WO2014063970A3 - Laminated materials, methods and apparatus for making same, and uses thereof - Google Patents

Laminated materials, methods and apparatus for making same, and uses thereof Download PDF

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Publication number
WO2014063970A3
WO2014063970A3 PCT/EP2013/071640 EP2013071640W WO2014063970A3 WO 2014063970 A3 WO2014063970 A3 WO 2014063970A3 EP 2013071640 W EP2013071640 W EP 2013071640W WO 2014063970 A3 WO2014063970 A3 WO 2014063970A3
Authority
WO
WIPO (PCT)
Prior art keywords
methods
making same
laminated materials
materials
laminated
Prior art date
Application number
PCT/EP2013/071640
Other languages
French (fr)
Other versions
WO2014063970A2 (en
Inventor
Daniel Brors
Richard Clark
Richard Demaray
David Slutz
Original Assignee
Nitride Solutions, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitride Solutions, Inc. filed Critical Nitride Solutions, Inc.
Priority to EP13779559.7A priority Critical patent/EP2912205A2/en
Priority to US14/879,865 priority patent/US20160181066A1/en
Priority to JP2015538376A priority patent/JP2016504485A/en
Priority to KR1020157013533A priority patent/KR20150079749A/en
Publication of WO2014063970A2 publication Critical patent/WO2014063970A2/en
Publication of WO2014063970A3 publication Critical patent/WO2014063970A3/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0617—AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3178—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for applying thin layers on objects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/31—Processing objects on a macro-scale
    • H01J2237/3132—Evaporating
    • H01J2237/3137—Plasma-assisted co-operation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
  • Combustion & Propulsion (AREA)
  • Cell Electrode Carriers And Collectors (AREA)
  • Battery Electrode And Active Subsutance (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

PVD methods and apparatus for producing materials, for example nitrides, are disclosed as are electrode materials.
PCT/EP2013/071640 2011-09-29 2013-10-16 Laminated materials, methods and apparatus for making same, and uses thereof WO2014063970A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP13779559.7A EP2912205A2 (en) 2012-10-25 2013-10-16 Laminated materials, methods and apparatus for making same, and uses thereof
US14/879,865 US20160181066A1 (en) 2011-09-29 2013-10-16 Laminated materials, methods and apparatus for making same, and uses thereof
JP2015538376A JP2016504485A (en) 2012-10-25 2013-10-16 LAMINATED MATERIAL, ITS MANUFACTURING METHOD AND MANUFACTURING DEVICE, AND USE THEREOF
KR1020157013533A KR20150079749A (en) 2012-10-25 2013-10-16 Laminated materials, methods and apparatus for making same, and uses thereof

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201261718575P 2012-10-25 2012-10-25
US61/718,575 2012-10-25

Publications (2)

Publication Number Publication Date
WO2014063970A2 WO2014063970A2 (en) 2014-05-01
WO2014063970A3 true WO2014063970A3 (en) 2014-07-24

Family

ID=47747979

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2013/071640 WO2014063970A2 (en) 2011-09-29 2013-10-16 Laminated materials, methods and apparatus for making same, and uses thereof

Country Status (5)

Country Link
EP (1) EP2912205A2 (en)
JP (1) JP2016504485A (en)
KR (1) KR20150079749A (en)
GB (1) GB201300133D0 (en)
WO (1) WO2014063970A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3366804B1 (en) * 2017-02-22 2022-05-11 Satisloh AG Box coating apparatus for vacuum coating of substrates, in particular spectacle lenses

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5227203A (en) * 1992-02-24 1993-07-13 Nkk Corporation Ion-plating method and apparatus therefor
US5846608A (en) * 1994-04-14 1998-12-08 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Process for ion-supported vacuum coating
DE10111515A1 (en) * 2001-02-19 2002-08-14 Fraunhofer Ges Forschung Plasma coating device used for coating metallic strip material in the manufacture of photovoltaic cells and modules comprises a hollow cathode
WO2010069594A1 (en) * 2008-12-19 2010-06-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Process and apparatus for coating articles by means of a low-pressure plasma
WO2013045596A2 (en) * 2011-09-29 2013-04-04 The Morgan Crucible Company Plc Inorganic materials, methods and apparatus for making same, and uses thereof

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AUPM365594A0 (en) * 1994-02-02 1994-02-24 Australian National University, The Method and apparatus for coating a substrate
JPH10265946A (en) * 1997-03-27 1998-10-06 Toyo Metallizing Co Ltd Vapor deposition device and manufacture of thin film using the same
GB2395059B (en) 2002-11-05 2005-03-16 Imp College Innovations Ltd Structured silicon anode
US20090188790A1 (en) 2008-01-18 2009-07-30 4D-S Pty. Ltd. Concentric hollow cathode magnetron sputter source
JPWO2011074439A1 (en) 2009-12-16 2013-04-25 東洋紡株式会社 Negative electrode for lithium ion secondary battery and lithium ion secondary battery using the same

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5227203A (en) * 1992-02-24 1993-07-13 Nkk Corporation Ion-plating method and apparatus therefor
US5846608A (en) * 1994-04-14 1998-12-08 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Process for ion-supported vacuum coating
DE10111515A1 (en) * 2001-02-19 2002-08-14 Fraunhofer Ges Forschung Plasma coating device used for coating metallic strip material in the manufacture of photovoltaic cells and modules comprises a hollow cathode
WO2010069594A1 (en) * 2008-12-19 2010-06-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Process and apparatus for coating articles by means of a low-pressure plasma
WO2013045596A2 (en) * 2011-09-29 2013-04-04 The Morgan Crucible Company Plc Inorganic materials, methods and apparatus for making same, and uses thereof

Also Published As

Publication number Publication date
JP2016504485A (en) 2016-02-12
KR20150079749A (en) 2015-07-08
GB201300133D0 (en) 2013-02-20
WO2014063970A2 (en) 2014-05-01
EP2912205A2 (en) 2015-09-02

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