WO2012108683A3 - Vacuum heat treatment apparatus - Google Patents
Vacuum heat treatment apparatus Download PDFInfo
- Publication number
- WO2012108683A3 WO2012108683A3 PCT/KR2012/000913 KR2012000913W WO2012108683A3 WO 2012108683 A3 WO2012108683 A3 WO 2012108683A3 KR 2012000913 W KR2012000913 W KR 2012000913W WO 2012108683 A3 WO2012108683 A3 WO 2012108683A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- heat treatment
- treatment apparatus
- vacuum heat
- reaction container
- chamber
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/04—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated adapted for treating the charge in vacuum or special atmosphere
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D17/00—Arrangements for using waste heat; Arrangements for using, or disposing of, waste gases
- F27D17/001—Extraction of waste gases, collection of fumes and hoods used therefor
- F27D17/002—Details of the installations, e.g. fume conduits or seals
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
- Furnace Details (AREA)
- Chemical Vapour Deposition (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Disclosed is a vacuum heat treatment apparatus. The vacuum heat treatment apparatus includes a chamber, a reaction container in the chamber, a heating member interposed between the chamber and the reaction container to heat the reaction container, an exhaust pipe to discharge gas out of an inner part of the reaction container, and a filter in the exhaust pipe.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020110010963A KR101273048B1 (en) | 2011-02-08 | 2011-02-08 | Vacuum heat treatment apparatus |
KR10-2011-0010963 | 2011-02-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2012108683A2 WO2012108683A2 (en) | 2012-08-16 |
WO2012108683A3 true WO2012108683A3 (en) | 2012-12-20 |
Family
ID=46639056
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/KR2012/000913 WO2012108683A2 (en) | 2011-02-08 | 2012-02-08 | Vacuum heat treatment apparatus |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR101273048B1 (en) |
WO (1) | WO2012108683A2 (en) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0587459A (en) * | 1991-04-30 | 1993-04-06 | Dia Shinku Kk | Vacuum heat treating furnace |
JPH07265685A (en) * | 1994-04-01 | 1995-10-17 | Ebara Corp | Evacuating pipe and evacuating system |
KR100261492B1 (en) * | 1994-10-13 | 2000-08-01 | 이중구 | Method and apparatus for heat treatment in vacuum |
JP2010519979A (en) * | 2007-03-01 | 2010-06-10 | ゲティンゲ ステラリゼイション アクチボラゲット | Sterilizer, sterilization method, evaporation system and method of using such an evaporation system |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR200243262Y1 (en) * | 2001-05-28 | 2001-10-15 | (주)영인테크 | Apparatus for collecting particle and fume on Semiconductor fabrication |
-
2011
- 2011-02-08 KR KR1020110010963A patent/KR101273048B1/en not_active IP Right Cessation
-
2012
- 2012-02-08 WO PCT/KR2012/000913 patent/WO2012108683A2/en active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0587459A (en) * | 1991-04-30 | 1993-04-06 | Dia Shinku Kk | Vacuum heat treating furnace |
JPH07265685A (en) * | 1994-04-01 | 1995-10-17 | Ebara Corp | Evacuating pipe and evacuating system |
KR100261492B1 (en) * | 1994-10-13 | 2000-08-01 | 이중구 | Method and apparatus for heat treatment in vacuum |
JP2010519979A (en) * | 2007-03-01 | 2010-06-10 | ゲティンゲ ステラリゼイション アクチボラゲット | Sterilizer, sterilization method, evaporation system and method of using such an evaporation system |
Also Published As
Publication number | Publication date |
---|---|
WO2012108683A2 (en) | 2012-08-16 |
KR20120090499A (en) | 2012-08-17 |
KR101273048B1 (en) | 2013-06-10 |
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