WO2012147387A1 - Wet electric dust collector - Google Patents

Wet electric dust collector Download PDF

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Publication number
WO2012147387A1
WO2012147387A1 PCT/JP2012/052872 JP2012052872W WO2012147387A1 WO 2012147387 A1 WO2012147387 A1 WO 2012147387A1 JP 2012052872 W JP2012052872 W JP 2012052872W WO 2012147387 A1 WO2012147387 A1 WO 2012147387A1
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WIPO (PCT)
Prior art keywords
exhaust gas
dust collector
dust
casing
drain tank
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PCT/JP2012/052872
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French (fr)
Japanese (ja)
Inventor
田中　正宏
山田　俊樹
光智 阿部
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エドワーズ株式会社
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Publication of WO2012147387A1 publication Critical patent/WO2012147387A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/02—Plant or installations having external electricity supply
    • B03C3/16—Plant or installations having external electricity supply wet type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/02—Plant or installations having external electricity supply
    • B03C3/025—Combinations of electrostatic separators, e.g. in parallel or in series, stacked separators, dry-wet separator combinations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/36—Controlling flow of gases or vapour
    • B03C3/361—Controlling flow of gases or vapour by static mechanical means, e.g. deflector
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/40—Electrode constructions
    • B03C3/45—Collecting-electrodes
    • B03C3/49—Collecting-electrodes tubular
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/74—Cleaning the electrodes
    • B03C3/78—Cleaning the electrodes by washing

Definitions

  • the present invention relates to a wet electrostatic precipitator, and more particularly to a wet electrostatic precipitator that eliminates the need for overhaul in a short period of time by preventing the dust collection performance from dropping over a long period of time.
  • a CVD (Chemical Vapor Deposition) process for forming a film using a chemical vapor reaction, an etching process, and the like are performed, and various gases are used in a process chamber.
  • the exhaust gas generated from the process chamber through a chemical vapor reaction or the like includes harmful P 4 gases (perfluorocarbon: global warming gas) such as CF 4 (Freon 14) and C 4 F 8 (Freon 318). It is. Since this PFC gas is extremely stable, it is harmful to the environment if it is released into the atmosphere without being decomposed.
  • harmful P 4 gases perfluorocarbon: global warming gas
  • CF 4 Fluorocarbon: global warming gas
  • C 4 F 8 Freon 318
  • exhaust gas is rendered harmless after passing through a combustion type or plasma type detoxifying device for exhaust gas treatment.
  • the exhaust gas may contain W 2 O 5 (tungsten oxide) or SiO 2 (silicon dioxide) depending on the CVD process in addition to the above components.
  • this wet type electrostatic precipitator can be increased to nearly 100%, can be stably maintained for a long period of time, and the number of maintenance can be minimized. Moreover, it is desired that the size of the wet electrostatic precipitator is small.
  • the wet type electrostatic precipitator has versatility that can be easily changed in design depending on the flow rate of the exhaust gas. Furthermore, it is conceivable that this wet type electrostatic precipitator applies corona discharge from the viewpoint of dust collection efficiency, but the power source for this corona discharge should be composed of a common power source as much as possible in terms of simplification of the system and cost. Is desirable.
  • the present invention has been made in view of such conventional problems, and an object of the present invention is to provide a wet type electrostatic precipitator that does not require overhaul in a short period of time by preventing the dust collection performance from deteriorating over a long period of time. To do.
  • the present invention includes an exhaust gas containing dust, at least one first cylindrical dust collector that is discharged after the exhaust gas is introduced and purified, and an upper portion of the casing of the cylindrical dust collector.
  • An electrode having a predetermined electric potential between the casing, a covering cylinder covering the periphery of the electrode, water flowing down in the form of a water film inside the casing, and a drain in which the casing is erected
  • a wet-type electrostatic precipitator including a tank, wherein the exhaust gas is discharged from an upper portion of the casing after rising in the casing via an air reservoir in the drain tank.
  • Dust in the exhaust gas is charged to negative ions by, for example, corona discharge. And this dust is drawn near to the case side which has a different voltage. Since a water film is formed inside the housing, the dust attached to the housing is washed away by this water and falls into the drain tank. The flow of the exhaust gas flows from the lower side to the upper side of the housing via the air reservoir in the drain tank. Therefore, dust is less likely to adhere to or accumulate around the coated cylinder, for example, when exhaust gas directly hits the coated cylinder. For this reason, there is no fear of electric leakage, and since it is stable over a long period of time, the dust collection performance is hardly lowered. Accordingly, the interval between overhauls can be increased. Since the number of installed cylindrical dust collectors may be set according to the flow rate of the exhaust gas, the versatility is high.
  • At least one second cylindrical dust collector not having an electrode and a coating cylinder for sucking exhaust gas from the upper part of the housing on the drain tank, and the second cylindrical shape. And water that flows down in the form of a water film inside the housing of the dust collector, and after the exhaust gas descends in the housing of the second cylindrical dust collector, the first tank passes through the air reservoir in the drain tank. After rising inside the casing of the cylindrical dust collector, it is discharged from the upper part of the casing of the first cylindrical dust collector.
  • the second cylindrical dust collector there is no covering cylinder that may cause dust adhering near the upper part of the casing, which is an inflow port for exhaust gas, and no electrode is provided to prevent leakage. For this reason, there is no fear of electric leakage, and since it is stable over a long period of time, the dust collection performance is hardly lowered. Accordingly, the interval between overhauls can be increased.
  • the present invention (Claim 3) is characterized in that the exhaust gas is directly introduced into the drain tank.
  • the present invention further includes at least one third cylindrical dust collector that discharges after the exhaust gas is introduced and purified on the drain tank, and the housing of the first cylindrical dust collector is further provided.
  • the exhaust gas discharged from the upper part of the body is reintroduced into the drain tank, and after rising in the casing of the third cylindrical dust collector via the air reservoir in the drain tank, the exhaust gas is discharged from the upper part of the casing. It is characterized by that.
  • the exhaust gas flows from the lower side to the upper side of the casing, so that it is difficult for dust to adhere or accumulate around the coated cylinder when the exhaust gas directly hits the coated cylinder. Become. For this reason, there is no fear of electric leakage, and since it is stable over a long period of time, the dust collection performance is hardly lowered. Accordingly, the interval between overhauls can be increased.
  • the present invention (Claim 5) is characterized in that a voltage is supplied in parallel from the same power source to the electrodes.
  • the possibility that the dust is attached to the periphery of the coated cylinder and the voltage is lowered due to electric leakage and the dust collection efficiency is lowered is extremely low. For this reason, there is no problem even if a voltage is supplied in parallel from the same power source to the electrodes. As a result, the wet electrostatic precipitator equipment can be configured simply and inexpensively.
  • the exhaust gas rises in the casing of the cylindrical dust collector via the air reservoir in the drain tank, and is then discharged from the upper part of the casing.
  • dust is less likely to adhere to or accumulate around the coated cylinder due to direct contact with exhaust gas. For this reason, there is no fear of electric leakage, and since it is stable over a long period of time, the dust collection performance is hardly lowered. Accordingly, the interval between overhauls can be increased.
  • FIG. 1 A system configuration diagram of the first embodiment of the present invention is shown in FIG. 1
  • the wet electrostatic precipitator 10 has three cylindrical dust collectors 10 ⁇ / b> A, 10 ⁇ / b> B, and 10 ⁇ / b> C having substantially the same outer shape standing on the drain tank 12.
  • the bottoms of the casings 11A, 11B, and 11C of the cylindrical dust collectors 10A, 10B, and 10C are communicated with the drain tank 12.
  • An air reservoir is formed in the upper layer portion of the drain tank 12.
  • the power terminals 21B and 21C are disposed at the upper ends of the cylindrical dust collectors 10B and 10C, and the electrode bars 23B and 23C are penetrated through the centers of the power terminals 21B and 21C. Electrode pieces 25B and 25C are attached to a plurality of locations of the electrode rods 23B and 23C at equal intervals so that corona discharge is possible.
  • a suction pipe 13A is attached to the upper end side of the cylindrical dust collector 10A.
  • Discharge pipes 25 and 15 are attached to the upper end sides of the cylindrical dust collectors 10B and 10C.
  • Glass-coated cylinders 27B and 27C are attached around the electrode bars 23B and 23C on the bottom surfaces of the power terminals 21B and 21C in order to stably perform corona discharge.
  • the exhaust gas containing dust such as W 2 O 5 and SiO 2 discharged from the abatement apparatus 1 is branched in the middle, and then introduced into the casing 11A of the cylindrical dust collector 10A through the suction pipe 13A. It has become.
  • the exhaust gas is guided to the drain tank 12 after passing through the housing 11A. Thereafter, the exhaust gas rises from the drain tank 12 to the cylindrical dust collectors 10B and 10C and is discharged from the discharge pipes 15 and 25. The exhaust gas that has exited the discharge pipes 15 and 25 is guided to an exhaust duct (not shown).
  • Each of the housings 11A, 11B, and 11C is grounded, and a voltage of ⁇ 25 kV is applied in parallel from the same power source 26 to the electrode rods 23B and 23C.
  • the casings 11A, 11B, and 11C are constituted by double cylinders.
  • a weir with an inner cylinder is formed immediately below the suction pipe 13A and the discharge pipes 15 and 25.
  • a storage tank (not shown) is formed between the outer cylinder and the inner cylinder, and water is introduced through the water pipes 29A, 29B, 29C and stored in the storage tank.
  • the water stored here then overflows into the drain tank 12 in a water film shape little by little along the inner cylinder wall beyond the inner cylinder.
  • the water accumulated in the drain tank 12 is drained to the outside by a drain pump 31.
  • the exhaust gas is introduced into the housing 11A of the cylindrical dust collector 10A through the suction pipe 13A by suction from the exhaust duct side. Thereafter, the exhaust gas falls down inside the housing 11A.
  • casing 11 is low by having reversed the flow direction of waste gas by the 1st step and the 3rd step, and it can comprise in space saving.
  • the inside of the casings 11B and 11C is configured such that dust in the exhaust gas rises, the dust hardly adheres around the coated cylinders 27B and 27C. For this reason, even if a water film is formed inside the casings 11B and 11C, the dust does not adhere to the surroundings of the covering cylinders 27B and 27C in a form of absorbing moisture. Accordingly, there is no risk of leakage, and the dust collection performance is not easily lowered because it is stable for a long time. The interval between overhauls can be increased.
  • FIG. 1 A system configuration diagram of the second embodiment of the present invention is shown in FIG. Note that the same elements as those in FIG. 1 are denoted by the same reference numerals and description thereof is omitted.
  • a partition plate 37 is disposed in the air reservoir of the drain tank 12 of the wet electrostatic precipitator 20, and is partitioned into two spaces, a suction side space 12A and a discharge side space 12B.
  • the partition plate not the partition plate but the drain tank itself may be separated and independent.
  • the exhaust gas discharged from the abatement apparatus 1 is directly sucked into the suction side space 12A of the drain tank 12.
  • the suction pipe 13A in the first embodiment of the cylindrical dust collector 10A functions as the discharge pipe 35 in the second embodiment, and is discharged from the discharge pipe 25 of the cylindrical dust collector 10B and the discharge pipe 35 of the cylindrical dust collector 10A.
  • the exhaust gas is different from the first embodiment in that the exhaust gas is merged in the middle of the pipe and then sucked into the discharge side space 12B of the drain tank 12.
  • the cylindrical dust collector 10A is also different from the first embodiment in that the power terminal 21A, the electrode rod 23A, the electrode piece 25A, and the covering cylinder 27A are present.
  • the exhaust gas also rises from the suction side space 12A of the drain tank 12 in the housing 11A. For this reason, since the exhaust gas does not directly hit the covering cylinder 27A from the side, dust is hardly attached or deposited around the covering cylinders 27A and 27B.
  • the exhaust gas rises from the discharge side space 12B in the casing 11C. Accordingly, since the exhaust gas does not directly hit the side of the coated cylinder 27C from the side, the dust hardly accumulates around the coated cylinder 27C. For this reason, while all the cylindrical dust collectors 10A, 10B, and 10C can collect dust by corona discharge, there is no risk of leakage and the dust collection performance is less than 99% because it is stable for a long time. Accordingly, the interval between overhauls can be increased.
  • FIG. 3 shows a system configuration diagram of the third embodiment. Note that the same elements as those in FIG. 1 are denoted by the same reference numerals and description thereof is omitted.
  • the third embodiment is different from the second embodiment in that it does not have the cylindrical dust collector 10C.
  • the exhaust gas rises from the drain tank 22 to the housings 11A and 11B. For this reason, since the exhaust gas does not directly hit the coated cylinders 27A and 27B from the side, the dust hardly adheres or accumulates around the coated cylinders 27A and 27B. For this reason, there is no fear of electric leakage, and since it is stable over a long period of time, the dust collection performance is difficult to drop at 99% or more. Accordingly, the interval between overhauls can be increased. Moreover, it can be simply configured with only two cylindrical dust collectors 10A and 10B.
  • FIG. 10A A system configuration diagram of the fourth embodiment is shown in FIG. Note that the same elements as those in FIG. 1 are denoted by the same reference numerals and description thereof is omitted.
  • the fourth embodiment is different from the first embodiment in that the cylindrical dust collector 10A of the wet electrostatic precipitator 40 includes a power terminal 21A, an electrode bar 23A, an electrode piece 25A, and a covering cylinder 27A.
  • the discharge pipe 25 in the first embodiment of the cylindrical dust collector 10B functions as the suction pipe 13B in the fourth embodiment, and includes dust such as W 2 O 5 and SiO 2 discharged from the abatement apparatus 1.
  • the exhaust gas is different from the first embodiment in that the exhaust gas is branched into the middle and then introduced into the casings 11A and 11B of the cylindrical dust collectors 10A and 10B through the suction pipes 13A and 13B.
  • the dust remaining in the exhaust gas is again charged to negative ions by corona discharge in the process of rising from the drain tank 12 into the housing 11C. And this dust is attracted
  • the dust is efficiently removed by going through the first stage by the cylindrical dust collectors 10A and 10B, the second stage by passing through the drain tank 12, and the third stage by the cylindrical dust collector 10C.
  • the introduced exhaust gas is distributed to the cylindrical dust collectors 10A and 10B, the probability that dust adheres to or accumulates around the coated cylinders 27A and 27B is reduced.

Abstract

Provided is a wet electric dust collector for which overhaul after short periods has become unnecessary because decreases in dust-collecting performance are prevented for long periods. No cover tube (27A), to which there is a risk of dust adhering, is provided near the exhaust gas inlet of a cylindrical dust collector (10A). To prevent leakage of electricity, a power terminal (21A), electrode (23A) and electrode strip (25A) have been eliminated. The invention is configured so that exhaust gas is discharged from a discharge tube (25) of a cylindrical dust collector (10B) and a discharge tube (15) of a cylindrical dust collector (10C). Since dust adhering to the inner wall of the casing (11A) is pushed down the inner wall along with water to a drain tank (12), the dust is, in effect, washed off. The flow of the exhaust gas is from the lower parts of the casings (11B, 11C) to the upper parts, thereby making adherence or accumulation of dust around the cover tubes (27B, 27C) difficult.

Description

湿式電気集塵機Wet electric dust collector
　本発明は湿式電気集塵機（Wet Electrostatic Precipitator）に係わり、特に集塵性能が長期間にわたり落ちないようにすることで短期間でのオーバーホールを不要とした湿式電気集塵機に関する。 The present invention relates to a wet electrostatic precipitator, and more particularly to a wet electrostatic precipitator that eliminates the need for overhaul in a short period of time by preventing the dust collection performance from dropping over a long period of time.
　半導体素子の製造工程では、化学気相反応を利用して成膜するＣＶＤ（Chemical Vapor Deposition）処理やエッチング処理等が行われ、プロセスチャンバにおいて各種のガスが使用されている。 In the manufacturing process of a semiconductor element, a CVD (Chemical Vapor Deposition) process for forming a film using a chemical vapor reaction, an etching process, and the like are performed, and various gases are used in a process chamber.
　そして、このプロセスチャンバから化学気相反応等を経て発生する排ガスは、有害なＣＦ4（フロン１４）やＣ4Ｆ8（フロン３１８）などのＰＦＣガス（パーフロロカーボン：地球温暖化ガス）が含まれている。
　このＰＦＣガスは極めて安定なため、分解されずに大気中に放出されると環境に対して害が大きい。 The exhaust gas generated from the process chamber through a chemical vapor reaction or the like includes harmful P 4 gases (perfluorocarbon: global warming gas) such as CF 4 (Freon 14) and C 4 F 8 (Freon 318). It is.
Since this PFC gas is extremely stable, it is harmful to the environment if it is released into the atmosphere without being decomposed.
　このため、排ガス処理のため燃焼式やプラズマ式等の除害装置に通された上で、排ガスを無害化している。そして、この排ガス中には上記成分以外にＣＶＤプロセス如何によってＷ2Ｏ5（酸化タングステン）やＳiＯ2（二酸化ケイ素）の含まれていることがある。 For this reason, exhaust gas is rendered harmless after passing through a combustion type or plasma type detoxifying device for exhaust gas treatment. The exhaust gas may contain W 2 O 5 (tungsten oxide) or SiO 2 (silicon dioxide) depending on the CVD process in addition to the above components.
　このＷ2Ｏ5やＳiＯ2は除害装置において相当程度除去されるが、完全には除去され切れず残りは主に粉塵の形で除害装置から排出される。そこで、この残った粉塵を除去すべく除害装置の後段には湿式電気集塵機が備えられることが望ましい。この湿式電気集塵機の従来例としては例えば特許文献１に記載のものがある。 The W 2 O 5 and SiO 2 are removed to a considerable extent by the abatement apparatus, but are not completely removed and the remainder is discharged from the abatement apparatus mainly in the form of dust. Therefore, it is desirable that a wet electrostatic precipitator is provided at the subsequent stage of the abatement apparatus to remove the remaining dust. A conventional example of this wet type electrostatic precipitator is disclosed in Patent Document 1, for example.
特開平１１－２１６３８７号公報JP-A-11-216387
　ところで、この湿式電気集塵機の集塵効率はほぼ１００％に近くまで上げられ、かつ、安定的に長期間維持され、保守の回数をできるだけ少なくすることが望まれる。また、湿式電気集塵機の大きさは小型であることが望まれる。 By the way, it is desired that the dust collection efficiency of this wet type electrostatic precipitator can be increased to nearly 100%, can be stably maintained for a long period of time, and the number of maintenance can be minimized. Moreover, it is desired that the size of the wet electrostatic precipitator is small.
　更に、湿式電気集塵機は排出ガスの流量の大きさに応じて臨機応変に設計変更が容易な汎用性のあることが望ましい。
　更に、この湿式電気集塵機は集塵効率の観点からコロナ放電等を適用することが考えられるが、このコロナ放電用の電源にはシステムの簡素化及びコスト面からできるだけ共通の電源で構成されることが望ましい。 Furthermore, it is desirable that the wet type electrostatic precipitator has versatility that can be easily changed in design depending on the flow rate of the exhaust gas.
Furthermore, it is conceivable that this wet type electrostatic precipitator applies corona discharge from the viewpoint of dust collection efficiency, but the power source for this corona discharge should be composed of a common power source as much as possible in terms of simplification of the system and cost. Is desirable.
　本発明はこのような従来の課題に鑑みてなされたもので、集塵性能が長期間にわたり落ちないようにすることで短期間でのオーバーホールを不要とした湿式電気集塵機を提供することを目的とする。 The present invention has been made in view of such conventional problems, and an object of the present invention is to provide a wet type electrostatic precipitator that does not require overhaul in a short period of time by preventing the dust collection performance from deteriorating over a long period of time. To do.
　このため本発明（請求項１）は、粉塵を含む排ガスと、該排ガスが導入され浄化後に吐出される少なくとも１本の第１の筒状集塵機と、該筒状集塵機の筐体上部に配設され、該筐体との間に所定の電位を有する電極と、該電極の周囲を覆う被覆筒と、前記筐体の内側を水膜状に流れ落ちる水と、前記筐体が立設されたドレインタンクとを備えた湿式電気集塵機であって、前記排ガスが該ドレインタンクの空気溜まりを経由して前記筐体内を上昇した後、該筐体の上部から吐出されることを特徴とする。 Therefore, the present invention (Claim 1) includes an exhaust gas containing dust, at least one first cylindrical dust collector that is discharged after the exhaust gas is introduced and purified, and an upper portion of the casing of the cylindrical dust collector. An electrode having a predetermined electric potential between the casing, a covering cylinder covering the periphery of the electrode, water flowing down in the form of a water film inside the casing, and a drain in which the casing is erected A wet-type electrostatic precipitator including a tank, wherein the exhaust gas is discharged from an upper portion of the casing after rising in the casing via an air reservoir in the drain tank.
　排ガス中の粉塵は例えばコロナ放電等によりマイナスイオンに帯電される。そして、この粉塵は異なる電圧を有する筐体側に引き寄せられる。筐体の内側には水膜が形成されているため、この水により、筐体に付着した粉塵は流し落とされ、ドレインタンクへと落下する。
　排ガスの流れはドレインタンクの空気溜まりを経由して筐体の下方から上方へと流れる。従って、被覆筒に対して直接排ガスが当たる等により粉塵が被覆筒の周囲に付着したり堆積し難くなる。このため、漏電のおそれも無く、長期にわたり安定するため集塵性能も落ちにくい。従って、オーバーホールの間隔も長くできる。排ガスの流量の大きさに応じて円筒状集塵機の設置台数を設置すればよいので汎用性が高い。 Dust in the exhaust gas is charged to negative ions by, for example, corona discharge. And this dust is drawn near to the case side which has a different voltage. Since a water film is formed inside the housing, the dust attached to the housing is washed away by this water and falls into the drain tank.
The flow of the exhaust gas flows from the lower side to the upper side of the housing via the air reservoir in the drain tank. Therefore, dust is less likely to adhere to or accumulate around the coated cylinder, for example, when exhaust gas directly hits the coated cylinder. For this reason, there is no fear of electric leakage, and since it is stable over a long period of time, the dust collection performance is hardly lowered. Accordingly, the interval between overhauls can be increased. Since the number of installed cylindrical dust collectors may be set according to the flow rate of the exhaust gas, the versatility is high.
　また、本発明（請求項２）は、前記ドレインタンク上には筐体上部から排ガスを吸入する電極及び被覆筒を有しない少なくとも１本の第２の筒状集塵機と、該第２の筒状集塵機の筐体の内側を水膜状に流れ落ちる水とを更に備え、前記排ガスが該第２の筒状集塵機の筐体内を下降した後、前記ドレインタンクの空気溜まりを経由して前記第１の筒状集塵機の筐体内を上昇した後、該第１の筒状集塵機の筐体の上部から吐出されることを特徴とする。 According to the present invention (Claim 2), there is provided at least one second cylindrical dust collector not having an electrode and a coating cylinder for sucking exhaust gas from the upper part of the housing on the drain tank, and the second cylindrical shape. And water that flows down in the form of a water film inside the housing of the dust collector, and after the exhaust gas descends in the housing of the second cylindrical dust collector, the first tank passes through the air reservoir in the drain tank. After rising inside the casing of the cylindrical dust collector, it is discharged from the upper part of the casing of the first cylindrical dust collector.
　第２の円筒状集塵機における排ガスの流入口である筐体上部付近には粉塵が付着するおそれのある被覆筒を配設せず、また、漏電を防ぐため電極も配設されていない。このため、漏電のおそれも無く、長期にわたり安定するため集塵性能も落ちにくい。従って、オーバーホールの間隔も長くできる。 In the second cylindrical dust collector, there is no covering cylinder that may cause dust adhering near the upper part of the casing, which is an inflow port for exhaust gas, and no electrode is provided to prevent leakage. For this reason, there is no fear of electric leakage, and since it is stable over a long period of time, the dust collection performance is hardly lowered. Accordingly, the interval between overhauls can be increased.
　更に、本発明（請求項３）は、前記排ガスが前記ドレインタンクに直接導入されたことを特徴とする。 Furthermore, the present invention (Claim 3) is characterized in that the exhaust gas is directly introduced into the drain tank.
　排ガスをドレインタンクに直接導入したことで、排ガスの流入口には被覆筒や電極が存在しない。このため、漏電のおそれも無く、長期にわたり安定するため集塵性能も落ちにくい。従って、オーバーホールの間隔も長くできる。 Since the exhaust gas is directly introduced into the drain tank, there are no coated cylinders or electrodes at the exhaust gas inlet. For this reason, there is no fear of electric leakage, and since it is stable over a long period of time, the dust collection performance is hardly lowered. Accordingly, the interval between overhauls can be increased.
　更に、本発明（請求項４）は、前記ドレインタンク上には前記排ガスが導入され浄化後に吐出される少なくとも１本の第３の筒状集塵機を更に備え、前記第１の筒状集塵機の筐体の上部から吐出された排ガスが再び前記ドレインタンクに導入され、該ドレインタンクの空気溜まりを経由して前記第３の筒状集塵機の筐体内を上昇した後、該筐体の上部から吐出されることを特徴とする。 Furthermore, the present invention (Claim 4) further includes at least one third cylindrical dust collector that discharges after the exhaust gas is introduced and purified on the drain tank, and the housing of the first cylindrical dust collector is further provided. The exhaust gas discharged from the upper part of the body is reintroduced into the drain tank, and after rising in the casing of the third cylindrical dust collector via the air reservoir in the drain tank, the exhaust gas is discharged from the upper part of the casing. It is characterized by that.
　第３の筒状集塵機の筐体内についても排ガスは筐体の下方から上方へと流れることになるので被覆筒に対して直接排ガスが当たる等により粉塵が被覆筒の周囲に付着したり堆積し難くなる。このため、漏電のおそれも無く、長期にわたり安定するため集塵性能も落ちにくい。従って、オーバーホールの間隔も長くできる。 Also in the casing of the third cylindrical dust collector, the exhaust gas flows from the lower side to the upper side of the casing, so that it is difficult for dust to adhere or accumulate around the coated cylinder when the exhaust gas directly hits the coated cylinder. Become. For this reason, there is no fear of electric leakage, and since it is stable over a long period of time, the dust collection performance is hardly lowered. Accordingly, the interval between overhauls can be increased.
　更に、本発明（請求項５）は、前記電極には同一の電源から並列に電圧が供給されることを特徴とする。 Furthermore, the present invention (Claim 5) is characterized in that a voltage is supplied in parallel from the same power source to the electrodes.
　前述したように、すべての筒状集塵機において粉塵が被覆筒の周囲に付着することで電圧が漏電により低下し集塵効率が低下するという可能性は極めて低くなった。このため、電極に対し同一の電源から並列に電圧を供給しても問題はない。このことにより、湿式電気集塵機設備を簡素かつ安価に構成できる。 As described above, in all the cylindrical dust collectors, the possibility that the dust is attached to the periphery of the coated cylinder and the voltage is lowered due to electric leakage and the dust collection efficiency is lowered is extremely low. For this reason, there is no problem even if a voltage is supplied in parallel from the same power source to the electrodes. As a result, the wet electrostatic precipitator equipment can be configured simply and inexpensively.
　以上説明したように本発明によれば、排ガスがドレインタンクの空気溜まりを経由して筒状集塵機の筐体内を上昇した後、筐体の上部から吐出されるように構成したので、被覆筒に対して直接排ガスが当たる等により粉塵が被覆筒の周囲に付着したり堆積し難くなる。このため、漏電のおそれも無く、長期にわたり安定するため集塵性能も落ちにくい。従って、オーバーホールの間隔も長くできる。 As described above, according to the present invention, the exhaust gas rises in the casing of the cylindrical dust collector via the air reservoir in the drain tank, and is then discharged from the upper part of the casing. On the other hand, dust is less likely to adhere to or accumulate around the coated cylinder due to direct contact with exhaust gas. For this reason, there is no fear of electric leakage, and since it is stable over a long period of time, the dust collection performance is hardly lowered. Accordingly, the interval between overhauls can be increased.
本発明の第１実施形態のシステム構成図System configuration diagram of the first embodiment of the present invention 本発明の第２実施形態のシステム構成図System configuration diagram of the second embodiment of the present invention 本発明の第３実施形態のシステム構成図System configuration diagram of the third embodiment of the present invention 本発明の第４実施形態のシステム構成図System configuration diagram of the fourth embodiment of the present invention
　以下、本発明の第１の実施形態について説明する。本発明の第１実施形態のシステム構成図を図１に示す。 Hereinafter, a first embodiment of the present invention will be described. A system configuration diagram of the first embodiment of the present invention is shown in FIG.
　図１において、湿式電気集塵機１０には、ほぼ同じ外形の３本の円筒状集塵機１０Ａ、１０Ｂ、１０Ｃがドレインタンク１２上に立設されている。この円筒状集塵機１０Ａ、１０Ｂ、１０Ｃの筐体１１Ａ、１１Ｂ、１１Ｃのそれぞれの底部はドレインタンク１２と連通されている。このドレインタンク１２の上層部分には空気溜まりが形成されている。 In FIG. 1, the wet electrostatic precipitator 10 has three cylindrical dust collectors 10 </ b> A, 10 </ b> B, and 10 </ b> C having substantially the same outer shape standing on the drain tank 12. The bottoms of the casings 11A, 11B, and 11C of the cylindrical dust collectors 10A, 10B, and 10C are communicated with the drain tank 12. An air reservoir is formed in the upper layer portion of the drain tank 12.
　円筒状集塵機１０Ｂ、１０Ｃの上端には電源端子２１Ｂ、２１Ｃが配設され、かつ、この電源端子２１Ｂ、２１Ｃの中心には電極棒２３Ｂ、２３Ｃが貫通されている。そして、この電極棒２３Ｂ、２３Ｃの複数箇所には等間隔に電極片２５Ｂ、２５Ｃが取り付けられコロナ放電が可能なようになっている。 The power terminals 21B and 21C are disposed at the upper ends of the cylindrical dust collectors 10B and 10C, and the electrode bars 23B and 23C are penetrated through the centers of the power terminals 21B and 21C. Electrode pieces 25B and 25C are attached to a plurality of locations of the electrode rods 23B and 23C at equal intervals so that corona discharge is possible.
　円筒状集塵機１０Ａの上端側部には吸入管１３Ａが取り付けられている。また、円筒状集塵機１０Ｂ、１０Ｃの上端側部には吐出管２５、１５が取り付けられている。電源端子２１Ｂ、２１Ｃの底面の電極棒２３Ｂ、２３Ｃ回りにはコロナ放電が安定的に行われるようにするためガラス製の被覆筒２７Ｂ、２７Ｃが取り付けられている。 A suction pipe 13A is attached to the upper end side of the cylindrical dust collector 10A. Discharge pipes 25 and 15 are attached to the upper end sides of the cylindrical dust collectors 10B and 10C. Glass-coated cylinders 27B and 27C are attached around the electrode bars 23B and 23C on the bottom surfaces of the power terminals 21B and 21C in order to stably perform corona discharge.
　そして、除害装置１から排出されたＷ2Ｏ5やＳiＯ2等の粉塵を含む排ガスは途中で分岐された後、吸入管１３Ａを通じて円筒状集塵機１０Ａの筐体１１Ａ内部に導入されるようになっている。 The exhaust gas containing dust such as W 2 O 5 and SiO 2 discharged from the abatement apparatus 1 is branched in the middle, and then introduced into the casing 11A of the cylindrical dust collector 10A through the suction pipe 13A. It has become.
　この際、排ガスは筐体１１Ａを通過した後ドレインタンク１２へと導かれる。その後、排ガスはドレインタンク１２から円筒状集塵機１０Ｂ、１０Ｃを昇って吐出管１５、２５から排出される。吐出管１５、２５を出た排ガスは図示しない排風ダクトへと導かれるようになっている。 At this time, the exhaust gas is guided to the drain tank 12 after passing through the housing 11A. Thereafter, the exhaust gas rises from the drain tank 12 to the cylindrical dust collectors 10B and 10C and is discharged from the discharge pipes 15 and 25. The exhaust gas that has exited the discharge pipes 15 and 25 is guided to an exhaust duct (not shown).
　筐体１１Ａ、１１Ｂ、１１Ｃのそれぞれはアースされ、電極棒２３Ｂ、２３Ｃには同一の電源２６から並列に－２５ｋＶの電圧が印加されるようになっている。 Each of the housings 11A, 11B, and 11C is grounded, and a voltage of −25 kV is applied in parallel from the same power source 26 to the electrode rods 23B and 23C.
　また、筐体１１Ａ、１１Ｂ、１１Ｃは２重の筒で構成されている。そして、吸入管１３Ａ及び吐出管１５、２５の直下には内側の筒による堰が形成されている。外側の筒と内側の筒の筒同士の間には図示しない貯留槽が形成されており、水配管２９Ａ、２９Ｂ、２９Ｃを介して水が流入され、貯留槽に貯められるようになっている。 Further, the casings 11A, 11B, and 11C are constituted by double cylinders. A weir with an inner cylinder is formed immediately below the suction pipe 13A and the discharge pipes 15 and 25. A storage tank (not shown) is formed between the outer cylinder and the inner cylinder, and water is introduced through the water pipes 29A, 29B, 29C and stored in the storage tank.
　ここで貯められた水はその後、内側の筒を超えて少しずつ内側の筒壁に沿って水膜状にドレインタンク１２へと溢れ落ちるようになっている。
　ドレインタンク１２に溜まった水は排水ポンプ３１により外部へと排水されるようになっている。 The water stored here then overflows into the drain tank 12 in a water film shape little by little along the inner cylinder wall beyond the inner cylinder.
The water accumulated in the drain tank 12 is drained to the outside by a drain pump 31.
　次に、本発明の第１実施形態の動作を説明する。
　排風ダクト側からの吸引により吸入管１３Ａを通じて円筒状集塵機１０Ａの筐体１１Ａ内部に排ガスは導入される。その後、排ガスは筐体１１Ａ内部を下方へと落下する。 Next, the operation of the first embodiment of the present invention will be described.
The exhaust gas is introduced into the housing 11A of the cylindrical dust collector 10A through the suction pipe 13A by suction from the exhaust duct side. Thereafter, the exhaust gas falls down inside the housing 11A.
　筐体１１Ａの内側には水膜が形成されているため、この水により、筐体１１Ａに付着した粉塵は流し落とされ、ドレインタンク１２へと落下する。筐体１１Ａからドレインタンク１２へと出た排ガスはドレインタンク１２内部に溜まった水の上を通ることで冷却され、かつ、この溜まった水に接触することで更に吸収される。 Since a water film is formed inside the housing 11 </ b> A, dust attached to the housing 11 </ b> A is washed away by this water and falls to the drain tank 12. The exhaust gas discharged from the housing 11A to the drain tank 12 is cooled by passing over the water accumulated in the drain tank 12, and further absorbed by coming into contact with the accumulated water.
　また、このドレインタンク１２より筐体１１Ｂ、１１Ｃ内部を昇る過程で排ガス中の粉塵はコロナ放電によりマイナスイオンに帯電される。そして、この粉塵は０Ｖである筐体１１Ｂ、１１Ｃ側に静電界を利用して引き寄せられる。
　筐体１１Ｂ、１１Ｃの内側には水膜が形成されているため、この水により、筐体１１Ｂ、１１Ｃに付着した粉塵は流し落とされ、ドレインタンク１２へと落下する。粉塵の落とされた排ガスは吐出管１５、２５より吐出される。 In addition, dust in the exhaust gas is charged to negative ions by corona discharge in the process of rising from the drain tank 12 into the housings 11B and 11C. And this dust is attracted | pulled to the housing | casing 11B, 11C side which is 0V using an electrostatic field.
Since a water film is formed inside the housings 11B and 11C, the dust attached to the housings 11B and 11C is washed away by this water and falls to the drain tank 12. The exhaust gas from which the dust has been dropped is discharged from the discharge pipes 15 and 25.
　以上の工程を経ることで０．３μｍ以上の粒径の粉塵が９９％以上程度除去された排ガスにすることができる。即ち、コロナ放電による集塵作用及び水膜による落下作用に加えて排ガスがドレインタンク１２内部に溜まった水の上を通ることでの水への吸収も作用するので粉塵の除去効果は高い。 By passing through the above steps, it is possible to obtain an exhaust gas from which about 99% or more of dust having a particle diameter of 0.3 μm or more has been removed. That is, in addition to the dust collecting action by the corona discharge and the dropping action by the water film, the absorption of the exhaust gas through the water accumulated in the drain tank 12 also acts on the water, so the dust removal effect is high.
　即ち、粉塵は、円筒状集塵機１０Ａによる第１段階、ドレインタンク１２内部を経過することによる第２段階、更に、円筒状集塵機１０Ｂ、１０Ｃによる第３段階の各段階を経ることで効率よく除去される。円筒状集塵機１０Ａではコロナ放電は行わないものの、筐体１１Ａの内壁に付着した粉塵は水と共に下方のドレインタンク１２へと内壁を伝って押し流されるので粉塵を洗い落とすという効果がある。 That is, dust is efficiently removed by going through the first stage by the cylindrical dust collector 10A, the second stage by passing through the drain tank 12, and the third stage by the cylindrical dust collectors 10B and 10C. The Although the cylindrical dust collector 10A does not perform corona discharge, dust adhering to the inner wall of the housing 11A is pushed along with the water to the lower drain tank 12 through the inner wall, so that the dust is washed off.
　また、排ガスの流量の大きさに応じて円筒状集塵機の設置台数を設置すればよいので汎用性が高い。更に、第１段階と第３段階とで排ガスの流れる方向を逆にしたことで筐体１１の高さは低く、省スペースに構成できる。 Also, it is highly versatile because it is only necessary to install the number of cylindrical dust collectors according to the flow rate of exhaust gas. Furthermore, the height of the housing | casing 11 is low by having reversed the flow direction of waste gas by the 1st step and the 3rd step, and it can comprise in space saving.
　筐体１１Ｂ、１１Ｃ内部を排ガス中の粉塵が昇るように構成したので、被覆筒２７Ｂ、２７Ｃの周囲には粉塵が付着し難い。このため、筐体１１Ｂ、１１Ｃの内側に水膜を形成したとしてもこの粉塵が水分を吸収した形で被覆筒２７Ｂ、２７Ｃの周囲に付着することはない。従って、漏電のおそれも無く、長期にわたり安定するため集塵性能も落ちにくい。オーバーホールの間隔も長くできる。 Since the inside of the casings 11B and 11C is configured such that dust in the exhaust gas rises, the dust hardly adheres around the coated cylinders 27B and 27C. For this reason, even if a water film is formed inside the casings 11B and 11C, the dust does not adhere to the surroundings of the covering cylinders 27B and 27C in a form of absorbing moisture. Accordingly, there is no risk of leakage, and the dust collection performance is not easily lowered because it is stable for a long time. The interval between overhauls can be increased.
　次に、本発明の第２実施形態について説明する。本発明の第２実施形態のシステム構成図を図２に示す。なお、図１と同一要素のものについては同一符号を付して説明は省略する。 Next, a second embodiment of the present invention will be described. A system configuration diagram of the second embodiment of the present invention is shown in FIG. Note that the same elements as those in FIG. 1 are denoted by the same reference numerals and description thereof is omitted.
　図２において、湿式電気集塵機２０のドレインタンク１２の空気溜まりには仕切り板３７が配設され吸入側空間１２Ａと吐出側空間１２Ｂの２つの空間に仕切られている。但し、仕切り板では無く、ドレインタンク自体が分離独立されてもよい。 In FIG. 2, a partition plate 37 is disposed in the air reservoir of the drain tank 12 of the wet electrostatic precipitator 20, and is partitioned into two spaces, a suction side space 12A and a discharge side space 12B. However, not the partition plate but the drain tank itself may be separated and independent.
　本実施形態では、図２に示すように、除害装置１から排出された排ガスはドレインタンク１２の吸入側空間１２Ａへと直接吸入されるようになっている。 In this embodiment, as shown in FIG. 2, the exhaust gas discharged from the abatement apparatus 1 is directly sucked into the suction side space 12A of the drain tank 12.
　そして、円筒状集塵機１０Ａの第１実施形態における吸入管１３Ａは第２実施形態では吐出管３５として機能させており、円筒状集塵機１０Ｂの吐出管２５及び円筒状集塵機１０Ａの吐出管３５より吐出された排ガスは配管の途中で合流された後、ドレインタンク１２の吐出側空間１２Ｂに吸入されるようになっている点で第１実施形態とは相違している。
　また、円筒状集塵機１０Ａには電源端子２１Ａ、電極棒２３Ａ、電極片２５Ａ及び被覆筒２７Ａが存在する点でも第１実施形態と相違する。 The suction pipe 13A in the first embodiment of the cylindrical dust collector 10A functions as the discharge pipe 35 in the second embodiment, and is discharged from the discharge pipe 25 of the cylindrical dust collector 10B and the discharge pipe 35 of the cylindrical dust collector 10A. The exhaust gas is different from the first embodiment in that the exhaust gas is merged in the middle of the pipe and then sucked into the discharge side space 12B of the drain tank 12.
The cylindrical dust collector 10A is also different from the first embodiment in that the power terminal 21A, the electrode rod 23A, the electrode piece 25A, and the covering cylinder 27A are present.
　次に、本発明の第２実施形態の動作を説明する。
　第２実施形態では第１実施形態とは異なり、筐体１１Ａについてもドレインタンク１２の吸入側空間１２Ａより排ガスが上昇する。このため、被覆筒２７Ａに対しても直接排ガスが側方から当たることは無いので粉塵が被覆筒２７Ａ、２７Ｂの周囲に付着したり堆積され難い。 Next, the operation of the second embodiment of the present invention will be described.
In the second embodiment, unlike the first embodiment, the exhaust gas also rises from the suction side space 12A of the drain tank 12 in the housing 11A. For this reason, since the exhaust gas does not directly hit the covering cylinder 27A from the side, dust is hardly attached or deposited around the covering cylinders 27A and 27B.
　同様に、筐体１１Ｃについても吐出側空間１２Ｂより排ガスが上昇する。従って、被覆筒２７Ｃに対しても直接排ガスが側方から当たることは無いので粉塵は被覆筒２７Ｃの周囲にも堆積し難い。このため、円筒状集塵機１０Ａ、１０Ｂ、１０Ｃのすべてについてコロナ放電による集塵を可能にしつつも、漏電のおそれも無く、長期にわたり安定するため集塵性能も９９％以上で落ちにくい。従って、オーバーホールの間隔も長くできる。 Similarly, the exhaust gas rises from the discharge side space 12B in the casing 11C. Accordingly, since the exhaust gas does not directly hit the side of the coated cylinder 27C from the side, the dust hardly accumulates around the coated cylinder 27C. For this reason, while all the cylindrical dust collectors 10A, 10B, and 10C can collect dust by corona discharge, there is no risk of leakage and the dust collection performance is less than 99% because it is stable for a long time. Accordingly, the interval between overhauls can be increased.
　次に、本発明の第３実施形態について説明する。第３実施形態のシステム構成図を図３に示す。なお、図１と同一要素のものについては同一符号を付して説明は省略する。第３実施形態は第２実施形態に比べ、円筒状集塵機１０Ｃを有さない点で相違する。 Next, a third embodiment of the present invention will be described. FIG. 3 shows a system configuration diagram of the third embodiment. Note that the same elements as those in FIG. 1 are denoted by the same reference numerals and description thereof is omitted. The third embodiment is different from the second embodiment in that it does not have the cylindrical dust collector 10C.
　湿式電気集塵機３０のドレインタンク２２には筐体１１Ａ、１１Ｂのみが立設されている。除害装置１から排出された排ガスはドレインタンク２２へと直接吸入されるようになっている。円筒状集塵機１０Ｂの吐出管２５及び円筒状集塵機１０Ａの吐出管３５より吐出された排ガスは配管の途中で合流された後、排風ダクトへと導かれるようになっている。 Only the casings 11 </ b> A and 11 </ b> B are erected on the drain tank 22 of the wet electrostatic precipitator 30. The exhaust gas discharged from the abatement apparatus 1 is directly sucked into the drain tank 22. The exhaust gas discharged from the discharge pipe 25 of the cylindrical dust collector 10B and the discharge pipe 35 of the cylindrical dust collector 10A is joined in the middle of the piping and then led to the exhaust duct.
　次に、本発明の第３実施形態の動作を説明する。
　筐体１１Ａ、１１Ｂにはドレインタンク２２より排ガスが上昇する。このため、被覆筒２７Ａ、２７Ｂに対して直接排ガスが側方から当たることは無いので粉塵は被覆筒２７Ａ、２７Ｂの周囲に付着したり堆積し難い。このため、漏電のおそれも無く、長期にわたり安定するため集塵性能も９９％以上で落ちにくい。従って、オーバーホールの間隔も長くできる。また、円筒状集塵機１０Ａ、１０Ｂの２本のみで簡素に構成可能である。 Next, the operation of the third embodiment of the present invention will be described.
The exhaust gas rises from the drain tank 22 to the housings 11A and 11B. For this reason, since the exhaust gas does not directly hit the coated cylinders 27A and 27B from the side, the dust hardly adheres or accumulates around the coated cylinders 27A and 27B. For this reason, there is no fear of electric leakage, and since it is stable over a long period of time, the dust collection performance is difficult to drop at 99% or more. Accordingly, the interval between overhauls can be increased. Moreover, it can be simply configured with only two cylindrical dust collectors 10A and 10B.
　次に、本発明の第４実施形態について説明する。第４実施形態のシステム構成図を図４に示す。なお、図１と同一要素のものについては同一符号を付して説明は省略する。
　第４実施形態は、湿式電気集塵機４０の円筒状集塵機１０Ａには電源端子２１Ａ、電極棒２３Ａ、電極片２５Ａ及び被覆筒２７Ａが存在する点で第１実施形態と相違する。 Next, a fourth embodiment of the present invention will be described. A system configuration diagram of the fourth embodiment is shown in FIG. Note that the same elements as those in FIG. 1 are denoted by the same reference numerals and description thereof is omitted.
The fourth embodiment is different from the first embodiment in that the cylindrical dust collector 10A of the wet electrostatic precipitator 40 includes a power terminal 21A, an electrode bar 23A, an electrode piece 25A, and a covering cylinder 27A.
　そして、円筒状集塵機１０Ｂの第１実施形態における吐出管２５は第４実施形態では吸入管１３Ｂとして機能させており、除害装置１から排出されたＷ2Ｏ5やＳiＯ2等の粉塵を含む排ガスは途中で分岐された後、吸入管１３Ａ、１３Ｂを通じて円筒状集塵機１０Ａ、１０Ｂの筐体１１Ａ、１１Ｂ内部に導入されるようになっている点で第１実施形態と相違する。 The discharge pipe 25 in the first embodiment of the cylindrical dust collector 10B functions as the suction pipe 13B in the fourth embodiment, and includes dust such as W 2 O 5 and SiO 2 discharged from the abatement apparatus 1. The exhaust gas is different from the first embodiment in that the exhaust gas is branched into the middle and then introduced into the casings 11A and 11B of the cylindrical dust collectors 10A and 10B through the suction pipes 13A and 13B.
　次に、本発明の第４実施形態の動作を説明する。
　排風ダクト側からの吸引により吸入管１３Ａ、１３Ｂを通じて円筒状集塵機１０Ａ、１０Ｂの筐体１１Ａ、１１Ｂ内部に排ガスは導入される。このとき、排ガスは、円筒状集塵機１０Ａ、１０Ｂの筐体１１Ａ、１１Ｂ内部に分配されて導入される為、各円筒状集塵機で処理される粉塵の量も半分になっている。その後、排ガスは筐体１１Ａ、１１Ｂ内部を下方へと落下するが、この際、排ガス中の粉塵はコロナ放電によりマイナスイオンに帯電される。そして、この粉塵は０Ｖである筐体１１Ａ、１１Ｂ側に静電界を利用して引き寄せられる。 Next, the operation of the fourth embodiment of the present invention will be described.
By suction from the exhaust duct side, exhaust gas is introduced into the casings 11A and 11B of the cylindrical dust collectors 10A and 10B through the suction pipes 13A and 13B. At this time, since the exhaust gas is distributed and introduced into the casings 11A and 11B of the cylindrical dust collectors 10A and 10B, the amount of dust processed by each cylindrical dust collector is also halved. Thereafter, the exhaust gas falls down inside the casings 11A and 11B. At this time, dust in the exhaust gas is charged to negative ions by corona discharge. And this dust is attracted | pulled to the housing | casing 11A, 11B side which is 0V using an electrostatic field.
　筐体１１Ａ、１１Ｂの内側には水膜が形成されているため、この水により、筐体１１Ａ、１１Ｂに付着した粉塵は流し落とされ、ドレインタンク１２へと落下する。筐体１１Ａ、１１Ｂからドレインタンク１２へと出た排ガスはドレインタンク１２内部に溜まった水の上を通ることで冷却され、かつ、この溜まった水に接触することで更に吸収される。 Since a water film is formed inside the housings 11A and 11B, dust adhered to the housings 11A and 11B is washed away by this water and falls to the drain tank 12. The exhaust gas that has flowed out of the casings 11A and 11B to the drain tank 12 is cooled by passing over the water accumulated in the drain tank 12, and further absorbed by coming into contact with the accumulated water.
　また、このドレインタンク１２より筐体１１Ｃ内部を昇る過程で再び排ガス中の残っている粉塵はコロナ放電によりマイナスイオンに帯電される。そして、この粉塵は０Ｖである筐体１１Ｃ側に静電界を利用して引き寄せられる。
　筐体１１Ｃの内側には水膜が形成されているため、この水により、筐体１１Ｃに付着した粉塵は流し落とされ、ドレインタンク１２へと落下する。粉塵の落とされた排ガスは吐出管１５より吐出される。 Further, the dust remaining in the exhaust gas is again charged to negative ions by corona discharge in the process of rising from the drain tank 12 into the housing 11C. And this dust is attracted | pulled to the housing | casing 11C side which is 0V using an electrostatic field.
Since a water film is formed inside the housing 11C, dust attached to the housing 11C is washed away by this water and falls to the drain tank 12. The exhaust gas from which the dust has been dropped is discharged from the discharge pipe 15.
　以上の工程を経ることで０．３μｍ以上の粒径の粉塵が９９％以上程度除去された排ガスにすることができる。即ち、コロナ放電による集塵作用及び水膜による落下作用に加えて排ガスがドレインタンク１２内部に溜まった水の上を通ることでの水への吸収も作用するので粉塵の除去効果は高い。 By passing through the above steps, it is possible to obtain an exhaust gas from which about 99% or more of dust having a particle diameter of 0.3 μm or more has been removed. That is, in addition to the dust collecting action by the corona discharge and the dropping action by the water film, the absorption of the exhaust gas through the water accumulated in the drain tank 12 also acts on the water, so the dust removal effect is high.
　即ち、粉塵は、円筒状集塵機１０Ａ、１０Ｂによる第１段階、ドレインタンク１２内部を経過することによる第２段階、更に、円筒状集塵機１０Ｃによる第３段階の各段階を経ることで効率よく除去される。また、導入される排ガスが円筒集塵機１０Ａと１０Ｂに分配されることで、粉塵が被覆筒２７Ａ、２７Ｂの周囲に付着したり堆積したりする確率は低減している。 That is, the dust is efficiently removed by going through the first stage by the cylindrical dust collectors 10A and 10B, the second stage by passing through the drain tank 12, and the third stage by the cylindrical dust collector 10C. The Further, since the introduced exhaust gas is distributed to the cylindrical dust collectors 10A and 10B, the probability that dust adheres to or accumulates around the coated cylinders 27A and 27B is reduced.
　筐体１１Ｃにはドレインタンク１２より排ガスが上昇する。このため、被覆筒２７Ｃに対して直接排ガスが側方から当たることは無いので粉塵は被覆筒２７Ｃの周囲に付着したり堆積し難い。このため、漏電のおそれも無く、長期にわたり安定するため集塵性能も９９％以上で落ちにくい。従って、円筒状集塵機１０Ｃのオーバーホールの間隔を長くできる。 Exhaust gas rises from the drain tank 12 to the housing 11C. For this reason, since the exhaust gas does not directly hit the coated cylinder 27C from the side, the dust hardly adheres or accumulates around the coated cylinder 27C. For this reason, there is no fear of electric leakage, and since it is stable over a long period of time, the dust collection performance is difficult to drop at 99% or more. Therefore, the interval of the overhaul of the cylindrical dust collector 10C can be increased.
　　１　除害装置
　１０、２０、３０、４０　湿式電気集塵機
　１０Ａ、１０Ｂ、１０Ｃ　円筒状集塵機
　１１Ａ、１１Ｂ、１１Ｃ　筐体
　１２、２２　ドレインタンク
　１２Ａ　ドレインタンク吸入側空間
　１２Ｂ　ドレインタンク吐出側空間
　１３Ａ、１３Ｂ　吸入管
　１５、２５、３５　吐出管
　２１Ａ、２１Ｂ、２１Ｃ　電源端子
　２３Ａ、２３Ｂ、２３Ｃ　電極棒
　２５Ａ、２５Ｂ、２５Ｃ　電極片
　２６　電源
　２７Ａ、２７Ｂ、２７Ｃ　被覆筒
　２９Ａ、２９Ｂ、２９Ｃ　水配管
　３７　仕切り板 1 Detoxifier 10, 20, 30, 40 Wet electrostatic precipitator 10A, 10B, 10C Cylindrical dust collector 11A, 11B, 11C Housing 12, 22 Drain tank 12A Drain tank suction side space 12B Drain tank discharge side space 13A, 13B Suction Pipe 15, 25, 35 Discharge pipe 21A, 21B, 21C Power supply terminal 23A, 23B, 23C Electrode rod 25A, 25B, 25C Electrode piece 26 Power supply 27A, 27B, 27C Coated cylinder 29A, 29B, 29C Water pipe 37 Partition plate

Claims (5)

  1. 粉塵を含む排ガスと、
    該排ガスが導入され浄化後に吐出される少なくとも１本の第１の筒状集塵機（１０）と、
    該第１の筒状集塵機の筐体（１１）の上部に配設され、該筐体との間に所定の電位を有する電極（２１、２３、２５）と、
    該電極の周囲を覆う被覆筒（２７）と、
    前記筐体の内側を水膜状に流れ落ちる水と、
    前記筐体が立設されたドレインタンク（１２、２２）とを備えた湿式電気集塵機であって、
    前記排ガスが該ドレインタンクの空気溜まりを経由して前記筐体内を上昇した後、該筐体の上部から吐出されることを特徴とする湿式電気集塵機。     Exhaust gas containing dust,
    At least one first cylindrical dust collector (10) into which the exhaust gas is introduced and discharged after purification;
    An electrode (21, 23, 25) disposed at an upper portion of the casing (11) of the first cylindrical dust collector and having a predetermined potential with the casing;
    A coated cylinder (27) covering the periphery of the electrode;
    Water flowing down in the form of a water film inside the housing;
    A wet electrostatic precipitator including a drain tank (12, 22) in which the casing is erected,
    A wet electrostatic precipitator, wherein the exhaust gas is discharged from the upper part of the casing after rising in the casing via an air reservoir in the drain tank.
  2. 前記ドレインタンク（１２）上には、筐体（１１Ａ）上部から前記排ガスを吸入する電極及び被覆筒を有しない少なくとも１本の第２の筒状集塵機（１０Ａ）と、
    該第２の筒状集塵機の筐体（１１Ａ）の内側を水膜状に流れ落ちる水とを更に備え、
    前記排ガスが該第２の筒状集塵機の筐体内を下降した後、前記ドレインタンク（１２）の空気溜まりを経由して前記第１の筒状集塵機（１０Ｂ、１０Ｃ）の筐体（１１Ｂ、１１Ｃ）内を上昇した後、該第１の筒状集塵機の筐体の上部から吐出されることを特徴とする請求項１記載の湿式電気集塵機。     On the drain tank (12), at least one second cylindrical dust collector (10A) that does not have an electrode for sucking the exhaust gas from the upper part of the housing (11A) and a covering cylinder,
    Water further flowing down in the form of a water film inside the housing (11A) of the second cylindrical dust collector,
    After the exhaust gas descends in the casing of the second cylindrical dust collector, the casing (11B, 11C) of the first cylindrical dust collector (10B, 10C) passes through the air reservoir of the drain tank (12). 2. The wet electrostatic precipitator according to claim 1, wherein the wet electrostatic precipitator is discharged from an upper portion of the casing of the first cylindrical dust collector after rising inside.
  3. 前記排ガスが前記ドレインタンク（１２、２２）に直接導入されたことを特徴とする請求項１記載の湿式電気集塵機。 2. The wet electrostatic precipitator according to claim 1, wherein the exhaust gas is directly introduced into the drain tank (12, 22).
  4. 前記ドレインタンク（１２）上には前記排ガスが導入され浄化後に吐出される少なくとも１本の第３の筒状集塵機（１０Ｃ）を更に備え、
    前記第１の筒状集塵機（１０Ａ、１０Ｂ）の筐体（１１Ａ、１１Ｂ）の上部から吐出された前記排ガスが再び前記ドレインタンク（１２）に導入され、該ドレインタンクの空気溜まりを経由して前記第３の筒状集塵機の筐体（１１Ｃ）内を上昇した後、該筐体の上部から吐出されることを特徴とする請求項１、２又は３記載の湿式電気集塵機。     The drain tank (12) further includes at least one third cylindrical dust collector (10C) into which the exhaust gas is introduced and discharged after purification,
    The exhaust gas discharged from the upper part of the casing (11A, 11B) of the first cylindrical dust collector (10A, 10B) is reintroduced into the drain tank (12) and passes through the air reservoir in the drain tank. 4. The wet electrostatic precipitator according to claim 1, wherein the wet electrostatic precipitator is discharged from an upper part of the casing after rising in the casing (11 </ b> C) of the third cylindrical dust collector.
  5. 前記電極には同一の電源（２６）から並列に電圧が供給されることを特徴とする請求項１、２、３又は４記載の湿式電気集塵機。 The wet electrostatic precipitator according to claim 1, 2, 3, or 4, wherein the electrode is supplied with a voltage in parallel from the same power source (26).
PCT/JP2012/052872 2011-04-28 2012-02-08 Wet electric dust collector WO2012147387A1 (en)

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JPS5329275A (en) * 1976-08-31 1978-03-18 Nippon Earo Piyuuru Kk Purification exhaust gases
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US10814336B2 (en) 2015-02-23 2020-10-27 Edwards Limited Apparatus for treating gas
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