WO2014050764A1 - Photoelectric conversion element, imaging element, optical sensor - Google Patents

Photoelectric conversion element, imaging element, optical sensor Download PDF

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WO2014050764A1
WO2014050764A1 PCT/JP2013/075564 JP2013075564W WO2014050764A1 WO 2014050764 A1 WO2014050764 A1 WO 2014050764A1 JP 2013075564 W JP2013075564 W JP 2013075564W WO 2014050764 A1 WO2014050764 A1 WO 2014050764A1
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group
photoelectric conversion
film
ring
compound
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PCT/JP2013/075564
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French (fr)
Japanese (ja)
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伊勢 俊大
知昭 吉岡
陽介 山本
大悟 澤木
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富士フイルム株式会社
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Priority to KR1020157006933A priority Critical patent/KR101635332B1/en
Publication of WO2014050764A1 publication Critical patent/WO2014050764A1/en

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    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07DHETEROCYCLIC COMPOUNDS
    • C07D487/00Heterocyclic compounds containing nitrogen atoms as the only ring hetero atoms in the condensed system, not provided for by groups C07D451/00 - C07D477/00
    • C07D487/02Heterocyclic compounds containing nitrogen atoms as the only ring hetero atoms in the condensed system, not provided for by groups C07D451/00 - C07D477/00 in which the condensed system contains two hetero rings
    • C07D487/04Ortho-condensed systems
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09BORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B3/00Dyes with an anthracene nucleus condensed with one or more carbocyclic rings
    • C09B3/78Other dyes in which the anthracene nucleus is condensed with one or more carbocyclic rings
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09BORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B57/00Other synthetic dyes of known constitution
    • C09B57/004Diketopyrrolopyrrole dyes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60Organic compounds having low molecular weight
    • H10K85/615Polycyclic condensed aromatic hydrocarbons, e.g. anthracene
    • H10K85/621Aromatic anhydride or imide compounds, e.g. perylene tetra-carboxylic dianhydride or perylene tetracarboxylic di-imide
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60Organic compounds having low molecular weight
    • H10K85/649Aromatic compounds comprising a hetero atom
    • H10K85/657Polycyclic condensed heteroaromatic hydrocarbons
    • H10K85/6572Polycyclic condensed heteroaromatic hydrocarbons comprising only nitrogen in the heteroaromatic polycondensed ring system, e.g. phenanthroline or carbazole
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K39/00Integrated devices, or assemblies of multiple devices, comprising at least one organic radiation-sensitive element covered by group H10K30/00
    • H10K39/30Devices controlled by radiation
    • H10K39/32Organic image sensors

Definitions

  • the present invention relates to a photoelectric conversion element, an imaging element, and an optical sensor.
  • a conventional photosensor is an element in which a photodiode (PD) is formed in a semiconductor substrate such as silicon (Si), and as a solid-state imaging element, PDs are two-dimensionally arrayed and signal charges generated in each PD
  • PDs are two-dimensionally arrayed and signal charges generated in each PD
  • Si silicon
  • a structure in which a color filter for transmitting light of a specific wavelength is disposed on the light incident surface side of the planar solid-state imaging device is generally used.
  • color filters that transmit blue (B) light, green (G) light, and red (R) light are regularly arranged on each of the two-dimensionally arrayed PDs widely used in digital cameras etc.
  • Single-plate solid-state imaging devices are well known. In this single-plate solid-state imaging device, the light not transmitted through the color filter is not used and the light utilization efficiency is poor.
  • the number of pixels has been increased, the pixel size has become smaller, and the reduction of the aperture ratio and the reduction of the light collection efficiency have become problems.
  • Patent Document 1 a photoelectric conversion film including a compound (3) or the like represented by the following formula is disclosed in the Example column, and it is described that the photoelectric conversion efficiency is high. Further, Patent Documents 2 and 3 also disclose a photoelectric conversion element containing a diketopyrrolopyrrole compound.
  • the present inventors prepared a photoelectric conversion film using a compound (for example, the above-mentioned compound 3) specifically disclosed in Patent Documents 1 to 3, and it was found that the heat resistance and the response speed were not necessarily obtained. It has been found that it has not reached the level required nowadays and further improvement is necessary.
  • a compound for example, the above-mentioned compound 3 specifically disclosed in Patent Documents 1 to 3
  • An object of this invention is to provide the photoelectric conversion element provided with the photoelectric conversion film which shows the outstanding heat resistance and responsiveness in view of the said situation.
  • Another object of the present invention is to provide an imaging device and a photosensor including a photoelectric conversion device.
  • a photoelectric conversion element obtained by laminating a conductive film, a photoelectric conversion film containing a photoelectric conversion material, and a transparent conductive film in this order The photoelectric conversion material is selected from the group consisting of a compound represented by General Formula (1) described later, a compound represented by General Formula (2) described later, and a compound represented by General Formula (3) described later Photoelectric conversion element containing at least one compound X.
  • the photoelectric conversion element provided with the photoelectric conversion film which shows the outstanding heat resistance and responsiveness can be provided. Further, according to the present invention, it is possible to provide an imaging device and a photosensor including the photoelectric conversion device.
  • FIG. 1A and FIG. 1B are schematic cross-sectional views showing one structural example of the photoelectric conversion element. It is a cross-sectional schematic diagram for one pixel of an image pick-up element.
  • a diketopyrrolopyrrole compound contained in the photoelectric conversion film or a compound obtained by condensing an aromatic ring between two pyrrole rings of diketopyrrolopyrrole is used to provide an aromatic at a predetermined position. It has been found that by introducing a group ring containing amine group, the desired effect can be obtained.
  • the photoelectric conversion element 10b shown in FIG. 1B has a configuration in which an electron blocking film 16A, a photoelectric conversion film 12, a hole blocking film 16B, and an upper electrode 15 are stacked in this order on the lower electrode 11. Have.
  • the stacking order of the electron blocking film 16A, the photoelectric conversion film 12, and the hole blocking film 16B in FIGS. 1A and 1B may be reversed depending on the application and characteristics. For example, the positions of the electron blocking film 16A and the photoelectric conversion film 12 may be reversed.
  • the photoelectric conversion element 10 a (10 b) light is preferably incident on the photoelectric conversion film 12 through the transparent conductive film 15. Moreover, when using photoelectric conversion element 10a (10b), an electric field can be applied.
  • the conductive film 11 and the transparent conductive film 15 form a pair of electrodes, and an electric field of 1 ⁇ 10 ⁇ 5 to 1 ⁇ 10 7 V / cm is applied between the pair of electrodes. From the viewpoint of performance and power consumption, an electric field of 1 ⁇ 10 ⁇ 4 to 1 ⁇ 10 6 V / cm is preferable, and an electric field of 1 ⁇ 10 ⁇ 3 to 5 ⁇ 10 5 V / cm is particularly preferable.
  • the voltage application method in FIGS.
  • the electron blocking film 16A side is a cathode and the photoelectric conversion film 12 side is an anode.
  • the photoelectric conversion element 10a (10b) is used as an optical sensor, and also when it is incorporated in an imaging element, voltage application can be performed by the same method.
  • the photoelectric conversion film 12 is a compound represented by General Formula (1) described later as a photoelectric conversion material, a compound represented by General Formula (2) described later, and a compound represented by General Formula (3) described later A membrane comprising at least one compound X selected from the group consisting of By using the compound X, a photoelectric conversion film exhibiting excellent heat resistance and fast response can be obtained.
  • the compounds represented by the general formulas (1) to (3) used in the photoelectric conversion film 12 will be described in detail.
  • aryl group examples include phenyl group, naphthyl group, anthryl group, pyrenyl group, phenanthrenyl group, methylphenyl group, dimethylphenyl group, biphenyl group, fluorenyl group and the like, and phenyl group, naphthyl group or anthryl group is exemplified. preferable.
  • the number of carbon atoms in the heteroaryl group is not particularly limited, but is preferably 3 to 30, and more preferably 3 to 18 in that the characteristics (heat resistance and response) of the photoelectric conversion film are more excellent. Is more preferred.
  • the heteroaryl group may have a substituent W described later.
  • Heteroaryl groups include hetero atoms other than carbon atom and hydrogen atom, and as hetero atoms, for example, nitrogen atom, sulfur atom, oxygen atom, selenium atom, tellurium atom, phosphorus atom, phosphorus atom, silicon atom, or boron atom
  • a nitrogen atom, a sulfur atom or an oxygen atom is mentioned.
  • the number of heteroatoms contained in the heteroaryl group is not particularly limited, and is usually about 1 to 10, preferably 1 to 4.
  • the number of ring members of the heteroaryl group is not particularly limited, but is preferably a 3- to 8-membered ring, more preferably a 5- to 7-membered ring, and particularly preferably a 5- to 6-membered ring.
  • heteroaryl group examples include pyridyl group, quinolyl group, isoquinolyl group, acridinyl group, phenanthrizinyl group, pteridinyl group, pyrazinyl group, quinoxalinyl group, pyrimidinyl group, quinazolyl group, pyridazinyl group, cinnolinyl group, phthalazinyl group, and the like.
  • the substituent W in the present specification is described.
  • a halogen atom an alkyl group (including a cycloalkyl group, a bicycloalkyl group and a tricycloalkyl group), an alkenyl group (including a cycloalkenyl group and a bicycloalkenyl group), an alkynyl group, an aryl group and a heterocyclic ring Group (may be referred to as hetero ring group), cyano group, hydroxy group, nitro group, carboxy group, alkoxy group, aryloxy group, silyloxy group, heterocyclic oxy group, acyloxy group, carbamoyloxy group, alkoxy carbonyloxy group , Aryloxycarbonyloxy group, amino group (including anilino group), ammonio group, acylamino group, acylamino group, aminocarbonylamino group, alkoxycarbonylamino group, aryloxycarbonylamin
  • R 11 , R 12 , R 13 and R 14 each independently represent an alkyl group, an aryl group or a heteroaryl group.
  • at least one of R 11 and R 12 and at least one of R 13 and R 14 represent an aryl group or a heteroaryl group.
  • R 11, R 12, R 13 and R 14 are aryl groups.
  • the definitions and preferred embodiments of the alkyl group, aryl group and heteroaryl group represented by R 11 , R 12 , R 13 and R 14 are the same as the alkyl group, aryl group and heteroaryl group represented by R 1 and R 2 above. Are the same as the definition and preferred embodiment of
  • Ar 1 and Ar 2 each independently represent an arylene group or a heteroarylene group.
  • Ar 1 and Ar 2 are preferably arylene groups in that the characteristics (heat resistance and responsiveness) of the photoelectric conversion film are more excellent.
  • the number of carbon atoms in the arylene group is not particularly limited, but is preferably 6 to 30, and more preferably 6 to 20 in that the characteristics (heat resistance and response) of the photoelectric conversion film are more excellent.
  • the number of carbon atoms in the heteroarylene group is not particularly limited, but is preferably 1 to 20 and more preferably 2 to 12 in that the characteristics (heat resistance and response) of the photoelectric conversion film are more excellent.
  • the heteroarylene group include pyridylene group, quinolylene group, isoquinolylene group, acridine diyl group, phenanthridine diyl group, pyrazine diyl group, quinoxaline diyl group, pyrimidine diyl group, triazine diyl group, imidazole diyl group, pyrazole diyl group, Examples include oxadiazole diyl group, triazole diyl group, furylene group, thienylene group, pyrrol diyl group, indole diyl group, carbazole diyl group and the like.
  • X 1 and X 2 are each independently, O (oxygen atom), S (sulfur atom), or an NR A. Among them, O (oxygen atom) or S (sulfur atom) is preferable, and O (oxygen atom) is more preferable, in that the characteristics (heat resistance and responsiveness) of the photoelectric conversion film are more excellent.
  • R A represents an alkyl group, an aryl group or a heteroaryl group. Especially, an alkyl group is preferable at the point which the characteristic (heat resistance and responsiveness) of a photoelectric conversion film is more excellent.
  • the definitions and the preferred embodiments of the alkyl group, the aryl group and the heteroaryl group represented by R A are the same as the definitions and the preferred embodiment of the alkyl group, the aryl group and the heteroaryl group represented by R 1 and R 2 above. .
  • Q represents a group represented by formula (A), a group represented by formula (B), a group represented by formula (C), a group represented by formula (D), and It is any one group selected from the group consisting of a group represented by formula (E).
  • each of R Q1 to R Q22 independently represents a hydrogen atom or a substituent.
  • the substituent include the above-mentioned substituent W, and examples include an alkyl group, an alkoxy group, a halogen atom and the like. Among them, it is preferable that R Q1 to R Q22 be a hydrogen atom in that the characteristics (heat resistance or response) of the photoelectric conversion element are more excellent.
  • the carbon atoms represented by * 1 to * 4 in the general formulas (A) to (E) are represented by * 1 to * 4 in the general formulas (1) to (3), respectively. Corresponds to a carbon atom. More specifically, examples of structural formulas when groups represented by general formulas (A) to (E) below are introduced into Q in general formulas (1) to (3) Indicates
  • the heat resistance of the compounds represented by the general formulas (1) to (3) is improved, and the photoelectric conversion element can be produced at a high deposition rate under high temperature conditions. And the responsiveness is further improved.
  • the structure of the linking group is not particularly limited, and examples thereof include oxygen atom, sulfur atom, alkylene group, silylene group, alkenylene group, cycloalkylene group, cycloalkenylene group, arylene group, divalent heterocyclic group, imino group, and the like. Or the group which combined these is mentioned, These may have a substituent further.
  • the structure of the ring formed is not particularly limited, and examples thereof include benzene ring, naphthalene ring, anthracene ring, phenanthrene ring, fluorene ring, triphenylene ring, naphthacene ring, biphenyl ring, pyrrole ring, furan ring, thiophene ring, imidazole ring, Oxazole ring, Thiazole ring, Pyridine ring, Pyrazine ring, Pyrimidine ring, Pyridazine ring, Indolizine ring, Indole ring, Indole ring, Benzofuran ring, Benzothiophene ring, Isobenzofuran ring, Quinolizine ring, Quinoline ring, Phthal
  • At least one of Ar 1 and R 11 , Ar 1 and R 12 , and R 11 and R 12 combine with each other to form a ring, and Ar 2 and R 13 , Ar 2 and R 14 , and R Preferably, at least one of 13 and R 14 is bonded to each other to form a ring.
  • the heat resistance and response of the photoelectric conversion film are further improved.
  • n 0 or 1; Among them, n is preferably 0 in terms of more excellent characteristics (heat resistance or response) of the photoelectric conversion element.
  • n 1
  • the compounds represented by the above general formulas (1A) to (3E) are exemplified.
  • the definition of each group in the general formulas (4) to (6) is as described above.
  • the compound represented by General formula (4) is especially preferable at the point which the effect of this invention is more excellent.
  • the compound represented by the general formula (4) is a so-called diketopyrrolopyrrole compound.
  • the compounds represented by the general formulas (1) to (3) are exemplified below.
  • the compounds represented by the general formula (1) to the general formula (3) have an absorption maximum at 400 nm or more and less than 720 nm in the UV-visible absorption spectrum, and the molar absorption coefficient of the absorption maximum wavelength is 10000 mol ⁇ 1 ⁇ l ⁇ cm It is preferably -1 or more.
  • a material having a large molar absorption coefficient is preferable.
  • the compounds represented by the general formulas (1) to (3) are more difficult to be decomposed during deposition as the difference between the melting point and the deposition temperature (melting point-deposition temperature) increases, and the deposition rate increases with an increase in temperature. can do.
  • the difference between the melting point and the vapor deposition temperature (melting point-vapor deposition temperature) is preferably 40 ° C. or more, more preferably 50 ° C. or more, still more preferably 60 ° C. or more, and particularly preferably 80 ° C. or more.
  • the molecular weight of the compound represented by the general formula (1) to the general formula (3) is preferably 300 to 1,500, more preferably 500 to 1000, and particularly preferably 500 to 900. If the molecular weight of the compound is 1,500 or less, the deposition temperature does not increase, and decomposition of the compound does not easily occur. If the molecular weight of the compound is 300 or more, the glass transition point of the deposited film does not decrease, and the heat resistance of the device does not easily decrease.
  • glass transition point (Tg) of the compound represented by General formula (1)-General formula (3) 110 degreeC or more is more preferable, 135 degreeC or more is more preferable, and 150 degreeC or more is especially preferable
  • Tg glass transition point
  • 160 ° C. or more is the most preferable. It is preferable that the glass transition point becomes high because the heat resistance of the element is improved.
  • the compounds represented by the general formula (1) to the general formula (3) are particularly useful as a material of a photoelectric conversion film used for an imaging device, an optical sensor, or a photovoltaic cell.
  • the compound represented by General formula (1) functions as an organic p-type compound in a photoelectric conversion film.
  • it can also be used as a coloring material, a liquid-crystal material, an organic-semiconductor material, an organic light emitting element material, a charge transport material, a pharmaceutical material, a fluorescence diagnostic agent material etc. as another use.
  • the photoelectric conversion film may further contain a photoelectric conversion material of an organic p-type compound or an organic n-type compound.
  • the organic p-type semiconductor (compound) is a donor type organic semiconductor (compound), mainly represented by a hole transporting organic compound, and refers to an organic compound having a property of easily giving an electron. More specifically, it refers to an organic compound having a smaller ionization potential when used in contact with two organic materials. Therefore, as the donor organic compound, any organic compound having an electron donating property can be used. For example, triarylamine compounds, benzidine compounds, pyrazoline compounds, styrylamine compounds, hydrazone compounds, triphenylmethane compounds, carbazole compounds and the like can be used.
  • the organic n-type semiconductor is an acceptor-type organic semiconductor, mainly represented by an electron-transporting organic compound, and refers to an organic compound having a property of easily accepting an electron. More specifically, when the two organic compounds are brought into contact with each other and used, the organic compound having higher electron affinity is used. Therefore, as the acceptor-type organic semiconductor, any organic compound can be used as long as it is an electron-accepting organic compound.
  • the organic n-type compound is preferably a fullerene selected from the group consisting of a fullerene and a fullerene derivative.
  • fullerenes fullerenes, fullerene C 60 , fullerene C 70 , fullerene C 76 , fullerene C 78 , fullerene C 80 , fullerene C 82 , fullerene C 84 , fullerene C 90 , fullerene C 96 , fullerene C 240 , fullerene C 240 , fullerene C 540 , mixed Represents a fullerene, and a fullerene derivative represents a compound to which a substituent is added.
  • a substituent an alkyl group, an aryl group or a heterocyclic group is preferable.
  • the fullerene derivative compounds described in JP-A-2007-123707 are preferable.
  • the photoelectric conversion film preferably has a bulk hetero structure formed by mixing the compound X and a fullerene.
  • the bulk hetero structure is a layer in which a p-type organic semiconductor (compound X) and an n-type organic semiconductor are mixed and dispersed in the photoelectric conversion film, and can be formed by either a wet method or a dry method. Preferred.
  • a p-type organic semiconductor compound X
  • an n-type organic semiconductor are mixed and dispersed in the photoelectric conversion film, and can be formed by either a wet method or a dry method. Preferred.
  • the bulk heterojunction structure is described in detail in, for example, [0013] to [0014] of JP-A-2005-303266.
  • the molar ratio of the organic n-type compound to the compound X (organic n-type compound / the compound X) in the photoelectric conversion film is preferably 1.0 or more, more preferably 1 or more and 10 or less, and 2 or more More preferably, it is 8 or less.
  • the photoelectric conversion film 12 can be formed by a dry film formation method or a wet film formation method.
  • the dry film formation method include physical vapor deposition methods such as vacuum deposition, sputtering, ion plating, and MBE, and CVD methods such as plasma polymerization.
  • a wet film formation method a cast method, a spin coat method, a dipping method, an LB method or the like is used. It is preferably a dry film formation method, and more preferably a vacuum deposition method.
  • the manufacturing conditions such as the degree of vacuum and the evaporation temperature can be set according to a conventional method.
  • the thickness of the photoelectric conversion film 12 is preferably 10 nm or more and 1000 nm or less, more preferably 50 nm or more and 800 nm or less, and particularly preferably 100 nm or more and 500 nm or less.
  • a suitable dark current suppression effect can be obtained, and by setting the thickness to 1000 nm or less, preferable photoelectric conversion efficiency can be obtained.
  • the electrodes are made of a conductive material.
  • a metal, an alloy, a metal oxide, an electrically conductive compound, or a mixture thereof can be used. Since light is incident from the upper electrode 15, the upper electrode 15 needs to be sufficiently transparent to light to be detected.
  • conductive metal oxides such as tin oxide (ATO, FTO) doped with antimony or fluorine, tin oxide, zinc oxide, indium oxide, indium tin oxide (ITO), zinc indium oxide (IZO), etc.
  • Metals such as gold, silver, chromium, nickel, titanium, tungsten, and aluminum, and conductive compounds such as oxides and nitrides of these metals (for example, titanium nitride (TiN) is mentioned), and these metals and conductive properties Mixtures or laminates with metal oxides, inorganic conductive materials such as copper iodide and copper sulfide, organic conductive materials such as polyaniline, polythiophene and polypyrrole, and laminates of these with ITO or titanium nitride .
  • TiN titanium nitride
  • the method of forming the electrode is not particularly limited, and can be appropriately selected according to the electrode material. Specifically, it can be formed by a printing method, a wet method such as a coating method, a physical method such as a vacuum evaporation method, a sputtering method, an ion plating method, or a chemical method such as CVD or plasma CVD.
  • a printing method a wet method such as a coating method
  • a physical method such as a vacuum evaporation method, a sputtering method, an ion plating method, or a chemical method such as CVD or plasma CVD.
  • the material of the electrode is ITO, it can be formed by an electron beam method, a sputtering method, a resistance heating evaporation method, a chemical reaction method (sol-gel method etc.), application of a dispersion of indium tin oxide, or the like.
  • UV-ozone treatment, plasma treatment, and the like can be performed on a film manufactured using
  • the photoelectric conversion element of the present invention may have a charge blocking film. By having the film, the characteristics (photoelectric conversion efficiency, response speed, etc.) of the obtained photoelectric conversion element are more excellent.
  • Examples of the charge blocking film include an electron blocking film and a hole blocking film. Below, each film is explained in full detail.
  • An electron donating organic material can be used for the electron blocking film.
  • low molecular weight materials such as N, N'-bis (3-methylphenyl)-(1,1'-biphenyl) -4,4'-diamine (TPD) and 4,4'-bis [N Aromatic diamine compounds such as-(naphthyl) -N-phenyl-amino] biphenyl ( ⁇ -NPD), oxazole, oxadiazole, triazole, imidazole, imidazolone, stilbene derivative, pyrazoline derivative, tetrahydroimidazole, polyarylalkane, butadiene
  • Porphyrins such as 4,4 ′, 4 ′ ′ tris (N- (3-methylphenyl) N-phenylamino) triphenylamine (m-MTDATA), porphyrin, tetraphenylporphyrin copper, phthalocyanine, copper phthalo
  • polymers such as phenylene vinylene, fluorene, carbazole, indole, pyrene, pyrrole, picoline, thiophene, acetylene, diacetylene and derivatives thereof and derivatives thereof can be used. Any compound having transportability can be used, and specifically, the compounds described in [0083] to [0089] of JP-A-2008-72090 are preferable.
  • the electron blocking film preferably also contains a compound represented by Formula (F-1).
  • F-1 a compound represented by Formula (F-1).
  • R ′ 1 to R ′ 3 each independently represent a hydrogen atom or an alkyl group.
  • R a "11 ⁇ R" 18, R '11 ⁇ R' 18 are each independently a hydrogen atom, a halogen atom, an alkyl group, an aryl group, a heterocyclic group, a hydroxyl group, an amino group, Or a mercapto group, which may further have a substituent.
  • the substituent represented by general formula (A-1) is preferably independently substituted to R ′ ′ 12 and R ′ 12 respectively, and the substituent represented by general formula (A-1) is R ′ ′ 12 and 'replaced independently to 12, R "11, R" 13 ⁇ R “18, R' R 11, R '13 ⁇ R' 18 is hydrogen atom, optionally 1 carbon atoms which may ⁇ have a substituent more preferably 18 alkyl group, particularly preferably a substituent represented by the general formula (a-1) is "substituted independently on 12 and R '12, R" R 11 , R “13 ⁇ R ′ ′ 18 , R ′ 11 and R ′ 13 to R ′ 18 are hydrogen atoms.
  • Y each independently represents a carbon atom, a nitrogen atom, an oxygen atom, a sulfur atom or a silicon atom, and these may further have a substituent. That is, Y represents a divalent linking group consisting of carbon atom, nitrogen atom, oxygen atom, sulfur atom, or silicon atom.
  • R ′ 20 to R ′ 24 are preferably a hydrogen atom, an alkyl group which may have a substituent, an aryl group, or a heterocyclic group, and more preferably a hydrogen atom or a substituent.
  • each of Ra 1 to Ra 8 independently represents a hydrogen atom, a halogen atom, an alkyl group which may have a substituent, an aryl group, a heterocyclic group, a hydroxyl group, an amino group, or Represents a mercapto group.
  • Specific examples of the further substituent include the substituent W. Also, a plurality of these substituents may be bonded to each other to form a ring.
  • Each of Ra 1 to Ra 8 is preferably a hydrogen atom, a halogen atom, an alkyl group having 1 to 18 carbon atoms, an aryl group having 6 to 18 carbon atoms, or a heterocyclic group having 4 to 16 carbon atoms.
  • An alkyl group of 1 to 12 or an aryl group having 6 to 14 carbon atoms is more preferable, and a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, or an aryl group having 6 to 10 carbon atoms is more preferable.
  • the alkyl group may be branched.
  • Xa represents a single bond, an oxygen atom, a sulfur atom, an alkylene group, a silylene group, an alkenylene group, a cycloalkylene group, a cycloalkenylene group, an arylene group, a divalent heterocyclic group, or an imino group, which are further substituted May be included.
  • R ′ 1 represents a hydrogen atom or an alkyl group.
  • R ′ 1 is preferably a methyl group, an ethyl group, a propyl group, an iso-propyl group, a butyl group or a tert-butyl group, and more preferably a methyl group, an ethyl group, a propyl group, an iso-propyl group or It is a tert-butyl group, more preferably a methyl group, an ethyl group, an iso-propyl group or a tert-butyl group, and particularly preferably a methyl group, an ethyl group or a tert-butyl group.
  • R ′ 2 represents a hydrogen atom or an alkyl group.
  • R ′ 2 is preferably a hydrogen atom, a methyl group, an ethyl group, a propyl group, an iso-propyl group, a butyl group or a tert-butyl group, and more preferably a hydrogen atom, a methyl group, an ethyl group or a propyl group And more preferably a hydrogen atom or a methyl group, and particularly preferably a methyl group.
  • R '3 represents a hydrogen atom or an alkyl group.
  • R ′ 3 is preferably a hydrogen atom or a methyl group, more preferably a methyl group.
  • R ′ 1 to R ′ 3 may be bonded to each other to form a ring.
  • the number of ring members is not particularly limited, but it is preferably a 5- or 6-membered ring, more preferably a 6-membered ring.
  • each of Ra 33 to Ra 38 , Ra 41 , Ra 44 to Ra 48 , Ra 51 , Ra 52 , and Ra 55 to Ra 58 independently represents a hydrogen atom or It represents a halogen atom (preferably a fluorine atom, a chlorine atom, a bromine atom or an iodine atom) or an alkyl group. It is preferable that it is a hydrogen atom or an alkyl group from the viewpoint that it is advantageous to transport of a hole that the substituent is a low polarity substituent, and a hydrogen atom is more preferable.
  • the ring includes the aforementioned ring R.
  • the ring is preferably a benzene ring, a naphthalene ring, an anthracene ring, a pyridine ring, a pyrimidine ring and the like.
  • Xc 1 , Xc 2 and Xc 3 each independently represent a single bond, an oxygen atom, a sulfur atom, an alkylene group, a silylene group, an alkenylene group, a cycloalkylene group, a cycloalkenylene group, an arylene group, a divalent heterocyclic group Or an imino group.
  • Xc 1 , Xc 2 and Xc 3 each represent an alkylene group, a silylene group, an alkenylene group, a cycloalkylene group, a cycloalkenylene group, an arylene group, a divalent heterocyclic group or an imino group, these further have a substituent You may have.
  • the additional substituent includes a substituent W.
  • Xc 1 , Xc 2 and Xc 3 each represents a single bond, an alkylene group having 1 to 12 carbon atoms, an alkenylene group having 2 to 12 carbon atoms, an arylene group having 6 to 14 carbon atoms, or a heterocyclic group having 4 to 13 carbon atoms
  • an imino group eg, phenylimino group, methylimino group, t-butylimino group
  • an oxygen atom, a sulfur atom, or a hydrocarbon group having 1 to 12 carbon atoms (preferably an aryl group or an alkyl group) is preferable, a single bond
  • An alkylene group having 1 to 6 carbon atoms eg, methylene group, 1,2-ethylene group, 1,1-dimethyl methylene group
  • an alkenylene group having 2 carbon atoms eg, -CH 2 CHCH 2-
  • An arylene group of 6 to 10 eg, a 1,2-pheny
  • Z 31 , Z 41 and Z 51 each independently represent a cycloalkyl ring, an aromatic hydrocarbon ring or an aromatic heterocyclic ring.
  • Z 31 , Z 41 and Z 51 are fused to a benzene ring.
  • Z 31 , Z 41 and Z 51 are preferably aromatic hydrocarbon rings from the viewpoint that high heat resistance and high hole transportability of the photoelectric conversion element can be expected.
  • Porphyrin compounds such as DCM (4-dicyanomethylene-2-methyl-6- (4- (dimethylaminostyryl))-4H pyran), 4H pyran compounds can be used.
  • styryl compounds such as DCM (4-dicyanomethylene-2-methyl-6- (4- (dimethylaminostyryl))-4H pyran
  • 4H pyran compounds can be used.
  • compounds described in paragraphs [0073] to [0078] of JP-A-2008-72090 are preferable.
  • the method for producing the charge blocking film is not particularly limited, and the film can be formed by a dry film forming method or a wet film forming method.
  • a vapor deposition method, a sputtering method, etc. can be used as a dry film forming method.
  • the vapor deposition may be physical vapor deposition (PVD) or chemical vapor deposition (CVD), but physical vapor deposition such as vacuum vapor deposition is preferred.
  • PVD physical vapor deposition
  • CVD chemical vapor deposition
  • a wet film forming method an inkjet method, a spray method, a nozzle printing method, a spin coating method, a dip coating method, a casting method, a die coating method, a roll coating method, a bar coating method, a gravure coating method, etc. can be used. From the viewpoint of high precision patterning, the inkjet method is preferred.
  • the thickness of the charge blocking film is preferably 10 to 200 nm, more preferably 30 to 150 nm, and particularly preferably 50 to 100 nm. When this thickness is too thin, the dark current suppressing effect is reduced, and when it is too thick, the photoelectric conversion efficiency is reduced.
  • sealing layer materials may be selected and manufactured according to the description in paragraphs [0210] to [0215] of JP-A-2011-082508.
  • a photoelectric conversion element of the present invention As a use of a photoelectric conversion element, although a photovoltaic cell and an optical sensor are mentioned, for example, it is preferred to use a photoelectric conversion element of the present invention as an optical sensor. As an optical sensor, what was used by the said photoelectric conversion element independently may be used, and what has a form of the line sensor which distribute
  • the photoelectric conversion element of the present invention converts optical image information into an electrical signal using an optical system and a driving unit such as a scanner in a line sensor, and the two-dimensional sensor converts optical image information into an optical signal as an imaging module.
  • the system functions as an imaging element by forming an image on a sensor and converting it into an electric signal. Since a photovoltaic cell is a power generation device, the efficiency of converting light energy into electrical energy is an important performance, but the dark current, which is the current in a dark place, does not pose a functional problem. Furthermore, there is no need for a subsequent heating process such as color filter installation. Since it is important that the light sensor convert light and dark signals into electrical signals with high accuracy, the efficiency of converting the amount of light into current is also an important performance, but outputting a signal in a dark place causes noise, Low dark current is required. Furthermore, resistance to the subsequent steps is also important.
  • FIG. 2 is a schematic cross-sectional view showing a schematic configuration of an imaging device for describing an embodiment of the present invention.
  • the image pickup device is used by being mounted on an image pickup apparatus such as a digital camera or a digital video camera, an image pickup module such as an electronic endoscope, or a mobile phone.
  • This imaging device has a plurality of photoelectric conversion devices configured as shown in FIG. 1 and a circuit board on which a readout circuit for reading out a signal corresponding to the charge generated in the photoelectric conversion film of each photoelectric conversion device is formed.
  • a plurality of photoelectric conversion elements are arranged in a one-dimensional or two-dimensional manner on the same plane above the circuit board.
  • the imaging device 100 illustrated in FIG. 2 includes a substrate 101, an insulating layer 102, a connection electrode 103, a pixel electrode (lower electrode) 104, a connection portion 105, a connection portion 106, a photoelectric conversion film 107, and an opposite electrode.
  • the pixel electrode 104 has the same function as the lower electrode 11 of the photoelectric conversion element 10a shown in FIG.
  • the counter electrode 108 has the same function as the upper electrode 15 of the photoelectric conversion element 10 a shown in FIG. 1.
  • the photoelectric conversion film 107 has the same configuration as the layer provided between the lower electrode 11 and the upper electrode 15 of the photoelectric conversion element 10 a shown in FIG. 1.
  • the substrate 101 is a glass substrate or a semiconductor substrate such as Si.
  • An insulating layer 102 is formed on the substrate 101.
  • a plurality of pixel electrodes 104 and a plurality of connection electrodes 103 are formed on the surface of the insulating layer 102.
  • the photoelectric conversion film 107 is a layer common to all the photoelectric conversion elements provided on the plurality of pixel electrodes 104 so as to cover them.
  • the counter electrode 108 is one electrode provided on the photoelectric conversion film 107 and common to all the photoelectric conversion elements.
  • the counter electrode 108 is formed on the connection electrode 103 disposed outside the photoelectric conversion film 107 and is electrically connected to the connection electrode 103.
  • connection portion 106 is embedded in the insulating layer 102 and is a plug or the like for electrically connecting the connection electrode 103 and the counter electrode voltage supply portion 115.
  • the counter electrode voltage supply unit 115 is formed on the substrate 101, and applies a predetermined voltage to the counter electrode 108 through the connection portion 106 and the connection electrode 103.
  • the power supply voltage is boosted by a charge pump or other booster circuit to supply the predetermined voltage.
  • the readout circuit 116 is provided on the substrate 101 corresponding to each of the plurality of pixel electrodes 104, and reads out a signal corresponding to the charge collected by the corresponding pixel electrode 104.
  • the readout circuit 116 is formed of, for example, a CCD, a CMOS circuit, or a TFT circuit, and is shielded from light by a light shielding layer (not shown) disposed in the insulating layer 102.
  • the readout circuit 116 is electrically connected to the corresponding pixel electrode 104 via the connection portion 105.
  • the light shielding layer 113 is formed on the sealing layer 110 except the area where the color filter 111 and the partition wall 112 are provided, and prevents light from entering the photoelectric conversion film 107 formed in areas other than the effective pixel area.
  • the protective layer 114 is formed on the color filter 111, the partition wall 112, and the light shielding layer 113, and protects the entire imaging element 100.
  • the imaging device 100 when light is incident, the light is incident on the photoelectric conversion film 107, and a charge is generated here. Holes among the generated charges are collected by the pixel electrode 104, and a voltage signal corresponding to the amount is output to the outside of the imaging element 100 by the readout circuit 116.
  • the method of manufacturing the imaging device 100 is as follows.
  • the connection portions 105 and 106, the plurality of connection electrodes 103, the plurality of pixel electrodes 104, and the insulating layer 102 are formed on the circuit substrate on which the counter electrode voltage supply portion 115 and the readout circuit 116 are formed.
  • the plurality of pixel electrodes 104 are arranged on the surface of the insulating layer 102 in, for example, a square lattice.
  • the photoelectric conversion film 107 is formed on the plurality of pixel electrodes 104 by, for example, a vacuum heating evaporation method.
  • the counter electrode 108 is formed on the photoelectric conversion film 107 under vacuum, for example, by sputtering.
  • the buffer layer 109 and the sealing layer 110 are sequentially formed on the counter electrode 108 by, for example, a vacuum heating evaporation method.
  • the protective layer 114 is formed, and the imaging device 100 is completed.
  • the compounds D1 to D2 and D4 to D14 described later were synthesized with reference to the synthesis method of the compound D3 and a known method.
  • the compounds (D1 to D14, RD1 to RD4) used in this example and the comparative example are collectively shown below.
  • the photoelectric conversion element of the form of Fig.1 (a) was produced.
  • the photoelectric conversion element includes the lower electrode 11, the electron blocking film 16 A, the photoelectric conversion film 12, and the upper electrode 15.
  • amorphous ITO is deposited on a glass substrate by sputtering to form the lower electrode 11 (thickness: 30 nm), and the following compound (EB-1) is vacuum-heated on the lower electrode 11
  • the film was formed by vapor deposition to form an electron blocking film 16A (thickness: 100 nm).
  • the above compounds (D1 to D14, RD1 to RD4) and fullerene (C 60 ) become 100 nm and 300 nm in single layer conversion, respectively, on the electron blocking film 16A.
  • the film was co-deposited by vacuum heating deposition to form a film, and the photoelectric conversion film 12 was formed.
  • amorphous ITO was formed into a film on the photoelectric conversion film 12 by a sputtering method to form an upper electrode 15 (transparent conductive film) (thickness: 10 nm).
  • an aluminum oxide (Al 2 O 3 ) layer was formed thereon by an ALCVD method, and a photoelectric conversion element was produced.
  • Example 1 [Rise time from 0 to 98% signal strength in the embodiment (or comparative example) X] / [rise time from 0 to 98% signal strength in the embodiment 1] In practice, it is preferably 20 or less, and more preferably 5 or less.
  • Example 3 when X 1 and X 2 are O (oxygen atom) (corresponding to Example 3), it is confirmed that the response speed and the heat resistance are more excellent.
  • X 1 and X 2 are O (oxygen atom) (corresponding to Example 3)
  • Ar 1 and Ar 2 are arylene groups (it corresponds to Example 1), it turned out that a response is more excellent so that comparison with Example 1 and Example 8 may show.
  • RD4 which does not have an amino group
  • RD2 and RD3 correspond to the exemplified compounds (19) and (71) exemplified in JP-A-2010-192782, and RD4 is used in Example 6 of JP-A-2003-346926. It corresponds to a compound.
  • Imaging device similar to that shown in FIG. 2 was produced. That is, after depositing amorphous TiN 30 nm on a CMOS substrate by sputtering, it is patterned by photolithography so that one pixel exists on each of the photodiodes (PD) on the CMOS substrate to form a lower electrode. After the film formation of the electron blocking material, it was manufactured in the same manner as in Examples 1 to 14 and Comparative Examples 1 to 4. The evaluation was also conducted similarly, and the same results as in Table 1 were obtained, and it was found that the imaging device is also suitable for production and shows excellent performance.

Abstract

The purpose of the present invention is to provide a photoelectric conversion element which is provided with a photoelectric conversion film exhibiting excellent heat resistance and excellent response, and an imaging element and an optical sensor containing said photoelectric conversion element. This photoelectric conversion element is formed by laminating a conductive film, a photoelectric conversion film containing a photoelectric conversion material, and a transparent conductive film, in that order, wherein the photoelectric conversion material contains at least one compound X selected from the group consisting of compounds represented by general formula (1), compounds represented by general formula (2), and compounds represented by general formula (3).

Description

光電変換素子、撮像素子、光センサPhotoelectric conversion element, imaging element, optical sensor
 本発明は、光電変換素子、撮像素子、光センサに関する。 The present invention relates to a photoelectric conversion element, an imaging element, and an optical sensor.
 従来の光センサは、シリコン(Si)などの半導体基板中にフォトダイオード(PD)を形成した素子であり、固体撮像素子としては、PDを2次元的に配列し、各PDで発生した信号電荷を回路で読み出す平面型固体撮像素子が広く用いられている。 A conventional photosensor is an element in which a photodiode (PD) is formed in a semiconductor substrate such as silicon (Si), and as a solid-state imaging element, PDs are two-dimensionally arrayed and signal charges generated in each PD A flat-type solid-state image sensor which reads out the signal by a circuit is widely used.
 カラー固体撮像素子を実現するには、平面型固体撮像素子の光入射面側に、特定の波長の光を透過するカラーフィルタを配した構造が一般的である。現在、デジタルカメラなどに広く用いられている2次元的に配列した各PD上に、青色(B)光、緑色(G)光、赤色(R)光を透過するカラーフィルタを規則的に配した単板式固体撮像素子がよく知られている。
 この単板式固体撮像素子においては、カラーフィルタを透過しなかった光が利用されず光利用効率が悪い。近年、多画素化が進む中、画素サイズが小さくなっており、開口率の低下、集光効率の低下が問題になっている。
In order to realize a color solid-state imaging device, a structure in which a color filter for transmitting light of a specific wavelength is disposed on the light incident surface side of the planar solid-state imaging device is generally used. Currently, color filters that transmit blue (B) light, green (G) light, and red (R) light are regularly arranged on each of the two-dimensionally arrayed PDs widely used in digital cameras etc. Single-plate solid-state imaging devices are well known.
In this single-plate solid-state imaging device, the light not transmitted through the color filter is not used and the light utilization efficiency is poor. In recent years, while the number of pixels has been increased, the pixel size has become smaller, and the reduction of the aperture ratio and the reduction of the light collection efficiency have become problems.
 これらの欠点を解決するため、アモルファスシリコンによる光電変換膜や光電変換膜を信号読出し用基板上に形成する構造が知られている。
 光電変換膜を用いた光電変換素子、撮像素子、光センサについては幾つかの公知例がある。
 例えば、特許文献1では、その実施例欄において以下式で表されるような化合物(3)などを含む光電変換膜が開示されており、高光電変換効率である旨が記されている。また、特許文献2および3においても、ジケトピロロピロール化合物を含む光電変換素子が開示されている。
In order to solve these defects, a structure is known in which a photoelectric conversion film or a photoelectric conversion film of amorphous silicon is formed on a signal readout substrate.
There are several known examples of a photoelectric conversion element, an imaging element, and an optical sensor using a photoelectric conversion film.
For example, in Patent Document 1, a photoelectric conversion film including a compound (3) or the like represented by the following formula is disclosed in the Example column, and it is described that the photoelectric conversion efficiency is high. Further, Patent Documents 2 and 3 also disclose a photoelectric conversion element containing a diketopyrrolopyrrole compound.
Figure JPOXMLDOC01-appb-C000004
Figure JPOXMLDOC01-appb-C000004
特開2006-339424号公報Japanese Patent Application Publication No. 2006-339424 特開2010-192782号公報Unexamined-Japanese-Patent No. 2010-192782 特開2003-346926号公報Japanese Patent Application Publication No. 2003-346926
 近年、撮像素子や光センサなどの性能向上の要求に伴い、これらに使用される光電変換膜に求められる耐熱性および応答速度などの諸特性に関しても、その向上が求められている。例えば、光電変換素子を撮像素子や光電池など種々の用途に応用する場合、プロセス適性の点から、光電変換素子が高い耐熱性を示すことが求められる。より具体的には、撮像素子を形成する場合のプロセスとして、カラーフィルタ設置、保護膜設置、素子のハンダ付け等、加熱処理を施す工程が数多くあり、光電変換素子はこれらの工程を経ても優れた特性(応答速度、低暗電流特性など)を示すことが求められる。
 本発明者らは、特許文献1~3で具体的に開示されている化合物(例えば、上記化合物3)を使用して光電変換膜の作製を行ったところ、耐熱性および応答速度の点において必ずしも昨今求められるレベルに達しておらず、さらなる向上が必要であることを見出した。
In recent years, with the demand for performance improvement of imaging devices, optical sensors and the like, improvements have also been required for various characteristics such as heat resistance and response speed required for photoelectric conversion films used for these. For example, when the photoelectric conversion element is applied to various applications such as an imaging element and a photoelectric cell, the photoelectric conversion element is required to exhibit high heat resistance from the viewpoint of process suitability. More specifically, as a process for forming an imaging device, there are many processes for applying heat treatment such as color filter installation, protective film installation, device soldering, etc. The photoelectric conversion device is excellent even through these processes It is required to show other characteristics (response speed, low dark current characteristics, etc.).
The present inventors prepared a photoelectric conversion film using a compound (for example, the above-mentioned compound 3) specifically disclosed in Patent Documents 1 to 3, and it was found that the heat resistance and the response speed were not necessarily obtained. It has been found that it has not reached the level required nowadays and further improvement is necessary.
 本発明は、上記実情に鑑みて、優れた耐熱性および応答性を示す光電変換膜を備える光電変換素子を提供することを目的とする。
 また、本発明は、光電変換素子を含む撮像素子および光センサを提供することも目的とする。
An object of this invention is to provide the photoelectric conversion element provided with the photoelectric conversion film which shows the outstanding heat resistance and responsiveness in view of the said situation.
Another object of the present invention is to provide an imaging device and a photosensor including a photoelectric conversion device.
 本発明者らは、上記課題について鋭意検討した結果、光電変換膜に含まれるジケトピロロピロール化合物、または、ジケトピロロピロールの二つのピロール環の間にさらに芳香環を縮環した化合物の所定の位置に芳香族環含有アミン基を導入することにより上記課題を解決できることを見出し、本発明を完成するに至った。
 すなわち、以下に示す手段により上記課題を解決し得る。
As a result of intensive studies on the above problems, the present inventors have found that a diketopyrrolopyrrole compound contained in a photoelectric conversion film or a compound in which an aromatic ring is further condensed between two pyrrole rings of diketopyrrolopyrrole. It has been found that the above-mentioned problems can be solved by introducing an aromatic ring-containing amine group at the position of, and the present invention has been completed.
That is, the above-mentioned subject can be solved by the means shown below.
(1) 導電性膜、光電変換材料を含む光電変換膜、および透明導電性膜をこの順で積層してなる光電変換素子であって、
 光電変換材料が、後述する一般式(1)で表される化合物、後述する一般式(2)で表される化合物、および、後述する一般式(3)で表される化合物からなる群から選択される少なくとも一つの化合物Xを含む、光電変換素子。
(2) 化合物Xが、後述する一般式(4)で表される化合物である、(1)に記載の光電変換素子。
(3) Ar1とR11、Ar1とR12、R11とR12、Ar2とR13、Ar2とR14、および、R13とR14の少なくとも一つがそれぞれ互いに結合して環を形成している、(1)または(2)に記載の光電変換素子。
(4) X1およびX2がOである、(1)~(3)のいずれかに記載の光電変換素子。
(5) 光電変換膜が、さらに有機n型化合物を含む、(1)~(4)のいずれかに記載の光電変換素子。
(6) 有機n型化合物が、フラーレンおよびその誘導体を含むフラーレン類を含む、(5)に記載の光電変換素子。
(1) A photoelectric conversion element obtained by laminating a conductive film, a photoelectric conversion film containing a photoelectric conversion material, and a transparent conductive film in this order,
The photoelectric conversion material is selected from the group consisting of a compound represented by General Formula (1) described later, a compound represented by General Formula (2) described later, and a compound represented by General Formula (3) described later Photoelectric conversion element containing at least one compound X.
(2) The photoelectric conversion element as described in (1) whose compound X is a compound represented by General formula (4) mentioned later.
(3) Ar 1 and R 11 , Ar 1 and R 12 , R 11 and R 12 , Ar 2 and R 13 , Ar 2 and R 14 , and at least one of R 13 and R 14 respectively bond to each other to form a ring The photoelectric conversion element as described in (1) or (2) which is forming.
(4) The photoelectric conversion device according to any one of (1) to (3), wherein X 1 and X 2 are O.
(5) The photoelectric conversion device according to any one of (1) to (4), wherein the photoelectric conversion film further contains an organic n-type compound.
(6) The photoelectric conversion device according to (5), wherein the organic n-type compound comprises fullerenes including fullerene and a derivative thereof.
(7) 化合物Xとフラーレン類とのモル比(フラーレン類のモル量/化合物Xのモル量)が1.0以上である、(6)に記載の光電変換素子。
(8) 導電性膜と透明導電性膜との間に電荷ブロッキング膜が配置される、(1)~(7)のいずれかに記載の光電変換素子。
(9) (1)~(8)のいずれかに記載の光電変換素子を含む撮像素子。
(10) (1)~(8)のいずれかに記載の光電変換素子を含む光センサ。
(7) The photoelectric conversion element as described in (6) whose molar ratio (molar amount of fullerenes / molar amount of compound X) of compound X and fullerenes is 1.0 or more.
(8) The photoelectric conversion device according to any one of (1) to (7), wherein a charge blocking film is disposed between the conductive film and the transparent conductive film.
(9) An imaging device comprising the photoelectric conversion device according to any one of (1) to (8).
(10) An optical sensor comprising the photoelectric conversion device according to any one of (1) to (8).
 本発明によれば、優れた耐熱性および応答性を示す光電変換膜を備える光電変換素子を提供することができる。
 また、本発明によれば、光電変換素子を含む撮像素子および光センサを提供することができる。
ADVANTAGE OF THE INVENTION According to this invention, the photoelectric conversion element provided with the photoelectric conversion film which shows the outstanding heat resistance and responsiveness can be provided.
Further, according to the present invention, it is possible to provide an imaging device and a photosensor including the photoelectric conversion device.
図1(a)および図1(b)は、それぞれ光電変換素子の一構成例を示す断面模式図である。FIG. 1A and FIG. 1B are schematic cross-sectional views showing one structural example of the photoelectric conversion element. 撮像素子の1画素分の断面模式図である。It is a cross-sectional schematic diagram for one pixel of an image pick-up element.
 以下に、本発明の光電変換素子の好適実施態様について説明する。
 まず、本発明の従来技術と比較した特徴点について詳述する。
 上述したように、本発明においては、光電変換膜に含まれるジケトピロロピロール化合物、またはジケトピロロピロールの二つのピロール環の間にさらに芳香環を縮環した化合物中の所定の位置に芳香族環含有アミン基を導入することにより、所望の効果が得られることを見出している。このような芳香族環含有アミン基を導入することにより、使用する化合物の分子量が大きくなり化合物間の相互作用が適度に大きくなると共に、環構造が多く導入されることにより分子の自由度が低下し、結果として耐熱性が向上したものと推測される。また、芳香族環含有アミン基を導入することにより、正孔を安定に保持できる骨格が分子の外側に張り出し、分子間での正孔のやり取りが容易になった結果、応答速度が向上したものと推測される。
Below, the preferable embodiment of the photoelectric conversion element of this invention is demonstrated.
First, the features of the present invention in comparison with the prior art will be described in detail.
As described above, in the present invention, a diketopyrrolopyrrole compound contained in the photoelectric conversion film or a compound obtained by condensing an aromatic ring between two pyrrole rings of diketopyrrolopyrrole is used to provide an aromatic at a predetermined position. It has been found that by introducing a group ring containing amine group, the desired effect can be obtained. By introducing such an aromatic ring-containing amine group, the molecular weight of the compound to be used is increased and the interaction between the compounds is appropriately increased, and the degree of freedom of the molecule is reduced by introducing a large number of ring structures. As a result, it is presumed that the heat resistance is improved. In addition, by introducing an aromatic ring-containing amine group, a skeleton capable of stably holding holes protrudes to the outside of the molecule, facilitating exchange of holes between molecules, resulting in improved response speed. It is guessed.
 以下に、本発明の光電変換素子の好適実施態様について図面を参照して説明する。図1に、本発明の光電変換素子の一実施形態の断面模式図を示す。
 図1(a)に示す光電変換素子10aは、下部電極として機能する導電性膜(以下、下部電極とも記す)11と、下部電極11上に形成された電子ブロッキング膜16Aと、電子ブロッキング膜16A上に形成された光電変換膜12と、上部電極として機能する透明導電性膜(以下、上部電極とも記す)15とがこの順に積層された構成を有する。
 図1(b)に別の光電変換素子の構成例を示す。図1(b)に示す光電変換素子10bは、下部電極11上に、電子ブロッキング膜16Aと、光電変換膜12と、正孔ブロッキング膜16Bと、上部電極15とがこの順に積層された構成を有する。なお、図1(a)、図1(b)中の電子ブロッキング膜16A、光電変換膜12、正孔ブロッキング膜16Bの積層順は、用途、特性に応じて逆にしても構わない。例えば、電子ブロッキング膜16Aと光電変換膜12との位置を逆にしてもよい。
Hereinafter, preferred embodiments of the photoelectric conversion element of the present invention will be described with reference to the drawings. In FIG. 1, the cross-sectional schematic diagram of one Embodiment of the photoelectric conversion element of this invention is shown.
The photoelectric conversion element 10a shown in FIG. 1A includes a conductive film (hereinafter also referred to as a lower electrode) 11 functioning as a lower electrode, an electron blocking film 16A formed on the lower electrode 11, and an electron blocking film 16A. The photoelectric conversion film 12 formed thereon and the transparent conductive film (hereinafter also referred to as an upper electrode) 15 which functions as an upper electrode have a configuration in which the photoelectric conversion film 12 is stacked in this order.
The structural example of another photoelectric conversion element is shown in FIG.1 (b). The photoelectric conversion element 10b shown in FIG. 1B has a configuration in which an electron blocking film 16A, a photoelectric conversion film 12, a hole blocking film 16B, and an upper electrode 15 are stacked in this order on the lower electrode 11. Have. The stacking order of the electron blocking film 16A, the photoelectric conversion film 12, and the hole blocking film 16B in FIGS. 1A and 1B may be reversed depending on the application and characteristics. For example, the positions of the electron blocking film 16A and the photoelectric conversion film 12 may be reversed.
 光電変換素子10a(10b)の構成では、透明導電性膜15を介して光電変換膜12に光が入射されることが好ましい。
 また、光電変換素子10a(10b)を使用する場合には、電場を印加することができる。この場合、導電性膜11と透明導電性膜15とが一対の電極をなし、この一対の電極間に、1×10-5~1×107V/cmの電場を印加することが好ましい。性能および消費電力の観点から、1×10-4~1×106V/cmの電場が好ましく、1×10-3~5×105V/cmの電場が特に好ましい。
 なお、電圧印加方法については、図1(a)および(b)において、電子ブロッキング膜16A側が陰極であり、光電変換膜12側が陽極となるように印加することが好ましい。光電変換素子10a(10b)を光センサとして使用した場合、また、撮像素子に組み込んだ場合も、同様の方法により電圧の印加を行うことができる。
In the configuration of the photoelectric conversion element 10 a (10 b), light is preferably incident on the photoelectric conversion film 12 through the transparent conductive film 15.
Moreover, when using photoelectric conversion element 10a (10b), an electric field can be applied. In this case, preferably, the conductive film 11 and the transparent conductive film 15 form a pair of electrodes, and an electric field of 1 × 10 −5 to 1 × 10 7 V / cm is applied between the pair of electrodes. From the viewpoint of performance and power consumption, an electric field of 1 × 10 −4 to 1 × 10 6 V / cm is preferable, and an electric field of 1 × 10 −3 to 5 × 10 5 V / cm is particularly preferable.
As for the voltage application method, in FIGS. 1A and 1B, it is preferable to apply so that the electron blocking film 16A side is a cathode and the photoelectric conversion film 12 side is an anode. When the photoelectric conversion element 10a (10b) is used as an optical sensor, and also when it is incorporated in an imaging element, voltage application can be performed by the same method.
 以下に、光電変換素子10a(10b)を構成する各層(光電変換膜12、電子ブロッキング膜16A、下部電極11、上部電極15、正孔ブロッキング膜16Bなど)の態様について詳述する。
 まず、光電変換膜12について詳述する。
Below, the aspect of each layer (The photoelectric conversion film 12, the electron blocking film 16A, the lower electrode 11, the upper electrode 15, the hole blocking film 16B etc.) which comprises the photoelectric conversion element 10a (10b) is explained in full detail.
First, the photoelectric conversion film 12 will be described in detail.
[光電変換膜]
 光電変換膜12は、光電変換材料として後述する一般式(1)で表される化合物、後述する一般式(2)で表される化合物、および、後述する一般式(3)で表される化合物からなる群から選択される少なくとも1つの化合物Xを含む膜である。該化合物Xを使用することにより、優れた耐熱性および高速応答性を示す光電変換膜が得られる。
 まず、光電変換膜12で使用される一般式(1)~一般式(3)で表される化合物について詳述する。
[Photoelectric conversion film]
The photoelectric conversion film 12 is a compound represented by General Formula (1) described later as a photoelectric conversion material, a compound represented by General Formula (2) described later, and a compound represented by General Formula (3) described later A membrane comprising at least one compound X selected from the group consisting of By using the compound X, a photoelectric conversion film exhibiting excellent heat resistance and fast response can be obtained.
First, the compounds represented by the general formulas (1) to (3) used in the photoelectric conversion film 12 will be described in detail.
Figure JPOXMLDOC01-appb-C000005
Figure JPOXMLDOC01-appb-C000005
 一般式(1)~一般式(3)中、R1およびR2は、それぞれ独立に、アルキル基、アリール基、または、ヘテロアリール基を表す。なかでも、合成が容易で、光電変換膜の特性(耐熱性および応答性)がより優れる点で、アルキル基が好ましい。
 アルキル基中の炭素数は特に制限されないが、光電変換膜の特性(耐熱性および応答性)がより優れる点で、1~10が好ましく、1~6がより好ましく、1~3がさらに好ましい。アルキル基としては、直鎖状、分岐状、環状のいずれの構造であってもよい。
 アルキル基として好ましいものは、例えば、メチル基、エチル基、n-プロピル基、n―ブチル基、n-ヘキシル基などが挙げられる。
In the general formulas (1) to (3), R 1 and R 2 each independently represent an alkyl group, an aryl group or a heteroaryl group. Among them, an alkyl group is preferable in that the synthesis is easy and the characteristics (heat resistance and response) of the photoelectric conversion film are more excellent.
The number of carbon atoms in the alkyl group is not particularly limited, but is preferably 1 to 10, more preferably 1 to 6, and still more preferably 1 to 3 in that the characteristics (heat resistance and response) of the photoelectric conversion film are more excellent. The alkyl group may have any of linear, branched and cyclic structures.
Preferred examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an n-butyl group and an n-hexyl group.
 アリール基中の炭素数は特に制限されないが、光電変換膜の特性(耐熱性および応答性)がより優れる点で、6~30が好ましく、6~18がより好ましい。アリール基は、単環構造でも、2環以上の環が縮環した縮合環構造でもよく、後述する置換基Wを有していてもよい。
 アリール基としては、例えば、フェニル基、ナフチル基、アントリル基、ピレニル基、フェナントレニル基、メチルフェニル基、ジメチルフェニル基、ビフェニル基、フルオレニル基などが挙げられ、フェニル基、ナフチル基、またはアントリル基が好ましい。
The number of carbon atoms in the aryl group is not particularly limited, but is preferably 6 to 30, and more preferably 6 to 18 in that the characteristics (heat resistance and responsiveness) of the photoelectric conversion film are more excellent. The aryl group may have a single ring structure or a condensed ring structure in which two or more rings are fused, and may have a substituent W described later.
Examples of the aryl group include phenyl group, naphthyl group, anthryl group, pyrenyl group, phenanthrenyl group, methylphenyl group, dimethylphenyl group, biphenyl group, fluorenyl group and the like, and phenyl group, naphthyl group or anthryl group is exemplified. preferable.
 ヘテロアリール基(1価の芳香族複素環基)中の炭素数は特に制限されないが、光電変換膜の特性(耐熱性および応答性)がより優れる点で、3~30が好ましく、3~18がより好ましい。ヘテロアリール基は、後述する置換基Wを有していてもよい。
 ヘテロアリール基には炭素原子および水素原子以外にヘテロ原子が含まれ、ヘテロ原子としては、例えば、窒素原子、硫黄原子、酸素原子、セレン原子、テルル原子、リン原子、ケイ素原子、またはホウ素原子が挙げられ、窒素原子、硫黄原子、または酸素原子が好ましい。ヘテロアリール基に含まれるヘテロ原子の数は特に制限されず、通常、1~10個程度であり、1~4個が好ましい。
 ヘテロアリール基の環員数は特に制限されないが、好ましくは3~8員環であり、さらに好ましくは5~7員環であり、特に好ましくは5~6員環である。
 ヘテロアリール基としては、例えば、ピリジル基、キノリル基、イソキノリル基、アクリジニル基、フェナントリジニル基、プテリジニル基、ピラジニル基、キノキサリニル基、ピリミジニル基、キナゾリル基、ピリダジニル基、シンノリニル基、フタラジニル基、トリアジニル基、オキサゾリル基、ベンゾオキサゾリル基、チアゾリル基、ベンゾチアゾリル基、イミダゾリル基、ベンゾイミダゾリル基、ピラゾリル基、インダゾリル基、イソオキサゾリル基、ベンゾイソオキサゾリル基、イソチアゾリル基、ベンゾイソチアゾリル基、オキサジアゾリル基、チアジアゾリル基、トリアゾリル基、テトラゾリル基、フリル基、ベンゾフリル基、チエニル基、ベンゾチエニル基、ジベンゾフリル基、ジベンゾチエニル基、ピロリル基、インドリル基、イミダゾピリジニル基、カルバゾリル基などが挙げられる。
The number of carbon atoms in the heteroaryl group (monovalent aromatic heterocyclic group) is not particularly limited, but is preferably 3 to 30, and more preferably 3 to 18 in that the characteristics (heat resistance and response) of the photoelectric conversion film are more excellent. Is more preferred. The heteroaryl group may have a substituent W described later.
Heteroaryl groups include hetero atoms other than carbon atom and hydrogen atom, and as hetero atoms, for example, nitrogen atom, sulfur atom, oxygen atom, selenium atom, tellurium atom, phosphorus atom, phosphorus atom, silicon atom, or boron atom Preferably, a nitrogen atom, a sulfur atom or an oxygen atom is mentioned. The number of heteroatoms contained in the heteroaryl group is not particularly limited, and is usually about 1 to 10, preferably 1 to 4.
The number of ring members of the heteroaryl group is not particularly limited, but is preferably a 3- to 8-membered ring, more preferably a 5- to 7-membered ring, and particularly preferably a 5- to 6-membered ring.
Examples of the heteroaryl group include pyridyl group, quinolyl group, isoquinolyl group, acridinyl group, phenanthrizinyl group, pteridinyl group, pyrazinyl group, quinoxalinyl group, pyrimidinyl group, quinazolyl group, pyridazinyl group, cinnolinyl group, phthalazinyl group, and the like. Triazinyl group, oxazolyl group, benzoxazolyl group, thiazolyl group, benzothiazolyl group, imidazolyl group, benzoimidazolyl group, pyrazolyl group, indazolyl group, isoxazolyl group, benzisoxazolyl group, isothiazolyl group, benzisothiazolyl group, oxazolyazolyl group Group, thiadiazolyl group, triazolyl group, tetrazolyl group, furyl group, benzofuryl group, thienyl group, benzothienyl group, dibenzofuryl group, dibenzothienyl group, pyrrolyl group, indolyl Group, imidazopyridinyl group, and carbazolyl group.
 本明細書における置換基Wについて記載する。
 置換基Wとしては、ハロゲン原子、アルキル基(シクロアルキル基、ビシクロアルキル基、トリシクロアルキル基を含む)、アルケニル基(シクロアルケニル基、ビシクロアルケニル基を含む)、アルキニル基、アリール基、複素環基(ヘテロ環基といってもよい)、シアノ基、ヒドロキシ基、ニトロ基、カルボキシ基、アルコキシ基、アリールオキシ基、シリルオキシ基、ヘテロ環オキシ基、アシルオキシ基、カルバモイルオキシ基、アルコキシカルボニルオキシ基、アリールオキシカルボニルオキシ基、アミノ基(アニリノ基を含む)、アンモニオ基、アシルアミノ基、アミノカルボニルアミノ基、アルコキシカルボニルアミノ基、アリールオキシカルボニルアミノ基、スルファモイルアミノ基、アルキルまたはアリールスルホニルアミノ基、メルカプト基、アルキルチオ基、アリールチオ基、ヘテロ環チオ基、スルファモイル基、スルホ基、アルキルまたはアリールスルフィニル基、アルキルまたはアリールスルホニル基、アシル基、アリールオキシカルボニル基、アルコキシカルボニル基、カルバモイル基、アリールまたはヘテロ環アゾ基、イミド基、ホスフィノ基、ホスフィニル基、ホスフィニルオキシ基、ホスフィニルアミノ基、ホスホノ基、シリル基、ヒドラジノ基、ウレイド基、ボロン酸基(-B(OH)2)、ホスファト基(-OPO(OH)2)、スルファト基(-OSO3H)、その他の公知の置換基が挙げられる。
 なお、置換基Wの詳細については、特開2007-234651号公報の段落[0023]に記載される。
The substituent W in the present specification is described.
As the substituent W, a halogen atom, an alkyl group (including a cycloalkyl group, a bicycloalkyl group and a tricycloalkyl group), an alkenyl group (including a cycloalkenyl group and a bicycloalkenyl group), an alkynyl group, an aryl group and a heterocyclic ring Group (may be referred to as hetero ring group), cyano group, hydroxy group, nitro group, carboxy group, alkoxy group, aryloxy group, silyloxy group, heterocyclic oxy group, acyloxy group, carbamoyloxy group, alkoxy carbonyloxy group , Aryloxycarbonyloxy group, amino group (including anilino group), ammonio group, acylamino group, acylamino group, aminocarbonylamino group, alkoxycarbonylamino group, aryloxycarbonylamino group, sulfamoylamino group, alkyl or arylsulfonylamide Group, mercapto group, alkylthio group, arylthio group, heterocyclic thio group, sulfamoyl group, sulfo group, alkyl or arylsulfinyl group, alkyl or arylsulfonyl group, acyl group, aryloxycarbonyl group, alkoxycarbonyl group, carbamoyl group, aryl Or heterocyclic azo group, imide group, phosphino group, phosphinyl group, phosphinyl oxy group, phosphinyl amino group, phosphono group, silyl group, hydrazino group, ureido group, boronic acid group (-B (OH) 2 ) And phosphato groups (-OPO (OH) 2 ), sulfato groups (-OSO 3 H), and other known substituents.
The details of the substituent W are described in paragraph [0023] of JP-A-2007-234651.
 R11、R12、R13およびR14は、それぞれ独立に、アルキル基、アリール基またはヘテロアリール基を表す。なお、R11およびR12の少なくとも一方、並びに、R13およびR14の少なくとも一方は、アリール基またはヘテロアリール基を表す。なかでも、光電変換膜の特性(耐熱性および応答性)がより優れる点で、R11、R12、R13およびR14がアリール基であることが好ましい。
 R11、R12、R13およびR14で表されるアルキル基、アリール基およびヘテロアリール基の定義および好適態様は、上記R1およびR2で表されるアルキル基、アリール基およびヘテロアリール基の定義および好適態様と同じである。
R 11 , R 12 , R 13 and R 14 each independently represent an alkyl group, an aryl group or a heteroaryl group. In addition, at least one of R 11 and R 12 and at least one of R 13 and R 14 represent an aryl group or a heteroaryl group. Among them, in that the characteristics of the photoelectric conversion layer (heat resistance and responsiveness) more excellent, it is preferable R 11, R 12, R 13 and R 14 are aryl groups.
The definitions and preferred embodiments of the alkyl group, aryl group and heteroaryl group represented by R 11 , R 12 , R 13 and R 14 are the same as the alkyl group, aryl group and heteroaryl group represented by R 1 and R 2 above. Are the same as the definition and preferred embodiment of
 Ar1およびAr2は、それぞれ独立に、アリーレン基またはヘテロアリーレン基を表す。なかでも、光電変換膜の特性(耐熱性および応答性)がより優れる点で、Ar1およびAr2がアリーレン基であることが好ましい。
 アリーレン基中の炭素数は特に制限されないが、光電変換膜の特性(耐熱性および応答性)がより優れる点で、6~30が好ましく、6~20がより好ましい。
 アリーレン基としては、例えば、フェニレン基、ビフェニレン基、ターフェニレン基、ナフチレン基、アントリレン基、フェナントリレン基、ピレンジイル基、ペリレンジイル基、フルオレンジイル基、クリセンジイル基、トリフェニレンジイル基、ベンゾアントラセンジイル基、ベンゾフェナントレンジイル基などが挙げられる。
Ar 1 and Ar 2 each independently represent an arylene group or a heteroarylene group. Among them, Ar 1 and Ar 2 are preferably arylene groups in that the characteristics (heat resistance and responsiveness) of the photoelectric conversion film are more excellent.
The number of carbon atoms in the arylene group is not particularly limited, but is preferably 6 to 30, and more preferably 6 to 20 in that the characteristics (heat resistance and response) of the photoelectric conversion film are more excellent.
As the arylene group, for example, phenylene group, biphenylene group, terphenylene group, naphthylene group, anthrylene group, phenanthrylene group, pyranediyl group, perylenediyl group, fluorenediyl group, chrysendiyl group, triphenylenediyl group, benzoanthracenediyl group, benzo And phenanthrenediyl groups.
 ヘテロアリーレン基中の炭素数は特に制限されないが、光電変換膜の特性(耐熱性および応答性)がより優れる点で、1~20が好ましく、2~12がより好ましい。
 ヘテロアリーレン基としては、例えば、ピリジレン基、キノリレン基、イソキノリレン基、アクリジンジイル基、フェナントリジンジイル基、ピラジンジイル基、キノキサリンジイル基、ピリミジンジイル基、トリアジンジイル基、イミダゾールジイル基、ピラゾールジイル基、オキサジアゾールジイル基、トリアゾールジイル基、フリレン基、チエニレン基、ピロールジイル基、インドールジイル基、カルバゾールジイル基などが挙げられる。
The number of carbon atoms in the heteroarylene group is not particularly limited, but is preferably 1 to 20 and more preferably 2 to 12 in that the characteristics (heat resistance and response) of the photoelectric conversion film are more excellent.
Examples of the heteroarylene group include pyridylene group, quinolylene group, isoquinolylene group, acridine diyl group, phenanthridine diyl group, pyrazine diyl group, quinoxaline diyl group, pyrimidine diyl group, triazine diyl group, imidazole diyl group, pyrazole diyl group, Examples include oxadiazole diyl group, triazole diyl group, furylene group, thienylene group, pyrrol diyl group, indole diyl group, carbazole diyl group and the like.
 X1およびX2は、それぞれ独立に、O(酸素原子)、S(硫黄原子)、またはNRAを表す。なかでも、光電変換膜の特性(耐熱性および応答性)がより優れる点で、O(酸素原子)またはS(硫黄原子)が好ましく、O(酸素原子)がより好ましい。
 RAは、アルキル基、アリール基、またはヘテロアリール基を表す。なかでも、光電変換膜の特性(耐熱性および応答性)がより優れる点で、アルキル基が好ましい。
 RAで表されるアルキル基、アリール基およびヘテロアリール基の定義および好適態様は、上記R1およびR2で表されるアルキル基、アリール基およびヘテロアリール基の定義および好適態様と同じである。
X 1 and X 2 are each independently, O (oxygen atom), S (sulfur atom), or an NR A. Among them, O (oxygen atom) or S (sulfur atom) is preferable, and O (oxygen atom) is more preferable, in that the characteristics (heat resistance and responsiveness) of the photoelectric conversion film are more excellent.
R A represents an alkyl group, an aryl group or a heteroaryl group. Especially, an alkyl group is preferable at the point which the characteristic (heat resistance and responsiveness) of a photoelectric conversion film is more excellent.
The definitions and the preferred embodiments of the alkyl group, the aryl group and the heteroaryl group represented by R A are the same as the definitions and the preferred embodiment of the alkyl group, the aryl group and the heteroaryl group represented by R 1 and R 2 above. .
 Qは、一般式(A)で表される基、一般式(B)で表される基、一般式(C)で表される基、一般式(D)で表される基、および、一般式(E)で表される基からなる群から選択されるいずれか一つの基である。 Q represents a group represented by formula (A), a group represented by formula (B), a group represented by formula (C), a group represented by formula (D), and It is any one group selected from the group consisting of a group represented by formula (E).
Figure JPOXMLDOC01-appb-C000006
Figure JPOXMLDOC01-appb-C000006
 一般式(A)~一般式(E)中、RQ1~RQ22は、それぞれ独立に、水素原子または置換基を表す。置換基としては上述した置換基Wが挙げられるが、例えば、アルキル基、アルコキシ基、ハロゲン原子などが挙げられる。なかでも、光電変換素子の特性(耐熱性または応答性)がより優れる点で、RQ1~RQ22は水素原子であることが好ましい。
 なお、一般式(A)~一般式(E)中の*1~*4で示される炭素原子は、それぞれ、一般式(1)~一般式(3)中の*1~*4で示される炭素原子に対応する。より具体的には、以下に一般式(A)~一般式(E)で表される基が、一般式(1)~一般式(3)中のQに導入された場合の構造式の例を示す。
In formulas (A) to (E), each of R Q1 to R Q22 independently represents a hydrogen atom or a substituent. Examples of the substituent include the above-mentioned substituent W, and examples include an alkyl group, an alkoxy group, a halogen atom and the like. Among them, it is preferable that R Q1 to R Q22 be a hydrogen atom in that the characteristics (heat resistance or response) of the photoelectric conversion element are more excellent.
The carbon atoms represented by * 1 to * 4 in the general formulas (A) to (E) are represented by * 1 to * 4 in the general formulas (1) to (3), respectively. Corresponds to a carbon atom. More specifically, examples of structural formulas when groups represented by general formulas (A) to (E) below are introduced into Q in general formulas (1) to (3) Indicates
Figure JPOXMLDOC01-appb-C000007
Figure JPOXMLDOC01-appb-C000007
 一般式(1)~一般式(3)において、Ar1とR11、Ar1とR12、R11とR12、Ar2とR13、Ar2とR14、R13とR14はそれぞれ互いに結合して環を形成してもよい。なお、結合に際しては、Ar1とR11、Ar1とR12、R11とR12、Ar2とR13、Ar2とR14、R13とR14はそれぞれ互いに直接または連結基を介して結合して環を形成することが好ましく、光電変換膜の特性(耐熱性および応答性)がより優れる点で、直接結合して環を形成するほうがより好ましい。
 該環構造が形成されることにより、一般式(1)~一般式(3)で表される化合物の耐熱性が向上し、高温条件下での高蒸着レートでの光電変換素子の製造が可能となり、さらに応答性もより向上する。
 なお、連結基の構造は特に制限されないが、例えば、酸素原子、硫黄原子、アルキレン基、シリレン基、アルケニレン基、シクロアルキレン基、シクロアルケニレン基、アリーレン基、2価の複素環基、イミノ基、またはこれらを組み合わせた基が挙げられ、これらは更に置換基を有してもよい。好ましくはアルキレン基、シリレン基、アルケニレン基、シクロアルキレン基、シクロアルケニレン基、アリーレン基等である。
 形成される環の構造は特に制限されず、例えば、ベンゼン環、ナフタレン環、アントラセン環、フェナントレン環、フルオレン環、トリフェニレン環、ナフタセン環、ビフェニル環、ピロール環、フラン環、チオフェン環、イミダゾール環、オキサゾール環、チアゾール環、ピリジン環、ピラジン環、ピリミジン環、ピリダジン環、インドリジン環、インドール環、ベンゾフラン環、ベンゾチオフェン環、イソベンゾフラン環、キノリジン環、キノリン環、フタラジン環、ナフチリジン環、キノキサリン環、キノキサゾリン環、イソキノリン環、カルバゾール環、フェナントリジン環、アクリジン環、フェナントロリン環、チアントレン環、クロメン環、キサンテン環、フェノキサチイン環、フェノチアジン環、フェナジン環、シクロペンタン環、シクロヘキサン環、ピロリジン環、ピペリジン環、テトラヒドロフラン環、テトラヒドロピラン環、テトラヒドロチオフェン環、テトラヒドロチオピラン環などが挙げられる。
In the general formulas (1) to (3), Ar 1 and R 11 , Ar 1 and R 12 , R 11 and R 12 , Ar 2 and R 13 , Ar 2 and R 14 , R 13 and R 14 respectively represent You may combine with each other to form a ring. At the time of bonding, Ar 1 and R 11 , Ar 1 and R 12 , R 11 and R 12 , Ar 2 and R 13 , Ar 2 and R 14 , and R 13 and R 14 are each directly or via a linking group. It is preferable to form a ring by forming a ring, and it is more preferable to form a ring by forming a ring directly from the viewpoint that the characteristics (heat resistance and responsiveness) of the photoelectric conversion film are more excellent.
By the formation of the ring structure, the heat resistance of the compounds represented by the general formulas (1) to (3) is improved, and the photoelectric conversion element can be produced at a high deposition rate under high temperature conditions. And the responsiveness is further improved.
The structure of the linking group is not particularly limited, and examples thereof include oxygen atom, sulfur atom, alkylene group, silylene group, alkenylene group, cycloalkylene group, cycloalkenylene group, arylene group, divalent heterocyclic group, imino group, and the like. Or the group which combined these is mentioned, These may have a substituent further. Preferred are an alkylene group, a silylene group, an alkenylene group, a cycloalkylene group, a cycloalkenylene group, an arylene group and the like.
The structure of the ring formed is not particularly limited, and examples thereof include benzene ring, naphthalene ring, anthracene ring, phenanthrene ring, fluorene ring, triphenylene ring, naphthacene ring, biphenyl ring, pyrrole ring, furan ring, thiophene ring, imidazole ring, Oxazole ring, Thiazole ring, Pyridine ring, Pyrazine ring, Pyrimidine ring, Pyridazine ring, Indolizine ring, Indole ring, Indole ring, Benzofuran ring, Benzothiophene ring, Isobenzofuran ring, Quinolizine ring, Quinoline ring, Phthalazine ring, Naphthiridine ring, Quinoxaline ring , Quinoxazoline ring, isoquinoline ring, carbazole ring, phenanthridine ring, acridine ring, phenanthroline ring, thianthrene ring, chromene ring, xanthene ring, phenoxathiin ring, phenothiazine ring, phenazine ring, cyclopenta Ring, cyclohexane ring, pyrrolidine ring, piperidine ring, a tetrahydrofuran ring, tetrahydropyran ring, a tetrahydrothiophene ring, a tetrahydrothiopyran ring.
 なお、Ar1とR11、Ar1とR12、およびR11とR12の中でも少なくとも1つがそれぞれ互いに結合して環を形成すると共に、Ar2とR13、Ar2とR14、およびR13とR14の中でも少なくとも1つがそれぞれ互いに結合して環を形成することが好ましい。このような態様であれば、光電変換膜の耐熱性および応答性がより向上する。 Note that at least one of Ar 1 and R 11 , Ar 1 and R 12 , and R 11 and R 12 combine with each other to form a ring, and Ar 2 and R 13 , Ar 2 and R 14 , and R Preferably, at least one of 13 and R 14 is bonded to each other to form a ring. With such an embodiment, the heat resistance and response of the photoelectric conversion film are further improved.
 nは、0または1を示す。なかでも、光電変換素子の特性(耐熱性または応答性)がより優れる点で、nは0であることが好ましい。
 nが1の場合、上記一般式(1A)~一般式(3E)で表される化合物が例示される。
 なお、nが0の場合、*1で示される炭素原子と*3で示される炭素原子とが同一の炭素原子となり、*2で示される炭素原子と*4で示される炭素原子とが同一の炭素元素となる。つまり、一般式(1)~一般式(3)において、n=0の場合、以下の一般式(4)~一般式(6)で表される化合物を表す。
 なお、一般式(4)~一般式(6)中の各基の定義は、上述の通りである。
n represents 0 or 1; Among them, n is preferably 0 in terms of more excellent characteristics (heat resistance or response) of the photoelectric conversion element.
When n is 1, the compounds represented by the above general formulas (1A) to (3E) are exemplified.
When n is 0, the carbon atom shown by * 1 and the carbon atom shown by * 3 are the same carbon atom, and the carbon atom shown by * 2 and the carbon atom shown by * 4 are the same. It becomes a carbon element. That is, in the general formula (1) to the general formula (3), when n = 0, the compounds represented by the following general formula (4) to the general formula (6) are represented.
The definition of each group in the general formulas (4) to (6) is as described above.
Figure JPOXMLDOC01-appb-C000008
Figure JPOXMLDOC01-appb-C000008
 なかでも、本発明の効果がより優れる点で、一般式(4)で表される化合物が特に好ましい。一般式(4)で表される化合物は、いわゆるジケトピロロピロール化合物である。
 以下に、一般式(1)~(3)で表される化合物を例示する。
Especially, the compound represented by General formula (4) is especially preferable at the point which the effect of this invention is more excellent. The compound represented by the general formula (4) is a so-called diketopyrrolopyrrole compound.
The compounds represented by the general formulas (1) to (3) are exemplified below.
Figure JPOXMLDOC01-appb-C000009
Figure JPOXMLDOC01-appb-C000009
Figure JPOXMLDOC01-appb-C000010
Figure JPOXMLDOC01-appb-C000010
Figure JPOXMLDOC01-appb-C000011
Figure JPOXMLDOC01-appb-C000011
Figure JPOXMLDOC01-appb-C000012
Figure JPOXMLDOC01-appb-C000012
Figure JPOXMLDOC01-appb-C000013
Figure JPOXMLDOC01-appb-C000013
Figure JPOXMLDOC01-appb-C000014
Figure JPOXMLDOC01-appb-C000014
Figure JPOXMLDOC01-appb-C000015
Figure JPOXMLDOC01-appb-C000015
Figure JPOXMLDOC01-appb-C000016
Figure JPOXMLDOC01-appb-C000016
Figure JPOXMLDOC01-appb-C000017
Figure JPOXMLDOC01-appb-C000017
Figure JPOXMLDOC01-appb-C000018
Figure JPOXMLDOC01-appb-C000018
Figure JPOXMLDOC01-appb-C000019
Figure JPOXMLDOC01-appb-C000019
Figure JPOXMLDOC01-appb-C000020
Figure JPOXMLDOC01-appb-C000020
Figure JPOXMLDOC01-appb-C000021
Figure JPOXMLDOC01-appb-C000021
Figure JPOXMLDOC01-appb-C000022
Figure JPOXMLDOC01-appb-C000022
Figure JPOXMLDOC01-appb-C000023
Figure JPOXMLDOC01-appb-C000023
Figure JPOXMLDOC01-appb-C000024
Figure JPOXMLDOC01-appb-C000024
Figure JPOXMLDOC01-appb-C000025
Figure JPOXMLDOC01-appb-C000025
Figure JPOXMLDOC01-appb-C000026
Figure JPOXMLDOC01-appb-C000026
 一般式(1)~(3)で表される化合物は紫外可視吸収スペクトルにおいて、400nm以上720nm未満に吸収極大を有することが好ましい。吸収スペクトルのピーク波長(吸収極大波長)は、可視領域の光を幅広く吸収するという観点から450nm以上700nm以下であることがより好ましく、480nm以上700nm以下がさらに好ましく、510nm以上680nm以下であることが特に好ましい。
 化合物の吸収極大波長は、化合物のクロロホルム溶液を、島津製作所社製UV-2550を用いて測定することができる。クロロホルム溶液の濃度は5×10-5~1×10-7mol/lが好ましく、3×10-5~2×10-6mol/lがより好ましく、2×10-5~5×10-6mol/lが特に好ましい。
The compounds represented by the general formulas (1) to (3) preferably have an absorption maximum at 400 nm or more and less than 720 nm in the UV-visible absorption spectrum. The peak wavelength (absorption maximum wavelength) of the absorption spectrum is preferably 450 nm or more and 700 nm or less, more preferably 480 nm or more and 700 nm or less, and preferably 510 nm or more and 680 nm or less from the viewpoint of wide absorption of light in the visible range. Particularly preferred.
The absorption maximum wavelength of the compound can be measured using a chloroform solution of the compound using UV-2550 manufactured by Shimadzu Corporation. Concentration of the chloroform solution is preferably from 5 × 10 -5 ~ 1 × 10 -7 mol / l, more preferably 3 × 10 -5 ~ 2 × 10 -6 mol / l, 2 × 10 -5 ~ 5 × 10 - 6 mol / l is particularly preferred.
 一般式(1)~一般式(3)で表される化合物は、紫外可視吸収スペクトルにおいて400nm以上720nm未満に吸収極大を有し、その吸収極大波長のモル吸光係数が10000mol-1・l・cm-1以上であることが好ましい。光電変換膜の膜厚を薄くし、高い電荷捕集効率、高速応答性、高感度特性の素子とするには、モル吸光係数が大きい材料が好ましい。一般式(1)~一般式(3)で表される化合物のモル吸光係数としては30000mol-1・l・cm-1以上がより好ましく、50000mol-1・l・cm-1以上がさらに好ましい。一般式(1)~一般式(3)で表される化合物のモル吸光係数はクロロホルム溶液で測定したものである。 The compounds represented by the general formula (1) to the general formula (3) have an absorption maximum at 400 nm or more and less than 720 nm in the UV-visible absorption spectrum, and the molar absorption coefficient of the absorption maximum wavelength is 10000 mol −1 · l · cm It is preferably -1 or more. In order to make the film thickness of the photoelectric conversion film thin and to make it an element having high charge collection efficiency, high-speed response, and high sensitivity characteristics, a material having a large molar absorption coefficient is preferable. More preferably 30000mol -1 · l · cm -1 or more as a molar extinction coefficient of the formulas (1) to (3), compounds represented by a further preferred 50000mol -1 · l · cm -1 or more. The molar absorption coefficients of the compounds represented by the general formulas (1) to (3) are those measured in a chloroform solution.
 一般式(1)~一般式(3)で表される化合物は、融点と蒸着温度の差(融点-蒸着温度)の差が大きいほど蒸着時に分解しにくく、高い温度をかけて蒸着速度を大きくすることができる。また、融点と蒸着温度の差(融点-蒸着温度)は40℃以上が好ましく、50℃以上がより好ましく、60℃以上が更に好ましく、80℃以上が特に好ましい。 The compounds represented by the general formulas (1) to (3) are more difficult to be decomposed during deposition as the difference between the melting point and the deposition temperature (melting point-deposition temperature) increases, and the deposition rate increases with an increase in temperature. can do. The difference between the melting point and the vapor deposition temperature (melting point-vapor deposition temperature) is preferably 40 ° C. or more, more preferably 50 ° C. or more, still more preferably 60 ° C. or more, and particularly preferably 80 ° C. or more.
 一般式(1)~一般式(3)で表される化合物の分子量は、300~1500が好ましく、500~1000がより好ましく、500~900が特に好ましい。化合物の分子量が1500以下であれば、蒸着温度が高くならず、化合物の分解が起こりにくい。化合物の分子量が300以上であれば蒸着膜のガラス転移点が低くならず、素子の耐熱性が低下しにくい。 The molecular weight of the compound represented by the general formula (1) to the general formula (3) is preferably 300 to 1,500, more preferably 500 to 1000, and particularly preferably 500 to 900. If the molecular weight of the compound is 1,500 or less, the deposition temperature does not increase, and decomposition of the compound does not easily occur. If the molecular weight of the compound is 300 or more, the glass transition point of the deposited film does not decrease, and the heat resistance of the device does not easily decrease.
 一般式(1)~一般式(3)で表される化合物のガラス転移点(Tg)は、95℃以上が好ましく、110℃以上がより好ましく、135℃以上がさらに好ましく、150℃以上が特に好ましく、160℃以上が最も好ましい。ガラス転移点が高くなると、素子の耐熱性が向上するため好ましい。 95 degreeC or more is preferable, as for the glass transition point (Tg) of the compound represented by General formula (1)-General formula (3), 110 degreeC or more is more preferable, 135 degreeC or more is more preferable, and 150 degreeC or more is especially preferable Preferably, 160 ° C. or more is the most preferable. It is preferable that the glass transition point becomes high because the heat resistance of the element is improved.
 一般式(1)~一般式(3)で表される化合物は、撮像素子、光センサ、または光電池に用いる光電変換膜の材料として特に有用である。なお、通常、一般式(1)で表される化合物は、光電変換膜内で有機p型化合物として機能する。また、他の用途として、着色材料、液晶材料、有機半導体材料、有機発光素子材料、電荷輸送材料、医薬材料、蛍光診断薬材料、等としても用いることもできる。 The compounds represented by the general formula (1) to the general formula (3) are particularly useful as a material of a photoelectric conversion film used for an imaging device, an optical sensor, or a photovoltaic cell. In addition, normally, the compound represented by General formula (1) functions as an organic p-type compound in a photoelectric conversion film. Moreover, it can also be used as a coloring material, a liquid-crystal material, an organic-semiconductor material, an organic light emitting element material, a charge transport material, a pharmaceutical material, a fluorescence diagnostic agent material etc. as another use.
(その他材料)
 光電変換膜は、さらに有機p型化合物または有機n型化合物の光電変換材料を含有してもよい。
 有機p型半導体(化合物)は、ドナー性有機半導体(化合物)であり、主に正孔輸送性有機化合物に代表され、電子を供与しやすい性質がある有機化合物をいう。さらに詳しくは、2つの有機材料を接触させて用いたときにイオン化ポテンシャルの小さい方の有機化合物をいう。したがって、ドナー性有機化合物は、電子供与性のある有機化合物であればいずれの有機化合物も使用可能である。例えば、トリアリールアミン化合物、ベンジジン化合物、ピラゾリン化合物、スチリルアミン化合物、ヒドラゾン化合物、トリフェニルメタン化合物、カルバゾール化合物等を用いることができる。
(Other materials)
The photoelectric conversion film may further contain a photoelectric conversion material of an organic p-type compound or an organic n-type compound.
The organic p-type semiconductor (compound) is a donor type organic semiconductor (compound), mainly represented by a hole transporting organic compound, and refers to an organic compound having a property of easily giving an electron. More specifically, it refers to an organic compound having a smaller ionization potential when used in contact with two organic materials. Therefore, as the donor organic compound, any organic compound having an electron donating property can be used. For example, triarylamine compounds, benzidine compounds, pyrazoline compounds, styrylamine compounds, hydrazone compounds, triphenylmethane compounds, carbazole compounds and the like can be used.
 有機n型半導体(化合物)とは、アクセプター性有機半導体であり、主に電子輸送性有機化合物に代表され、電子を受容しやすい性質がある有機化合物をいう。更に詳しくは、2つの有機化合物を接触させて用いたときに電子親和力の大きい方の有機化合物をいう。したがって、アクセプター性有機半導体は、電子受容性のある有機化合物であればいずれの有機化合物も使用可能である。好ましくは、フラーレンまたはフラーレン誘導体、縮合芳香族炭素環化合物(ナフタレン誘導体、アントラセン誘導体、フェナントレン誘導体、テトラセン誘導体、ピレン誘導体、ペリレン誘導体、フルオランテン誘導体)、窒素原子、酸素原子、硫黄原子を含有する5~7員のヘテロ環化合物(例えば、ピリジン、ピラジン、ピリミジン、ピリダジン、トリアジン、キノリン、キノキサリン、キナゾリン、フタラジン、シンノリン、イソキノリン、プテリジン、アクリジン、フェナジン、フェナントロリン、テトラゾール、ピラゾール、イミダゾール、チアゾール、オキサゾール、インダゾール、ベンゾイミダゾール、ベンゾトリアゾール、ベンゾオキサゾール、ベンゾチアゾール、カルバゾール、プリン、トリアゾロピリダジン、トリアゾロピリミジン、テトラザインデン、オキサジアゾール、イミダゾピリジン、ピラリジン、ピロロピリジン、チアジアゾロピリジン、ジベンゾアゼピン、トリベンゾアゼピン等)、ポリアリーレン化合物、フルオレン化合物、シクロペンタジエン化合物、シリル化合物、含窒素ヘテロ環化合物を配位子として有する金属錯体などが挙げられる。 The organic n-type semiconductor (compound) is an acceptor-type organic semiconductor, mainly represented by an electron-transporting organic compound, and refers to an organic compound having a property of easily accepting an electron. More specifically, when the two organic compounds are brought into contact with each other and used, the organic compound having higher electron affinity is used. Therefore, as the acceptor-type organic semiconductor, any organic compound can be used as long as it is an electron-accepting organic compound. Preferably, a fullerene or a fullerene derivative, a fused aromatic carbocyclic compound (naphthalene derivative, anthracene derivative, phenanthrene derivative, tetracene derivative, pyrene derivative, perylene derivative, fluoranthene derivative), a nitrogen atom, an oxygen atom or a sulfur atom is contained 5 to 7-membered heterocyclic compounds (eg, pyridine, pyrazine, pyrimidine, pyridazine, triazine, quinoline, quinoxaline, quinazoline, quintalin, phthalazine, cinnoline, isoquinoline, pteridine, acridine, phenazine, phenanthroline, tetrazole, pyrazole, imidazole, thiazole, oxazole, indazole , Benzimidazole, benzotriazole, benzoxazole, benzothiazole, carbazole, purine, triazolopyridazine, tria Lopyrimidin, tetrazaindene, oxadiazole, imidazopyridine, pyraridine, pyrrolopyridine, thiadiazolopyridine, dibenzoazepine, dibenzoazepine, etc., polyarylene compounds, fluorene compounds, cyclopentadiene compounds, silyl compounds, nitrogen-containing heterocyclic rings The metal complex etc. which have a compound as a ligand are mentioned.
 上記有機n型化合物としては、フラーレンおよびフラーレン誘導体からなる群から選択されるフラーレン類が好ましい。フラーレンとは、フラーレンC60、フラーレンC70、フラーレンC76、フラーレンC78、フラーレンC80、フラーレンC82、フラーレンC84、フラーレンC90、フラーレンC96、フラーレンC240、フラーレンC540、ミックスドフラーレンを表し、フラーレン誘導体とはこれらに置換基が付加された化合物のことを表す。置換基としては、アルキル基、アリール基、または複素環基が好ましい。フラーレン誘導体としては、特開2007-123707号公報に記載の化合物が好ましい。 The organic n-type compound is preferably a fullerene selected from the group consisting of a fullerene and a fullerene derivative. With fullerenes, fullerene C 60 , fullerene C 70 , fullerene C 76 , fullerene C 78 , fullerene C 80 , fullerene C 82 , fullerene C 84 , fullerene C 90 , fullerene C 96 , fullerene C 240 , fullerene C 240 , fullerene C 540 , mixed Represents a fullerene, and a fullerene derivative represents a compound to which a substituent is added. As a substituent, an alkyl group, an aryl group or a heterocyclic group is preferable. As the fullerene derivative, compounds described in JP-A-2007-123707 are preferable.
 光電変換膜は、上記化合物Xと、フラーレン類とが混合された状態で形成されるバルクヘテロ構造をなしていることが好ましい。バルクヘテロ構造は光電変換膜内で、p型有機半導体(化合物X)とn型有機半導体が混合、分散している層であり、湿式法、乾式法のいずれでも形成できるが、共蒸着法で形成するものが好ましい。へテロ接合構造を含有させることにより、光電変換膜のキャリア拡散長が短いという欠点を補い、光電変換膜の光電変換効率を向上させることができる。なお、バルクへテロ接合構造については、特開2005-303266号公報の[0013]~[0014]等において詳細に説明されている。 The photoelectric conversion film preferably has a bulk hetero structure formed by mixing the compound X and a fullerene. The bulk hetero structure is a layer in which a p-type organic semiconductor (compound X) and an n-type organic semiconductor are mixed and dispersed in the photoelectric conversion film, and can be formed by either a wet method or a dry method. Preferred. By including the heterojunction structure, it is possible to compensate for the short carrier diffusion length of the photoelectric conversion film and to improve the photoelectric conversion efficiency of the photoelectric conversion film. The bulk heterojunction structure is described in detail in, for example, [0013] to [0014] of JP-A-2005-303266.
 光電変換膜における上記化合物Xに対する有機n型化合物のモル比率(有機n型化合物/上記化合物X)は、1.0以上であることが好ましく、1以上10以下であることがより好ましく、2以上8以下であることが更に好ましい。 The molar ratio of the organic n-type compound to the compound X (organic n-type compound / the compound X) in the photoelectric conversion film is preferably 1.0 or more, more preferably 1 or more and 10 or less, and 2 or more More preferably, it is 8 or less.
 本発明の化合物Xおよび有機n型化合物が含まれる光電変換膜は非発光性膜であり、有機電界発光素子(OLED)とは異なる特徴を有する。非発光性膜とは発光量子効率が1%以下の膜の場合であり、0.5%以下であることがより好ましく、0.1%以下であることが更に好ましい。 The photoelectric conversion film containing the compound X and the organic n-type compound of the present invention is a non-luminescent film, and has different characteristics from the organic electroluminescent device (OLED). The non-luminescent film is a film having a light emission quantum efficiency of 1% or less, more preferably 0.5% or less, and still more preferably 0.1% or less.
(成膜方法)
 光電変換膜12は、乾式成膜法または湿式成膜法により成膜することができる。乾式成膜法の具体例としては、真空蒸着法、スパッタリング法、イオンプレーティング法,MBE法等の物理気相成長法、または、プラズマ重合等のCVD法が挙げられる。湿式成膜法としては、キャスト法、スピンコート法、ディッピング法、LB法等が用いられる。好ましくは乾式成膜法であり、真空蒸着法がより好ましい。真空蒸着法により成膜する場合、真空度、蒸着温度等の製造条件は常法に従って設定することができる。
(Deposition method)
The photoelectric conversion film 12 can be formed by a dry film formation method or a wet film formation method. Specific examples of the dry film formation method include physical vapor deposition methods such as vacuum deposition, sputtering, ion plating, and MBE, and CVD methods such as plasma polymerization. As a wet film formation method, a cast method, a spin coat method, a dipping method, an LB method or the like is used. It is preferably a dry film formation method, and more preferably a vacuum deposition method. When forming a film by a vacuum evaporation method, the manufacturing conditions such as the degree of vacuum and the evaporation temperature can be set according to a conventional method.
 光電変換膜12の厚みは、10nm以上1000nm以下が好ましく、50nm以上800nm以下がより好ましく、100nm以上500nm以下が特に好ましい。10nm以上とすることにより、好適な暗電流抑制効果が得られ、1000nm以下とすることにより、好適な光電変換効率が得られる。 The thickness of the photoelectric conversion film 12 is preferably 10 nm or more and 1000 nm or less, more preferably 50 nm or more and 800 nm or less, and particularly preferably 100 nm or more and 500 nm or less. By setting the thickness to 10 nm or more, a suitable dark current suppression effect can be obtained, and by setting the thickness to 1000 nm or less, preferable photoelectric conversion efficiency can be obtained.
[電極]
 電極(上部電極(透明導電性膜)15と下部電極(導電性膜)11)は、導電性材料から構成される。導電性材料としては、金属、合金、金属酸化物、電気伝導性化合物、またはこれらの混合物などを用いることができる。
 上部電極15から光が入射されるため、上部電極15は検知したい光に対し十分透明であることが必要である。具体的には、アンチモンやフッ素等をドープした酸化錫(ATO、FTO)、酸化錫、酸化亜鉛、酸化インジウム、酸化インジウム錫(ITO)、酸化亜鉛インジウム(IZO)等の導電性金属酸化物、金、銀、クロム、ニッケル等の金属薄膜、更にこれらの金属と導電性金属酸化物との混合物または積層物、ヨウ化銅、硫化銅などの無機導電性物質、ポリアニリン、ポリチオフェン、ポリピロールなどの有機導電性材料、およびこれらとITOとの積層物などが挙げられる。この中で好ましいのは、高導電性、透明性等の点から、透明導電性金属酸化物である。
[electrode]
The electrodes (upper electrode (transparent conductive film) 15 and lower electrode (conductive film) 11) are made of a conductive material. As the conductive material, a metal, an alloy, a metal oxide, an electrically conductive compound, or a mixture thereof can be used.
Since light is incident from the upper electrode 15, the upper electrode 15 needs to be sufficiently transparent to light to be detected. Specifically, conductive metal oxides such as tin oxide (ATO, FTO) doped with antimony or fluorine, tin oxide, zinc oxide, indium oxide, indium tin oxide (ITO), zinc indium oxide (IZO), etc. Metal thin films such as gold, silver, chromium and nickel, and mixtures or laminates of these metals and conductive metal oxides, inorganic conductive substances such as copper iodide and copper sulfide, organic substances such as polyaniline, polythiophene and polypyrrole Examples thereof include conductive materials and laminates of these with ITO. Among these, transparent conductive metal oxides are preferable in terms of high conductivity, transparency and the like.
 通常、導電性膜をある範囲より薄くすると、急激な抵抗値の増加をもたらすが、本実施形態に係る光電変換素子を組み込んだ固体撮像素子では、シート抵抗は、好ましくは100~10000Ω/□でよく、薄膜化できる膜厚の範囲の自由度は大きい。また、上部電極(透明導電性膜)15は厚みが薄いほど吸収する光の量は少なくなり、一般に光透過率が増す。光透過率の増加は、光電変換膜12での光吸収を増大させ、光電変換能を増大させるため、非常に好ましい。薄膜化に伴う、リーク電流の抑制、薄膜の抵抗値の増大、透過率の増加を考慮すると、上部電極15の膜厚は、5~100nmであることが好ましく、更に好ましくは5~20nmであることが望ましい。 Usually, making the conductive film thinner than a certain range causes a sharp increase in resistance value, but in the solid-state imaging device incorporating the photoelectric conversion device according to this embodiment, the sheet resistance is preferably 100 to 10000 Ω / □. The degree of freedom in the range of film thickness that can be made thin is large. In addition, as the thickness of the upper electrode (transparent conductive film) 15 decreases, the amount of light absorbed decreases, and the light transmittance generally increases. An increase in light transmittance is very preferable because it increases the light absorption in the photoelectric conversion film 12 and the photoelectric conversion capability. The thickness of the upper electrode 15 is preferably 5 to 100 nm, more preferably 5 to 20 nm, in consideration of suppression of leakage current, increase in resistance of the thin film, and increase in transmittance as the film thickness decreases. Is desirable.
 下部電極11は、用途に応じて、透明性を持たせる場合と、逆に透明を持たせず光を反射させるような材料を用いる場合等がある。具体的には、アンチモンやフッ素等をドープした酸化錫(ATO、FTO)、酸化錫、酸化亜鉛、酸化インジウム、酸化インジウム錫(ITO)、酸化亜鉛インジウム(IZO)等の導電性金属酸化物、金、銀、クロム、ニッケル、チタン、タングステン、アルミ等の金属およびこれらの金属の酸化物や窒化物などの導電性化合物(一例として窒化チタン(TiN)を挙げる)、更にこれらの金属と導電性金属酸化物との混合物または積層物、ヨウ化銅、硫化銅などの無機導電性物質、ポリアニリン、ポリチオフェン、ポリピロールなどの有機導電性材料、およびこれらとITOまたは窒化チタンとの積層物などが挙げられる。 The lower electrode 11 may be made transparent or may be made of a material that does not have transparency and reflects light depending on the application. Specifically, conductive metal oxides such as tin oxide (ATO, FTO) doped with antimony or fluorine, tin oxide, zinc oxide, indium oxide, indium tin oxide (ITO), zinc indium oxide (IZO), etc. Metals such as gold, silver, chromium, nickel, titanium, tungsten, and aluminum, and conductive compounds such as oxides and nitrides of these metals (for example, titanium nitride (TiN) is mentioned), and these metals and conductive properties Mixtures or laminates with metal oxides, inorganic conductive materials such as copper iodide and copper sulfide, organic conductive materials such as polyaniline, polythiophene and polypyrrole, and laminates of these with ITO or titanium nitride .
 電極を形成する方法は特に限定されず、電極材料に応じて適宜選択することができる。具体的には、印刷方式、コーティング方式等の湿式方式、真空蒸着法、スパッタリング法、イオンプレーティング法等の物理的方式、CVD、プラズマCVD法等の化学的方式等により形成することができる。
 電極の材料がITOの場合、電子ビーム法、スパッタリング法、抵抗加熱蒸着法、化学反応法(ゾル-ゲル法など)、酸化インジウムスズの分散物の塗布などの方法で形成することができる。更に、ITOを用いて作製された膜に、UV-オゾン処理、プラズマ処理などを施すことができる。電極の材料がTiNの場合、反応性スパッタリング法をはじめとする各種の方法が用いられ、更にUV-オゾン処理、プラズマ処理などを施すことができる。
The method of forming the electrode is not particularly limited, and can be appropriately selected according to the electrode material. Specifically, it can be formed by a printing method, a wet method such as a coating method, a physical method such as a vacuum evaporation method, a sputtering method, an ion plating method, or a chemical method such as CVD or plasma CVD.
When the material of the electrode is ITO, it can be formed by an electron beam method, a sputtering method, a resistance heating evaporation method, a chemical reaction method (sol-gel method etc.), application of a dispersion of indium tin oxide, or the like. Furthermore, UV-ozone treatment, plasma treatment, and the like can be performed on a film manufactured using ITO. When the material of the electrode is TiN, various methods such as reactive sputtering can be used, and further, UV-ozone treatment, plasma treatment, etc. can be performed.
[電荷ブロッキング膜:電子ブロッキング膜、正孔ブロッキング膜]
 本発明の光電変換素子は、電荷ブロッキング膜を有していてもよい。該膜を有することにより、得られる光電変換素子の特性(光電変換効率、応答速度など)がより優れる。電荷ブロッキング膜としては、電子ブロッキング膜と正孔ブロッキング膜とが挙げられる。以下に、それぞれの膜について詳述する。
[Charge blocking film: electron blocking film, hole blocking film]
The photoelectric conversion element of the present invention may have a charge blocking film. By having the film, the characteristics (photoelectric conversion efficiency, response speed, etc.) of the obtained photoelectric conversion element are more excellent. Examples of the charge blocking film include an electron blocking film and a hole blocking film. Below, each film is explained in full detail.
(電子ブロッキング膜)
 電子ブロッキング膜には、電子供与性有機材料を用いることができる。具体的には、低分子材料では、N,N’-ビス(3-メチルフェニル)-(1,1’-ビフェニル)-4,4’-ジアミン(TPD)や4,4’-ビス[N-(ナフチル)-N-フェニル-アミノ]ビフェニル(α-NPD)等の芳香族ジアミン化合物、オキサゾール、オキサジアゾール、トリアゾール、イミダゾール、イミダゾロン、スチルベン誘導体、ピラゾリン誘導体、テトラヒドロイミダゾール、ポリアリールアルカン、ブタジエン、4,4’,4”トリス(N-(3-メチルフェニル)N-フェニルアミノ)トリフェニルアミン(m-MTDATA)、ポルフィリン、テトラフェニルポルフィリン銅、フタロシアニン、銅フタロシアニン、チタニウムフタロシアニンオキサイド等のポルフィリン化合物、トリアゾール誘導体、オキサジザゾール誘導体、イミダゾール誘導体、ポリアリールアルカン誘導体、ピラゾリン誘導体、ピラゾロン誘導体、フェニレンジアミン誘導体、アリールアミン誘導体、アミノ置換カルコン誘導体、オキサゾール誘導体、スチリルアントラセン誘導体、フルオレノン誘導体、ヒドラゾン誘導体、シラザン誘導体などを用いることができ、高分子材料では、フェニレンビニレン、フルオレン、カルバゾール、インドール、ピレン、ピロール、ピコリン、チオフェン、アセチレン、ジアセチレン等の重合体や、その誘導体を用いることができる。電子供与性化合物でなくとも、十分なホール輸送性を有する化合物であれば用いることは可能である。具体的には特開2008-72090号公報の[0083]~[0089]に記載の化合物が好ましい。
(Electron blocking film)
An electron donating organic material can be used for the electron blocking film. Specifically, low molecular weight materials such as N, N'-bis (3-methylphenyl)-(1,1'-biphenyl) -4,4'-diamine (TPD) and 4,4'-bis [N Aromatic diamine compounds such as-(naphthyl) -N-phenyl-amino] biphenyl (α-NPD), oxazole, oxadiazole, triazole, imidazole, imidazolone, stilbene derivative, pyrazoline derivative, tetrahydroimidazole, polyarylalkane, butadiene Porphyrins such as 4,4 ′, 4 ′ ′ tris (N- (3-methylphenyl) N-phenylamino) triphenylamine (m-MTDATA), porphyrin, tetraphenylporphyrin copper, phthalocyanine, copper phthalocyanine, titanium phthalocyanine oxide, etc. Compound, triazole derivative, oxadizazole derivative, Midazole derivatives, polyarylalkane derivatives, pyrazoline derivatives, pyrazolone derivatives, phenylenediamine derivatives, arylamine derivatives, amino-substituted chalcone derivatives, oxazole derivatives, styrylanthracene derivatives, fluorenone derivatives, hydrazone derivatives, silazane derivatives, etc. As the molecular material, polymers such as phenylene vinylene, fluorene, carbazole, indole, pyrene, pyrrole, picoline, thiophene, acetylene, diacetylene and derivatives thereof and derivatives thereof can be used. Any compound having transportability can be used, and specifically, the compounds described in [0083] to [0089] of JP-A-2008-72090 are preferable.
 電子ブロッキング膜は一般式(F-1)で表される化合物を含有することも好ましい。該化合物を使用することにより、得られる光電変換膜の応答速度がより優れると共に、各製造ロッド間の応答速度のばらつきがより抑制される。 The electron blocking film preferably also contains a compound represented by Formula (F-1). By using the compound, the response speed of the obtained photoelectric conversion film is more excellent, and the variation in the response speed among the production rods is further suppressed.
Figure JPOXMLDOC01-appb-C000027
Figure JPOXMLDOC01-appb-C000027
(一般式(F-1)中、R”11~R”18、R’11~R’18はそれぞれ独立に、水素原子、ハロゲン原子、アルキル基、アリール基、複素環基、水酸基、アミノ基、またはメルカプト基を表し、これらは更に置換基を有していてもよい。R”15~R”18中のいずれか一つは、R’15~R’18中のいずれか一つと連結し、単結合を形成する。A11およびA12はそれぞれ独立に下記一般式(A-1)で表される基を表し、R”11~R”14、およびR’11~R’14中のいずれか一つとして置換する。Yはそれぞれ独立に炭素原子、窒素原子、酸素原子、硫黄原子、またはケイ素原子を表し、これらは更に置換基を有していてもよい。) (In the general formula (F-1), R " 11 ~ R" 18, R a '11 ~ R' 18 are each independently a hydrogen atom, a halogen atom, an alkyl group, an aryl group, a heterocyclic group, a hydroxyl group, an amino group , or represents a mercapto group, these are further any one in good .R "15 ~ R" 18 may have a substituent, R linked to any one in the '15 ~ R' 18 , .A 11 and a 12 form a single bond represents a group each represented independently by the following general formula (a-1), R " 11 ~ R" 14, and R '11 ~ R' in 14 And Y is independently substituted by Y. Each Y independently represents a carbon atom, a nitrogen atom, an oxygen atom, a sulfur atom, or a silicon atom, and these may further have a substituent.
Figure JPOXMLDOC01-appb-C000028
Figure JPOXMLDOC01-appb-C000028
(一般式(A-1)中、Ra1~Ra8は、それぞれ独立に、水素原子、ハロゲン原子、アルキル基、アリール基、または複素環基を表し、これらは更に置換基を有していてもよい。*は結合位置を表す。Xaは、単結合、酸素原子、硫黄原子、アルキレン基、シリレン基、アルケニレン基、シクロアルキレン基、シクロアルケニレン基、アリーレン基、2価の複素環基、またはイミノ基を表し、これらは更に置換基を有していてもよい。S11はそれぞれ独立に下記置換基(S11)を示し、Ra1~Ra8中のいずれかひとつとして置換する。n’は0~4の整数を表す。) (In the general formula (A-1), each of Ra 1 to Ra 8 independently represents a hydrogen atom, a halogen atom, an alkyl group, an aryl group or a heterocyclic group, and these further have a substituent * Represents a bonding position, and Xa represents a single bond, oxygen atom, sulfur atom, alkylene group, silylene group, alkenylene group, cycloalkylene group, cycloalkenylene group, arylene group, divalent heterocyclic group, or an imino group, which further indicates which may have a substituent .S 11 each independently represent the following substituents (S 11), .n substituting as any one of in Ra 1 ~ Ra 8 ' Represents an integer of 0 to 4)
Figure JPOXMLDOC01-appb-C000029
Figure JPOXMLDOC01-appb-C000029
(R’1~R’3はそれぞれ独立に、水素原子またはアルキル基を表す。) (R ′ 1 to R ′ 3 each independently represent a hydrogen atom or an alkyl group.)
 一般式(F-1)中、R”11~R”18、R’11~R’18はそれぞれ独立に、水素原子、ハロゲン原子、アルキル基、アリール基、複素環基、水酸基、アミノ基、またはメルカプト基を表し、これらは更に置換基を有していてもよい。更なる置換基の具体例は上述した置換基Wが挙げられ、好ましくはハロゲン原子、アルキル基、アリール基、複素環基、水酸基、アミノ基、またはメルカプト基であり、より好ましくはハロゲン原子、アルキル基、アリール基、または複素環基であり、更に好ましくはフッ素原子、アルキル基、またはアリール基であり、特に好ましくはアルキル基、アリール基であり、最も好ましくはアルキル基である。
 R”11~R”18、R’11~R’18として好ましくは、水素原子、置換基を有していてもよいアルキル基、アリール基、または複素環基であり、より好ましくは、水素原子、置換基を有していてもよい炭素数1~18のアルキル基、炭素数6~18のアリール基、または炭素数4~16の複素環基である。中でも一般式(A-1)で表される置換基がR”12およびR’12にそれぞれ独立に置換することが好ましく、一般式(A-1)で表される置換基がR”12およびR’12にそれぞれ独立に置換し、R”11、R”13~R”18、R’11、R’13~R’18が水素原子、置換基を有していてもよい炭素数1~18のアルキル基であることがより好ましく、特に好ましくは一般式(A-1)で表される置換基がR”12およびR’12にそれぞれ独立に置換し、R”11、R”13~R”18、R’11、R’13~R’18が水素原子である。
In formula (F-1), R a "11 ~ R" 18, R '11 ~ R' 18 are each independently a hydrogen atom, a halogen atom, an alkyl group, an aryl group, a heterocyclic group, a hydroxyl group, an amino group, Or a mercapto group, which may further have a substituent. Specific examples of the further substituent include the above-mentioned substituent W, preferably a halogen atom, an alkyl group, an aryl group, a heterocyclic group, a hydroxyl group, an amino group or a mercapto group, more preferably a halogen atom, an alkyl It is a group, an aryl group or a heterocyclic group, more preferably a fluorine atom, an alkyl group or an aryl group, particularly preferably an alkyl group or an aryl group, and most preferably an alkyl group.
Preferred as R "11 ~ R" 18, R '11 ~ R' 18, a hydrogen atom, an optionally substituted alkyl group, an aryl group or a heterocyclic group, more preferably a hydrogen atom And an alkyl group having 1 to 18 carbon atoms, an aryl group having 6 to 18 carbon atoms, or a heterocyclic group having 4 to 16 carbon atoms which may have a substituent. Among them, the substituent represented by general formula (A-1) is preferably independently substituted to R ′ ′ 12 and R ′ 12 respectively, and the substituent represented by general formula (A-1) is R ′ ′ 12 and 'replaced independently to 12, R "11, R" 13 ~ R "18, R' R 11, R '13 ~ R' 18 is hydrogen atom, optionally 1 carbon atoms which may ~ have a substituent more preferably 18 alkyl group, particularly preferably a substituent represented by the general formula (a-1) is "substituted independently on 12 and R '12, R" R 11 , R "13 ~ R ′ ′ 18 , R ′ 11 and R ′ 13 to R ′ 18 are hydrogen atoms.
 Yはそれぞれ独立に炭素原子、窒素原子、酸素原子、硫黄原子、またはケイ素原子を表し、これらは更に置換基を有していてもよい。すなわち、Yは炭素原子、窒素原子、酸素原子、硫黄原子、またはケイ素原子からなる二価の連結基を表す。このうち-C(R’21)(R’22)-、-Si(R’23)(R’24)-、-N(R’20)-、が好ましく、-C(R’21)(R’22)-、-N(R’20)-、がより好ましく、-C(R’21)(R’22)-が特に好ましい。
 R’20~R’24は、それぞれ独立に、水素原子、ハロゲン原子、置換基を有していてもよいアルキル基、アリール基、複素環基、水酸基、アミノ基、またはメルカプト基を表す。その更なる置換基の具体例は置換基Wが挙げられる。R’20~R’24として好ましくは水素原子、置換基を有していてもよいアルキル基、アリール基、または複素環基であり、より好ましくは、水素原子、置換基を有していてもよい炭素数1~18のアルキル基、炭素数6~18のアリール基、または炭素数4~16の複素環基であり、更に好ましくは水素原子、または置換基を有していてもよい炭素数1~18のアルキル基であり、特に好ましくは炭素数1~18のアルキル基である。
Y each independently represents a carbon atom, a nitrogen atom, an oxygen atom, a sulfur atom or a silicon atom, and these may further have a substituent. That is, Y represents a divalent linking group consisting of carbon atom, nitrogen atom, oxygen atom, sulfur atom, or silicon atom. Among -C (R '21) (R ' 22) -, - Si (R '23) (R' 24) -, - N (R '20) -, preferably, -C (R' 21) ( R ′ 22 ) —, —N (R ′ 20 ) —, is more preferable, and —C (R ′ 21 ) (R ′ 22 ) — is particularly preferable.
R ′ 20 to R ′ 24 each independently represent a hydrogen atom, a halogen atom, an alkyl group which may have a substituent, an aryl group, a heterocyclic group, a hydroxyl group, an amino group or a mercapto group. Specific examples of the further substituent include the substituent W. R ′ 20 to R ′ 24 are preferably a hydrogen atom, an alkyl group which may have a substituent, an aryl group, or a heterocyclic group, and more preferably a hydrogen atom or a substituent. A good alkyl group having 1 to 18 carbon atoms, an aryl group having 6 to 18 carbon atoms, or a heterocyclic group having 4 to 16 carbon atoms, and more preferably a hydrogen atom or a carbon number which may have a substituent It is an alkyl group of 1 to 18, particularly preferably an alkyl group having 1 to 18 carbon atoms.
 一般式(A-1)におけるRa1~Ra8は、それぞれ独立に、水素原子、ハロゲン原子、置換基を有していてもよいアルキル基、アリール基、複素環基、水酸基、アミノ基、またはメルカプト基を表す。その更なる置換基の具体例は置換基Wが挙げられる。また、これらの置換基は複数が互いに結合して環を形成していてもよい。 In general formula (A-1), each of Ra 1 to Ra 8 independently represents a hydrogen atom, a halogen atom, an alkyl group which may have a substituent, an aryl group, a heterocyclic group, a hydroxyl group, an amino group, or Represents a mercapto group. Specific examples of the further substituent include the substituent W. Also, a plurality of these substituents may be bonded to each other to form a ring.
 Ra1~Ra8として好ましくは水素原子、ハロゲン原子、炭素数1~18のアルキル基、炭素数6~18のアリール基、または炭素数4~16の複素環基が好ましく、水素原子、炭素数1~12のアルキル基、または炭素数6~14のアリール基がより好ましく、水素原子、炭素数1~6のアルキル基、または炭素数6~10のアリール基が更に好ましい。アルキル基は分岐を有するものであってもよい。
 好ましい具体例としては、水素原子、メチル基、エチル基、プロピル基、ブチル基、ヘキシル基、シクロヘキシル基、フェニル基、またはナフチル基が挙げられる。
 また、Ra3およびRa6が水素原子または炭素数1~6のアルキル基であり、かつRa1、Ra2、Ra4、Ra5、Ra7、Ra8は、水素原子である場合が特に好ましい。
Each of Ra 1 to Ra 8 is preferably a hydrogen atom, a halogen atom, an alkyl group having 1 to 18 carbon atoms, an aryl group having 6 to 18 carbon atoms, or a heterocyclic group having 4 to 16 carbon atoms. An alkyl group of 1 to 12 or an aryl group having 6 to 14 carbon atoms is more preferable, and a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, or an aryl group having 6 to 10 carbon atoms is more preferable. The alkyl group may be branched.
Preferred specific examples include a hydrogen atom, a methyl group, an ethyl group, a propyl group, a butyl group, a hexyl group, a cyclohexyl group, a phenyl group or a naphthyl group.
It is particularly preferable that Ra 3 and Ra 6 each be a hydrogen atom or an alkyl group having 1 to 6 carbon atoms, and each of Ra 1 , Ra 2 , Ra 4 , Ra 5 , Ra 7 and Ra 8 be a hydrogen atom. .
 Xaは、単結合、酸素原子、硫黄原子、アルキレン基、シリレン基、アルケニレン基、シクロアルキレン基、シクロアルケニレン基、アリーレン基、2価の複素環基、またはイミノ基を表し、これらは更に置換基を有していてもよい。
 Xaは、単結合、炭素数1~12のアルキレン基、炭素数2~12のアルケニレン基、炭素数6~14のアリーレン基、炭素数4~13の複素環基、酸素原子、硫黄原子、炭素数1~12の炭化水素基(好ましくはアリール基またはアルキル基)を有するイミノ基(例えばフェニルイミノ基、メチルイミノ基、t-ブチルイミノ基)、またはシリレン基が好ましく、単結合、酸素原子、炭素数1~6のアルキレン基(例えばメチレン基、1,2-エチレン基、1,1-ジメチルメチレン基)、炭素数2のアルケニレン基(例えば-CH2=CH2-)、炭素数6~10のアリーレン基(例えば1,2-フェニレン基、2,3-ナフチレン基)、またはシリレン基がより好ましく、単結合、酸素原子、炭素数1~6のアルキレン基(例えばメチレン基、1,2-エチレン基、1,1-ジメチルメチレン基)が更に好ましい。これらの置換基に更に置換基Wを有していてもよい。
 一般式(A-1)で表される基の具体例としては、下記N1~N11で例示される基が挙げられる。但し、これらに限定されない。一般式(A-1)で表される基として好ましくはN-1~N-7であり、N-1~N-6がより好ましく、N-1~N-3がより好ましく、N-1~N-2が特に好ましく、N-1が最も好ましい。
Xa represents a single bond, an oxygen atom, a sulfur atom, an alkylene group, a silylene group, an alkenylene group, a cycloalkylene group, a cycloalkenylene group, an arylene group, a divalent heterocyclic group, or an imino group, which are further substituted May be included.
Xa is a single bond, an alkylene group having 1 to 12 carbon atoms, an alkenylene group having 2 to 12 carbon atoms, an arylene group having 6 to 14 carbon atoms, a heterocyclic group having 4 to 13 carbon atoms, an oxygen atom, a sulfur atom, carbon An imino group (for example, a phenylimino group, a methylimino group, a t-butylimino group) having a hydrocarbon group (preferably an aryl group or an alkyl group) of 1 to 12 or a silylene group is preferable, and a single bond, an oxygen atom, or a carbon number 1 to 6 alkylene group (for example, methylene group, 1,2-ethylene group, 1,1-dimethylmethylene group), alkenylene group having 2 carbon atoms (for example, -CH 2 = CH 2- ), 6 to 10 carbon atoms An arylene group (for example, 1,2-phenylene group, 2,3-naphthylene group) or a silylene group is more preferable, and a single bond, an oxygen atom, an alkylene group having 1 to 6 carbon atoms (for example, methyl group) Down group, 1,2-ethylene group, 1,1-dimethylmethylene group) is more preferred. These substituents may further have a substituent W.
Specific examples of the group represented by formula (A-1) include groups exemplified by the following N1 to N11. However, it is not limited to these. The group represented by formula (A-1) is preferably N-1 to N-7, more preferably N-1 to N-6, more preferably N-1 to N-3, and N-1 -N-2 is particularly preferred, and N-1 is most preferred.
Figure JPOXMLDOC01-appb-C000030
Figure JPOXMLDOC01-appb-C000030
 置換基(S11)において、R’1は水素原子またはアルキル基を表す。R’1として好ましくは、メチル基、エチル基、プロピル基、iso-プロピル基、ブチル基、またはtert-ブチル基であり、より好ましくはメチル基、エチル基、プロピル基、iso-プロピル基、またはtert-ブチル基であり、更に好ましくはメチル基、エチル基、iso-プロピル基、またはtert-ブチル基であり、特に好ましくはメチル基、エチル基、またはtert-ブチル基である。 In the substituent (S 11 ), R ′ 1 represents a hydrogen atom or an alkyl group. R ′ 1 is preferably a methyl group, an ethyl group, a propyl group, an iso-propyl group, a butyl group or a tert-butyl group, and more preferably a methyl group, an ethyl group, a propyl group, an iso-propyl group or It is a tert-butyl group, more preferably a methyl group, an ethyl group, an iso-propyl group or a tert-butyl group, and particularly preferably a methyl group, an ethyl group or a tert-butyl group.
 R’2は、水素原子またはアルキル基を表す。R’2として好ましくは、水素原子、メチル基、エチル基、プロピル基、iso-プロピル基、ブチル基、またはtert-ブチル基であり、更に好ましくは水素原子、メチル基、エチル基、またはプロピル基であり、より好ましくは水素原子、メチル基であり、特に好ましくはメチル基である。 R ′ 2 represents a hydrogen atom or an alkyl group. R ′ 2 is preferably a hydrogen atom, a methyl group, an ethyl group, a propyl group, an iso-propyl group, a butyl group or a tert-butyl group, and more preferably a hydrogen atom, a methyl group, an ethyl group or a propyl group And more preferably a hydrogen atom or a methyl group, and particularly preferably a methyl group.
 R’3は水素原子またはアルキル基を表す。R’3として好ましくは水素原子、またはメチル基であり、より好ましくはメチル基である。 R '3 represents a hydrogen atom or an alkyl group. R ′ 3 is preferably a hydrogen atom or a methyl group, more preferably a methyl group.
 また、R’1~R’3はそれぞれ互いに結合して環を形成していてもよい。環を形成する場合、環員数は特に限定されないが、好ましくは5または6員環であり、更に好ましくは6員環である。 Further, R ′ 1 to R ′ 3 may be bonded to each other to form a ring. When forming a ring, the number of ring members is not particularly limited, but it is preferably a 5- or 6-membered ring, more preferably a 6-membered ring.
 S11は上記置換基(S11)を示し、Ra1~Ra8中のいずれかひとつとして置換する。一般式(A-1)におけるRa3およびRa6のいずれか少なくとも1つがそれぞれ独立に、上記置換基(S11)を表すことが好ましい。
 置換基(S11)として好ましくは下記(a)~(x)を挙げることができ、(a)~(j)がより好ましく、(a)~(h)がより好ましく、(a)~(f)が特に好ましく、更に(a)~(c)が好ましく、(a)が最も好ましい。
S 11 represents the above-mentioned substituent (S 11 ), which is substituted as any one of Ra 1 to Ra 8 . It is preferable that any one of Ra 3 and Ra 6 in the general formula (A-1) independently represents the above-mentioned substituent (S 11 ).
Preferable examples of the substituent (S 11 ) include the following (a) to (x), (a) to (j) are more preferable, (a) to (h) are more preferable, and (a) to (h) Particularly preferred is f), more preferably (a) to (c), and most preferably (a).
Figure JPOXMLDOC01-appb-C000031
Figure JPOXMLDOC01-appb-C000031
 n’はそれぞれ独立に0~4の整数を表し、0~3が好ましく、0~2がより好ましく、1~2が更に好ましく、2が特に好ましい。 N 'each independently represents an integer of 0 to 4, preferably 0 to 3, more preferably 0 to 2, still more preferably 1 to 2, and particularly preferably 2.
 上記一般式(A-1)としては、下記一般式(A-3)で表される基、下記一般式(A-4)で表される基、または下記一般式(A-5)で表される基でもよい。 As the above general formula (A-1), a group represented by the following general formula (A-3), a group represented by the following general formula (A-4), or a table represented by the following general formula (A-5) It may be a substituted group.
Figure JPOXMLDOC01-appb-C000032
Figure JPOXMLDOC01-appb-C000032
(一般式(A-3)~(A-5)中、Ra33~Ra38、Ra41、Ra44~Ra48、Ra51、Ra52、Ra55~Ra58は、それぞれ独立に、水素原子、ハロゲン原子、またはアルキル基を表し、これらは更に置換基を有してもよい。*は結合位置を表す。Xc1、Xc2、およびXc3は、それぞれ独立に、単結合、酸素原子、硫黄原子、アルキレン基、シリレン基、アルケニレン基、シクロアルキレン基、シクロアルケニレン基、アリーレン基、2価の複素環基、またはイミノ基を表し、これらは更に置換基を有してもよい。Z31、Z41、およびZ51は、それぞれ独立に、シクロアルキル環、芳香族炭化水素環、または芳香族複素環を表し、これらは更に置換基を有してもよい。) (In the general formulas (A-3) to (A-5), each of Ra 33 to Ra 38 , Ra 41 , Ra 44 to Ra 48 , Ra 51 , Ra 52 , and Ra 55 to Ra 58 independently represents a hydrogen atom , A halogen atom, or an alkyl group, which may further have a substituent, * represents a bonding position, and Xc 1 , Xc 2 , and Xc 3 are each independently a single bond, an oxygen atom, Represents a sulfur atom, an alkylene group, a silylene group, an alkenylene group, a cycloalkylene group, a cycloalkenylene group, an arylene group, a divalent heterocyclic group, or an imino group, which may further have a substituent Z 31 , Z 41 and Z 51 each independently represent a cycloalkyl ring, an aromatic hydrocarbon ring or an aromatic heterocyclic ring, which may further have a substituent.
 一般式(A-3)~(A-5)において、Ra33~Ra38、Ra41、Ra44~Ra48、Ra51、Ra52、Ra55~Ra58は、それぞれ独立に、水素原子、ハロゲン原子(好ましくはフッ素原子、塩素原子、臭素原子、またはヨウ素原子)、またはアルキル基を表す。極性の低い置換基であると正孔の輸送に有利であるという理由から、水素原子、またはアルキル基であることが好ましく、水素原子であることがより好ましい。
 Ra33~Ra38、Ra41、Ra44~Ra48、Ra51、Ra52、Ra55~Ra58がアルキル基を表す場合、該アルキル基としては、炭素数1~18のアルキル基が好ましく、炭素数1~12のアルキル基がより好ましく、炭素数1~6のアルキル基が更に好ましい。具体的には、メチル基、エチル基、プロピル基、ブチル基、ヘキシル基、またはシクロヘキシル基が好ましい。
 一般式(A-3)~(A-5)において、Ra33~Ra38、Ra41、Ra44~Ra48、Ra51、Ra52、Ra55~Ra58のうち隣接するもの同士が互いに結合して環を形成してもよい。環としては前述の環Rが挙げられる。該環としては、好ましくは、ベンゼン環、ナフタレン環、アントラセン環、ピリジン環、ピリミジン環等である。
In the general formulas (A-3) to (A-5), each of Ra 33 to Ra 38 , Ra 41 , Ra 44 to Ra 48 , Ra 51 , Ra 52 , and Ra 55 to Ra 58 independently represents a hydrogen atom or It represents a halogen atom (preferably a fluorine atom, a chlorine atom, a bromine atom or an iodine atom) or an alkyl group. It is preferable that it is a hydrogen atom or an alkyl group from the viewpoint that it is advantageous to transport of a hole that the substituent is a low polarity substituent, and a hydrogen atom is more preferable.
When Ra 33 to Ra 38 , Ra 41 , Ra 44 to Ra 48 , Ra 51 , Ra 52 , and Ra 55 to Ra 58 each represent an alkyl group, the alkyl group is preferably an alkyl group having 1 to 18 carbon atoms, An alkyl group having 1 to 12 carbon atoms is more preferable, and an alkyl group having 1 to 6 carbon atoms is more preferable. Specifically, a methyl group, an ethyl group, a propyl group, a butyl group, a hexyl group or a cyclohexyl group is preferable.
In the general formulas (A-3) to (A-5), adjacent ones of Ra 33 to Ra 38 , Ra 41 , Ra 44 to Ra 48 , Ra 51 , Ra 52 , and Ra 55 to Ra 58 are mutually bonded To form a ring. The ring includes the aforementioned ring R. The ring is preferably a benzene ring, a naphthalene ring, an anthracene ring, a pyridine ring, a pyrimidine ring and the like.
 Xc1、Xc2、およびXc3は、それぞれ独立に、単結合、酸素原子、硫黄原子、アルキレン基、シリレン基、アルケニレン基、シクロアルキレン基、シクロアルケニレン基、アリーレン基、2価の複素環基、またはイミノ基を表す。Xc1、Xc2、およびXc3がアルキレン基、シリレン基、アルケニレン基、シクロアルキレン基、シクロアルケニレン基、アリーレン基、2価の複素環基、またはイミノ基を表す場合、これらは更に置換基を有していてもよい。該更なる置換基としては、置換基Wが挙げられる。 Xc 1 , Xc 2 and Xc 3 each independently represent a single bond, an oxygen atom, a sulfur atom, an alkylene group, a silylene group, an alkenylene group, a cycloalkylene group, a cycloalkenylene group, an arylene group, a divalent heterocyclic group Or an imino group. When Xc 1 , Xc 2 and Xc 3 each represent an alkylene group, a silylene group, an alkenylene group, a cycloalkylene group, a cycloalkenylene group, an arylene group, a divalent heterocyclic group or an imino group, these further have a substituent You may have. The additional substituent includes a substituent W.
 Xc1、Xc2、およびXc3は、単結合、炭素数1~12のアルキレン基、炭素数2~12のアルケニレン基、炭素数6~14のアリーレン基、炭素数4~13の複素環基、酸素原子、硫黄原子、炭素数1~12の炭化水素基(好ましくはアリール基またはアルキル基)を有するイミノ基(例えば、フェニルイミノ基、メチルイミノ基、t-ブチルイミノ基)が好ましく、単結合、炭素数1~6のアルキレン基(例えば、メチレン基、1,2-エチレン基、1,1-ジメチルメチレン基)、炭素数2のアルケニレン基(例えば、-CH2=CH2-)、炭素数6~10のアリーレン基(例えば、1,2-フェニレン基、2,3-ナフチレン基)がさらに好ましい。 Xc 1 , Xc 2 and Xc 3 each represents a single bond, an alkylene group having 1 to 12 carbon atoms, an alkenylene group having 2 to 12 carbon atoms, an arylene group having 6 to 14 carbon atoms, or a heterocyclic group having 4 to 13 carbon atoms And an imino group (eg, phenylimino group, methylimino group, t-butylimino group) having an oxygen atom, a sulfur atom, or a hydrocarbon group having 1 to 12 carbon atoms (preferably an aryl group or an alkyl group) is preferable, a single bond, An alkylene group having 1 to 6 carbon atoms (eg, methylene group, 1,2-ethylene group, 1,1-dimethyl methylene group), an alkenylene group having 2 carbon atoms (eg, -CH 2 CHCH 2- ), a carbon number An arylene group of 6 to 10 (eg, a 1,2-phenylene group, a 2,3-naphthylene group) is more preferable.
 Z31、Z41、およびZ51は、それぞれ独立に、シクロアルキル環、芳香族炭化水素環、または芳香族複素環を表す。一般式(A-3)~(A-5)において、Z31、Z41、およびZ51はベンゼン環と縮合している。光電変換素子の高い耐熱性と高い正孔輸送能が期待できるという理由から、Z31、Z41、およびZ51は芳香族炭化水素環であることが好ましい。 Z 31 , Z 41 and Z 51 each independently represent a cycloalkyl ring, an aromatic hydrocarbon ring or an aromatic heterocyclic ring. In the general formulas (A-3) to (A-5), Z 31 , Z 41 and Z 51 are fused to a benzene ring. Z 31 , Z 41 and Z 51 are preferably aromatic hydrocarbon rings from the viewpoint that high heat resistance and high hole transportability of the photoelectric conversion element can be expected.
 なお、電子ブロッキング膜は、複数膜で構成してもよい。
 電子ブロッキング膜としては無機材料を用いることもできる。一般的に、無機材料は有機材料よりも誘電率が大きいため、電子ブロッキング膜に用いた場合に、光電変換膜に電圧が多くかかるようになり、光電変換効率を高くすることができる。電子ブロッキング膜となりうる材料としては、酸化カルシウム、酸化クロム、酸化クロム銅、酸化マンガン、酸化コバルト、酸化ニッケル、酸化銅、酸化ガリウム銅、酸化ストロンチウム銅、酸化ニオブ、酸化モリブデン、酸化インジウム銅、酸化インジウム銀、酸化イリジウム等がある。電子ブロッキング膜が単層の場合にはその層を無機材料からなる層とすることができ、または、複数層の場合には1つまたは2以上の層を無機材料からなる層とすることができる。
The electron blocking film may be composed of a plurality of films.
An inorganic material can also be used as the electron blocking film. Generally, since the inorganic material has a dielectric constant larger than that of the organic material, when it is used for the electron blocking film, a large voltage is applied to the photoelectric conversion film, and the photoelectric conversion efficiency can be increased. Materials that can be an electron blocking film include calcium oxide, chromium oxide, chromium oxide copper, manganese oxide, cobalt oxide, nickel oxide, copper oxide, gallium oxide copper, strontium oxide copper, niobium oxide, molybdenum oxide, indium oxide copper oxide There are indium silver, iridium oxide and the like. When the electron blocking film is a single layer, the layer may be a layer made of an inorganic material, or in the case of multiple layers, one or more layers may be a layer made of an inorganic material .
(正孔ブロッキング膜)
 正孔ブロッキング膜には、電子受容性有機材料を用いることができる。
 電子受容性材料としては、1,3-ビス(4-tert-ブチルフェニル-1,3,4-オキサジアゾリル)フェニレン(OXD-7)等のオキサジアゾール誘導体、アントラキノジメタン誘導体、ジフェニルキノン誘導体、バソクプロイン、バソフェナントロリン、およびこれらの誘導体、トリアゾール化合物、トリス(8-ヒドロキシキノリナート)アルミニウム錯体、ビス(4-メチル-8-キノリナート)アルミニウム錯体、ジスチリルアリーレン誘導体、シロール化合物などを用いることができる。また、電子受容性有機材料でなくとも、十分な電子輸送性を有する材料ならば使用することは可能である。ポルフィリン系化合物や、DCM(4-ジシアノメチレン-2-メチル-6-(4-(ジメチルアミノスチリル))-4Hピラン)等のスチリル系化合物、4Hピラン系化合物を用いることができる。具体的には特開2008-72090号公報の[0073]~[0078]に記載の化合物が好ましい。
(Hole blocking film)
An electron accepting organic material can be used for the hole blocking film.
As the electron accepting material, oxadiazole derivatives such as 1,3-bis (4-tert-butylphenyl-1,3,4-oxadiazolyl) phenylene (OXD-7), anthraquinodimethane derivatives, diphenylquinone derivatives , Vasocuproin, vasophenanthroline, and derivatives thereof, triazole compounds, tris (8-hydroxyquinolinate) aluminum complexes, bis (4-methyl-8-quinolinate) aluminum complexes, distyrylarylene derivatives, silole compounds, etc. Can. Moreover, even if it is not an electron-accepting organic material, it is possible to use any material having a sufficient electron-transporting property. Porphyrin compounds, styryl compounds such as DCM (4-dicyanomethylene-2-methyl-6- (4- (dimethylaminostyryl))-4H pyran), 4H pyran compounds can be used. Specifically, compounds described in paragraphs [0073] to [0078] of JP-A-2008-72090 are preferable.
 電荷ブロッキング膜の製造方法は特に制限されず、乾式製膜法または湿式製膜法により製膜できる。乾式製膜法としては、蒸着法、スパッタ法等が使用できる。蒸着は、物理蒸着(PVD)、化学蒸着(CVD)のいずれでもよいが、真空蒸着等の物理蒸着が好ましい。湿式製膜法としては、インクジェット法、スプレー法、ノズルプリント法、スピンコート法、ディップコート法、キャスト法、ダイコート法、ロールコート法、バーコート法、グラビアコート法等が使用可能であるが、高精度パターニングの観点からはインクジェット法が好ましい。 The method for producing the charge blocking film is not particularly limited, and the film can be formed by a dry film forming method or a wet film forming method. A vapor deposition method, a sputtering method, etc. can be used as a dry film forming method. The vapor deposition may be physical vapor deposition (PVD) or chemical vapor deposition (CVD), but physical vapor deposition such as vacuum vapor deposition is preferred. As a wet film forming method, an inkjet method, a spray method, a nozzle printing method, a spin coating method, a dip coating method, a casting method, a die coating method, a roll coating method, a bar coating method, a gravure coating method, etc. can be used. From the viewpoint of high precision patterning, the inkjet method is preferred.
 電荷ブロッキング膜(電子ブロッキング膜および正孔ブロッキング膜)の厚みは、それぞれ、10~200nmが好ましく、更に好ましくは30~150nm、特に好ましくは50~100nmである。この厚みが薄すぎると、暗電流抑制効果が低下してしまい、厚すぎると光電変換効率が低下してしまうためである。 The thickness of the charge blocking film (electron blocking film and hole blocking film) is preferably 10 to 200 nm, more preferably 30 to 150 nm, and particularly preferably 50 to 100 nm. When this thickness is too thin, the dark current suppressing effect is reduced, and when it is too thick, the photoelectric conversion efficiency is reduced.
[基板]
 光電変換素子は、さらに基板を含んでいてもよい。使用される基板の種類は特に制限されず、半導体基板、ガラス基板、またはプラスチック基板を用いることができる。
 なお、基板の位置は特に制限されないが、通常、基板上に導電性膜、光電変換膜、および透明導電性膜をこの順で積層する。
[封止層]
 光電変換素子は、さらに封止層を含んでいてもよい。光電変換材料は水分子などの劣化因子の存在で顕著にその性能が劣化してしまうことがあり、水分子を浸透させない緻密な金属酸化物・金属窒化物・金属窒化酸化物などセラミクスやダイヤモンド状炭素(DLC)などの封止層で光電変換膜全体を被覆して封止することが上記劣化を防止することができる。
 なお、封止層としては、特開2011-082508号公報の段落[0210]~[0215]に記載に従って、材料の選択および製造を行ってもよい。
[substrate]
The photoelectric conversion element may further include a substrate. The type of substrate used is not particularly limited, and a semiconductor substrate, a glass substrate, or a plastic substrate can be used.
Although the position of the substrate is not particularly limited, in general, the conductive film, the photoelectric conversion film, and the transparent conductive film are stacked in this order on the substrate.
[Sealing layer]
The photoelectric conversion element may further include a sealing layer. Photoelectric conversion materials may deteriorate their performance significantly due to the presence of deterioration factors such as water molecules, and such as dense metal oxides, metal nitrides, metal nitride oxides, etc. that do not allow water molecules to permeate, and diamond-like The above deterioration can be prevented by covering and sealing the entire photoelectric conversion film with a sealing layer of carbon (DLC) or the like.
In addition, as the sealing layer, materials may be selected and manufactured according to the description in paragraphs [0210] to [0215] of JP-A-2011-082508.
[光センサ]
 光電変換素子の用途として、例えば、光電池と光センサが挙げられるが、本発明の光電変換素子は光センサとして用いることが好ましい。光センサとしては、上記光電変換素子単独で用いたものでもよいし、上記光電変換素子を直線状に配したラインセンサや、平面上に配した2次元センサの形態とするものが好ましい。本発明の光電変換素子は、ラインセンサでは、スキャナー等の様に光学系および駆動部を用いて光画像情報を電気信号に変換し、2次元センサでは、撮像モジュールのように光画像情報を光学系でセンサ上に結像させ電気信号に変換することで撮像素子として機能する。
 光電池は発電装置であるため、光エネルギーを電気エネルギーに変換する効率が重要な性能となるが、暗所での電流である暗電流は機能上問題にならない。更にカラーフィルタ設置等の後段の加熱工程が必要ない。光センサは明暗信号を高い精度で電気信号に変換することが重要な性能となるため、光量を電流に変換する効率も重要な性能であるが、暗所で信号を出力するとノイズとなるため、低い暗電流が要求される。更に後段の工程に対する耐性も重要である。
[Light sensor]
As a use of a photoelectric conversion element, although a photovoltaic cell and an optical sensor are mentioned, for example, it is preferred to use a photoelectric conversion element of the present invention as an optical sensor. As an optical sensor, what was used by the said photoelectric conversion element independently may be used, and what has a form of the line sensor which distribute | arranged the said photoelectric conversion element linearly, and what has a form of the two-dimensional sensor arranged on plane is preferable. The photoelectric conversion element of the present invention converts optical image information into an electrical signal using an optical system and a driving unit such as a scanner in a line sensor, and the two-dimensional sensor converts optical image information into an optical signal as an imaging module. The system functions as an imaging element by forming an image on a sensor and converting it into an electric signal.
Since a photovoltaic cell is a power generation device, the efficiency of converting light energy into electrical energy is an important performance, but the dark current, which is the current in a dark place, does not pose a functional problem. Furthermore, there is no need for a subsequent heating process such as color filter installation. Since it is important that the light sensor convert light and dark signals into electrical signals with high accuracy, the efficiency of converting the amount of light into current is also an important performance, but outputting a signal in a dark place causes noise, Low dark current is required. Furthermore, resistance to the subsequent steps is also important.
[撮像素子]
 次に、光電変換素子10aを備えた撮像素子の構成例を説明する。
 なお、以下に説明する構成例において、すでに説明した部材などと同等な構成・作用を有する部材等については、図中に同一符号または相当符号を付すことにより、説明を簡略化或いは省略する。
 撮像素子とは画像の光情報を電気信号に変換する素子であり、複数の光電変換素子が同一平面状でマトリクス上に配置されており、各々の光電変換素子(画素)において光信号を電気信号に変換し、その電気信号を画素ごとに逐次撮像素子外に出力できるものをいう。そのために、画素ひとつあたり、一つの光電変換素子、一つ以上のトランジスタから構成される。
 図2は、本発明の一実施形態を説明するための撮像素子の概略構成を示す断面模式図である。この撮像素子は、デジタルカメラ、デジタルビデオカメラ等の撮像装置、電子内視鏡、携帯電話機等の撮像モジュール等に搭載して用いられる。
 この撮像素子は、図1に示したような構成の複数の光電変換素子と、各光電変換素子の光電変換膜で発生した電荷に応じた信号を読み出す読み出し回路が形成された回路基板とを有し、該回路基板上方の同一面上に、複数の光電変換素子が1次元状または二次元状に配列された構成となっている。
[Image sensor]
Next, a configuration example of an imaging device provided with the photoelectric conversion device 10a will be described.
In the configuration example described below, the description of the members or the like having the same configuration and action as the members and the like already described is simplified or omitted by attaching the same reference numerals or the corresponding reference numerals in the drawings.
An imaging element is an element that converts light information of an image into an electrical signal, and a plurality of photoelectric conversion elements are arranged on a matrix in the same plane, and an optical signal is converted into an electrical signal in each photoelectric conversion element (pixel). And the electric signal can be sequentially output to the outside of the imaging device for each pixel. Therefore, one photoelectric conversion element and one or more transistors are provided per pixel.
FIG. 2 is a schematic cross-sectional view showing a schematic configuration of an imaging device for describing an embodiment of the present invention. The image pickup device is used by being mounted on an image pickup apparatus such as a digital camera or a digital video camera, an image pickup module such as an electronic endoscope, or a mobile phone.
This imaging device has a plurality of photoelectric conversion devices configured as shown in FIG. 1 and a circuit board on which a readout circuit for reading out a signal corresponding to the charge generated in the photoelectric conversion film of each photoelectric conversion device is formed. A plurality of photoelectric conversion elements are arranged in a one-dimensional or two-dimensional manner on the same plane above the circuit board.
 図2に示す撮像素子100は、基板101と、絶縁層102と、接続電極103と、画素電極(下部電極)104と、接続部105と、接続部106と、光電変換膜107と、対向電極(上部電極)108と、緩衝層109と、封止層110と、カラーフィルタ(CF)111と、隔壁112と、遮光層113と、保護層114と、対向電極電圧供給部115と、読出し回路116とを備える。 The imaging device 100 illustrated in FIG. 2 includes a substrate 101, an insulating layer 102, a connection electrode 103, a pixel electrode (lower electrode) 104, a connection portion 105, a connection portion 106, a photoelectric conversion film 107, and an opposite electrode. (Upper electrode) 108, buffer layer 109, sealing layer 110, color filter (CF) 111, partition wall 112, light shielding layer 113, protective layer 114, counter electrode voltage supply unit 115, readout circuit And 116.
 画素電極104は、図1に示した光電変換素子10aの下部電極11と同じ機能を有する。対向電極108は、図1に示した光電変換素子10aの上部電極15と同じ機能を有する。光電変換膜107は、図1に示した光電変換素子10aの下部電極11および上部電極15間に設けられる層と同じ構成である。 The pixel electrode 104 has the same function as the lower electrode 11 of the photoelectric conversion element 10a shown in FIG. The counter electrode 108 has the same function as the upper electrode 15 of the photoelectric conversion element 10 a shown in FIG. 1. The photoelectric conversion film 107 has the same configuration as the layer provided between the lower electrode 11 and the upper electrode 15 of the photoelectric conversion element 10 a shown in FIG. 1.
 基板101は、ガラス基板またはSi等の半導体基板である。基板101上には絶縁層102が形成されている。絶縁層102の表面には複数の画素電極104と複数の接続電極103が形成されている。 The substrate 101 is a glass substrate or a semiconductor substrate such as Si. An insulating layer 102 is formed on the substrate 101. A plurality of pixel electrodes 104 and a plurality of connection electrodes 103 are formed on the surface of the insulating layer 102.
 光電変換膜107は、複数の画素電極104の上にこれらを覆って設けられた全ての光電変換素子で共通の層である。 The photoelectric conversion film 107 is a layer common to all the photoelectric conversion elements provided on the plurality of pixel electrodes 104 so as to cover them.
 対向電極108は、光電変換膜107上に設けられた、全ての光電変換素子で共通の1つの電極である。対向電極108は、光電変換膜107よりも外側に配置された接続電極103の上にまで形成されており、接続電極103と電気的に接続されている。 The counter electrode 108 is one electrode provided on the photoelectric conversion film 107 and common to all the photoelectric conversion elements. The counter electrode 108 is formed on the connection electrode 103 disposed outside the photoelectric conversion film 107 and is electrically connected to the connection electrode 103.
 接続部106は、絶縁層102に埋設されており、接続電極103と対向電極電圧供給部115とを電気的に接続するためのプラグ等である。対向電極電圧供給部115は、基板101に形成され、接続部106および接続電極103を介して対向電極108に所定の電圧を印加する。対向電極108に印加すべき電圧が撮像素子の電源電圧よりも高い場合は、チャージポンプ等の昇圧回路によって電源電圧を昇圧して上記所定の電圧を供給する。 The connection portion 106 is embedded in the insulating layer 102 and is a plug or the like for electrically connecting the connection electrode 103 and the counter electrode voltage supply portion 115. The counter electrode voltage supply unit 115 is formed on the substrate 101, and applies a predetermined voltage to the counter electrode 108 through the connection portion 106 and the connection electrode 103. When the voltage to be applied to the counter electrode 108 is higher than the power supply voltage of the imaging device, the power supply voltage is boosted by a charge pump or other booster circuit to supply the predetermined voltage.
 読出し回路116は、複数の画素電極104の各々に対応して基板101に設けられており、対応する画素電極104で捕集された電荷に応じた信号を読出すものである。読出し回路116は、例えばCCD、CMOS回路、またはTFT回路等で構成されており、絶縁層102内に配置された図示しない遮光層によって遮光されている。読み出し回路116は、それに対応する画素電極104と接続部105を介して電気的に接続されている。 The readout circuit 116 is provided on the substrate 101 corresponding to each of the plurality of pixel electrodes 104, and reads out a signal corresponding to the charge collected by the corresponding pixel electrode 104. The readout circuit 116 is formed of, for example, a CCD, a CMOS circuit, or a TFT circuit, and is shielded from light by a light shielding layer (not shown) disposed in the insulating layer 102. The readout circuit 116 is electrically connected to the corresponding pixel electrode 104 via the connection portion 105.
 緩衝層109は、対向電極108上に、対向電極108を覆って形成されている。封止層110は、緩衝層109上に、緩衝層109を覆って形成されている。カラーフィルタ111は、封止層110上の各画素電極104と対向する位置に形成されている。隔壁112は、カラーフィルタ111同士の間に設けられており、カラーフィルタ111の光透過効率を向上させるためのものである。 The buffer layer 109 is formed on the counter electrode 108 so as to cover the counter electrode 108. The sealing layer 110 is formed on the buffer layer 109 so as to cover the buffer layer 109. The color filter 111 is formed on the sealing layer 110 so as to face each pixel electrode 104. The partition wall 112 is provided between the color filters 111 and is for improving the light transmission efficiency of the color filter 111.
 遮光層113は、封止層110上のカラーフィルタ111および隔壁112を設けた領域以外に形成されており、有効画素領域以外に形成された光電変換膜107に光が入射する事を防止する。保護層114は、カラーフィルタ111、隔壁112、および遮光層113上に形成されており、撮像素子100全体を保護する。 The light shielding layer 113 is formed on the sealing layer 110 except the area where the color filter 111 and the partition wall 112 are provided, and prevents light from entering the photoelectric conversion film 107 formed in areas other than the effective pixel area. The protective layer 114 is formed on the color filter 111, the partition wall 112, and the light shielding layer 113, and protects the entire imaging element 100.
 このように構成された撮像素子100では、光が入射すると、この光が光電変換膜107に入射し、ここで電荷が発生する。発生した電荷のうちの正孔は、画素電極104で捕集され、その量に応じた電圧信号が読み出し回路116によって撮像素子100外部に出力される。 In the imaging device 100 configured as described above, when light is incident, the light is incident on the photoelectric conversion film 107, and a charge is generated here. Holes among the generated charges are collected by the pixel electrode 104, and a voltage signal corresponding to the amount is output to the outside of the imaging element 100 by the readout circuit 116.
 撮像素子100の製造方法は、次の通りである。
 対向電極電圧供給部115と読み出し回路116が形成された回路基板上に、接続部105,106、複数の接続電極103、複数の画素電極104、および絶縁層102を形成する。複数の画素電極104は、絶縁層102の表面に例えば正方格子状に配置する。
The method of manufacturing the imaging device 100 is as follows.
The connection portions 105 and 106, the plurality of connection electrodes 103, the plurality of pixel electrodes 104, and the insulating layer 102 are formed on the circuit substrate on which the counter electrode voltage supply portion 115 and the readout circuit 116 are formed. The plurality of pixel electrodes 104 are arranged on the surface of the insulating layer 102 in, for example, a square lattice.
 次に、複数の画素電極104上に、光電変換膜107を例えば真空加熱蒸着法によって形成する。次に、光電変換膜107上に例えばスパッタ法により対向電極108を真空下で形成する。次に、対向電極108上に緩衝層109、封止層110を順次、例えば真空加熱蒸着法によって形成する。次に、カラーフィルタ111、隔壁112、遮光層113を形成後、保護層114を形成して、撮像素子100を完成する。 Next, the photoelectric conversion film 107 is formed on the plurality of pixel electrodes 104 by, for example, a vacuum heating evaporation method. Next, the counter electrode 108 is formed on the photoelectric conversion film 107 under vacuum, for example, by sputtering. Next, the buffer layer 109 and the sealing layer 110 are sequentially formed on the counter electrode 108 by, for example, a vacuum heating evaporation method. Next, after forming the color filter 111, the partition wall 112, and the light shielding layer 113, the protective layer 114 is formed, and the imaging device 100 is completed.
 撮像素子100の製造方法においても、光電変換膜107の形成工程と封止層110の形成工程との間に、作製途中の撮像素子100を非真空下に置く工程を追加しても、複数の光電変換素子の性能劣化を防ぐことができる。この工程を追加することで、撮像素子100の性能劣化を防ぎながら、製造コストを抑えることができる。 Even in the method of manufacturing the imaging device 100, even if a process of placing the imaging device 100 in the middle of production under non-vacuum is added between the process of forming the photoelectric conversion film 107 and the process of forming the sealing layer 110, Performance degradation of the photoelectric conversion element can be prevented. By adding this process, it is possible to suppress the manufacturing cost while preventing the performance deterioration of the imaging device 100.
 以下に実施例を示すが、本発明はこれらに限定されるものではない。 Although an example is shown below, the present invention is not limited to these.
(化合物D3の合成) (Synthesis of Compound D3)
Figure JPOXMLDOC01-appb-C000033
Figure JPOXMLDOC01-appb-C000033
 100mL三口丸底フラスコに、p-ブロモベンゾニトリル5.46g(30mmol)、t-アミルアルコール20mL、カリウムt-ブトキシド5.05g(45mmol)を加え、攪拌しながら95℃まで加熱した。この混合物に、t-アミルアルコール3mLにコハク酸ジイソプロピル2.73g(13.5mmol)を溶かした溶液を25分かけて滴下した。滴下後、反応混合物を4時間加熱還流し、次いで50℃まで冷却した。この混合物に水15mLとメタノール15mLとを加え、30分攪拌し、沈殿物を濾取した。得られた赤色粉末を50%水性メタノール、水で洗浄し、80℃で真空乾燥し、化合物1を3.0g(収率50%)で、赤色粉末として得た。 In a 100 mL three-necked round bottom flask, 5.46 g (30 mmol) of p-bromobenzonitrile, 20 mL of t-amyl alcohol, and 5.05 g (45 mmol) of potassium t-butoxide were added and heated to 95 ° C. with stirring. To this mixture, a solution of 2.73 g (13.5 mmol) of diisopropyl succinate in 3 mL of t-amyl alcohol was added dropwise over 25 minutes. After addition, the reaction mixture was heated to reflux for 4 hours and then cooled to 50 ° C. To the mixture were added 15 mL of water and 15 mL of methanol, and the mixture was stirred for 30 minutes, and the precipitate was collected by filtration. The obtained red powder was washed with 50% aqueous methanol and water, and vacuum dried at 80 ° C. to obtain 3.0 g (yield 50%) of Compound 1 as a red powder.
 200mL三口丸底フラスコに、化合物1(1.0g,2.24mmol)、炭酸カリウム1.24g(8.97mmol)、N-メチルピロリドン35mLを加え、窒素雰囲気下、室温で30分攪拌した。次に、ヨードメタン4.07g(28.7mmol)を加え、室温で1時間攪拌した。さらに、ヨードメタン3.18g(22.4mmol)を加え、55℃まで加熱し、5時間攪拌した。室温まで冷却した後、水100mLを加え、得られた固体を濾取した。シリカゲルカラムクロマトグラフィーにより精製し、化合物2を319mg(収率30%)で橙色粉末として得た。 Compound 1 (1.0 g, 2.24 mmol), 1.24 g (8.97 mmol) of potassium carbonate, and 35 mL of N-methylpyrrolidone were added to a 200 mL three-necked round bottom flask, and stirred at room temperature for 30 minutes under a nitrogen atmosphere. Next, 4.07 g (28.7 mmol) of iodomethane was added and stirred at room temperature for 1 hour. Further, 3.18 g (22.4 mmol) of iodomethane was added, and the mixture was heated to 55 ° C. and stirred for 5 hours. After cooling to room temperature, 100 mL of water was added and the obtained solid was collected by filtration. The residue was purified by silica gel column chromatography to give 319 mg (yield 30%) of Compound 2 as an orange powder.
 100mL三口丸底フラスコに、化合物2(0.3g,0.63mmol)、Pd2(dba)350mg、DPPF30mg、xylene15mLを加え、窒素雰囲気下、室温で15分攪拌した。ジフェニルアミン0.32g(1.89mmol)、ナトリウムt-ブトキシド0.9g(9.45mmol)を加え、100℃で7時間攪拌し、後に室温まで冷却した。反応混合物に水と酢酸エチルを加え、有機層を抽出し、溶媒を留去した。シリカゲルカラムクロマトグラフィーにより精製し、D3を赤褐色粉末として0.26g(収率64%)得た。 Compound 2 (0.3 g, 0.63 mmol), 50 mg of Pd 2 (dba) 3 , 30 mg of DPPF, and 15 mL of xylene were added to a 100 mL three-necked round bottom flask, and stirred at room temperature for 15 minutes under a nitrogen atmosphere. 0.32 g (1.89 mmol) of diphenylamine and 0.9 g (9.45 mmol) of sodium t-butoxide were added, and the mixture was stirred at 100 ° C. for 7 hours and then cooled to room temperature. Water and ethyl acetate were added to the reaction mixture, the organic layer was extracted, and the solvent was evaporated. The residue was purified by silica gel column chromatography to obtain 0.26 g (yield 64%) of D3 as a reddish brown powder.
 なお、後述する化合物D1~D2、および、D4~D14は、上記化合物D3の合成方法および公知の方法を参照して、合成した。
 以下に、本実施例および比較例で使用した化合物(D1~D14、RD1~RD4)をまとめて示す。
The compounds D1 to D2 and D4 to D14 described later were synthesized with reference to the synthesis method of the compound D3 and a known method.
The compounds (D1 to D14, RD1 to RD4) used in this example and the comparative example are collectively shown below.
Figure JPOXMLDOC01-appb-C000034
Figure JPOXMLDOC01-appb-C000034
Figure JPOXMLDOC01-appb-C000035
Figure JPOXMLDOC01-appb-C000035
Figure JPOXMLDOC01-appb-C000036
Figure JPOXMLDOC01-appb-C000036
<光電変換素子の作製>
 図1(a)の形態の光電変換素子を作製した。ここで、光電変換素子は、下部電極11、電子ブロッキング膜16A、光電変換膜12および上部電極15からなる。
 具体的には、ガラス基板上に、アモルファス性ITOをスパッタ法により成膜して、下部電極11(厚み:30nm)を形成し、さらに下部電極11上に下記化合物(EB-1)を真空加熱蒸着法により成膜して、電子ブロッキング膜16A(厚み:100nm)を形成した。さらに、基板の温度を25℃に制御した状態で、電子ブロッキング膜16A上に、上記化合物(D1~D14、RD1~RD4)とフラーレン(C60)とをそれぞれ単層換算で100nm、300nmとなるように真空加熱蒸着により共蒸着して成膜し、光電変換膜12を形成した。さらに、光電変換膜12上に、アモルファス性ITOをスパッタ法により成膜して、上部電極15(透明導電性膜)(厚み:10nm)を形成した。上部電極15上に、加熱蒸着により封止層としてSiO膜を形成した後、その上にALCVD法により酸化アルミニウム(Al23)層を形成し、光電変換素子を作製した。
<Fabrication of photoelectric conversion element>
The photoelectric conversion element of the form of Fig.1 (a) was produced. Here, the photoelectric conversion element includes the lower electrode 11, the electron blocking film 16 A, the photoelectric conversion film 12, and the upper electrode 15.
Specifically, amorphous ITO is deposited on a glass substrate by sputtering to form the lower electrode 11 (thickness: 30 nm), and the following compound (EB-1) is vacuum-heated on the lower electrode 11 The film was formed by vapor deposition to form an electron blocking film 16A (thickness: 100 nm). Furthermore, with the substrate temperature controlled at 25 ° C., the above compounds (D1 to D14, RD1 to RD4) and fullerene (C 60 ) become 100 nm and 300 nm in single layer conversion, respectively, on the electron blocking film 16A. As described above, the film was co-deposited by vacuum heating deposition to form a film, and the photoelectric conversion film 12 was formed. Furthermore, amorphous ITO was formed into a film on the photoelectric conversion film 12 by a sputtering method to form an upper electrode 15 (transparent conductive film) (thickness: 10 nm). After forming a SiO film as a sealing layer by heating vapor deposition on the upper electrode 15, an aluminum oxide (Al 2 O 3 ) layer was formed thereon by an ALCVD method, and a photoelectric conversion element was produced.
Figure JPOXMLDOC01-appb-C000037
Figure JPOXMLDOC01-appb-C000037
<素子耐熱性>
 得られた各素子を、窒素雰囲気下、150℃のホットプレート上で20分保持して熱アニールを行い、室温に戻した後に暗電流を測定してアニール前からの暗電流の増加率[{(アニール後の暗電流値-アニール前の暗電流値)/アニール前の暗電流値}×100(%)]が5%未満であるものを「A」、5%以上10%未満であったものを「B」、10%超であったものを「C」として表1の「耐熱性」欄に記載した。なお、実用上、AまたはBである必要がある。
<Element heat resistance>
Each element thus obtained is thermally annealed by holding it on a hot plate at 150 ° C. for 20 minutes in a nitrogen atmosphere, returning it to room temperature and then measuring the dark current to increase the dark current from before annealing [{ (A dark current after annealing-dark current before annealing) / dark current before annealing} × 100 (%)] was less than 5%, "A" was 5% or more and less than 10% What was "B" and what was more than 10% was described in the "heat resistance" column of Table 1 as "C". In practice, it is necessary to be A or B.
<応答速度(98%信号立ち上がり時間)の評価>
 得られた固体撮像素子中の光電変換素子に2×105V/cmの電場で印加したときの相対応答速度(0から98%信号強度への立ち上がり時間)を測定し、実施例1を1とする相対値として求め、表1の「応答速度(相対値)」欄に記載した。なお、各素子の光電変換性能の測定の際には、上部電極(透明導電性膜)側から光を入射した。以下に、相対値の求め方を示す。
(実施例1を1とする相対値)
=[実施例(または比較例)Xにおける0から98%信号強度への立ち上がり時間]/[実施例1における0から98%信号強度への立ち上がり時間]
 なお、実用上、20以内が好ましく、5以内であることがより好ましい。
<Evaluation of response speed (98% signal rise time)>
The relative response speed (rise time to a signal intensity of 0 to 98%) was measured when an electric field of 2 × 10 5 V / cm was applied to the photoelectric conversion element in the obtained solid-state imaging device. It calculated | required as a relative value and was described in the "response speed (relative value)" column of Table 1. In addition, in the case of the measurement of the photoelectric conversion performance of each element, light was injected from the upper electrode (transparent conductive film) side. The following shows how to determine relative values.
(Relative value where Example 1 is 1)
= [Rise time from 0 to 98% signal strength in the embodiment (or comparative example) X] / [rise time from 0 to 98% signal strength in the embodiment 1]
In practice, it is preferably 20 or less, and more preferably 5 or less.
Figure JPOXMLDOC01-appb-T000038
Figure JPOXMLDOC01-appb-T000038
 上記表1に示すように、本発明の光電変換素子においては、優れた耐熱性および応答性を示すことが確認された。
 例えば、実施例1~14の比較から分かるように、Ar1とR11、Ar1とR12、R11とR12、Ar2とR13、Ar2とR14、およびR13とR14の少なくとも一つが互いに結合し環を形成していれば、耐熱性がより優れることが確認された。
 また、実施例1と実施例5との比較から分かるように、一般式(1)~一般式(3)中のAr1とR11、Ar1とR12およびR11とR12の少なくとも一つが互いに結合して環を形成し、Ar2とR13、Ar2とR14、およびR13とR14の少なくとも一つが互いに結合して環を形成している場合(実施例1に該当)、応答性がより優れることが確認された。
 また、実施例4と実施例6との比較から分かるように、Ar1とR11、Ar1とR12、R11とR12、Ar2とR13、Ar2とR14、R13とR14はそれぞれ連結基を介さずに直接結合している場合(実施例6に該当)、応答性がより優れることが確認された。
 また、実施例3と実施例7との比較から分かるように、X1およびX2がO(酸素原子)の場合(実施例3に相当)、応答速度および耐熱性がより優れることが確認された。
 また、実施例1と実施例8との比較から分かるように、Ar1およびAr2がアリーレン基の場合(実施例1に該当)、応答性がより優れることが確認された。
As shown in the said Table 1, in the photoelectric conversion element of this invention, it was confirmed that the outstanding heat resistance and responsiveness are shown.
For example, as can be seen from the comparison of Examples 1-14, Ar 1 and R 11 , Ar 1 and R 12 , R 11 and R 12 , Ar 2 and R 13 , Ar 2 and R 14 , and R 13 and R 14 It has been confirmed that the heat resistance is more excellent if at least one of them is bonded to each other to form a ring.
Also, as can be seen from the comparison between Example 1 and Example 5, at least one of Ar 1 and R 11 , Ar 1 and R 12, and R 11 and R 12 in the general formulas (1) to (3) When two are bonded to each other to form a ring, and at least one of Ar 2 and R 13 , Ar 2 and R 14 , and R 13 and R 14 are bonded to each other to form a ring (corresponding to Example 1) It was confirmed that the responsiveness is better.
Also, as can be seen from the comparison between Example 4 and Example 6, Ar 1 and R 11 , Ar 1 and R 12 , R 11 and R 12 , Ar 2 and R 13 , Ar 2 and R 14 , and R 13 It was confirmed that the response is more excellent when R 14 is directly bonded without a linking group (corresponding to Example 6).
Further, as can be seen from the comparison between Example 3 and Example 7, when X 1 and X 2 are O (oxygen atom) (corresponding to Example 3), it is confirmed that the response speed and the heat resistance are more excellent. The
Moreover, as Ar 1 and Ar 2 are arylene groups (it corresponds to Example 1), it turned out that a response is more excellent so that comparison with Example 1 and Example 8 may show.
 一方、特許文献1の実施例欄で使用されていたRD1を使用した場合(比較例1に該当)、耐熱性および応答性に劣ることが確認された。
 また、一般式(1)~一般式(3)中のR1およびR2が水素原子であるRD2を使用した場合(比較例2に該当)、応答性に劣ることが確認された。
 さらに、一般式(1)~一般式(3)中のR11~R14がアルキル基であるRD3を使用した場合(比較例3に該当)、応答性に劣ることが確認された。
 また、アミノ基を有しないRD4を使用した場合(比較例4に該当)、そもそも蒸着時に化合物が分解してしまい、光電変換膜を製造できなかった。
 なお、RD2およびRD3は、特開2010-192782号公報で例示される例示化合物(19)および(71)に該当し、RD4は、特開2003-346926号公報の実施例6で使用されている化合物に該当する。
On the other hand, when RD1 used by the Example column of patent document 1 was used (it corresponds to the comparative example 1), it was confirmed that it is inferior to heat resistance and responsiveness.
In addition, when RD2 in which R 1 and R 2 in the general formulas (1) to (3) are hydrogen atoms is used (corresponding to Comparative Example 2), it is confirmed that the responsiveness is inferior.
Moreover, the general formula (1) (corresponding to Comparative Example 3) were If used R 11 - R 14 of ~ the general formula (3) is a RD3 is an alkyl group, it was confirmed that the poor responsiveness.
Moreover, when RD4 which does not have an amino group is used (it corresponds to the comparative example 4), the compound decomposed | disassembled at the time of vapor deposition from the first, and the photoelectric conversion film was not able to be manufactured.
RD2 and RD3 correspond to the exemplified compounds (19) and (71) exemplified in JP-A-2010-192782, and RD4 is used in Example 6 of JP-A-2003-346926. It corresponds to a compound.
<撮像素子の作製>
 図2に示す形態と同様の撮像素子を作製した。すなわち、CMOS基板上に、アモルファス性TiN 30nmをスパッタ法により成膜後、フォトリソグラフィーによりCMOS基板上のフォトダイオード(PD)の上にそれぞれ1つずつ画素が存在するようにパターニングして下部電極とし、電子ブロッキング材料の製膜以降は実施例1~14、比較例1~4と同様に作製した。その評価も同様に行い、第1表と同様な結果が得られ、撮像素子においても製造に適していることと、優れた性能を示すことが分かった。
<Fabrication of imaging device>
An imaging device similar to that shown in FIG. 2 was produced. That is, after depositing amorphous TiN 30 nm on a CMOS substrate by sputtering, it is patterned by photolithography so that one pixel exists on each of the photodiodes (PD) on the CMOS substrate to form a lower electrode. After the film formation of the electron blocking material, it was manufactured in the same manner as in Examples 1 to 14 and Comparative Examples 1 to 4. The evaluation was also conducted similarly, and the same results as in Table 1 were obtained, and it was found that the imaging device is also suitable for production and shows excellent performance.
 10a、10b  光電変換素子
 11  下部電極(導電性膜)
 12  光電変換膜
 15  上部電極(透明導電性膜)
 16A  電子ブロッキング膜
 16B  正孔ブロッキング膜
 100  撮像素子
 101  基板
 102  絶縁層
 103  接続電極
 104  画素電極(下部電極)
 105  接続部
 106  接続部
 107  光電変換膜
 108  対向電極(上部電極)
 109  緩衝層
 110  封止層
 111  カラーフィルタ(CF)
 112  隔壁
 113  遮光層
 114  保護層
 115  対向電極電圧供給部
 116  読出し回路
10a, 10b photoelectric conversion element 11 lower electrode (conductive film)
12 photoelectric conversion film 15 upper electrode (transparent conductive film)
16A electron blocking film 16B hole blocking film 100 imaging device 101 substrate 102 insulating layer 103 connection electrode 104 pixel electrode (lower electrode)
105 connection portion 106 connection portion 107 photoelectric conversion film 108 counter electrode (upper electrode)
109 buffer layer 110 sealing layer 111 color filter (CF)
112 partition wall 113 light shielding layer 114 protective layer 115 counter electrode voltage supply unit 116 readout circuit

Claims (10)

  1.  導電性膜、光電変換材料を含む光電変換膜、および透明導電性膜をこの順で積層してなる光電変換素子であって、
     前記光電変換材料が、一般式(1)で表される化合物、一般式(2)で表される化合物、および、一般式(3)で表される化合物からなる群から選択される少なくとも一つの化合物Xを含む、光電変換素子。
    Figure JPOXMLDOC01-appb-C000001

    (一般式(1)~(3)中、R1およびR2は、それぞれ独立に、アルキル基、アリール基、または、ヘテロアリール基を表す。R11、R12、R13およびR14は、それぞれ独立に、アリール基またはヘテロアリール基を表す。Ar1およびAr2は、それぞれ独立に、アルキル基、アリーレン基またはヘテロアリーレン基を表す。なお、R11およびR12の少なくとも一方、並びに、R13およびR14の少なくとも一方は、アリール基またはヘテロアリール基を表す。X1およびX2は、それぞれ独立に、O、S、またはNRAを表す。RAは、アルキル基、アリール基、またはヘテロアリール基を表す。Qは、一般式(A)~一般式(E)からなる群から選択されるいずれかの基を表す。R01~R022は、それぞれ独立に、水素原子または置換基を表す。nは、0または1を表す。
     なお、Ar1とR11、Ar1とR12、R11とR12、Ar2とR13、Ar2とR14、または、R13とR14はそれぞれ互いに結合して環を形成してもよい。)
    Figure JPOXMLDOC01-appb-C000002
    It is a photoelectric conversion element formed by laminating a conductive film, a photoelectric conversion film containing a photoelectric conversion material, and a transparent conductive film in this order,
    The photoelectric conversion material is at least one selected from the group consisting of a compound represented by the general formula (1), a compound represented by the general formula (2), and a compound represented by the general formula (3) The photoelectric conversion element containing the compound X.
    Figure JPOXMLDOC01-appb-C000001

    (In the general formulas (1) to (3), R 1 and R 2 each independently represent an alkyl group, an aryl group or a heteroaryl group. R 11 , R 12 , R 13 and R 14 each represent Each independently represents an aryl group or a heteroaryl group Ar 1 and Ar 2 each independently represent an alkyl group, an arylene group or a heteroarylene group, and at least one of R 11 and R 12 , and R 13 and at least one of R 14 is, .X 1 and X 2 represents an aryl group or heteroaryl group, each independently, O, S or .R a representative of the NR a, an alkyl group, an aryl group, or, And Q represents a group selected from the group consisting of general formula (A) to general formula (E) R 01 to R 022 each independently represent a hydrogen atom or a substituent The To .n represents 0 or 1.
    Ar 1 and R 11 , Ar 1 and R 12 , R 11 and R 12 , Ar 2 and R 13 , Ar 2 and R 14 , or R 13 and R 14 respectively bond to each other to form a ring. It is also good. )
    Figure JPOXMLDOC01-appb-C000002
  2.  前記化合物Xが、一般式(4)で表される化合物である、請求項1に記載の光電変換素子。
    Figure JPOXMLDOC01-appb-C000003

    (一般式(4)中、R1およびR2は、それぞれ独立に、アルキル基、アリール基、または、ヘテロアリール基を表す。R11、R12、R13およびR14は、それぞれ独立に、アリール基またはヘテロアリール基を表す。Ar1およびAr2は、それぞれ独立に、アルキル基、アリーレン基またはヘテロアリーレン基を表す。なお、R11およびR12の少なくとも一方、並びに、R13およびR14の少なくとも一方は、アリール基またはヘテロアリール基を表す。X1およびX2は、それぞれ独立に、O、S、またはNRAを表す。RAは、アルキル基、アリール基、またはヘテロアリール基を表す。
     なお、Ar1とR11、Ar1とR12、R11とR12、Ar2とR13、Ar2とR14、または、R13とR14はそれぞれ互いに結合して環を形成してもよい。)
    The photoelectric conversion element of Claim 1 whose said compound X is a compound represented by General formula (4).
    Figure JPOXMLDOC01-appb-C000003

    (In the general formula (4), R 1 and R 2 each independently represent an alkyl group, an aryl group or a heteroaryl group. R 11 , R 12 , R 13 and R 14 are each independently. Ar 1 and Ar 2 each independently represent an alkyl group, an arylene group or a heteroarylene group, and at least one of R 11 and R 12 and R 13 and R 14 each independently represent an aryl group or a heteroaryl group. At least one represents an aryl group or a heteroaryl group X 1 and X 2 each independently represent O, S, or NRA A. R A represents an alkyl group, an aryl group or a heteroaryl group Represent.
    Ar 1 and R 11 , Ar 1 and R 12 , R 11 and R 12 , Ar 2 and R 13 , Ar 2 and R 14 , or R 13 and R 14 respectively bond to each other to form a ring. It is also good. )
  3.  Ar1とR11、Ar1とR12、R11とR12、Ar2とR13、Ar2とR14、および、R13とR14の少なくとも一つがそれぞれ互いに結合して環を形成している、請求項1または2に記載の光電変換素子。 Ar 1 and R 11 , Ar 1 and R 12 , R 11 and R 12 , Ar 2 and R 13 , Ar 2 and R 14 , and at least one of R 13 and R 14 respectively combine with each other to form a ring The photoelectric conversion element according to claim 1 or 2.
  4.  X1およびX2がOである、請求項1~3のいずれか1項に記載の光電変換素子。 The photoelectric conversion device according to any one of claims 1 to 3, wherein X 1 and X 2 are O.
  5.  前記光電変換膜が、さらに有機n型化合物を含む、請求項1~4のいずれか1項に記載の光電変換素子。 The photoelectric conversion device according to any one of claims 1 to 4, wherein the photoelectric conversion film further contains an organic n-type compound.
  6.  前記有機n型化合物が、フラーレンおよびその誘導体からなる群から選択されるフラーレン類を含む、請求項5に記載の光電変換素子。 The photoelectric conversion device according to claim 5, wherein the organic n-type compound contains fullerenes selected from the group consisting of fullerenes and derivatives thereof.
  7.  前記化合物Xと前記フラーレン類とのモル比(前記フラーレン類のモル量/前記化合物Xのモル量)が1.0以上である、請求項6に記載の光電変換素子。 The photoelectric conversion element according to claim 6, wherein a molar ratio of the compound X to the fullerenes (molar amount of the fullerenes / molar amount of the compound X) is 1.0 or more.
  8.  前記導電性膜と前記透明導電性膜との間に電荷ブロッキング膜が配置される、請求項1~7のいずれか1項に記載の光電変換素子。 The photoelectric conversion element according to any one of claims 1 to 7, wherein a charge blocking film is disposed between the conductive film and the transparent conductive film.
  9.  請求項1~8のいずれか1項に記載の光電変換素子を含む撮像素子。 An imaging device comprising the photoelectric conversion device according to any one of claims 1 to 8.
  10.  請求項1~8のいずれか1項に記載の光電変換素子を含む光センサ。 An optical sensor comprising the photoelectric conversion element according to any one of claims 1 to 8.
PCT/JP2013/075564 2012-09-26 2013-09-20 Photoelectric conversion element, imaging element, optical sensor WO2014050764A1 (en)

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