WO2012133217A1 - Glass composition for sealing, and sealing material - Google Patents

Glass composition for sealing, and sealing material Download PDF

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Publication number
WO2012133217A1
WO2012133217A1 PCT/JP2012/057577 JP2012057577W WO2012133217A1 WO 2012133217 A1 WO2012133217 A1 WO 2012133217A1 JP 2012057577 W JP2012057577 W JP 2012057577W WO 2012133217 A1 WO2012133217 A1 WO 2012133217A1
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WIPO (PCT)
Prior art keywords
glass
mass
sealing
ceramic
powder
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PCT/JP2012/057577
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French (fr)
Japanese (ja)
Inventor
中村 淳一
貴文 赤松
禎隆 真弓
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日本山村硝子株式会社
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Application filed by 日本山村硝子株式会社 filed Critical 日本山村硝子株式会社
Priority to JP2013507531A priority Critical patent/JP5887339B2/en
Publication of WO2012133217A1 publication Critical patent/WO2012133217A1/en

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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C8/00Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
    • C03C8/02Frit compositions, i.e. in a powdered or comminuted form
    • C03C8/04Frit compositions, i.e. in a powdered or comminuted form containing zinc
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C10/00Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
    • C03C10/0009Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing silica as main constituent
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C10/00Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
    • C03C10/0036Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing SiO2, Al2O3 and a divalent metal oxide as main constituents
    • C03C10/0045Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing SiO2, Al2O3 and a divalent metal oxide as main constituents containing SiO2, Al2O3 and MgO as main constituents
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00Glass compositions
    • C03C3/04Glass compositions containing silica
    • C03C3/062Glass compositions containing silica with less than 40% silica by weight
    • C03C3/064Glass compositions containing silica with less than 40% silica by weight containing boron
    • C03C3/066Glass compositions containing silica with less than 40% silica by weight containing boron containing zinc
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/04Joining burned ceramic articles with other burned ceramic articles or other articles by heating with articles made from glass
    • C04B37/042Joining burned ceramic articles with other burned ceramic articles or other articles by heating with articles made from glass in a direct manner
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32Ceramic

Definitions

  • the present invention relates to a glass composition for sealing and a sealing material, for example, a glass composition used for sealing between metal members, between ceramic members, or between a metal member and a ceramic member. And a sealing material containing glass powder made of the glass composition.
  • a sealing material containing glass powder is obtained by bonding metal members or ceramic members, or by bonding a metal member and a ceramic member, and part or all of the gap between these members.
  • ceramic members and metal members are collectively referred to as “ceramic members and the like”.
  • ceramic members and the like are sometimes used in a high-temperature atmosphere in which a general resin undergoes thermal decomposition. Therefore, a gap between members used in such an atmosphere is sealed.
  • a sealing material containing glass powder is used. In that case, for example, after filling the sealing material between the members to be sealed, the sealing material is heated to a temperature equal to or higher than the softening point of the glass powder contained in the sealing material.
  • the gap is sealed with a sintered body of glass.
  • the sealing material used for such applications uses glass powder that can precipitate a crystalline phase by firing, and is a member made of a fired body called glass ceramics in which the crystalline phase is precipitated in glass. It is done to seal between.
  • Patent Document 1 describes a glass composition for sealing between members made of an Fe—Ni—Co alloy exhibiting the same thermal expansion coefficient as a member made of ceramics.
  • the invention described in Patent Document 1 below has a low SiO 2 content and a low crystallization peak temperature, there is a possibility that wetting of the ceramic after glass softening becomes insufficient. Therefore, with the glass composition described in Patent Document 1, it is difficult to perform highly reliable sealing on a ceramic member or the like.
  • the temperature increase rate is made quick, the fluidity
  • the following patent document 2 describes a glass composition used for sealing alumina ceramic members.
  • the glass composition described in the following Patent Document 2 is easy to obtain a fired body having a small coefficient of thermal expansion at 30 to 550 ° C., and after firing, temperature changes such as temperature rise and cooling occur in a temperature range having a small coefficient of thermal expansion. If it occurs, stress due to the difference in thermal expansion coefficient is likely to be generated in the vicinity of the interface between the alumina ceramic member and the glass ceramic, which may cause peeling.
  • the glass composition described in Patent Document 2 has a high BaO content and crystallization after firing is likely to be insufficient, the ratio of the glass phase (residual glass phase) present in the glass ceramic is increased.
  • Patent Document 3 describes a glass composition for sealing between a gas sensor element composed of zirconia or alumina ceramics and insulating glass.
  • this glass composition also contains a large amount of BaO, crystallization after firing tends to be insufficient, and the difference between the thermal expansion coefficient at 30 to 500 ° C. and the thermal expansion coefficient at 30 to 600 ° C. is increased, resulting in sealing properties. May be reduced.
  • the present invention is useful for forming glass ceramics having thermal expansion characteristics suitable for sealing ceramic members and the like, and on the surface of ceramic members and the like during firing.
  • the object is to provide a glass composition exhibiting good wettability and a sealing material.
  • the present invention relating to a glass composition for sealing to solve the above-mentioned problems is, in terms of oxides, SiO 2 : 14 to 21% by mass, Al 2 O 3 : 0 to 12% by mass, B 2 O 3 : 17 to It has a composition ratio of 24% by mass, ZnO: 29 to 51% by mass, and MgO: 7 to 16% by mass.
  • the invention according to the sealing material for solving the problem contains a glass powder, a sealing material for use in sealing is fired, the glass powder, in terms of oxide, SiO 2 : 14 to 21% by mass, Al 2 O 3 : 0 to 12% by mass, B 2 O 3 : 17 to 24% by mass, ZnO: 29 to 51% by mass, MgO: 7 to 16% by mass It is characterized by being contained in.
  • a glass ceramic that exhibits a thermal expansion coefficient close to that of a ceramic member or the like and does not show a large difference between a thermal expansion coefficient at 30 to 500 ° C. and a thermal expansion coefficient at 30 to 600 ° C. is formed.
  • a sealing glass composition that exhibits good wetting with respect to the surface of a ceramic member or the like during firing, and a sealing material suitable for sealing a ceramic member or the like. Can be provided.
  • the glass composition for sealing according to the present invention preferably has a property of precipitating SiO 2 —ZnO-based and MgO—B 2 O 3 -based crystal phases during firing. According to this preferred embodiment, the glass ceramic obtained by firing the sealing glass composition of the present invention can be more reliably made to have a thermal expansion coefficient close to that of a ceramic member or the like.
  • the difference between the thermal expansion coefficient at 30 to 500 ° C. and the thermal expansion coefficient at 30 to 600 ° C. of the crystallized glass formed by firing is 9.0 ⁇ 10 ⁇ 7 / ° C.
  • the following is preferable. According to such a preferable aspect, the sealing property with a ceramic member or the like can be further improved.
  • the difference between the glass softening point (Ts) and the crystallization peak temperature (Tx) is preferably 130 ° C. or higher. According to such a preferable aspect, since the fluidity
  • the glass composition of the present invention preferably has a thermal expansion coefficient at 30 to 550 ° C. of the glass ceramic formed by firing of 60 to 70 ⁇ 10 ⁇ 7 / ° C. According to such a preferred embodiment, it is possible to exhibit excellent sealing properties for an alumina ceramic member having a thermal expansion coefficient of 60 to 80 ⁇ 10 ⁇ 7 / ° C. or the like.
  • the sealing material of the present invention contains ceramic powder together with the glass powder made of the glass composition in order to adjust the strength and thermal expansion coefficient of the fired body obtained by firing the sealing material.
  • the ratio of the ceramic powder in the total amount of the glass powder and the ceramic powder is preferably more than 0% by mass and 5% by mass or less.
  • sealing glass composition and sealing material of the present invention will be described below.
  • a sealing material of this embodiment what was comprised only by the glass powder which grind
  • the glass composition for sealing according to the present embodiment is SiO 2 : 14 to 21% by mass in terms of oxide, Al 2 O 3 : 0 to 12% by mass, B 2 O 3 : 17 to 24% by mass. %, ZnO: 29 to 51% by mass, and MgO: 7 to 16% by mass.
  • SiO 2 is a glass network forming component, which improves the stability of the glass during the production of the glass base, and is SiO 2 —ZnO-based (willemite, etc.) It is an essential component effective for producing the crystals.
  • the glass powder obtained by pulverizing the glass has a faster start of crystallization at the time of firing, so that the fluidity of the melt is early in the stage after firing. It is likely that the surface of a ceramic member or the like that performs sealing will be insufficiently wet.
  • the above range is defined for the content of SiO 2 is based on such a viewpoint, and the above lower limit is defined. If the content of SiO 2 is less than the above range, the stability of the glass is lowered, and when the glass powder is fired, the start of crystallization is accelerated, and the obtained fired body is not sufficiently bonded to the surface of the ceramic member or the like. This is because of fear.
  • the upper limit as described above is determined when the SiO 2 content exceeds the above range, the phase transition between the low-temperature crystal phase ( ⁇ ) and the high-temperature crystal phase ( ⁇ ) This is because SiO 2 -based (such as cristobalite) crystals that occur in a temperature range in which manufactured members are generally used are likely to precipitate.
  • SiO 2 -based (such as cristobalite) crystals that occur in a temperature range in which manufactured members are generally used are likely to precipitate.
  • ⁇ ⁇ ⁇ or ⁇ ⁇ ⁇ transition for example, when there is a transition at 250 ° C., heating or cooling with the temperature of 250 ° C. sandwiched after firing
  • a rapid volume expansion or contraction occurs, and there is a risk of generating microcracks in the glass ceramic obtained by firing or the ceramic member sealed with the glass ceramic.
  • thermomechanical analysis (TMA) apparatus Whether such volume expansion or contraction occurs can be confirmed using a thermomechanical analysis (TMA) apparatus.
  • TMA thermomechanical analysis
  • the glass ceramic made of the sealing glass composition of the present embodiment is 300 It is preferable that an inflection point is not observed on the TMA curve in a temperature range of ° C or lower.
  • the “inflection point” observed in the temperature range of 300 ° C. or less if the thermal expansion coefficient at 10 ° C. before and after a certain temperature has changed by 20% or more, the inflection point is indicated on the TMA curve. Can be confirmed.
  • the content of SiO 2 in the sealing glass composition of the present embodiment is usually 14% by mass or more, preferably 14.5% by mass or more, more preferably 15% by mass or more.
  • the content of SiO 2 is usually 21% by mass or less, preferably 19.5% by mass or less, more preferably 19% by mass or less. That is, the content of SiO 2 in the sealing glass composition of this embodiment is usually 14 to 21% by mass, preferably 14.5 to 20% by mass, and preferably 15 to 19% by mass. It is particularly preferable.
  • Al 2 O 3 is a component useful for improving the stability during production of the glass raw material, and for adjusting the crystallization start temperature and maintaining the adhesive force with the ceramic member and the like. It is.
  • Al 2 O 3 is an optional component, it is a useful component for forming Al 2 O 3 —ZnO-based (garnite, etc.) crystals in glass ceramics. Since the Al 2 O 3 —ZnO-based (garnite, etc.) crystal has a thermal expansion coefficient close to that of alumina or zirconia, the sealing material according to this embodiment is used for sealing alumina members or zirconia members. In some cases, it is preferable to form the sealing material in a glass ceramic obtained by firing.
  • the content of Al 2 O 3 in the sealing glass composition of the present embodiment is usually 0 to 12% by mass, but more preferably 1 to 10% by mass.
  • B 2 O 3 is a glass network forming component and an essential component for improving the stability of the glass during the production of the glass base.
  • B 2 O 3 is also an effective component for precipitating MgO—B 2 O 3 -based (such as suanite) crystals in the fired body (glass ceramic) when the sealing material of the present embodiment is fired. It is.
  • the lower limit as described above on the content of B 2 O 3 is defined, in the B than 2 content of O 3 is 17% by mass, decreases the stability of the glass, crystals in the firing of the glass powder It is because there is a possibility that fluidization may be started earlier and fluidity may be reduced.
  • the upper limit as described above is determined when the content of B 2 O 3 exceeds 24% by mass, and the glass phase that does not crystallize remains in the fired glass ceramic. This is because the linearity of the thermal expansion coefficient with respect to temperature change may be reduced. Therefore, the content of B 2 O 3 is usually 17% by mass or more, preferably 18% by mass or more, more preferably 19% by mass or more. Further, the content of B 2 O 3 is usually 24% by mass or less, preferably 23% by mass or less, more preferably 22% by mass or less. That is, the content of B 2 O 3 in the sealing glass composition of the present embodiment is usually 17 to 24% by mass, preferably 18 to 23% by mass, and preferably 19 to 22% by mass. It is particularly preferable.
  • ZnO is an essential component effective for producing crystals having few transformations such as phase transition such as SiO 2 —ZnO-based and Al 2 O 3 —ZnO-based (such as garnite).
  • ZnO is an effective component for suppressing Al 2 O 3 from remaining in the glass phase by generating Al 2 O 3 —ZnO-based crystals.
  • the lower limit as described above is determined for the content of ZnO. If the content of ZnO is less than 29% by mass, the degree of crystallinity in the fired body (glass ceramic) after firing is not sufficient. This is because the residual ratio of the glass phase to the crystal phase may be increased.
  • the upper limit as described above is determined for the content of ZnO. If the content of ZnO exceeds 51% by mass, the stability during the production of the glass raw material is reduced, and the glass powder is fired. This is because there is a possibility of reducing the flowability at the time.
  • ZnO is excessively contained, SiO 2 —ZnO-based crystals are precipitated, and the thermal expansion coefficient is 60 ⁇ 10 ⁇ 7 / ° C. or more and 70 ⁇ 10 ⁇ 7 which is suitable for sealing ceramic members and the like. There is a risk of causing the temperature to fall outside the range of less than / ° C.
  • the content of ZnO in the sealing glass composition of this embodiment is usually 29% by mass or more, preferably 32% by mass or more, more preferably 34% by mass or more.
  • the ZnO content is usually 51% by mass or less, preferably 50% by mass or less, and more preferably 49% by mass or less. That is, the ZnO content in the present embodiment is usually 29 to 51% by mass, preferably 32 to 50% by mass, and more preferably 34 to 49% by mass.
  • MgO is an essential component effective for precipitating MgO—B 2 O 3 -based highly expansive crystals in glass ceramics obtained by firing a sealing material.
  • the lower limit as described above is determined for the content of MgO because, if the content of MgO is less than 7% by mass, sufficient crystal precipitation does not occur in the fired glass ceramic, and the glass with respect to the crystalline phase Since the residual ratio of the phase is increased, it may be difficult to impart good heat resistance to the glass ceramic.
  • the thermal expansion coefficient of the glass ceramic is 60 ⁇ 10 which is suitable for sealing ceramic members and the like. There is a risk that it will be outside the range of ⁇ 7 / ° C. to 70 ⁇ 10 ⁇ 7 / ° C.
  • the upper limit as described above is determined when the MgO content exceeds 16% by mass, the stability during the production of the glass base material is lowered, and the glass when the sealing material is fired. This is because the melt does not have sufficient fluidity and it is difficult to perform good sealing. Further, when MgO is excessively contained, MgO—B 2 O 3 -based crystals are generated more and the thermal expansion coefficient may become higher than necessary.
  • the content of MgO in the sealing glass composition of the present embodiment is usually 7% by mass or more, preferably 9% by mass or more, and more preferably 10% by mass or more.
  • the content of MgO is usually 16% by mass or less, preferably 15% by mass or less, and more preferably 14% by mass or less. That is, the content of MgO in the present embodiment is usually 7 to 16% by mass, preferably 9 to 15% by mass, and more preferably 10 to 14% by mass.
  • the sealing material which concerns on this embodiment does not need to correspond by the composition ratio in conversion of an oxide in all the glass powders to contain, and two or more glass powders from which a component ratio differs may be blended.
  • the overall component ratio matches the above composition ratio
  • a part of the glass powder can be formed of a glass composition other than the above composition ratio.
  • the neutral component examples include CaO, SrO, BaO, Y 2 O 3 , La 2 O 5 , TiO 2 , ZrO 2 , and CeO 2 . If the total weight of these components is 2% by mass or less, even if they are usually contained as components of the glass composition, they have a significant adverse effect on the crystallized glass during firing for sealing or after firing. Not give. On the other hand, P 2 O 5 or the like makes it easier to stabilize the glass state when producing the glass raw material, but on the other hand, it causes phase separation in the crystallized glass after firing and substantially reduces acid resistance. It is preferable not to contain.
  • transition metal elements belonging to Group 5 to Group 11, especially Cu, etc. tend to improve the electrical conductivity of glass at high temperatures, so that it is a sealing material for solid oxide fuel cells that require insulation. Is an unsuitable component, and it is preferable not to contain substantially when a sealing material is utilized for this kind of use. Further, since alkali metals such as Na and K also show a tendency to improve electrical conductivity in a high temperature range, it is preferable that they are not substantially contained when the sealing material is used for this kind of application. .
  • the expression “substantially not contain” is not intended to deny the case where it is contained at the impurity level in this specification, for example, a raw material for producing a glass raw material, etc. It is intended that the inclusion is acceptable if the level is contained as an impurity. More specifically, the components as described above are less likely to be a problem even if they are contained if their total amount is 1000 ppm or less in terms of oxide, and correspond to the case where they are not substantially contained.
  • the content of at least the Cu component is less than 100 ppm in terms of oxides, from Group 5 to Group 11
  • the total of transition metal element components corresponding to the above is more preferably 100 ppm or less, and the total is particularly preferably 30 ppm or less.
  • the glass composition composed of the components as described above has a difference (Tx ⁇ Ts) between the crystallization peak temperature (Tx) and the softening point (Ts) of 130 ° C. or more. It is preferably adjusted.
  • the difference between the crystallization peak temperature and the softening point (Tx ⁇ Ts) is preferably 130 ° C. or more. If this difference is less than 130 ° C., the fluidity during firing is insufficient, and a dense fired body is obtained. This is because there is a fear that a gap may be formed between the sintered object such as an alumina ceramic member or a zirconia ceramic member and the fired body.
  • the difference (Tx ⁇ Ts) is preferably 140 ° C. or higher.
  • the upper limit of the difference (Tx ⁇ Ts) is not particularly limited, but is usually 200 ° C.
  • the crystallization peak temperature (Tx) is, for example, higher than the softening point (Ts) by performing differential thermal analysis (DTA) on a sample of about 40 mg at a rate of temperature increase of about 10 ° C./min. And it can obtain
  • the glass composition for sealing according to the present embodiment is more suitable for sealing applications such as a ceramic member by having such characteristics.
  • glass powder and the sealing material containing the glass powder will be described.
  • a metal oxide as a raw material is prepared and mixed, and the mixture is melted at a temperature of 1300 to 1450 ° C., for example.
  • the molten glass may be cooled without being crystallized, and the glass raw material obtained by the cooling may be dry pulverized.
  • a general sealing material is required to have high fluidity during firing because the glass powder once shrinks during firing and is required to wet the surface of a ceramic member while softening and flowing.
  • the particle size is adjusted according to the dry pulverization conditions, the average particle size is preferably 5 to 50 ⁇ m, and the maximum particle size is preferably 200 ⁇ m or less.
  • the average particle size is less than 5 ⁇ m, the proportion of fine powder increases, and there is a possibility that sufficient fluidity to wet the surface of a ceramic member or the like may not be exhibited.
  • the average particle size exceeds 50 ⁇ m, crystals are not sufficiently precipitated in the glass ceramic after sealing, and the residual ratio of the glass phase to the crystal phase is increased, and sufficient heat resistance may not be obtained.
  • a coarse powder having an excessively large particle size has a problem that the powder particles settle and separate when the powder is made into a paste or when applied and dried, and the crystallization is uneven and insufficient. May cause insufficient strength. From the above, it is preferable to adjust the particle size by removing fine powder and coarse powder by operations such as classification.
  • the glass powder contained in the sealing material according to the present embodiment is classified so that the maximum particle size is 200 ⁇ m or less, more preferably 150 ⁇ m or less, while the average particle size is 5 ⁇ m or more and 50 ⁇ m or less. Is preferably included in the sealing material.
  • This glass powder can be used alone or together with ceramic powder (ceramic filler) to form a sealing material.
  • ceramic powder ceramic filler
  • this ceramic powder is preferably contained in the sealing material in such a content that does not greatly affect the flowability during firing. That is, when the total amount of the glass powder and the ceramic powder is 100% by mass, if the ceramic powder content exceeds 5% by mass, the flowability may be hindered. It is preferable to be over 0% by mass and 5% by mass or less. However, if the content of the ceramic powder is less than 0.01% by mass, the effect may not be expected. Therefore, the content of the ceramic powder in the total amount of the glass powder and the ceramic powder is 0.01 to 5% by mass. The content is preferably 0.03 to 5% by mass. Further, it is particularly preferably 0.03 to 3% by mass.
  • the ceramic filler examples include, but are not limited to, powders of alumina, quartz glass, zirconia, magnesia, and the like.
  • the average particle size of the ceramic filler is preferably 20 ⁇ m or less, more preferably 5 ⁇ m or less, even more preferably 3 ⁇ m or less, and the maximum particle size is preferably 106 ⁇ m or less, more preferably 45 ⁇ m or less, and even more preferably 22 ⁇ m or less. is there.
  • the sealing material according to the present embodiment is not limited to the use of the glass powder alone, but a paste in which the glass powder and ceramic powder (ceramic filler) are dispersed in a binder or a slurry in which a solvent is dispersed. In a form, for example, it is used by applying to a sealing object by printing or by a dispenser.
  • the sealing material according to this embodiment uses glass powder composed of the glass composition as described above, the thermal expansion coefficient of the fired body after firing is suitable for sealing ceramic members and the like. It becomes a suitable state.
  • the inflection point of the thermal expansion coefficient due to the remaining glass in the glass ceramic after firing appears from 520 ° C. to less than 600 ° C.
  • the difference ( ⁇ 2 ⁇ 1 ) between the thermal expansion coefficient ( ⁇ 1) at 30 to 500 ° C. and the thermal expansion coefficient ( ⁇ 2 ) at 30 to 600 ° C. is 0 to 9.0 ⁇ 10 ⁇ It is preferably 7 / ° C.
  • thermal expansion coefficient (alpha 1) and the thermal expansion coefficient of 30 ⁇ 600 °C ( ⁇ 2) ( ⁇ 2 - ⁇ 1) is within this range at 500 ° C., thermal expansion
  • difference in coefficient exceeds 9.0 ⁇ 10 ⁇ 7 / ° C.
  • glass ceramics formed by firing the sealing material when a heating or cooling thermal cycle is applied between 500 ° C. and 600 ° C. This is because there is a possibility of generating microcracks in the ceramic member sealed with the glass ceramic, and if the difference in thermal expansion coefficient is negative, crystallization is considered to be insufficient. Because. Further, when the thermal expansion coefficient at 30 to 550 ° C.
  • a thermal expansion coefficient suitable for sealing a ceramic member or the like having a thermal expansion coefficient of 60 to 80 ⁇ 10 ⁇ 7 / ° C. is preferable.
  • a molded body that has been pre-sintered at a temperature near the softening point of the glass is used as a sealing material. can do.
  • the pre-sintered molded body is also called a pre-fired body and can be handled as a part, so that it has excellent handling properties and is suitable as a sealing material.
  • the calcined body is incorporated into a ceramic member or the like to be sealed, and is softened and fluidized by being fired, and then crystallized to exhibit excellent performance as a sealing material.
  • the calcined body will be described.
  • the average particle size of the glass powder for producing the calcined body is preferably in the range of 6 ⁇ m to 50 ⁇ m, and in the range of 6.5 ⁇ m to 25 ⁇ m, from the viewpoint of workability in the subsequent steps of granulation and dry press molding. Further preferred. In other words, if the average particle size is too fine, the calcined body may not exhibit sufficient fluidity during sealing firing, and also tends to cause uneven density during dry press molding, resulting in dimensional variation of the calcined body. There is a risk of causing. On the other hand, if the average particle size is too large, the yield of the granulated powder may be reduced.
  • a granulated powder suitable for dry press molding can be obtained by mixing the glass powder with a binder resin such as an acrylic resin as a molding aid.
  • a molded body having a desired shape can be obtained by dry press molding using this granulated powder.
  • this molded body By holding this molded body at a temperature not lower than the temperature at which the binder resin thermally decomposes and not higher than the glass transition point, the binder resin is removed, and then temporary sintering is performed at a temperature near the softening point of the glass. A fired body is obtained.
  • the surface roughness of the calcined body is large, contaminants are likely to adhere, and the flow of the glass is likely to be hindered.
  • the surface roughness of the calcined body is small, contaminants hardly adhere to the calcined body, and the flow of the glass is hardly inhibited. That is, a calcined body having stable sealing performance can be obtained by adjusting the average particle diameter of the glass powder, conditions for pre-sintering, and controlling the surface roughness.
  • the surface roughness of the calcined body of the present embodiment is preferably 0.5 ⁇ m or less, and more preferably 0.1 ⁇ m or less.
  • a flow test in which the calcined body is fired at about 900 ° C. on a substrate made of ceramics such as alumina and the appearance after firing is observed.
  • the flow of the glass is not hindered, and the shape after the flow becomes a normal state close to a hemisphere as shown in FIG.
  • the height after flow is low and sufficient sealing performance is obtained.
  • the flow of the glass is hindered and a normal shape cannot be obtained as shown in FIG.
  • flow height becomes high and sealing performance becomes inadequate.
  • the technical matters relating to the glass powder and other materials to be included in the sealing material, production conditions, etc., are within the scope not significantly impairing the effects of the present invention.
  • the present invention can also be employed, and the present invention is not limited to the above examples.
  • Examples 1 to 9 and Comparative Examples 1 to 10 The raw materials were prepared and mixed so as to have the glass compositions shown in Tables 1 and 2, and the prepared raw materials were put in a platinum crucible and melted at 1300 to 1450 ° C. for 1 hour to obtain glass flakes as a glass raw material. The glass flakes were put in a pot mill and pulverized while adjusting the average particle size to 5 to 50 ⁇ m, and then coarse particles were removed with a sieve having an opening of 106 ⁇ m. Examples 1 to 9 and Comparative Examples 1 to Ten glass powders were used. For Example 6, alumina powder (average particle size 2 ⁇ m) was added to the glass powder, and the mixture was evaluated. Comparative Example 9 is a glass powder having a composition range of Patent Document 3, and Comparative Example 10 has the same composition as the glass powder of Example 2 of Patent Document 2.
  • ⁇ Test method About the glass powder of the Example and the comparative example, the following method measured the average particle diameter of the glass powder, the softening point, and the crystallization peak temperature, it baked and evaluated the thermal expansion coefficient and the flow diameter. (1) using an average particle size of a laser scattering particle size distribution meter of glass powder (manufactured by Nikkiso Co., Ltd. Microtrac MT3000), it was determined a value of D 50 of the volume distribution mode.
  • the thermal expansion coefficient ( ⁇ ) of this specimen was determined from the slope of a straight line connecting two points of 30 ° C. and 550 ° C. in this thermal expansion curve, and this was used as the thermal expansion coefficient ( ⁇ ) of this specimen. If the coefficient of thermal expansion is less than 60 ⁇ 10 ⁇ 7 / ° C. or more than 70 ⁇ 10 ⁇ 7 / ° C., it may cause a problem in matching the thermal expansion characteristics with a ceramic member. An “x” is also written next to the mark. Further, since the inflection point of the thermal expansion coefficient due to the remaining glass in the crystallized glass after firing appears from 520 ° C. to less than 600 ° C., the thermal expansion coefficient at 30 to 500 ° C. and the thermal expansion coefficient at 30 to 600 ° C. The difference was calculated.
  • the sealing materials of the examples are flow characteristics that are indicators of wettability to the surface of ceramic members and the like, and thermal expansion coefficients and thermal expansion coefficients that are indicators of suitability for thermal expansion characteristics.
  • the difference between the crystallization peak temperature and the softening point is an index indicating whether reliable sealing can be easily performed without generating a gap or the like at the time of sealing.
  • Excellent results are also obtained in (Tx ⁇ Ts).
  • the sealing material of the comparative example has not obtained a good value in any item.
  • it is useful for forming glass ceramics having a thermal expansion characteristic suitable for sealing ceramic members and the like, and good for the surface of ceramic members and the like during firing. It can be seen that a glass composition and a sealing material exhibiting wettability are provided.
  • a molded body having a desired shape such as a cylinder, a prism, or a ring having a diameter or side of 5 to 25 mm and a thickness of 0.5 to 10 mm was obtained by dry press molding.
  • the pre-sintering temperature conditions are four levels of Condition 1, Condition 2, Condition 3, and Condition 4.
  • Condition 1 is the lowest, and is increased in this order, and Condition 4 is the highest. That is, with condition 2 near the softening point as a reference, condition 1 was set at reference ⁇ 5 ° C., condition 3 was set at reference + 5 ° C., and condition 4 was set at reference + 10 ° C. Note that this pre-sintering temperature condition may vary depending on the furnace used.
  • Deterioration rate (H1-H0) / (H0) (However, “H0” is the flow height of the calcined body not immersed in saline, and “H1” is the flow height of the calcined body immersed in 1% saline and dried.)
  • NaCl is a representative contaminant that becomes a crystallization nucleating agent that inhibits the flow of glass during sealing firing. When the contaminants are attached to the calcined body by dipping and drying in a 1% saline solution, the flow of the glass is inhibited and the flow height is increased.
  • the surface roughness of the calcined body is adjusted by adjusting the production conditions. It can be seen that the thickness Ra should be 0.5 ⁇ m or less, preferably 0.10 ⁇ m or less.
  • the adjustment of the surface roughness was made by adjusting the pre-sintering conditions, but other adjustments by the average particle diameter of the powder glass are also possible.
  • the surface roughness can be reduced as the average particle size is reduced in the range of 5 to 25 ⁇ m. For example, if the pre-sintering temperature is set to a higher condition, the powder glass is softened, contracted, and flowed, and the desired calcined body shape and dimensions cannot be obtained. More determined.
  • the glass composition for sealing of the present invention can be suitably used for sealing between the members by bringing the glass composition into contact with a metal member or a ceramic member and firing at a temperature of about 900 ° C., for example. Moreover, granulation, a dry press, and temporary sintering can be performed using the glass composition for sealing of this invention, and a calcined body can be obtained. This calcined body is easy to handle and can be suitably used by sealing between the members. As a specific application, for example, a sealing material for sealing a sealing portion such as a ceramic sensor or a fuel cell can be used.

Abstract

The objective of the present invention is to provide: a glass composition, which is useful for forming a glass ceramic that has thermal expansion characteristics suitable for sealing of a ceramic member and the like, and which exhibits good wettability with respect to the surface of the ceramic member and the like at the time of firing; and a sealing material. A glass composition for sealing, which has a compositional ratio wherein, in terms of oxides, SiO2 is 14-21% by mass, Al2O3 is 0-12% by mass, B2O3 is 17-24% by mass, ZnO is 29-51% by mass and MgO is 7-16% by mass, and the like are provided in order to achieve the above-mentioned objective.

Description

封着用ガラス組成物及び封着材Sealing glass composition and sealing material
 本発明は、封着用ガラス組成物、及び、封着材に関し、例えば、金属製部材どうしやセラミックス製部材どうし、あるいは、金属製部材とセラミックス製部材との間の封着に用いられるガラス組成物、及び、該ガラス組成物からなるガラス粉末を含有する封着材に関する。 The present invention relates to a glass composition for sealing and a sealing material, for example, a glass composition used for sealing between metal members, between ceramic members, or between a metal member and a ceramic member. And a sealing material containing glass powder made of the glass composition.
 従来、ガラス粉末を含有する封着材は、金属製部材どうしやセラミックス製部材どうし、あるいは、金属製部材とセラミックス製部材とを接着して、これらの部材間の間隙の一部、又は、全部を封着することを目的として広く用いられている(以下、セラミックス製部材と金属製部材とを総称して「セラミックス製部材等」ともいう)。
 例えば、セラミックス製部材等は、一般的な樹脂が熱分解を生じてしまうような高温雰囲気で使用される場合があるために、このような雰囲気下で使用される部材どうしの間隙を封着するのにはガラス粉末を含んだ封着材が用いられている。
 その際には、例えば、封着材を封着させる部材間に充填した後に該封着材に含有されているガラス粉末の軟化点以上の温度にまで封着材を加熱して前記部材間の間隙をガラスの焼成体で封着させることが行われている。
 このような用途に用いられる封着材には焼成によって結晶相を析出させることのできるガラス粉末が用いられたりしており、ガラス中に前記結晶相を析出させたガラスセラミックスと呼ばれる焼成体で部材間を封着することが行われている。
Conventionally, a sealing material containing glass powder is obtained by bonding metal members or ceramic members, or by bonding a metal member and a ceramic member, and part or all of the gap between these members. Are widely used for the purpose of sealing (hereinafter, ceramic members and metal members are collectively referred to as “ceramic members and the like”).
For example, ceramic members and the like are sometimes used in a high-temperature atmosphere in which a general resin undergoes thermal decomposition. Therefore, a gap between members used in such an atmosphere is sealed. For this, a sealing material containing glass powder is used.
In that case, for example, after filling the sealing material between the members to be sealed, the sealing material is heated to a temperature equal to or higher than the softening point of the glass powder contained in the sealing material. The gap is sealed with a sintered body of glass.
The sealing material used for such applications uses glass powder that can precipitate a crystalline phase by firing, and is a member made of a fired body called glass ceramics in which the crystalline phase is precipitated in glass. It is done to seal between.
 この種のガラスセラミックスは、一般的に焼成される際における結晶相の変態が少なく、且つ、高強度である点において優れており、セラミックス製部材等の封着に適した材料として広く用いられている。
 例えば、下記特許文献1には、セラミックス製部材と同程度の熱膨張係数を示すFe-Ni-Co合金製部材間を封着するためのガラス組成物について記載されている。
 しかしながら、下記特許文献1に記載の発明は、SiO含有量が少なく結晶化ピーク温度が低いため、ガラス軟化後のセラミックスへの濡れが不十分になるおそれを有する。
 そのため、特許文献1に記載のガラス組成物では、セラミックス製部材等に対して信頼性の高い封着を行うことが困難である。
 また、特許文献1に記載のガラス組成物では、昇温速度を速くしなければ、焼成時の流動性が不十分になりやすく、封着が不十分になるなどの問題を生じさせやすい。
This type of glass ceramics is generally excellent in that it has little transformation of crystal phase when fired and has high strength, and is widely used as a material suitable for sealing ceramic members and the like. Yes.
For example, Patent Document 1 below describes a glass composition for sealing between members made of an Fe—Ni—Co alloy exhibiting the same thermal expansion coefficient as a member made of ceramics.
However, since the invention described in Patent Document 1 below has a low SiO 2 content and a low crystallization peak temperature, there is a possibility that wetting of the ceramic after glass softening becomes insufficient.
Therefore, with the glass composition described in Patent Document 1, it is difficult to perform highly reliable sealing on a ceramic member or the like.
Moreover, in the glass composition of patent document 1, unless the temperature increase rate is made quick, the fluidity | liquidity at the time of baking will become inadequate easily, and it will be easy to produce problems, such as insufficient sealing.
 また、下記特許文献2には、アルミナセラミックス製部材どうしの封着に利用されるガラス組成物について記載されている。
 しかしながら、下記特許文献2に記載のガラス組成物は、30~550℃における熱膨張係数が小さな焼成体が得られやすく、焼成後にこの熱膨張係数の小さな温度域において昇温、冷却といった温度変化が生じるとアルミナセラミックス製部材とガラスセラミックスとの界面付近に熱膨張係数の違いによる応力を発生させやすく、剥離が生じるおそれを有する。
 また、特許文献2記載のガラス組成物は、BaOの含有量が多く焼成後の結晶化が不十分になりやすいため、ガラスセラミックス中に存在するガラス相(残存ガラス相)の割合が多くなって、該残存ガラス相の特性が全体に与える影響が大きくなる。
 即ち、残存ガラス相の転移点によって、例えば、30~500℃における熱膨張係数と30~600℃における熱膨張係数の差が大きくなりやすく、500℃から600℃の間で昇温または冷却の熱サイクルが加わった際に、アルミナセラミックス製部材とガラスセラミックスとの界面付近にマイクロクラックを発生させてしまい、封着性を低下させるおそれを有する。
Moreover, the following patent document 2 describes a glass composition used for sealing alumina ceramic members.
However, the glass composition described in the following Patent Document 2 is easy to obtain a fired body having a small coefficient of thermal expansion at 30 to 550 ° C., and after firing, temperature changes such as temperature rise and cooling occur in a temperature range having a small coefficient of thermal expansion. If it occurs, stress due to the difference in thermal expansion coefficient is likely to be generated in the vicinity of the interface between the alumina ceramic member and the glass ceramic, which may cause peeling.
Moreover, since the glass composition described in Patent Document 2 has a high BaO content and crystallization after firing is likely to be insufficient, the ratio of the glass phase (residual glass phase) present in the glass ceramic is increased. The influence of the characteristics of the residual glass phase on the whole becomes large.
That is, the difference between the thermal expansion coefficient at 30 to 500 ° C. and the thermal expansion coefficient at 30 to 600 ° C. tends to increase depending on the transition point of the remaining glass phase. When the cycle is applied, microcracks are generated in the vicinity of the interface between the alumina ceramic member and the glass ceramic, which may reduce the sealing performance.
 さらに、下記特許文献3には、ジルコニアやアルミナセラミックスより構成されるガスセンサ素子と絶縁ガラスとの間を封着するためのガラス組成物について記載されている。
 しかしながら、このガラス組成物もBaOを多く含有するため焼成後の結晶化が不十分になりやすく、30~500℃における熱膨張係数と30~600℃における熱膨張係数の差が大きくなり封着性を低下させるおそれを有する。
Furthermore, Patent Document 3 below describes a glass composition for sealing between a gas sensor element composed of zirconia or alumina ceramics and insulating glass.
However, since this glass composition also contains a large amount of BaO, crystallization after firing tends to be insufficient, and the difference between the thermal expansion coefficient at 30 to 500 ° C. and the thermal expansion coefficient at 30 to 600 ° C. is increased, resulting in sealing properties. May be reduced.
日本国特開昭58-204837号公報Japanese Laid-Open Patent Publication No. 58-204837 日本国特開平10-236844号公報Japanese Unexamined Patent Publication No. 10-236844 日本国特開2003-4694号公報Japanese Unexamined Patent Publication No. 2003-4694
 本発明は、上記のような問題点に鑑み、セラミックス製部材等の封着に適した熱膨張特性を有するガラスセラミックスの形成に有用で、且つ、焼成時においてセラミックス製部材等の表面に対して良好な濡れ性を示すガラス組成物ならびに封着材の提供を図ることを目的としている。  In view of the above-described problems, the present invention is useful for forming glass ceramics having thermal expansion characteristics suitable for sealing ceramic members and the like, and on the surface of ceramic members and the like during firing. The object is to provide a glass composition exhibiting good wettability and a sealing material. *
 上記課題を解決するための封着用ガラス組成物に係る本発明は、酸化物換算で、SiO:14~21質量%、Al:0~12質量%、B:17~24質量%、ZnO:29~51質量%、MgO:7~16質量%となる組成比を有していることを特徴としている。 The present invention relating to a glass composition for sealing to solve the above-mentioned problems is, in terms of oxides, SiO 2 : 14 to 21% by mass, Al 2 O 3 : 0 to 12% by mass, B 2 O 3 : 17 to It has a composition ratio of 24% by mass, ZnO: 29 to 51% by mass, and MgO: 7 to 16% by mass.
 また、課題を解決するための封着材に係る本発明は、ガラス粉末を含有し、焼成されて封着に用いられる封着材であって、前記ガラス粉末が、酸化物換算で、SiO:14~21質量%、Al:0~12質量%、B:17~24質量%、ZnO:29~51質量%、MgO:7~16質量%の組成比となるように含有されていることを特徴としている。 Further, the invention according to the sealing material for solving the problem contains a glass powder, a sealing material for use in sealing is fired, the glass powder, in terms of oxide, SiO 2 : 14 to 21% by mass, Al 2 O 3 : 0 to 12% by mass, B 2 O 3 : 17 to 24% by mass, ZnO: 29 to 51% by mass, MgO: 7 to 16% by mass It is characterized by being contained in.
 本発明によれば、セラミックス製部材等に近い熱膨張係数を示すとともに30~500℃における熱膨張係数と30~600℃における熱膨張係数との間に大きな差を示すことがないガラスセラミックスを形成させることができ、しかも、焼成時においてセラミックス製部材等の表面に対して良好な濡れを示す封着用ガラス組成物を提供することができ、セラミックス製部材等の封着に適した封着材を提供することができる。 According to the present invention, a glass ceramic that exhibits a thermal expansion coefficient close to that of a ceramic member or the like and does not show a large difference between a thermal expansion coefficient at 30 to 500 ° C. and a thermal expansion coefficient at 30 to 600 ° C. is formed. In addition, it is possible to provide a sealing glass composition that exhibits good wetting with respect to the surface of a ceramic member or the like during firing, and a sealing material suitable for sealing a ceramic member or the like. Can be provided.
 また、本発明に係る封着用ガラス組成物は、焼成時にSiO-ZnO系およびMgO-B系の結晶相を析出する性質を有することが好ましい。
 この好ましい態様によれば、本発明の封着用ガラス組成物を焼成することによって得られるガラスセラミックスをより確実にセラミックス製部材等に近い熱膨張係数とすることができる。
The glass composition for sealing according to the present invention preferably has a property of precipitating SiO 2 —ZnO-based and MgO—B 2 O 3 -based crystal phases during firing.
According to this preferred embodiment, the glass ceramic obtained by firing the sealing glass composition of the present invention can be more reliably made to have a thermal expansion coefficient close to that of a ceramic member or the like.
 また、本発明のガラス組成物は、焼成することにより形成される結晶化ガラスの30~500℃における熱膨張係数と30~600℃における熱膨張係数の差が9.0×10-7/℃以下であることが好ましい。
 このような好ましい態様によればセラミックス製部材等との封着性をより向上させ得る。
In the glass composition of the present invention, the difference between the thermal expansion coefficient at 30 to 500 ° C. and the thermal expansion coefficient at 30 to 600 ° C. of the crystallized glass formed by firing is 9.0 × 10 −7 / ° C. The following is preferable.
According to such a preferable aspect, the sealing property with a ceramic member or the like can be further improved.
 なお、本発明のガラス組成物は、ガラス軟化点(Ts)と結晶化ピーク温度(Tx)の差が130℃以上であることが好ましい。
 このような好ましい態様によれば、焼成時の流動性を良好なものとさせ得ることから封着作業を容易にさせ得る。
In the glass composition of the present invention, the difference between the glass softening point (Ts) and the crystallization peak temperature (Tx) is preferably 130 ° C. or higher.
According to such a preferable aspect, since the fluidity | liquidity at the time of baking can be made favorable, a sealing operation | work can be made easy.
 また、本発明のガラス組成物は、焼成することにより形成されるガラスセラミックスの30~550℃における熱膨張係数が60~70×10-7/℃であることが好ましい。
 このような好ましい態様によれば、通常、60~80×10-7/℃の熱膨張係数を有するアルミナセラミックス製部材などに対して優れた封着性を発揮させ得る。
The glass composition of the present invention preferably has a thermal expansion coefficient at 30 to 550 ° C. of the glass ceramic formed by firing of 60 to 70 × 10 −7 / ° C.
According to such a preferred embodiment, it is possible to exhibit excellent sealing properties for an alumina ceramic member having a thermal expansion coefficient of 60 to 80 × 10 −7 / ° C. or the like.
 さらに、本発明の封着材は、該封着材が焼成されてなる焼成体の強度や熱膨張係数の調整を図る上においては、前記ガラス組成物からなるガラス粉末とともにセラミックス粉末を含有させることが好ましく、その場合には、前記ガラス粉末と前記セラミックス粉末との合計量に占める前記セラミックス粉末の割合が0質量%を超え5質量%以下であることが好ましい。
 このようなセラミックス粉末の含有によって、焼成後の焼成体(ガラスセラミックスとセラミックス粉末の複合体)の強度や熱膨張係数の調整を容易にさせ得る。
Furthermore, the sealing material of the present invention contains ceramic powder together with the glass powder made of the glass composition in order to adjust the strength and thermal expansion coefficient of the fired body obtained by firing the sealing material. In this case, the ratio of the ceramic powder in the total amount of the glass powder and the ceramic powder is preferably more than 0% by mass and 5% by mass or less.
By including such ceramic powder, the strength and thermal expansion coefficient of the fired body (composite of glass ceramics and ceramic powder) after firing can be easily adjusted.
仮焼体のフローテスト結果(良好)。Flow test result of the calcined body (good). 仮焼体のフローテスト結果(不良)。Flow test result of the calcined body (defect).
 以下に本発明の封着用ガラス組成物と封着材とについて説明する。
 本実施形態の封着材としては、例えば、所定の封着用ガラス組成物からなるガラス原体を粉砕したガラス粉末のみによって構成されたもの、又は、このガラス粉末とともにセラミックス粉末を含むものが挙げられる。
 このガラス粉末は、焼成後の結晶化ガラスに所定の熱膨張係数を付与し得る点において、以下の成分組成となるように封着材に含有されることが重要である。
The sealing glass composition and sealing material of the present invention will be described below.
As a sealing material of this embodiment, what was comprised only by the glass powder which grind | pulverized the glass raw material which consists of a predetermined glass composition for sealing, or the thing containing ceramic powder with this glass powder is mentioned, for example. .
It is important that this glass powder is contained in the sealing material so as to have the following component composition in that a predetermined thermal expansion coefficient can be imparted to the crystallized glass after firing.
 具体的には、本実施形態に係る封着用ガラス組成物は、酸化物換算でSiO:14~21質量%、Al:0~12質量%、B:17~24質量%、ZnO:29~51質量%、MgO:7~16質量%となる組成比を有することが重要である。 Specifically, the glass composition for sealing according to the present embodiment is SiO 2 : 14 to 21% by mass in terms of oxide, Al 2 O 3 : 0 to 12% by mass, B 2 O 3 : 17 to 24% by mass. %, ZnO: 29 to 51% by mass, and MgO: 7 to 16% by mass.
 以下に、封着用ガラス組成物の各成分について説明する。
 本実施形態の封着用ガラス組成物においてSiOは、ガラス網目形成成分であり、ガラス原体の製造時にガラスの安定性を向上させるとともに、粉末ガラスの焼成においてSiO-ZnO系(ウィレマイト等)の結晶を生成させるのに有効な必須成分である。
Below, each component of the glass composition for sealing is demonstrated.
In the glass composition for sealing of this embodiment, SiO 2 is a glass network forming component, which improves the stability of the glass during the production of the glass base, and is SiO 2 —ZnO-based (willemite, etc.) It is an essential component effective for producing the crystals.
 なお、ガラス原体中に結晶を析出させると、これを粉砕して得たガラス粉末は、焼成時における結晶化の開始が早まる結果、焼成を開始した後の早い段階において溶融物の流動性が低下し、封着を行うセラミックス製部材等の表面での濡れが不十分になるおそれを有する。
 本実施形態の封着用ガラス組成物においてSiOの含有量に上記のような範囲が定められているのはこのような観点に基づくものであり、上記のような下限値が定められているのは、SiOの含有量が上記範囲未満では、ガラスの安定性が低下し、ガラス粉末を焼成する際において結晶化開始が早まって、得られる焼成体がセラミックス製部材等の表面に十分接着されないおそれを有するためである。
 また、上記のような上限値が定められているのは、SiOの含有量が上記範囲を超えると、低温型結晶相(α)と高温型結晶相(β)との相転移が、セラミックス製部材等が一般的に使用される温度域において生じるSiO系(クリストバライト等)の結晶が析出しやすくなるためである。
 なお、上記結晶相の転移(即ち、α→βまたはβ→αの転移)がある場合、例えば250℃において転移がある場合、焼成後にこの250℃の温度を挟んでの加熱または冷却が焼成体に加えられると、急激な体積膨張または収縮を生じ、焼成によって得られたガラスセラミックスや該ガラスセラミックスによって封着されているセラミックス製部材等にマイクロクラックを発生させるおそれを有する。
In addition, when crystals are precipitated in the glass raw material, the glass powder obtained by pulverizing the glass has a faster start of crystallization at the time of firing, so that the fluidity of the melt is early in the stage after firing. It is likely that the surface of a ceramic member or the like that performs sealing will be insufficiently wet.
In the glass composition for sealing of the present embodiment, the above range is defined for the content of SiO 2 is based on such a viewpoint, and the above lower limit is defined. If the content of SiO 2 is less than the above range, the stability of the glass is lowered, and when the glass powder is fired, the start of crystallization is accelerated, and the obtained fired body is not sufficiently bonded to the surface of the ceramic member or the like. This is because of fear.
In addition, the upper limit as described above is determined when the SiO 2 content exceeds the above range, the phase transition between the low-temperature crystal phase (α) and the high-temperature crystal phase (β) This is because SiO 2 -based (such as cristobalite) crystals that occur in a temperature range in which manufactured members are generally used are likely to precipitate.
When there is a transition of the crystal phase (that is, α → β or β → α transition), for example, when there is a transition at 250 ° C., heating or cooling with the temperature of 250 ° C. sandwiched after firing When added to the above, a rapid volume expansion or contraction occurs, and there is a risk of generating microcracks in the glass ceramic obtained by firing or the ceramic member sealed with the glass ceramic.
 なお、このような体積膨張や収縮が生じるものかどうかは、熱機械分析(TMA)装置を用いて確認することができ、例えば、本実施形態の封着用ガラス組成物からなるガラスセラミックスは、300℃以下の温度域においてTMA曲線に変曲点が観測されないものであることが好ましい。
 なお、この300℃以下の温度域で観測される「変曲点」については、ある温度の前後10℃における熱膨張係数に20%以上の変化を生じていれば変曲点としてTMA曲線上において確認することができる。
Whether such volume expansion or contraction occurs can be confirmed using a thermomechanical analysis (TMA) apparatus. For example, the glass ceramic made of the sealing glass composition of the present embodiment is 300 It is preferable that an inflection point is not observed on the TMA curve in a temperature range of ° C or lower.
As for the “inflection point” observed in the temperature range of 300 ° C. or less, if the thermal expansion coefficient at 10 ° C. before and after a certain temperature has changed by 20% or more, the inflection point is indicated on the TMA curve. Can be confirmed.
 以上のようなことから、本実施形態の封着用ガラス組成物におけるSiOの含有量は、通常14質量%以上とされ、好ましくは14.5質量%以上、より好ましくは15質量%以上とされる。
 また、SiOの含有量は、通常21質量%以下とされ、好ましくは19.5質量%以下、より好ましくは19質量%以下とされる。
 すなわち、本実施形態の封着用ガラス組成物におけるSiOの含有量は、通常、14~21質量%であり、14.5~20質量%とされることが好ましく、15~19質量%とされることが特に好ましい。
From the above, the content of SiO 2 in the sealing glass composition of the present embodiment is usually 14% by mass or more, preferably 14.5% by mass or more, more preferably 15% by mass or more. The
Further, the content of SiO 2 is usually 21% by mass or less, preferably 19.5% by mass or less, more preferably 19% by mass or less.
That is, the content of SiO 2 in the sealing glass composition of this embodiment is usually 14 to 21% by mass, preferably 14.5 to 20% by mass, and preferably 15 to 19% by mass. It is particularly preferable.
 本実施形態の封着用ガラス組成物においてAlは、ガラス原体の製造時における安定性を向上させ、結晶化開始温度の調整およびセラミックス製部材等との接着力を保つために役立つ成分である。
 なお、Alは、任意成分ではあるが、ガラスセラミックス中にAl-ZnO系(ガーナイト等)の結晶を形成させるために有用な成分である。
 このAl-ZnO系(ガーナイト等)の結晶は、アルミナやジルコニアなどに近い熱膨張係数を有することから本実施形態に係る封着材をアルミナ製部材やジルコニア製部材の封着に用いる場合には、該封着材を焼成して得られるガラスセラミックス中に形成させることが好ましい。
 ただし、過度にAlを封着用ガラス組成物に含有させると、焼成後に多くのガラス相を残存させる結果となって温度変化に対する熱膨張係数の直線性を低下させるおそれを有する。
 このようなことから、本実施形態の封着用ガラス組成物におけるAlの含有量は、通常、0~12質量%とされるが、1~10質量%とされることがより好ましい。
In the glass composition for sealing of this embodiment, Al 2 O 3 is a component useful for improving the stability during production of the glass raw material, and for adjusting the crystallization start temperature and maintaining the adhesive force with the ceramic member and the like. It is.
Although Al 2 O 3 is an optional component, it is a useful component for forming Al 2 O 3 —ZnO-based (garnite, etc.) crystals in glass ceramics.
Since the Al 2 O 3 —ZnO-based (garnite, etc.) crystal has a thermal expansion coefficient close to that of alumina or zirconia, the sealing material according to this embodiment is used for sealing alumina members or zirconia members. In some cases, it is preferable to form the sealing material in a glass ceramic obtained by firing.
However, if Al 2 O 3 is excessively contained in the glass composition for sealing, there is a risk that the linearity of the thermal expansion coefficient with respect to a temperature change may be caused as a result of leaving many glass phases after firing.
For these reasons, the content of Al 2 O 3 in the sealing glass composition of the present embodiment is usually 0 to 12% by mass, but more preferably 1 to 10% by mass.
 本実施形態の封着用ガラス組成物においてBは、ガラス網目形成成分であり、ガラス原体の製造時におけるガラスの安定性を向上させるための必須成分である。
 また、Bは、本実施形態の封着材を焼成した際にMgO-B系(スアナイト等)の結晶を焼成体(ガラスセラミックス)中に析出させるのにも有効な成分である。
 Bの含有量に上記のような下限値が定められているのは、Bの含有量が17質量%未満では、ガラスの安定性が低下し、ガラス粉末の焼成において結晶化開始が早まって、流動性を低下させるおそれを有するためである。
 また、上記のような上限値が定められているのは、Bの含有量が24質量%を超えると、焼成後のガラスセラミックス中に結晶化しないガラス相を残存させる結果となって温度変化に対する熱膨張係数の直線性を低下させるおそれを有するためである。
 従ってBの含有量は、通常17質量%以上とされ、好ましくは18質量%以上、より好ましくは19質量%以上とされる。
 また、Bの含有量は、通常24質量%以下とされ、好ましくは23質量%以下、より好ましくは22質量%以下とされる。
 すなわち、本実施形態の封着用ガラス組成物におけるBの含有量は、通常、17~24質量%であり、18~23質量%とされることが好ましく、19~22質量%とされることが特に好ましい。
In the glass composition for sealing of the present embodiment, B 2 O 3 is a glass network forming component and an essential component for improving the stability of the glass during the production of the glass base.
B 2 O 3 is also an effective component for precipitating MgO—B 2 O 3 -based (such as suanite) crystals in the fired body (glass ceramic) when the sealing material of the present embodiment is fired. It is.
The lower limit as described above on the content of B 2 O 3 is defined, in the B than 2 content of O 3 is 17% by mass, decreases the stability of the glass, crystals in the firing of the glass powder It is because there is a possibility that fluidization may be started earlier and fluidity may be reduced.
In addition, the upper limit as described above is determined when the content of B 2 O 3 exceeds 24% by mass, and the glass phase that does not crystallize remains in the fired glass ceramic. This is because the linearity of the thermal expansion coefficient with respect to temperature change may be reduced.
Therefore, the content of B 2 O 3 is usually 17% by mass or more, preferably 18% by mass or more, more preferably 19% by mass or more.
Further, the content of B 2 O 3 is usually 24% by mass or less, preferably 23% by mass or less, more preferably 22% by mass or less.
That is, the content of B 2 O 3 in the sealing glass composition of the present embodiment is usually 17 to 24% by mass, preferably 18 to 23% by mass, and preferably 19 to 22% by mass. It is particularly preferable.
 本実施形態の封着用ガラス組成物においてZnOは、SiO-ZnO系、Al-ZnO系(ガーナイト等)といった相転移などの変態が少ない結晶を生成させるために有効な必須成分である。
 また、ZnOは、Al-ZnO系の結晶を生成させることで、Alのガラス相への残存を抑制させるのにも効果的な成分である。
 ZnOの含有量に上記のような下限値が定められているのは、ZnOの含有量が29質量%未満では、焼成後の焼成体(ガラスセラミックス)における結晶化度が充分なものにならず、結晶相に対するガラス相の残存割合が高くなるおそれを有するためである。
In the glass composition for sealing of the present embodiment, ZnO is an essential component effective for producing crystals having few transformations such as phase transition such as SiO 2 —ZnO-based and Al 2 O 3 —ZnO-based (such as garnite). .
In addition, ZnO is an effective component for suppressing Al 2 O 3 from remaining in the glass phase by generating Al 2 O 3 —ZnO-based crystals.
The lower limit as described above is determined for the content of ZnO. If the content of ZnO is less than 29% by mass, the degree of crystallinity in the fired body (glass ceramic) after firing is not sufficient. This is because the residual ratio of the glass phase to the crystal phase may be increased.
 また、ZnOの含有量に上記のような上限値が定められているのは、ZnOの含有量が51質量%を超えると、ガラス原体の製造時における安定性が低下し、ガラス粉末の焼成時における流れ性を低下させるおそれを有するためである。
 また、ZnOを過度に含有させると、SiO-ZnO系の結晶の析出が多くなり、熱膨張係数をセラミックス製部材等の封着に好適な60×10-7/℃以上70×10-7/℃以下の範囲外とさせるおそれを有する。
In addition, the upper limit as described above is determined for the content of ZnO. If the content of ZnO exceeds 51% by mass, the stability during the production of the glass raw material is reduced, and the glass powder is fired. This is because there is a possibility of reducing the flowability at the time.
In addition, when ZnO is excessively contained, SiO 2 —ZnO-based crystals are precipitated, and the thermal expansion coefficient is 60 × 10 −7 / ° C. or more and 70 × 10 −7 which is suitable for sealing ceramic members and the like. There is a risk of causing the temperature to fall outside the range of less than / ° C.
 以上のようなことから、本実施形態の封着用ガラス組成物におけるZnOの含有量は、通常29質量%以上とされ、好ましくは32質量%以上、より好ましくは34質量%以上とされる。
 また、ZnOの含有量は、通常51質量%以下とされ、好ましくは50質量%以下、より好ましくは49質量%以下とされる。
 すなわち、本実施形態におけるZnOの含有量は、通常、29~51質量%であり、32~50質量%とされることが好ましく、34~49質量%とされることがより好ましい。
From the above, the content of ZnO in the sealing glass composition of this embodiment is usually 29% by mass or more, preferably 32% by mass or more, more preferably 34% by mass or more.
The ZnO content is usually 51% by mass or less, preferably 50% by mass or less, and more preferably 49% by mass or less.
That is, the ZnO content in the present embodiment is usually 29 to 51% by mass, preferably 32 to 50% by mass, and more preferably 34 to 49% by mass.
 本実施形態の封着用ガラス組成物においてMgOは、封着材を焼成して得られるガラスセラミックス中にMgO-B系の高膨張性結晶を析出させるのに有効となる必須成分である。
 MgOの含有量に上記のような下限値が定められているのは、MgOの含有量が7質量%未満では、焼成後のガラスセラミックス中に十分な結晶の析出が生じず、結晶相に対するガラス相の残存割合が大きくなるため、ガラスセラミックスに良好なる耐熱性を付与することが困難になるおそれを有する。
 また、MgOの含有量が7質量%未満では、MgO-B系の結晶の生成が不十分になり、ガラスセラミックスの熱膨張係数をセラミックス製部材等の封着に好適な60×10-7/℃以上70×10-7/℃以下の範囲外とさせるおそれを有する。
 また、上記のような上限値が定められているのは、MgOの含有量が16質量%を超えると、ガラス原体の製造時における安定性が低下し、封着材を焼成する際におけるガラス溶融物の流動性が十分なものにならず良好なる封着を行うことが困難になるおそれを有するためである。
 また、過度にMgOを含有させると、MgO-B系の結晶の生成が多くなり、熱膨張係数が必要以上に高くなるおそれを有する。
In the sealing glass composition of the present embodiment, MgO is an essential component effective for precipitating MgO—B 2 O 3 -based highly expansive crystals in glass ceramics obtained by firing a sealing material. .
The lower limit as described above is determined for the content of MgO because, if the content of MgO is less than 7% by mass, sufficient crystal precipitation does not occur in the fired glass ceramic, and the glass with respect to the crystalline phase Since the residual ratio of the phase is increased, it may be difficult to impart good heat resistance to the glass ceramic.
On the other hand, when the MgO content is less than 7% by mass, the generation of MgO—B 2 O 3 based crystals becomes insufficient, and the thermal expansion coefficient of the glass ceramic is 60 × 10 which is suitable for sealing ceramic members and the like. There is a risk that it will be outside the range of −7 / ° C. to 70 × 10 −7 / ° C.
In addition, the upper limit as described above is determined when the MgO content exceeds 16% by mass, the stability during the production of the glass base material is lowered, and the glass when the sealing material is fired. This is because the melt does not have sufficient fluidity and it is difficult to perform good sealing.
Further, when MgO is excessively contained, MgO—B 2 O 3 -based crystals are generated more and the thermal expansion coefficient may become higher than necessary.
 以上のようなことから本実施形態の封着用ガラス組成物におけるMgOの含有量は、通常7質量%以上とされ、好ましくは9質量%以上、より好ましくは10質量%以上とされる。
 また、MgOの含有量は、通常16質量%以下とされ、好ましくは15質量%以下、より好ましくは14質量%以下とされる。
 すなわち、本実施形態におけるMgOの含有量は、通常、7~16質量%であり、9~15質量%とされることが好ましく、10~14質量%とされることがより好ましい。
From the above, the content of MgO in the sealing glass composition of the present embodiment is usually 7% by mass or more, preferably 9% by mass or more, and more preferably 10% by mass or more.
The content of MgO is usually 16% by mass or less, preferably 15% by mass or less, and more preferably 14% by mass or less.
That is, the content of MgO in the present embodiment is usually 7 to 16% by mass, preferably 9 to 15% by mass, and more preferably 10 to 14% by mass.
 なお、本実施形態に係る封着材は、含有させる全てのガラス粉末において酸化物換算での組成比で一致している必要はなく、成分割合の異なるガラス粉末が複数ブレンドされていてもよい。
 なお、その場合、全体的な成分割合として上記組成比に合致するのであれば、一部のガラス粉末を上記組成比以外のガラス組成物で形成されたものとすることも可能である。
In addition, the sealing material which concerns on this embodiment does not need to correspond by the composition ratio in conversion of an oxide in all the glass powders to contain, and two or more glass powders from which a component ratio differs may be blended.
In this case, as long as the overall component ratio matches the above composition ratio, a part of the glass powder can be formed of a glass composition other than the above composition ratio.
 さらには、本実施形態においては、封着用ガラス組成物におけるSiO、Al、B、ZnO、MgOの各含有量の間に上記のような関係が満たされていれば、得られるガラス原体や結晶化ガラスの物性に対して大きな影響を与えない中性成分を、本発明の効果が著しく損なわれない範囲において加えることができ、このような中性成分を含有するような場合も本発明が意図する範囲のものである。 Furthermore, in the present embodiment, if the above relationship is satisfied between the contents of SiO 2 , Al 2 O 3 , B 2 O 3 , ZnO, and MgO in the sealing glass composition, Neutral components that do not significantly affect the physical properties of the resulting glass raw material or crystallized glass can be added as long as the effects of the present invention are not significantly impaired. In this case, it is within the scope of the present invention.
 この中性成分としては、例えば、CaO、SrO、BaO、Y、La、TiO、ZrO、CeO等が挙げられる。
 これらの成分は、その総合計量が2質量%以下であれば、通常、ガラス組成物の成分として含有させても、封着のための焼成時や、焼成後の結晶化ガラスに対して著しい悪影響を与えない。
 一方で、Pなどはガラス原体を作製する場合にガラス状態を安定化させやすくなる反面、焼成後の結晶化ガラスに分相を生じさせるとともに耐酸性を著しく低下させるために実質上含有させないことが好ましい。
 さらに、第5族から第11族にあたる遷移金属元素、中でもCuなどは高温域においてガラスの電気伝導度を向上させる傾向を示すことから絶縁性が求められる固体酸化物型燃料電池の封着材としては不向きな成分であり、封着材がこの種の用途に利用されるような場合には実質的に含有させないことが好ましい。
 また、NaやKなどのアルカリ金属も高温域において電気伝導度を向上させる傾向を示すことから、封着材がこの種の用途に利用されるような場合には実質的に含有させないことが好ましい。
Examples of the neutral component include CaO, SrO, BaO, Y 2 O 3 , La 2 O 5 , TiO 2 , ZrO 2 , and CeO 2 .
If the total weight of these components is 2% by mass or less, even if they are usually contained as components of the glass composition, they have a significant adverse effect on the crystallized glass during firing for sealing or after firing. Not give.
On the other hand, P 2 O 5 or the like makes it easier to stabilize the glass state when producing the glass raw material, but on the other hand, it causes phase separation in the crystallized glass after firing and substantially reduces acid resistance. It is preferable not to contain.
Further, transition metal elements belonging to Group 5 to Group 11, especially Cu, etc., tend to improve the electrical conductivity of glass at high temperatures, so that it is a sealing material for solid oxide fuel cells that require insulation. Is an unsuitable component, and it is preferable not to contain substantially when a sealing material is utilized for this kind of use.
Further, since alkali metals such as Na and K also show a tendency to improve electrical conductivity in a high temperature range, it is preferable that they are not substantially contained when the sealing material is used for this kind of application. .
 ここで、「実質的に含有させない」との表現については、本明細書においては、不純物レベルで含有されるような場合までをも否定する意図ではなく、例えば、ガラス原体を作製する原材料などに不純物として含まれているレベルであればその含有が許容され得ることを意図するものである。
 より具体的には、上記のような成分は、その合計量が酸化物換算で1000ppm以下であれば含有されても問題になるおそれは低く、実質的に含有されていない場合に相当する。
 ただし、上記のような問題を発生させるおそれをより確実に防止する意味においては、酸化物換算で、少なくとも、Cu成分が100ppm未満の含有量とされることが好ましく、第5族から第11族にあたる遷移金属元素成分の合計が100ppm以下の含有量とされることがより好ましく、前記合計が30ppm以下の含有量とされることが特に好ましい。
Here, the expression “substantially not contain” is not intended to deny the case where it is contained at the impurity level in this specification, for example, a raw material for producing a glass raw material, etc. It is intended that the inclusion is acceptable if the level is contained as an impurity.
More specifically, the components as described above are less likely to be a problem even if they are contained if their total amount is 1000 ppm or less in terms of oxide, and correspond to the case where they are not substantially contained.
However, in the sense of more reliably preventing the possibility of causing the above problems, it is preferable that the content of at least the Cu component is less than 100 ppm in terms of oxides, from Group 5 to Group 11 The total of transition metal element components corresponding to the above is more preferably 100 ppm or less, and the total is particularly preferably 30 ppm or less.
 また、本発明においては、上記のような成分によって構成されるガラス組成物は、その結晶化ピーク温度(Tx)と軟化点(Ts)の差(Tx-Ts)が130℃以上となるように調整されていることが好ましい。
 結晶化ピーク温度と軟化点の差(Tx-Ts)が130℃以上であることが好ましいのは、この差が130℃未満では焼成時における流動性が不足して、緻密な焼成体が得られないおそれを有するとともに、アルミナセラミックス製部材やジルコニアセラミックス製部材などの封着対象物と焼成体との間に隙間が生じるおそれを有するためである。
 このようなおそれをより確実に防止するためには、上記差(Tx-Ts)は、140℃以上であることが好ましい。
 なお、この差(Tx-Ts)の値に関して、その上限値は特に限定されるものではないが、通常、200℃とされる。
 なお、結晶化ピーク温度(Tx)は、例えば、40mg程度の試料に対して10℃/min程度の昇温速度で示差熱分析(DTA)を行って、軟化点(Ts)よりも高温側でかつ最初に見られる発熱ピークのピーク温度を測定することで求めることができる。
 本実施形態に係る封着用ガラス組成物は、このような特性を有することでセラミックス製部材等の封着用途によりいっそう適したものとなる。
In the present invention, the glass composition composed of the components as described above has a difference (Tx−Ts) between the crystallization peak temperature (Tx) and the softening point (Ts) of 130 ° C. or more. It is preferably adjusted.
The difference between the crystallization peak temperature and the softening point (Tx−Ts) is preferably 130 ° C. or more. If this difference is less than 130 ° C., the fluidity during firing is insufficient, and a dense fired body is obtained. This is because there is a fear that a gap may be formed between the sintered object such as an alumina ceramic member or a zirconia ceramic member and the fired body.
In order to prevent such a fear more reliably, the difference (Tx−Ts) is preferably 140 ° C. or higher.
The upper limit of the difference (Tx−Ts) is not particularly limited, but is usually 200 ° C.
The crystallization peak temperature (Tx) is, for example, higher than the softening point (Ts) by performing differential thermal analysis (DTA) on a sample of about 40 mg at a rate of temperature increase of about 10 ° C./min. And it can obtain | require by measuring the peak temperature of the exothermic peak seen initially.
The glass composition for sealing according to the present embodiment is more suitable for sealing applications such as a ceramic member by having such characteristics.
 次に、ガラス粉末ならびに該ガラス粉末を含有する封着材について説明する。
 上記に示したような封着用ガラス組成物によってガラス粉末を形成させるには、例えば、原料である金属酸化物を調合、混合し、該混合物を、例えば、1300~1450℃の温度で溶融した後、該溶融ガラスを結晶化させないようにして冷却させ、該冷却によって得られるガラス原体を乾式粉砕すればよい。
Next, the glass powder and the sealing material containing the glass powder will be described.
In order to form glass powder with the sealing glass composition as described above, for example, a metal oxide as a raw material is prepared and mixed, and the mixture is melted at a temperature of 1300 to 1450 ° C., for example. The molten glass may be cooled without being crystallized, and the glass raw material obtained by the cooling may be dry pulverized.
 また、一般的な封着材には、焼成時にガラス粉末が一旦収縮し、軟化流動しながらセラミックス製部材等の表面を濡らすことが求められるため、焼成時の流動性が高いことが求められる。
 このためには、上記乾式粉砕の条件により粒径を調整し、平均粒径を5~50μmとすることが好ましく、最大粒径を200μm以下とすることが好ましい。
 例えば、平均粒径が5μm未満では、微粉の割合が多くなり、セラミックス製部材等の表面を濡らす十分な流動性が発揮されないおそれを有する。
 一方で平均粒径が50μmを超えると、封着後のガラスセラミックス中に十分結晶が析出せず、結晶相に対するガラス相の残存割合が大きくなって十分な耐熱性が得られないおそれを有する。
Further, a general sealing material is required to have high fluidity during firing because the glass powder once shrinks during firing and is required to wet the surface of a ceramic member while softening and flowing.
For this purpose, the particle size is adjusted according to the dry pulverization conditions, the average particle size is preferably 5 to 50 μm, and the maximum particle size is preferably 200 μm or less.
For example, if the average particle size is less than 5 μm, the proportion of fine powder increases, and there is a possibility that sufficient fluidity to wet the surface of a ceramic member or the like may not be exhibited.
On the other hand, when the average particle size exceeds 50 μm, crystals are not sufficiently precipitated in the glass ceramic after sealing, and the residual ratio of the glass phase to the crystal phase is increased, and sufficient heat resistance may not be obtained.
 ここで、粒子径が過度に小さい微粉では結晶化開始が早くなり、封着焼成時における溶融物の流れ性が低下して流動阻害が生じるおそれを有し、封着材の塗布・焼成の回数を増加させる必要が生じて当該封着材を用いて製造される製品の製造コストを増大させるおそれを有する。
 一方、粒子径が過度に大きい粗粉は、粉末をペースト化する際、あるいは塗布、乾燥の際に、粉末粒子が沈降し分離するという問題と、結晶化が不均一、不十分となりやすく焼成体の強度不足をまねくおそれを有する。
 上記のようなことから、微粉、粗粉を分級等の操作により取り除くことによって粒径を調整することが好ましい。
 すなわち、本実施形態に係る封着材に含有させるガラス粉末は、平均粒径を、5μm以上、且つ、50μm以下にしつつ最大粒径が、200μm以下、より好ましくは150μm以下となるように分級操作を行って封着材に含有させることが好ましい。
Here, when the particle size is too small, crystallization starts earlier, the flowability of the melt at the time of sealing firing may decrease, and flow inhibition may occur, and the number of times the sealing material is applied and fired It is necessary to increase the manufacturing cost of the product manufactured using the sealing material.
On the other hand, a coarse powder having an excessively large particle size has a problem that the powder particles settle and separate when the powder is made into a paste or when applied and dried, and the crystallization is uneven and insufficient. May cause insufficient strength.
From the above, it is preferable to adjust the particle size by removing fine powder and coarse powder by operations such as classification.
That is, the glass powder contained in the sealing material according to the present embodiment is classified so that the maximum particle size is 200 μm or less, more preferably 150 μm or less, while the average particle size is 5 μm or more and 50 μm or less. Is preferably included in the sealing material.
 このガラス粉末は、単独で、又は、セラミックス粉末(セラミックスフィラー)とともに封着材を構成させることができる。
 このセラミックス粉末を含有させることで熱膨張係数の微調整や焼成後のガラスの強度向上を図ることができる。
 ただし、このセラミックス粉末は、焼成時における流れ性に大きく影響を与えない程度の含有量で封着材に含有させることが好ましい。
 すなわち、ガラス粉末とセラミックス粉末との合計量を100質量%とする場合、前記セラミックス粉末含有量が5質量%を超えると流れ性を阻害させるおそれを有することから、セラミックス粉末を含有させるのであれば0質量%を超え5質量%以下とすること好ましい。
 ただし、セラミックス粉末の含有量が0.01質量%未満では効果が期待できないおそれを有することからガラス粉末とセラミックス粉末との合計量に占めるセラミックス粉末の含有量は0.01~5質量%とすることが好ましく、0.03~5質量%とすることがより好ましい。さらには、0.03~3質量%とすることが特に好ましい。
This glass powder can be used alone or together with ceramic powder (ceramic filler) to form a sealing material.
By containing this ceramic powder, it is possible to finely adjust the coefficient of thermal expansion and improve the strength of the glass after firing.
However, this ceramic powder is preferably contained in the sealing material in such a content that does not greatly affect the flowability during firing.
That is, when the total amount of the glass powder and the ceramic powder is 100% by mass, if the ceramic powder content exceeds 5% by mass, the flowability may be hindered. It is preferable to be over 0% by mass and 5% by mass or less.
However, if the content of the ceramic powder is less than 0.01% by mass, the effect may not be expected. Therefore, the content of the ceramic powder in the total amount of the glass powder and the ceramic powder is 0.01 to 5% by mass. The content is preferably 0.03 to 5% by mass. Further, it is particularly preferably 0.03 to 3% by mass.
 上記セラミックスフィラーとしては、アルミナ、石英ガラス、ジルコニア、マグネシアなどの粉末が挙げられるが、これらに限定されない。
 セラミックスフィラーの平均粒径は、好ましくは20μm以下、より好ましくは5μm以下、さらに好ましくは3μm以下であり、かつ最大粒径は、好ましくは106μm以下、より好ましくは45μm以下、さらに好ましくは22μm以下である。
Examples of the ceramic filler include, but are not limited to, powders of alumina, quartz glass, zirconia, magnesia, and the like.
The average particle size of the ceramic filler is preferably 20 μm or less, more preferably 5 μm or less, even more preferably 3 μm or less, and the maximum particle size is preferably 106 μm or less, more preferably 45 μm or less, and even more preferably 22 μm or less. is there.
 なお、本実施形態に係る封着材は、上記ガラス粉末単体での使用だけでなく、上記ガラス粉末とセラミックス粉末(セラミックスフィラー)とをバインダーに分散させたペーストや溶媒に分散させたスラリーなどの形態で、例えば、印刷により又はディスペンサーによって封着対象物に塗布して使用される。
 特に、本実施形態に係る封着材は、上記に述べたようなガラス組成物で構成されたガラス粉末が用いられるために焼成後の焼成体の熱膨張係数がセラミックス製部材等の封着に好適な状態となる。
Note that the sealing material according to the present embodiment is not limited to the use of the glass powder alone, but a paste in which the glass powder and ceramic powder (ceramic filler) are dispersed in a binder or a slurry in which a solvent is dispersed. In a form, for example, it is used by applying to a sealing object by printing or by a dispenser.
In particular, since the sealing material according to this embodiment uses glass powder composed of the glass composition as described above, the thermal expansion coefficient of the fired body after firing is suitable for sealing ceramic members and the like. It becomes a suitable state.
 具体的には、上記に示したようなガラス組成物においては、焼成後のガラスセラミックス中の残存ガラスに起因する熱膨張係数の変曲点が520℃から600℃未満に現れるため、良好な封着性を発揮させるためには30~500℃における熱膨張係数(α1)と30~600℃における熱膨張係数(α)の差(α-α)が0~9.0×10-7/℃であることが好ましい。
 30~500℃における熱膨張係数(α)と30~600℃における熱膨張係数(α)の差(α-α)がこのような範囲内であることが好ましいのは、熱膨張係数差が9.0×10-7/℃を超えるものは、500℃から600℃の間で昇温または冷却の熱サイクルが加わった際に、当該封着材が焼成されてなるガラスセラミックスや、該ガラスセラミックスによって封着されているセラミックス製部材等にマイクロクラックを発生させるおそれを有するためであり、熱膨張係数の差が負になるようであれば結晶化が不十分であると考えられるためである。
 また、焼成後の結晶化ガラスの30~550℃における熱膨張係数を60~70×10-7/℃にすると、30~500℃における熱膨張係数および30~600℃における熱膨張係数においても、60~80×10-7/℃の熱膨張係数を有するセラミックス製部材等の封着に好適な熱膨張係数となるため好ましい。
Specifically, in the glass composition as described above, the inflection point of the thermal expansion coefficient due to the remaining glass in the glass ceramic after firing appears from 520 ° C. to less than 600 ° C. In order to exhibit the wearability, the difference (α 2 −α 1 ) between the thermal expansion coefficient (α1) at 30 to 500 ° C. and the thermal expansion coefficient (α 2 ) at 30 to 600 ° C. is 0 to 9.0 × 10 It is preferably 7 / ° C.
30 to the and the difference in thermal expansion coefficient (alpha 1) and the thermal expansion coefficient of 30 ~ 600 ℃ (α 2) (α 2 -α 1) is within this range at 500 ° C., thermal expansion When the difference in coefficient exceeds 9.0 × 10 −7 / ° C., glass ceramics formed by firing the sealing material when a heating or cooling thermal cycle is applied between 500 ° C. and 600 ° C. This is because there is a possibility of generating microcracks in the ceramic member sealed with the glass ceramic, and if the difference in thermal expansion coefficient is negative, crystallization is considered to be insufficient. Because.
Further, when the thermal expansion coefficient at 30 to 550 ° C. of the crystallized glass after firing is 60 to 70 × 10 −7 / ° C., the thermal expansion coefficient at 30 to 500 ° C. and the thermal expansion coefficient at 30 to 600 ° C. A thermal expansion coefficient suitable for sealing a ceramic member or the like having a thermal expansion coefficient of 60 to 80 × 10 −7 / ° C. is preferable.
 また、上記ガラス粉末および上記ガラス粉末とセラミックス粉末の混合物を成型助剤と混合後、乾式プレス成型を行ない、ガラスの軟化点付近の温度で仮焼結を行った成型体を封着材として使用することができる。
 この仮焼結を行った成型体は、仮焼体とも呼ばれ、部品としての取扱いが可能であるためハンドリング性に優れ、封着材として好適である。
 該仮焼体は、封着するセラミックス製部材等に組み込まれ、焼成されることで軟化流動した後に、結晶化することで、封着材としての優れた性能が発揮される。
 以下、仮焼体について説明する。
Moreover, after mixing the glass powder and the mixture of the glass powder and ceramic powder with a molding aid, dry press molding is performed, and a molded body that has been pre-sintered at a temperature near the softening point of the glass is used as a sealing material. can do.
The pre-sintered molded body is also called a pre-fired body and can be handled as a part, so that it has excellent handling properties and is suitable as a sealing material.
The calcined body is incorporated into a ceramic member or the like to be sealed, and is softened and fluidized by being fired, and then crystallized to exhibit excellent performance as a sealing material.
Hereinafter, the calcined body will be described.
 仮焼体を作製するためのガラス粉末の平均粒径は、次工程である造粒、および乾式プレス成型での作業性からは、6μm~50μmの範囲が好ましく、6.5μm~25μmの範囲がさらに好ましい。
 つまり、平均粒径が細かすぎると、仮焼体が封着焼成時に十分な流動性を発揮しないおそれを有するばかりでなく、乾式プレス成型時に密度むらを生じ易く、仮焼体の寸法ばらつきを発生させるおそれを有する。
 一方、平均粒径が大きすぎると、造粒粉末の収率を低下させるおそれを有する。
The average particle size of the glass powder for producing the calcined body is preferably in the range of 6 μm to 50 μm, and in the range of 6.5 μm to 25 μm, from the viewpoint of workability in the subsequent steps of granulation and dry press molding. Further preferred.
In other words, if the average particle size is too fine, the calcined body may not exhibit sufficient fluidity during sealing firing, and also tends to cause uneven density during dry press molding, resulting in dimensional variation of the calcined body. There is a risk of causing.
On the other hand, if the average particle size is too large, the yield of the granulated powder may be reduced.
 このガラス粉末に、例えばアクリル系樹脂などのバインダー樹脂を成型助剤として、混合することで、乾式プレス成型に適した造粒粉末が得られる。 A granulated powder suitable for dry press molding can be obtained by mixing the glass powder with a binder resin such as an acrylic resin as a molding aid.
 この造粒粉末を用いて、乾式プレス成型を行うことで、所望の形状の成型体が得られる。 A molded body having a desired shape can be obtained by dry press molding using this granulated powder.
 この成型体を、バインダー樹脂が熱分解する温度以上、かつガラス転移点以下の温度で保持することによりバインダー樹脂を除去し、その後ガラスの軟化点付近の温度で仮焼結を実施することで仮焼体が得られる。 By holding this molded body at a temperature not lower than the temperature at which the binder resin thermally decomposes and not higher than the glass transition point, the binder resin is removed, and then temporary sintering is performed at a temperature near the softening point of the glass. A fired body is obtained.
 このようにして得られる仮焼体においては、人汗中の塩分、樹脂性手袋に滑材として付着している無機粉末といった汚染物が仮焼体の表面に付着していると、これらが封着焼成時にガラスの結晶化の核剤となってガラスの流動を阻害することになる。
 そうするとセラミックス製部材等の接着する部材との濡れが悪化し、前記部材から剥離し易くなって封着材としての性能が著しく劣化するおそれがある。
In the calcined body thus obtained, if contaminants such as salt in human sweat or inorganic powder adhering to the resin gloves as a lubricant adhere to the surface of the calcined body, these are sealed. It becomes a nucleating agent for crystallization of glass at the time of firing and impedes the flow of glass.
If it does so, wetting with the member to adhere, such as a ceramic member, will deteriorate, it will be easy to exfoliate from the member, and there is a possibility that the performance as a sealing material may deteriorate remarkably.
 また、仮焼体は、その表面粗さが大きいと、汚染物が付着し易くなり、ガラスの流動が阻害されやすくなる。
 言い換えると、仮焼体は、表面粗さが小さいと汚染物が付着しにくくなり、ガラスの流動が阻害されにくくなる。
 即ち、ガラス粉末の平均粒径や仮焼結させる際の条件などを調整し、その表面粗さを制御することによって安定した封着性能を有する仮焼体を得ることができる。
 このようなことから、本実施形態の仮焼体の表面粗さは0.5μm以下であることが好ましく、0.1μm以下であることがより好ましい。
Moreover, when the surface roughness of the calcined body is large, contaminants are likely to adhere, and the flow of the glass is likely to be hindered.
In other words, when the surface roughness of the calcined body is small, contaminants hardly adhere to the calcined body, and the flow of the glass is hardly inhibited.
That is, a calcined body having stable sealing performance can be obtained by adjusting the average particle diameter of the glass powder, conditions for pre-sintering, and controlling the surface roughness.
For this reason, the surface roughness of the calcined body of the present embodiment is preferably 0.5 μm or less, and more preferably 0.1 μm or less.
 このようにして得られた仮焼体の性能を確認する方法として、例えばアルミナなどのセラミックスで出来た基板上にて仮焼体を900℃程度で焼成し、焼成後の外観観察を行うフローテストがある。
 仮焼体に汚染物付着が無い場合、ガラスの流動が阻害されず、図1に示すように流動後の形状が半球に近い正常な状態となる。
 しかも、流動後の高さ(フロー高さ)が低く、十分な封着性能が得られると推測できる。
 一方で汚染物質が付着している場合、ガラスの流動が阻害され、図2に示すように正常な形状が得られない。
 また、汚染物質が付着している場合、フロー高さが高くなり、封着性能が不十分になる。
As a method of confirming the performance of the calcined body thus obtained, for example, a flow test in which the calcined body is fired at about 900 ° C. on a substrate made of ceramics such as alumina and the appearance after firing is observed. There is.
When the calcined body is free from contaminants, the flow of the glass is not hindered, and the shape after the flow becomes a normal state close to a hemisphere as shown in FIG.
Moreover, it can be assumed that the height after flow (flow height) is low and sufficient sealing performance is obtained.
On the other hand, when the contaminant is adhered, the flow of the glass is hindered and a normal shape cannot be obtained as shown in FIG.
Moreover, when the contaminant has adhered, flow height becomes high and sealing performance becomes inadequate.
 なお、ここでは詳述はしないが、封着材に含有させるガラス粉末やその他の材料、製造条件などに関する技術事項については、本発明の効果が著しく損なわれない範囲において、従来公知の技術事項を本発明においても採用することができるものであり、本発明は上記例示に限定されるものではない。 Although not described in detail here, the technical matters relating to the glass powder and other materials to be included in the sealing material, production conditions, etc., are within the scope not significantly impairing the effects of the present invention. The present invention can also be employed, and the present invention is not limited to the above examples.
 次に実施例を挙げて本発明をさらに詳しく説明するが、本発明はこれらに限定されるものではない。 Next, the present invention will be described in more detail with reference to examples, but the present invention is not limited thereto.
〔ガラス原体及びガラス粉末の製造〕
実施例1~9及び比較例1~10
 表1~2に示すガラス組成となるように原料を調合、混合し、調合原料を白金るつぼに入れて1300~1450℃で1時間溶融後、ガラス原体であるガラスフレークを得た。
 ポットミルにこのガラスフレークを入れ、平均粒径が5~50μmになるよう調整しつつ粉砕し、その後、目開きが106μmの篩にて粗粒を除去し、実施例1~9及び比較例1~10のガラス粉末とした。
 なお、実施例6については、ガラス粉末にアルミナ粉末(平均粒径2μm)を添加し、混合物を評価した。
 また、比較例9は特許文献3の組成範囲のガラス粉末であり、比較例10は特許文献2の例2のガラス粉末と同一組成のものである。
[Manufacture of glass bulk and glass powder]
Examples 1 to 9 and Comparative Examples 1 to 10
The raw materials were prepared and mixed so as to have the glass compositions shown in Tables 1 and 2, and the prepared raw materials were put in a platinum crucible and melted at 1300 to 1450 ° C. for 1 hour to obtain glass flakes as a glass raw material.
The glass flakes were put in a pot mill and pulverized while adjusting the average particle size to 5 to 50 μm, and then coarse particles were removed with a sieve having an opening of 106 μm. Examples 1 to 9 and Comparative Examples 1 to Ten glass powders were used.
For Example 6, alumina powder (average particle size 2 μm) was added to the glass powder, and the mixture was evaluated.
Comparative Example 9 is a glass powder having a composition range of Patent Document 3, and Comparative Example 10 has the same composition as the glass powder of Example 2 of Patent Document 2.
〔試験方法〕
 実施例及び比較例のガラス粉末について、下記の方法によりガラス粉末の平均粒径および軟化点、結晶化ピーク温度を測定し、焼成して、熱膨張係数、フロー径を評価した。
(1)ガラス粉末の平均粒径
 レーザー散乱式粒度分布計(日機装社製マイクロトラックMT3000)を用いて、体積分布モードのD50の値を求めた。
〔Test method〕
About the glass powder of the Example and the comparative example, the following method measured the average particle diameter of the glass powder, the softening point, and the crystallization peak temperature, it baked and evaluated the thermal expansion coefficient and the flow diameter.
(1) using an average particle size of a laser scattering particle size distribution meter of glass powder (manufactured by Nikkiso Co., Ltd. Microtrac MT3000), it was determined a value of D 50 of the volume distribution mode.
(2)軟化点、結晶化ピーク温度
 ガラス粉末約40mgを白金セルに充填し、DTA測定装置(リガク社製Thermo Plus TG8120)を用いて、室温から10℃/分で昇温させて軟化点(Ts)、結晶化ピーク温度(Tx)を測定した。なお、(Tx-Ts)が130℃未満のものは、流動性に問題を生じるおそれがあるため、測定値の横に「×」を併記した。
(2) Softening point, crystallization peak temperature Approximately 40 mg of glass powder is filled in a platinum cell, and the temperature is increased from room temperature to 10 ° C./min using a DTA measuring device (Thermo Plus Thermo Plus TG8120). Ts) and crystallization peak temperature (Tx) were measured. When (Tx−Ts) is less than 130 ° C., there is a possibility of causing a problem in fluidity.
(3)熱膨張係数
 得られたガラス粉末を乾式プレスで成型後、900℃で焼成を行った。
 この焼成によって得られた焼成体を約5×5×15mmに切り出し、試験体を作製した。
 TMA測定装置(リガク社製Thermo Plus TMA8310)を用いて、試験体を室温から10℃/分で昇温したときの熱膨張曲線を測定した。
 この熱膨張曲線から、30℃での試験体の長さを基準にし、550℃での試験体の長さから熱膨張係数を求めた。この値を30~550℃における熱膨張係数(α)とした。
 即ち、この熱膨張曲線における30℃と550℃の2点を結ぶ直線の傾きから30~550℃における熱膨張係数を求め、この試験体の熱膨張係数(α)とした。
 なお、熱膨張係数が60×10-7/℃未満および70×10-7/℃を超えるものは、セラミックス製部材等と熱膨張特性上のマッチングに問題を生じるおそれがあるため、測定値の横に「×」を併記した。
 また、焼成後の結晶化ガラス中の残存ガラスに起因する熱膨張係数の変曲点が520℃から600℃未満に現れるため、30~500℃における熱膨張係数と30~600℃における熱膨張係数の差を算出した。
 なお、熱膨張係数差が9.0×10-7/℃を超えるものは、測定値の横に「×」(不適合)を併記した。
 また、相転移を持つ結晶に起因する熱膨張係数の変曲点が300℃以下に現れるか否かをTMA曲線にて確認した。
 300℃以下で変曲点が確認されるものは、セラミックス製部材等と熱膨張特性上のマッチングに問題を生じるおそれがあるため、「あり(×)」とし、確認されないものは「なし」とした。
(3) Coefficient of thermal expansion The obtained glass powder was molded by a dry press and then fired at 900 ° C.
The fired body obtained by this firing was cut out to about 5 × 5 × 15 mm to prepare a test body.
Using a TMA measuring device (Thermo Plus Thermo Plus TMA8310), the thermal expansion curve was measured when the specimen was heated from room temperature at 10 ° C./min.
From this thermal expansion curve, the coefficient of thermal expansion was determined from the length of the specimen at 550 ° C., based on the length of the specimen at 30 ° C. This value was defined as the thermal expansion coefficient (α) at 30 to 550 ° C.
That is, the thermal expansion coefficient at 30 to 550 ° C. was determined from the slope of a straight line connecting two points of 30 ° C. and 550 ° C. in this thermal expansion curve, and this was used as the thermal expansion coefficient (α) of this specimen.
If the coefficient of thermal expansion is less than 60 × 10 −7 / ° C. or more than 70 × 10 −7 / ° C., it may cause a problem in matching the thermal expansion characteristics with a ceramic member. An “x” is also written next to the mark.
Further, since the inflection point of the thermal expansion coefficient due to the remaining glass in the crystallized glass after firing appears from 520 ° C. to less than 600 ° C., the thermal expansion coefficient at 30 to 500 ° C. and the thermal expansion coefficient at 30 to 600 ° C. The difference was calculated.
When the difference in thermal expansion coefficient exceeded 9.0 × 10 −7 / ° C., “x” (nonconformity) was written alongside the measured value.
Further, it was confirmed by TMA curve whether or not the inflection point of the thermal expansion coefficient due to the crystal having a phase transition appears at 300 ° C. or lower.
If the inflection point is confirmed at 300 ° C or lower, there is a possibility of causing a problem in matching the thermal expansion characteristics with a ceramic member or the like. Therefore, “Yes” is indicated. did.
(4)封着性(フロー性)
 前記ガラス粉末5gを直径20mmの円筒形にし、アルミナ基板の上に載せて、900℃で焼成し、得られた焼成体の外径の最大値を測定した。このフロー径(外径の最大値)が19.5mm以下の場合、アルミナセラミックス製部材の表面を濡らすのに十分な流動性が備えられていないと判定し、測定値の横に「×」を併記した。
 結果を表1~2に示す。
(4) Sealability (flowability)
5 g of the glass powder was formed into a cylindrical shape having a diameter of 20 mm, placed on an alumina substrate, fired at 900 ° C., and the maximum outer diameter of the fired body obtained was measured. When the flow diameter (maximum outer diameter) is 19.5 mm or less, it is determined that the fluidity sufficient to wet the surface of the alumina ceramic member is not provided, and an “x” is placed beside the measured value. Also written.
The results are shown in Tables 1-2.
Figure JPOXMLDOC01-appb-T000001
 
Figure JPOXMLDOC01-appb-T000001
 
Figure JPOXMLDOC01-appb-T000002
 
Figure JPOXMLDOC01-appb-T000002
 
 結果を表1~2に示す。
 これらの表に見られるように、実施例の封着材はセラミックス製部材等の表面に対する濡れの指標となるフロー性、及び、熱膨張特性上の適性の指標となる熱膨張係数、熱膨張係数差において良好な結果が得られているばかりでなく封着時に隙間等を発生させずに信頼性の高い封着を容易に実施可能かどうかを示す指標となる結晶化ピーク温度と軟化点の差(Tx-Ts)においても優れた結果が得られている。
 一方、比較例の封着材は、何れかの項目で良好な値が得られていない。
 このことからも、本発明によれば、セラミックス製部材等の封着に適した熱膨張特性を有するガラスセラミックスの形成に有用で、且つ、焼成時においてセラミックス製部材等の表面に対して良好な濡れ性を示すガラス組成物ならびに封着材が提供されることがわかる。
The results are shown in Tables 1-2.
As can be seen from these tables, the sealing materials of the examples are flow characteristics that are indicators of wettability to the surface of ceramic members and the like, and thermal expansion coefficients and thermal expansion coefficients that are indicators of suitability for thermal expansion characteristics. The difference between the crystallization peak temperature and the softening point is an index indicating whether reliable sealing can be easily performed without generating a gap or the like at the time of sealing. Excellent results are also obtained in (Tx−Ts).
On the other hand, the sealing material of the comparative example has not obtained a good value in any item.
Also from this, according to the present invention, it is useful for forming glass ceramics having a thermal expansion characteristic suitable for sealing ceramic members and the like, and good for the surface of ceramic members and the like during firing. It can be seen that a glass composition and a sealing material exhibiting wettability are provided.
〔仮焼体の製造〕
 次に、表1の実施例4のガラス組成を用いた仮焼体の作製について説明する。
 各原料を秤量したものを、十分混合し、1300℃~1450℃の範囲で溶融し、ガラスフレークを得た。
 このガラスフレークをポットミルを用いて粉砕し、平均粒径が8~23μmのガラス粉末を得た。
[Production of calcined body]
Next, preparation of a calcined body using the glass composition of Example 4 in Table 1 will be described.
What weighed each raw material was sufficiently mixed and melted in the range of 1300 ° C. to 1450 ° C. to obtain glass flakes.
The glass flakes were pulverized using a pot mill to obtain glass powder having an average particle size of 8 to 23 μm.
 次に、アクリル系樹脂を、ガラス粉末に添加、混合し、乾式プレス成型に適した造粒粉末を得た。 Next, an acrylic resin was added to and mixed with glass powder to obtain a granulated powder suitable for dry press molding.
 この造粒粉末を用いて、乾式プレス成型にて、直径または辺が5mm~25mm、厚みが0.5~10mmの円柱、または角柱、またはリング型などの所望の形状の成型体を得た。 Using this granulated powder, a molded body having a desired shape such as a cylinder, a prism, or a ring having a diameter or side of 5 to 25 mm and a thickness of 0.5 to 10 mm was obtained by dry press molding.
 この成型体を、アクリル系樹脂が熱分解する温度以上、かつガラス転移点以下の温度で保持し、アクリル系樹脂を十分除去し、その後ガラスの軟化点付近の温度にて、仮焼結を実施し仮焼体を得た。 Hold this molded body at a temperature above the temperature at which the acrylic resin thermally decomposes and below the glass transition point, sufficiently remove the acrylic resin, and then perform preliminary sintering at a temperature near the softening point of the glass. A calcined body was obtained.
〔試験方法〕
 上記の方法で、仮焼結温度条件を変更して作製した仮焼体の表面粗さと汚染に対する流動性の変化を評価した。
 仮焼結温度条件は、条件1、条件2、条件3、条件4の4水準とし、条件1が最も低く、この順序で高くし、条件4が最も高くなっている。
 即ち、軟化点付近の条件2を基準として、条件1は基準-5℃、条件3は基準+5℃、条件4は基準+10℃とした。
 なお、この仮焼結温度条件は、用いる炉によって変わり得る。
〔Test method〕
By the above method, the surface roughness of the calcined body produced by changing the pre-sintering temperature condition and the change in fluidity with respect to contamination were evaluated.
The pre-sintering temperature conditions are four levels of Condition 1, Condition 2, Condition 3, and Condition 4. Condition 1 is the lowest, and is increased in this order, and Condition 4 is the highest.
That is, with condition 2 near the softening point as a reference, condition 1 was set at reference −5 ° C., condition 3 was set at reference + 5 ° C., and condition 4 was set at reference + 10 ° C.
Note that this pre-sintering temperature condition may vary depending on the furnace used.
(1)表面粗さ
 オリンパス製レーザー顕微鏡PLS-3500を用い、共焦点モードにて仮焼体表面の3D画像を取り込み、画像解析により算術平均粗さRaを求めた。
(1) Surface Roughness Using an Olympus laser microscope PLS-3500, a 3D image of the surface of the calcined body was captured in the confocal mode, and the arithmetic average roughness Ra was determined by image analysis.
(2)汚染に対する流動性の変化
 仮焼体のフローテストを仮焼結後の状態で行い、フロー高さを測定した。
 次に、仮焼体を1%食塩水に浸漬し乾燥させた後、同様のフローテストを行い、フロー高さを測定した。
 仮焼結後のフロー高さからの変化率を劣化率として以下の式から求めた。
 
  劣化率=(H1-H0)/(H0)
(ただし「H0」は、食塩水に浸漬させていない仮焼体のフロー高さであり、「H1」は、1%食塩水に浸漬・乾燥させた仮焼体のフロー高さである。)
 
 なお、NaClは、封着焼成時のガラスの流動を阻害する結晶化の核剤となる汚染物の代表的なものである。
 1%食塩水溶液に浸漬、乾燥することで、仮焼体に汚染物を付着させるとガラスの流動が阻害されフロー高さが高くなる。
 そして、仮焼結後の劣化率から、ガラスの流動性の汚染物に対する耐性、つまり汚染物の影響の受けにくさを求めることができ、劣化率が大きいほど汚染物の影響を受け易いと言える。
 劣化率は0.1以下を「AA」判定、0.1を超え0.3未満を「A」判定、0.3以上を「F」判定とし、汚染物に対する耐性の評価を行った。
 以上の結果を表3に示す。 
(2) Change in fluidity with respect to contamination A flow test of the calcined body was performed in a state after pre-sintering, and the flow height was measured.
Next, the calcined body was immersed in 1% saline and dried, and then the same flow test was performed to measure the flow height.
The change rate from the flow height after pre-sintering was determined as the deterioration rate from the following equation.

Deterioration rate = (H1-H0) / (H0)
(However, “H0” is the flow height of the calcined body not immersed in saline, and “H1” is the flow height of the calcined body immersed in 1% saline and dried.)

NaCl is a representative contaminant that becomes a crystallization nucleating agent that inhibits the flow of glass during sealing firing.
When the contaminants are attached to the calcined body by dipping and drying in a 1% saline solution, the flow of the glass is inhibited and the flow height is increased.
And, from the deterioration rate after pre-sintering, it is possible to determine the resistance to the flowable contaminants of the glass, that is, the difficulty of being affected by the contaminants, and it can be said that the greater the deterioration rate, the more susceptible to the contaminants. .
A deterioration rate of 0.1 or less was evaluated as “AA”, a value exceeding 0.1 but less than 0.3 was determined as “A”, and a value of 0.3 or more was determined as “F”.
The above results are shown in Table 3.
Figure JPOXMLDOC01-appb-T000003
 
Figure JPOXMLDOC01-appb-T000003
 
 なお、上記の評価においては、これらの仮焼結の状態に応じて、Raが0.02~0.93μmの範囲をとることが確認された。
 その結果、Ra=0.93μmの場合は、劣化率が0.48と大きく、汚染物の付着の有無でフロー高さがかなりの変化を示し、汚染物に対する耐性が低いことが確認できた。
 一方で、Ra=0.40μmでは劣化率が0.21となり、汚染物に対する耐性が向上していることがわかった。
 さらにRaが0.1μm以下では、劣化率が0.03以下となり、汚染物が付着しても封着焼成時のガラスの流動性がほとんど低下しないことが分った。 
In the above evaluation, it was confirmed that Ra was in the range of 0.02 to 0.93 μm depending on the presintered state.
As a result, in the case of Ra = 0.93 μm, the deterioration rate was as large as 0.48, the flow height showed a considerable change depending on the presence or absence of contaminants, and it was confirmed that the resistance to contaminants was low.
On the other hand, when Ra = 0.40 μm, the deterioration rate was 0.21, and it was found that the resistance to contaminants was improved.
Furthermore, when Ra is 0.1 μm or less, the deterioration rate is 0.03 or less, and it has been found that the flowability of the glass during sealing firing hardly deteriorates even if contaminants adhere.
 以上のように、封着焼成時に安定したガラスの流動性が得られ、その結果安定した封着性能を有する仮焼体を得るためには、作製条件を調整して、仮焼体の表面粗さRaを0.5μm以下、好ましくは0.10μm以下にすればよいことが分る。
 ここでは、表面粗さの調整には、仮焼結条件の調整を行ったが、その他にも粉末ガラスの平均粒径による調整も可能であり、通常、同じ仮焼結条件においては、6.5μm~25μmの範囲で平均粒径を小さくするほど表面粗さを小さくすることが可能である。
 なお、例えば仮焼結温度をさらに高い条件に設定すると、粉末ガラスの軟化、収縮、流動が引き起こり、所望の仮焼体形状、及び寸法が得られなくなるので、仮焼結条件の上限はこれより決定される。
As described above, in order to obtain a calcined body having stable glass flowability during sealing firing, and consequently obtaining a calcined body having stable sealing performance, the surface roughness of the calcined body is adjusted by adjusting the production conditions. It can be seen that the thickness Ra should be 0.5 μm or less, preferably 0.10 μm or less.
Here, the adjustment of the surface roughness was made by adjusting the pre-sintering conditions, but other adjustments by the average particle diameter of the powder glass are also possible. The surface roughness can be reduced as the average particle size is reduced in the range of 5 to 25 μm.
For example, if the pre-sintering temperature is set to a higher condition, the powder glass is softened, contracted, and flowed, and the desired calcined body shape and dimensions cannot be obtained. More determined.
 本発明の封着用ガラス組成物は、金属製部材やセラミックス製部材に接触させて、例えば、900℃程度の温度で焼成することにより前記部材間の封着に好適に利用可能なものである。
 また、本発明の封着用ガラス組成物を用い、造粒、乾式プレス、仮焼結を行い、仮焼体を得ることができる。この仮焼体は、取扱いが容易であり、前記部材間の封着により好適に利用可能である。
 その具体的な用途としては、例えば、セラミックス製センサや燃料電池などのシール部を封着するための封着材が挙げられる。
 
The glass composition for sealing of the present invention can be suitably used for sealing between the members by bringing the glass composition into contact with a metal member or a ceramic member and firing at a temperature of about 900 ° C., for example.
Moreover, granulation, a dry press, and temporary sintering can be performed using the glass composition for sealing of this invention, and a calcined body can be obtained. This calcined body is easy to handle and can be suitably used by sealing between the members.
As a specific application, for example, a sealing material for sealing a sealing portion such as a ceramic sensor or a fuel cell can be used.

Claims (7)

  1.  酸化物換算で、SiO:14~21質量%、Al:0~12質量%、B:17~24質量%、ZnO:29~51質量%、MgO:7~16質量%となる組成比を有していることを特徴とする封着用ガラス組成物。 In terms of oxides, SiO 2 : 14 to 21% by mass, Al 2 O 3 : 0 to 12% by mass, B 2 O 3 : 17 to 24% by mass, ZnO: 29 to 51% by mass, MgO: 7 to 16% by mass A glass composition for sealing, which has a composition ratio of%.
  2.  焼成されて、SiO-ZnO系およびMgO-B系の結晶相が析出しガラスセラミックスとなる請求項1記載の封着用ガラス組成物。 2. The glass composition for sealing according to claim 1, wherein the glass composition is fired to precipitate glass crystals of SiO 2 —ZnO and MgO—B 2 O 3 .
  3.  前記ガラスセラミックスが、30~500℃における熱膨張係数(α)と30~600℃における熱膨張係数(α)との差(α-α)が0~9.0×10-7/℃となるガラスセラミックスである請求項2記載の封着用ガラス組成物。 The glass ceramic, 30-500 thermal expansion coefficient in ° C. (alpha 1) and 30 thermal expansion coefficient at ~ 600 ℃ (α 2) the difference between (α 21) is 0 ~ 9.0 × 10 -7 The glass composition for sealing according to claim 2, which is a glass ceramic that is / ° C.
  4.  ガラス軟化点(Ts)と結晶化ピーク温度(Tx)との差が130℃以上となる請求項2又は3記載の封着用ガラス組成物。 The glass composition for sealing according to claim 2 or 3, wherein the difference between the glass softening point (Ts) and the crystallization peak temperature (Tx) is 130 ° C or higher.
  5.  前記ガラスセラミックスの30~550℃における熱膨張係数が60~70×10-7/℃である請求項2乃至4のいずれか1項に記載の封着用ガラス組成物。 The glass composition for sealing according to any one of claims 2 to 4, wherein the glass ceramic has a thermal expansion coefficient at 30 to 550 ° C of 60 to 70 × 10 -7 / ° C.
  6.  ガラス粉末を含有し、焼成されて封着に用いられる封着材であって、
     前記ガラス粉末が、酸化物換算で、SiO:14~21質量%、Al:0~12質量%、B:17~24質量%、ZnO:29~51質量%、MgO:7~16質量%の組成比となるように含有されていることを特徴とする封着材。
    A sealing material containing glass powder, fired and used for sealing,
    The glass powder is in terms of oxides: SiO 2 : 14 to 21% by mass, Al 2 O 3 : 0 to 12% by mass, B 2 O 3 : 17 to 24% by mass, ZnO: 29 to 51% by mass, MgO : A sealing material, which is contained so as to have a composition ratio of 7 to 16% by mass.
  7.  前記ガラス粉末とともにセラミックス粉末を含有し、前記ガラス粉末と前記セラミックス粉末との合計量に占める前記セラミックス粉末の割合が0質量%を超え5質量%以下である請求項6記載の封着材。 The sealing material according to claim 6, comprising ceramic powder together with the glass powder, wherein a ratio of the ceramic powder in a total amount of the glass powder and the ceramic powder is more than 0% by mass and 5% by mass or less.
PCT/JP2012/057577 2011-03-25 2012-03-23 Glass composition for sealing, and sealing material WO2012133217A1 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104017419A (en) * 2013-12-24 2014-09-03 韦先飞 Method for preparing silicon dioxide and zinc oxide composite material
CN104017418A (en) * 2013-12-24 2014-09-03 韦先飞 Method for preparing silicon dioxide and zinc oxide composite material

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* Cited by examiner, † Cited by third party
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JPS58204837A (en) * 1982-05-19 1983-11-29 Asahi Glass Co Ltd Crystalline glass composition for sealing
JPH06127976A (en) * 1992-10-15 1994-05-10 Nippon Electric Glass Co Ltd Crystalline sealing material
JPH10236844A (en) * 1997-02-26 1998-09-08 Iwaki Glass Kk Sealing composition
JP2002082089A (en) * 2000-06-30 2002-03-22 Denso Corp Gas sensor and its manufacturing method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58204837A (en) * 1982-05-19 1983-11-29 Asahi Glass Co Ltd Crystalline glass composition for sealing
JPH06127976A (en) * 1992-10-15 1994-05-10 Nippon Electric Glass Co Ltd Crystalline sealing material
JPH10236844A (en) * 1997-02-26 1998-09-08 Iwaki Glass Kk Sealing composition
JP2002082089A (en) * 2000-06-30 2002-03-22 Denso Corp Gas sensor and its manufacturing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104017419A (en) * 2013-12-24 2014-09-03 韦先飞 Method for preparing silicon dioxide and zinc oxide composite material
CN104017418A (en) * 2013-12-24 2014-09-03 韦先飞 Method for preparing silicon dioxide and zinc oxide composite material

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