WO2011094147A3 - Monolithic silicon acousto-optic modulator structure and method - Google Patents

Monolithic silicon acousto-optic modulator structure and method Download PDF

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Publication number
WO2011094147A3
WO2011094147A3 PCT/US2011/022211 US2011022211W WO2011094147A3 WO 2011094147 A3 WO2011094147 A3 WO 2011094147A3 US 2011022211 W US2011022211 W US 2011022211W WO 2011094147 A3 WO2011094147 A3 WO 2011094147A3
Authority
WO
WIPO (PCT)
Prior art keywords
disk
anchor point
acousto
optic modulator
located separated
Prior art date
Application number
PCT/US2011/022211
Other languages
French (fr)
Other versions
WO2011094147A2 (en
Inventor
Sunil Bhave
Suresh Sridaran
Original Assignee
Cornell University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cornell University filed Critical Cornell University
Priority to CN201180016155.9A priority Critical patent/CN102822726B/en
Publication of WO2011094147A2 publication Critical patent/WO2011094147A2/en
Publication of WO2011094147A3 publication Critical patent/WO2011094147A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2426—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators in combination with other electronic elements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/05—Function characteristic wavelength dependent
    • G02F2203/055—Function characteristic wavelength dependent wavelength filtering
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/15—Function characteristic involving resonance effects, e.g. resonantly enhanced interaction
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2436—Disk resonators

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

An electro-optic structure, which may comprise an acousto-optic modulator for use in an opto-acoustic oscillator, comprises a plurality of connected disks located separated over a substrate and anchored at one end to the substrate at an anchor point. An actuator electrode is located separated from a first one of the connected disks (i.e., that is typically closer to the anchor point) and an optical waveguide is located separated from a second one of the connected disks (i.e., that is typically further from the anchor point). Radio frequency and direct current actuation of the actuator electrode provides a mechanical vibration in the first disk that is mechanically coupled to the second disk which serves to optically modulate light transported through the wave guide. Reverse operation is also contemplated. Embodiments also contemplate a third disk as a radiation pressure driven detector disk connected to the first disk, but not the second disk. Further contemplated is a related fabrication method and a related operation method.
PCT/US2011/022211 2010-01-26 2011-01-24 Monolithic silicon acousto-optic modulator structure and method WO2011094147A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201180016155.9A CN102822726B (en) 2010-01-26 2011-01-24 Monolithic silicon acousto-optic modulator structure and method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US29833010P 2010-01-26 2010-01-26
US61/298,330 2010-01-26

Publications (2)

Publication Number Publication Date
WO2011094147A2 WO2011094147A2 (en) 2011-08-04
WO2011094147A3 true WO2011094147A3 (en) 2012-01-19

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2011/022211 WO2011094147A2 (en) 2010-01-26 2011-01-24 Monolithic silicon acousto-optic modulator structure and method

Country Status (2)

Country Link
CN (1) CN102822726B (en)
WO (1) WO2011094147A2 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000111855A (en) * 1998-09-29 2000-04-21 Pirelli Cavi & Syst Spa Multiple-passage type acoustooptic device and laser
JP2005331885A (en) * 2004-05-21 2005-12-02 Fujitsu Ltd Acoustooptic device and method for manufacturing acoustooptic device
US20070171513A1 (en) * 2006-01-21 2007-07-26 Pannell Christopher N Silicon acousto-optic modulator

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI97087C (en) * 1994-10-05 1996-10-10 Nokia Telecommunications Oy Dielectric resonator
US6665476B2 (en) * 2000-09-29 2003-12-16 Sarnoff Corporation Wavelength selective optical add/drop multiplexer and method of manufacture
JP2006303558A (en) * 2005-04-15 2006-11-02 Seiko Epson Corp Mems resonator
US7965745B2 (en) * 2007-06-13 2011-06-21 Oewaves, Inc. RF and microwave receivers based on electro-optic optical whispering gallery mode resonators
CN100588119C (en) * 2007-09-10 2010-02-03 北京大学 A kind of plane capacitance resonance machine and preparation method thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000111855A (en) * 1998-09-29 2000-04-21 Pirelli Cavi & Syst Spa Multiple-passage type acoustooptic device and laser
JP2005331885A (en) * 2004-05-21 2005-12-02 Fujitsu Ltd Acoustooptic device and method for manufacturing acoustooptic device
US20070171513A1 (en) * 2006-01-21 2007-07-26 Pannell Christopher N Silicon acousto-optic modulator

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
SUNIL A. BHAVE ET AL.: "SILICON MONOLITHIC ACOUSTO-OPTIC MODULATOR", 23RD IEE E INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2010), 24 January 2010 (2010-01-24), HONG KONG, pages 835 - 838 *

Also Published As

Publication number Publication date
CN102822726B (en) 2015-03-04
WO2011094147A2 (en) 2011-08-04
CN102822726A (en) 2012-12-12

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