WO2012165367A1

WO2012165367A1 - Administration device, administration method, and administration program

Info

Publication number: WO2012165367A1
Application number: PCT/JP2012/063603
Authority: WO
Inventors: 潤三上; 佐藤　淳一; 靖浩稲益
Original assignee: シャープ株式会社
Priority date: 2011-06-03
Filing date: 2012-05-28
Publication date: 2012-12-06

Abstract

When a lot (M) product process is carried out in a process device which is included in a CIM system (S11), an administration device acquires process data which is a value relating to a prescribed parameter in the process (S12). The administration device stores a correspondence relation between an administration level which is associated with the process data and a control value of a process device which is positioned downstream from the process device, specifies an administration level which is associated with the process data relating to the lot (M) product, and, on the basis of the administration level, determines a control value for the product of the lot at the downstream process device (S21).

Description

Management device, management method, and management program

The present invention relates to a management device, a management method, and a management program, and more particularly to a management device, a management method, and a management program for manufacturing management.

CIM (Computer Integrated Manufacturing) is widely used as a production system. In the CIM system, a management device such as a server manages each production device.

In the process of manufacturing industrial products such as liquid crystal panels, processing is performed in lot units by a manufacturing apparatus or an inspection apparatus as a production apparatus. In the CIM system, various parameter information is transmitted from each production apparatus to the management apparatus. As this parameter information, for example, if the production apparatus is an inspection apparatus, it corresponds to various measurement results such as the number of defects in a lot and film thickness, and if it is a manufacturing apparatus, the processing time, the amount of material used, the remaining amount, Various manufacturing conditions (temperature, pressure, etc.) are applicable. This information is also referred to as process data in the following description.

When it is detected in the management device that the process data from the production device has changed, there is no other way than flowing in the normal flow when the influence on the yield is unknown.

Also, the inspection frequency is often fixed for each model.

Special table 2007-501517

Originally, from the viewpoint of securing yield, it is necessary to increase the inspection frequency when a change in process parameters is detected, and check the finish before counting the yield in the final inspection or change the process flow. it is conceivable that.

However, in the current CIM system, since such a function is not installed in the management device, the above management is not realized, and management depending on the administrator such as announcement in the process in writing is performed. It is the actual situation.

The present invention has been made in view of such problems, and provides a management apparatus, a management method, and a management program capable of improving manufacturing quality and improving yield in a CIM system. It is an object.

In order to achieve the above object, according to one aspect of the present invention, the management device includes a first process device and a second process device disposed downstream of the first process device in the product transfer direction. In a manufacturing system including a plurality of process devices, a management device for managing the plurality of process devices, communicating with each of the plurality of process devices, and processing products from each of the plurality of process devices An acquisition unit for acquiring process data that is a value related to a predetermined parameter in the process, a management level to which the process data from the first process apparatus belongs, and a second disposed downstream of the first process apparatus. A storage unit for storing a correspondence relationship with the control value of the process device; and process data from the first process device relating to a product of a predetermined lot A specifying unit for specifying a management level to be performed, a determining unit for determining a control value for a product of a predetermined lot in the second process device based on the specified management level, and the determined control And a control unit for controlling processing of a product of a predetermined lot in the second process apparatus using the value.

Preferably, the determination unit stores the boundary value of the management level as a threshold value, and determines the management level to which the process data belongs by comparing the value indicated by the process data from the first process device with the threshold value. .

Preferably, the first process device is a manufacturing device, the second process device is an inspection device, and the determination unit is based on a management level to which process data relating to a product of a predetermined lot from the manufacturing device belongs. The inspection frequency of the product of a predetermined lot is determined as a control value in the inspection apparatus.

More preferably, the management level is set stepwise from the normal production possible range in the manufacturing apparatus, and the storage unit is a management level to which the management level to which the process data from the manufacturing apparatus belongs is separated from the normal production possible range. The correspondence relationship in which the inspection frequency of the inspection apparatus increases is stored.

According to another aspect of the present invention, a management method includes a plurality of process devices including a first process device and a second process device disposed downstream of the first process device in the product conveyance direction. A process for managing a plurality of process devices in a manufacturing system including the steps of: obtaining from the first process device process data that is a value relating to a predetermined parameter in processing a product of a predetermined lot; Identifying the management level to which the process data from the first process device belongs, the management level to which the process data from the first process device belongs, and the second process device arranged downstream of the first process device The storage device storing the correspondence relationship with the control value of the second process device is accessed based on the specified management level. Comprising of determining a control value for the product lot, and controlling the processing of products of a given lot of the second process device by using the determined control value.

According to still another aspect of the present invention, the management program includes a plurality of processes including a first process device and a second process device disposed downstream of the first process device in the product conveyance direction. In a manufacturing system including an apparatus, a program for causing a management apparatus electrically connected to a plurality of process apparatuses to execute a process for managing the plurality of process apparatuses, wherein A step of acquiring process data which is a value relating to a predetermined parameter in the processing of the product, a step of specifying a management level to which the process data from the first process device belongs, and a management to which the process data from the first process device belongs The correspondence relationship between the level and the control value of the second process device arranged downstream of the first process device A step of determining a control value for a product of a predetermined lot in the second process device based on the specified management level by accessing the storage device to be stored, and a second using the determined control value And a step of controlling the processing of a product of a predetermined lot in the process apparatus.

According to the present invention, in the CIM system, the manufacturing quality can be improved and the yield can be improved.

It is a figure which shows the specific example of a structure of the CIM (Computer Integrated Manufacturing) system concerning embodiment. It is a figure showing the outline | summary of operation | movement in the CIM system concerning embodiment. It is a block diagram which shows the specific example of a function structure of the management apparatus contained in a CIM system. It is a figure showing the specific example of the relationship between the threshold value and management level which are memorize | stored in the comparison part of the management apparatus. It is a flowchart showing the flow of the operation | movement performed with a management apparatus. It is a figure showing the specific example of a response | compatibility with the process data from the manufacturing apparatus in a modification, and inspection frequency. It is a figure which shows the specific example of determination of the inspection frequency using the response | compatibility of FIG. 6A. It is a figure which shows the other specific example of a structure of a CIM system. It is a figure showing the flow of the process processing in the CIM system of the structure of FIG. It is a figure which shows the other specific example of a structure of a CIM system.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, the same parts and components are denoted by the same reference numerals. Their names and functions are also the same.

<System configuration>
FIG. 1 is a diagram illustrating a specific example of a configuration of a CIM (Computer Integrated Manufacturing) system 1 according to the present embodiment.

Referring to FIG. 1, the CIM system 1 includes a plurality of process devices for performing process processing step by step.

The process apparatus includes

manufacturing apparatuses

20A, 20B,..., 20N for manufacturing products in stages provided for each manufacturing process, and an inspection for inspecting manufactured products provided for each inspection process. Including

devices

30A, 30B,..., 30N. The

manufacturing apparatuses

20A, 20B,..., 20N are representatively referred to as the manufacturing apparatus 20, and the

inspection apparatuses

30A, 30B,.

The CIM system 1 further includes a storage device 50 for storing and storing information necessary for management in the database 51, and a management device 10 for managing these process devices.

The CIM system 1 is provided with a production line 40 for proceeding with production and inspection while conveying products. In the production line 40, a product such as a robot (not shown) is arranged, so that the product is transported in a predetermined order (direction) from the upstream side to the downstream side.

The

manufacturing apparatuses

20A, 20B,..., 20N are arranged on the production line 40 in this order from the upstream side, and produce products in stages. Thereafter, the

inspection devices

30A, 30B,..., 30N are arranged in this order from the upstream side to the downstream side of the

manufacturing devices

20A, 20B,. As the production line 40 transports the product from the upstream side to the downstream side, the product is transported to the inspection device 30N that performs the final inspection.

In the example of FIG. 1, the

manufacturing apparatuses

20A, 20B,..., 20N are arranged in series in this order from the upstream side, and the

inspection apparatuses

30A, 30B,. An example is shown that is arranged in series. However, each arrangement of the manufacturing apparatus 20 and each arrangement of the inspection apparatus 30 is not limited to the example of FIG. For example, as shown in FIG. 7, there is a case where the so-called job shop type is arranged, and manufacturing and inspection are performed in the order shown in FIG. FIG. 7 is a diagram showing another specific example of the configuration of the CIM system 1, but only the production line is shown without representing the management device and the storage device in order to facilitate the explanation.

Further, the configuration of the CIM system 1 is not limited to the one in which the manufacturing apparatus and the inspection apparatus are regularly arranged in order as shown in FIG. 1. As another example, for example, as shown in FIG. The apparatus and the inspection apparatus may be arranged irregularly (for example, alternately).

The CIM system 1 naturally includes an arrangement as shown in FIG. 7 and FIG. 8, and the CIM system 1 includes a first manufacturing apparatus 20 that is directly or second relative to the second manufacturing apparatus 20. A system is assumed that is indirectly upstream and whose manufacturing process affects the manufacturing in the second manufacturing apparatus 20.

The management device 10 can communicate with the manufacturing device 20 and the inspection device 30. This communication may be wireless communication or wired communication such as a LAN (Local Area Network).

Further, the management device 10 can access the storage device 50, and reads information stored in the database 51 to manage the manufacturing device 20 and the inspection device 30.

In the example of FIG. 1, it is shown that the storage device 50 is a separate device from the management device 10. However, the configuration illustrated in FIG. 1 is an example, and the storage device 50 manages the storage device 50. It may be included in the device 10.

Furthermore, the management apparatus 10 may be included in any manufacturing apparatus 20 or inspection apparatus 30.

<Device configuration>
Further, referring to FIG. 1, the management device 10 has, as a device configuration, a CPU (Central Processing Unit) 11 for controlling the entire device, a memory 12 for storing a program executed by the CPU 11, and the like. An HDD (Hard Disk Drive) 13 for storing information necessary for management, and a communication interface (I / F) 14 for communicating with the manufacturing apparatus 20, the inspection apparatus 30, and the storage apparatus 50 are included.

This device configuration is an example and is similar to the configuration of a general computer or server. Therefore, the management apparatus 10 may include other configurations. For example, a storage device conforming to SSD (Solid State Drive) or other standards may be used instead of or in addition to the HDD as the storage device.

<Overview of operation>
FIG. 2 is a diagram showing an outline of the operation in the CIM system 1.

With reference to FIG. 2, when a product of a certain lot number M is manufactured in the manufacturing apparatus 20 in step S11, the manufacturing apparatus 20 manages the lot number M as the lot information and process data in step S12. It transmits to the apparatus 10.

Here, the process data refers to various parameter information as a processing result when a product is processed (manufactured or inspected) for each lot by the manufacturing apparatus 20 or the inspection apparatus 30. For example, as the process data in the manufacturing apparatus 20, Processing time, amount of material used, remaining amount, various manufacturing conditions (temperature, pressure, etc.) are applicable, and the process data in the inspection apparatus 30 includes various measurement results such as the number of defects and film thickness in the lot. , Etc.

Lot information (lot number) is generally read using a bar code or the like. When the manufacturing apparatus 20 includes a reading device (not shown), the manufacturing apparatus 20 reads it and manages it together with the process data. Transmit to device 10.

Note that a conveyance device (not shown) on the production line 40 may be provided with a reading device for reading lot information, and the conveyance device may transmit the data to the manufacturing device 20 as the process progresses. In this case, the manufacturing apparatus 20 transmits the lot information received from the transport apparatus to the management apparatus 10 together with the process data that is the processing result of the own apparatus.

In step S21, the management apparatus 10 determines the inspection frequency in the inspection apparatus 30 of the product of the lot number M based on the process data received from the manufacturing apparatus 20, and the inspection determined as the lot number M in step S22. The frequency is transmitted to the inspection device 30.

The inspection apparatus 30 that has received this information inspects the product of the lot number M in step S31 according to the received inspection frequency, and sends the inspection result as process data together with the lot number M to the management apparatus 10 in step S32. Send.

<Functional configuration>
FIG. 3 is a block diagram illustrating a specific example of a functional configuration of the management apparatus 10 for executing the above operation. Each function shown in FIG. 3 is mainly formed on the CPU 11 when the CPU 11 of the management apparatus 10 reads and executes a program stored in the memory 12, but at least a part of the functions are illustrated. May be realized by a hardware configuration such as an electric circuit.

Referring to FIG. 3, the management apparatus 10 receives a process data input unit 101 for receiving input of process data transmitted from the manufacturing apparatus 20 via the communication I / F 14, and transmits the input process data to the communication I / F. In order to store the storage unit 102 for executing the process for executing the process stored in the database 51 of the storage device 50 via F14 and a threshold value to be described later, and to compare the process data with the threshold value. Comparison unit 103, a determination unit 104 for determining an inspection frequency in the inspection device 30 based on the comparison result, and a notification unit 105 for notifying the corresponding inspection device 30 of the determined inspection frequency. An inspection data input unit 106 for receiving input of inspection data that is process data transmitted from the inspection device 30 via the communication I / F 14; An analysis unit 107 for analyzing the input inspection data, a management unit 108 for performing manufacturing management by feeding back the analysis result to the manufacturing apparatus 20 via the communication I / F 14, and an inspection for performing a final inspection And a calculation unit 109 for calculating the yield from the analysis result of the inspection data from the apparatus 30N.

The process data input unit 101 accepts input of a lot number together with process data from the manufacturing apparatus 20. The storage unit 102 stores the lot number in association with the process data in the database 51 of the storage device 50 for each manufacturing apparatus 20.

The comparison unit 103 stores a threshold value of a value (hereinafter, process data value) indicated by process data from the manufacturing apparatus 20 in advance for each manufacturing apparatus 20. This threshold value is a threshold value for classifying process data values into management levels. In the following description, the management level is also referred to as a management level.

The threshold value may be specified for each manufacturing apparatus 20 or may be specified for each manufacturing parameter in the manufacturing apparatus 20.

FIG. 4 is a diagram illustrating a specific example of the relationship between the threshold value stored in the comparison unit 103 and the management level. Referring to FIG. 4, as an example, comparison unit 103 stores threshold values Th1 to Th4.

The range defined by Th2 to Th3 indicates a range of process data values (normal production possible range) in which normal production is possible in the manufacturing apparatus 20 concerned. The range specified by Th3 to Th4 indicates the range of control level 1 that is adjacent to the normal production range on the higher process data value side, and the range specified by Th4 is the value of process data value. On the higher side, the management level 2 range adjacent to the management level 1 range is indicated.

Similarly, the range defined by Th1 to Th2 indicates the range of the management level 1 that is adjacent to the normal production possible range on the lower side of the process data value, and the range defined by ~ Th1 is the process data value. Indicates a management level 2 range adjacent to the management level 1 range on the lower side.

The comparison unit 103 reads the process data associated with the lot number to be compared from the database 51 and compares it with the stored threshold values Th1 to Th4, thereby specifying the management level corresponding to the lot number. .

As shown in FIG. 4, when there are a plurality of process data associated with a lot number, the comparison unit 103 sets the management level to which the most process data among them belongs to the management level corresponding to the lot number. Alternatively, the management level to which the average value of the values indicated by the process data belongs may be specified as the management level corresponding to the lot number.

The determination unit 104 stores a correspondence between the management level and the inspection frequency in the inspection apparatus 30 in advance. Alternatively, the correspondence between the management level and the inspection frequency in the inspection device 30 may be stored in the HDD 13 or the like, and the determination unit 104 may read the correspondence. The determination unit 104 reads the inspection frequency in the inspection device 30 according to the management level related to the lot number specified by the comparison unit 103, thereby inspecting the product associated with the lot number in the inspection device 30. Determine the frequency.

As shown in FIG. 1, when the CIM system 1 includes a plurality of

inspection devices

30A, 30B,... 30N as the inspection device 30, correspondence between inspection frequencies and management levels is stored for each inspection device. The determination unit 104 may determine the inspection frequency for each inspection device.

Here, for example, the inspection frequency of the product associated with the lot number in the inspection device 30A is notified to the inspection device 30A before the inspection device 30A starts the inspection of the product associated with the lot number. Is done. Thereby, in an apparatus for extracting a product for inspection from a product conveyed along the production line 40, such as a loading robot (not shown) provided in the inspection apparatus 30A, the lot is extracted in accordance with the number of extractions according to the notification. The product associated with is extracted for inspection by the inspection apparatus 30A.

The inspection apparatus 30 performs inspection at the notified inspection frequency, and inspection data that is the inspection result is transmitted as process data to the management apparatus 10. The analysis unit 107 analyzes the inspection data and obtains an analysis result based on a relational expression stored in advance.

<Operation flow>
FIG. 5 is a flowchart showing the flow of operations executed by the management apparatus 10. The operation shown in the flowchart of FIG. 5 is realized by the CPU 11 of the management apparatus 10 reading and executing a program stored in the memory 12.

Referring to FIG. 5, when process data is received from the manufacturing apparatus 20 as a product of a certain lot number is manufactured (YES in step S <b> 101), CPU 11 stores the received process data in database 51 of storage device 50 in step S <b> 113. Store.

When manufacturing of the product of the lot number is completed in the manufacturing apparatus 20 and transmission of process data associated with the lot number is completed (YES in step S105), the CPU 11 associates with the lot number in step S107. Management level is determined using process data. In step S105, if the CPU 11 stores the number of products for each lot number in advance, the number of process data received in step S101 is counted using a counter (not shown). By detecting that the count value reaches the number of stored process data, it is possible to detect the completion of reception of process data related to the lot number. Alternatively, the CPU 11 monitors data representing the lot number transmitted from the manufacturing apparatus 20 in association with the process data, and when the lot number changes, reception of the process data associated with the previous lot number is completed. May be detected.

In step S107, the CPU 11 determines the management level of the process data associated with the lot number by comparing the value indicated by the process data with the boundary value of the management level used as a threshold value stored in advance. In step S109, the CPU 11 determines the inspection frequency stored corresponding to the management level determined in step S107 as the inspection frequency in the inspection apparatus 30 for the product of the lot number, and corresponds in step S111. The inspection device 30 is notified.

<Effect of Embodiment>
By performing the above operation in the management apparatus 10, in the CIM system 1, the inspection frequency in the inspection apparatus 30 is set corresponding to the change in the process data in the manufacturing apparatus 20. That is, when the value indicated by the process data in the manufacturing apparatus 20 is classified into management levels and the inspection frequency is set for each management category, and the management level of the process data in the manufacturing apparatus 20 changes, the changed management level The inspection frequency corresponding to is set. Thereby, manufacturing quality will be improved. In addition, the yield can be improved.

<Modification>
In the above example, the inspection frequency is determined by specifying the management level by paying attention to the process data from one of the plurality of

manufacturing apparatuses

20A, 20B,... 20N.

However, as the CIM system 1 is shown in FIG. 1, the production progresses while the products are sequentially conveyed to the plurality of

production apparatuses

20A, 20B,... 20N by the production line 40, and then the inspection by the inspection apparatus 30 is performed. In the case of the configuration, the inspection frequency may be determined by a combination of process data from each of the plurality of

manufacturing apparatuses

20A, 20B,.

FIG. 6A is a diagram showing a specific example of the correspondence between the process data from the manufacturing apparatus and the inspection frequency in the modified example. With reference to FIG. 6A, as an example, the threshold value indicating the normal state is defined such that the value of process data in manufacturing apparatus 20A is less than 80, and the value of process data in manufacturing apparatus 20B is less than 0.4. In this case, the inspection frequency of the inspection apparatus 30 is defined as 1/10. Furthermore, the value of process data in the manufacturing apparatus 20A is 80 or more, the value of process data in the manufacturing apparatus 20B is 0.4 or more, the first threshold value, the value of process data in the manufacturing apparatus 20A is 110 or more, A process data value of 0.9 or more in the manufacturing apparatus 20B is defined as the second threshold value. Then, 1/5 is defined as the inspection frequency when the value of the process data in each of the

manufacturing apparatuses

20A and 20B is at a management level between the first threshold value and the second threshold value, The total number is defined as the inspection frequency when the management level is equal to or higher than the second threshold.

In this case, the inspection frequency corresponding to the management level to which all of the process data values of the

manufacturing apparatuses

20A and 20B belong may be determined as the inspection frequency of the product of the lot number, and each of these process data belongs. Of the management levels, the management level farthest from the normal state may be determined as the inspection frequency of the product of the lot number.

The management apparatus 10 stores the threshold value as shown in FIG. 6A and the inspection frequency for each management level, and specifies the inspection frequency based on the process data associated with a lot number from the

manufacturing apparatuses

20A and 20B. To do.

FIG. 6B is a diagram showing a specific example of determination of the inspection frequency using FIG. 6A. With reference to FIG. 6B, since the combinations of the values of the process data of the

manufacturing apparatuses

20A and 20B associated with the

lot numbers

1, 2, and 6 are all in the normal state, the inspection frequency of the products of these lot numbers Is determined to be 1/10.

On the other hand, although the value of the process data of the manufacturing apparatus 20B associated with the lot number 5 is normal, the value of the process data of the manufacturing apparatus 20A exceeds the first threshold value and reaches the second threshold value. Belongs to the management level between. Therefore, in this case, the inspection frequency of the product of lot number 5 is determined to be 1/5.

Similarly, the values of the process data of the manufacturing apparatus 20A associated with the

lot numbers

3 and 4 belong to the normal state and the management level between the first threshold value and the second threshold value, respectively. However, the value of the process data of the manufacturing apparatus 20B belongs to a management level equal to or higher than the second threshold value. Therefore, in this case, the inspection frequency of the products having these lot numbers is determined as the total number.

In this example, the inspection frequency is determined by a combination of process data values for each manufacturing apparatus, but the inspection frequency is determined by a combination of the process data from the manufacturing apparatus 20 and the process data from the inspection apparatus 30. It may be determined.

Such a method for determining the inspection frequency is assumed in the following cases. That is, as the process data from the manufacturing apparatus 20A, the remaining amount of a certain material used in manufacturing by the manufacturing apparatus 20A can be mentioned. At this time, the remaining amount of the material represented by the process data is close to the replacement time, and the amount of the material used for the product of the lot number in the inspection device 30A is just below the predetermined manufacturing condition. When process data indicating an inspection result indicating a certain situation is obtained, there is a possibility that a defective product due to a shortage of the material or a non-defective product with poor quality that is very close to the defective product may occur after the next step. Therefore, in this case, the management apparatus 10 determines the inspection frequency in the inspection apparatus 30B of the next process higher (more) than usual based on the combination of these process data. This makes it possible to detect defects early. In addition, the replacement time of the material of the manufacturing apparatus 20A is reviewed.

As yet another example, when multiple types (parameters) of process data are obtained from a single manufacturing apparatus, the inspection frequency may be determined based on the management level to which each process data belongs. That is, the management device 10 stores in advance the correspondence between the combination of the management levels and the inspection frequency for each type of process data, and a plurality of types of process data for a product with a lot number from one manufacturing device 20 are stored. Once obtained, the inspection frequency may be determined according to the combination of management levels to which the respective process data belongs.

This increases the inspection frequency for types of process data that affect quality more, and the inspection frequency for types of process data that do not significantly affect quality (even if they may deviate slightly from normal production levels). Therefore, it is possible to set an inspection frequency of “not changing” and to achieve both improvement in yield and improvement in manufacturing efficiency.

In the above example, the management apparatus 10 determines the inspection frequency in the inspection apparatus 30 based on the process data from the manufacturing apparatus 20 and the inspection apparatus 30. However, the control value determined by the management device 10 is not limited to the inspection frequency in the inspection device 30.

As another example, the management apparatus 10 uses the CIM as control values such as the manufacturing speed in the manufacturing apparatus 20, the material replacement frequency (as in the above example), the inspection sample replacement frequency in the inspection apparatus 30, and the like. The control value of each device included in the system 1 may be determined.

In this case, as shown in FIG. 1, in the CIM system 1, since the production proceeds while the product is transported from the upstream side to the downstream side along the production line 40, the management device 10 receives the process data from the upstream device. On the basis of the control value, the control value in the downstream apparatus may be determined.

Specifically, the management apparatus 10 determines, in advance, for each apparatus for which a control value is determined, a management level (or a combination of management levels) to which the process data from the upstream apparatus belongs, and the control value. The correspondence with the control value of the device is stored, and when the process data from the upstream device for the product of a certain lot number is obtained, according to the management level (or combination of management levels) to which the process data belongs Control values (for example, inspection frequency, manufacturing speed, etc.) of the device are determined.

Thereby, the manufacturing quality in the CIM system 1 can be improved, and the yield can be improved.

Furthermore, it is possible to provide a program for causing a computer to execute the operation in the management apparatus 10 described above. Such a program is stored on a computer-readable recording medium such as a flexible disk attached to the computer, a CD-ROM (Compact Disk-Read Only Memory), a ROM (Read Only Memory), a RAM (Random Access Memory), and a memory card. And can be provided as a program product. Alternatively, the program can be provided by being recorded on a recording medium such as a hard disk built in the computer. A program can also be provided by downloading via a network.

The program according to the present invention is a program module that is provided as a part of a computer operating system (OS) and calls necessary modules in a predetermined arrangement at a predetermined timing to execute processing. Also good. In that case, the program itself does not include the module, and the process is executed in cooperation with the OS. A program that does not include such a module can also be included in the program according to the present invention.

Further, the program according to the present invention may be provided by being incorporated in a part of another program. Even in this case, the program itself does not include the module included in the other program, and the process is executed in cooperation with the other program. Such a program incorporated in another program can also be included in the program according to the present invention.

The provided program product is installed in a program storage unit such as a hard disk and executed. The program product includes the program itself and a recording medium on which the program is recorded.

The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

1 CIM system, 10 management device, 11 CPU, 12 memory, 13 HDD, 14 communication I / F, 20, 20A, 20B, ... 20N manufacturing device, 30, 30A, 30B, ... 30N inspection device, 40 manufacturing line, 50 Storage device, 51 database, 101 process data input unit, 102 storage unit, 103 comparison unit, 104 determination unit, 105 notification unit, 106 inspection data input unit, 107 analysis unit, 108 management unit, 109 calculation unit.

Claims

In a manufacturing system including a plurality of process devices including a first process device and a second process device disposed downstream of the first process device in a product conveyance direction, the plurality of process devices are A management device for managing,
An acquisition unit for communicating with each of the plurality of process devices to acquire process data that is a value related to a predetermined parameter in processing of a product from each of the plurality of process devices;
A storage unit for storing a correspondence relationship between a management level to which process data from the first process device belongs and a control value of the second process device arranged downstream of the first process device; ,
A specifying unit for specifying a management level to which process data from the first process device relating to a product of a predetermined lot belongs;
A determining unit for determining a control value for the product of the predetermined lot in the second process apparatus based on the specified management level;
And a control unit configured to control processing of the product of the predetermined lot in the second process apparatus using the determined control value.
The determination unit stores the boundary value of the management level as a threshold value, and compares the value indicated by the process data from the first process device with the threshold value, thereby managing the management level to which the process data belongs. The management device according to claim 1, wherein
The first process apparatus is a manufacturing apparatus,
The second process device is an inspection device,
The determination unit determines an inspection frequency of the product of the predetermined lot as a control value in the inspection device based on a management level to which the process data related to the product of the predetermined lot from the manufacturing device belongs. Item 3. The management device according to Item 1 or 2.
The management level is set in stages from the normal production possible range in the manufacturing apparatus,
The storage unit stores a correspondence relationship in which the inspection frequency in the inspection apparatus increases as the management level to which the process data from the manufacturing apparatus belongs is a management level that is farther from the normal production possible range. Item 4. The management device according to Item 3.
In a manufacturing system including a plurality of process devices including a first process device and a second process device disposed downstream of the first process device in a product conveyance direction, the plurality of process devices are A method of managing,
Obtaining process data which is a value relating to a predetermined parameter in processing a product of a predetermined lot from the first process device;
Identifying a management level to which process data from the first process device belongs;
Access to a storage device that stores a correspondence relationship between a management level to which process data from the first process device belongs and a control value of the second process device arranged downstream of the first process device And determining a control value for the product of the predetermined lot in the second process device based on the specified management level;
Controlling the processing of the product of the predetermined lot in the second process apparatus using the determined control value.
In a manufacturing system including a plurality of process devices including a first process device and a second process device disposed downstream of the first process device in a product transfer direction, the plurality of process devices; A program for causing an electrically connected management device to execute processing for managing the plurality of process devices,
Obtaining process data which is a value relating to a predetermined parameter in processing a product of a predetermined lot from the first process device;
Identifying a management level to which process data from the first process device belongs;
Access to a storage device that stores a correspondence relationship between a management level to which process data from the first process device belongs and a control value of the second process device arranged downstream of the first process device And determining a control value for the product of the predetermined lot in the second process device based on the specified management level;
A management program for causing the management device to execute a step of controlling processing of the product of the predetermined lot in the second process device using the determined control value.