WO2012033568A1 - Method for treating metal surfaces - Google Patents
Method for treating metal surfaces Download PDFInfo
- Publication number
- WO2012033568A1 WO2012033568A1 PCT/US2011/044613 US2011044613W WO2012033568A1 WO 2012033568 A1 WO2012033568 A1 WO 2012033568A1 US 2011044613 W US2011044613 W US 2011044613W WO 2012033568 A1 WO2012033568 A1 WO 2012033568A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- nickel
- process according
- silver
- plating solution
- immersion
- Prior art date
Links
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 63
- 239000002184 metal Substances 0.000 title claims abstract description 63
- 238000000034 method Methods 0.000 title claims abstract description 59
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 125
- 238000007747 plating Methods 0.000 claims abstract description 73
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 63
- 229910052709 silver Inorganic materials 0.000 claims abstract description 62
- 239000004332 silver Substances 0.000 claims abstract description 62
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 55
- 238000007654 immersion Methods 0.000 claims abstract description 33
- 230000008569 process Effects 0.000 claims description 43
- 229910052802 copper Inorganic materials 0.000 claims description 36
- 239000010949 copper Substances 0.000 claims description 36
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 34
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 15
- -1 silver ions Chemical class 0.000 claims description 15
- 229910052717 sulfur Inorganic materials 0.000 claims description 14
- 239000011593 sulfur Substances 0.000 claims description 14
- 239000002253 acid Substances 0.000 claims description 12
- 239000000654 additive Substances 0.000 claims description 11
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 claims description 9
- 239000003638 chemical reducing agent Substances 0.000 claims description 8
- 239000000203 mixture Substances 0.000 claims description 8
- VEQPNABPJHWNSG-UHFFFAOYSA-N Nickel(2+) Chemical compound [Ni+2] VEQPNABPJHWNSG-UHFFFAOYSA-N 0.000 claims description 7
- 229910001453 nickel ion Inorganic materials 0.000 claims description 7
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 6
- 150000002815 nickel Chemical class 0.000 claims description 6
- 229910052698 phosphorus Inorganic materials 0.000 claims description 6
- 239000011574 phosphorus Substances 0.000 claims description 6
- KERTUBUCQCSNJU-UHFFFAOYSA-L nickel(2+);disulfamate Chemical compound [Ni+2].NS([O-])(=O)=O.NS([O-])(=O)=O KERTUBUCQCSNJU-UHFFFAOYSA-L 0.000 claims description 5
- 239000007800 oxidant agent Substances 0.000 claims description 5
- 230000001590 oxidative effect Effects 0.000 claims description 5
- 239000003381 stabilizer Substances 0.000 claims description 5
- 150000001412 amines Chemical class 0.000 claims description 4
- 239000008139 complexing agent Substances 0.000 claims description 4
- 150000003839 salts Chemical group 0.000 claims description 4
- 150000007513 acids Chemical class 0.000 claims description 3
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 claims description 3
- 150000002460 imidazoles Chemical class 0.000 claims description 3
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 claims description 3
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 claims description 3
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 claims description 3
- XXSPKSHUSWQAIZ-UHFFFAOYSA-L 36026-88-7 Chemical compound [Ni+2].[O-]P=O.[O-]P=O XXSPKSHUSWQAIZ-UHFFFAOYSA-L 0.000 claims description 2
- 229910021586 Nickel(II) chloride Inorganic materials 0.000 claims description 2
- MQRWBMAEBQOWAF-UHFFFAOYSA-N acetic acid;nickel Chemical compound [Ni].CC(O)=O.CC(O)=O MQRWBMAEBQOWAF-UHFFFAOYSA-N 0.000 claims description 2
- 150000001408 amides Chemical class 0.000 claims description 2
- 235000014113 dietary fatty acids Nutrition 0.000 claims description 2
- 239000000194 fatty acid Substances 0.000 claims description 2
- 229930195729 fatty acid Natural products 0.000 claims description 2
- 150000004665 fatty acids Chemical class 0.000 claims description 2
- 229940078494 nickel acetate Drugs 0.000 claims description 2
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 claims description 2
- UQPSGBZICXWIAG-UHFFFAOYSA-L nickel(2+);dibromide;trihydrate Chemical compound O.O.O.Br[Ni]Br UQPSGBZICXWIAG-UHFFFAOYSA-L 0.000 claims description 2
- 125000003785 benzimidazolyl group Chemical class N1=C(NC2=C1C=CC=C2)* 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 230000000996 additive effect Effects 0.000 claims 1
- 229940058303 antinematodal benzimidazole derivative Drugs 0.000 claims 1
- 238000005260 corrosion Methods 0.000 abstract description 22
- 230000007797 corrosion Effects 0.000 abstract description 22
- 238000004100 electronic packaging Methods 0.000 abstract description 6
- 230000001965 increasing effect Effects 0.000 abstract description 5
- 229910000679 solder Inorganic materials 0.000 description 22
- 239000010410 layer Substances 0.000 description 18
- 238000005476 soldering Methods 0.000 description 15
- 239000000758 substrate Substances 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 9
- 238000000576 coating method Methods 0.000 description 7
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 7
- 229910052737 gold Inorganic materials 0.000 description 7
- 239000010931 gold Substances 0.000 description 7
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 6
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 6
- 239000010970 precious metal Substances 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 239000011135 tin Substances 0.000 description 5
- 229910052718 tin Inorganic materials 0.000 description 5
- 229910000881 Cu alloy Inorganic materials 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 4
- 239000012190 activator Substances 0.000 description 4
- 238000007772 electroless plating Methods 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 229940098779 methanesulfonic acid Drugs 0.000 description 3
- 230000005012 migration Effects 0.000 description 3
- 238000013508 migration Methods 0.000 description 3
- 229910052763 palladium Inorganic materials 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 238000006722 reduction reaction Methods 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
- LWFUFLREGJMOIZ-UHFFFAOYSA-N 3,5-dinitrosalicylic acid Chemical compound OC(=O)C1=CC([N+]([O-])=O)=CC([N+]([O-])=O)=C1O LWFUFLREGJMOIZ-UHFFFAOYSA-N 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 2
- MPTQRFCYZCXJFQ-UHFFFAOYSA-L copper(II) chloride dihydrate Chemical compound O.O.[Cl-].[Cl-].[Cu+2] MPTQRFCYZCXJFQ-UHFFFAOYSA-L 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 239000005002 finish coating Substances 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000011133 lead Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 230000005693 optoelectronics Effects 0.000 description 2
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical compound [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000003755 preservative agent Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 description 2
- UMGDCJDMYOKAJW-UHFFFAOYSA-N thiourea Chemical compound NC(N)=S UMGDCJDMYOKAJW-UHFFFAOYSA-N 0.000 description 2
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 description 1
- BTJIUGUIPKRLHP-UHFFFAOYSA-N 4-nitrophenol Chemical compound OC1=CC=C([N+]([O-])=O)C=C1 BTJIUGUIPKRLHP-UHFFFAOYSA-N 0.000 description 1
- KWSLGOVYXMQPPX-UHFFFAOYSA-N 5-[3-(trifluoromethyl)phenyl]-2h-tetrazole Chemical compound FC(F)(F)C1=CC=CC(C2=NNN=N2)=C1 KWSLGOVYXMQPPX-UHFFFAOYSA-N 0.000 description 1
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910052770 Uranium Inorganic materials 0.000 description 1
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Natural products NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000001464 adherent effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- QDWJUBJKEHXSMT-UHFFFAOYSA-N boranylidynenickel Chemical compound [Ni]#B QDWJUBJKEHXSMT-UHFFFAOYSA-N 0.000 description 1
- RJTANRZEWTUVMA-UHFFFAOYSA-N boron;n-methylmethanamine Chemical compound [B].CNC RJTANRZEWTUVMA-UHFFFAOYSA-N 0.000 description 1
- 239000003060 catalysis inhibitor Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 235000015165 citric acid Nutrition 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229960003280 cupric chloride Drugs 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- YPTUAQWMBNZZRN-UHFFFAOYSA-N dimethylaminoboron Chemical compound [B]N(C)C YPTUAQWMBNZZRN-UHFFFAOYSA-N 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 150000002193 fatty amides Chemical class 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000013505 freshwater Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 229910000037 hydrogen sulfide Inorganic materials 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 229940046892 lead acetate Drugs 0.000 description 1
- LQBJWKCYZGMFEV-UHFFFAOYSA-N lead tin Chemical compound [Sn].[Pb] LQBJWKCYZGMFEV-UHFFFAOYSA-N 0.000 description 1
- 239000001630 malic acid Substances 0.000 description 1
- 235000011090 malic acid Nutrition 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- JRKICGRDRMAZLK-UHFFFAOYSA-L peroxydisulfate Chemical compound [O-]S(=O)(=O)OOS([O-])(=O)=O JRKICGRDRMAZLK-UHFFFAOYSA-L 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 150000003071 polychlorinated biphenyls Chemical class 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000006479 redox reaction Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 150000003378 silver Chemical class 0.000 description 1
- 229940100890 silver compound Drugs 0.000 description 1
- 150000003379 silver compounds Chemical class 0.000 description 1
- 229910001961 silver nitrate Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000012279 sodium borohydride Substances 0.000 description 1
- 229910000033 sodium borohydride Inorganic materials 0.000 description 1
- 235000011121 sodium hydroxide Nutrition 0.000 description 1
- 229910001379 sodium hypophosphite Inorganic materials 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 150000003464 sulfur compounds Chemical class 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/20—Preliminary treatment of work or areas to be soldered, e.g. in respect of a galvanic coating
- B23K1/203—Fluxing, i.e. applying flux onto surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
- B23K1/0012—Brazing heat exchangers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1646—Characteristics of the product obtained
- C23C18/165—Multilayered product
- C23C18/1651—Two or more layers only obtained by electroless plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1646—Characteristics of the product obtained
- C23C18/165—Multilayered product
- C23C18/1653—Two or more layers with at least one layer obtained by electroless plating and one layer obtained by electroplating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
- C23C18/34—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
- C23C18/34—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents
- C23C18/36—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents using hypophosphites
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/54—Contact plating, i.e. electroless electrochemical plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/42—Printed circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0025—Processes relating to coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/58—Optical field-shaping elements
- H01L33/60—Reflective elements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12861—Group VIII or IB metal-base component
- Y10T428/12896—Ag-base component
Definitions
- the present invention is directed to a method of treating metal surfaces to reduce corrosion thereon and/or increase reflectance of the treated metal surfaces.
- PCB manufacturing processes typically comprise many steps, in part because of the increasing demand for enhanced, performance.
- Surface circuits on PCBs usually include copper and copper alloy materials that are coated to provide good mechanical and electrical connection with other devices in the assembly.
- a first stage comprises preparing the circuit board and a second stage comprises mounting various components on the circuit board.
- legged components such as resistors, transistors, etc.
- surface mount devices which are attached to the surface of the board by soldering with a flat contact area or by adhesion with a suitable adhesive.
- Plated through-hole printed circuit boards may generally be fabricated by a process comprising the following sequence of steps:
- sequences of steps may also be used and are generally well known to those skilled in the art.
- fresh water rinses may be interposed between each step.
- sequences of steps that may be used to prepare the printed circuit boards in the first stage are described, for example, in U.S. Pat. No. 6,319,543 to Soutar et a!., U.S. Pat, No. 6,656,370 to Toscano et al, and U.S. Pat, No. 6,815,126 to Fey et al., the subject matter of each of which is herein incorporated by reference in its entirety.
- Solder masking is an operation in which the entire area of a printed circuit board, except solder pads, surface mount pads, and plated through-holes, is selectively covered with an organic polymer coating.
- the polymer coating acts like a dam around the pads to prevent the undesirable flow of solder during assembly and also improves the electrical insulation resistance between conductors and provides protection from the environment.
- the solder mask compound is typically an epoxy resin that is compatible with the substrate.
- the solder mask may be screen printed onto the printed circuit board in the desired pattern or may also be a photoimageable solder mask that is coated onto the surface.
- the contact areas include wire-bonding areas, chip attach areas, soldering areas and other contact areas.
- Contact finishes must provide good solderability, good wire bonding performance and high corrosion resistance. Some contact finishes must also provide high conductivity, high wear resistance, and high corrosion resistance.
- a typical prior art contact finish coating may include an electrolytic nickel coating with an electrolytic gold layer on top, although other coatings are also known to those skilled in the art. Soldering is generally used for making mechanical, electromechanical, or electronic connections to a variety of articles. The distinction between expected functions of the joints is important because each application has its own specific requirements for surface preparation. Of the three soldering applications, making electronic connections is the most demanding.
- connections of electronic components to a substrate are made by soldering the leads of the components to the through-holes, surrounding pads, lands and other points of connection (collectively, "Areas of Connection") on the substrate.
- the electronic packing devices may then receive other electronic units including, for example, light emitting diodes (LEDs), which can be soldered to, for example, electrodes on a printed circuit board.
- LED refers to a diode that emits visible, ultraviolet, or infrared light.
- Another means of arranging good solderability of these surfaces is to plate them with a final finish coating of gold, palladium or rhodium.
- U.S. Pat. No. 5,235,139 describes a method for achieving this metal final finish by plating the copper areas to be soldered with electroless nickel-boron, followed by a precious metal coating such as gold.
- U.S. Pat. No. 4,940,181 describes the plating of electroless copper, followed by electrolytic copper, followed by nickel followed by gold as a solderable surface
- U.S. Pat. No. 6,776,828 describes the plating of electroless copper followed by immersion gold.
- Still another means of arranging good solderability of these surfaces is to electrolessly plate them with a final coating of silver.
- U.S. Pat. No. 5,322,553 and U.S. Pat. No. 5,318,621 the subject matter of each of which is herein incorporated by reference in its entirety, describe methods of treating copper clad printed circuit boards by coatmg them with electroless nickel then subsequently plating them with electroless silver.
- the electroless silver bath plates on a surface of a support metal to give a thick deposit.
- immersion silver deposits are excellent solderability preservatives, which are particularly useful in the fabrication of printed circuit boards.
- Immersion plating is a process which results from a replacement reaction whereby the surface being plated dissolves into solution and at the same time the metal being plated deposits from the plating solution onto the surface.
- the immersion plating typically initiates without prior activation of the surfaces.
- the metal to be plated is generally more noble than the surface metal.
- immersion plating is usually significantly easier to control and significantly more cost effective than electroless plating, which requires sophisticated auto-catalytic plating solutions and processes for activation of the surfaces prior to plating.
- SMIA solder mask interface attack
- galvanic attack may erode the copper trace at the interface between the solder mask and the copper trace.
- SMIA is also referred to as solder mask crevice corrosion and galvanic attack at the solder mask interface.
- the problem concerns a galvanic attack at the solder mask-copper interface, and this interfacial galvanic attack arises as a result of the solder mask-copper interfacial structure and the immersion plating mechanism.
- Galvanic corrosion is caused by the junction of two dissimilar metals. Differences in the metal can be seen as composition of the metal itself varying, or differences in grain boundaries, or localized shear or torque from the manufacturing process. Almost any lack of homogeneity of the metal surface or its environment may initiate a galvanic corrosion attack, causing a difference in potential. Contact between dissimilar metals also causes galvanic current to flow, due to the difference in potential of the two or more different metals. Galvanic corrosion can occur when one metal is coated with a more noble metal, for example silver over copper, and any exposed copper can accelerate this process as well. Higher failure rates and accelerated corrosion are seen in environments that have high levels of reduced sulfur gases such as elemental sulfur and hydrogen sulfide.
- a silver layer is also desirable in the manufacture of LEDs, As described, for example, in U.S. Pat. Pub. No. 2004/0256632 to Stein et al., the subject matter of which is herein incorporated by reference in its entirety, it is desirable to form a reflective contact between an optoelectronic semiconductor chip, for example an LED, and a carrier substrate so that penetration of radiation generated or detected by the optoelectronic semiconductor chip into the contact is avoided and absorption losses are reduced. Stein describes arranging a very thin layer containing platinum, palladium, or nickel between a semiconductor layer containing a nitride compound and a reflective layer containing silver or gold. U.S. Pat. Pub. No.
- 2007/0145396 to Wantanabe describes improving the light extraction efficiency of an LED and thereby increase the life and power of the LED while decreasing power consumption, by arranging a light reflective layer comprising a silver alloy between a semiconductor layer, formed by laminating a first conductive layer, an active layer and a second conductive layer on a transparent substrate, and a protective layer.
- the present invention relates to a method of treating a metal surface, the method comprising the steps of:
- the present invention relates to a method of treating a metal surface, the method comprising the steps of:
- the nickel plated on the metal surface comprises either from 2% to 12% by weight phosphorous or from 0.0005% to 0.1% by weight sulfur.
- the metal surface may be any metal which is less electropositive than silver, including, for example, zinc, iron, tin, nickel, lead or copper and alloys of the foregoing.
- the metal surface is a copper or copper alloy surface.
- the metal surface is cleaned prior to contacting the metal surface with the plating composition compositions.
- cleaning may be accomplished using an acidic cleaning composition or other such cleaning composition that is well known in the art.
- the nickel plating is preferably accomplished electrolessly but it can also be plated electrolyticaUy.
- Electroless nickel plating is an autocatalytic or chemical reduction of nickel ions to nickel which is then deposited on a substrate and can be used upon any metal surface upon which nickel can be plated.
- the precious metal activator typically comprises colloidal or ionic palladium, gold or silver and is performed before the electroless step.
- preparing the surface to accept electroless nickel plating thereon may comprise (i) a precious metal activator before an electroless nickel phosphorus bath, or (ii) use of a dimethylamino borane pre-dip to create a very thin nickel layer before an electroless nickel phosphorus bath. In either instance, an adherent and uniform deposit is formed on the metal surface.
- the metal surface may also be microetched to increase the magnitude and reliability of the subsequent bond.
- the microetch may comprise (i) a peroxide-sulfuric microetch, (ii) a cupric chloride microetch, or (iii) a persulfate microetch.
- the microetch it is preferable for the microetch to uniformly roughen the metal surface.
- the time and temperature of the contact with the microetchant may vary depending, for example, upon the type of microetchant being used and the characteristics of the metal surface with the goal being the attainment of a uniformly rough metal surface.
- the metal surface may be activated with a precious metal activator, as discussed above, to coat the metal surface with catalytic precious metal sites which are capable of initiating the subsequent electroless plating.
- the metal surface is then contacted with an electroless nickel plating bath, preferably for a time and at a temperature sufficient to plate about 2 to about 50 microinches of nickel, more preferably from about 100 to about 250 microinches of nickel.
- a suitable electroless nickel plating bath for use in the present invention comprises;
- the source of nickel ions can be any suitable source of nickel ions, and is preferably a nickel salt selected from the group consisting of nickel bromide, nickel fluoroborate, nickel sulfonate, nickel sulfamate, nickel alkyl sulfonate, nickel sulfate, nickel chloride, nickel acetate, nickel hypophosphite and combinations of one or more of the foregoing.
- the nickel salt is nickel sulfamate.
- the nickel salt is nickel sulfate.
- Reducing agents typically include borohydride and hypophosphite ions.
- electroless nickel plating is carried out utilizing hypophosphite ions as the reducing agent, with sodium hypophosphite being the most preferable.
- Other reducing agents include sodium borohydride, dimethylamine borane, N-diethylamine borane, hydrazine and hydrogen, by way of example and not limitation.
- the stabilizers in the solution may be metallic (inorganic) or organic.
- Metallic stabilizers commonly used in electroless nickel plating solutions include Pb, Sn, or Mo compounds, such as lead acetate.
- Organic stabilizers commonly used include sulfur compounds ("S compounds"), such as thiourea, Complexing agents include citric acid, lactic acid, or malic acid, Sodium hydroxide may al so be included in the electroless nickel bath to maintain the pH of the solution.
- the electroless nickel plating solution may include one or more additives selected from sulfur and/or phosphorus. Sulfur is preferably usable in the plating solution as a divalent sulfur and phosphorus is typically usable in the plating solution as a hypophosphiie.
- divalent sulfur is present in the electroless nickel plating solution, it is preferable that it be present at a concentration of about 0.1 ppm to about 3ppm, most preferably from about 0.2 ppm to about 1 ppm, not mcluding the sulfur present from the source of acidity such as sulfuric acid, sulfuric acid or methane sulfonic acid.
- the inventors have found that if nickel sulfamate is used as the nickel salt in accordance with the present invention, at least a minimal amount of sulfur and/or phosphorus should be included in the electroless nickel plating bath.
- nickel, plated on the metal surface comprise about 2 percent by weight to about 12 percent by weight phosphorus and/or 0.0005% by weight sulfur to 0.1% by weight sulfur. It has unexpectedly been found that the inclusion of the foregoing amounts of phosphorous and/or sulfur are beneficial to achieving an improved immersion silver deposit.
- Nickel ions are reduced to nickel in the electroless nickel plating bath by the action of chemical reducing agents which are oxidized in the process.
- the catalyst may be the substrate or a metallic surface on the substrate, which allows the reduction-oxidation reaction to occur with the ultimate deposition of nickel on the substrate.
- the electroless plating deposition rate is further controlled by selecting the proper temperature, pH and metal ion/reducer concentrations.
- Complexing agents may also be used as catalyst inhibitors to reduce the potential for spontaneous decomposition of the electroless bath.
- the total thickness of electroless nickel plated on the metal surface is typically in the range of about 1 to 50 microinches, preferably in the range of about 100 to about 250 raicroinches.
- the electroless nickel plated metal surface is thereafter immersion silver plated to provide a layer of silver thereon.
- immersion silver deposits are excellent so! durability preservatives and are particularly useful in the fabrication of printed circuit boards.
- the solderability achieved by following electroless nickel plating with immersion silver plating in accordance with the present invention results in an unexpectedly large reduction of galvanic corrosion on the surfaces of the circuits, a reduction of copper pores which are susceptible to tarnish and corrosion, and an increase in the process window for bonding applications. This is beneficial because, in printed circuit applications, for example, the surfaces are wire bondable. Additionally, the process of the present invention results in uniform silver coverage and increased reflectance of the silver surface.
- the immersion silver plating bath of the present invention comprises: a) a soluble source of silver ions;
- d) optionally, but preferably, an imidazole or imidazole derivative.
- the silver immersion plating solution generally contains a soluble source of silver ions in an acid aqueous matrix.
- the soluble source of silver ions can be derived from a variety of silver compounds, including for example organic or inorganic silver salts.
- the source of silver ions is silver nitrate.
- the concentration of silver in the plating solution can generally range from about 0.1 to 25 grams per liter, but is preferably in the range of about 0.5 to 2 grams per liter,
- a variety of acids are suitable for use in the silver immersion plating solution, including, for example, fluoboric acid, hydrochloric acid, phosphoric acid, methane sulfonic acid, nitric acid and combinations of one or more of the foregoing. In one embodiment, methane sulfonic acid or nitric acid is used.
- the concentration of acid in the plating solution generally ranges from about 1 to 150 grams per liter but is preferably in the range of about 5 to 50 grams per liter.
- the silver immersion plating solution also comprises an oxidant in order to create a uniform silver covering on the electroless nickel plated substrate.
- Nitro aromatic compounds such as sodium meta-nitrobenzenesulfonate, para-nitrophenol, 3,5-dinitrosalicylic acid, and 3,5- dimtrebenzoic acid are preferred in this regard.
- the dinitro compound is 3,5-dinitrosalicylic acid.
- the concentration of the oxidant in the solution can range from about 0.1 to 25 grams per liter, but is preferably from about 0.5 to 2 grams per liter.
- additives may also be included in the plated deposit, either by incorporation of the additives in the plating bath itself or by subsequent treatment of the plated surface with the additives.
- additives may be selected from the group consisting of fatty amines, fatty acids, fatty amides, quaternary salts, amphoteric salts, resinous amines, resinous amides, resinous acids and mixtures of the foregoing. Examples of the additives are described, for example, in U.S. Patent No. 7,267,259, the subject matter of winch is herein incorporated by reference in its entirety.
- concentration of the foregoing additives in the immersion silver plating bath or in the subsequent surface treatment composition typically range from 0.1 to 15 grams per liter but is preferably from 1 to 5 grams per liter.
- an imidazole or imidazole derivative may also optionally be included in the immersion plating bath of the present invention to make the plate brighter, smoother and more cohesive,
- the immersion silver plating bath is typically maintained at a temperature of about room temperature to about 200" F, more preferably at about 80° F to about 120° F.
- the article to be plated may be immersed in the plating solution for a suitable amount of time to achieve the desired plating thickness of the deposit, which is typically in the range of about. 1 to 5 minutes.
- the immersion silver solution plates a thin layer of silver onto the metal surface.
- the resultant silver coating is from about 1 to 100 micro inches thick, preferably from about 10 to 60 micro inches thick for effective enhancement and preservation of the solderability of the surface.
- the process described herein is also effective in silver plating LEDs and in prepaing LEDs to accept soldering thereon, for example for soldering to electronic packaging devices including printed circuit boards. It is possible for copper to migrate through silver deposits as a function of heat in LED applications, thus decreasing the surface reflectance. Thus, the process described herein produces a surface in which copper migration through the silver deposit is at least substantially eliminated resulting in increased reflectivity, which is particularly beneficial for use in LED applications. In one embodiment, the process described herein provides a silver surface on an LED with a reflectance of at least 80 percent. As described herein, the process of the present invention can be used to electrolessly deposit nickel onto a semiconductor chip.
- the process of the present invention can also be used to deposit electroless nickel and immersion silver upon a semiconductor LED that has been formed by laminating a first conductive layer, an active layer, and a second conductive layer on a transparent substrate in that order as is known in the art.
- the process of the present invention has also been shown to at least substantially eliminate galvanic corrosion from the underlying copper substrate, in addition, the process of the present invention substantially eliminates copper pores in the silver deposit that are susceptible to tarnish corrosion and further at least substantially eliminates migration of copper through the silver deposit. As a result, the process of the present invention also increases the processing window for wire bonding applications because any oxidized copper encountered during wire bonding results in a non ⁇ bondable surface.
- the present invention as described herein utilizes electroless nickel, it is also possible that the nickel barrier can be provided using an electrolytic nickel deposit or that the electroless nickel plating bath may comprise a nickel alloy or, in the alternative, another suitable electroless plating metal may be used in place of electroless nickel in the invention described herein.
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- Metallurgy (AREA)
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Abstract
Description
Claims
Priority Applications (3)
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CN2011800430409A CN103097037A (en) | 2010-09-10 | 2011-07-20 | Method for treating metal surfaces |
JP2013528199A JP5711376B2 (en) | 2010-09-10 | 2011-07-20 | Method for treating metal surfaces |
EP11823908.6A EP2613892A4 (en) | 2010-09-10 | 2011-07-20 | Method for treating metal surfaces |
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US12/879,672 | 2010-09-10 | ||
US12/879,672 US20120061710A1 (en) | 2010-09-10 | 2010-09-10 | Method for Treating Metal Surfaces |
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WO2012033568A1 true WO2012033568A1 (en) | 2012-03-15 |
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PCT/US2011/044613 WO2012033568A1 (en) | 2010-09-10 | 2011-07-20 | Method for treating metal surfaces |
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US (2) | US20120061710A1 (en) |
EP (1) | EP2613892A4 (en) |
JP (1) | JP5711376B2 (en) |
CN (1) | CN103097037A (en) |
TW (1) | TWI433958B (en) |
WO (1) | WO2012033568A1 (en) |
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- 2011-07-20 JP JP2013528199A patent/JP5711376B2/en active Active
- 2011-07-20 EP EP11823908.6A patent/EP2613892A4/en not_active Withdrawn
- 2011-07-20 WO PCT/US2011/044613 patent/WO2012033568A1/en active Application Filing
- 2011-07-20 CN CN2011800430409A patent/CN103097037A/en active Pending
- 2011-08-09 TW TW100128337A patent/TWI433958B/en active
- 2011-09-09 US US13/229,210 patent/US20120061705A1/en not_active Abandoned
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EP2783399A4 (en) * | 2011-11-22 | 2016-11-30 | Macdermid Acumen Inc | Method for treating metal surfaces |
Also Published As
Publication number | Publication date |
---|---|
EP2613892A1 (en) | 2013-07-17 |
TWI433958B (en) | 2014-04-11 |
JP2013537935A (en) | 2013-10-07 |
EP2613892A4 (en) | 2016-08-17 |
US20120061710A1 (en) | 2012-03-15 |
CN103097037A (en) | 2013-05-08 |
TW201211308A (en) | 2012-03-16 |
JP5711376B2 (en) | 2015-04-30 |
US20120061705A1 (en) | 2012-03-15 |
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