WO2014015545A1 - 坚固型双压电体并排推动的三摩擦力步进器 - Google Patents

坚固型双压电体并排推动的三摩擦力步进器 Download PDF

Info

Publication number
WO2014015545A1
WO2014015545A1 PCT/CN2012/080143 CN2012080143W WO2014015545A1 WO 2014015545 A1 WO2014015545 A1 WO 2014015545A1 CN 2012080143 W CN2012080143 W CN 2012080143W WO 2014015545 A1 WO2014015545 A1 WO 2014015545A1
Authority
WO
WIPO (PCT)
Prior art keywords
sliding rod
base
piezoelectric bodies
piezoelectric
tubular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2012/080143
Other languages
English (en)
French (fr)
Inventor
陆轻铀
王�琦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Science and Technology of China USTC
Original Assignee
University of Science and Technology of China USTC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Science and Technology of China USTC filed Critical University of Science and Technology of China USTC
Publication of WO2014015545A1 publication Critical patent/WO2014015545A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/025—Inertial sliding motors

Definitions

  • the present invention relates to a piezoelectric thruster, and more particularly to a three-brake force intrusion device in which a strong bimorph is pushed side by side, and belongs to the technical field of piezoelectric positioners.
  • a piezoelectric intrusor is a piezoelectric positioner capable of accumulating microscopic small piezoelectric displacement generated by each crucible into a macroscopic large displacement, which can simultaneously possess nanometer positioning accuracy and a centimeter-scale large stroke, thereby becoming a precision nowadays.
  • a sliding rod that is slidably engaged in a direction, and a positive pressure that presses the sliding rod with the free ends of the two piezoelectric bodies and a positive pressure that presses the sliding rod with the pedestal are provided in a direction perpendicular to the expansion and contraction direction of the two piezoelectric bodies.
  • either of the maximum static friction forces is less than the sum of the other two maximum static friction forces. This is the "frictional relationship" of the work of the three friction thrusters driven by the two piezoelectric bodies side by side.
  • the dilator can give the maximum thrust when the maximum static friction generated by the three positive pressures on the slider is equal (referred to as "optimal frictional relationship").
  • An important disadvantage of the intrusion device is: poor robustness (ie, poor rigidity), because the free ends of the two piezoelectric bodies are independent and not fixed, resulting in loose overall structure and susceptible to external vibration in atomic resolution imaging applications. Interference, low image quality, increased requirements for vibration isolation, sound insulation, etc. This particularly affects its application in extreme conditions and harsh conditions such as strong magnetic fields, strong electric fields, and variable temperature and pressure.
  • the free ends of the two piezoelectric bodies are to bear a certain positive pressure, and the free ends are not relied on, the two piezoelectric bodies are also subjected to some damaging lateral directions (perpendicular to the piezoelectric extension). Shrink direction) stress.
  • the present invention proposes the following technical solutions: (1) Fixing the bridge between the free ends of the two piezoelectric bodies, pulling the two free ends to each other, but not significantly reducing the two free ends along the direction of expansion and contraction of the two piezoelectric bodies Freedom; (2) On this basis, the two piezoelectric bodies themselves can even be integrally enclosed and fixed on the annular base to form a seamless tubular bimorph structure, which makes the ruggedness and integration greatly improve.
  • the technical problem to be solved by the present invention is that the conventional two-pieder-driven three-friction force intrusion device has poor robustness, thereby providing a solid-type two-piezoelectric side-by-side thrusting friction stirrer.
  • the present invention provides a three-viomatic force intrusion device with a strong bimorph side-by-side push, comprising two piezoelectric bodies, a base, and a sliding bar, the two piezoelectric bodies being parallel in the telescopic direction
  • the device is fixedly arranged side by side on the base to form a double piezoelectric structure
  • the thruster further comprises a bridge piece, wherein the left and right ends of the bridge piece are respectively fixed to the free ends of the two piezoelectric bodies, and are arranged
  • the sliding body of the piezoelectric body is a sliding fit in the direction of expansion and contraction thereof, and a positive pressure for pressing the sliding rod with the left and right ends of the bridge piece and a sliding rod and the base are arranged perpendicular to the expansion and contraction direction of the two piezoelectric bodies.
  • the positive pressure of the phase pressure in which the maximum static friction generated by the three positive pressures on the sliding rod is less than the sum of the other two maximum static friction forces.
  • the slide bar is elastically pressed against the base by the elasticity of the slide bar and/or the elasticity of the base and/or the additional elastic body, and the slide bar is elastic and/or two through the slide bar.
  • the piezoelectric body elasticity and/or the additional elastomer are elastically pressed against the left and right ends of the bridge piece.
  • the two piezoelectric bodies are in the shape of a half tube which is cut along the central axis of the tubular body, and they are enclosed and fixedly standing on the annular base to form a double-slit tubular bimorph. Body structure.
  • the slider is placed in the double-slit tubular bimorph structure and passes through a pedestal and a bridge piece respectively located at both ends thereof or the slider is tubular And inserting the double-slit tubular bimorph structure together with the base and the bridge piece, and providing a spring piece between the sliding bar and the double-slit tubular bimorph structure, the spring piece and the sliding bar
  • the elastic phase pressure is a point contact or a line contact.
  • the spring piece presses one end of the slide bar against the base, and presses the other end of the slide bar and the left and right ends of the bridge piece respectively to form the three positive pressure.
  • the spring piece is disposed between the base and the sliding bar, and the elastic phase between the spring piece and the sliding bar is point contact or line contact, and the spring piece is perpendicular to In the expansion and contraction direction of the two piezoelectric bodies, one end of the sliding rod is pressed against the base, and the other end of the sliding rod and the left and right ends of the bridge piece are respectively pressed to form the three positive pressures.
  • the slider is disposed outside the bimorph structure, and the spring piece is disposed between the bimorph structure and the slider, the spring piece and the slider.
  • the elastic phase pressure between the two is a point contact or a line contact, and the spring piece presses one end of the slide bar against the base in a direction perpendicular to the expansion and contraction direction of the two piezoelectric bodies, and the other end of the slide bar and the left and right sides of the bridge piece The ends are respectively phase pressed to form the three positive pressures.
  • the two piezoelectric bodies are in the shape of a half tube which is cut along the central axis of the tubular body, and are integrally enclosed and fixedly standing on the annular base to form a seamless tubular double Piezoelectric structure.
  • the slider is placed in the seamless tubular bimorph structure and passes through a pedestal and a bridge piece respectively located at both ends thereof, in the slider and the seamless tube
  • a spring piece is disposed between the inner walls of the double-piezoelectric structure, and the spring piece presses one end of the sliding rod against the base, and presses the other end of the sliding rod and the left and right ends of the bridge piece respectively to form the three A positive pressure.
  • the sliding bar is tubular and sleeved outside the seamless tubular bimorph structure, and the outer wall of the sliding bar and the outer wall of the seamless tubular bimorph structure It A spring piece is arranged between the one end of the sliding rod and the base end, and the other end of the sliding rod is respectively pressed against the left and right ends of the bridge piece to form the three positive pressures.
  • the spring piece is in a position where the spring force is located closer to the spacer between the base and the spacer.
  • the important beneficial effects of the invention are: the addition of the bridge piece, which greatly increases the robustness of the existing three-pieder-driven three-friction force intrusion device without significant influence on performance, in particular: seamless pressing
  • the electric friction type of the three-pieder pusher driven by the electric double-pieder is also improved in the robustness of the bimorph structure and is improved to the extreme.
  • the technical solution of the lateral pressure of the spring piece can not only automatically satisfy the working friction relationship and even the optimal frictional relationship of the intrusion, but also can be used when the bimorph structure is tubular. Automatically produces 4 points of rigid contact with the slider to further enhance rigidity. All of these help to improve their resistance to external vibration and sound interference, and to obtain high-quality atomic resolution imaging. In particular, they help to improve their extreme conditions and harsh conditions such as strong magnetic fields, strong electric fields, and variable temperature and pressure. High-quality atomic resolution imaging applications under conditions.
  • FIG. 1 is a schematic view showing the structure of a three-fold friction stirrer of a substantially rigid type double piezoelectric body side by side according to the present invention.
  • Fig. 2 is a schematic view showing the structure of a three-friction force intrusion device with a slit-shaped and strong bimorph in parallel pushing according to the present invention.
  • Fig. 3 is a schematic view showing the structure of a tribrach force intrusion device in which the spring piece of the present invention is pressed side by side with a slit-shaped solid bimorph.
  • Fig. 4 is a schematic view showing the structure of a three-friction force intrusion device in which a spring type sheet is pressed side by side and a spring piece is disposed between the base and the slide bar and the solid type double piezoelectric body is pushed side by side.
  • FIG. 5 is a schematic view showing the structure of a three-brake force intrusion device in which a spring-type sheet is pressed side by side and a spring piece is disposed between a two-piezo structure and a sliding rod.
  • Fig. 6 is a schematic view showing the structure of a three-brake force intrusion device in which a seamless tubular solid type double piezoelectric body is pushed side by side according to the present invention.
  • Fig. 7 is a structural schematic view of a three-wire friction thruster with a side-pressed, seamless tubular solid-state bimorph of the spring sheet of the present invention.
  • the reference numerals are as follows: 1 pedestal, 2a, one piezoelectric body, 2b, two piezoelectric bodies, 2c, a gap between two piezoelectric bodies, 2d electrode insulation between two piezoelectric bodies, 3 sliders, 4 bridging piece, 5a spring piece, 5b point contact or line contact, 5c side spring piece elastic direction and position.
  • the three-brake force intrusion device of the rugged two-piezoelectric side-by-side pusher of the present invention works as follows: a solid bi-pieder-driven three-friction force intrusion device comprising two piezoelectric bodies, a base, and a sliding rod The two piezoelectric bodies are arranged in parallel in a telescopic direction and are fixedly arranged side by side on the base to form a bimorph structure.
  • the jumper further includes a bridge piece, wherein the left and right ends of the bridge piece are respectively fixed to the free ends of the two piezoelectric bodies, and the slide bars are arranged to be slidingly matched with the two piezoelectric bodies in the telescopic direction thereof, in the vertical direction Providing a positive pressure for pressing the sliding rod with the left and right ends of the bridge piece and a positive pressure for pressing the sliding rod with the base in the direction of expansion and contraction of the two piezoelectric bodies, and the three positive pressures are generated on the sliding rod Among the maximum static friction forces, any one of the maximum static friction forces is less than the sum of the other two maximum static friction forces.
  • the fixing method Since the two ends of the bridge piece are fixed to the free ends of the two piezoelectric bodies: the left and right ends of the bridge piece, the fixing method has a small rigidity in the direction in which the piezoelectric body expands and contracts, and is stretchable to the piezoelectric body.
  • the obstruction force is negligible compared to the telescopic force of the piezoelectric body, thereby increasing the robustness of the thruster without significantly affecting performance (including thrust).
  • each of the piezoelectric bodies is a half-piece piezoelectric tube, which together form a complete seamless piezoelectric.
  • the above-mentioned rugged two-pieder-driven three-friction stirrer still works well; the robustness of such a thruster structure has been achieved to the highest.
  • the working principle is as follows: The integrated two piezoelectric bodies can still be independently stretched, only when the two piezoelectric bodies are in different state of expansion and contraction.
  • the seamless piezoelectric tube will be tilted, so the intrusion device realizes the independent telescopic movement of the two piezoelectric bodies by the rocking motion of the seamless piezoelectric tube, thereby making the intrusion device Walking.
  • This scheme and principle are not obvious, because the fully integrated piezoelectric tube is completely unrecognizable from the two-piezoelectric body of the prior art, and the independently controllable double-piezoelectric side-by-side push-driven three-friction force intrusion device is completely unrecognizable.
  • the present invention also proposes an important technical solution for the lateral pressure self-coupling of the spring leaf to achieve an automatic satisfaction of the frictional relationship and even the optimal frictional relationship:
  • the slider is placed in the double-slit (or seamless) tubular bimorph structure and passes through a pedestal and a bridge piece respectively located at both ends thereof, on the outer wall of the slider and the double-slit tube
  • a spring piece is disposed between the inner walls of the double piezoelectric structure, and the spring piece presses one end of the sliding rod against the base, and presses the other end of the sliding rod and the left and right ends of the bridge piece respectively to form the three Positive pressure.
  • the frictional relationship is automatically satisfied and the intrusion device can work.
  • the point of application of the lateral elastic force is 2/3 of the length of the tubular bimorph structure (ie, the distance from the free end to the base end)
  • the optimum friction relationship can be automatically satisfied.
  • the slider and the double-slit (or seamless) tubular bimorph structure can also be internally and externally tuned (the tubular slider slides the tubular bimorph structure therein, the spring The sheet is placed between the inner wall of the slider and the outer wall of the tubular bimorph structure).
  • the spring piece may be disposed between the base and the slide bar, and the elastic phase pressure between the spring piece and the slide bar is point contact or line contact, The spring piece presses one end of the sliding rod and the base perpendicular to the direction of expansion and contraction of the two piezoelectric bodies, and presses the other end of the sliding rod and the left and right ends of the bridge piece respectively to form the three positive pressures;
  • the slider may be disposed outside the bimorph structure, and the spring piece is disposed between the bimorph structure and the slider.
  • the elastic phase between the spring piece and the sliding bar is a point contact or a line contact, and the spring piece presses one end of the sliding bar against the base in a direction perpendicular to the expansion and contraction of the two piezoelectric bodies, and the other end of the sliding bar
  • the left and right ends of the bridge piece are respectively pressed to form the three positive pressures.
  • the working principle and advantages of the latter two spring-sheet side-pressure self-mating schemes are similar to those of the first (tubular-type two-piezoelectric structure) spring-sheet side-pressure self-mating scheme.
  • Example 1 Basic Rugged Bimorph Side-Pushing Three Friction Stepper
  • a basic rugged bimorph side-by-side push three friction thruster including two piezoelectric bodies 2a, 2b, pedestal 1, slider 3, the two piezoelectric bodies 2a, 2b are arranged in parallel in a telescopic direction and are fixedly arranged side by side on the susceptor 1 to form a bimorph structure, which is characterized by including a bridge piece.
  • the left and right ends of the bridge piece are respectively fixed to the free ends of the two piezoelectric bodies 2a, 2b, and the slide bars 3 are arranged to be slidingly matched with the two piezoelectric bodies 2a, 2b in the telescopic direction thereof, perpendicular to A positive pressure for pressing the slide bar 3 with the left and right ends of the bridge piece 4 and a positive pressure for pressing the slide bar 3 with the base 1 are provided in the direction in which the two piezoelectric bodies are stretched, and the three positive pressures are slipped.
  • any one of the maximum static friction forces is smaller than the sum of the other two maximum static friction forces.
  • the rigidity of the fixing method is small in the expansion and contraction direction of the piezoelectric body, and the piezoelectric body is expanded and contracted.
  • the obstruction force is negligible compared to the telescopic force of the piezoelectric body, thereby increasing the robustness of the thruster without significantly affecting performance (including thrust), which achieves the object of the present invention.
  • Embodiment 2 Three-friction stepper driven by a spring-type rugged bimorph
  • the slide bar 3 is elastically pressed against the base 1 by the elasticity of the slide bar and/or the elastic base of the base and/or the additional elastic body 5a, and the slide bar 3 is elastically and/or pressed by the slide bar.
  • the electric body elastic and/or the additional elastic body 5a is elastically pressed against the left and right ends of the bridge piece 4 to realize the left and right sides of the slide bar 3 and the bridge piece 4 disposed perpendicularly to the direction in which the two piezoelectric bodies are stretched and contracted.
  • the positive pressure of the end phase pressure and the positive pressure of the sliding rod 3 and the base 1 are pressed, and the maximum static friction force generated by the three positive pressures on the sliding rod 3 is less than the other two maximum The sum of static friction.
  • Example 3 Three-seam tubular bimorph structure of a robust two-piezoelectric side-by-side push three friction stepper
  • the two piezoelectric bodies 2a, 2b are in the shape of a half tube which is cut along the central axis of the tubular body, and they are enclosed and fixedly standing on the annular base 1 to form a double-slit tubular bimorph. Body structure.
  • Embodiment 4 Three-blade stepper for pushing a double-piened tubular body with a double-slit tubular bimorph structure
  • the slider 3 is placed inside the double-slit tubular bimorph structure and passes through the pedestal 1 and the bridge piece 4 respectively located at both ends thereof or the slider 3 is a tube Forming and fitting the double-slit tubular bimorph structure together with the base 1 and the bridge piece 4, and providing a spring piece 5a between the slide bar 3 and the double-slit tubular bimorph structure, the spring
  • the elastic phase pressure between the piece 5a and the slide bar 3 is a point contact or a line contact
  • the spring piece 5a presses one end of the slide bar 3 against the base 1, and the other end of the slide bar 3 and the left and right sides of the bridge piece 4 The ends are respectively phase pressed to form the three positive pressures.
  • Embodiment 5 Three-friction stepper driven by a strong type of two piezoelectric bodies arranged side by side between a base plate and a slide bar
  • the spring piece 5a is disposed between the base 1 and the slide bar 3, and the elastic phase pressure between the spring piece 5a and the slide bar 3 is point contact or line contact, and the spring piece 5a is vertical
  • One end of the slide bar is pressed against the base 1 in the direction in which the two piezoelectric bodies expand and contract, and the other end of the slide bar 3 and the left and right ends of the bridge piece 4 are respectively pressed to form the three positive pressures.
  • Embodiment 6 Three-friction stepper with a spring piece disposed between a two-piezo structure and a sliding bar and a rigid bimorph side-by-side push
  • the slider 3 is disposed outside the bimorph structure
  • the spring piece is disposed between the bimorph structure and the slider 3, and the spring piece 5a and the slider 3
  • the elastic phase pressure is a point contact or a line contact
  • the spring piece 5a presses one end of the slide bar 3 with the susceptor 1 in a direction perpendicular to the expansion and contraction direction of the two piezoelectric bodies, and the other end of the slide bar 3 and the bridge piece
  • the left and right ends of 4 are respectively pressed to form the three positive pressures.
  • Example 7 Robust type of seamless tubular bimorph structure with spring plate side pressure built-in sliders Double friction stepper driven by three piezoelectrics side by side
  • the two piezoelectric bodies 2a, 2b are in the shape of a half tube which is cut along the central axis of the tubular body, and are integrally enclosed and fixedly standing on the annular base 1 to form a seamless tubular double Piezoelectric structure.
  • Example 8 Rugged bimorph of a seamless tubular bimorph structure, three friction steppers pushed side by side
  • the slider 3 is placed within the seamless tubular bimorph structure and passes through the pedestal 1 and the bridge 4 at the ends thereof, respectively, in the slider 3 and the seamless tube
  • a spring piece 5a is disposed between the inner walls of the bimorph structure, and the spring piece 5a presses one end of the slide bar 3 against the base 1, and presses the other end of the slide bar 3 and the left and right ends of the bridge piece 4 respectively. , constitutes the three positive pressures described.
  • Example 9 Rugged double-piezoelectric structure of a seamless tubular bimorph structure with a spring leaf side pressing jacket slide
  • the slider 3 is tubular and sleeved outside the seamless tubular bimorph structure, between the inner wall of the slider 3 and the outer wall of the seamless tubular bimorph structure.
  • a spring piece 5a is provided. The spring piece 5a presses one end of the slide bar 3 against the base 1, and the other end of the slide bar 3 and the left and right ends of the bridge piece 4 are respectively pressed to form the three positive pressures.
  • Example 10 Frictional relationship self-satisfied three-trigger thruster driven by a rigid bimorph
  • the spring piece 5a is elastically placed at a position closer to the spacer 4 between the base and the spacer.

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

一种坚固型双压电体并排推动的三摩擦力步进器，包括两个压电体（2a、2b）、基座（1）、滑杆（3），该两压电体（2a、2b）按伸缩方向平行设置并排地固定站立于基座（1）上，构成双压电体结构。且该步进器还包括搭桥片（4），该搭桥片（4）的左右两端分别固定于该两压电体（2a、2b）的自由端，设置与两压电体（2a、2b）在其伸缩方向上为滑动配合的滑杆（3），在垂直于两压电体（2a、2b）伸缩方向上设置将滑杆（3）与该搭桥片（4）的左右两端相压的正压力以及将滑杆（3）与基座（1）相压的正压力，在这三个正压力对滑杆（3）产生的最大静摩擦力中，任一个最大静摩擦力小于其它两个最大静摩擦力之和。该发明尺寸小、刚性强、摩擦力条件和最佳摩擦力条件容易得到满足，适于作为极端条件和高灵敏原子分辨率扫描探针显微镜的粗逼近马达应用。

Description

坚固型双压电体并排推动的三摩擦力步进器
技术领域 本发明涉及一种压电歩进器， 特别涉及一种坚固型双压电体并排推 动的三摩擦力歩进器， 属于压电定位器技术领域。
背景技术 压电歩进器是一种能够把每一歩产生的微观小压电位移累加成一 个宏观大位移的压电定位器， 可同时拥有纳米级定位精度、 厘米级大行 程， 从而成为现今精密测量、 纳米器件加工、 原子 /分子操纵、 乃至亚原 子结构成像的有力定位工具。 其现今的发展趋势是高刚性、 大推力、 和 小型化。
我们以前提出了一种 "双压电体并排推动的三摩擦力歩进器"（发 明专利授权号： ZL200910116492.X)是朝着这方面推进的一个典型代表。 其技术特征为： 包括两个压电体、 基座、 滑杆， 其特征是所述两压电体 按伸缩方向平行设置并排地固定站立于基座上， 设置与两压电体在其伸 缩方向上为滑动配合的滑杆， 在垂直于两压电体伸缩方向上设置将滑杆 与两压电体自由端相压的正压力以及将滑杆与基座相压的正压力， 在这 三个正压力对滑杆产生的最大静摩擦力中， 任一个最大静摩擦力小于其 它两个最大静摩擦力之和。 此即为双压电体并排推动的三摩擦力歩进器 工作的 "摩擦力关系"。 该歩进器在所述三个正压力对滑杆产生的最大 静摩擦力都相等时 （称为 "最佳摩擦力关系")， 能给出最大推力。
该歩进器的一个重要缺点是： 坚固性差 （即： 刚性差）， 因为两压 电体的自由端相互独立、 不固定， 导致整体结构松散， 在原子分辨率成 像的应用中易受外振动干扰，成像质量低，对隔振、隔声等的要求增加。 这特别影响其在强磁场、 强电场、 变温变压等极端条件与恶劣条件下的 应用。 此外， 由于所述两压电体的自由端要承载一定的正压力， 而自由 端又无依靠， 故两压电体也要承受一些有损害性的横向 （垂直于压电伸 缩方向） 应力。 为此， 本发明提出如下技术方案： （1 ) 在两压电体自由 端之间固定搭桥片， 把两自由端相互拉住， 但又不显著减少两自由端沿 两压电体伸缩方向的自由性； （2) 在此基础上， 两压电体本身甚至也可 以一体地围合起来固定站立于环形基座上， 构成无缝管形双压电体结构， 使坚固性、 集成性大大提高。 这些做法的合法性不是显而易见的， 特别 是完全一体的无缝管形双压电体结构看上去与原有技术中的双压电体 结构已截然不同， 虽然使得其坚固性大大增强， 达到最强， 但是其完全 一体的结构也很容易被人认为两压电体相互牵扯严重， 能极大程度地阻 止两压电体的独立伸缩， 导致歩进器不工作。 我们也是在多次实验的基 础上， 才揭示了这种担心没有必要。
发明内容
(一） 要解决的技术问题
本发明所要解决的技术问题是现有双压电体并排推动的三摩擦力 歩进器坚固性差的问题， 从而提供一种坚固型双压电体并排推动的三摩 擦力歩进器。
(二） 技术方案
为解决上述技术问题， 本发明提出一种坚固型双压电体并排推动的 三摩擦力歩进器， 包括两个压电体、 基座、 滑杆， 所述两压电体按伸缩 方向平行设置并排地固定站立于基座上， 构成双压电体结构， 且该歩进 器还包括搭桥片， 该搭桥片的左右两端分别固定于所述两压电体的自由 端， 设置与两压电体在其伸缩方向上为滑动配合的滑杆， 在垂直于两压 电体伸缩方向上设置将滑杆与所述搭桥片的左右两端相压的正压力以 及将滑杆与基座相压的正压力， 在这三个正压力对滑杆产生的最大静摩 擦力中， 任一个最大静摩擦力小于其它两个最大静摩擦力之和。
根据本发明的一种具体实施方式，所述滑杆通过滑杆弹性和 /或基座 弹性和 /或增设弹性体与基座弹性相压， 所述滑杆通过滑杆弹性和 /或两 压电体弹性和 /或增设弹性体与所述搭桥片的左右两端弹性相压。
根据本发明的一种具体实施方式， 所述两压电体皆呈沿管形体中轴 线剖开的半管形状， 它们围合起来固定站立于环形基座上， 构成双缝管 形双压电体结构。
根据本发明的一种具体实施方式， 所述滑杆置于所述双缝管形双压 电体结构之内并且穿过分别位于其两端的基座和搭桥片或者所述滑杆 为管形并把所述双缝管形双压电体结构连同基座和搭桥片套于其内， 在 滑杆与双缝管形双压电体结构之间设置弹簧片， 该弹簧片和滑杆之间的 弹性相压为点接触或线接触， 该弹簧片将滑杆的一端与基座相压， 将滑 杆的另一端与搭桥片的左右两端分别相压， 构成所述的三个正压力。
根据本发明的一种具体实施方式， 在所述弹簧片设置于基座和滑杆 之间， 该弹簧片和滑杆之间的弹性相压为点接触或线接触， 该弹簧片在 垂直于两压电体伸缩方向上将滑杆的一端与基座相压， 并将滑杆的另一 端与搭桥片的左右两端分别相压， 构成所述的三个正压力。
根据本发明的一种具体实施方式， 在所述滑杆置于所述双压电体结 构之外， 所述弹簧片设置于双压电体结构和滑杆之间， 该弹簧片和滑杆 之间的弹性相压为点接触或线接触， 该弹簧片在垂直于两压电体伸缩方 向上将滑杆的一端与基座相压， 并将滑杆的另一端与搭桥片的左右两端 分别相压， 构成所述的三个正压力。
根据本发明的一种具体实施方式， 所述两压电体皆呈沿管形体中轴 线剖开的半管形状， 它们一体地围合起来固定站立于环形基座上， 构成 无缝管形双压电体结构。
根据本发明的一种具体实施方式， 所述滑杆置于所述无缝管形双压 电体结构之内并且穿过分别位于其两端的基座和搭桥片， 在滑杆与无缝 管形双压电体结构的内壁之间设置弹簧片， 该弹簧片将滑杆的一端与基 座相压， 将滑杆的另一端与搭桥片的左右两端分别相压， 构成所述的三 个正压力。
根据本发明的一种具体实施方式， 所述滑杆为管形并套于所述无缝 管形双压电体结构之外， 在滑杆内壁与无缝管形双压电体结构的外壁之 间设置弹簧片， 该弹簧片将滑杆的一端与基座相压， 将滑杆的另一端与 搭桥片的左右两端分别相压， 构成所述的三个正压力。
根据本发明的一种具体实施方式， 所述弹簧片产生弹力的位置处于 基座与垫片之间更靠近垫片的地方。
(三） 有益效果
本发明的重要有益效果是： 增加了搭桥片， 在不显著影响性能的情 况下， 大大增加了现有双压电体并排推动的三摩擦力歩进器的坚固性， 特别是： 无缝压电管型的双压电体并排推动的三摩擦力歩进器更是把双 压电体结构的坚固性也提高了， 且提高到了极致。 而弹簧片侧压自配合 的技术方案不仅能使得歩进器工作摩擦力关系、 甚至最佳摩擦力关系得 到自动满足， 更可在双压电体结构为管形时， 基座与垫片可与滑杆自动 产生 4点刚性接触， 从而进一歩增强刚性。 这些都有助于提升其在抵抗 外振动和声音干扰， 获得高品质的原子分辨率成像等方面的应用， 特别 是有助于提升其在强磁场、 强电场、 变温变压等极端条件与恶劣条件下 的高品质原子分辨率成像方面的应用。
附图说明 图 1是本发明基本的坚固型双压电体并排推动的三摩擦力歩进器的 结构示意图。
图 2是本发明有缝管形坚固型双压电体并排推动的三摩擦力歩进器 的结构示意图。
图 3是本发明弹簧片侧压有缝管形坚固型双压电体并排推动的三摩 擦力歩进器的结构示意图。
图 4是本发明弹簧片侧压且弹簧片设置于基座和滑杆之间的坚固型 双压电体并排推动的三摩擦力歩进器的结构示意图。
图 5是本发明弹簧片侧压且弹簧片设置于双压电体结构和滑杆之间 的坚固型双压电体并排推动的三摩擦力歩进器的结构示意图。 图 6是本发明无缝管形坚固型双压电体并排推动的三摩擦力歩进器 的结构示意图。
图 7是本发明弹簧片侧压无缝管形坚固型双压电体并排推动的三摩 擦力歩进器的结构示意图。
图中标号： 1基座、 2a两压电体之一、 2b两压电体之二、 2c两压电 体之间的缝隙、 2d两压电体之间的电极绝缘缝、 3滑杆、 4搭桥片、 5a 弹簧片、 5b点接触或线接触、 5c侧弹簧片的弹力方向与位置。
具体实施方式 为使本发明的目的、 技术方案和优点更加清楚明白， 以下结合具体 实施例， 并参照附图， 对本发明作进一歩的详细说明。
本发明坚固型双压电体并排推动的三摩擦力歩进器的工作原理为： 坚固型双压电体并排推动的三摩擦力歩进器， 包括两个压电体、 基 座、滑杆，所述两压电体按伸缩方向平行设置并排地固定站立于基座上， 构成双压电体结构。 且该歩进器还包括搭桥片， 该搭桥片的左右两端分 别固定于所述两压电体的自由端， 设置与两压电体在其伸缩方向上为滑 动配合的滑杆， 在垂直于两压电体伸缩方向上设置将滑杆与所述搭桥片 的左右两端相压的正压力以及将滑杆与基座相压的正压力， 在这三个正 压力对滑杆产生的最大静摩擦力中， 任一个最大静摩擦力小于其它两个 最大静摩擦力之和。 由于与两压电体自由端相固定的是搭桥片的分开的 两个部分： 搭桥片的左右两端， 所以， 这种固定法在压电体伸缩方向的 刚性小， 对压电体伸缩的阻碍力与压电体的伸缩力相比可以忽略， 从而 既增加了歩进器的坚固性， 又不显著影响性能 （包括推力）。
更重要的是， 我们的实验发现， 即使把两压电体做成一个无缝的压 电管， 其中每个压电体为半片压电管， 两者合起来为一个完整的无缝压 电管， 上述坚固型双压电体并排推动的三摩擦力歩进器依然能够很好地 工作； 这样的歩进器结构的坚固性已达到了最高。 其工作原理是： 一体 化的两压电体依然能够独立地伸缩， 只是在两压电体伸缩状态不同时 (即： 一个伸长， 另一个收缩）， 该无缝压电管会倾斜， 所以歩进器是 通过无缝压电管的摇摆运动实现两压电体的独立伸缩运动， 从而使歩进 器行走的。 我们实际上也在高分辨的显微镜下观测到了歩进器行走时无 缝压电管的摇摆运动， 证明了我们的分析是对的， 其工作原理是合理、 可行的。 这一方案与原理并不是显而易见的， 因为完全一体的压电管与 原有技术的两压电体分开的、 独立可控的双压电体并排推动的三摩擦力 歩进器已完全面目全非， 看不出有何联系了， 甚至让人担心两压电体完 全的一体化是否会导致它们相互牵扯并阻止对方独立伸缩， 导致歩进器 不能工作。 这充分体现了本发明的重要性。
此外， 本发明还提出了重要的弹簧片侧压自配合的技术方案以实现 摩擦力关系、 甚至最佳摩擦力关系的自动满足：
( 1 ) 所述滑杆置于所述双缝 （或无缝） 管形双压电体结构之内并 且穿过分别位于其两端的基座和搭桥片， 在滑杆外壁与双缝管形双压电 体结构的内壁之间设置弹簧片， 该弹簧片将滑杆的一端与基座相压， 将 滑杆的另一端与搭桥片的左右两端分别相压， 构成所述的三个正压力。 特别地， 当弹簧片侧向弹力的作用点处于管形双压电体结构的两端 （分 别为基座端和压电体自由端）之间且距离基座远于距离另一端 (自由端） 的地方， 且摩擦系数都相同时， 即可保证摩擦力关系自动满足， 歩进器 可工作。 特别是当侧向弹力的作用点距离基座端为管形双压电体结构长 度 （即： 自由端到基座端的距离） 的 2/3的地方， 即可保证自动满足最 佳摩擦力关系。 与此相类似， 所述滑杆与双缝 （或无缝） 管形双压电体 结构之间也可以内外对调 （管形的滑杆把管形双压电体结构套于其内， 弹簧片置于滑杆内壁和管形双压电体结构外壁之间）。 此方案的优点是: (I)通过从侧面植入仅仅一弹簧片， 即可保证摩擦力关系， 甚至最佳摩 擦力关系， 得到自动满足； （Π) 只在侧面插入了一小片薄弹簧片 （几乎 不增加任何空间）， 几乎实现了双压电体并排推动的三摩擦力歩进器所 能实现出来的最小结构了， 满足小型化要求； （III) 刚性强： 滑杆被压 在高刚性的双压电体结构两端， 是十分牢固的结构， 特别是， 如果双压 电体结构为管形 （双缝或无缝）， 而滑杆以一对平行的棱与其两端的环 状搭桥片和环状基座相压， 则可自动产生四点刚性相压， 这是两件东西 压在一起能产生的最多接触点的情形 （通常只能产生三点接触， 因为三 点决定一个平面， 第四点往往是悬浮的）， 所以刚性很强。 （2 ) 对于非 管形的双压电体结构， 可将所述弹簧片设置于基座和滑杆之间， 该弹簧 片和滑杆之间的弹性相压为点接触或线接触， 该弹簧片在垂直于两压电 体伸缩方向上将滑杆的一端与基座相压， 并将滑杆的另一端与搭桥片的 左右两端分别相压， 构成所述的三个正压力； （3 ) 对于非管形的双压电 体结构， 也可将所述滑杆置于所述双压电体结构之外， 所述弹簧片设置 于双压电体结构和滑杆之间， 该弹簧片和滑杆之间的弹性相压为点接触 或线接触， 该弹簧片在垂直于两压电体伸缩方向上将滑杆的一端与基座 相压， 并将滑杆的另一端与搭桥片的左右两端分别相压， 构成所述的三 个正压力。 后两种弹簧片侧压自配合方案的工作原理及其优点类似于第 一种（管形双压电体结构）弹簧片侧压自配合方案的工作原理及其优点。
实施例 1: 基本的坚固型双压电体并排推动的三摩擦力步进器 参见附图 1， 基本型坚固型双压电体并排推动的三摩擦力歩进器， 包括两个压电体 2a、 2b、 基座 1、 滑杆 3， 所述两压电体 2a、 2b按伸缩 方向平行设置并排地固定站立于基座 1上， 构成双压电体结构， 其特征 是还包括搭桥片 4， 该搭桥片的左右两端分别固定于所述两压电体 2a、 2b的自由端， 设置与两压电体 2a、 2b在其伸缩方向上为滑动配合的滑 杆 3， 在垂直于两压电体伸缩方向上设置将滑杆 3与所述搭桥片 4的左 右两端相压的正压力以及将滑杆 3与基座 1相压的正压力， 在这三个正 压力对滑杆 3产生的最大静摩擦力中， 任一个最大静摩擦力小于其它两 个最大静摩擦力之和。
由于与两压电体自由端相固定的是搭桥片 4的分开的两个部分： 搭 桥片的左右两端， 所以， 这种固定法在压电体伸缩方向的刚性小， 对压 电体伸缩的阻碍力与压电体的伸缩力相比可以忽略， 从而既增加了歩进 器的坚固性， 又不显著影响性能 （包括推力）， 这就实现了本发明的目 的。
实施例 2: 弹力型坚固型双压电体并排推动的三摩擦力步进器 在上述实施例中， 所述滑杆 3通过滑杆弹性和 /或基座弹性和 /或增 设弹性体 5a与基座 1弹性相压， 所述滑杆 3通过滑杆弹性和 /或两压电 体弹性和 /或增设弹性体 5a与所述搭桥片 4的左右两端弹性相压， 以实 现在垂直于两压电体伸缩方向上设置将滑杆 3与所述搭桥片 4的左右两 端相压的正压力以及将滑杆 3与基座 1相压的正压力， 并使得在这三个 正压力对滑杆 3产生的最大静摩擦力中， 任一个最大静摩擦力小于其它 两个最大静摩擦力之和。
实施例 3: 双缝管形双压电体结构的坚固型双压电体并排推动的三 摩擦力步进器
在上述实施例中，所述两压电体 2a、 2b皆呈沿管形体中轴线剖开的 半管形状， 它们围合起来固定站立于环形基座 1上， 构成双缝管形双压 电体结构。
实施例 4: 弹簧片侧压双缝管形双压电体结构的坚固型双压电体并 排推动的三摩擦力步进器
在上述实施例中， 或者所述滑杆 3置于所述双缝管形双压电体结构 之内并且穿过分别位于其两端的基座 1和搭桥片 4或者所述滑杆 3为管 形并把所述双缝管形双压电体结构连同基座 1和搭桥片 4套于其内， 在 滑杆 3与双缝管形双压电体结构之间设置弹簧片 5a， 该弹簧片 5a和滑 杆 3之间的弹性相压为点接触或线接触，该弹簧片 5a将滑杆 3的一端与 基座 1相压， 将滑杆 3的另一端与搭桥片 4的左右两端分别相压， 构成 所述的三个正压力。
实施例 5: 弹簧片设置于基座和滑杆之间的坚固型双压电体并排推 动的三摩擦力步进器
在上述实施例中，所述弹簧片 5a设置于基座 1和滑杆 3之间，该弹 簧片 5a和滑杆 3之间的弹性相压为点接触或线接触， 该弹簧片 5a在垂 直于两压电体伸缩方向上将滑杆的一端与基座 1相压， 并将滑杆 3的另 一端与搭桥片 4的左右两端分别相压， 构成所述的三个正压力。
实施例 6: 弹簧片设置于双压电体结构和滑杆之间的坚固型双压电 体并排推动的三摩擦力步进器 在上述实施例中， 所述滑杆 3置于所述双压电体结构之外， 所述弹 簧片设置于双压电体结构和滑杆 3之间，该弹簧片 5a和滑杆 3之间的弹 性相压为点接触或线接触，该弹簧片 5a在垂直于两压电体伸缩方向上将 滑杆 3的一端与基座 1相压， 并将滑杆 3的另一端与搭桥片 4的左右两 端分别相压， 构成所述的三个正压力。
实施例 7: 弹簧片侧压内置滑杆的无缝管形双压电体结构的坚固型 双压电体并排推动的三摩擦力步进器
在上述实施例中，所述两压电体 2a、 2b皆呈沿管形体中轴线剖开的 半管形状， 它们一体地围合起来固定站立于环形基座 1上， 构成无缝管 形双压电体结构。
实施例 8: 无缝管形双压电体结构的坚固型双压电体并排推动的三 摩擦力步进器
在上述实施例中， 所述滑杆 3置于所述无缝管形双压电体结构之内 并且穿过分别位于其两端的基座 1和搭桥片 4， 在滑杆 3与无缝管形双 压电体结构的内壁之间设置弹簧片 5a， 该弹簧片 5a将滑杆 3的一端与 基座 1相压， 将滑杆 3的另一端与搭桥片 4的左右两端分别相压， 构成 所述的三个正压力。
实施例 9: 弹簧片侧压外套滑杆的无缝管形双压电体结构的坚固型 双压电体并排推动的三摩擦力歩进器
在上述实施例中， 所述滑杆 3为管形并套于所述无缝管形双压电体 结构之外， 在滑杆 3内壁与无缝管形双压电体结构的外壁之间设置弹簧 片 5a， 该弹簧片 5a将滑杆 3的一端与基座 1相压， 将滑杆 3的另一端 与搭桥片 4的左右两端分别相压， 构成所述的三个正压力。
实施例 10:摩擦力关系自满足的坚固型双压电体并排推动的三摩擦 力歩进器
在上述实施例中，其特征是所述弹簧片 5a产生弹力的位置处于基座 与垫片之间更靠近垫片 4的地方。
以上所述的具体实施例， 对本发明的目的、 技术方案和有益效果进 行了进一歩详细说明， 应理解的是， 以上所述仅为本发明的具体实施例 而已， 并不用于限制本发明， 凡在本发明的精神和原则之内， 所做的任 何修改、 等同替换、 改进等， 均应包含在本发明的保护范围之内。

Claims

权利要求
1、 一种坚固型双压电体并排推动的三摩擦力歩进器， 包括两个压 电体、 一个基座和一个滑杆， 所述两个压电体按伸缩方向平行设置， 并 且并排地固定站立于所述基座上，构成一个双压电体结构，其特征在于， 所述歩进器还包括一个搭桥片， 该所述搭桥片的左右两端分别固定于所 述两个压电体的自由端， 所述滑杆设置成与所述两个压电体在其伸缩方 向上滑动配合， 在垂直于所述两个压电体的伸缩方向上施加有将所述滑 杆与所述搭桥片的左右两端相压的正压力以及将滑杆与基座相压的正 压力， 在所述三个正压力对所述滑杆产生的最大静摩擦力中， 任一个最 大静摩擦力均小于其他两个最大静摩擦力之和。
2、 根据权利要求 1 所述的坚固型双压电体并排推动的三摩擦力歩 进器， 其特征在于， 所述滑杆通过滑杆弹性和 /或基座弹性和 /或增设弹 性体与基座弹性相压， 所述滑杆通过滑杆弹性和 /或两压电体弹性和 /或 增设弹性体与所述搭桥片的左右两端弹性相压。
3、 根据权利要求 1 所述的坚固型双压电体并排推动的三摩擦力歩 进器， 其特征在于， 所述两压电体皆呈沿一管形体的中轴线剖开的半管 形状， 它们围合起来固定站立于呈环形的所述基座上， 构成一种双缝管 形的双压电体结构。
4、 根据权利要求 3 所述的坚固型双压电体并排推动的三摩擦力歩 进器， 其特征在于， 所述滑杆置于所述双缝管形双压电体结构之内并且 穿过分别位于其两端的基座和搭桥片， 或者， 所述滑杆为管形并把所述 双缝管形的双压电体结构连同基座和搭桥片一起套于其内， 在所述滑杆 与所述双缝管形双压电体结构之间设置一弹簧片， 该弹簧片和所述滑杆 之间的弹性相压处为点接触或线接触， 该弹簧片将所述滑杆的一端与所 述基座相压， 将该滑杆的另一端与所述搭桥片的左右两端分别相压， 构 成所述的三个正压力。
5、 根据权利要求 1 所述的坚固型双压电体并排推动的三摩擦力歩 进器， 其特征在于， 一弹簧片设置于所述基座和所述滑杆之间， 该弹簧 片和所述滑杆之间的弹性相压处为点接触或线接触， 该弹簧片在垂直于 两压电体伸缩方向上将所述滑杆的一端与基座相压， 并将滑杆的另一端 与所述搭桥片的左右两端分别相压， 构成所述的三个正压力。
6、 根据权利要求 1 所述的坚固型双压电体并排推动的三摩擦力歩 进器， 其特征在于， 在所述滑杆置于所述双压电体结构之外时， 一弹簧 片设置于所述双压电体结构和所述滑杆之间， 该弹簧片和所述滑杆之间 的弹性相压处为点接触或线接触， 该弹簧片在垂直于两压电体伸缩方向 上将所述滑杆的一端与基座相压， 并将该滑杆的另一端与所述搭桥片的 左右两端分别相压， 构成所述的三个正压力。
7、 根据权利要求 1 所述的坚固型双压电体并排推动的三摩擦力歩 进器， 其特征在于， 所述两压电体皆呈沿一管形体的中轴线剖开的半管 形状， 它们一体地围合起来固定站立于环形基座上， 构成一种无缝管形 的双压电体结构。
8、 根据权利要求 7 所述的坚固型双压电体并排推动的三摩擦力歩 进器， 其特征在于， 所述滑杆置于所述无缝管形双压电体结构之内， 并 且穿过分别位于其两端的所述基座和所述搭桥片， 在滑杆与所述无缝管 形双压电体结构的内壁之间设置一弹簧片， 该弹簧片将所述滑杆的一端 与所述基座相压， 将所述滑杆的另一端与所述搭桥片的左右两端分别相 压， 构成所述的三个正压力。
9、 根据权利要求 7 所述的坚固型双压电体并排推动的三摩擦力歩 进器， 其特征在于， 所述滑杆为管形并套于所述无缝管形双压电体结构 之外， 在滑杆内壁与无缝管形双压电体结构的外壁之间设置一弹簧片， 该弹簧片将滑杆的一端与基座相压， 将滑杆的另一端与搭桥片的左右两 端分别相压， 构成所述的三个正压力。
10、 根据权利要求 4或 5或 6或 8或 9所述的坚固型双压电体并排 推动的三摩擦力歩进器， 其特征在于， 所述弹簧片产生弹力的位置处于
PCT/CN2012/080143 2012-07-25 2012-08-15 坚固型双压电体并排推动的三摩擦力步进器 Ceased WO2014015545A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201210260297.6 2012-07-25
CN201210260297.6A CN102856305B (zh) 2012-07-25 2012-07-25 坚固型双压电体并排推动的三摩擦力步进器

Publications (1)

Publication Number Publication Date
WO2014015545A1 true WO2014015545A1 (zh) 2014-01-30

Family

ID=47402749

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2012/080143 Ceased WO2014015545A1 (zh) 2012-07-25 2012-08-15 坚固型双压电体并排推动的三摩擦力步进器

Country Status (2)

Country Link
CN (1) CN102856305B (zh)
WO (1) WO2014015545A1 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103616532B (zh) * 2013-11-06 2015-10-28 中国科学技术大学 低回差高重复扫描探针显微镜独立扫描器
CN103986365B (zh) * 2014-05-16 2016-06-29 中国科学技术大学 多区驱动的惯性压电马达装置及扫描探针显微镜和控制法
CN108593969A (zh) * 2018-05-16 2018-09-28 中国科学院合肥物质科学研究院 一种圆管型外绝缘窄尺寸扫描探针显微镜镜体

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4939404A (en) * 1988-04-22 1990-07-03 Aisin Seiki Kabushiki Kaisha Vibration wave motor
JP2003111454A (ja) * 2001-09-27 2003-04-11 Asmo Co Ltd 超音波モータ、及び超音波モータのステータ
CN101521197A (zh) * 2009-04-07 2009-09-02 中国科学技术大学 三或四压电体并行推进的步进器及其扫描探针显微镜镜体
CN101521195A (zh) * 2009-04-07 2009-09-02 中国科学技术大学 双压电体并排推动的三摩擦力步进器与扫描探针显微镜

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3902084A (en) * 1974-05-30 1975-08-26 Burleigh Instr Piezoelectric electromechanical translation apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4939404A (en) * 1988-04-22 1990-07-03 Aisin Seiki Kabushiki Kaisha Vibration wave motor
JP2003111454A (ja) * 2001-09-27 2003-04-11 Asmo Co Ltd 超音波モータ、及び超音波モータのステータ
CN101521197A (zh) * 2009-04-07 2009-09-02 中国科学技术大学 三或四压电体并行推进的步进器及其扫描探针显微镜镜体
CN101521195A (zh) * 2009-04-07 2009-09-02 中国科学技术大学 双压电体并排推动的三摩擦力步进器与扫描探针显微镜

Also Published As

Publication number Publication date
CN102856305A (zh) 2013-01-02
CN102856305B (zh) 2015-03-18

Similar Documents

Publication Publication Date Title
CN104767421B (zh) 相向摩擦减阻力惯性压电马达及控制法和扫描探针显微镜
KR100501196B1 (ko) 렌즈 이송장치
CN101521195B (zh) 双压电体并排推动的三摩擦力步进器与扫描探针显微镜
CN103616532B (zh) 低回差高重复扫描探针显微镜独立扫描器
WO2014015545A1 (zh) 坚固型双压电体并排推动的三摩擦力步进器
CN104393786B (zh) 一种利用滑杆惯性产生步进的压电马达
JP5387811B2 (ja) 駆動装置の駆動方法
CN103684037B (zh) 一种利用相向搓动降低摩擦力的双端夹持压电马达及控制方法
CN101521197B (zh) 三或四压电体并行推进的步进器及其扫描探针显微镜镜体
JP2009115982A (ja) オートフォーカスモジュールに適用するレンズ変位機構
WO2012019477A1 (zh) 嵌套双压电管推动的三摩擦力压电步进器与步进扫描器
CN102347318B (zh) 全压电并排推动的三摩擦力步进器与扫描探针显微镜镜体
CN102857139A (zh) 高刚性自配合双压电体并排推动的三摩擦力步进器
CN100547899C (zh) 双压电体线性纳米定位压电驱动器、其控制方法及控制器
CN114127607A (zh) 用于摄像头模块的线性执行器
CN106597025A (zh) 嵌套压电管驱动多维可脱离压电马达及扫描探针显微镜
Di Spigna et al. Application of EAP materials toward a refreshable Braille display
CN108089030A (zh) 双压电管嵌套机械并联高稳定扫描器及扫描探针显微镜
RU2205474C1 (ru) Устройство для микроперемещений объекта
CN104953889A (zh) 一种利用相向摩擦力压制成的叠堆压电马达
CN108599616A (zh) 一种基于单个压电堆栈的纳米定位器
TW201007246A (en) Lens actuation device
JP2007274790A (ja) 駆動装置
CN113296215B (zh) 一种高清镜头
CN108616226B (zh) 四足压电步进运动台及集成直线电机

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 12881635

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 12881635

Country of ref document: EP

Kind code of ref document: A1