WO2013162266A1

WO2013162266A1 - Spraying device for coating surface of cylindrical mold

Info

Publication number: WO2013162266A1
Application number: PCT/KR2013/003479
Authority: WO
Inventors: 유지강; 조명구; 허지원; 이규만
Original assignee: (주)뉴옵틱스
Priority date: 2012-04-24
Filing date: 2013-04-23
Publication date: 2013-10-31
Also published as: KR101443437B1; KR20130119687A

Abstract

The present invention relates to a spraying device for coating the surface of a cylindrical mold, and, more particularly, to a spraying device for coating the surface of a cylindrical mold which has a spray coating unit installed having a plurality of spray nozzles formed in the lengthwise direction of a large surface area cylindrical mold, and which can finely coat a cylindrical mold by means of the vertical movement of the spray coating unit or by adjusting the distance to the large surface area cylindrical mold. The spraying device of the present invention for coating a cylindrical mold has technical significance in that it comprises: a spraying unit spaced a predetermined distance from the outer peripheral surface of the vertically upright cylindrical mold, one or more of which spraying units are provided in order to receive a supply of a liquid spraying material; and at least one spray nozzle unit coupled to the spraying unit in order to apply the liquid spraying material to the outer peripheral surface of the cylindrical mold.

Description

[Correction 20.06.2013 by Rule 26] 스프레이 Spray system for coating cylindrical mold surface

The present invention relates to a spray apparatus for coating a cylindrical mold surface, and more particularly, is provided with a spray coating unit in which a plurality of spray nozzles are formed in the longitudinal direction of a large-area cylindrical mold, and the spray coating unit moves up or down or a large area. The present invention relates to a spray apparatus for coating a surface of a cylindrical mold to adjust the distance to the cylindrical mold and to perform fine coating on the cylindrical mold.

As a general exposure process in semiconductors and displays, not only the basic processes such as deposition, exposure (mask), development, and etching have to be repeated several times or dozens of times, but also ultra-precision printing in nanometers cannot be realized. In order to print, the plate was imprinted on a small substrate using a flat die engraved with a nano pattern through a flat plate imprint process.

When the flat printing process as described above is applied to a large area, a problem arises in that the uniformity of the pattern and the manufacturing cost are increased. Currently, the nano printing process using the cylindrical mold has been applied.

Nano printing process using the cylindrical mold is easy to secure the uniformity of the pattern when applying a large area, there is an advantage in large area using a seamless cylindrical mold.

On the other hand, in order to manufacture a cylindrical mold having a nanopattern, first of all, processing of a cylindrical material having a surface roughness of several nanometers and applying a photoresist are essential.

In general, the photoresist coating method is spray coating, roll coating, spin coating, and the like, and in particular, the spray coating method is used because various factors such as the position of the spray coater nozzle, the rotational speed, and the heating temperature have a great influence on the physical properties. There was a lot of difficulty in controlling.

The present invention devised to solve the problems of the prior art as described above, the coating of the protective film for protecting the cylindrical mold after the micropattern processing of the cylindrical mold as well as the application of the photoresist, and cleaning the cylindrical mold before and after the micropattern production It is an object of the present invention to provide a vertical spray device that can be used in various ways.

In addition, there is another object to enable the production and production of cylindrical molds in a shorter time, because the spray unit formed with a plurality of injection nozzles is used.

In addition, another object of the present invention is to provide a vertical spray coating apparatus for overcoming a deflection phenomenon of a cylindrical mold generated when a large-area cylindrical mold is worked in a horizontal direction.

In addition, another object of the present invention is to provide a temperature control unit capable of controlling the temperature of the liquid injection material injected in correspondence with each process using a cylindrical mold.

In addition, there is another object to provide a feed pump unit that can control the injection pressure of the liquid injection material corresponding to each process using the cylindrical mold.

In addition, another object of the present invention is to provide a cylindrical mold fastening portion capable of rotating a vertically coupled cylindrical mold to evenly apply a liquid spray material to the cylindrical mold.

The above object of the present invention is a spray device for use in any one or more of a photoresist coating process, a protective film coating process or a cleaning process in the working process of the cylindrical mold for producing a fine pattern for printed electronics, the cylindrical mold vertically erect A spraying unit spaced apart from the outer circumferential surface of a predetermined distance by at least one spray unit for supplying the liquid spray material and at least one spray nozzle unit coupled with the spray unit to apply the liquid spray material toward the outer circumferential surface of the cylindrical mold. It is achieved by a spray device for coating a cylindrical mold surface comprising.

The present invention has been made in order to solve the problems of the prior art as described above, the coating of the protective film for protecting the cylindrical mold after the micropattern processing of the cylindrical mold as well as the application of the photoresist, and cleaning the cylindrical mold before and after the micropattern production There is an effect that can provide a vertical spray coating device that can be utilized for a variety of back.

In addition, the use of a spray coating unit formed with a large number of spray nozzles has another effect that can enable the working and production of a cylindrical mold efficiently in a shorter time.

In addition, there is another effect that can provide a vertical spray coating apparatus to overcome the deflection phenomenon of the cylindrical mold generated when the large-area cylindrical mold in the horizontal direction.

In addition, by providing a temperature control unit for adjusting the injection temperature of the liquid injection material supplied to the cylindrical mold, there is another effect that can maintain the temperature of the liquid injection material to be sprayed corresponding to each process at the optimum conditions.

In addition, by providing a feed pump for adjusting the injection pressure of the liquid injection material supplied to the cylindrical mold, there is another effect that can maintain the injection pressure of the liquid injection material to be sprayed corresponding to each process at the optimum conditions.

In addition, by having a cylindrical mold fastening portion capable of rotating the vertically coupled cylindrical mold, there is another effect that can be evenly applied to the liquid injection material to be sprayed on the outer peripheral surface of the cylindrical mold.

1 is a block diagram of a first embodiment for showing a spray device for a cylindrical mold according to the present invention,

2 is a block diagram of a second embodiment for showing a spray device for a cylindrical mold according to the present invention;

3 is a configuration diagram for showing a supply pump unit provided in the spray device according to the present invention;

4 is a configuration diagram for illustrating a temperature control unit provided in the spray apparatus according to the present invention;

5 is a block diagram showing a cylindrical mold fastening portion for fastening and rotating the cylindrical mold according to the present invention.

The terms or words used in this specification and claims are not to be construed as being limited to their ordinary or dictionary meanings, and the inventors may appropriately define the concept of terms in order to best describe their invention. It should be interpreted as meaning and concept corresponding to the technical idea of the present invention based on the principle that the present invention.

Therefore, the embodiments described in the specification and the drawings shown in the drawings are only the most preferred embodiment of the present invention and do not represent all of the technical idea of the present invention, various modifications that can be replaced at the time of the present application It should be understood that there may be equivalents and variations.

Hereinafter, preferred embodiments of the present invention will be described in detail.

1 is a block diagram of a first embodiment for showing a spray device for a cylindrical mold according to the present invention. As shown in Figure 1, the outer circumferential surface of the vertically formed cylindrical mold 100 is provided with one or more circular rim-shaped spray unit 200 is spaced apart at predetermined intervals.

One or more injection nozzles 210 are coupled to the inside of the spray rim 200 in the form of a circular rim, and the injection nozzle 210 is a cylindrical mold for the liquid injection material supplied through the sprayer 200. Fine coating may be performed on the outer circumferential surface of the 100.

The injection nozzle unit 210 may be provided in plurality at uniform intervals corresponding to the diameter of the cylindrical mold 100 and the number of spray units 200.

As shown in (a) of FIG. 1, the spray unit 200 is provided as one, and the liquid spray material may be evenly applied to the outer circumferential surface of the cylindrical mold 100 through vertical movement. The spray unit as shown in FIG. By providing a plurality of (200-1, 200-2, 200-3, 200-n), the working process of the cylindrical mold 100, such as a photosensitive agent application | coating process, a protective film coating process, or a cleaning process, can be advanced quickly.

At this time, the vertical movement of the spray unit 200 provided to be spaced apart from the outer circumferential surface of the cylindrical mold 100 may be moved through a transfer unit (not shown) coupled with the spray unit 200, the transfer unit (not shown) It is preferable to use a servo motor or the like.

That is, the transfer unit (not shown) is combined with one or more spray units 200, 200-1, 200-2, 200-3, 200-n to spray units 200, 200-1, 200-2, 200-3. , 200-n) reciprocating in the vertical direction of the cylindrical mold 100, and according to the external conditions such as the size of the cylindrical mold 100 or the injection pressure of the liquid injection material injected from the injection nozzle unit 210 It is desirable to be able to control the speed at which it is conveyed.

In addition, the cylindrical mold 100 may be vertically coupled to the cylindrical mold fastening part 400, and the center of the cylindrical mold 100 may be formed by a servomotor (not shown) included in the cylindrical mold fastening part 400. The cylindrical mold 100 can be rotated as an axis. Accordingly, the liquid injection material applied by the injection nozzle unit 210 may be evenly applied to the outer circumferential surface of the cylindrical mold 100.

In addition, it is preferable that the servomotor (not shown) for rotating the cylindrical mold 100 standing vertically can selectively rotate clockwise or counterclockwise.

Figure 2 is a block diagram of a second embodiment for showing a spray device for a cylindrical mold according to the present invention. As shown in FIG. 2, the outer circumferential surface of the vertically shaped cylindrical mold 100 is provided with at least one straight bar-shaped spray unit 300, 300-1, 300-in the longitudinal direction of the cylindrical mold 100. 2) is spaced apart at predetermined intervals.

The injection nozzle unit 310 provided with at least one is coupled to the inside of the spray unit 300, 300-1, 300-2 in the form of a straight bar, and the injection nozzle unit 310 is the

spray unit

300, 300-. 1, 300-2 may be finely applied to the outer surface of the cylindrical mold 100, the liquid injection material supplied through.

The injection nozzle unit 310 may be provided in plurality at uniform intervals corresponding to the diameter of the cylindrical mold 100 and the number of spray units 300, 300-1, and 300-2.

As shown in FIG. 2A, the spray unit 300 is provided as one, and the liquid spray material may be evenly applied to the outer circumferential surface of the cylindrical mold 100 through horizontal movement in the direction of the outer circumferential surface of the cylindrical mold 100. By providing a plurality of spray units 300-1 and 300-2 as shown in FIG. 2 (b), the working process of the cylindrical mold 100, such as a photosensitive agent coating step, a protective film coating step or a cleaning step, can be promptly performed. .

At this time, the horizontal movement of the spray unit 300, 300-1, 300-2 provided to be spaced apart from the outer circumferential surface of the cylindrical mold 100 is transferred to the spray unit 300, 300-1, 300-2 It may be moved through (not shown), it is preferable that the transfer unit (not shown) to use a servo motor or the like.

That is, the transfer part (not shown) is combined with one or more spray parts 300, 300-1 and 300-2 to reciprocate the spray parts 300, 300-1 and 300-2 in the horizontal direction of the cylindrical mold 100. It is preferable to control the injection distance through the transfer, and to control the feeding speed according to external conditions such as the size of the cylindrical mold 100 or the injection pressure of the liquid injection material injected from the injection nozzle unit 310. Do.

In addition, the cylindrical mold 100 may be vertically coupled to the cylindrical mold fastening part 400, and the center of the cylindrical mold 100 may be formed by a servomotor (not shown) included in the cylindrical mold fastening part 400. The cylindrical mold 100 can be rotated as an axis. Accordingly, the liquid injection material applied by the injection nozzle unit 310 may be evenly applied to the outer circumferential surface of the cylindrical mold 100.

3 is a configuration diagram for illustrating a supply pump unit included in the spray apparatus according to the present invention. As shown in FIG. 3, the

supply pump parts

220 and 320 may be spray parts 200 according to the first embodiment shown in FIG. 1 or spray parts 300 according to the second embodiment shown in FIG. 2. Are combined in one or more.

The

supply pump parts

220 and 320 supply the liquid injection material at a constant pressure so that the liquid injection material supplied to the

spray parts

200 and 300 may be injected while maintaining a constant pressure through the

injection nozzle parts

210 and 310. do.

In this case, the

supply pump parts

220 and 320 may change the pressure supplied according to the number of the

spray nozzle parts

210 and 310 coupled to the

spray parts

200 and 300 or the characteristics of the

spray nozzle parts

210 and 310. It is characterized by being.

4 is a configuration diagram for illustrating a temperature control unit provided in the spray apparatus according to the present invention. As shown in FIG. 4, the

spray units

200 and 300 perform a liquid spray material on the cylindrical mold 100 through the

spray nozzle units

210 and 310 in performing the photosensitive agent coating process, the protective film coating process, or the cleaning process. Can be applied.

That is, the liquid injection material supplied at a predetermined pressure through the

supply pump parts

220 and 320 shown in FIG. 3 is a cylindrical mold 100 through the

injection nozzle parts

210 and 310 coupled to the

spray parts

200 and 300. It can be applied to the), according to the working process using the cylindrical mold 100, each liquid injection material is characterized in that it must be applied while maintaining a predetermined temperature.

Therefore, the

spray unit

200, 300 may be configured to be combined with the

temperature control unit

230, 330. The

temperature controllers

230 and 330 may be configured of any one of a heating coil and a planar heating element.

At least one of the hot wire coil or the planar heating element is provided inside the

spray units

200 and 300 to directly heat or spray the liquid spray material supplied to the

spray units

200 and 300 through the

supply pump units

220 and 320. It may be provided outside the

parts

200 and 300 to indirectly heat the liquid spray material introduced into the

spray parts

200 and 300.

Meanwhile, by forming the

spray units

200 and 300 using the planar heating element, the liquid injection material may be directly heated through the

spray units

200 and 300 formed of the planar heating element, without providing a separate heating coil or the planar heating element. It may be.

In addition, the

temperature controllers

230 and 330 perform a process for the cylindrical mold 100 such as a photosensitive agent coating process, a protective film coating process, or a cleaning process to preheat the liquid spray material to a predetermined temperature corresponding to each process. It is preferable.

5 is a block diagram showing a cylindrical mold fastening portion for fastening and rotating the cylindrical mold according to the present invention. The cylindrical mold fastening part 400 may be coupled to the lower and upper surfaces of the cylindrical mold 100 to vertically position the cylindrical mold 100.

At this time, the servo motor is provided on the upper side or the lower side of the cylindrical mold fastening portion 400, it is preferable to be able to rotate the cylindrical mold (100). In particular, the rotation of the cylindrical mold 100 is the number of spray units (200, 300), the number of spray nozzles (210, 310) coupled to the spray unit (200, 300), in the spray nozzles (210, 310) It is preferable that the rotational speed can be controlled according to the injection pressure of the liquid injection material to be injected.

On the other hand, in the case of fastening the cylindrical mold 100 to the cylindrical mold fastening portion 400, the upper side of the cylindrical mold fastening portion 400 is opened to the lower surface of the cylindrical mold 100 of the cylindrical mold fastening portion 400 After positioning on the lower side, the upper side is preferably coupled to the upper surface of the cylindrical mold 100, but is not limited thereto.

Although the present invention has been shown and described with reference to the preferred embodiments as described above, it is not limited to the above embodiments and those skilled in the art without departing from the spirit of the present invention. Various changes and modifications will be possible.

As mentioned above, in the best mode for carrying out the invention, related matters have been described.

The present invention can be applied to various industrial fields such as semiconductors and displays.

Claims

In the spray device for use in any one or more of a photosensitive agent coating process, protective film coating process or cleaning process in the working process of the cylindrical mold for producing a fine pattern for printed electronics,

A spraying part spaced apart from the outer circumferential surface of the cylindrical mold vertically installed by one or more to receive a liquid injection material; And

One or more spray nozzle portions coupled to the spray portion for applying the liquid spray material toward the outer circumferential surface of the cylindrical mold

Spray device for coating a cylindrical mold surface comprising a.
The method of claim 1,

And at least one supply pump part for supplying the liquid spray material at a constant pressure to the spray part, wherein the supply pump part is coupled to the spray part.
The method of claim 1,

Spraying apparatus for coating the surface of the cylindrical mold, characterized in that further comprising a temperature control unit for controlling the temperature of the liquid spray material is injected from the spray nozzle unit coupled to the spray unit.
The method of claim 1,

Spraying the cylindrical mold surface in the vertical direction, and further comprising a cylindrical mold fastening portion for rotating the center of the cylindrical mold in the spray device for coating a cylindrical mold surface.
The method of claim 1,

The spray unit is a spray device for coating a cylindrical mold surface, characterized in that formed in the form of a circular rim (bar) configured to surround the outer peripheral surface of the cylindrical mold or a straight bar (bar) configured in the longitudinal direction of the cylindrical mold.
The method of claim 5,

The spraying portion of the circular rim form to move up and down in the vertical direction of the cylindrical mold in order to apply the liquid injection material to the cylindrical mold, the vertical movement is characterized in that performed by the moving unit provided in the spray unit Spray device for coating cylindrical mold surfaces.
The method of claim 5,

The spraying unit in the form of a straight bar moves horizontally in the horizontal direction of the cylindrical mold to apply the liquid spray material to the cylindrical mold, and the horizontal movement is performed by a moving unit provided in the spray unit. Spray device for coating cylindrical mold surfaces.
The method of claim 3, wherein

The temperature control unit is composed of any one of a heating coil or a surface heating element, the temperature control unit is sprayed for coating the surface of the cylindrical mold, characterized in that provided in or inside the spray portion, or the spray portion is formed of the surface heating element Device.
The method of claim 4, wherein

The cylindrical mold fastening portion is provided with a servo motor, the spray apparatus for coating the surface of the cylindrical mold, characterized in that for rotating the cylindrical mold using the servomotor.