WO2012155276A1 - Dispositif de positionnement - Google Patents

Dispositif de positionnement Download PDF

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Publication number
WO2012155276A1
WO2012155276A1 PCT/CH2011/000119 CH2011000119W WO2012155276A1 WO 2012155276 A1 WO2012155276 A1 WO 2012155276A1 CH 2011000119 W CH2011000119 W CH 2011000119W WO 2012155276 A1 WO2012155276 A1 WO 2012155276A1
Authority
WO
WIPO (PCT)
Prior art keywords
electrode
positioning device
polymer film
actuator
segments
Prior art date
Application number
PCT/CH2011/000119
Other languages
English (en)
Inventor
Manuel Aschwanden
Original Assignee
Optotune Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optotune Ag filed Critical Optotune Ag
Priority to PCT/CH2011/000119 priority Critical patent/WO2012155276A1/fr
Publication of WO2012155276A1 publication Critical patent/WO2012155276A1/fr

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements
    • G02B7/005—Motorised alignment
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B5/00—Adjustment of optical system relative to image or object surface other than for focusing
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0095—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules
    • H04N23/68—Control of cameras or camera modules for stable pick-up of the scene, e.g. compensating for camera body vibrations
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/64—Imaging systems using optical elements for stabilisation of the lateral and angular position of the image
    • G02B27/646—Imaging systems using optical elements for stabilisation of the lateral and angular position of the image compensating for small deviations, e.g. due to vibration or shake
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G02B7/08—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification adapted to co-operate with a remote control mechanism
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B2205/00—Adjustment of optical system relative to image or object surface other than for focusing
    • G03B2205/0007—Movement of one or more optical elements for control of motion blur
    • G03B2205/0023—Movement of one or more optical elements for control of motion blur by tilting or inclining one or more optical elements with respect to the optical axis
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B2205/00—Adjustment of optical system relative to image or object surface other than for focusing
    • G03B2205/0053—Driving means for the movement of one or more optical element
    • G03B2205/0061—Driving means for the movement of one or more optical element using piezoelectric actuators
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules

Definitions

  • the present invention relates to a position- ing device for a movable element, in particular an opti- cal element, and to methods for operating, using, and fabricating such a device.
  • a positioning device is used to move (i.e., displace and/ or tilt) an element in different directions and/ or around different tilt axes. While many different multi-axes positioning devices for optical elements have existed for many years (e.g., relying on mechanical actuation via fine pitch threads or piezo actuation) , a lot of these devices are unsuitable for applications that require compact components, e.g., in miniaturized optical systems. Therefore, compact positioning devices have gained an increasing attention, e.g., for use as autofo- cus actuators or vibration compensation actuators in compact camera modules, e.g., in cellphones, PDAs, webcaras, or tablet computers.
  • a highly functional positioning device i.e., with a plurality of degrees of freedom
  • the positioning device comprises a polymer film that is interconnected to the element that is to be displaced and/ or tilted by the positioning device.
  • An electroactive polymer actuator is used to displace the element in a lateral direction x, y that is perpendicular to an axial direction z:
  • a first surface of the polymer film on a first side is interconnected to a first electrode and a second surface of the polymer film (opposing the first surface) is interconnected to a second electrode.
  • the polymer film can be arranged planar in the x-y-plane and at least a part of the fourth electrode is arranged at an angle (i.e., with an inclination) to this plane.
  • the inner part of the fourth electrode i.e., the part that is closer to an optical axis z' of the movable element
  • the axial distance (along z) between the third electrode and the fourth electrode is a non-constant function of a lateral position (along x and/ or y, i.e.,.
  • the tilt axes ⁇ , ⁇ are parallel to lines in the lateral plane x-y, i.e., the plane that is perpendicular to the axial direction z.
  • the optical axis z' of the element in its fourth position is tilted around a tilt axis ⁇ , ⁇ with respect to its third position.
  • voltage biasing is possible for the electrostatic actuator as well (as described above) , i.e., a nonzero voltage is already applied between the third and the fourth electrode when the element is in its third position. Then, upon changing this voltage difference, the element is, e.g., displaced along +z or -z, depending on the sign of the change of the voltage difference.
  • the displacements that result from the electroactive polymer actuator and the electrostatic actuator are combinable.
  • the element is then displaced and/ or tilted from its first position to its fourth position.
  • the fourth position differs from the first position in lateral (along x, y) coordinates and/ or in axial coordinates (along z) and/ or the optical axis z' of the element in the fourth position is tilted with respect to the optical axis z' of the element in the first position.
  • the control of the displacement/ tilting is achieved by a control unit that applies suitable voltage differences between the first and the second electrode of the electroactive polymer actuator and between the third and the fourth electrode of the electrostatic actuator.
  • the movable element comprises, e.g., a lens barrel which could itself comprise a plurality of lenses (e.g., forming an objective for a camera device) .
  • a lens barrel which could itself comprise a plurality of lenses (e.g., forming an objective for a camera device) .
  • two elec- troactive polymer actuators specifically, the polymer films of the electroactive polymer actuators
  • electrostatic actuators can be interconnected to two opposing sides of the movable element (or, e.g., the lens barrel itself) .
  • An alternative approach for stabilization would be a spring element that is interconnected to the movable element on a side opposing the positioning device.
  • the positioning device can be used for positioning of an element comprising or consisting of a spherical lens, a Fresnel lens, a cylindrical lens, an aspherical lens, a mirror, a grating, a lens assembly, a lens barrel (11), a GRIN lens, a square, a triangle, a line, a pyramid, - a hologram, a diffuser, a needle, an im ⁇ age sensor, and a mechanical element.
  • the positioning accuracy and/ or repeatability is better than 20 ⁇ for said displacement and/ or 5mrad for said titling .
  • Fig. 2 shows a side view of the first embodiment of the positioning device with the element in a second position
  • Fig. 5 shows a side view of the first embodiment of the positioning device with the optical axis z' of the element tilted
  • Fig. 14 shows a side view of a seventh embodiment of the positioning device comprising a rotator device and a holding frame
  • Fig. 19 shows a top view of the second electrode of the electroactive polymer actuator of a twelfth embodiment of the positioning device, wherein the second electrode comprises two segments,
  • the electroactive polymer actuator 4 comprises a polymer film 3 (e.g., an elastomer membrane) that is partly sandwiched between a first compliant electrode 41 on the polymer film's first surface 31 and a second compliant electrode 42a, 42c on the polymer film's second surface 32.
  • the compliant electrodes may, e.g., be formed through metal ion implantation. This produces a compliant electrode with high adhesion and low roughness.
  • Another possibility to create compliant (i.e., able to reversibly and elastically follow deformations of the polymer film without being damaged) electrodes comprises the dispersing of conducting particles (such as carbon black) in a polymer matrix and applying this via inkjet printing, pad printing, screen printing, or spray deposition.
  • Fig. 5 shows a tilting movement of the element 2 around a tilt axis ⁇ which is in this case anti- parallel to the x-direction, i.e., pointing out from the y-z-plane.
  • the tilting movement is achieved by applying a nonzero voltage difference between the common electrode 41/51 and only some segments (here: the highly conductive segments 52b and 52c) of the fourth electrode 52 of the electrostatic actuator 5 (see below) .
  • the optical axis z '. of the element 2 can be rotated around ⁇ .
  • a similar rotation around a second tilt axis ⁇ is ⁇ possible by applying a nonzero voltage between the common electrode 41/51 and the highly conductive segments 52c and 52d of the fourth electrode 52 of the electrostatic actuator 5.
  • Fig. 12 shows a top view (i.e., an x-y projection) of the fifth embodiment of the positioning device 1. It is clearly visible that the segments 42a-d of the, : second electrode 42 (cross-hatched) o the electroactive polymer actuator 4 do not extend to the outer edge of the polymer film 3. Slim electrode ridges 42e-h extend to the outer edge of the polymer film 3 for connecting the electrode segments 42a-d to the control unit 6 for application of voltage difference.
  • the outer part (outward from approximately 90% of the diameter) of the fourth electrode 52 (dotted circle shows its outer edge) of the electrostatic actuator 5 is not laterally overlapped by the second electrode 42 of the electroactive polymer actuator 4. This leads to a better decoupling of the actuators .
  • Fig. 13 shows a side view of a sixth embodiment of the positioning device 1 comprising separation rings 8a, 8b and decoupled first/ third electrodes 41, 51.
  • a separation ring 8a is arranged at the edge of the movable element 2 in . the polymer film 1.
  • the whole positioning device 1 can be manufactured without mounting the movable element 2 which can be done later in a final mounting stage.
  • the manufacturing process is simplified.
  • the positioning device 1 can be fully manufactured and tested and shipped to a customer who can mount his own movable element 2 in the separation ring 8a.
  • the second electrostatic actuator 5' can also be omitted as in the ninth embodiment as shown in Fig. 16. This makes the positioning device 1 more compact and cheaper compared to the eighth embodiment, but at the cost of a slightly reduced z-actuation-range .
  • axial (along the z direction) is generally used to designate a direction perpendicular to the surface of the polymer film in its relaxed state, which corresponds to a direction parallel to the untilted optical axis z' of the (optical) element as shown in some of the figures.
  • lateral (along the x and/ or y direction) is used to designate a direction perpendicular to the axial direction z, i.e., a direction parallel to the relaxed polymer film.
  • radial is used synonymously to "lateral".
  • the polymer film 3 is preferably connected to a holding frame 10 and/ or prestretched .
  • an edge region of polymer film 3 can be clamped between a top and a bottom part of the holding frame 10.
  • pre- straining can be understood as suspending the polymer film in the holding frame 10 in such a manner that it is under tensional strain, i.e., a tensional force tries to keep the polymer film straight.
  • the polymer film 3 can be freely suspended in the holding frame 10, i.e., it is only supported by the holding frame 10 with no further stationary, rigid elements being in contact with its surfaces 31, 32 (with the exception of the movable element 2) .
  • the first, second, and third electrodes 41, 42, 51 should be compliant, i.e., they should be able to reversibly and elastically follow deformations of at least 5%, in particular of at least 20% of the polymer film 3 without being damaged and/ or constraining the deformations.
  • the electrodes are therefore manufactured from one of the following materials: - Carbon nanotubes (see “Self-clearable carbon nanotube electrodes for improved performance of dielectric elastomer actuators", Proc. SPIE, Vol. 6927, 69270P (2008))
  • Metallic powders in particular metallic nanoparticles (gold, silver, copper)
  • Any of the following methods can e.g. be applied for forming and structuring the element 2: ⁇ - Casting, in particular injection molding/ mold processing
  • the material for the polymer film 3 can e.g. comprise or consist of:

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Optics & Photonics (AREA)
  • Lens Barrels (AREA)

Abstract

L'invention concerne un dispositif de positionnement électroactif (1) comprenant un film de polymère élastique (3) offrant une première et une seconde surface (31, 32). Une première et une troisième électrode souple (41, 51) sont connectées à la première surface (31) et une deuxième électrode souple (segmentée) (42) est connectée à la seconde surface (32). Une quatrième électrode rigide (segmentée) (52), inclinée ou recourbée, et une couche d'isolation (54) sont disposées au-dessus et/ou au-dessous du film de polymère (3). Lorsqu'une tension est appliquée aux électrodes (41, 42, 51, 52), un élément (2) qui est connecté au film de polymère (3) (par exemple une lentille optique) peut être déplacé selon cinq degrés de liberté.
PCT/CH2011/000119 2011-05-19 2011-05-19 Dispositif de positionnement WO2012155276A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/CH2011/000119 WO2012155276A1 (fr) 2011-05-19 2011-05-19 Dispositif de positionnement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CH2011/000119 WO2012155276A1 (fr) 2011-05-19 2011-05-19 Dispositif de positionnement

Publications (1)

Publication Number Publication Date
WO2012155276A1 true WO2012155276A1 (fr) 2012-11-22

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PCT/CH2011/000119 WO2012155276A1 (fr) 2011-05-19 2011-05-19 Dispositif de positionnement

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WO (1) WO2012155276A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120139393A1 (en) * 2010-12-07 2012-06-07 Industry-Academic Cooperation Foundation, Yonsei University Electroactive polymer actuator and method of manufacturing the same
DE102013209829A1 (de) * 2013-05-27 2014-11-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optische Struktur mit daran angeordneten Stegen und Verfahren zur Herstellung derselben
EP3744634A1 (fr) 2019-04-29 2020-12-02 Airbus Operations GmbH Sous-ensemble de compensation de tolérance, composant d'aéronef en étant équipé et aéronef
US11696821B2 (en) 2021-03-31 2023-07-11 Toyota Motor Engineering & Manufacturing North America, Inc. Asymmetric electrode insulation for artificial muscles

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Publication number Priority date Publication date Assignee Title
US6376971B1 (en) * 1997-02-07 2002-04-23 Sri International Electroactive polymer electrodes
US20080204909A1 (en) 2007-02-27 2008-08-28 Konica Minolta Holdings, Inc. Polymer actuator and optical unit
US20080284285A1 (en) * 2007-03-14 2008-11-20 Nikon Corporation Vibration actuator, lens barrel, camera, manufacturing method for vibration body and manufacturing method for vibration actuator
WO2009076477A1 (fr) * 2007-12-10 2009-06-18 Artificial Muscle, Inc. Systèmes de stabilisation d'image de lentille optique
EP2239792A1 (fr) * 2009-04-07 2010-10-13 Universität Potsdam Dispositif de positionnement et son utilisation

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6376971B1 (en) * 1997-02-07 2002-04-23 Sri International Electroactive polymer electrodes
US20080204909A1 (en) 2007-02-27 2008-08-28 Konica Minolta Holdings, Inc. Polymer actuator and optical unit
US20080284285A1 (en) * 2007-03-14 2008-11-20 Nikon Corporation Vibration actuator, lens barrel, camera, manufacturing method for vibration body and manufacturing method for vibration actuator
WO2009076477A1 (fr) * 2007-12-10 2009-06-18 Artificial Muscle, Inc. Systèmes de stabilisation d'image de lentille optique
EP2239792A1 (fr) * 2009-04-07 2010-10-13 Universität Potsdam Dispositif de positionnement et son utilisation

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Title
"Low voltage, highly tunable diffraction grating based on dielectric elastomer actuators", PROC. SPIE, vol. 6524, 2007, pages 65241N
"Mechanical properties of electroactive polymer microactuators with ion-implanted electrodes", PROC. SPIE, vol. 6524, 2007, pages 652410
"Self-clearable carbon nanotube electrodes for improved performance of dielectric elastomer actuators", PROC. SPIE, vol. 6927, 2008, pages 69270P
L. SEEMANN, A. STEMMER, N. NAUJOKS: "Electro-magnetic field guided pattern forming", NANO LETT., vol. 7, no. 10, 2007, pages 3007 - 3012
L. SEEMANN, A. STEMMER, N. NAUJOKS: "Local surface charges direct the deposition of carbon nanotubes and fullerenes into nanoscale patterns", NANO LETTERS, vol. 7, no. 10, 2007, pages 3007 - 3012
R.R.A. SYMS, E. M. YEATMAN, V.M. BRIGHT, G.M. WHITESIDES: "Surface tension-powered self-assembly of microstructures - the state-of-the-art", JOURNAL OF MICROELECTROMECHANI- CAL SYSTEMS, vol. 12, no. 4, 2003, pages 387 - 417, XP011099390, DOI: doi:10.1109/JMEMS.2003.811724

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120139393A1 (en) * 2010-12-07 2012-06-07 Industry-Academic Cooperation Foundation, Yonsei University Electroactive polymer actuator and method of manufacturing the same
US8564181B2 (en) * 2010-12-07 2013-10-22 Samsung Electronics Co., Ltd. Electroactive polymer actuator and method of manufacturing the same
DE102013209829A1 (de) * 2013-05-27 2014-11-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optische Struktur mit daran angeordneten Stegen und Verfahren zur Herstellung derselben
DE102013209829B4 (de) * 2013-05-27 2016-04-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optische Struktur mit daran angeordneten Stegen und Verfahren zur Herstellung derselben
JP2016520875A (ja) * 2013-05-27 2016-07-14 フラウンホーファー−ゲゼルシャフト・ツール・フェルデルング・デル・アンゲヴァンテン・フォルシュング・アインゲトラーゲネル・フェライン 橋渡し部材を備える光学構造およびその製造方法
US10429607B2 (en) 2013-05-27 2019-10-01 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Optical structure with ridges arranged at the same and method for producing the same
US11009673B2 (en) 2013-05-27 2021-05-18 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Optical structure with ridges arranged at the same and method for producing the same
EP3744634A1 (fr) 2019-04-29 2020-12-02 Airbus Operations GmbH Sous-ensemble de compensation de tolérance, composant d'aéronef en étant équipé et aéronef
US11492142B2 (en) 2019-04-29 2022-11-08 Airbus Operations Gmbh Tolerance compensation subassembly, aircraft component provided therewith and aircraft
US11696821B2 (en) 2021-03-31 2023-07-11 Toyota Motor Engineering & Manufacturing North America, Inc. Asymmetric electrode insulation for artificial muscles

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