WO2012007527A3 - Methods and systems for detecting, setting, monitoring, determining, storing and compensating the spatial situation of a mobile unit - Google Patents

Methods and systems for detecting, setting, monitoring, determining, storing and compensating the spatial situation of a mobile unit Download PDF

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Publication number
WO2012007527A3
WO2012007527A3 PCT/EP2011/061997 EP2011061997W WO2012007527A3 WO 2012007527 A3 WO2012007527 A3 WO 2012007527A3 EP 2011061997 W EP2011061997 W EP 2011061997W WO 2012007527 A3 WO2012007527 A3 WO 2012007527A3
Authority
WO
WIPO (PCT)
Prior art keywords
mobile unit
setting
spatial situation
compensating
monitoring
Prior art date
Application number
PCT/EP2011/061997
Other languages
French (fr)
Other versions
WO2012007527A2 (en
Inventor
Gilbert Cavazza
Stefan Svensson
Tomas UTTERBÄCK
Nicolas Raynaud
Patrik MÖLLER
Aurélien DETRY
Eric Cunningham
Original Assignee
Replisaurus Group Sas
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Replisaurus Group Sas filed Critical Replisaurus Group Sas
Priority to EP11745504.8A priority Critical patent/EP2593841A2/en
Publication of WO2012007527A2 publication Critical patent/WO2012007527A2/en
Publication of WO2012007527A3 publication Critical patent/WO2012007527A3/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70816—Bearings
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping

Abstract

A method and system for setting the spatial situation of a mobile unit is provided. The mobile unit is moving with respect to a movement surface by means of at least one air pad (5, 6) and/or a motorized support structure, and the system (1A, 1B) comprises means (8, 9, 10) for setting an air feeding parameter of at least one such air pad (5, 6) or at least on position parameter for a motorized support structure, when the mobile unit (2) holds a position for which a spatial situation error is detected with respect to a predefined reference spatial situation.
PCT/EP2011/061997 2010-07-15 2011-07-13 Methods and systems for detecting, setting, monitoring, determining, storing and compensating the spatial situation of a mobile unit WO2012007527A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP11745504.8A EP2593841A2 (en) 2010-07-15 2011-07-13 Methods and systems for detecting, setting, monitoring, determining, storing and compensating the spatial situation of a mobile unit

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
SE1050803 2010-07-15
SE1050803-4 2010-07-15
US36498910P 2010-07-16 2010-07-16
US61/364,989 2010-07-16

Publications (2)

Publication Number Publication Date
WO2012007527A2 WO2012007527A2 (en) 2012-01-19
WO2012007527A3 true WO2012007527A3 (en) 2012-05-18

Family

ID=44630441

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2011/061997 WO2012007527A2 (en) 2010-07-15 2011-07-13 Methods and systems for detecting, setting, monitoring, determining, storing and compensating the spatial situation of a mobile unit

Country Status (2)

Country Link
EP (1) EP2593841A2 (en)
WO (1) WO2012007527A2 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6094255A (en) * 1997-02-04 2000-07-25 Nikon Corporation Projection exposure apparatus and method that floats a plate
US6151100A (en) * 1996-12-12 2000-11-21 Canon Kabushiki Kaisha Positioning system

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58116735A (en) * 1981-12-29 1983-07-12 Canon Inc Projection printing apparatus
US5121256A (en) * 1991-03-14 1992-06-09 The Board Of Trustees Of The Leland Stanford Junior University Lithography system employing a solid immersion lens
KR101289979B1 (en) * 2003-06-19 2013-07-26 가부시키가이샤 니콘 Exposure device and device producing method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6151100A (en) * 1996-12-12 2000-11-21 Canon Kabushiki Kaisha Positioning system
US6094255A (en) * 1997-02-04 2000-07-25 Nikon Corporation Projection exposure apparatus and method that floats a plate

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
See also references of EP2593841A2 *
SHIMOKOHBE A ET AL: "An active air bearing: a controlled-type bearing with ultra-precision, infinite static stiffness, high damping capability and new functions", NANOTECHNOLOGY, IOP, BRISTOL, GB, vol. 2, no. 1, 1 January 1991 (1991-01-01), pages 64 - 71, XP020067186, ISSN: 0957-4484, DOI: 10.1088/0957-4484/2/1/009 *

Also Published As

Publication number Publication date
WO2012007527A2 (en) 2012-01-19
EP2593841A2 (en) 2013-05-22

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