WO2012006626A3 - Flow controller - Google Patents

Flow controller Download PDF

Info

Publication number
WO2012006626A3
WO2012006626A3 PCT/US2011/043575 US2011043575W WO2012006626A3 WO 2012006626 A3 WO2012006626 A3 WO 2012006626A3 US 2011043575 W US2011043575 W US 2011043575W WO 2012006626 A3 WO2012006626 A3 WO 2012006626A3
Authority
WO
WIPO (PCT)
Prior art keywords
flow
fluid
flow passage
control
flexible tube
Prior art date
Application number
PCT/US2011/043575
Other languages
French (fr)
Other versions
WO2012006626A2 (en
WO2012006626A9 (en
Inventor
Todd M. Ulschmid
John G. Fisher
Jorge A. Diaz
Wiley J. Wilkinson
Christopher M. Belsky
Robert T. Chinnock
Robert K. Snyder
Original Assignee
Entegris, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris, Inc. filed Critical Entegris, Inc.
Publication of WO2012006626A2 publication Critical patent/WO2012006626A2/en
Publication of WO2012006626A9 publication Critical patent/WO2012006626A9/en
Publication of WO2012006626A3 publication Critical patent/WO2012006626A3/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/001—Means for regulating or setting the meter for a predetermined quantity
    • G01F15/003—Means for regulating or setting the meter for a predetermined quantity using electromagnetic, electric or electronic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)
  • Lift Valve (AREA)

Abstract

A flow controller includes a body having an inlet end, an outlet end, a flow measurement portion, a variable valve portion and a control portion to control the valve portion based on an output from the flow measurement portion. The flow measurement portion includes a pair of differential pressure sensors for measuring the pressure drop across a flow path as the fluid flows through the flow path. The flow control portion comprises a flexible tube and a plunger with a motor drive that incrementally pinches the flexible tube. A linear, constant diameter bore extends through the housing forming a fluid flow passage for providing a calibrated pressure drop to a fluid that is passed through the fluid flow passage. A replaceable portion of the fluid flow passage is comprised of resilient soft plastic tubing as part of a pinch valve having non-contaminating fittings for positive device shut off.
PCT/US2011/043575 2010-07-09 2011-07-11 Flow controller WO2012006626A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US36288210P 2010-07-09 2010-07-09
US61/362,882 2010-07-09

Publications (3)

Publication Number Publication Date
WO2012006626A2 WO2012006626A2 (en) 2012-01-12
WO2012006626A9 WO2012006626A9 (en) 2012-03-01
WO2012006626A3 true WO2012006626A3 (en) 2012-04-19

Family

ID=45441872

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2011/043575 WO2012006626A2 (en) 2010-07-09 2011-07-11 Flow controller

Country Status (2)

Country Link
TW (1) TW201234155A (en)
WO (1) WO2012006626A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6372998B2 (en) * 2013-12-05 2018-08-15 株式会社フジキン Pressure flow control device
JP6055941B2 (en) * 2016-02-15 2016-12-27 株式会社堀場エステック Fluid control equipment
FR3066016B1 (en) * 2017-05-04 2019-08-30 Mediconseil DEBITMETER FITABLE TO BE REMOTELY CONTROLLED
CN113632038A (en) * 2019-04-25 2021-11-09 株式会社富士金 Flow rate control device
KR102246720B1 (en) * 2020-06-23 2021-04-30 (주)발맥스기술 Ultrasonic flowmeter

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060052903A1 (en) * 2000-11-01 2006-03-09 Weatherford/Lamb, Inc. Controller system for downhole applications
US20070016333A1 (en) * 2005-07-12 2007-01-18 Edwards Grant B Method and apparatus for controlling the valve position of a variable orifice flow meter
US20070246102A1 (en) * 2006-04-20 2007-10-25 Mcdonald R Michael Flow controller delivery of a specified-quantity of a fluid
US20080009978A1 (en) * 2006-07-05 2008-01-10 Smirnov Alexei V Multi-mode control algorithm

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060052903A1 (en) * 2000-11-01 2006-03-09 Weatherford/Lamb, Inc. Controller system for downhole applications
US20070016333A1 (en) * 2005-07-12 2007-01-18 Edwards Grant B Method and apparatus for controlling the valve position of a variable orifice flow meter
US20070246102A1 (en) * 2006-04-20 2007-10-25 Mcdonald R Michael Flow controller delivery of a specified-quantity of a fluid
US20080009978A1 (en) * 2006-07-05 2008-01-10 Smirnov Alexei V Multi-mode control algorithm

Also Published As

Publication number Publication date
WO2012006626A2 (en) 2012-01-12
TW201234155A (en) 2012-08-16
WO2012006626A9 (en) 2012-03-01

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