WO2014010286A1

WO2014010286A1 - Thermoelectric conversion element, and method for producing same

Info

Publication number: WO2014010286A1
Application number: PCT/JP2013/061213
Authority: WO
Inventors: 明宏桐原; 石田　真彦; 滋河本
Original assignee: 日本電気株式会社
Priority date: 2012-07-09
Filing date: 2013-04-15
Publication date: 2014-01-16
Also published as: JPWO2014010286A1

Abstract

This thermoelectric conversion element is provided with a plurality of stacked thermoelectric conversion unit structures. Each of the plurality of thermoelectric conversion unit structures is provided with a magnetic material layer, and an electrogenic layer formed on the magnetic material layer, and formed of a material that exhibits spin orbit interaction. The individual thermoelectric conversion unit structures are folded such that the electrogenic layer is exposed to the outside. The electrogenic layers of adjacently situated thermoelectric conversion unit structures contact one another.

Description

Thermoelectric conversion element and manufacturing method thereof

The present invention relates to a thermoelectric conversion element based on a spin Seebeck effect and an inverse spin Hall effect, and a manufacturing method thereof.

In recent years, an electronic technology called “spintronics” has been in the spotlight. Conventional electronics have used only “charge”, which is one property of electrons, while spintronics also actively uses “spin”, which is another property of electrons. In particular, the “spin-current”, which is the flow of electron spin angular momentum, is an important concept. Since the energy dissipation of the spin current is small, there is a possibility that highly efficient information transfer can be realized by using the spin current. Therefore, generation, detection and control of spin current are important themes.

For example, a phenomenon is known in which a spin current is generated when a current flows. This is the “spin-Hall effect (spin-Hall
effect) ”. It is also known as an opposite phenomenon that an electromotive force is generated when a spin current flows. This is called the “inverse spin-Hall effect”. By using the inverse spin Hall effect, the spin current can be detected. It should be noted that both the spin Hall effect and the reverse spin Hall effect are significantly expressed in a substance (eg, Pt, Au) having a large “spin orbit coupling”.

Recent studies have also revealed the existence of the “spin-Seebeck effect” in magnetic materials. The spin Seebeck effect is a phenomenon in which when a temperature gradient is applied to a magnetic material, a spin current is induced in a direction parallel to the temperature gradient (see, for example, Patent Document 1, Non-Patent Document 1, and Non-Patent Document 2). ). That is, heat is converted into a spin current by the spin Seebeck effect (thermal spin current conversion). In patent document 1, the spin Seebeck effect in the NiFe film | membrane which is a ferromagnetic metal is reported. Non-Patent Documents 1 and 2 report the spin Seebeck effect at the interface between a magnetic insulator such as yttrium iron garnet (YIG, Y ₃ Fe ₅ O ₁₂ ) and a metal film.

Note that the spin current induced by the temperature gradient can be converted into an electric field (current, voltage) using the above-described inverse spin Hall effect. That is, by using the spin Seebeck effect and the inverse spin Hall effect in combination, “thermoelectric conversion” that converts a temperature gradient into electricity becomes possible.

FIG. 1 shows a configuration of a thermoelectric conversion element disclosed in Patent Document 1. A thermal spin current conversion unit 102 is formed on the sapphire substrate 101. The thermal spin current conversion unit 102 has a stacked structure of a Ta film 103, a PdPtMn film 104, and a NiFe film 105. The NiFe film 105 has in-plane magnetization. Further, a Pt electrode 106 is formed on the NiFe film 105, and both ends of the Pt electrode 106 are connected to terminals 107-1 and 107-2, respectively.

In the thermoelectric conversion element configured as described above, the NiFe film 105 plays a role of generating a spin current from the temperature gradient by the spin Seebeck effect, and the Pt electrode 106 generates an electromotive force from the spin current by the reverse spin Hall effect. Play a role. Specifically, when a temperature gradient is applied in the in-plane direction of the NiFe film 105, a spin current is generated in a direction parallel to the temperature gradient due to the spin Seebeck effect. Then, a spin current flows from the NiFe film 105 to the Pt electrode 106 or a spin current flows from the Pt electrode 106 to the NiFe film 105. In the Pt electrode 106, an electromotive force is generated in a direction orthogonal to the spin current direction and the NiFe magnetization direction by the inverse spin Hall effect. The electromotive force can be taken out from terminals 107-1 and 107-2 provided at both ends of the Pt electrode 106.

JP 2009-130070 A

Higher output of thermoelectric conversion element is desired.

In one aspect of the present invention, a thermoelectric conversion element is provided. The thermoelectric conversion element includes a plurality of stacked thermoelectric conversion unit structures. Each of the plurality of thermoelectric conversion unit structures includes a magnetic layer and an electromotive layer formed on the magnetic layer and formed of a material that exhibits spin-orbit interaction. Each thermoelectric conversion unit structure is folded so that the electromotive layer is exposed to the outside. Moreover, the electromotive layers are in contact between adjacent thermoelectric conversion unit structures.

In another aspect of the present invention, a method for manufacturing a thermoelectric conversion element is provided. The manufacturing method includes the step of (A) providing a thermoelectric conversion sheet. Here, the thermoelectric conversion sheet includes a magnetic layer and an electromotive layer formed on the magnetic layer and formed of a material that exhibits spin-orbit interaction. The manufacturing method further includes (B) a step of creating a thermoelectric conversion unit structure by folding the thermoelectric conversion sheet so that the electromotive layer is exposed to the outside, and (C) so that the electromotive layers are in contact with each other. Laminating a plurality of thermoelectric conversion unit structures.

According to the present invention, further increase in output of the thermoelectric conversion element is realized.

FIG. 1 is a perspective view schematically showing a thermoelectric conversion element described in Patent Document 1. As shown in FIG. FIG. 2 is a perspective view schematically showing the thermoelectric conversion element according to the embodiment of the present invention. FIG. 3 is a perspective view schematically showing a thermoelectric conversion unit structure in the embodiment of the present invention. FIG. 4 is a cross-sectional view showing a method for manufacturing a thermoelectric conversion element in the first example. FIG. 5 is a cross-sectional view showing a method for manufacturing a thermoelectric conversion element in the first example. FIG. 6 is a cross-sectional view showing a method for manufacturing a thermoelectric conversion element in the first example. FIG. 7 is a cross-sectional view showing the structure of the thermoelectric conversion element in the first example. FIG. 8 is a cross-sectional view showing another structure of the thermoelectric conversion element in the first example. FIG. 9 is a cross-sectional view showing still another structure of the thermoelectric conversion element in the first example. FIG. 10 is a cross-sectional view showing still another structure of the thermoelectric conversion element in the first example. FIG. 11 is a cross-sectional view illustrating a method for manufacturing a thermoelectric conversion element in the second example. FIG. 12 is a cross-sectional view showing a method for manufacturing a thermoelectric conversion element in the second example. FIG. 13 is a cross-sectional view showing a method for manufacturing a thermoelectric conversion element in the second example. FIG. 14 is a cross-sectional view showing a method for manufacturing a thermoelectric conversion element in the second example. FIG. 15 is a cross-sectional view showing the structure of the thermoelectric conversion element in the second example. FIG. 16 is a cross-sectional view showing another structure of the thermoelectric conversion element in the second example. FIG. 17 is a cross-sectional view showing still another structure of the thermoelectric conversion element in the second example.

Embodiments of the present invention will be described with reference to the accompanying drawings.

1. Basic Structure FIG. 2 is a perspective view schematically showing a thermoelectric conversion element 1 according to the present embodiment. The thermoelectric conversion element 1 has a laminated structure in which a plurality of thermoelectric conversion unit structures 10 are laminated. The stacking direction is the Z direction, and the in-plane directions orthogonal to the Z direction are the X direction and the Y direction. The X direction and the Y direction are orthogonal to each other.

A first conductive structure 51 is formed on the first side surface 11 of the laminated structure. A second conductive structure 52 is formed on the second side surface 12 of the laminated structure. Both the first conductive structure 51 and the second conductive structure 52 are conductors. The first side surface 11 and the second side surface 12 face each other in the X direction. That is, the first conductive structure 51 and the second conductive structure 52 face each other in the X direction.

FIG. 3 schematically shows a single thermoelectric conversion unit structure 10. The thermoelectric conversion unit structure 10 includes a magnetic layer 30 and an electromotive layer (conductive layer) 40. The electromotive layer 40 is formed on the magnetic layer 30. Typically, the electromotive layer 40 is in contact with the magnetic layer 30.

The magnetic layer 30 is formed of a material that exhibits a spin Seebeck effect. The material of the magnetic layer 30 may be a ferromagnetic metal or a magnetic insulator. Examples of the ferromagnetic metal include NiFe, CoFe, and CoFeB. Examples of magnetic insulators include yttrium iron garnet (YIG, Y ₃ Fe ₅ O ₁₂ ), YIG doped with bismuth (Bi) (Bi: YIG), and YIG added with lanthanum (La) (LaY ₂ Fe ₅ O ₁₂ ). And yttrium gallium iron garnet (Y ₃ Fe _5-x Ga _x O ₁₂ ). From the viewpoint of suppressing heat conduction by electrons, it is desirable to use a magnetic insulator.

The electromotive layer (conductive layer) 40 is formed of a material that exhibits a reverse spin Hall effect (spin orbit interaction). More specifically, the material of the electromotive layer 40 contains a metal material having a large spin orbit interaction. For example, Au, Pt, Pd, Ir, other metal materials having f orbitals having a relatively large spin-orbit interaction, or alloy materials containing them are used. Further, the same effect can be obtained by simply doping a general metal film material such as Cu with a material such as Au, Pt, Pd, or Ir by about 0.5 to 10%. Alternatively, the electromotive layer 40 may be an oxide such as ITO.

By the lamination of the magnetic layer 30 and the electromotive layer 40, the thermoelectric conversion unit structure 10 has a function as a “thermoelectric conversion portion” using the spin Seebeck effect and the inverse spin Hall effect. More specifically, the magnetic body 30 generates (drives) a spin current from the temperature gradient ∇T by the spin Seebeck effect. The direction of the spin current is parallel or antiparallel to the direction of the temperature gradient ∇T. The electromotive layer 40 generates an electromotive force from the spin current by the reverse spin Hall effect. Here, the direction of the generated electromotive force is given by the outer product of the direction of the magnetization M of the magnetic layer 30 and the direction of the temperature gradient ∇T (E, J // M × ∇T).

In the present embodiment, the thermoelectric conversion unit structure 10 is configured such that the direction of the electromotive force in the electromotive layer 40 is the in-plane direction for efficient power generation. For example, as shown in FIG. 3, the direction of the magnetization M of the magnetic layer 30 is the −Y direction, the direction of the temperature gradient ∇T is the −Z direction, and the direction of the electromotive force is the + X direction. Note that the magnetization M of the magnetic layer 30 only needs to include at least a Y-direction component, thereby generating at least an electromotive force in the X direction.

Here, the end portion of the electromotive layer 40 on the first side surface 11 side (−X direction side) is a first end portion 41. On the other hand, an end portion of the electromotive layer 40 on the second side surface 12 side (+ X direction side) is a second end portion 42. The first end portion 41 and the second end portion 42 face each other in the X direction. The first end 41 of the electromotive layer 40 is physically connected to the first conductive structure 51 shown in FIG. On the other hand, the second end portion 42 of the electromotive layer 40 is physically connected to the second conductive structure 52 shown in FIG. Note that “physically connected” includes the case where the electromotive layer 40 and the first conductive structure 51 or the second conductive structure 52 are integrally formed. That is, the electromotive layer 40 and the first conductive structure 51 or the second conductive structure 52 may be formed separately or integrally.

When the first end 41 (second end 42) of the electromotive layer 40 of each thermoelectric conversion unit structure 10 is physically connected to the first conductive structure 51 (second conductive structure 52), a plurality of stacked layers The electromotive layers 40 of the thermoelectric conversion unit structure 10 are electrically connected to each other.

The first conductive structure 51 and the second conductive structure 52 are preferably formed of a low resistance material. For example, the material of the first conductive structure 51 and the second conductive structure 52 is Pt. In order to reduce the resistance, it is desirable that the thickness of the first conductive structure 51 and the second conductive structure 52 in the X direction is larger than the thickness of the electromotive layer 40 in the Z direction.

As described above, in the thermoelectric conversion element 1 according to the present embodiment, a plurality of thermoelectric conversion unit structures 10 are laminated. The electromotive layer 40 of each thermoelectric conversion unit structure 10 is commonly connected to the first conductive structure 51 and the second conductive structure 52. Therefore, by using the first conductive structure 51 and the second conductive structure 52, it is possible to simultaneously extract the electromotive force generated in the plurality of thermoelectric conversion unit structures 10. Thereby, it is possible to increase the power generation amount, that is, the output power without increasing the element area.

Note that the resistance value between the first end 41 and the second end 42 of the single electromotive layer 40 is “R1”, and the entire first conductive structure 51 (second conductive structure 52) in the Z direction. When the resistance value is “R2”, the condition “R1> R2” is preferably satisfied.

2. 1st example Next, the 1st example of the manufacturing method of the thermoelectric conversion element 1 which concerns on this Embodiment is demonstrated.

First, as shown in FIG. 4, the magnetic layer 30 is formed on the substrate 20, and the electromotive layer 40 is formed on the magnetic layer 30. Further, the lamination of the substrate 20, the magnetic layer 30 and the electromotive layer 40 is taken as one unit, and the lamination is repeated a plurality of times.

Next, a portion corresponding to a desired element size is cut out from the laminated structure shown in FIG. As a result, the laminated structure shown in FIG. 5 is obtained. The side surface on the −X direction side of the stacked structure is the first side surface 11, and the side surface on the + X direction side is the second side surface 12. Here, the laminated structure of the substrate 20, the magnetic layer 30 and the electromotive layer 40 corresponds to a single thermoelectric conversion unit structure 10. The end of the electromotive layer 40 on the first side surface 11 side (−X direction side) is the first end portion 41, and the end of the electromotive layer 40 on the second side surface 12 side (+ X direction side) is the first end portion 41. Two end portions 42.

Next, as shown in FIG. 6, a conductive film is formed from the lateral direction. As a result, the first conductive structure 51 is formed so as to be in contact with the first side surface 11, and the second conductive structure 52 is formed so as to be in contact with the second side surface 12.

Further, as shown in FIG. 7, a first external terminal 61 and a second external terminal 62 are attached to the first conductive structure 51 and the second conductive structure 52, respectively. The first external terminal 61 and the second external terminal 62 are used for taking out electric power.

By the method described above, the structure shown in FIGS. 2 and 3 is obtained. The magnetization process of the magnetic layer 30 may be performed at any timing.

Thus, the electromotive layer 40 and the first conductive structure 51 (second conductive structure 52) are electrically connected by being in physical contact. Therefore, it is possible to simultaneously extract the electromotive force generated in the plurality of thermoelectric conversion unit structures 10. Thereby, it is possible to increase the power generation amount, that is, the output power without increasing the element area.

As shown in FIG. 8, in the single thermoelectric conversion unit structure 10, electromotive layers 40 may be formed above and below the magnetic layer 30.

Further, in order to increase the contact area between the electromotive layer 40 and the first conductive structure 51 (second conductive structure 52) (that is, to reduce the contact resistance), as shown in FIG. The side surface 11 (second side surface 12) may be formed in a slope shape.

Alternatively, as shown in FIG. 10, the first electrode 45 and the second electrode 46 may be formed on both ends of the electromotive layer 40. The first electrode 45 and the second electrode 46 are made of a low resistance material (eg, Cu) and extend in the Y direction. The side surface of the first electrode 45 is in contact with the first conductive structure 51 together with the first end 41 of the electromotive layer 40. On the other hand, the side surface of the second electrode 46 is in contact with the second conductive structure 52 together with the second end portion 42 of the electromotive layer 40. Such a structure also increases the contact area with the first conductive structure 51 and the second conductive structure 52 (that is, the contact resistance is reduced).

When the thermoelectric conversion unit structure 10 as shown in FIG. 10 is stacked, if a space remains between the first electrode 45 and the second electrode 46, the heat conduction is reduced in the space, and the power generation efficiency is reduced. Becomes worse. Therefore, as shown in FIG. 10, the insulating film 47 may be formed on the electromotive layer 40 so as to fill the space between the first electrode 45 and the second electrode 46. The insulating film 47 is made of a material having high thermal conductivity (low thermal resistance), for example, polyimide. Such an insulating film 47 prevents generation of spaces in the laminated structure and improves power generation efficiency.

3. Second Example Next, a second example of the manufacturing method of the thermoelectric conversion element 1 according to the present embodiment will be described.

From the viewpoint of efficiency, it is desirable to set the thickness of the electromotive layer 40 to about the “spin diffusion length (spin relaxation length)” depending on the material. For example, when the electromotive layer 40 is a Pt film, the film thickness is preferably set to about 10 to 30 nm. However, in the above first example, the electromotive layer 40 and the first conductive structure 51 (second conductive structure 52) are formed by separate processes. In this case, the contact resistance between the thin electromotive layer 40 and the first conductive structure 51 (second conductive structure 52) is inevitably increased. That is, the contact portions (the first end portion 41 and the second end portion 42) with respect to the thin electromotive layer 40 are increased in resistance. The second example is for solving such a problem.

First, a thermoelectric conversion sheet 70 as shown in FIG. 11 is provided. This thermoelectric conversion sheet 70 also has a laminated structure of the substrate 20, the magnetic layer 30 and the electromotive layer 40. However, the thermoelectric conversion sheet 70 has flexibility. Here, flexibility includes the concepts of both plasticity and elasticity. That is, the thermoelectric conversion sheet 70 can be bent.

For example, the substrate 20 is a polyimide substrate (thickness: 25 μm), the magnetic layer 30 is a ferrite magnetic body (thickness: 3 μm), and the electromotive layer 40 is a Pt film (thickness: 10 nm). The ferrite magnetic body is formed by, for example, a ferrite plating method. The Pt film is formed by sputtering, for example. Such a substrate 20, the magnetic layer 30 and the electromotive layer 40 realize a flexible thermoelectric conversion sheet 70.

Next, as shown in FIG. 12, the thermoelectric conversion sheet 70 is folded so that the electromotive layer 40 is exposed to the outside. At this time, the thermoelectric conversion sheet 70 is bent at two locations. The bent portions corresponding to these two locations in the electromotive layer 40 are the “first side surface conductive portion 40S1” and the “second side surface conductive portion 40S2”. The first side surface conductive portion 40S1 and the second side surface conductive portion 40S2 face each other in the X direction. Among these, the first side surface conductive portion 40S1 is located on the −X direction side, and the second side surface conductive portion 40S2 is located on the + X direction side.

Further, the portion of the electromotive layer 40 exposed in the upward direction (+ Z direction) is hereinafter referred to as “upper electromotive layer 40U”. On the other hand, the portion of the electromotive layer 40 that is exposed in the downward direction (−Z direction) is hereinafter referred to as a “lower electromotive layer 40L”. That is, the upper electromotive layer 40U is formed on the upper surface side, and the lower electromotive layer 40L is formed on the lower surface side. Each of the upper electromotive layer 40U and the lower electromotive layer 40L corresponds to the single electromotive layer 40 shown in FIG.

The upper electromotive layer 40U (lower electromotive layer 40L) and the first side surface conductive portion 40S1 are integrally formed. A transition portion from the upper electromotive layer 40U (lower electromotive layer 40L) to the first side surface conductive portion 40S1 corresponds to the first end portion 41 shown in FIG. That is, the first side conductive portion 40S1 is integrated with the upper electromotive layer 40U (lower electromotive layer 40L) so as to extend from the first end 41 of the upper electromotive layer 40U (lower electromotive layer 40L). Is formed. The transition portion from the upper electromotive layer 40U (lower electromotive layer 40L) to the first side surface conductive portion 40S1 has a certain radius of curvature.

Similarly, the upper electromotive layer 40U (lower electromotive layer 40L) and the second side surface conductive portion 40S2 are integrally formed. A transition portion from the upper electromotive layer 40U (lower electromotive layer 40L) to the second side surface conductive portion 40S2 corresponds to the second end portion 42 shown in FIG. That is, the second side conductive portion 40S2 is formed integrally with the upper electromotive layer 40U (lower electromotive layer 40L) so as to extend from the second end portion 42. The transition portion from the upper electromotive layer 40U (lower electromotive layer 40L) to the second side surface conductive portion 40S2 has a certain radius of curvature.

Such a structure shown in FIG. 12 corresponds to the thermoelectric conversion unit structure 10 according to the present embodiment. In the case of the thermoelectric conversion unit structure 10 shown in FIG. 12, in the electromotive layer 40 excluding the first side surface conductive portion 40S1 and the second side surface conductive portion 40S2 (that is, the upper electromotive layer 40U and the lower electromotive layer 40L), An electromotive force in the direction is generated.

As shown in FIG. 13, as a result of bending, a gap 15 may exist on the lower surface side of the thermoelectric conversion unit structure 10.

Next, as shown in FIG. 14, the thermoelectric conversion unit structure 10 shown in FIG. 12 (or FIG. 13) is laminated in a plurality of stages. At this time, the electromotive layers 40 are in contact with each other over a wide area between the thermoelectric conversion unit structures 10 that are vertically adjacent to each other. More specifically, the lower electromotive layer 40L of the upper thermoelectric conversion unit structure 10 and the upper electromotive layer 40U of the lower thermoelectric conversion unit structure 10 are in contact with each other.

Further, it is preferable that the first side surface conductive portions 40S1 are physically connected to each other between the thermoelectric conversion unit structures 10 adjacent to each other in the vertical direction. In this case, the “first conductive structure 51” shown in FIG. 2 is formed by connecting the first side surface conductive portions 40S1 of the plurality of thermoelectric conversion unit structures 10 stacked.

Similarly, it is preferable that the second side surface conductive portions 40S2 are physically connected to each other between the thermoelectric conversion unit structures 10 that are vertically adjacent to each other. In this case, the second side conductive portions 40S2 of the plurality of laminated thermoelectric conversion unit structures 10 are connected to form the “second conductive structure 52” shown in FIG.

Further, as shown in FIG. 15, a first external terminal 61 and a second external terminal 62 are attached to the first conductive structure 51 and the second conductive structure 52, respectively. The first external terminal 61 and the second external terminal 62 are used for taking out electric power.

In this way, the electromotive layers 40 of the plurality of laminated thermoelectric conversion unit structures 10 are electrically connected to each other. Therefore, it is possible to simultaneously extract the electromotive force generated in the plurality of thermoelectric conversion unit structures 10. Thereby, it is possible to increase the power generation amount, that is, the output power without increasing the element area.

Further, according to the second example, the thermoelectric conversion unit structure 10 is formed by bending the thermoelectric conversion sheet 70. Furthermore, the thermoelectric conversion element 1 is formed by laminating the thermoelectric conversion unit structure 10 in a plurality of stages. At this time, the electromotive layers 40 of the thermoelectric conversion unit structures 10 adjacent to each other in the vertical direction are in contact with each other over a wide area. Therefore, a portion having a high contact resistance as generated in the first example is eliminated. That is, according to the second example, it is possible to further increase the output as compared with the first example.

FIG. 16 shows a lamination example in which the lower electromotive layers 40L of the thermoelectric conversion unit structure 10 shown in FIG. 13 are in contact with each other as a modification. When the positions of the gaps 15 of the upper and lower thermoelectric conversion unit structures 10 coincide with each other, the current in the X direction is interrupted at that portion. In this case, the effect is not completely lost, but is reduced. Therefore, it is preferable to stack the upper electromotive layer 40U and the lower electromotive layer 40L in contact with each other. Alternatively, as shown in FIG. 12, it is preferable that the thermoelectric conversion sheet 70 is bent so that the gap 15 is not formed.

FIG. 17 shows another modification. As shown in FIG. 17, the thermoelectric conversion sheet 70 may be bent so as to be wound around the support 80. In this case, breakage of the thermoelectric conversion sheet 70 is suppressed, and the strength of the thermoelectric conversion element 1 as a whole increases.

The embodiments of the present invention have been described above with reference to the accompanying drawings. However, the present invention is not limited to the above-described embodiments, and can be appropriately changed by those skilled in the art without departing from the scope of the invention.

Some or all of the above embodiments can be described as in the following supplementary notes, but are not limited thereto.

(Appendix 1)
It has a plurality of laminated thermoelectric conversion unit structures,
Each of the plurality of thermoelectric conversion unit structures is
A magnetic layer;
An electromotive layer formed on the magnetic layer and formed of a material that exhibits spin-orbit interaction, and
Each thermoelectric conversion unit structure is folded so that the electromotive layer is exposed to the outside,
A thermoelectric conversion element in which the electromotive layers are in contact with each other between adjacent thermoelectric conversion unit structures.

(Appendix 2)
The thermoelectric conversion element according to attachment 1, wherein
The electromotive layer of each thermoelectric conversion unit structure is bent at the first side surface conductive portion and the second side surface conductive portion,
The thermoelectric conversion element in which the first side surface conductive parts are physically connected to each other between the adjacent thermoelectric conversion unit structures and the second side surface conductive parts are physically connected to each other.

(Appendix 3)
The thermoelectric conversion element according to appendix 1 or 2,
The first side surface conductive portion and the second side surface conductive portion are opposed to each other in the first in-plane direction,
Each of the thermoelectric conversion unit structures is configured such that an electromotive force is generated in the first in-plane direction in the electromotive layer excluding the first side surface conductive portion and the second side surface conductive portion. .

(Appendix 4)
The thermoelectric conversion element according to attachment 3, wherein
The thermoelectric conversion element, wherein the magnetization of the magnetic layer includes a component in a second in-plane direction orthogonal to the first in-plane direction.

(Appendix 5)
A laminated structure in which a plurality of thermoelectric conversion unit structures are laminated;
A first conductive structure formed on a first side surface of the laminated structure;
A second conductive structure formed on the second side surface of the laminated structure,
Each of the plurality of thermoelectric conversion unit structures is
A magnetic layer;
An electromotive layer formed on the magnetic layer and formed of a material that exhibits spin-orbit interaction, and
A first end that is an end of the electromotive layer on the first side surface is physically connected to the first conductive structure;
The thermoelectric conversion element in which the 2nd edge part which is an edge part of the said 2nd side surface side of the said electromotive layer is physically connected with the said 2nd conductive structure.

(Appendix 6)
The thermoelectric conversion element according to appendix 5,
The first side surface and the second side surface are opposed in the first in-plane direction,
Each of the thermoelectric conversion unit structures is configured to generate an electromotive force in the first in-plane direction in the electromotive layer.

(Appendix 7)
The thermoelectric conversion element according to attachment 6, wherein
The thermoelectric conversion element, wherein the magnetization of the magnetic layer includes a component in a second in-plane direction orthogonal to the first in-plane direction.

(Appendix 8)
The thermoelectric conversion element according to any one of appendices 5 to 7,
Each thermoelectric conversion unit structure further includes:
A first side surface conductive portion formed integrally with the electromotive layer so as to extend from the first end of the electromotive layer to the first side surface;
A second side surface conductive portion formed integrally with the electromotive layer so as to extend from the second end portion of the electromotive layer to the second side surface;
The first conductive structure is formed by physically connecting the first side surface conductive portions between adjacent thermoelectric conversion unit structures,
The thermoelectric conversion element in which the second conductive structure is formed by physically connecting the second side-surface conductive portions between adjacent thermoelectric conversion unit structures.

(Appendix 9)
The thermoelectric conversion element according to attachment 8, wherein
The electromotive layer of each thermoelectric conversion unit structure is:
An upper electromotive layer formed on the upper surface side of each thermoelectric conversion unit structure;
A lower electromotive layer formed on the lower surface side of each thermoelectric conversion unit structure,
The thermoelectric conversion element in which the upper electromotive layer and the lower electromotive layer are in contact between adjacent thermoelectric conversion unit structures.

(Appendix 10)
The thermoelectric conversion element according to appendix 8 or 9,
Each of the thermoelectric conversion unit structures is a thermoelectric conversion element formed of a flexible material.

(Appendix 11)
(A) providing a thermoelectric conversion sheet;
Here, the thermoelectric conversion sheet is
A magnetic layer;
An electromotive layer formed on the magnetic layer and formed of a material that exhibits spin-orbit interaction, and
(B) creating a thermoelectric conversion unit structure by folding the thermoelectric conversion sheet so that the electromotive layer is exposed to the outside;
(C) A step of laminating the thermoelectric conversion unit structures in a plurality of stages so that the electromotive layers are in contact with each other.

(Appendix 12)
A method of manufacturing a thermoelectric conversion element according to appendix 11,
In the step of creating the thermoelectric conversion unit structure, the electromotive layer is bent at the first side surface conductive portion and the second side surface conductive portion,
The method of manufacturing a thermoelectric conversion element, wherein in the step of laminating the thermoelectric conversion unit structures in a plurality of stages, the first side surface conductive parts are physically connected to each other, and the second side surface conductive parts are physically connected to each other.

This application claims the priority on the basis of the Japan patent application 2012-153414 for which it applied on July 9, 2012, and takes in those the indications of all here.

Claims

It has a plurality of laminated thermoelectric conversion unit structures,
Each of the plurality of thermoelectric conversion unit structures is
A magnetic layer;
An electromotive layer formed on the magnetic layer and formed of a material that exhibits spin-orbit interaction, and
Each thermoelectric conversion unit structure is folded so that the electromotive layer is exposed to the outside,
A thermoelectric conversion element in which the electromotive layers are in contact with each other between adjacent thermoelectric conversion unit structures.
The thermoelectric conversion element according to claim 1,
The electromotive layer of each thermoelectric conversion unit structure is bent at the first side surface conductive portion and the second side surface conductive portion,
The thermoelectric conversion element in which the first side surface conductive parts are physically connected to each other between the adjacent thermoelectric conversion unit structures and the second side surface conductive parts are physically connected to each other.
The thermoelectric conversion element according to claim 1 or 2,
The first side surface conductive portion and the second side surface conductive portion are opposed to each other in the first in-plane direction,
Each of the thermoelectric conversion unit structures is configured such that an electromotive force is generated in the first in-plane direction in the electromotive layer excluding the first side surface conductive portion and the second side surface conductive portion. .
The thermoelectric conversion element according to claim 3,
The thermoelectric conversion element, wherein the magnetization of the magnetic layer includes a component in a second in-plane direction orthogonal to the first in-plane direction.
(A) providing a thermoelectric conversion sheet;
Here, the thermoelectric conversion sheet is
A magnetic layer;
An electromotive layer formed on the magnetic layer and formed of a material that exhibits spin-orbit interaction, and
(B) creating a thermoelectric conversion unit structure by folding the thermoelectric conversion sheet so that the electromotive layer is exposed to the outside;
(C) A step of laminating the thermoelectric conversion unit structures in a plurality of stages so that the electromotive layers are in contact with each other.
It is a manufacturing method of the thermoelectric conversion element according to claim 5,
In the step of creating the thermoelectric conversion unit structure, the electromotive layer is bent at the first side surface conductive portion and the second side surface conductive portion,
The method of manufacturing a thermoelectric conversion element, wherein in the step of laminating the thermoelectric conversion unit structures in a plurality of stages, the first side surface conductive parts are physically connected to each other, and the second side surface conductive parts are physically connected to each other.