WO2013022669A2 - Systems and methods for processing vapor - Google Patents
Systems and methods for processing vapor Download PDFInfo
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- WO2013022669A2 WO2013022669A2 PCT/US2012/049146 US2012049146W WO2013022669A2 WO 2013022669 A2 WO2013022669 A2 WO 2013022669A2 US 2012049146 W US2012049146 W US 2012049146W WO 2013022669 A2 WO2013022669 A2 WO 2013022669A2
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- vapor
- vacuum chamber
- conduit
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45561—Gas plumbing upstream of the reaction chamber
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
- B01D3/10—Vacuum distillation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/60—Deposition of organic layers from vapour phase
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/228—Gas flow assisted PVD deposition
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/544—Controlling the film thickness or evaporation rate using measurement in the gas phase
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
- C23C14/582—Thermal treatment using electron bombardment
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D2252/00—Sheets
- B05D2252/02—Sheets of indefinite length
Definitions
- the present disclosure relates to systems and methods for processing vapor and, particularly, to systems and methods for monitoring and controlling a flow of vapor generated by a vapor source.
- Vapor coating techniques such as plasma deposition and chemical vapor deposition are used to deposit thin coatings of various materials without the use of solvents.
- a substrate e.g., polymerizable or curable materials
- Processes for coating organic materials onto a substrate e.g., polymerizable or curable materials
- a substrate e.g., a polymer film
- Processes for coating organic materials onto a substrate e.g., polymerizable or curable materials
- a substrate e.g., a polymer film
- U.S. Patent 4,842,893 e.g., U.S. Patent 4,842,893.
- These processes can involve the evaporation of organic or organometallic precursors to create a vapor that is transferred to the substrate to be coated.
- Some patents related to evaporation methods and apparatus are U.S. Patents 6,309,508 and 7, 1 13,351.
- a system for processing vapor may include a vapor source for producing a vapor and an outlet conduit coupled to the vapor source for carrying the vapor from the vapor source. Downstream of the vapor source the outlet conduit may separate into a vapor bypass conduit and a vapor feed conduit.
- the system may further include a first vapor control valve disposed in the bypass conduit, a second vapor control valve disposed in the feed conduit, a first vacuum chamber fluidically coupled to the bypass conduit, and a second vacuum chamber fluidically coupled to the feed conduit.
- a method for processing vapor may include discharging a vapor from a vapor source into a fluid pathway.
- the fluid pathway may include an outlet conduit fluidically coupled to the vapor source. Downstream of the vapor source the outlet conduit may separate into a vapor bypass conduit and a vapor feed conduit.
- the fluid pathway may further include a first vapor control valve disposed in the bypass conduit and a second vapor control valve disposed in the feed conduit, a first vacuum chamber fluidically coupled to the bypass conduit, and a second vacuum chamber fluidically coupled to the feed conduit.
- the method may further include controlling an amount of vapor passing through the feed conduit and the bypass conduit via manipulation of either or both of the first vapor control valve and the second vapor control valve.
- Figure 1 illustrates a schematic diagram of a system for processing vapor in accordance with some embodiments of the present disclosure.
- Figure 2 is a plot of mean coated thickness as a function of mean vapor pressure, which was generated using systems and methods in accordance with some embodiments of the present disclosure.
- Figure 3 is a plot of both vapor pressure and measured coated thickness, as a function of substrate web position, which was generated using systems and methods in accordance with some embodiments of the present disclosure.
- Vapor coating techniques such as, for example, chemical vapor deposition (CVD), plasma deposition, and polymer multi-layer deposition are used to deposit thin coatings of various materials on a substrate without the use of solvents. Often times, these techniques require the evaporation of a material (e.g., an organic, organometallic, or metal) to create a vapor flow to a deposition appliance (e.g., nozzle), which is positioned proximate the substrate to be coated.
- CVD chemical vapor deposition
- plasma deposition e.g., a plasma deposition
- polymer multi-layer deposition e.g., vapor flow
- the present disclosure relates to systems and methods for monitoring and controlling the characteristics of a vapor flow produced by a vapor source (e.g., an evaporator).
- the systems and methods may involve monitoring and controlling a flow of vapor generated by a vapor source, which is to be deposited as a coating onto a substrate in a vapor coating chamber, such that a rate of vapor production in the vapor source (e.g., evaporation rate) is decoupled from a deposition rate of the vapor in the vapor coating chamber.
- a rate of vapor production in the vapor source e.g., evaporation rate
- the systems and methods of the present disclosure may account for perturbations in vapor flow caused by variable vapor generation rates, thereby enabling precise control of vapor deposition rates and coating thickness.
- FIG. 1 illustrates a schematic diagram of a system 2 for processing vapor in accordance with some embodiments of the present disclosure.
- the system may include a vapor source 4 fluidically coupled, via a fluid pathway 6, to a first vacuum chamber 8 and a second vacuum chamber 12.
- the fluid pathway 6 may include an outlet conduit 6a, a vapor bypass conduit 6b, and a vapor feed conduit 6c.
- a pressure sensor 14 may be operatively coupled to the fluid pathway 6.
- a vapor bypass control valve 16 and a vapor feed control valve 18 may be disposed in the vapor bypass conduit 6b and the vapor feed conduit 6c, respectively.
- the system may further include a controller 22 operatively coupled to the pressure sensor 14 and either or both of the bypass vapor control valve 16 and the feed vapor control valve 18.
- the vapor source 4 may be configured as any device capable of vaporizing liquid. Suitable vapor sources may include, for example, heated baths, bubblers, atomizers, cyclone evaporators, ultrasonic evaporators, wiped-film evaporators, rolled film evaporators, spinning disk evaporators, rotary evaporators, porous frit evaporators, tubular evaporators, and the like. In various embodiments, the vapor source 4 may include one or more of the vapor sources described in the following patents and publications, incorporated by reference herein in their entireties: U.S. Pub. No. 2008/0108180 (Charles, et al.); U.S. Pub. No.
- the vapor supplied by the vapor source 4 may include monomers, oligomers, resins, waxes, solvents, organic compounds, organometallic compounds, metallic compounds, biologically active materials, and combinations thereof.
- suitable materials for vaporization include, but are not limited to, epoxies, vinyl ethers, (meth)acrylates, fluoro-containing polymers, styrene containing polymers, acetylenes, polyamides, acrylamides, parylenes, waxes, fluoropolyethers, polyamines, diallyldiphenylsilanes, metal alkoxides, metal alkyls, silicones, oils, dyes, proteins, peptides, polypeptides, lipids, carbohydrates, enzymes, nucleic acids, polynucleic acids, drugs, drug metabolites, and combinations thereof.
- the vapor supplied by the vapor source 4 may include one or more additives to affect processing of the vapor and/or the properties and performance of a condensed or deposited material formed from the vapor, as is known in the art.
- one or more additives may be included to lower surface tension, reduce viscosity, inhibit thermally-induced reactions such as polymerization, prevent oxidation reactions, or combinations thereof.
- one or more additives may be included to absorb radiation (e.g., UV, visible
- wavelengths, IR, and microwave energy and/or initiate reactions (e.g., photoinitiators, thermal initiators, and the like).
- Other additives may include colorants, crosslinkers, or other materials known in the art.
- the system 2 may include a gas source 24 configured to provide a flow of gas to the vapor source 4 and/or the flow pathway 6.
- Suitable inert gases may include nitrogen, argon, helium, neon, and combinations thereof.
- Suitable reactive gases may include oxygen, ozone, nitrous oxide, hydrogen, hydrogen sulfide, carbon tetrafluoride, methane, ammonia, and combinations thereof.
- the vapor source 4 (and optionally the gas source 24) may be fluidically coupled to a fluid pathway 6.
- the fluid pathway 6 may include an outlet conduit 6a, which is fluidically coupled on a first end to the vapor source 4, and which is bifurcated on a second end to separate flow from the outlet conduit 6a into a vapor bypass conduit 6b and a vapor feed conduit 6c.
- the vapor bypass conduit 6b may terminate in a fluidic coupling to the first vacuum chamber 8.
- the vapor feed conduit 6c may terminate in a fluidic coupling to the second vacuum chamber 12.
- one or more pressure sensors may be operatively associated with the fluid pathway 6.
- the pressure sensors may be positioned and configured to sense a pressure of fluid being transported through the fluid pathway 6.
- the system 2 may include a pressure sensor 14 positioned to sense the pressure of fluid being transported through the outlet conduit 6a.
- the system may include pressure sensors positioned in either or both of the vapor bypass conduit 6b and feed conduit 6c, for example, downstream of the vapor bypass control valve 16 and the vapor feed control valve 18, respectively.
- a bypass vapor control valve 16 and a feed vapor control valve 18 may be disposed in the vapor bypass conduit 6b and the vapor feed conduit 6c, respectively.
- the valves 16, 18 may be configured as any devices capable of fully or partially opening or closing such that one of more properties (e.g., rate, pressure) of a fluid flow passing therethrough may be adjusted.
- the degree to which the valves are opened/closed which may be referred to herein as "the position" of the valve, may be adjusted manually, or automatically, such as in response to signals received from the controller 22.
- the adjustment of the position of the valves 16, 18 may be carried out by means of mechanical, electrical, hydraulic, or pneumatic systems, or combinations thereof.
- valves 16, 18 may be substantially similar.
- each of the valves 16, 18 may be configured such that their respective valve positions may be continuously adjustable between a fully open and a fully closed position (hereinafter, a "continuously adjustable control valve").
- the valves 16, 18 may of different construction.
- the bypass control valve 16 may be a continuously adjustable control valve and the feed control valve 18 may be configured as a basic open/close valve.
- the system 2 may include a bypass control valve 16 only (i.e., the feed control valve 18 may be omitted).
- one or more heating elements may be operatively associated with any or all of the components of the flow path 6, including the bypass and feed control valves 16, 18.
- the heating elements may be utilized to, for example, maintain the temperature of the conduits 6a, 6b, and 6c and/or valves 16, 18 at a temperature above a condensation point of a vapor being transported therethrough, thereby preventing condensation of the vapor on the walls of the conduits 6a, 6b, and 6c and/or valves 16, 18.
- the system 2 may include a controller 22 operatively coupled to one or more components of the system 2 such that one or more characteristics of a fluid flow within the fluid pathway 6 may be monitored and/or controlled.
- the controller 22 may be configured as one or more processing devices (e.g., general purpose computers, programmable logic controllers, combinations thereof) having instructions stored thereon for monitoring system variables and causing components of the system 2 to perform specified functions.
- the controller 22 may be provided with instructions to, in response to signals received from one or more components of the system 2 (e.g., sensors) selectively actuate one or more components of the system 2 (e.g., valves) to achieve/maintain a desired process condition (e.g., flow rate, pressure setpoint) within the fluid pathway 6.
- a desired process condition e.g., flow rate, pressure setpoint
- the controller 22 may be operatively coupled to any or all of the pressure sensor 14, the bypass control valve 16, and the feed control valve 18.
- the controller 22 may be provided with instructions to, for example, receive signals from the pressure sensor 14 regarding a fluid pressure within the fluid pathway 6, compare the measured pressure to a predetermined pressure setpoint, and selectively actuate either or both of the bypass control valve 16 and the feed control valve 18 (e.g., set/change valve position) such that the pressure setpoint is achieved/maintained.
- the system 2 may be configured to precisely control system pressures and flow rates, such as the pressures and flow rates of vapor entering the first vacuum chamber 8 and/or the second vacuum chamber 12.
- system 2 may also be configured to compensate for any interruptions or perturbations in the rate of vapor supplied by the vapor source 4.
- the first vacuum chamber 8 may include any device configured to condense and collect a vapor flow under vacuum conditions.
- the first vacuum chamber 8 may be operated at a temperature and pressure sufficient to condense any or all of the components of a vapor flow which is transported from the vapor source 4 to the first vacuum chamber 8.
- the first vacuum chamber 8 may be operatively coupled to one or more vacuum sources, such as a vacuum pump 26.
- the first vacuum chamber 8 may include a condenser having a collector disposed therein for collecting condensed vapor.
- the second vacuum chamber 12 may be operated under conditions (e.g., temperature and pressure) such that pressure within the vacuum chamber 12 is at or above the vapor pressure of one or more components of a vapor mixture that is being transported to the vacuum chamber 12 from the feed vapor conduit 6c. In this manner, one or more components of the vapor mixture may be condensed out of a vapor mixture and collected in a collector.
- the conditions of the second vacuum chamber 12 e.g., temperature and pressure
- one or more first components of a vapor mixture being transported to the vacuum chamber 12 via the fluid pathway 6 may be condensed and collected in the vacuum chamber 12, and one or more second components, which differ from the first components, may be condensed and collected in the first vacuum chamber 8.
- the second vacuum chamber 12 may include a vapor coater for depositing at least a portion of a vapor flow on a substrate.
- vapor coaters useful in the system 2 of the present disclosure may include a rotating process drum and a plurality of rollers configured for unwinding a substrate (e.g., a rolled web of material), passing the un-wound substrate over a surface of the process drum, and re -winding the substrate.
- Useful vapor coaters may also include a vapor nozzle, in fluid communication with a vapor source, configured to deposit (e.g., by condensation, CVD reaction, plasma deposition) a vapor onto a surface of the substrate as it is passed over a surface of the process drum.
- a vapor coater for use in the system 2 may include a first roll 32 configured to direct a substrate 34 around a rotatable process drum 36, and a second roll 38 configured to re-wind the substrate.
- the vapor coater may further include one or more vapor nozzles 42 positioned proximate a surface 43 of the rotatable process drum 36.
- the vapor nozzles 42 may be configured to deposit/condense a vapor onto a surface of the substrate 34 as it is passed over the process drum 36.
- the vapor nozzles 42 may be fluidically coupled to the fluid pathway 6, particularly, the vapor feed conduit 6c.
- the rotatable process drum 36 may be provided with a heat transfer fluid circulation such that at least the surface 43 is temperature controlled, thereby promoting condensation, reaction, and/or other form of deposition of vapor onto the substrate 34.
- the vapor coater may further include one or more curing sources 44.
- the curing sources 44 may be positioned within the vapor coater such that following vapor deposition/condensation, the substrate 34 may be exposed to a treatment delivered from the curing sources 44.
- Curing sources 44 useful in the systems of the present disclosure include one or more of, for example, heat sources, ultraviolet radiation sources, e-beam radiation sources, and plasma radiation sources.
- the vapor coater may, in addition to the one or more vapor coating processes, include other deposition processes.
- polypropylene various polyesters (e.g. polyethylene terephthalate, fluorene polyester), polymethylmethacrylate and other polymers such as polyethylene naphthalate, polyethersulphone, polyestercarbonate, polyetherimide, polyarylate, polyimide, vinyls, cellulose acetates, and fluoropolymers.
- polyesters e.g. polyethylene terephthalate, fluorene polyester
- polymethylmethacrylate e.g. polyethylene naphthalate, polyethersulphone, polyestercarbonate, polyetherimide, polyarylate, polyimide, vinyls, cellulose acetates, and fluoropolymers.
- the substrate 34 is a discrete part rather than a continuous roll of film.
- the discrete part may move past the vapor nozzle 42, or the discrete part may be stationary during the coating process.
- Suitable discrete substrates include silicon wafers, electronic or optical devices, glass, metal, and plastic parts.
- the present disclosure further relates to methods for processing vapor such as, for example, monitoring and controlling a flow of vapor generated by a vapor source.
- the methods for processing vapor may be carried out utilizing the system of FIG. 1.
- the positions of the bypass control valve 16 and the feed control valve 18 may be such that, at the initial vapor flow rate, a pressure within the fluid pathway 6 is at a predetermined pressure setpoint. Assuming the positions of the bypass control valve 16 and the feed control valve 18 are maintained (and constant temperature), at the initial vapor flow rate, the pressure setpoint may be maintained within the fluid pathway 6. Moreover, the flow rates of vapor through the fluid pathway 6, including the vapor bypass conduit 6b and the vapor feed conduit 6c, may be substantially maintained at an initial value. [00040] The vapor generation rate of the vapor source 4 may fluctuate, thereby causing a momentary increase/decrease of the vapor flow rate and pressure within the outlet conduit 6a and, in turn, the bypass conduit 6b and the feed conduit 6c.
- the controller 22 may accomplish this by, for example, modulating the positions of either or both of the bypass control valve 16 and the feed control valve 18 such that the a pressure of the vapor at a position within the flow system 6 is maintained at the predetermined pressure set point.
- the systems and methods of the present disclosure may allow for precise control of the pressure and flow rates of vapor passing through the bypass conduit 6b and the feed conduits 6c.
- the methods of the present disclosure further include deposition of at least a portion of the vapor transported into the vacuum chamber 12 from the feed conduit 6c onto a substrate.
- the method may include unwinding the substrate 34 from the first roll 32 and onto the surface 43 of the process drum 36, such that the substrate 34 is in intimate contact with the drum surface 43.
- the substrate 32 may move past the vapor nozzle 42.
- the vapor nozzle 42 may project vapor, which is being supplied at a precisely controlled pressure and flow rate through the feed conduit 6c, onto the substrate 34 where it may deposited by, for example, condensation, CVD reaction, or plasma deposition.
- condensed fluid deposited on the substrate 34 may move past the curing source 44, which may apply a curing treatment to form a cured coating layer on the substrate.
- the coated substrate may then be re -wound on the second roll 38.
- the flow rate and pressure of the vapor being transported in the feed conduit 6c and, thus the deposition rate onto the substrate 34 may be precisely controlled irrespective of fluctuations or perturbations in the rate vapor is being supplied from the vapor source 4.
- the vapor may be deposited onto the substrate 34 with very small variations in thickness over the length of the substrate 34.
- flow of vapor to the vapor coater may be eliminated during start up and shut down phases of the vapor source 4, thereby reducing the amount of substrate wasted during the start up and shut down phases.
- the methods of the present disclosure further include condensing at least a portion of the vapor transported into the vacuum chamber 12 from the feed conduit 6c.
- the method may include operating the condensing chamber at a pressure that is above the vapor pressure of any or all of the components of the vapor being transported from the vapor feed conduit 6c, condensing at least a portion of the vapor, and collecting the condensed vapor in a collector.
- the vapor processing systems and methods of the present disclosure may be carried at pressures within the fluid pathway 6 as low as 1000 mTorr, 100 mTorr, 1 mTorr, 0.1 mTorr, or even as low as as 0.001 mTorr. Pressures within the fluid pathway 6 may be as high as 1 Torr, 10 Torr, 100 Torr, 500 Torr, or even as high as 760 Torr.
- the vapor processing systems and methods of the present disclosure may be carried at vapor flow rates as low as 1 g/min, 0.1 g/min or even as low as 0.001 g/min.
- the vapor flow rates may be as high as 100 g/min, 1 kg/min, or even as high as 50 kg/min. In one embodiment, the vapor flow rate ranges from 1-50 g/min.
- the systems and methods of the present disclosure may be run at substrate line speeds as low as 10, 1, or even as low as 0.1 feet/minute (3.0, 0.3 or 0.03 m/min.).
- Substrate line speeds may be as high as 10, 100, or even as high as 2000 feet/minute (3.0, 30.5 or 609.6 m/min.). In one embodiment, the substrate line speed ranges from 10-300 feet/minute 3.0 - 304.8 m/min.).
- the systems and methods of the present disclosure may achieve coating thicknesses as low as 100, 10, or even as low as 0.1 nm.
- the coating thicknesses may be as high as 1, 25, or even as high as 50 ⁇ .
- the coating thicknesses may range from 0.1-10,000 nm, 1-5000 nm, or 10 - 1000 nm.
- the system and methods of the present disclosure allow for precise control of the pressures and flows of vapor entering the second vacuum chamber 12 and, thus in embodiments in which the second vacuum chamber 12 includes a vapor coater, precise control of the deposition rate of the vapor onto a substrate.
- Such precise control of deposition rate allows for the deposition of coatings having very small variations in thickness over the length of the substrate (i.e, the longitudinal dimension of the substrate).
- the systems and methods of the present disclosure may produce coated substrates having a variation in coating thickness of less than 20%, 5%, or even less than 1 % over lengths of substrate as high as 10, 1000, or even as high as 10,000 feet.
- the systems and methods of the present disclosure may be used to produce single or multi-layer films for applications such as optical films (reflectors, antireflection, absorbers, colored, optically variable, optical filters, optical interference filters, infrared reflectors), EMI (Electromagnetic Interference) filters, release coatings, transparent conductive films, capacitors, sensors, heat seal packaging, and display films.
- optical films reflectors, antireflection, absorbers, colored, optically variable, optical filters, optical interference filters, infrared reflectors), EMI (Electromagnetic Interference) filters, release coatings, transparent conductive films, capacitors, sensors, heat seal packaging, and display films.
- EMI Electromagnetic Interference
- the systems and methods of the present disclosure may further be used to produce coated substrates which, when combined with additional layers of, for example, metals or metal oxides, limit permeation of gases such as oxygen and water vapor.
- barrier films and processes for the preparation of barrier films may be found, for example in the following patents and publications, incorporated by reference herein in their entireties: U.S. Pat. No. 5,440,446 (Shaw, et al.); U.S. Pat. No. 5,725,909 (Shaw et al.); U.S. Pat. No. 6,231,939 (Shaw et al.); U.S. Pat. No. 6,420,003 (Shaw et al.); U.S. Pat. No. 4,647,818 (Ham); U.S. Pat. No. 4,696,719
- barrier films are useful in the manufacture of many products, for example, as packaging for food and drugs and for the protection of environmentally sensitive electronic devices. Electronic devices that degrade when exposed to environmental moisture and oxygen are often protected from exposure by encasing the device in glass.
- a particularly useful application of barrier films made by the process disclosed herein includes protection for electronic display and signage devices, such as liquid crystal displays (LCDs), light emitting diodes (LEDs), organic light emitting diodes (OLEDs), light emitting polymers (LEPs), electrochromic, electrophoretic inks, inorganic electroluminescent devices, phosphorescent devices, and the like.
- barrier films produce at least in part by the systems and methods of the present disclosure include the protection of solar cells, photovoltaics, micro-electronics, organic micro-electronic devices (OMED), nano-devices, and nano-structures. Still other useful applications for such barrier films include bio-active devices such as those used in analytical measurements of bio-active materials, bio-active-micro-electronic devices used for analysis or separations.
- the barrier films may be flexible, making possible the production of flexible displays, electrical devices, and bio-active devices.
- the coating precursor solution was placed in a temperature controlled supply tank and preheated to a temperature of 100°C.
- the coating precursor solution was fed, using a liquid flow controller, from the supply tank to a vapor source, as generally described in the present disclosure, at a rate of 8.0 ml/min (it is believed that the type of vapor source does not have an appreciable impact on coating performance).
- the vapor source was vented to a fluid conduit that separated the vapor flow into 2 channels: a bypass conduit connected to a condenser (operated at - 10°C) and a feed conduit connected to a vapor nozzle of a vapor coater (configured similarly to the vapor coater described with respect to FIG. 1 of the present disclosure).
- the coating precursor was discharged from the nozzle onto the substrate travelling at a constant line speed (16 feet per minute (4.9 m/min.)).
- the process drum temperature was maintained at 0°C.
- the substrate was subsequently passed under an electron beam operating at 9.0 kV and 4.0 mA to effect curing.
- the coating thickness was controlled using the vapor control valve to regulate the pressure of vapor in the fluid conduit.
- the vapor control valve was programmed to maintain a pressure setpoint in the fluid conduit, and different pressure setpoints were selected as listed in Table 1.
- the transmission and reflectance of the coating and the substrate were measured at a downstream location using an online optical spectrophotometer. Thickness was determined based upon the location of interference peak maxima and minima across the spectrum from 400 to 850 nm measured using the spectrophotomer.
- FIG. 2 illustrates a plot of the mean coating thickness versus pressure set point observed in Examples 1-5. A linear relationship between the vapor pressure and the coating thickness was observed:
- a coating precursor solution of difunctional acrylate monomer (SR833S) and 250 ppm of a polymerization inhibitor was vaporized and coated at a coating width of 12.5 inches (318 mm) onto a substrate (2-mil (51 ⁇ ) PET, 14-inches (356 mm) wide) as in Examples 1-5, except that: 4 wt% of N-n-Butyl-Aza-2,2-Dimethoxysilacyclopentane (Gelest) was added to the precursor formulation; the electron beam was operated at 7.0 kV and 3.0 mA; and the vapor control valve was operated to maintain the pressure at 95 mtorr.
- Figure 3 is a plot of both vapor pressure and measured coated thickness, as a function of substrate web position in a longitudinal, or down-web direction, observed in Example 6.
- the mean thickness was 771 nm with a standard deviation of 14.8 nm.
- the coefficient of variance (COV) was 0.019, substantially less than the COV of the liquid flowrate into the vapor source (liquid flowrate mean 7.90 ml/min, standard deviation 0.334 ml/min, COV 0.042). This demonstrates that the vapor control valve substantially reduced the variation in the coating thickness relative to the variation in the input flow rate of the liquid.
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Abstract
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CN201280038700.9A CN103732792B (en) | 2011-08-05 | 2012-08-01 | For processing the system and method for steam |
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KR1020147005711A KR102040758B1 (en) | 2011-08-05 | 2012-08-01 | Systems and methods for processing vapor |
JP2014524046A JP6559423B2 (en) | 2011-08-05 | 2012-08-01 | System and method for treating steam |
EP12821620.7A EP2739765B1 (en) | 2011-08-05 | 2012-08-01 | Systems and methods for processing vapor |
US14/232,671 US9302291B2 (en) | 2011-08-05 | 2012-08-01 | Systems and methods for processing vapor |
US15/051,761 US20160168702A1 (en) | 2011-08-05 | 2016-02-24 | Systems and methods for processing vapor |
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JP2014162969A (en) * | 2013-02-27 | 2014-09-08 | Hitachi Zosen Corp | Vapor deposition apparatus and vapor deposition method |
CN105765101A (en) * | 2013-11-16 | 2016-07-13 | 纽升股份有限公司 | Method for monitoring Se vapor in vacuum reactor apparatus |
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WO2013022669A3 (en) | 2013-04-25 |
EP2739765B1 (en) | 2019-01-16 |
JP2014521839A (en) | 2014-08-28 |
CN103732792A (en) | 2014-04-16 |
US20160168702A1 (en) | 2016-06-16 |
JP6559423B2 (en) | 2019-08-14 |
KR20140064829A (en) | 2014-05-28 |
BR112014002320A2 (en) | 2017-03-01 |
CN103732792B (en) | 2016-06-29 |
KR102040758B1 (en) | 2019-11-05 |
US9302291B2 (en) | 2016-04-05 |
EP2739765A4 (en) | 2015-03-25 |
US20140178567A1 (en) | 2014-06-26 |
EP2739765A2 (en) | 2014-06-11 |
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