WO2012108683A3 - Vacuum heat treatment apparatus - Google Patents

Vacuum heat treatment apparatus Download PDF

Info

Publication number
WO2012108683A3
WO2012108683A3 PCT/KR2012/000913 KR2012000913W WO2012108683A3 WO 2012108683 A3 WO2012108683 A3 WO 2012108683A3 KR 2012000913 W KR2012000913 W KR 2012000913W WO 2012108683 A3 WO2012108683 A3 WO 2012108683A3
Authority
WO
WIPO (PCT)
Prior art keywords
heat treatment
treatment apparatus
vacuum heat
reaction container
chamber
Prior art date
Application number
PCT/KR2012/000913
Other languages
French (fr)
Other versions
WO2012108683A2 (en
Inventor
Byung Sook Kim
Original Assignee
Lg Innotek Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lg Innotek Co., Ltd. filed Critical Lg Innotek Co., Ltd.
Publication of WO2012108683A2 publication Critical patent/WO2012108683A2/en
Publication of WO2012108683A3 publication Critical patent/WO2012108683A3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/04—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated adapted for treating the charge in vacuum or special atmosphere
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D17/00—Arrangements for using waste heat; Arrangements for using, or disposing of, waste gases
    • F27D17/001—Extraction of waste gases, collection of fumes and hoods used therefor
    • F27D17/002—Details of the installations, e.g. fume conduits or seals

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
  • Furnace Details (AREA)
  • Chemical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)

Abstract

Disclosed is a vacuum heat treatment apparatus. The vacuum heat treatment apparatus includes a chamber, a reaction container in the chamber, a heating member interposed between the chamber and the reaction container to heat the reaction container, an exhaust pipe to discharge gas out of an inner part of the reaction container, and a filter in the exhaust pipe.
PCT/KR2012/000913 2011-02-08 2012-02-08 Vacuum heat treatment apparatus WO2012108683A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020110010963A KR101273048B1 (en) 2011-02-08 2011-02-08 Vacuum heat treatment apparatus
KR10-2011-0010963 2011-02-08

Publications (2)

Publication Number Publication Date
WO2012108683A2 WO2012108683A2 (en) 2012-08-16
WO2012108683A3 true WO2012108683A3 (en) 2012-12-20

Family

ID=46639056

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2012/000913 WO2012108683A2 (en) 2011-02-08 2012-02-08 Vacuum heat treatment apparatus

Country Status (2)

Country Link
KR (1) KR101273048B1 (en)
WO (1) WO2012108683A2 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0587459A (en) * 1991-04-30 1993-04-06 Dia Shinku Kk Vacuum heat treating furnace
JPH07265685A (en) * 1994-04-01 1995-10-17 Ebara Corp Evacuating pipe and evacuating system
KR100261492B1 (en) * 1994-10-13 2000-08-01 이중구 Method and apparatus for heat treatment in vacuum
JP2010519979A (en) * 2007-03-01 2010-06-10 ゲティンゲ ステラリゼイション アクチボラゲット Sterilizer, sterilization method, evaporation system and method of using such an evaporation system

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200243262Y1 (en) * 2001-05-28 2001-10-15 (주)영인테크 Apparatus for collecting particle and fume on Semiconductor fabrication

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0587459A (en) * 1991-04-30 1993-04-06 Dia Shinku Kk Vacuum heat treating furnace
JPH07265685A (en) * 1994-04-01 1995-10-17 Ebara Corp Evacuating pipe and evacuating system
KR100261492B1 (en) * 1994-10-13 2000-08-01 이중구 Method and apparatus for heat treatment in vacuum
JP2010519979A (en) * 2007-03-01 2010-06-10 ゲティンゲ ステラリゼイション アクチボラゲット Sterilizer, sterilization method, evaporation system and method of using such an evaporation system

Also Published As

Publication number Publication date
KR20120090499A (en) 2012-08-17
WO2012108683A2 (en) 2012-08-16
KR101273048B1 (en) 2013-06-10

Similar Documents

Publication Publication Date Title
WO2013040127A3 (en) Gas delivery and distribution for uniform process in linear-type large-area plasma reactor
GB2548040A (en) Compact side inlet and outlet exhaust aftertreatment system
WO2012107332A3 (en) Cleaning apparatus for cleaning articles
WO2012149327A3 (en) Method and apparatus for gas delivery
IN2014DN06190A (en)
WO2013052261A3 (en) Harmonic cold plasma devices and associated methods
EP2759330A4 (en) Device and method for gas treatment using low-temperature plasma and catalyst medium
WO2014110446A3 (en) Method and system for graphene formation
ZA201104975B (en) Treatment of flue gas from an oxyfuel combustion process
WO2013052907A3 (en) Methods and processes for non-invasive assessment of genetic variations
WO2013105905A3 (en) Methods and apparatuses for water purification
IN2013MN01570A (en)
WO2011156906A3 (en) Process for treating a flue gas
WO2012096468A3 (en) Warmer for medical treatment
MY166640A (en) Container cleaning and recharging method and apparatus
WO2012118710A3 (en) Process and apparatus for venting a catalyst cooler
WO2012160347A3 (en) Gas/fluid mass exchange apparatus
WO2012100781A3 (en) Catalytic heating system
PL2578314T3 (en) Method for regeneration of exhaust gas treatment catalyst, and exhaust gas treatment catalyst produced using the method
WO2012087919A3 (en) Methods and apparatus for gas delivery into plasma processing chambers
WO2012108683A3 (en) Vacuum heat treatment apparatus
TWI427259B (en) Vapor chamber and sealing method thereof
MX2017004521A (en) Apparatus and methods for producing and delivering a vapour medicament.
PH12014501123A1 (en) Pressure release closure device and bag for cooking
WO2012087044A3 (en) Vacuum thermal treating apparatus

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 12745307

Country of ref document: EP

Kind code of ref document: A2

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 12745307

Country of ref document: EP

Kind code of ref document: A2