WO2012173130A1

WO2012173130A1 - Liquid analyser

Info

Publication number: WO2012173130A1
Application number: PCT/JP2012/065072
Authority: WO
Inventors: ケネディオケヨ; 足立　作一郎; 原田　邦男
Original assignee: 株式会社日立製作所
Priority date: 2011-06-17
Filing date: 2012-06-13
Publication date: 2012-12-20
Also published as: JPWO2012173130A1

Abstract

There is a problem with scattering light when an absorbance measurement is conducted on a scattering substance in a liquid transport device, and an accurate absorbance measurement is difficult to perform. In order to solve this problem, an embodiment of the present invention is configured to be able to reduce scattering light and conduct an accurate absorbance measurement by providing an electrode with a measuring slit on two substrates making up the liquid transport device. This embodiment of the present invention is also configured to provide a positioning mechanism for the slits on the two substrates. In this way, the absorbance of a sample including a scattering substance can be measured accurately. Highly accurate slit positioning can also be performed.

Description

Liquid analyzer

The invention relates to a system for operating a liquid on a substrate. In particular, the present invention relates to a liquid analyzer or reaction system for conveying and analyzing a large number of liquids.

In biochemical analyzers, conventionally, specimens and reagents are dispensed in a plastic or glass reaction vessel, and light is applied to a reaction solution obtained by mixing these to measure the amount of components. However, in recent years, in order to reduce reagent costs and reduce the burden on the environment, it has been required to reduce the amount of reaction solution used for analysis. Note: There was a problem that accurate measurement could not be performed due to bubbles generated during mixing. Therefore, there has been a demand for a technique for accurately operating a minute amount of liquid and analyzing it with high accuracy.

One method of manipulating a small amount of liquid (droplet) is to place a droplet on an electrode formed on a flat substrate and transport it by electrical control. As a typical method, two substrates on which a plurality of electrodes are formed are arranged facing each other at a constant interval, a droplet to be conveyed is sandwiched between both substrates, and a voltage is applied to the electrodes. There is a method of conveying a liquid by applying (for example, Non-Patent Documents 1 and 2). In this method, normally, a plurality of electrodes are formed on the surface of the two substrates in contact with the droplets along the liquid conveyance path formed of the electrode array for conveying the droplets. When a constant voltage is applied to the electrode on one side of the two substrates and the electrode on the other side of the substrate, the electrowetting phenomenon improves the wettability of the electrode to which the ground and voltage are applied, and the droplet Move. By repeating this process, droplets can be transported along the electrode array. Here, such a device for transporting droplets is called a liquid transport device. In addition to being able to operate a small amount of liquid with a high degree of freedom, the liquid transfer device has advantages such as being less susceptible to air bubbles because it uses a substrate than a container surrounded by a wall.

An analyzer that detects and analyzes the amount of components contained in a sample generally irradiates the reaction solution, which is a mixture of the sample and reagent, with white light from a halogen lamp or the like, and uses the light transmitted through the reaction solution. A configuration is widely used in which a necessary wavelength component is extracted by spectroscopic analysis with a diffraction grating and the absorbance is calculated. Alternatively, the reaction solution may be irradiated after white light is separated by a diffraction grating. The optical path length, which is the light transmission distance of the liquid in this analyzer, is usually about 5 to 10 mm. On the other hand, in a liquid analyzer using a liquid transport device, the optical path length is as short as less than 1 mm, and securing the light amount and absorbance is a problem when the device is used as the above-described analyzer. So far, a liquid analyzer using a liquid transport device has been reported (Non-patent Document 3) (Patent Document 1) (Patent Document 2) (Patent Document 3) (Patent Document 4).

Special table 2010-521676 Special table 2010-503516 Special table 2009-534653 JP 2006-317363 A

In the above-described liquid analyzer, the distance between the two substrates arranged opposite to each other is as narrow as 1 mm or less, and when measuring absorbance, the optical path length is short, so that the amount of signal obtained is reduced. For this reason, an optical system is built that increases the irradiation angle width of the light that irradiates the sample and the light reception angle width that captures the light from the sample so that the light receiver can receive more light from the light source. For example, in the liquid analyzer described above, a mechanism has been reported in which an opening is provided in a part of the electrode of the substrate on the light source side and the substrate on the light receiver side is made transparent. With this configuration, a large amount of light can be secured, so that variations in measurement can be reduced. However, the configuration in which the opening is provided in the electrode of the substrate on the light source side can cut the stray light derived from the light source, but cannot reduce the scattered stray light generated in the sample. Therefore, there are immunoturbidimetric measurement, latex immunoturbidimetric measurement, and turbidity measurement including Escherichia coli among the applications of the liquid transport device as an analyzer, but in the case of measurement of samples containing these scatterers, Then, the transmitted light should be received and the absorbance measurement should be performed, but the scattered light once scattered enters the light receiver, and the correct absorbance cannot be obtained.

In the present invention, an electrode with a slit (slit electrode) in which an electrode and a slit are integrated is provided on both the substrate on the light source side and the substrate on the light receiver side as a configuration capable of obtaining an accurate absorbance measurement. The basic configuration is shown in FIG. Specifically, the lower substrate 20 on the light source 101 side has a plurality of control electrodes 21, and at least one of the control electrodes is provided with an electrode 22 with a slit including the first slit 1. The insulating film 23 is disposed between the attached control electrode 22 and the liquid 30, and the first slit 1 and at least a part thereof are also formed on the upper substrate 10 on the side of the light receiver 102 that receives the light transmitted through the liquid 30. A counter electrode 12 with a slit including the second slit 2 that faces is provided. The droplet 30 is irradiated through the first slit 1 of the electrode 22 with the slit, and the transmitted light from the sample passes through the second slit 2 and enters the light receiver 102. There may be a plurality of electrodes with slits 22 including the first slits 1 and electrodes 12 with slits including the second slits 2. Further, since the lower substrate 20 and the upper substrate 10 transmit light, they are basically transparent to the light from the light source. However, the entire substrate does not need to be transparent, and a portion necessary for light transmission is transparent. I just need it. The control electrode with the slit and the counter electrode 12 do not transmit light and are not easily reflected.

A comparative example is shown in FIG. In this configuration, a control electrode 21 and a slit electrode 22 having a first slit 1 are arranged on a substrate 20 on the light source 101 side, and light emitted from the light source 101 through the first slit 1 is passed through a liquid 30. Irradiate the through light receiver 102. An insulating film 23 is disposed between the control electrode 21 and the control electrode 22 with slits and the liquid 30. On the other hand, the counter electrode 11 disposed on the upper substrate 10 on the light receiver 102 side is made entirely transparent, and the transmitted light of the liquid 30 as a sample is detected by the light receiver 102. In this configuration, the scattered stray light derived from the sample cannot be reduced, so the absorbance of the liquid containing the scatterer could not be measured accurately.

Next, a sphere having a diameter of 2 μm was used as a scatterer, and the absorbance and the amount of light in each configuration were obtained by a simulation of absorbance measurement. In this simulation, the absorbance of 0.5 abs was set as the target value, and the scatterer concentration and optical path were set. The results are shown in FIGS. 3 (A) and 3 (B). A comparative example is described as a one-side slit and the configuration of the present invention as a two-sided slit.

From FIG. 3 (A), the amount of light is obtained in the case of the one-side slit than in the case of the both-side slit, but as is clear from FIG. 3 (B), the absorbance in the one-side slit is 0.17 abs, It was found that the absorbance at both side slits could be measured more accurately at 0.5 abs.

Next, the dependency of the light amount and absorbance on the slit position when the position of the second slit 2 on the receiver side is gradually moved away from the liquid 30 toward the receiver was calculated. The result is shown in FIG. 0 mm is the position of the counter electrode 12 with a slit in which the second slit 2 is integrated with the counter electrode 11. That is, 0 mm is the position where the second slit 2 is in contact with the liquid 30. From FIG. 4, it is clear that the amount of light decreases as the position of the second slit 2 moves away from the liquid. It can be seen that the absorbance does not change much even if the distance increases, but decreases if the distance is excessive. For this reason, it is understood that the second slit 2 is preferably integrated with the counter electrode or as close as possible when it is desired to increase the amount of light and the absorbance. For example, if it is acceptable even if the absorbance is reduced to 2%, the position of the second slit 2 is desirably arranged within 1 mm. However, since the thickness of the upper substrate 10 is required to be approximately 1 mm, when the slits are arranged outside the upper substrate 10, the point that the amount of light decreases is disadvantageous.

From the above, it can be seen that if the second slit 2 is provided not only on the light source side but also on the light receiver side, the accuracy of absorbance measurement is improved. Furthermore, it can be seen that when the second slit 2 is integrated with the counter electrode 11, more accurate light absorbance measurement can be performed with more light. Similar results are obtained for the first slit 1. Further, the thickness of the insulating film is about several hundred nanometers, and the integrated electrode 22 with slits as shown in FIG. 1 is optically the same state that the electrode with slits is almost in contact with the liquid 30. You may think.

On the other hand, when slits are provided in each of the lower substrate 20 and the upper substrate 10, the alignment of the slits on both sides is important. As described above, the size of the slit is reduced to about 100 μm square by reducing the size of the slit due to the miniaturization. In that case, it is considered that the alignment accuracy of the second slits 2 and the first slits 1 on both substrates must be approximately 10 μm or less in order to ensure the light quantity and perform accurate measurement. When the slit is integrated with the electrode, it is possible to provide an alignment mechanism for the semiconductor process used to form the electrode array on the same substrate, and the slit position can be adjusted simultaneously when aligning the substrate. In addition, the position can be easily adjusted, the amount of light is ensured, and an accurate absorbance measurement is possible.

The accuracy of absorbance measurement is improved by providing slits on both the light source side and the light receiver side. By providing a slit integrated with the electrode on the substrate on the light receiver side, the absorbance of the sample including the scatterer can be accurately measured. Furthermore, it becomes possible to perform highly accurate slit alignment.

Illustration of electrode slits on both sides Illustration of electrode slit one side configuration Absorbance and light intensity simulation results Simulation results of the dependency of absorbance and light quantity on slit position Overview of liquid analyzer Cross-sectional view of liquid device transport path Cross section of detection unit of liquid analyzer Explanatory drawing of slit alignment mechanism using fitting port Explanatory drawing of slit alignment mechanism based on two sides of device Explanatory drawing of slit alignment mechanism using alignment marks

In the present embodiment, the configuration of a measurement unit in an analysis system that performs absorbance measurement will be described.

Fig. 5 shows the configuration of the aforementioned analysis system. The liquid analyzer measures the components inside the liquid transport device 100, the introduction unit 80 for introducing the specimen 28 and the reagent 29 into the liquid transport device 100, and the sample (droplet 30) in which the specimen 28 and the reagent 29 are mixed. A detection unit 90 for discharging the liquid droplets 30 and a discharge unit 70 for discharging the droplets 30 from the liquid transport device 100.

In the introduction unit 80, a specimen 28 and a reagent 29 containing a latex reagent as a scatterer are accommodated in a reagent tank, and the specimen 28 and the reagent 29 are sequentially introduced into the liquid transport device 100 from the introduction port 82 by the probe 81. 28 and the reagent 29 are mixed and stirred to form a droplet 30 as a sample. The detection unit 90 is installed adjacent to the detection unit installed in at least a part of the liquid transport path through which the liquid droplet 30 is transported and discharged to the liquid transport device 100. A sipper 71 and a waste liquid tank 73 are disposed in the discharge unit 70, and the droplets 30 conveyed to the discharge port 72 can be discharged from the liquid transfer device 100 to the waste liquid tank 73 by the sipper 71. The introduction port 82 and the discharge port 72 may be holes provided on both sides of the upper substrate 10 as shown in FIG.

Next, the configuration of the liquid transport device 100 used in the present embodiment is shown in FIG. The liquid transport device 100 is configured by arranging a lower substrate 20 having a thickness of 2 mm and an upper substrate 10 having a thickness of 1 mm so as to form a gap 31 having a spacing of 0.5 mm. The gap 31 was filled with a silicone oil 40 having a viscosity of 2 cSt as a medium. Since the silicone oil 40 can prevent the droplets 30 from evaporating, the silicone oil 40 is preferably used in the case of a solution in which the droplets 30 are easily evaporated. A plurality of square control electrodes 21 each having a size of 1.5 mm square were disposed on the lower substrate 20, and the surface of these control electrodes 21 was covered with an insulating film 23 having a thickness of 300 mm. One or more counter electrodes 11 are arranged on the upper substrate 10. The thicknesses of the control electrode 21 and the counter electrode 11 were 200 nm. In order to control the liquid conveyance, a voltage control unit including a power source 121, a wiring 122, and a switch 120 for controlling ON / OFF of the voltage to each control electrode 21 is also provided. Normally, by applying the voltage to the control electrode 21 with the counter electrode 11 as the ground, a voltage difference is generated between the upper substrate and the lower substrate, so that the droplet 30 can be transported. The droplet 30 to be conveyed was placed on one or more control electrodes 21 and moved by sequentially applying a voltage of 25 V to the control electrode 21. The surfaces of the insulating film 23 and the counter electrode 11 were subjected to a water repellency treatment so that the droplets 30 were easy to move.

In this embodiment, quartz is used for the lower substrate 20 and the upper substrate 10, but silicon may also be used. For example, when silicon is used for the lower substrate 20, it is necessary to provide the silicon substrate with an opening leading to the first slit 1. As a method for this, silicon dioxide is formed on the silicon surface by using a generally known semiconductor technology. There is a method in which after forming a light-transmitting film such as silicon, the silicon at the location of the opening is locally removed by anisotropic etching or the like to leave the light-transmitting film as the opening. The same applies when silicon is used for the upper substrate 10. Further, the control electrode 21 and the counter electrode 11 are made of chrome having a thickness of 200 nm and formed by a semiconductor technique represented by a lithography method. Silicon dioxide (SiO ₂ ) was used for the insulating film 23 and was formed by CVD (Chemical Vapor Deposition). In this embodiment, silicon dioxide is used, but insulating materials such as parylene C, silicon nitride, and amorphous fluororesin (amorphous fluoropolymer) may be used.

Prior to the measurement, the specimen 28 and the reagent 29 containing latex particles having a diameter of 2 μm are introduced into the transport device 100, the voltage is applied to the control electrode 21 to control the introduced liquid, and the specimen 28 and the reagent 29 are transported within the device. Mixing and reaction were performed to form droplets 30. Next, by sandwiching the voltage between the lower substrate 20 and the upper substrate 10 and applying a voltage to the control electrode 21 disposed on the lower substrate 20, the liquid up to the detection unit 90 including the light source 101, the light receiver 102, and the electrode 22 with the slit is obtained. Drop 30 was conveyed.

FIG. 7 is a cross-sectional view showing the positional relationship between the detection unit 90 and the liquid transport device 100. The detection unit 90 includes a light source 101, a light receiver 102, and a lens 103. The upper substrate 10 provided with the second slit 2 and the counter electrode 12 with slit is disposed on the light receiver 102 side, and the lower substrate 20 provided with the first slit 1 and the electrode 22 with slit is disposed on the light source 101 side. ing. In the optical path design, the two substrates sandwiching the droplet 30 are arranged between the light source 101 and the light receiver 102, and the light 104 from the light source 101 is collected by the lens 103 and is provided on the electrode 22 with the slit. It was made to enter the droplet 30 through the slit 1. Further, the light 104 that has passed through the droplet 30 passes through the second slit 2 provided in the counter electrode 12 with slit, and is condensed by the lens 103 and reaches the light receiver 102. Actually, using the configuration shown in FIG. 7, the absorbance of the liquid 30 obtained by mixing and stirring the specimen 28 containing latex particles having a diameter of 2 μm and the reagent 29 was measured. At the time of measurement, the voltage controller fixes the liquid 30 by applying a voltage between the electrode 22 with the slit and the counter electrode 12 with the slit at least while the liquid 30 is irradiated with light. 30 did not move carelessly, and stable measurement became possible. Note that the first slit 1 and the second slit 2 are paired, and a plurality of both the slit electrode 22 and the slit electrode 22 and the slit electrode 12 may be provided. Although the case where the first slit electrode is provided on the light source side and the second counter electrode with a slit is provided on the light receiver side is shown here, measurement is possible even if the positions of the light source and the light receiver are switched.

In this embodiment, the electrode 22 with the slit is a square having a thickness of 200 nm and a size of 1.5 mm square, and is the same as the adjacent control electrode 21. In addition, the size of the first slit 1 is set to 1/3 of the area of the electrode 22 with a slit and a square with a width of 0.5 mm square so that the electrode 22 with the slit can be used for both conveyance and measurement. Further, the size of the second slit 2 is the same as that of the first slit 1 and is a square of 0.5 mm square. The shape of the slit is not limited to a square, but may be a rectangle, other polygons, or a circle. As a result, both conveyance and measurement were realized. Chrome is used for the electrode 22 with slit and the counter electrode 12 with slit, but other opaque metal materials such as aluminum may be used. Other opaque conductive materials may also be used. As for the electrode without a slit, a transparent electrode may be used so that the position of the liquid can be seen from the substrate. By providing a slit integrated with the electrode on the substrate on the light receiver side, the absorbance of the sample containing the scatterer could be accurately measured.

Alignment of the slits by mechanical assembly becomes difficult due to the reduction of the slit size due to the small amount of liquid transported. In this embodiment, a description will be given of an alignment mechanism for adjusting the slit position error to 10 μm or less when the slits on both substrates are 0.1 mm square square. The size of the electrode 22 with slits, the first slit 1 and the second slit 2 was the same as described above.

One form of this embodiment is shown in FIG. As shown in FIG. 8A, in this embodiment, the fitting opening 200 is formed at an arbitrary tip of the lower substrate 20 including the first slit 1 by a semiconductor process used for electrode formation. Further, the fitting opening 200 was formed at an arbitrary tip of the upper substrate 10 including the second slit 2 by the same semiconductor process. The distance XE from the first slit 1 and the second slit 2 of the upper and lower substrates to the insertion opening 200 was made the same as 10 mm. As one method for setting this condition, a distance XE = 10 mm is taken from one side of the slit to an arbitrary tip of the substrate, and a fitting port 200 is formed at that position. Although dry etching is used to form the insertion hole with high accuracy, a semiconductor process such as wet etching or dicing may be used. Next, as shown in FIG. 8B, a spacer 201 having a shape that fits into the fitting opening 200 was fitted into the fitting openings of the substrates on both sides, and the positions of the slits were adjusted. As a result, the slit position error ΔL defined by the shift of the vertical center line of each of the two first slits 1 and the second slit 2 can be suppressed to 10 μm or less. The spacer 201 also serves to make the gap 31 constant.

In this way, by providing an alignment mechanism that reduces the slit position error, the amount of light was secured and accurate absorbance measurement could be performed.

Furthermore, a spacer having a step may be used for positioning the upper and lower substrates. Details are shown in FIGS. 9A to 9C. In this alignment mechanism, the two sides of the upper substrate and the lower substrate were processed with high accuracy and used for alignment. This time, dicing was used for processing, but the substrate may be gradually sharpened with a scissors or the like to finally match with accuracy. As shown in FIG. 9A, out of the four sides of the upper substrate 10 including the second slit 2 and the counter electrode 12 with the slit, the two

sides

306 and 307 constituting one end of the substrate are accurately defined. processed. In other words, the processing positions of the

sides

306 and 307 are set to positions where the distances XE and YE are determined with reference to two sides that form the second slit 2 and are orthogonal to each other. The width distances XE and YE were 10 mm and 5 mm respectively. Instead of the side of the second slit 2, the horizontal axis 305 and the vertical axis 304 passing through the center of the slit may be used as a reference. In that case, the

sides

306 and 307 corresponding to the distances may be processed at the positions of the distances XC and YC shown in FIG.

Also, the two

sides

308 and 309 were processed for the lower substrate 20 shown in FIG. 9B by the same procedure as that for the upper substrate 10. Again, the center line of the slit may be used as a reference. In this case, the side 308 and the side 309 may be processed based on the distance XC and the distance YC shown in FIG.

Furthermore, as shown in FIG. 9C, the spacers 310 are placed in contact with two processed sides (for example, the side 306 and the side 308) of the substrates on both sides, so that the upper substrate 10 and the lower substrate 20 are formed. The positions of the two sides coincide vertically, and the first slit 1 and the second slit 2 can be aligned. The spacers 310 may be installed on both sides to serve as a constant substrate interval. Thus, by processing the end face with high accuracy, the first slit 1 and the second slit 2 can be aligned with high accuracy and simply, and accurate absorbance measurement can be performed.

Also, positioning marks may be used for positioning the upper and lower substrates. Details are shown in FIGS. 10 (A) to 10 (C). 10A is a plan view of the upper substrate 10 including the second slit 2 and the counter electrode 12 with the slit, and FIG. 10B includes the first slit 1, the electrode 22 with the slit, and the control electrode 21. The top view of a lower board | substrate is shown. As shown in FIG. 10A, 210 and 211 are provided as two or more alignment marks for positioning the slit in the upper substrate 10, and similarly, two or more alignment marks 212 are also provided in the lower substrate 20. And 213, which correspond to the alignment marks on the upper substrate. That is, the alignment marks of the upper substrate 10 and the lower substrate 20 form a pair (210 → 213, 211 → 212). The alignment mark may be formed by a process similar to that of the counter electrode 11 or the control electrode 21, and may be formed by a general semiconductor process (dry etching, wet etching, etc.) used for forming the electrode. Since the vertical direction and the horizontal direction are easily determined, the shape of the alignment mark is a cross shape here, but other shapes (circular shape, polygonal shape, etc.) may be used.

Next, FIG. 10C shows a cross-sectional view of the liquid transport device including the droplets 30, and the alignment will be described based on the cross-sectional view. As shown in FIG. 10C, the upper substrate 10 including the second slit 2 and the counter electrode 12 with the slit and the lower substrate 20 including the first slit 1, the electrode 22 with the slit, and the control electrode 21 are faced to each other. Arranged. At that time, as indicated by

arrows

214 and 214 in FIG. 10C, the alignment marks of the paired substrates are arranged in a straight line. That is, the alignment mark 210 of the upper substrate and the alignment mark 212 of the lower substrate are aligned, and similarly, the alignment mark 211 of the upper substrate 10 and the alignment mark 213 of the lower substrate 20 corresponding thereto are aligned. If the alignment mark is small, the alignment marks on both substrates may be matched using a microscope or the like, but it is usually sufficient to form the alignment mark large so that the alignment can be made visually. By using the alignment mark as described above, the alignment of the first slit 1 and the second slit 2 can be easily performed with high accuracy, and accurate absorbance measurement can be performed.

DESCRIPTION OF SYMBOLS 1 ... 1st slit, 2 ... 2nd slit, 10 ... Upper substrate, 11 ... Counter electrode, 12 ... Counter electrode with slit, 20 ... Lower substrate, 21 ... Control electrode, 22 ... Electrode with slit, 23 ... Insulation Membrane, 28 ... specimen, 29 ... reagent, 30 ... liquid, 31 ... gap, 40 ... oil, 70 ... discharge unit, 71 ... sipper, 72 ... discharge port, 73 ... liquid tank, 80 ... introduction unit, 81 ... probe, DESCRIPTION OF SYMBOLS 82 ... Introduction port, 90 ... Detection unit, 100 ... Liquid conveyance device, 101 ... Light source, 102 ... Light receiver, 103 ... Lens, 104 ... Light, 121 ... Power supply, 122 ... Wiring, 120 ... Switch, 200 ... Insertion port, 201 ... spacer, 210 ... alignment mark, 211 ... alignment mark, 212 ... alignment mark, 213 ... alignment mark, 214 ... arrow, 304 ... vertical axis , 305 ... horizontal axis, 306 ... of the upper substrate side, 307 ... of the upper substrate side, 308 ... of the lower substrate side, 309 ... of the lower substrate side, 310 ... spacer

Claims

A first substrate;
A plurality of control electrodes provided on the first substrate;
A first slit provided in at least one of the plurality of control electrodes;
A second substrate disposed with a certain gap from the first substrate;
A counter electrode provided on the second substrate;
A second slit provided in the counter electrode so that at least part of the first slit faces the first slit;
A voltage control unit that controls transport of a liquid disposed between the first substrate and the second substrate by controlling a voltage between each of the plurality of control electrodes and the counter electrode;
A light source;
A liquid analyzer comprising: a light receiver that detects light emitted from the light source and passed through the first slit and the second slit.
2. The liquid according to claim 1, wherein the control electrode having the first slit and the counter electrode having the second slit are formed of a conductive material that is opaque to light from the light source. Analysis equipment.
While the voltage control unit irradiates the liquid with light from the light source and detects the light with the light receiver, the voltage control unit is provided between the control electrode having the first slit and the counter electrode having the second slit. The liquid analyzer according to claim 1, wherein a voltage is applied.
The liquid analyzer according to claim 1, further comprising a positioning mechanism for aligning the positions of the first slit and the second slit.
The positioning mechanism includes a first insertion port provided at one or both ends of the first substrate and a second insertion port provided at one or both ends of the second substrate. 4. The liquid analyzer according to 4.
6. The liquid analyzer according to claim 5, wherein a distance from the first slit to the first insertion port is equal to a distance from the second slit to the second insertion port.
6. The processing positions of the first and second insertion holes are processed on the basis of one side of the first and second slits and another side different from the one side. Liquid analyzer.
6. The liquid analyzer according to claim 5, wherein the processing positions of the first and second insertion ports are processed based on the centers of the first and second slits.
5. The liquid analyzer according to claim 4, wherein the positioning mechanism is a visible alignment mark provided on each of the first substrate and the second substrate.
The liquid analyzer according to claim 1, further comprising:
Means for supplying the liquid;
Introducing means for introducing the liquid into the gap between the first and second substrates from the means for supplying the liquid;
And a means for discharging the liquid from a gap between the first and second substrates.