WO2012091540A1 - Integrated microfluidics sensor - Google Patents

Integrated microfluidics sensor Download PDF

Info

Publication number
WO2012091540A1
WO2012091540A1 PCT/MY2011/000152 MY2011000152W WO2012091540A1 WO 2012091540 A1 WO2012091540 A1 WO 2012091540A1 MY 2011000152 W MY2011000152 W MY 2011000152W WO 2012091540 A1 WO2012091540 A1 WO 2012091540A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
sensor
biological
chemical
sensor according
Prior art date
Application number
PCT/MY2011/000152
Other languages
French (fr)
Inventor
Hing Wah Lee
Chia Sheng Daniel Bien
Original Assignee
Mimos Berhad
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mimos Berhad filed Critical Mimos Berhad
Publication of WO2012091540A1 publication Critical patent/WO2012091540A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4145—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for biomolecules, e.g. gate electrode with immobilised receptors

Definitions

  • the present invention relates generally to an integrated microfluidics sensor and more specifically to such a sensor that is FET-based.
  • microfluidic elements to perform the desired fluid manipulation and biological or chemical reactions.
  • pTAS Micro Total Analysis Systems
  • LOC Lab On Chips
  • POC Point Of Care
  • BEANS Bio Electro-mechanical Autonomous Nano Systems
  • microfluidics sensor system that is integrated to allow various types of FET-based sensors to be developed on the same substrate with the microfluidics elements.
  • microfluidics sensor system that prevents fluid leakage, electrical shortage, signal interruptions due to noise, while increasing the response time of the sensor.
  • the present invention aims at providing an integrated microfluidics sensor system that allows various types of FET-based sensors to be developed on the same substrate with the microfluidics elements while preventing fluid leakage, electrical shortage, signal interruptions due to noise, and an increase in the response time of the sensor.
  • the present invention thus relates to a FET-based sensor with integrated microfluidics components on opposite surfaces of the substrate for biological or chemical analysis with fluid manipulation capabilities.
  • the FET-based sensors and microfluidic elements are embedded in a single chip and on a single substrate.
  • the contact pads for the sensor are at the opposing side of the microfluidic components and sensing element. This will ensure that only components which need to be in contact with the fluid region will be exposed to the fluid boundary while the electrical and electronics components will inherently be protected from the fluid region. This eliminates the need for very reliable and leakage-free packaging material and technology traditionally required for segregation of the electrical components to the sensing and microfluidic regions.
  • the present invention also relates to a biological or chemical sensor comprising: a first silicon substrate; a sensor attached to a first side of said first substrate, said sensor having electrical contact pads for electrical connection with an external measurement device and a sensing membrane, said sensing membrane located adjacent to said first substrate; microfluidic components located on an opposite side of said first substrate; and a second substrate attached to said opposite side of said first substrate, whereby the biological or chemical sample to be sensed enters a fluid inlet, passes through the microfluidic component before coming into contact with the sensing membrane and exiting via a fluid outlet.
  • the microfluidic component comprises any of the following devices: at least one micromixer, at least one microchannel and at least one reservoir, or a combination thereof.
  • the sensor may further comprise a polysilicon member that acts as the body of the sensor (30) and also as a structural support for said sensing membrane.
  • the sensor is a field-effect transistor (FET) based sensor and may include any of: ion-sensitive field-effect transistor (ISFET) and chemical field-effect transistor (CHE FET).
  • FET field-effect transistor
  • the microfluidic component can either be formed within the first substrate or the second substrate.
  • the third substrate located on the said first side of the first substrate, said third substrate assisting with development of the said contact pads and sensor in order to create a planar device.
  • the third substrate is a silicon on insulator (SOI) type of substrate.
  • the substrates can be made from any of the following materials: glass, polymer, silicon substrate, or a combination thereof.
  • the present invention further relates to a method for fabricating a biological or chemical sensor comprising the steps of:
  • Figure 1 shows an integrated microfluidic system in an embodiment of the present invention.
  • Figures 2 (a) to (h) show a fabrication process of an integrated microfluidic system in an embodiment of the present invention.
  • Figure 3 shows an integrated microfluidic system in a second embodiment of the present invention.
  • Figure 4 shows an integrated microfluidic system in a third embodiment of the present invention.
  • an integrated microfluidic system comprising: a first silicon substrate (10); a sensor (30) attached to a first side of said first substrate (10), said sensor having electrical contact pads (32, 34) for electrical connection with an external measurement device, and a sensing membrane (36).
  • the sensing membrane (36) is located adjacent to said first substrate (10).
  • a microfluidic component (40) is located on a side of said first substrate (10) that opposite to the said first side.
  • a second substrate (20) is attached by bonding or other means to said opposite side of said first substrate (10).
  • the second substrate (20) contains hollows that form a fluid inlet (22) and fluid outlet (24).
  • the biological or chemical sample to be sensed enters the said fluid inlet (22), passes through the microfluidic component (40) before coming into contact with the sensing membrane (36) and exits via the said fluid outlet (24).
  • the microfluidic component (40) comprises any or a combination of the following devices: at least one micromixer (42), at least one microchannel (44) and at least one reservoir.
  • the sensor (30) may further comprise a polysilicon member (38) that acts as the body of the sensor (30) and also as a structural support for said sensing membrane (36).
  • the sensor (30) is a field- effect transistor (FET) based sensor and may include any of: ion-sensitive field-effect transistor (ISFET) and chemical field-effect transistor (CHEMFET).
  • the microfluidic component (40) is formed within the said first substrate (10). Referring to Figure 2 (a) to (h), there is shown a fabrication process of an integrated microfluidic system, comprising the steps of:
  • FIG. 3 there is shown a second embodiment of this invention, and an integrated microfluidic system comprising: a first silicon substrate (10); a sensor (30) attached to a first side of said first substrate (10), said sensor having electrical contact pads (32, 34) for electrical connection with an external measurement device, and a sensing membrane (36).
  • the sensing membrane (36) is located adjacent to said first substrate (10).
  • a microfluidic component (40) is located on a side of said first substrate (10) that opposite to the said first side.
  • a second substrate (20) is attached by bonding or other means to said opposite side of said first substrate (10).
  • the second substrate (20) contains hollows that form a fluid inlet (22) and fluid outlet (24).
  • the biological or chemical sample to be sensed enters the said fluid inlet (22), passes through the microfluidic component (40) before coming into contact with the sensing membrane (36) and exits via the said fluid outlet (24).
  • the microfluidic component (40) comprises any or a combination of the following devices: at least one micromixer (42), at least one microchannel (44) and at least one reservoir.
  • the sensor (30) is a field-effect transistor (FET) based sensor and may include any of: ion-sensitive field-effect transistor (ISFET) and chemical field-effect transistor (CHEMFET).
  • the microfluidic component (40) is formed within the said second substrate (20).
  • FIG 4 shows a third embodiment of the present invention.
  • An integrated microfluidic system comprising: a first silicon substrate (10); a sensor (30) attached to a first side of said first substrate (10), said sensor having electrical contact pads (32, 34) for electrical connection with an external measurement device, and a sensing membrane (36).
  • the sensing membrane (36) is located adjacent to said first substrate (10).
  • a microfluidic component (40) is located on a side of said first substrate (10) that opposite to the said first side.
  • a second substrate (20) is attached by bonding or other means to said opposite side of said first substrate (10).
  • the second substrate (20) contains hollows that form a fluid inlet (22) and fluid outlet (24).
  • the biological or chemical sample to be sensed enters the said fluid inlet (22), passes through the microfluidic component (40) before coming into contact with the sensing membrane (36) and exits via the said fluid outlet (24).
  • the microfluidic component (40) comprises any or a combination of the following devices: at least one micromixer (42), at least one microchannel (44) and at least one reservoir.
  • the sensor (30) is a field-effect transistor (FET) based sensor and may include any of: ion-sensitive field-effect transistor (ISFET) and chemical field-effect transistor (CHEMFET).
  • the microfluidic component (40) is formed within the said second substrate (20).
  • a third substrate (50) is provided and located on the said first side of the first substrate (10), said third substrate (50) assisting with development of the said contact pads (32, 34) and sensor (30) in order to create a planar device.
  • the said third substrate (50) is a silicon on insulator (SOI) type of substrate.
  • SOI silicon on insulator
  • the substrates in all three embodiments can be made from any of the following materials: glass, polymer, silicon substrate, or a combination thereof.

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Molecular Biology (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electrochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)

Abstract

A FET-based sensor with integrated microfluidics components on opposite surfaces of the substrate for biological or chemical analysis with fluid manipulation capabilities. The FET-based sensors and microfluidic elements are embedded in a single chip and on a single substrate. The contact pads for the sensor are at the opposing side of the microfluidic components and sensing element. This will ensure that only components which need to be in contact with the fluid region will be exposed to the fluid boundary while the electrical and electronics components will inherently be protected from the fluid region. This eliminates the need for very reliable and leakage-free packaging material and technology traditionally required for segregation of the electrical components to the sensing and microfluidic regions.

Description

Integrated Microfluidics Sensor
FIELD OF INVENTION The present invention relates generally to an integrated microfluidics sensor and more specifically to such a sensor that is FET-based.
BACKGROUND OF INVENTION Miniaturization of biological or chemical analytical systems, known as Micro Total Analysis Systems (pTAS), Lab On Chips (LOC), Point Of Care (POC), or Bio Electro-mechanical Autonomous Nano Systems (BEANS), requires microfluidic elements to perform the desired fluid manipulation and biological or chemical reactions. Currently, the microfluidic elements are established through assembly of discrete devices.
The problem with this is that only discrete sensors or different platforms of microfluidic systems with specific functions can be developed. There is no full integration for the same fabrication process on the same substrate. There is also no separation of the microfluidic components with the FET-based sensor's contact pads on the same substrate. Separate packaging must be provided to avoid the problem of fluid leakage, which harms the electrical connectivity and electronics operation. If packaged together, the reliability of the packaging is very critical.
What is needed is a microfluidics sensor system that is integrated to allow various types of FET-based sensors to be developed on the same substrate with the microfluidics elements. What is also needed is a microfluidics sensor system that prevents fluid leakage, electrical shortage, signal interruptions due to noise, while increasing the response time of the sensor. SUMMARY OF INVENTION
The present invention aims at providing an integrated microfluidics sensor system that allows various types of FET-based sensors to be developed on the same substrate with the microfluidics elements while preventing fluid leakage, electrical shortage, signal interruptions due to noise, and an increase in the response time of the sensor.
The present invention thus relates to a FET-based sensor with integrated microfluidics components on opposite surfaces of the substrate for biological or chemical analysis with fluid manipulation capabilities. The FET-based sensors and microfluidic elements are embedded in a single chip and on a single substrate. The contact pads for the sensor are at the opposing side of the microfluidic components and sensing element. This will ensure that only components which need to be in contact with the fluid region will be exposed to the fluid boundary while the electrical and electronics components will inherently be protected from the fluid region. This eliminates the need for very reliable and leakage-free packaging material and technology traditionally required for segregation of the electrical components to the sensing and microfluidic regions.
The present invention also relates to a biological or chemical sensor comprising: a first silicon substrate; a sensor attached to a first side of said first substrate, said sensor having electrical contact pads for electrical connection with an external measurement device and a sensing membrane, said sensing membrane located adjacent to said first substrate; microfluidic components located on an opposite side of said first substrate; and a second substrate attached to said opposite side of said first substrate, whereby the biological or chemical sample to be sensed enters a fluid inlet, passes through the microfluidic component before coming into contact with the sensing membrane and exiting via a fluid outlet. The microfluidic component comprises any of the following devices: at least one micromixer, at least one microchannel and at least one reservoir, or a combination thereof. The sensor may further comprise a polysilicon member that acts as the body of the sensor (30) and also as a structural support for said sensing membrane. The sensor is a field-effect transistor (FET) based sensor and may include any of: ion-sensitive field-effect transistor (ISFET) and chemical field-effect transistor (CHE FET). The microfluidic component can either be formed within the first substrate or the second substrate.
In another embodiment, there is a third substrate located on the said first side of the first substrate, said third substrate assisting with development of the said contact pads and sensor in order to create a planar device. The third substrate is a silicon on insulator (SOI) type of substrate.
The substrates can be made from any of the following materials: glass, polymer, silicon substrate, or a combination thereof.
The present invention further relates to a method for fabricating a biological or chemical sensor comprising the steps of:
a) depositing and patterning of silicon nitride and silicon dioxide on a first substrate;
b) depositing and patterning of doped silicon on said first substrate to form a sensor; c) implanting a source drain and channel on said sensor;
d) depositing silicon dioxide on said sensor to form a protective layer; e) forming of contact pads on said sensor;
f) etching of said first substrate to form a microfluidic component;
g) defining fluid inlet and outlet on a second substrate; and
h) bonding said second substrate to said first substrate.
These and other objects of the present invention will become more readily apparent from the detailed description given hereinafter. However, it should be understood that the detailed description and specific examples, while indicating the preferred embodiments of the invention, are given by way of illustration only, since various changes and modifications within the spirit and scope of the invention will become apparent to those skilled in the art from this detailed description.
BRIEF DESCRIPTION OF DRAWINGS
Figure 1 shows an integrated microfluidic system in an embodiment of the present invention.
Figures 2 (a) to (h) show a fabrication process of an integrated microfluidic system in an embodiment of the present invention.
Figure 3 shows an integrated microfluidic system in a second embodiment of the present invention.
Figure 4 shows an integrated microfluidic system in a third embodiment of the present invention. DETAILED DESCRIPTION OF INVENTION
It should be noted that the following detailed description is directed to an integrated microfluidic system and fabrication method thereof and is not limited to any particular size or configuration but in fact a multitude of sizes and configurations within the general scope of the following description.
Referring to Figure 1 , there is shown an integrated microfluidic system comprising: a first silicon substrate (10); a sensor (30) attached to a first side of said first substrate (10), said sensor having electrical contact pads (32, 34) for electrical connection with an external measurement device, and a sensing membrane (36). The sensing membrane (36) is located adjacent to said first substrate (10). A microfluidic component (40) is located on a side of said first substrate (10) that opposite to the said first side. A second substrate (20) is attached by bonding or other means to said opposite side of said first substrate (10). The second substrate (20) contains hollows that form a fluid inlet (22) and fluid outlet (24). The biological or chemical sample to be sensed enters the said fluid inlet (22), passes through the microfluidic component (40) before coming into contact with the sensing membrane (36) and exits via the said fluid outlet (24). The microfluidic component (40) comprises any or a combination of the following devices: at least one micromixer (42), at least one microchannel (44) and at least one reservoir. The sensor (30) may further comprise a polysilicon member (38) that acts as the body of the sensor (30) and also as a structural support for said sensing membrane (36). The sensor (30) is a field- effect transistor (FET) based sensor and may include any of: ion-sensitive field-effect transistor (ISFET) and chemical field-effect transistor (CHEMFET). In this first embodiment, the microfluidic component (40) is formed within the said first substrate (10). Referring to Figure 2 (a) to (h), there is shown a fabrication process of an integrated microfluidic system, comprising the steps of:
a) depositing and patterning of silicon nitride (101 ) and silicon dioxide (102) on a first substrate (10);
b) depositing and patterning of doped silicon (103) on said first substrate (10) to form a sensor (30);
c) implanting a source drain and channel (104) on said sensor (30);
d) depositing silicon dioxide (105) on said sensor (30) to form a protective layer;
e) forming of contact pads (32, 34) on said sensor (30);
f) etching of said first substrate (10) to form a microfluidic component (40); g) defining fluid inlet (22) and outlet (24) on a second substrate (20); and h) bonding said second substrate (20) to said first substrate (10). Referring now to Figure 3, there is shown a second embodiment of this invention, and an integrated microfluidic system comprising: a first silicon substrate (10); a sensor (30) attached to a first side of said first substrate (10), said sensor having electrical contact pads (32, 34) for electrical connection with an external measurement device, and a sensing membrane (36). The sensing membrane (36) is located adjacent to said first substrate (10). A microfluidic component (40) is located on a side of said first substrate (10) that opposite to the said first side. A second substrate (20) is attached by bonding or other means to said opposite side of said first substrate (10). The second substrate (20) contains hollows that form a fluid inlet (22) and fluid outlet (24). The biological or chemical sample to be sensed enters the said fluid inlet (22), passes through the microfluidic component (40) before coming into contact with the sensing membrane (36) and exits via the said fluid outlet (24). The microfluidic component (40) comprises any or a combination of the following devices: at least one micromixer (42), at least one microchannel (44) and at least one reservoir. The sensor (30) is a field-effect transistor (FET) based sensor and may include any of: ion-sensitive field-effect transistor (ISFET) and chemical field-effect transistor (CHEMFET). In this second embodiment, the microfluidic component (40) is formed within the said second substrate (20).
Figure 4 shows a third embodiment of the present invention. An integrated microfluidic system comprising: a first silicon substrate (10); a sensor (30) attached to a first side of said first substrate (10), said sensor having electrical contact pads (32, 34) for electrical connection with an external measurement device, and a sensing membrane (36). The sensing membrane (36) is located adjacent to said first substrate (10). A microfluidic component (40) is located on a side of said first substrate (10) that opposite to the said first side. A second substrate (20) is attached by bonding or other means to said opposite side of said first substrate (10). The second substrate (20) contains hollows that form a fluid inlet (22) and fluid outlet (24). The biological or chemical sample to be sensed enters the said fluid inlet (22), passes through the microfluidic component (40) before coming into contact with the sensing membrane (36) and exits via the said fluid outlet (24). The microfluidic component (40) comprises any or a combination of the following devices: at least one micromixer (42), at least one microchannel (44) and at least one reservoir. The sensor (30) is a field-effect transistor (FET) based sensor and may include any of: ion-sensitive field-effect transistor (ISFET) and chemical field-effect transistor (CHEMFET). In this second embodiment, the microfluidic component (40) is formed within the said second substrate (20). A third substrate (50) is provided and located on the said first side of the first substrate (10), said third substrate (50) assisting with development of the said contact pads (32, 34) and sensor (30) in order to create a planar device. The said third substrate (50) is a silicon on insulator (SOI) type of substrate. The substrates in all three embodiments can be made from any of the following materials: glass, polymer, silicon substrate, or a combination thereof.
While several particularly preferred embodiments of the present invention have been described and illustrated, it should now be apparent to those skilled in the art that various changes and modifications can be made without departing from the spirit and scope of the invention. Accordingly, the following claims are intended to embrace such changes, modifications, and areas of application that are within the spirit and scope of this invention.

Claims

1 . A biological or chemical sensor comprising:
a first silicon substrate (10);
a sensor (30) attached to a first side of said first substrate (10), said sensor having a sensing membrane (36), said sensing membrane located adjacent to said first substrate (10);
microfluidic components (40) located on an opposite side of said first substrate (10); and
a second substrate (20) attached to said opposite side of said first substrate (10), said second substrate provided with grooves that form a fluid inlet (22) and a fluid outlet (24)
whereby the biological or chemical sample to be sensed enters said fluid inlet (22) and comes into contact with said sensing membrane (36) before exiting via said fluid outlet (24).
2. A biological or chemical sensor according to claim 1 wherein said sensor (30) further comprises electrical contact pads (32, 34) for electrical connection with an external measurement device.
3. A biological or chemical sensor according to claim 1 or 2 wherein said microfluidic components (40) comprises any of the following devices: at least one micromixer (42), at least one microchannel (44) and at least one reservoir, or a combination thereof.
4. A biological or chemical sensor according to any of claims 1 to 3 wherein said sensor (30) further comprises a polysilicon member (38) that acts as the body of said sensor (30) and also as a structural support for said sensing membrane (36).
A biological or chemical sensor according to any of claims 1 to 4 wherein the said biological or chemical sample to be sensed passes through said microfluidic component (40) before coming into contact with said sensing membrane (36).
6. A biological or chemical sensor according to any of claims 1 to 5 wherein the said sensor is a field-effect transistor (FET) based sensor.
A biological or chemical sensor according to claim 6 wherein the said FET based sensor (30) include devices such as: ion-sensitive field- effect transistor (ISFET) and chemical field-effect transistor (CHEMFET).
A biological or chemical sensor according to any of claims 1 to 7 wherein the said microfluidic component (40) is formed within the said first substrate (10).
A biological or chemical sensor according to any of claims 1 to 7 wherein the said microfluidic component (40) is formed within the said second substrate (20).
0. A biological or chemical sensor according to any of claims 1 to 9 further comprising a third substrate (50) located on said first side of said first substrate (10), said third substrate (50) assisting with development of the said contact pads (32, 34) and sensor (30) in order to create a planar device.
1 1 . A biological or chemical sensor according to any of claims 1 to 10 wherein the said first (10) and second (20) substrates are made from any of the following materials: glass, polymer, silicon substrate, or a combination thereof.
12. A biological or chemical sensor according to any of claims 1 to 10 wherein the said third substrate (50) is a silicon on insulator (SOI) type of substrate.
13. A method for fabricating a biological or chemical sensor comprising the steps of:
a) depositing and patterning of silicon nitride (101 ) and silicon dioxide (102) on a first substrate (10);
b) depositing and patterning of doped silicon (103) on said first substrate (10) to form a sensor (30);
c) implanting a source, drain and channel (104) on said sensor (30); d) depositing silicon dioxide (105) on said sensor (30) to form a protective layer;
e) forming of contact pads (32, 34) on said sensor (30);
f) etching of said first substrate (10) to form a microfluidic component (40);
g) defining fluid inlet (22) and outlet (24) on a second substrate (20); and
h) bonding said second substrate (20) to said first substrate (10).
PCT/MY2011/000152 2010-12-29 2011-06-24 Integrated microfluidics sensor WO2012091540A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
MYPI2010006288 2010-12-29
MYPI2010006288 2010-12-29

Publications (1)

Publication Number Publication Date
WO2012091540A1 true WO2012091540A1 (en) 2012-07-05

Family

ID=46383350

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/MY2011/000152 WO2012091540A1 (en) 2010-12-29 2011-06-24 Integrated microfluidics sensor

Country Status (1)

Country Link
WO (1) WO2012091540A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9733210B2 (en) 2014-12-31 2017-08-15 International Business Machines Corporation Nanofluid sensor with real-time spatial sensing
US10830745B2 (en) 2017-12-25 2020-11-10 International Business Machines Corporation Miniaturized precision agriculture

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4115414A1 (en) * 1991-05-10 1992-11-12 Meinhard Prof Dr Knoll METHOD FOR PRODUCING MINIATURIZED CHEMO AND BIOSENSOR ELEMENTS WITH ION SELECTIVE MEMBRANE AND CARRIERS FOR THESE ELEMENTS
US6287438B1 (en) * 1996-01-28 2001-09-11 Meinhard Knoll Sampling system for analytes which are fluid or in fluids and process for its production

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4115414A1 (en) * 1991-05-10 1992-11-12 Meinhard Prof Dr Knoll METHOD FOR PRODUCING MINIATURIZED CHEMO AND BIOSENSOR ELEMENTS WITH ION SELECTIVE MEMBRANE AND CARRIERS FOR THESE ELEMENTS
US6287438B1 (en) * 1996-01-28 2001-09-11 Meinhard Knoll Sampling system for analytes which are fluid or in fluids and process for its production

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9733210B2 (en) 2014-12-31 2017-08-15 International Business Machines Corporation Nanofluid sensor with real-time spatial sensing
US10605768B2 (en) 2014-12-31 2020-03-31 International Business Machines Corporation Nanofluid sensor with real-time spatial sensing
US11378545B2 (en) 2014-12-31 2022-07-05 International Business Machines Corporation Nanofluid sensor with real-time spatial sensing
US10830745B2 (en) 2017-12-25 2020-11-10 International Business Machines Corporation Miniaturized precision agriculture

Similar Documents

Publication Publication Date Title
US10823696B2 (en) Method of fabricating a biological field-effect transistor (BioFET) with increased sensing area
KR101491257B1 (en) A method of manufacturing a biological field-effect transistor(biofet) device and the device
Choi et al. Integration of field effect transistor-based biosensors with a digital microfluidic device for a lab-on-a-chip application
EP1850124B1 (en) Field effect transistor for detecting ionic material and method of detecting ionic material using the same
US20180202958A1 (en) Gas sensor with a gas permeable region
US8158063B2 (en) Biosensor package structure with micro-fluidic channel
US20050212016A1 (en) On-chip integrated detector for analyzing fluids
US10724981B2 (en) Microfluidic chip and manufacturing method thereof and integrated microfluidic chip system
US11360045B2 (en) Integrated biological sensing platform
US20130040374A1 (en) Chemical sensor
CN109870205B (en) Microfluidic flow meter and manufacturing method thereof
US20210270770A1 (en) Field-effect transistor device or sensor for sensing ions, molecules or biomarkers in a fluid
CN113270391A (en) Biosensor system package and method of manufacturing the same
WO2012091540A1 (en) Integrated microfluidics sensor
EP4017635B1 (en) Devices incorporating a multilane flow cell
US7740805B2 (en) Integrated CMOS-compatible biochip
RU2713099C1 (en) Apparatus for detecting and recognizing analytes in a multicomponent medium and a method for production thereof
KR101838966B1 (en) Multi-sensor of nano-floating structure and manufacturing method thereof
KR101220285B1 (en) Processing method of bio sensor using nano-wire devices
US9810662B1 (en) Structure for integrating microfluidic devices and electrical biosensors
US12031949B2 (en) Preventing epoxy bleed-out for biosensor devices
KR101247112B1 (en) The biosensor using gate induced drain leakage of field effect transistor and its manufacturing method
US20230184713A1 (en) Integrated circuit FLUID sensor
WO2024129639A1 (en) Sensor device with functionalized fluid cavity
Sarkar et al. Integrated microfluidics of electrochemical nanogap sensors

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 11853010

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 11853010

Country of ref document: EP

Kind code of ref document: A1