WO2013044050A3 - High efficiency echelle grating and method of manufacture - Google Patents

High efficiency echelle grating and method of manufacture Download PDF

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Publication number
WO2013044050A3
WO2013044050A3 PCT/US2012/056603 US2012056603W WO2013044050A3 WO 2013044050 A3 WO2013044050 A3 WO 2013044050A3 US 2012056603 W US2012056603 W US 2012056603W WO 2013044050 A3 WO2013044050 A3 WO 2013044050A3
Authority
WO
WIPO (PCT)
Prior art keywords
facet
manufacture
high efficiency
echelle grating
substrate
Prior art date
Application number
PCT/US2012/056603
Other languages
French (fr)
Other versions
WO2013044050A2 (en
Inventor
John Hoose
Original Assignee
Newport Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Newport Corporation filed Critical Newport Corporation
Publication of WO2013044050A2 publication Critical patent/WO2013044050A2/en
Publication of WO2013044050A3 publication Critical patent/WO2013044050A3/en

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials

Abstract

The present application discloses an echelle diffraction grating which includes at least one substrate, at least one formation layer formed on the substrate, at least one diffraction element formed on the formation layer, the diffraction element comprising a first facet, a second facet, and at least a third facet, and at least one coating optical coating applied to at least one of the first facet, second facet, and third facet.
PCT/US2012/056603 2011-09-23 2012-09-21 High efficiency echelle grating and method of manufacture WO2013044050A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201161538320P 2011-09-23 2011-09-23
US61/538,320 2011-09-23

Publications (2)

Publication Number Publication Date
WO2013044050A2 WO2013044050A2 (en) 2013-03-28
WO2013044050A3 true WO2013044050A3 (en) 2013-07-04

Family

ID=47915100

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2012/056603 WO2013044050A2 (en) 2011-09-23 2012-09-21 High efficiency echelle grating and method of manufacture

Country Status (1)

Country Link
WO (1) WO2013044050A2 (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010003035A1 (en) * 1998-09-10 2001-06-07 Robert G. Ozarski Diffraction grating and fabrication technique for same
WO2001077738A2 (en) * 2000-04-07 2001-10-18 Zolo Technologies, Inc. Apparatus and method for the reduction of polarization sensitivity in diffraction gratings used in fiber optic communications devices
US6517734B1 (en) * 2000-07-13 2003-02-11 Network Photonics, Inc. Grating fabrication process using combined crystalline-dependent and crystalline-independent etching
KR20030055739A (en) * 2001-12-27 2003-07-04 가부시키가이샤 시마쓰세사쿠쇼 Grating, negative and replica gratings of the grating, and method of manufacturing the same
US20060227425A1 (en) * 2002-01-07 2006-10-12 Carl Zeiss Laser Optics Gmbh Optical grating and method for the manufacture of such an optical grating

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010003035A1 (en) * 1998-09-10 2001-06-07 Robert G. Ozarski Diffraction grating and fabrication technique for same
WO2001077738A2 (en) * 2000-04-07 2001-10-18 Zolo Technologies, Inc. Apparatus and method for the reduction of polarization sensitivity in diffraction gratings used in fiber optic communications devices
US6517734B1 (en) * 2000-07-13 2003-02-11 Network Photonics, Inc. Grating fabrication process using combined crystalline-dependent and crystalline-independent etching
KR20030055739A (en) * 2001-12-27 2003-07-04 가부시키가이샤 시마쓰세사쿠쇼 Grating, negative and replica gratings of the grating, and method of manufacturing the same
US20060227425A1 (en) * 2002-01-07 2006-10-12 Carl Zeiss Laser Optics Gmbh Optical grating and method for the manufacture of such an optical grating

Also Published As

Publication number Publication date
WO2013044050A2 (en) 2013-03-28

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