WO2013105574A1

WO2013105574A1 - Microchannel device and method for manufacturing same

Info

Publication number: WO2013105574A1
Application number: PCT/JP2013/050194
Authority: WO
Inventors: 崇史笠原; 水野　潤; 庄子　習一; 知彦江面; 松波　成行; 安達　千波矢
Original assignee: 国立大学法人九州大学; 東京エレクトロン株式会社
Priority date: 2012-01-13
Filing date: 2013-01-09
Publication date: 2013-07-18
Also published as: TW201348121A; JPWO2013105574A1

Abstract

Proposed are a microchannel device (2) capable of maintaining desired characteristics in a channel space (14) and preventing a failure due to joining of a channel groove (23) in a first substrate (7) and a second substrate (8), and a method for manufacturing the same. Since a first self-assembled monomolecular film (21a) is not formed in the channel groove in the microchannel device, the characteristics of the materials themselves of first electrodes (11a, 11b, 11c) and a channel formation layer (12) can be maintained in the channel space without change in characteristics such as wettability, surface free energy, and a surface functional group in the channel groove, and joining with the second substrate can be reliably performed by only a joint surface (20a) except the channel groove, thereby making it possible to prevent the failure due to joining of the channel groove in the first substrate and the second substrate.

Description

Microchannel device and manufacturing method thereof

The present invention relates to a microchannel device and a method for manufacturing the microchannel device, and is suitable for application to, for example, a microchannel device having a hollow channel space between a first substrate and a second substrate.

Recently, research on MEMS (Micro Electro Mechanical Systems) that produces micro devices with mechanical and electrical functions using semiconductor microfabrication technology has attracted attention. As an application of such MEMS technology, flow structures, pumps, valves, mixers, and other microstructures are integrated on several centimeter square substrates, and fluids are sent and mixed to analyze fluids. ΜTAS (Micro Total Analysis Systems) is known. Furthermore, in recent years, an electrode-embedded microchannel device in which an electrode is provided in the channel space is also being considered for higher functionality of the device, and a method for manufacturing this type of electrode-embedded microchannel device Research is also underway. Here, as a conventional method of manufacturing a microchannel device, for example, a microchannel device is manufactured by joining a concave substrate formed with a concave groove to be a channel or a chamber and a flat cover substrate. Manufacturing methods are known.

As a method for joining such a concave substrate as the first substrate and a cover substrate as the second substrate, for example, the concave substrate and the cover substrate are irradiated with vacuum plasma or vacuum ultraviolet rays by an excimer UV lamp, A manufacturing method is known in which oxygen-containing groups are introduced into each bonding surface of the concave substrate and the cover substrate, and the bonding surfaces are bonded and thermocompression bonded together to react and bond oxygen-containing groups (for example, Patent Document 1 and Non-Patent Document 1). Note that the bonding method by introducing the oxygen-containing group is not limited to the above-described method, and for example, UV ozone treatment using a low-pressure mercury lamp, atmospheric pressure plasma treatment, or the like may be used. Furthermore, as another bonding method, as shown in Non-Patent Document 2, a self-assembled monomolecular film (SAM film) is formed on a concave substrate and a cover substrate, and terminal functional groups of the self-assembled monomolecular film are bonded to each other. A bonding method is also known in which the concave substrate and the cover substrate are bonded by chemical reaction.

JP 2010-82540 A

However, in the former joining method by introducing an oxygen-containing group and the latter joining method using a self-assembled monolayer, not only on the joint surface of the concave substrate and the cover substrate, but also on the surface of the channel groove serving as the channel space. Since the surface modification is performed until the surface of the channel groove has wettability and functional groups different from the material of the concave substrate and the cover substrate itself, it is necessary to adjust the characteristics in the channel space again. There was a problem that sometimes.

Further, in such a microchannel device, since it has a fine structure, particularly in the case of a channel groove having a low aspect ratio, when the concave substrate and the cover substrate are brought into close contact with each other and applied with a load, the concave substrate is caused by this load. The cover substrate is deformed and a part of the flow channel groove comes into contact with the cover substrate. As a result, the surface functional groups of the flow channel groove and the cover substrate react with each other. There is a possibility that a defect such as a failure of being bonded to each other and a defect that a desired flow path space cannot be formed may occur. Furthermore, in the above-described electrode-embedded microchannel device, for example, the use of a self-assembled monolayer may affect the characteristics of the work function of the electrode surface. May also occur.

Therefore, the present invention has been made in consideration of the above points, and can maintain the desired characteristics of the flow path space, and can prevent a defect caused by joining the flow path groove of the first substrate and the second substrate. It aims at proposing a channel device and its manufacturing method.

In order to solve this problem, claim 1 of the present invention has a flow channel groove serving as a flow channel space on the joint surface, and the first self-organizing unit is selectively formed only on the joint surface excluding the flow channel groove. A first substrate on which a molecular film is formed; and a second substrate on which a second self-assembled monomolecular film is formed on a bonding facing surface facing the bonding surface of the first substrate, the first self-organization The first functional group of the first monolayer and the second functional group of the second self-assembled monolayer are bonded to each other, and the first substrate and the second substrate are joined together. A microchannel device characterized in that a hollow channel space is formed therebetween.

According to a sixth aspect of the present invention, a dummy member forming step of forming a dummy member in the flow channel groove provided on the bonding surface of the first substrate and protecting the flow channel groove with the dummy member; and the bonding of the first substrate Forming a first self-assembled monolayer on the surface and the dummy member; and removing the dummy member and selectively forming the first self-assembled surface only on the joint surface excluding the flow channel A selection step of forming a monomolecular film; a second self-assembled monomolecular film formed on the bonding facing surface of the second substrate; and the first self-organization formed only on the bonding surface of the first substrate. A terminal functional group with a monomolecular film is bonded, the first substrate and the second substrate are joined, and a hollow channel space is formed between the first substrate and the second substrate by the channel groove. A microchannel device comprising a bonding step It is a method of manufacture.

According to claims 1 and 6 of the present invention, since the first self-assembled monolayer is not formed in the flow channel, the wettability in the flow channel, surface free energy, surface functional groups, etc. The characteristics of the material of the channel groove itself can be maintained in the channel space without changing the characteristics, and the second substrate can be reliably bonded only by the bonding surface excluding the channel groove. In addition, it is possible to realize a micro-channel device that can prevent defects due to the bonding between the channel groove of the first substrate and the second substrate.

It is the schematic which shows the whole structure of a light-emitting device. It is the schematic where it uses for description of the light emission principle. It is a disassembled perspective view which shows the detailed structure of a microchannel device. It is sectional drawing which shows the side cross-section structure of a microchannel device. It is the schematic where it uses for description of the manufacturing method of a 1st board | substrate. It is the schematic where it uses for description of the manufacturing method of a 1st board | substrate. It is the schematic where it uses for description of the manufacturing method of a 1st board | substrate. It is the schematic where it uses for description of the manufacturing method of a 2nd board | substrate. It is the schematic where it uses for description of the film-forming method of a 1st self-assembled monolayer and a 2nd self-assembled monolayer. It is sectional drawing which shows the side cross-section structure of a 1st board | substrate and a 2nd board | substrate. It is a chemical formula which shows the coupling | bonding of a 1st self-assembled monolayer and a 2nd self-assembled monolayer. It is the photograph by the ultrasonic microscope which shows the mode of the channel space of a microchannel device. It is the schematic which shows the whole structure of a verification apparatus. It is a disassembled perspective view which shows the detailed structure of a fixing device. It is a photograph which shows the mode of light emission when a liquid semiconductor, a rubrene solution, a DBP-rubrene solution, and a DPA solution are used as a luminescent liquid. It is the schematic which shows the whole structure of the light-emitting device by other embodiment.

2 Micro-channel device 7 First substrate 8

Second substrate

11a, 11b, 11c First electrode 14

Channel space

18a, 18b, 18c Second electrode 20a Bonding surface 20b Bonding facing surface 21a First self-assembled monolayer 21b Second self-assembled monolayer 23 Channel groove 23a Dummy member L Luminescent liquid

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

(1) Configuration of Light-Emitting Device and Micro-Channel Device In FIG. 1, 1 indicates a light-emitting device using the micro-channel device 2 of the present invention, and this light-emitting device 1 is connected to the micro-channel device 2 via wiring 4 The power supply 5 is connected. Here, in the light emitting device 1, a plurality of

first electrodes

11a, 11b, 11c and a plurality of

second electrodes

18a, 18b, 18c are provided in the microchannel device 2, and these

first electrodes

11a, 11b, 11c and the

second electrodes

18a, 18b, and 18c are individually provided with power via wiring. In FIG. 1, for convenience of explanation, a common power supply 5 is connected to only one first electrode 11b and second electrode 18b via wiring 4, and the other

first electrodes

11a, 11c and second electrodes are connected. The power supply connected to 18a and 18c is omitted.

Here, in the case of this embodiment, the entire microchannel device 2 is formed in a flat shape, and a channel space 14 is formed therein. The width of the channel space 14 is selected to be about 10 to 2000 [μm], the depth is about 10 to 200 [mm], and the thickness (distance between electrodes) is about 1 to 100 [μm]. Has been. In this microchannel device 2, a first substrate 7 provided with a plurality of

first electrodes

11a, 11b, 11c and a second substrate 8 provided with a plurality of

second electrodes

18a, 18b, 18c are joined. A hollow channel space 14 is formed between the first substrate 7 and the second substrate 8. Here, in the microchannel device 2, the first substrate 7 has a configuration in which the channel forming layer 12 is provided on the support substrate 10, and the channel space 14 is formed in the channel forming layer 12. A flow path space 14 is surrounded by the support substrate 10, the flow path forming layer 12, and the second substrate 8.

In the case of this embodiment, the microchannel device 2 is formed with a plurality of (in this case, three) channel spaces 14 having the same configuration, and a luminescent liquid is respectively contained in each channel space 14. It is configured to flow. In this case, in the microchannel device 2, a plurality of channel spaces 14 formed in a straight line are arranged so that the longitudinal directions thereof are parallel to each other.

Each flow path space 14 has an inlet 2a formed at one end and an outlet 2b formed at the other end. For example, tube members (not shown) are provided at the inlet 2a and the outlet 2b, respectively. Can be connected. When the luminescent liquid is supplied to the channel space 14 from the inlet 2a at one end by the upstream tube member, the microchannel device 2 passes through the channel space 14 and flows at the other end. The luminescent liquid flows out from the outlet 2b to the tube member on the downstream side, and different luminescent liquids can flow into the respective flow path spaces 14. Incidentally, the luminescent liquid mentioned above refers to a form in which a luminescent compound is added to various solvents, liquid semiconductors, ionic liquids, or a mixed solution thereof.

Here, the light emitting compound is preferably a light emitter of an organic compound. For example, a fluorescein compound, a stilbene compound, a coumarin compound, a rhodamine compound, an oxazine compound, a DOTC (diethyloxatricarbocyanine iodide) compound, HITC ( Laser dyes such as hexamethylindotricarbocyanine iodide), perylene, pycene, pentaphen, pentacene, tetraphenylene, hexaphene, rubicene, coronene, trinaphthylene, heptaphene, heptacene, pyranthrene, ovalene, 1,4,5,8- Tetraphenylnaphthalene, 9,10-diphenylanthracene, bianthranyl (eg 9,9'-bianthranyl), 9,10-dinaphthylanthracene, rubrene, dibenzo {[f, f ']-4,4', 7, 7'-tetraphenyl} diindeno [1,2,3-cd: 1 ', 2 ', 3'-lm] perylene, 1,3,6,8-tetraphenylpyrene, bipyrenyl, o-phenylenepyrene, ansanthrene, 3,3'-bifluoroanthenyl, and other fluorescent dyes such as tris (2- Centers such as phenylpyridinato) iridium (III) and other complexes having iridium (Ir) as the central metal, ruthenium (II) trisbipyridyl (PF ^6- ) ₂ , and ruthenium (II) trisbipyridyl (TFSI ⁻ ) ₂ And a complex having ruthenium (Ru) as a metal.

The various solvents used are water, methanol, ethanol, 1-propanol, 2-propanol, tetrahydrofuran, 1,4-dioxane, acetone, 4-methyl-2-pentanone, acetylacetone, acetonitrile, propionitrile, ethylenediamine, pyridine. , Formamide, N-methylpyrrolidone, dimethyl sulfoxide, sulfolane, nitromethane, nitrobenzene, 1,2-dichlorobenzene, chloroform, methylene chloride, dichloromethane, 1,2-dichloroethane, propylene carbonate, ethylene carbonate, acetic acid, acetic anhydride, toluene, Examples include xylene, mesitylene, tetralin, decalin, n-butylbenzene, and benzonitrile.

A liquid semiconductor refers to a state of a liquid organic semiconductor, for example, aromatic hydrocarbons such as a benzene derivative, a naphthalene derivative, an anthracene derivative, a carbazole derivative, and a typical one is 9- (2-ethylhexyl) carbazole (EHCz ) Or PLQ. The ionic liquid is an ionic liquid that is liquid at room temperature (25 ° C.), and a configuration represented by the general formula AB (A is a cation and B is an anion) is a good example.

Examples of the cation represented by A above include the following. N, N, N-trimethylbutylammonium ion, N-ethyl-N, N-dimethylpropylammonium ion, N-ethyl-N, N-dimethylbutylammonium ion, N, N-dimethyl-N-propylbutylammonium ion, N- (2-methoxyethyl) -N, N-dimethylethylammonium ion, 1-ethyl-3-methylimidazolium ion, 1-ethyl-2,3-dimethylimidazolium ion, 1-ethyl-3,4- Dimethylimidazolium ion, 1-ethyl-2,3,4-trimethylimidazolium ion, 1-ethyl-2,3,5-trimethylimidazolium ion, N-methyl-N-propylpyrrolidinium ion, N-butyl- N-methylpyrrolidinium ion, N-sec-butyl-N-methylpyrrole Nium ion, N- (2-methoxyethyl) -N-methylpyrrolidinium ion, N- (2-ethoxyethyl) -N-methylpyrrolidinium ion, N-methyl-N-propylpiperidinium ion, N-butyl- N-methylpiperidinium ion, N-sec-butyl-N-methylpiperidinium ion, N- (2-methoxyethyl) -N-methylpiperidinium ion, and N- (2-ethoxyethyl) -N-methyl Such as piperidinium ions.

N-methyl-N-propylpiperidinium ions are particularly preferred as the cation because of the wide potential window used. On the other hand, examples of the anion represented by B include PF ₆ ⁻ , [PF ₃ (C ₂ F ₅ ) ₃ ] ⁻ , [PF ₃ (CF ₃ ) ₃ ] ⁻ , BF ₄ ⁻ , [BF ₂ (CF _{^{^{3) 2] -, [BF}}} 2 (C 2 F 5) 2] -, [BF 3 (CF 3)] -, [BF 3 (C 2 F 5)] -, (BOB -), [(CF 3 SO ₂ ) ₂ N] ⁻ (TFSI ⁻ ), [(C ₂ F ₅ SO ₂ ) ₂ N] ⁻ (BETI ⁻ ), [(CF ₃ SO ₂ ) (C ₄ F ₉ SO ₂ ) N] ⁻ , [ (CN) ₂ N] ⁻ (DCA ⁻ ), [(CF ₃ SO ₂ ) ₃ C] ⁻ , [(CN) ₃ C] ^{− and the} like can be used. Since the viscosity of the ionic liquid can be lowered, BF ₄ ⁻ , [BF ₃ (CF ₃ )] ⁻ , [BF ₃ (C ₂ F ₅ )] ⁻ , BOB ⁻ , TFSI ⁻ and BETI ⁻ are preferable.

Further, the addition amount of the luminescent substance is preferably 1 to 99% by weight, more preferably 5 to 90% by weight, with respect to various solvents, liquid semiconductors, ionic liquids or mixed solutions thereof.

Here, FIG. 2A is a schematic diagram for explaining the light emission principle when a liquid semiconductor is used as the luminescent liquid L. FIG. In this case, in the light emitting device 1, as shown in FIG. 2A, a voltage is applied to the first electrode 11b and the second electrode 18b by the power source 5, and in this state, the flow path between the first electrode 11b and the second electrode 18b. When the luminescent liquid L flows into the space 14, holes are injected from the first electrode 11b into the luminescent liquid L, and electrons are flown into the luminescent liquid L from the second electrode 18b. The holes and electrons in L recombine with each other, and the excitons generated thereby can emit light when returning to the ground state.

On the other hand, for example, when a luminescent liquid L in which a luminescent compound such as rubrene is dissolved in various solvents is used, light can be emitted on the principle of electrochemiluminescence (ECL). FIG. 2B is a schematic diagram for explaining the light emission principle by the ECL. In this case, in the light emitting device 1, as shown in FIG. 2B, a voltage is applied to the first electrode 11b and the second electrode 18b by the power source 5, and the channel space 14 between the first electrode 11b and the second electrode 18b is applied. When the luminescent liquid L such as rubrene flows, the cation radical R ⁺ generated at the first electrode 11b serving as the anode and the anion radical R ⁻ generated at the second electrode 18b serving as the cathode are contained in the luminescent liquid L. And neutral molecules in the ground state and excited state are generated, and the neutral molecules in the excited state can emit light when returning to the ground state.

In the light emitting device 1, the luminescent liquid L constantly or intermittently flows in the flow path space 14 from the inlet 2a toward the outlet 2b, and the luminescent liquid L deteriorated in the flow path space 14. The new luminescent liquid L continues to be supplied to the flow path space 14 without being stopped, so that the optimum light emission state can be maintained for a long time.

In practice, as shown in FIG. 3, in the microchannel device 2, the second substrate 8 is disposed on the channel forming layer 12 of the first substrate 7, and the support substrate 10 and the channel forming layer 12 are sequentially arranged from the bottom. The second substrate 8 is laminated. Here, the support substrate 10 constituting the first substrate 7 is made of various materials such as glass, polyester (PET (polyethylene terephthalate), PEN (polyethylene naphthalate)), polycarbonate, polyimide resin, acrylic resin member, and the like. The outer shape is formed in a plate shape or a sheet shape in a quadrilateral shape, and one surface on which the flow path forming layer 12 is laminated is formed flat. In the microchannel device 2, the light emitting state of the luminescent liquid L flowing in the channel space 14 is visually recognized from the outside on the first substrate 7 side by forming the support substrate 10 with various transparent materials. Can do.

In addition, a plurality of strip-shaped

first electrodes

11a, 11b, and 11c are arranged on one surface of the support substrate 10 so as to run in parallel with each other in the longitudinal direction. The flow path forming layer 12 can be laminated so that the hole 15 faces the

first electrodes

11a, 11b, and 11c. As a result, the

first electrodes

11a, 11b, and 11c of the support substrate 10 are exposed in the groove forming through holes 15 of the flow path forming layer 12 on the first substrate 7, and the groove forming through holes 15 and the

first electrodes

11a, 11a, A channel groove having a concave cross section can be formed by 11b and 11c. The

first electrodes

11a, 11b, and 11c can be formed of a transparent electrode such as ITO, IZO, or ZnO, a metal such as gold, platinum, silver, magnesium, lithium, or aluminum, or an alloy thereof.

The flow path forming layer 12 is formed of, for example, a negative photosensitive resin, and is formed so that a quadrilateral outline dimension is within the frame of the support substrate 10, and the longitudinal direction is substantially parallel to the longitudinal direction of the support substrate 10. Is provided. In addition, the flow path forming layer 12 is provided with circular diameter-enlarged

regions

15a and 15b communicating with the inflow port 2a and the outflow port 2b, respectively, at both ends of the groove-forming through hole 15 formed in a band shape. The diameter-enlarged

regions

15a and 15b can also be arranged to face the

first electrodes

11a, 11b, and 11c on the support substrate 10.

In addition to this configuration, the first self-assembled monolayer 21a is selectively formed on the bonding surface 20a of the flow path forming layer 12 facing the second substrate 8 except for the flow path grooves. Is formed. Thus, the first substrate 7 has the second self formed on the bonding facing surface 20b of the second substrate 8 on the terminal functional group of the first self-assembled monolayer 21a on the bonding surface 20a facing the second substrate 8. The terminal functional group of the organized monolayer 21b is bonded, and the second substrate 8 can be bonded.

Here, the first self-assembled monolayer 21a is preferably composed of a self-assembled monomolecule having an epoxy as a terminal functional group. For example, 3-glycidyloxypropyltrimethoxysilane (GOPTS, GPTS, GPTMS ), 3-glycidoxypropyltriethoxysilane (GPTES), 3-glycidoxypropylmethyldiethoxysilane (GPMDES), 3-glycidoxypropylmethyldimethoxysilane and the like.

On the other hand, the second self-assembled monolayer 21b that binds to the terminal functional group of the first self-assembled monolayer 21a may be composed of a self-assembled monomolecule having —NH ₂ as the terminal functional group. Preferably, for example, 3-aminopropyltriethoxysilane (APTES), 3-aminopropyltrimethoxysilane (APTMS), N-2- (aminoethyl) -3-aminopropylmethyldimethoxysilane, N-2- (aminoethyl) -3-aminopropyltrimethoxysilane, N-2- (aminoethyl) -3-aminopropyltriethoxysilane, and the like.

In the above-described embodiment, a self-assembled monomolecular film having epoxy as a terminal functional group is formed on the first substrate 7 as the first self-assembled monomolecular film 21a, and —NH ₂ is formed as the terminal functional group. Although the case where the self-assembled monolayer having the second self-assembled monolayer 21b is formed on the second substrate 8 has been described, the present invention is not limited to this. A self-assembled monomolecular film having a second self-assembled monomolecular film on the second substrate 8 and a self-assembled monomolecular film having —NH ₂ as a terminal functional group as the first self-assembled monomolecular film May be formed on the first substrate 7.

The second substrate 8 on which such second self-assembled monolayer 21b is formed is, for example, polyester (PET (polyethylene terephthalate) or PEN (polyethylene naphthalate)), polycarbonate, polyimide resin, acrylic resin member. It is made of various film-like or sheet-like materials, and its outer shape is formed in a quadrilateral shape, and a joining facing surface 20b joined to the joining surface 20a of the first substrate 7 is formed almost flat. In the microchannel device 2, the second substrate 8 is formed of various transparent materials, so that the light emission state of the luminescent liquid L flowing in the channel space 14 can be changed from the outside on the second substrate 8 side. Visible. A plurality of strip-shaped

second electrodes

18a, 18b, 18c are arranged on the joint facing surface 20b of the second substrate 8 so as to run in parallel in the longitudinal direction. These

second electrodes

18a, 18b, 18c The first substrate 7 may be disposed so that the longitudinal direction of the first substrate 7 is orthogonal to the longitudinal direction of the flow channel grooves of the first substrate 7 (that is, the

first electrodes

11a, 11b, 11c).

As a result, when the second substrate 8 is joined to the first substrate 7 to block the opening of the flow channel, a part of the

second electrodes

18a, 18b, 18c is exposed in the flow channel of the first substrate 7. It is made to be able to let you. Thus, in the microchannel device 2, a channel space 14 in which, for example, the first electrode 11b and a part of the second electrode 18b face each other can be formed between the first substrate 7 and the second substrate 8. The

second electrodes

18a, 18b, and 18c are made of, for example, transparent electrodes such as ITO, IZO, and ZnO, as well as the

first electrodes

11a, 11b, and 11c, as well as gold, platinum, silver, magnesium, lithium, and aluminum. Etc., and alloys thereof. The second substrate 8 is provided with a plurality of inlets 2a and outlets 2b penetrating the thickness at predetermined positions around the

second electrodes

18a, 18b, 18c. The second substrate 8 is positioned on the flow path forming layer 12 so that the inlet 2a and the outlet 2b overlap with the

enlarged diameter regions

15a and 15b of the flow path forming layer 12, and is joined to the flow path forming layer 12. obtain.

Incidentally, in such a microchannel device 2, the support substrate 10 and the second substrate are formed of a soft member such as polyester (PET), and the

first electrodes

11a, 11b, 11c and the

second electrodes

18a, 18b, By forming 18c with a soft electrode member such as ITO, for example, a sheet-like flexible configuration that can be bent by the user's hand can be obtained, and damage due to external force can be prevented.

Here, in the microchannel device 2, as shown in FIG. 1, the longitudinal direction of the

second electrodes

18a, 18b, 18c on the second substrate 8 is the longitudinal direction of the

first electrodes

11a, 11b, 11c on the first substrate 7. The one end of the first substrate 7 protrudes from the side of the second substrate 8 and the one end of the second substrate 8 protrudes from the side of the first substrate 7. It has a configuration. As a result, the microchannel device 2 can expose the

first electrodes

11a, 11b, 11c at one end of the first substrate 7 without overlapping the second substrate 8, and accordingly, the

first electrodes

11a, 11b. , 11c can be easily connected to the wiring 4. Further, since the

second electrodes

18a, 18b, and 18c can be exposed at one end of the second substrate 8 without overlapping the first substrate 7, the wiring 4 is connected to the

second electrodes

18a, 18b, and 18c accordingly. It can be easily connected.

The micro-channel device 2 having such a configuration is selected only for the joining surface 20a except for the channel groove of the first substrate 7, as shown in FIG. 4 showing a side cross-sectional configuration of the AA ′ portion of FIG. Terminal functional groups of the first self-assembled monolayer formed on the second substrate 8 and the second self-assembled monolayer on the bonding facing surface 20b of the second substrate 8 are bonded to each other. The substrate 8 is joined, the channel groove is not bonded to the second substrate 8, the hollow channel space 14 can be reliably formed, and the characteristics of the channel space are not changed. The characteristics of the

first electrode

11a, 11b, 11c, the flow path forming layer 12, the

second electrode

18a, 18b, 18c, and the second substrate 8 can be maintained. Therefore, in the microchannel device 2, the luminescent liquid L can be surely passed through the channel space 14, and the

first electrode

11a, 11b, 11c and the

second electrode

18a, 18b, 18c are supplied by the power source 5. By applying a voltage, the luminescent liquid L flowing through the flow path space 14 can be caused to emit light.

(2) Manufacturing Method of Microchannel Device Next, a manufacturing method of such a microchannel device 2 will be described below. First, a plate-like support substrate having an electrode layer formed on the surface is prepared, and the electrode layer on the support substrate is etched with a resin mask pattern, and as shown in FIG. Shaped

first electrodes

11a, 11b, and 11c are formed. Next, for example, a negative photosensitive resin is spin-coated on the support substrate 10 on which the

first electrodes

11a, 11b, and 11c are formed, and the negative photosensitive resin is heated and prebaked. Next, as shown in FIG. 6, a belt-shaped groove-forming through-hole region 22 having enlarged

diameter regions

15a and 15b at both ends can be exposed using a mask (not shown) using an exposure apparatus for performing photolithography. Solubilize.

Subsequently, post-exposure baking is performed at a predetermined temperature, development is performed with a developer, and the solubilized groove-forming through-hole region 22 is removed to form the groove-forming through-hole 15 in the negative photosensitive resin. Post-baking is performed at a temperature, and a flow path forming layer 12 in which the

first electrodes

11a, 11b, and 11c are exposed at the bottom of the groove forming through hole 15 is formed on the support substrate 10 (not shown). Incidentally, the flow path forming layer 12 is preferably formed of the above-described negative photosensitive resin since it is desired that the height and width of the flow path groove can be easily changed. For example, SU manufactured by Microchem (Nippon Kayaku) -8 series, KMPR series, Tokyo Ohka Kogyo TMMR S2000, Toray Photo Nice (photosensitive polyimide), etc. are used.

In addition, in the present invention, for example, a dummy member such as a dummy resin (TSMR: manufactured by Tokyo Ohka Kogyo Co., Ltd.) is prepared, and the dummy member 23a is formed in the groove forming through hole 15 of the flow path forming layer 12 as shown in FIG. And then baked at a predetermined temperature. In this way, the entire inside of the channel groove 23 is covered with the dummy member 23a, and the

first electrodes

11a, 11b, 11c in the channel groove 23 are not exposed to the outside. Incidentally, as the dummy member 23a, for example, the TSMR series manufactured by Tokyo Ohka Kogyo, which is a positive resist that dissolves in an organic solvent (acetone or the like), the OFPR series, the AZ series manufactured by Clariant, or the like may be used.

Further, as a method of forming the dummy member 23a, when the channel groove width is 500 [un] or larger, the dummy member 23a may be provided directly in the channel groove by directly tracing the dummy member 23a with a syringe or the like. In addition, when the flow path width is narrow, after the dummy member 23a is spin-coated on the substrate 10, the dummy member 23a is formed by exposing and developing a portion other than the portion where the dummy member is to be formed using a mask. The flow channel groove is covered with a plate-like member provided with a supply port and a discharge port, and the dummy member 23a is fed from the supply port through the flow channel groove to the dummy member 23a. The member 23a may be provided, and then the plate member may be removed to form the dummy member 23a only in the flow channel.

Next, separately from this, a film-like second substrate having an electrode layer formed on the surface is prepared, and the electrode layer on the second substrate is etched with a resin mask pattern, and as shown in FIG.

Second electrodes

18a, 18b and 18c having a predetermined shape are formed on the two substrates 8 from electrode layers. In addition, the second substrate 8 has through-holes having substantially the same shape and size as the

enlarged diameter regions

15a and 15b at positions corresponding to the

enlarged diameter regions

15a and 15b of the groove-forming through-holes 15 of the flow path forming layer 12. A hole is formed by punching to form an inlet 2a and an outlet 2b. In this way, the second substrate 8 is manufactured in which the

second electrodes

18a, 18b, and 18c are provided on the bonding facing surface 20b, and the inflow port 2a and the outflow port 2b are formed.

Next, as shown in FIG. 9, the excimer UV is applied to the bonding surface 20a provided with the dummy member 23a of the first substrate 7 and the bonding facing surface 20b provided with the second electrode 18b of the second substrate 8. The lamp is irradiated with vacuum ultraviolet light (VUV / O ₃ ), and oxygen-containing groups (carboxyl groups, ketones) are formed on the dummy member 23a and the bonding surface 20a of the first substrate 7 and the bonding facing surface 20b of the second substrate 8, respectively. , Hydroxyl groups, etc.) are introduced to make them hydrophilic. For introduction of oxygen-containing groups, in addition to VUV or VUV / O ₃ treatment using an excimer UV device with a central wavelength of 172 [nm], UV / O ₃ treatment using a low-pressure mercury lamp, atmospheric pressure plasma treatment, Vacuum plasma treatment or the like may be used.

Next, the first substrate is immersed in a first self-assembled monomolecular formation solution (first SAM formation solution), and as shown in FIG. 10A, on the bonding surface 20a of the first substrate 7 and the dummy member 23a, For example, a first self-assembled monolayer 21a having a terminal functional group made of epoxy such as 3-glycidyloxypropyltrimethoxysilane (GOPTS) is formed. Next, the first substrate 7 is rinsed with a removing solution such as acetone, and the residual self-assembled monomolecules that are not attached to the bonding surface 20a and the dummy member 23a in the channel groove 23 are removed. As a result, the

first electrode

11a, 11b, 11c is exposed on the bottom of the flow channel 23 on the first substrate 7, and the first self-organization is selectively performed only on the bonding surface 20a excluding the flow channel 23. A monomolecular film 21a can be formed.

On the other hand, the second substrate 8 is immersed in a second self-assembled monomolecular formation solution (second SAM formation solution), and as shown in FIG. 10B, on the bonding facing surface 20b of the second substrate 8, for example, 3- A second self-assembled monolayer 21b whose terminal functional group is an amino group, such as aminopropyltriethoxysilane (APTES), is formed. Next, the second substrate 8 is rinsed with ethanol or the like to remove residual self-assembled monomolecules that are not attached to the bonding facing surface 20b. In this way, the second substrate 8 includes the second self-assembled monomolecule on the entire bonding facing surface 20b other than the

second electrodes

18a, 18b, 18c, including the exposed

second electrodes

18a, 18b, 18c. The film 21b can be formed.

Finally, the first substrate 7 whose surface 20a is modified by the first self-assembled monolayer 21a and the second surface 20b whose surface 20b is modified by the second self-assembled monolayer 21b. The substrate 8 is brought into contact, and the first substrate 7 and the second substrate 8 are loaded and heated in this state, and as shown in FIG. 11, the terminal functional groups of the first self-assembled monolayer 21a and the first functional group 2 The terminal functional group of the self-assembled monomolecular film 21b is bonded by an epoxy-amino reaction. Thus, by such a manufacturing method, the bonding surface 20a excluding the channel groove 23 in which the first self-assembled monolayer 21a of the first substrate 7 is not formed, and the bonding facing surface 20b of the second substrate 8 Can be manufactured. Further, in the microchannel device 2 manufactured by such a manufacturing method, as shown in FIG. 12, when the location of the first substrate 7 is observed with an ultrasonic microscope, the first self-assembled monolayer 21a is formed. Since the entire flow channel groove 23 that was not formed was white, it was confirmed that the hollow flow channel space 14 could be reliably formed without the entire flow channel groove 23 being bonded to the second substrate 8. .

Incidentally, in the case of this embodiment, the second substrate 8 has a slightly concavity and convexity on the bonding facing surface 20b on which the

second electrodes

18a, 18b, and 18c are provided depending on the presence or absence of the

second electrodes

18a, 18b, and 18c. The first self-assembled monolayer 21a of the first substrate 7 and the second self-assembled monolayer 21b of the bonding facing surface 20b are formed of a deformable film-like member. Therefore, the bonding facing surface 20b is brought into close contact with the bonding surface 20a of the first substrate 7 so that the bonding can be reliably performed. Thus, in the microchannel device 2, the first substrate 7 and the second substrate 8 are closely bonded without forming a gap, and the channel space 14 that communicates with the outside only through the inlet 2 a and the outlet 2 b is formed. The first substrate 7 and the second substrate 8 can be formed.

(3) Verification Test (3-1) Manufacture of Micro-channel Device Used for Verification Test Next, a micro-channel device 2 was actually manufactured according to the above manufacturing method, and a light-emitting device 1 using this micro-channel device 2 In FIG. 5, the verification was made on how the luminescent liquid L emits light in the flow path space. Here, the microchannel device 2 was manufactured as follows. First, an ITO-glass substrate was prepared in which a supporting substrate 10 was a 700 [μm] thick glass substrate on which 100 [nm] thick ITO was formed on one surface. Next, a resin mask pattern was formed on the ITO using a positive photosensitive resin TSMR manufactured by Tokyo Ohka Kogyo Co., Ltd. Next, aqua regia (mixed solution of nitric acid, hydrochloric acid and pure water) was used as an etching solution, and after etching ITO, the resin mask pattern was removed by immersion in acetone. Thus, the support substrate 10 formed so that the three

first electrodes

11a, 11b, and 11c having a strip shape as shown in FIG.

Next, a negative photosensitive resin (SU-8 3005: manufactured by Nippon Kayaku Co., Ltd.) with excellent chemical resistance and mechanical properties is spin-coated to a thickness of 6 [μm], and this negative photosensitive resin is hot. After pre-baking by heating to 70 [° C.] on the plate, only the groove-forming through-hole region 22 that becomes the groove-forming through-hole 15 is formed by using a mask aligner (MA6: manufactured by Carlsose) that is an exposure apparatus. The exposure was carried out at [mW / cm ² ] for 6 seconds to solubilize the groove-forming through-hole region 22 as shown in FIG. Subsequently, post-exposure baking is performed at 120 [° C.], development is performed with a developer (SU-8 developer: manufactured by Nippon Kayaku Co., Ltd.), solubilized groove-forming through-hole region 22 is removed, and negative photosensitive After forming the groove forming through hole 15 in the conductive resin, the flow path forming layer 12 with the

first electrodes

11a, 11b, and 11c exposed at the bottom of the groove forming through hole 15 is further hard-baked at 150 [° C.]. It was formed on the support substrate 10.

Next, a resin material made of TSMR (manufactured by Tokyo Ohka Kogyo Co., Ltd.) is prepared as a dummy member 23a, and as shown in FIG. 7, this TSMR is injected into the groove forming through-hole 15 of the flow path forming layer 12, and hot The plate was baked at 110 [° C.] for 5 minutes. In this way, the entire inside of the channel groove 23 is covered with the dummy member 23a, and the

first electrodes

11a, 11b, 11c in the channel groove 23 are not exposed to the outside. In this state, vacuum ultraviolet light ( VUV / O ₃ ) was irradiated to form oxygen-containing groups on the flow path forming layer 12 and the dummy member 23a.

Next, a 1% (v / v) 3-glycidyloxypropyltrimethoxysilane (GOPTS) solution dissolved in pure water is prepared as a first self-assembled monomolecular formation solution (first SAM formation solution) to form a first SAM. The first substrate 7 is immersed in the solution for 20 minutes, and a first self-assembled monolayer 21a in which GOPTS having a terminal functional group made of epoxy is provided on the bonding surface 20a of the first substrate 7 and the dummy member 23a as a film. Formed. Next, after the first substrate 7 is lifted from the first SAM forming solution, the first substrate 7 is rinsed with acetone to cover the remaining self-assembled monomolecules not attached to the bonding surface 20a and the flow channel 23. The dummy member 23a was removed, and then rinsed with isopropyl alcohol and pure water to remove acetone. As a result, the

first electrodes

11a, 11b, 11c are exposed at the bottom of the flow channel 23, and the first self-assembled monolayer 21a is selectively formed only on the bonding surface 20a excluding the flow channel 23. A first substrate 7 was manufactured.

Separately from this, an ITO-PEN film in which ITO having a thickness of 350 [nm] was formed on a PEN film having a thickness of 120 [μm] was prepared as the second substrate 8. Next, the ITO on the second substrate 8 was etched with a resin mask pattern, and as shown in FIG. 8, three

second electrodes

18a, 18b, 18c having a strip shape were formed from the ITO. Next, in the second substrate 8, a through hole having substantially the same shape and size as the

enlarged diameter regions

15 a, 15 b is provided at a position corresponding to the

enlarged diameter regions

15 a, 15 b of the groove forming through hole 15 in the flow path forming layer 12. Were punched to form the inlet 2a and the outlet 2b. In this way, the second substrate 8 in which the

second electrodes

18a, 18b, and 18c were provided on the bonding facing surface 20b and the inflow port 2a and the outflow port 2b were formed was manufactured.

The junction facing surface 20b of the second substrate 8 was also irradiated with vacuum ultraviolet light (VUV / O ₃ ) by an excimer UV lamp to form an oxygen-containing group on the junction facing surface 20b. Next, a 5% (v / v) 3-aminopropyltriethoxysilane (APTES) solution dissolved in pure water is produced as a second self-assembled monomolecular formation solution (second SAM formation solution). The second substrate 8 was immersed in the solution for 20 minutes to form a second self-assembled monolayer 21b in which the APTES whose terminal functional group is an amino group was provided on the bonding facing surface 20b of the second substrate 8 as a film. . Next, after the second substrate 8 is lifted from the second SAM forming solution, the second substrate 8 is rinsed with ethanol to remove residual self-assembled monomolecules not attached to the bonding facing surface 20b, and thus exposed. A second substrate 8 was produced in which the second self-assembled monolayer 21b was formed on the bonding facing surface 20b including the

second electrodes

18a, 18b and 18c.

Finally, the first self-assembled monolayer 21a of the first substrate 7 and the second self-assembled monolayer 21b of the second substrate 8 are brought into contact with each other, and the bonding apparatus (EVG520HE: EV group, Inc.) remains in this state. The first self-assembled monolayer 21a and the second self-assembled monolayer 21b are bonded to each other by applying a load with a load of 1.5 [MPa], a temperature of 140 [° C] and a holding time of 5 minutes. The substrate 7 and the second substrate 8 were joined, and the microchannel device 2 including the three channel spaces 14 having widths of 1000 [μm], 1250 [μm], and 1500 [μm] was manufactured.

(3-2) Verification Apparatus and Verification Results Next, a light emitting device 1 using this microchannel device 2 is constructed, and the state of light emission of the luminescent liquid L flowing through the channel space 14 of the microchannel device 2 is shown. A verification device that can be verified was created. As shown in FIG. 13, the verification device 40 fixes the microchannel device 2 with a fixing device 41 and installs the fixing device 41 on the lifting platform 42, and the first electrode 11 a of the microchannel device 2, A voltage was applied to 11b, 11c and the

second electrodes

18a, 18b, 18c (FIG. 1) by the power supply device 43 (power supply 5). Incidentally, as shown in FIG. 14, the fixing device 41 includes a first plastic plate 52 erected on a base 51 and a second plastic plate 53 that is a separate body from the first plastic plate 52. The micro-channel device 2 was made visible through the

glass windows

57 and 58 embedded in the first plastic plate 52 and the second plastic plate 53 with the device 2 interposed therebetween.

The first plastic plate 52 is provided with a pin member 55a penetrating the thickness, and one end of the pin member 55a exposed on one surface is brought into contact with the

second electrodes

18a, 18b, 18c of the microchannel device 2 and exposed on the other surface. The wiring 4 (FIG. 13) is connected to the other end of the pin member 55a so that the voltage from the power supply device 43 can be applied to the

second electrodes

18a, 18b, and 18c via the wiring 4 and the pin member 55a. Also, the second plastic plate 53 is provided with a pin member 55b penetrating the thickness, and one end of the pin member 55b exposed on one surface is brought into contact with the

first electrodes

11a, 11b, 11c of the microchannel device 2, and the other surface The wiring 4 (FIG. 13) is connected to the other end of the pin member 55b exposed to the voltage so that the voltage from the power supply device 43 can be applied to the

first electrodes

11a, 11b, and 11c via the wiring 4 and the pin member 55b. did.

The second plastic plate 53 is provided with openings communicating with the inlet 2a and the outlet 2b of the microchannel device 2, and a sealing pin 56 or a connecting pipe 56a (FIG. 13) is provided in the opening. It was. In the verification device 40, the cylinder 44 is connected to the inlet 2a communicating with the channel space 14 to be verified in the microchannel device 2 via the connection pipe 56a, and the cylinder 44 is connected to the inlet 2a via the inlet 2a. The luminescent liquid L was supplied to the channel space 14. Note that the luminescent liquid L supplied to the flow path space 14 is retained in the flow path space 14 by the sealing pin 56 provided at the outlet 2b of the micro flow path device 2.

In this verification, first, as a luminescent liquid L, a liquid semiconductor disclosed in “Appl3Phys Lett.95,053304 (2009) Organic light-emitting diode with liquid emitting layer, Denghui Xu and Chihaya Adachi '' Was used.

Then, UV is irradiated to the microchannel device 2 using the UV lamp 45, and the light emission state of the luminescent liquid L supplied into the channel space 14 of the microchannel device 2 is imaged by the digital camera 46. . In this verification test, a liquid semiconductor is injected as the luminescent liquid L into the channel space 14 located in the center among the three channel spaces 14 of the microchannel device 2 to correspond to the channel space 14. A voltage was applied to the central first electrode 11b and the three

second electrodes

18a, 18b, 18c orthogonal to the first electrode 11b. As a result, a result as shown in FIG. 15A was obtained. From Figure 15A, the microfluidic device 2 manufactured by the manufacturing method described above, the first electrode 11b and the

second electrodes

18a, 18b, at 18c is opposed, centrally disposed hollow flow path space 14b ₁ It was confirmed that the luminescent liquid L emitted light. In addition, it was confirmed that in the flow path space 14b ₁ , it was possible to prevent defects due to the joining of the flow path grooves of the first substrate 7 and the second substrate 8.

Next, as the luminescent liquid L, rubrene ((5,6,11,12) -tetraphenyltetracene) that emits yellow light is mixed into a mixed solvent (2: 1, v / v) of 1,2 dichlorobenzene and acetonitrile. Dissolved luminescent solution (hereinafter simply referred to as rubrene solution) and dibenzo {[f, f ']-4,4', 7,7'-tetraphenyl} diindeno [1,2,3- cd: 1 ', 2', 3'-lm] Perylene (hereinafter simply referred to as DBP), a luminescent compound doped with rubrene, mixed solvent of 1,2 dichlorobenzene and acetonitrile (2: 1, v / v ) And a luminescent solution (hereinafter simply referred to as a DBP-rubrene solution), and the rubrene solution is allowed to flow through the channel space 14a ₁ on _one end side and the DBP-rubrene in the channel space 14c ₁ on the other end side The solution was allowed to flow, and voltages were applied to the three

second electrodes

18a, 18b, 18c orthogonal to the first electrode 11b. As a result, a result as shown in FIG. 15B was obtained. From FIG. 15B, in the microchannel device 2 manufactured by the above-described manufacturing method, the hollow channel space 14a ₁ arranged on one end side is turned yellow by a rubden solution (indicated simply as “rubrene” in FIG. 15B). At the same time, the hollow channel space 14c ₁ arranged on the other end side can be made to emit red light with a DBP-rubrene solution (indicated simply as “DBP” in FIG. 15B). did it.

Next, as the luminescent liquid L, 9,10-diphenylanthracene (hereinafter simply referred to as DPA) that emits blue light as the luminescent liquid L is mixed with a mixed solvent of 1,2 dichlorobenzene and acetonitrile (2: 1, v / A luminescent solution dissolved in v) (hereinafter simply referred to as a DPA solution) is prepared, and this DPA solution is allowed to flow only in the central flow path space 14b ₁ and three second electrodes 18a, Voltage was applied to 18b and 18c. As a result, a result as shown in FIG. 15C was obtained. From FIG. 15C, in the microchannel device 2 manufactured by the above-described manufacturing method, the blue channel space 14b ₁ disposed in the center emits blue light by the DPA solution (simply expressed as “DPA” in FIG. 15C). I was able to.

The concentration of rubrene in the rubrene solution is preferably 1 to 20 [mM], and the concentrations of rubrene and DBP used in the DBP-rubrene solution are preferably 1 to 20 [mM] and 0.1 to 0.4 [mM], respectively. The concentration of DPA is preferably 5 to 50 [mM]. In addition, non-patent literature "K. Nishimura etal., Solution Electrochemiluminescent Cell with a High Luminance Using an Ion Conductive Assistant Dopant '', Japanese Journal of Applied Physics (Jpn. J. Appl. Phys), vol. pp. L 1323-L 1326, .2001 ”is added to the luminescent liquid as an ion conductive auxiliary dopant (0.122M of 1,2 diphenoxyethane).

Next, the luminescent liquid L is changed, and the rubrene solution that emits yellow light again as the luminescent liquid L is caused to flow through the channel space 14a _{1 on one} end side and the channel space 14c ₁ on the other end side, and the first electrode. A voltage was applied to the three

second electrodes

18a, 18b, and 18c orthogonal to 11b. As a result, a result as shown in FIG. 15D was obtained. 15D, in the microchannel device 2 manufactured by the above-described manufacturing method, the rubrene solution is passed through the hollow channel space 14a ₁ disposed on _one end side and the hollow channel space 14c ₁ disposed on the other end side. (In FIG. 15D, simply indicated as “rubrene”) can simultaneously emit yellow light, and even if the luminescent liquid L is changed, each channel space 14a ₁ to 14c ₁ emits light without causing poor bonding. I was able to. As described above, in the microchannel device 2 according to the present invention, each channel space 14a ₁ to 14c ₁ can be caused to emit light using not only a liquid semiconductor but also various luminescent liquids L, and light emission It was confirmed that each flow path space 14a ₁ to 14c ₁ can emit light even when the type of the ionic liquid L is changed.

(4) Operation and Effect In the above configuration, in the microchannel device 2, the first self-assembled monolayer 21a is selectively formed only on the bonding surface 20a excluding the channel groove 23 of the first substrate 7. Then, the terminal functional group of the second self-assembled monolayer 21b formed on the bonding facing surface 20b of the second substrate 8 and the terminal functional group of the first self-assembled monolayer 21a are bonded to each other. The first substrate 7 and the second substrate 8 are joined together to form a hollow flow path space 14 between the first substrate 7 and the second substrate 8.

In this microchannel device 2, since the first self-assembled monolayer 21a is not formed in the channel groove 23, characteristics such as wettability, surface free energy, surface functional groups, etc. of the channel groove 23 are obtained. The characteristics of the material of the flow channel 23 itself can be maintained without change, and the first substrate can be reliably bonded to the second substrate 8 only by the bonding surface 20a excluding the flow channel 23. It is possible to prevent defects caused by joining the seven flow path grooves and the second substrate 8.

In the microchannel device 2, the

first electrodes

11a, 11b, and 11c are formed so as to be exposed in the channel groove 23, and the

first electrodes

11a, 11b, and 11b are formed on the bonding facing surface 20b of the second substrate 8.

Second electrodes

18a, 18b, 18c that are at least partially opposed to 11c are provided, and these

first electrodes

11a, 11b, 11c and

second electrodes

18a, 18b, 18c are arranged to face each other across channel space 14 I tried to do it. Thus, in the microchannel device 2, by applying a voltage to the

first electrodes

11a, 11b, 11c and the

second electrodes

18a, 18b, 18c, the

first electrodes

11a, 11b, 11c and the second electrodes 18a, The luminescent liquid L flowing in the flow path space 14 between 18b and 18c can emit light.

Further, in this microchannel device 2, the luminescent liquid L can be supplied from the inflow port 2a to the channel space 14 by providing the inflow port 2a and the outflow port 2b for communicating the channel space 14 with the outside. At the same time, the luminescent liquid L supplied to the flow path space 14 can flow out from the outlet 2b, so that the deteriorated luminescent liquid L does not stay in the flow path space 14, and a new luminescent liquid L is always flowed. The luminescent liquid L can continue to emit light in the space 14 by being given in the space 14.

Further, in this microchannel device 2, a plurality of

first electrodes

11a, 11b, 11c and

second electrodes

18a, 18b, 18c are provided, and these

first electrodes

11a, 11b, 11c and

second electrodes

18a, 18a, Since 18b and 18c are arranged in a matrix, the

first electrode

11a, 11b and 11c and the

second electrode

18a, 18b and 18c to which the voltage is applied by the power source 5 are selected, so that the current to which the voltage is applied is selected. Only the luminescent liquid L flowing through the road space 14 can emit light.

(5) Other Embodiments The present invention is not limited to this embodiment, and various modifications can be made within the scope of the gist of the present invention. In the above-described embodiments, Although the case where the light-emitting device is manufactured using the micro-channel device 2 provided with the three linear channel spaces 14 is described, the present invention is not limited to this, and as shown in FIG. Light-emitting device using a micro-channel device 62 provided with a

merged channel space

14e, 14g in which a plurality of

channel spaces

14b, 14c, 14d merge in addition to the

channel spaces

14a, 14c, 14d and the curved channel space 14b 61 may be produced.

In practice, the microchannel device 62 includes, for example, four

inlets

63a, 63b, 63c, and 63d and three

outlets

64a, 64b, and 64c, of which a pair of inlets 63a and outlets are formed. A straight channel space 14a is provided between 64a. Further, between the other inlet 63b and outlet 64b, there are a plurality of U-shaped curved portions that are continuous and folded to the left and right, and a branch channel space 14f branched from the adjacent merge channel space 14e. A flow path space 14b and a merged flow path space 14g joined together are provided. Further, in the microchannel device 62, the

channel spaces

14c and 14d extending from the other two

inflow ports

63c and 63d, respectively, and the two

channel spaces

14c and 14d merge to form one outlet 64c. And a branch channel space 14f branched from the junction channel space 14e merges with the adjacent channel space 14b.

In such a microchannel device 62,

different syringes

44a, 44b, 44c, 44d are connected to the

respective inlets

63a, 63b, 63c, 63d, and are different from the

respective syringes

44a, 44b, 44c, 44d. A luminescent liquid can be supplied. The microchannel device 62 is provided with a plurality of first electrodes and second electrodes (not shown), and

channel spaces

14a, 14b, 14c, 14d are provided between the first electrodes and the second electrodes. And the

confluence channel spaces

14e, 14g are arranged, and by applying a voltage to the first electrode and the second electrode, the

channel spaces

14a, 14b, 14c, between the first electrode and the second electrode to which the voltage is applied. The luminescent liquid flowing in 14d or the merged

flow path spaces

14e and 14g can emit light. Thus, in this microchannel device 62, a plurality of types of luminescent liquids can be mixed in the

merged channel spaces

14e and 14g, and thus the luminescent liquids can be mixed while emitting light in the luminescent color of the luminescent liquid alone. The combined

flow path spaces

14e and 14g can be continuously emitted with a new emission color in which the emission colors are mixed.

Incidentally, even the microchannel device 62 having such a configuration can be manufactured in accordance with the above-described “(2) Manufacturing method of microchannel device”. Specifically, a channel groove having a complicated shape may be formed in the channel forming layer in accordance with the shape of the

channel spaces

14a, 14b, 14c, 14d and the

merged channel spaces

14e, 14g. Then, a dummy member is provided in the flow channel groove, and the first self-assembled monolayer is formed in this state, and then the dummy member is removed, so that only the bonding surface excluding the flow channel groove is the first. A self-assembled monolayer can be formed. Next, a second substrate having a second self-assembled monolayer formed on the bonding facing surface is prepared, and the first self-assembled monolayer of the first substrate and the second self-assembled monolayer of the second substrate are prepared. By bonding the film, the microchannel device 62 can be manufactured by bonding the first substrate and the second substrate.

As another embodiment, in the above-described embodiment, the

first electrode

11a, 11b, 11c and the

second electrode

18a, 18b, 18c are provided in the flow path space 14 between the first substrate 7 and the second substrate 8. Although the case where the electrode embedded type microchannel device 2 provided so as to face each other is applied is described, the present invention is not limited to this, and the

first electrode

11a, 11b, 11c and the

second electrode

18a, 18b , 18c may be used, and a microchannel device that simply includes a hollow channel space 14 between the first substrate 7 and the second substrate 8 may be applied.

Further, in the above-described embodiment, the case where the second self-assembled monomolecular film 21b is formed on all the bonding facing surfaces 20b of the second substrate 8 has been described. However, the present invention is not limited to this, and the second substrate The second self-assembled monolayer 21b may be formed only on the bonding facing surface 20b excluding the region facing the flow channel 23 out of the eight bonding facing surfaces 20b. In this case, the first substrate 7, not only the channel groove 23 of 7 but also the bonding facing surface 20 b of the second substrate 8 located in the channel space 14 is not subjected to surface modification. The characteristics of the materials of the

first electrodes

11a, 11b, 11c, the flow path forming layer 12, the

second electrodes

18a, 18b, 18c, and the second substrate 8 are maintained without changing the characteristics such as free energy and surface functional groups. The second substrate 8 can be reliably bonded to the bonding surface 20a excluding the flow channel groove 23 while being maintained in the flow channel space 14. Runode may prevent failure due to bonding of the flow channel and the second substrate 8 of the first substrate 7.

Note that the light-emitting device using the micro-channel device of the present invention can emit a single-color or multi-color luminescent solution within the channel path of the micro-channel device formed on one chip. Therefore, it can be used as, for example, a full color display or illumination.

As another application of the light emitting device, it can also be used as a micron-scale light source for irradiating excitation light in a fluorescence detection sensor or the like. That is, in this case, in the light emitting device, in the microchannel device, the luminescent solution is selected by the channel path 14 formed in the micron-scale width, and various lights in the visible light region (350 to 850 nm) are emitted. Therefore, it can be used as an excitation light source for measuring the fluorescence amount of the target sample in a specific wavelength region.

In addition, since the microchannel device of the present invention can reliably produce a hollow channel space having a desired shape and a micro size, for example, when analyzing various fluids such as liquid and gas in an analyzer, It can also be used as a device for confining a fluid in a channel space or flowing in a channel space. That is, in this case, in the microchannel device of the present invention, for example, a minute reaction chamber or mixing chamber provided on the substrate as one type of channel space, a channel, and other various blood or DNA to be analyzed Since it is possible to flow a biological sample made of liquid or gas, it can also be used as a micro TAS (Total Analysis System) for analyzing these liquids and gases and as a flow channel device used for immunoassay.

Claims

A first substrate having a channel groove serving as a channel space on a bonding surface, wherein a first self-assembled monolayer is selectively formed only on the bonding surface excluding the channel groove;
A second substrate having a second self-assembled monolayer formed on a bonding facing surface facing the bonding surface of the first substrate;
A terminal functional group of the first self-assembled monolayer and a terminal functional group of the second self-assembled monolayer are bonded to bond the first substrate and the second substrate, and the first substrate And a hollow flow path space is formed between the second substrates.
The second self-assembled monolayer is formed on the second substrate only on the bonding facing surface except for a groove facing region facing the flow channel of the first substrate. The microchannel device according to claim 1.
The first substrate has a first electrode formed in the flow channel groove,
The microchannel device according to claim 1 or 2, wherein a second electrode, at least a part of which is opposed to the first electrode, is formed on the bonding facing surface of the second substrate.
The microchannel device according to claim 3, wherein a plurality of the first electrodes and the second electrodes are provided, and the first electrodes and the second electrodes are arranged in a matrix.
The first substrate and / or the second substrate are formed with an inlet for allowing the luminescent liquid to flow into the channel space from the outside and an outlet for discharging the luminescent liquid from the channel space to the outside. And
5. The luminescent liquid flowing in the flow path space is caused to emit light when a voltage is applied between the first electrode and the second electrode. Microchannel device.
A dummy member forming step of forming a dummy member in the channel groove on the bonding surface of the first substrate and protecting the channel groove with the dummy member;
A film forming step of forming a first self-assembled monolayer on the bonding surface of the first substrate and the dummy member;
A selection step of removing the dummy member and selectively forming the first self-assembled monolayer only on the joint surface excluding the channel groove;
Bonding terminal functional groups of the second self-assembled monolayer formed on the bonding facing surface of the second substrate and the first self-assembled monolayer formed only on the bonding surface of the first substrate A bonding step of bonding the first substrate and the second substrate, and forming a hollow flow path space between the first substrate and the second substrate by the flow path groove. Manufacturing method of microchannel device.
A groove-facing dummy member is formed in a groove-facing region facing the flow channel groove of the first substrate in the bonding-facing surface of the second substrate, and the groove-facing region is protected by the groove-facing dummy member. 2 substrate side dummy member forming step;
A second substrate side film forming step of forming a second self-assembled monolayer on the groove facing dummy member and the bonding facing surface;
A second substrate side selecting step of removing the groove facing dummy member and selectively forming the second self-assembled monolayer only on the bonding facing surface excluding the groove facing region;
In the joining step,
The microchannel device manufacturing method according to claim 6, wherein the channel groove and the groove facing region are positioned so as to face each other, and the first substrate and the second substrate are bonded.
In the dummy member forming step, the dummy member is formed in the flow channel so as to cover the first electrode formed in the flow channel,
In the bonding step, a second electrode is formed on the bonding facing surface of the second substrate, and at least a part of the second electrode is opposed to the first electrode and the first substrate and the first substrate Two substrates are joined. The manufacturing method of the microchannel device of Claim 6 or 7 characterized by the above-mentioned.