WO2011071819A1 - Plaque de phase de cavité optique pour microscopie électronique à transmission - Google Patents

Plaque de phase de cavité optique pour microscopie électronique à transmission Download PDF

Info

Publication number
WO2011071819A1
WO2011071819A1 PCT/US2010/059103 US2010059103W WO2011071819A1 WO 2011071819 A1 WO2011071819 A1 WO 2011071819A1 US 2010059103 W US2010059103 W US 2010059103W WO 2011071819 A1 WO2011071819 A1 WO 2011071819A1
Authority
WO
WIPO (PCT)
Prior art keywords
optical
phase
cavity
optical cavity
electron beam
Prior art date
Application number
PCT/US2010/059103
Other languages
English (en)
Inventor
Robert Glaeser
Jian Jin
Radostin Danev
Holger Mueller
John Spence
Original Assignee
Regents Of The University Of California
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Regents Of The University Of California filed Critical Regents Of The University Of California
Publication of WO2011071819A1 publication Critical patent/WO2011071819A1/fr
Priority to US13/487,831 priority Critical patent/US20130037712A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/248—Components associated with the control of the tube
    • H01J2237/2482—Optical means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2614—Holography or phase contrast, phase related imaging in general, e.g. phase plates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

L'invention concerne un système de plaque de phase optique et un procédé permettant de renforcer le contraste de phase dans l'imagerie par faisceau d'électrons, qui comprend un microscope électronique à transmission (TEM) dont le plan focal arrière comporte en son centre une cavité optique présentant un facteur de réflexion de surface interne élevé. La cavité optique comporte un premier port destiné à recevoir un faisceau d'électrons concentré sur le centre de la cavité optique, et un second port par lequel ledit faisceau sort. Un port optique se situant sur un axe transversal et coupant l'axe du faisceau d'électrons reçoit un faisceau laser provenant d'un laser couplé à la cavité optique. Le faisceau laser est réfléchi de multiples fois par le facteur de réflexion de surface interne élevé afin de former une plaque de phase optique d'onde stationnaire de haute intensité, concentrée sur le plan focal arrière. Un plan d'image du TEM se situant à l'opposé du second port reçoit le faisceau d'électrons modulé par la plaque de phase optique d'onde stationnaire de haute intensité.
PCT/US2010/059103 2009-12-07 2010-12-06 Plaque de phase de cavité optique pour microscopie électronique à transmission WO2011071819A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US13/487,831 US20130037712A1 (en) 2009-12-07 2012-06-04 Optical-cavity phase plate for transmission electron microscopy

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US26734809P 2009-12-07 2009-12-07
US61/267,348 2009-12-07

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US13/487,831 Continuation US20130037712A1 (en) 2009-12-07 2012-06-04 Optical-cavity phase plate for transmission electron microscopy

Publications (1)

Publication Number Publication Date
WO2011071819A1 true WO2011071819A1 (fr) 2011-06-16

Family

ID=44145871

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2010/059103 WO2011071819A1 (fr) 2009-12-07 2010-12-06 Plaque de phase de cavité optique pour microscopie électronique à transmission

Country Status (2)

Country Link
US (1) US20130037712A1 (fr)
WO (1) WO2011071819A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104766776A (zh) * 2014-01-07 2015-07-08 中国科学院物理研究所 多功能超快透射电子显微镜电子枪
US9129774B2 (en) 2013-04-25 2015-09-08 Fei Company Method of using a phase plate in a transmission electron microscope
US9460890B2 (en) 2013-11-19 2016-10-04 Fei Company Phase plate for a transmission electron microscope

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017170558A1 (fr) * 2016-03-30 2017-10-05 大学共同利用機関法人自然科学研究機構 Dispositif du type microscope électronique à transmission de contraste de phase
US10395888B2 (en) * 2017-03-30 2019-08-27 The Regents Of The University Of California Optical-cavity based ponderomotive phase plate for transmission electron microscopy
US11101101B2 (en) * 2019-05-15 2021-08-24 Fei Company Laser-based phase plate image contrast manipulation

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4802186A (en) * 1987-07-06 1989-01-31 Hughes Aircraft Company High reflectance laser resonator cavity
US20020148955A1 (en) * 2000-07-27 2002-10-17 Hill Henry A. Multiple-source arrays with optical transmission enhanced by resonant cavities
US6674078B2 (en) * 2001-09-25 2004-01-06 Jeol Ltd. Differential contrast transmission electron microscope and method of processing data about electron microscope images
US6775003B2 (en) * 2001-03-14 2004-08-10 Biacore Ab Apparatus and method for total internal reflection spectroscopy
US20060227842A1 (en) * 2005-04-11 2006-10-12 Ronald Lacomb Scalable spherical laser
US20070014392A1 (en) * 2005-06-02 2007-01-18 John Madey High Efficiency Monochromatic X-Ray Source Using An Optical Undulator
US20070284528A1 (en) * 2006-03-14 2007-12-13 Gerd Benner Phase contrast electron microscope
US20090166558A1 (en) * 2005-11-15 2009-07-02 Kuniaki Nagayama Phase Contrast Electron Microscope Device
US7623556B2 (en) * 2004-09-24 2009-11-24 Gabriele Ferrari Device for multiplying optical frequencies

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10105840C2 (de) * 2001-02-07 2002-12-05 Bundesrep Deutschland Verfahren zur Überprüfung des Regelungszustandes einer frequenzstabilisierten Laseranodnung und frequenzstabilisierte Laseranordnung

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4802186A (en) * 1987-07-06 1989-01-31 Hughes Aircraft Company High reflectance laser resonator cavity
US20020148955A1 (en) * 2000-07-27 2002-10-17 Hill Henry A. Multiple-source arrays with optical transmission enhanced by resonant cavities
US6775003B2 (en) * 2001-03-14 2004-08-10 Biacore Ab Apparatus and method for total internal reflection spectroscopy
US6674078B2 (en) * 2001-09-25 2004-01-06 Jeol Ltd. Differential contrast transmission electron microscope and method of processing data about electron microscope images
US7623556B2 (en) * 2004-09-24 2009-11-24 Gabriele Ferrari Device for multiplying optical frequencies
US20060227842A1 (en) * 2005-04-11 2006-10-12 Ronald Lacomb Scalable spherical laser
US20070014392A1 (en) * 2005-06-02 2007-01-18 John Madey High Efficiency Monochromatic X-Ray Source Using An Optical Undulator
US7382861B2 (en) * 2005-06-02 2008-06-03 John M. J. Madey High efficiency monochromatic X-ray source using an optical undulator
US20090166558A1 (en) * 2005-11-15 2009-07-02 Kuniaki Nagayama Phase Contrast Electron Microscope Device
US20070284528A1 (en) * 2006-03-14 2007-12-13 Gerd Benner Phase contrast electron microscope

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9129774B2 (en) 2013-04-25 2015-09-08 Fei Company Method of using a phase plate in a transmission electron microscope
US9460890B2 (en) 2013-11-19 2016-10-04 Fei Company Phase plate for a transmission electron microscope
CN104766776A (zh) * 2014-01-07 2015-07-08 中国科学院物理研究所 多功能超快透射电子显微镜电子枪
CN104766776B (zh) * 2014-01-07 2016-09-28 中国科学院物理研究所 多功能超快透射电子显微镜电子枪

Also Published As

Publication number Publication date
US20130037712A1 (en) 2013-02-14

Similar Documents

Publication Publication Date Title
US10395888B2 (en) Optical-cavity based ponderomotive phase plate for transmission electron microscopy
Mueller et al. Design of an electron microscope phase plate using a focused continuous-wave laser
US20130037712A1 (en) Optical-cavity phase plate for transmission electron microscopy
JP5802128B2 (ja) 四次元イメージング超高速電子顕微鏡
US20220319803A1 (en) Use of optical polarization states to control a ponderomotive phase plate
US9978559B2 (en) Method and device for time-resolved pump-probe electron microscopy
Mihaila et al. Transverse electron-beam shaping with light
Lamprianidis et al. Excitation of nonradiating magnetic anapole states with azimuthally polarized vector beams
Nabben et al. Attosecond electron microscopy of sub-cycle optical dynamics
Fang et al. Probing the orbital angular momentum of intense vortex pulses with strong-field ionization
CN114594075A (zh) 基于单自旋的量子钻石精密磁学测量系统
EP3699949B1 (fr) Microscope électronique interférométrique
Balykin et al. Atom nano-optics
Barannikov et al. Laboratory complex for the tests of the X-ray optics and coherence-related techniques
Liu et al. Development of in situ optical spectroscopy with high temporal resolution in an aberration-corrected transmission electron microscope
Schropp et al. Scanning coherent x-ray microscopy as a tool for XFEL nanobeam characterization
Guzzinati Exploring electron beam shaping in transmission electron microscopy
Makarov et al. Direct LiF imaging diagnostics on refractive X-ray focusing at the EuXFEL High Energy Density instrument
Brenny Probing light emission at the nanoscale with cathodoluminescence
Umamageswari et al. Focal properties of cylindrically polarized axisymmetric Bessel-modulated Gaussian beams by a high NA parabolic mirror
Norris A Comparison of Beam Induced Damage from Xenon and Gallium Focused Ion Beams
Fishman et al. Imaging the field inside nanophotonic devices
Schwartz et al. Continuous 40 GW/cm $^ 2$ laser intensity in a near-concentric optical cavity
Seymour-Smith Ion-trap cavity QED system for probabilistic entanglement
Saraswathi et al. Focusing properties of Azimuthally Polarized Lorentz Gauss Vortex Beam through a Dielectric Interface

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 10836481

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 10836481

Country of ref document: EP

Kind code of ref document: A1