WO2014043557A1 - Dual-lens-gun electron beam apparatus and methods for high-resolution imaging with both high and low beam currents - Google Patents
Dual-lens-gun electron beam apparatus and methods for high-resolution imaging with both high and low beam currents Download PDFInfo
- Publication number
- WO2014043557A1 WO2014043557A1 PCT/US2013/059788 US2013059788W WO2014043557A1 WO 2014043557 A1 WO2014043557 A1 WO 2014043557A1 US 2013059788 W US2013059788 W US 2013059788W WO 2014043557 A1 WO2014043557 A1 WO 2014043557A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- electron
- gun
- lens
- electron beam
- current
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/063—Geometrical arrangement of electrodes for beam-forming
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/029—Schematic arrangements for beam forming
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/08—Arrangements for controlling intensity of ray or beam
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/04—Means for controlling the discharge
- H01J2237/045—Diaphragms
- H01J2237/0456—Supports
- H01J2237/0458—Supports movable, i.e. for changing between differently sized apertures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/304—Controlling tubes
- H01J2237/30472—Controlling the beam
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020157009422A KR102139654B1 (en) | 2012-09-14 | 2013-09-13 | Dual-lens-gun electron beam apparatus and methods for high-resolution imaging with both high and low beam currents |
SG11201501957PA SG11201501957PA (en) | 2012-09-14 | 2013-09-13 | Dual-lens-gun electron beam apparatus and methods for high-resolution imaging with both high and low beam currents |
JP2015532101A JP6310920B2 (en) | 2012-09-14 | 2013-09-13 | Dual lens gun electron beam device for high resolution imaging using both high and low beam currents |
EP13837241.2A EP2896062B1 (en) | 2012-09-14 | 2013-09-13 | Dual-lens-gun electron beam apparatus and methods for high-resolution imaging with both high and low beam currents |
IL237738A IL237738A (en) | 2012-09-14 | 2015-03-15 | Dual-lens-gun electron beam apparatus and methods for high-resolution imaging with both high and low beam currents |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/618,760 US8859982B2 (en) | 2012-09-14 | 2012-09-14 | Dual-lens-gun electron beam apparatus and methods for high-resolution imaging with both high and low beam currents |
US13/618,760 | 2012-09-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2014043557A1 true WO2014043557A1 (en) | 2014-03-20 |
Family
ID=50273493
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2013/059788 WO2014043557A1 (en) | 2012-09-14 | 2013-09-13 | Dual-lens-gun electron beam apparatus and methods for high-resolution imaging with both high and low beam currents |
Country Status (8)
Country | Link |
---|---|
US (1) | US8859982B2 (en) |
EP (1) | EP2896062B1 (en) |
JP (1) | JP6310920B2 (en) |
KR (1) | KR102139654B1 (en) |
IL (1) | IL237738A (en) |
SG (1) | SG11201501957PA (en) |
TW (1) | TWI620224B (en) |
WO (1) | WO2014043557A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CZ308963B6 (en) * | 2017-05-11 | 2021-10-20 | Carl Zeiss Microscopy Gmbh | A particle source for generating a particle beam and a particle optical device |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI502616B (en) | 2014-08-08 | 2015-10-01 | Nat Univ Tsing Hua | Desktop electron microscope and wide range tunable magnetic lens thereof |
EP4141536B1 (en) * | 2017-03-30 | 2024-05-01 | Lg Innotek Co., Ltd. | Dual lens driving apparatus and camera module |
US10096447B1 (en) * | 2017-08-02 | 2018-10-09 | Kla-Tencor Corporation | Electron beam apparatus with high resolutions |
KR102634195B1 (en) * | 2017-09-29 | 2024-02-07 | 에이에스엠엘 네델란즈 비.브이. | A method and apparatus for adjusting the beam condition of the charged particle |
US10964522B2 (en) | 2018-06-06 | 2021-03-30 | Kla Corporation | High resolution electron energy analyzer |
US11978609B2 (en) | 2019-05-21 | 2024-05-07 | Hitachi High-Tech Corporation | Electron gun and charged particle beam device equipped with electron gun |
US11469072B2 (en) * | 2021-02-17 | 2022-10-11 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Charged particle beam apparatus, scanning electron microscope, and method of operating a charged particle beam apparatus |
CN113163564A (en) * | 2021-04-30 | 2021-07-23 | 中国科学院电工研究所 | Electron beam processing device with static elimination function |
Citations (7)
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JP2009187950A (en) * | 2008-02-08 | 2009-08-20 | Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh | Dual-mode gas electric field ion source |
US7821187B1 (en) | 2007-09-07 | 2010-10-26 | Kla-Tencor Corporation | Immersion gun equipped electron beam column |
US20110018470A1 (en) * | 2005-06-29 | 2011-01-27 | Hermes-Microvision, Inc. | Electron gun with magnetic immersion double condenser lenses |
US20110114838A1 (en) | 2009-11-18 | 2011-05-19 | Liqun Han | High-Sensitivity and High-Throughput Electron Beam Inspection Column Enabled by Adjustable Beam-Limiting Aperture |
US20110309263A1 (en) * | 2003-07-14 | 2011-12-22 | Fei Company | Dual Beam System |
US20120091360A1 (en) * | 2009-10-14 | 2012-04-19 | Fei Company | Charged particle beam system having multiple user-selectable operating modes |
US20120217152A1 (en) * | 2011-02-25 | 2012-08-30 | Fei Company | Method for Rapid Switching between a High Current Mode and a Low Current Mode in a Charged Particle Beam System |
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US3979890A (en) | 1975-12-29 | 1976-09-14 | Schenk John H | Rake for gathering and containing fallen fruit |
JPH01143217A (en) * | 1987-11-27 | 1989-06-05 | Jeol Ltd | Electron beam lithography equipment |
US5444243A (en) | 1993-09-01 | 1995-08-22 | Hitachi, Ltd. | Wien filter apparatus with hyperbolic surfaces |
DE4438315A1 (en) | 1994-10-26 | 1996-05-02 | Siemens Ag | Gas ion removal device from electron beam in tomography appts. |
US6111253A (en) | 1997-09-01 | 2000-08-29 | Jeol Ltd. | Transmission electron microscope |
JPH11233053A (en) * | 1998-02-18 | 1999-08-27 | Jeol Ltd | Movable beam limiting apparatus for electron microscope |
DE60033767T2 (en) * | 1999-06-22 | 2007-11-15 | Fei Co., Hillsboro | CORPUSCULAR OPTICAL DEVICE WITH A PARTICLE SOURCE SWITCHABLE BETWEEN HIGH BRIGHTNESS AND LARGE RADIATION CURRENT |
JP3757371B2 (en) | 1999-07-05 | 2006-03-22 | 日本電子株式会社 | Energy filter and electron microscope using the same |
JP4146103B2 (en) * | 2001-05-23 | 2008-09-03 | 日本電子株式会社 | Electron beam apparatus equipped with a field emission electron gun |
US6717141B1 (en) | 2001-11-27 | 2004-04-06 | Schlumberger Technologies, Inc. | Reduction of aberrations produced by Wien filter in a scanning electron microscope and the like |
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JP2003331770A (en) | 2002-05-15 | 2003-11-21 | Seiko Instruments Inc | Electron beam device |
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US20090212213A1 (en) | 2005-03-03 | 2009-08-27 | Ebara Corporation | Projection electron beam apparatus and defect inspection system using the apparatus |
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JP2007335125A (en) | 2006-06-13 | 2007-12-27 | Ebara Corp | Electron beam device |
US7560691B1 (en) | 2007-01-19 | 2009-07-14 | Kla-Tencor Technologies Corporation | High-resolution auger electron spectrometer |
WO2008090380A1 (en) * | 2007-01-25 | 2008-07-31 | Nfab Limited | Improved particle beam generator |
US7755043B1 (en) | 2007-03-21 | 2010-07-13 | Kla-Tencor Technologies Corporation | Bright-field/dark-field detector with integrated electron energy spectrometer |
-
2012
- 2012-09-14 US US13/618,760 patent/US8859982B2/en active Active
-
2013
- 2013-09-09 TW TW102132489A patent/TWI620224B/en active
- 2013-09-13 EP EP13837241.2A patent/EP2896062B1/en active Active
- 2013-09-13 JP JP2015532101A patent/JP6310920B2/en active Active
- 2013-09-13 WO PCT/US2013/059788 patent/WO2014043557A1/en active Application Filing
- 2013-09-13 SG SG11201501957PA patent/SG11201501957PA/en unknown
- 2013-09-13 KR KR1020157009422A patent/KR102139654B1/en active IP Right Grant
-
2015
- 2015-03-15 IL IL237738A patent/IL237738A/en active IP Right Revival
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110309263A1 (en) * | 2003-07-14 | 2011-12-22 | Fei Company | Dual Beam System |
US20110018470A1 (en) * | 2005-06-29 | 2011-01-27 | Hermes-Microvision, Inc. | Electron gun with magnetic immersion double condenser lenses |
US7821187B1 (en) | 2007-09-07 | 2010-10-26 | Kla-Tencor Corporation | Immersion gun equipped electron beam column |
JP2009187950A (en) * | 2008-02-08 | 2009-08-20 | Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh | Dual-mode gas electric field ion source |
US20120091360A1 (en) * | 2009-10-14 | 2012-04-19 | Fei Company | Charged particle beam system having multiple user-selectable operating modes |
US20110114838A1 (en) | 2009-11-18 | 2011-05-19 | Liqun Han | High-Sensitivity and High-Throughput Electron Beam Inspection Column Enabled by Adjustable Beam-Limiting Aperture |
US20120217152A1 (en) * | 2011-02-25 | 2012-08-30 | Fei Company | Method for Rapid Switching between a High Current Mode and a Low Current Mode in a Charged Particle Beam System |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CZ308963B6 (en) * | 2017-05-11 | 2021-10-20 | Carl Zeiss Microscopy Gmbh | A particle source for generating a particle beam and a particle optical device |
Also Published As
Publication number | Publication date |
---|---|
TW201419360A (en) | 2014-05-16 |
JP6310920B2 (en) | 2018-04-11 |
IL237738A (en) | 2016-10-31 |
TWI620224B (en) | 2018-04-01 |
SG11201501957PA (en) | 2015-04-29 |
US8859982B2 (en) | 2014-10-14 |
EP2896062A1 (en) | 2015-07-22 |
KR102139654B1 (en) | 2020-07-30 |
EP2896062B1 (en) | 2019-12-18 |
US20140077077A1 (en) | 2014-03-20 |
JP2015531984A (en) | 2015-11-05 |
KR20150055023A (en) | 2015-05-20 |
EP2896062A4 (en) | 2016-06-08 |
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