WO2012102603A1 - Appareil de balayage pour ligne à une seule passe et à balayages multiples pour inspection de cellules solaires, et méthodologie associée - Google Patents
Appareil de balayage pour ligne à une seule passe et à balayages multiples pour inspection de cellules solaires, et méthodologie associée Download PDFInfo
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- WO2012102603A1 WO2012102603A1 PCT/MY2012/000006 MY2012000006W WO2012102603A1 WO 2012102603 A1 WO2012102603 A1 WO 2012102603A1 MY 2012000006 W MY2012000006 W MY 2012000006W WO 2012102603 A1 WO2012102603 A1 WO 2012102603A1
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- Prior art keywords
- solar cell
- line scan
- colour
- single pass
- pass line
- Prior art date
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- 238000007689 inspection Methods 0.000 title claims abstract description 36
- 238000000034 method Methods 0.000 title claims description 23
- 238000003384 imaging method Methods 0.000 claims abstract description 37
- 230000007547 defect Effects 0.000 claims abstract description 18
- 238000005286 illumination Methods 0.000 claims abstract description 18
- 210000004027 cell Anatomy 0.000 claims description 109
- 230000003595 spectral effect Effects 0.000 claims description 26
- 230000003287 optical effect Effects 0.000 claims description 23
- 239000011521 glass Substances 0.000 claims description 10
- 238000001228 spectrum Methods 0.000 claims description 10
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 238000000926 separation method Methods 0.000 claims description 6
- 238000003491 array Methods 0.000 claims description 5
- 238000011109 contamination Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 239000000853 adhesive Substances 0.000 claims description 2
- 230000001070 adhesive effect Effects 0.000 claims description 2
- 239000002245 particle Substances 0.000 claims description 2
- 239000003086 colorant Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 230000002950 deficient Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000006117 anti-reflective coating Substances 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 241001281435 Viola guadalupensis Species 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001429 visible spectrum Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02S—GENERATION OF ELECTRIC POWER BY CONVERSION OF INFRARED RADIATION, VISIBLE LIGHT OR ULTRAVIOLET LIGHT, e.g. USING PHOTOVOLTAIC [PV] MODULES
- H02S50/00—Monitoring or testing of PV systems, e.g. load balancing or fault identification
- H02S50/10—Testing of PV devices, e.g. of PV modules or single PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Definitions
- the present invention relates generally to a multiple scan single pass line scan apparatus for solar cell inspection, comprising at least one line scan imaging device, at least one beam splitter, at least one light beam illuminated from an illumination source and a pair of equilateral triangular prism to obtain the various defects information of the solar cell.
- Solar cell also called photovoltaic cell
- solar module also called solar panels
- the energy generated from the solar modules are referred to as solar power, which is an example of solar energy.
- the performance of a solar cell is mainly determined by the conversion efficiency between light and electricity.
- solar cells made by silicon have the greatest market share. Categorizing by crystal structure, they can be divided into single-crystal silicon solar cell, poly-crystalline silicon solar cell and amorphous silicon solar cell. Finding ways to raise the energy conversion efficiency and lowering the thickness of silicon wafers is another major focus in the development of solar cell technology.
- inspection may need to be performed routinely to ensure that defective unit of solar cell are identified so as to control the quality of the solar cells.
- defects may happen on a solar cell in a few ways such as print electrode defects, surface passivation defects, ARC (Anti-reflective coating) color defects, cell geometric variations, cell edge defects and etc.
- ARC Anti-reflective coating
- solar cell manufacturers need to characterize the quality of solar cell on multiple process gates of solar cell production line as well as to separate the defective units from the working units.
- a vision inspection system and method whereby solar cell is illuminated with lights to detect the existence and location of defects on a solar cell, and hence to sort the cells with defects into different quality classes.
- line scanning method is used in solar cell vision inspection system, due to its ability to produce high resolution image at high speed.
- a line scan camera is normally coupled with single or multiple line lights to produce a single frame image or web images. This is normally used in printing industry where inspection is progressing continuously.
- Conventional method of line scan optical setup consists of the camera and line light which is set at an angle relative to each other, as shown in FIG. 1. Normally either a monochromatic color or white light is used, depending on type of application. White line light is used especially when color line scan camera is used to illuminate multi-spectral features on the solar cell. Otherwise specific color spectrum, i.e. red, green and blue will be used as light source when coupled with monochrome line scan camera. And depending on the angle in between, the setup affects the quality of the image acquired.
- FIG. 3 illustrates the reflected light angle is identical to the angle of incident light when it is projected on flat surface and the amounts of refractions is depends on surface property and smoothness.
- FIG. 4 illustrates the normal line shifted to different angle due to the curvature profile of a warped surface, and the angle and direction of the incident and reflected light will change along the warp surface when solar cell moves along the scanning line.
- FIG. 5 shows another prior art by using two or multiple line lights which are mounted at the same angle on both side of the camera and the camera is mounted vertically and perpendicular to solar cell surface to increase the amount of light illuminated at certain line of the solar cell surface.
- the same problem may still exists due to the light reflection, which is not completely reflected back to the camera as the amount and direction of reflected lights is depend on the curvature surface of the warped solar cell.
- the various prior arts are using monochromatic or polychromatic camera coupled with white line lights to generate single spectral image which is in most cases of solar cell inspection, single spectral image will not able to discern various chromatic defects accurately when their color hue, saturation or intensity (HSI values) values are overlapping with one another.
- the method of acquiring multiple color planes of solar cell is using multiple optical setups, each with different light spectrum illumination. This will require more space, more illumination and camera that lead to bigger footprint and higher setup cost.
- a multiple scan single pass line scan optical apparatus comprising a plurality of co-linear line lights with different spectral frequency and a plurality of receiver sensor cameras to generate multi-spectral undistorted and highly even across the entire field of view solar cell images for solar cell inspection.
- a multiple scan single pass line scan optical apparatus comprising a plurality of co-linear line lights with different spectral frequency and a plurality of receiver sensor cameras to generate multi-spectral undistorted and highly even across the entire field of view solar cell images for solar cell inspection.
- a multi scan single pass line scan apparatus for solar cell inspection comprising: at least one line scan imaging device (601); at least one light beam (605) having a plurality of wavelengths illuminated from an illumination source (607); characterized in that said apparatus further comprising of at least one beam splitter (603) to direct said illuminated light beam (605) to be projected substantially perpendicular onto a solar cell surface and said light beam is reflected almost at the same angle of said projected light and reach the said line scan imaging device (601).
- a methodology of multi scan single pass line scan for solar cell inspection comprising steps of: i. projecting a light beam (605) from an illumination source (607) towards a solar cell surface; ii. providing at least one line scan imaging device (601) to detect the reflected light from said solar cell surface; iii. acquiring images from said line scan imaging device (601); characterized in that said methodology further comprises of following steps before said reflected light is detected by said line scan imaging device: i. said light beam (605) having a plurality of wavelengths from an illumination source (607) strikes the first equilateral prism (903) and disperse to break light into individual spectral component; ii.
- said dispersed multi-spectral component lights strike the second equilateral prism (904) at an angle substantially equivalent to the exit angle from the first equilateral prism (903) in order for said component lights to be diffracted and transmitted as substantially parallel beams going out from said second equilateral prism; iii. said illuminated light beams passing through at least one colour filter and at least one focusing lens to filter out unwanted colour spectrums and at the same time to focus the intended colour component lights before said substantially parallel beams strikes the said beam splitter (603); iv. said substantially parallel multi-spectral component lights strike the beam-splitter (603) to generate a co- linear multi-spectral lights towards said solar cell surface; v. the intended colour component lights are reflected (908) and transmitted to the multi spectral sensor imaging device.
- a methodology of multi scan single pass line scan for solar cell inspection comprising steps of: i. projecting a light beam (605) from an illumination source (607) towards a solar cell surface; ii. providing at least one line scan imaging device (601) to detect the reflected light from said solar cell surface; iii. acquiring images from said line scan imaging device (601); characterized in that said methodology further comprises of following steps before said reflected light is detected by said line scan imaging device: i. said light beam (605) having a plurality of wavelengths from an illumination source (607) strikes the first equilateral prism (903) and disperse to break light into individual spectral component; ii.
- said dispersed multi-spectral component lights strike the second equilateral prism (904) at an angle substantially equivalent to the exit angle from the first equilateral prism (903) in order for said component lights to be diffracted and transmitted as substantially parallel beams going out from said second equilateral prism; iii. said illuminated light beams passing through at least one colour filter and at least one focusing lens to filter out unwanted colour spectrums and at the same time to focus the intended colour component lights before said substantially parallel beams strikes the said beam splitter (603); iv. said substantially parallel multi-spectral component lights strike the beam-splitter (603) to generate a co- linear multi-spectral lights towards said solar cell surface; v.
- said intended colour component lights are reflected (908) and transmitted from said solar cell surface; vi. said intended colour component lights (118) are individually directed by a plurality of reflective mirrors (116, 117) towards a plurality of single-spectral line scan camera (111, 112, 113). 4. BRIEF DESCRIPTION OF THE DRAWINGS
- FIG. 1 shows a conventional method of line scan optical setup consists of the camera and line light which is set at an angle relative to each other.
- FIG. 2 shows a conventional method of line scan optical setup consists of the camera and line light which is set at an angle relative to each other towards a warped surface cell.
- FIG. 3 shows the reflected light angle is identical to the angle of incident light when it is projected on flat surface and the amounts of refractions is depends on surface property and smoothness.
- FIG. 4 shows the normal line shifted to different angle due to the curvature profile of a warped surface.
- FIG. 5 shows another prior art by using two or multiple line lights which are mounted at the same angle on both side of the camera.
- FIG. 6 shows an embodiment of the present invention for multiple scan single pass line scan apparatus.
- FIG. 7 shows a glass plate used as beam splitter to produce co-linear lighting.
- FIG. 8 shows a cube used as beam splitter to produce co-linear lighting.
- FIG. 9 shows a multiple scan single pass line scan optical apparatus, wherein multi-sensor and multi-spectral line scan camera is used in the present invention.
- FIG. 10 shows a multiple scan single pass line scan optical apparatus, wherein a plurality of line scan cameras or a plurality of monochromatic line scan cameras is used in the present invention.
- FIG. 11 shows a comparison for the image quality obtained using a conventional angular line light setups and a co-linear line light setup.
- FIG. 12 shows the importance of using multi-colour plan to ease the image processing.
- FIG. 6 there is shown an embodiment of the present invention for multiple scan single pass line scan apparatus, comprises of at least one line scan imaging device (601), at least one beam splitter (603) and at least one light beam (605) having a plurality of wavelengths illuminated from an illumination source (607).
- the present invention is using a co-linear line light method, whereby collimated light is projected substantially perpendicular onto a solar cell surface or warped solar cell and said light beam is reflected almost at the same angle of said projected light and reach the said imaging device sensors (601) at the smallest deflected angle. Hence high contrast image is obtained.
- Beam splitter (603) is used to make the said projected light coincides with said reflected light.
- Said beam splitter (603) includes but not limited to a glass plate (701) or a cube (801), which is further illustrated in FIG. 7 and FIG. 8.
- a glass plate (701) which includes a half-silvered mirror coated glass plate used as beam splitter (603) to produce co-linear lighting.
- said glass plate splits the said incident light to a certain percentage ratio, wherein certain percentage is being transmitted and the remaining percentage is being reflected.
- Said percentage ratio can vary depending on the angle between the incident light and the said beam splitter (603). In general, the larger the angle between the incident light and the said beam splitter (603), the larger the percentage of light is being reflected and the remaining percentage is being transmitted.
- Said reflected light beam strikes towards a solar cell surface and thereafter is reflected back and is passed through the said beam splitter plate (701) and eventually reach the said line scan imaging device sensor (601).
- a cube (801) used as beam splitter (603) to produce co-linear lighting Said cube comprises of two triangular glass prisms which are attached by using adhesive coating material (803) at a certain predetermined thickness which may range from zero up to ten micrometer so that said light beam is reflected and transmitted according to a specific percentage ratio.
- Said beam splitter cube (801) is typically coated with a selected metallic or dielectric optical filter coating so that incident light beam is reflected and transmitted according to certain percentage ratio with negligible absorption loss. Said percentage ratio can vary depending on the angle between the incident light and the said beam splitter (603).
- the incident light is 45 degree from the said beam splitter (801)
- half of the light incident is transmitted at 45 degree angle and the remainder is reflected.
- Said reflected light is striking the surface of solar cell vertically and some will be reflected as diffused light due to the presence of the anti-reflective SiN2 layer at said solar cell.
- Said reflected light from surface of said solar cell hence pass through the beam-splitter cube (801) and eventually reaches the line scan imaging device sensor (601).
- multi-spectral line scan imaging device includes a single polychromatic line scan camera (901) with a plurality of sensors (902).
- the said photosensor is a multi chips or multi sensor package solid state device which comprises of a plurality of linear sensors (902) and is aligned and spaced precisely to coincide with the respective focused line images.
- multi sensor line scan CCD camera with resolution ranging from 2048 to 12288 photo elements or pixels per line can be used as the said imaging device in the present invention. If three colours are adopted, i.e. red, blue and green, three linear sensors are required.
- a distance of "D” is used to separate the said plurality of photo-sensor (902) arrays as shown in the enlarged view in FIG. 9.
- Said plurality of sensor (902) arrays is separated at a distance of 10 micrometer to 20 micrometer corresponding to separation distance of the said three colours or any parallel collimated lights.
- the three photo-sensor (902) arrays have common clock inputs for synchronization.
- the combined spacing precision of the colour component lights and the three photo-sensor (902) array detectors allows accurate coincidence of the detected images with the single line of image of the original.
- the said multiple scan single pass line scan apparatus further comprises of a pair of equilateral triangular prism (903, 904).
- Said pair of equilateral triangular prism (903, 904) is used to obtain the spectral component separation of an incident white light.
- each of the said prisms (903, 904) is separated by a distance of "E", wherein said distance of "E” can be ranged from 10 mm to 12 mm.
- the occurrence of the dispersion is because of the angle of refraction is dependent on the refractive index of the prism material which in turn is slightly dependent on the wavelength of light that is travelling through it. This means that different wavelengths of light will travel at different speeds, and so the light will dispersed into the colours of the visible spectrum, with longer wavelengths (e.g. red, yellow) being refracted less than shorter wavelengths (e.g. violet, blue).
- the prism is placed at a position with the incident light beam adjusted such that the refracted beam is at minimum deviation whereby at the angle of minimum deviation both the incoming and outgoing light rays hit the surface approximately at the Brewster's angle, which is an angle of incidence at which light with a particular polarization is perfectly transmitted through a transparent dielectric surface with no reflection.
- the dispersed multi- spectral component lights will strike the second equilateral prism (904) at an angle substantially equivalent to the exit angle from the first equilateral prism (903) in order for said component lights to be diffracted and transmitted as substantially parallel beams (906) going out from the said second equilateral prism (904), and thereafter collimated into substantially parallel beams.
- the exit angle from first equilateral prism (903) and striking angle at second equilateral prism (904) has dependency on refractive index of the prism material, light beam angle of incidence with the surface of first equilateral prism (903) and also the apex angle of the equilateral prism (903), whereby the range of angle is approximately 30 to 50 degree.
- Filter and focus lens unit (905) is used to further refined the beams with high focus and accurate wavelength before the parallel multi-spectral component lights (907) striking the beam-splitter (603) to generate a co-linear multi-spectral lights.
- said filter and focus lens unit (905) comprises of at least one colour filter and at least one focusing lens to filter out unwanted colour spectrums and at the same time to focus the intended colour component lights.
- the focusing of the intended colour components is important in order to reduce interference from adjacent colour spectrum. Therefore when all the intended colour component lights are reflected to the said multi-spectral sensor camera (902), multi-colour image planes can be produced in said single polychromatic line scan camera (901). Referring now to FIG 10, there is shown a multiple scan single pass line scan optical apparatus, which is in another embodiment of the present invention.
- said multiple scan single pass line scan optical apparatus comprises of at least one line scan imaging device (601), at least one beam splitter (603), at least one light beam (605) illuminated from an illumination source (607) and a pair of equilateral triangular prism (903, 904)
- Said line scan imaging device (601) comprises of a plurality of single-sensor line scan cameras (111, 112, 113), coupled with a plurality of dichroic mirrors (114, 115) and a plurality of reflective mirrors (116, 117).
- Said plurality of monochromatic line scan cameras (111, 112, 113) is used to obtain multiple colour image planes.
- the photo-sensor arrays used are multiple single-sensor line scan camera with highest spectral response at a particular wavelength.
- Said dichroic mirrors (114, 115) are used to direct the light to the imaging device sensor of the individual monochromatic line scan camera (111, 112, 113) accordingly.
- the reflected spectral lights (118) coming out from the beam-splitter (603) are striking the first dichroic mirrors (114) at a particular angle, in which 45 degree is an example reflects the blue spectral band (approximately 450nm to 495nm) while transmitting the green and red spectral bands (approximately 495nm to 750nm).
- the blue band is striking a first reflective mirror (116) at a particular angle, in which 45 degree is an example and reflected, traveling towards and reaches the first line scan camera (111) which is highly responsive towards blue spectral band.
- the green band striking a second dichroic mirror (115) at a particular angle, in which 45 degree is an example, is reflected and striking a second reflective mirror (117) at a particular angle, in which 45 degree is an example and reflected, traveling towards and reaches the second line scan camera (112) which is highly responsive towards green spectral band.
- the red spectral band which is un-reflected by the second dichroic mirror (115) travels and reaches the third line scan camera (113) which is highly responsive towards red spectral band.
- separation of red, green and blue spectral bands of the incident spectral bands through said plurality of dichroic mirrors and reflective mirrors is an example beams with substantially parallel distance separation which is solely determined by dichroic coating and reflective indexes of said dichroic mirrors.
- the order in which the reflected colour bands have been presented is by example only. Referring now to FIG 11, there is shown a comparison for the image quality obtained using a conventional angular line light setups and a co-linear line light setup. Sample Image A and Sample Image B were captured using angular line light setups, in which the middle area of the cell was found dark.
- Sample Image C is captured using the co-linear line light setup of the present invention, which showed the effectiveness to produce a high uniformity of contrast on the solar cell surface and undisturbed by the warp surface of solar cell.
- multi-colour image planes can be produced by using of at least one image processing tool.
- Said image processing tool is used to extract colour in different colour planes, whereby said colour planes can be from colour space such as RGB, HSL, CYMK etc.
- Sample Image D as shown in FIG. 12 is in blue colour plane which represent the original image of solar cell with defects and is predominantly used to compute blue colour homogeneity and variance of said solar cell.
- Sample Image E is in hue colour plane and is used to determine the solar cell colour, this colour space as different colours have different constant hue value.
- Sample Image F is in red colour plane but appears as black and white image by using the monochromatic sensor or camera. As said red plane has the most insensitivity towards blue colour, red plane will give very high contrast image compared to grey image as well as the original blue colour image. Therefor the red colour plane is used predominantly to extract finger print (horizontal white lines) and busbar (vertical white lines) information such as dimension, contamination, interruption, shape, irregularity and etc. since the white lines are most visible under the red colour plane.
- Sample Image G is in saturation plane, and usually the blue colour of solar cell has high saturation value and the saturation value represents the brightness of the colour. Surface defects which have colours other than blue (e.g.
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Abstract
La présente invention concerne de manière générale un appareil de balayage pour ligne à une seule passe et à balayages multiples pour l'inspection de cellules solaires, comprenant au moins un dispositif de formation d'image de ligne de balayage, au moins une séparatrice de faisceaux, au moins un faisceau lumineux projeté par une source d'éclairement et une paire de prismes triangulaires équilatéraux permettant d'obtenir diverses informations concernant des défauts de la cellule solaire.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
MYPI2011000436A MY159053A (en) | 2011-01-28 | 2011-01-28 | Multiple scan single pass line scan apparatus for solar cell inspection and methodology thereof |
MYPI2011000436 | 2011-01-28 |
Publications (1)
Publication Number | Publication Date |
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WO2012102603A1 true WO2012102603A1 (fr) | 2012-08-02 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/MY2012/000006 WO2012102603A1 (fr) | 2011-01-28 | 2012-01-20 | Appareil de balayage pour ligne à une seule passe et à balayages multiples pour inspection de cellules solaires, et méthodologie associée |
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MY (1) | MY159053A (fr) |
WO (1) | WO2012102603A1 (fr) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015021411A1 (fr) * | 2013-08-09 | 2015-02-12 | Kla-Tencor Corporation | Éclairage multipoint pour une sensibilité de détection améliorée |
EP3460999A1 (fr) | 2017-09-25 | 2019-03-27 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Procédé et agencement d'essai à grande surface de propriétés optiques d'une couche |
CN113465546A (zh) * | 2021-07-02 | 2021-10-01 | 长春理工大学 | 激光扫描投影系统圆形背向反射合作目标扫描方法 |
CN115656217A (zh) * | 2022-10-24 | 2023-01-31 | 福建带好路智能科技有限公司 | 一种玻璃面板的瑕疵检测方法及装置 |
CN116074648A (zh) * | 2023-03-06 | 2023-05-05 | 杭州百子尖科技股份有限公司 | 基于机器视觉的彩色图像获取方法、装置、系统及介质 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5003166A (en) * | 1989-11-07 | 1991-03-26 | Massachusetts Institute Of Technology | Multidimensional range mapping with pattern projection and cross correlation |
US5367174A (en) * | 1992-01-27 | 1994-11-22 | Aerospatiale Societe Nationale Industrielle | Defect detecting device for two-layer parts, in particular for solar cells |
EP1557661A1 (fr) * | 2002-10-30 | 2005-07-27 | Toppan Printing Co., Ltd. | Dispositif de controle d'un modele de cablage, procede de controle, dispositif de detection, et procede de detection |
US20100237895A1 (en) * | 2009-03-19 | 2010-09-23 | Kyo Young Chung | System and method for characterizing solar cell conversion performance and detecting defects in a solar cell |
-
2011
- 2011-01-28 MY MYPI2011000436A patent/MY159053A/en unknown
-
2012
- 2012-01-20 WO PCT/MY2012/000006 patent/WO2012102603A1/fr active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5003166A (en) * | 1989-11-07 | 1991-03-26 | Massachusetts Institute Of Technology | Multidimensional range mapping with pattern projection and cross correlation |
US5367174A (en) * | 1992-01-27 | 1994-11-22 | Aerospatiale Societe Nationale Industrielle | Defect detecting device for two-layer parts, in particular for solar cells |
EP1557661A1 (fr) * | 2002-10-30 | 2005-07-27 | Toppan Printing Co., Ltd. | Dispositif de controle d'un modele de cablage, procede de controle, dispositif de detection, et procede de detection |
US20100237895A1 (en) * | 2009-03-19 | 2010-09-23 | Kyo Young Chung | System and method for characterizing solar cell conversion performance and detecting defects in a solar cell |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015021411A1 (fr) * | 2013-08-09 | 2015-02-12 | Kla-Tencor Corporation | Éclairage multipoint pour une sensibilité de détection améliorée |
CN105612611A (zh) * | 2013-08-09 | 2016-05-25 | 科磊股份有限公司 | 用于提高检测灵敏度的多点照明 |
US9494531B2 (en) | 2013-08-09 | 2016-11-15 | Kla-Tencor Corporation | Multi-spot illumination for improved detection sensitivity |
EP3460999A1 (fr) | 2017-09-25 | 2019-03-27 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Procédé et agencement d'essai à grande surface de propriétés optiques d'une couche |
CN113465546A (zh) * | 2021-07-02 | 2021-10-01 | 长春理工大学 | 激光扫描投影系统圆形背向反射合作目标扫描方法 |
CN113465546B (zh) * | 2021-07-02 | 2022-09-16 | 长春理工大学 | 激光扫描投影系统圆形背向反射合作目标扫描方法 |
CN115656217A (zh) * | 2022-10-24 | 2023-01-31 | 福建带好路智能科技有限公司 | 一种玻璃面板的瑕疵检测方法及装置 |
CN116074648A (zh) * | 2023-03-06 | 2023-05-05 | 杭州百子尖科技股份有限公司 | 基于机器视觉的彩色图像获取方法、装置、系统及介质 |
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