WO2014117673A1 - 反射型纳米柱表面等离子体滤光器 - Google Patents

反射型纳米柱表面等离子体滤光器 Download PDF

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Publication number
WO2014117673A1
WO2014117673A1 PCT/CN2014/071245 CN2014071245W WO2014117673A1 WO 2014117673 A1 WO2014117673 A1 WO 2014117673A1 CN 2014071245 W CN2014071245 W CN 2014071245W WO 2014117673 A1 WO2014117673 A1 WO 2014117673A1
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nano
reflective
nanocolumn
nanorods
surface plasmon
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姜潇潇
司光远
吕江涛
王凤文
谷琼婵
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Northeastern University China
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Northeastern University China
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/26—Reflecting filters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals

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  • the present invention relates to the field of optical analysis and processing devices, and more particularly to a reflective nanocolumn surface plasma filter.
  • FIG. 1 The structure designed by Ebbesen et al. is shown in Fig. 1.
  • a white light source is used to illuminate a lower surface of a slit of 170 nm in a silver film of 300 nm thick, and is etched on both sides of the slit at one end of the upper surface. Grooves with different depths.
  • the grooves on both sides of the nano-slot can act as an antenna to collect the optical signal transmitted through the nano-slit, and the position of the transmitted signal peak is closely related to the period of the antenna groove. Therefore, by using the antenna grooves of different periods, the wavelength of light transmitted through the nano slit can be precisely controlled, thereby achieving the effect of splitting.
  • the second method is to use the one-dimensional metal-insulator-metal (MIM) layer stack structure to separate the broadband white light source proposed by L. Jay Guo's group in 2010, as shown in the figure. 2 is shown.
  • the one-dimensional periodic layer stack grating structure also has wavelength selectivity for white light sources, and the position of the peaks can be precisely controlled by the period of the modulation layer stack grating.
  • the deviation from the incident light source The direction of vibration has a strong selection requirement. Since the one-dimensional groove and the layer stack grating are both asymmetric structures, only when the direction of the incident light magnetic field is parallel to the groove or the grating (transverse-magnetic wave, the cylinder is TM), the spectroscopic effect is obtained. The splitting effect cannot be achieved for a transverse-electric wave (telecom-numbered TE) in which the direction of the incident optical field is parallel to the groove or grating. In real life, most of the light sources are unpolarized natural light (such as sunlight). Therefore, the polarization selectivity of linear structures greatly limits the range of application of such filter devices. In addition, since the polarization sensitivity causes a part of the light energy (about half of the total energy) to be transmitted through the filter but is reflected or absorbed, the transmission efficiency of the similar filter is low, which reduces the performance of the instrument.
  • the technical problem to be solved by the present invention is: how to provide a reflective nano-pillar surface plasmon filter capable of solving the polarization sensitivity problem of the filter device, improving the reflection spectroscopy effect and improving the performance and reflection efficiency of the filter, and
  • the structure is stable and the application range is wider.
  • the present invention provides a reflective nano-pillar surface plasmon filter, the filter comprising a village bottom and a nano-column, the nano-columns are uniformly distributed on the bottom surface of the village .
  • the nano-columns have a diameter of 300-500 nm
  • the nano-pillars have a height of 200-500 nm
  • the nano-pillars have a column spacing of 0-880 nm
  • the nano-pillars have a distribution period of nano-columns. The sum of the diameter and the spacing of the nanocolumns.
  • the material of the nanocolumn is: gold, silver or aluminum.
  • the material of the village bottom is quartz, silicon or gallium arsenide.
  • the wavelength of the formant is:
  • ⁇ is the angle of incidence of the incident light hitting the array of nanopillars
  • I is the polarization angle of the incident light
  • m, p are non-negative integers
  • the wavelength of the formant is:
  • the reflective nano-column surface plasmon filter of the invention effectively solves the polarization sensitivity problem of the filter device, has a sensitive reflection splitting effect and can maximize the filter performance and reflection efficiency, and the resolution
  • the high-performance and stable structure, long service life and wide application range can accurately reproduce various saved data.
  • Figure 1 is a filter in the prior art of the present invention
  • Figure 2 is a filter in the prior art of the present invention
  • FIG. 3 is a schematic structural view of a reflective nanocolumn surface plasmon filter according to an embodiment of the present invention
  • FIG. 4 is a schematic view showing a reflection spectrum spectroscopic mechanism of a reflective nanocolumn surface plasmon filter according to an embodiment of the present invention
  • FIG. 5 is a schematic diagram showing a linear relationship between a resonance wavelength of a reflective nano-pillar surface plasmon filter and an array period according to an embodiment of the present invention
  • FIG. 6 is a diagram showing a correspondence relationship between a period of a nano-column array of a reflective nano-pillar surface plasmon filter and a monochromatic light of different colors according to an embodiment of the present invention
  • FIG. 7 is a light splitting effect of a reflective nano-column surface plasmon filter nano-column array in a reflective mode according to an embodiment of the present invention, and a reflection spectrum corresponding to monochromatic light of different colors;
  • FIG. 8 is a comparison diagram of the surface field strength of the corresponding silver column array calculated by the finite time domain difference method of the reflective nanocolumn surface plasmon filter according to the embodiment of the present invention when resonance occurs and does not occur.
  • Embodiments of the present invention provide a reflective nano-pillar surface plasmon filter as shown in FIG.
  • the filter includes a substrate and a nano-column, and the nano-columns are uniformly distributed on the bottom surface of the village.
  • the nanocolumn has a diameter of 300-500 nm
  • the nanocolumn has a height of 200-500 nm
  • the nanocolumn has a column spacing of 0-880 nm
  • the nanocolumn has a distribution period of nanocolumn diameter and nanometer.
  • the material of the nanocolumn is: gold, silver or aluminum.
  • the material of the village bottom is quartz, silicon or gallium arsenide.
  • the embodiment of the present invention is based on the nano-pillar structure, and the theoretical simulation and calculation are performed by the finite time domain difference method. Subsequently, the performance of the fabricated device is tested and analyzed. Cylindrical Filter Operation In the reflective state, when a white light source is incident on the device surface from above the nanocolumn, the splitting is achieved on the same side of the device, and the reflected signal can also be collected and analyzed.
  • the nanocolumns used in the embodiments of the present invention have a diameter of 150 nm to 500 nm, and can be split in a size range of 1 ⁇ m or less.
  • the adjustment range can cover not only the entire visible light band, but also the near-infrared portion.
  • the resonance peaks in the reflection spectrum can achieve continuous precision dynamic modulation, and the modulation range can be achieved from the range of red to 600 nm to the near infrared range.
  • the position of the surface plasmon resonance peak is closely related to the array period, the position of the resonance peak can be precisely controlled and the filtering effect can be achieved by changing the period of the array.
  • the wavelength of the formant and the period of growth of the nanopillar array are linear.
  • the wavelength at which resonance occurs can be formulated as:
  • ⁇ ⁇ ⁇ + q
  • the period of the nano-pillar array is further reduced to below 400 nm, so that a white light source of 4 bar broadband is divided into monochromatic lights of different colors.
  • monochromatic light of different colors can be clearly separated from a bundle of broadband white light sources.
  • the period of the nanopillar arrays listed in Figure 6 were measured by scanning electron micrographs using high magnification.
  • the arrays of periods 540, 485, 430, 375, and 320 nm are used, the five basic colors of red, yellow, green, cyan, and blue are separated from the broadband white light source.
  • Fig. 7 shows the spectroscopic effect of the experimentally measured nanocolumn array in the reflection mode, and the reflection spectrum corresponding to the monochromatic light of different colors.
  • the energy is mainly concentrated in the cavity between the nanopillars. It can also be seen from Fig. 8 that when the resonance occurs (the left column), the maximum field strength is effectively increased by about 50 times and 300 times, respectively, when resonance does not occur (right column).
  • the energy of the light can be limited to the area between the nanocolumns, that is, the loss of the prepared filter is small. , has a relatively high reflection efficiency.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
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  • Biophysics (AREA)
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Abstract

公开了一种反射型纳米柱表面等离子体滤光器，包括衬底和纳米柱，纳米柱均匀分布在衬底表面。纳米柱的直径为300-500纳米，纳米柱的高度为200-500纳米，纳米柱的柱间距为0-880纳米，纳米柱的分布周期为纳米柱直径与纳米柱柱间距之和。其可以有效解决滤光器的偏振敏感性问题，具有灵敏的反射分光效果并且可以最大幅度提高滤光器的性能和反射效率，且分辨率高、性能结构稳定可靠、使用寿命长、应用范围广，能准确再现各种所保存的数据。

Description

反射型纳米柱表面等离子体滤光器 技术领域
本发明涉及光分析和处理器件领域，特别涉及一种反射型纳米柱表面等 离子体滤光器。
背景技术
自 1998年法国科学家 Ebbesen等人首次发现光在金属亚波长结构中的 异常传输现象 ( extraordinary optical transmission, 筒 i己为 EOT ) 、来, 有关 表面等离子体的相关研究已经取得了广泛的关注和长足的发展。运用表面等 离子体原理所制备的器件具有分辨率高、 易调制、 性能卓越等优点， 并且已 经在光电、 新能源 (太阳能电池)、 数据存储、 显微成像等领域取得了广泛的 应用。 目前， 已存在的表面等离子体型滤光器均为透射型滤光器， 即只能在 透射状态下实现分光的效果。 主要包括两种滤光方法： 第一种， 由 Ebbesen 课题组于 2008年提出运用周期结构的线性凹槽光栅对宽带 （broadband ) 的 白光源进行滤光的方法。 Ebbesen等人设计的结构如图 1所示， 用一束白光 源照射到一个位于 300纳米厚的银膜中宽度为 170纳米的缝隙的下表面，在 上表面一端此缝隙的两侧分别刻蚀出深度不同的凹槽。 纳米缝隙两侧的凹槽 可以起到天线的作用， 收集透射过纳米缝隙的光信号， 而且透射过来的信号 波峰的位置与天线凹槽的周期大小紧密相关。 因此， 通过使用不同周期的天 线凹槽， 可以精确控制透射过纳米缝隙的光波长， 进而达到分光的效果。 第 二种方法是由 L. Jay Guo课题组于 2010年提出的运用一维金属 -绝缘体 - 金属 （metal - insulator - metal, 筒记为 MIM )层堆结构对宽带的白光源进 行分光， 如图 2所示。 一维的周期层堆光栅结构对于白光源也具有波长选择 性， 并且波峰的位置可以通过调制层堆光栅的周期进行精密的控制。
不论是一维的凹槽天线结构还是层堆线性光栅结构，都对入射光源的偏 振方向具有很强的选择要求。 因为一维的凹槽和层堆光栅本身都是非对称的 结构， 所以只有当入射光磁场方向平行于凹槽或光栅 (横磁波， transverse-magnetic wave, 筒记为 TM )才具有分光效果， 而对于入射光电场 方向平行于凹槽或光栅的横电波（ transverse-electric wave, 筒记为 TE )则无 法实现分光效果。 而在现实生活中， 大部分光源都是非偏振的自然光（如太 阳光）。 因此， 线性结构的偏振选择性大大限制了此类滤光器件的适用范围。 此外， 由于偏振敏感性会造成一部分光能量（约为总能量的一半）无法透过 滤光器而是被反射或吸收， 使得类似滤光器的透射效率很低， 降低了仪器的 使用性能。
发明内容
(一）要解决的技术问题
本发明要解决的技术问题是： 如何提供一种反射型纳米柱表面等离子体 滤光器能够解决滤光器件的偏振敏感性问题，提高反射分光效果并提高滤光 器的性能和反射效率， 并且结构稳定， 应用范围更广。
(二）技术方案
为解决上述技术问题， 本发明提供了一种反射型纳米柱表面等离子体滤 光器， 所述滤光器包括村底和纳米柱， 所述纳米柱均勾对称的分布在所述村 底表面。
优选的， 所述纳米柱的直径为 300-500 纳米， 所述纳米柱的高度为 200-500纳米， 所述纳米柱的柱间距为 0-880纳米， 所述纳米柱的分布周期 为纳米柱直径与纳米柱柱间距之和。
优选的， 所述纳米柱的材质为： 金、 银或铝。
优选的， 所述村底的材质为石英、 硅或砷化镓。
优选的， 共振峰的波长为：
K
Figure imgf000004_0001
其中"为纳米柱阵列的周期， Θ为入射光打到纳米柱阵列上的入射角度， 是入射光的偏振角度， 而 m、 p、 均为非负整数
优选的， 在正入射情况下 （6» = 0 )共振峰的波长为：
Figure imgf000005_0001
(三）有益效果
采用本发明的反射型纳米柱表面等离子体滤光器有效地解决了滤光器 件的偏振敏感性问题，具有灵敏的反射分光效果并且可以最大幅度提高滤光 器的性能和反射效率， 且分辨率高、 性能结构稳定可靠、 使用寿命长、 应用 范围广， 能准确再现各种所保存的数据。
附图说明
图 1是本发明现有技术中的一种滤光器；
图 2是本发明现有技术中的一种滤光器；
图 3是本发明实施例反射型纳米柱表面等离子体滤光器的结构示意图； 图 4是本发明实施例反射型纳米柱表面等离子体滤光器的反射光谱分光 机理示意图；
图 5是本发明实施例反射型纳米柱表面等离子体滤光器共振波长与阵列 周期呈现线性关系示意图；
图 6是本发明实施例反射型纳米柱表面等离子体滤光器纳米柱阵列周期 与不同颜色的单色光的对应关系图；
图 7是本发明实施例反射型纳米柱表面等离子体滤光器纳米柱阵列在反 射模式下的分光效果， 和不同颜色的单色光所对应的反射光谱；
图 8是本发明实施例反射型纳米柱表面等离子体滤光器有限时域差分法 计算得到的相应银柱阵列在共振发生和未发生时表面场强的对比图。
具体实施方式
下面结合附图和实施例， 对本发明的具体实施方式作进一步详细描述。 以下实施例用于说明本发明， 但不用来限制本发明的范围。
本发明实施例提供了一种反射型纳米柱表面等离子体滤光器如图 3 所 示， 所述滤光器包括村底和纳米柱， 所述纳米柱均勾对称的分布在所述村底 表面。 所述纳米柱的直径为 300-500纳米， 所述纳米柱的高度为 200-500纳 米， 所述纳米柱的柱间距为 0-880纳米， 所述纳米柱的分布周期为纳米柱直 径与纳米柱柱间 巨之和。
优选的， 所述纳米柱的材质为： 金、 银或铝。
优选的， 所述村底的材质为石英、 硅或砷化镓。
本发明实施例以纳米柱结构为基础， 采用有限时域差分法进行理论上的 模拟和计算， 随后， 对制成的器件进行性能测试和分析。 圓柱形滤光器工作 在反射状态下， 当一束白光源从纳米柱上方入射到器件表面时， 在器件的同 侧实现分光， 同时也可对反射回来的信号进行采集与分析。 本发明实施例中 所采用的纳米柱的直径为 150纳米至 5 00纳米， 可在 1微米以下的尺寸范围 内实现分光。
图 4为使用有限时域差分法理论模拟计算得到的本发明实施例滤光器利 用纳米柱阵列的反射光谱的工作原理， 其工作原理为： 通过使用不同周期的 纳米柱阵列来实现调节局域型表面等离子共振并最终在反射状态下达到滤 波的效果。 使用类似的纳米柱结构， 其调节范围不但可以涵盖整个可见光波 段， 还可以覆盖到近红外部分区域。 当改变纳米柱的周期时， 反射谱中的共 振峰可以实现连续的精密动态调制， 并且调制的范围可以实现从 600纳米左 右到 1 000纳米的红光范围和近红外波段范围。
对于反射型纳米柱表面等离子体滤光器， 由于表面等离子体共振峰的位 置和阵列周期息息相关， 因此可以通过改变阵列的周期的方法精确控制共振 峰的位置并达到滤光的效果。 如图 5所示， 共振峰的波长和纳米柱阵列的周 期增长符合线性关系。对于纳米柱阵列而言，发生共振时的波长可以用公式：
MPQ
Figure imgf000006_0001
来表示， 其中 β表示纳米柱阵列的周期， »是入射光打到纳米柱阵列上的入 射角度， Φ 是入射光的偏振角度， 而 m、 p、 均为整数。 对于正入射的情 况（即 » = 0时）， 公式（ 1 )可筒化为： λ^ = ^Ρ + q (2) 对于本项目中所关心的可见光波段， 最为重要的两个共振波长是 " '
― m 和 - m (3) 即对应 = 1， q = 0 (或 ？ = 0， q = \) 和 ？ = = 1的两种情况， 折射 率计算数值刚好与空气和所采用的石英基底的折射率大小匹配，从而达到了 共振模式。
为了进一步在整个可见光波段实现滤波效果，将纳米柱阵列的周期进一 步减小到 400纳米以下， 从而实现 4巴一束宽带 （broadband ) 的白光源分成 不同颜色的单色光。 当使用图 6中的结构参数时， 不同颜色的单色光就可以 被清晰地从一束宽带白光源中分离开来。 图 6中所列出的纳米柱阵列的周期 均通过使用高放大倍数的扫描电子显微镜图测量得到。 当使用周期分别为 540、 485、 430、 375、 320纳米的阵列时， 使得红、 黄、 绿、 青、 蓝这五种 基本颜色从宽带的白光源中被分离出来。 如图 7所示， 图 7展示了实验测得 的纳米柱阵列在反射模式下的分光效果， 和不同颜色的单色光所对应的反射 光谱。
与单个纳米柱的共振状态不同， 对于纳米柱阵列而言， 共振发生时更多 的能量则是聚集在纳米柱之间的缝隙里。这是因为在这些纳米柱之间的腔体 里， 能量更容易被限制和保存， 通过对阵列参数的有效控制， 可以有效减少 能量向基底方向和顶部空气方向的消散损耗，使得大部分能量集中在纳米柱 之间的共振腔中。 如图 8所示， 对于间距为 50和 20纳米的阵列而言， 当共 振发生时近场场强相较于共振未发生时都会有大幅度的增加， 而且纳米柱间 距越小， 能量的增强越明显。 但是， 不论间距大小， 能量都是主要集中于纳 米柱之间的腔体里。 从图 8中还可以看出， 当共振发生时（左列）场强最大 值比共振未发生时（右列 )可有效增大分别约 50倍和 300倍。 另外， 不论 从俯视图 （上排）还是截面图 （下排）都可以看出， 光的能量可以被 ^艮好的 限制在纳米柱之间的区域中， 也就是说所制备的滤光器的损耗很小， 具有相 对较高的反射效率。
以上实施方式仅用于说明本发明， 而并非对本发明的限制， 有关技术领 域的普通技术人员， 在不脱离本发明的精神和范围的情况下， 还可以做出各 种变化和变型， 因此所有等同的技术方案也属于本发明的范畴， 本发明的专 利保护范围应由权利要求限定。

Claims

权利要求
1、 一种反射型纳米柱表面等离子体滤光器， 其特征在于， 所述滤光器 包括村底和纳米柱， 所述纳米柱均匀对称的分布在所述村底表面。
2、 权利要求 1所述的反射型纳米柱表面等离子体滤光器， 其特征在于， 所述纳米柱的直径为 300-500纳米， 所述纳米柱的高度为 200- 500纳米， 所述 纳米柱的柱间距为 0-880纳米， 所述纳米柱的分布周期为纳米柱直径与纳米 柱柱间距之和。
3、 权利要求 2所述的反射型纳米柱表面等离子体滤光器， 其特征在于， 所述纳米柱的材质为： 金、 银或铝。
4、 权利要求 2所述的反射型纳米柱表面等离子体滤光器， 其特征在于， 所述村底的材质为石英、 硅或砷化镓。
5、 权利要求 2所述的反射型纳米柱表面等离子体滤光器， 其特征在于， 发生表面等离子体共振的波峰的波长为：
Figure imgf000009_0001
其中"为纳米柱阵列的周期， Θ为入射光打到纳米柱阵列上的入射角度, Φ 是入射光的偏振角度， 而 、 p、 均为非负整数。
6、 权利要求 5所述的反射型纳米柱表面等离子体滤光器， 其特征在于, 在正入射情况下 （6» = 0 )共振峰的波长为：
Figure imgf000009_0002
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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008082569A1 (en) * 2006-12-29 2008-07-10 Nanolambda, Inc. Wavelength selective metallic embossing nanostructure
CN102346269A (zh) * 2011-11-09 2012-02-08 苏州大学 一种反射式彩色滤光片
US20120140305A1 (en) * 2009-08-28 2012-06-07 Sharp Kabushiki Kaisha Reflection type display device
CN102789021A (zh) * 2012-08-31 2012-11-21 苏州大学 一种反射式彩色滤光片
CN103149616A (zh) * 2013-01-31 2013-06-12 东北大学秦皇岛分校 反射型纳米柱表面等离子体滤光器
CN103454710A (zh) * 2013-09-02 2013-12-18 东北大学 一种纳米滤光方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008082569A1 (en) * 2006-12-29 2008-07-10 Nanolambda, Inc. Wavelength selective metallic embossing nanostructure
US20120140305A1 (en) * 2009-08-28 2012-06-07 Sharp Kabushiki Kaisha Reflection type display device
CN102346269A (zh) * 2011-11-09 2012-02-08 苏州大学 一种反射式彩色滤光片
CN102789021A (zh) * 2012-08-31 2012-11-21 苏州大学 一种反射式彩色滤光片
CN103149616A (zh) * 2013-01-31 2013-06-12 东北大学秦皇岛分校 反射型纳米柱表面等离子体滤光器
CN103454710A (zh) * 2013-09-02 2013-12-18 东北大学 一种纳米滤光方法

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* Cited by examiner, † Cited by third party
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