WO2012165791A3 - Scanning thermal microscope and method for temperature profiling using same - Google Patents

Scanning thermal microscope and method for temperature profiling using same Download PDF

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Publication number
WO2012165791A3
WO2012165791A3 PCT/KR2012/004007 KR2012004007W WO2012165791A3 WO 2012165791 A3 WO2012165791 A3 WO 2012165791A3 KR 2012004007 W KR2012004007 W KR 2012004007W WO 2012165791 A3 WO2012165791 A3 WO 2012165791A3
Authority
WO
WIPO (PCT)
Prior art keywords
sample
probe
pointed end
scanning
driving
Prior art date
Application number
PCT/KR2012/004007
Other languages
French (fr)
Korean (ko)
Other versions
WO2012165791A2 (en
Inventor
권오명
정재훈
김경태
황광석
Original Assignee
고려대학교 산학협력단
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 고려대학교 산학협력단 filed Critical 고려대학교 산학협력단
Publication of WO2012165791A2 publication Critical patent/WO2012165791A2/en
Publication of WO2012165791A3 publication Critical patent/WO2012165791A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/58—SThM [Scanning Thermal Microscopy] or apparatus therefor, e.g. SThM probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K13/00—Thermometers specially adapted for specific purposes
    • G01K13/12—Thermometers specially adapted for specific purposes combined with sampling devices for measuring temperatures of samples of materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

The present invention relates to a scanning thermal microscope for profiling quantitative temperatures and thermal characteristics of a sample by scanning the sample, and to a method for temperature profiling using same. In particular, the scanning thermal microscope of the present invention comprises: a probe having a pointed end for scanning a sample; a driving-power supply unit for heating the pointed end of the probe in order to drive the pointed end of the probe into an active mode; a driving mechanism for controlling the height position of the pointed end of the probe in order to drive the pointed end of the probe into a contact mode, in which the pointed end of the probe contacts the sample, and into a non-contact mode, in which the pointed end of the probe is spaced apart from the sample; a control unit for controlling the driving-power supply unit and the driving mechanism in order to scan the sample in each of the contact mode and the non-contact mode by driving the pointed end of the probe into the active mode or a passive mode; and a sample-temperature measuring unit for measuring the temperature of the sample using a thermoelectric voltage generated at the pointed end of the probe due to the scanning of the sample.
PCT/KR2012/004007 2011-05-30 2012-05-21 Scanning thermal microscope and method for temperature profiling using same WO2012165791A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020110051103A KR101240399B1 (en) 2011-05-30 2011-05-30 Scanning thermal microscope and temperature profiling method using the same
KR10-2011-0051103 2011-05-30

Publications (2)

Publication Number Publication Date
WO2012165791A2 WO2012165791A2 (en) 2012-12-06
WO2012165791A3 true WO2012165791A3 (en) 2013-01-17

Family

ID=47260025

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2012/004007 WO2012165791A2 (en) 2011-05-30 2012-05-21 Scanning thermal microscope and method for temperature profiling using same

Country Status (2)

Country Link
KR (1) KR101240399B1 (en)
WO (1) WO2012165791A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2532746B (en) 2014-11-26 2017-03-29 Ibm Temperature sensing
CN104614557B (en) * 2015-02-02 2017-07-18 国家纳米科学中心 A kind of material domain conductance and the measurement apparatus of thermoelectric property, measuring method and application thereof

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09325079A (en) * 1996-06-04 1997-12-16 Sony Corp Scanning temperature microscope
JP3320472B2 (en) * 1992-02-03 2002-09-03 株式会社東芝 Scanning probe device
KR100983883B1 (en) * 2008-05-02 2010-09-28 고려대학교 산학협력단 Method for measuring thermophyscal properties using scanning thermal microscope(SThM)
KR20110004925A (en) * 2009-06-29 2011-01-17 고려대학교 산학협력단 Quantitative temperature and thermal conductivity measuring method using scanning thermal microscope

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3320472B2 (en) * 1992-02-03 2002-09-03 株式会社東芝 Scanning probe device
JPH09325079A (en) * 1996-06-04 1997-12-16 Sony Corp Scanning temperature microscope
KR100983883B1 (en) * 2008-05-02 2010-09-28 고려대학교 산학협력단 Method for measuring thermophyscal properties using scanning thermal microscope(SThM)
KR20110004925A (en) * 2009-06-29 2011-01-17 고려대학교 산학협력단 Quantitative temperature and thermal conductivity measuring method using scanning thermal microscope

Also Published As

Publication number Publication date
KR101240399B1 (en) 2013-03-11
WO2012165791A2 (en) 2012-12-06
KR20120132771A (en) 2012-12-10

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