WO2012088172A3 - Front opening large substrate container - Google Patents

Front opening large substrate container Download PDF

Info

Publication number
WO2012088172A3
WO2012088172A3 PCT/US2011/066282 US2011066282W WO2012088172A3 WO 2012088172 A3 WO2012088172 A3 WO 2012088172A3 US 2011066282 W US2011066282 W US 2011066282W WO 2012088172 A3 WO2012088172 A3 WO 2012088172A3
Authority
WO
WIPO (PCT)
Prior art keywords
closed
side wall
container
door
shelves
Prior art date
Application number
PCT/US2011/066282
Other languages
French (fr)
Other versions
WO2012088172A2 (en
Inventor
Martin L. Forbes
Matthew A. Fuller
John Burns
Original Assignee
Entegris, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris, Inc. filed Critical Entegris, Inc.
Publication of WO2012088172A2 publication Critical patent/WO2012088172A2/en
Publication of WO2012088172A3 publication Critical patent/WO2012088172A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67386—Closed carriers characterised by the construction of the closed carrier

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A flat panel substrate container provides a microenvironment for safely storing and allowing horizontal removal through a front door. In an embodiment of the invention, a robust shelf system has a plurality of stacked shelves that have a cantilevered state with the door open and a non-cantilevered state with the door closed. The container may be generally rectilinear in shape and conforming to the shape of the substrate panels. The container has an open front with a closed top wall, closed bottom wall, closed left side wall, closed right side wall, and closed back side wall. A plurality of shelves are secured to the back side wall and extend forwardly in a cantilevered fashion. In an embodiment of the invention, the shelves may be generally elongate slender shelf members formed of aluminum extrusions or assemblies that are arranged in two columns with a pair of such members provided for each substrate and defining a slot. Also inwardly extending edge supports are provided at the left side wall and right side wall for edge support of the substrates. In an embodiment of the invention, the elongate shelf members each have one of a pair of male and female portion that join as the door is closed to effectively "uncantilever" the elongate shelf members as the door closes the open front. All of the shelf members and the substrates thereon may be fixed into position at the end opposite the cantilevered connection to the container portion. The container may have a feature for overhead transport, such as lifting brackets, static dissipation features, and latching features.
PCT/US2011/066282 2010-12-20 2011-12-20 Front opening large substrate container WO2012088172A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201061425223P 2010-12-20 2010-12-20
US61/425,223 2010-12-20
US201161452144P 2011-03-13 2011-03-13
US61/452,144 2011-03-13

Publications (2)

Publication Number Publication Date
WO2012088172A2 WO2012088172A2 (en) 2012-06-28
WO2012088172A3 true WO2012088172A3 (en) 2012-10-26

Family

ID=46314857

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2011/066282 WO2012088172A2 (en) 2010-12-20 2011-12-20 Front opening large substrate container

Country Status (1)

Country Link
WO (1) WO2012088172A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016145338A1 (en) * 2015-03-11 2016-09-15 Entegris, Inc. Wafer carrier with replaceable getters
CN107851595A (en) * 2015-06-15 2018-03-27 恩特格里斯公司 The chip carrier of door with tool single main body construction
WO2017040707A1 (en) * 2015-08-31 2017-03-09 Entegris, Inc. Front opening substrate container with compression latches
US10793338B2 (en) * 2017-03-31 2020-10-06 Fisher Clinical Services Inc. Apparatus and methods for transporting and conditioning panels containing phase change materials
US11540432B2 (en) * 2019-09-26 2022-12-27 Applied Materials, Inc. Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6464081B2 (en) * 1999-01-06 2002-10-15 Entegris, Inc. Door guide for a wafer container
US20050109669A1 (en) * 2003-11-07 2005-05-26 John Burns Substrate container
US20080023442A1 (en) * 2006-07-20 2008-01-31 Shoko Ito Method for manufacturing electronic device
US20090184112A1 (en) * 2008-01-17 2009-07-23 Ole Henrik Nielsen Extended width shipping container and method of shipping
US7694817B2 (en) * 2006-09-13 2010-04-13 Daifuku Co., Ltd. Container for storing substrate having ventilated lid and fan
US20100224524A1 (en) * 2006-04-07 2010-09-09 Ichiro Yuasa Substrate cassette

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6464081B2 (en) * 1999-01-06 2002-10-15 Entegris, Inc. Door guide for a wafer container
US20050109669A1 (en) * 2003-11-07 2005-05-26 John Burns Substrate container
US20100224524A1 (en) * 2006-04-07 2010-09-09 Ichiro Yuasa Substrate cassette
US20080023442A1 (en) * 2006-07-20 2008-01-31 Shoko Ito Method for manufacturing electronic device
US7694817B2 (en) * 2006-09-13 2010-04-13 Daifuku Co., Ltd. Container for storing substrate having ventilated lid and fan
US20090184112A1 (en) * 2008-01-17 2009-07-23 Ole Henrik Nielsen Extended width shipping container and method of shipping

Also Published As

Publication number Publication date
WO2012088172A2 (en) 2012-06-28

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