WO2013191412A1 - Complex three-dimensional multi-layer structure and manufacturing method thereof - Google Patents

Abstract

The present invention relates to a complex three-dimensional multi-layer structure, and more specifically, provides a complex three-dimensional multi-layer structure characterized in that a first pattern and a second pattern having different thicknesses are formed on one surface or both surfaces of a plate phase, the first pattern is selected from a group consisting of parallel lines, parallel curves, parallel zigzag lines and a combination thereof, none of which cross each other, the second pattern which is not parallel to the first pattern is selected from a group consisting of parallel lines, parallel curves, parallel zigzag lines and a combination thereof, none of which cross each other, a boundary of the first pattern and the second pattern is a figure selected from a group consisting of a polygon, a circle, an oval and a combination thereof, and the figure is repeatedly formed on the one surface or the both surfaces of the plate phase. Unlike the conventional device having only a simple pattern, the complex three-dimensional multi-layer structure of the present invention has complexly formed different patterns and can be manufactured by a simple process, and thus the three-dimensional complex multi-layer structure of the present invention can be useful for display optical parts (light guide plates, diffusion plates, prisms, and color filters), next-generation display processes (TFTs, OTFTs, oxide TFTs, flexible displays and transparent displays), next-generation three-dimensional semiconductors, dry adhesion using a miniature cilia structure, micro/nano piezoelectric elements, lighting optical parts, biocell/virus researches using micro patterns, and the like.

Description

[Correction 26.06.2013 based on Article 26 of the Rule] Three-dimensional complex multilayer structure and its manufacturing method

The present invention relates to a three-dimensional complex multilayer structure, and more particularly, to a three-dimensional complex multilayer structure having a complex shape that can be utilized in various fields such as optics, metrology, and integrated circuits and other micro devices and It is about how it can be.

BACKGROUND OF THE INVENTION With advances in optics, metrology, and integrated circuits and other microdevices, research into micro / nano sized structures with complex three-dimensional shapes is being actively conducted. These structures include not only optical components but also next-generation three-dimensional semiconductors, next-generation displays (TFT backplanes, flexible TFTs, transparent displays, etc.), dry adhesion using micro-ciliary structures, micro / nano piezoelectric elements, lighting, and biocell / virus research using micropatterns. This is because it can be used in various fields.

Referring to the optical component in detail, in recent years, various flat panel display apparatuses that can reduce the weight and volume, which are disadvantages of cathode ray tubes, have been developed. Such flat panel displays include Liquid Crystal Display (LCD), Field Emission Display (FED), Plasma Display Panel (PDP) and Electro-Luminescence (EL) display. The flat panel display apparatus has been actively researched to improve the display quality and to make a large screen.

In particular, the liquid crystal display (LCD) of the flat panel display device has a number of advantages, such as small size / light weight and low power consumption is increasingly used. The liquid crystal display is a non-light emitting display that displays information by using the electrical / optical properties of the liquid crystal injected into the liquid crystal display panel and expresses an image by using a light source such as a lamp. That is, unlike a cathode ray tube, a liquid crystal display device is a liquid crystal material injected between a TFT substrate and a color filter substrate, not a light emitting material that emits light, but a light receiving material that controls the amount of light coming from the outside and displays it on the screen. A separate device, ie, a backlight assembly, for irradiating light to the display panel is necessary.

The backlight assembly includes a mold frame in which a storage space is formed, a reflection sheet installed on a base surface of the storage space to reflect light toward the liquid crystal display panel, a light guide plate or diffuser plate installed on the reflective surface to guide light, a light guide plate and a storage space. A lamp unit disposed between sidewalls or at the bottom of the lamp unit to emit light, optical sheets stacked on an upper surface of the light guide plate to diffuse and collect light, and installed on an upper part of the mold frame, It consists of a top chassis covering an area leading to the side.

Among them, the light guide plate or the diffuser plate has a disadvantage in that the emission angle or the front luminance is very low, and the optical sheet must be placed thereon.

The optical sheets may include a diffusion sheet for diffusing light, a prism sheet for condensing the diffused light stacked on the upper surface of the diffusion sheet and transferring the light to a liquid crystal display panel, and a protective sheet for protecting the diffusion sheet and the prism sheet. It consists of.

As described above, since the number of optical sheets used in the display device is large and expensive, reducing the number of optical sheets has become a major technical issue. In order to reduce the number of optical sheets, for example, when replacing the diffusion sheet and prism sheet with one optical sheet, the one optical sheet has both the functions of the diffusion sheet and the prism sheet, and its performance is large. It should be no less than when using an optical sheet.

In addition, the one optical sheet should not deteriorate the image quality on the display panel obtained when a plurality of optical sheets are used. As described above, there are many disclosures of techniques for allowing one optical sheet to have a complex function. For example, Korean Patent Laid-Open Publication No. 10-2009-0073532 and Korean Patent Publication No. 10-2011-0017194 disclose a composite optical sheet having different patterns formed on its upper and lower surfaces.

Furthermore, a light diffusing layer including a prism pattern or a plurality of lenses on an upper surface of the transparent film and diffusion beads on a lower surface of the transparent film facing the light source, or forming a plurality of layers having different refractive indices, or including air bubbles Techniques for forming the same have been proposed.

However, it is a reality that the multifunctional optical sheet developed according to the above-described conventional techniques does not sufficiently satisfy image quality conditions such as luminance, contrast ratio, etc. which can be achieved by a plurality of conventional optical sheets. Accordingly, there is a need for the development of an optical sheet having a complex function capable of satisfying image quality conditions such as brightness and contrast ratio requirements on a display screen, which can replace a plurality of optical sheets used in a display device.

Furthermore, the light guide plate serves as one or more optical sheets, or a light collecting sheet or a light collecting plate in a photovoltaic device is also required for an optical sheet that can perform such a complex function. Can be solved.

Conventional methods for manufacturing complex three-dimensional structures can be fabricated in order by using lithography or imprinting processes, or after the first pattern is formed on a substrate, and then surface treated by chemical and physical methods. How to process.

However, these methods require two or more steps in forming a multi-layered pattern of two layers, and there are many restrictions on the structure or size of the second pattern or the third pattern that can be manufactured. Therefore, there is a need for a method capable of manufacturing a three-dimensional complex multilayer structure in a simpler process.

The present invention is a complex shape that can be used in a variety of fields, such as next generation three-dimensional semiconductor, next-generation display, optical components, dry adhesion using micro-ciliary structure, micro / nano piezoelectric element, lighting equipment, bio-cell / virus research using micropattern It is an object to provide a three-dimensional complex multilayer structure having.

Another object of the present invention is to provide a method of manufacturing the three-dimensional complex multilayer structure.

The present invention to achieve the object as described above,

First and second patterns having different thicknesses are formed on one or both surfaces of the plate,

The first pattern is selected from the group consisting of parallel lines, parallel curves, parallel zigzag lines, and combinations thereof, which do not meet each other,

The second pattern is selected from the group consisting of parallel lines, parallel curves, parallel zigzag lines, and combinations thereof, which are not parallel to the first pattern and do not meet each other,

The boundary between the first pattern and the second pattern is a figure selected from the group consisting of polygons, circles, ellipses, and combinations thereof.

The figure provides a three-dimensional complex multilayer structure characterized in that it is repeatedly formed on one side or both sides of the plate.

In addition, in the three-dimensional complex multilayer structure of the present invention, the parallel direction of the first pattern and the parallel direction of the second pattern may be perpendicular to each other.

In addition, the three-dimensional complex multilayer structure of the present invention may have a third pattern to form the first pattern and the second pattern spaced apart by a predetermined height.

In addition, the first pattern and the second pattern may be formed of a thermosetting resin or an active energy ray curable resin.

In addition, a cross section perpendicular to the parallel direction of the first pattern and the second pattern forms a waveform, and a pair of valleys adjacent to each other and a floor between them are triangular vertices and arches, respectively, among the waveforms formed by the cross section. One end of the string and one of the arcs of the chord, both the end of the chord of the elliptic chord and one of the elliptical arcs, or the floor of the triangle may be rounded off.

In addition, in the three-dimensional complex multilayer structure of the present invention, when the pair of valleys adjacent to each other among the waveforms formed by the cross section and the floor between them are three vertices of a triangle or the floor is a rounded triangle, the included angle (narrow angle) of the floor is 30 To 150 °.

In addition, the height from the valley to the floor of the waveform formed by the cross section may be 1 to 500 μm.

In addition, the three-dimensional complex multilayer structure may have a refractive index of 1.3 to 1.9.

In addition, the diameter, the long diameter or the length of one side of the repeated figure may be 1 to 5000 μm.

The present invention also provides an optical component, a semiconductor device, a piezoelectric device or a biosensor using the three-dimensional complex multilayer structure.

The optical component may be an optical sheet, a light guide plate of an edge type liquid crystal display device, a diffusion plate of a direct type liquid crystal display device, or a light collecting plate of a photovoltaic device.

On the other hand, the manufacturing method of the three-dimensional complex multilayer structure of the present invention

(A) preparing a second basic mold having a first pattern selected from the group consisting of parallel lines, parallel curves, parallel zigzag lines, and combinations thereof, which do not meet each other on one surface;

(B) a flexible or rigid plate-like first support through which the active energy ray is transmitted; A mask in which a polygon, a circle, an ellipse or a combination thereof is repeatedly formed on one surface of the first support, or a polygon, a circle, an ellipse or a combination thereof is repeatedly perforated; And a second layer formed on a portion of the pattern layer having a second pattern formed on the surface opposite to the surface facing the first support and the mask, or the one surface of the first support on which the mask is formed. Preparing a mask mold including a pattern, wherein the mask does not transmit active energy rays;

(C) applying a resin for a second mold on the first pattern of the second base mold or the mask mold,

(D) bringing the second base mold into close contact with the mask mold around the resin for the second mold such that the parallel direction of the second pattern is not parallel to the parallel direction of the first pattern;

(E) pressing the mask mold in the direction of the resin for the second mold, and curing the resin for the second mold to form a second mold by irradiating or heating an active energy ray on the mask mold;

(F) separating the mask mold from the second mold; And

(G) dissolving and removing the uncured portion of the second mold resin with a solvent

Characterized in that it comprises a.

In addition, the method of manufacturing a three-dimensional complex multilayer structure of the present invention after the step (G),

(H) applying a resin for a third mold to the master passed through the step (G);

(I) bringing the second supporter into close contact with the third mold resin;

(J) pressing the second support in the direction of the master and curing the resin for the third mold by irradiating or heating an active energy ray to form a third mold;

(K) separating the third mold from the master;

(L) coating a resin for the pattern on the third mold or substrate;

(M) bringing the third mold into close contact with the substrate around the resin for the pattern;

(N) hardening the resin for the pattern to form a pattern by irradiating or heating an active energy ray on the third mold or the substrate; And

(O) separating the patterned three-dimensional complex multilayer structure from the third mold

It may include.

In addition, the second pattern may be selected from the group consisting of parallel lines, parallel curves, parallel zigzag lines, and combinations thereof, which are not parallel to the first pattern and do not meet each other.

In addition, in the step (D), when the second base mold and the mask mold is in close contact with the resin for the second mold, the first pattern and the second pattern is formed to be spaced apart by a predetermined height It can be made to adhere so much that a 3 pattern can be provided.

In addition, in the method of manufacturing a three-dimensional complex multilayer structure of the present invention, in the step (D), the second mold is formed around the resin for the second mold so that the parallel direction of the second pattern is orthogonal to the parallel direction of the first pattern. 2 The base mold and the mask mold can be in close contact.

In addition, a cross section perpendicular to the parallel direction of the first pattern and the second pattern forms a waveform, and a pair of valleys adjacent to each other and a floor between them are triangular vertices and arches, respectively, among the waveforms formed by the cross section. One end of the string and one of the arcs of the chord, both the end of the chord of the elliptic chord and one of the elliptical arcs, or the floor of the triangle may be rounded off.

In addition, the three-dimensional complex multilayer structure having the first pattern and the second pattern may be formed on only one surface of the substrate, or may be formed on both surfaces.

In addition, the first pattern may be thicker than the second pattern, or the second pattern may be thicker than the first pattern.

On the other hand, the mask mold is a flexible or rigid plate-like first support for transmitting the active energy ray,

A mask in which a polygon, a circle, an ellipse, or a combination thereof is repeatedly formed on one surface of the first support, or a polygon, a circle, an ellipse, or a combination thereof is repeatedly perforated, and

A pattern layer covering the first support and the mask and having a pattern formed on a surface opposite to the surface facing the first support.

Including,

The mask is characterized in that it does not transmit the active energy ray.

On the other hand, the mask mold is a flexible or rigid plate-like first support for transmitting the active energy ray,

A mask in which a polygon, a circle, an ellipse, or a combination thereof is repeatedly formed on one surface of the first support, or a polygon, a circle, an ellipse, or a combination thereof is repeatedly perforated, and

The pattern formed on the exposed portion of the first support of one surface of the first support on which the mask is formed

Including,

The mask is characterized in that it does not transmit the active energy ray.

In addition, the first support and the mask may further include an adhesion-activating layer between the pattern layer.

In addition, the pattern layer, pattern or adhesion active layer may be cured by active energy rays or heat.

In addition, the first pattern and the second pattern may be a pattern selected from the group consisting of parallel lines, parallel curves, parallel zigzag lines and combinations thereof that do not meet each other.

In addition, the mask may be printed colored coating or deposited opaque metal.

On the other hand, the manufacturing method of the mask mold of the present invention

Printing and color-coating a portion of one surface of the flexible or rigid plate-shaped first support through which the active energy ray is transmitted;

Applying a resin for a first mold to an active energy ray transmitting first basic mold or a surface on which a colored coating is printed;

Bringing the first support and the first base mold into close contact with each other based on the first mold resin;

Pressing the first support toward the first base mold and irradiating or heating an active energy ray to the first base mold to cure the first mold resin to form a mask mold; And

Separating the mask mold from the first base mold

It includes, The colored coating is characterized in that it does not transmit the active energy ray.

On the other hand, the manufacturing method of the mask mold of the present invention

Printing and color-coating a portion of one surface of the flexible or rigid plate-shaped first support through which the active energy ray is transmitted;

Applying a resin for an adhesion-activating layer to a surface on which a colored coating is printed in the first support;

Irradiating or heating an active energy ray on the resin for an adhesion active layer to cure the adhesion active layer to form an adhesion active layer;

Applying a resin for a first mold to an active energy ray transmitting first base mold or the adhesion active layer;

Bringing the adhesion-activating layer and the first base mold into close contact with each other based on the first mold resin;

Pressing the first support toward the first base mold and irradiating or heating an active energy ray to the first base mold to cure the first mold resin to form a mask mold; And

Separating the mask mold from the first base mold

It includes, The colored coating is characterized in that it does not transmit the active energy ray.

In addition, the colored coating may be printed such that a polygon, a circle, an ellipse or a combination thereof is repeatedly printed, or a polygon, a circle, an ellipse or a combination thereof is repeatedly printed.

On the other hand, the manufacturing method of the mask mold of the present invention

Covering a portion of one surface of the flexible or rigid plate-shaped first support through which the active energy ray is transmitted with a shadow mask and depositing an opaque metal;

Applying a resin for a first mold to an active energy ray transmitting first base mold or a surface on which an opaque metal is deposited in the first support;

Bringing the first support and the first base mold into close contact with each other based on the first mold resin;

Pressing the first support toward the first base mold and irradiating or heating an active energy ray to the first base mold to cure the first mold resin to form a mask mold; And

Separating the mask mold from the first base mold

It includes, The opaque metal is characterized in that it does not transmit the active energy ray.

On the other hand, the manufacturing method of the mask mold of the present invention

Covering a portion of one surface of the flexible or rigid plate-shaped first support through which the active energy ray is transmitted with a shadow mask and depositing an opaque metal;

Applying a resin for an adhesion-active layer to a surface on which an opaque metal is deposited in the first support;

Irradiating or heating an active energy ray on the resin for an adhesion active layer to cure the adhesion active layer to form an adhesion active layer;

Applying a resin for a first mold to an active energy ray transmitting first base mold or the adhesion active layer;

Bringing the adhesion-activating layer and the first base mold into close contact with each other based on the first mold resin;

Pressing the first support toward the first base mold and irradiating or heating an active energy ray to the first base mold to cure the first mold resin to form a mask mold; And

Separating the mask mold from the first base mold

It includes, The opaque metal is characterized in that it does not transmit the active energy ray.

In addition, the opaque metal may be deposited such that a polygon, a circle, an ellipse, or a combination thereof is repeatedly deposited, or a polygon, a circle, an ellipse, or a combination thereof is repeatedly drilled.

On the other hand, the mask mold of the present invention is characterized in that it is manufactured by the manufacturing method.

The three-dimensional complex multilayer structure according to the present invention is different from the conventional device formed with only one simple pattern, and different patterns are formed in a complex, and can be manufactured by a simple process, and thus display optical components (light guide plates, diffuser plates, prisms, Color filter), next-generation display process (TFT, OTFT, Oxide TFT, flexible display, transparent display), next-generation three-dimensional semiconductor, dry adhesion using micro fine structure, micro / nano piezoelectric element, lighting optical parts, bio cell using fine pattern It may be usefully used for virus research, but is not limited thereto.

In particular, when the three-dimensional complex multilayer structure of the present invention is used in an optical component, it is not necessary to separately provide a plurality of optical sheets as in the prior art, thereby improving economic efficiency and reducing thickness. In addition, when the optical part is a light guide plate, a sufficient light converging effect is expressed even without a separate light collecting sheet. As a result, only the light guide plate and the diffusion sheet could realize front luminance greater than that of the conventional optical component. In addition, it is possible to reduce the light loss due to the light guided by the light source passing through the plurality of optical sheets. This advantage is equally manifested in the diffuser plate used in direct type LCDs and condensing parts used in photovoltaic devices. Furthermore, as the number of optical sheets entering the optical component is reduced, the manufacturing process of the optical component is simplified, thereby improving the stability and economical efficiency of the process.

There are also various attempts in the field of dry adhesion to simulate the multi-layered fine cilia in the soles of gecko lizards or the legs of beetles. The fine multilayered ciliary structure has an effective elastic modulus characteristic that the elastic modulus is lower than that of the same material due to its structural features. Due to these characteristics, the van der Waals force is used to have strong adhesion to various deposits. However, these techniques require more than one process each time to produce a single layer of ciliary structure, and the process is also very complicated or sensitive to the surrounding environment, which does not significantly affect the mass production for mass production.

On the other hand, when applying the three-dimensional complex multilayer structure manufacturing method of the present invention it is possible to manufacture a multi-layer fine cilia structure of two or more layers in one process, and it is possible to manufacture significantly simpler than the prior art. In addition, since the present invention can be used repeatedly, a pattern of four or more layers is also possible. Existing imprint infrastructure can be used in production, which allows the mass production.

1 is a perspective view of an embodiment of the present invention in which the first pattern is a prism pattern and the second pattern is a prism pattern orthogonal to the parallel direction of the first pattern.

FIG. 2 is a partially enlarged view of FIG. 1.

3 is a plan view of an embodiment of the present invention in which a first pattern of parallel curves and a second pattern of parallel curves orthogonal to the parallel direction of the first pattern are combined.

4 is a plan view of an embodiment of the present invention in which a first pattern of parallel curves and a second pattern of parallel lines orthogonal to the parallel direction of the first pattern are combined.

5 is a plan view of an embodiment of the present invention in which a first pattern of parallel zigzag lines and a second pattern of parallel zigzag lines orthogonal to the parallel direction of the first pattern are combined.

6 is a plan view of an embodiment of the present invention in which a first pattern of parallel zigzag lines and a second pattern of parallel lines orthogonal to the parallel direction of the first pattern are combined.

7 is a plan view of an embodiment of the present invention in which a first pattern of parallel curves and a parallel zigzag line orthogonal to the parallel direction of the first pattern and a second pattern of parallel lines are combined.

8 is a cross-sectional view of an embodiment of the present invention in which a pair of valleys adjacent to each other among the waveforms formed by the cross section of the pattern and the floor between them are three vertices of a triangle.

9 is a cross-sectional view of an embodiment of the present invention with the floor rounded in FIG. 8.

10 is a cross-sectional view of an embodiment of the present invention in which a pair of valleys adjacent to each other among the waveforms formed by the cross section of the pattern are both end points of the bow string and the floor between them is one of the arcs of the bow.

11 is a cross-sectional view of an embodiment of the present invention in which a pair of adjacent bones among the waveforms formed by the cross section of the pattern are both end points of the elliptic bow string and the floor between them is one of the elliptical arcs of the elliptical bow.

12 and 13 are conceptual views illustrating a manufacturing process of a mask mold used for manufacturing a three-dimensional complex multilayer structure of the present invention.

14 and 15 are conceptual views illustrating one embodiment of a method for manufacturing a three-dimensional complex multilayer structure of the present invention as a master.

16 is a conceptual diagram illustrating an embodiment of a method for manufacturing a three-dimensional complex multilayer structure of the present invention from a master.

FIG. 17 is a photograph of an embodiment of the present invention in which a first pattern is a prism pattern and a second pattern is a prism pattern orthogonal to the parallel direction of the first pattern.

18 is a partially enlarged photograph of FIG. 17.

19 to 22 are view angle analysis diagrams in the case of using a diffusion plate (FIG. 20), a first light collecting sheet (FIG. 21) and a second light collecting sheet (FIG. 22) in a conventional light guide plate (FIG. 19).

23 and 24 are view angle analysis diagrams when the three-dimensional complex multilayer structure according to the present invention is used as a light guide plate (FIG. 23) and a diffusion plate (FIG. 24) is used.

25 is a view angle analysis diagram when a diffusion plate is used in a conventional light guide plate.

FIG. 26 is a view angle analysis diagram when a diffusion plate, a first light collecting sheet, and a second light collecting sheet are used in a conventional light guide plate. FIG.

27 is a view angle analysis diagram when a diffusion plate and a three-dimensional complex multilayer structure of the present invention are used as an optical sheet in a conventional light guide plate.

Hereinafter, preferred embodiments of the present invention will be described in detail. In addition, many specific details such as specific components are described in the following description, which is provided to help a more general understanding of the present invention, and the present invention may be practiced without these specific details. It is self-evident to those who have knowledge of the world. In describing the present invention, when it is determined that a detailed description of a related known function or configuration may unnecessarily obscure the subject matter of the present invention, the detailed description thereof will be omitted.

First, some of the terms used herein are defined.

In this specification, structures having different shapes of patterns according to heights from a substrate are regarded as one layer, and thus, a structure including all of them is referred to as a multilayer.

Referring to the cross-sectional view of the three-dimensional complex multilayer structure illustrated in FIGS. 14 to 16 as an example, the first pattern formed with the height H1 in the first basic mold, the predetermined height T from the first pattern without being parallel to the first pattern When the second pattern is formed to have a height H2, the predetermined height T may be expressed by the thickness or the third pattern of the second pattern. This is because when the height of the second pattern and the third pattern is large, the function of each structure exists.

According to the first type, the height T of the third pattern may be equal to or smaller than the height H1 of the first pattern (T≤H1) and may be equal to or smaller than the height H2 of the second pattern (T≤H2). ). In this case, when the height T of the third pattern is close to 0, for example, as shown in the pattern of FIG. 18, it may be regarded as a case where the second pattern is directly raised over the first pattern.

The second type is when the height of the third pattern is greater than the height of the first pattern and the second pattern (T> H1, T> H2). The overall height of the pattern is an important factor in the effective elastic modulus, but if T is much larger (H2 <H1 << T) like the third type, then the overall height (H1 + T + H2) is determined by T. Three patterns will perform a structural (or optical) function.

Table 1

Type 1	Type 2	Type 3

In the present specification, a composite optical component using a three-dimensional complex multilayer structure of the present invention is an optical member that collects light in two directions perpendicular to the composite optical component, and is a light guide plate or a direct type in an optical sheet or an edge type LCD. In the field of diffusers in LCDs and photovoltaic devices, it refers to light collecting sheets or panels.

In the present specification, the active energy ray refers to both a particle beam and an electromagnetic wave having an energy enough to cure a predetermined resin, and include ultraviolet rays, lasers, microwaves, electron beams, X-rays, and the like. .

Example

EMBODIMENT OF THE INVENTION Hereinafter, the Example of this invention is described.

In order to achieve the object as described above, the three-dimensional complex multilayer structure of the present invention is formed with a first pattern and a second pattern having different thicknesses, or a first pattern, a second pattern, and a third pattern on one surface of a plate. The first pattern is selected from the group consisting of parallel lines, parallel curves, parallel zigzag lines, and combinations thereof, wherein the second pattern is not parallel to the first pattern, and parallel lines, parallel curves, and parallels do not meet each other. A zigzag line and a combination thereof, and the boundary between the first pattern and the second pattern is a figure selected from the group consisting of polygons, circles, ellipses, and combinations thereof, and the figure is repeatedly formed on one surface of the plate. The most important feature.

In the present invention, by forming two or more patterns on the same surface of one three-dimensional complex multilayer structure, various functions, for example, when used as optical parts, can perform the functions of several optical parts as one optical part. have. For example, if the first pattern and the second pattern are both prism patterns, the optical sheet using the three-dimensional complex multilayer structure of the present invention may have the effect of condensing in two directions. If the first pattern is a prism pattern and the second pattern is a diffusion pattern, the functions of the light collecting sheet and the diffusion sheet may be simultaneously performed.

In particular, the parallel direction (parallel 1 in FIG. 1) of the first pattern selected from the group consisting of parallel lines, parallel curves, parallel zig-zag lines, and combinations thereof, which do not meet each other, parallel lines, parallel curves, The three-dimensional complex multilayer structure of the present invention, wherein the parallel direction (direction 2 in FIG. 2) of a series of lines selected from the group consisting of parallel zigzag lines and combinations thereof and not parallel to the first pattern is orthogonal to each other, is focused in a direction perpendicular to each other. In this case, the luminance can be maximized when used as an optical component.

1 and 2 illustrate an embodiment of the present invention in which the first pattern and the second pattern are prismatic patterns, and are orthogonal to each other, and the thickness of the second pattern is greater than the thickness of the first pattern, that is, the third pattern. Are formed (not specifically shown), and the boundary between the first pattern and the second pattern forms a rectangle. If a three-dimensional complex multilayer structure in which such a pattern is formed is used as a light guide plate or a diffusion plate, sufficient front luminance can be achieved without a separate light collecting sheet. If such a pattern is formed on an optical sheet, the light collecting effect of two conventional optical sheets is performed. Can be implemented as a single optical sheet.

The length of one side of the quadrangle that forms the boundary between the first pattern and the second pattern is preferably 1 to 5000 μm. If it is less than the above range, the pattern is difficult to form and the mold itself becomes too difficult to manufacture. In the case of using the three-dimensional complex multilayer structure of the present invention as an optical component, if the above range is exceeded, it can be visually identified to realize a uniform brightness, and as a result, it cannot be used as a display device, but is not particularly limited in other applications. Do not.

The three-dimensional complex multilayer structure of the present invention may have not only parallel lines orthogonal to each other, but also parallel and parallel zigzag lines, and the boundary between the first pattern and the second pattern may be polygons, circles, or ellipses in addition to quadrangles. Combination of is also possible.

For example, FIG. 3 shows an example in which a first pattern of parallel curves and a second pattern of parallel curves orthogonal to the parallel direction of the first pattern are combined, and the boundary thereof is a quadrangle.

4 is an example in which a first pattern of parallel curves and a second pattern of parallel lines orthogonal to the parallel direction of the first pattern are combined, and the boundary thereof is a quadrangle.

5 shows an example in which a first pattern of parallel zigzag lines and a second pattern of parallel zigzag lines orthogonal to the parallel direction of the first pattern are combined, and the boundary thereof is a circle.

6 shows an example in which a first pattern of parallel zig-zag lines and a second pattern of parallel lines orthogonal to the parallel direction of the first pattern are combined, and the boundary thereof is a circle.

FIG. 7 shows an example in which a first pattern of parallel curves and a parallel zigzag line and a second pattern of parallel lines orthogonal to the parallel direction of the first pattern are combined, and the boundaries thereof are circles and squares.

The first pattern and the second pattern of the present invention is a microstructure implemented from a thermosetting resin or an active energy ray curable resin.

Active energy ray hardening resin refers to resin in which hardening is performed by active energy ray. Conventional curing of the resin was mainly performed by heat, but thermal curing is caused by the volume shrinkage due to thermal expansion caused by the temperature difference between the maximum heating temperature and the normal temperature during cooling, and the volume shrinkage due to the curing reaction itself. It is also difficult to obtain sophisticated dimensions. Furthermore, the thermal residual stress generated by the thermosetting process shortens the life of the part, requires a lot of thermal energy in the curing process, has a limitation in the size of the molded article, and has a long time for curing.

On the other hand, the hardening process by the active energy ray does not cause the problems of the thermal curing process (cracking, low precision, thermal residual stress, etc.), significantly less energy and time consumption, and is not limited by the size of the molded article. There is an advantage.

On the other hand, the cross section perpendicular to the parallel direction of the first pattern and the second pattern forms a waveform, and a pair of valleys adjacent to each other and the floor between them are triangular vertices and arches, respectively, among the waveforms formed by the cross section. One end of the string and one of the arcs of the chord, both the end of the chord of the elliptic chord and one of the elliptical arcs, or the floor of the triangle may be rounded off.

FIG. 8 is an embodiment of a first pattern or a second pattern of the present invention in the three-dimensional complex multilayer structure in which the pair of valleys adjacent to each other among the waveforms formed by the cross section and the floor between them are three vertices of a triangle. When used as the second pattern, the third pattern may be formed to a thickness T.

The use of the structure of the present invention having such a pattern as a prism sheet exhibits a simultaneous light collection effect in two different directions. When used as a prism sheet, the included angle (narrow angle) of the floor, that is, the angle A in FIG. 8 is preferably 30 to 150 °, but if it is less than the above range, light cannot totally pass through, and mold processing is difficult, This sharp and brittle is inferior in handleability. On the contrary, if it exceeds 150 °, it is closer to the plane than the prism, so that the condensing effect is reduced, and as a result, the brightness decreases as the light spreads.

9 is a first or second pattern of the three-dimensional complex multilayer structure of the present invention in which a pair of valleys adjacent to each other among the waveforms formed by the cross section are both end points of the bow string and the floor therebetween is one point of the arc of the bow. Is one embodiment. When a three-dimensional complex multilayer structure having such a pattern is used as a diffusion sheet, light can be diffused to widen the viewing angle and make the luminance uniform.

10 is a first pattern of the three-dimensional complex multilayer structure of the present invention in which a pair of bones adjacent to each other among the waveforms formed by the cross-section are both end points of an elliptic bow and a floor between them is one of the elliptical arcs of the elliptic bow; One embodiment of the second pattern. Like the case of the circular bow, the three-dimensional complex multilayer structure also spreads light in the form of a diffusion sheet, thereby widening the viewing angle and making the luminance uniform.

In addition, in the case of using the three-dimensional complex multilayer structure of the present invention as an optical component, it is preferable that the height from the valley to the floor of the waveform formed by the cross section, that is, H of FIGS. 8 to 11 is 1 to 500 μm. If it is less than the above range, the pattern effect due to the step disappears. On the contrary, if it exceeds 500 μm, it is visually identifiable, resulting in poor visibility and an excessively thick result.

In addition, when using the three-dimensional complex multilayer structure of the present invention implemented with the first pattern and the second pattern as an optical sheet, the refractive index is preferably 1.3 to 1.9.

In addition, the optical component is not limited so long as it is an optical component for inducing and controlling the movement path of light. For example, various optical sheets for concentrating or dispersing light paths, light guide plates in edge type liquid crystal displays, diffusion plates in direct type liquid crystal displays, or light collecting sheets or light collecting plates used in photovoltaic devices.

In addition to the above-mentioned optical components, the three-dimensional complex multilayer structure of the present invention can be used for display optical components such as color filters, next-generation display processes (TFT, OTFT, Oxide TFT, flexible displays, transparent displays), next-generation three-dimensional semiconductors, and micro fine structures. It may be used for dry adhesion, micro / nano piezoelectric elements, illumination optical parts, biocell / virus research using micropatterns, but is not limited thereto.

On the other hand, the three-dimensional complex multilayer structure of the present invention can be manufactured using a mask mold, for example, as shown in Figs.

First, a second basic mold 12 having a first pattern selected from the group consisting of parallel lines, parallel curves, parallel zig-zag lines, and combinations thereof not formed on one surface thereof is prepared [step (f) of FIG. 14, FIG. 15). Step (f ')].

Separately, the flexible or rigid plate-like first support 20 through which the active energy ray is transmitted; A mask 30 in which a polygon, a circle, an ellipse or a combination thereof is repeatedly formed on one surface of the first support 20, or a polygon, a circle, an ellipse or a combination thereof is repeatedly perforated; And a pattern layer on which the second pattern is formed on the surface opposite to the surface facing the first support 20 and the mask 30, or on which the mask 30 is formed. The first support 20 of the one surface of the) includes a second pattern formed on the exposed portion, the mask 30 prepares the mask mold (60, 60 ') that does not transmit the active energy ray (Fig. 14 Step (f), step (f ') of FIG. 15].

Here, the second pattern may be selected from the group consisting of parallel lines, parallel curves, parallel zigzag lines, and combinations thereof, which are not parallel to the first pattern and do not meet each other.

Then, a second mold resin 42 is applied onto the first pattern of the second base mold 12 or the mask molds 60 and 60 ', and the parallel direction of the second pattern is the first pattern. The second base mold 12 and the mask mold 60, 60 'are brought into close contact with each other so that the second mold resin 42 is not parallel to the parallel direction of the step (f) of FIG. Step (f ') of FIG. 15]. Further, the second base mold 12 and the mask mold 60, 60 ′ centering on the second mold resin 42 so that the parallel direction of the second pattern is perpendicular to the parallel direction of the first pattern. ) Is more preferable.

Subsequently, the mask molds 60 and 60 'are pressed in the direction of the resin 42 for the second mold, and active energy rays are irradiated or heated to the mask molds 60 and 60', thereby producing the resin for the two molds. Is cured to form a second mold 52 (step (g) in FIG. 14, step (g ') in FIG. 15).

Then, the mask mold 60, 60 'is separated from the second mold 52 (step (h) of FIG. 14, step (h') of FIG. 15), and the resin for the second mold 42 ), The uncured portion of the solution is dissolved by removing the solvent (step (i) of FIG. 14, step (i ′) of FIG. 15), thereby manufacturing a three-dimensional complex multilayer structure 70 according to the present invention [FIG. 14. Step (j), step (j) of FIG. 15].

Although the three-dimensional complex multilayer structure of the present invention may be manufactured by the above manufacturing method, a mold may be made again and manufactured from the three-dimensional complex multilayer structure 70 manufactured by the manufacturing method as a master (see FIG. 16). ).

Specifically, referring to FIG. 16, the third mold resin 44 may be coated using the multilayer structure 70 manufactured as shown in FIG. 14 or 15 as a master, and the second support may be applied to the third mold resin 44. (25) is brought into close contact (step (k) of FIG. 16).

The second support 25 is pressed in the direction of the master 70 and the active energy ray is irradiated or heated to cure the resin 44 for the third mold to form the third mold 54 [Fig. 16 steps (l)]. Then, the third mold 54 is separated from the master 70 (step (m) of FIG. 16).

Subsequently, the patterning resin 84 is applied to the third mold 54 or the substrate 82, and the third mold 54 and the substrate 82 are brought into close contact with the patterning resin 84. [Step (n) of Fig. 16].

Then, by irradiating or heating an active energy ray on the third mold 54 or the substrate 82, the pattern resin 84 is cured to form a pattern 86 (step (o) of FIG. 16). ].

The three-dimensional complex multilayer structure 80 of the present invention in which the pattern 86 is formed is separated from the third mold 54 (step (p) of FIG. 16).

On the other hand, the first pattern and the second pattern may be formed on only one surface of the multilayer structure, or may be formed on both surfaces. This is distinguished from the prior art in which separate patterns are formed on both sides of one multilayer structure. When the pattern is formed on both sides of one multilayer structure as described above, when used as an optical sheet, the light condensing effect in two different directions cannot be achieved, and as a result, the number of optical sheets is reduced or the frontal brightness is increased dramatically. The same effect of the present invention may not be fully enjoyed, but it is irrelevant for other uses.

In recent years, there have been many developments of a composite (prism) optical sheet that produces two sheets as one sheet by bonding or adhering the prism in two directions overlapping each other. In this case, although the simultaneous condensing can be achieved in two directions, the use of two sheets of support (PET) has a problem in that the manufacturing cost is high and the end prism is crushed for adhesion, thereby degrading the optical function. According to this, the prism in two directions can be formed on one surface of the support (see Table 2).

TABLE 2

Prior art	The present invention

On the other hand, the mask mold 60 used in the manufacture of the three-dimensional complex multilayer structure of the present invention is a flexible or rigid plate-like first support 20 through which the active energy ray is transmitted,

A mask 30 in which a polygon, a circle, an ellipse, or a combination thereof is repeatedly formed on one surface of the first support 20, or a polygon, a circle, an ellipse, or a combination thereof is repeatedly perforated, and

A pattern layer covering the first support 20 and the mask 30 and having a pattern formed on a surface opposite to the surface facing the first support 20.

Including,

The mask 30 is characterized in that it does not transmit active energy rays.

Alternatively, the mask mold 60 '

A flexible or rigid plate-like first support 20 through which active energy rays are transmitted,

A mask 30 in which a polygon, a circle, an ellipse, or a combination thereof is repeatedly formed on one surface of the first support 20, or a polygon, a circle, an ellipse, or a combination thereof is repeatedly perforated, and

A pattern formed on an exposed portion of the first support 20 of one surface of the first support 20 on which the mask 30 is formed

Including,

The mask 30 is characterized in that it does not transmit active energy rays.

In addition, it is preferable that the first support 20 and the mask 30 further include an adhesion-activating layer between the pattern layer or the pattern to prevent the pattern layer or the pattern from falling off.

In addition, the pattern layer, pattern or adhesion active layer may be cured by active energy rays or heat. As described above, thermal curing may cause cracks due to the action of volume shrinkage due to thermal expansion occurring at the temperature difference between the maximum heating temperature and room temperature during cooling and the volume shrinkage due to the curing reaction itself, and also have precise dimensions. Difficult to obtain Furthermore, the thermal residual stress generated by the thermosetting process shortens the life of the part, requires a lot of thermal energy in the curing process, has a limitation in the size of the molded article, and takes a long time to cure, resulting in energy and Remarkably low time consumption, hardening by active energy ray has the advantage that the size of the molded article is not limited is widely used.

The first pattern and the second pattern may be a pattern selected from the group consisting of parallel lines, parallel curves, parallel zigzag lines, and combinations thereof, which do not meet each other, as in the case of the 3D complex multilayer structure.

In addition, the mask 30 may in particular be a printed colored coating or a deposited opaque metal.

Meanwhile, the mask molds 60 and 60 'of the present invention may be manufactured by an imprint method, for example, as shown in FIGS. 12 and 13, but are not limited thereto, and may also be manufactured by inkjet or screen printing.

The imprint method of FIGS. 12 and 13 will be described in detail as an example. First, a portion of one surface of the flexible or rigid plate-shaped first support 20 through which active energy rays are transmitted is printed and colored coated (step (a) of FIG. 12 and step (a) of FIG. 13). In addition, the colored coating may be printed such that a polygon, a circle, an ellipse or a combination thereof is repeatedly printed, or a polygon, a circle, an ellipse or a combination thereof is repeatedly printed.

If necessary, the adhesive active layer resin may be formed by coating and curing the resin for the adhesive active layer on the surface on which the colored coating is printed in the first support 20. This adhesion-activating layer further strengthens the bond between the first support 20 and the first mold 50 to be described later.

Then, the first mold resin 40 is coated on the surface of the active energy ray transmitting first basic mold 10 or the first support 20 where the colored coating is printed, and the first mold resin 40 is applied. The first support 20 and the first base mold 10 are brought into close contact with each other (step (b) of FIG. 12 and step (b) of FIG. 13).

Subsequently, the first support 20 is pressed in the direction of the first base mold 10, and an active energy ray is irradiated or heated on the first base mold 10 to thereby form the first mold resin 40. To form mask molds 60 and 60 '(step (c) in FIG. 12, step (c') in FIG. 13). Step (c) of FIG. 12 is a case where the active energy ray is irradiated from the first base mold side, and step (c ') of FIG. 13 is a case where the active energy ray is irradiated from the first support side.

If necessary, the step of dissolving and removing the uncured portion of the first mold resin 40 with a solvent may be further roughened.

Finally, the mask mold 60, 60 'is separated from the first base mold 10 (step (d) of FIG. 12, step (d') of FIG. 13), the three-dimensional complex multilayer of the present invention. A mask mold (60,60 ') used to manufacture the structure (80) is obtained (step (e) of FIG. 12, step (e') of FIG. 13), wherein the colored coating does not transmit active energy rays. It features.

In addition, the mask molds 60 and 60 'of the present invention may first begin by depositing an opaque metal by covering part of one surface of the flexible or rigid plate-shaped first support 20 through which active energy rays are transmitted, with a shadow mask. [Step (a) of FIG. 12, step (a) of FIG. 13]. In addition, the opaque metal may be deposited such that a polygon, a circle, an ellipse, or a combination thereof is repeatedly deposited, or a polygon, a circle, an ellipse, or a combination thereof is repeatedly drilled.

If necessary, the adhesion active layer resin may be applied to the surface on which the opaque metal is deposited in the first support 20 and cured to form an adhesion active layer. This adhesion-activating layer further strengthens the bond between the first support 20 and the first mold 50 to be described later.

Then, the first mold resin 40 is coated on the surface where the opaque metal is deposited in the active energy ray transmitting first basic mold 10 or the first support 20, and the first mold resin 40 is applied. The first support 20 and the first base mold 10 are brought into close contact with each other (step (b) of FIG. 12 and step (b) of FIG. 13).

Subsequently, the first support 20 is pressed in the direction of the first base mold 10, and an active energy ray is irradiated or heated on the first base mold 10 to thereby form the first mold resin 40. To form mask molds 60 and 60 '(step (c) in FIG. 12, step (c') in FIG. 13).

If necessary, the step of dissolving and removing the uncured portion of the first mold resin 40 with a solvent may be further roughened.

Finally, the mask mold 60, 60 'is separated from the first base mold 10 (step (d) of FIG. 12, step (d') of FIG. 13), the three-dimensional complex multilayer of the present invention. A mask mold (60, 60 ') used to manufacture the structure (80) is obtained (step (e) of FIG. 12, step (e') of FIG. 13), wherein the opaque metal does not transmit active energy rays. It features.

Hereinafter, the effect when the three-dimensional complex multilayer structure according to the present invention is actually applied to an optical component, for example.

17 is a photograph of an embodiment of the present invention in which a first pattern is a prism pattern and a second pattern is a prism pattern orthogonal to the parallel direction of the first pattern, and FIG. 18 is a partially enlarged photograph of FIG. 17.

19 to 22 are view angle analysis diagrams in the case of using a diffusion plate (FIG. 20), a first light collecting sheet (FIG. 21), and a second light collecting sheet (FIG. 22) in a conventional light guide plate (FIG. 19).

The part displayed in red is a high luminance part. In the conventional light guide plate (FIG. 19), a diffuser plate (FIG. 20), a first condensing sheet (FIG. 21), and a second condensing sheet (FIG. 22) must be used. It can be confirmed that the light guide plate has a conventional light guide plate, so it can be seen that two light collecting sheets are necessary.

On the contrary, when the three-dimensional complex multilayer structure of the present invention is used as the light guide plate, and the viewing angle analysis drawing when only the diffusion plate is used, the structure according to the present invention is used as the light guide plate (FIG. 23), first, the conventional light guide plate (FIG. Compared with 19), the brightness is higher, and even though only the diffusion plate is added, the center becomes red (FIG. 24), and it can be seen that a separate light collecting sheet is not required. This can reduce the use of optical sheets, which is economically beneficial and can also reduce the thickness of equipment.

In addition, when the diffusion plate is mounted on the conventional light guide plate, the brightness is the same as that of FIG. 25. When the two conventional optical sheets are mounted (FIG. 26) and the multilayer structure of the present invention is mounted on one sheet as the optical sheet of FIG. 17. Comparing the case (FIG. 27), it was confirmed that the luminance in the case of Figure 27 as a whole, the number of sheets required optical sheet is reduced.

In the above description of the preferred embodiment of the present invention, the present invention is not limited to the specific embodiments described above, those skilled in the art various modifications without departing from the gist of the present invention Of course it is possible. Therefore, the scope of the present invention should not be construed as being limited to the above embodiments, but should be defined by the claims below and equivalents thereof.

The three-dimensional complex multilayer structure according to the present invention is different from the conventional device formed with only one simple pattern, and different patterns are formed in a complex, and can be manufactured by a simple process, and thus display optical components (light guide plates, diffuser plates, prisms, Color filter), next-generation display process (TFT, OTFT, Oxide TFT, flexible display, transparent display), next-generation three-dimensional semiconductor, dry adhesion using micro fine structure, micro / nano piezoelectric element, lighting optical parts, bio cell using fine pattern It may be usefully used for virus research, but is not limited thereto.

Claims (15)

1. First and second patterns having different thicknesses are formed on one or both surfaces of the plate,

   The first pattern is selected from the group consisting of parallel lines, parallel curves, parallel zigzag lines, and combinations thereof, which do not meet each other,

   The second pattern is selected from the group consisting of parallel lines, parallel curves, parallel zigzag lines, and combinations thereof, which are not parallel to the first pattern and do not meet each other,

   The boundary between the first pattern and the second pattern is a figure selected from the group consisting of polygons, circles, ellipses, and combinations thereof.

   The figure is a three-dimensional complex multilayer structure, characterized in that repeated on one or both sides of the plate shape.
2. The method of claim 1,

   And the parallel direction of the first pattern and the parallel direction of the second pattern are perpendicular to each other.
3. The three-dimensional complex multilayer structure of claim 1, further comprising a third pattern to form the first pattern and the second pattern spaced apart by a predetermined height.
4. The method of claim 1,

   The first pattern and the second pattern is a three-dimensional complex multilayer structure, characterized in that formed of a thermosetting resin or active energy ray-curable resin.
5. The method of claim 1,

   Cross sections perpendicular to the parallel direction of the first pattern and the second pattern form a waveform, and a pair of valleys adjacent to each other and the floor between them are triangular vertices and bow strings, respectively. A three-dimensional complex multi-layer structure, characterized in that one end of the arc and one of the arcs, both the end of the elliptic chord and one of the elliptical arcs, or the floor of the triangle is rounded.
6. The method of claim 1,

   When the pair of valleys adjacent to each other among the waveforms formed by the cross section and the floor between them are three vertices of a triangle or the floor is a rounded triangle, the included angle (narrow angle) of the floor is 30 to 150 °. Multilayer structure.
7. The method of claim 1,

   3D complex multilayer structure, characterized in that the height from the valley to the floor of the waveform formed by the cross section is 1 to 500 μm.
8. The method of claim 1,

   The three-dimensional complex multilayer structure is a three-dimensional complex multilayer structure, characterized in that the refractive index 1.3 to 1.9.
9. The method of claim 1,

   Diameter, long diameter or the length of one side of the repeating figure is 1 to 5000 μm, characterized in that the multi-layer complex structure.
10. The three-dimensional complex multilayer structure according to any one of claims 1 to 9, which is used for an optical component, a semiconductor element, a piezoelectric element, a biosensor, or a dry adhesive layer.
11. (A) preparing a second basic mold having a first pattern selected from the group consisting of parallel lines, parallel curves, parallel zigzag lines, and combinations thereof, which do not meet each other on one surface;

    (B) a flexible or rigid plate-like first support through which the active energy ray is transmitted; A mask in which a polygon, a circle, an ellipse or a combination thereof is repeatedly formed on one surface of the first support, or a polygon, a circle, an ellipse or a combination thereof is repeatedly perforated; And a second layer formed on a portion of the pattern layer having a second pattern formed on the surface opposite to the surface facing the first support and the mask, or the one surface of the first support on which the mask is formed. Preparing a mask mold including a pattern, wherein the mask does not transmit active energy rays;

    (C) applying a resin for a second mold on the first pattern of the second base mold or the mask mold,

    (D) bringing the second base mold into close contact with the mask mold around the resin for the second mold such that the parallel direction of the second pattern is not parallel to the parallel direction of the first pattern;

    (E) pressing the mask mold in the direction of the resin for the second mold, and curing the resin for the second mold to form a second mold by irradiating or heating an active energy ray on the mask mold;

    (F) separating the mask mold from the second mold; And

    (G) dissolving and removing the uncured portion of the second mold resin with a solvent

    Method for producing a three-dimensional complex multilayer structure comprising a.
12. The method of claim 11,

    After the above step (G),

    (H) applying a resin for a third mold to the master passed through the step (G);

    (I) bringing the second supporter into close contact with the third mold resin;

    (J) pressing the second support in the direction of the master and curing the resin for the third mold by irradiating or heating an active energy ray to form a third mold;

    (K) separating the third mold from the master;

    (L) coating a resin for the pattern on the third mold or substrate;

    (M) bringing the third mold into close contact with the substrate around the resin for the pattern;

    (N) hardening the resin for the pattern to form a pattern by irradiating or heating an active energy ray on the third mold or the substrate; And

    (O) separating the patterned three-dimensional complex multilayer structure from the third mold

    Method for producing a three-dimensional complex multilayer structure comprising a.
13. The method according to claim 11 or 12,

    And the second pattern is selected from the group consisting of parallel lines, parallel curves, parallel zigzag lines, and combinations thereof, which are not parallel to the first pattern and do not meet each other.
14. The method of claim 11,

    In the step (D), when the second base mold and the mask mold is in close contact with the resin for the second mold, a third pattern such that the first pattern and the second pattern are spaced apart by a predetermined height Method for producing a three-dimensional complex multilayer structure characterized in that the adhesion close enough to be provided.
15. The method of claim 11,

    In step (D), the second base mold and the mask mold in close contact with the resin for the second mold so that the parallel direction of the second pattern is orthogonal to the parallel direction of the first pattern. Method for manufacturing three-dimensional complex multilayer structure.

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