WO2014088137A1

WO2014088137A1 - Clamp for vacuum pipes

Info

Publication number: WO2014088137A1
Application number: PCT/KR2012/010608
Authority: WO
Inventors: 김기남
Original assignee: 주식회사 엠아이
Priority date: 2012-12-07
Filing date: 2012-12-07
Publication date: 2014-06-12

Abstract

The present invention relates to an improved clamp for a vacuum pipeline, in which multiple vacuum pipelines are arranged to maintain a vacuum state in the main equipment during a semiconductor fabrication process, and the vacuum pipelines are arranged such that continuous vibrations can be generated and the connected state of the vacuum pipes can be firmly maintained while maintaining an airtight state without the loosening of the vacuum pipes by the vibrations. The clamp for the vacuum pipes is configured such that a first flange of a first pipe and a second flange of a second pipe contact each other and are fixed to be separable from each other, wherein a center ring is interposed between the first flange and the second flange. The clamp includes a semicircular first clamp having, along the inner circumferential surface thereof, a first insertion groove for the first flange and the second flange. A semicircular second clamp has, along the inner circumferential surface thereof, a second insertion groove for the first flange and the second flange. A connection link has both ends rotatably and hingedly-coupled to free ends of the first clamp and the second clamp. A locking member has one end hingedly-coupled to the first clamp and the other end separably coupled to the second clamp. The second clamp has a free end with a fixing protrusion having a fixing groove. The outer surfaces of the first clamp and the second clamp have entry/exit holes penetrating therethrough, and at least one auxiliary fixing member may enter/exit into/from the entry/exit holes.

Description

Clamp for Vacuum Pipe

The present invention relates to a clamp for vacuum pipe, and more particularly, a plurality of vacuum pipe lines are installed to maintain a vacuum state in the main equipment during the semiconductor manufacturing process, these vacuum pipe lines are a continuous vibration occurs, the vibration Improved vacuum pipe clamp to maintain the tightly connected state of the vacuum pipe without loosening caused by loosening, and to press the centering by the auxiliary fixing member to maintain a more solid coupling state It is about.

In general, the semiconductor manufacturing process is largely composed of a preprocess (Fabrication process) and a post process (Assembly process). The entire process is a process of manufacturing a semiconductor chip by processing a specific pattern by repeatedly depositing a thin film on a wafer in various process chambers and selectively etching the deposited thin film. . In addition, the post-process refers to a process of separately separating the chips manufactured in the previous process, and then assembled with the lead frame and assembled into a finished product.

At this time, in the case of a process of depositing a thin film on the wafer or etching a thin film deposited on the wafer, it is carried out at a high temperature using a harmful gas in the process chamber. During this process, a large amount of ignitable gases, corrosive foreign substances, and gases containing toxic components are generated in the process chamber. That is, only about 30% of noxious gases are deposited on the wafer surface inside the chamber, and some unreacted gases are discharged.

Thus, a scrubber is provided at the rear end of the vacuum pump that makes the process chamber vacuum, to purify the gas discharged from the process chamber and then discharge it to the atmosphere.

The vacuum pipe line is connected in series with the vacuum pump, and the vacuum state in the vacuum pipe line is maintained by the operation of the vacuum pump. As the vibration caused by the operation of the vacuum pump is transmitted along the vacuum pipe line, the vacuum pipe line continues. Vibration is generated.

However, such a conventional vacuum pipe clamp has a problem that the tight connection state of the fastening nut is gradually released as the vibration of the vacuum pipe is continued, so that the clamp is loosened and the airtight connection state of the vacuum pipe is released.

The present invention is to solve the above problems, an object of the present invention by using a plurality of locking members including a locking spring and a protective bracket to fix the flanges of the two pipes to maintain a more solid coupling state, unwinding It is possible to prevent the locking member from loosening itself from the external impact by the prevention member, and to provide a clamp for the vacuum pipe to press the centering by the auxiliary fixing member to maintain a more solid coupling state.

In order to achieve the above object, the present invention

A clamp for vacuum pipe for fixing detachably in a state where a first flange of a first pipe and a second flange of a second pipe are in contact with each other with a centering in between,

A semicircular first clamp having an inner diameter in which first insertion grooves of the first flange and the second flange are formed;

A semicircular second clamp having an inner diameter in which a second insertion groove of the first flange and the second flange is formed;

A connecting link hinged at both ends to be rotatable at the free ends of the first clamp and the second clamp;

A locking member having one end hinged to the first clamp and the other end detachably coupled to the second clamp; And

At least one auxiliary fixing member which passes through an access hole on one side of an outer circumferential surface of the first clamp and the second clamp, and is provided to be accessible through the access hole; It is configured to include,

The locking member is hinged to one end rotatably to the first clamp, the outer peripheral surface is provided with a screw thread bolt portion detachably coupled to the fixing step of the second clamp; And a nut part penetrating a screw hole in a longitudinal direction of an inner diameter to be screwed to an outer circumferential surface of the bolt part, and detachably coupled to a fixing groove of the second clamp. Included,

A first gear part is formed on an outer circumferential surface of the nut part, and an operating chamber is provided in a second clamp at a position corresponding to the first gear part, and the operating chamber is further provided with an anti-loosening member of the nut part. The vertical guide hole is provided on the side wall of the second clamp so as to communicate with the seal, and the free end of the second clamp is provided with a fixing step with a fixing groove.

Here, it is preferable that at least one contact buffer groove is formed on both inner walls of the first insertion groove and the second insertion groove.

Preferably, the second clamp is provided with a separation prevention groove from the fixed step.

A female thread is formed in the access hole of the first clamp and the second clamp, and the auxiliary fixing member is formed of a male screw to be screwed into the access hole, and a buffer cap made of a rubber material is provided at the tip of the auxiliary fixing member. that

It is preferable that the first spring having washers on both sides of the bolt portion is coupled so that the nut portion is elastically supported in the fixing groove of the second clamp.

One end of the bolt portion is preferably formed in a hexagonal shape.

One end is rotatably hinged to the free end of the first clamp, the other end is preferably provided with a protective bracket that is detachably coupled to the second clamp to prevent the first spring and the washer from being exposed to the outside. Do.

The protective bracket is preferably made of a transparent plastic material so that the coupling and loosening of the first spring and the washer can be confirmed from the outside.

The anti-loosening member may include a reverse rotation prevention tool configured to hinge in the operating chamber so that the locking protrusion protrudes to one side so as to sequentially contact the first gear part of the nut part, and one end of which is rotatable up and down in the vertical guide hole; And a second spring provided in the operating chamber to always push the reverse rotation prevention tool to the hinged portion of the reverse rotation prevention tool so as to contact the first gear part of the nut part. It is preferable to include.

The second clamp is provided with a ball plunger which is operated forward and backward in the direction of the operating chamber. When the nut part is rotated in the clockwise direction, the second clamp is spaced apart from the anti-rotation stop, and the nut part is rotated in the counterclockwise direction. It is preferable that the reverse rotation prevention device is pressed so as not to move.

The ball plunger is horizontal with respect to the connection link, screwed to the second clamp so as to be able to move forward and backward, the plunger body having a thread formed therein; A third spring fitted into the plunger body; And a fixing ball to fix the anti-rotation prevention device by pressing the reverse rotation prevention means by the elastic force of the third spring. It is preferable to include.

Preferably, one of the first clamp and the second clamp is laser marked.

The connection link 130 is preferably provided in plurality.

According to the vacuum pipe clamp according to the present invention, the first flange of the first pipe and the second flange of the second pipe are in contact with each other. Next, the first and second flanges are pressed by the first clamp and the second clamp to be fixed by the locking member. At this time, when the locking member is screwed to the bolt part with the nut part, the locking member may be elastically supported primarily by the spring, and secondly, the release of the nut part may be prevented by the anti-flame member, and the protective bracket may be thirdly applied to the protection bracket. It encloses the locking member so as to maintain an improved engagement state. In addition, by pressing the centering by the auxiliary fixing member has an effect to maintain a more solid coupling state.

1 is a photograph of a clamp for a vacuum pipe according to the present invention;

FIG. 2 is a photograph of a state in which the protective bracket is restrained from the locking member in FIG. 1; FIG.

3 is a photograph of a state in which the first clamp and the second clamp in FIG. 1 are unfolded with respect to each other;

4 is a photograph of a state in which the first pipe, the second pipe, and the locking member are disassembled in FIG. 3;

5 is a perspective view of a clamp for vacuum piping according to the present invention;

6 is a front view of FIG. 5;

7 is a top view of FIG. 5;

8 is a right side view of FIG. 5;

9 is a view of the state cut along the line AA of FIG. 6;

FIG. 10 is a view in a vertical cut along the first gear part and the second clamp in FIG. 5; FIG.

11 is a view of a state in which the first clamp and the second clamp are fixed by the locking member; And

FIG. 12 is a partially enlarged view of “B” in FIG. 11, (a) before fitting the ball plunger to the second clamp, and (b) placing the ball plunger into the second clamp.

FIG. 13 is a partially enlarged view of “B” in FIG. 11, (a) is a state in which the reverse rotation prevention tool is raised, and (b) is a state in which the reverse rotation prevention device is lowered.

14 and 15 are views showing a clamp for a vacuum pipe to which the auxiliary fixing member is applied according to the present invention. FIG. 14 is before the auxiliary fixing member is fitted, and FIG. 15 is after the auxiliary fixing member is inserted.

Hereinafter, with reference to the accompanying drawings the contents of the present invention through the embodiments will be described in detail. The following examples are by way of example only and are not intended to limit the scope of the invention.

1 to 8, in the present invention, the first flange P12 of the first pipe P10 and the second flange P22 of the second pipe P20 are disposed with the center ring CR interposed therebetween. The clamp 100 for vacuum pipe to detachably fix in a state in contact with each other. The center ring CR is provided with a metal part and a rubber part outside thereof. The part made of rubber is for ensuring airtightness on the contact surface between the first flange P12 and the second flange P22.

The clamp 100 for the vacuum pipe includes a first clamp 110 and a second clamp 120. The first clamp 110 has an inner diameter in which the first insertion groove 112 of the first flange P12 and the second flange P22 is formed. The first clamp 110 is preferably formed in a semicircular shape.

The second clamp 120 is formed with a second insertion groove 122 of the first flange P12 and the second flange P22. Like the first clamp 110, the second clamp 120 is preferably formed in a semicircular shape. The fixed step 124 is provided at the free end of the second clamp 120. At least one contact buffer groove 114 may be formed at both inner walls of the first insertion groove 112 and the second insertion groove 122. In the contact buffer groove 114, the contact area of the first and second flanges P12 and P22 may be reduced to the maximum in the first and

second insertion grooves

112 and 122 to improve the tightening force. The release preventing groove 128 is preferably provided to the second clamp 120 successively from the fixed step 124. The separation prevention groove 128 may prevent the nut part 144 screwed into the bolt part 142 from being pulled out by itself. That is, the nut part 144 is not easily retracted from the departure prevention groove 128 to some extent, so that the rotation of the first clamp 110 becomes difficult.

The connecting link 130 is hinged at both ends so as to be rotatable to the free ends of the first clamp 110 and the second clamp 120.

One end of the locking member is hinged to the first clamp 110, and the other end is detachably coupled to the second clamp 120. One end of the locking member is hinged to the first clamp 110 so as to be rotatable, and a thread is provided on the outer circumferential surface to detach the bolt portion 142 detachably coupled to the fixing step 124 of the second clamp 120. Include. The nut part 144 penetrates the screw hole in the longitudinal direction of the inner diameter to be screwed to the outer circumferential surface of the bolt part 142, and is detachably coupled to the fixing groove 126 of the second clamp 120. It is preferable that the first spring 148 having washers at both sides is coupled to the bolt 142 so that the nut 144 can be elastically supported in the fixing groove 126 of the second clamp 120. One end of the bolt portion 142 is preferably formed in a hexagonal shape.

14 to 15, at least one or more entrance holes H penetrate through one side of the outer circumferential surfaces of the first clamp 110 and the second clamp 120, and are provided to be accessible through the entrance holes H. Auxiliary fixing member SF is provided. The female thread is formed in the entrance hole H of the first clamp 110 and the second clamp 120, and the auxiliary fixing member SF is formed of a male screw to be screwed into the entrance hole H, and the auxiliary fixing member At the tip of the (SF), a rubber cushion cap (BC) is provided.

The protective bracket 150 is hingedly coupled to the free end of the first clamp 110 at one end, and the other end thereof is detachably coupled to the second clamp 120 so that the first spring 148 and the washer 146 can be detached. Should not be exposed to the outside. Here, the protection bracket 150 is rotated around the hinged portion of the first clamp 110 is coupled to the second clamp 120 by detachable interference fit. In particular, the protection bracket 150 is formed of a transparent plastic material so that the coupling and loosening of the first spring 148 and the washer 146 can be confirmed from the outside. In this case, when it is confirmed that the first spring 148 and the washer 146 are loosened, the worker performs the tightening operation.

The first gear portion 145 is formed on the outer circumferential surface of the nut portion 144. The operating chamber 129 is provided in the second clamp 120 at a position corresponding to the first gear portion 145. The anti-loosening member is provided in the operating chamber 129 of the second clamp 120. The vertical guide hole 129a is provided to the side wall of the second clamp 120 to communicate with the operation chamber 129.

The anti-loosening member includes a reverse rotation prevention device 150 and a second spring 164.

The reverse rotation prevention tool 150 has a locking protrusion 162 protruding to one side so as to sequentially contact the first gear part 145 of the nut part 144, and one end thereof rotates up and down in the vertical guide hole 129a. It is hinged in the operating chamber 129 to enable it.

The second spring 164 always pushes the reverse rotation prevention tool 150 to the hinged portion of the reverse rotation prevention tool 150 so as to contact the first gear part 145 of the nut part 144. 129 is provided.

The ball plunger 170 is provided to the second clamp 120 to be operated forward and backward in the direction of the operating chamber 129. When the nut part 144 is rotated in a clockwise direction, the nut part 144 is spaced apart from the anti-rotation preventing part 150, and when the nut part 144 is rotated in the counterclockwise direction, the nut is not pressed by the reverse rotation preventing part 150. do.

The ball plunger 170 includes a third spring 174 and a fixed ball 176 in the plunger body 172. The plunger body 172 is horizontal with respect to the connection link 130, is screwed to the second clamp 120 so as to be able to move forward, backward, and a thread is formed therein. The third spring 174 is fitted inside the plunger body 172. The fixing ball 176 is fixed by pressing the reverse rotation prevention device 150 by the elastic force of the third spring 174 so as not to move.

One of the first clamp 110 and the second clamp 120 may be laser marked. This can prevent problems such as being removed by friction after attaching a trademark or the like on the outer surface.

The connection link 130 may be provided in plurality. By doing so, the first clamp 110 and the second clamp 120 can be prevented from being twisted about the plurality of connection links 130.

When described in detail with reference to the accompanying drawings, a clamp for a vacuum pipe according to the present invention having such a configuration as follows.

Referring back to FIGS. 1 to 8, the first flange P12 of the first pipe P10 and the second flange P22 of the second pipe P20 may be in close contact with each other with the center ring CR therebetween. In this state, the first flange P12 and the second flange P22 which are in close contact with each other are fitted into the second insertion groove 122 of the second clamp 120 to be coupled.

Subsequently, the second clamp 120 is rotated around the hinged portion of the first clamp 110 so that the first flange P12 and the second flange P22 coupled to each other are connected to the first insertion groove 112. The first clamp 110 is rotated to fit.

Then, the bolt portion 142 is rotated around the hinged portion of the first clamp 110. At this time, the bolt portion 142 is fixed to the fixing groove 126 formed in the fixing step 124 of the second clamp 120. Here, the first spring 148 and the washer 146 are located between the fixed step 124 and the free end of the first clamp 110. At the same time, the bolt portion 142 is fitted into the separation prevention groove 128 formed in the second clamp 120.

In this state, the worker uses a tool such as a wrench to fasten the nut part 144 to the bolt part 142 to advance into the departure preventing groove 128. In this case, the first clamp 110 and the second clamp 120 are pulled against each other. At this time, the first spring 148 is in a compressed state due to tightening of the nut part 144. The worker continues to work until the nut portion 144 is no longer tightened. In this case, the first flange P12 of the first pipe P10 and the second flange P22 of the second pipe P20 are fixedly adhered to each other so that a firmly coupled state is maintained even from external shock such as vibration.

Here, referring to FIGS. 10 and 11, when the nut part 144 is rotated, the release preventing member is sequentially contacted with the first gear part 145 provided to the second clamp 120. The vertical guide hole 129a is connected to the operation chamber 129 of the second clamp 120 so as to be connected to the side wall of the second clamp 120.

In this process, the locking protrusion 162 of the reverse rotation prevention tool 150 is in contact with the first gear portion 145 of the nut portion 144 sequentially. At this time, the reverse rotation prevention device 150 is rotated around the hinge-coupled portion in the operating chamber 129 is one end is rotated up and down in the vertical guide hole (129a).

In particular, the second spring 164 provided in the operating chamber 129 always pushes the reverse rotation prevention tool 150 to the hinged portion of the reverse rotation prevention tool 150, and thus the first gear part of the nut part 144. 145 is contacted.

12 (a) and 13 (a) (b), the ball plunger 170 provided in the second clamp 120 is operated forward and backward in the direction of the operating chamber 129. will be. That is, when the nut part 144 is rotated in a clockwise direction, the nut part 144 is spaced apart from the anti-rotation preventing part 150. When the nut part 144 is rotated in a counterclockwise direction, the nut part 144 is pressed by the reverse rotation preventing part 150. It won't be.

The plunger body 172 of the ball plunger 170 is disposed to be horizontal with respect to the connecting link 130. The second clamp 120 is screwed to enable the forward and backward. At this time, the fixing ball 176 is fixed so as not to move by pressing the reverse rotation preventer 150 by the elastic force of the third spring 174 inserted into the plunger body 172. On the contrary, when the rotation of the nut part 144 can be freely rotated, the plunger body 172 is retracted from the second clamp 120 so that the fixing ball 176 contacts with the reverse rotation preventing device 150. It will not be.

Finally, the protection bracket 150 is rotated around the hinged portion of the first clamp 110 to be coupled to the second clamp 120 by the interference fit method. In this state, the first spring 148, the washer 146, and the nut part 144 are wrapped and protected from the outside by the protection bracket 150. That is, the nut 144 may be prevented from being easily removed from the bolt 142 by the elastic force of the first spring 148, and may be secondarily prevented by the protection bracket 150. .

Thereafter, when releasing the engagement state between the first flange P12 of the first pipe P10 and the second flange P22 of the second pipe P20, the nut part 144 is moved in the opposite direction as before. Rotate Subsequently, the nut 144 is rotated to be separated from the separation preventing groove 128 and the fixing groove 126. As a result, the first clamp 110 and the second clamp 120 can be opened with respect to each other to join the first flange P12 of the first pipe and the second flange P22 of the second pipe P20. You can release the state.

Meanwhile, referring back to FIGS. 14 and 15, the auxiliary fixing member SF is fitted into the access hole H of the first clamp 110 and the second clamp 120. In this case, the centering (CR) portion, which is a coupling portion between the first flange P12 of the first pipe P10 and the second flange P22 of the second pipe P20, which are joined to each other, is pressed so as not to move. To be fixed (see FIGS. 14 and 15). At this time, the female thread is formed in the access hole (H) of the first clamp 110 and the second clamp 120, the auxiliary fixing member (SF) is formed with the male thread of the access hole (H). The auxiliary fixing member (SF) is screwed to the access hole (H). In particular, the front end of the auxiliary fixing member (SF) is provided with a buffer cap (BC) made of a rubber material to prevent damage during contact with the center ring (CR).

In particular, since the protective bracket 150 is formed of a transparent plastic material, the coupling and loosening of the first spring 148 and the washer 146 can be confirmed from the outside. In this case, when it is confirmed that the first spring 148 and the washer 146 are loosened, the worker performs the tightening operation.

While the invention has been shown and described with respect to specific preferred embodiments thereof, the invention is not limited to the embodiments described above, and is commonly used in the art to which the invention pertains without departing from the spirit of the invention as claimed in the claims. Anyone with knowledge will be able to make various variations.

Claims

A clamp for a vacuum pipe for detachably fixing in a state where the first flange of the first pipe and the second flange of the second pipe are in contact with each other with a centering in between,

A semicircular first clamp having an inner diameter in which first insertion grooves of the first flange and the second flange are formed;

A semicircular second clamp having an inner diameter in which a second insertion groove of the first flange and the second flange is formed;

A connecting link hinged at both ends to be rotatable at the free ends of the first clamp and the second clamp;

A locking member having one end hinged to the first clamp and the other end detachably coupled to the second clamp; And

At least one auxiliary fixing member which passes through an access hole on one side of an outer circumferential surface of the first clamp and the second clamp, and is provided to be accessible through the access hole; It is configured to include,

The locking member is hinged to one end rotatably to the first clamp, the outer peripheral surface is provided with a screw thread bolt portion detachably coupled to the fixing step of the second clamp; And a nut part penetrating a screw hole in a longitudinal direction of an inner diameter to be screwed to an outer circumferential surface of the bolt part, and detachably coupled to a fixing groove of the second clamp. Is included,

A first gear part is formed on an outer circumferential surface of the nut part, and an operating chamber is provided in a second clamp at a position corresponding to the first gear part, and the operating chamber is further provided with an anti-loosening member of the nut part. A vertical guide hole is provided on the side wall of the second clamp so as to communicate with the seal, and the free end of the second clamp is provided with a fixing step having a fixing groove.
The clamp of claim 1, wherein at least one contact buffer groove is formed on both inner walls of the first and second insertion grooves.
3. The clamp for vacuum pipe according to claim 2, wherein the second clamp is provided with a separation preventing groove from the fixing step.
The method of claim 1, wherein the female thread is formed in the access hole of the first clamp and the second clamp, the auxiliary fixing member is formed of a male screw to be screwed into the access hole, the rubber material at the tip of the auxiliary fixing member Clamp for a vacuum piping, characterized in that the buffer cap of the provided.
The clamp of claim 1, wherein a first spring having washers on both sides is coupled to the bolt to allow the nut to be elastically supported in the fixing groove of the second clamp.
The clamp of claim 5, wherein one end of the bolt is formed in a hexagonal shape.
The protection bracket of claim 1, wherein one end of the first clamp is rotatably hinged and the other end of the first clamp is detachably coupled to the second clamp to prevent the first spring and the washer from being exposed to the outside. Clamp for vacuum pipe, characterized in that further provided.
The clamp of claim 7, wherein the protection bracket is made of a transparent plastic material so that the coupling and disengagement of the first spring and the washer can be confirmed from the outside.
According to claim 1, wherein the anti-loosening member is a reverse projection protruding to one side so as to sequentially contact the first gear portion of the nut portion and one end is hinged in the operating chamber to be able to rotate up and down in the vertical guide hole Anti-rotation tool; And a second spring provided in the operating chamber to always push the reverse rotation prevention tool to the hinged portion of the reverse rotation prevention tool so as to contact the first gear part of the nut part. Clamp for a vacuum piping comprising a.
10. The method of claim 9, wherein the second clamp is provided with a ball plunger which is operated forward and backward in the direction of the operating chamber, when the nut portion is rotated clockwise to be spaced apart from the counterclockwise rotation, the nut The vacuum pipe clamp, characterized in that the reverse rotation prevention port is pressed so as not to move when the addition is rotated in the counterclockwise direction.
The method of claim 10, wherein the ball plunger is

A plunger body which is horizontal with respect to the connection link and is screwed to the second clamp so as to be able to move forward and backward and has a thread formed therein;

A third spring fitted into the plunger body; And

Fixing ball for fixing the anti-rotation prevention by pressing the reverse rotation by the elastic force of the third spring; Clamp for a vacuum piping comprising a.
The clamp for vacuum pipe according to claim 1, wherein one of the first clamp and the second clamp is laser marked.
The clamp of claim 1, wherein the connection link is provided in plurality.