WO2013170135A1 - Thermally stable, flexible substrates for electronic devices - Google Patents

Thermally stable, flexible substrates for electronic devices Download PDF

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Publication number
WO2013170135A1
WO2013170135A1 PCT/US2013/040527 US2013040527W WO2013170135A1 WO 2013170135 A1 WO2013170135 A1 WO 2013170135A1 US 2013040527 W US2013040527 W US 2013040527W WO 2013170135 A1 WO2013170135 A1 WO 2013170135A1
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Prior art keywords
substrate
dianhydride
group
diamine
aromatic
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PCT/US2013/040527
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French (fr)
Inventor
Limin Sun
Dong Zhang
Jiaokai Jing
Frank Harris
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Akron Polymer Systems, Inc.
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Application filed by Akron Polymer Systems, Inc. filed Critical Akron Polymer Systems, Inc.
Priority to JP2015511738A priority Critical patent/JP6422432B2/en
Priority to KR1020147034127A priority patent/KR102104825B1/en
Priority to CN201380026280.7A priority patent/CN104379635B/en
Priority to EP13787350.1A priority patent/EP2847250B1/en
Publication of WO2013170135A1 publication Critical patent/WO2013170135A1/en

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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L79/00Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
    • C08L79/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C08L79/08Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/28Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
    • C03C17/32Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material with synthetic or natural resins
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G69/00Macromolecular compounds obtained by reactions forming a carboxylic amide link in the main chain of the macromolecule
    • C08G69/48Polymers modified by chemical after-treatment
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1042Copolyimides derived from at least two different tetracarboxylic compounds or two different diamino compounds
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1067Wholly aromatic polyimides, i.e. having both tetracarboxylic and diamino moieties aromatically bound
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1075Partially aromatic polyimides
    • C08G73/1078Partially aromatic polyimides wholly aromatic in the diamino moiety
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D179/00Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen, with or without oxygen, or carbon only, not provided for in groups C09D161/00 - C09D177/00
    • C09D179/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C09D179/08Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133305Flexible substrates, e.g. plastics, organic film
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F1/00Details not covered by groups G06F3/00 - G06F13/00 and G06F21/00
    • G06F1/16Constructional details or arrangements
    • G06F1/1613Constructional details or arrangements for portable computers
    • G06F1/1633Constructional details or arrangements of portable computers not specific to the type of enclosures covered by groups G06F1/1615 - G06F1/1626
    • G06F1/1637Details related to the display arrangement, including those related to the mounting of the display in the housing
    • G06F1/1652Details related to the display arrangement, including those related to the mounting of the display in the housing the display being flexible, e.g. mimicking a sheet of paper, or rollable
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2379/00Other polymers having nitrogen, with or without oxygen or carbon only, in the main chain
    • B32B2379/08Polyimides
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/26Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264Up to 3 mils
    • Y10T428/2651 mil or less
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/31551Of polyamidoester [polyurethane, polyisocyanate, polycarbamate, etc.]
    • Y10T428/31623Next to polyamide or polyimide

Definitions

  • the application relates to the manufacture of transparent, flexible substrates for electronic devices, such as flat panel displays, photovoltaic systems, lighting devices, and input/output devices.
  • the flexible substrates include those prepared from organo- soluble, fully imidized polyimides with high glass transition temperatures (Tgs).
  • Tgs glass transition temperatures
  • This application also relates to the manufacture of flexible substrates in the form of thick polyimide films or multi-layer laminates containing at least one polyimide layer and one thin glass layer. More particularly, this application relates to the manufacture of thermally stable, flexible substrates with near-zero birefringence and a relatively low coefficient of thermal expansion (CTE).
  • CTE coefficient of thermal expansion
  • LCDs liquid crystal displays
  • OLEDs organic light emitting diodes displays
  • EPDs electrophoretic displays
  • the glass substrates currently used in such displays are thick, heavy, rigid, and vulnerable to breaking, reducing product design freedom.
  • Polymer substrate materials are attractive because they open new possibilities for product design and fabrication. They can be produced using cost effective roll-to-roll manufacturing which can increase production efficiencies over glass materials and lower the manufacturing costs.
  • the glass substrate is one of the most expensive components in a LCD (DisplaySearch 2007 Materials Report). Therefore, a flexible substrate material would allow for radical design freedom for information displays.
  • Organic polymers have also been used in producing thin light weight displays, but it has proven difficult to obtain a polymer substrate with properties that match all of the thermal and optical properties of a glass plate.
  • polyethylene naphthalate (PEN) films are highly transparent and have a low CTE ( ⁇ 20 ppm/°C).
  • PEN films can only be processed below 180°C and the film exhibits high birefringence (>0.001).
  • PEN substrates are offered commercially by DuPont, which reflects the market need.
  • Poly(cycloolefm) (COP) films have excellent transparency, high thermal stability (Tg> 300°C) and almost zero birefringence, but the CTE of these films is too large (>70 ppm/°C) for display applications.
  • soluble polyimides have been prepared and solution cast into highly transparent films. In fact, such films have found commercial success as negative compensation films for LCDs, but these films are highly birefringent. Thus, no polyimide film has been commercialized with high optical transmittance, near zero birefringence, a relatively low CTE and a high Tg. As discussed above, the substrate is required to have near zero birefringence, i.e., the refractive index along the direction perpendicular to the film plane (nz) and along the directions parallel to the film plane (nx or ny) must be identical. Conventional polyimides are composed of rigid rod-like, aromatic monomer units.
  • polyimides prepared from linear rod-like, aromatic monomers form films with a high negative birefringence. This prevents such films from being used as display substrates where optical isotropy is required to avoid display distortion.
  • Previous approaches to obtaining polyimide films with low birefringence have involved increasing the flexibility and/or decreasing the linearity of the rigid polyimide backbone. However, these approaches also result in a dramatic decrease in the glass transition temperature.
  • Transparent polyimide films have also been prepared by solution casting that exhibit positive out-of-plane birefringence. This has been accomplished through the use of specifically designed cardo diamine monomers (positive birefringent monomers). The monomers have been polymerized with aromatic dianhydrides to give polymer backbones that spontaneously orient in-plane during the casting process. However, the repeat units which result from the positive birefringent monomers have high polarizability perpendicular to the polymer backbone that results in an out-of-plane refractive index (nz) higher than that of the in-plane refractive indices (nx and ny).
  • nz out-of-plane refractive index
  • Cardo diamines have also been polymerized with alicyclic dianhydrides to form soluble polyimides.
  • the polymers have been primarily used to form alignment layers for LCDs.
  • Alicyclic polyimide coatings on a polyolefm substrate have been stretched to form a birefringent compensation film.
  • no attempt has been made to utilize their optical and thermal properties in the development of substrates for electronic devices that require near zero birefringence.
  • a transparent, fiexible substrate for an electronic device includes an organo-soluble polyimide with a Tg>300°C that is prepared from a mixture of at least one dianhydride and at least one diamine, wherein the at least one dianhydride is an alicyclic dianhydride and the at least one diamine is an aromatic, cardo diamine.
  • the electronic device is a flat panel display, a lighting device, a photovoltaic device or an input/output device.
  • the fiexible substrate has a thickness of at least 25 microns and a transmittance from 400 to 750 nm that is >80%.
  • the fiexible substrate has an out-of-plane birefringence of less than about ⁇ 0.001, a coefficient of thermal expansion of less than about 60 ppm/°C.
  • the organo-soluble polyimide has the general structure:
  • AC is selected from the group:
  • Cardo is selected from the group:
  • the at least one alicyclic dianhydride is selected from the group with the general structures:
  • AC is selected from the group:
  • 1,2,3,4-cyclobutanetetracarboxylic dianhydride 1 ,2,3,4-cyclopentanetetracarboxylic dianhydride, 1 ,2,4,5-cyclohexanetetracarboxylic dianhydride, and bicyclo[2.2.2]oct-7-ene-2,3,5,6-tetracarboxylic dianhydride.
  • aromatic, cardo diamine is selected from the group with general structure:
  • halogen fluoride, chloride, bromide, and iodide
  • alkyl substituted alkyl such as halogenated alkyls, nitro, cyano, thioalkyl, alkoxy, substituted alkoxy such as halogenated alkoxy, aryl, or substituted aryl such as halogenated aryls, ethynyl,
  • the aromatic, cardo diamine may further be selected from the group comprising 9, 9- bis(4-aminophenyl)fluorine, 9, 9-bis(4-amino-3-fluorophenyl)fluorine, and 9, 9-bis(4-amino-3- methylphenyl)fluorine.
  • soluble polyimides with Tgs >300°C can be used in the manufacture of transparent flexible substrates with near zero birefringence that maintain excellent transparency after exposure to 300°C for 10 minutes in air, or for 30 minutes under reduced pressure or in an inert atmosphere.
  • polyimides that are prepared from alicyclic dianhydrides and aromatic, cardo dianhydrides can be used in the manufacture of transparent substrates (transmittance of greater than 80% at 400 nm to 750 nm) with an out-of-plane birefringence of less than ⁇ 0.001 and a CTE of less than 60 ppm/°C.
  • the substrates can be used in the manufacture of flexible, electronic devices where they are exposed to high temperatures.
  • the polyimides may generally be prepared from alicyclic dianhydrides and aromatic diamines. Alicyclic dianhydrides may be selected from the group:
  • dianhydrides include:
  • CBDA 1,2,3,4-Cyclobutanetetracarboxylic dianhydride
  • CPDA 1,2,3,4-Cyclopentanetetracarboxylic dianhydride
  • HPMDA 1,2,4,5-Cyclohexanetetracarboxylic dianhydride
  • BOD A Bicyclo[2.2.2]oct-7-ene-2,3,5,6-tetracarboxylic dianhydride
  • aromatic diamines may have the following structure:
  • halogen fluoride, chloride, bromide, and iodide
  • alkyl substituted alkyl such as halogenated alkyls, nitro, cyano, thioalkyl, alkoxy, substituted alkoxy such as halogenated alkoxy, aryl, or substituted aryl such as halogenated aryls, ethynyl,
  • Particularly useful diamines include:
  • the polyimide may be prepared from monomer mixtures containing one or more alicyclic dianhydrides and one or more cardo, aromatic diamines. In some cases, it may be desirable to substitute some of the cardo diamine with a non-cardo, aromatic diamine, and/or some of the alicyclic dianhydride with an aromatic dianhydride. In particular, it may be useful to include a monomer containing a group, such as a carboxyl group, that can be used in crosslinking the polymer so as to induce solvent resistance. When this group is present crosslinking can be induced by heating near 300°C or by heating above 200 °C in the presence of a multi-functional epoxide.
  • a group such as a carboxyl group
  • the monomers can be polymerized in high boiling solvents, such DMAC, NMP or m-cresol, which can contain an imidization catalyst, such as isoquinoline, at elevated temperatures to directly yield the imidized polymer.
  • the polymerization mixture may also contain a dehydration reagent such as toluene.
  • the monomers can be polymerized in polar aprotic solvents below 100°C to yield a low molecular weight polyamic acid that is imidized either chemically or thermally imidized.
  • imidization can also be carried out by a combination of these two methods. In fact, a combination of the two methods may be useful for the continuous casting of film directly from the polyamic acid polymerization mixture.
  • the flexible substrates are prepared as single layer, films and as multi-layer laminates comprising a polyimide layer and a thin glass layer.
  • the single layer films can be prepared by solution casting techniques known to those skilled in the art from solutions of the imidized polyimides in common organic solvents. Both batch and continuous processes, such as a roll-to-roll process, may be used. In both techniques, the viscosity of the solution is adjusted by adjusting the solids concentration and the polymer molecular weight so that optimum films may be produced with the equipment used.
  • the multi-layer laminates can be prepared in one step by solution casting a layer of the polyimide on thin glass films. Additives may be used to increase the adhesion of the polyimide to the glass.
  • the laminates may also be prepared in a multi-step process, wherein a polyimide layer is first solution cast on a carrying tape such as a polyester film. The combination is then laminated to the glass film so that the polyimide layer adheres to the glass. The carrying tape is removed prior to or during the construction of the flat panel display.
  • the substrates can also be prepared by solution casting techniques from solutions of the polyamic acid precursors to the polyimides.
  • the conversion of the polyamic acid to the polyimide is carried out chemically and/or thermally during or subsequent to the casting process.
  • a continuous, roll-to-roll process whereby the polyamic acid is mixed with a chemical imidization mixture immediately prior to casting on an endless belt, which passes through heated zones, can be used to prepare single layer substrates or to form a polyimide layer on a glass film.
  • other functional and non-functional layers may be cast on or laminated to the substrate. For example, a gas barrier layer might be added.
  • GENERAL POLYMERIZATION PROCEDURES [0021] The following general procedure may be used to prepare a polyimide from a cardo diamine and an alicyclic dianhydride in a high boiling solvent:
  • reaction mixture was heated to about 200°C for 12 hours. During this process, water and some m-cresol were removed by distillation. The reaction mixture was then diluted with 50 ml of m-cresol, allowed to cool to room temperature and then added to 500 ml of methanol. The fibrous precipitate that formed was collected by filtration, soaked in methanol to remove the majority of the solvent (process was repeated three times) and then dried under reduced pressure at 100°C.
  • BODA was polymerized by the general polymerization procedure with FDA (la), FFDA (lb), and MeFDA (lc) (Table 1).
  • examples la-c produced polymers that formed films with a near zero birefringence and excellent transparency. Specifically, examples la-c had a transmittance of greater than 80% from 400 nm to 750 nm with an out-of-plane birefringence of less than ⁇ 0.001 and a CTE of less than 60 ppm/°C.
  • Example 3 The general polymerization procedure was carried out with HPMDA and a mixture of FFDA (90 mol%) and ODA (10 mol %) (Table 2).
  • Example 4 The general polymerization procedure was carried out with HPMDA
  • Example 5 The general polymerization procedure described was carried out with

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Abstract

A flexible substrate with a high optical transparency (>80% from 400 to 750nm) that is retained after exposure to 300°C, near-zero birefringence (< + 0.001), and a relatively low CTE (< 60 ppm/°C) is disclosed. The substrate may be manufactured as single layer, polyimide films and as a multi-layer laminate comprising a polyimide layer and a thin glass layer. The polyimides may include alicyclic dianhydrides and aromatic, cardo diamines. The films formed of the polyimides can serve as flexible substrates for optical displays and other applications that require their unique combination of properties.

Description

THERMALLY STABLE, FLEXIBLE SUBSTRATES FOR ELECTRONIC DEVICES RELATED APPLICATIONS
[0001] This application claims priority to U.S. Provisional Application No. 61/645,707, filed on May 11, 2012, entitled THERMALLY STABLE SUBSTRATES FOR FLEXIBLE FLAT PANEL DISPLAYS.
FIELD OF THE INVENTION
[0002] The application relates to the manufacture of transparent, flexible substrates for electronic devices, such as flat panel displays, photovoltaic systems, lighting devices, and input/output devices. Specifically, the flexible substrates include those prepared from organo- soluble, fully imidized polyimides with high glass transition temperatures (Tgs). This application also relates to the manufacture of flexible substrates in the form of thick polyimide films or multi-layer laminates containing at least one polyimide layer and one thin glass layer. More particularly, this application relates to the manufacture of thermally stable, flexible substrates with near-zero birefringence and a relatively low coefficient of thermal expansion (CTE).
BACKGROUND
[0003] The next-generation of optical displays, including liquid crystal displays (LCDs), organic light emitting diodes displays (OLEDs), and electrophoretic displays (EPDs), will be flexible. The glass substrates currently used in such displays are thick, heavy, rigid, and vulnerable to breaking, reducing product design freedom. Polymer substrate materials are attractive because they open new possibilities for product design and fabrication. They can be produced using cost effective roll-to-roll manufacturing which can increase production efficiencies over glass materials and lower the manufacturing costs. For example, the glass substrate is one of the most expensive components in a LCD (DisplaySearch 2007 Materials Report). Therefore, a flexible substrate material would allow for radical design freedom for information displays.
[0004] There are materials available that display some of the target properties and that have been utilized to fabricate commercial thin, planar, light-weight displays i.e. cell phone displays. Although some of these materials have also been used to fabricate rollable and conformable prototype displays, none of these devices are commercially viable due to their poor performance and production yields. The performance and durability of these displays could be greatly increased if the processing temperatures, namely the temperature at which the metal deposition step is carried out, could be increased. The conductivity and robustness of the metal layers are increased as the deposition temperature is increased. However, the processing temperatures are limited by the lack of a thermally stable material with a high Tg that displays all the targeted properties. This need for a flexible substrate that is stable at high temperatures is also shared by many electronic devices, such as lighting devices, photovoltaic devices, and electronic input/output devices. Numerous approaches have been used to develop flexible LCD devices that meet the property requirements. Some efforts have included using metal foils, such as stainless steel. Stainless steel foil has a high thermal stability, low CTE (<20 ppm/°C), and is flexible. However, stainless steel foil is relatively heavy and is not transparent. This limits the use of this material to reflective mode displays. In addition, extra coatings have to be applied on the stainless foil because of its conductivity and surface roughness.
[0005] Organic polymers have also been used in producing thin light weight displays, but it has proven difficult to obtain a polymer substrate with properties that match all of the thermal and optical properties of a glass plate. For example, polyethylene naphthalate (PEN) films are highly transparent and have a low CTE (<20 ppm/°C). However, PEN films can only be processed below 180°C and the film exhibits high birefringence (>0.001). Despite these limitations, PEN substrates are offered commercially by DuPont, which reflects the market need. Poly(cycloolefm) (COP) films have excellent transparency, high thermal stability (Tg> 300°C) and almost zero birefringence, but the CTE of these films is too large (>70 ppm/°C) for display applications.
[0006] The outstanding thermal properties of polyimides make them natural candidates for substrates. Two commercial polyimide films, Kapton® of Dupont Co (USA) and Upilex® of Ube Co (Japan) have excellent mechanical properties and Tgs higher than 350°C, but the films are dark orange and cannot be cast directly from solution. Due to their insolubility, they must be prepared from precursor polyamic acid films, which further limits their utility. Due to their rigid rod structure, polyimide films usually have a relatively low CTE (the CTE of a UpilexR film can be <10 ppm/°C), and a very high birefringence (for a UpilexR film, this value can be >0.1). Using specifically designed monomers, soluble polyimides have been prepared and solution cast into highly transparent films. In fact, such films have found commercial success as negative compensation films for LCDs, but these films are highly birefringent. Thus, no polyimide film has been commercialized with high optical transmittance, near zero birefringence, a relatively low CTE and a high Tg. As discussed above, the substrate is required to have near zero birefringence, i.e., the refractive index along the direction perpendicular to the film plane (nz) and along the directions parallel to the film plane (nx or ny) must be identical. Conventional polyimides are composed of rigid rod-like, aromatic monomer units. During solution casting of soluble polyimides or polyamic acid precursors in the absence of stress, the polymer chains spontaneously orient in-plane, but without preferential in-plane orientation, resulting in zero in- plane birefringence, i.e., nx=ny. However, this process generates negative out-of-plane birefringence, i.e., nz<nx=ny. In fact, polyimides prepared from linear rod-like, aromatic monomers (negative birefringent monomers) form films with a high negative birefringence. This prevents such films from being used as display substrates where optical isotropy is required to avoid display distortion. Previous approaches to obtaining polyimide films with low birefringence have involved increasing the flexibility and/or decreasing the linearity of the rigid polyimide backbone. However, these approaches also result in a dramatic decrease in the glass transition temperature.
[0007] Transparent polyimide films have also been prepared by solution casting that exhibit positive out-of-plane birefringence. This has been accomplished through the use of specifically designed cardo diamine monomers (positive birefringent monomers). The monomers have been polymerized with aromatic dianhydrides to give polymer backbones that spontaneously orient in-plane during the casting process. However, the repeat units which result from the positive birefringent monomers have high polarizability perpendicular to the polymer backbone that results in an out-of-plane refractive index (nz) higher than that of the in-plane refractive indices (nx and ny).
[0008] Cardo diamines have also been polymerized with alicyclic dianhydrides to form soluble polyimides. The polymers have been primarily used to form alignment layers for LCDs. Alicyclic polyimide coatings on a polyolefm substrate have been stretched to form a birefringent compensation film. However, no attempt has been made to utilize their optical and thermal properties in the development of substrates for electronic devices that require near zero birefringence. SUMMARY
[0009] In one embodiment, a transparent, fiexible substrate for an electronic device includes an organo-soluble polyimide with a Tg>300°C that is prepared from a mixture of at least one dianhydride and at least one diamine, wherein the at least one dianhydride is an alicyclic dianhydride and the at least one diamine is an aromatic, cardo diamine. In one embodiment, the electronic device is a flat panel display, a lighting device, a photovoltaic device or an input/output device. In yet another embodiment, the fiexible substrate has a thickness of at least 25 microns and a transmittance from 400 to 750 nm that is >80%. In another embodiment, the fiexible substrate has an out-of-plane birefringence of less than about ±0.001, a coefficient of thermal expansion of less than about 60 ppm/°C.
[0010] In yet another embodiment, the organo-soluble polyimide has the general structure:
Figure imgf000006_0001
wherein AC is selected from the group:
Figure imgf000006_0002
wherein Cardo is selected from the group:
Figure imgf000006_0003
R = H, Br, phenyl, phenylethynyl wherein n=l-4 and R is selected from the group comprising hydrogen, halogen (fluoride, chloride, bromide, and iodide), alkyl, substituted alkyl such as halogenated alkyls, nitro, cyano, thioalkyl, alkoxy, substituted alkoxy such as halogenated alkoxy, aryl, or substituted aryl such as halogenated aryls, ethynyl, phenylethynyl, alkyl ester and substituted alkyl esters, and combinations thereof. It is to be understood that when n is less than 4 the remaining positions on the aromatic ring are assumed by hydrogen atoms. It is also to be understood that each R can be different.
[0011] In another embodiment, the at least one alicyclic dianhydride is selected from the group with the general structures:
Figure imgf000007_0001
wherein AC is selected from the group:
Figure imgf000007_0002
and may further be selected from the group including 1,2,3,4-cyclobutanetetracarboxylic dianhydride, 1 ,2,3,4-cyclopentanetetracarboxylic dianhydride, 1 ,2,4,5-cyclohexanetetracarboxylic dianhydride, and bicyclo[2.2.2]oct-7-ene-2,3,5,6-tetracarboxylic dianhydride.
[0012] In another embodiment, the aromatic, cardo diamine is selected from the group with general structure:
Figure imgf000008_0001
wherein n=l-4 and R is selected from the group comprising hydrogen, halogen (fluoride, chloride, bromide, and iodide), alkyl, substituted alkyl such as halogenated alkyls, nitro, cyano, thioalkyl, alkoxy, substituted alkoxy such as halogenated alkoxy, aryl, or substituted aryl such as halogenated aryls, ethynyl, phenylethynyl, alkyl ester and substituted alkyl esters, and combinations thereof. It is to be understood that when n is less than 4 the remaining positions on the aromatic ring are assumed by hydrogen atoms. It is also to be understood that each R can be different. The aromatic, cardo diamine may further be selected from the group comprising 9, 9- bis(4-aminophenyl)fluorine, 9, 9-bis(4-amino-3-fluorophenyl)fluorine, and 9, 9-bis(4-amino-3- methylphenyl)fluorine.
DETAILED DESCRIPTION
[0013] Surprisingly, it has been discovered that soluble polyimides with Tgs >300°C can be used in the manufacture of transparent flexible substrates with near zero birefringence that maintain excellent transparency after exposure to 300°C for 10 minutes in air, or for 30 minutes under reduced pressure or in an inert atmosphere. In particular, it has been found that polyimides that are prepared from alicyclic dianhydrides and aromatic, cardo dianhydrides can be used in the manufacture of transparent substrates (transmittance of greater than 80% at 400 nm to 750 nm) with an out-of-plane birefringence of less than ± 0.001 and a CTE of less than 60 ppm/°C. The substrates can be used in the manufacture of flexible, electronic devices where they are exposed to high temperatures. The polyimides may generally be prepared from alicyclic dianhydrides and aromatic diamines. Alicyclic dianhydrides may be selected from the group:
Figure imgf000009_0001
wherein Ac is selected from the group:
Figure imgf000009_0002
and particularly useful dianhydrides include:
1,2,3,4-Cyclobutanetetracarboxylic dianhydride (CBDA);
Figure imgf000009_0003
CBDA
1,2,3,4-Cyclopentanetetracarboxylic dianhydride (CPDA);
Figure imgf000009_0004
1,2,4,5-Cyclohexanetetracarboxylic dianhydride (HPMDA); and
Figure imgf000009_0005
Bicyclo[2.2.2]oct-7-ene-2,3,5,6-tetracarboxylic dianhydride (BOD A).
Figure imgf000010_0001
[0014] The aromatic diamines may have the following structure:
Figure imgf000010_0002
wherein n=l-4 and R is selected from the group comprising hydrogen, halogen (fluoride, chloride, bromide, and iodide), alkyl, substituted alkyl such as halogenated alkyls, nitro, cyano, thioalkyl, alkoxy, substituted alkoxy such as halogenated alkoxy, aryl, or substituted aryl such as halogenated aryls, ethynyl, phenylethynyl, alkyl ester and substituted alkyl esters, and combinations thereof. It is to be understood that when n is less than 4 the other positions on the aromatic ring are assumed by hydrogen atoms. It is also to be understood that each R can be different.
Particularly useful diamines include:
9, 9-Bis(4-aminophenyl)fluorene (FDA);
Figure imgf000010_0003
9, 9-Bis(4-amino-3-fluorophenyl)fluorene (FFDA); and
Figure imgf000011_0001
9, 9-Bis-(4-amino-3-methylphenyl)fluorene (MeFDA).
Figure imgf000011_0002
[0016] In one embodiment, the polyimide may be prepared from monomer mixtures containing one or more alicyclic dianhydrides and one or more cardo, aromatic diamines. In some cases, it may be desirable to substitute some of the cardo diamine with a non-cardo, aromatic diamine, and/or some of the alicyclic dianhydride with an aromatic dianhydride. In particular, it may be useful to include a monomer containing a group, such as a carboxyl group, that can be used in crosslinking the polymer so as to induce solvent resistance. When this group is present crosslinking can be induced by heating near 300°C or by heating above 200 °C in the presence of a multi-functional epoxide. The monomers can be polymerized in high boiling solvents, such DMAC, NMP or m-cresol, which can contain an imidization catalyst, such as isoquinoline, at elevated temperatures to directly yield the imidized polymer. The polymerization mixture may also contain a dehydration reagent such as toluene.
[0017] In another embodiment, the monomers can be polymerized in polar aprotic solvents below 100°C to yield a low molecular weight polyamic acid that is imidized either chemically or thermally imidized. In yet another embodiment, imidization can also be carried out by a combination of these two methods. In fact, a combination of the two methods may be useful for the continuous casting of film directly from the polyamic acid polymerization mixture.
[0018] The flexible substrates are prepared as single layer, films and as multi-layer laminates comprising a polyimide layer and a thin glass layer. The single layer films can be prepared by solution casting techniques known to those skilled in the art from solutions of the imidized polyimides in common organic solvents. Both batch and continuous processes, such as a roll-to-roll process, may be used. In both techniques, the viscosity of the solution is adjusted by adjusting the solids concentration and the polymer molecular weight so that optimum films may be produced with the equipment used. The multi-layer laminates can be prepared in one step by solution casting a layer of the polyimide on thin glass films. Additives may be used to increase the adhesion of the polyimide to the glass. The laminates may also be prepared in a multi-step process, wherein a polyimide layer is first solution cast on a carrying tape such as a polyester film. The combination is then laminated to the glass film so that the polyimide layer adheres to the glass. The carrying tape is removed prior to or during the construction of the flat panel display.
[0019] The substrates can also be prepared by solution casting techniques from solutions of the polyamic acid precursors to the polyimides. In this case, the conversion of the polyamic acid to the polyimide is carried out chemically and/or thermally during or subsequent to the casting process. A continuous, roll-to-roll process whereby the polyamic acid is mixed with a chemical imidization mixture immediately prior to casting on an endless belt, which passes through heated zones, can be used to prepare single layer substrates or to form a polyimide layer on a glass film. [0020] In order to simplify the construction of a flexible electronic device such as a display, other functional and non-functional layers may be cast on or laminated to the substrate. For example, a gas barrier layer might be added.
GENERAL POLYMERIZATION PROCEDURES [0021] The following general procedure may be used to prepare a polyimide from a cardo diamine and an alicyclic dianhydride in a high boiling solvent:
[0022] To a three-neck, round-bottom flask (250 mL) that was equipped with an overhead stirrer, a nitrogen inlet, and a short path distillation apparatus, 0.040 mol of the cardo diamine and 60 ml of m-cresol was added to form a mixture. The mixture was heated to about 60°C under nitrogen with stirring until all the diamine dissolved. The alicyclic dianhydride (about 0.040 mol) was added to the mixture to form a reaction mixture, which was heated at about 100°C until all the dianhydride dissolved. The heating bath was then removed, and the reaction mixture was allowed to cool to room temperature and was then stirred for about 4 hours. After several drops of isoquinoline were added, the reaction mixture was heated to about 200°C for 12 hours. During this process, water and some m-cresol were removed by distillation. The reaction mixture was then diluted with 50 ml of m-cresol, allowed to cool to room temperature and then added to 500 ml of methanol. The fibrous precipitate that formed was collected by filtration, soaked in methanol to remove the majority of the solvent (process was repeated three times) and then dried under reduced pressure at 100°C.
[0023] Polymer solubility. The solubility of the polymer was determined in N-methyl- pyrrolidinone (NMP), N, N-dimethylacetamide (DMAc) and cyclopentanone (CPN). The results are shown in Table 1. The polymer was considered soluble if a 5 wt % solution could be prepared. [0024] Preparation of film for substrate qualification. The dry polymer was dissolved in cyclopentanone with a solids content between 5-20%. (Films could also be prepared from solutions of the polymers in polar aprotic solvents.) After filtration, the solution was poured on a glass substrate. The solvent was allowed to evaporate at ambient temperature. The glass substrate containing the film was dried at 100°C under reduced pressure. The polymer film was removed from the glass by dipping the substrate glass in water.
[0025] Film birefringence. The birefringence of the freestanding film (25 μιη) was determined on a Metricon Prism Coupler 2010/M.
[0026] Film transparency. Transparency was measured by determining the transmittance of a 25 μιη thick film from 400 to 750 nm with a UV- Visible spectrometer (Shimadzu UV 2450). The transmittance was determined before and after the film was heated at 300°C for 10 minutes in air or under reduced pressure or an inert atmosphere for 30 minutes. A plot of transmittance vs. wavelength was nearly identical to that of commercial PEN substrates. The minimum transmittance of the films, which is given in Table 1, was at 400 nm. If the film was heated under these conditions for longer than 60 minutes the transmittance at 400 nm was less than 80%.
EXAMPLES
[0027] Examples la-c. BODA was polymerized by the general polymerization procedure with FDA (la), FFDA (lb), and MeFDA (lc) (Table 1).
[0028] Comparative Examples la-c. The general polymerization procedure was carried out with the aromatic dianhydride 3,3',4,4'-Biphenyltetracarboxylic acid dianhydride (BPDA), which was used in place of the alicyclic dianhydride and FDA (la), FFDA (lb), and MeFDA (lc) (Table 1). [0029] Comparative Examples 2a-c. The general polymerization procedure was carried out with the aromatic dianhydride bis[4-(3,4-dicarboxyphenoxy)phenyl]propane dianhydride (BisADA), which was used in place of the alicyclic dianhydride and FDA (2a), FFDA (2b), and MeFDA (2c) (Table 1).
Table 1. Polymerization of BOD A, BPDA and BisADA
Figure imgf000015_0001
2b
MeFD Comparative
Yes Yes Yes -0.0073 62
A 2c
* After thermal treatment at 300°C for 30 minutes under reduced pressure.
[0030] As shown in Table I, examples la-c produced polymers that formed films with a near zero birefringence and excellent transparency. Specifically, examples la-c had a transmittance of greater than 80% from 400 nm to 750 nm with an out-of-plane birefringence of less than ± 0.001 and a CTE of less than 60 ppm/°C.
[0031] Examples 2a-h. The general polymerization procedure was carried out with
HPMDA and various mixtures of FFDA (98 mol% to 88 mol%) and PFMB (2 mol% to 12 mol%) (Table 2).
[0032] Example 3. The general polymerization procedure was carried out with HPMDA and a mixture of FFDA (90 mol%) and ODA (10 mol %) (Table 2).
[0033] Example 4. The general polymerization procedure was carried out with HPMDA
(90 mol%) and 6FDA (10 mol%) and FFDA (Table 2).
[0034] Example 5. The general polymerization procedure described was carried out with
HPMDA and FDA (Table 2).
Table 2. Polymerization of HPMDA
Figure imgf000017_0001
PFM
FFDA
B 2g Yes Yes Yes 0.00 59 422
90%
10% 05
PFM
FFDA
B 2h Yes Yes Yes 0.00 55 422
88%
12% 09
OD
HPMDA FFDA
A 3 Yes Yes No 0.00 55 428 85.7 82.0 100% 90%
10% 03
HPM 6FD
FFDA 0.00
DA A 4 Yes Yes Yes 58 422 85.0 80.6
100% 01
90% 10%
HPMDA FDA 0.00
5 Yes Yes No 45 83.3 100% 100% 09
* After thermal treatment at 300°C for 10 minutes in air.
[0035] As shown in Table II, the selected dianhydrides and diamines, and mixtures thereof, along with the percentages used may be varied in the reaction mixtures to form polyimides that can be used to form acceptable flexible substrates. [0036] To the extent that the term "includes" or "including" is used in the specification or the claims, it is intended to be inclusive in a manner similar to the term "comprising" as that term is interpreted when employed as a transitional word in a claim. Furthermore, to the extent that the term "or" is employed (e.g., A or B) it is intended to mean "A or B or both." When the applicants intend to indicate "only A or B but not both" then the term "only A or B but not both" will be employed. Thus, use of the term "or" herein is the inclusive, and not the exclusive use. See, Bryan A. Garner, A Dictionary of Modern Legal Usage 624 (2d. Ed. 1995). Also, to the extent that the terms "in" or "into" are used in the specification or the claims, it is intended to additionally mean "on" or "onto." Furthermore, to the extent the term "connect" is used in the specification or claims, it is intended to mean not only "directly connected to," but also "indirectly connected to" such as connected through another component or components.
[0037] While the present application has been illustrated by the description of embodiments thereof, and while the embodiments have been described in considerable detail, it is not the intention of the applicant to restrict or in any way limit the scope of the appended claims to such detail. Therefore, the application, in its broader aspects, is not limited to the specific details, the representative apparatus and method, and illustrative examples shown and described. Accordingly, departures may be made from such details without departing from the spirit or scope of the applicant's general inventive concept.

Claims

1. A transparent, flexible substrate for use in or with electronic devices, the substrate comprising an organo-soluble polyimide having a glass transition temperature greater than about 300°C, wherein the organo-soluble polyimide is comprised of at least one dianhydride and at least one diamine, wherein at the least one dianhydride is an alicyclic dianhydride and the at least one diamine is an aromatic cardo diamine.
2. The substrate of claim 1, wherein the electronic device is a flat panel display, a lighting device, a photovoltaic device, or an input/output device.
3. The substrate of claim 1, wherein the substrate has a thickness of at least 25 microns and a transmittance from 400 to 750 nm of greater than about 80%.
4. The substrate of claim 3, wherein the transmittance from 400 to 750 nm is greater than 80% after the substrate has been heated at 300°C for less than 60 minutes.
5. The substrate of claim 1, wherein the substrate has an out-of-plane birefringence of less than about + 0.001.
6. The substrate of claim 1, wherein the substrate has a coefficient of thermal expansion of less than about 60 ppm/°C.
7. The substrate of claim 1, wherein the polyimide has the general structure:
Figure imgf000020_0001
wherein Ac is selected from the group comprising:
Figure imgf000021_0001
and wherein cardo is selected from the group comprising:
Figure imgf000021_0002
R = H, Br, phenyl, phenylethynyl . wherein n=l-4 and R is selected from the group comprising hydrogen, halogen (fluoride, chloride, bromide, and iodide), alkyl, substituted alkyl such as halogenated alkyls, nitro, cyano, thioalkyl, alkoxy, substituted alkoxy such as halogenated alkoxy, aryl, or substituted aryl such as halogenated aryls, ethynyl, phenylethynyl, alkyl ester and substituted alkyl esters, and combinations thereof. It is to be understood that when n is less than 4 the remaining positions on the aromatic ring are assumed by hydrogen atoms. It is also to be understood that each R can be different.
8. The substrate of claim 1, wherein the alicyclic dianhydride is selected from the group with the general structure:
Figure imgf000021_0003
wherein Ac is selected from the group comprising:
Figure imgf000022_0001
9. The substrate of claim 8, wherein the alicyclic dianhydride is selected from the group comprising: 1,2,3,4-cyclobutanetetracarboxylic dianhydride, 1,2, 3,4- cyclopentanetetracarboxylic dianhydride, 1,2,4,5-cyclohexanetetracarboxylic dianhydride, and bicyclo[2.2.2]oct-7-ene-2,3,5,6-tetracarboxylic dianhydride.
10. The substrate of claim 1, wherein the aromatic cardo diamine is selected from the group with general structure:
Figure imgf000022_0002
wherein n=l-4 and R is selected from the group comprising hydrogen, halogen (fluoride, chloride, bromide, and iodide), alkyl, substituted alkyl such as halogenated alkyls, nitro, cyano, thioalkyl, alkoxy, substituted alkoxy such as halogenated alkoxy, aryl, or substituted aryl such as halogenated aryls, ethynyl, phenylethynyl, alkyl ester and substituted alkyl esters, and combinations thereof. It is to be understood that when n is less than 4 the remaining positions on the aromatic ring are assumed by hydrogen atoms. It is also to be understood that each R can be different.
11. The substrate of claim 10, wherein the aromatic cardo diamine is selected from the group comprising: 9,9-bis(4-aminophenyl)fluorine, 9,9-bis(4-amino-3-fluorophenyl)fluorine, and 9, 9-bis(4-amino-3-methylphenyl)fluorine.
12. The substrate of claim 1, wherein the polyimide further comprises an aromatic dianhydride.
13. The substrate of claim 1, wherein the polyimide further comprises a non-cardo, aromatic diamine.
14. The substrate of claim 13, wherein the non-cardo, aromatic diamine contains a free carboxyl group.
15. The substrate of claim 14, wherein the non-cardo, aromatic diamine is selected from the group comprising 3.5-dicarboxyaniline and 2,2'-dicarboxy-4,4'-diaminobiphenyl.
16. A transparent, flexible, multi-layer substrate for electronic devices comprising: a first layer comprising an organo-soluble polyimide having a glass transition temperature greater than about 300°C, wherein the organo-soluble polyimide comprises at least one dianhydride and at least one diamine, wherein the at least one dianhydride is an alicyclic dianhydride and the at least one diamine is an aromatic cardo diamine; and
a second layer comprising glass.
17. The substrate of claim 16, wherein the first layer has a thickness of at least 2 microns.
18. The substrate of claim 16, wherein the second layer has a thickness of at least 20 microns.
19. The substrate of claim 16, wherein the substrate has a transmittance from 400 to 750 nm that is greater than about 80%.
20. The substrate of claim 16, wherein the substrate has a transmittance from 400 to 750 nm that is greater than about 80% after the substrate has been heated at 300°C for less than 60 minutes.
21. The substrate of claim 16, wherein the substrate has an out-of-plane birefringence of less than about ± 0.001.
22. The substrate of claim 16, wherein the substrate has a coefficient of thermal expansion of less than about 60 ppm/°C.
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KR20150007335A (en) 2015-01-20
CN104379635B (en) 2022-10-28
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US20140037930A1 (en) 2014-02-06
US11059742B2 (en) 2021-07-13

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