WO2014094695A4 - Method of generating plasma at atmospheric pressure in a slot jet and device for performance the method - Google Patents
Method of generating plasma at atmospheric pressure in a slot jet and device for performance the method Download PDFInfo
- Publication number
- WO2014094695A4 WO2014094695A4 PCT/CZ2013/000167 CZ2013000167W WO2014094695A4 WO 2014094695 A4 WO2014094695 A4 WO 2014094695A4 CZ 2013000167 W CZ2013000167 W CZ 2013000167W WO 2014094695 A4 WO2014094695 A4 WO 2014094695A4
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- slot
- working gas
- stream
- plasma
- frequency
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2418—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the electrodes being embedded in the dielectric
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2240/00—Testing
- H05H2240/10—Testing at atmospheric pressure
Abstract
The invention relates to a method of generating plasma at atmospheric pressure in a slot jet, in which a stream of working gas flowing through the slot jet is acted upon by an electromagnetic field. In the slot jet a high-frequency electromagnetic field created and formed by at least one high-voltage electrode (7) dielectrically separated from the cavity of the slot (3) and by at least one grounded electrode (8) acts upon the flowing atomic working gas, by which means high-pressure high-frequency plasma is created at a high or low electric potential, by which as a feedback loop the original high-frequency electromagnetic field changes and the high-pressure high-frequency plasma is statistically distributed along the entire length of the slot (3) and is blown out of the entire length of the slot (3) by the stream of the atomic working gas. The invention also relates to a device for generating plasma at atmospheric pressure comprising at least one hollow body (1) provided with at least one inlet (2) of working gas and further provided with at least one slot (3) which forms the outlet orifice of the plasma, at least one electrode being aligned with the hollow body (1). The slot (3) is formed by a gap between a pair of dielectric plates (9), whereby aligned with the slot (3) is at least one high- voltage high-frequency electrode (7), separated from the cavity of the slot (3) by the dialectric plate (9), and at least one grounded electrode (8).
Claims
1. A method of generating plasma at atmospheric pressure in a slot nozzle, in which a stream of of working gas flowing through the slot nozzle is acted upon by an high-frequency electromagnetic field created and formed by at least one high-voltage electrode (7) dielectrically separated from the cavity of the slot (3) and by at least one grounded electrode (8) acts upon the flowing atomic working gas, characterized in that high-frequency electromagnetic field is created as at least one longitudinal electromagnetic field in direction of flowing of atomic working gas, by which is created high-pressure high-frequency plasma is created at a high or low electric potential with feedback loop to changes of primary high-frequency electromagnetic field , while the high- pressure high-frequency plasma spreads itself along the entire length of the slot (3) and is blown out of the entire length of the slot (3) by a stream of atomic working gas.
2. A method according to Claim 1 , characterized in that inside and/or outside the slot nozzle at least one auxiliary material is introduced into the stream of the high-pressure high-frequency plasma.
3. A method according to Claim 2, characterized in that the auxiliary material is introduced together with the atomic working gas into the slot nozzle in which high-pressure high-frequency plasma is generated.
4. A method according to Claim 2, characterized in that the auxiliary material is introduced by a deliberate erosion of the material surrounded by the created stream of high-pressure high-frequency plasma.
5. A method according to Claim 2, characterized in that the auxiliary material is introduced into a separate slot nozzle parallel to the slot nozzle in which high-pressure high-frequency plasma is generated.
6. A method according to Claim 2, characterized in that the auxiliary material is introduced into the outer space in front of the slot (3) of the slot nozzle.
28
7. A method according to Claim 1 , characterized in that in the slot nozzle the flowing atomic working gas is divided into at least two streams, whereby at least one of them is acted upon by the high-frequency electromagnetic field, by which means this separated stream of atomic working gas is converted into high-pressure high-frequency plasma, which is blown out of the slot (3) by the stream of atomic working gas.
8. A method according to Claim 1 , characterized in that the high- frequency electromagnetic field is applied along the entire length of the slot (3) or it is only applied on part of the length (P) of the slot (3) and at least one other high-frequency electromagnetic field is aligned with the remaining part of the length (P) of the slot (3).
9. A method according to Claim 1 , characterized in that the high- frequency electromagnetic field is only applied on parts of the length (P) of the slot (3), while the remaining part of the length (P) of the slot (3) is without another high-frequency electromagnetic field.
10. A method according to Claim 1 , characterized in that the high- frequency electromagnetic field has in a direction of the length (P) of the slot (3) a constant or varying intensity.
11. A method according to Claim 1 , characterized in that the working gas is in a direction of its stream flow through the slot (3) is acted upon by one high-frequency electromagnetic field or successively by at least two high- frequency electromagnetic fields.
12. A method according to Claim 1 , characterized in that in different sections of the slot (3) the working gas is acted upon by a different high- frequency electromagnetic field.
13. A method according to Claim 1 , characterized in that the created stream of high-pressure high-frequency plasma is curved in a direction of its movement.
14. A method according to Claim 1 , characterized in that the working gas in the slot nozzle is acted upon by one high-frequency electromagnetic
29 field, as well as by at least one direct current electromagnetic field by means of direct voltage (bias voltage).
15. A device for generating plasma at atmospheric pressure comprising at least one hollow body (1) provided with at least one inlet (2) of the working gas and further provided with at least one slot (3) formed by a gap between a pair of dielectric plates (9) and which forms the outlet orifice of the plasma, while to the slot (3) there is aligned at least one high-voltage high-frequency electrode (7) and at least one grounded electrode (8), characterized in that the grounded electrode (8) is placed in direction of flowing of working gas behind the high-voltage high-frequency electrode (7), which is separated from the cavity of the slot (3) by a dialectric plate (9).
16. A device according to Claim 15, characterized in that the slot (3) is in a direction of its length either planar or three-dimensional.
17. A device according to Claim 15, characterized in that the slot (3) is in a direction of the working gas stream flow either planar or three-dimensional.
18. A device according to Claim 15, characterized in that the HVHF electrode (7) and/or the grounded electrode (8) imitates the oblong shape of the slot (3) or it has in a direction of the length of the slot (3) a varying distance from the slot (3), whereby it is situated along the entire length of the slot (3) or on a part of the length of the slot (3).
19. A device according to Claim 15, characterized in that the HVHF electrode (7) is physically separated from the slot (3).
20. A device according to Claim 15, characterized in that arranged in . the slot (3) is at least one dividing partition of the working gas stream.
21. A device according to Claim 15, characterized in that at least one parallel slot (3) is aligned with the slot (3) formed by a gap between a pair of dielectric plates (9), whereby aligned with the slots (3) is at least one separate or common HVHF electrode (7) and at least one separate or common grounded electrode (8), both slots (3) having one common hollow body (1) and one common inlet (2) of the working gas.
30
22. A device according to Claim 15, characterized in that aligned with the slot (3) formed by a gap between a pair of dielectric plates (9) is at least one parallel slot (3) with a separate hollow body (1) and at least one separate inlet (2) of the working gas, whereby aligned with the slots (3) is at least one separate or common HVHF electrode (7) and at least one separate or common grounded electrode (8).
23. A device according to Claims 21 or 22, characterized in that at least two of the slots (3) are arranged next to each other and/or behind each other.
24. A device according to Claim 15, characterized in that aligned with the slot (3) is a source of the auxiliary material into the generated planar stream of the high-pressure plasma.
25. A device according to Claim 24, characterized in that the source of the auxiliary material into the generated stream of the high-pressure plasma is created by at least one device with an oblong slot for dosing the auxiliary material.
26. A device according to Claim 24, characterized in that the source of the auxiliary material into the generated stream of high-pressure plasma is composed of a body arranged in the path of the generated stream of high- pressure plasma.
27. A device according to Claim 26, characterized in that the body arranged in the path of the generated stream of high-pressure plasma is at least one grounded electrode (8).
28. A device according to Claim 24, characterized in that the source of the auxiliary material into the generated stream of high-pressure plasma is composed of the source of the auxiliary material fed into the stream of working gas before it enters the slot (3)
29. A device according to any of Claims 15 to 24, characterized in that aligned with the slot (3) is at least one auxiliary electrode connected to the source of direct voltage.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CZPV2012-935 | 2012-12-19 | ||
| CZ2012-935A CZ2012935A3 (en) | 2012-12-19 | 2012-12-19 | Method of generating plasma under atmospheric pressure in slot nozzle and apparatus for making the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO2014094695A1 WO2014094695A1 (en) | 2014-06-26 |
| WO2014094695A4 true WO2014094695A4 (en) | 2014-09-18 |
Family
ID=50033296
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/CZ2013/000167 WO2014094695A1 (en) | 2012-12-19 | 2013-12-16 | Method of generating plasma at atmospheric pressure in a slot jet and device for performance the method |
Country Status (2)
| Country | Link |
|---|---|
| CZ (1) | CZ2012935A3 (en) |
| WO (1) | WO2014094695A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111145623B (en) * | 2019-12-31 | 2021-12-10 | 河海大学常州校区 | Device and method for experimental research on positive and negative corona and substance action of different parameters |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CZ147698A3 (en) | 1998-05-12 | 2000-03-15 | Přírodovědecká Fakulta Masarykovy Univerzity | Method of making physically and chemically active medium by making use of plasma nozzle and the plasma nozzle per se |
| US6424091B1 (en) * | 1998-10-26 | 2002-07-23 | Matsushita Electric Works, Ltd. | Plasma treatment apparatus and plasma treatment method performed by use of the same apparatus |
| DE29911974U1 (en) * | 1999-07-09 | 2000-11-23 | Agrodyn Hochspannungstechnik G | Plasma nozzle |
| US7651585B2 (en) * | 2005-09-26 | 2010-01-26 | Lam Research Corporation | Apparatus for the removal of an edge polymer from a substrate and methods therefor |
| JP2007305309A (en) * | 2006-05-08 | 2007-11-22 | Matsushita Electric Ind Co Ltd | Method and apparatus for generating atmospheric-pressure plasma |
-
2012
- 2012-12-19 CZ CZ2012-935A patent/CZ2012935A3/en unknown
-
2013
- 2013-12-16 WO PCT/CZ2013/000167 patent/WO2014094695A1/en active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| WO2014094695A1 (en) | 2014-06-26 |
| CZ2012935A3 (en) | 2014-07-02 |
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