WO2013030079A3 - Interferometric pressure sensor - Google Patents

Interferometric pressure sensor Download PDF

Info

Publication number
WO2013030079A3
WO2013030079A3 PCT/EP2012/066408 EP2012066408W WO2013030079A3 WO 2013030079 A3 WO2013030079 A3 WO 2013030079A3 EP 2012066408 W EP2012066408 W EP 2012066408W WO 2013030079 A3 WO2013030079 A3 WO 2013030079A3
Authority
WO
WIPO (PCT)
Prior art keywords
reflection surface
pressure
partial
counter
pressure sensor
Prior art date
Application number
PCT/EP2012/066408
Other languages
German (de)
French (fr)
Other versions
WO2013030079A2 (en
Inventor
Marc Andreas SCHLACHTER
Dietmar FRÜHAUF
Simon Weidenbruch
Original Assignee
Endress+Hauser Gmbh+Co. Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress+Hauser Gmbh+Co. Kg filed Critical Endress+Hauser Gmbh+Co. Kg
Publication of WO2013030079A2 publication Critical patent/WO2013030079A2/en
Publication of WO2013030079A3 publication Critical patent/WO2013030079A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
    • G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements

Abstract

An interferometric pressure sensor (1) comprises a measuring membrane body (2) having a measuring membrane having a first reflection surface (8) that can be deflected in relation to pressure; and an at least partially transparent counter body (3), wherein the measuring membrane body (2) is connected to the counter body (3) in a pressure-tight manner, wherein the counter body (3) has at least one second, partially reflective reflection surface (9) parallel to the first reflection surface at a pressure-dependent distance from the first reflection surface, wherein the counter body (3) has a third, partially reflective reflection surface (10) having a temperature-dependent distance from the second reflection surface, wherein the counter body (3) has a first, partially transparent partial body and a second partial body that is rigidly connected to the first partial body, wherein the first partial body has two boundary surfaces that are plane-parallel at least in some sections, of which a first boundary surface has the second reflection surface (9) and a second boundary surface has the third reflection surface (10), wherein the first reflection surface (8), the second reflection surface (9), and the third reflection surface (10) can be illuminated through the second partial body in perpendicular incidence.
PCT/EP2012/066408 2011-08-26 2012-08-23 Interferometric pressure sensor WO2013030079A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011081651.8 2011-08-26
DE201110081651 DE102011081651A1 (en) 2011-08-26 2011-08-26 Interferometric pressure sensor

Publications (2)

Publication Number Publication Date
WO2013030079A2 WO2013030079A2 (en) 2013-03-07
WO2013030079A3 true WO2013030079A3 (en) 2013-06-20

Family

ID=46754439

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2012/066408 WO2013030079A2 (en) 2011-08-26 2012-08-23 Interferometric pressure sensor

Country Status (2)

Country Link
DE (1) DE102011081651A1 (en)
WO (1) WO2013030079A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013114062A1 (en) 2013-12-16 2015-06-18 Endress + Hauser Gmbh + Co. Kg pressure sensor
PT3353517T (en) * 2015-09-21 2020-05-20 Opsens Solutions Inc Optical pressure sensor with reduced mechanical stresses
DE102015121625A1 (en) * 2015-12-11 2017-06-14 Endress+Hauser Gmbh+Co. Kg Method for producing a pressure measuring device
DE102018124753A1 (en) * 2018-10-08 2020-04-09 fos4X GmbH Temperature compensated fiber optic sensor and method for pressure measurement

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5280173A (en) * 1992-01-31 1994-01-18 Brown University Research Foundation Electric and electromagnetic field sensing system including an optical transducer
US20020162399A1 (en) * 2000-03-07 2002-11-07 Masayoshi Esashi Pressure sensor and method of manufacturing the same
EP2072986A1 (en) * 2007-12-18 2009-06-24 Services Pétroliers Schlumberger A pressure measuring device and method

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0460357A3 (en) * 1990-06-08 1992-07-29 Landis & Gyr Betriebs Ag Device for optical measurement of pressure differences
US6738145B2 (en) * 2000-04-14 2004-05-18 Shipley Company, L.L.C. Micromachined, etalon-based optical fiber pressure sensor
JP5143736B2 (en) * 2005-08-12 2013-02-13 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング Measuring cell and manufacturing method thereof
DE112008003344A5 (en) * 2007-12-20 2010-12-09 Inficon Gmbh Arrangement for a diaphragm pressure measuring cell
DE102009031705A1 (en) * 2009-07-04 2011-01-05 CiS Institut für Mikrosensorik GmbH Micromechanical pressure sensor has substrate and diaphragm, which has piezo-resistive sensor elements, where substrate has framework with rectangular cross section
DE102009027592A1 (en) * 2009-07-09 2011-05-12 Endress + Hauser Gmbh + Co. Kg Pressure sensor with interferometric transducer and pressure gauge with such a pressure sensor
DE102011077499A1 (en) 2011-06-14 2012-12-20 CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH Interferometric pressure measuring cell

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5280173A (en) * 1992-01-31 1994-01-18 Brown University Research Foundation Electric and electromagnetic field sensing system including an optical transducer
US20020162399A1 (en) * 2000-03-07 2002-11-07 Masayoshi Esashi Pressure sensor and method of manufacturing the same
EP2072986A1 (en) * 2007-12-18 2009-06-24 Services Pétroliers Schlumberger A pressure measuring device and method

Also Published As

Publication number Publication date
WO2013030079A2 (en) 2013-03-07
DE102011081651A1 (en) 2013-02-28

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