WO2014092059A1 - Sensor element and composite sensor - Google Patents

Abstract

On the detection base section (220E1) side of a movable-side detection base section (240D1), a plurality of protruding sections (241D1) are formed by being aligned with each other in the longitudinal direction. On the detection base section (220F1) side of the detection base section (240D1), a plurality of protruding sections (242D1) are formed by being aligned with each other in the longitudinal direction. On the detection base section (240D1) side of a fixed-side detection base section (220E1), a plurality of protruding sections (221F1) are formed by being aligned with each other such that the protruding sections partially face the protruding sections (242D1). On the detection base section (240D1) side of a fixed-side detection base section (220F1), a plurality of protruding sections(221F1) are formed by being aligned with each other such that the protruding sections partially face the protruding sections (241D1). On an end section of the detection base section (240D1), said end section being on the inner frame (101A) side, a capacitance forming section (243D1) is formed.

Description

Sensor element and composite sensor

The present invention relates to a sensor element that detects angular velocity and acceleration, and a composite sensor including the sensor element.

Conventionally, various composite sensors for detecting the angular velocity and acceleration applied to the element have been devised. For example, the sensor element of the composite sensor described in Patent Document 1 includes a mass portion supported by a support beam so as to have a gap with respect to the substrate. The mass portion is supported so as to be displaceable in two axial directions (for example, the X-axis direction and the Y-axis direction) that are parallel to the substrate surface and orthogonal to each other.

This composite sensor detects the angular velocity in a state where the mass part is vibrated in the X-axis direction. In this state, when an angular velocity around the Z axis orthogonal to the X axis and the Y axis acts on the mass portion, a Coriolis force in the Y axis direction is generated. By detecting the Coriolis force electrically, the angular velocity around the Z axis is detected.

Furthermore, this composite sensor includes an acceleration detection unit that detects an acceleration in the Y-axis direction using an electric signal in a region different from the mass unit that detects the angular velocity.

FIG. 22 is an enlarged plan view of a part of the acceleration detection unit of the conventional composite sensor. FIG. 22A shows a case where the displacement Δx of the movable part in the X-axis direction due to vibration is zero. FIG. 22B shows a case where the displacement Δx of the movable part in the X-axis direction due to vibration is + x1.

As shown in FIG. 22, in the acceleration detector, the movable-side acceleration detector detection base 240P1 is disposed between the fixed-side acceleration detector detection bases 220P1 and 220P2 arranged along the Y-axis direction. Has been. The detection bases 240P1, 220P1, and 220P2 have a long shape extending in the X-axis direction. A protrusion 241P1 protruding in the Y-axis direction is formed on the side surface of the movable detection base 240P1 on the fixed detection base 220P1 side. A protrusion 242P1 protruding in the Y-axis direction is formed on the side of the movable detection base 240P1 on the fixed detection base 220P2 side. The protrusion 241P1 and the protrusion 242P1 have a shape with a length of 2W along the X axis. The positions of the protrusion 241P1 and the protrusion 242P1 along the X-axis direction are shifted by W.

A protrusion 221P1 is formed on the side of the movable detection base 240P1 side of the fixed detection base 220P1. The protruding portion 221P1 has a shape with a length of 2W along the X axis. The position of the protrusion 221P1 in the X-axis direction is the same as the position of the protrusion 242P1. The fixed-side protrusion 221P1 and the movable-side protrusion 241P1 face each other with a length of W in the X-axis direction. The fixed-side protrusion 221P2 and the movable-side protrusion 241P1 face each other at an interval of D12 in the Y-axis direction.

A protrusion 221P2 is formed on the movable detection base 240P1 side of the fixed detection base 220P2. The protrusion 221P2 has a shape with a length of 2W along the X axis. The position of the protrusion 221P2 in the X-axis direction is the same as the position of the protrusion 241P1. The fixed-side protrusion 221P2 and the movable-side protrusion 242P1 face each other with a length of W in the X-axis direction. The fixed-side protrusion 221P1 and the movable-side protrusion 242P1 face each other at an interval of D12 in the Y-axis direction.

The acceleration detecting unit includes a capacitance C1P1 determined by a facing area S1P1 (dependent on W) and a facing distance D12 between the fixed-side protrusion 221P1 and the movable-side protrusion 241P1, and the fixed-side protrusion 221P2 and the movable side. The acceleration is detected from the change of the capacitance C2P1 determined by the facing area S2P1 (depending on W) and the facing distance D12 with respect to the protrusion 242P1.

When acceleration in the positive direction of the Y-axis is applied to the sensor element, the movable-side detection base 240P1 moves away from the fixed-side detection base 220P1 and close to the fixed-side detection base 220P2. To do.

Therefore, the facing distance D12 between the protrusion 221P1 on the fixed side and the protrusion 241P1 on the movable side increases, and the capacitance C1P1 decreases. The facing distance D12 between the fixed-side protrusion 221P2 and the movable-side protrusion 242P1 decreases, and the capacitance C2P1 increases. At this time, the capacitances C1P1 and C2P1 are determined by the reciprocal of the facing interval. As a result, the combined capacitance of the capacitance C1P1 and the capacitance C2P1 decreases according to the reciprocal of the opposing distance change, and the acceleration can be detected from this decrease amount.

By the way, in this composite sensor, the movable-side detection base 240P1 and the protrusions 241P1 and 242P1 vibrate in the X-axis direction in order to detect the angular velocity described above. Therefore, the facing area between the movable-side protrusion 241P1 and the fixed-side protrusion 221P1 changes, and the facing area between the movable-side protrusion 242P1 and the fixed-side protrusion 221P2 also changes. For example, as shown in FIG. 21B, when moving in the positive direction of the X-axis, the facing area S1P2 between the movable protrusion 241P1 and the fixed protrusion 221P1 increases as W ′ increases. (Opposing area S1P2> S1P1). The facing area S2P2 between the movable protrusion 242P1 and the fixed protrusion 221P2 decreases as W ″ decreases (facing area S2P2 <S2P1). At this time, the facing distance D12 does not change. , The capacitance C1P2 after the movement becomes larger than the capacitance C1P1 before the movement, and the capacitance C2P2 after the movement becomes smaller than the capacitance C2P1 before the movement.

Here, the amount by which the movable-side protrusion 241P1, the fixed-side protrusion 221P1, and the facing area S1P1 are increased to the facing area S1P2, and the movable-side protruding part 242P1, the fixed-side protruding part 221P2, and the facing area S2P1 are facing areas. The amount reduced to S2P2 is the same. Therefore, the amount of change in capacitance between the movable-side protrusion 241P1 and the fixed-side protrusion 221P1 and the amount of change in capacitance between the movable-side protrusion 242P1 and the fixed-side protrusion 221P2 are offset. To do. Therefore, the combined capacitance of the capacitances C1P2 and C2P2 is the same as the combined capacitance of the capacitances C1P1 and C2P1.

In this way, in the conventional composite sensor, the opposing shape of the protrusion of the movable part and the fixed part is as described above, so that the X-axis direction vibration for detecting the angular velocity has an influence on the acceleration detection capacitance. It does not occur.

JP 2010-85313 A

However, in the conventional composite sensor described above, the acceleration detection accuracy may decrease in the following state.

FIG. 23 is an enlarged plan view of a part of the acceleration detection unit for explaining the problem of the conventional composite sensor. FIG. 24 is a waveform diagram for explaining the problem of the conventional composite sensor. FIG. 24A shows the capacitance C1P between the movable projection 241P1 and the fixed projection 221P1, and FIG. 24B shows the capacitance between the movable projection 242P1 and the fixed projection 221P2. C2P is shown. FIG. 24C shows a combined capacitance of the capacitances C1P and C2P.

In the conventional composite sensor, as shown in FIG. 23, the displacement in the X-axis direction becomes large, and the following problem occurs when the movable-side protrusion 242P1 and the fixed-side protrusion 221P2 do not face each other. In this case, the capacitance generated between the movable side and the fixed side is only the capacitance C1P3 due to the length Wex (opposing area S1P3) between the movable side protrusion 241P1 and the fixed side protrusion 221P1.

Here, the opposing length Wex is smaller than the length 2W at which the movable-side protrusion 241P1 and the fixed-side protrusion 221P1 are opposed to each other longest. Therefore, the capacitance C1P3 is smaller than the capacitance C1Pm when the movable side protrusion 241P1 and the fixed side protrusion 221P1 face each other with a length of 2W. In this case, no capacitance is generated between the movable protrusion 242P1 and the fixed protrusion 221P2. Therefore, the combined capacitance generated between the movable portion and the fixed portion is more rapidly reduced than the change due to the displacement of the combined capacitance when the movable portion is opposed to the fixed portion at both ends in the Y-axis direction. The linearity is broken.

In this state, the capacitance C has a primary component that changes at the same fundamental frequency as the vibration frequency and a secondary component that changes at twice the vibration frequency. Note that even higher-order components of the second order or higher are also generated, but are not considered here because they are sufficiently smaller than the secondary components. This is because the vibration in the above state has the minimum capacitance when the displacement is maximum (Δx = + xmax, −xmax) and the maximum capacitance when the displacement is 0 (Δx = 0). .

As shown in FIG. 24, since the primary component of the capacitance C1P and the primary component of the capacitance C2P are in opposite phases as described above, the primary combined capacitance (C1P + C2P) cancels out the primary components C1P and C2P. 0. However, since the secondary component of the capacitance C1P and the secondary component of the capacitance C2P are in phase, the secondary combined capacitance (C1P + C2P) is doubled by adding the secondary components C1P and C2P together. Such a secondary component becomes noise when measuring acceleration, and deteriorates the detection performance of acceleration.

In view of such problems, the present invention provides a sensor that can detect acceleration with high accuracy even when the angular velocity detection unit and the acceleration detection unit are formed using a single movable unit. It is to provide an element and a composite sensor.

The present invention includes a substrate, a fixed portion fixed to one surface of the substrate, a movable portion that is supported by the substrate in a state capable of vibrating in a first direction parallel to the one surface of the substrate, and faces the fixed portion, And has the following characteristics.

The movable part includes a movable side detection base, a movable first protrusion, and a movable second protrusion. The movable side detection base portion extends along the first direction, and has a first surface and a second surface on both sides of the second direction parallel to one surface of the substrate and orthogonal to the first direction. The movable first protrusion protrudes in one direction in the second direction from the first surface of the movable detection base. The movable second protrusion protrudes in the other direction of the second direction from the second surface of the movable detection base.

The fixed portion has a first fixed side detection base, a second fixed side detection base, a fixed side first protrusion, and a fixed side second protrusion. The first fixed side detection base and the second fixed side detection base are respectively disposed on both sides of the movable side detection base in the second direction, and extend along the first direction. The fixed first protrusion protrudes from the first fixed detection base to the movable first protrusion side. The fixed-side second protrusion protrudes from the second fixed-side detection base toward the movable-side second protrusion.

The sensor element includes a first capacitance between the movable first projection and the fixed first projection, and a second capacitance between the movable second projection and the fixed second projection. An acceleration detection signal is output from the change in the combined electrostatic capacity.

A third capacitance between the movable portion and the fixed portion is generated at an end portion in the first direction of any of the movable side detection base, the first fixed side detection base, and the second fixed side detection base. A capacitance forming portion is disposed.

In this configuration, the vibration becomes a predetermined value or more, and the movable side first protrusion and the fixed side first protrusion do not face each other, or the movable side second protrusion and the fixed side second protrusion face each other. If the combined capacitance of the first capacitance and the second capacitance decreases and the third capacitance increases. As a result, the decrease in the combined capacitance of the first capacitance and the second capacitance can be compensated by the increase in the third capacitance. Therefore, it is possible to substantially eliminate the change in capacitance due to vibration.

Further, the sensor element of the present invention preferably has the following configuration. The movable part includes a movable side detection base, a movable first protrusion, and a movable second protrusion. The movable side detection base portion extends along the first direction, and has a first surface and a second surface on both sides of the second direction parallel to one surface of the substrate and orthogonal to the first direction. The movable first protrusion protrudes in one direction in the second direction from the first surface of the movable detection base. The movable second protrusion protrudes in the other direction of the second direction from the second surface of the movable detection base. The fixed portion includes a first fixed-side detection base, a second fixed-side detection base, a fixed-side first protrusion, and a fixed-side second protrusion. The first fixed side detection base and the second fixed side detection base are respectively disposed on both sides of the movable side detection base in the second direction, and extend along the first direction. The fixed first protrusion protrudes from the first fixed detection base to the movable first protrusion side. The fixed-side second protrusion protrudes from the second fixed-side detection base toward the movable-side second protrusion. The sensor element includes a first capacitance between the movable first projection and the fixed first projection, and a second capacitance between the movable second projection and the fixed second projection. An acceleration detection signal is output from the change in the combined electrostatic capacity. A capacitance forming portion is disposed at an end portion in the first direction in any of the movable side detection base, the first fixed side detection base, and the second fixed side detection base. The width along the second direction of the capacitance forming portion is the same as the width of the movable side detection base, the first fixed side detection base, and the second fixed side detection base in which the capacitance formation portion is arranged. Larger than the width along two directions.

In this configuration, the capacitance of the capacitance forming portion can be increased, and the change in capacitance due to vibration can be suppressed and almost eliminated.

In the sensor element of the present invention, each of the movable part and the fixed part may be provided with a capacitance forming part.

In this configuration, the change in capacitance due to vibration can be more easily suppressed and can be almost eliminated.

Further, the sensor element of the present invention preferably has the following configuration. The movable part has a movable side holding part extending along the second direction at one end of the movable side detection base in the first direction. The fixed portion has a fixed-side holding portion extending along the second direction at the other end in the first direction of the first fixed-side detection base and the second fixed-side detection base. The movable side detection base, the first fixed side detection base, and the second fixed side detection base are disposed between the movable side holding part and the fixed side holding part in the first direction. The capacitance forming part is disposed at the other end in the first direction of the movable side detection base.

This configuration shows a specific structure of the capacitance forming portion in the movable portion.

Further, the sensor element of the present invention preferably has the following configuration.

The movable part has a movable side holding part extending in the second direction at one end in the first direction of the movable side detection base. The fixed portion has a fixed-side holding portion extending along the second direction at the other end in the first direction of the first fixed-side detection base and the second fixed-side detection base. The movable side detection base, the first fixed side detection base, and the second fixed side detection base are arranged between the movable side holding part and the fixed side holding part in the first direction. The capacitance forming part is disposed at one end of the first fixed side detection base and the second fixed side detection base in the first direction.

This configuration shows a specific structure of the capacitance forming portion in the fixed portion.

Further, the sensor element of the present invention preferably has the following configuration. The movable side detection bases are formed on both sides of the movable side holding portion in the first direction. The capacitance forming part is arranged symmetrically about the second direction on both sides of the movable side holding part.

In this configuration, the change in capacitance due to vibration can be suppressed more effectively.

Further, the sensor element of the present invention preferably has the following configuration. The sensor element includes a first mass unit and a second mass unit arranged in the second direction with a gap with respect to the substrate, and the first mass unit and the second mass unit along the first direction. And a supporting beam that supports the vibration so that the vibration is in the opposite phase. The first mass unit has a fixed part and a movable part, and outputs a first acceleration detection signal. The second mass unit has a fixed part and a movable part, and outputs a second acceleration detection signal.

In this configuration, acceleration can be detected more reliably.

Further, the sensor element of the present invention preferably has the following configuration. The first mass unit outputs a first angular velocity detection signal based on an angular velocity around a third direction orthogonal to the first direction and the second direction. The second mass unit outputs a second angular velocity detection signal based on an angular velocity around the third direction. The sensor element is configured to output so that the phase relationship between the first angular velocity detection signal and the second angular velocity detection signal is opposite to the phase relationship between the first acceleration detection signal and the second acceleration detection signal.

In this configuration, angular velocity detection can be detected simultaneously with the acceleration detector. A sensor element that can detect acceleration and angular velocity can be realized in a small size.

The composite sensor according to the present invention includes a sensor element that detects the acceleration and the angular velocity, a first detection signal including a first angular velocity detection signal and a first acceleration detection signal, a second angular velocity detection signal, and a second acceleration detection signal. And an addition unit that adds the second detection signal, and a subtraction unit that subtracts the first detection signal and the second detection signal.

This configuration shows a specific configuration of the composite sensor using the above-described sensor element. And by setting it as this structure, the composite sensor which can detect an acceleration and an angular velocity separately is realizable small.

According to the present invention, when the angular velocity detection unit and the acceleration detection unit are formed using a single movable unit, the acceleration can be accurately determined without being affected by the magnitude of vibration for angular velocity detection. Can be detected.

It is a top view which shows the structure of the sensor element which concerns on embodiment of this invention. It is an enlarged plan view which shows the structure of the 1st detection part which concerns on embodiment of this invention. It is an enlarged plan view which shows the structure of the acceleration detection part of the 1st detection part and angular velocity detection part which concern on embodiment of this invention. It is an enlarged plan view which shows the structure of the 2nd detection part which concerns on embodiment of this invention. It is an enlarged plan view which shows the structure of the 3rd detection part which concerns on embodiment of this invention. It is an enlarged plan view which shows the structure of the 4th detection part which concerns on embodiment of this invention. It is an enlarged plan view which shows the structure of the drive part and monitor part which concern on embodiment of this invention. It is a block diagram which shows the structure of the composite sensor which concerns on embodiment of this invention. It is a figure which shows the behavior when angular velocity (omega) is applied to the sensor element which concerns on embodiment of this invention. It is a figure which shows the behavior when the acceleration a is applied to the sensor element which concerns on embodiment of this invention. It is a wave form chart of each signal when only angular velocity omega is impressed to sensor element 1 concerning an embodiment of the present invention. It is a wave form chart of each signal when only acceleration a is impressed to sensor element 1 concerning an embodiment of the present invention. It is a wave form chart of each signal when acceleration a and angular velocity omega are impressed to sensor element 1 concerning an embodiment of the present invention. FIG. 5 is a partial plan view showing a more specific structure of a movable acceleration detector and a fixed acceleration detector. It is an enlarged view of the both ends of the X-axis direction of a movable-side acceleration detector (when displacement amount (DELTA) x is 0). It is an enlarged view of the both ends of the X-axis direction of the movable-side acceleration detector (when the displacement amount Δx is + W). FIG. 4 is an enlarged view of both ends of a movable-side acceleration sensor in the X-axis direction (when the displacement amount Δx is −W). It is a graph which shows the change with respect to the amount of displacement of synthetic capacity. The figure which shows the time change of displacement amount (DELTA) x, the primary component and secondary component of electrostatic capacitance C1, C2 by the vibration of a projection part, electrostatic capacitance C30 by an electrostatic capacitance formation part, and synthetic electrostatic capacitance Cc. It is. It is a partial top view which shows the more concrete other structure of the acceleration sensor on a movable side and the acceleration sensor on a fixed side. FIG. 12 is a partial plan view showing another more specific second structure of a movable-side acceleration detector and a fixed-side acceleration detector. It is the top view which expanded a part of acceleration detection part of the conventional composite sensor. It is the top view which expanded a part of acceleration detection part for demonstrating the subject of the conventional composite sensor. It is a wave form diagram for demonstrating the subject of the conventional composite sensor.

A sensor element and a composite sensor according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a plan view showing a configuration of a sensor element according to an embodiment of the present invention. For example, the sensor element is sealed by a housing (not shown). The atmosphere in the housing in which the sensor element is arranged is maintained, for example, in a reduced pressure atmosphere.

The sensor element 1 includes a rectangular substrate 2. The substrate 2 is formed of an insulating semiconductor such as silicon. In the following, the short direction of the rectangular substrate 2 is defined as the X-axis direction (corresponding to the “first direction” of the present invention), and the longitudinal direction is defined as the Y-axis direction (the “second direction” of the present invention). Will be described.

The sensor element 1 includes a first mass unit 10, a second mass unit 20, a third mass unit 300, and a fourth mass unit 400. These mass parts are made of a conductive semiconductor such as low-resistance silicon. Further, the parts other than the substrate 2 constituting the sensor element 1 are made of a conductive semiconductor such as low-resistance silicon, for example, in the same manner as each mass part.

The first mass unit 10, the second mass unit 20, the third mass unit 300, and the fourth mass unit 400 are arranged in the Y-axis direction at intervals. As a more specific arrangement order, the first mass unit 10 and the second mass unit 20 are arranged at the center along the arrangement direction (Y-axis direction). The third mass unit 300 is disposed on the opposite side of the first mass unit 10 from the second mass unit 20 side. The fourth mass unit 400 is disposed on the opposite side of the second mass unit 20 from the first mass unit 10 side.

The first mass unit 10, the second mass unit 20, the third mass unit 300, and the fourth mass unit 400 are supported by the support beams 4A and 4B with a gap from the substrate 2.

The support beams 4A and 4B have a long shape extending along the Y-axis direction. The width (length in the X-axis direction) of the support beams 4A and 4B is set so as to be strong enough to be bent while being partially displaced in the X-axis direction due to vibration described later.

The support beam 4A is disposed on one end side in the X-axis direction with respect to the region where the first mass unit 10, the second mass unit 20, the third mass unit 300, and the fourth mass unit 400 are arranged. The support beam 4B is disposed on the other end side in the X-axis direction with respect to the region where the first mass unit 10, the second mass unit 20, the third mass unit 300, and the fourth mass unit 400 are arranged. That is, the support beams 4A and 4B are arranged so as to sandwich the first mass unit 10, the second mass unit 20, the third mass unit 300, and the fourth mass unit 400 along the X-axis direction.

The first mass part 10 and the support beam 4A are connected by a connecting part 5A. The second mass part 20 and the support beam 4A are connected by a connecting part 5B. The third mass part 300 and the support beam 4A are connected by a connecting part 5C. The fourth mass part 400 and the support beam 4A are connected by a connecting part 5D.

The first mass part 10 and the support beam 4B are connected by a connecting part 5E. The 2nd mass part 20 and support beam 4B are connected by connecting part 5F. The third mass unit 300 and the support beam 4B are coupled by a coupling unit 5G. The fourth mass part 400 and the support beam 4B are connected by a connecting part 5H.

The connecting part 5A and the connecting part 5E pass through the center of gravity G of the arranged first mass part 10, the second mass part 20, the third mass part 300, and the fourth mass part 400, and are symmetrical about an axis parallel to the Y-axis direction. As an axis, they are arranged in line-symmetric positions. The connecting part 5B and the connecting part 5F are arranged at positions symmetrical with respect to the symmetry axis. The connecting portion 5C and the connecting portion 5G are arranged at positions symmetrical with respect to the symmetry axis. The connecting part 5D and the connecting part 5H are arranged at positions symmetrical with respect to the symmetry axis.

The support beam 4A is connected to the fixing portions 3A, 3B, 3C. The support beam 4B is connected to the fixing portions 3D, 3E, and 3F. The positions where the fixing portions 3A to 3F are connected to the support beams 4A and 4B are points (nodes) where the displacement of the support beams 4A and 4B in the X-axis direction does not occur when each mass portion vibrates in the X-axis direction. .

The first mass unit 10 includes an inner frame portion 101A and an outer frame portion 102A. The inner frame portion 101A is a rectangle having a long side in the X-axis direction and a short side in the Y-axis direction. The outer frame portion 102A is a rectangle having a long side in the X-axis direction and a short side in the Y-axis direction. The outer frame portion 102A has a shape surrounding the inner frame portion 101A. The outer frame portion 102A is connected to the support beams 4A and 4B by connecting portions 5A and 5E.

The inner frame portion 101A is connected to the outer frame portion 102A in the vicinity of the axis along the Y-axis direction passing through the center of gravity G. More specifically, a long connecting member 103A is formed on the side on the center of gravity G side of the inner frame portion 101A. The connecting member 103A has a shape extending along the X-axis direction, and is connected to the inner frame portion 101A at both ends in the X-axis direction. A connecting member 104A is formed at the center of the connecting member 103A. The connecting member 104A has a short shape in the Y-axis direction, one end in the Y-axis direction is connected to the outer frame portion 102A, and the other end in the Y-axis direction is connected to the connecting member 103A. The connecting member 104A has a shape in which the length in the X-axis direction is longer than the length in the Y-axis direction and is sufficiently shorter than the length in the longitudinal direction (X-axis direction) of the connecting member 103A.

A long connecting member 103B is formed on the side opposite to the center of gravity G side of the inner frame portion 101A. The connecting member 103B has a shape extending along the X-axis direction, and is connected to the inner frame portion 101A at both ends in the X-axis direction. A connecting member 104B is formed at the center of the connecting member 103B in the longitudinal direction. The connecting member 104B has a short shape in the Y-axis direction, one end in the Y-axis direction is connected to the outer frame portion 102A, and the other end in the Y-axis direction is connected to the connecting member 103B. The connecting member 104B has a shape in which the length in the X-axis direction is longer than the length in the Y-axis direction and is sufficiently shorter than the length in the longitudinal direction (X-axis direction) of the connecting member 103B.

The inner frame portion 101A includes a central axis 101C. The central axis 101C has a shape extending in the Y-axis direction and has a predetermined width in the X-axis direction. The central axis 101C is disposed at the center in the X-axis direction of the inner frame 101A. In other words, the central axis 101C is arranged at a position where the extending axis substantially coincides with the Y axis. The inner space of the inner frame portion 101A is divided into two regions in the X-axis direction by the central axis 101C. The two regions are generally line symmetric with respect to the Y axis except for the arrangement order of the conductor portions described later.

A fixed portion 111, an acceleration detection portion 112, and an angular velocity detection portion 113 are formed inside one of the inner frame portions 101A. The fixed part 111 has substantially the same length in both the X-axis direction and the Y-axis direction. The fixed portion 111 has a shape having a relatively large plane area in the sensor element 1 when viewed in plan. The fixing part 111 is fixed to the substrate 2.

Further, although a specific configuration will be described later, the acceleration detection unit 112 and the angular velocity detection unit 113 include a conductor part connected to the fixed part 111 and a conductor part connected to the inner frame part 101A. In addition, the conductor part has shown the part of the electroconductive semiconductor which generate | occur | produces an electrostatic capacitance substantially according to angular velocity and acceleration.

The first detection unit 11 is configured by the fixing unit 111, the first mass unit 10, and the conductor units that constitute the acceleration detection unit 112 and the angular velocity detection unit 113.

A fixed part 121, an acceleration detection part 122, and an angular velocity detection part 123 are formed on the other inner side of the inner frame part 101A. The fixed part 121 has substantially the same length in both the X-axis direction and the Y-axis direction. The fixed part 121 has a shape having a relatively large plane area in the sensor element 1 when viewed in plan. The fixing part 121 is fixed to the substrate 2. The fixed part 121 has a shape symmetrical with the fixed part 111 with respect to the Y axis.

Further, although a specific configuration will be described later, the acceleration detection unit 122 and the angular velocity detection unit 123 include a conductor part connected to the fixed part 121 and a conductor part connected to the inner frame part 101A. The acceleration detection unit 122 is generally symmetrical with the acceleration detection unit 112 with respect to the Y axis, but a conductor connected to the inner frame 101A for acceleration detection and a conductor connected to the fixed unit 121. The arrangement order with respect to the parts is not line symmetric but the same order along the X-axis direction. The angular velocity detection unit 123 is symmetrical with respect to the angular velocity detection unit 113 in the extending direction of the conductor with respect to the Y axis, but the arrangement order of the conductors is different from that of the angular velocity detection unit 113.

The second detection unit 12 is configured by the fixing unit 121, the first mass unit 10, and the conductor units that constitute the acceleration detection unit 122 and the angular velocity detection unit 123.

The second mass unit 20 includes an inner frame portion 101B and an outer frame portion 102B. The inner frame portion 101B is a rectangle having a long side in the X-axis direction and a short side in the Y-axis direction. The outer frame portion 102B is a rectangle having a long side in the X-axis direction and a short side in the Y-axis direction. The outer frame portion 102B has a shape surrounding the inner frame portion 101B. The outer frame portion 102B is connected to the support beams 4A and 4B by connecting portions 5B and 5F.

The inner frame portion 101B is arranged in a line-symmetrical position with respect to the inner frame portion 101A of the first mass unit 10 with respect to the X axis passing through the center of gravity G, and has a line-symmetric shape. The outer frame portion 102B is arranged at a line-symmetrical position with respect to the outer frame portion 102A of the first mass unit 10 with respect to the X axis passing through the center of gravity G, and has a line-symmetric shape.

The inner frame portion 101B is connected to the outer frame portion 102B in the vicinity of the axis along the Y-axis direction passing through the center of gravity G. More specifically, a long connecting member 103C is formed on the side of the inner frame portion 101B on the center of gravity G side. The connecting member 103C has a shape extending along the X-axis direction, and is connected to the inner frame portion 101B at both ends in the X-axis direction. A connecting member 104C is formed at the center of the connecting member 103C. The connecting member 104C has a short shape in the Y-axis direction, one end in the Y-axis direction is connected to the outer frame portion 102B, and the other end in the Y-axis direction is connected to the connecting member 103C. The connecting member 104C has a shape in which the length in the X-axis direction is longer than the length in the Y-axis direction and is sufficiently shorter than the length in the longitudinal direction (X-axis direction) of the connecting member 103C. The connecting member 103C and the connecting member 104C are symmetrical with the connecting member 103A and the connecting member 104A, respectively, with respect to the X axis.

A long connecting member 103D is formed on the side opposite to the center of gravity G side of the inner frame portion 101B. The connecting member 103D has a shape extending along the X-axis direction, and is connected to the inner frame portion 101B at both ends in the X-axis direction. A connecting member 104D is formed at the center of the connecting member 103D in the longitudinal direction. The connecting member 104D has a short shape in the Y-axis direction, one end in the Y-axis direction is connected to the outer frame portion 102B, and the other end in the Y-axis direction is connected to the connecting member 103D. The connecting member 104D has a shape in which the length in the X-axis direction is longer than the length in the Y-axis direction and is sufficiently shorter than the length in the long direction (X-axis direction) of the connecting member 103D. The connecting member 103D and the connecting member 104D are symmetrical with the connecting member 103B and the connecting member 104B, respectively, with respect to the X axis.

The inner frame portion 101B includes a central axis 101D. The central axis 101D has a shape extending in the Y-axis direction and has a predetermined width in the X-axis direction. The center axis 101D is disposed at the center of the inner frame 101B in the X-axis direction. In other words, the central axis 101D is disposed at a position where the extending axis substantially coincides with the Y axis. The inner space of the inner frame portion 101B is divided into two regions in the X-axis direction by the central axis 101D. The two regions are generally line symmetric with respect to the Y axis except for the arrangement order of the conductor portions. The central axis 101D has a shape symmetrical with the central axis 101C with respect to the X axis.

The fixed part 131, the acceleration detection part 132, and the angular velocity detection part 133 are formed inside one side of the inner frame part 101B. The fixed part 131 has substantially the same length in both the X-axis direction and the Y-axis direction. The fixed portion 131 has a shape having a relatively large plane area in the sensor element 1 when viewed in plan. The fixing part 131 is fixed to the substrate 2.

Further, although a specific configuration will be described later, the acceleration detection unit 132 and the angular velocity detection unit 133 include a conductor portion connected to the fixed portion 131 and a conductor portion connected to the inner frame portion 101B. The fixed unit 131, the acceleration detection unit 132, and the angular velocity detection unit 133 are symmetrical with the fixed unit 111, the acceleration detection unit 112, and the angular velocity detection unit 113, respectively, with respect to the X axis.

The third detection unit 13 is configured by the fixing unit 131, the second mass unit 20, and the conductors that form the acceleration detection unit 132 and the angular velocity detection unit 133.

A fixed portion 141, an acceleration detection portion 142, and an angular velocity detection portion 143 are formed on the other inner side of the inner frame portion 101B. The fixed portion 141 has substantially the same length in both the X-axis direction and the Y-axis direction. The fixed portion 141 has a shape having a relatively large plane area in the sensor element 1 when viewed in plan. The fixing part 141 is fixed to the substrate 2. The fixed portion 141 has a shape symmetrical with the fixed portion 131 with respect to the Y axis, and has a shape symmetrical with the fixed portion 121 with respect to the X axis.

Further, although a specific configuration will be described later, the acceleration detection unit 142 and the angular velocity detection unit 143 include a conductor part connected to the fixed part 141 and a conductor part connected to the inner frame part 101B. The acceleration detection unit 142 is generally symmetrical with the acceleration detection unit 132 with respect to the Y axis, but the conductor connected to the acceleration detection inner frame 101B and the conductor connected to the fixed unit 141. The arrangement order with respect to the parts is not line symmetric but the same order along the X-axis direction. The angular velocity detector 143 has a conductor line extending in a line-symmetric shape with respect to the angular velocity detector 133 with respect to the Y axis, but the arrangement order of the conductors is different from that of the angular velocity detector 133.

4th detection part 14 is constituted by fixed part 141, 2nd mass part 20, and a conductor part which constitutes acceleration detection part 142 and angular velocity detection part 143.

The third mass unit 300 is disposed away from the first mass unit 10. The third mass unit 300 has a rectangular shape extending in the X-axis direction. One end of the third mass part 300 in the longitudinal direction is connected to the support beam 4A by a connecting part 5C. The other end in the longitudinal direction of the third mass unit 300 is connected to the support beam 4B by a connecting part 5G.

The fixing unit 31 is disposed between the third mass unit 300 and the first mass unit 10. The fixing part 31 has a shape having a predetermined area, like the fixing parts 111, 121, 131, 141, and is fixed to the substrate 2. The fixed portion 31 is disposed at the center position in the X-axis direction. The support member 32 has a substantially rectangular shape extending along the X-axis direction with the fixed portion 31 as the center.

A plurality of comb teeth 33 </ b> A are formed on the outer frame 102 </ b> A side of the first mass unit 10 in the support member 32. A plurality of comb tooth portions 34A are formed on the support member 32 side of the outer frame portion 102A. The comb tooth portion 33A and the comb tooth portion 34A are arranged so as to mesh with each other.

A plurality of comb teeth portions 33B are formed on the third mass portion 300 side of the support member 32. A plurality of comb teeth 34 </ b> B are formed on the support member 32 side of the third mass unit 300. The comb tooth portion 33B and the comb tooth portion 34B are arranged so as to mesh with each other.

The first drive unit 30 is configured by the comb tooth portion 33A and the comb tooth portion 34A, and the comb tooth portion 33B and the comb tooth portion 34B.

The fixed part 500 is arranged on the opposite side of the third mass part 300 from the first mass part 10. The fixing unit 500 is disposed away from the third mass unit 300. The fixed part 500 has a rectangular shape extending in the X-axis direction. One end in the extending direction of the fixing portion 500 is connected to the substrate 2. As a result, the fixing unit 500 is fixed to the substrate 2 in the same manner as the fixing units 111, 121, 131, 141, and 31.

A plurality of comb-tooth portions 51 are formed on the fixed portion 500 side of the third mass portion 300. A plurality of comb teeth portions 52 are formed on the third mass portion 300 side of the fixed portion 500. The comb-tooth part 51 and the comb-tooth part 52 are arrange | positioned so that it may mesh | engage. The first monitor unit 50 is configured by the comb-tooth portion 51 and the comb-tooth portion 52.

The fourth mass unit 400 is disposed away from the second mass unit 20. The fourth mass unit 400 has a rectangular shape extending in the X-axis direction. One end of the fourth mass part 400 in the longitudinal direction is connected to the support beam 4A by a connecting part 5D. The other end in the longitudinal direction of the fourth mass part 400 is connected to the support beam 4B by the connecting part 5H.

The fixed part 41 is disposed between the fourth mass part 400 and the second mass part 20. The fixing portion 41 has a shape having a predetermined area, like the fixing portion 31, and is fixed to the substrate 2. The fixed portion 41 is disposed at the center position in the X-axis direction. The support member 42 has a substantially rectangular shape extending along the X-axis direction with the fixed portion 41 as the center.

A plurality of comb-tooth portions 43A are formed on the support member 42 on the outer frame portion 102B side of the second mass portion 20. A plurality of comb teeth 44A are formed on the support member 42 side of the outer frame portion 102B. The plurality of comb-tooth portions 44A are connected to the outer frame portion 102B. The comb tooth portion 43A and the comb tooth portion 44A are arranged so as to mesh with each other.

A plurality of comb teeth 43B are formed on the support member 42 on the fourth mass portion 400 side. A plurality of comb teeth portions 44B are formed on the support member 42 side of the fourth mass portion 400. The comb tooth portion 43B and the comb tooth portion 44B are disposed so as to mesh with each other.

The second drive unit 40 is configured by the comb tooth portion 43A and the comb tooth portion 44A, and the comb tooth portion 43B and the comb tooth portion 44B.

The fixed part 600 is arranged on the opposite side of the fourth mass part 400 from the second mass part 20. The fixed part 600 is disposed away from the fourth mass part 400. One end in the extending direction of the fixing portion 600 is connected to the substrate 2. Thereby, the fixed part 600 has a rectangular shape extending in the X-axis direction. The fixing part 600 is fixed to the substrate 2 in the same manner as the fixing part 500.

A plurality of comb-tooth portions 61 are formed on the fourth mass portion 400 side of the fixing portion 600. A plurality of comb teeth 62 are formed on the fixed part 600 side of the fourth mass part 400. The comb-tooth part 61 and the comb-tooth part 62 are arrange | positioned so that it may mesh | engage. The comb monitor 61 and the comb 62 constitute a second monitor 60.

Next, a specific configuration of the first detection unit 11 will be described with reference to the drawings. FIG. 2 is an enlarged plan view showing the configuration of the first detection unit according to the embodiment of the present invention. FIG. 3 is an enlarged plan view showing configurations of the acceleration detection unit and the angular velocity detection unit of the first detection unit according to the embodiment of the present invention.

The fixed portion 111 is disposed in one internal space divided by the central axis 101C in the internal space of the inner frame portion 101A. The length of the fixed portion 111 in the X-axis direction is shorter than the length of the internal space in the X-axis direction. The fixed portion 111 is located near the second mass portion 20 side (the connecting members 103A and 104A), and is shifted from the center of the internal space along the Y-axis direction so as to be separated from the third mass portion 300 side. Is arranged. As a result, predetermined spaces are formed on the support beam 4A side, the central axis 101C side, and the third mass unit 300 side (the coupling portions 103B and 104B side) of the fixed portion 111.

Acceleration detectors 202A1, 202B1, 202C1, 202D1, 202E1, 202F1, 202G1, 202H1, 202I1, 202J1, 202K1, 202L1, 202M1, 202N1 and acceleration detectors 204A1, 204B1, 204C1, 204D1, 204E1, 204F1, 204G1, 204H1 , 204I1 and 204J1 are arranged in a space on the third mass unit 300 side of the fixed part 111 including the vicinity of the end of the fixed part 111 on the third mass unit 300 side.

The fixing unit 111 includes long detector holding parts 201A1 and 201B1 (corresponding to the “fixing side holding part” of the present invention) protruding toward the third mass part 300 side. The detector holding part 201A1 is disposed at a corner where the end of the fixed part 111 on the support beam 4A side and the end of the third mass part 300 intersect. The detector holding part 201B1 is disposed at a corner where the end of the fixed part 111 on the central axis 101C side and the end of the third mass part 300 intersect.

The side of the inner frame portion 101A on the third mass portion 300 side includes a long detector holding portion 2051 (corresponding to the “movable side holding portion” of the present invention) protruding toward the fixed portion 111 side. The detector holding unit 2051 is arranged at an intermediate position between the detector holding units 201A1 and 201B1 along the X-axis direction.

The acceleration detectors 202A1, 202B1, 202C1, 202D1 are connected to the support beam 4A side of the detector holding portion 201A1 and have a shape protruding to the support beam 4A side.

The acceleration detector 202A1 includes a detection base 220A1 and a plurality of protrusions 222A1. The detection base 220A1 has a long shape extending in the X-axis direction, and one end thereof is connected to the detector holding portion 201A1. The plurality of protrusions 222A1 have a rectangular shape having a predetermined width in the X-axis direction. The plurality of protrusions 222A1 are arranged on the side of the base 220A1 on the second mass unit 20 side at a predetermined interval along the direction in which the base 220A1 extends (X-axis direction).

The acceleration detector 202B1 includes a detection base 220B1, a plurality of protrusions 221B1, and a plurality of protrusions 222B1. The detection base 220B1 has a long shape extending in the X-axis direction, and one end thereof is connected to the detector holder 201A1. The plurality of protrusions 221B1 have a rectangular shape having a predetermined width in the X-axis direction. The plurality of protrusions 221B1 are arranged at predetermined intervals along the direction (X axis direction) in which the detection base 220B1 extends on the side of the detection base 220B1 on the third mass unit 300 side. The plurality of protrusions 222B1 have a rectangular shape having a predetermined width in the X-axis direction. The plurality of protrusions 222B1 are arranged at predetermined intervals along the direction (X-axis direction) in which the detection base 220B1 extends on the side of the detection base 220B1 on the second mass unit 20 side.

The acceleration detector 202C1 includes a detection base 220C1, a plurality of protrusions 221C1, and a plurality of protrusions 222C1. The detection base 220C1 has a long shape extending in the X-axis direction, and one end thereof is connected to the detector holding portion 201A1. The plurality of protrusions 221C1 have a rectangular shape having a predetermined width in the X-axis direction. The plurality of protrusions 221C1 are arranged on the side of the detection base 220C1 on the third mass unit 300 side at a predetermined interval along the direction in which the detection base 220C1 extends (X-axis direction). The plurality of protrusions 222C1 have a rectangular shape having a predetermined width in the X-axis direction. The plurality of protrusions 222C1 are arranged at predetermined intervals along the direction in which the detection base 220C1 extends (X-axis direction) on the side of the detection base 220C1 on the second mass unit 20 side.

The acceleration detector 202D1 includes a detection base 220D1 and a plurality of protrusions 221D1. The detection base 220D1 has a long shape extending in the X-axis direction, and one end thereof is connected to the detector holding portion 201A1. The plurality of protrusions 221D1 have a rectangular shape having a predetermined width in the X-axis direction. The plurality of protrusions 221D1 are arranged at predetermined intervals along the direction in which the detection base 220D1 extends (X-axis direction) on the side of the detection base 220D1 on the third mass unit 300 side.

The acceleration detectors 204A1, 204B1, 204C1 are connected to the fixed portion 111 side of the inner frame 101A and have a shape protruding to the fixed portion 111 side.

The acceleration detector 204A1 includes a detection base 240A1, a plurality of protrusions 241A1, a plurality of protrusions 242A1, and a capacitance forming part 243A1. The detection base 240A1 has a long shape extending in the X-axis direction, and one end thereof is connected to the inner frame portion 101A. The plurality of protrusions 241A1 have a rectangular shape having a predetermined width in the X-axis direction. The plurality of protrusions 241A1 are arranged on the side of the detection base 240A1 on the third mass unit 300 side at a predetermined interval along the direction in which the detection base 240A1 extends (X-axis direction). The plurality of protrusions 242A1 have a rectangular shape having a predetermined width in the X-axis direction. The plurality of protrusions 242A1 are arranged at predetermined intervals along the direction in which the detection base 240A1 extends (X-axis direction) on the side of the detection base 240A1 on the second mass unit 20 side. The capacitance forming portion 243A1 is formed at the end of the detection base portion 240A1 on the detector holding portion 201A1 side. The capacitance forming portion 243A1 is formed so that the area seen along the X-axis direction is wider than the area of the detection base portion 240A1. The area of the electrostatic capacity forming unit 243A1 viewed along the X-axis direction is appropriately set to a value suitable for correcting a change in electrostatic capacity during vibration described later. Further, by adjusting the length of the capacitance forming portion 243A1 in the X-axis direction, the distance between the capacitance forming portion 243A1 and the inner frame portion 101A is suitable for correcting a change in capacitance during vibration described later. The value is set appropriately.

The acceleration detector 204B1 includes a detection base 240B1, a plurality of protrusions 241B1, a plurality of protrusions 242B1, and a capacitance forming part 243B1. The detection base 240B1 has a long shape extending in the X-axis direction, and one end thereof is connected to the inner frame portion 101A. The plurality of protrusions 241B1 have a rectangular shape having a predetermined width in the X-axis direction. The plurality of protrusions 241B1 are arranged at predetermined intervals along the direction in which the detection base 240B1 extends (X-axis direction) on the side of the detection base 240B1 on the third mass unit 300 side. The plurality of protrusions 242B1 have a rectangular shape having a predetermined width in the X-axis direction. The plurality of protrusions 242B1 are arranged at predetermined intervals along the direction (X-axis direction) in which the detection base 240B1 extends on the side of the detection base 240B1 on the second mass unit 20 side. The capacitance forming part 243B1 is formed at the end of the detection base part 240B1 on the detector holding part 201A1 side. The capacitance forming portion 243B1 is formed so that the area viewed along the X-axis direction is wider than the area of the detection base portion 240B1. The area of the electrostatic capacity forming unit 243B1 viewed along the X-axis direction is appropriately set to a value suitable for correcting a change in electrostatic capacity during vibration described later. Further, by adjusting the length of the capacitance forming portion 243B1 in the X-axis direction, the distance between the capacitance forming portion 243B1 and the inner frame portion 101A is suitable for correcting the capacitance change during vibration described later. The value is set appropriately.

The acceleration detector 204C1 includes a detection base 240C1, a plurality of protrusions 241C1, a plurality of protrusions 242C1, and a capacitance forming part 243C1. The detection base 240C1 has a long shape extending in the X-axis direction, and one end thereof is connected to the inner frame portion 101A. The plurality of protrusions 241C1 have a rectangular shape having a predetermined width in the X-axis direction. The plurality of protrusions 241C1 are arranged at predetermined intervals along the direction in which the detection base 240C1 extends (X-axis direction) on the side of the detection base 240C1 on the third mass unit 300 side. The plurality of protrusions 242C1 have a rectangular shape having a predetermined width in the X-axis direction. The plurality of protrusions 242C1 are arranged at predetermined intervals along the direction (X-axis direction) in which the detection base 240C1 extends on the side of the detection base 240C1 on the second mass unit 20 side. The capacitance forming portion 243C1 is formed at the end of the detection base portion 240C1 on the detector holding portion 201A1 side. The capacitance forming portion 243C1 is formed so that the area viewed along the X-axis direction is larger than the area of the detection base portion 240C1. The area of the electrostatic capacity forming unit 243C1 viewed along the X-axis direction is appropriately set to a value suitable for correcting a change in electrostatic capacity during vibration described later. Further, by adjusting the length of the capacitance forming portion 243C1 in the X-axis direction, the distance between the capacitance forming portion 243C1 and the inner frame portion 101A is suitable for correcting the capacitance change during vibration described later. The value is set appropriately.

The acceleration detectors 202A1, 202B1, 202C1, 202D1 and the acceleration detectors 204A1, 204B1, 204C1 are alternately arranged along the Y-axis direction. Specifically, the acceleration detector 204A1 is disposed between the acceleration detectors 202A1 and 202B1. The acceleration detector 204B1 is disposed between the acceleration detectors 202B1 and 202C1. The acceleration detector 204C1 is disposed between the acceleration detectors 202C1 and 202D1.

In such a configuration, each component of one movable-side acceleration detector and each component of two fixed-side movable-side detectors sandwiching the movable-side acceleration detector are respectively components of the present invention. Corresponds to the element as shown below.

The detection base of the movable acceleration detector sandwiched in the Y-axis direction corresponds to the “movable side detection base” of the present invention. The protrusion protruding to the side opposite to the center of gravity G of the detection base of the movable acceleration detector (in the case of the first mass unit 10, the negative direction in the Y-axis direction and the third mass unit 300 side) is the present invention. Corresponds to “movable side first protrusion”. The protrusion protruding toward the center of gravity G of the detection base of the movable-side acceleration detector (in the case of the first mass unit 10, the positive direction in the Y-axis direction and the second mass unit 20 side) This corresponds to the “movable side second protrusion”.

The detection base portion of the fixed-side acceleration detector adjacent to the movable-side acceleration detector and disposed on the side opposite to the center of gravity G corresponds to the “first fixed-side detection base” of the present invention. The protrusion that protrudes toward the acceleration detector on the movable portion side of the fixed-side detection main shaft corresponds to the “fixed-side first protrusion” of the present invention.

The detection base of the fixed-side acceleration detector arranged adjacent to the movable-side acceleration detector and located on the center of gravity G side corresponds to the “second fixed-side detection base” of the present invention. The protrusion that protrudes toward the acceleration detector on the movable portion side of the fixed-side detection main shaft corresponds to the “fixed-side second protrusion” of the present invention.

For example, in the case of the movable-side acceleration detector 204A1, the detection base 240A1 corresponds to the “movable-side detection base”. The protrusion 241A1 corresponds to the “movable side first protrusion” of the present invention. The protrusion 242A1 corresponds to the “movable side second protrusion” of the present invention. The detection base 220A1 of the fixed-side acceleration detector 202A1 corresponds to a “first fixed-side detection base”. The protrusion 222A1 corresponds to a “fixed-side first protrusion”. The detection base 220B1 of the fixed-side acceleration detector 202B1 corresponds to a “second fixed-side detection base”. The protrusion 221B1 corresponds to a “fixed-side second protrusion”.

The protrusions of the acceleration detectors 202A1, 202B1, 202C1, and 202D1 and the protrusions of the acceleration detectors 204A1, 204B1, and 204C1 are arranged to face each other with a predetermined area.

More specifically, the protrusion 222A1 of the acceleration detector 202A1 and the protrusion 241A1 of the acceleration detector 204A1 face each other. The protrusion 242A1 of the acceleration detector 204A1 and the protrusion 221B1 of the acceleration detector 202B1 face each other. The protrusion 222B1 of the acceleration detector 202B1 and the protrusion 241B1 of the acceleration detector 204B1 face each other. The protrusion 242B1 of the acceleration detector 204B1 and the protrusion 221C1 of the acceleration detector 202C1 face each other. The protrusion 222C1 of the acceleration detector 202C1 and the protrusion 241C1 of the acceleration detector 204C1 face each other. The protrusion 242C1 of the acceleration detector 204C1 and the protrusion 221D1 of the acceleration detector 202D1 face each other.

The projections of the acceleration detectors 202A1, 202B1, 202C1, and 202D1 and the projections of the acceleration detectors 204A1, 204B1, and 204C1 do not face each other, but each of the projections that face each other has an X axis. Opposite in the direction. At this time, the protrusions of the acceleration detectors 202A1, 202B1, 202C1, and 202D1 are displaced in different directions in the X-axis direction with respect to the protrusions of the acceleration detectors 204A1, 204B1, and 204C1 that are sandwiched therebetween.

For example, as shown in FIG. 3, each protrusion 222A1 of the fixed-side acceleration detector 202A1 is positioned on the detector holding portion 201A1 side along the X-axis direction with respect to each protrusion 241A1 of the movable-side acceleration detector 204A1. In this case, the protrusions 221B1 of the fixed-side acceleration detector 202B1 are shifted toward the inner frame 101A adjacent to the protrusions 242A1 of the movable-side acceleration detector 204A1 along the X-axis direction. Yes. At this time, each protrusion is formed so that the amount of deviation is the same. More preferably, each protrusion is formed such that the amount of deviation is half of the protrusion in the X-axis direction.

With such a configuration, even if each of the movable-side acceleration detectors 204A1, 204B1, and 204C1 vibrates in the X-axis direction, one side of the movable-side acceleration detectors 204A1, 204B1, and 204C1 in the Y-axis direction. Change in capacitance between the fixed-side acceleration detectors arranged on the fixed side and the fixed side arranged on the other side in the Y-axis direction of each of the movable-side acceleration detectors 204A1, 204B1, 204C1 The change in capacitance (capacitance) that occurs between the acceleration sensor and the acceleration sensor changes in the opposite direction. For example, if one capacitance increases, the other capacitance decreases. Therefore, when the distance between the protrusions is equal as in the case where no acceleration is applied, the acceleration sensors 204A1, 204B1, 204C1 on the movable side can be moved in the X-axis direction by adding these capacitances. Even if it vibrates, the change in capacitance due to the vibration can be prevented.

The acceleration detectors 202E1, 202F1, 202G1 are connected to the center axis 101C side of the detector holding portion 201A1 and have a shape projecting toward the center axis 101C side. The acceleration detector 202E1 is formed symmetrically with the acceleration detector 202A1 with respect to the detector holder 201A1. The acceleration detector 202F1 is formed symmetrically with the acceleration detector 202B1 with respect to the detector holder 201A1. The acceleration detector 202G1 is formed at a position symmetrical to the acceleration detector 202C1 with respect to the detector holder 201A1, and the shape of the acceleration detector 202G1 is the same as that of the acceleration detector 202D1 projected in line symmetry. .

The acceleration detectors 204D1 and 204E1 are connected to the detector holding unit 201A1 side of the detector holding unit 2051 and have a shape protruding to the detector holding unit 201A1 side. The acceleration detector 204D1 has a shape symmetrical with the acceleration detector 204A1 with respect to the detector holder 201A1. The acceleration detector 204E1 has a shape symmetrical with the acceleration detector 204B1 with respect to the detector holder 201A1.

Acceleration detectors 202E1, 202F1, 202G1 and acceleration detectors 204D1, 204E1 are alternately arranged along the Y-axis direction. Specifically, the acceleration detector 204D1 is disposed between the acceleration detectors 202E1 and 202F1. An acceleration detector 204E1 is disposed between the acceleration detectors 202F1 and 202G1. The projections of the acceleration detectors 202E1, 202F1, 202G1 and the projections of the acceleration detectors 204D1, 204E1 are the projections of the acceleration detectors 202A1, 202B1, 202C1, 202D1, and the acceleration detectors 204A1, 204B1, 204C1. As in the projections of FIG. 2, they face each other in a state shifted in the X-axis direction, and the arrangement order thereof is the same along the X-axis direction.

The acceleration detectors 204F1 and 204G1 are connected to the detector holding unit 201B1 side of the detector holding unit 2051 and have a shape protruding to the detector holding unit 201B1 side. The acceleration detector 204F1 has a shape symmetrical with the acceleration detector 204D1 with respect to the detector holder 2051. The acceleration detector 204G1 has a shape symmetrical with the acceleration detector 204E1 with respect to the detector holder 2051.

The acceleration detectors 202H1, 202I1, and 202J1 are connected to the detector holding unit 2051 side of the detector holding unit 201B1 and have a shape protruding to the detector holding unit 2051 side. The acceleration detector 202H1 is formed symmetrically with the acceleration detector 202E1 with respect to the detector holder 2051. The acceleration detector 202I1 is formed symmetrically with the acceleration detector 202F1 with respect to the detector holder 2051. The acceleration detector 202J1 is formed symmetrically with the acceleration detector 202G1 with respect to the detector holder 2051.

Acceleration detectors 202H1, 202I1, 202J1 and acceleration detectors 204F1, 204G1 are alternately arranged along the Y-axis direction. Specifically, the acceleration detector 204F1 is disposed between the acceleration detectors 202H1 and 202I1. An acceleration detector 204G1 is disposed between the acceleration detectors 202I1 and 202J1. The projections of the acceleration detectors 202H1, 202I1, 202J1 and the projections of the acceleration detectors 204F1, 204G1 are the projections of the acceleration detectors 202A1, 202B1, 202C1, 202D1, and the acceleration detectors 204A1, 204B1, 204C1. As in the projections of FIG. 2, they face each other in a state shifted in the X-axis direction, and the arrangement order thereof is the same along the X-axis direction.

The acceleration detectors 202K1, 202L1, 202M1, and 202N1 are connected to the center axis 101C side of the detector holding portion 201B1 and have a shape protruding toward the center axis 101C side. The acceleration detector 202K1 is formed symmetrically with the acceleration detector 202A1 with reference to an axis passing through the center in the width direction of the detector holder 2051 and extending in the Y-axis direction. The acceleration detector 202L1 is formed in line symmetry with the acceleration detector 202B1 with reference to an axis that passes through the center in the width direction of the detector holder 2051 and extends in the Y-axis direction. The acceleration detector 202M1 is formed in line symmetry with the acceleration detector 202C1 with reference to an axis that passes through the center in the width direction of the detector holder 2051 and extends in the Y-axis direction. The acceleration detector 202N1 is formed in line symmetry with the acceleration detector 202D1 with reference to an axis passing through the center in the width direction of the detector holder 2051 and extending in the Y-axis direction.

The acceleration detectors 204H1, 204I1, and 204J1 are connected to the fixed portion 111 side of the central axis 101C and have a shape that protrudes toward the fixed portion 111 side. The acceleration detector 204H1 is formed in line symmetry with the acceleration detector 204A1 with reference to an axis passing through the center in the width direction of the detector holder 2051 and extending in the Y-axis direction. The acceleration detector 204I1 is formed in line symmetry with the acceleration detector 204B1 with reference to an axis that passes through the center in the width direction of the detector holder 2051 and extends in the Y-axis direction. The acceleration detector 204J1 is formed in line symmetry with the acceleration detector 204C1 with reference to an axis that passes through the center in the width direction of the detector holder 2051 and extends in the Y-axis direction.

Acceleration detectors 202K1, 202L1, 202M1, 202N1 and acceleration detectors 204H1, 204I1, 204J1 are alternately arranged along the Y-axis direction. Specifically, the acceleration detector 204H1 is disposed between the acceleration detectors 202K1 and 202L1. An acceleration detector 204I1 is disposed between the acceleration detectors 202L1 and 202M1. An acceleration detector 204J1 is disposed between the acceleration detectors 202M1 and 202N1. The projections of the acceleration detectors 202K1, 202L1, 202M1, and 202N1 and the projections of the acceleration detectors 204H1, 204I1, and 204J1 are the projections of the acceleration detectors 202A1, 202B1, 202C1, and 202D1, and the acceleration detector 204A1. , 204B1 and 204C1 are opposed to each other while being displaced in the X-axis direction, and the arrangement order thereof is the same along the X-axis direction.

By configuring the acceleration detectors 202A1 to 202N1 and 204A1 to 204J1 as described above, when acceleration is applied in the Y-axis direction in a state of vibrating in the X-axis direction, the adjacent acceleration detectors 202A1 to 202N1, 204A1 to 204J1 are vibrated. The opposing distance of the protrusions of the slab changes. Since the capacitance changes corresponding to the change in the facing distance, the acceleration can be detected by detecting the amount of change. Since the direction of change in capacitance (capacitance from large to small, or from small to large) varies depending on the direction of acceleration, the direction of acceleration can also be detected.

A plurality of angular velocity detectors 3011 and 3021 are formed in the space on the support beam 4A side and the space on the central axis 101C side of the fixed portion 111. The angular velocity detector 3011 has a long shape with one end connected to the fixed portion 111. The angular velocity detector 3021 has a long shape with one end connected to the central axis 101C. The angular velocity detector 3011 on the support beam 4 </ b> A side and the angular velocity detector 3011 on the central axis 101 </ b> C side are arranged at symmetrical positions via the fixing portion 111.

The angular velocity detectors 3011 and 3021 are alternately arranged along the Y-axis direction. At this time, the distance to the angular velocity detector 3021 on the second mass unit 20 side is set wider than the interval to the angular velocity detector 3021 on the third mass unit 300 side based on one angular velocity detector 3011. .

By configuring the angular velocity detectors 3011 and 3021 in such a structure, the angular velocity ω with the Z-axis direction (the direction orthogonal to the X-axis and the Y-axis) as an axis is applied to the sensor element 1 in a state of vibrating in the X-axis direction. When applied, the Coriolis force in the Y-axis direction is applied to the inner frame portion 101A of the first mass unit 10, and the capacitance between the angular velocity detectors 3011 and 3021 changes. By detecting this amount of change, the angular velocity ω can be detected. At this time, since the interval to the angular velocity detector 3021 on the second mass unit 20 side with respect to one angular velocity detector 3011 is different from the interval to the angular velocity detector 3021 on the third mass unit 300 side, the Y axis If Coriolis force is applied in the negative direction of the direction, the capacitance decreases, and if Coriolis force is applied in the positive direction in the Y-axis direction, the capacitance increases. Therefore, the direction of the angular velocity ω can also be detected.

Furthermore, the angular velocity detectors 3011 and 3021 are elongated in the X-axis direction, have a large area with respect to the Y-axis direction, and have a large area facing each other, so that the mechanical Q value in the acceleration application direction is reduced. be able to. Thereby, the damping effect with respect to acceleration detection can be obtained.

Next, the specific configuration of the second detection unit 12 will be described with reference to the drawings. FIG. 4 is an enlarged plan view showing the configuration of the second detection unit according to the embodiment of the present invention.

The second detector 12 includes a fixed part 121, acceleration detectors 202A2, 202B2, 202C2, 202D2, 202E2, 202F2, 202G2, 202H2, 202I2, 202J2, 202K2, 202L2, 202M2, 202N2, and acceleration detectors 204A2, 204B2. 204C2, 204D2, 204E2, 204F2, 204G2, 204H2, 204I2, and 204J2.

The fixing part 121 is arranged in the other internal space divided by the central axis 101C in the internal space of the inner frame part 101A. The fixed part 121 has a shape symmetrical with the fixed part 111 with respect to the Y axis passing through the center of gravity G.

The detector holders 201A2 and 201B2 connected to the fixed part 121 are symmetrical with the detector holders 201A1 and 201B1, respectively, with respect to the Y axis. The detector holding unit 2052 connected to the inner frame 103B has a shape symmetrical with the detector holding unit 2051 with respect to the Y axis.

The acceleration detectors 202A2 to 202N2 are roughly symmetrical with the acceleration detectors 202A1 to 202N1 with respect to the Y axis, respectively. The acceleration detectors 204A2 to 204J2 are roughly The acceleration detectors 204A1 to 204J1 are symmetrical with respect to the acceleration detectors 204A1 to 204J1, but the order of arrangement of the protrusions of the acceleration detectors 202A2 to 202N2 and the protrusions of the acceleration detectors 204A2 to 204J2 is the acceleration detection. The order of arrangement of the projections of the children 202A1 to 202N1 and the projections of the acceleration detectors 204A1 to J1 is not symmetrical with respect to the arrangement order, but is in the same order along the X-axis direction.

By configuring the acceleration detectors 202A2 to 202N2 and 204A2 to 204J2 as described above, acceleration detection signals having the same amplitude and the same phase as the acceleration detectors 202A1 to 202N1 and 204A1 to 204J1 can be obtained.

The arrangement group of the plurality of angular velocity detectors 3012 and 3022 is substantially symmetrical with the arrangement group of the plurality of angular velocity detectors 3011 and 3021 with respect to the Y axis, but the arrangement order along the arrangement direction is reversed. It is. By configuring the plurality of angular velocity detectors 3012 and 3022 as described above, an angular velocity detection signal having the same amplitude as that of the angular velocity detectors 3011 and 3021 can be obtained.

Next, a specific configuration of the third detection unit 13 will be described with reference to the drawings. FIG. 5 is an enlarged plan view showing the configuration of the third detection unit according to the embodiment of the present invention.

The third detector 13 includes a fixed portion 131, acceleration detectors 202A3, 202B3, 202C3, 202D3, 202E3, 202F3, 202G3, 202H3, 202I3, 202J3, 202K3, 202L3, 202M3, 202N3 and acceleration detectors 204A3, 204B3. 204C3, 204D3, 204E3, 204F3, 204G3, 204H3, 204I3, 204J3 are provided.

The fixed portion 131 is disposed in one internal space divided by the central axis 101D in the internal space of the inner frame portion 101B. The fixed portion 131 has a shape symmetrical with the fixed portion 111 with respect to the X axis passing through the center of gravity G.

The detector holders 201A3 and 201B3 connected to the fixed part 131 are symmetrical with the detector holders 201A1 and 201B1, respectively, with respect to the X axis. The detector holding unit 2053 connected to the inner frame portion 103D has a shape symmetrical with the detector holding unit 2051 with respect to the X axis.

The acceleration detectors 202A3 to 202N3 have a shape symmetrical with the acceleration detectors 202A1 to 202N1 with respect to the X axis. The acceleration detectors 204A3 to 204J3 have line-symmetric shapes with respect to the acceleration detectors 204A1 to 204J1, respectively, with respect to the X axis. The projections of the acceleration detectors 202A3 to 202N3 and the projections of the acceleration detectors 204A3 to 204J3 are the same as the projections of the acceleration detectors 202A1 to 202N1 and the projections of the acceleration detectors 204A1 to J1, respectively. Opposing in a state shifted in the X-axis direction.

By configuring the acceleration detectors 202A3 to 202N3 and 204A3 to 204J3 as described above, acceleration detection signals having the same amplitude and the same phase as the acceleration detectors 202A1 to 202N1 and 204A1 to 204J1 can be obtained.

The plurality of angular velocity detectors 3013 and 3023 have line-symmetric shapes with the plurality of angular velocity detectors 3011 and 3021, respectively, with respect to the X axis. By configuring the plurality of angular velocity detectors 3013 and 3023 as described above, an angular velocity detection signal having the same amplitude and the same phase as the angular velocity detectors 3011 and 3021 can be obtained.

Next, a specific configuration of the fourth detection unit 14 will be described with reference to the drawings. FIG. 6 is an enlarged plan view showing the configuration of the fourth detection unit according to the embodiment of the present invention.

The fourth detector 14 includes a fixed portion 141, acceleration detectors 202A4, 202B4, 202C4, 202D4, 202E4, 202F4, 202G4, 202H4, 202I4, 202J4, 202K4, 202L4, 202M4, 202N4 and acceleration detectors 204A4, 204B4. 204C4, 204D4, 204E4, 204F4, 204G4, 204H4, 204I4, 204J4 are provided.

The fixed portion 141 is disposed in the other internal space divided by the central axis 101D in the internal space of the inner frame portion 101B. The fixed portion 141 has a shape symmetrical to the fixed portion 113 with respect to the Y axis passing through the center of gravity G.

The detector holders 201A4 and 201B4 connected to the fixed part 141 have line-symmetric shapes with respect to the detector holders 201A3 and 201B3, respectively, with respect to the Y axis. The detector holding unit 2054 connected to the inner frame portion 103D has a shape symmetrical with the detector holding unit 2053 with respect to the Y axis.

The acceleration detectors 202A4 to 202N4 generally have a shape symmetrical with the acceleration detectors 202A3 to 202N3 with respect to the Y axis. The acceleration detectors 204A4 to 204J4 generally have a shape symmetrical to the acceleration detectors 204A3 to 204J3 with respect to the Y axis, but the protrusions of the acceleration detectors 202A4 to 202N4 and the acceleration detectors. The arrangement order of the projections 204A4 to 204J4 is not symmetrical with the arrangement order of the projections of the acceleration detectors 202A3 to 202N3 and the projections of the acceleration detectors 204A3 to J3, but along the X-axis direction. The order is the same.

By configuring the acceleration detectors 202A4 to 202N4 and 204A4 to 204J4 as described above, an acceleration detection signal having the same amplitude and the same phase as the acceleration detectors 202A3 to 202N3 and 204A3 to 204J3 can be obtained.

The arrangement group of the plurality of angular velocity detectors 3014 and 3024 is substantially symmetrical to the arrangement group of the plurality of angular velocity detectors 3013 and 3023 with respect to the Y axis, but the arrangement order along the arrangement direction is reversed. It is. By configuring the plurality of angular velocity detectors 3014 and 3024 in such a configuration, an angular velocity detection signal having the same amplitude as that of the angular velocity detectors 3013 and 3023 can be obtained.

Next, specific configurations of the drive unit 40 and the monitor unit 60 will be described with reference to the drawings. FIG. 7 is an enlarged plan view showing the configuration of the drive unit and the monitor unit according to the embodiment of the present invention. In FIG. 7, only the portions of the second drive unit 40 and the second monitor unit 60 that are close to the third detection unit 13 are enlarged and displayed. And the structure of a drive part and a monitor part is demonstrated to this part as an example. The basic detailed structure of each of the comb teeth adjacent to the other detectors (the first detector 11, the second detector 12, and the fourth detector 14) is comb teeth 43A, 44A, 43B described below. 44B, the description is omitted.

The plurality of comb teeth 43A are connected to the support member 42. The comb tooth portion 43A includes a shaft portion 431A and a plurality of tooth portions 432A. The shaft portion 431A has a long shape extending in the Y-axis direction. The plurality of tooth portions 432A are arranged at intervals along the axial direction of the shaft portion 431A. The plurality of tooth portions 432A are formed on the shaft portion 431A so as to protrude toward the comb tooth portion 44A.

The plurality of comb tooth portions 44A are connected to the outer frame portion 102B. The comb tooth portion 44A includes a shaft portion 441A and a plurality of tooth portions 442A. The shaft portion 441A has a long shape extending in the Y-axis direction. The plurality of tooth portions 442A are arranged at intervals along the axial direction of the shaft portion 441A. The plurality of tooth portions 442A are formed on the shaft portion 441A so as to protrude toward the comb tooth portion 43A.

In this configuration, the plurality of tooth portions 432A and the plurality of tooth portions 442A are alternately arranged in the Y-axis direction at intervals. At this time, the plurality of tooth portions 432A and the plurality of tooth portions 442A are arranged so that the surfaces orthogonal to the Y-axis direction face each other.

The plurality of comb teeth 43B are connected to the support member 42. The comb tooth portion 43B includes a shaft portion 431B and a plurality of tooth portions 432B. The shaft portion 431B has a long shape extending in the Y-axis direction. The plurality of tooth portions 432B are arranged at intervals along the axial direction of the shaft portion 431B. The plurality of tooth portions 432B are formed on the shaft portion 431B so as to protrude toward the comb tooth portion 44B.

The plurality of comb teeth portions 44B are connected to the fourth mass portion 400. The comb tooth portion 44B includes a shaft portion 441B and a plurality of tooth portions 442B. The shaft portion 441B has a long shape extending in the Y-axis direction. The plurality of tooth portions 442B are arranged at intervals along the axial direction of the shaft portion 441B. The plurality of tooth portions 442B are formed on the shaft portion 441B so as to protrude toward the comb tooth portion 43B.

In this configuration, the plurality of tooth portions 432B and the plurality of tooth portions 442B are alternately arranged in the Y-axis direction at intervals. At this time, the plurality of tooth portions 432B and the plurality of tooth portions 442B are arranged so that the surfaces orthogonal to the Y-axis direction face each other.

When a drive signal is applied to the drive unit 40 having such a configuration, the comb- tooth portions 43A and 44A are attracted or separated along the X-axis direction according to the amplitude of the drive signal, and the comb-tooth portion 43B. 44B are attracted or separated along the X-axis direction. The movement between the comb teeth 43A and 44A and the movement between the comb teeth 43B and 44B are the same.

Thereby, the fourth mass unit 400 and the second mass unit 20 vibrate in the opposite phases in the X-axis direction. The same operation also occurs in the third mass unit 300 and the first mass unit 10. At this time, the support beams 4A and 4B are distorted by setting the vibration of the third mass unit 300, the vibration of the fourth mass unit 400, and the vibration of the first mass unit 10 and the vibration of the second mass unit 20 to opposite phases. The first mass unit 10 vibrates in phase with the fourth mass unit 400, and the second mass unit 20 vibrates in phase with the third mass unit 300. In this way, vibration along the X-axis direction can be applied to the first mass unit 10 and the second mass unit 20.

The plurality of comb tooth portions 61 are connected to the fourth mass portion 400. The comb tooth portion 61 includes a shaft portion 611 and a plurality of tooth portions 612. The shaft portion 611 has a long shape extending in the Y-axis direction. The plurality of tooth portions 612 are arranged at intervals along the axial direction of the shaft portion 611. The plurality of tooth portions 612 are formed on the shaft portion 611 so as to protrude toward the comb tooth portion 62 side.

The plurality of comb teeth portions 62 are connected to the fixed portion 600. The comb tooth portion 62 includes a shaft portion 621 and a plurality of tooth portions 622. The shaft portion 621 has a long shape extending in the Y-axis direction. The plurality of tooth portions 622 are arranged at intervals along the axial direction of the shaft portion 621. The plurality of tooth portions 622 are formed on the shaft portion 621 so as to protrude toward the comb tooth portion 61 side.

In this configuration, the plurality of tooth portions 612 and the plurality of tooth portions 622 are arranged alternately at intervals in the Y-axis direction. At this time, the plurality of tooth portions 612 and the plurality of tooth portions 622 are arranged so that the surfaces orthogonal to the Y-axis direction face each other.

In such a configuration, when a drive signal is applied to the drive unit 40 and the fourth mass unit 400 vibrates, the distance between the comb- tooth portions 61 and 62 changes, and the capacitance changes. The drive signal can be monitored by detecting this change in capacitance.

The sensor element 1 having the above configuration functions as a composite sensor when combined with a detection IC 8 shown below, and detects angular velocity and acceleration separately. FIG. 8 is a block diagram showing the configuration of the composite sensor according to the embodiment of the present invention.

The composite sensor includes a sensor element 1 and a detection IC 8. Although the sensor element 1 is mechanically configured as described above, the circuit includes the first detection unit 11, the second detection unit 12, the third detection unit 13, the fourth detection unit 14, the first drive unit 30, the first 2 drive part 40, the 1st monitor part 50, and the 2nd monitor part 60 are comprised. The first detection unit 11, the second detection unit 12, the third detection unit 13, the fourth detection unit 14, the first drive unit 30, the second drive unit 40, the first and second monitor units 50 and 60 are variable. It consists of a capacitive element. The first detection unit 11, the second detection unit 12, the third detection unit 13, the fourth detection unit 14, the first drive unit 30, the second drive unit 40, and the first and second monitor units 50 and 60 are connected in common. The terminal to be connected is connected to the ground. This ground is also connected to the ground of the detection IC 8.

The detection IC 8 includes a control unit 80, a filter 81, a driving non-inverting amplifier 82A, a driving inverting amplifier 82B, monitoring amplifiers 83A and 83B, a differential amplifier 840, a filter 84, a phase shifter 85, amplifiers 91A and 91B, and addition. And a subtractor 93, filters 94A and 94B, detectors 95A and 95B, output circuits 96A and 96B, and output terminals OUTa and OUTω. A drive voltage Vcc is applied to the detection IC 8.

The control unit 80 generates an alternating drive voltage signal and outputs it to the filter 81. At this time, the control unit 80 drives the drive voltage signal so that the vibration amplitude of each mass part of the sensor element 1 becomes a specified value according to the voltage value of the monitor voltage signal output from the filter 84 formed of a high-pass filter. Set the voltage value of.

The filter 81 is formed of, for example, a low-pass filter, and in combination with the high-pass filter 84, functions as a band-pass filter that selectively passes the element vibration frequency (for example, noise cut), and the phase of the monitor output is approximately 90. The output is output to the driving non-inverting amplifier 82A and the driving inverting amplifier 82B with a delay.

The driving non-inverting amplifier 82A amplifies the driving voltage signal with a predetermined gain and outputs the amplified signal to the driving unit 30. The drive inverting amplifier 82B amplifies the drive voltage signal with a predetermined gain (the same gain as that of the drive non-inverting amplifier 82B), and outputs the amplified signal to the drive unit 40. Note that the gain of the driving non-inverting amplifier 82A and the driving inverting amplifier 82B may be 1, and in this case, the driving non-inverting amplifier 82A and the driving inverting amplifier 82B are synchronized with the driving units 30 and 40. Functions as a buffer circuit for inputting a driving voltage signal having a reverse phase.

When drive voltage signals having phases opposite to each other are applied to the drive unit 30 and the drive unit 40, as described above, the first mass unit 10, the second mass unit 20, the third mass unit 300, and the fourth mass unit. The part 400 vibrates in the X axis direction.

The electrostatic capacity of the first and second monitor units 50 and 60 changes due to this vibration. At this time, the polarities of the two capacitance changes are different from each other. The capacitance changes of the first and second monitor units 50 and 60 are input to the amplifiers 83A and 83B. The amplifiers 83A and 83B are capacitance / voltage conversion circuits (so-called C / V circuits) and output monitor voltage signals corresponding to the capacitance. The two monitor voltage signals are added by the differential amplifier 840. Thereby, the amplitude of the monitor signal can be increased. The monitor signal that is added to form one signal is input to the filter 84. The monitor signal filtered by the filter 84 is fed back to the control unit 80 and output to the detector 95A and the phase shifter 85.

The phase shifter 85 delays the phase of the monitor voltage signal by 90 ° and outputs it to the detector 95B.

Here, when an angular velocity around the Z-axis or acceleration in the Y-axis direction is applied to the sensor element 1, each acceleration of the first detection unit 11, the second detection unit 12, the third detection unit 13, and the fourth detection unit 14. The capacitances of the detection unit and each angular velocity detection unit change.

With the above-described configuration, the capacitance changes of the first detection unit 11 and the third detection unit 13 due to application of angular velocity or acceleration are the same. The first detection unit 11 and the third detection unit 13 are connected by electrodes outside the sensor element. Therefore, the capacitance change obtained by adding the capacitance change of the first detection unit 11 and the capacitance change of the third detection unit 13 is twice that of the first or third detection unit 11 or 13. A change in capacitance can be obtained. The capacitance changes of the first and third detectors 11 and 13 are input to the amplifier 91A. The amplifier 91A is a capacitance / voltage conversion circuit (so-called C / V circuit) and outputs a first detection signal corresponding to the capacitance. The first detection signal is output to the adder 92 and the subtracter 93.

With the above-described configuration, the capacitance changes of the second detection unit 12 and the fourth detection unit 14 due to application of angular velocity or acceleration are the same. The second detection unit 12 and the fourth detection unit 14 are connected by electrodes outside the sensor element. Therefore, the capacitance change obtained by adding the capacitance change of the second detection unit 12 and the capacitance change of the fourth detection unit 14 is 2 of either the second or fourth detection unit 12 or 14. Double capacitance change is obtained. The capacitance changes of the second and fourth detection units 12 and 14 are input to the amplifier 91B. The amplifier 91B is a capacitance / voltage conversion circuit (so-called C / V circuit) and outputs a second detection signal corresponding to the capacitance. The second detection signal is output to the adder 92 and the subtracter 93.

The adder 92 adds the first detection signal and the second detection signal, and outputs the result to the filter 94A. The subtractor 93 calculates the difference between the first detection signal and the second detection signal and outputs the difference to the filter 94B.

The filter 94A is composed of, for example, a high-pass filter, filters the added signal, and outputs it to the detector 95A. The filter 94B is composed of, for example, a high-pass filter, filters the difference signal (subtraction signal), and outputs the filtered signal to the detector 95B.

The detector 95A synchronously detects the addition signal with the monitor voltage signal and outputs the first detection signal to the output circuit 96A. The output circuit 96A includes an amplitude adjustment circuit and a low-pass filter, performs predetermined processing on the first detection signal, and outputs it to the output terminal OUTa.

The detector 95B synchronously detects the addition signal with the monitor voltage signal and outputs the second detection signal to the output circuit 96B. The output circuit 96B has the same circuit configuration as the output circuit 96A and includes an amplitude adjustment circuit and a low-pass filter. The output circuit 96B performs predetermined processing on the second detection signal and outputs the second detection signal to the output terminal OUTω.

When the sensor element 1 of the composite sensor having such a configuration vibrates in the X-axis direction, when the angular velocity ω around the Z-axis or the acceleration a in the Y-axis direction is applied, the following effect is obtained.

FIG. 9 is a diagram showing the behavior when the angular velocity ω is applied to the sensor element according to the embodiment of the present invention. FIG. 9A shows a state in which the drive voltage signal is not applied, and FIGS. 9B and 9C show a state in which the drive voltage signal is applied. FIG. 9B shows that the first mass unit 10 and the fourth mass unit 400 move in the positive direction of the X-axis direction, and the second mass unit 20 and the third mass unit 300 move in the negative direction of the X-axis direction. Indicates the state of exercising. FIG. 9C shows that the first mass unit 10 and the fourth mass unit 400 move in the negative direction of the X-axis direction, and the second mass unit 20 and the third mass unit 300 move in the positive direction of the X-axis direction. Indicates the state of exercising.

As described above, when a driving voltage signal having a reverse phase is applied to the driving unit 30 and the driving unit 40, as shown in FIG. 9B, the adjacent mass units constantly vibrate so as to move in the opposite direction of the X axis. To do. In such a state, when an angular velocity ω around the Z axis is applied, as shown in the first mass unit 10 and the second mass unit 20 in FIG. A positive Coriolis force in the Y-axis direction is applied to the mass part, and the mass part is displaced in the positive direction in the Y-axis direction and moved in the positive direction in the X-axis direction. The negative direction Coriolis force is applied, and the negative direction of the Y-axis is displaced. As a result, the electrostatic capacity decreases in the angular velocity detectors 113 and 133 in the first and second mass units 10 and 20, and the electrostatic capacity increases in the angular velocity detectors 123 and 143. Each angular velocity detecting unit 113, 133 is electrically connected outside the sensor element before circuit input. Similarly, the angular velocity detection units 123 and 143 are also electrically connected outside the sensor element before circuit input.

Therefore, regardless of the vibration state, the capacitance change of the angular velocity detection units 113 and 133 in the first and second mass units 10 and 20 and the capacitance change of the angular velocity detection units 123 and 143 are added. In the first detection signal, the change in capacitance between the two is opposite to each other and cancels out, so that the change in capacitance due to the angular velocity ω becomes zero.

On the other hand, regardless of the vibration state, the difference in capacitance between the angular velocity detectors 113 and 133 in the first and second mass units 10 and 20 is different from the capacitance change in the angular velocity detectors 123 and 143. In the second detection signal, the capacitance change between the two is added, so that the capacitance change due to the angular velocity ω is doubled.

FIG. 11 is a waveform diagram of each signal when only the angular velocity ω is applied to the sensor element 1 according to the embodiment of the present invention. In addition, the 1st output of FIG. 11 converts into a voltage the electrostatic capacitance change of each angular velocity detection part 113,133 in the 1st, 2nd mass parts 10 and 20. FIG. The second output is obtained by voltage-converting the capacitance change of the angular velocity detection units 123 and 143 in the first and second mass units 10 and 20. As shown in FIG. 11, the first output and the second output are always in reverse phase. Therefore, a signal obtained by adding the first output and the second output, that is, the first detection signal is a signal obtained by canceling the first output and the second output, and OUT1 (addition output) becomes 0 (or a reference potential). . On the other hand, a signal obtained by subtracting the first output and the second output, that is, the second detection signal is a signal obtained by adding the first output and the second output, and OUT2 (addition output) is the first output or the second output. Doubled. Thereby, the angular velocity ω can be detected by the second detection signal. At this time, since the amplitude increases, the angular velocity ω can be detected reliably and accurately.

FIG. 10 is a diagram showing the behavior when the acceleration a is applied to the sensor element according to the embodiment of the present invention. FIG. 10A shows a state in which the drive voltage signal is not applied, and FIGS. 10B and 10C show a state in which the drive voltage signal is applied. FIG. 10B shows that the first mass unit 10 and the fourth mass unit 400 move in the positive direction of the X-axis direction, and the second mass unit 20 and the third mass unit 300 move in the negative direction of the X-axis direction. Indicates the moved state. FIG. 10C shows that the first mass unit 10 and the fourth mass unit 400 move in the negative direction of the X-axis direction, and the second mass unit 20 and the third mass unit 300 move in the positive direction of the X-axis direction. Indicates the moved state.

As described above, when a driving voltage signal having an opposite phase is applied to the driving unit 30 and the driving unit 40, as shown in FIGS. 10 (B) and 10 (C), the adjacent mass units are always in the reverse direction of the X axis. Vibrate to move to. In such a state, when an acceleration a in the positive direction in the Y-axis direction is applied, as shown in the first mass unit 10 and the second mass unit 20 in FIG. Both the mass part moving in the direction and the mass part moving in the negative direction of the X-axis direction are displaced in the positive direction of the Y-axis direction. Thereby, in each acceleration detection part 112,122,132,142 in the 1st, 2nd mass parts 10 and 20, the space | interval of the one side of each conductor part to protrude decreases, and the space | interval of an other side increases. The capacitance changes in synchronization with the monitor signal. At this time, the phases of the acceleration detectors 112, 122, 132, 142 are all equal. Each acceleration detector 112, 132 is electrically connected outside the sensor element before circuit input. Similarly, the acceleration detection units 122 and 142 are also electrically connected outside the sensor element before circuit input.

On the other hand, when the acceleration a in the negative direction in the Y-axis direction is applied, the mass part that is moving in the positive direction in the X-axis direction and the mass part that is moving in the negative direction in the X-axis direction are Displacement in the negative direction. Thereby, in each acceleration detection part 112,122,132,142 in the 1st, 2nd mass parts 10 and 20, the space | interval on one side of each protruding conductor part increases, and the space | interval on the opposite side decreases. The capacitance changes in synchronization with the monitor signal. At this time, the phases of the acceleration detectors 112, 122, 132, 142 are all equal.

Therefore, regardless of the vibration state, the capacitance change of the acceleration detection units 112 and 132 in the first and second mass units 10 and 20 and the capacitance change of the acceleration detection units 122 and 142 are added. In the first detection signal, the phase of both is equal, and the capacitance change due to the acceleration a is doubled by adding the capacitance change.

On the other hand, regardless of the vibration state, the difference in capacitance between the acceleration detection units 112 and 132 in the first and second mass units 10 and 20 is different from the capacitance change in the acceleration detection units 122 and 142. In the second detection signal, the change in capacitance between the two cancels out, and the change in capacitance due to acceleration a becomes zero.

FIG. 12 is a waveform diagram of each signal when only the acceleration a is applied to the sensor element 1 according to the embodiment of the present invention. Note that the first output in FIG. 12 is obtained by voltage-converting the capacitance change of each acceleration detection unit 112, 132 in the first and second mass units 10, 20, and the second output is the first, The capacitance change of each acceleration detection part 122,142 in the 2nd mass part 10,20 is voltage-converted.

As shown in FIG. 12, the first output and the second output are always in phase. Therefore, a signal obtained by adding the first output and the second output, that is, the first detection signal is a signal obtained by adding the first output and the second output, and OUT1 (addition output) is the first output or the second output. Twice as much. On the other hand, a signal obtained by subtracting the first output and the second output, that is, the second detection signal is a signal obtained by canceling the first output and the second output, and OUT2 (addition output) is 0 (or reference potential). Become. Thereby, the acceleration a can be detected by the first detection signal. At this time, since the amplitude increases, the acceleration a can be detected reliably and accurately.

In the above-described configuration, the capacitance change obtained from the first detection unit 11 and the third detection unit 13 and the capacitance change obtained from the second detection unit 12 and the fourth detection unit 14 are both accelerations. The component due to a and the component due to angular velocity ω are mixed. However, through the above-described adder 92 and subtracter 93, the component caused by the acceleration a and the component caused by the angular velocity ω can be reliably separated and output.

Further, by utilizing the fact that the change in capacitance due to the angular velocity ω is 90 ° out of phase with respect to the drive voltage signal, and performing the synchronous detection with the 90 ° out of phase, the signal due to the acceleration a and the angular velocity The signal by ω can be detected and output more reliably.

FIG. 13 is a waveform diagram of each signal when acceleration a and angular velocity ω are applied to the sensor element 1 according to the embodiment of the present invention. In addition, the 1st output of FIG. 13 converts the electrostatic capacitance change of each acceleration detection part 112,132 and each angular velocity detection part 113,133 in the 1st, 2nd mass parts 10 and 20, into voltage, The second output is obtained by voltage-converting the capacitance changes of the acceleration detection units 122 and 142 and the angular velocity detection units 123 and 143 in the first and second mass units 10 and 20. Here, the case where the capacitance change due to the acceleration a and the capacitance change due to the angular velocity ω are the same is shown.

As shown in FIG. 13, the first output and the second output have a predetermined phase shift with respect to the drive voltage signal according to the ratio of the capacitance change due to the acceleration a and the capacitance change due to the angular velocity ω. . However, only a component due to acceleration a remains in OUT1 (addition output), and only a component due to angular velocity ω remains in OUT2 (difference output).

In the sensor element 1 of the composite sensor of the present embodiment, the influence on the acceleration detection capacitance that occurs when the vibration amount (displacement) in the X-axis direction becomes excessive is suppressed by the following principle. can do.

FIG. 14 is a partial plan view showing a more specific structure of the movable-side acceleration detector and the fixed-side acceleration detector. 15, 16, and 17 are enlarged views of both ends of the movable-side acceleration detector in the X-axis direction. FIG. 15 shows a case where the amount of displacement Δx in the X-axis direction is zero. FIG. 16 shows when the displacement amount Δx in the X-axis direction is + W. FIG. 17 shows the time when the amount of displacement Δx in the X-axis direction is −W.

14, 15, 16, and 17 show a set of the movable-side acceleration detector 204D1 and the acceleration detector 204F1, and the fixed-side acceleration detectors 202E1, 202F1 and the acceleration detectors 202H1, 202I1. Although a set is shown, other sets operate on a similar principle.

A detection base portion 240D1 of the movable acceleration detector 204D1 is formed on one side (−X axis direction) along the X axis direction of the movable detector holding portion 2051 extending in the Y axis direction. The detection base 240D1 has a long shape extending in the X-axis direction. The detection base 240D1 corresponds to the “movable side detection base” of the present invention.

A plurality of protrusions 241D1 projecting in the direction of the detection base 220E1 are formed on the side of the detection base 220E1 side of the movable detection base 240D1. The plurality of protrusions 241D1 correspond to “movable-side first protrusions”. The plurality of protrusions 241D1 have a length (width) in the X-axis direction of 2W. The plurality of protrusions 241D1 are arranged at predetermined intervals along the longitudinal direction (X-axis direction) of the detection base 240D1. This interval is set longer than the width 2W of the protrusion 241D1.

A plurality of protrusions 242D1 protruding in the direction of the detection base 220F1 are formed on the side of the movable detection base 240D1 on the detection base 220F1 side. The plurality of protrusions 242D1 correspond to “movable side second protrusions”. The plurality of protrusions 242D1 have a length (width) in the X-axis direction of 2W. The plurality of protrusions 242D1 are arranged at predetermined intervals along the longitudinal direction (X-axis direction) of the detection base 240D1. This interval is set longer than the width 2W of the protrusion 242D1, and is the same as the arrangement interval of the protrusions 241D1. Further, the plurality of protrusions 242D1 are arranged so as to be shifted in the X-axis direction by a length that is half the width of the protrusions 241D1242D2 with respect to the plurality of protrusions 241D1. In other words, the protrusions 241D1 and 242D1 that partially face each other via the detection base 240D1 have a center position in the X-axis direction that is half the width of the protrusions 241D1 and 242D2 in the X-axis direction. They are offset.

A capacitance forming portion 243D1 is formed at the end of the movable side detection base 240D1 opposite to the detector holding portion 2051 in the longitudinal direction. The capacitance forming portion 243D1 faces the inner frame 101A at a distance D34D. Further, the capacitance forming portion 243D1 is formed so that the area (opposed area) S3D viewed in the X-axis direction is wider than the detection base portion 240D1. More specifically, the length of the capacitance forming portion 243D1 in the Y-axis direction is longer than the length of the detection base portion 240D1 in the Y-axis direction. The thickness of the capacitance forming portion 243D1 (the length in the direction orthogonal to the X-axis direction and the Y-axis direction) is the same as the thickness of the detection base portion 240D1. The capacitance forming portion 243D1 is integrally formed with the detection base portion 240D1.

The detection base 220E1 of the fixed-side acceleration detector 202E1 is disposed on one side (negative direction in the Y-axis direction) in the Y-axis direction of the detection base 240D1. The detection base 220E1 also has a long shape extending in the X-axis direction. The fixed-side detection base 220E1 is disposed away from the movable-side detection base 240D1.

A plurality of protrusions 222E1 protruding in the direction of the detection base 240D1 are formed on the side of the detection base 240D1 side of the detection base 220E1 on the fixed side. The plurality of protrusions 222E1 correspond to “fixed-side first protrusions”. The plurality of protrusions 222E1 have a length (width) in the X-axis direction of 2W. The plurality of protrusions 222E1 are arranged at predetermined intervals along the longitudinal direction (X-axis direction) of the detection base 220E1. This interval is set longer than the width 2W of the protrusion 222E1, and is the same as the arrangement interval of the protrusions 241D1.

The plurality of protrusions 222E1 are arranged so that only the width W faces the plurality of protrusions 241D1 in the X-axis direction. In other words, the protrusion 222E1 and the protrusion 241D1 facing each other are arranged such that the center position in the X-axis direction is shifted in the X-axis direction by a length that is half the width of the protrusions 241D1 and 222E1. Further, the positions of the plurality of protrusions 222E1 and the protrusions 242D1 in the X-axis direction are the same. Further, the plurality of protrusions 222E1 are arranged so as to have a distance D12 along the Y-axis direction with respect to the plurality of protrusions 241D1.

The detection base 220F1 of the fixed-side acceleration detector 202F1 is disposed on the other side in the Y-axis direction (positive direction in the Y-axis direction) of the detection base 240D1. The detection base 220F1 also has a long shape extending in the X-axis direction. The stationary-side detection base 220F1 is disposed away from the movable-side detection base 240D1.

A plurality of protrusions 221F1 projecting in the direction of the detection base 240D1 are formed on the detection base 240D1 side of the fixed detection base 220F1. The plurality of protrusions 221F1 correspond to “fixed-side second protrusions”. The plurality of protrusions 221F1 have a length (width) in the X-axis direction of 2W. The plurality of protrusions 221F1 are arranged at predetermined intervals along the longitudinal direction (X-axis direction) of the detection base 220F1. This interval is set longer than the width 2W of the protruding portion 221F1, and is the same as the arrangement interval of the protruding portion 242D1.

The plurality of protrusions 221F1 are arranged so that only the width W faces the plurality of protrusions 242D1 in the X-axis direction. In other words, the protruding portion 221F1 and the protruding portion 242D1 facing each other are arranged such that the center position in the X-axis direction is shifted in the X-axis direction by a length that is half the width of the protruding portions 242D1 and 222F1. Further, the positions of the plurality of protrusions 221F1 and the protrusions 241D1 in the X-axis direction are the same. Further, the plurality of protrusions 222F1 are arranged so as to have a distance D12 along the Y-axis direction with respect to the plurality of protrusions 242D1.

With such a configuration, the width of the facing surface between the movable-side protrusion 241D1 and the fixed-side protrusion 222E1 is W, the facing area is S1D1, and the facing distance is D12. A capacitance C1D1 is formed. Further, the width of the facing surface between the movable-side protrusion 242D1 and the fixed-side protrusion 221F1 is W, the facing area is S2D1 (= S1D1), and the facing distance is D12. Capacitance) C2D1 (= C1D1) is formed. Further, the area of the facing surface between the capacitance forming portion 243D1 and the inner frame 101A is S3D, and the distance between the facing surfaces is D34D, thereby forming a capacitance C3D1.

Since these capacitances C1D1, C2D1, and C3D1 are electrically connected by the inner frame 101A, the capacitance C1D1 is interposed between the movable acceleration detector 204D1 and the fixed acceleration detectors 220E1 and 220F1. , C2D1 and C3D1 are combined to generate a combined capacitance (synthetic capacitance).

On the other side (positive direction in the X-axis direction) along the X-axis direction of the movable-side detector holding part 2051 extending in the Y-axis direction, a detection base 240F1 of the movable-side acceleration detector 204F1 is formed. Yes. The detection base 240F1 has a long shape extending in the X-axis direction. The detection base 240F1 corresponds to the “movable side detection base” of the present invention.

A plurality of projections 241F1 projecting in the direction of the detection base 220H1 are formed on the side of the detection base 220H1 side of the movable detection base 240F1. The plurality of protrusions 241F1 correspond to “movable-side first protrusions”. The plurality of protrusions 241F1 have a length (width) in the X-axis direction of 2W. The plurality of protrusions 241F1 are arranged at predetermined intervals along the longitudinal direction (X-axis direction) of the detection base 240F1. This interval is set longer than the width 2W of the protrusion 241F1.

A plurality of protrusions 242F1 projecting in the direction of the detection base 220I1 are formed on the side of the detection base 220I1 side of the movable detection base 240F1. The plurality of protrusions 242F1 correspond to “movable side second protrusions”. The plurality of protrusions 242F1 have a length (width) in the X-axis direction of 2W. The plurality of protrusions 242F1 are arranged at predetermined intervals along the longitudinal direction (X-axis direction) of the detection base 240F1. This interval is set longer than the width 2W of the protrusion 242F1, and is the same as the arrangement interval of the protrusions 241F1. Furthermore, the plurality of protrusions 242F1 are arranged so as to be shifted in the X-axis direction by a length that is half the width of the protrusions 241F1 and 242F2 with respect to the plurality of protrusions 241F1. In other words, the protrusions 241F1 and 242F1 that partially face each other via the detection base 240F1 have a center position in the X-axis direction that is half the width of the protrusions 241F1 and 242F2 in the X-axis direction. They are offset.

A capacitance forming portion 243F1 is formed at the end of the movable detection base 240F1 on the opposite side to the detector holding portion 2051 in the longitudinal direction. The capacitance forming portion 243F1 is opposed to the inner frame 101A at a distance D34F. The interval D34F is the same as the interval D34D. The capacitance forming portion 243F1 is formed so that the area S3F viewed in the X-axis direction is wider than the detection base portion 240F1. The area S3F is the same as the area S3D. More specifically, the length of the capacitance forming portion 243F1 in the Y-axis direction is longer than the length of the detection base portion 240F1 in the Y-axis direction. The thickness of the capacitance forming portion 243F1 (the length in the direction orthogonal to the X-axis direction and the Y-axis direction) is the same as the thickness of the detection base portion 240F1. The capacitance forming portion 243F1 is integrally formed with the detection base portion 240F1.

The detection base 220H1 of the fixed-side acceleration detector 202H1 is disposed on one side in the Y-axis direction of the detection base 240F1 (negative direction in the Y-axis direction). The detection base 220H1 also has a long shape extending in the X-axis direction. The fixed-side detection base 220H1 is disposed away from the movable-side detection base 240F1.

A plurality of protrusions 222H1 projecting in the direction of the detection base 240F1 are formed on the detection base 240F1 side of the fixed detection base 220H1. The plurality of protrusions 222H1 correspond to “fixed-side first protrusions”. The plurality of protrusions 222H1 has a length (width) in the X-axis direction of 2W. The plurality of protrusions 222H1 are arranged at predetermined intervals along the longitudinal direction (X-axis direction) of the detection base 220H1. This interval is set longer than the width 2W of the protrusion 222H1, and is the same as the arrangement interval of the protrusions 241F1.

The plurality of protrusions 222H1 are arranged so that only the width W faces the plurality of protrusions 241F1 in the X-axis direction. In other words, the protrusion 222H1 and the protrusion 241F1 facing each other are arranged such that the center position in the X-axis direction is shifted in the X-axis direction by a length that is half the width of the protrusions 241F1 and 222H1. Further, the positions of the plurality of protrusions 222H1 and the protrusions 242F1 in the X-axis direction are the same. Further, the plurality of protrusions 222H1 are arranged so as to have a distance D12 along the Y-axis direction with respect to the plurality of protrusions 241F1.

The detection base 220I1 of the fixed-side acceleration detector 202I1 is disposed on the other side (positive direction in the Y-axis direction) in the Y-axis direction of the detection base 240F1. The detection base 220I1 also has a long shape extending in the X-axis direction. The fixed-side detection base 220I1 is disposed away from the movable-side detection base 240F1.

A plurality of protrusions 221I1 projecting in the direction of the detection base 240F1 are formed on the side of the detection base 220F1 on the fixed side on the detection base 240F1 side. The plurality of protrusions 221I1 correspond to “fixed-side second protrusions”. The plurality of protrusions 221I1 have a length (width) in the X-axis direction of 2W. The plurality of protrusions 221I1 are arranged at predetermined intervals along the longitudinal direction (X-axis direction) of the detection base 220I1. This interval is set to be longer than the width 2W of the protrusion 221I1, and is the same as the arrangement interval of the protrusions 242F1.

The plurality of protrusions 221I1 are arranged so that only the width W faces the plurality of protrusions 242F1 in the X-axis direction. In other words, the protruding portion 221I1 and the protruding portion 242F1 facing each other are arranged such that the center position in the X-axis direction is shifted in the X-axis direction by half the width of the protruding portions 242F1 and 222I1. Further, the positions of the plurality of protrusions 221I1 and the protrusion 241F1 in the X-axis direction are the same. Further, the plurality of protrusions 222I1 are arranged so as to have a distance D12 along the Y-axis direction with respect to the plurality of protrusions 242F1.

With such a configuration, the width of the facing surface between the movable-side protrusion 241F1 and the fixed-side protrusion 222H1 is W, the facing area is S1F1, and the facing distance is D12. A capacitance C1F1 is formed. Further, since the width of the facing surface between the movable protrusion 242F1 and the fixed protrusion 221I1 is W, the facing area is S2F1 (= S1F1), and the facing distance is D12, the capacitance ( Capacitance) C2F1 (= C1F1) is formed. Further, the area of the facing surface between the capacitance forming portion 243F1 and the inner frame 101A is S3F, and the distance between the facing surfaces is D34F (= D34D), thereby forming a capacitance (capacitance) C3F1.

Since these electrostatic capacitances C1F1, C2F1, and C3F1 are conducted by the inner frame 101A, the electrostatic capacitance C1F1 is interposed between the movable acceleration detector 204F1 and the fixed acceleration detectors 220H1 and 220I1. , C2F1 and C3F1 are combined to generate a combined capacitance (synthetic capacitance). The combined capacitances of the capacitances C1F1, C2F1, and C3F1 and the combined capacitances of the above-described capacitances C1D1, C2D1, and C3D1 are also added to obtain a further combined capacitance.

With such a configuration, when vibration is applied in the X-axis direction, the combined capacitance changes as follows.

First, when the acceleration detectors 240D1 and 240F1 are displaced in the positive direction of the X-axis direction, the opposing area between the protrusion 241D1 and the protrusion 222E1 increases, so that the capacitance between the protrusions 241D1222E1 is To increase. On the other hand, the facing area between the protrusion 242D1 and the protrusion 221F1 decreases, and the capacitance between the protrusion 242D1 and the protrusion 221F1 decreases. Similarly, when the acceleration detector 240D1240F1 is displaced in the positive direction of the X-axis direction, the opposing area between the protrusion 241F1 and the protrusion 222H1 increases, so that the capacitance between the protrusions 241F1 and 222H1 is increased. Will increase. On the other hand, the facing area between the protrusion 242F1 and the protrusion 221I1 decreases, and the capacitance between the protrusion 242F1 and the protrusion 221I1 decreases. And the change of the synthetic | combination electrostatic capacitance by vibration is canceled by the synthesis | combination of these electrostatic capacitances.

Here, as shown in FIG. 16, when the acceleration detectors 240D1 and 240F1 are displaced in the positive direction of the X axis and the displacement amount is W, the protrusion 241D1 and the protrusion 222E1 face each other with a full width of 2W. Thus, the opposing area becomes the maximum value S1D1 ′, the electrostatic capacitance becomes the maximum value C1D1 ′, and the protruding portion 242D1 and the protruding portion 221F1 do not face each other, and no electrostatic capacitance is generated. Similarly, when the acceleration detectors 240D1 and 240F1 are displaced in the positive direction of the X axis and the displacement amount is W, the protrusion 241F1 and the protrusion 222H1 face each other with a full width of 2W, and the facing area is the maximum value. The capacitance becomes S1F1 ′, and the electrostatic capacitance becomes the maximum value C1F1 ′, and the protruding portion 242F1 and the protruding portion 221I1 are not opposed to each other, and the electrostatic capacitance is not generated.

Up to this point, the combined capacitance due to the protrusions of the acceleration detectors 240D1 and 240F1 does not change.

Then, when the acceleration detectors 240D1 and 240F1 are further displaced in the positive direction of the X-axis and the displacement amount exceeds W, the capacitance by the protrusion 241D1 and the protrusion 222E1, and the protrusion 241F1 and protrusion The capacitance due to the portion 222H1 decreases, and the combined capacitance due to the protrusions of the acceleration detectors 240D1 and 240F1 also decreases.

On the other hand, as shown in FIG. 17, when the acceleration detectors 240D1 and 240F1 are displaced in the negative direction of the X axis and the displacement amount is W, the protrusion 242D1 and the protrusion 221F1 face each other with a full width of 2W. Thus, the opposing area becomes the maximum value S2D1 ″, the electrostatic capacitance becomes the maximum value C2D1 ″, and the protruding portion 241D1 and the protruding portion 222E1 do not face each other, so that no electrostatic capacitance is generated. Similarly, when the acceleration detectors 240D1 and 240F1 are displaced in the negative direction in the X-axis direction and the displacement amount is W, the protrusion 242F1 and the protrusion 221I1 face each other with a total width of 2W and the facing area is the maximum value. S2F1 "is reached, and the electrostatic capacitance reaches the maximum value C2F1", and the protruding portion 241F1 and the protruding portion 222H1 do not face each other, so that no electrostatic capacitance is generated.

Up to this point, the combined capacitance due to the protrusions of the acceleration detectors 240D1 and 240F1 does not change.

If the acceleration detectors 240D1 and 240F1 are further displaced in the negative direction of the X-axis and the displacement amount exceeds W, the electrostatic capacitance by the protrusion 242D1 and the protrusion 221F1, and the protrusion 242F1 and the protrusion The capacitance due to the portion 221I1 decreases, and the combined capacitance due to the protrusions of the acceleration detectors 240D1 and 240F1 also decreases.

Here, when the absolute value of the displacement in the X-axis direction is within W, the capacitance forming portions 243D1 and 243F1 have their capacitances C3D1 and C3F1 sufficiently higher than the capacitance due to the above-described protrusions. It is set to be smaller. Further, when the absolute value of the displacement in the X-axis direction becomes larger than W, a change can be given to the combined capacitance with the capacitance due to the above-described protrusions by the capacitances C3D1 and C3F1. Is set to More specifically, the amount of change in the capacitances C3D1 and C3F1 that increases when the absolute value of the displacement in the X-axis direction becomes larger than W is the acceleration detector when the displacement amount exceeds W. The shapes and positions of the capacitance forming portions 243D1 and 243F1 are set so as to coincide with the amount of decrease in the combined capacitance due to the protrusions 240D1 and 240F1.

こ の This setting can be expressed more specifically with mathematical formulas and graphs as follows. FIG. 18 is a graph showing the change of the synthetic capacitance with respect to the displacement amount. FIG. 18A shows the combined capacitance due to the protrusions. FIG. 18B shows the capacitance by the capacitance forming portion. FIG. 18C shows the combined capacitance of the adjacent movable-side acceleration detector and the fixed-side acceleration detector.

First, the synthetic capacitance due to the protrusion is obtained from the following equation. In the following formula, the thickness of each part is B. In addition, the mathematical formula indicates a theoretical value.

(I) When the displacement amount Δx is within W (when −W ≦ Δx ≦ + W)
The electrostatic capacitance C1 generated between the protrusion of the movable part and the protrusion of the fixed part on one side is expressed by the following equation. This capacitance C1 corresponds to, for example, the capacitance due to the above-described protrusion 241D1 and protrusion 222E1.

Also, the capacitance C1 generated between the protrusion of the movable part and the protrusion of the fixed part on one side is expressed by the following equation. The capacitance C1 corresponds to, for example, the capacitance due to the above-described protrusion 242D1 and protrusion 221F1.

Therefore, the synthetic capacitance C12 due to the protrusion is expressed by the following equation.

(Ii) When the displacement amount Δx is larger than W and moves in the positive direction of the X-axis direction (when Δx ≧ + W, see FIG. 16)

(Iii) When the displacement amount Δx is larger than W and moves in the negative direction of the X axis direction (when Δx ≦ −W,
(See Figure 17)

Thereby, the synthetic capacitance C12 due to the protrusion has characteristics as shown in FIG. Specifically, as shown by the broken line in FIG. 18A, the combined capacitance is a constant value when the displacement amount Δx is between −W and + W. When the displacement amount Δx is smaller than −W and larger than + W (the absolute value of the displacement amount Δx is larger than W), the combined capacitance monotonously decreases as the displacement amount Δx moves away from zero.

In reality, electrostatic capacity is generated even if the adjacent protrusions of the movable part and the fixed part do not face each other, so the displacement amount Δx as shown in FIG. 18 is set to a maximum value (maximum value). As the absolute value of the displacement amount Δx increases, the capacitance decreases in a curve.

On the other hand, the synthetic capacitance by the capacitance forming portion is obtained from the following equation. In the following formula, the thickness of each part is B. In addition, the mathematical formula indicates a theoretical value. Since the electrostatic capacitance formed by the electrostatic capacitance forming portion changes in the distance from the inner frame due to vibration in the X-axis direction, the mathematical formula need not be divided into cases.

The capacitance C31 by the capacitance forming part formed on one of the detection bases via the detector holding part is expressed by the following equation. The capacitance C31 corresponds to, for example, the capacitance due to the above-described capacitance forming portion 243F1 and the inner frame 101A. Note that S31 is an opposing area between the capacitance forming portion and the inner frame. D34 is the distance between the capacitance forming portion and the inner frame when the displacement amount Δx = 0.

Here, when the capacitance C31 is expanded by Taylor, the following equation is obtained.

The electrostatic capacity C32 by the electrostatic capacity forming part formed on one of the detection bases via the detector holding part is expressed by the following equation. The capacitance C32 corresponds to, for example, the capacitance due to the above-described capacitance forming portion 243D1 and the inner frame 101A. Note that S32 is a facing area between the capacitance forming portion and the inner frame, and S32 = S31.

Here, when the capacitance C32 is expanded by Taylor, the following equation is obtained.

Here, since S32 = S31, the combined capacitance C30 = (C31 + C32) is expressed by the following equation.

Therefore, the combined capacitance C30 = (C31 + C32) is an even function having a minimum value, and the higher-order term than the fourth-order term can be ignored as being sufficiently small. Therefore, Equation 14 can be approximated by

Thereby, the synthetic capacitance C30 by the capacitance forming portion has characteristics as shown in FIG. Specifically, as shown in FIG. 18B, the combined capacitance has a minimum value (minimum value) when the displacement amount Δx is 0, and monotonously increases as the displacement amount Δx is farther from 0.

Therefore, the combined capacitance Cc as an acceleration detector obtained by adding the combined capacitance C30 by the capacitance forming unit to the combined capacitance C12 by the protruding portion is expressed by the following equation.

(I) When the displacement amount Δx is within W (when −W ≦ Δx ≦ + W)

(Ii) When the displacement amount Δx is larger than W and moves in the positive direction of the X-axis direction (when Δx ≧ + W, see FIG. 16)

(Iii) When the displacement amount Δx is larger than W and moves in the negative direction of the X-axis direction (when Δx ≦ −W, refer to FIG. 17)

Here, as described above, by appropriately setting the shape of the capacitance forming portion, the rate of increase of the combined capacitance C30 by the capacitance forming portion and the rate of decrease of the combined capacitance C12 by the protrusions are set. Match approximately. This calculation may be performed using, for example, the above-described (Expression 17), (Expression 18), and (Expression 19).

By performing such a setting, the amount of decrease in the combined capacitance C12 caused by the protrusion caused by vibration can be supplemented by the amount of increase in the combined capacitance C30 by the capacitance forming unit. As a result, as shown in FIG. 18C, the combined capacitance Cc of the acceleration detector formed by adding the combined capacitance C12 by the protrusion and the combined capacitance C30 by the capacitance forming unit is It becomes constant without depending on the displacement amount Δx.

At this time, the combined capacitance C30 by the capacitance forming portion becomes the maximum value when the absolute value of the displacement amount Δx is maximum, and becomes the minimum value when the displacement amount Δx is minimum (Δx = 0). The same frequency (same cycle) as the secondary components of the capacitances C1 and C2 due to the vibrations of.

FIG. 19A is a diagram showing temporal changes of the displacement amount Δx, the primary and secondary components of the capacitances C1 and C2 due to the vibration of the protrusions, and the capacitance C30 due to the capacitance forming unit. It is. FIG. 19B is a diagram illustrating a change over time in the displacement amount Δx and the combined capacitance Cc.

As shown in FIG. 19A, the primary components of the capacitances C1 and C2 have the same frequency and are in reverse phase. Therefore, they are canceled out by adding and synthesizing them. The secondary component of the combined capacitance of the capacitances C1 and C2 and the capacitance C30 by the capacitance forming unit have the same frequency and are in opposite phases. Therefore, they are canceled out by adding and synthesizing them.

Thus, as shown in FIG. 19B, the combined capacitance Cc of the acceleration detector becomes constant without depending on the displacement amount Δx.

It should be noted that such a principle is common to all sets of the movable-side acceleration detector and the fixed-side acceleration detector sandwiching the movable-side acceleration detector. Therefore, as a whole of the sensor element, the combined capacitance Cc of the acceleration detector is constant without depending on the displacement amount Δx.

As described above, by using the configuration of the present embodiment, it is possible to prevent a change in the capacitance of the acceleration detection unit due to vibration for angular velocity detection. As a result, the acceleration can be reliably and accurately detected without being affected by the vibration.

Further, it is preferable that the capacitance forming portion is formed in line symmetry with respect to an axis in the Y-axis direction passing through the center of the detector holding portion. By forming the capacitance forming portion symmetrical with respect to the center line, the detection sensitivity can be increased without generating unnecessary odd-order harmonic components due to capacitance changes in the acceleration detection portion.

The above-described composite sensor can be manufactured, for example, by the following method. First, for example, a low resistance silicon substrate is formed as a thin film on the surface of an insulating silicon substrate. Next, the composite silicon substrate is dry-etched from the low resistance silicon substrate side, and the fixed portion, the support beam, the first and second mass portions, the connecting portion, the first to fourth detection portions, the first, The functional unit such as the second driving unit is formed with the above-described pattern. At this time, a frame-like body is formed on the outer edge of the composite silicon substrate so as to surround the entire functional portion.

Next, a lid made of a glass material or the like is joined to the frame-like body in a reduced pressure atmosphere, and the entire functional unit is hermetically sealed. Thereafter, a conductive via hole for connecting a necessary portion of the functional unit to the outside is formed on the lid. Then, an external connection conductor connected to the conductive via hole is formed on the lid.

In the above description, the example in which the capacitance forming portion is formed on the movable acceleration detector is shown. However, the capacitance forming portion may be formed on the fixed acceleration detector. FIG. 20 is a partial plan view showing another more specific structure of the movable-side acceleration detector and the fixed-side acceleration detector.

In the structure shown in FIG. 20, the structures of the acceleration detectors 202E1 ', 202F1' ?, 202H1 '?, 202I1' on the fixed side are different from the structure shown in FIG. 14 described above, and the other structures are the same. Therefore, description of the same part is abbreviate | omitted and only a different part is demonstrated.

The acceleration detector 202E1 'is obtained by adding a capacitance forming unit 223E1 to the acceleration detector 202E1 described above. The capacitance forming part 223E1 is formed at the end of the detection base 220E1 on the detection holding part 2051 side. The electrostatic capacity forming unit 223E1 is opposed to the detection holding unit 2051 with a predetermined area and has a predetermined interval. The capacitance forming part 223E1 is formed so that the area viewed along the X-axis direction is wider than the area of the first fixed side detection base or the second fixed side detection base. As a result, a capacitance C4D1 is formed between the capacitance forming unit 223E1 and the detection holding unit 2051.

The acceleration detector 202F1 'is obtained by adding a capacitance forming unit 223F1 to the acceleration detector 202F1 described above. The capacitance forming unit 223F1 is formed at the end of the detection base 220F1 on the detection holding unit 2051 side. The capacitance forming unit 223F1 is opposed to the detection holding unit 2051 with a predetermined area, and is spaced by a predetermined interval. The capacitance forming part 223F1 is formed so that the area seen along the X-axis direction is wider than the area of the first fixed side detection base or the second fixed side detection base. As a result, a capacitance C4D2 is formed between the capacitance forming unit 223F1 and the detection holding unit 2051.

The acceleration detector 202H1 'is obtained by adding a capacitance forming unit 223H1 to the above-described acceleration detector 202H1. The capacitance forming part 223H1 is formed at the end of the detection base 220H1 on the detection holding part 2051 side. The electrostatic capacity forming unit 223H1 is opposed to the detection holding unit 2051 with a predetermined area and has a predetermined interval. The capacitance forming part 223H1 is formed so that the area seen along the X-axis direction is larger than the area of the first fixed side detection base or the second fixed side detection base. As a result, a capacitance C4F1 is formed between the capacitance forming unit 223H1 and the detection holding unit 2051.

The acceleration detector 202I1 'is obtained by adding a capacitance forming unit 223I1 to the above-described acceleration detector 202I1. The capacitance forming portion 223I1 is formed at the end of the detection base 220I1 on the detection holding portion 2051 side. The capacitance forming unit 223I1 faces the detection holding unit 2051 with a predetermined area and has a predetermined interval. The capacitance forming part 223I1 is formed so that the area seen along the X-axis direction is larger than the area of the first fixed side detection base or the second fixed side detection base. As a result, a capacitance C4F2 is formed between the capacitance forming unit 223I1 and the detection holding unit 2051.

In such a configuration, the capacitance C3D1 formed by the capacitance forming unit 243D1 and the inner frame 101A, and the capacitances C4D1 and C4D2 formed by the capacitance forming units 223E1 and 223F1 and the detection holding unit 2051 are used. Thus, it is possible to suppress the capacitance between the protrusions 241D1 and 222E1 and between the protrusions 242D1 and 221F1 from decreasing due to vibration.

Similarly, using the capacitance C3F1 formed by the capacitance forming unit 243F1 and the inner frame 101A described above, and the capacitances C4F1 and C4F2 formed by the capacitance forming units 223H1 and 223I1 and the detection holding unit 2051 are used. It can suppress that the electrostatic capacitance between the part 241F1 and 222H1 and between the projection part 242F1 and 221I1 decreases by vibration.

Such a protrusion on the fixed side is also formed on other acceleration detectors. Thereby, the change of the electrostatic capacitance of the acceleration detection part by vibration can be suppressed. Then, by using the structure of FIG. 20, the electrostatic capacity formed by the movable-side capacitance forming portion and the inner frame is reduced by the vibration due to the shape limitation on the movable side and the detection performance of acceleration and angular velocity. Even if it is not possible to sufficiently compensate for the decrease in capacitance, it is possible to reliably compensate with the capacitance by the capacitance forming portion on the fixed side.

Further, in the above-described embodiment, when the capacitance forming part is formed on the movable part side, the case where it is formed on both the movable part side and the fixed part side is shown. However, as shown in FIG. You may form only.

FIG. 21 is a partial plan view showing another more specific second structure of the movable-side acceleration detector and the fixed-side acceleration detector.

As shown in FIG. 21, the acceleration detectors 202E1 'and 202H1' on the fixed part side have the same structure as that shown in FIG. The acceleration detector 204D1 'on the movable portion side is obtained by omitting the capacitance forming portion 243D1 from the acceleration detector 204D1 of FIG. The acceleration detector 204F1 'on the movable portion side is obtained by omitting the capacitance forming portion 243F1 from the acceleration detector 204F1 of FIG.

Even with such a configuration, the same operational effects as those of the above-described embodiment can be obtained.

1: sensor element,
2: substrate
3A, 3B, 3C, 3D, 3E, 3F: fixed part,
4A, 4B: support beam,
5A, 5B, 5C, 5D, 5E, 5F, 5G, 5H: connecting part,
8: IC for detection,
10: 1st mass part,
20: second mass part,
11: 1st detection part,
12: 2nd detection part,
13: Third detection unit,
14: 4th detection part,
30: 1st drive part,
31: fixed part,
32: support member,
33A, 33B, 34A, 34B, 43A, 43B, 44A, 44B, 51, 52, 61, 62: comb teeth,
431A, 431B, 441A, 441B, 661: shaft portion,
432A, 432B, 442A, 442B, 662: tooth part 40: second drive part,
41: fixing part,
42: a support member,
50, 60: monitor unit,
101A, 101B: inner frame,
101C, 101D: central axis,
102A, 102B: outer frame part,
103A, 103B, 104A, 104B, 103C, 103C, 104D, 104D: connecting members,
111, 121, 131, 141: fixed part,
112, 122, 132, 142: acceleration detection unit,
113, 123, 133, 143: angular velocity detector,
201A1, 201B1, 201A2, 201B2, 201A3, 201B3, 201A4, 201B1, 2051, 2052, 2053, 2054: detector holding unit,
202A1 to 202N1, 204A1 to 204J1, 202A2 to 202N2, 204A2 to 204J2, 202A3 to 202N3, 204A3 to 204J3, 202A4 to 202N4, 204A4 to 204J4, 202E1 ', 202F1', 202H1 ', 202I1', 204D1 ', 204F1': Acceleration sensor,
220A1 to 220D1, 240A1 to 240C1: detection base,
221B1, 221C1, 221D1, 222A1, 222B1, 222C1, 241A1, 241B1, 241C1, 242A1, 242B1, 242C1: protrusions,
243A1, 243B1, 243C1, 243D1, 243F1, 223E1, 223F1, 223H1, 223I1: capacitance forming unit,
300: third mass part,
400: 4th mass part,
500,600: fixed part,
3011, 3021, 3012, 3022, 3013, 3023, 3014, 3024: angular velocity detector,
80: control unit,
81: Filter,
82A: driving non-inverting amplifier,
82B: Inverting amplifier for driving,
83A, 83B: monitor amplifier,
84: Filter,
840: differential amplifier,
85: Phase shifter,
91A, 91B: amplifiers
92: Adder,
93: subtractor,
94A, 94B: Filter,
95A, 95B: detector,
96A, 96B: output circuit,
OUTa, OUTω: Output terminals

Claims (9)

1. A substrate,
   A fixing part fixed to one surface of the substrate;
   A movable portion supported by the substrate in a state capable of vibrating in a first direction parallel to the one surface of the substrate, and facing the fixed portion;
   The movable part is
   A movable side detection for extending along the first direction, having a first surface and a second surface on both sides of a second direction parallel to the one surface of the substrate and perpendicular to the first direction, respectively. The base,
   A movable-side first protrusion protruding in one direction of the second direction from the first surface of the movable-side detection base;
   A movable-side second protrusion that protrudes in the other direction of the second direction from the second surface of the movable-side detection base;
   The fixing part is
   A first fixed-side detection base and a second fixed-side detection base, which are respectively arranged on both sides of the movable-side detection base in the second direction and extend along the first direction;
   A fixed-side first protrusion protruding from the first fixed-side detection base to the movable-side first protrusion;
   A fixed-side second protrusion protruding from the second fixed-side detection base toward the movable-side second protrusion,
   A first capacitance between the movable side first projection and the fixed side first projection, and a second capacitance between the movable side second projection and the fixed side second projection. From the change in the combined capacitance with
   At the end in the first direction of any one of the movable side detection base, the first fixed side detection base, and the second fixed side detection base, a first portion between the movable portion and the fixed portion is provided. 3 Capacitance forming part for generating capacitance is arranged,
   Sensor element.
2. A substrate,
   A fixing part fixed to one surface of the substrate;
   A movable portion supported by the substrate in a state capable of vibrating in a first direction parallel to the one surface of the substrate, and facing the fixed portion;
   The movable part is
   A movable side detection for extending along the first direction, having a first surface and a second surface on both sides of a second direction parallel to the one surface of the substrate and perpendicular to the first direction, respectively. The base,
   A movable-side first protrusion protruding in one direction of the second direction from the first surface of the movable-side detection base;
   A movable-side second protrusion that protrudes in the other direction of the second direction from the second surface of the movable-side detection base;
   The fixing part is
   A first fixed-side detection base and a second fixed-side detection base, which are respectively arranged on both sides of the movable-side detection base in the second direction and extend along the first direction;
   A fixed-side first protrusion protruding from the first fixed-side detection base to the movable-side first protrusion;
   A fixed-side second protrusion protruding from the second fixed-side detection base to the movable-side second protrusion,
   A first capacitance between the movable side first projection and the fixed side first projection, and a second capacitance between the movable side second projection and the fixed side second projection. From the change in the combined capacitance with
   A capacitance forming portion is disposed at an end portion in the first direction in any of the movable side detection base, the first fixed side detection base, and the second fixed side detection base,
   A width of the capacitance forming portion along the second direction is the capacitance forming portion of the movable side detection base, the first fixed side detection base, and the second fixed side detection base. Is larger than the width along the second direction,
   Sensor element.
3. For each of the movable part and the fixed part,
   The sensor element of Claim 1 or Claim 2 provided with the said electrostatic capacitance formation part.
4. The movable part has a movable side holding part extending along the second direction at one end of the movable side detection base in the first direction,
   The fixed portion has a fixed-side holding portion extending along the second direction at the other end in the first direction of the first fixed-side detection base and the second fixed-side detection base.
   The movable side detection base, the first fixed side detection base, and the second fixed side detection base are arranged between the movable side holding part and the fixed side holding part in the first direction. And
   4. The sensor element according to claim 1, wherein the capacitance forming portion is disposed at the other end in the first direction of the movable side detection base portion. 5.
5. The movable part has a movable side holding part extending along the second direction at one end of the movable side detection base in the first direction,
   The fixed portion has a fixed-side holding portion extending along the second direction at the other end in the first direction of the first fixed-side detection base and the second fixed-side detection base.
   The movable side detection base, the first fixed side detection base, and the second fixed side detection base are arranged between the movable side holding part and the fixed side holding part in the first direction. ,
   The capacitance forming portion is disposed at one end of the first direction in the first fixed-side detection base and the second fixed-side detection base.
   The sensor element according to any one of claims 1 to 3.
6. The movable side detection base is formed on both sides of the movable side holding portion in the first direction,
   The capacitance forming portions are arranged symmetrically about the second direction on both sides of the movable side holding portion,
   The sensor element according to claim 4 or 5.
7. A first mass part and a second mass part arranged in the second direction with a gap with respect to the substrate;
   A support beam that supports the first mass part and the second mass part along the first direction so as to be able to vibrate so that their vibrations are in opposite phases;
   The first mass unit includes the fixed unit and the movable unit, and outputs a first acceleration detection signal.
   The second mass unit includes the fixed unit and the movable unit, and outputs a second acceleration detection signal.
   The sensor element according to any one of claims 1 to 6.
8. The first mass unit outputs a first angular velocity detection signal based on an angular velocity around a third direction orthogonal to the first direction and the second direction,
   The second mass unit outputs a second angular velocity detection signal based on an angular velocity around the third direction,
   The phase relationship between the first angular velocity detection signal and the second angular velocity detection signal and the phase relationship between the first acceleration detection signal and the second acceleration detection signal are output so as to be reversed.
   The sensor element according to claim 7.
9. A sensor element according to claim 8;
   An adder for adding the first detection signal including the first angular velocity detection signal and the first acceleration detection signal and the second detection signal including the second angular velocity detection signal and the second acceleration detection signal;
   A subtractor for subtracting the first detection signal and the second detection signal;
   Composite sensor with

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