WO2012019477A1 - 嵌套双压电管推动的三摩擦力压电步进器与步进扫描器 - Google Patents

嵌套双压电管推动的三摩擦力压电步进器与步进扫描器 Download PDF

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WO2012019477A1
WO2012019477A1 PCT/CN2011/074697 CN2011074697W WO2012019477A1 WO 2012019477 A1 WO2012019477 A1 WO 2012019477A1 CN 2011074697 W CN2011074697 W CN 2011074697W WO 2012019477 A1 WO2012019477 A1 WO 2012019477A1
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piezoelectric
tube
guide
base
stepper
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French (fr)
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陆轻铀
王�琦
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University of Science and Technology of China USTC
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University of Science and Technology of China USTC
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors

Definitions

  • the invention relates to a piezoelectric stepper, in particular to a three-fibre piezoelectric stepper driven by a nested bimorph tube and a stepper scanner made thereof, and belongs to the technical field of piezoelectric positioners.
  • Piezo positioners are capable of positioning objects to nanometer accuracy in the macroscopic (millimeter) range, making them an indispensable tool in nanoscience and technology, including atomic imaging, atomic manipulation and other sub-nano fields.
  • the piezoelectric effect is generally weak, and the piezoelectric deformation produces less thrust, which does not push a slightly larger object.
  • Piezoelectric positioners are also often difficult to operate in low temperature (e.g., liquid helium temperature) because the piezoelectric deformation is further reduced at low temperatures, giving a thrust that is even small enough to overcome the frictional resistance or load gravitational displacement.
  • the size is not significantly increased and the stack is not used.
  • a piezoelectric stepper that can generate more thrust or can work at a lower temperature, and because the piezoelectric tube does not need to be cut, the original integrity and rigidity are maintained, so that it can be stepped more robustly. More precise, its structure is also more robust (not susceptible to external vibration, and usually external vibration can easily destroy atomic accuracy applications, such as scanning probe microscope).
  • the present invention has a high degree of symmetry in structure and can greatly reduce thermal drift caused by temperature changes, which is very important for the application of atomic level positioning accuracy. Summary of the invention
  • a piezoelectric positioner capable of generating greater thrust or operating at a lower temperature without significantly increasing the size and without using a stack is proposed and made with Stepper scanner for scanning function.
  • the three-friction piezoelectric stepper driven by the nested bipolar tube of the present invention comprises two piezoelectric tubes, two protective sheets, a base and a guide, and one of the two piezoelectric tubes is fixedly standing on
  • the inner piezoelectric tube is formed on the pedestal, and the other sleeve is fixedly disposed on the pedestal outside the inner piezoelectric tube to form an outer piezoelectric tube.
  • the piezoelectric stretching directions of the two piezoelectric tubes are the same.
  • both are axial, two protective sheets are respectively disposed at the free ends of the two piezoelectric tubes, and the guides are placed inside the inner piezoelectric tubes or placed outside the outer piezoelectric tubes or placed on the outer wall of the inner piezoelectric tubes And a positive pressure that presses the base and the two protective sheets respectively against the guide, in the gap between the inner wall of the outer piezoelectric tube and the piezoelectric stretching direction, in the three positive pressure pairs of the guides Of the maximum static friction generated, any one of the maximum static friction is less than the sum of the other two maximum static frictions.
  • the guide is resiliently pressed against the base spring protection sheet by the spring of the guide and/or the elastic of the base and/or the additional elastomer.
  • the two protective sheets and the base are both annular, and the guide is tubular or cylindrical, and the two ends thereof are respectively cut along the axial direction thereof to the other end but are not completely separated, and the guide is disposed inside the inner piezoelectric tube.
  • the outer walls of the two ends are respectively elastically pressed against the inner side of the annular base and the inner sides of the two annular protection sheets.
  • the guide is square tubular or round tubular or square cylindrical or cylindrical.
  • the guide is tubular or fence-shaped and sleeved outside the outer piezoelectric tube and is pressed against the base and the two protective sheets.
  • the number of columns of the fence is 2 or 3 or 4.
  • the column generates a positive pressure with the base and the two protective sheets either by a cylindrical surface or by a blade.
  • Stepper scanner made of a three-piezo piezoelectric stepper driven by a nested bimorph tube, comprising a piezoelectric scanning tube and a three-friction piezoelectric stepper driven by the nested bimorph tube, pressure
  • An electric scanning tube is fixedly disposed on a base of the three-vibration piezoelectric stepper driven by the nested bimorph, the axial direction of the piezoelectric scanning tube and the three-pitch driven by the nested bi-piezo
  • the axial direction of the inner and outer piezoelectric tubes of the friction piezoelectric stepper is the same.
  • the working principle of the three-friction piezoelectric stepper driven by the nested double piezoelectric tube of the invention is as follows: the inner piezoelectric tube is fixedly standing on the base, and the outer piezoelectric tube sleeve is fixed on the outer part of the inner piezoelectric tube. Standing on the base, and the two piezoelectric tubes have the same expansion and contraction direction, all of which are axial;
  • the free ends of the two piezoelectric tubes are respectively fixed with a protective sheet, and the guide is placed inside the internal piezoelectric tube or placed outside the external piezoelectric tube or placed in the gap between the outer wall of the inner piezoelectric tube and the inner wall of the outer piezoelectric tube Providing a positive pressure that presses the guide and the two protective sheets perpendicular to the telescopic direction and a positive pressure that presses the guide and the base, and the maximum static friction force generated by the three positive pressures on the guide Among them, the maximum static friction is less than the sum of the other two maximum static friction forces.
  • the initial state can be set such that both piezoelectric tubes are in a contracted state, and then the two piezoelectric tubes are simultaneously elongated, which will drive the base to move relative to the guide in the direction of elongation, because at this time two pressures
  • the static friction between the protective sheet and the guide at the free end of the tube is such that the base moves along the guide toward the extension of the two piezoelectric tubes, and the static friction between the base and the guide is the resistance to the movement. Since the maximum static friction between the base and the guide is less than the sum of the maximum static friction between the two protective sheets and the guide, the base is stepped one step relative to the guide. Then, one of the two piezoelectric tubes contracts (deformation reduction), and the other remains in an extended state.
  • the protective sheet that shrinks the free end of the piezoelectric tube slides on the guide, and the protective sheet of the free end of the other piezoelectric tube and the base do not slide on the guide because the shrinking piezoelectric tube free end protection sheet and the guide.
  • the maximum static friction between the two is less than the sum of the maximum static friction between the other protective sheet and the guide and the maximum static friction between the base and the guide.
  • the pedestal has been stepped one step relative to the director and both piezoelectric tubes have returned to their original contracted state. Repeating the above steps allows the susceptor to step stepwise along the direction of extension of the two piezoelectric tubes with respect to the guide.
  • the base can be stepped along the pressure with respect to the guide step by step.
  • the tube shrinks in the direction of the step.
  • the nested structure of the above two piezoelectric tubes is not significantly larger than the size of a single piezoelectric tube, and is not a stacked structure in which a plurality of piezoelectric materials are bonded by glue, which does not lower the positioning accuracy and the generation of ultra-high vacuum. Destruction, but the thrust is twice as large as that of a piezoelectric tube of approximately the same size by dividing the electrodes to produce two half-tube piezoelectric bodies, thereby achieving the object of the present invention.
  • the two piezoelectric tube nesting structures of the invention are highly symmetrical and have a good offset effect on temperature drift, so the influence of temperature drift on positioning accuracy can be reduced, and is particularly suitable for the field of scanning probe microscopes with positioning accuracy up to atomic level. .
  • the two piezoelectric tubes also do not need to be separated by cutting to cut the electrodes, so they have high rigidity and greatly increase their ability to resist external vibration interference.
  • the function of the guide is to (1) generate a positive pressure perpendicular to the telescopic direction of the piezoelectric tube for the pedestal and the two protective sheets, so that a frictional force capable of cooperating to generate a step can be obtained in the telescopic direction. (2) A guiding effect on the stepping.
  • the positive pressure between the guide and the base may be generated by the guide elastically and/or the base elastic and/or the elastic phase of the elastic body and the base, the guide and the two protective sheets respectively
  • the positive pressure generated between the guides can be produced by the deflector elastic and/or the protective sheet elasticity and/or the additional elastic body and the two protective sheets are respectively elastically pressed.
  • the elasticity is only present in the positive pressure direction, and the shape variable generated by the guide, the base and the two protective sheets under the frictional force in the piezoelectric stretching direction should be smaller than the piezoelectric expansion amount of the inner and outer piezoelectric tubes. .
  • the guide is tubular or cylindrical, and the two ends are respectively cut into the other end along the axial direction thereof but not completely cut, which makes the guide elastic, or A spring is added inside the guide so that the guide can generate an external force, and the outer walls of the two ends of the guide are respectively elastically pressed against the inner side of the annular base and the inner sides of the two annular protection sheets.
  • the guides are tubular or fence-shaped (consisting of columns and poles that hold the columns). The number of columns is 2 or 3 or 4. These columns are evenly distributed around the outer piezoelectric tube. The column generates a positive pressure with the base and the two protective sheets by a cylindrical surface or a blade, respectively.
  • the pedestal In the gap between the outer wall of the electric tube and the inner wall of the outer piezoelectric tube, at this time, the pedestal cannot completely fill the gap, and a hole or a slit is required to allow a part of the guide to pass through the pedestal, and the guide is tubular or In the shape of a fence, the number of columns is 2 or 3 or 4, and the columns are evenly distributed in the gap, and the column generates positive pressure with the base and the two protective sheets by a cylindrical surface or a blade respectively. .
  • the inner and outer piezoelectric tubes form a tube sleeve structure and the front side of the piezoelectric scanning tube or the sub-base or on the same side of the base, for the latter case
  • the piezoelectric scanning tube is sleeved on the outside of the outer piezoelectric tube or is sheathed inside the inner piezoelectric tube.
  • the three-flip piezoelectric stepper driven by the nested bimorph can be used to perform the scanning imaging function by using the piezoelectric scanning tube after stepping in position.
  • Double the thrust not only can drive a larger load, but also work at a lower temperature.
  • FIG. 1 is a schematic view showing the structure of a three-rubber piezoelectric stepper driven by a basic nested bimorph tube of the present invention.
  • FIG. 2 is a three-friction piezoelectric step driven by a built-in elastic guide type nested bimorph tube according to the present invention; Schematic diagram of the structure of the feeder.
  • Figure 3 is a block diagram showing the structure of a three-friction piezoelectric stepper driven by a nested bimorph tube in the gap between the inner and outer piezoelectric tubes of the present invention.
  • Fig. 4 is a view showing the structure of a three-friction piezoelectric stepper driven by a fence guide type nested bimorph tube of the present invention.
  • Fig. 5 is a structural schematic view of a three-friction piezoelectric stepper driven by a blade guide type nested bimorph tube of the present invention.
  • 1 piezoelectric tube (internal piezoelectric tube), 2 other piezoelectric tube (external piezoelectric tube), 3 protective sheet (internal piezoelectric tube protective sheet), 4 another protective sheet (external piezoelectric tube) Protective sheet), 5 bases, 6 guides, 7 piezoelectric telescopic directions, 8 elastomers, 9-column, 10 piezoelectric scanning tubes.
  • Example 1 Basic three-piezo piezoelectric stepper driven by a nested bimorph
  • the basic type of double-piezoelectrically driven three-friction piezoelectric stepper of the present embodiment comprises two piezoelectric tubes 1, 2, two protective sheets 3, 4, a base 5, a guide 6, one of the two piezoelectric tubes 1, 2 is fixedly standing on the base 5 to form the inner piezoelectric tube 1, and the other sleeve is fixedly standing on the base outside the inner piezoelectric tube 1.
  • the outer piezoelectric tube 2 is formed on the base 5, and the piezoelectric stretching directions 7 of the two piezoelectric tubes 1 and 2 are the same, both in the axial direction, and the two protective sheets 3 and 4 are respectively disposed on the two piezoelectric tubes 1.
  • the guide 6 is placed either inside the inner piezoelectric tube 1 (including from the inner piezoelectric tube 1) or placed outside the outer piezoelectric tube 2 or placed on the outer wall of the inner piezoelectric tube 1
  • a positive pressure for pressing the susceptor 5 and the two protective sheets 3, 4 respectively with the guide 5 is provided in a direction perpendicular to the piezoelectric stretching direction 7
  • any one of the maximum static friction is less than the sum of the other two maximum static frictions.
  • the working principle of the embodiment is as follows: the initial state can be set to the two piezoelectric tubes 1, 2 are all in a contracted state, and then the two piezoelectric tubes 1, 2 are simultaneously elongated, which will drive the base 5 relative to the guide 6 moves in the direction of elongation, because the static friction between the protective sheets 3, 4 of the free ends of the two piezoelectric tubes 1, 2 and the guide 6 pushes the base 5 along the guide 6 to the two piezoelectric tubes 1 2, moving in the direction of elongation, The static friction between the base 5 and the guide 6 is the resistance to this movement.
  • the base 5 Since the maximum static friction between the base 5 and the guide 6 is less than the sum of the maximum static friction between the two protective sheets 3, 4 and the guide 6, the base 5 is stepped one step relative to the guide 6. Then, one of the two piezoelectric tubes 1, 2 is contracted (deformation reduction), and the other 2 is kept in an extended state. At this time, the protective sheet 3 which shrinks the free end of the piezoelectric tube 1 slides on the guide 6, and the protective sheet 4 at the free end of the other piezoelectric tube 2 and the susceptor 5 do not slide on the guide 6, because the piezoelectric tube is shrunk.
  • the maximum static friction between the free end protection piece 3 and the guide 6 is smaller than the sum of the maximum static friction between the other protection piece 4 and the guide 6 and the maximum static friction between the base 5 and the guide 6.
  • the contraction of the piezoelectric tube 1 restores the initial contracted state and does not cause the base 5 to slide relative to the guide 6.
  • the piezoelectric tube 2 which is still in the extended state is contracted, and it is also known that it can also return to the original contracted state without sliding the base 5 relative to the guide 6. So far, the susceptor 5 has been stepped one step relative to the guide 6 and both piezoelectric tubes 1, 2 are restored to the original contracted state. Repeating the above steps allows the susceptor 5 to step in the direction of elongation of the two piezoelectric tubes 1, 2 with respect to the guide 6 step by step.
  • the base 5 can be made relative to the guide 6 - Step by step along the contraction direction of the two piezoelectric tubes 1, 2.
  • the nesting structure of the above two piezoelectric tubes 1, 2 is not significantly larger than that of a single piezoelectric tube, and is not a stack structure in which a plurality of piezoelectric materials are bonded by glue, and the positioning accuracy is not lowered. Destruction of the ultra-high vacuum, but the thrust is twice as large as that of a piezoelectric tube of approximately the same size by dividing the electrodes to produce two half-tube piezoelectric bodies, thereby achieving the object of the present invention.
  • the function of the guide 6 is to (1) generate a positive pressure perpendicular to the telescopic direction 7 of the piezoelectric tube for the pedestal 5 and the two protective sheets 3, 4, so that the telescopic direction 7 can be obtained. Cooperate to produce a stepping friction; (2) A guiding effect on the stepping.
  • the inside of the inner piezoelectric tube 1 (see FIG. 2) is disposed outside the outer piezoelectric tube 2 (see FIG. 1) or in the gap between the outer wall of the inner piezoelectric tube 1 and the inner wall of the outer piezoelectric tube 2. (See Figure 3).
  • the pedestal 5 cannot completely fill the gap, and a hole or slit is required to allow a portion of the guide 6 to pass through the pedestal 5 (see Figure 3, which is a top view).
  • the shape variable generated by the guide 6, the base 5 and the two protective sheets 3, 4 under the frictional force should be Less than the amount of piezoelectric expansion of the inner and outer piezoelectric tubes 1, 2.
  • Example 2 Three-friction piezoelectric stepper driven by a spring-type nested bimorph
  • the positive pressure at which the susceptor 1 and the two protective sheets 3, 4 respectively in the above embodiment 1 are pressed against the guide 6 may be gravity, electromagnetic force and/or elastic force.
  • the three positive pressures are elastic: the guide 6 is elasticized by the guide 6 and/or the base 5 is elastic and/or the elastic body 8 (see FIG. 1) is added to the elastic phase of the base 5. Pressing, the guide 6 is elastically and/or protected elastically and/or the elastic body 8 is elastically pressed against the two protective sheets 3, 4 by the guide 6 and/or the protective sheet 3, 4.
  • the elastomer 7 described herein can also be considered as part of the base 5, as part of the two protective sheets 3, 4, and as part of the guide 6.
  • the elasticity is only present in the positive pressure direction, and in the piezoelectric expansion direction 7, the shape variable generated by the guide 6, the base 5 and the two protective sheets 3, 4 under the frictional force should be smaller than the inner and outer piezoelectric.
  • Embodiment 3 Three-friction piezoelectric stepper driven by a built-in elastic guide type nested bimorph
  • the guiding action of the guide 6 to the stepping in the above embodiment can be realized by the following structure:
  • the guide 6 is disposed inside the inner piezoelectric tube 1 (including the inner piezoelectric tube 1), and the guide 6 is a tube. a shape or a column shape, the two ends of which are respectively cut into the other end along the axial direction thereof but are not completely cut apart, which makes the guide 6 elastic, or a spring can be added inside the guide 6 so that the guide can generate an external force and guide
  • the outer walls of the two ends of the device 6 are respectively elastically pressed against the inner side of the annular base 5 and the inner sides of the two annular protective sheets 3, 4.
  • the guide 6 in this embodiment is in the shape of a square tube, it is based on the edge of the square tube and the annular base.
  • Embodiment 4 The guide is a three-friction piezoelectric stepper driven by a tube or a fence type nested bimorph.
  • the guides 6 in the above embodiments 1 and 2 may be formed in a tubular shape (see Fig. 1) or a fence shape (see Fig. 4 and Fig. 5), with the column 9 of the wall or fence and the base 5 and the two protective sheets 3, 4 are respectively pressed to generate a positive pressure.
  • the number of columns is 2 (see Figure 4) or 3 (see Figure 5) or 4, the column 9 or cylindrical (see Figure 4) Or with the blade (see Fig. 5), a positive pressure is generated with the base 5 and the two protective sheets 3, 4, respectively.
  • Example 5 Stepper scanner made of a three-friction piezoelectric stepper driven by a nested bimorph
  • the embodiment includes a piezoelectric scanning tube 10 and a three-friction piezoelectric stepper driven by the nested bimorph tube, and the piezoelectric scanning tube 10 is fixedly supported by the three frictional forces pushed by the nested bimorph
  • the base 5 of the piezoelectric stepper has the same piezoelectric expansion direction as the inner 1 and outer piezoelectric tubes 2 of the three-friction piezoelectric stepper pushed by the nested bimorphs 1 and 2 7.
  • the tube sleeve structure formed by the inner 1 and outer piezoelectric tubes 2 is opposite to the front and back sides of the piezoelectric scanning tube 10 or the sub-base 5 or on the same side of the base 5, and in the latter case,
  • the piezoelectric scanning tube 10 is sleeved on the outside of the outer piezoelectric tube 2, the guide 6 is placed inside the inner piezoelectric tube 1, or the piezoelectric scanning tube 10 is placed inside the inner piezoelectric tube 1, and the guide 6 is placed The outside of the outer piezoelectric tube 2.

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Description

嵌套双压电管推动的三摩擦力压电步进器与步进扫描器 本申请要求于 2010 年 8 月 10 日提交中国专利局、 申请号为 201010254442.0、 发明名称为"嵌套双压电管推动的三摩擦力压电步进器与 步进扫描器"的中国专利申请的优先权，其全部内容通过引用结合在本申请 中。 技术领域
本发明涉及一种压电步进器， 特别涉及一种嵌套双压电管推动的三摩 擦力压电步进器以及用其制成的步进扫描器， 属于压电定位器技术领域。
背景技术
压电定位器能在宏观（毫米） 范围内把物体定位到纳米精度， 因而在 纳米科学与技术领域中 （包括原子成像、 原子操纵等亚纳米领域）成为必 不可少的工具。 但压电效应一般较弱， 压电形变产生的推力也较小， 推动 不了稍大的物体。 压电定位器通常也难以工作于低温（如液氦温度）领域， 因为在低温下压电形变进一步减小， 给出的推力甚至小到不能克服摩擦阻 力或负载重力而产生位移。
把压电材料做成多级压电堆栈（ piezo stack )能给出较大的推力， 但工 艺复杂， 定位精度变低， 并且把压电材料粘接成堆栈所用的胶在低温下性 能变差， 且对超高真空具有破坏作用， 十分不利于极端物理条件下的科研 应用。
我们以前提出的双压电体并排推动的三摩擦力步进器（发明专利申请 号： 200910116492.X ), 其一个重要的实施例为实施例 4: 管形双压电体并 排推动的三摩擦力步进器。 我们发现： 现当围合成管形的双半管形压电体 的长度小于 3厘米时， 步进器在液氦温度下就走不动了 （在液氮温度下依 在液氦温度下工作， 这是一个较显而易见的解决方案， 但其更大的尺寸或 更复杂的结构均难以在极端条件（空间小、 真空度高） 下得到广泛应用。
为此， 我们在本发明中设计出了在不显著增加尺寸和不使用堆栈的情 况下， 能产生更大推力或能在更低温度下工作的压电步进器， 并因其压电 管不需要切割， 保持了原有的完整性和刚性， 故能步进地更稳健、 更精密， 其结构也更牢固 （不易受外界震动的干扰， 而通常外界震动很容易就能破 坏原子级精度的应用， 如扫描探针显微镜）。 此外， 本发明在结构上具有高 度的对称性， 能大大减少温度变化引起的热漂移， 这对原子级定位精度的 应用是非常重要的。 发明内容
本发明的目的： 为解决上述缺陷， 提出一种在不显著增加尺寸和不使 用堆栈的情况下， 能产生更大推力或能在更低温度下工作的压电定位器， 并用其制成具有扫描功能的步进扫描器。
本发明实现上述目的的技术方案是：
本发明嵌套双压电管推动的三摩擦力压电步进器， 包括两个压电管、 两个保护片、 基座、 导向器， 所述两压电管中的一个固定地立于基座上构 成内压电管， 而另一个套在所述内压电管之外也固定地立于该基座上构成 外压电管， 这两个压电管的压电伸缩方向相同， 都为轴向， 两个保护片分 别设置在这两个压电管的自由端， 导向器或者置于内压电管的内部或者置 于外压电管的外部或者置于内压电管外壁与外压电管内壁间的间隙中， 在 垂直于所述压电伸缩方向上设置将所述基座和两保护片分别与导向器相压 的正压力， 在这三个正压力对导向器产生的最大静摩擦力中， 任一个最大 静摩擦力小于其它两个最大静摩擦力之和。
所述导向器通过导向器弹性和 /或基座弹性和 /或增设弹性体与基座弹 保护片弹性相压。
所述两个保护片和基座均为环形， 导向器为管形或柱形， 其两端分别 沿其轴线方向向另一端切入但不完全切分离， 导向器设置于内压电管的内 部， 其两端外壁以弹力分别与环形基座的内侧以及两环形保护片的内侧相 压。
所述导向器为方管形或圓管形或方柱形或圓柱形。 所述导向器为管形或围栏形并套在所述外压电管的外面， 并与基座以 及两保护片相压。
所述围栏的栏柱数目为 2或 3或 4个。
所述栏柱或以圓柱面或以刀刃分别与所述基座和两保护片产生正压 力。
嵌套双压电管推动的三摩擦力压电步进器制成的步进扫描器， 包括压 电扫描管和所述嵌套双压电管推动的三摩擦力压电步进器， 压电扫描管固 定地立于所述嵌套双压电管推动的三摩擦力压电步进器的基座上， 该压电 扫描管的轴线方向与所述嵌套双压电管推动的三摩擦力压电步进器的内和 外压电管的轴线方向相同。
本发明嵌套双压电管推动的三摩擦力压电步进器的工作原理为： 内压 电管固定地立于基座上， 而外压电管套在内压电管的外部也固定地立于该 基座上， 且两压电管的伸缩方向相同， 都是轴向；
两压电管的自由端分别固定有保护片， 导向器或者置于内压电管的内 部或者置于外压电管的外部或者置于内压电管外壁与外压电管内壁间的间 隙中， 在垂直于所述伸缩方向上设置将导向器与两保护片相压的正压力以 及将导向器与基座相压的正压力， 在这三个正压力对导向器产生的最大静 摩擦力中， 任一个最大静摩擦力小于其它两个最大静摩擦力之和。
工作时， 可先将初态设置为两压电管皆为收缩状态， 接着， 两压电管 同时伸长， 这将带动基座相对于导向器沿该伸长方向移动， 因为此时两压 电管自由端的保护片与导向器间的静摩擦力都是推着基座沿导向器往两压 电管伸长方向移动， 而基座与导向器间的静摩擦力是阻止该移动的阻力。 由于基座与导向器间的最大静摩擦力小于两保护片与导向器间的最大静摩 擦力之和， 所以基座相对于导向器步进了一步。 接着， 两压电管中的一个 收缩（形变还原 ), 另一个保持伸长状态不变。 此时收缩压电管自由端的保 护片会在导向器上滑动， 而另一压电管自由端的保护片以及基座在导向器 上都没有滑动， 因为收缩压电管自由端保护片与导向器间的最大静摩擦力 小于另一保护片-导向器间最大静摩擦力与基座-导向器间最大静摩擦力之 和。收缩压电管就恢复了最初的收缩状态且没有使基座相对于导向器滑动。 再接着， 还保持伸长状态的那个压电管收缩， 同理可知， 它也能恢复最初 的收缩状态且不使基座相对于导向器滑动。 至此， 基座已相对于导向器步 进了一步且两压电管都恢复到最初的收缩状态。 重复上述步骤可使基座相 对于导向器一步步地沿两压电管伸长方向步进。
同理， 如果让初态皆为收缩状态的上述两压电管按照： 一个伸长 -另一 个伸长-同时收缩的顺序来重复进行，可使基座相对于导向器一步步地沿两 压电管收缩方向步进。
上述两压电管的嵌套结构不会显著比单个压电管在尺寸上大很多， 也 不是多层压电材料以胶粘结成的堆栈结构， 不会降低定位精度和对超高真 空产生破坏， 但其推力比近乎同尺寸的一个压电管通过分割电极产生两个 半管压电体的推力大一倍， 从而实现了本发明的目的。 本发明的两压电管 嵌套结构是高度对称的， 对温度漂移有很好的抵消作用， 所以能减少温漂 对定位精度的影响， 特别适用于定位精度高达原子级别的扫描探针显微镜 领域。 两压电管也不需要通过切割来分隔电极， 所以具有很高的刚性， 大 大增加了其抵抗外界震动干扰的能力。
由上述原理知， 所述导向器的作用是（ 1 )对基座和两保护片产生垂直 于压电管伸缩方向的正压力， 从而能在该伸缩方向上获得可配合产生步进 的摩擦力； （2 )对步进起一个导向作用。
所述导向器与基座间的正压力可以是导向器通过导向器弹性和 /或基 座弹性和 /或增设弹性体与基座弹性相压来产生的，所述导向器分别与两保 护片间产生的正压力可以是导向器通过导向器弹性和 /或保护片弹性和 /或 增设弹性体与两保护片分别弹性相压来产生的。 所述弹性只存在于所述正 压力方向， 而在压电伸缩方向上导向器、 基座和两保护片在摩擦力作用下 产生的形变量应小于内和外压电管的压电伸缩量。 管的内部（包含从内压电管内穿出）， 导向器为管形或柱形， 其两端分别沿 其轴线方向向另一端切入但不完全切分离， 这使得导向器具有弹性， 或者 可以在导向器的内部增设弹簧使得导向器可以对外产生弹力， 导向器两端 外壁以弹力分别与环形基座的内侧以及两环形保护片的内侧相压。 电管外部， 导向器为管形或为围栏形 （由栏柱和固定各栏柱的围杆构成）， 栏柱的数目为 2或 3或 4, 这些栏柱均匀分布在外压电管的外围， 所述栏 柱或以圓柱面或以刀刃分别与所述基座和两保护片产生正压力。 电管外壁与外压电管内壁间的间隙中，这时，基座不能完全把该间隙填满， 需开有孔或缝隙让导向器有一部分可以穿过基座， 导向器为管形或为围栏 形， 栏柱的数目为 2或 3或 4, 这些栏柱均匀分布在所述间隙中， 所述栏 柱或以圓柱面或以刀刃分别与所述基座和两保护片产生正压力。
我们也可以增设一个压电扫描管并将其固定地立于所述基座上， 并与 所述嵌套双压电管推动的三摩擦力压电步进器的内和外压电管具有相同的 压电伸缩方向， 所述内和外压电管构成的管套管结构与该压电扫描管或者 分处基座的正反两侧或者处于基座的同一侧， 对于后一种情况， 所述压电 扫描管或者套在外压电管的外面或者被套在内压电管的内部。 这样， 所述 嵌套双压电管推动的三摩擦力压电步进器除了能够步进之外， 还能在步进 到位后利用所述的压电扫描管实现扫描成像功能。
根据上述原理可以看出， 与以近乎同尺寸的一个压电管通过分割电极 发明的有益效果体现在：
( a )推力大一倍：不仅能推动更大的负载，也能在更低的温度下工作。
( b )具有更高的对称性： 抗温漂的能力强。
( c )具有更大的刚性： 抗震动干扰的能力强。
U )接近理想步进器： 由于上述优点， 本发明就非常接近理想步进器 了。
附图说明
图 1是本发明基本型嵌套双压电管推动的三摩擦力压电步进器的结构 示意图。
图 2是本发明内置弹性导向器型嵌套双压电管推动的三摩擦力压电步 进器的结构示意图。
图 3是本发明导向器置于内和外压电管之间隙中的嵌套双压电管推动 的三摩擦力压电步进器的结构示意图。
图 4是本发明栏柱数为 2的围栏导向器型嵌套双压电管推动的三摩擦 力压电步进器的结构示意图。
图 5是本发明刀刃导向器型嵌套双压电管推动的三摩擦力压电步进器 的结构示意图。
图中标号： 1压电管（内压电管）、 2另一个压电管（外压电管）、 3保 护片 （内压电管保护片）、 4另一保护片 （外压电管保护片）、 5基座、 6导 向器、 7压电伸缩方向、 8弹性体、 9栏柱、 10压电扫描管。
以下通过具体实施方式和结构附图对本发明作进一步的描述。
具体实施方式
实施例 1 : 基本型嵌套双压电管推动的三摩擦力压电步进器
参见附图 1 , 本实施例基本型嵌套双压电管推动的三摩擦力压电步进 器包括两个压电管 1、 2, 两个保护片 3、 4, 基座 5、 导向器 6, 所述两压 电管 1、 2中的一个固定地立于基座 5上构成内压电管 1 , 而另一个套在所 述内压电管 1之外也固定地立于该基座 5上构成外压电管 2, 这两个压电 管 1、 2的压电伸缩方向 7相同， 都为轴向， 两个保护片 3、 4分别设置在 这两个压电管 1、 2的自由端， 导向器 6或者置于内压电管 1的内部（包含 从内压电管 1内穿出）或者置于外压电管 2的外部或者置于内压电管 1外 壁与外压电管 2内壁间的间隙中， 在垂直于所述压电伸缩方向 7上设置将 所述基座 5和两保护片 3、 4分别与导向器 5相压的正压力，在这三个正压 力对导向器产生的最大静摩擦力中， 任一个最大静摩擦力小于其它两个最 大静摩擦力之和。
本实施例的工作原理为： 可先将初态设置为两压电管 1、 2皆为收缩状 态， 接着， 两压电管 1、 2同时伸长， 这将带动基座 5相对于导向器 6沿该 伸长方向移动， 因为此时两压电管 1、 2 自由端的保护片 3、 4与导向器 6 间的静摩擦力都是推着基座 5沿导向器 6往两压电管 1、 2伸长方向移动， 而基座 5与导向器 6间的静摩擦力是阻止该移动的阻力。 由于基座 5与导 向器 6间的最大静摩擦力小于两保护片 3、 4与导向器 6间的最大静摩擦力 之和， 所以基座 5相对于导向器 6步进了一步。 接着， 两压电管 1、 2中的 一个 1收缩（形变还原）， 另一个 2保持伸长状态不变。 此时收缩压电管 1 自由端的保护片 3会在导向器 6上滑动， 而另一压电管 2自由端的保护片 4以及基座 5在导向器 6上都没有滑动，因为收缩压电管 1 自由端保护片 3 与导向器 6间的最大静摩擦力小于另一保护片 4-导向器 6间最大静摩擦力 与基座 5-导向器 6间最大静摩擦力之和。 收缩压电管 1就恢复了最初的收 缩状态且没有使基座 5相对于导向器 6滑动。 再接着， 还保持伸长状态的 那个压电管 2收缩， 同理可知， 它也能恢复最初的收缩状态且不使基座 5 相对于导向器 6滑动。 至此， 基座 5已相对于导向器 6步进了一步且两压 电管 1、 2都恢复到最初的收缩状态。重复上述步骤可使基座 5相对于导向 器 6—步步地沿两压电管 1、 2伸长方向步进。
同理， 如果让初态皆为收缩状态的上述两压电管 1、 2按照： 一个伸长 -另一个伸长-同时收缩的顺序来重复进行， 可使基座 5相对于导向器 6— 步步地沿两压电管 1、 2收缩方向步进。
上述两压电管 1、 2 的嵌套结构不会显著比单个压电管在尺寸上大 ^艮 多， 也不是多层压电材料以胶粘结成的堆栈结构， 不会降低定位精度和对 超高真空产生破坏， 但其推力比近乎同尺寸的一个压电管通过分割电极产 生两个半管压电体的推力大一倍， 从而实现了本发明的目的。
由上述原理知， 所述导向器 6的作用是（1 )对基座 5和两保护片 3、 4产生垂直于压电管伸缩方向 7的正压力， 从而能在该伸缩方向 7上获得 可配合产生步进的摩擦力； （2 )对步进起一个导向作用。 于内压电管 1的内部（见附图 2 )或者设置于外压电管 2的外部（见附图 1 ) 或者设置于内压电管 1外壁与外压电管 2内壁间的间隙中（见附图 3 )。 对 于这第三种情况， 基座 5不能完全把该间隙填满， 需开有孔或缝隙让导向 器 6有一部分可以穿过基座 5 (见附图 3 , 该图为俯视图）。 在压电伸缩方 向 7上导向器 6、 基座 5和两保护片 3、 4在摩擦力作用下产生的形变量应 小于内和外压电管 1、 2的压电伸缩量。
实施例 2: 弹力型嵌套双压电管推动的三摩擦力压电步进器
上述实施例 1中的基座 1和两保护片 3、4三者分别与导向器 6相压的 正压力可以是重力、 电磁力和 /或弹性力。 在本实施例中， 这三个正压力是 弹力： 所述导向器 6通过导向器 6弹性和 /或基座 5弹性和 /或增设弹性体 8 (见附图 1 )与基座 5弹性相压， 所述导向器 6通过导向器 6弹性和 /或保 护片 3、 4弹性和 /或增设弹性体 8与两保护片 3、 4弹性相压。 这里所述的 弹性体 7也可以视为基座 5的一部分，也可以视为两保护片 3、4的一部分， 也可以视为导向器 6的一部分。 所述弹性只存在于所述正压力方向， 而在 压电伸缩方向 7上导向器 6、 基座 5和两保护片 3、 4在摩擦力作用下产生 的形变量应小于内和外压电管 1、 2的压电伸缩量。
实施例 3: 内置弹性导向器型嵌套双压电管推动的三摩擦力压电步进 器
上述实施例中导向器 6对步进的导向作用可以由下述结构实现： 导向 器 6设置于内压电管 1的内部（包含从内压电管 1内穿出），导向器 6为管 形或柱形， 其两端分别沿其轴线方向向另一端切入但不完全切分离， 这使 得导向器 6具有弹性， 或者可以在导向器 6的内部增设弹簧使得导向器可 以对外产生弹力， 导向器 6两端外壁以弹力分别与环形基座 5的内侧以及 两环形保护片 3、 4的内侧相压。
本实施例中的导向器 6为方管形时， 由于是以方管的棱边和环形基座
5的内侧以及两环形保护片 3、 4的内侧相压， 因此接触面积小， 从而， 可 以实现用较大的压力而获得相对较小的但合适的摩察力， 这样步进器的整 体结构就比较紧固。
实施例 4: 导向器为管或围栏型嵌套双压电管推动的三摩擦力压电步 进器
上述实施例 1和 2中的导向器 6可以做成管形 （见附图 1 )或围栏形 (见附图 4和附图 5 ), 以管壁或围栏的栏柱 9与所述基座 5以及两保护片 3、 4分别相压， 产生正压力。 对于导向器 6为围栏的情形， 栏柱的数目为 2 (见附图 4 )或 3 (见附图 5 )或 4, 所述栏柱 9或以圓柱面 （见附图 4 ) 或以刀刃 （见附图 5 )分别与所述基座 5和两保护片 3、 4产生正压力。 实施例 5: 由嵌套双压电管推动的三摩擦力压电步进器制成的步进扫 描器
本实施例包括压电扫描管 10 和上述嵌套双压电管推动的三摩擦力压 电步进器，压电扫描管 10固定地立于所述嵌套双压电管推动的三摩擦力压 电步进器的基座 5上， 并与所述嵌套双压电管 1、 2推动的三摩擦力压电步 进器的内 1和外压电管 2具有相同的压电伸缩方向 7, 所述内 1和外压电 管 2构成的管套管结构与压电扫描管 10或者分处基座 5的正反两侧或者处 于基座 5的同一侧， 对于后一种情况， 所述压电扫描管 10套在外压电管 2 的外面，导向器 6置于内压电管 1的内部，或者压电扫描管 10套在内压电 管 1的内部， 导向器 6置于外压电管 2的外部。

Claims

权 利 要 求
1、 一种嵌套双压电管推动的三摩擦力压电步进器， 包括两个压电管、 两个保护片、 基座、 导向器， 其特征是： 所述两压电管中的一个固定地立 于基座上构成内压电管， 而另一个套在所述内压电管之外也固定地立于该 基座上构成外压电管， 这两个压电管的压电伸缩方向相同， 都为轴向， 两 个保护片分别设置在这两个压电管的自由端， 导向器或者置于内压电管的 内部或者置于外压电管的外部或者置于内压电管外壁与外压电管内壁间的 间隙中， 在垂直于所述压电伸缩方向上设置将所述基座和两保护片分别与 导向器相压的正压力， 在这三个正压力对导向器产生的最大静摩擦力中， 任一个最大静摩擦力小于其它两个最大静摩擦力之和。
2、 根据权利要求 1所述的嵌套双压电管推动的三摩擦力压电步进器， 其特征是:所述导向器通过导向器弹性和 /或基座弹性和 /或增设弹性体与基 与两保护片弹性相压。
3、根据权利要求 1或 2所述的嵌套双压电管推动的三摩擦力压电步进 器， 其特征是： 两个保护片和基座均为环形， 导向器为管形或柱形， 其两 端分别沿其轴线方向向另一端切入但不完全切分离， 导向器设置于内压电 管的内部， 其两端外壁以弹力分别与环形基座的内侧以及两环形保护片的 内侧相压。
4、 根据权利要求 3所述的嵌套双压电管推动的三摩擦力压电步进器， 其特征是： 导向器为方管形或圓管形或方柱形或圓柱形。
5、根据权利要求 1或 2所述的嵌套双压电管推动的三摩擦力压电步进 器， 其特征是： 所述导向器为管形或围栏形， 导向器套在外压电管的外面 并与基座以及两保护片相压。
6、 根据权利要求 5所述的嵌套双压电管推动的三摩擦力压电步进器， 其特征是： 所述围栏的栏柱数目为 2或 3或 4个。
7、 根据权利要求 6所述的嵌套双压电管推动的三摩擦力压电步进器， 其特征是： 所述栏柱或以圓柱面或以刀刃分别与所述基座和两保护片产生 正压力。
8、一种由权利要求 1所述嵌套双压电管推动的三摩擦力压电步进器制 成的步进扫描器， 其特征是： 包括压电扫描管和所述嵌套双压电管推动的 三摩擦力压电步进器， 压电扫描管固定地立于所述嵌套双压电管推动的三 摩擦力压电步进器的基座上， 该压电扫描管的轴线方向与所述嵌套双压电 管推动的三摩擦力压电步进器的内和外压电管的轴线方向相同。
PCT/CN2011/074697 2010-08-10 2011-05-26 嵌套双压电管推动的三摩擦力压电步进器与步进扫描器 Ceased WO2012019477A1 (zh)

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