WO2013163195A1 - Transducteur en champ proche pourvu d'un noyau et d'une couche extérieure plasmonique - Google Patents

Transducteur en champ proche pourvu d'un noyau et d'une couche extérieure plasmonique Download PDF

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Publication number
WO2013163195A1
WO2013163195A1 PCT/US2013/037816 US2013037816W WO2013163195A1 WO 2013163195 A1 WO2013163195 A1 WO 2013163195A1 US 2013037816 W US2013037816 W US 2013037816W WO 2013163195 A1 WO2013163195 A1 WO 2013163195A1
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WIPO (PCT)
Prior art keywords
transducer
conformal layer
core
nft
field transducer
Prior art date
Application number
PCT/US2013/037816
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English (en)
Inventor
Michael Allen Seigler
Michael Christopher KAUTZKY
Tong Zhao
Edwin Frank REJDA
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Seagate Technology Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of WO2013163195A1 publication Critical patent/WO2013163195A1/fr

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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/313—Disposition of layers
    • G11B5/3133—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure
    • G11B5/314—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure where the layers are extra layers normally not provided in the transducing structure, e.g. optical layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B5/60—Fluid-dynamic spacing of heads from record-carriers
    • G11B5/6005—Specially adapted for spacing from a rotating disc using a fluid cushion
    • G11B5/6088—Optical waveguide in or on flying head
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1226—Basic optical elements, e.g. light-guiding paths involving surface plasmon interaction
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B2005/0002—Special dispositions or recording techniques
    • G11B2005/0005—Arrangements, methods or circuits
    • G11B2005/0021—Thermally assisted recording using an auxiliary energy source for heating the recording layer locally to assist the magnetization reversal

Definitions

  • the present disclosure relates to optical components used in applications such as heat assisted magnetic recording (HAMR).
  • HAMR heat assisted magnetic recording
  • a HAMR device utilizes a magnetic recording media (e.g., hard drive disk) that is able to overcome
  • TAMR thermal assisted magnetic recording
  • EAMR energy assisted magnetic recording
  • One embodiment described herein is directed to a near- field transducer having a core with at least two non-parallel surfaces.
  • An outer conformal layer of plasmonic material encompasses the at least two surfaces of the core structure.
  • the core is formed of a material that provides higher mechanical stability at elevated temperature than the plasmonic material.
  • the core structure may be formed of a nonmagnetic material of low-solubility in the plasmonic material.
  • an inner conformal layer may be formed between the core and the outer conformal layer.
  • FIG. 1 is a perspective view of a thermal assisted recording slider utilizing a near field transducer and waveguide according to an example embodiment
  • FIG 2 is a cross-sectional view of a waveguide, write pole, and near- field transducer according to an example embodiment
  • FIGS. 3-5 are perspective views of near- field transducer geometries according to example embodiments.
  • FIG. 6-9 are diagrams of near- field transducer configurations according to example embodiments.
  • FIGS. 10 and 1 1 are scanning electron microscope images of a slider surface according to an example embodiment
  • FIG. 12 is a tunneling electron microscope image of a near- field transducer at a slider surface according to an example embodiment.
  • FIGS. 13 and 14 are flowcharts illustrating procedures according to example embodiments.
  • HAMR thermal/heat assisted magnetic recording
  • FIG. 1 a perspective view shows an example HAMR slider 100.
  • This example slider 100 includes an edge-emitting laser diode 102 integrated into a trailing edge surface 104 of the slider 100.
  • the laser diode 102 is proximate to a HAMR read/write head 106, which has one edge on an air bearing surface (ABS) 108 of the slider 100.
  • ABS air bearing surface
  • the ABS 108 faces and is held proximate to a moving media surface (not shown) during device operation.
  • the laser diode 102 provides electromagnetic energy to heat the media surface at a point near to the read/write head 106.
  • Optical coupling components such as a waveguide 1 10, are formed integrally within the slider device 100 to deliver light from the laser 102 to the media.
  • a portion of waveguide 1 10 and an NFT 1 12 may be located proximate the read/write head 106 to provide local heating of the media during write operations.
  • the laser diode 102 in this example is an integral, edge firing device, it will be appreciated that the waveguide/NFT 112 may be applicable to any light source and light delivery mechanisms.
  • surface emitting lasers (SEL) may be used instead of edge firing lasers, and the slider 100 may use any combination of integrated and/or external lasers.
  • a HAMR device may utilize optical components to heat a recording media (e.g., magnetic hard disk) in order to overcome superparamagnetic effects that limit the areal data density of conventional magnetic recording media.
  • a recording media e.g., magnetic hard disk
  • a coherent light source such as a laser may provide the energy for this heating operation
  • optical components e.g., built in to a slider that houses the write head, are configured direct this energy onto the media.
  • Energy from the light source is launched into a waveguide integrated into a hard drive head.
  • the light propagates through the waveguide and may be coupled to an optical NFT, e.g., either directly from the waveguide or by way of a focusing element.
  • the NFT focuses and emits the light onto the media surface to heat the media over the track on the media surface where writing takes place.
  • FIG. 2 a cross-sectional view illustrates portions of a read/write head 106 according to an example embodiment.
  • the ABS 108 and NFT 1 12 are proximate to a surface of a magnetic medium 202, e.g., a magnetic disk.
  • the waveguide 110 delivers electromagnetic energy 204 to the NFT 1 12, which directs the energy to create a small hotspot 208 on the medium 202.
  • a magnetic write pole 206 causes changes in magnetic flux near the ABS 108 in response to an applied current. Flux from the write pole 206 changes a magnetic orientation of the hotspot 208 as the hotspot 208 moves past the write pole 206 in the downtrack direction (z-direction).
  • the waveguide 1 10 and NFT 1 12 may be formed integrally within a slider that houses the read-write head 106.
  • These and other optical elements used in HAMR recording heads are generally known as integrated optics devices.
  • Integrated optics devices are components constructed on substrates, sometimes in combination with electronic components.
  • Integrated optics device may be formed using processes similar to those used for semiconductor production, e.g., deposition of thin films on a substrate.
  • the waveguide 1 10 which transfers light from a laser (e.g., laser diode 102 in FIG. 1) to the NFT 1 12, can be formed by depositing dielectric materials on a substrate using techniques such as atomic layer deposition, photoresist etching, chemical- mechanical planarization, etc.
  • the layers of the waveguide 110 may have differing optical properties, e.g., with middle layer 210 having a refractive index 3 ⁇ 4, and top and bottom layers 212, 214 having refractive indices n 2 and 3 ⁇ 4.
  • the middle layer 210 acts as a waveguide core and the top and bottom layers 212, 214 act as cladding (similar to cladding over an optic fiber core) so that light propagates efficiently through the waveguide 1 10 over a particular range of wavelengths.
  • the NFT 112, write pole 206, and other illustrated components may be formed using similar layer deposition techniques as the waveguide 1 10, although out of different materials.
  • the write pole 206 may be formed using an iron alloy, and the NFT may be formed from a plasmonic material such as gold or silver.
  • a plasmonic device such as NFT 1 12 is used instead of a lens or mirror to focus the energy 204 on to the medium 202 because lenses or mirrors may be diffraction limited at this scale.
  • the NFT 1 12 is made of a material (e.g., Au, Ag, Cu, Al, etc.) that emits a field of surface plasmons at resonance.
  • the NFT 112 is shaped to direct the plasmon field to the surface of the medium 202.
  • the NFT 1 12 is disposed within the waveguide core
  • the waveguide core 210 may be terminated behind the NFT 1 12, e.g., in the negative y-direction.
  • the dimensions and/or location of the waveguide 1 10 may be adjusted so that the NFT 1 12 is disposed on or near one of the cladding layers 212, 214 instead of the core 210.
  • the waveguide 110 may include other features that are not shown in FIG. 2, such as a solid immersion mirror (SIM) or solid immersion lens (SIL) that focuses light on to the NFT 1 12.
  • SIM solid immersion mirror
  • SIL solid immersion lens
  • the energy applied to the NFT 1 12 to create the hotspot 208 can also cause a significant temperature rise in the NFT 1 12.
  • the NFT 1 12 may be formed as a peg, pin, bar, or other protrusion having relatively small dimensions in order to keep the generated plasmonic field small.
  • a heat sink 218 may be formed proximate to (or integral with) the NFT 112. The heat sink 218 may draw heat away from the NFT 1 12, and be thermally coupled to other components (e.g., the write pole 206) in order to dissipate the heat.
  • FIGS. 3-5 NFT geometries according to example embodiments are shown in FIGS. 3-5. These geometries are presented for purposes of illustration and not limitation. The claimed subject matter may apply to NFT configurations different than those illustrated in FIGS. 3-5 and elsewhere herein.
  • FIG. 3 a perspective view shows an NFT geometry 300 that includes a circular disk 302 lying on the x-y plane.
  • the disk 302 is coupled to a peg 304, the end of which extends to the ABS 108.
  • This NFT geometry 300 may be referred to herein as the "lollipop" NFT configuration.
  • the disk 302 may be placed in the focal point of a SIM or the like, and the generated plasmons radiate from the peg 304 to a media surface.
  • a heat sink 306, that may be considered as either integral to or separate from the NFT 300.
  • the heat sink 306 provides a thermal conductive path, e.g., to a magnetic pole or other structure, such as previously represented by heat sink 218 and pole 206 in FIG. 2.
  • FIG. 4 a perspective view shows another NFT geometry 320.
  • This NFT 320 is configured as side-by-side, elongated plates 322, 324 (elongated in the y- direction) with a gap 326 therebetween.
  • the plates 322, 324 are disposed on the x-y plane, and the gap 326 runs in the y-direction from an excitation location 328 to the ABS 108.
  • the gap 326 and surrounding areas near the excitation location 328 may be filled with a dielectric material.
  • the plates 322, 324 are curved/chamfered at waveguide facing ends 329 in order to improve coupling with a waveguide (not shown). This arrangement may be referred to herein as the "gap" NFT.
  • FIG. 5 a perspective view shows another NFT geometry 330.
  • This NFT 330 is configured as an elongated pin with a narrowed tip 332 near the ABS
  • the NFT is shown disposed between a magnetic write pole 206 and waveguide 336, the latter which may include a waveguide core and/or cladding. This arrangement may be referred to herein as the "pin" NFT.
  • temperature of the NFT may significantly increase at plasmonic resonance.
  • significant energy is being concentrated in a small volume, such as parts of the NFT near the ABS.
  • the peg 304 in FIG. 3 have reduced volume compared to the NFT as a whole, and is positioned in a location of high energy density.
  • a similar concentration of energy in a small volume may occur along the narrow parts of the gap 326 of the NFT design in FIG. 4.
  • a portion of the plates 322, 324 and peg 304 may be exposed at ABS, and thus may be subject to mechanical wearing as well.
  • the NFT performance may be influenced by thermal and mechanical stresses during F1AMR operation. Due to its superior optical properties, gold (Au) is often used to form plasmonic resonator/antenna of the NFT (e.g., disk/peg 302/304 in FIG. 3, and plates 324, 326 in FIG. 4). However gold has relatively poor mechanical strength compared to other metals, and gold NFT devices have shown various types of degradation or failure at elevated temperature.
  • Au gold
  • NFT temperature during HAMR operation may reach up to 400° C in a lollipop-type configuration and up to 250° C in a gap-type configuration. This heating is due to both to the laser light emitted from the NFT, and from writer and reader heaters. It has been found that these temperatures are sufficient to cause plastic deformation of an NFT formed from a plasmonic metals such as pure Au. For example, grain growth, creep, and plastic deformation can start in an Au at around 100°C. These temperature effects can result in lower coupling efficiency, intrusion of NFT material onto the ABS, and/or device failure at sufficiently high temperatures.
  • a relatively soft plasmonic metal such as Au
  • a relatively soft plasmonic metal such as Au
  • recession of NFT material at the ABS may occur during lapping, which is a manufacturing process of mechanically and/or chemically removing materials from layers on a slider/bar. This recession may occur in response to other fabrication operations, such as etching to clean the ABS surface prior to deposition of a protective diamond-like carbon (DLC) head overcoat.
  • DLC diamond-like carbon
  • plasmonic materials such as pure Au, Ag, Cu, or alloys thereof (see, e.g., plasmonic alloys disclosed in United States Patent 201 1/0205863, which is hereby incorporated by reference) may have diminished high-temperature resistance and can be difficult to manufacture, the electromagnetic and optical properties of these materials are superior. Depending on the system design parameters (e.g., available laser power, waveguide losses, energy required at the media) the high efficiencies provided by these materials may make them indispensible.
  • one approach considered herein is to make an outer edge (or skin) of the NFT out of a good plasmonic material, such as Au, Ag, Cu, Al, alloys thereof, and make the inner part of the NFT out of a more mechanically robust material.
  • a good plasmonic material such as Au, Ag, Cu, Al, alloys thereof
  • This concept gives the freedom of selecting different and optimal material properties for different portions of the NFT.
  • having a thin plasmonic layer can result in smaller grain size and associated hardening (e.g. Hall-Petch hardening) of the plasmonic outer layer(s).
  • the NFT is viewed from the ABS, proximate at least part of a magnetic pole 206.
  • the NFTs in these figures have a gap-type NFT geometry as shown in FIG. 4. It will be appreciated that the concepts shown and described in these figures are equally applicable to other NFT configurations, e.g., NFT configurations 300 and 330 shown in FIGS. 3 and 5.
  • an inner core portion of the NFT 400 is made from a mechanically robust material 402 that is coated by a plasmonic material 404.
  • the core portion has at least two adjacent non-parallel surfaces, 403, 405.
  • the outer conformal layer of plasmonic material 404 encompasses the at least two surfaces 403, 405.
  • the core may be formed of a non-magnetic material 402 of low-solubility in the plasmonic material 404. In such a case, the non-magnetic material 402 provides the near- field transducer 400 higher mechanical stability than the plasmonic material 404.
  • the choice of materials 402, 404 may be chosen based on a thickness 406 of the outer conformal layer(s). If the mechanically robust material 402 has relatively good plasmonic properties, than the thickness 406 of the outer material 404 can be thin relative to the outer dimensions of the NFT 400. For example, if a maximum dimension of the NFT is on the order of 800 nm, an Au skin thickness 406 could be on the order of 20-50 nm for inner materials 402 such as a plasmonic alloy. If the inner material 402 is a relatively poorer plasmonic material, the outer layer thickness 406 could be greater. [0034] The inner material 402 could be chosen based on any combination of plasmonic, mechanical, corrosion and heat sinking properties.
  • the inner material 402 is thermal stability relative to the outer material 404, e.g., solubility, inter-diffusion, chemical reactions, thermal expansion etc., that may occur between the two materials 402, 404.
  • the inner material 402 could be also chosen to enhance the mechanical strength of the outer material 404 through interface engineering.
  • the inner materials 402 may chosen to have low solubility with Au, such as refractory metals/alloys W, TiW, Rh, Ru, etc., or alloys thereof
  • Other examples of the inner material 402 include Cr, NiW, NiCr, Ti, Zr, Y, Ir, V, Re, Pt, etc.
  • the inner material may also include thermally conductive ceramics (oxides, nitrides, diborides), such as conducting metal oxides like TCOs and conducting metal nitrides like TiN, ZrN.
  • the core 422 core has at least two non-parallel surfaces, e.g., surfaces 430 and 432.
  • the inner conformal layer 424 is disposed over and thereby encompasses at least one of the surfaces 430, 432.
  • the outer conformal layer of plasmonic material 426 is disposed over and thereby encompasses the at least two surfaces 430, 432 and the inner conformal layer 424.
  • the term "over” is not meant to imply direct contact.
  • the outer conformal layer 426 may be considered to be over the core 422 and over the inner conformal layer 424, yet as seen here, the outer conformal layer 426 does not touch the surfaces 430, 432 of the core 422.
  • This embodiment includes three discrete layers of materials 422,
  • each material 422, 424, 426 can be chosen with a range of different properties.
  • the outer layer material 426 is a plasmonic material
  • one or both of the inner layers 422, 424 is a non-plasmonic material (or plasmonic alloy) that is chosen to improve mechanical characteristics of the NFT 420 as a whole.
  • the core material 422 is formed of a core material that provides higher mechanical stability at elevated temperature than the plasmonic material.
  • the NFT is formed by a graded material that transitions from a mechanically robust material 502 at the core of the NFT 500 to a plasmonic material 504 at one or more outer surfaces of the NFT 500. This could be done by changing the alloy composition gradually or by gradually introducing doping element(s) or nano-particles when forming the structures of the NFT 500.
  • a diagram shows an NFT structure 520 according to a fourth example embodiment.
  • the outer edges of the NFT 520 have a layer of plasmonic material 522 deposited over core material 524.
  • the outer layer 522 has a varying thickness, which varies from a first thickness 526 at one side of the NFT 520 to a second thickness 528 at another side of the NFT 520.
  • the use of a tapered/flared outer material coating 522 allows for optimization of optical performance of the NFT, e.g. optical spot size and distribution, coupling efficiency, etc., while still benefiting from mechanical and heat transfer properties of the core material 524.
  • the tapered liner/coating 522 may be obtained, for example, generally controlled, low-incidence sputtering techniques such as ion beam deposition (IBD), etc.
  • the outer liner of plasmonic material covers all sides except the side facing the magnetic pole 206 (e.g., sides 530 in FIG. 9). This is because it is expected that, at least in this configuration, adding plasmonic material on the pole-facing surfaces may provide minimal
  • the outer layer of plasmonic material can be applied on any combination of surfaces, such as on the bottom only, on the sides only, on the top only, continuous all the way around, or any combination of these. These variations can be achieved by modifying the processes used to deposit the plasmonic material on the core.
  • This concepts described herein may could apply to any NFT geometry where there is a cross-section of plasmonic material at the air-bearing surface that is larger than the skin-depth of the given plasmonic material and plasmon wavelength.
  • the mechanically robust materials used for the core may be, mechanically hard, corrosion resistant, and resistant to diffusion with the outer coating material.
  • the core may also be a magnetic material to adjust the alignment of the magnetic field and thermal spot in the media.
  • a diffusion barrier may be needed between the magnetic material and the plasmonic material to ensure there is no diffusion between the two.
  • an adhesion layer may be included between the plasmonic outer layer and dielectric cladding (e.g., cladding 212 or 214 shown in FIG. 2) of the waveguide. This is shown in FIG. 6, with adhesion layer 410 between outer conformal layer 404 and dielectric cladding 412.
  • an NFT may have a large amount of Au at the ABS that could lead to recession during lapping and/or the pre-DLC etch.
  • An example of this type of recession in a non-HAMR perpendicular recording head is seen in SEM images of FIGS. 10 and 1 1. Performance of both perpendicular and HAMR recording may be significantly dependent on the spacing between the writer and the media. In order to control the spacing to the media, planarization of the transducer features on the ABS of the recording head is performed. Material such as gold used for the NFT tend to recess relative to other transducer materials such as FeCo (e.g., used for the write pole) in current lapping and etching slider manufacturing processes.
  • This NFT recession may lead to rounding, such as indicated circled area of write pole 602 proximate to surrounding material 604 in FIG. 10. This rounding may lead to decreased performance.
  • a coated NFT may reduce the recession at the edge of the NFT relative to other transducer materials. In this way, the spacing between the NFT edge (e.g., at surface 108 shown in FIGS. 3-5) and the media may be reduced.
  • FIG. 1 1 illustrates a reduction on write pole rounding using a sidewall 612 of Ru between the surrounding material 614 and write pole 616.
  • Lapping tolerance of the write pole may vary based on NFT configuration.
  • a gap-type NFT may exhibit improved lapping tolerances of the write pole 602 compared to a lollipop configuration, although as seen in FIG. 12 the gap NFT itself may still exhibit rounding in response to lapping operations and the like.
  • TEM tunneling electron microscope
  • FIG. 12 a tunneling electron microscope (TEM) image shows a gap-style NFT at the ABS.
  • this NFT includes two side by side plates 622 with a gap 624 therebetween.
  • the gap 624 in this example is filled with a dielectric material.
  • the NFT plates 622 are rounded where the Au material interfaces with different materials at the ABS. This rounding is caused by aforementioned manufacturing operations such as lapping that are performed on the ABS.
  • a multilayer NFT with a thin but hard plasmonic layer and mechanically robust core may be less susceptible to this type of rounding.
  • a flowchart illustrates a procedure for forming an NFT according to an example embodiment.
  • the procedure involves forming 702 a first core structure having at least two non-parallel surfaces (e.g., coated surfaces of NFT 400 in FIG 6).
  • the core is formed of a material that provides higher mechanical stability at elevated temperature than a plasmonic material.
  • the procedure also involves forming 704 at least one internal conformal layer over the at least two non-parallel surfaces of core structure.
  • An outer conformal layer of the plasmonic material is then formed 706 over the inner conformal layer.
  • the procedure may also optionally involve forming 708 a magnetic write pole proximate the near-field transducer.
  • a flowchart illustrates a procedure for forming an NFT according to an example embodiment.
  • the procedure involves forming 710 a first core structure having at least two non-parallel surfaces (e.g., coated surfaces of NFT 400 in FIG 6).
  • the core structure is formed of a material that provides higher mechanical stability at elevated temperature than a plasmonic material.
  • the procedure also involves forming 712 an outer conformal layer of the plasmonic material over the at least two surfaces of the core structure.
  • the procedure may also optionally involve forming 708 a magnetic write pole proximate the near- field transducer.
  • Item 1 is a near-field transducer, comprising: a core having at least two non-parallel surfaces; an inner conformal layer encompassing at least one of the at least two non-parallel surfaces; and an outer conformal layer of a plasmonic material encompassing the at least two non- parallel surfaces and the inner conformal layer, wherein the core is formed of a core material that provides higher mechanical stability at elevated temperature than the plasmonic material.
  • Item 2 is the near- fie Id transducer of item 1 , wherein the inner conformal layer comprises a refractory metal of low solubility in the plasmonic material.
  • Item 3 is the near- field transducer of item 2, wherein the inner conformal layer comprises an alloy of refractory metal.
  • Item 4 is the near- fie Id transducer of item 1, wherein the inner conformal layer comprises a metal oxide.
  • Item 5 is the near-field transducer of item 1 , wherein at least one of the core material and the inner conformal layer comprises a thermally conductive ceramic.
  • Item 6 is the near- fie Id transducer of any of items 1-5, wherein the near- field transducer is formed as two elongated plates with a gap disposed therebetween.
  • Item 7 is the near- field transducer of any of items 1-6, wherein the at least two non- parallel surfaces comprise three or more adjacent surfaces.
  • Item 8 is the near- field transducer of any of items 1-7, wherein interfaces between the at least two non-parallel surfaces of the core, the inner conformal layer, and the outer conformal layer are gradually blended between the respective core material, inner material of the inner conformal layer, and the plasmonic material of the outer conformal layer.
  • Item 9 is the near-field transducer of item 1 , wherein the core material comprises a magnetic material that adjusts an alignment of a magnetic field of energy applied to the near- field transducer.
  • Item 10 is the near- field transducer of item 9, wherein the inner conformal layer comprises a diffusion barrier between the magnetic material and the plasmonic material.
  • Item 1 1 is the near- field transducer of item 1 , further comprising an adhesion layer between the outer conformal layer and a dielectric cladding of a waveguide.
  • Item 12 is a near-field transducer, comprising: a core having at least two adjacent non-parallel surfaces; and an outer conformal layer of a plasmonic material encompassing the at least two adjacent non-parallel surfaces, wherein the core is formed of a non-magnetic material of low-solubility in the plasmonic material, wherein the non-magnetic material provides the near- field transducer a higher mechanical stability than the plasmonic material.
  • Item 13 is the near- fie Id transducer of item 12, wherein the nonmagnetic material comprises a refractory metal.
  • Item 14 is the near- field transducer of item 13, wherein the non-magnetic material comprises an alloy of refractory metal.
  • Item 15 is the near- field transducer of item 12, wherein the non-magnetic material comprises a metal oxide.
  • Item 16 is the near- field transducer of item 12, wherein the non-magnetic material comprises a thermally conductive ceramic.
  • Item 17 is the near-field transducer of any of items 12- 16, wherein the near- field transducer is formed as two elongated plates with a gap disposed therebetween.
  • Item 18 is the near- field transducer of any of items 12- 17, wherein the outer conformal layer comprises a varying thickness along at least one of the at least two adjacent non-parallel surfaces.
  • Item 19 is the near- fie Id transducer of item 12- 18, wherein the at least two adjacent non-parallel surfaces comprise three or more adjacent surfaces.
  • Item 20 is the near-field transducer of item 12, further comprising an adhesion layer between the outer conformal layer and a dielectric cladding of a waveguide.

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  • Recording Or Reproducing By Magnetic Means (AREA)

Abstract

Un transducteur en champ proche comprend un noyau ayant au moins deux surfaces non parallèles. Une couche conforme extérieure en un matériau plasmonique entoure les au moins deux surfaces de la structure du noyau. Le noyau est constitué d'un matériau qui, à température élevée, présente une stabilité mécanique supérieure à celle du matériau plasmonique. La structure du noyau peut être constituée d'un matériau non magnétique à faible solubilité dans le matériau plasmonique. En variante, une couche conforme intérieure peut être formée entre le noyau et la couche conforme extérieure.
PCT/US2013/037816 2012-04-24 2013-04-23 Transducteur en champ proche pourvu d'un noyau et d'une couche extérieure plasmonique WO2013163195A1 (fr)

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US201261637628P 2012-04-24 2012-04-24
US61/637,628 2012-04-24

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