WO2012086997A3 - Plasma particle photographing apparatus - Google Patents

Plasma particle photographing apparatus Download PDF

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Publication number
WO2012086997A3
WO2012086997A3 PCT/KR2011/009841 KR2011009841W WO2012086997A3 WO 2012086997 A3 WO2012086997 A3 WO 2012086997A3 KR 2011009841 W KR2011009841 W KR 2011009841W WO 2012086997 A3 WO2012086997 A3 WO 2012086997A3
Authority
WO
WIPO (PCT)
Prior art keywords
plasma
photographing apparatus
ccd camera
lens
particle photographing
Prior art date
Application number
PCT/KR2011/009841
Other languages
French (fr)
Korean (ko)
Other versions
WO2012086997A2 (en
WO2012086997A9 (en
Inventor
김병환
Original Assignee
세종대학교 산학협력단
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 세종대학교 산학협력단 filed Critical 세종대학교 산학협력단
Publication of WO2012086997A2 publication Critical patent/WO2012086997A2/en
Publication of WO2012086997A3 publication Critical patent/WO2012086997A3/en
Publication of WO2012086997A9 publication Critical patent/WO2012086997A9/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

The present invention relates to a plasma particle photographing apparatus comprising: a CCD camera arranged in a plasma chamber to acquire a three-dimensional space distribution of plasma particles in the plasma chamber; and a composite lens which is coupled to a front portion of the CCD camera and which has a diopter lens and at least one convex lens to increase the magnification of the CCD camera. According to the above-described plasma particle photographing apparatus, the composite lens has the diopter lens and at least one convex lens is employed to advantageously increase the magnification of the CCD camera and improve the image resolution. In addition, the plasma particle photographing apparatus of the present invention may collect three-dimensional information on the dust particles generated in the plasma, diagnose whether or not the plasma state is normal using the collected information, and notify the result of the diagnosis. Accordingly, quality of processes and productivity of equipment may be improved, thereby increasing yield rate of devices.
PCT/KR2011/009841 2010-12-22 2011-12-20 Plasma particle photographing apparatus WO2012086997A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020100132398A KR101151588B1 (en) 2010-12-22 2010-12-22 Digital hologram sensor system for photographing plasma particles
KR10-2010-0132398 2010-12-22

Publications (3)

Publication Number Publication Date
WO2012086997A2 WO2012086997A2 (en) 2012-06-28
WO2012086997A3 true WO2012086997A3 (en) 2012-09-07
WO2012086997A9 WO2012086997A9 (en) 2012-10-11

Family

ID=46272749

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/009841 WO2012086997A2 (en) 2010-12-22 2011-12-20 Plasma particle photographing apparatus

Country Status (2)

Country Link
KR (1) KR101151588B1 (en)
WO (1) WO2012086997A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101305804B1 (en) 2012-05-25 2013-09-06 세종대학교산학협력단 Method for measuring physical characteristics of deposition film and apparatus for thereof
KR101398578B1 (en) * 2012-08-22 2014-05-23 세종대학교산학협력단 Method for monitoring ion distribution in plasma sheath and apparatus for thereof
KR101398579B1 (en) 2012-09-10 2014-05-23 세종대학교산학협력단 Apparatus for monitoring plasma particles and method thereof
KR101296958B1 (en) * 2012-09-10 2013-08-14 세종대학교산학협력단 Apparatus for photographing plasma particles and method for detecting etch endpoint using the same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010078065A (en) * 2000-01-28 2001-08-20 가네꼬 히사시 Dust particle removing method and apparatus, impurity detecting method and system
KR20060032137A (en) * 2003-05-09 2006-04-14 가부시키가이샤 에바라 세이사꾸쇼 Inspection device by charged particle beam and device manufacturing method using the inspection device
KR20080083485A (en) * 2007-03-12 2008-09-18 한국표준과학연구원 Particle Measuring System and Particle Measuring Method Using The Same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3833810B2 (en) * 1998-03-04 2006-10-18 株式会社日立製作所 Semiconductor manufacturing method, plasma processing method and apparatus
JP5404984B2 (en) * 2003-04-24 2014-02-05 東京エレクトロン株式会社 Plasma monitoring method, plasma monitoring apparatus, and plasma processing apparatus
KR101610705B1 (en) * 2008-12-10 2016-04-11 삼성전자주식회사 Terminal having camera and method for processing image thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010078065A (en) * 2000-01-28 2001-08-20 가네꼬 히사시 Dust particle removing method and apparatus, impurity detecting method and system
KR20060032137A (en) * 2003-05-09 2006-04-14 가부시키가이샤 에바라 세이사꾸쇼 Inspection device by charged particle beam and device manufacturing method using the inspection device
KR20080083485A (en) * 2007-03-12 2008-09-18 한국표준과학연구원 Particle Measuring System and Particle Measuring Method Using The Same

Also Published As

Publication number Publication date
WO2012086997A2 (en) 2012-06-28
WO2012086997A9 (en) 2012-10-11
KR101151588B1 (en) 2012-05-31

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