WO2014021590A1 - Resin composition having photocurable property and thermosetting property, and dry film solder resist - Google Patents

Resin composition having photocurable property and thermosetting property, and dry film solder resist Download PDF

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Publication number
WO2014021590A1
WO2014021590A1 PCT/KR2013/006747 KR2013006747W WO2014021590A1 WO 2014021590 A1 WO2014021590 A1 WO 2014021590A1 KR 2013006747 W KR2013006747 W KR 2013006747W WO 2014021590 A1 WO2014021590 A1 WO 2014021590A1
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WIPO (PCT)
Prior art keywords
resin composition
group
acid
compound
thermosetting
Prior art date
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PCT/KR2013/006747
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French (fr)
Korean (ko)
Inventor
정민수
최병주
정우재
최보윤
이광주
Original Assignee
주식회사 엘지화학
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Application filed by 주식회사 엘지화학 filed Critical 주식회사 엘지화학
Priority to JP2015524190A priority Critical patent/JP2015529844A/en
Priority to US14/419,179 priority patent/US9880467B2/en
Priority to CN201380051369.9A priority patent/CN104704426A/en
Priority claimed from KR1020130088425A external-priority patent/KR101545724B1/en
Publication of WO2014021590A1 publication Critical patent/WO2014021590A1/en

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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/037Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polyamides or polyimides
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds

Definitions

  • thermosetting resin composition dry film solder resist
  • the present invention relates to a resin composition and a dry film solder resist (DFSR) which are photocurable and thermosetting. More specifically, the present invention relates to a photocurable and thermosetting resin composition and DFSR enabling the formation of DFSR having fine unevenness on the surface without a separate treatment step such as a plasma treatment step.
  • DFSR dry film solder resist
  • photosensitive solder resists capable of forming fine opening patterns are used for printed thin substrates, semiconductor package substrates, and flexible circuit boards.
  • the solder resist generally requires characteristics such as developability, high resolution, insulation, soldering heat resistance, and gold plating resistance.
  • characteristics such as developability, high resolution, insulation, soldering heat resistance, and gold plating resistance.
  • fine surface irregularities are formed on the film type solder resist as necessary in order to secure excellent adhesion to subsequent materials and the like during the process.
  • the present invention provides a resin composition having photocurability and thermosetting property which enables formation of DFSR having fine unevenness on the surface without a separate treatment step such as a plasma treatment step.
  • the present invention also provides a Dry Film Solder Resist (DFSR) which exhibits excellent adhesion to other materials due to the formation of fine irregularities on the surface without a separate treatment step such as a plasma treatment step. .
  • DFSR Dry Film Solder Resist
  • the present invention also relates to a circuit board comprising the DFSR. [Measures of problem]
  • the present invention is an acid-modified oligomer having a carboxyl group (-COOH) and a photocurable unsaturated functional group; Polyimide resin; Photopolymerizable monomers having two or more photocurable unsaturated functional groups; Thermosetting binders having thermosetting functional groups; And photocurable and thermoset comprising photoinitiators. It provides a resin composition.
  • the present invention is an acid-modified oligomer having a carboxy group (-COOH), and a photocurable unsaturated functional group; Polyimide resins; Photopolymerizable monomers having two or more photocurable unsaturated functional groups; And a cured product of a thermosetting binder having a thermosetting functional group, and providing a dry film solder resist (DFSR) having fine irregularities having an average roughness (Rz) of 2 to 20 im on the surface thereof.
  • DFSR dry film solder resist
  • a carboxyl group (-COOH) and an acid-modified oligomer having a photocurable unsaturated functional group polyimide resin; Photopolymerizable monomers having two or more photocurable unsaturated functional groups; Thermosetting binders having thermosetting functional groups; And a photocurable and thermosetting resin composition comprising a photoinitiator.
  • a predetermined acid-modified oligomer, a photopolymerizable monomer, A polyimide resin is included together with the photoinitiator and the thermosetting binder.
  • the resin composition of this embodiment may be used as a composition for forming DFSR through the following process. First, after apply
  • the resin composition of the exposed part having the crosslinked structure is left on the substrate as it is, and the resin composition of the remaining non-exposed part may be dissolved in the developer and removed.
  • the carboxyl groups contained in the acid-modified oligomer can react with the thermosetting functional groups of the thermosetting binder to form crosslinks, and as a result thermosetting While forming a cross-linked structure by the desired portion on the substrate
  • DFSR can be formed.
  • the resin composition of one embodiment includes a polyimide-based resin, and thus may solve this disadvantage. That is, the polyimide The resin does not deteriorate photocurability, is not easily miscible with the acid-modified oligomer, and may exhibit properties that can be dissolved in a developer. Due to the characteristics of these polyimide resins, when the development process is performed on the resin composition after the exposure exposure, the resin composition including the polyimide resin may be substantially dissolved and removed by the development in the non-exposed part where photocuring is not advanced. Can be. On the other hand, in the exposed portion, the polyimide-based resin may cause fine phase separation with other components of the resin composition due to the incompatibility with the acid-modified oligomer, and the like.
  • Such a polyimide resin may be selectively removed by melting with a developer, and only other components such as an acid-modified oligomer having a crosslinked structure may remain in the exposed portion. Therefore, due to the selective removal of the polyimide resin, fine unevenness may be formed in the exposed portion (see FIG. 1).
  • the DFSR having fine irregularities on the surface may be formed even without a separate plasma treatment process.
  • the formation process of the DFSR can be simplified, and excellent adhesion with the subsequent process materials and the like. It is possible to form a DFSR indicating.
  • the resin composition according to one embodiment will be described in more detail for each component.
  • the resin composition of one embodiment includes a carboxyl group (-COOH) and an acid-modified oligomer having a photocurable unsaturated functional group. These acid-modified oligomers form crosslinks with other components of the resin composition, ie, photopolymerizable monomers and / or thermosetting binders, by photocuring to enable the formation of DFSR, including carboxyl groups. Have sex.
  • acid-modified oligomers are oligomers having a carboxyl group and a photocurable functional group, for example, a curable functional group having a curable functional group having an acrylate group or an unsaturated double bond in the molecule, and have all been known to be usable in the photocurable resin composition.
  • the main chain of the acid-modified oligomer may be a novolac epoxy or polyurethane, and may be used as the acid-modified oligomer having a carboxyl group and an acrylate column introduced into the main chain.
  • the photocurable functional group may be suitably an acrylate group, wherein the acid-modified oligomer may be obtained as a oligomer form by copolymerizing a polymerizable monomer having a carboxyl group and a monomer including an acrylate compound.
  • specific examples of the acid-modified oligomer usable in the resin composition include the following components.
  • ethylenically unsaturated groups such as vinyl groups, allyl groups, (meth) acryloyl groups, and epoxy groups, acid chlorides, and the like, as part of the copolymer of the unsaturated carboxylic acid (a) and the compound (b) having an unsaturated double bond
  • Carboxyl group-containing photosensitive resin obtained by reacting a compound having a reactive group, for example, glycidyl (meth) acrylate and adding an ethylenically unsaturated group as a pendant;
  • a carboxyl group-containing photosensitive resin obtained by reacting an unsaturated carboxylic acid (a) with reacting a saturated or unsaturated polybasic anhydride (d) such as phthalic anhydride, tetrahydrophthalic anhydride, or nuxahydrophthalic anhydride with the resulting secondary hydroxy group;
  • the carboxyl groups of unsaturated monocarboxylic acid (h) such as acrylic acid are subjected to esterification reaction (full esterification or partial esterification, preferably total esterification), and saturated or unsaturated polybasic acid anhydrides ( carboxyl group-containing photosensitive compound obtained by reacting d);
  • diisocyanates (j) such as aliphatic diisocyanates, branched aliphatic diisocyanates, alicyclic diisocyanates, and aromatic diisocyanates; and carboxyl group-containing dialcohol compounds (k) such as dimethyl-propionic acid and dimethylolbutanoic acid, And a compound having a polycarbonate poly, a polyether polyol, a polyester poly, a polyolefin poly, an acrylic polyol, a bisphenol A alkylene oxide adduct, a phenolic hydroxyl group and an alcoholic hydroxyl group.
  • diisocyanate (j) bisphenol A epoxy resin, hydrogenated bisphenol A epoxy resin, bisphenol bisphenol A epoxy resin, bisphenol
  • (Meth) acrylates of bifunctional epoxy resins such as F type epoxy resins, bisphenol S type epoxy resins, bixylenol type epoxy resins, and biphenol type epoxy resins or partial acid anhydride modified substances (n) thereof, and carboxyl group-containing di An alcohol compound (k), and Photosensitive carboxyl group-containing urethane resin in which the middle part of a diol compound (m) is obtained by reaction;
  • Carboxyl group-containing photosensitive resin obtained by introducing an unsaturated double bond into the reaction product of a bisepoxy compound and bisphenols, and then reacting saturated or unsaturated polybasic anhydride (d);
  • Novolak-type phenol resins alkylene oxides such as ethylene oxide, propylene oxide, butylene oxide, trimethylene oxide, tetrahydrofuran, tetrahydropyran and / or ethylene carbonate, propylene carbon
  • the reaction product obtained by reacting unsaturated monocarboxylic acid (h) with a reaction product with cyclic carbonates such as carbonate, butylene carbonate, 2,3-carbonate propyl methacrylate, and saturated or unsaturated polybasic acid
  • Carboxyl group-containing photosensitive resin obtained by reacting anhydride (d);
  • the polyfunctional and bifunctional epoxy resins used for the synthesis are bisphenol A skeleton, bisphenol F
  • a component which can be preferably used as an acid-modified oligomer in terms of flexibility of the DFSR can be obtained.
  • the modified product of the resins of the above (7) to (10) is preferable for the bending including the urethane bond in the main chain.
  • the acid-modified oligomer may be used as the acid-modified oligomer, and specific examples of such components may include ZAR-2000, ZFR-1031, ZFR-1121 or ZFR-1122 manufactured by Nippon Chemical Co., Ltd.
  • the above-mentioned acid-modified oligomer has weight one embodiment about 15 with respect to the total weight of the resin composition to 75 0/0, and black is about 20 to 50 parts by weight 0/0, or from about 25 to 45 it may be included in an amount in weight% have.
  • the content of the acid-modified oligomer is too small, the developability of the resin composition may be lowered and the strength of the DFSR may be lowered.
  • the content of the acid-modified oligomer is too high, not only the resin composition may be excessively developed, but also uniformity may be decreased during coating.
  • the acid value of the acid-modified oligomer may be about 40 to 120 mgKOH / g, or about 50 to 110 mgKOH / g, or 60 to 90 mg KOH / g.
  • the acid value is too low, alkali developability may be lowered.
  • the acid value is too high, it may be difficult to form a photocurable part, for example, an exposed part, by a developing solution, which makes it difficult to form a normal pattern of DFSR.
  • the resin composition of one embodiment includes a photopolymerizable monomer.
  • a photopolymerizable monomer may be, for example, a compound having a photocurable unsaturated functional group, such as two or more polyfunctional vinyl groups, and may form a crosslink with the unsaturated functional group of the acid-modified oligomer described above to provide photocuring during exposure.
  • Crosslinked structure can be formed. This ensures that the part where the DFSR is to be formed .
  • the resin composition of the corresponding exposure part can be made to remain on a board
  • a liquid phase may be used at room temperature, and accordingly, the viscosity of the resin composition of one embodiment may be adjusted according to a coating method, It can also play a role of further improving alkali developability of the non-exposed part.
  • the (meth) acrylate type compound which has 2 or more, 3 or more, or 3-6 photocurable unsaturated functional groups in a molecule
  • numerator can be used, More specifically, a pentaery Hydroxy group-containing polyfunctional acrylate compounds such as trirol triacrylate or dipentaerythritol pentaacrylate; Water-soluble polyfunctional acrylate compounds such as polyethylene glycol diacrylate or polypropylene glycol diacrylate; Polyfunctional polyester acrylate-based compounds of polyhydric alcohols such as trimethylolpropane triacrylate, pentaerythritol tetraacrylate, or dipentaerythrite; Acrylate-based compounds of ethylene oxide adducts and / or propylene oxide adducts of polyfunctional alcohols such as trimethyl-propane or hydrogenated bisphenol A, or polyhydric phenols such as bisphenol A and biphenol; A polyfunctional or monofunctional polyurethane acryl
  • the photopolymerizable monomer the polyfunctional which has 2 or more, or 3 or more, or 3 to 6 (meth) acryloyl groups in 1 molecule.
  • (Meth) acrylate-based compounds can be preferably used, especially pentatritriacrylate, trimethylolpropanetriacrylate, Hexaacrylate or caprolactone-modified ditrimethyl can be suitably used as the dipentaerythrate.
  • pentatritriacrylate, trimethylolpropanetriacrylate, Hexaacrylate or caprolactone-modified ditrimethyl can be suitably used as the dipentaerythrate.
  • Kaylarad DPEA-12 etc. are mentioned.
  • the black is based on the total amount of the black resin composition of the above-described photo-polymerization monomer may be about 7 to 15% by weight. If the content of the photopolymerizable monomer is too small, the photocuring may not be divided, and if the content is excessively large, the drying property of the DFSR may deteriorate and the physical properties may be degraded.
  • the resin composition of one embodiment is a polyimide-based. Resin.
  • Such polyimide-based resins do not exhibit photocurability, and are not commonly reacted or reacted with the acid-modified oligomers, photopolymerizable monomers, and the like, and may exhibit properties that can be dissolved in a developer. Due to the characteristics of such a polyimide resin, when the development process is performed after exposing the resin composition of one embodiment, only the polyimide resin which does not have photocurability in the exposed portion subjected to photocuring is selectively dissolved in the developer. It can be removed, and only acid-modified oligomers and the like whose crosslinked structure is formed by the remaining photocuring can remain.
  • polyimide-based resins exhibit incompatibility and non-reactivity with acid-modified oligomers and the like, and thus cause fine phase separation after photocuring.
  • polyimide-based resins are selectively removed in the exposed portion.
  • minute unevenness may be formed on the DFSR surface remaining in the exposed portion.
  • DFSR having fine irregularities formed on the surface may be formed even without a separate plasma treatment process.
  • the formation of the DFSR formed on the surface of the fine unevenness is possible, so that it is possible to form a DFSR that exhibits excellent adhesion to subsequent process materials and the like in a simplified process. do.
  • any polyimide resin, a precursor thereof or a derivative thereof in the form of any polyimide resin, plymic acid, etc., which exhibits non-coagulant and non-combustibility with an acid-modified ligomer and solubility in a developer, etc. may be used.
  • the polyimide resin may be a precursor of polyamic acid or polyimide resin obtained by reaction of diamine and dianhydride having an aliphatic or aromatic functional group.
  • the polyimide resin may have a weight average molecular weight of about 10000 to 100000, or a weight average molecular weight of about 20000 to 100000.
  • Such a polyimide resin may be directly synthesized by a method well known to those skilled in the art, or may be obtained by using a commercially available polyimide resin.
  • the polyimide content of the imide resin is in the range of about 1 to 30% by weight based on the total amount of the resin composition, or from about 5 to 27 weight 0/0, the black can be about 10 to 25 wt. / 0. If the content of the polyimide resin is too small, fine irregularities may not be formed well on the final DFSR, and thus, sufficient adhesion may not be ensured with subsequent process materials.
  • the polyimide-based resin may be removed to prevent DFSR having a desired pattern from being properly formed.
  • the resin composition of one embodiment includes a photoinitiator.
  • photoinitiators serve to initiate radical photocuring, for example, in the exposed portion of the resin composition.
  • mold compound which consists of benzoin, such as benzoin, benzoin methyl ether, benzoin ethyl ether, and its alkyl ether; Acetophenone-based compounds such as acetophenone, 2,2-dimethec-2-phenylacetophenone, 1,1-dichloroacetophenone, and 4- (lt-butyldioxy-1-methylethyl) acetophenone; Anthraquinone compounds such as methyl anthraquinone, 2-amyl anthraquinone, 2-t-butyl anthraquinone, and 1-chloroanthraquinone; Thioxanthone compounds, such as 2, 4- dimethyl thioxanthone, 2, 4- diisopropyl thioxanthone, and 2-chloro thioxanthone; Ketal compounds such as acetophenone di
  • an oxime ester compound is mentioned.
  • 2-aminoethyl ether 2-aminoethyl ether
  • 2-aminoethyl ether 2-aminoethyl ether
  • 2-aminoethyl ether 2-aminoethyl ether
  • 2-aminoethyl ether 2-aminoethyl ether
  • 2-aminoethyl ether 2-a specific example of an oxime ester compound
  • the content of the photoinitiator may be about 0.5 to 20% by weight, or about 1 to 10% by weight, or about 1 to 5% by weight based on the total weight of the resin composition.
  • Thermosetting binder When the content of the photoinitiator is too small, the photocuring may not occur properly, on the contrary, when the content of the photoinitiator is too large, the resolution of the water soluble composition may be lowered or the reliability of the DFSR may not be severe.
  • the resin composition of one embodiment is also selected from thermosetting functional groups such as epoxy groups, oxetanyl groups, cyclic ether groups and cyclic thio ether groups
  • thermosetting binder having at least one kind.
  • Such a thermosetting binder may form a crosslinked bond with an acid-modified oligomer and the like by thermosetting to secure heat resistance or mechanical properties of DFSR.
  • thermosetting binder may have a softening point of about 70 to 100 ° C., thereby enjoying unevenness during lamination. Low softening points increase the tackiness of the DFSR and high flow rates can deteriorate.
  • thermosetting binder a resin having two or more cyclic ether groups and / or cyclic thioether groups (hereinafter referred to as cyclic (thio) ether groups) in a molecule can be used, and a bifunctional epoxy resin can be used. have. Other diisocyanates or their difunctional block isocyanates can also be used.
  • the thermosetting binder having two or more cyclic (thio) ether groups in the molecule may be a compound having any one or two or more of three, four or five membered cyclic ether groups, or cyclic thioether groups in the molecule. have.
  • the thermosetting binder may be a polyfunctional epoxy compound having at least two or more epoxy groups in a molecule, a polyfunctional oxetane compound having at least two or more oxetanyl groups in a molecule, or an episulfide resin having two or more thioether groups in a molecule And so on.
  • the said polyfunctional epoxy compound bisphenol-A epoxy resin, hydrogenated bisphenol-A epoxy resin, brominated bisphenol-A epoxy resin, bisphenol F-type epoxy resin, bisphenol S-type epoxy resin, novolak-type epoxa, for example Resins, phenol novolak type epoxy resins, cresol novolak type epoxy resins, N-glycidyl type epoxy resins, bisphenol A novolak type epoxy resins, bixylenol type epoxy resins, biphenol type epoxy resins, chelate type epoxy resins, Glyoxal type epoxy resin, amino group containing epoxy resin, rubber modified epoxy resin, dicyclopentadiene phenolic epoxy resin, diglycidyl phthalate resin, heterocyclic epoxy resin, tetraglycidyl xylenyl yl ethane resin, silicone A modified epoxy resin, (epsilon) -caprolactone modified epoxy resin, etc.
  • Resins phenol novolak type epoxy resins, cresol novol
  • thermosetting these epoxy resins By thermosetting these epoxy resins, the adhesiveness of a cured film, solder heat resistance, electroless plating resistance, etc. improve it.
  • polyfunctional oxetane compound examples include bis [(3-methyl-3-oxetanylmethoxy) methyl] ether, bis [(3-ethyl-3-oxetanylmethoxy) methyl] ether, 1,4 Bis [(3-methyl-3-oxetanylmethoxy) methyl] benzene, 1,4-bis [(3'ethyl-3-oxetanylmethoxy) methyl] benzene, (3-methyl-3-jade Cetanyl) methylacrylate, (3-ethyl-3-oxetanyl) methylacrylate, (3-methyl-3-oxetanyl) methylmethacrylate, (3-ethyl-3-oxetanyl) methyl In addition to polyfunctional oxetanes such as methacrylates and oligomers or copolymers thereof, oxetane alcohols and novolac resins, poly ( ⁇ -hydroxystyrene), card
  • Japan epoxy resin ⁇ As a compound which has a 2 or more cyclic thioether group in the said molecule
  • numerator Japan epoxy resin ⁇ , the bisphenol A episulfide resin YL7000 by V manufacture etc. are mentioned, for example.
  • the episulfide resin etc. which substituted the oxygen atom of the epoxy group of the novolak-type epoxy resin with the sulfur atom can also be used.
  • YDCN-500-80P etc. of Kukdo Chemical Co., Ltd. can be used.
  • thermosetting binder can be included in an amount that Daewoong to 0.8 to 2.0 equivalents with respect to the carboxylic, diplopia group of 1 equivalent of the acid-modified oligomer. If the content of the thermosetting binder is excessively small, carboxyl groups remain in the DFSR after curing, which may lower heat resistance, alkali resistance, and electrical insulation. On the contrary, when the content is excessively large, the low molecular weight thermosetting binder remains in the dry coating film, which is not preferable because the strength of the coating film is lowered.
  • the resin composition of one embodiment includes a solvent; And thermosetting binder catalysts (thermosetting catalysts), fillers, pigments and additives described below. It may further comprise one or more selected from the group consisting of.
  • thermosetting binder catalyst ⁇ thermosetting catalyst
  • thermosetting binder catalyst serves to promote thermosetting of the thermosetting binder.
  • thermosetting binder catalyst for example, imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4-phenylimidazole Imidazole derivatives such as 1-cyanoethyl-2-phenylimidazole and 1- (2-cyanoethyl) -2-ethyl-4-methylimidazole; Dicyandiamide, benzyldimethylamine, 4- (dimethoxy 'butyl-amino) - ⁇ , ⁇ - dimethylbenzylamine, 4-meteuk when - ⁇ , ⁇ - dimethylbenzylamine, 4-methyl - ⁇ , ⁇ - dimethylbenzylamine, etc.
  • Amine compound Hydrazine compounds such as adipic dihydrazide and sebacic acid dihydrazide; Phosphorus compounds, such as a triphenylphosphine, etc. are mentioned.
  • Shikoku Kasei Kogyo Sezo 2 ⁇ - ⁇ , 2 ⁇ - ⁇ , 2 ⁇ , 2 ⁇ 4 ⁇ , 2 ⁇ 4 ⁇ both brand names of imidazole compounds
  • U-CAT3503N manufactured by San Aprosa UCAT3502T (All are brand names of block isocyanate compounds of dimethylamine), DBU, DBN, U-CATSA102, U-CAT5002 (both bicyclic amidine compounds and salts thereof), and the like.
  • the present invention is not limited thereto, and may be a thermosetting catalyst of an epoxy resin or an oxetane compound, or may promote reaction of an epoxy group and / or an oxetanyl group with a carboxyl group, or may be used alone or in combination of two or more thereof. .
  • guanamine, acetoguanamine, benzoguanamine, melamine, 2,4-diamino-6-methacryloyloxyethyl-S-triazine, 2-vinyl-4,6-diamino-S-tri Azine, 2-vinyl-4,6-diamino-S-triazine isocyanuric acid adduct, 2,4-diamino-6-methacryloyloxyethyl -S-triazine _ isocyanuric acid S-triazine derivatives, such as an adduct, can also be used,
  • the compound which functions also as these adhesive adhering agents can be used together with the said thermosetting binder catalyst.
  • the content of the thermosetting binder catalyst may be about 3 to 15% by weight based on the total weight of the resin composition in terms of suitable thermosetting.
  • Filler is characterized by thermal stability, thermal dimensional stability, resin adhesion To improve. In addition, it also serves as a constitution pigment by reinforcing the color.
  • Inorganic or organic layer fillers may be used, for example barium sulfate, barium titanate, amorphous silica, crystalline silica, fused silica, spherical silica, talc, clay, magnesium carbonate, calcium carbonate, aluminum oxide (alumina ), Aluminum hydroxide, mica and the like can be used.
  • the content of the filler is preferably about 5 to 50% by weight based on the total weight of the composition. In the case of using more than 50% by weight, the viscosity of the composition is increased, so that the coating property is lowered or the degree of curing is lowered.
  • Pigments exhibit visibility and hiding power to hide defects such as scratches on circuit lines.
  • pigment a red, blue, green, yellow, black pigment or the like can be used.
  • Phthalocyanine blue, pigment blue 15: 1, pigment blue 15: 2, pigment blue 15: 3, pigment blue 15: 4, pigment blue 15: 6, pigment blue 60, etc. have.
  • Pigment Green 7, Pigment Green 36, Solvent Green 3, Solvent Green 5, Solvent Green 20, Solvent Green 28 and the like can be used as the green pigment.
  • yellow pigments include anthraquinones, isoindolinones, condensed azos, and benzimidazolones.
  • Pigment Yellow 108, Pigment Yellow 147, Pigment Yellow 151, Pigment Yellow 166, Pigment. Pigment yellow 181, pigment yellow 193 and the like can be used.
  • the content of the pigment is preferably used at about 0.5 to 3% by weight based on the total weight of the resin composition. When used in less than 5% by weight, visibility and hiding power is lowered, and when used in excess of 3% by weight is less heat resistance.
  • the additive may be added to remove bubbles in the resin composition or to remove popping or craters from the surface of the film, impart flame retardancy, adjust viscosity, and catalyze the film.
  • finely divided silica, organic bentonite, montmorillonite and the like Conventional thickeners; antifoaming agents such as silicone-based, fluorine-based, and polymeric-based and / or leveling crabs; Silane coupling agents such as imidazole series, thiazole series, and triazole series;
  • Known and common additives such as flame retardants such as phosphorus flame retardants and antimony flame retardants can be blended.
  • the leveling agent serves to remove the popping or crater of the surface when the film is coated, for example, BYK-Chemie GmbH BYK 80N, BYK-307, BYK-378, BYK-350 and the like can be used.
  • the content of the additive is preferably about 0.01 to 10% by weight based on the total weight of the resin composition.
  • One or more solvents may be commonly used to dissolve the resin composition or impart an appropriate viscosity.
  • Ketones such as methyl ethyl ketone and cyclonucleanone
  • Aromatic hydrocarbons such as toluene, xylene and tetramethylbenzene
  • Ethylene glycol monoethyl ether ethylene glycol monomethyl ether, ethylene glycol monobutyl ether diethylene glycol monoethyl ether, diethylene glycol monomethyl ether diethylene glycol monobutyl ether, propylene glycol monomethyl ether : propylene glycol monoethyl ether, di Propylene glycol diethyl ether : glycol ethers (cellosolve) such as triethylene glycol monoethyl ether; Ethyl acetate, butyl acetate, ethylene glycol monoethyl ether acetate: ethylene glycol monobutyl ether acetate,
  • Acetate esters such as dipropylene glycol monomethyl ether acetate; Alcohols such as ethanol, propanol, ethylene glycol, propylene glycol and carbyl; Aliphatic hydrocarbons such as octane and decane; Petroleum solvents such as petroleum ether, petroleum naphtha, hydrogenated petroleum naphtha and solvent naphtha; Amides such as dimethylacetamide and dimethylformamide (DMF). These solvents It can be used alone or as a mixture of two subphases. ,
  • the content of the solvent may be about 10 to 50% by weight based on the total weight of the resin composition. If it is less than 10% by weight, the viscosity is high, the coating is inferior, and if it exceeds 50% by weight, the drying is not good, the stickiness increases.
  • a DFSR formed using the resin composition having the photocurable and thermosetting properties of the embodiment described above.
  • Such DFSRs include carboxyl groups (-COOH) and acid-modified oligomers having photocurable unsaturated functional groups; Polyimide resin; Photopolymerizable monomers having two or more photocurable unsaturated functional groups; And a cured product of a thermosetting binder having a thermosetting functional group, wherein fine unevennesses having an average roughness (Rz) of about 2 to 20 / ⁇ , or about 3 to 10 // m, or about 4 to about are formed on the surface thereof. It may be.
  • the microrefractive point may have an average roughness Ra of about 50 nm to 5 / m, or about 50 nm to 5, black to about 100 nm to 3 /, or about 200 nm to i. ,
  • the resin composition of the above embodiment is applied to a carrier film as a photosensitive coating material.
  • After the coating, etc. it is dried by passing an oven at a temperature of 50 to 130 ° C for 1 to 30 minutes, and then laminating a release film to form a carrier film, a photosensitive film, a release film from below.
  • the dry film comprised can be manufactured.
  • the thickness of the photosensitive film may be about 5 to 100 IM.
  • a plastic film such as polyethylene terephthalate (PET), a polyester film, a polyimide film, a polyamideimide film, a polypropylene film, a polystyrene film may be used as the carrier film, and polyethylene (PE), Polytetrafluoroethylene film, polypropylene film, surface treated paper, etc.
  • PET polyethylene terephthalate
  • PE polyethylene
  • Polytetrafluoroethylene film polypropylene film
  • surface treated paper etc.
  • the substrate is exposed to light having a constant wavelength band (UV, etc.).
  • the exposure may be selectively exposed with a photo mask or may be directly pattern exposed with a laser direct exposure machine.
  • the carrier film peels off after exposure.
  • the exposure amount depends on the coating film thickness, but is preferably about 0 to 1,000 mJ / orf.
  • photocuring may occur to form a crosslinking bond between an acid-modified oligomer and a photopolymerizable monomer, and as a result, may not be removed by a subsequent phenomenon.
  • the non-exposed portion may be maintained in a carboxyl group as it is, and thus may be in an alkali developable state.
  • the alkaline solution may be an aqueous alkali solution such as potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, ammonia, amines and the like.
  • aqueous alkali solution such as potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, ammonia, amines and the like.
  • the resin composition of one embodiment includes the above-described polyimide resin. Accordingly, through the developing step, not only the resin composition of the non-exposed part but also the polyimide resin of the exposed part may be selectively removed. Therefore, as described above, fine unevenness may be formed on the exposed portion and the finally formed DFSR.
  • the DFSR formed from the photosensitive film can be finally formed.
  • Heat curing temperature is more than 100 ° C.
  • thermosetting of a thermosetting binder is possible
  • the functional group and the carboxyl group of the acid-modified oligomer may crosslink to form a crosslinked structure.
  • corrugation formed in the surface by the polyimide resin after the said image development process is reflected,
  • black is about 4 to 8 / m average roughness (Rz), or about 50nm to 5 / ⁇ , or about 50nm to 5 / im, or about lOOnm to 3 // m, black may be finally formed DFSR with fine irregularities having an average roughness (Ra) of about 200 nm to 2 GPa.
  • a DFSR and a printed circuit board including the same for example, a package substrate of a semiconductor device may be provided, and the DFSR contacts a subsequent process material and the like as predetermined fine irregularities are formed on a surface thereof.
  • the surface area can be increased to show good adhesion.
  • the DFSR is the acid-modified oligomer described above as the photocuring and thermal curing; Photopolymerizable monomers; And a cured product of a thermosetting binder having a thermosetting functional group.
  • the carboxyl group of the acid-modified oligomer may be cross-linked with the thermosetting functional group of the thermosetting semi-unggi group by thermosetting, and the photo-curable unsaturated functional group of the acid-modifying oligomer
  • the crosslinking may be carried out by crosslinking with the unsaturated functional groups included in the photopolymerizable monomer.
  • DFSR fine unevenness on the surface while omitting a separate plasma treatment and the like, thereby providing DFSR that exhibits excellent adhesion to subsequent process materials when applied to a semiconductor package substrate. It is possible to provide a DFSR which expresses and maintains excellent physical properties by suppressing a decrease in physical properties of the DFSR by plasma treatment or the like.
  • the DFSR may further include a small amount of photoinitiator remaining in the photocuring in a state of being dispersed in the cured product.
  • a resin composition and DFSR having photocurable and thermosetting properties which enable the formation of DFSR having fine unevenness on the surface can be provided.
  • the DFSR thus formed can exhibit excellent adhesion to subsequent process materials due to fine concavities and convexities when applied to semiconductor package substrates, and can be formed in a simpler and more economical process by eliminating a separate treatment process such as a plasma treatment process.
  • such DFSR can suppress the deterioration of physical properties due to the plasma treatment and the like and can express and maintain excellent seban physical properties.
  • FIG. 1 is a schematic diagram showing a process of forming a DFSR having fine unevenness by applying a photocurable and thermosetting resin composition according to an embodiment of the invention.
  • PAA replicon amic acid
  • ZFR-1122 of Nippon Kayaku the polyimide resin in the form of 11.5 weight 0/0, as an acid-modified oligomer, a photopolymerizable monomer resulting in functional epoxy yarn acrylate (Nippon Kayaku DPEA-12) 10 weight 0 / ⁇
  • As photoinitiator Darocur TPO Ciba Specialty Chemicals Inc.
  • YDCN-500-80P Kerdo Chemical Co.
  • the 2-phenyl imidazole as a thermal curing catalyst, 1 parts by weight 0/0, to a 15% by weight
  • an additive for B-30 (Sakai Chemical Co., Ltd.) as a filler using 13% by weight and DMF of BYK-333's BYK 0.5 weight 0/0, as a solvent, and then blending the components and stirring for 3
  • the photosensitive film layer was vacuum laminated with a vacuum laminator (MV LP-500 manufactured by Meisei Seisakusho Co., Ltd.) on a substrate on which a circuit was formed, and then 400 mJ / After exposing to cm 2 , the PET film was removed. Subsequently, the resultant was immersed in 311: Na 2 CO 3 1% alkaline solution for stirring for 60 seconds, and then developed and heat-cured at 150 ° C. for 1 hour.
  • the printed circuit board comprising the dry film solder resist (DFSR). was completed.
  • the substrate on which the circuit is formed is cut into LG Chem's copper-clad laminate LG-T-500GA having a thickness of 0.1 l and a copper thickness of 12 / ⁇ into a substrate having a width of 5 cm and a length of 5 cm.
  • LG Chem's copper-clad laminate LG-T-500GA having a thickness of 0.1 l and a copper thickness of 12 / ⁇ into a substrate having a width of 5 cm and a length of 5 cm.
  • the resin composition prepared above was applied to PET used as a carrier film using a comma coater, and then dried by passing an obon at 75 ° C. for 8 minutes, and then laminated with PE as a release film, thereby carrying a carrier film and a photosensitive material.
  • the dry film which consists of a film and a release film was manufactured.
  • a printed circuit board including the DFSR was completed in the same manner as in Example 1 except for using the manufactured dry film.
  • Example 2 Instead of using the polyimide-based resin in Example 1, except that 41.5% by weight of acid-modified oligomer ZFR-1122 was used in the same manner as in Example 1 to complete a printed thin substrate containing DFSR.
  • a negatively drawn quartz photomask was placed on the laminated DFSR, exposed to UV (i band) of 400 mJ / cin 2 , and then the PET film used as a carrier film was removed, and Na 2 at 30 ° C. C0 3 1% Alkali The solution was developed for 60 seconds, washed with water and dried.
  • Example 1 and Comparative Example 1 were observed on the surface state using FE-SEM (Hitachi S-4800), and in Example 1 and Comparative Example 1 in order to accurately measure the difference in the surface roughness OP (Optical profiler, nanoview, Inc.) It was measured by comparing the values of the surface roughness values Rz and Ra using.
  • FE-SEM photographs of the surface conditions of Examples 1 and 2 are as shown in Figs. 2 and 3, and the images measured using OP for Examples 1, 2 and Comparative Example 1, and Rz and Ra values It was as summarized in Table 1 below.
  • Experimental Example 2 Evaluation of developability After peeling off the release film of the DFSR obtained in Examples 1 and 2 and Comparative Example 1 and placing it on the copper foil laminate, vacuum treatment was performed with a vacuum laminator for 20 seconds, a temperature of 65 ° C. for 40 seconds, and O Mpa. Lamination was carried out under the pressure of.
  • a negatively drawn quartz photomask was placed on the laminated DFSR, exposed to UV (i band) of 400 mJ / cin 2 , and then the PET film used as a carrier film was removed, and Na 2 at 30 ° C. After developing for 60 seconds in an alkaline solution of C0 3 1%, it was washed with water and dried.
  • the protective film for printed circuit board was laminated on CCL, and finished through photocuring, thermal curing and back curing, and then cut to 150mm * 130mm.
  • a temperature of 288 ° C was set in the bath (electrically heated, temperature-controlled and at least 2.25 kg of lead for testing), and the test specimen was placed with the film on top of the bath. The test specimens were inspected for visible peeling or deformation of the film.
  • the DFSR of Examples 1 and 2 is formed from a resin composition comprising a polyimide resin, so that the surface has an average roughness (Rz) of about 6.01 kPa and about 3 3 5 . Fine unevenness was formed with an average roughness (Ra) of 98 nm, an average roughness (Rz) of about 5.0 l / m, and an average roughness (Ra) of about 317.70 nm.
  • the DFSR of the embodiment exhibits excellent heat resistance and developability according to the comparative example in which fine irregularities are not formed on the surface, but fine irregularities are not formed. Therefore, the DFSR of the embodiment can exhibit excellent adhesion as well as excellent physical properties as DFSR.

Abstract

The present invention relates to a resin composition having a photocurable property and a thermosetting property, and a DFSR, wherein the resin composition enables the formation of a DFSR having a micro-undulated surface without an extra treating process such as a plasma treating process. The resin composition having a photocurable property and a thermosetting property comprises: an acid modified oligomer having a carboxyl group (-COOH) and an unsaturated functional group which can be photocured; a polyimide-based resin; a photopolymeric monomer having two or more unsaturated functional groups which can be photocured; a thermosetting binder having a functional group which can be thermoset; and a photoinitiator.

Description

【명세세  [Specifications
[발명의 명칭】  [Name of invention]
광경화성 및 열경화성을 갖는 수지 조성물과, 드라이 필름 솔더 레지스트  Photocurable and thermosetting resin composition, dry film solder resist
【기술분야】  Technical Field
본 발명은 광경화성 및 열경화성을 갖는 수지 조성물 및 드라이 필름 솔더 레지스트 (DFSR: Dry Film Solder Resist; 이하, 같다.)에 관한 것이다. 보다 구체적으로, 본 발명은 플라즈마 처리 공정 등 별도의 처리 공정 없이도 표면에 미세 요철을 갖는 DFSR의 형성을 가능케 하는 광경화성 및 열경화성을 갖는 수지 조성물 및 DFSR에 관한 것이다.  BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a resin composition and a dry film solder resist (DFSR) which are photocurable and thermosetting. More specifically, the present invention relates to a photocurable and thermosetting resin composition and DFSR enabling the formation of DFSR having fine unevenness on the surface without a separate treatment step such as a plasma treatment step.
【배경기술】  Background Art
각종 전자 기기의 소형화와 경량화에 따라, 인쇄희로기판, 반도체 패키지 기판, 플텍시블 회로기판 등에는 미세한 개구 패턴을 형성할 수 있는 감광성의 솔더 레지스트가사용되고 있다.  Background Art With the miniaturization and light weight of various electronic devices, photosensitive solder resists capable of forming fine opening patterns are used for printed thin substrates, semiconductor package substrates, and flexible circuit boards.
솔더 레지스트에 대해서는, 일반적으로 현상성, 고해상성, 절연성, 납땜 내열성, 금 도금 내성 등의 특성이 요구된다. 또한, 이러한 솔더 레지스트를 반도체 패키지 기판 등에 적용할 경우, 공정 진행 과정에서 후속 재료 등과의 우수한 접착력 확보를 위해, 필요에 따라 필름 타입 솔더 레지스트 상에 미세한 표면 요철을 형성하고 있다.  The solder resist generally requires characteristics such as developability, high resolution, insulation, soldering heat resistance, and gold plating resistance. In addition, when the solder resist is applied to a semiconductor package substrate or the like, fine surface irregularities are formed on the film type solder resist as necessary in order to secure excellent adhesion to subsequent materials and the like during the process.
그런데, 이전에는 이러한 미세 표면 요철을 형성하기 위해, 광경화, 열경화 공정 등을 거쳐 필름 타입 솔더 레지스트, 예를 들어, DFSR을 형성한 후에, 플라즈마 처리 공정 등 별도의 표면 처리 공정을 진행하는 방법을 적용하였다. 그러나, 이러한 플라즈마 처리 공정 등 별도의 처리 공정의 부가로 인해, 전체적인 공정의 복잡성 및 비경제성이 크게 야기되는 단점이 있었다.  However, in order to form such fine surface irregularities, a method of performing a separate surface treatment process such as a plasma treatment process after forming a film type solder resist, for example, DFSR, through a photocuring and thermal curing process Was applied. However, due to the addition of a separate treatment process such as the plasma treatment process, there was a disadvantage that the complexity and economical efficiency of the overall process is greatly caused.
【발명의 내용】  [Content of invention]
【해결하려는 과제】 본 발명은 플라즈마 처리 공정 등 별도의 처리 공정 없이도 표면에 미세 요철을 갖는 DFSR의 형성을 가능케 하는 광경화성 및 열경화성을 갖는 수지 조성물을 제공하는 것이다. [Problem to solve] The present invention provides a resin composition having photocurability and thermosetting property which enables formation of DFSR having fine unevenness on the surface without a separate treatment step such as a plasma treatment step.
본 발명은 또한, 플라즈마 처리 공정 등 별도의 처리 공정 없이도 표면에 미세 요철이 형성되어 다른 재료와의 우수한 접착력을 나타내는 드라이 필름 솔더 레지스트 (DFSR: Dry Film Solder Resist; 이하, 같다.)를 제공하는 것이다.  The present invention also provides a Dry Film Solder Resist (DFSR) which exhibits excellent adhesion to other materials due to the formation of fine irregularities on the surface without a separate treatment step such as a plasma treatment step. .
또한, 본 발명은 상기 DFSR을 포함하는 회로 기판에 관한 것이다. 【과제의 해결 수단】  The present invention also relates to a circuit board comprising the DFSR. [Measures of problem]
본 발명은 카르복시기 (-COOH)와, 광경화 가능한 불포화 작용기를 갖는 산변성 을리고머; 폴리이미드계 수지; 2개 이상의 광경화 가능한 불포화 작용기를 갖는 광중합성 모노머; 열경화 가능한 작용기를 갖는 열경화성 바인더; 및 광개시제를 포함하는 광경화성 및 열경화성을 갖는. 수지 조성물을 제공한다.  The present invention is an acid-modified oligomer having a carboxyl group (-COOH) and a photocurable unsaturated functional group; Polyimide resin; Photopolymerizable monomers having two or more photocurable unsaturated functional groups; Thermosetting binders having thermosetting functional groups; And photocurable and thermoset comprising photoinitiators. It provides a resin composition.
또한, 본 발명은 카르복시기 (-COOH)와, 광경화 가능한 불포화 작용기를 갖는 산변성 올리고머; 플리이미드계 수지; 2개 이상의 광경화 가능한 불포화 작용기를 갖는 광중합성 모노머; 및 열경화 가능한 작용기를 갖는 열경화성 바인더의 경화물을 포함하고, 표면에 2 내지 20im의 평균 조도 (Rz)를 갖는 미세 요철이 형성되어 있는 드라이 필름 솔더 레지스트 (DFSR)를 제공한다. 이하, 발명의 구현예에 따른 광경화성 및 열경화성을 갖는 수지 조성물과, DFSR에 대하여 보다 상세하게 설명한다.  In addition, the present invention is an acid-modified oligomer having a carboxy group (-COOH), and a photocurable unsaturated functional group; Polyimide resins; Photopolymerizable monomers having two or more photocurable unsaturated functional groups; And a cured product of a thermosetting binder having a thermosetting functional group, and providing a dry film solder resist (DFSR) having fine irregularities having an average roughness (Rz) of 2 to 20 im on the surface thereof. Hereinafter, a photocurable and thermosetting resin composition and an DFSR according to an embodiment of the present invention will be described in more detail.
발명의 일 구현예에 따르면, 카르복시기 (-COOH)와, 광경화 가능한 불포화 작용기를 갖는 산변성 올리고머; 폴리이미드계 수지; 2개 이상의 광경화 가능한 불포화 작용기를 갖는 광중합성 모노머; 열경화 가능한 작용기를 갖는 열경화성 바인더; 및 광개시제를 포함하는 광경화성 및 열경화성을 갖는 수지 조성물이 제공된다.  According to one embodiment of the invention, a carboxyl group (-COOH) and an acid-modified oligomer having a photocurable unsaturated functional group; Polyimide resin; Photopolymerizable monomers having two or more photocurable unsaturated functional groups; Thermosetting binders having thermosetting functional groups; And a photocurable and thermosetting resin composition comprising a photoinitiator.
이러한 수지 조성물에는, 소정의 산변성 을리고머, 광중합성 모노머, 광개시제 및 열경화성 바인더와 함께, 폴리이미드계 수지가 포함된다ᅳ 이러한 일 구현예의 수지 조성물은 다음과 같은 과정을 거쳐 DFSR을 형성하기 위한 조성물로 사용될 수 있다. 먼저, 수지 조성물을 기판 상에 도포한 후에, DFSR이 형성될 부분의 수지 조성물에 선택적으로 노광을 진행한다. 이러한 노광을 진행하면, 산변성 올리고머에 포함된 불포화 작용기와, 광중합성 모노머에 포함된 불포화 작용기가 광경화를 일으켜 서로 가교 결합을 형성할 수 있고, 그 결과 노광부에서 광경화에 의한 가교 구조가 형성될 수 있다. In such a resin composition, a predetermined acid-modified oligomer, a photopolymerizable monomer, A polyimide resin is included together with the photoinitiator and the thermosetting binder. The resin composition of this embodiment may be used as a composition for forming DFSR through the following process. First, after apply | coating a resin composition on a board | substrate, it exposes selectively to the resin composition of the part in which DFSR is to be formed. When such exposure is carried out, the unsaturated functional groups contained in the acid-modified oligomer and the unsaturated functional groups contained in the photopolymerizable monomer may cause photocuring to form crosslinks with each other. Can be formed.
이후, 알칼리 현상액을 사용해 현상을 진행하게 되면, 가교 구조가 형성된 노광부의 수지 조성물을 그대로 기판 상에 남고, 나머지 비노광부의 수지 조성물이 현상액에 녹아 제거될 수 있다.  Subsequently, when development is carried out using an alkali developer, the resin composition of the exposed part having the crosslinked structure is left on the substrate as it is, and the resin composition of the remaining non-exposed part may be dissolved in the developer and removed.
그리고 나서, 상기 기판 상에 남은 수지 조성물을 열처리하여 열경화를 진행하면, 상기 산변성 올리고머에 포함된 카르복시기가 열경화성 바인더의 열경화 가능한 작용기와 반웅하여 가교 결합을 형성할 수 있고, 그 결과 열경화에 의한 가교 구조가 형성되면서 기판 상의 원하는 부분에 Then, when the heat treatment of the resin composition remaining on the substrate to proceed with the thermal curing, the carboxyl groups contained in the acid-modified oligomer can react with the thermosetting functional groups of the thermosetting binder to form crosslinks, and as a result thermosetting While forming a cross-linked structure by the desired portion on the substrate
DFSR이 형성될 수 있다. DFSR can be formed.
그런데, 이렇게 형성된 DFSR을 반도체 패키지 기판 등에 적용할 경우, 공정 진행 과정에서 후속 재료 등과의 우수한 접착력 확보를 위해, By the way, when the DFSR formed in this way is applied to a semiconductor package substrate, etc., in order to ensure excellent adhesion to the subsequent materials and the like during the process,
DFSR 상에 미세한 표면 요철을 형성할 필요가 생기게 된다. 이러한 미세 요철이 D^SR 표면에 형성됨으로서, 상기 DFSR과, 이러한 DFSR 상에 적용되는 후속 공정 재료 간의 접촉 표면적이 증가할 수 있고, 그 결과 우수한 접착력이 확보될 수 있다. There is a need to form fine surface irregularities on the DFSR. As these fine irregularities are formed on the D ^ SR surface, the contact surface area between the DFSR and subsequent processing materials applied on the DFSR can be increased, and as a result, excellent adhesion can be secured.
다만, 이전에는 이러한 미세 요철을 형성하기 위해, 상술한 광경화, 열경화 공정 등을 거쳐 DFSR을 형성한 후에, 플라즈마 처리 공정 등 별도의 표면 처리 공정을 진행하는 방법을 적용하였다. 그러나, 이러한 플라즈마 처리 공정 등의 부가로 인해, 전체적인 공정의 복잡성이 야기되는 등의 단점이 있었다.  However, in order to form such fine concavities and convexities, a method of performing a separate surface treatment process such as a plasma treatment process after forming the DFSR through the above-described photocuring and thermosetting process is applied. However, the addition of such a plasma treatment process, there is a disadvantage such as causing the complexity of the overall process.
이에 비해, 일 구현예의 수지 조성물은 폴리이미드계 수지를 포함함에 따라, 이러한 단점을 해결할 수 있다. 즉, 상기 폴리이미드계 수지는 광경화성을 나하내지 않고, 상기 산변성 올리고머와 잘 흔화되지 않으며, 현상액에 용해 가능한 특성을 나타낼 수 있다. 이 러한 폴리 이미드계 수지의 특성으로 인해, 상가 노광 후의 수지 조성물에 대해 현상 공정을 진행하면, 광경화가 진행되지 않은 비노광부에서는 현상에 의해 폴리 이미드계 수지를 포함한 수지 조성물이 실질적으로 모두 녹아 제거 될 수 있다. 이에 비해, 노광부에서는 폴리 이미드계 수지가 산변성 올리고머 등과의 비흔화성 때문에 수지 조성물의 다른 성분과 미세한 상분리를 일으킬 수 있고, 그 결과 광경화에 의해 가교 구조가 형성된 산변성 을리고머 등의 다른 성분과 실질적으로 분리되어 존재할 수 있다. 이 러한 폴리 이미드계 수지는 현상액에 의해 녹아 선택적으로 제거될 수 있고 가교 구조가 형성된 산변성 을리고머 등의 다른 성분만이 노광부에 잔류할 수 있다. 따라서 , 이 러한 폴리 이미드계 수지의 선택적 제거로 인해, 노광부에 미세한 요철이 형성될 수 있다 (도 1 참조). In contrast, the resin composition of one embodiment includes a polyimide-based resin, and thus may solve this disadvantage. That is, the polyimide The resin does not deteriorate photocurability, is not easily miscible with the acid-modified oligomer, and may exhibit properties that can be dissolved in a developer. Due to the characteristics of these polyimide resins, when the development process is performed on the resin composition after the exposure exposure, the resin composition including the polyimide resin may be substantially dissolved and removed by the development in the non-exposed part where photocuring is not advanced. Can be. On the other hand, in the exposed portion, the polyimide-based resin may cause fine phase separation with other components of the resin composition due to the incompatibility with the acid-modified oligomer, and the like. It may be present substantially separate from the components. Such a polyimide resin may be selectively removed by melting with a developer, and only other components such as an acid-modified oligomer having a crosslinked structure may remain in the exposed portion. Therefore, due to the selective removal of the polyimide resin, fine unevenness may be formed in the exposed portion (see FIG. 1).
따라서, 일 구현예의 수지 조성물을 적용하여 DFSR을 형성하면, 별도의 플라즈마 처리 공정 등을 부가하지 않더라도 표면에 미세 요철이 형성된 DFSR이 형성될 수 있다. 특히, 원래 DFSR의 형성을 위해 적용하여 야 하는 현상 공정 만을 진행하더라도, 상기 미세 요철이 표면에 형성된 DFSR의 형성 이 가능해지므로, DFSR의 형성 공정을 단순화할 수 있고, 후속 공정 재료 등과의 우수한 접 착력을 나타내는 DFSR을 형성할 수 있게 된다. 이하, 일 구현예에 따른 수지 조성물을 각 성분별로 보다 구체적으로 설명하기로 한다.  Therefore, when the DFSR is formed by applying the resin composition of one embodiment, the DFSR having fine irregularities on the surface may be formed even without a separate plasma treatment process. In particular, even if only the development process that should be applied for the formation of the original DFSR proceeds, since the formation of the DFSR formed on the surface of the fine unevenness is possible, the formation process of the DFSR can be simplified, and excellent adhesion with the subsequent process materials and the like. It is possible to form a DFSR indicating. Hereinafter, the resin composition according to one embodiment will be described in more detail for each component.
산변성 을리고머  Acid denatured oligomer
상기 일 구현예의 수지 조성물은 카르복시기 (-COOH)와, 광경화 가능한 불포화 작용기를 갖는 산변성 올리고머를 포함한다. 이 러한 산변성 을리고머는 광경화에 의해 수지 조성물의 다른 성분, 즉, 광중합성 모노머 및 /또는 열경화성 바인더와 가교 결합을 형성해 DFSR의 형성을 가능케 하며 , 카르복시 기를 포함하여 수지 조성 ί "이 알칼리 현상성을 나타내게 한다. 이러한 산변성 올리고머로는 카르복시기와 광경화 가능한 작용기, 예를 들어, 아크릴레이트기나 불포화 이중 결합을 、갖는 경화 가능한 작용기를 분자 내에 갖는 을리고머로서, 이전부터 광경화성 수지 조성물에 사용 가능한 것으로 알려진 모든 성분을 별다른 제한없이 사용할 수 있다. 예를 들어, 이러한 산변성 올리고머의 주쇄는 노볼락 에폭시 또는 폴리우레탄으로 될 수 있고, 이러한 주쇄에 카르복시기와 아크릴레이트기 둥이 도입된 산변성 올리고머로서 사용할 수 있다. 상기 광경화 가능한 작용기는 적절하게는 아크릴레이트기로 될 수 있는데, 이때, 상기 산변성 올리고머는 카르복시기를 갖는 중합 가능한 모노머와, 아크릴레이트계 화합물 등을 포함한 모노머를 공중합하여 을리고머 형태로서 얻을 수 있다. 보다 구체적으로, 상기 수지 조성물에 사용 가능한 산변성 을리고머의 구체적인 예로는 다음과 같은 성분들을 들 수 있다. The resin composition of one embodiment includes a carboxyl group (-COOH) and an acid-modified oligomer having a photocurable unsaturated functional group. These acid-modified oligomers form crosslinks with other components of the resin composition, ie, photopolymerizable monomers and / or thermosetting binders, by photocuring to enable the formation of DFSR, including carboxyl groups. Have sex. Such acid-modified oligomers are oligomers having a carboxyl group and a photocurable functional group, for example, a curable functional group having a curable functional group having an acrylate group or an unsaturated double bond in the molecule, and have all been known to be usable in the photocurable resin composition. The ingredients can be used without any restriction. For example, the main chain of the acid-modified oligomer may be a novolac epoxy or polyurethane, and may be used as the acid-modified oligomer having a carboxyl group and an acrylate column introduced into the main chain. The photocurable functional group may be suitably an acrylate group, wherein the acid-modified oligomer may be obtained as a oligomer form by copolymerizing a polymerizable monomer having a carboxyl group and a monomer including an acrylate compound. . More specifically, specific examples of the acid-modified oligomer usable in the resin composition include the following components.
(1) (메트)아크릴산 등의 불포화 카르복실산 (a)과 스티렌, α- 메틸스티렌, 저급 알킬 (메트)아크릴레이트, 이소부틸렌 등의 불포화 이중 결합을 갖는 화합물 (b)을 공중합시킴으로서 얻어지는 카르복시기 함유 수지;  (1) Obtained by copolymerizing unsaturated carboxylic acids (a) such as (meth) acrylic acid with compounds (b) having unsaturated double bonds such as styrene, α-methylstyrene, lower alkyl (meth) acrylate and isobutylene Carboxyl group-containing resins;
(2) 불포화 카르복실산 (a)과 불포화 이중 결합을 갖는 화합물 (b)의 공중합체의 일부에 비닐기, 알릴기, (메트)아크릴로일기 등의 에틸렌성 불포화기와 에폭시기, 산클로라이드 등의 반응성기를 갖는 화합물, 예를 들어, 글리시딜 (메트)아크릴레이트를 반웅시키고, 에틸렌성 불포화기를 팬던트로서 부가시킴으로서 얻어지는 카르복시기 함유 감광성 수지;  (2) ethylenically unsaturated groups such as vinyl groups, allyl groups, (meth) acryloyl groups, and epoxy groups, acid chlorides, and the like, as part of the copolymer of the unsaturated carboxylic acid (a) and the compound (b) having an unsaturated double bond Carboxyl group-containing photosensitive resin obtained by reacting a compound having a reactive group, for example, glycidyl (meth) acrylate and adding an ethylenically unsaturated group as a pendant;
(3) 글리시딜 (메트)아크릴레이트, α-메틸글리시딜 (메트)아크릴레이트 등의 에폭시기와 불포화 이중 결합을 갖는 화합물 (c)과 불포화 이증 결합을 갖는 화합물 (b)의 공중합체에 불포화 카르복실산 (a)을 반응시키고, 생성된 2급의 히드록시기에 무수프탈산, 테트라히드로무수프탈산, 핵사히드로무수프탈산 등의 포화 또는 불포화 다염기산 무수물 (d)을 반응시켜 얻어지는 카르복시기 함유 감광성 수지;  (3) to a copolymer of a compound (c) having an unsaturated double bond with an epoxy group such as glycidyl (meth) acrylate and α-methylglycidyl (meth) acrylate and a compound having a unsaturated double bond (b) A carboxyl group-containing photosensitive resin obtained by reacting an unsaturated carboxylic acid (a) with reacting a saturated or unsaturated polybasic anhydride (d) such as phthalic anhydride, tetrahydrophthalic anhydride, or nuxahydrophthalic anhydride with the resulting secondary hydroxy group;
(4) 무수 말레산, 무수 이타콘산 등의 불포화 이중 결합을 갖는 산무수물 (e)과 불포화 이중 결합을 갖는 화합물 (b)의 공중합체에 히드톡시 알킬 (메트)아크릴레이트 등의 1개의 히드록시기와 1개 이상의 에틸렌성 불포화 이중 결합을 갖는 화합물 (f)을 반응시켜 얻어지는 카르복시 기 함유 감광성 수지 ; (4) a copolymer of an acid anhydride (e) having an unsaturated double bond, such as maleic anhydride and itaconic anhydride, and a compound (b) having an unsaturated double bond; Carboxyl group-containing photosensitive resin obtained by making compound (f) which has one hydroxyl group, such as hydroxy oxyalkyl (meth) acrylate, and one or more ethylenically unsaturated double bonds react;
(5) 후술하는 바와 같은 분자 중에 2개 이상의 에폭시 기를 갖는 다관능 에폭시 화합물 (g) 또는 다관능 에폭시 화합물의 히드록시기를 추가로 에피클로로히드린으로 에폭시화한 다관능 에폭시 수지의 에폭시 기와, (메트)아크릴산 등의 불포화 모노카르북실산 (h)의 카르복시기를 에스테르화 반웅 (전체 에스테르화 또는 부분 에스테르화, 바람직하게는 전체 에스테르화)시 키고, 생성된 히드록시기 에 추가로 포화 또는 불포화 다염 기산 무수물 (d)을 반웅시켜 얻어지는 카르복시기 함유 감광성 화합물;  (5) an epoxy group of a polyfunctional epoxy resin in which a hydroxy group of a polyfunctional epoxy compound having two or more epoxy groups (g) or a polyfunctional epoxy compound is further epoxidized with epichlorohydrin, and (meth) The carboxyl groups of unsaturated monocarboxylic acid (h) such as acrylic acid are subjected to esterification reaction (full esterification or partial esterification, preferably total esterification), and saturated or unsaturated polybasic acid anhydrides ( carboxyl group-containing photosensitive compound obtained by reacting d);
(6) 불포화 이증 결합을 갖는 화합물 (b)과 글리시딜 (메트)아크릴레이트의 공중합체의 에폭시기에 탄소수 2 내지 17의 알킬카르복실산, 방향족기 함유 알킬카르복실산 등의 1 분자 중에 1개의 카르복시 기를 갖고, 에틸렌성 블포화 결합을 갖지 않는 유기산 (i)을 반웅시키고, 생성된 2급의 히드록시기에 포화 또는 불포화 다염기산 무수물 (d)을 반응시켜 얻어지는 카르복시기 함유 수지 ;  (6) 1 in 1 molecule of an alkyl group having 2 to 17 carbon atoms, an aromatic group-containing alkyl carboxylic acid, etc., in the epoxy group of the copolymer of the compound (b) having an unsaturated double bond and glycidyl (meth) acrylate A carboxyl group-containing resin obtained by reacting an organic acid (i) having two carboxyl groups and not having an ethylenically unsaturated bond and reacting the produced secondary hydroxy group with a saturated or unsaturated polybasic anhydride (d);
(7) 지방족 디 이소시아네이트, 분지 지방족 디 이소시아네이트, 지환식 디 이소시아네이트, 방향족 디 이소시아네이트 등의 디 이소시아네이트 (j)와, 디 메틸을프로피온산, 디 메틸올부탄산 등의 카르복시 기 함유 디 알코을 화합물 (k), 및 폴리카르보네이트계 폴리을, 플리에 테르계 폴리올, 폴리에스테르계 폴리을, 폴리올레핀계 폴리을, 아크릴계 플리올, 비스페놀 A계 알킬렌옥시드 부가체 디을, 페놀성 히드톡실기 및 알코올성 히드록실기를 갖는 화합물 등의 디올 화합물 (m)의 중부가 반웅에 의해 얻어지는 카르복시기 함유 우레탄 수지 ;  (7) diisocyanates (j) such as aliphatic diisocyanates, branched aliphatic diisocyanates, alicyclic diisocyanates, and aromatic diisocyanates; and carboxyl group-containing dialcohol compounds (k) such as dimethyl-propionic acid and dimethylolbutanoic acid, And a compound having a polycarbonate poly, a polyether polyol, a polyester poly, a polyolefin poly, an acrylic polyol, a bisphenol A alkylene oxide adduct, a phenolic hydroxyl group and an alcoholic hydroxyl group. Carboxyl group-containing urethane resin in which the middle part of diol compounds (m), such as these, are obtained by reaction;
(8) 디 이소시아네이트 (j)와, 비스페놀 A형 에폭시 수지, 수소 첨가 비스페놀 A형 에폭시 수지, 브름화 비스페놀 A형 에폭시 수지 , 비스페놀 (8) diisocyanate (j), bisphenol A epoxy resin, hydrogenated bisphenol A epoxy resin, bisphenol bisphenol A epoxy resin, bisphenol
F형 에폭시 수지, 비스페놀 S형 에폭시 수지, 비크실레놀형 에폭시 수지, 비페놀형 에폭시 수지 등의 2관능 에폭시 수지의 (메트)아크릴레이트 또는 그의 , 부분산 무수물 변성물 (n), 카르복시 기 함유 디 알코을 화합물 (k), 및 디올 화합물 (m)의 중부가 반웅에 의해 얻어지는 감광성의 카르복시기 함유 우레탄 수지; (Meth) acrylates of bifunctional epoxy resins such as F type epoxy resins, bisphenol S type epoxy resins, bixylenol type epoxy resins, and biphenol type epoxy resins or partial acid anhydride modified substances (n) thereof, and carboxyl group-containing di An alcohol compound (k), and Photosensitive carboxyl group-containing urethane resin in which the middle part of a diol compound (m) is obtained by reaction;
(9) 상기 (7) 또는 (8)의 수지의 합성 중에 히드록시알킬 (메트)아크릴레이트 등의 1개의 히드록시기와 1개 이상의 에틸렌성 불포화 이중 결합을 갖는 화합물 (f)을 가하여, 말단에 불포화 이중 결합을 도입한 카르복시기 함유 우레탄 수지;  (9) Compound (f) having one hydroxy group such as hydroxyalkyl (meth) acrylate and one or more ethylenically unsaturated double bonds is added during the synthesis of the resin of the above (7) or (8), and is unsaturated at the terminal. Carboxyl group-containing urethane resin which introduce | transduced the double bond;
(10) 상기 (7) 또는 (8)의 수지의 합성 중에 이소포론디이소시아네이트와 펜타에리트리를트리아크릴레이트의 등몰 반웅물 등의 분자 내에 1개의 이소시아네이트기와 1개 이상의 (메트)아크릴로일기를 갖는 화합물을 가하고, 말단 (메트)아크릴화한 카르복시기 함유 우레탄 수지;  (10) One isocyanate group and one or more (meth) acryloyl groups in a molecule such as an equimolar semi-flour of isophorone diisocyanate and pentaerythritol triacrylate during the synthesis of the resin (7) or (8). Carboxyl group-containing urethane resin which added the compound which has, and was terminal (meth) acrylated;
(11) 후술하는 바와 같은 분자 증에 2개 이상의 옥세탄환을 갖는 다관능 옥세탄 화합물에 불포화 모노카르복실산 (h)을 반웅시켜, 얻어진 변성 옥세탄 화합물 중의 1급 히드록시기에 대하여 포화 또는 불포화 다염기산 무수물 (d)을 반응시켜 얻어지는 카르복시기 함유 감광성 수지;  (11) Saturated or unsaturated polybasic acids with respect to the primary hydroxy group in the modified oxetane compound obtained by reacting unsaturated monocarboxylic acid (h) with a polyfunctional oxetane compound having two or more oxetane rings in the molecular weight as described later. Carboxyl group-containing photosensitive resin obtained by making anhydride (d) react;
(12) 비스에폭시 화합물과 비스페놀류와의 반웅 생성물에 불포화 이중 결합을 도입하고, 계속해서 포화 또는 불포화 다염기산 무수물 (d)을 반웅시켜 얻어지는 카르복시기 함유 감광성 수지;  (12) Carboxyl group-containing photosensitive resin obtained by introducing an unsaturated double bond into the reaction product of a bisepoxy compound and bisphenols, and then reacting saturated or unsaturated polybasic anhydride (d);
(13) 노볼락형 페놀 수지와, 에틸렌옥시드, 프로필렌옥시드, 부틸렌옥시드, 트리메틸렌옥시드, 테트라히드로푸란, 테트라히드로피란 등의 알킬렌옥시드 및 /또는 에틸렌카르보네이트, 프로필렌카르보네이트, 부틸렌카르보네이트, 2,3-카르보네이트프로필메타크릴레이트 등의 환상 카르보네이트와의 반웅 생성물에 불포화 모노카르복샬산 (h)올 반응시켜, 얻어진 반응 생성물에 포화 또는 불포화 다염기산 무수물 (d)을 반웅시켜 얻어지는 카르복시기 함유 감광성 수지;  (13) Novolak-type phenol resins, alkylene oxides such as ethylene oxide, propylene oxide, butylene oxide, trimethylene oxide, tetrahydrofuran, tetrahydropyran and / or ethylene carbonate, propylene carbon The reaction product obtained by reacting unsaturated monocarboxylic acid (h) with a reaction product with cyclic carbonates such as carbonate, butylene carbonate, 2,3-carbonate propyl methacrylate, and saturated or unsaturated polybasic acid Carboxyl group-containing photosensitive resin obtained by reacting anhydride (d);
상술한 성분들 중에서도, 상기 (7) 내지 (10)에서, 수지 합성에 이용되는 이소시아네이트기 함유 화합물이 벤젠환을 포함하지 않는 디이소시아네이트로 되는 경우와, 상기 (5) 및 (8) 에서, 수지 합성에 이용되는 다관능 및 2관능 에폭시 수지가 비스페놀 A 골격, 비스페놀 F 골격, 비페닐 골격 또는 비크실레놀 골격을 갖는 선상 구조의 화합물이나 그 수소 첨가 화합물로 되는 경우, DFSR의 가요성 등의 측면에서 산변성 을리고머로서 바람직하게 사용 가능한 성분이 얻어질 수 있다. 또한, 다른 측면에서, 상기 (7) 내지 (10)의 수지의 변성물은 주쇄에 우레탄 결합을 포함하여 휘어짐에 대해 바람직하다. Among the above-mentioned components, in the said (7)-(10), when the isocyanate group containing compound used for resin synthesis becomes diisocyanate which does not contain a benzene ring, and in said (5) and (8), The polyfunctional and bifunctional epoxy resins used for the synthesis are bisphenol A skeleton, bisphenol F In the case of the compound having a linear structure having a skeleton, a biphenyl skeleton or a bixylenol skeleton, or a hydrogenated compound thereof, a component which can be preferably used as an acid-modified oligomer in terms of flexibility of the DFSR can be obtained. In addition, in another aspect, the modified product of the resins of the above (7) to (10) is preferable for the bending including the urethane bond in the main chain.
그리고, 상술한 산변성 을리고머로는 상업적으로 입수 가능한 성분을 사용할 수도 있는데, 이러한 성분의 구체적인 예로는 일본화약사의 ZAR- 2000, ZFR-1031,ZFR-1121 또는 ZFR-1122 등을 를 수 있다.  In addition, commercially available components may be used as the acid-modified oligomer, and specific examples of such components may include ZAR-2000, ZFR-1031, ZFR-1121 or ZFR-1122 manufactured by Nippon Chemical Co., Ltd.
한편, 상술한 산변성 올리고머는 일 구현예의 수지 조성물의 전체 중량에 대하여 약 15 내지 75 중량0 /0, 흑은 약 20 내지 50 중량0 /0, 혹은 약 25 내지 45 중량 %의 함량으로 포함될 수 있다. 상기 산변성 을리고머의 함량이 지나치게 작으면 수지 조성물의 현상성이 떨어지고 DFSR의 강도가 저하될 수 있다. 반대로, 산변성 올리고머의 함량이 지나치게 높아지면, 수지 조성물이 과도하게 현상될 뿐 아니라 코팅 시 균일성이 떨어질 수 있다. 또, 산변성 을리고머의 산가는 약 40 내지 120 mgKOH/g, 혹은 약 50 내지 110 mgKOH/g, 혹은 60 내지 90 mgKOH/g로 될 수 있다. 산가가 지나치게 낮아지면, 알칼리 현상성이 저하될 수 있고, 반대로 지나치게 높아지면 현상액에 의해 광경화부, 예를 들어, 노광부까지 용해될 수 있으므로, DFSR의 정상적 패턴 형성이 어려워질 수 있다. On the other hand, the above-mentioned acid-modified oligomer has weight one embodiment about 15 with respect to the total weight of the resin composition to 75 0/0, and black is about 20 to 50 parts by weight 0/0, or from about 25 to 45 it may be included in an amount in weight% have. When the content of the acid-modified oligomer is too small, the developability of the resin composition may be lowered and the strength of the DFSR may be lowered. On the contrary, when the content of the acid-modified oligomer is too high, not only the resin composition may be excessively developed, but also uniformity may be decreased during coating. In addition, the acid value of the acid-modified oligomer may be about 40 to 120 mgKOH / g, or about 50 to 110 mgKOH / g, or 60 to 90 mg KOH / g. When the acid value is too low, alkali developability may be lowered. On the contrary, when the acid value is too high, it may be difficult to form a photocurable part, for example, an exposed part, by a developing solution, which makes it difficult to form a normal pattern of DFSR.
광중합성 모노머  Photopolymerizable monomer
한편, 일 구현예의 수지 조성물은 광중합성 모노머를 포함한다. 이러한 광중합성 모노머는, 예를 들어, 2개 이상의 다관능 비닐기 등 광경화 가능한 불포화 작용기를 갖는 화합물로 될 수 있으며, 상술한 산변성 올리고머의 불포화 작용기와 가교 결합을 형성하여 노광시 광경화에 의한 가교 구조를 형성할 수 있다. 이로서, DFSR이 형성될 부분에 대.응하는 노광부의 수지 조성물이 알칼리 현상되지 않고 기판 상에 잔류하도록 할 수 있다. On the other hand, the resin composition of one embodiment includes a photopolymerizable monomer. Such a photopolymerizable monomer may be, for example, a compound having a photocurable unsaturated functional group, such as two or more polyfunctional vinyl groups, and may form a crosslink with the unsaturated functional group of the acid-modified oligomer described above to provide photocuring during exposure. Crosslinked structure can be formed. This ensures that the part where the DFSR is to be formed . The resin composition of the corresponding exposure part can be made to remain on a board | substrate without alkali developing.
이러한 광중합성 모노머로는, 실온에서 액상인 것을 사용할 수 있고, 이에 따라 일 구현예의 수지 조성물의 점도를 도포 방법에 맞게 조절하거나, 비노광부의 알칼리 현상성을 보다 향상시키는 역할도 함께 할 수 있다. As the photopolymerizable monomer, a liquid phase may be used at room temperature, and accordingly, the viscosity of the resin composition of one embodiment may be adjusted according to a coating method, It can also play a role of further improving alkali developability of the non-exposed part.
상기 광중합성 모노머로는, 분자 내에 2개 이상, 혹은 3개 이상, 혹은 3 내지 6개의 광경화 가능한 불포화 작용기를 갖는 (메트)아크릴레이트계 화합물을 사용할 수 있고, 보다 구체적 인 예로서, 펜타에리트리롤트리아크릴레이트, 또는 디펜타에 리트리를펜타아크릴레이트 등의 히드록시기 함유 다관능 아크릴레이트계 화합물; 폴리에틸렌글리콜디아크릴레이트, 또는 폴리프로필렌글리콜디아크릴레이트 등의 수용성 다관능 아크릴레이트계 화합물; 트리 메틸올프로판트리아크릴레이트, 펜타에리트리를테트라아크릴레이트, 또는 디펜타에 리트리를핵사아크릴레이트 등의 다가 알코올의 다관능 폴리에스테르아크릴레이트계 화합물; 트리 메틸을프로판, 또는 수소 첨가 비스페놀 A 등의 다관능 알코올 또는 비스페놀 A, 비페놀 등의 다가 페놀의 에틸렌옥시드 부가물 및 /또는 프로필렌옥시드 부가물의 아크릴레이트계 화합물; 상기 히드록시기 함유 다관능 아크릴레이트계 화합물의 이소시아네이트 변성물인 다관능 또는 단관능 폴리우레탄아크릴레이트계 화합물; 비스페놀 A 디글리시딜에테르, 수소 첨가 비스페놀 A 디글라시딜에 테르 또는 페놀 노볼락 에폭시 수지 의 (메트)아크릴산 부가물인 에폭시아크릴레이트계 화합물; 카프로락톤 변성 디트리 메틸올프로판테트라아크릴레이트, ε -카프로락톤 변성 디 펜타에 리트리를의 아크릴레이트, 또는 카프로락톤 변성 히드록시피발산네오펜틸글리콜에스테르디아크릴레이트 등의 카프로락톤 변성 의 아크릴레이트계 화합물, 및 상술한 아크릴레이트계 화합물에 대웅하는 (메트)아크릴레이트계 화합물 등의 감광성 (메트)아크릴레이트계 화합물로 이루어진 군에서 선택된 1종 이상의 화합물을 사용할 수 있고, 이들을 단독 또는 2종 이상을 조합하여 사용할 수도 있다.  As said photopolymerizable monomer, the (meth) acrylate type compound which has 2 or more, 3 or more, or 3-6 photocurable unsaturated functional groups in a molecule | numerator can be used, More specifically, a pentaery Hydroxy group-containing polyfunctional acrylate compounds such as trirol triacrylate or dipentaerythritol pentaacrylate; Water-soluble polyfunctional acrylate compounds such as polyethylene glycol diacrylate or polypropylene glycol diacrylate; Polyfunctional polyester acrylate-based compounds of polyhydric alcohols such as trimethylolpropane triacrylate, pentaerythritol tetraacrylate, or dipentaerythrite; Acrylate-based compounds of ethylene oxide adducts and / or propylene oxide adducts of polyfunctional alcohols such as trimethyl-propane or hydrogenated bisphenol A, or polyhydric phenols such as bisphenol A and biphenol; A polyfunctional or monofunctional polyurethane acrylate compound which is an isocyanate modified product of the hydroxy group-containing polyfunctional acrylate compound; Epoxy acrylate compounds that are (meth) acrylic acid adducts of bisphenol A diglycidyl ether, hydrogenated bisphenol A diglycidyl ether, or phenol novolac epoxy resins; Caprolactone-modified acrylates such as caprolactone-modified ditrimethylolpropane tetraacrylate, acrylate of ε-caprolactone-modified dipentatrile, or caprolactone-modified hydroxypivalate neopentyl glycol ester diacrylate One or more compounds selected from the group consisting of photosensitive (meth) acrylate-based compounds such as (meth) acrylate-based compounds and the above-mentioned acrylate-based compounds, and these may be used alone or in combination of two or more. It can also be used in combination.
이들 중에서도, 상기 광중합성 모노머로는 1 분자 중에 2개 이상, 혹은 혹은 3개 이상, 혹은 3 내지 6개의 (메트)아크릴로일기를 갖는 다관능 Among these, as said photopolymerizable monomer, the polyfunctional which has 2 or more, or 3 or more, or 3 to 6 (meth) acryloyl groups in 1 molecule.
(메트)아크릴레이트계 화합물을 바람직하게 사용할 수 있으며, 특히 펜타에 리트리를트리아크릴레이트, 트리 메틸올프로판트리아크릴레이트, 디펜타에리트리를헥사아크릴레이트, 또는 카프로락톤 변성 디트리메틸을프로판테트라아크릴레이트 등을 적절히 사용할 수 있다. 상업적으로 입수 가능한 광중합성 모노머의 예로는, 카야라드의 DPEA-12 등을 들 수 있다. (Meth) acrylate-based compounds can be preferably used, especially pentatritriacrylate, trimethylolpropanetriacrylate, Hexaacrylate or caprolactone-modified ditrimethyl can be suitably used as the dipentaerythrate. As an example of a commercially available photopolymerizable monomer, Kaylarad DPEA-12 etc. are mentioned.
상술한 광중합성 모노머의 함량은 수지 조성물 전체 중량에 대하여 약 5 내지 30 중량0 /0, 흑은 약 7 내지 20 중량0 /0, 흑은 약 7 내지 15 중량%로 될 수 있다. 광중합성 모노머의 함량이 지나치게 작아지면, 광경화가 층분하지 않게 될 수 있고, 자나치게 커지면 DFSR의 건조성이 나빠지고 물성이 저하될 수 있다. Content is about 7 to 20 weight 0/0, about 5 to 30 parts by weight 0/0, the black is based on the total amount of the black resin composition of the above-described photo-polymerization monomer may be about 7 to 15% by weight. If the content of the photopolymerizable monomer is too small, the photocuring may not be divided, and if the content is excessively large, the drying property of the DFSR may deteriorate and the physical properties may be degraded.
폴리이미드계 수지  Polyimide resin
한편, 일 구현예의 수지 조성물은 폴리이미드계. 수지를 포함한다. 이러한 폴리이미드계 수지는 광경화성을 나타내지 않고, 상기 산변성 올리고머 및 광중합성 모노머 등과 흔화되거나 반웅하지 않으며, 현상액에 용해 가능한 특성을 나타낼 수 있다. 이러한 폴리이미드계 수지의 특성으로 인해, 일 구현예의 수지 조성물에 대해 노광을 진행한 후에 현상 공정을 진행하면, 광경화가 진행된 노광부에서 광경화성을 갖자 않는 폴리이미드계 수지만이 선택적으로 현상액에 녹아 제거될 수 있고, 나머지 광경화에 의해 가교 구조가 형성된 산변성 을리고머 등만이 잔류할 수 있다. 이는 폴리이미드계 수지가 산변성 을리고머 등과 비흔화성 및 비반응성을 나타내기 때문에, 광경화 후 미세 상분리를 일으키기 때문으로 볼 수 있고, 그 결과 노광부 내에서 폴리이미드계 수지만이 선택적으로 제거되어 노광부에 잔류하는 DFSR표면에 미세한 요철이 형성될 수 있다.  On the other hand, the resin composition of one embodiment is a polyimide-based. Resin. Such polyimide-based resins do not exhibit photocurability, and are not commonly reacted or reacted with the acid-modified oligomers, photopolymerizable monomers, and the like, and may exhibit properties that can be dissolved in a developer. Due to the characteristics of such a polyimide resin, when the development process is performed after exposing the resin composition of one embodiment, only the polyimide resin which does not have photocurability in the exposed portion subjected to photocuring is selectively dissolved in the developer. It can be removed, and only acid-modified oligomers and the like whose crosslinked structure is formed by the remaining photocuring can remain. This is because polyimide-based resins exhibit incompatibility and non-reactivity with acid-modified oligomers and the like, and thus cause fine phase separation after photocuring. As a result, only polyimide-based resins are selectively removed in the exposed portion. As a result, minute unevenness may be formed on the DFSR surface remaining in the exposed portion.
즉, 이러한 폴리이미드계 수지의 작용으로, 일 구현예의 수지 조성물을 적용하여 DFSR을 형성하면, 별도의 플라즈마 처리 공정 등을 부가하지 않더라도 표면에 미세 요철이 형성된 DFSR이 형성될 수 있다. 특히, DFSR의 형성을 위해 당연히 적용하여야 하는 현상 공정만을 진행하더라도, 상기 미세 요철이 표면에 형성된 DFSR의 형성이 가능해지므로, 단순화된 공정으로 후속 공정 재료 등과의 우수한 접착력을 나타내는 DFSR을 형성할 수 있게 된다. 이러한 폴리이미드계 수지로는, 산변성 을리고머 등과의 비반웅성 및 비흔화성과, 현상액에 대한 용해도 등을 나타내는 임의의 폴리이미드 수지, 플리아믹산 등의 형태를 갖는 이의 전구체나 유도체 등을 사용할 수 있다. 예를 들어 , 상기 플리이미드계 수지로는 지방족 또는 방향족 작용기를 갖는 디아민과 디안하이드라이드의 반응으로 얻어진 폴리아믹산의 전구체 또는 폴리이미드 수지 등을 사용할 수 있다. 또, 상술한 폴리이미드계 수지의 특성을 고려하여, 이러한 폴리이미드계 수지는 약 10000 내지 100000의 중량평균분자량, 혹은 약 20000 내지 100000의 중량평균분자량을 가질 수 있다. 이러한 폴리이미드계 수지는 당업자에게 자명하게 알려진 방법으로 직접 합성하여 사용하거나, 상용화된 폴리이미드계 수지를 입수하여 사용할 수도 있음은 물론이다. That is, when the DFSR is formed by applying the resin composition of one embodiment by the action of the polyimide-based resin, DFSR having fine irregularities formed on the surface may be formed even without a separate plasma treatment process. In particular, even if only the development process that should be applied naturally for the formation of the DFSR is possible, the formation of the DFSR formed on the surface of the fine unevenness is possible, so that it is possible to form a DFSR that exhibits excellent adhesion to subsequent process materials and the like in a simplified process. do. As such a polyimide-based resin, any polyimide resin, a precursor thereof or a derivative thereof in the form of any polyimide resin, plymic acid, etc., which exhibits non-coagulant and non-combustibility with an acid-modified ligomer and solubility in a developer, etc. may be used. Can be. For example, the polyimide resin may be a precursor of polyamic acid or polyimide resin obtained by reaction of diamine and dianhydride having an aliphatic or aromatic functional group. In addition, in consideration of the above-described properties of the polyimide resin, the polyimide resin may have a weight average molecular weight of about 10000 to 100000, or a weight average molecular weight of about 20000 to 100000. Such a polyimide resin may be directly synthesized by a method well known to those skilled in the art, or may be obtained by using a commercially available polyimide resin.
또, 상기 폴리이미드계 수지의 함량은 수지 조성물 전체 중량에 대하여 약 1 내지 30 중량 %, 혹은 약 5 내지 27 중량0 /0, 흑은 약 10 내지 25 중량。 /0로 될 수 있다. 폴리이미드계 수지의 함량이 지나치게 작아지면, 최종 형성된 DFSR 상에 미세 요철이 잘 형성되지 않아, 후속 공정 재료 등과의 층분한 접착력이 확보되지 못할 수 있고, 지나치게 커지면 DFSR이 형성될 노광부에서 지나치게 많은 폴리이미드계 수지가 제거되어 원하는 패턴을 갖는 DFSR이 제대로 형성되지 못할 수 있다. In addition, the polyimide content of the imide resin is in the range of about 1 to 30% by weight based on the total amount of the resin composition, or from about 5 to 27 weight 0/0, the black can be about 10 to 25 wt. / 0. If the content of the polyimide resin is too small, fine irregularities may not be formed well on the final DFSR, and thus, sufficient adhesion may not be ensured with subsequent process materials. The polyimide-based resin may be removed to prevent DFSR having a desired pattern from being properly formed.
광개시제  Photoinitiator
일 구현예의 수지 조성물은 광개시제를 포함한다. 이러한 광개시제는, 예를 들어, 수지 조성물의 노광부에서 라디칼 광경화를 개시하는 역할을 한다.  The resin composition of one embodiment includes a photoinitiator. Such photoinitiators serve to initiate radical photocuring, for example, in the exposed portion of the resin composition.
광개시제로서는 공지의 것을 사용할 수 있고, 벤조인, 벤조인메틸에테르, 벤조인에틸에테르 등의 벤조인과 그 알킬에테르류로 되는 벤조인계 ᅳ 화합물; 아세토페논, 2,2-디메특시 -2-페닐아세토페논, 1,1- 디클로로아세토페논, 4-(l-t-부틸디옥시 -1-메틸에틸)아세토페논 등의 아세토페논계 화합물 ;2-메틸안트라퀴논, 2-아밀안트라퀴논, 2-t-부틸안트라퀴논, 1-클로로안트라퀴논 등의 안트라퀴논계 화합물; 2,4-디메틸티오크산톤, 2,4- 디이소프로필티오크산톤, 2-클로로티오크산톤 등의 티오크산톤 화합물; 아세토페논디메틸케탈, 벤질디메틸케탈 등의 케탈 화합물; 벤조페논, 4-(l-t- 부틸디옥시 _1_메틸에틸)벤조페논, 3,3',4,4'-테트라키스 (t- 부틸디옥시카르보닐)벤조페논 등의 벤조페논계 화합물 등의 물질을 사용할 수 있다. As a photoinitiator, well-known thing can be used and the benzoin type | mold compound which consists of benzoin, such as benzoin, benzoin methyl ether, benzoin ethyl ether, and its alkyl ether; Acetophenone-based compounds such as acetophenone, 2,2-dimethec-2-phenylacetophenone, 1,1-dichloroacetophenone, and 4- (lt-butyldioxy-1-methylethyl) acetophenone; Anthraquinone compounds such as methyl anthraquinone, 2-amyl anthraquinone, 2-t-butyl anthraquinone, and 1-chloroanthraquinone; Thioxanthone compounds, such as 2, 4- dimethyl thioxanthone, 2, 4- diisopropyl thioxanthone, and 2-chloro thioxanthone; Ketal compounds such as acetophenone dimethyl ketal and benzyl dimethyl ketal; Benzophenone compounds such as benzophenone, 4- (lt-butyldioxy _1_methylethyl) benzophenone and 3,3 ', 4,4'-tetrakis (t-butyldioxycarbonyl) benzophenone Substances can be used.
또, 2-메틸 -1-[4- (메틸티오)페닐] -2-모르폴리노프로파논 -1,2-벤질 -2- 디메틸아미노 -1-(4-몰포리노페닐) -부탄 -1-은, 2- (디메틸아미노) -2-[(4- 메틸페닐)메틸] -1-[4-(4-몰포리닐)페닐] -1-부타논, Ν,Ν- 디메틸아미노아세토페논 (시판품으로서는 치바스페셜리티케미컬사 (현, 치바저팬사) 제품의 이루가큐어 (등특상표) 907, 이루가큐어 369, 이루가큐어 379 등) 등의 α-아미노아세토페논 화합물; 2,4,6- 트리메틸벤조일디페닐포스핀옥사이드, 비스 (2,4,6-트리메틸벤조일) - 페닐포스핀옥사이드, 비스 (2,6-디메록시벤조일) -2,4,4-트리메틸- 펜틸포스핀옥사이드 (시판품으로서는, BASF사 제품 루실린 (등록상표) TPO, 치바스페셜리티케미컬사 제품의 아루가큐어 819 등) 등의 아실포스핀옥사이드 화합물 역시 적절한 광개시제로서 언급될 수 있다.  In addition, 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinopropanone-1,2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butane-1 -Silver, 2- (dimethylamino) -2-[(4-methylphenyl) methyl] -1- [4- (4-morpholinyl) phenyl] -1-butanone, Ν, Ν- dimethylaminoacetophenone ( Examples of commercially available products include α-aminoacetophenone compounds such as Irugacure (trademark) 907, Irugacure 369, Irugacure 379, and the like manufactured by Chiba Specialty Chemical Co., Ltd. (currently, Chiba Japan); 2,4,6-trimethylbenzoyldiphenylphosphineoxide, bis (2,4,6-trimethylbenzoyl) -phenylphosphineoxide, bis (2,6-dimethoxybenzoyl) -2,4,4-trimethyl- Acylphosphine oxide compounds such as pentylphosphine oxide (commercially available products such as Rucillin® TPO from BASF, Arugacure 819 from Chivas Specialty Chemical, etc.) may also be mentioned as suitable photoinitiators.
그리고, 다른 적절한 광개시제로서는, 옥심에스테르 화합물을 들 수 있다. 옥심에스테르 화합물의 구체예로서는 2- And as another suitable photoinitiator, an oxime ester compound is mentioned. As a specific example of an oxime ester compound, 2-
(아세틸옥시이미노메틸)티오크산텐 -9-온, (1,2-옥탄디온, 1-[4- (페닐티오)페닐 ]-, 2- (0-벤조일옥심)), (에탄온, 1-[9-에틸 -6-(2-메틸벤조일) -9H-카르바졸 -3-일] -, l-(0- 아세틸옥심)) 등을 들 수 있다. 시판품으로서는 치바스페셜리티케미컬사 제품의 GGI-325, 이루가큐어 OXE01, 이루가큐어 OXE02, ADEKA사 제품 N- 1919, 치바스페셜리티케미컬사의 Darocur TPO 등을 들 수 있다. 부가하여, 비이미다졸계 화합물 또는 트리아진계 화합물 등도 적절한 광개시제로서 사용될 수 있다. (Acetyloxyiminomethyl) thioxanthene-9-one, (1,2-octanedione, 1- [4- (phenylthio) phenyl]-, 2- (0-benzoyloxime)), (ethanone, 1 -, and the like, l- (0- acetyl oxime)) - [9-ethyl-6- (2-methylbenzoyl) - 9 H- carbazole-3-yl]. Commercially available products include GGI-325 from Chiba Specialty Chemical, Irugacure OXE01, Irugacure OXE02, ADEKA N-1919, Chiba Specialty Chemical's Darocur TPO, and the like. In addition, biimidazole-based compounds or triazine-based compounds and the like can also be used as suitable photoinitiators.
광개시제의 함량은 수지 조성물 전체 중량에 대하여 약 0.5 내지 20 중량 %, 혹은 약 1 내지 10 중량 %, 혹은 약 1 내지 5 증량 %로 될 수 있다. 광개시제의 함량이 지나치게 작으면, 광경화가 제대로 일어나지 않을 수 있고, 반대로 지나치게 커지면 수자 조성물의 해상도가 저하되거나 DFSR의 신뢰성이 층분하지 않을 수 있다. 열경화성 바인더 The content of the photoinitiator may be about 0.5 to 20% by weight, or about 1 to 10% by weight, or about 1 to 5% by weight based on the total weight of the resin composition. When the content of the photoinitiator is too small, the photocuring may not occur properly, on the contrary, when the content of the photoinitiator is too large, the resolution of the water soluble composition may be lowered or the reliability of the DFSR may not be severe. Thermosetting binder
일 구현예의 수지 조성물은 또한 열경화 가능한 작용기, 예를 들어, 에폭시기, 옥세타닐기, 환상 에테르기 및 환상 티오 에테르기 중에서 선택된 The resin composition of one embodiment is also selected from thermosetting functional groups such as epoxy groups, oxetanyl groups, cyclic ether groups and cyclic thio ether groups
1종 이상을 갖는 열경화성 바인더를 포함한다. 이러한 열경화성 바인더는 열경화에 의해 산변성 을리고머 등과 가교 결합을 형성해 DFSR의 내열성 또는 기계적 물성을 담보할 수 있다. It includes a thermosetting binder having at least one kind. Such a thermosetting binder may form a crosslinked bond with an acid-modified oligomer and the like by thermosetting to secure heat resistance or mechanical properties of DFSR.
이러한 열경화성 바인더는 연화점이 약 70 내지 100°C로 될 수 있고, 이를 통해 라미네이션시 요철을 즐일 수 있다. 연화점이 낮을 경우 DFSR의 끈적임 (Tackiness)이 증가하고, 높을 경우 흐름성이 악화될 수 있다. Such a thermosetting binder may have a softening point of about 70 to 100 ° C., thereby enjoying unevenness during lamination. Low softening points increase the tackiness of the DFSR and high flow rates can deteriorate.
상기 열경화성 바인더로는, 분자 중에 2개 이상의 환상 에테르기 및 /또는 환상 티오에테르기 (이하, 환상 (티오)에테르기라고 함)를 갖는 수지를 사용할 수 있고, 또 2관능성의 에폭시 수지를 사용할 수 있다. 기타 디이소시아네이트나 그의 2관능성 블록이소시아네이트도 사용할 수 있다. 상기 분자 중에 2개 이상의 환상 (티오)에테르기를 갖는 열경화성 바인더는 분자 중에 3, 4 또는 5원환의 환상 에테르기, 또는 환상 티오에테르기 중 어느 한쪽 또는 2종의 기를 2개 이상 갖는 화합물로 될 수 있다. 또, 상기 열경화성 바인더는 분자 중에 적어도 2개 이상의 에폭시기를 갖는 다관능 에폭시 화합물, 분자 중에 적어도 2개 이상의 옥세타닐기를 갖는 다관능 옥세탄 화합물 또는 분자 중에 2개 이상의 티오에테르기를 갖는 에피술피드 수지 등으로 될 수 있다.  As the thermosetting binder, a resin having two or more cyclic ether groups and / or cyclic thioether groups (hereinafter referred to as cyclic (thio) ether groups) in a molecule can be used, and a bifunctional epoxy resin can be used. have. Other diisocyanates or their difunctional block isocyanates can also be used. The thermosetting binder having two or more cyclic (thio) ether groups in the molecule may be a compound having any one or two or more of three, four or five membered cyclic ether groups, or cyclic thioether groups in the molecule. have. The thermosetting binder may be a polyfunctional epoxy compound having at least two or more epoxy groups in a molecule, a polyfunctional oxetane compound having at least two or more oxetanyl groups in a molecule, or an episulfide resin having two or more thioether groups in a molecule And so on.
상기 다관능 에폭시 화합물의 구체예로서는, 예를 들면 비스페놀 A형 에폭시 수지, 수소 첨가 비스페놀 A형 에폭시 수지, 브롬화 비스페놀 A형 에폭시 수지, 비스페놀 F형 에폭시 수지, 비스페놀 S형 에폭시 수지, 노볼락형 에폭사 수지, 페놀 노볼락형 에폭시 수지, 크레졸 노볼락형 에폭시 수지, N-글리시딜형 에폭시 수지, 비스페놀 A의 노볼락형 에폭시 수지, 비크실레놀형 에폭시 수지, 비페놀형 에폭시 수지, 킬레이트형 에폭시 수지, 글리옥살형 에폭시 수지, 아미노기 함유 에폭시 수지, 고무 변성 에폭시 수지, 디시클로펜타디엔 페놀릭형 에폭시 수지, 디글리시딜프탈레이트 수지, 헤테로시클릭 에폭시 수지, 테트라글리시딜크실레노일에탄 수지, 실리콘 변성 에폭시 수지 , ε -카프로락톤 변성 에폭시 수지 등을 들 수 있다. 또한, 난연성 부여를 위해, 인 등의 원자가 그 구조 중에 도입된 것을 사용할 수도 있다. 이들 에폭시 수지는 열경화함으로써 , 경화 피막의 밀착성, 땜납 내열성, 무전해 도금 내성 등의 특성을 향상시 킨다. As a specific example of the said polyfunctional epoxy compound, bisphenol-A epoxy resin, hydrogenated bisphenol-A epoxy resin, brominated bisphenol-A epoxy resin, bisphenol F-type epoxy resin, bisphenol S-type epoxy resin, novolak-type epoxa, for example Resins, phenol novolak type epoxy resins, cresol novolak type epoxy resins, N-glycidyl type epoxy resins, bisphenol A novolak type epoxy resins, bixylenol type epoxy resins, biphenol type epoxy resins, chelate type epoxy resins, Glyoxal type epoxy resin, amino group containing epoxy resin, rubber modified epoxy resin, dicyclopentadiene phenolic epoxy resin, diglycidyl phthalate resin, heterocyclic epoxy resin, tetraglycidyl xylenyl yl ethane resin, silicone A modified epoxy resin, (epsilon) -caprolactone modified epoxy resin, etc. are mentioned. In addition, for the purpose of imparting flame retardancy, those in which atoms such as phosphorus are introduced into the structure may be used. By thermosetting these epoxy resins, the adhesiveness of a cured film, solder heat resistance, electroless plating resistance, etc. improve it.
상기 다관능 옥세탄 화합물로서는 비스 [(3-메틸 -3- 옥세타닐메톡시)메틸]에 테르, 비스 [(3-에 틸 -3-옥세타닐메특시)메틸]에 테르, 1 ,4- 비스 [(3-메틸 -3-옥세타닐메록시 )메틸]벤젠, 1 ,4-비스 [(3ᅳ에 틸 -3- 옥세타닐메록시)메틸]벤젠, (3-메틸 -3-옥세타닐)메틸아크릴레이트, (3-에틸 -3- 옥세타닐)메틸아크릴레이트, (3-메틸 -3-옥세타닐)메틸메타크릴레이트, (3-에틸 -3- 옥세타닐)메틸메타크릴레이트나 이들의 올리고머 또는 공중합체 등의 다관능 옥세탄류 이외에, 옥세탄 알코올과 노볼락 수지 , 폴리 (Ρ-히드록시스티 렌), 카르도형 비스페놀류, 카릭스아렌류, 카릭스레졸신아렌류, 또는 실세스퀴옥산 등의 히드록시기를 갖는 수지와의 에 테르화물 등을 들 수 있다. 그 밖의, 옥세탄환을 갖는 불포화 모노머와 알킬 (메트)아크릴레이트와의 공중합체 등도 들 수 있다.  Examples of the polyfunctional oxetane compound include bis [(3-methyl-3-oxetanylmethoxy) methyl] ether, bis [(3-ethyl-3-oxetanylmethoxy) methyl] ether, 1,4 Bis [(3-methyl-3-oxetanylmethoxy) methyl] benzene, 1,4-bis [(3'ethyl-3-oxetanylmethoxy) methyl] benzene, (3-methyl-3-jade Cetanyl) methylacrylate, (3-ethyl-3-oxetanyl) methylacrylate, (3-methyl-3-oxetanyl) methylmethacrylate, (3-ethyl-3-oxetanyl) methyl In addition to polyfunctional oxetanes such as methacrylates and oligomers or copolymers thereof, oxetane alcohols and novolac resins, poly (Ρ-hydroxystyrene), cardo-type bisphenols, charixarenes, and charixresolecin And etherates with a resin having a hydroxy group such as arene or silsesquioxane. In addition, the copolymer etc. of the unsaturated monomer which has an oxetane ring, and an alkyl (meth) acrylate are mentioned.
상기 분자 중에 2개 이상의 환상 티오에 테르기를 갖는 화합물로서는, 예를 들면 재팬 에폭시 레진^、 V 제조의 비스페놀 Α형 에피술피드 수지 YL7000 등을 들 수 있다. 또한, 노볼락형 에폭시 수지의 에폭시기의 산소 원자를 황 원자로 대체한 에피술피드 수지 등도 사용할 수 있다.  As a compound which has a 2 or more cyclic thioether group in the said molecule | numerator, Japan epoxy resin ^, the bisphenol A episulfide resin YL7000 by V manufacture etc. are mentioned, for example. Moreover, the episulfide resin etc. which substituted the oxygen atom of the epoxy group of the novolak-type epoxy resin with the sulfur atom can also be used.
또한, 시판되고 있는 것으로서, 국도화학사의 YDCN-500-80P 등을 사용할 수 있다.  Moreover, as marketed, YDCN-500-80P etc. of Kukdo Chemical Co., Ltd. can be used.
열경화성 바인더는 상기 산변성 올리고머 의 카르'복시 기 1 당량에 대하여 0.8 내지 2.0 당량에 대웅하는 함량으로 포함될 수 있다. 열경화성 바인더의 함량이 지나치 게 작아지면, 경화 후 DFSR에 카르복시기가 남아 내열성 , 내알칼리성 , 전기 절연성 등이 저하될 수 있다. 반대로, 함량이 지나치 게 커지면, 저분자량의 열경화성 바인더가 건조 도막에 잔존함으로써 , 도막의 강도 등이 저하되 기 때문에 바람직하지 않다. The thermosetting binder can be included in an amount that Daewoong to 0.8 to 2.0 equivalents with respect to the carboxylic, diplopia group of 1 equivalent of the acid-modified oligomer. If the content of the thermosetting binder is excessively small, carboxyl groups remain in the DFSR after curing, which may lower heat resistance, alkali resistance, and electrical insulation. On the contrary, when the content is excessively large, the low molecular weight thermosetting binder remains in the dry coating film, which is not preferable because the strength of the coating film is lowered.
상술한 각 성분 외 에도, 일 구현예의 수지 조성물은 용제; 및 후술하는 열경화성 바인더 촉매 (열경화 촉매), 필러 , 안료 및 첨가제로 이루어진 군에서 선택된 1종 이상을 더 포함할 수도 있다. In addition to the above-mentioned components, the resin composition of one embodiment includes a solvent; And thermosetting binder catalysts (thermosetting catalysts), fillers, pigments and additives described below. It may further comprise one or more selected from the group consisting of.
열경화성 바인더 촉매 ί열경화 촉매)  Thermosetting binder catalyst ί thermosetting catalyst)
열경화성 바인더 촉매는 열경화성 바인더의 열경화를 촉진시키는 역할을 한다.  The thermosetting binder catalyst serves to promote thermosetting of the thermosetting binder.
이러한 열경화성 바인더 촉매로서는, 예를 들면 이미다졸, 2- 메틸이미다졸, 2-에틸이미다졸, 2-에틸 -4-메틸이미다졸, 2-페닐이미다졸, 4- 페닐이미다졸, 1-시아노에틸 -2-페닐이미다졸, 1-(2-시아노에틸) -2-에틸 -4- 메틸이미다졸 등의 이미다졸 유도체; 디시안디아미드, 벤질디메틸아민, 4- (디메'틸아미노) -Ν,Ν-디메틸벤질아민, 4-메특시 -Ν,Ν-디메틸벤질아민, 4-메틸 -Ν,Ν- 디메틸벤질아민 등의 아민 화합물; 아디프산 디히드라지드, 세박산 디히드라지드 등의 히드라진 화합물; 트리페닐포스핀 등의 인 화합물 등을 들 수 있다. 또한, 시판되고 있는 것으로서는, 예를 들면 시코쿠 가세이 고교사 쎄조의 2ΜΖ-Α, 2ΜΖ-ΟΚ, 2ΡΗΖ, 2Ρ4ΒΗΖ, 2Ρ4ΜΗΖ (모두 이미다졸계 화합물의 상품명), 산아프로사 제조의 U-CAT3503N, UCAT3502T (모두 디메틸아민의 블록이소시아네이트 화합물의 상품명), DBU, DBN,U-CATSA102, U-CAT5002(모두 이환식 아미딘 화합물 및 그의 염) 등을 들 수 있다. 특히 이들에 한정되는 것이 아니고, 에폭시 수지나 옥세탄 화합물의 열경화 촉매, 또는 에폭시기 및 /또는 옥세타닐기와 카르복시기의 반응을 촉진하는 것일 수 있고, 단독으로 또는 2종 이상을 흔합하여 사용할 수도 있다. 또한, 구아나민, 아세토구아나민, 벤조구아나민, 멜라민, 2,4-디아미노 -6-메타크릴로일옥시에틸- S-트리아진, 2-비닐 -4,6-디아미노 -S-트리아진, 2-비닐 -4,6-디아미노 -S- 트리아진 ·이소시아누르산 부가물, 2,4-디아미노 -6-메타크릴로일옥시에틸 -S- 트리아진 _이소시아누르산 부가물 등의 S-트리아진 유도체를 이용할 수도 있고, 바람직하게는 이들 밀착성 부껴제로서도 기능하는 화합물을 상기 열경화성 바인더 촉매와 병용할 수 있다. As such a thermosetting binder catalyst, for example, imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4-phenylimidazole Imidazole derivatives such as 1-cyanoethyl-2-phenylimidazole and 1- (2-cyanoethyl) -2-ethyl-4-methylimidazole; Dicyandiamide, benzyldimethylamine, 4- (dimethoxy 'butyl-amino) -Ν, Ν- dimethylbenzylamine, 4-meteuk when -Ν, Ν- dimethylbenzylamine, 4-methyl -Ν, Ν- dimethylbenzylamine, etc. Amine compound; Hydrazine compounds such as adipic dihydrazide and sebacic acid dihydrazide; Phosphorus compounds, such as a triphenylphosphine, etc. are mentioned. As commercially available products, for example, Shikoku Kasei Kogyo Sezo 2ΜΖ-Α, 2ΜΖ-ΟΚ, 2ΡΗΖ, 2Ρ4ΒΗΖ, 2Ρ4ΜΗΖ (both brand names of imidazole compounds), U-CAT3503N manufactured by San Aprosa, UCAT3502T (All are brand names of block isocyanate compounds of dimethylamine), DBU, DBN, U-CATSA102, U-CAT5002 (both bicyclic amidine compounds and salts thereof), and the like. In particular, the present invention is not limited thereto, and may be a thermosetting catalyst of an epoxy resin or an oxetane compound, or may promote reaction of an epoxy group and / or an oxetanyl group with a carboxyl group, or may be used alone or in combination of two or more thereof. . In addition, guanamine, acetoguanamine, benzoguanamine, melamine, 2,4-diamino-6-methacryloyloxyethyl-S-triazine, 2-vinyl-4,6-diamino-S-tri Azine, 2-vinyl-4,6-diamino-S-triazine isocyanuric acid adduct, 2,4-diamino-6-methacryloyloxyethyl -S-triazine _ isocyanuric acid S-triazine derivatives, such as an adduct, can also be used, Preferably the compound which functions also as these adhesive adhering agents can be used together with the said thermosetting binder catalyst.
열경화성 바인더 촉매의 함량은 적절한 열경화성의 측면에서, 수지 조성물 전체 중량에 대하여 약 으3 내지 15 중량 %로 될 수 있다.  The content of the thermosetting binder catalyst may be about 3 to 15% by weight based on the total weight of the resin composition in terms of suitable thermosetting.
필러  filler
필러는 내열 안정성, 열에 의한 치수안정성, 수지 접착력을 향상시키는 역할을 한다. 또한, 색상을 보강함으로써 체질안료 역할도 한다. 필러로는 무기 또는 유기 층전제를 사용할 수가 있는데, 예를 들어 황산바륨, 티탄산바륨, 무정형 실리카, 결정성 실리카, 용융 실리카, 구형 실리카, 탈크, 클레이, 탄산마그네슴, 탄산칼슘, 산화알루미늄 (알루미나), 수산화알루미늄, 마이카 등을 사용할 수 았다. Filler is characterized by thermal stability, thermal dimensional stability, resin adhesion To improve. In addition, it also serves as a constitution pigment by reinforcing the color. Inorganic or organic layer fillers may be used, for example barium sulfate, barium titanate, amorphous silica, crystalline silica, fused silica, spherical silica, talc, clay, magnesium carbonate, calcium carbonate, aluminum oxide (alumina ), Aluminum hydroxide, mica and the like can be used.
필러의 함량은 조성물 전체 중량에 대하여 약 5 내지 50 중량 %인 것이 바람직하다. 50 중량 %를 초과하여 사용할 경우에는 조성물의 점도가 높아져서 코팅성이 저하되거나 경화도가 떨어지게 되어 바람직하지 않다.  The content of the filler is preferably about 5 to 50% by weight based on the total weight of the composition. In the case of using more than 50% by weight, the viscosity of the composition is increased, so that the coating property is lowered or the degree of curing is lowered.
안료  Pigment
안료는 시인성, 은폐력을 발휘하여 회로선의 긁힘과 같은 결함을 숨기는 역할을 한다.  Pigments exhibit visibility and hiding power to hide defects such as scratches on circuit lines.
안료로는 적색, 청색, 녹색, 황색, 흑색 안료 등을 사용할 수 있다. 청색 안료로는 프탈로시아닌 블루, 피그먼트 블루 15:1, 피그먼트 블루 15:2, 피그먼트 블루 15:3, 피그먼트 블루 15:4,꾀그먼트 블루 15:6, 피그먼트 블루 60 등을 사용할수 있다. 녹색 안료로는 피그먼트 그린 7, 피그먼트 그린 36, 솔벤트 그린 3, 솔벤트 그린 5, 솔벤트 그린 20, 솔벤트 그린 28 등을 사용할 수 있다. 황색 안료로는 안트라퀴논계, 이소인돌리논계, 축합 아조계, 벤즈이미다졸론계 등이 있으며, 예를 들어 피그먼트 옐로우 108, 피그먼트 엘로우 147, 피그먼트 옐로우 151, 피그먼트 옐로우 166, 피그먼트 옐로우 181, 피그먼트 옐로우 193 등을 사용할 수 있다.  As the pigment, a red, blue, green, yellow, black pigment or the like can be used. Phthalocyanine blue, pigment blue 15: 1, pigment blue 15: 2, pigment blue 15: 3, pigment blue 15: 4, pigment blue 15: 6, pigment blue 60, etc. have. Pigment Green 7, Pigment Green 36, Solvent Green 3, Solvent Green 5, Solvent Green 20, Solvent Green 28 and the like can be used as the green pigment. Examples of the yellow pigments include anthraquinones, isoindolinones, condensed azos, and benzimidazolones. For example, Pigment Yellow 108, Pigment Yellow 147, Pigment Yellow 151, Pigment Yellow 166, Pigment. Pigment yellow 181, pigment yellow 193 and the like can be used.
안료의 함량은 수지 조성물 전체 중량에 대하여 약 0.5 내지 3 중량 %로 사용하는 것이 바람직하다. 으5 중량% 미만으로 사용할 경우에는 시인성, 은폐력이 떨어지게 되며, 3 중량 %를 초과하여 사용할 경우에는 내열성이 떨어지게 된다.  The content of the pigment is preferably used at about 0.5 to 3% by weight based on the total weight of the resin composition. When used in less than 5% by weight, visibility and hiding power is lowered, and when used in excess of 3% by weight is less heat resistance.
첨가제  additive
첨가제는 수지 조성물의 기포를 제거하거나, 필름 코팅시 표면의 팝핑 (Popping)이나 크레이터 (Crater)를 제거, 난연성질 부여, 점도 조절, 촉매 등의 역할로 첨가될 수 있다.  The additive may be added to remove bubbles in the resin composition or to remove popping or craters from the surface of the film, impart flame retardancy, adjust viscosity, and catalyze the film.
구체적으로, 미분실리카, 유기 벤토나이트, 몬모릴로나이트 등의 공지 관용의 증점제; 실리콘계, 불소계, 고분자계 등의 소포제 및 /또는 레벨링게; 이미다졸계, 티아졸계, 트리아졸계 등의 실란 커플링제; 인계 난연제, 안티몬계 난연제 등의 난연제 등과 같은 공지 관용의 첨가제류를 배합할 수 있다. Specifically, finely divided silica, organic bentonite, montmorillonite and the like Conventional thickeners; antifoaming agents such as silicone-based, fluorine-based, and polymeric-based and / or leveling crabs; Silane coupling agents such as imidazole series, thiazole series, and triazole series; Known and common additives such as flame retardants such as phosphorus flame retardants and antimony flame retardants can be blended.
이중에서 레벨링제는 필름 코팅시 표면의 팝핑이나 크레이터를 제거하는 역할을 하며, 예를 들어 BYK-Chemie GmbH의 BYK 80N, BYK-307, BYK-378,BYK-350 등을 사용할 수 있다.  Among them, the leveling agent serves to remove the popping or crater of the surface when the film is coated, for example, BYK-Chemie GmbH BYK 80N, BYK-307, BYK-378, BYK-350 and the like can be used.
첨가제의 함량은 수지 조성물 전체 중량에 대하여 약 0.01 내지 10 중량 %인 것이 바람직하다. 수지 조성물을 용해시키거나 적절한 점도를 부여하기 위해 1개 이상의 용제를 흔용하여 사용할 수 있다.  The content of the additive is preferably about 0.01 to 10% by weight based on the total weight of the resin composition. One or more solvents may be commonly used to dissolve the resin composition or impart an appropriate viscosity.
용제로서는 메틸에틸케톤, 시클로핵사논 등의 케톤류; 틀루엔, 크실렌, 테트라메틸벤젠 등의 방향족 탄화수소류; 에틸렌글리콜모노에틸에테르, 에틸렌글리콜모노메틸에테르, 에틸렌글리콜모노부틸에테르 디에틸렌글리콜모노에틸에테르, 디에틸렌글리콜모노메틸에테르 디에틸렌글리콜모노부틸에테르, 프로필렌글리콜모노메틸에테르 : 프로필렌글리콜모노에틸에테르, 디프로필렌글리콜디에틸에테르 : 트리에틸렌글리콜모노에틸에테르 등의 글리콜에테르류 (셀로솔브); 아세트산에틸, 아세트산부틸, 에틸렌글리콜모노에틸에테르아세테이트: 에틸렌글리콜모노부틸에테르아세테이트, As a solvent, Ketones, such as methyl ethyl ketone and cyclonucleanone; Aromatic hydrocarbons such as toluene, xylene and tetramethylbenzene; Ethylene glycol monoethyl ether, ethylene glycol monomethyl ether, ethylene glycol monobutyl ether diethylene glycol monoethyl ether, diethylene glycol monomethyl ether diethylene glycol monobutyl ether, propylene glycol monomethyl ether : propylene glycol monoethyl ether, di Propylene glycol diethyl ether : glycol ethers (cellosolve) such as triethylene glycol monoethyl ether; Ethyl acetate, butyl acetate, ethylene glycol monoethyl ether acetate: ethylene glycol monobutyl ether acetate,
디에틸렌글리콜모노에틸에테르아세테이트, Diethylene glycol monoethyl ether acetate,
디에틸렌글리콜모노부틸에테르아세테이트, Diethylene glycol monobutyl ether acetate,
프로필렌글리콜모노메틸에테르아세테이트, Propylene glycol monomethyl ether acetate,
디프로필렌글리콜모노메틸에테르아세테이트 등의 아세트산에스테르류; 에탄올, 프로판올, 에틸렌글리콜, 프로필렌글리콜, 카르비를 등의 알코을류; 옥탄, 데칸 등의 지방족 탄화수소; 석유에테르, 석유나프타, 수소 첨가 석유나프타, 용매나프타 등의 석유계 용제; 디메틸아세트아미드, 디메틸포름아미드 (DMF) 등의 아미드류 등을 들 수 있다. 이들 용제는 단독으로 또는 2종 아상의 흔합물로서 사용할 수 있다. , Acetate esters, such as dipropylene glycol monomethyl ether acetate; Alcohols such as ethanol, propanol, ethylene glycol, propylene glycol and carbyl; Aliphatic hydrocarbons such as octane and decane; Petroleum solvents such as petroleum ether, petroleum naphtha, hydrogenated petroleum naphtha and solvent naphtha; Amides such as dimethylacetamide and dimethylformamide (DMF). These solvents It can be used alone or as a mixture of two subphases. ,
용제의 함량은 수지 조성물 전체 중량에 대하여 약 10 내지 50 중량 %로 될 수 있다. 10 중량 % 미만인 경우에는 점도가 높아 코팅성이 떨어지고 50 중량 %를 초과할 경우에는 건조가 잘 되지 않아 끈적임이 증가하게 된다.  The content of the solvent may be about 10 to 50% by weight based on the total weight of the resin composition. If it is less than 10% by weight, the viscosity is high, the coating is inferior, and if it exceeds 50% by weight, the drying is not good, the stickiness increases.
드라이 필름 솔더 레지스트  Dry film solder resist
발명의 다른 구현예에 따르면, 상술한 일 구현예의 광경화성 및 열경화성을 갖는 수지 조성물을 이용하여 형성된 DFSR이 제공된다. 이러한 DFSR은 카르복시기 (-COOH)와, 광경화 가능한 불포화 작용기를 갖는 산변성 을리고머; 폴리이미드계 수지; 2개 이상의 광경화 가능한 불포화 작용기를 갖는 광중합성 모노머; 및 열경화 가능한 작용기를 갖는 열경화성 바인더의 경화물을 포함하고, 표면에 약 2 내지 20/ιη, 혹은 약 3 내지 10//m, 혹은 약 4 내지 의 평균 조도 (Rz)를 갖는 미세 요철이 형성되어 있는 것일 수 있다. 이러한 DFSR에서, 상기 미세 요찰은 약 50nm 내지 5/m, 혹은 약 50nm 내지 5 , 흑은 약 lOOnm 내지 3/ , 혹은 약 200nm 내지 i의 평균 조도 (Ra)를 가질 수 있다. ,  According to another embodiment of the invention, there is provided a DFSR formed using the resin composition having the photocurable and thermosetting properties of the embodiment described above. Such DFSRs include carboxyl groups (-COOH) and acid-modified oligomers having photocurable unsaturated functional groups; Polyimide resin; Photopolymerizable monomers having two or more photocurable unsaturated functional groups; And a cured product of a thermosetting binder having a thermosetting functional group, wherein fine unevennesses having an average roughness (Rz) of about 2 to 20 / ιη, or about 3 to 10 // m, or about 4 to about are formed on the surface thereof. It may be. In such DFSR, the microrefractive point may have an average roughness Ra of about 50 nm to 5 / m, or about 50 nm to 5, black to about 100 nm to 3 /, or about 200 nm to i. ,
먼저, 이러한 DFSR의 형성 과정을 살피면 이하와 같다.  First, the process of forming such DFSR is as follows.
캐리어 필름 (Carrier Film)에 감광성 코팅 재료 (Photosensitive Coating Materials)로서 상기 일 구현예의 수지 조성물을 콤마 코터, 블레이드 코터, 립 코터, 로드 코터, 스퀴즈 코터, 리버스 코터, 트랜스퍼 롤 코터, 그라비아 코터 또는 분무 코터 등으로 도포한 후, 50 내지 130°C 온도의 오븐을 1 내지 30분간 통과시켜 건조시킨 다음, 이형 필름 (Release Film)을 적층함으로써, 아래로부터 캐리어 필름, 감광성 필름 (Photosensitive Film), 이형 필름으로 구성되는 드라이 필름을 제조할 수 있다. 상기 감광성 필름의 두께는 약 5 내지 100 IM 정도로 될 수 있다. 이때, 캐리어 필름으로는 폴리에틸렌테레프탈레이트 (PET), 폴리에스테르 필름, 폴리이미드 필름, 폴리아미드이미드 필름, 폴리프로필렌 필름, 폴리스티렌 필름 등의 플라스틱 필름을 사용할 수 있고, 이형 필름으로는 폴리에틸렌 (PE), 폴리테트라플루오로에틸렌 필름, 폴리프로필렌 필름, 표면 처리한 종이 등을 사용할 수 있으며, 이형필름을 박리할 때 감광성 필름과 캐리어 필름의 접착력보다 감광성 필름과 이형 필름의 접착력이 낮은 것이 바람직하다. 다음, 이형 필름을 벗긴 후, 회로가 형성된 기판 위에 감광성 필름층을 진공 라미네이터, 핫 롤 라미네이터, 진공 프레스 등을 이용하여 접합한다. The resin composition of the above embodiment is applied to a carrier film as a photosensitive coating material. A comma coater, a blade coater, a lip coater, a rod coater, a squeeze coater, a reverse coater, a transfer roll coater, a gravure coater, or a spray coater. After the coating, etc., it is dried by passing an oven at a temperature of 50 to 130 ° C for 1 to 30 minutes, and then laminating a release film to form a carrier film, a photosensitive film, a release film from below. The dry film comprised can be manufactured. The thickness of the photosensitive film may be about 5 to 100 IM. In this case, a plastic film such as polyethylene terephthalate (PET), a polyester film, a polyimide film, a polyamideimide film, a polypropylene film, a polystyrene film may be used as the carrier film, and polyethylene (PE), Polytetrafluoroethylene film, polypropylene film, surface treated paper, etc. When the release film is peeled off, the adhesive force between the photosensitive film and the release film is preferably lower than that of the photosensitive film and the carrier film. Next, after peeling off a release film, a photosensitive film layer is bonded together on the board | substrate with a circuit using a vacuum laminator, a hot roll laminator, a vacuum press, etc.
다음, 기재를 일정한 파장대를 갖는 광선 (UV 등)으로 노광 (Exposure)한다. 노광은 포토 마스크로 선택적으로 노광하거나, 또는 레이저 다이렉트 노광기로 직접 패턴 노광할 수도 있다. 캐리어 필름은 노광 후에 박리한다. 노광량은 도막 두께에 따라 다르나, 약 0 내지 1,000 mJ/orf가 바람직하다. 상기 노광을 진행하면, 예를 들어, 노광부에서는 광경화가 일어나 산변성 올리고머와, 광중합성 모노머 등의 가교 결합이 형성될 수 있고, 그 결과 이후의 현상에 의해 제거되지 않는 상태로 될 수 있다. 이에 비해, 비노광부는 카르복시기가 그대로 유지되어, 알칼리 현상 가능한 상태로 될 수 있다.  Next, the substrate is exposed to light having a constant wavelength band (UV, etc.). The exposure may be selectively exposed with a photo mask or may be directly pattern exposed with a laser direct exposure machine. The carrier film peels off after exposure. The exposure amount depends on the coating film thickness, but is preferably about 0 to 1,000 mJ / orf. When the exposure is carried out, for example, in the exposed portion, photocuring may occur to form a crosslinking bond between an acid-modified oligomer and a photopolymerizable monomer, and as a result, may not be removed by a subsequent phenomenon. In contrast, the non-exposed portion may be maintained in a carboxyl group as it is, and thus may be in an alkali developable state.
다음, 알칼리 용액 등을 이용하여 현상 (Development)한다. 알칼리 용액은 수산화칼륨, 수산화나트륨, 탄산나트륨, 탄산칼륨, 인산나트륨, 규산나트륨, 암모니아, 아민류 등의 알칼리 수용액을 사용할 수 있다. 이러한 현상에 의해, 비노광부의 산변성 올리고머 및 광중합성 모노머 등이 현상액에 녹아 제거될 수 있다.  Next, development is carried out using an alkaline solution or the like. The alkaline solution may be an aqueous alkali solution such as potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, ammonia, amines and the like. By this phenomenon, acid-modified oligomers, photopolymerizable monomers, and the like in the non-exposed part can be dissolved in the developer and removed.
그런데, 일 구현예의 수지 조성물은 상술한 폴리이미드계 수지를 포함한다ᅳ 이에 따라, 상기 현상 공정을 거치면, 비노광부의 수지 조성물 뿐만 아니라, 노광부의 폴리이미드계 수지가 선택적으로 제거될 수 있다. 따라서, 이미 상술한 바와 같이, 노광부 및 최종 형성된 DFSR 상에 미세한 요철이 형성될 수 있다.  However, the resin composition of one embodiment includes the above-described polyimide resin. Accordingly, through the developing step, not only the resin composition of the non-exposed part but also the polyimide resin of the exposed part may be selectively removed. Therefore, as described above, fine unevenness may be formed on the exposed portion and the finally formed DFSR.
그 결과, 상기 현상 공정을 거치게 되면, 도 1에 도시된 바와 같이, 표면에 미세 요철을 갖는 필름이 형성될 수 있다.  As a result, through the development process, as shown in Figure 1, a film having fine irregularities on the surface can be formed.
마지막으로, 가열 경화시킴으로써 (Post Cure), 감광성 필름으로부터 형성되는 DFSR을 최종 형성할 수 있다. 가열 경화온도는 100°C 이상이 적당하다. 이러한 가열 경화에 의해, 열경화성 바인더의 열경화 가능한 작용기와, 산변성 올리고머의 카르복시기가 가교 결합되어 가교 구조를 이를 수 있다. 또, 이러한 가열 경화까지 거친 결과, 상기 현상 공정 후에 폴리이미드계 수지로 인해 표면에 형성된 미세 요철이 반영되어, 표면에, 약Finally, by heat curing (Post Cure), the DFSR formed from the photosensitive film can be finally formed. Heat curing temperature is more than 100 ° C. By such heat curing, thermosetting of a thermosetting binder is possible The functional group and the carboxyl group of the acid-modified oligomer may crosslink to form a crosslinked structure. Moreover, as a result of this heat-hardening, the fine unevenness | corrugation formed in the surface by the polyimide resin after the said image development process is reflected,
2 내지 20 , 혹은 약 3 내지 lO/m, 흑은 약 4 내지 8/m의 평균 조도 (Rz), 또는 약 50nm 내지 5/ΛΠ, 혹은 약 50nm 내자 5/im, 혹은 약 lOOnm 내지 3//m, 흑은 약 200nm 내지 2卿의 평균 조도 (Ra)를 갖는 미세 요철이 형성된 DFSR이 최종 형성될 수 있다. 2 to 20, or about 3 to lO / m, black is about 4 to 8 / m average roughness (Rz), or about 50nm to 5 / ΛΠ, or about 50nm to 5 / im, or about lOOnm to 3 // m, black may be finally formed DFSR with fine irregularities having an average roughness (Ra) of about 200 nm to 2 GPa.
상술한 방법 등을 통해, DFSR 및 이를 포함하는 인쇄회로기판, 예를 들어, 반도체 소자의 패키지 기판이 제공될 수 있으며, 상기 DFSR은 소정의 미세 요철이 표면에 형성됨에 따라, 후속 공정 재료 등과 접촉 표면적이 증가하여 우수한 접착력을 나타낼 수 있다. 또, 상기 DFSR은 광경화 및 열경화를 거침에 따라, 상술한 산변성 을리고머; 광중합성 모노머; 및 열경화 가능한 작용기를 갖는 열경화성 바인더의 경화물을 포함할 수 있다..  Through the above-described method, a DFSR and a printed circuit board including the same, for example, a package substrate of a semiconductor device may be provided, and the DFSR contacts a subsequent process material and the like as predetermined fine irregularities are formed on a surface thereof. The surface area can be increased to show good adhesion. In addition, the DFSR is the acid-modified oligomer described above as the photocuring and thermal curing; Photopolymerizable monomers; And a cured product of a thermosetting binder having a thermosetting functional group.
보다 구체적으로, 상기 경화물에서, 상기 산변성 올리고머의 카르복시기는 열경화에 의해, 열경화성 반웅기의 열경화 가능한 작용기와 가교 결합될 수 있고, 상기 산변성 을리고머의 광경화 가능한 불포화 작용기는 광경화에 의해 광중합성 모노머에 포함된 불포화 작용기와 가교 결합되어 가교 구조를 이를 수 있다. 또,. 이미 상술한 바와 같이, 상기 폴리이미드계 수지가 DFSR 형성 과정 중에 제거됨에 따라, DFSR의 표면에는 상술한 미세 요철이 형성될 수 있다. More specifically, in the cured product, the carboxyl group of the acid-modified oligomer may be cross-linked with the thermosetting functional group of the thermosetting semi-unggi group by thermosetting, and the photo-curable unsaturated functional group of the acid-modifying oligomer The crosslinking may be carried out by crosslinking with the unsaturated functional groups included in the photopolymerizable monomer. Again . As described above, as the polyimide-based resin is removed during the DFSR forming process, the above-described fine unevenness may be formed on the surface of the DFSR.
이와 같이, 별도의 플라즈마 처리 등을 생략하면서도, 표면에 미세 요철이 형성된 DFSR의 형성이 가능해 짐에 따라, 반도체 패키지 기판 등에 적용시 후속 공정 재료와의 우수한 접착력을 나타내는 DFSR의 제공이 가능해 지면서도, 플라즈마 처리 등에 의한 DFSR의 물성 저하를 억제하여 우수한 물성을 발현 및 유지하는 DFSR의 제공이 가능해 진다.  As such, it is possible to form DFSR having fine unevenness on the surface while omitting a separate plasma treatment and the like, thereby providing DFSR that exhibits excellent adhesion to subsequent process materials when applied to a semiconductor package substrate. It is possible to provide a DFSR which expresses and maintains excellent physical properties by suppressing a decrease in physical properties of the DFSR by plasma treatment or the like.
부가하여, 상기 DFSR은 광경화에 참여하고 남은 소량의 광개시제를 경화물 내에 분산된 상태로 더 포함할 수 있다.  In addition, the DFSR may further include a small amount of photoinitiator remaining in the photocuring in a state of being dispersed in the cured product.
[발명의 효과]  [Effects of the Invention]
본 발명에 따르면, 플라즈마 처리 공정 등 별도의 처리 공정 없이도 표면에 미세 요철을 갖는 DFSR의 형성을 가능케 하는 광경화성 및 열경화성을 갖는 수지 조성물 및 DFSR이 제공될 수 있다. 이렇게 형성된 DFSR은 반도체 패키지 기판 등에 적용되었을 때, 미세 요철에 의해 후속 공정 재료와의 우수한 접착력을 나타낼 수 있으면서도, 플라즈마 처리 공정 등의 별도의 처리 공정 생략 하에 보다 단순화되고 경제적인 공정으로 형성될 수 있다. 또, 이러한 DFSR은 플라즈마 처리 등에 따른 물성 저하가 억제되어 우수한쎄반 물성을 발현 및 유지할 수 있다. According to the present invention, even without a separate treatment process such as plasma treatment A resin composition and DFSR having photocurable and thermosetting properties which enable the formation of DFSR having fine unevenness on the surface can be provided. The DFSR thus formed can exhibit excellent adhesion to subsequent process materials due to fine concavities and convexities when applied to semiconductor package substrates, and can be formed in a simpler and more economical process by eliminating a separate treatment process such as a plasma treatment process. . In addition, such DFSR can suppress the deterioration of physical properties due to the plasma treatment and the like and can express and maintain excellent seban physical properties.
【도면의 간단한 설명】  [Brief Description of Drawings]
도 1은 발명의 일 구현예에 따른 광경화성 및 열경화성을 갖는 수지 조성물을 적용하여, 미세 요철을 갖는 DFSR을 형성하는 과정을 개략적으로 나타낸 모식도이다.  1 is a schematic diagram showing a process of forming a DFSR having fine unevenness by applying a photocurable and thermosetting resin composition according to an embodiment of the invention.
도 2 및 3은 실시예 1 및 2에서 형성된 DFSR의 표면상태에 대한 FE- SEM사진이다.  2 and 3 are FE-SEM images of the surface state of the DFSR formed in Examples 1 and 2.
【발명을 실시하기 위한 구체적인 내용】  [Specific contents to carry out invention]
이하, 발명의 구체적인 실시예를 통해, 발명의 작용 및 효과를 보다 상술하기로 한다. 다만, 이러한 실시예는 발명의 예시로 제시된 것에 불과하며, 이에 의해 발명의 권리범위가 정해지는 것은 아니다.  Hereinafter, the operation and effects of the invention will be described in more detail with reference to specific embodiments of the invention. However, these embodiments are only presented as an example of the invention, whereby the scope of the invention is not determined.
<실시예 > <Example>
실시예 1  Example 1
(1) 폴리이미드계 수지의 제조  (1) Preparation of Polyimide Resin
폴리이미드계 수지를 합성하기 위해서, 중합 모노머로서 QDA (4,4 diaminodiphenyl ether)를 용제인 에 20 중량 %로 용해 시킨 후, ODA와 몰비율 1:1로 PMDA(Pyromemtic dian ydride) 를 넣고, ice bath 분위기에서 24시간 교반하여 중량 평균 분자량이 31500인 PAA (Poly amic acid) 를 얻었다.  To synthesize the polyimide resin, 20 wt% of QDA (4,4 diaminodiphenyl ether) was dissolved in a solvent as a polymerization monomer, and then PMDA (Pyromemtic dian ydride) was added at an ODA and molar ratio of 1: 1. It stirred for 24 hours in bath atmosphere, and obtained PAA (Poly amic acid) which has a weight average molecular weight of 31500.
(2) 드라이 필름 솔더 레지스트의 제조  (2) Preparation of Dry Film Solder Resist
위에서 얻어진 PAA (플리아믹산) 형태의 폴리이미드계 수지를 11.5 중량0 /0, 산변성 올리고머로서 일본화약의 ZFR-1122를 30 중량 %, 광중합성 모노머로서 다관능 에폭사 아크릴레이트 (일본화약의 DPEA-12) 10 중량0 /。, 광개시제로서 Darocur TPO (치바스페셜리티케미컬사)를 3 중량0 /0, 열경화성 바인더로 YDCN-500-80P (국도화학사) 16중량 %, 열경화 촉매로서 2- 페닐이미다졸을 1 중량0 /0, 필러로서 B-30 (사카이 케미컬사)를 15중량 %, 첨가제로서 BYK사의 BYK-333을 0.5 중량0 /0, 용제로서 DMF를 13중량 %를 사용하여 각 성분을 배합하고 교반한 후 3를밀 장비로 필러를 분산시켜 광경화성 및 열경화성을갖는 수지 조성물을 제조하였다. The above as PAA (replicon amic acid) 30% by weight of ZFR-1122 of Nippon Kayaku the polyimide resin in the form of 11.5 weight 0/0, as an acid-modified oligomer, a photopolymerizable monomer resulting in functional epoxy yarn acrylate (Nippon Kayaku DPEA-12) 10 weight 0 /。, As photoinitiator Darocur TPO (Ciba Specialty Chemicals Inc.) 3 parts by weight 0/0, YDCN-500-80P (Kukdo Chemical Co.) as a thermosetting binder, 16 wt%, the 2-phenyl imidazole as a thermal curing catalyst, 1 parts by weight 0/0, to a 15% by weight, an additive for B-30 (Sakai Chemical Co., Ltd.) as a filler using 13% by weight and DMF of BYK-333's BYK 0.5 weight 0/0, as a solvent, and then blending the components and stirring for 3 reulmil equipment The filler was dispersed to prepare a resin composition having photocurability and thermosetting property.
제조된 수지 조성물을 콤마 코터를 이용하여 캐리어 필름으로 사용되는 PET에 도포한 후, 75°C의 오븐을 8분간 통과시켜 건조시킨 다음, 이형 필름으로서 PE를 적층함으로써, 아래로부터 캐리어 필름, 감광성 필름, 이형 필름으로 구성되는 드라이 필름을 제조하였다. After applying the prepared resin composition to the PET used as a carrier film using a comma coater, and then dried by passing through an oven at 75 ° C for 8 minutes, by laminating PE as a release film, carrier film, photosensitive film from below And the dry film comprised from the release film was manufactured.
(3) 인쇄 회로 기판의 제조  (3) manufacture of printed circuit boards
상기 제조된 드라이 필름의 이형 필름을 벗긴 후, 회로가 형성된 기판 위에 감광성 필름층을 진공라미네이터 (메이끼 세이사꾸쇼사 제조 MV LP-500)로 진공 적층한 다음, 365nm 파장대의 UV로 400 mJ/cm2로 노광한 후, PET 필름을 제거하였다. 이러한 결과물을 교반하고 있는 311:의 Na2C03 1%의 알칼리 용액에 60초간 담근 후, 현상하여 150°C에서 1 시간 동안 가열 경화시킴으로써,드라이 필름 솔더 레지스트 (DFSR)를 포함하는 인쇄회로기판을 완성하였다. After peeling off the release film of the manufactured dry film, the photosensitive film layer was vacuum laminated with a vacuum laminator (MV LP-500 manufactured by Meisei Seisakusho Co., Ltd.) on a substrate on which a circuit was formed, and then 400 mJ / After exposing to cm 2 , the PET film was removed. Subsequently, the resultant was immersed in 311: Na 2 CO 3 1% alkaline solution for stirring for 60 seconds, and then developed and heat-cured at 150 ° C. for 1 hour. The printed circuit board comprising the dry film solder resist (DFSR). Was completed.
한편, 상기 회로가 형성된 기판은 두께가 O.lmin, 동박 두께가 12/ΛΠ인 LG화학의 동박적층판 LG-T-500GA를 가로 5cm, 세로 5cm의 기판으로 잘라, 화학적 에칭으로 동박 표면에 미세 조도를 형성한 것을 사용하였다. 실시예 2  Meanwhile, the substrate on which the circuit is formed is cut into LG Chem's copper-clad laminate LG-T-500GA having a thickness of 0.1 l and a copper thickness of 12 / ΛΠ into a substrate having a width of 5 cm and a length of 5 cm. Was used. Example 2
(1) 플리이미드계 수지의 제조  (1) Preparation of Plyimide Resin
폴리이미드계 수지를 합성하기 위해서, 중합 모노머로서 ODA (4,4 diaminodiphenyl ether)를 용제인 iF 에 20 중량 %로 용해 시킨 후, ODA와 몰비율 1:1로 ODPA (4,4'-oxydiphthalic anhydride) 를 넣고, ice bath 분위기에서 24시간 교반하여 중량 평균 분자량이 33000인 PAA (Poly amic acid) 를 얻었다.  In order to synthesize a polyimide resin, ODA (4,4 diaminodiphenyl ether) was dissolved as a polymerization monomer in 20 wt% of iF as a solvent, and then ODPA (4,4'-oxydiphthalic anhydride) in a molar ratio of 1: 1 with ODA. ), And stirred for 24 hours in an ice bath atmosphere to obtain PAA (Poly amic acid) having a weight average molecular weight of 33000.
(2)드라이 필름 솔더 레지스트의 제조 위에서 얻어진 PAA (폴리아믹산) 형태의 폴리이미드계 수지를 사용하고, 산변성 을리고머로서 일본화약의 ZFR-1121을 30 중량 %을 사용한 점을 제외하고 실시예 1과 동일한 방법으로 광경화성 및 열경화성을 갖는 수지 조성물을 제조하였다. (2) manufacture of dry film solder resist Photocurable and thermosetting in the same manner as in Example 1, except for using a polyimide resin in the form of PAA (polyamic acid) obtained above and using 30% by weight of ZFR-1121 of Nippon Gunpowder as an acid-modified oligomer. A resin composition having was prepared.
상기 제조된 수지 조성물을 콤마 코터를 이용하여 캐리어 필름으로 사용되는 PET에 도포한 후, 75°C의 오본을 8분간 통과시켜 건조시킨 다음, 이형 필름으로서 PE를 적층함으로써, 아래로부터 캐리어 필름, 감광성 필름, 이형 필름으로 구성되는 드라이 필름을 제조하였다 The resin composition prepared above was applied to PET used as a carrier film using a comma coater, and then dried by passing an obon at 75 ° C. for 8 minutes, and then laminated with PE as a release film, thereby carrying a carrier film and a photosensitive material. The dry film which consists of a film and a release film was manufactured.
(3) 인쇄회로 기판의 제조  (3) Manufacture of printed circuit board
상기 제조된 드라이 필름을 사용한 점을 제외하고 실시예 1과 동일한 방법으로 DFSR을 포함하는 인쇄회로기판을 완성하였다.  A printed circuit board including the DFSR was completed in the same manner as in Example 1 except for using the manufactured dry film.
<비교예 > Comparative Example
비교예 1  Comparative Example 1
상기 실시예 1에서 폴리이미드계 수지를 사용한 대신에 산변성 올리고머인 ZFR-1122 를 41.5 중량 %를 사용한 것 외에는 실시예 1 에서와 동일한 방법으로 DFSR을 포함하는 포함하는 인쇄희로기판을 완성하였다  Instead of using the polyimide-based resin in Example 1, except that 41.5% by weight of acid-modified oligomer ZFR-1122 was used in the same manner as in Example 1 to complete a printed thin substrate containing DFSR.
<시험예: 인쇄회로 기판용보호필름의 물성 평가 > <Test Example: Evaluation of Properties of Protective Film for Printed Circuit Boards>
실시예 1, 2 및 비교예 1에서 제조한 인쇄회로 기판용 드라이 필름 솔더 레지스트에 대하여 아래방법과 같이 표면조도, 현상성 및 내열 신뢰성을 평가하여 다.  The surface roughness, developability, and heat resistance reliability of the dry film solder resist for printed circuit boards prepared in Examples 1 and 2 and Comparative Example 1 were evaluated as follows.
실험예 1: 표면 조도  Experimental Example 1: Surface Roughness
실시예 1, 2 및 비교예 1에서 얻어진 DFSR 의 이형 필름을 벗기고 동박 적층판 위에 위치시킨 후에, 진공 라미네이터로 20초간 진공 처리하고, 40 초간 65°C의 온도, 0.7Mpa의 압력으로 라미네이션 (lamination)하였다. After peeling off the release film of the DFSR obtained in Examples 1 and 2 and Comparative Example 1 and placing it on the copper foil laminate, vacuum treatment was performed with a vacuum laminator for 20 seconds, lamination at a temperature of 65 ° C. and a pressure of 0.7 Mpa for 40 seconds. It was.
그리고, 라미네이션된 DFSR 위에 네가티브 방식으로 그려진 쿼츠 (quartz) 포토마스크를 놓고 400mJ/cin2의 UV(i band)로 노광한 후, 캐리어 필름으로 사용되는 PET 필름을 제거하고, 30°C의 Na2C03 1%의 알칼리 용액에 60초간 현상한 후 수세하여 건조시켰다. Then, a negatively drawn quartz photomask was placed on the laminated DFSR, exposed to UV (i band) of 400 mJ / cin 2 , and then the PET film used as a carrier film was removed, and Na 2 at 30 ° C. C0 3 1% Alkali The solution was developed for 60 seconds, washed with water and dried.
건조시킨 샘플을 FE-SEM (Hitachi S-4800) 을 이용하여 표면상태를 관찰하였고, 실시예 1과 비교예 1의 경우 표면조도의 차이점을 정확히 측정하기 위해 OP (Optical profiler, 나노시스템 社 nanoview)를 이용하여 표면조도 값 Rz 및 Ra의 값을 비교하여 측정하였다. 실시예 1, 2의 표면상태에 대한 FE-SEM 사진은 도 2 및 3 에 도시된 바와 같으며, 실시예 1, 2및 비교예 1에 대해 OP를 이용해 측정한 이미지와, Rz 및 Ra 값은 하기 표 1에 정리된 바와 같았다. 실험예 2: 현상성 평가 실시예 1, 2 및 비교예 1에서 얻어진 DFSR 의 이형 필름을 벗기고 동박 적층판 위에 위치시킨 후에, 진공 라미네이터로 20초간 진공 처리하고, 40 초간 65°C의 온도, O Mpa의 압력으로 라미네이션 (lamination)하였다. The dried samples were observed on the surface state using FE-SEM (Hitachi S-4800), and in Example 1 and Comparative Example 1 in order to accurately measure the difference in the surface roughness OP (Optical profiler, nanoview, Inc.) It was measured by comparing the values of the surface roughness values Rz and Ra using. FE-SEM photographs of the surface conditions of Examples 1 and 2 are as shown in Figs. 2 and 3, and the images measured using OP for Examples 1, 2 and Comparative Example 1, and Rz and Ra values It was as summarized in Table 1 below. Experimental Example 2: Evaluation of developability After peeling off the release film of the DFSR obtained in Examples 1 and 2 and Comparative Example 1 and placing it on the copper foil laminate, vacuum treatment was performed with a vacuum laminator for 20 seconds, a temperature of 65 ° C. for 40 seconds, and O Mpa. Lamination was carried out under the pressure of.
그리고, 라미네이션된 DFSR 위에 네가티브 방식으로 그려진 쿼츠 (quartz) 포토마스크를 놓고 400mJ/cin2의 UV(i band)로 노광한 후, 캐리어 필름으로 사용되는 PET 필름을 제거하고, 30°C의 Na2C03 1%의 알칼리 용액에 60초간 현상한후 수세하여 건조시켰다. Then, a negatively drawn quartz photomask was placed on the laminated DFSR, exposed to UV (i band) of 400 mJ / cin 2 , and then the PET film used as a carrier film was removed, and Na 2 at 30 ° C. After developing for 60 seconds in an alkaline solution of C0 3 1%, it was washed with water and dried.
이러한 현상성 평가 기준 및 결과는 하기 표 2에 정리된 바와 같았다.  These developability evaluation criteria and results were summarized in Table 2 below.
'  '
실험예 3: 내열 신뢰성 측정 방법  Experimental Example 3: Method for Measuring Thermal Resistance
인쇄기판용 보호필름을 CCL에 lamination하여 광경화, 열경화 및 후광경화를 거쳐 완성한 후 150mm*130mm 로 잘랐다. 납조 (전기적으로 가열되고 온도 조절이 가능하며 테스트를 위해 최소 2.25kg 이상의 납이 들어 있는 전기로)에 288°C의 온도를 setting 하고 테스트 시편을 납조 위에 film이 있는 면이 위로 가게 띄웠다. 테스트 시편이 외관적으로 필름의 박리나 변형이 있는지 검사하였다. The protective film for printed circuit board was laminated on CCL, and finished through photocuring, thermal curing and back curing, and then cut to 150mm * 130mm. A temperature of 288 ° C was set in the bath (electrically heated, temperature-controlled and at least 2.25 kg of lead for testing), and the test specimen was placed with the film on top of the bath. The test specimens were inspected for visible peeling or deformation of the film.
이러한 내열 신뢰성 평가 기준 및 결과는 하기 표 2에 정리된 바와 같았다. [표 1] 실험예 1 의 Rz 및 Ra측정결과 These heat reliability evaluation criteria and results were summarized in Table 2 below. Table 1 Rz and Ra measurement results of Experimental Example 1
Figure imgf000026_0001
상기 표 1을 참고하면, 실시예 1 및 2의 DFSR은 폴리이미드계 수지를 포함한 수지 조성물로부터 형성됨에 따라, 표면에 약 6.01皿의 평균 조도 (Rz) 및 약 335.98nm의 평균 조도 (Ra)와, 약 5.l /m의 평균 조도 (Rz) 및 약 317.70nm의 평균 조도 (Ra)를 갖는 미세한 요철이 형성된 것으로 확인되었다.
Figure imgf000026_0001
Referring to Table 1 above, the DFSR of Examples 1 and 2 is formed from a resin composition comprising a polyimide resin, so that the surface has an average roughness (Rz) of about 6.01 kPa and about 3 3 5 . Fine unevenness was formed with an average roughness (Ra) of 98 nm, an average roughness (Rz) of about 5.0 l / m, and an average roughness (Ra) of about 317.70 nm.
이에 비해, 비교예 1의 DFSR은 플라즈마 처리 등 별도의 처리 없이는 표면에 미세한 요철이 형성되지 않고, 약 0.94 의 평균 조도 (Rz) 및 약 48.52nm의 평균 조도 (Ra)를 갖는데 불과한 것으로 확인되었다.  In contrast, it was confirmed that the DFSR of Comparative Example 1 did not form fine irregularities on the surface without a separate treatment such as plasma treatment, and had only an average roughness (Rz) of about 0.94 and an average roughness (Ra) of about 48.52 nm.
[표 2] 실험예 2 및 3의 측정결과  Table 2 Measurement Results of Experimental Examples 2 and 3
Figure imgf000027_0001
상기 표 2를 참고하면, 실시예의 DFSR은 표면에 미세한 요철이 형성되어 있으면서도, 미세 요철이 형성되지 않은 비교예에 준하는 우수한 내열 신뢰성 및 현상성을 나타냄이 확인되었다. 따라서, 실시예의 DFSR은 우수한 접착력을 나타낼 수 있으면서도 DFSR로서의 우수한 물성을 나타낼 수 있다.
Figure imgf000027_0001
Referring to Table 2, it was confirmed that the DFSR of the embodiment exhibits excellent heat resistance and developability according to the comparative example in which fine irregularities are not formed on the surface, but fine irregularities are not formed. Therefore, the DFSR of the embodiment can exhibit excellent adhesion as well as excellent physical properties as DFSR.

Claims

【특허청구범위】 [Patent Claims]
【청구항 1】  [Claim 1]
카르복시기 (-COOH)와, 광경화 가능한 불포화 작용기를 갖는 산변성 을리고머;  Acid-modified oligomers having a carboxyl group (—COOH) and a photocurable unsaturated functional group;
폴리이미드계 수지;  Polyimide resin;
2개 이상의 광경화 가능한 불포화 작용기를 갖는 광중합성 모노머; 열경화 가능한 작용기를 갖는 열경화성 바인더; 및  Photopolymerizable monomers having two or more photocurable unsaturated functional groups; Thermosetting binders having thermosetting functional groups; And
광개시제를 포함하는 광경화성 및 열경화성을 갖는 수지 조성물.  Resin composition which has photocurability and thermosetting containing photoinitiator.
【청구항 2】 [Claim 2]
제 1 항에 있어서, 상기 산변성 을리고머의 광경화 가능한 작용기는 아크릴레이트기인 수지 조성물.  The resin composition according to claim 1, wherein the photocurable functional group of the acid-modified oligomer is an acrylate group.
【청구항 3】 [Claim 3]
제 1 항에 있어서, 상기 산변성 올리고머는 카르복시기를 갖는 중합 가능한 모노머와, 아크릴레이트계 화합물을 포함한 모노머의 공중합체를 포함하는 수지 조성물.  The resin composition according to claim 1, wherein the acid-modified oligomer comprises a copolymer of a polymerizable monomer having a carboxyl group and a monomer including an acrylate compound.
【청구항 4】 [Claim 4]
제 1 항쎄 있어서, 상기 산변성 을리고머는 수지 조성물의 전체 중량을 기준으로 15 내지 75 중량0 /0로 포함되는 수지 조성물. First hangsse in the resin composition contained the acid modified hitting with 15 to 75 parts by weight 0/0, based on the total weight of the resin composition dimmer.
【청구항 5】 [Claim 5]
제 1 항에 있어서, 상기 산변성 올리고머의 산가는 40 내지 120 mgKOH/g인 수지 조성물.  The resin composition according to claim 1, wherein the acid value of the acid-modified oligomer is 40 to 120 mgKOH / g.
【청구항 6】 [Claim 6]
제 1 항에 있어서, 상기 폴리이미드계 수지는 10000 내지 100000 의 중량평균분자량을 갖는 폴리이미드 수지, 이의 전구체 또는 유도체를 포함하는 수지 조성물. The method of claim 1, wherein the polyimide-based resin is a polyimide resin, a precursor or derivative thereof having a weight average molecular weight of 10000 to 100000 Resin composition containing.
【청구항 7】 [Claim 7]
제 6 항에 있어서, 상기 폴리 이미드 수지의 전구체 또는 유도체는 폴리아믹산인 수지 조성물.  The resin composition according to claim 6, wherein the precursor or derivative of the polyimide resin is a polyamic acid.
【청구항 8】 [Claim 8]
제 1 항에 있어서 , 상기 폴리 이미드계 수지는 수지 조성물의 전체 중량을 기준으로 1 내지 30 중량0 /0로 포함되는 수지 조성물. The method of claim 1, wherein the poly-imide resin is a resin composition comprising, based on the total weight of the resin composition to 1 to 30 parts by weight 0/0.
【청구항 9】 [Claim 9]
제 1 항에 있어서 , 상기 광증합성 모노머는 분자 내에 2개 이상의 (메트)아크릴로일기를 갖는 다관능 (메트)아크릴레이트계 화합물을 포함하는 수지 조성물.  The resin composition according to claim 1, wherein the photopolymerizable monomer comprises a polyfunctional (meth) acrylate compound having two or more (meth) acryloyl groups in a molecule.
【청구항 10】 [Claim 10]
제 1 항에 있어서, 상기 광중합성 모노머는 히드록시기 함유 다관능 아크릴레이트계 화합물; 수용성 다관능 아크릴레이트계 화합물; 다가 알코을의 다관능 플리에스테르아크릴레이트계 화합물; 다관능 알코을 또는 다가 페놀의 에 틸렌옥시드 부가물의 아크릴레이트계 화합물; 다관능 알코올 또는 다가 페놀의 프로필렌옥시드 부가물의 아크릴레이트계 화합물; 다관능 또는 단관능 폴리우레탄아크릴레이트계 화합물; 에폭시아크릴레이트계 화합물; 카프로락톤 변성의 아크릴레이트계 화합물 및 감광성 (메트)아크릴레이트계 화합물로 이루어진 군에서 선택된 1종 이상의 다관능 (메트)아크릴레이트계 화합물을 포함하는 수지 조성물.  According to claim 1, wherein the photopolymerizable monomer is a hydroxyl group-containing polyfunctional acrylate compound; Water-soluble polyfunctional acrylate compounds; Polyfunctional polyester acrylate compound of polyhydric alcohol; Acrylate-based compounds of ethylene oxide adducts of polyfunctional alcohols or polyhydric phenols; Acrylate compounds of propylene oxide adducts of polyfunctional alcohols or polyhydric phenols; Polyfunctional or monofunctional polyurethane acrylate compounds; Epoxy acrylate compounds; A resin composition comprising at least one polyfunctional (meth) acrylate compound selected from the group consisting of caprolactone-modified acrylate compounds and photosensitive (meth) acrylate compounds.
【청구항 1 1】 [Claim 1 11]
제 1 항에 있어서 , 상기 광중합성 모노머는 수지 조성물의 전체 중량을 기준으로 5 내지 30 중량 %로 포함되는 수지 조성물. The resin composition of claim 1, wherein the photopolymerizable monomer is included in an amount of 5 to 30 wt% based on the total weight of the resin composition.
【청구항 12】 [Claim 12]
제 1 항에 있어서, 상기 광개시 제는 벤조인계 화합물, 아세토페논계 화합물, 안트라퀴논계 화합물, 티오크산톤 화합물, 케탈 화합물, 벤조페논계 화합물, α -아미노아세토페논 화합물, 아실포스핀옥사이드 화합물, 옥심 에스테르 화합물, 비 이미다졸계 화합물 및 트리아진계 화합물로 이루어진 군에서 선택된 1종 이상을 포함하는 수지 조성물.  The method of claim 1, wherein the photoinitiator is a benzoin compound, acetophenone compound, anthraquinone compound, thioxanthone compound, ketal compound, benzophenone compound, α-aminoacetophenone compound, acylphosphine oxide compound , A resin composition comprising at least one selected from the group consisting of an oxime ester compound, a non-imidazole compound and a triazine compound.
【청구항 13】 [Claim 13]
제 1 항에 있어서 , 상기 광개시제는 수지 조성물의 전체 중량을 기준으로 0.5 내지 20 중량 %로 포함되는 수지 조성물.  The resin composition of claim 1, wherein the photoinitiator is included in an amount of 0.5 to 20 wt% based on the total weight of the resin composition.
【청구항 14】 [Claim 14]
제 1 항에 있어서, 상기 열경화 가능한 작용기는 에폭시 기 , 옥세타닐기 , 환상 에 테르기 및 환상 티오 에 테르기로 이루어진 군에서 선택된 1종 이상인 수지 조성물.  The resin composition according to claim 1, wherein the thermosetting functional group is at least one member selected from the group consisting of an epoxy group, an oxetanyl group, a cyclic ether group, and a cyclic thio ether group.
【청구항 15】 [Claim 15]
제 1 항에 있어서, 상기 열경화성 바인더는 상기 산변성 올리고머 의 카르복시기 1 당량에 대하여 0.8 내지 2.0 당량에 대웅하는 함량으로 포함되는 수지 조성물.  The resin composition according to claim 1, wherein the thermosetting binder is contained in an amount of 0.8 to 2.0 equivalents based on 1 equivalent of the carboxyl group of the acid-modified oligomer.
【청구항 16】 [Claim 16]
제 1 항에 있어서, 용제; 및 열경화성 바인더 촉매, 필러, 안료 및 첨가제로 이루어진 군에서 선택된 1종 이상을 더 포함하는 수지 조성물.  A solvent according to claim 1; And at least one selected from the group consisting of a thermosetting binder catalyst, a filler, a pigment, and an additive.
[청구항 17】 [Claim 17]
카르복시기 (-COOH)와, 광경화 가능한 불포화 작용기를 갖는 산변성 을리고머 ; 2개 이상의 광경화 가능한 불포화 작용기를 갖는 광중합성 모노머 ; 열경화 가능한 작용기를 갖는 열경화성 바인더 의 경화물을 포함하고, 표면에 2 내지 20 의 평균 조도 (Rz)를 갖는 미세 요철이 형성 되어 있는 드라이 필름 솔더 레지스트. Acid-modified oligomers having a carboxyl group (-COOH) and a photocurable unsaturated functional group; Photopolymerizable monomers having two or more photocurable unsaturated functional groups; A dry film soldering resist comprising a cured product of a thermosetting binder having a thermosetting functional group, wherein fine unevenness having an average roughness (Rz) of 2 to 20 is formed on a surface thereof.
【청구항 18】 , 【Claim 18】,
제 17 항에 있어서 , 상기 경화물은, 상기 산변성 을리고머 의 카르복시기와, 상기 열경화 가능한 작용기가 가교 결합된 가교 구조; 및  The cured product of claim 17, wherein the cured product comprises: a crosslinked structure in which the carboxyl group of the acid-modified oligomer and the thermosetting functional group are crosslinked; And
상기 산변성 올리고머 및 광증합성 모노머 의 불포화 작용기가 서로 가교 결합된 가교 구조를 포함하는 드라이 필름 솔더 레지스트.  Dry film soldering resist comprising a cross-linked structure cross-linked unsaturated functional groups of the acid-modified oligomer and photopolymerizable monomer.
【청구항 19] [Claim 19]
제 17 항에 있어서, 상기 경화물 내에 분산되어 있는 광개시제를 더 포함하는 드라이 필름 솔더 레지스트.  18. The dry film solder resist of claim 17, further comprising a photoinitiator dispersed in said cured product.
【청구항 20】 [Claim 20]
제 Π 항에 있어서, 상기 미세 요철은 50nm 내지 5/皿의 평균 조도 (Ra)를 갖는 드라이 필름 솔더 레지스트.  The dry film soldering resist of claim Π, wherein the fine unevenness has an average roughness Ra of 50 nm to 5 / dl.
【청구항 21】 [Claim 21]
제 17 항에 있어서 , 반도체 소자의 패키지 기판의 제조에 사용되는 드라이 필름 솔더 레지스트.  18. The dry film solder resist according to claim 17, which is used for the manufacture of a package substrate of a semiconductor device.
PCT/KR2013/006747 2012-08-01 2013-07-26 Resin composition having photocurable property and thermosetting property, and dry film solder resist WO2014021590A1 (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016012002A (en) * 2014-06-27 2016-01-21 日立化成株式会社 Cured product of photosensitive resin composition, photosensitive resin composition used therefor, method for manufacturing substrate for mounting semiconductor device, and method for manufacturing semiconductor device
CN114641145A (en) * 2020-12-16 2022-06-17 深南电路股份有限公司 Circuit board and manufacturing method of circuit board solder mask
TWI780648B (en) * 2020-04-03 2022-10-11 日商旭化成股份有限公司 Photosensitive element, and method of forming resist pattern

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006220886A (en) * 2005-02-10 2006-08-24 Showa Denko Kk Photosensitive dry film for printed wiring board protective film, method for manufacturing the same, and printed wiring board
KR20070039151A (en) * 2002-12-13 2007-04-11 가부시키가이샤 가네카 Thermoplastic polyimide resin film, multilayer body and method for manufacturing printed wiring board composed of same
JP2008265069A (en) * 2007-04-18 2008-11-06 Kaneka Corp Insulating adhesion sheet, laminate, and printed wiring board
KR101010036B1 (en) * 2009-08-28 2011-01-21 주식회사 엘지화학 New polyamic acid, polyimide, photosensitive resin composition comprising the same and dry film manufactured by the same
KR20110106237A (en) * 2010-03-22 2011-09-28 주식회사 엘지화학 Photo-curable and thermo-curable resin composition, and dry film solder resist

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070039151A (en) * 2002-12-13 2007-04-11 가부시키가이샤 가네카 Thermoplastic polyimide resin film, multilayer body and method for manufacturing printed wiring board composed of same
JP2006220886A (en) * 2005-02-10 2006-08-24 Showa Denko Kk Photosensitive dry film for printed wiring board protective film, method for manufacturing the same, and printed wiring board
JP2008265069A (en) * 2007-04-18 2008-11-06 Kaneka Corp Insulating adhesion sheet, laminate, and printed wiring board
KR101010036B1 (en) * 2009-08-28 2011-01-21 주식회사 엘지화학 New polyamic acid, polyimide, photosensitive resin composition comprising the same and dry film manufactured by the same
KR20110106237A (en) * 2010-03-22 2011-09-28 주식회사 엘지화학 Photo-curable and thermo-curable resin composition, and dry film solder resist

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016012002A (en) * 2014-06-27 2016-01-21 日立化成株式会社 Cured product of photosensitive resin composition, photosensitive resin composition used therefor, method for manufacturing substrate for mounting semiconductor device, and method for manufacturing semiconductor device
TWI780648B (en) * 2020-04-03 2022-10-11 日商旭化成股份有限公司 Photosensitive element, and method of forming resist pattern
CN114641145A (en) * 2020-12-16 2022-06-17 深南电路股份有限公司 Circuit board and manufacturing method of circuit board solder mask

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