WO2012156908A4 - X-ray optical system - Google Patents

X-ray optical system Download PDF

Info

Publication number
WO2012156908A4
WO2012156908A4 PCT/IB2012/052425 IB2012052425W WO2012156908A4 WO 2012156908 A4 WO2012156908 A4 WO 2012156908A4 IB 2012052425 W IB2012052425 W IB 2012052425W WO 2012156908 A4 WO2012156908 A4 WO 2012156908A4
Authority
WO
WIPO (PCT)
Prior art keywords
optical system
segment
ray optical
modules
axis
Prior art date
Application number
PCT/IB2012/052425
Other languages
French (fr)
Other versions
WO2012156908A1 (en
Inventor
Adolf Inneman
Veronika MARSIKOVA
Ladislav Pina
Rene Hudec
Original Assignee
Rigaku Innovative Technologies Europe S.R.O.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rigaku Innovative Technologies Europe S.R.O. filed Critical Rigaku Innovative Technologies Europe S.R.O.
Priority to EP12728320.8A priority Critical patent/EP2710610B1/en
Publication of WO2012156908A1 publication Critical patent/WO2012156908A1/en
Publication of WO2012156908A4 publication Critical patent/WO2012156908A4/en

Links

Classifications

    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G21K1/067Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators using surface reflection, e.g. grazing incidence mirrors, gratings
    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00Arrangements for handling radiation or particles
    • G21K2201/06Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • G21K2201/067Construction details

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Lenses (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

X-ray optical system composed of modules wit thin reflection foils or rectangular small channels. The optical system (3) is composed of minimum 5 segments (2), each segment (2) is assembled from minimum one module (1) and the diagonals of all modules (1) in a segment (2) are always in parallel with the symmetry axis (5) of the segment (2) and the segment (2) is a sector with a central angle from 18° to 72°, in the narrowest part of which is the dysfunctional or "dead"z one (6). The X-ray optical system has this dead zone (6), which can be filled with thin, rotationally symmetric foils (7), laid out in another geometric layout so that a common focus of the whole optical system (3) is formed. The X-ray optical system (3) has individual segments (2) laid out so that the aperture of the X-ray optical system (3) approaches the circular aperture and the symmetry axis (5) of a segment (2) always intersects the optical axis (4) of the optical system (3).

Claims

AMENDED CLAIMS
received by the International Bureau on 19 November 2012 (19.1 1.2012) The X-ray optical system (3) based on total reflection which is consisted of at least five segments (2), the segment (2) is formed from at least one module (1) and the diagonals of all modules (1) in the segment (2) are always parallel to the axis (5) of symmetry of the segment (2), the segment (2) is a sector with a central angle of 18 0 to 72 0 at its narrowest part is dead zone (6), distinguished by that the modules (1) are consisted of two sub-modules (1A and IB) which are towards each other along the optical axis at 90 0 and each sub-module (1A and IB) is consisted of a thin planar aspherical curved reflective foil (7). The X-ray optical system (3) according to claim 1, distinguished by that the centre dead zone (6) is filled with thin rotationally symmetric reflective foils (7) assembled in such a geometry that common focus arise for the centre part and all modules (1). The X-ray optical system (3) according to claim 1, distinguished by that individual segments (2) are arranged in the shape of a regular polygon, so that the aperture of X-ray optical system (3) close to the circular aperture and the axis (5) of symmetry of the segment (2) always intersects the optical axis (4) X-ray optical system (3).
PCT/IB2012/052425 2011-05-17 2012-05-15 X-ray optical system WO2012156908A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP12728320.8A EP2710610B1 (en) 2011-05-17 2012-05-15 X-ray optical system

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CZPV2011-297 2011-05-17
CZ2011-297A CZ306934B6 (en) 2011-05-17 2011-05-17 An X-ray optical system

Publications (2)

Publication Number Publication Date
WO2012156908A1 WO2012156908A1 (en) 2012-11-22
WO2012156908A4 true WO2012156908A4 (en) 2013-01-10

Family

ID=44307748

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2012/052425 WO2012156908A1 (en) 2011-05-17 2012-05-15 X-ray optical system

Country Status (3)

Country Link
EP (1) EP2710610B1 (en)
CZ (1) CZ306934B6 (en)
WO (1) WO2012156908A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU175420U1 (en) * 2017-08-03 2017-12-05 Федеральное государственное автономное образовательное учреждение высшего образования "Национальный исследовательский Нижегородский государственный университет им. Н.И. Лобачевского" X-ray convergence control device
CN111427077B (en) * 2020-04-24 2021-11-02 中国建筑材料科学研究总院有限公司 X-ray detection lens and preparation method thereof
CN113916910B (en) * 2021-10-19 2023-07-28 中国建筑材料科学研究总院有限公司 X-ray detection lens and preparation method and application thereof
CZ36961U1 (en) 2022-12-06 2023-04-04 Tichý Vladimír Mgr., Ph.D. Optical module assembly for an optical system, especially the crayfish type
CZ2022511A3 (en) * 2022-12-06 2024-05-08 Vladimír Tichý An optical module assembly for an optical system, in particular of a lobster-eye type and a method of preparation of the assembly

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1992009088A1 (en) * 1990-11-20 1992-05-29 Commonwealth Scientific And Industrial Research Organisation Improved multiple channel configurations for conditioning x-ray or neutron beams
JP2002286547A (en) * 2000-12-28 2002-10-03 Inst Of Physical & Chemical Res Wide band normal incidence telescope
FR2866438B1 (en) * 2004-02-16 2006-08-11 Agence Spatiale Europeenne REFLECTIVE OPTICAL ELEMENT, METHOD FOR MANUFACTURING SAME, AND OPTICAL INSTRUMENT USING SUCH ELEMENTS
EP1812935A2 (en) * 2004-11-09 2007-08-01 Carl Zeiss SMT AG High-precision optical surface prepared by sagging from a masterpiece
JP2007163191A (en) * 2005-12-09 2007-06-28 Canon Inc Multilayer-film reflector and optical system equipped with multilayer-film reflector
JP5076349B2 (en) * 2006-04-18 2012-11-21 ウシオ電機株式会社 Extreme ultraviolet light collector mirror and extreme ultraviolet light source device
FR2901628B1 (en) * 2006-05-24 2008-08-22 Xenocs Soc Par Actions Simplif OPTICAL ASSEMBLY OF REFLECTIVE SHELLS AND ASSOCIATED METHOD

Also Published As

Publication number Publication date
WO2012156908A1 (en) 2012-11-22
EP2710610B1 (en) 2019-09-11
CZ306934B6 (en) 2017-09-27
EP2710610A1 (en) 2014-03-26
CZ2011297A3 (en) 2011-07-27

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