WO2013129755A1 - Dispositif d'inspection spectroscopique - Google Patents

Dispositif d'inspection spectroscopique Download PDF

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Publication number
WO2013129755A1
WO2013129755A1 PCT/KR2012/009121 KR2012009121W WO2013129755A1 WO 2013129755 A1 WO2013129755 A1 WO 2013129755A1 KR 2012009121 W KR2012009121 W KR 2012009121W WO 2013129755 A1 WO2013129755 A1 WO 2013129755A1
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WO
WIPO (PCT)
Prior art keywords
optical fiber
light
inspection device
sample
spectroscopic inspection
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PCT/KR2012/009121
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English (en)
Inventor
Kang Hyuk Kwon
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Samsung Techwin Co.,Ltd.
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Publication of WO2013129755A1 publication Critical patent/WO2013129755A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type

Definitions

  • the present invention relates to a spectroscopic inspection device, and more particularly to a spectroscopic inspection device which can quickly inspect a large-area sample.
  • a Raman spectroscope is a device which measures a phenomenon that an oscillation frequency of photons is changed that is reemitted due to interaction between the photons of incident light and a sample to be measured when a monochromatic light is incident to the sample.
  • the Raman spectroscope is used in association with a microscope, and this is called a Raman micro-spectroscope or a confocal Raman spectroscope.
  • the Raman spectroscope makes light incident to a local area to be measured using an object lens of a microscope and performs spectroscopic analysis with respect to the light that is reemitted due to the interaction. If monochromatic light is incident to the sample that is the subject of measurement, the incident light rays cause the generation of light that is excited by the physical characteristics or chemical characteristics of the sample. In this case, if the light that is the same as the incident light is excited, it is called Rayleigh scattering, and if the light rays having decreased energy in comparison to the incident light are excited, that is, if the light rays having a longer wavelength than the incident light are excited, it is called Stokes scattering.
  • the Raman spectroscopy means spectroscopic analysis with respect to the anti-Stokes scattering.
  • the Raman spectroscope in the related art irradiates the local area of a sample through the object lens of the microscope with the light rays emitted from a light source, and the light incident to the local area causes light that is different from the incident light to be reemitted due to the interaction.
  • the reemitted light passes through the object lens of the microscope and forms a focus at a pinhole that is put in front of the spectroscope.
  • the light of the focus area formed by the object lens of the microscope passes, but the light in other areas except for the focus area is intercepted.
  • the spectroscope separates only the light having a predetermined wavelength from the light rays that reach the spectroscope using a grating and a wavelength measurement range that can be measured by the spectroscope is 50 cm-1 to 4000 cm-1.
  • a Raman signal Due to the interaction between the light rays incident to the sample and the sample, a Raman signal is mixed with and exists in the light rays reemitted from the sample. Since the Raman signal is a very weak signal, it is greatly influenced by noise that occurs due to neighboring light rays and fluorescent light rays generated from the sample. In order to reduce the influence of such noise, several gratings may be used, but in this case, inspection time is increased.
  • the area of the light rays that are condensed by the Raman spectroscope in the related art is 1 ?m2
  • the inspection is possible only with respect to a very small area, and thus in the case of scanning a wide area, a lot of time is required.
  • the present invention has been made to solve the above-mentioned problems occurring in the related art, and a subject to be achieved by the present invention is to provide a spectroscopic inspection device which can quickly perform a Raman spectroscopic analysis with respect to a large-area sample by shortening the measurement time through solving of the problems caused by the local measurement area.
  • Another subject to be achieved by the present invention is to provide a spectroscopic inspection device which can quickly perform a Raman spectroscopic measurement while maintaining high resolution.
  • a spectroscopic inspection device which includes a light source generating light; a first optical fiber guiding an incident light incident from the light source; a coupler connected to one end portion of the first optical fiber to branch off a path of the light; a second optical fiber connected to the coupler to guide the incident light to a sample and to guide an emission light emitted from the sample; a first lens positioned between an end portion of the second optical fiber and the sample to form focuses of the incident light and the emission light; a third optical fiber connected to the coupler to guide the emission light; a detector positioned at an end portion of the third optical fiber to receive the emission light and to generate analysis data; and a second lens arranged between the end portion of the third optical fiber and the detector to form the focus of the emission light.
  • the Raman spectroscopic measurement can be quickly performed with respect to a large-area sample with high resolution.
  • FIG. 1 is a diagram illustrating the structure of a spectroscopic inspection device according to an embodiment of the present invention
  • FIG. 2 is a diagram illustrating the structure of a first optical fiber that constitutes a spectroscopic inspection device according to another embodiment of the present invention
  • FIG. 3 is a diagram illustrating the structure of a second optical fiber and a first lens of the spectroscopic inspection device of FIG. 2;
  • FIG. 4 is a diagram illustrating the structure of a third optical fiber and a second lens of the spectroscopic inspection device of FIG. 2;
  • FIG. 5 is a diagram illustrating the structure of a first optical fiber that constitutes a spectroscopic inspection device according to still another embodiment of the present invention.
  • FIG. 6 is a diagram illustrating the structure of a second optical fiber and a first lens of the spectroscopic inspection device of FIG. 5;
  • FIG. 7 is a diagram illustrating the structure of a third optical fiber and a second lens of the spectroscopic inspection device of FIG. 5;
  • FIG. 8 is a diagram illustrating the structure of a spectroscopic inspection device according to still another embodiment of the present invention.
  • FIG. 9 is a diagram illustrating the structure of a spectroscopic inspection device according to still another embodiment of the present invention.
  • FIG. 1 is a diagram illustrating the structure of a spectroscopic inspection device according to an embodiment of the present invention.
  • a spectroscopic inspection device includes a light source 110 generating light, a first optical fiber 120 guiding an incident light that is incident from the light source 110, a coupler 130 connected to one end portion of the first optical fiber 120 to branch off a path of the light, a second optical fiber 140 connected to the coupler 130 to guide the incident light to a sample 200 and to guide an emission light emitted from the sample 200; a first lens 150 positioned between an end portion of the second optical fiber 140 and the sample 200 to form focuses of the incident light and the emission light; a third optical fiber 160 connected to the coupler 130 to guide the emission light and including a grating 170 that intercepts a selective wavelength, a detector 190 positioned at an end portion of the third optical fiber 160 to receive the emission light and to generate analysis data, and a second lens 180 arranged between the end portion of the third optical fiber 160 and the detector 190 to form the focus of the emission light.
  • the light source emits a specified light and makes the emitted light incident to the first optical fiber 120.
  • the light source 110 may be a laser light source, but is not limited thereto. It is sufficient if the light source 110 can generate light having a predetermined intensity for detecting a Raman signal from the sample 200.
  • the first optical fiber 120 receives the light generated from the light source 110 and guides the received light to the coupler 130.
  • the spectroscopic inspection device guides the light using optical fibers.
  • the first optical fiber 120 may have the same configuration as a general optical fiber. That is, the first optical fiber 120 can guide the light from one end to the other end of the optical fiber by totally reflecting the light through a core and a cladding having different densities. Since the optical fiber intercepts neighboring light in other areas except for the light incident to the open end portion thereof, the occurrence of noise due to stray light detected by the detector 190 can be suppressed.
  • the first optical fiber 120 has a specified flexibility, and even if the positions of the light source 110 and the sample 200 are changed, it is not necessary to move a stage that supports the sample 200, but it is possible to make the light from the light source 110 reach the sample 200 through controlling of the position and the curvature of the first optical fiber.
  • the coupler 130 serves to distribute the incident light depending on the number of channels.
  • the light incident along the first optical fiber 120 may be guided to the second optical fiber 140 through the coupler 130, and as described later, the emission light incident to the second optical fiber 140 may be guided to eth third optical fiber 160 through the coupler 130.
  • the number of optical fibers connected to the coupler 130 may be changed depending on the kind of the coupler 130, and a part of the emission light that is guided from the second optical fiber 140 to the third optical fiber 160 may be incident to the first optical fiber 120.
  • the second optical fiber 140 may have the same configuration as the first optical fiber 120, and serves to supply the light generated from the light source 110 to the sample 200 and to guide the light generated from the sample 200 in the direction of the coupler 130 as well.
  • the second optical fiber 140 which is formed in a position that corresponds to the target sample 200 to be analyzed by a Raman spectroscopic method, may have a specified flexibility, and due to this, even if the sample 200 has a large area, it is possible to adjust the position and the angle of the second optical fiber 140 without the necessity of moving the stage that supports the sample 200 in order to measure the Raman signal over the whole area of the sample 200.
  • the first lens 150 may be provided between the sample 200 and the second optical fiber 140.
  • the first lens 150 may control the light emitted from the open end of the second optical fiber 140 to be directed toward a specified area of the sample 200.
  • the first lens 150 may be a convex lens for condensing the light onto the specified area, but is not limited thereto.
  • the first lens 150 may make the light emitted from the second optical fiber 140 incident to the sample 200 and may make the emission light generated from the sample 200 incident to the second optical fiber 140 as well.
  • Raman scattering which is reemitted depending on the wavelength of the light that is incident to the sample 200 through the second optical fiber 140 and the first lens 150 is expressed by equation (1) as follows.
  • ⁇ w denotes a Raman shift that is indicated by wavenumber
  • ⁇ 0 denotes a wavelength of light incident to the sample 200
  • ⁇ 1 denotes a Raman spectrum wavelength
  • the Raman peak with respect to the graphene may be 1580 cm-1 with respect to G peak, 2700 cm-1 with respect to 2D peak, and 1340 cm-1 with respect to D peak.
  • the G peak has a Raman spectrum wavelength of about 580 nm
  • the 2D peak has a Raman spectrum wavelength of about 621 nm
  • the D peak has a Raman spectrum wavelength of about 572 nm.
  • a filter that passes only the light of a desired Raman spectrum wavelength band can be configured by adjusting the effective refraction index of the grating 170 and the interval of the grating 170 through a core of the third optical fiber 160.
  • the third optical fiber 160 may have the same configuration as the first and/or second optical fibers 120 and 140, and serve to guide the emission light emitted from the sample 200 to the detector 190. On end of the third optical fiber 160 may be connected to the coupler 130 and the other end thereof may be open in the direction of the detector 190.
  • the grating 170 is formed on one portion or an end portion of the third optical fiber 160.
  • the grating 170 intercepts a selective wavelength, and may be inserted into the inside of the third optical fiber 160, but is not limited thereto.
  • the grating 170 may be connected to one end or the other end of the third optical fiber 160 that is connected to the detector 190.
  • the grating 170 may be a Bragg grating.
  • the grating 170 may be configured so as to regularly change the refraction index of a single optical fiber core.
  • the wavelength of the light that is reflected from the grating 170 may be a Bragg wavelength, and may be determined by equation (2) as follows.
  • ⁇ B denotes a Bragg wavelength of the reflected light
  • n ⁇ denotes an effective refraction index of the grating 170 in the core of the third optical fiber 160
  • ⁇ denotes a grating interval.
  • Equation (3) the Bragg wavelength bandwidth is given by Equation (3) as follows.
  • ⁇ n 0 denotes a difference between the refraction indexes of the cladding and the core of the third optical fiber 160
  • ⁇ denotes a power fraction of the core of the third optical fiber 160
  • the grating 170 transmits only a specified wavelength
  • an image that is composed of only a desired Raman signal can be acquired with respect to the specified sample 200.
  • the bonding and the characteristics of the sample 200 can be analyzed.
  • the third optical fiber 160 selectively transmits only the light having a desired wavelength among the light of all wavelengths incident through the grating 170 and guides the selected light to the detector 190. Accordingly, even a signal having a weak intensity can be easily detected, the light that has passed through the grating 170 is focused on a CCD pixel included in the detector 190 in a one-to-one manner through the second lens 180, and the strength and weakness of the signal can be detected.
  • the second lens 180 may be positioned between the open end of the third optical fiber 160 and the detector 190, and may form the focus of the light having the Raman spectrum wavelength, which has passed through the third optical fiber 160.
  • the detector 190 receives the light having the Raman spectrum wavelength that has passed through the third optical fiber 160 and generates image data with respect to the surface state of the sample 200 based on the received light.
  • the detector 190 may include a charge coupled device (CCD).
  • CCD charge coupled device
  • the spectroscopic inspection device by guiding the light using the optical fiber, an external light can be intercepted without being mixed, and thus the Raman spectrum wavelength analysis with high reliability can be performed.
  • FIG. 2 is a diagram illustrating the structure of a first optical fiber that constitutes a spectroscopic inspection device according to another embodiment of the present invention.
  • FIG. 3 is a diagram illustrating the structure of a second optical fiber and a first lens of the spectroscopic inspection device of FIG. 2
  • FIG. 4 is a diagram illustrating the structure of a third optical fiber and a second lens of the spectroscopic inspection device of FIG. 2.
  • the spectroscopic inspection device according to this embodiment may have substantially the same configuration as the spectroscopic inspection device according to the previous embodiment.
  • the spectroscopic inspection device according to this embodiment is provided with a plurality of the first, second, and third optical fibers 120, 140, and 160 of which the numbers are the same.
  • respective unit optical fibers may be arranged in the form of a line along a predetermined row.
  • the first optical fiber 120 is composed of n (n is a natural number) unit optical fibers 120_n.
  • the respective unit optical fibers 120_n independently guide and move the light rays to a desired position, that is, to the side of the coupler 130.
  • a plurality of light sources 120, which make the light incident to the first optical fiber 120, may be provided depending on the number of unit optical fibers 120_n to make the light incident to the unit optical fibers 120_n, respectively.
  • the configuration of the unit optical fibers 120_n is not limited thereto.
  • the second optical fiber 140 is composed of n unit optical fibers 140_n.
  • the first lens 150 that is arranged between the second optical fiber 140 and the sample 200 may be configured to include a plurality of micro lenses, and the plurality of micro lenses may be arranged to correspond to the n unit optical fibers 140_n that constitute the second optical fiber 140 in a one-to-one manner.
  • the unit optical fiber 140 can scan the range of about 1 ?m2 on the surface of the sample 200, and by controlling the number of unit optical fibers that are connected in the form of a line, for example, by providing 10 or more unit optical fibers and 10 or more micro lenses that correspond to the unit optical fibers, line scanning can be quickly performed with respect to a wide range that is equal to or larger than 10 ?m.
  • the third optical fiber 160 is composed of n unit optical fibers 160_n.
  • the second lens 180 that is arranged between the third optical fiber 160 and the detector 190 may be configured to include a plurality of micro lenses, and the plurality of micro lenses may be arranged to correspond to the n unit optical fibers 160_n that constitute the third optical fiber 160 in a one-to-one manner.
  • the Bragg grating 170 may be formed in each of the unit optical fibers 160_n, and only the light having a desired wavelength can be transmitted by controlling the interval of the gratings or the like.
  • the light is guided using the plurality of unit optical fibers, and micro lenses of which the number corresponds to the number of unit optical fibers are provided in the form of a line at the end portions of the respective unit optical fibers. Accordingly, the light can be irradiated onto the wide range of the sample, and thus the scanning speed can be improved.
  • FIG. 5 is a diagram illustrating the structure of a first optical fiber that constitutes a spectroscopic inspection device according to still another embodiment of the present invention.
  • FIG. 6 is a diagram illustrating the structure of a second optical fiber and a first lens of the spectroscopic inspection device of FIG. 5
  • FIG. 7 is a diagram illustrating the structure of a third optical fiber and a second lens of the spectroscopic inspection device of FIG. 5.
  • the spectroscopic inspection device according to this embodiment may have substantially the same configuration as the spectroscopic inspection device according to the previous embodiment.
  • the spectroscopic inspection device according to this embodiment is provided with a plurality of the first, second, and third optical fibers 120, 140, and 160 of which the numbers are the same.
  • respective unit optical fibers may be arranged in the form of an array that forms an optical fiber bundle.
  • the first optical fiber 120 is composed of n (n is a natural number) unit optical fibers 120_n.
  • the respective unit optical fibers 120_n independently guide and move the light rays to a desired position, that is, to the side of the coupler 130.
  • a plurality of light sources 120, which make the light incident to the first optical fiber 120, may be provided depending on the number of unit optical fibers 120_n to make the light incident to the unit optical fibers 120_n, respectively.
  • the configuration of the unit optical fibers 120_n is not limited thereto.
  • the second optical fiber 140 is an optical fiber bundle that is composed of n unit optical fibers 140_n.
  • the first lens 150 which is arranged between the second optical fiber 140 and the sample 200, may be configured as a lens array that is composed of a plurality of lenses, but is not limited thereto.
  • the first lens 150 covers the whole optical fiber bundle, and guides the light emitted from the respective optical fibers to make the guided light incident to the sample 200.
  • the first lens forms the focus of the light emitted from the whole optical fiber bundle in a manner that the light is not incident to the sample 200 in the form of one point light source, but is irradiated onto the whole specified area of the sample 200.
  • the radius of irradiation of the incident light on the sample 200 may be set to equal to or larger than 5 ?m, and such a set value may differ depending on the number of unit optical fibers that constitute the optical fiber bundle.
  • the third optical fiber 160 is an optical fiber bundle that is composed of n unit optical fibers.
  • the Bragg grating 170 is formed in each of the unit optical fibers, and the second lens 180 provide in the front is a lens array that is composed of a plurality of lenses.
  • the light is irradiated onto the specified area of the sample using the plurality of unit optical fibers that constitute a optical fiber bundle, and thus the Raman spectrum wavelength can be obtained with respect to the large-area sample at the same time.
  • FIG. 8 is a diagram illustrating the structure of a spectroscopic inspection device according to still another embodiment of the present invention
  • FIG. 9 is a diagram illustrating the structure of a spectroscopic inspection device according to still another embodiment of the present invention.
  • a third lens 115 is arranged between a light source 110 and a first optical fiber 120 to condense the light so that the light emitted from the light source 110 is incident to the first optical fiber 120.
  • the third lens 115 may be a plurality of lens arrays or a plurality of micro lenses depending on the arrangement shape of the first optical fiber 120.
  • the spectroscopic inspection device may include a light source 1110, n first optical fibers 1120_n, second optical fibers 1140_n, third optical fibers 1160_n, and n detectors 1190_n.
  • the light emitted from the light source is incident to different optical fibers to be independently guided, and by controlling Bragg gratings included in the third light fibers, light having different wavelengths can be received.
  • the Bragg gratings may be controlled so that the first detector can detect the D peak, the second detector can detect the 2D peak, and the third detector can detect the G peak.

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Abstract

La présente invention concerne un dispositif d'inspection faisant appel à la spectroscopie Raman, le dispositif comprenant une source de lumière générant une lumière, une première fibre optique guidant une lumière incidente provenant de la source de lumière, un coupleur fixé à une partie terminale de la première fibre optique pour dévier un trajet de la lumière, une deuxième fibre optique fixée au coupleur pour guider la lumière incidente vers un échantillon et pour guider une lumière d'émission émise par l'échantillon, une première lentille positionnée entre une partie terminale de la deuxième fibre optique et l'échantillon pour former des foyers de la lumière incidente et de la lumière d'émission, une troisième fibre optique fixée au coupleur pour guider la lumière d'émission, et un détecteur positionné à une partie terminale de la troisième fibre optique pour recevoir la lumière d'émission et pour générer des données d'analyse.
PCT/KR2012/009121 2012-02-29 2012-11-01 Dispositif d'inspection spectroscopique WO2013129755A1 (fr)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103811568A (zh) * 2014-02-21 2014-05-21 中国科学院半导体研究所 一种基于一维光栅的表面入射石墨烯光电探测器
EP3203215A1 (fr) * 2016-02-08 2017-08-09 Leibniz-Institut für Astrophysik Potsdam (AIP) Optique spectroscopie d'imagerie d'échantillons à grande surface
US10060794B2 (en) 2015-06-24 2018-08-28 Samsung Electronics Co., Ltd. Spectrometer and apparatus for monitoring light-shielded state
CN114152547A (zh) * 2021-12-01 2022-03-08 中国科学院光电技术研究所 基于拉曼光谱的颗粒检测分析系统及方法
CN116009142A (zh) * 2022-11-30 2023-04-25 南京春辉科技实业有限公司 一种医用pcr光纤束及多路荧光定量pcr检测仪

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US4784450A (en) * 1984-10-15 1988-11-15 Hughes Aircraft Company Apparatus for generating and amplifying new wavelengths of optical radiation
US20070002435A1 (en) * 2003-05-29 2007-01-04 The Regents Of The University Of Michigan Double-clad fiber scanning microscope
US20070133626A1 (en) * 2005-12-12 2007-06-14 Electronics And Telecommunications Research Institute Mid-infrared raman fiber laser system
US20080049232A1 (en) * 2006-08-25 2008-02-28 The General Hospital Coporation Apparatus and methods for enhancing optical coherence tomography imaging using volumetric filtering techniques
US20090021724A1 (en) * 2007-07-20 2009-01-22 Vanderbilt University Combined raman spectroscopy-optical coherence tomography (rs-oct) system and applications of the same

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4784450A (en) * 1984-10-15 1988-11-15 Hughes Aircraft Company Apparatus for generating and amplifying new wavelengths of optical radiation
US20070002435A1 (en) * 2003-05-29 2007-01-04 The Regents Of The University Of Michigan Double-clad fiber scanning microscope
US20070133626A1 (en) * 2005-12-12 2007-06-14 Electronics And Telecommunications Research Institute Mid-infrared raman fiber laser system
US20080049232A1 (en) * 2006-08-25 2008-02-28 The General Hospital Coporation Apparatus and methods for enhancing optical coherence tomography imaging using volumetric filtering techniques
US20090021724A1 (en) * 2007-07-20 2009-01-22 Vanderbilt University Combined raman spectroscopy-optical coherence tomography (rs-oct) system and applications of the same

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103811568A (zh) * 2014-02-21 2014-05-21 中国科学院半导体研究所 一种基于一维光栅的表面入射石墨烯光电探测器
CN103811568B (zh) * 2014-02-21 2016-04-20 中国科学院半导体研究所 一种基于一维光栅的表面入射石墨烯光电探测器
US10060794B2 (en) 2015-06-24 2018-08-28 Samsung Electronics Co., Ltd. Spectrometer and apparatus for monitoring light-shielded state
EP3203215A1 (fr) * 2016-02-08 2017-08-09 Leibniz-Institut für Astrophysik Potsdam (AIP) Optique spectroscopie d'imagerie d'échantillons à grande surface
CN114152547A (zh) * 2021-12-01 2022-03-08 中国科学院光电技术研究所 基于拉曼光谱的颗粒检测分析系统及方法
WO2023097815A1 (fr) * 2021-12-01 2023-06-08 中国科学院光电技术研究所 Système et procédé de détection et d'analyse de particules fondées sur le spectre raman
CN116009142A (zh) * 2022-11-30 2023-04-25 南京春辉科技实业有限公司 一种医用pcr光纤束及多路荧光定量pcr检测仪

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