WO2011108786A1 - Procédé de fabrication d'un actionneur pliant tridimensionnel - Google Patents

Procédé de fabrication d'un actionneur pliant tridimensionnel Download PDF

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Publication number
WO2011108786A1
WO2011108786A1 PCT/KR2010/005442 KR2010005442W WO2011108786A1 WO 2011108786 A1 WO2011108786 A1 WO 2011108786A1 KR 2010005442 W KR2010005442 W KR 2010005442W WO 2011108786 A1 WO2011108786 A1 WO 2011108786A1
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WO
WIPO (PCT)
Prior art keywords
actuator
mold
dimensional
hema
pdms
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PCT/KR2010/005442
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English (en)
Korean (ko)
Inventor
정광운
진광용
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전북대학교산학협력단
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Publication of WO2011108786A1 publication Critical patent/WO2011108786A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C67/00—Shaping techniques not covered by groups B29C39/00 - B29C65/00, B29C70/00 or B29C73/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/0019—Flexible or deformable structures not provided for in groups B81C1/00142 - B81C1/00182
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate

Definitions

  • the present invention is to combine a three-dimensional structure with a polymer hydrogel, to implement a new actuator that can be applied in the production of new devices, such as by using a characteristic that changes the form and structure in response to external stimulation.
  • the manufacturing method of the three-dimensional folding actuator according to the present invention will provide the basis of various form changes through the introduction of the basic principle and hydrogel of the existing actuator. Accordingly, the present invention provides a method of manufacturing a three-dimensional folding actuator that is more highly integrated and more functional than a conventional actuator and is applicable to technical fields such as photons, electricity, magnetic devices and chemical and biological sensors.
  • a third step of removing the imide film after thermally curing the PDMS layer
  • the mold is manufactured using a unit of mm that can be observed by the eye, the size of the actuator is characterized in that the production can be up to 100 ⁇ m ⁇ 1m.
  • the present invention is characterized in that the shape of the part occupied by the actuator in the mold by expressing the three-dimensional structure to be assembled in a two-dimensional structure, the mold is divided into any one of the form of a tetrahedron, a cube and a flat ball to produce do.
  • the present invention is characterized in that the component ratio of PU: HEMA in the PU / HEMA layer is 1-9: 9-1.
  • Actuator manufacturing method can implement a new three-dimensional folding actuator that can freely adjust the form by the external stimulation in accordance with the combination of the hydrogel and the actuator to produce a new actuator in which a variety of technologies are bonded photons, electricity, It will have excellent functions that can be applied to magnetic devices, chemical and biological sensors, and related materials.
  • Tg glass transition temperature
  • HEMA component ratio
  • FIG. 2 is a graph showing the expansion volume ratio of PDMS layer and PU / HEMA layer under various solvent conditions.
  • FIG. 3 is a view showing a manufacturing process of a three-dimensional folding actuator.
  • 5 is a two-dimensional symmetrical structure (cube, pyramid, flat ball structure) designed before the swelling reaction.
  • a third step of removing the imide film after thermally curing the PDMS layer
  • the mold is manufactured using a unit that can be observed by the eye, the size of the actuator is characterized in that the production can be up to 100 ⁇ m ⁇ 1m.
  • the present invention is characterized in that the shape of the part occupied by the actuator in the mold by expressing the three-dimensional structure to be assembled in a two-dimensional structure, the mold is divided into any one of the form of a tetrahedron, a cube and a flat ball to produce do.
  • the present invention is characterized in that the component ratio of PU: HEMA in the PU / HEMA layer is 1-9: 9-1.
  • a new concept of photons / electricity / devices, chemical / biological sensors, and actuators using a hydrogel may be developed and applied to many other industries.
  • the manufacturing process of the actuator according to the present invention was to combine the polymer hydrogel and the three-dimensional structure, to implement a new three-dimensional folding actuator that the shape changes freely according to external stimulation
  • the simplest and simplest existing actuator is a one-dimensional cantilever structure that is mainly used in MEMS (microelectromechanical systems).
  • the three-dimensional folding actuator of the present invention was produced by using a polymer by varying the composition ratio from the bi-layer one-dimensional kenti lever structure.
  • the polymer used in the actuator is considered to be an ideal material because it can change the surface freely and easily change the shape and size in response to the external environment compared to the silicon inorganic material.
  • the polymer material is used as a material for silicon-based electronic devices and bio devices that are currently being studied in various fields because they can easily change molecular structure and have chemical and mechanical stability.
  • a flexible, transparent, thermosetting polydimethylsiloxane (PDMS) and UV-curable polyurethane / 2-hydroxyethylmethacrylate (PU / HEMA) elastomer composite respectively, nonpolar (hydrophobic) and polar (hydrophilic) Selective swelling experiments were carried out in polar / non-polar solvents.
  • PDMS polydimethylsiloxane
  • PU / HEMA 2-hydroxyethylmethacrylate
  • Figure 1 (a) is a change in Tg due to the difference in the component ratio of HEMA
  • Figure 1 (b) is a change in physical properties according to the difference in the component ratio of PU / HEMA.
  • DSC differential scanning calorimeter
  • DMA dynamic mechanical analysis
  • UMT universal mechanical tester
  • PU and HEMA were manufactured with various component ratios, and the thermal and mechanical analysis showed the best thermal and mechanical properties at the composition ratio of 7: 3, and was selected as the optimal PU / HEMA component ratio for the manufacture of actuators.
  • the three-dimensional folding actuator is an actuator in which a two-dimensional symmetrical structure manufactured by applying PDMS rods between square arrays of PU / HEMA composites changes shape in three dimensions without color change through swelling reaction under solvent conditions.
  • the manufacturing process of the three-dimensional folding actuator is simpler than the manufacturing process of the conventional scroll or helical actuator because it skips the crystallization process of silica colloid.
  • the voids are filled with an imide film, fluorinated, and the PDMS layer is thermally cured in the form of a rod.
  • the imide film was removed and oxygen plasma treatment was performed on the surface of the mold and PDMS layer to form a methacryloxypropyl-trimethoxysilane monolayer.
  • 1 to 9 9 to 1 ratio of PU / HEMA layer is added to the UV cured after the prepared sample is separated.
  • FIG. 4 a three-dimensional folding actuator is representatively shown to sequentially assemble a cube structure over time under solvent conditions.
  • the three-dimensional folding actuator manufactured through the manufacturing process of FIG. 3 appears as a two-dimensional structure as shown in FIG. 4 (a) before swelling.
  • the non-polar PDMS layer used in the junction forming the cube in the two-dimensional structure is a non-polar hexane solvent condition.
  • the swelling reaction is sequentially performed from (b) to 4 (f) in FIG. 4 (a before swelling, be during swelling, f after swelling).
  • the driving force of the three-dimensional folding actuator is the swelling reaction between the non-polar PDMS layer and the non-polar hexane solvent, and since the arrangement of the squares of the two-dimensional structure is asymmetric, the thickness of the PDMS layer on the right side of FIG. 4A is thickened. Thus, the force required to assemble the three-dimensional structure can be obtained.
  • FIG. 5 shows a photograph assembled with a cube, a tetrahedron, and a flat ball when a solvent is provided from various two-dimensional structures.
  • the portion of the junction where the color of the joint is different is the PDMS layer, and various structures in three dimensions can be realized through the selective swelling reaction of the rod-shaped PDMS layer.
  • the adjustment of the composition ratio and position of the PDMS layer and the PU / HEMA layer is an important variable in assembling the three-dimensional structure from the two-dimensional structure.
  • the expansion volume ratio is different depending on the type of polar / non-polar solvent, it is possible to efficiently use the swelling effect by selectively using the solvent according to the slope of each side in the three-dimensional structure.
  • FIG. 5 (a) shows a two-dimensional structure in which a three-dimensional folding actuator manufactured as described above is formed by arranging a total of six squares in a cross shape.
  • the three-dimensional pyramid actuator shown in (b) of FIG. 5 is composed of four equilateral triangles and is a two-dimensional structure in which three triangles are arranged on each side of the center triangle, and a PDMS layer is positioned on each side of the center triangle. do.
  • the three-dimensional pyramid structure requires that the three triangles require the same force, and that the angle between the faces is small, so that the size of the PDMS layer is larger than other actuators.
  • the more complex three-dimensional flat ball actuator can implement a flat ball structure from a two-dimensional structure consisting of two hexagons and twelve rhombuses joined to the hexagon, and a PDMS layer is provided at the junction between each side of the hexagon and the left and right rhombuses. Located. Since the two-dimensional structure is symmetrical, the greatest force is required to lift up the part containing one hexagon, and the PDMS layer located between the rhombus and the supporting rhombus and hexagon is important.
  • Such folding actuators of various types of three-dimensional structures have the advantage that various three-dimensional structures can be assembled by adjusting the composition ratio and position of PDMS and PU / HEMA.
  • Such a three-dimensional folding actuator has laid the foundation for various morphological changes through the introduction of a hydrogel based on the basic principle of the actuator.
  • various types of symmetrical structures may be manufactured in the manufacturing process, thereby manufacturing various actuators as described above.
  • Such actuators are more integrated and highly functional technologies than conventional actuators, and can be applied to microstructures of nano and micro units.
  • the technology is industrially applicable as applicable to technical fields such as electrical, magnetic devices and chemical and biological sensors.

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Micromachines (AREA)

Abstract

La présente invention concerne un procédé de fabrication d'un actionneur pliant tridimensionnel. Le procédé selon la présente invention comporte les étapes consistant à : (1) utiliser un film imide pour combler un espace vide, à l'exclusion des zones ayant reçu une application de PDMS ; (2) former une couche de PDMS en traitant la surface dudit film imide et du moule avec un fluorosilane ; (3) durcir thermiquement la couche de PDMS puis éliminer le film imide ; (4) créer des groupes fonctionnels hydroxyle et former une monocouche de méthacryloxypropyle-triméthoxysilane par un traitement au plasma d'oxygène, une couche de PDMS étant formée sur ledit moule en place ; et (5) durcir par UV en appliquant une couche de PU/HEMA polaire. La présente invention concerne un procédé de fabrication d'un nouvel actionneur, qui réunit diverses technologies, car il donne un actionneur pliant tridimensionnel sous une forme pouvant être facilement réglée par une combinaison d'un hydrogel et d'un actionneur.
PCT/KR2010/005442 2010-03-04 2010-08-18 Procédé de fabrication d'un actionneur pliant tridimensionnel WO2011108786A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2010-0019362 2010-03-04
KR1020100019362A KR20110100405A (ko) 2010-03-04 2010-03-04 3차원 폴딩 액추에이터의 제조방법

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WO2011108786A1 true WO2011108786A1 (fr) 2011-09-09

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TWI555778B (zh) * 2015-06-12 2016-11-01 國立清華大學 基底表面改質的方法
KR102285322B1 (ko) * 2020-01-23 2021-08-03 고려대학교 세종산학협력단 생체적합성 마이크로 소프트 벨로우 액추에이터 및 그 제조 방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040191321A1 (en) * 2002-11-05 2004-09-30 Ohio State University Self-folding polymer microparticles

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040191321A1 (en) * 2002-11-05 2004-09-30 Ohio State University Self-folding polymer microparticles

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
EBEFORS ET AL.: "New small radius joints based on thermal shrinkage of polyimide in V- grooves for robust self-assembly 3D microstructures", J. MICROMECH. MICROENG., vol. 8, 1998, pages 188 - 194 *
GUAN ET AL.: "Self-Folding of Three-Dimensional Hydrogel Microstructures", JOURNAL OF PHYSICAL CHEMISTRY B, vol. 109, no. 49, 2005, pages 23134 - 23137 *
WANG ET AL.: "Enhanced 3-D Folding of Silicon Microstructures via Thermal Shrinkage of a Composite Organic/Inorganic Bilayer", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, vol. 17, no. 4, August 2008 (2008-08-01), pages 882 - 889 *

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