WO2013104715A1

WO2013104715A1 - Mach-zehnder modulator arrangement and method for operating a mach-zehnder modulator arrangement

Info

Publication number: WO2013104715A1
Application number: PCT/EP2013/050404
Authority: WO
Inventors: Karl-Otto Velthaus
Original assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Priority date: 2012-01-12
Filing date: 2013-01-10
Publication date: 2013-07-18
Also published as: US20150043865A1; US9310663B2; EP2615489B1; EP2615489A1

Abstract

The invention relates to a Mach-Zehnder modulator arrangement, comprising - at least one electro-optic Mach-Zehnder modulator (1) comprising a first optical waveguide (11) forming a first modulator arm and a second optical waveguide (12) forming a second modulator arm; - a travelling wave electrode arrangement (2) comprising a plurality of first waveguide electrodes (21) for applying a voltage across the first optical waveguide (11) and a plurality of second waveguide electrodes (22) for applying a voltage across the second optical waveguide (12), wherein the first waveguide electrodes (21) are capacitively coupled to the second waveguide electrodes (22); and - a driver unit (41) for supplying an alternating voltage to the travelling wave electrode arrangement (2), wherein - the driver unit (41) comprises a first output port (441) coupled to the first waveguide electrodes (21) and a second output port (442) coupled to the second waveguide electrodes (22), wherein the driver unit (41) is configured to supply a first varying signal (S+) to the first waveguide electrodes (21) via the first output port (441) and to supply a second varying signal (S-) to the second waveguide electrodes (22) via the second output port (442). The invention further relates to a method for operating a Mach-Zehnder modulator arrangement.

Description

Mach-Zehnder Modulator Arrangement and Method for Operating a Mach-Zehnder

Modulator Arrangement

Description

The invention relates to an electro-optic Mach-Zehnder modulator arrangement according to claim 1 and a method for operating a Mach-Zehnder modulator arrangement according to claim 15.

It is known in the art to use Mach-Zehnder interferometers as electro-optic modulators in optical high-speed transmission systems, wherein, for example, coplanar travelling wave electrodes (TWE) are used to induce a phase shift in the interferometer arms. These TWEs comprise a first and a second coplanar microwave line connected to a plurality of periodically arranged and capacitively coupled electrodes on top of the waveguides. Examples of such TWE-Mach-Zehnder modulators are described in the publication "High- Speed lll-V Semiconductor Intensity Modulators", Robert G. Walker, IEEE Journal of Quantum Electronics Vol. 27, No. 3, March 1991 .

Usually, a high frequency ( e.g. > 20 GHz) data signal is supplied to the Mach-Zehnder modulator via an amplifying driver, wherein a signal carrying connector of the driver is connected to one of the coplanar lines of the TWE, whereas the other coplanar line is grounded (single drive operation). Further, the impedance of the travelling wave electrode of the modulator is matched to the conventional 50 Ohm impedance of the output port of the driver. However, this asymmetric operation of the TWE creates stray capacitances against ground which may, for example, cause drops in the frequency response of the Mach-Zehnder modulator due to parasitic electrical modes.

In order to eliminate stray capacitances a complicated layout of the high frequency inter- face between the electric input port of the modulator and the coplanar line of the modulator as well as a complicated grounding of the modulator module is required. For example, the modulator housing is arranged at a great distance (for example, several millimetres) from the TWE. Further, the publication "Advances in InP Mach-Zehnder modulators for large capacity photonic network systems", H. Yasaka et al., Indium Phosphide and Related Materials, IPRM 2008, p. 1 , discloses a Mach-Zehnder modulator having separate (electrically uncoupled) continuous electrodes disposed on the optical waveguides, wherein the electrodes are driven by two 50 Ohm drivers requiring twice the voltage of the capacitively coupled TWE.

It is the object of the invention to provide a highly efficient Mach-Zehnder modulator that nevertheless can be fabricated in a cost effective way. According to the invention, an electro-optic Mach-Zehnder modulator arrangement is provided, comprising

- an electro-optic Mach-Zehnder modulator comprising a first optical waveguide forming a first modulator arm and a second optical waveguide forming a second modulator arm;

- a travelling wave electrode arrangement comprising a plurality of first waveguide elec- trodes for applying a voltage across the first optical waveguide and a plurality of second waveguide electrodes for applying a voltage across the second optical waveguide, wherein the first waveguide electrodes are capacitively coupled to the second waveguide electrodes; and

- a driver unit for supplying an alternating voltage to the travelling wave electrode ar- rangement, wherein

- the driver unit comprises a first output port coupled to the first waveguide electrodes and a second output port coupled to the second waveguide electrodes, wherein the driver unit is configured to supply a first varying signal to the first waveguide electrodes via the first output port and to supply a second varying signal to the second waveguide electrodes via the second output port. For example, a non-grounded (or at least not permanently grounded) signal-carrying connector of the first output port is connected to the first waveguide electrodes and a non- grounded (or at least not permanently grounded) signal-carrying connector of the second output port is connected to the second waveguide electrodes to supply the first and the second signal (in particular in the form of a voltage signal), respectively.

The waveguide electrodes may be operated similar to electrical lines used for differential signaling. For example, the first waveguide electrodes and the second waveguide electrodes are driven symmetrically, i.e. the absolute value (e.g. the absolute value of a volt- age swing of a high frequency voltage applied between the first and the second waveguide electrode) supplied to the first electrodes is identical to the absolute value of the voltage supplied to the second electrodes. In particular, supplying a signal (a voltage) to both electrodes may have the advantage over the conventional asymmetric electrode operation (by means of a grounded first or second waveguide electrode) that stray ca- pacitance against ground (mass) and thus parasitic electrical modes can be avoided or reduced such that a complicated grounding layout is not necessary. Also, the grounding design does not have to be completely reconsidered when changing the module design.

The Mach-Zehnder modulator arrangement according to the invention further may permit the driver unit and/or the Mach-Zehnder modulator to comprise a grounded (e.g. metal) carrier, i.e. circuitry of the driver unit (implementing, for example, the first and the second output port) may be arranged on a grounded (e.g. metal) carrier. The semiconductor substrate used for arranging the optical and electrical Mach-Zehnder modulator structures (such as the optical waveguides) may still be arranged on an insulating carrier.

For example, the driver unit is a differential driver unit configured in such a way that the first signal (electrical potential), e.g. a first RF signal voltage, and the second signal, e.g. a second RF signal voltage, supplied to the first and the second waveguide electrodes, respectively, have opposite polarity but the same absolute value (bipolar operation). Us- ing this kind of differential drive operation half of the required driving voltage ν_π is to be supplied to the first and the second waveguide electrodes, respectively. Thus, in contrast to the conventional single drive operation, the driver unit does not have to be configured to be able to deliver the full required driving voltage. For example, the on-off-keying format requires a driving voltage ν_π of about 2 - 2.5 V, wherein a phase modulation format even requires a driving voltage of 2 x ν_π, i.e. about 4 - 5 V. Such voltages often require multi-stage drivers. Using the modulator arrangement according to the invention, a driving voltage of only + ν_π/2 may be supplied to the first waveguide electrodes and a driving voltage of - MJ2 may be supplied to the second waveguide electrodes (or the other way round, - ν_π/2 to the first waveguide electrodes and + ν_π/2 to the second waveguide electrodes). It is noted that in some differential driver regimes the (e.g. RF) drive voltage is used in a switching mode - the output potential gets switched from one output to the other to drive either a logical "one" or a "zero" respectively. Regarding the absolute RF voltage swing there is no difference to already described approach with dual polarity. Thus, it is possible to supply a first signal (non-zero potential) to the first waveguide electrodes while the second electrodes are on ground (zero) potential during a first period of time and to supply a second, non zero signal (potential) to the second waveguide electrodes while the first waveguide electrodes are on ground potential during a second period of time. In other words, the first and second waveguide electrodes may be driven corresponding to the "low-voltage differential signaling" - LVDS - scheme.

For example, a first driver unit stage (comprising the first output port) of the driver unit is configured to deliver an output voltage of about 1 - 1 .25 V and a second driver unit stage (comprising the second output port) is configured to deliver an output voltage of also about 1 - 1 .25 V. The low required output voltages, for example, may further permit the driving unit to be fabricated using SiGe substrates (using a BiCMOS process, for example) instead of GaAs substrates.

It is noted that the Mach-Zehnder modulator arrangement may comprise a plurality (for example, two) Mach-Zehnder modulators, wherein the signal carrying first and second waveguide electrodes of the modulators may reduce crosstalk between adjacent modulators such that a higher "modulator density" may be realized. For example, an arrangement comprising multiple Mach-Zehnder modulators may be used for quadrature amplitude modulation systems. Also, the arrangement according to the invention may be used in photonic ICs (PICs), e.g. OFDM (Orthogonal frequency-division multiplexing) PICs.

According to an embodiment of the invention, the impedance of the driver unit at each one of the two output ports (i.e. the impedance of the first and second driver stage producing the voltage supplied to first and the second waveguide electrodes via the first and the second output port) is at least essentially half of the impedance of the travelling wave electrode arrangement. For example, the impedance of the travelling wave electrode arrangement is in the range between approximately 46 to approximately 54 Ohm or is approximately 50 Ohm such that the impedance of the driver unit at the first output port is about 23 to 27 Ohm or about 25 Ohm and at the second output port also about 23 to 27 Ohm or about 25 Ohm. Of course, other impedances could be used, wherein the impedance at the driver output ports may be adapted to the impedance of the design of the travelling waveguide electrodes.

The driver unit, however, may comprise an input port having an impedance of approxi- mately 50 Ohm such that the input port can be connected to conventional 50 Ohm equipment.

It is noted that all conventional high frequency components such as drivers, cables und plugs have the standard 50 Ohm impedance such that all conventional driver-modulator units are restricted to a 50 Ohm layout, wherein a first signal carrying connector of an output port of the driver is connected to the first waveguide electrodes of the modulator and a second grounded connector of the driver is connected to the second waveguide electrodes such that the known 50 Ohm infrastructure only permits a very inefficient 2 x 50 Ohm = 100 Ohm design of the modulator.

It is further noted that a conventional symmetrical differential drive operation comprises a ground contact between the two waveguide electrodes (for example, an electrode connected to a ground connector of the driver), which is not necessarily required in the Mach-Zehnder modulator arrangement according to the invention.

According to the invention, the modulator is capacitively coupled, which means in particular that the waveguide electrodes with respect to an RF voltage applied to the electrodes are coupled via a conductive region (for example, an n-doped region) located between them (as explained in more detail below). Driving the waveguide electrodes symmetrically (for example, using a bipolar differential signal or a switched unipolar RF signal similar to the differential scheme used in the LVDS standard as set forth above) may have the effect that the potential relative to ground of the conductive region does not change during operation of the modulator. Thus, if a capacitance occurs between the conductive region and ground, this capacitance will not be loaded or unloaded by the RF voltage applied to the waveguide electrodes such that a stray capacitance between the conductive region and ground affecting the electro-optical characteristics of the modulator may be avoided. In the conventional, asymmetric electrode operation the conductive region between the waveguide electrodes has a "floating" potential, i.e. a potential that varies with the applied RF voltage. Subsequently, a capacitance occurring between the conductive region and ground may be loaded and unloaded during RF operation and thus may form a stray capacitance impairing the electro-optical performance of the modulator.

Thus, the conductive region may have a constant or nearly constant potential (which may be ground potential or nearly ground potential) because of the symmetric drive, but, for example, there is no connection (at least no direct connection) between the conductive region and the ground of the driver unit) such that the conductive region may be "non- grounded". It is noted, however, that a DC-source may be used to bias the conductive region (see below), wherein it may be possible to bias the conductive region in such a way that it assumes ground potential (by setting the DC voltage to zero). However, in intended operation of the Mach-Zehnder modulator arrangement the bias voltage will not be set to zero such that in intended operation the conductive region is "non-grounded". In particular, "non-grounded" means that the conductive region is not connected to ground via the driver unit, i.e. there is no electrical connecting means (such as a wire or another electrically conductive element) arranged between the conductive region and a ground contact (e.g. a ground connector) of the driver unit. Further, for example, the Mach- Zehnder-modulator and the driver unit form a unit, wherein there is no connection be- tween the conductive region and the mass of this unit, i.e. there is no internal (within the unit formed by the Mach-Zehnder-modulator and the driver unit) connection (no "on-chip"- connection) of the conductive region to ground, although the conductive region may be set to ground potential using a DC-source, which, however, is located external to the unit formed by the modulator and the driver unit.

According to another embodiment of the invention, the Mach-Zehnder modulator comprises a first and a second electrical line extending at least partially parallel to the first and second optical waveguide. In particular, the first and the second output port of the driver unit are coupled to the plurality of first and second waveguide electrodes via the first and second electrical line, respectively. Further, the first and the second electrical line may be formed as coplanar microwave strip lines, i.e. the modulator electrodes have a coplanar stripline (CPS) travelling wave design, wherein, however, none of the coplanar lines is permanently grounded. An example of a possible principal optical and electrical layout of the Mach-Zehnder modulator of the arrangement according to the invention is described in the publication "45 GHz Bandwidth Travelling Wave Electrode Mach-Zehnder Modulator with Integrated Spot Size Converter", D. Hoffmann, Proceedings International Conference on Indium Phosphide and Related Materials, p. 585, 2004, wherein the content of this article in respect to the optical and electrical design of the Mach-Zehnder modulator is incorporated by reference herewith. It is noted, however, that the invention is of course not restricted to a particular basic design of the Mach-Zehnder modulator. For example, the optical waveguides could also be formed as strongly guiding ("deep ridge") waveguides as disclosed in US patent application 12/638,372 (published as US 2010/0150494 A1 ) and in the article "High performance InP-based Mach-Zehnder modulators for 10 to 100 Gb/s optical fiber transmission systems", K.-O. Velthaus et al., Compound Semiconductor Week and 23rd International Conference on Indium Phosphide and Related Materials, CSW/IPRM 201 1 , which are also incorporated by reference herewith.

The impedance of the travelling wave electrode arrangement depends on the design of the electrodes such as the design of the waveguide electrodes (e.g. their length, number and the space between the waveguide electrodes) and the design of the coplanar lines connected to the waveguide electrodes.

According to another example of the invention, the first and/or the second output port of the driver unit are connected to the first or second electrical line via an adapted RF con- necting waveguide, e.g. a microstrip line (each of the RF connecting waveguidess, for example, having an impedance of about half of the impedance of the TWE electrodes, e.g. about 25 Ohm). Further, the RF connecting waveguides (e.g. the microstrip lines) may be short lines (having a length of e.g. not more than 10 mm) such that the driver unit is positioned in proximity of the travelling wave electrodes. In particular, the RF connect- ing waveguides may extend in the interior of a housing of the Mach-Zehnder-modulator arrangement (such that no 25 Ohm feed throughs are required).

It is also possible that the driver unit (i.e. its first and second output port) are directly connected to the first and second electrical line of the modulator, i.e. without using an electri- cal (microstrip) line between the output ports and the electrical lines of the modulator, e.g. the connection is realized by a bonding material, only. The driver unit and the Mach- Zehnder-modulator may also be arranged in a common housing but may be disposed, for example, on different substrates consisting of different materials (hybrid integration). However, the driver unit may also be arranged outside a modulator housing.

Moreover, the first and the second waveguide electrodes may be arranged on top of ca- pacitive segments of the optical waveguides, wherein the capacitive segments of the first optical waveguide, for example, are coupled to the capacitive segments of the second optical waveguide via a conductive region as already set forth above, the conductive region being, for example, arranged on a side of the capacitive segments that faces away from the waveguide electrodes. Thus, the waveguide electrodes are capacitively coupled to one another via the connected capacitive segments.

For example, the Mach-Zehnder modulator of the arrangement according to the invention is formed as a semi-conductor device, wherein the conductive region is formed by an n- doped semiconductor layer. In particular, the Mach-Zehnder modulator is fabricated using indium phosphide or gallium arsenide technology, i.e. the modulator is fabricated on an indium phosphide or a gallium arsenide substrate. For example, the capacitive segments of the modulator arms comprise a p-doped layer, wherein the p-doped layer can be removed between adjacent capacitive segments (the active sections of the waveguides) in order to electrical isolate the active sections from each other and reduce the optical loss in the waveguide sections between the capacitive segments (i.e. in the passive sections of the waveguides).

The p-doped layer in the capacitive segments may form part of a p-i-n-diode, wherein the isolating region of the p-i-n-diode is formed by at least one isolating layer arranged be- tween the p-doped layer and an n-doped layer or an n-doped substrate. It is, however, also possible that other kinds of diodes realize the capacitive segments such as n-i-n diodes and/or Schottky diodes.

According to another example, the Mach-Zehnder modulator arrangement comprises a DC-source connected to the first and/or the second (e.g. coplanar) electrical line and the conductive region for supplying a bias voltage across the capacitive segments, in particular to bias the diodes of the capacitive segments in reverse direction. According to another example of the invention, the DC-source is connected to the first and/or the second waveguide electrodes via a connecting point located between two terminating resistors coupled between the first and the second waveguide electrode. This has the effect that a photo current created in the region of the capacitive segments will flow across both terminating resistors such that the DC voltage across the terminating resistors will be the same, thereby eliminating or reducing a contribution of a chirp of the optical signal generated by the Mach-Zehnder modulator.

Moreover, the Mach-Zehnder modulator arrangement may comprise at least one digital- to-digital converter, at least one digital-to-analog converter and/or at least one field pro- grammable gate array component, the digital-to-digital converter, the digital-to-analog converter or the field programmable gate array component being connected to the driver unit or implementing the driver unit. For example, a "power DAC" as described in the article "InP DHBT Very High Speed Power-DACs for Spectrally Efficient Optical Transmis- sion Systems", J. Godin, Compound Semiconductor Integrated Circuit Symposium (CSICS), 201 1 IEEE (incorporated by reference herewith), may implement the driver unit or may be used to provide an input signal supplied to the driver unit.

The invention also relates to a method for operating a Mach-Zehnder modulator ar- rangement, in particular as described above, the method comprising the steps of:

- providing at least one electro-optic Mach-Zehnder modulator comprising a first optical waveguide forming a first modulator arm and a second optical waveguide forming a second modulator arm;

- providing a travelling wave electrode arrangement comprising a plurality of first waveguide electrodes for applying a voltage across the first optical waveguide and a plurality of second waveguide electrodes for applying a voltage across the second optical waveguide, wherein the first waveguide electrodes are capacitively coupled to the second waveguide electrodes; and

- supplying a first varying signal to the first waveguide electrodes and supplying a second varying signal to the second waveguide electrodes.

In particular, a differential driver unit is used for supplying a first voltage signal to the first waveguide electrodes and a second (inverse) voltage signal to the second waveguide electrodes as already set forth above.

Embodiments of the invention will be described in more detail hereinafter with reference to the drawings, in which:

Fig. 1 illustrates the principal layout of a known Mach-Zehnder modulator;

Fig. 2 illustrates the principal layout of a known Mach-Zehnder modulator - driver arrangement;

Fig. 3 depicts a perspective view of a known Mach-Zehnder modulator arrange- ment; Fig. 4A schematically shows a top view of a Mach-Zehnder modulator arrangement according to an embodiment of the invention;

Fig. 4B shows a perspective view of the Mach-Zehnder modulator arrangement of

Fig. 4A;

Fig. 5 shows a perspective view of a variant of the Mach-Zehnder modulator arrangement illustrated in Fig. 4A and 4B; and

Fig. 6 shows another variant of the Mach-Zehnder modulator arrangement illustrated in Fig. 4A and 4B.

Figure 1 shows the principal layout of a prior art coplanar stripline travelling wave Mach- Zehnder modulator 1 as disclosed, for example, in the publication "45 GHz Bandwidth Travelling Wave Electrode Mach-Zehnder Modulator with Integrated Spot Size Converter", D. Hoffmann, Proceedings International Conference on Indium Phosphide and Related Materials, p. 585, 2004, already mentioned above. The Mach-Zehnder modulator 1 comprises a first and a second optical waveguide 1 1 , 12, wherein an optical input port of the modulator 1 comprises a spot size converter 13 and a splitter 14 that distributes the optical power inserted via the input port to the first and the second optical waveguide 1 1 , 12.

At the output port side, the first and the second optical waveguide 1 1 , 12 are merged in a combiner 15 (for example, realized by a multi mode interference - MMI device). The out- put port also comprises spot size converters 16 connected to output ports of the combiner

15.

Further, the Mach-Zehnder modulator 1 comprises a travelling wave electrode arrangement 2 that comprises a plurality of first waveguide electrodes 21 and a plurality of sec- ond waveguide electrodes 22 for applying a voltage V supplied by a high frequency voltage source 4 across the first and the second optical waveguide 1 1 , 12. The first and second waveguide electrodes 21 , 22 are arranged periodically (with a distance from one another) on top of the first and the second optical waveguide 1 1 , 12, respectively. The travelling wave electrode arrangement 2 further comprises two coplanar microwave (e.g. mi- crostrip) lines 23, 24 extending at least partially parallel to the first and the second optical waveguide 1 1 , 12. The first and the second coplanar line 23, 24 are connected to the first and second waveguide electrodes 21 , 22 via a plurality of air bridges 25. Thus, the first electrodes 21 are connected to one another via the first coplanar line 23 and the second electrodes 22 are connected to one another via the second coplanar line 24.

The first and second waveguide electrodes 21 , 22 are arranged on first and second ca- pacitive segments 1 1 1 , 121 of the first and the second optical waveguide 1 1 , 12, wherein the capacitive segments 1 1 1 , 121 are formed by p-i-n diode sections of the optical waveguides 1 1 , 12. An active layer (for example, a multi quantum well layer) forms the intrinsic region, a p-doped region above the intrinsic region the p-region and an n-doped layer below the active layer and arranged on a semi-isolating substrate (e.g. an InP- substrate) the n-region of the diodes.

The capacitive segments 1 1 1 , 121 are coupled in series (indicated by the resistor symbol in the lower left sectional view of Fig. 1 ) via an n-doped region 3 (conductive region) formed by a portion of the n-doped layer such that the first and the second waveguide electrodes 21 , 22 are capacitively coupled to one another, the modulator 1 thus having a capacitively coupled coplanar travelling wave electrode design. Due to the capacitively coupled waveguide electrodes 21 , 22 a first voltage +V/2 drops across the first capacitive segments 1 1 1 and an opposite voltage -V/2 drops across the second capacitive segments 121 ("push-pull-drive").

The n-doped region 3 is at least partially surrounded by an isolation groove 31 extending through the n-doped layer and thus electrically separating the n-doped region 3 from the coplanar lines 23, 24. For example, the n-doped region 3 has an essentially rectangular contour.

In operation, a high frequency (RF) voltage source 4 is coupled to the first and the second coplanar line 23, 24 such that a microwave travels along the coplanar lines 23, 24 and thus via the plurality of first and second waveguide electrodes 21 , 22 along the optical waveguides 1 1 , 12. The endings of the coplanar lines 23, 24 are terminated with a resistor 5.

As shown in Figures 2 and 3, the high frequency voltage source 4 may comprise a driver unit 41 for amplifying a high frequency input signal supplied to the driver unit 41 via an input port 42. The conventional driver unit 41 shown in Figure 2 comprises a single output port 43 having a first, non-grounded signal carrying connector 44 and a grounded second connector 45. The signal carrying connector 44 is connected to the first coplanar microwave line 23 and thus to the first waveguide electrode 21 , whereas the grounded second connector 45 is connected to the second coplanar line 24 and thus to the second waveguide electrodes 22. The output port 43 of the driver unit 41 has an impedance that is matched to the impedance of the travelling wave electrode arrangement 2. Conventionally, the impedance of the output port 43 is 50 Ohm, i.e. the driver unit 41 and the modulator 1 are 50 Ohm devices, wherein the impedance of the modulator's travelling wave electrode arrangement 2 is designed to be 50 Ohm, the terminating resistor 5 has 50 Ohm as well as the input port 42 of the driver unit 41 . Due to the grounding of the second coplanar line 24, the n-doped region 3 has a "floating" potential, i.e. its potential varies dependent on the voltage V applied to the first and the second waveguide electrodes 21 , 22 such that the n-doped region 3 may create a stray capacitance against mass.

In order to be able to bias the capacitive segments (the p-i-n diodes) 1 1 1 , 121 in reverse direction, a DC voltage can be applied between the n-doped region 3 and the second (grounded) coplanar microwave line 24 using a DC source 6. In order to prevent the DC voltage from entering the driver unit 41 via the output port 44 a capacitor 7 or a bias-T (not shown) is introduced between the connector 44 and the first coplanar microwave line 23.

Figures 4A, 4B depict a Mach-Zehnder modulator arrangement according to an embodiment of the invention. The principle layout of the Mach-Zehnder modulator 1 is identical to the layout of the modulator shown in Figures 1 to 3. However, the driver unit 41 comprises a first and a second output port 441 , 442 coupled to the first coplanar line and the second coplanar line 23, 24, respectively.

The impedance of the driver unit 41 at the first and the second output port 441 , 442 is only half of the impedance of the travelling wave electrode arrangement 2. For example, if the impedance of the travelling wave electrode arrangement 2 is about 50 Ohm, the impedance at the first output port 441 is about 25 Ohm and the impedance at the second output port 442 is also about 25 Ohm. The first and the second output ports 441 , 442 each comprise a first and second signal-carrying connector 451 , 461 , wherein the first connector 451 is coupled to the first coplanar line 23 (for example, via a high frequency connecting waveguide in the form of a microstrip line 47) and the second connector 461 is coupled to the second coplanar line 24 (for example, also via a microstrip line 48) such that none of the two coplanar lines 23, 24 is permanently grounded. For example, the driver unit 41 is a differential driver for symmetrically driving the modulator such that a first signal (potential) in the form of a first voltage signal S+ is supplied to the first microwave line 23 via the first connector 451 and a second, inverse signal (potential) in the form of a second voltage signal S- is supplied to the second coplanar line 24 via the second connector 461 . Thus, a first voltage V+ (corresponding to the voltage signal S+) drops at the first capacitive segments 1 1 1 and an opposite voltage (i.e. an opposite electrical field) V- drops at the second capacitive segments 121 .

The impedance of the microstrip lines 47, 48 is chosen in each case to match the impedance of the output ports 441 , 442 of the driver unit 41 , i.e. to be at least essentially 25 Ohm (illustrated in Figure 4B by resistor symbols 471 , 481 ). It is noted that in pure symmetric differential drive operation the absolute value of the first voltage signal S+ is at least essentially identical to the absolute value of the second voltage signal S- (wherein the signals have opposite signs). However, it is also conceivable that the electrode arrangement 2 is not operated in a pure symmetric way such that the first and the second voltage signal have opposite signs but different absolute values or that the signal (potential) of the first and second waveguide electrodes is switched according to the electrode operation of the LVDS approach described above. For example, applying a first and a second voltage signal S+, S- that have different (non-zero) absolute values it may be possible to selectively control a chirp of the optical output of the modulator.

Further, as shown in Figure 5, a DC bias source 6 may be provided in order to supply a DC bias voltage V_bias across the capacitive segments 1 1 1 , 121 , wherein the DC source 6 is connected to the n-doped region 3 and the microwave lines 23, 24 (via a connecting point between two terminating resistors 51 , 52). The terminating resistors 51 , 52 each have a resistance corresponding to half the impedance of the travelling wave arrangement, e.g. 25 Ohm each. In contrast to the conventional modulator arrangement, a DC blocking capacitor (such as capacitor 7 in Figure 2) or a bias-T is not necessary as the capacitive segments 1 1 1 , 121 inherently decouple the DC voltage supplied by DC source 6 from the driver unit 41 and the terminating resistors 51 , 52. Further, although the n- doped region 3 is not connected to a mass connector 45 of the driving unit 41 , the n- doped region 3 does not have a floating potential anymore due to the symmetric electrode operation. Rather, its potential may not vary during RF operation of the electrodes such that stray capacitances between the n-doped region 3 and mass may be eliminated or reduced.

Further, as the DC voltage source is connected to a connecting point between the two terminating resistors 51 , 52 (having the same resistance value) the DC voltage is symmetrically supplied to the capacitive segments. This has the effect that a photo current created in the region of the capacitive segments will symmetrically flow across both resis- tors 51 , 52 such that the DC voltage across the resistors 51 , 52 will be the same, thereby eliminating a contribution of a chirp of the optical signal generated by the Mach-Zehnder modulator.

Figure 6 shows an example of a configuration of the driver unit 41 used in the modulator arrangement according to the invention. The first and the second output ports 45, 46 have a "ground-signal-signal-ground" configuration, wherein the signal carrying connectors 451 , 461 of the first and the second output port 441 , 442, respectively, are connected to the coplanar lines 23, 24 as shown in Figures 4A, 4B and Figure 5. Also, the mass side of the DC source 6 may be connected to the mass of the driver unit 41 (as indicated by the dashed line in Fig. 6).

Further ground connectors 452, 462 connected to the ground may be provided, wherein the ground connectors 452, 462 may be realized as actual connectors such as contact pads. However, it is also possible that the ground connectors 452, 462 of the first and the second output port 441 , 442 are provided by a general mass (common ground) of the driver unit 41 and/or the Mach-Zehnder modulator, for example, by a grounded substrate 4500 of the driver unit 41 . Further, the first and second connector 451 , 461 may comprise contact pads 451 1 , 461 1 arranged on the substrate 4500, wherein the microstrip lines 47, 48 may be bonded to the contact pads 451 1 , 461 1 . Reference signs

1 Mach-Zehnder modulator

2 Travelling wave electrode arrangement

3 n-doped region

4 high frequency source

5 terminating resistor

6 DC source

7 capacitor

1 1 first optical waveguide

12 second optical waveguide

13, 16 spot size converter

14 splitter

15 combiner

21 first waveguide electrodes

22 second waveguide electrodes

23 first coplanar line

24 second coplanar line

25 air bridge

31 isolation groove

41 driver unit

42 input port

43 output port

44 signal carrying connector

45 grounded connector

47, 48 microstrip line

51 terminating resistor

1 1 1 first capacitive segments

121 second capacitive segments

441 first output port

442 second output port

451 first signal-carrying connector

452, 462, 451 1 , 461 1 contact pad

461 second signal-carrying connector

471 , 481 impedance

4500 substrate

Claims

ms

A Mach-Zehnder modulator arrangement, comprising

- at least one electro-optic Mach-Zehnder modulator (1 ) comprising a first optical waveguide (1 1 ) forming a first modulator arm and a second optical waveguide (12) forming a second modulator arm;

- a travelling wave electrode arrangement (2) comprising a plurality of first waveguide electrodes (21 ) for applying a voltage across the first optical waveguide (1 1 ) and a plurality of second waveguide electrodes (22) for applying a voltage across the second optical waveguide (12), wherein the first waveguide electrodes (21 ) are ca- pacitively coupled to the second waveguide electrodes (22); and

- a driver unit (41 ) for supplying an alternating voltage (V) to the travelling wave electrode arrangement (2), wherein

- the driver unit (41 ) comprises a first output port (441 ) coupled to the first waveguide electrodes (21 ) and a second output port (442) coupled to the second waveguide electrodes (22), wherein the driver unit (41 ) is configured to supply a first varying signal (S+) to the first waveguide electrodes (21 ) via the first output port (441 ) and to supply a second varying signal (S-) to the second waveguide electrodes (22) via the second output port (442).

The Mach-Zehnder modulator arrangement as claimed in claim 1 , wherein the impedance of the driver unit (41 ) at each one of the two output ports (441 , 442) is essentially half of the impedance of the travelling wave electrode arrangement (2).

The Mach-Zehnder modulator arrangement as claimed in claim 1 or 2, wherein the impedance of the travelling wave electrode arrangement (2) is in the range between approximately 46 Ohm to approximately 54 Ohm or is approximately 50 Ohm.

The Mach-Zehnder modulator arrangement as claimed in one of the preceding claims, wherein the driver unit (41 ) comprises an input port (42), wherein the impedance of the driver unit (41 ) at the input port (42) is approximately 50 Ohm.

The Mach-Zehnder modulator arrangement as claimed in one of the preceding claims, wherein the driver unit (41 ) is a differential driver unit configured in such a way that the first and the second signal (S+, S-) supplied to the first and second waveguide electrodes (21 , 22), respectively, have opposite polarity .

6. The Mach-Zehnder modulator arrangement as claimed in one of the preceding claims, further comprising a first and a second electrical line (23, 24) extending at least partially parallel to the first and second optical waveguide (1 1 , 12), wherein the first and the second output port (441 , 442) of the driver unit (41 ) are coupled to the plurality of first and second waveguide electrodes (21 , 22) via the first and second electrical line (23, 24), respectively.

7. The Mach-Zehnder modulator arrangement as claimed in claim 6, wherein the first and the second electrical line (23, 24) are formed as coplanar microwave strip lines.

8. The Mach-Zehnder modulator arrangement as claimed in claim 6 or 7, wherein the first and/or the second output port (441 , 442) of the driver unit (41 ) is connected to the first or second electrical line (23, 24) via a high frequency connecting waveguide (47, 48).

9. The Mach-Zehnder modulator arrangement as claimed in one of the preceding claims, wherein the first and the second waveguide electrodes (21 , 22) are arranged on top of capacitive segments (1 1 1 , 121 ) of the optical waveguides (1 1 , 12). 10. The Mach-Zehnder modulator arrangement as claimed in claim 9, wherein the capacitive segments (1 1 1 ) of the first optical waveguide (1 1 ) are coupled to the capacitive segments (121 ) of the second optical waveguide (12) via a conductive region (3) arranged on a side of the capacitive segments (1 1 1 , 121 ) that faces away from the waveguide electrodes (21 , 22).

1 1 . The Mach-Zehnder modulator arrangement as claimed in claim 10, wherein the Mach-Zehnder modulator (1 ) is formed as a semi-conductor device, and wherein the conductive region (3) is formed by an n-doped semiconductor layer. 12. The Mach-Zehnder modulator arrangement as claimed in one of the claims 9 to 1 1 , further comprising a DC-source (6) connected to the first and/or the second electrical line (23, 24) and the conductive region (3) for supplying a bias voltage (V_bias) across the capacitive segments (1 1 1 , 121 ) of the optical waveguides (1 1 , 12). 13. The Mach-Zehnder modulator arrangement as claimed in one of the preceding claims, wherein the driver unit (41 ) and/or the Mach-Zehnder modulator (1 ) comprise a grounded substrate (4500).

14. The Mach-Zehnder modulator arrangement as claimed in one of the claims 9 to 13, wherein the capacitive segments (1 1 1 , 121 ) each form a p-i-n diode, an n-i-n diode or a Schottky diode.

15. Method for operating a Mach-Zehnder modulator arrangement, in particular according to one of the preceding claims, comprising the steps of:

- providing at least one electro-optic Mach-Zehnder modulator (1 ) comprising a first optical waveguide (1 1 ) forming a first modulator arm and a second optical waveguide (12) forming a second modulator arm;

- providing a travelling wave electrode arrangement (2) comprising a plurality of first waveguide electrodes (21 ) for applying a voltage across the first optical waveguide (1 1 ) and a plurality of second waveguide electrodes (22) for applying a voltage across the second optical waveguide (12), wherein the first waveguide electrodes (21 ) are capacitively coupled to the second waveguide electrodes (22); and

- supplying a first varying signal (S+) to the first waveguide electrodes (21 ) and supplying a second varying signal voltage (S-) to the second waveguide electrodes (22).