WO2011064929A1

WO2011064929A1 - Vacuum drainage discharging device

Info

Publication number: WO2011064929A1
Application number: PCT/JP2010/005619
Authority: WO
Inventors: 勉幅田
Original assignee: 信越半導体株式会社
Priority date: 2009-11-27
Filing date: 2010-09-15
Publication date: 2011-06-03
Also published as: JP5493775B2; JP2011112176A

Abstract

Disclosed is a vacuum drainage discharging device connected to a vacuum pipe in vacuum equipment and collecting drainage from the vacuum pipe and discharging the same. The vacuum drainage discharging device at least includes a tank for storing the collected drainage and a compressed air supplying means for supplying compressed air to the tank, and is characterized in that the drainage stored in the tank is discharged by the compressed air supplied from the compressed air supplying means. It is thus possible to provide a vacuum drainage discharging device having an improved drainage discharging capability, which reduces the constraint on the pipe construction route and thereby facilitates the layout planning of the vacuum equipment.

Description

Vacuum drain discharge device

The present invention relates to a vacuum drain discharge device that collects and discharges drain generated in vacuum piping of vacuum equipment used in various manufacturing processes.

For example, in the manufacture of semiconductors, a large amount of liquid (drain) is entrained in the vacuum piping of a vacuum adsorption device when a semiconductor silicon wafer is transferred in a wet state, or in the vacuum pump piping when performing vacuum distillation. There are many cases.
Conventionally, in order to maintain the vacuum even when the drain is accompanied by the vacuum pump, a vacuum facility employing a water ring vacuum pump has been used. In this case, in order to prevent the liquid from accumulating in the vacuum pipe, it is necessary to always make the pipe downwardly inclined, and the construction route of the pipe has been limited.

Also, this water-sealed vacuum pump is a vacuum pump that can be operated stably even if there is a drain accompanying it. However, the power during operation is larger and the running cost is higher than other roots type dry pumps. Moreover, in order to obtain a high vacuum, it is necessary to supply cooling water with a low temperature, and installation of the incidental equipment is also expensive.

Thus, the vacuum equipment using the dry pump is more cost-effective, but in the vacuum equipment using the dry pump, if the drain accompanies the dry pump, the pump is broken and stable. Since it cannot be operated, it is necessary to discharge the generated drain to the outside of the system.

In vacuum equipment using this dry pump, a vacuum drain discharge device is connected to the vacuum equipment to collect and discharge the drain in order to discharge the generated drain out of the system.
For example, it has a drain collection tank that separates drain and gas sucked by a vacuum generation device such as a dry pump, and the drain collection tank collects a drain and a drain collection section that collects the drain. There is disclosed a vacuum suction device that includes a drain storage unit that stores drain, and in which the drain collection unit and the drain storage unit are partitioned by a separation plate (see Patent Document 1).

When installing such a vacuum suction device, separating the drain from the gas and storing it in the drain storage part, and discharging the stored drain, close the valve between the drain collection part and the drain storage part. By releasing the vacuum in the drain storage unit and switching to the atmospheric pressure, it is possible to prevent the drain from being accompanied by the dry pump without stopping the vacuum facility.

JP-A-9-26496

Similar to such a vacuum suction device, in the conventional general vacuum drain discharge device, when drain is discharged, the inside of the tank storing the drain is switched from vacuum to atmospheric pressure so that the drain flows downward by a natural gradient. By doing so, the discharge is performed. In other words, the discharge pipe to which the drain is discharged must be installed below the drain storage tank. For this reason, there is a problem that the route for constructing the piping is greatly restricted and the arrangement plan of the facilities becomes complicated. Moreover, since drain flows out downward by gravity, there also existed a problem that discharge efficiency was bad.

In addition, in order to automatically collect and discharge drain, the liquid level of drain is detected by an electrical position sensor, and the automatic valve is used to switch to atmospheric pressure for discharge. In order to perform the operation, an instrumentation facility for controlling the operation is also required, and there are problems such as an increase in cost and the inability to downsize the apparatus.

The present invention has been made in view of the above-described problems, and can improve the drain discharge capacity and reduce the restrictions on the construction route of piping, thereby making it possible to easily plan the layout of vacuum equipment. An object of the present invention is to provide a vacuum drain discharge device.

In order to achieve the above object, according to the present invention, there is provided a vacuum drain discharge device that is connected to a vacuum pipe in a vacuum facility, collects and discharges drain from the vacuum pipe, and stores at least the recovered drain. And a compressed air supply means for sending compressed air into the tank, and the drain stored in the tank is discharged by the compressed air from the compressed air supply means. A vacuum drain discharge device is provided.

Thus, at least the tank for storing the collected drain and the compressed air supply means for sending the compressed air into the tank are provided, and the drain stored in the tank is compressed from the compressed air supply means. If it is exhausted by air, the drain discharge capacity can be improved with a simple configuration, and the discharge pipe can be installed above the tank where the drain is stored, that is, the restriction on the construction route of the pipe can be reduced. Become. As a result, it is possible to easily plan the arrangement of vacuum equipment.

At this time, the drain pipe connected to the vacuum pipe and the tank, the drain is collected from the vacuum pipe and stored in the tank, the discharge pipe connected to the tank and discharging the stored drain, and the tank It is arranged on the vacuum flow path between the vacuum pipe and the tank for making the inside vacuum, and on the compressed air flow path between the compressed air supply means and the tank, and the connection flow path to the tank is supplied with the compressed air A flow path switching means for switching to the vacuum pipe or the vacuum pipe, and a liquid level detection means for detecting the liquid level of the drain stored in the tank, and the flow path switching according to the detected liquid level of the drain By switching the connection flow path to the tank by means, the recovery of the drain from the drain pipe and the discharge of the drain to the discharge pipe are switched. Door is preferable.

Thus, connected to the vacuum pipe and the tank, the drain pipe for collecting drain from the vacuum pipe and storing in the tank, the discharge pipe connecting to the tank and discharging the stored drain, It is arranged on the vacuum flow path between the vacuum pipe and the tank for making the inside of the tank in a vacuum state and on the compressed air flow path between the compressed air supply means and the tank, and the connection flow path to the tank A flow path switching means for switching between the supply means and the vacuum pipe; and a liquid level detection means for detecting the liquid level of the drain stored in the tank, and the flow path according to the detected liquid level of the drain. If the switching means switches the connection flow path to the tank to switch the recovery of the drain from the drain pipe and the discharge to the discharge pipe, The timing of the discharge of emissions easily and accurately be detected, and that the discharge of the drain recovery of drain to the discharge pipe from the drain pipe can easily switch it at the right time. Therefore, the operation of the vacuum drain discharge device can be easily performed.

Further, at this time, a switching detection flow path is further provided between the compressed air supply means and the flow path switching means, and the liquid level detection means can be moved up and down by the liquid level of the drain stored in the tank. And a mechanical valve that can be opened and closed by the vertical movement of the float and disposed on the switching detection flow path, and the flow path switching means is changed by opening and closing the mechanical valve. It is preferable that the air operation valve switches the connection flow path to the tank according to the pressure of the compressed air from the tank.

In this way, there is further provided a switching detection flow path between the compressed air supply means and the flow path switching means, and the liquid level detection means can be moved up and down by the liquid level of the drain stored in the tank. And a mechanical valve that can be opened and closed by the vertical movement of the float and disposed on the switching detection flow path, and the flow path switching means is changed by opening and closing the mechanical valve. If the air operation valve switches the connection flow path to the tank according to the pressure of the compressed air from the air, the cost is reduced because no electrical equipment or control panel is used. Moreover, it becomes a miniaturized vacuum drain discharge device, and the arrangement plan of the vacuum facility can be more easily performed.

At this time, the float and the mechanical valve may be provided in two pairs, and the two floats may be installed at different height positions.
Thus, if there are two pairs of the float and the mechanical valve, and the two floats are installed at different height positions, the drain liquid when using a tank with a high height is used. Therefore, a tank with a large drain storage capacity can be used.

Further, at this time, the drain pipe has a check valve for stopping the reverse flow from the tank to the vacuum pipe direction, and the discharge pipe has a check valve for stopping the reverse flow from the discharge pipe to the tank direction. It can be.
As described above, the drain pipe has a check valve for stopping the reverse flow from the tank to the vacuum pipe direction, and the discharge pipe has a check valve for stopping the reverse flow from the discharge pipe to the tank direction. Therefore, an on-off valve is provided on the drain pipe and the discharge pipe, and there is no need to operate the on-off valve in accordance with the switching between drain collection and discharge, and the operability is improved and safety is improved. Is also expensive.

Further, at this time, by automatically switching the connection flow path to the tank by the flow path switching means, it is possible to automatically switch the recovery of the drain from the drain pipe and the discharge to the discharge pipe. .
In this way, if the connection flow path to the tank by the flow path switching unit is automatically switched, the recovery of the drain from the drain pipe and the discharge to the discharge pipe are automatically switched. It becomes a vacuum drain discharger that can be automated.

In the present invention, the vacuum drain discharge device includes at least a tank for storing the recovered drain and compressed air supply means for sending the compressed air into the tank, and the drain stored in the tank is used as the compressed air. Since it is discharged by compressed air from the supply means, the drain discharge capacity can be improved with a simple configuration, and the discharge pipe can be installed above the tank in which the drain is stored. Can be reduced. As a result, it is possible to easily plan the arrangement of vacuum equipment and to reduce the cost.

It is the schematic which shows an example of the vacuum drain discharge device of this invention. It is the schematic which shows another example of the vacuum drain discharge apparatus of this invention. It is explanatory drawing explaining another example of the vacuum drain discharge device of the present invention at the time of drain collection and discharge. (A) A state where drain is collected. (B) A state in which drainage is discharged. It is the schematic which shows another example of the vacuum drain discharge apparatus of this invention. It is the schematic which shows an example of the liquid level detection means of the vacuum drain discharge device of this invention.

Hereinafter, although an embodiment is described about the present invention, the present invention is not limited to this.
In the conventional general vacuum drain discharge device, the collected drain is discharged by switching the inside of the tank storing the drain from vacuum to atmospheric pressure and flowing the drain downward with a natural gradient. That is, the discharge pipe to which the drain is discharged must be installed below the vacuum drain discharge device. For this reason, there is a problem that the route for constructing the piping is greatly restricted, and the arrangement plan of the facilities becomes complicated. Moreover, since drain flows out downward by gravity, there also existed a problem that discharge efficiency was bad.

Therefore, the present inventor has intensively studied to solve such problems. As a result, if the drain stored in the tank is pushed out by compressed air and discharged, the drain discharge capacity is improved, and the vacuum drain discharge device can be arranged without being restricted by the construction route of the discharge pipe. I came up with what I can do. And the best form for implementing this was examined and the present invention was completed.

The vacuum drain discharge device of the present invention is connected to a vacuum pipe in a vacuum facility used in a manufacturing process such as vacuum adsorption of a semiconductor wafer in a wet state or vacuum distillation, and drains generated during the manufacturing process. Is recovered from the vacuum piping and discharged.

FIG. 1 is a schematic view showing an example of a vacuum drain discharge device of the present invention.
As shown in FIG. 1, a vacuum drain discharge device 1 of the present invention includes a tank 3 for storing drain recovered from a vacuum pipe 12 in a vacuum facility 11, and compressed air supply means 2 for sending compressed air into the tank 3. have. The compressed air supply means 2 is arranged so as to be connected to the tank 3 through the compressed air flow path 10.

Here, the tank 3 can be made of, for example, vinyl chloride having excellent chemical resistance, and if a transparent one is used, the situation in the tank 3 can be visually observed. The invention is not particularly limited to these.
Moreover, the compressed air supply means 2 will not be specifically limited if compressed air is sent into the tank 3 with a predetermined pressure, For example, an air compressor etc. can be used.

Further, as shown in FIG. 1, a drain pipe 5 for collecting drain is connected to a vacuum pipe 12. This drain pipe 5 can be connected by making a hole at an arbitrary position on the vacuum pipe 12. The other end of the drain pipe 5 is connected to the tank 3.
In this case, when collecting the drain from the vacuum pipe 12, the inside of the tank 3 is sucked through the drain pipe 5, and the inside of the tank 3 is in a vacuum state. Here, the drain pipe 5 and the tank 3 are arranged below the vacuum pipe 12. By arranging in this way, the drain can be collected from the vacuum pipe 12 by the natural pipe with the natural gradient and stored in the tank 3.

The tank 3 is connected to a discharge pipe 6 for discharging the stored drain 4. The arrangement location of the discharge pipe 6 is not particularly limited, and may be arranged below the tank 3 in which the drain 4 is stored or may be arranged above. Further, a check valve 17 can be provided to stop the backflow from the discharge pipe 6 toward the tank.
When discharging the drain 4 stored in the tank 3, for example, by closing the on-off valve 21 installed in the drain pipe 5 to shut off the vacuum pipe 12 and the tank 3, the compressed air flow After opening the on-off valve 22 installed in the passage 10, compressed air is sent into the tank 3 from the compressed air supply means 2, and the drain 4 in the tank 3 is pushed out by the sent compressed air, and the discharge pipe 6. To be discharged.

With such a vacuum drain discharge device 1, a large amount of drain 4 can be discharged when drain 4 stored in the tank 3 is discharged. Capability can be greatly improved. Moreover, since it is a pressure drainage, it is not necessary to make the discharge pipe 6 into a downward slope, and as described above, the discharge pipe 6 may be installed above the vacuum drain discharge device 1 including the tank 3 or the vacuum pipe 12. In other words, the restriction on the construction route of piping can be reduced. As a result, it is possible to reduce restrictions on installation locations of production equipment used in manufacturing processes that require vacuum, vacuum generators such as vacuum pipes and dry pumps, and the arrangement planning of these vacuum equipments can be easily performed. Moreover, such a vacuum drain discharge device 1 can be easily configured.

Here, the pressure of the compressed air sent from the compressed air supply means 2 is not particularly limited, and may be appropriately determined depending on, for example, the installation location of the discharge pipe 6, the size and pressure resistance of the tank 3, or the amount of drain 4 to be discharged. For example, it can be about 0.2 MPa.

FIG. 2 shows a schematic diagram of another example of the vacuum drain discharge device of the present invention. As shown in FIG. 2, the vacuum drain discharge device 31 is provided with a vacuum pipe 12 for making the inside of the tank 3 in a vacuum state when the drain 4 is recovered and a vacuum flow path 9 between the tank 3 separately from the drain pipe 5. Can do. Then, on this vacuum flow path 9 and on the compressed air flow path 10 between the compressed air supply means 2 and the tank 3, the flow path switching for switching the connection flow path to the tank 3 to the compressed air supply means 2 or the vacuum pipe 12. Means 7 can be provided.

By switching the connection flow path to the tank 3 to the compressed air supply means 2 or the vacuum pipe 12 by the flow path switching means 7, the drain recovery from the drain pipe 5 and the drain discharge to the discharge pipe 6 are switched. Can do. That is, when the connection flow path to the tank 3 is switched to the vacuum pipe 12, the compressed air from the compressed air supply means 2 is not supplied into the tank 3, and the tank is passed through the vacuum flow path 9 between the vacuum pipe 12 and the tank 3. The inside of the tank 3 is sucked, the inside of the tank 3 is brought into a vacuum state, and the drain is collected from the vacuum pipe 12 through the drain pipe 5 and stored in the tank 3.

On the other hand, when the connection flow path to the tank 3 is switched to the compressed air supply means 2, the vacuum flow path 9 is shut off and suction in the tank 3 is not performed, and the tank is passed from the compressed air supply means 2 through the compressed air flow path 10. Compressed air is sent into 3 and the drain 4 is discharged from the discharge pipe 6.
Here, the drain pipe 5 is provided with a check valve 16 for stopping the reverse flow from the tank 3 toward the vacuum pipe 12 and a check valve 17 for stopping the reverse flow from the discharge pipe 6 toward the tank 3. It is possible to easily operate the vacuum drain discharge device without providing an open / close valve on 5 and the discharge pipe 6 to operate the open / close valve in accordance with the switching between drain recovery and discharge.

In addition, as shown in FIG. 2, a liquid level detecting means 8 for detecting the liquid level of the drain 4 stored in the tank 3 can be provided in the vacuum drain discharge device 31. Furthermore, according to the drain liquid level detected by the liquid level detection means 8, the flow path switching means 7 can switch the connection flow path to the tank 3.
Thus, in addition to the vacuum drain discharge device 1 shown in FIG. 1, the vacuum flow path 9, the flow path switching means 7, and the liquid level detection means 8 are provided, and according to the drain liquid level detected by the liquid level detection means 8. If the drain switching from the drain pipe 5 and the drain discharging to the discharge pipe 6 are switched by switching the connection flow path to the tank 3 by the flow path switching means 7, the drain discharge timing is accurate. In addition, it can be easily detected, and drain recovery and discharge can be easily switched at an appropriate timing. Therefore, it becomes a vacuum drain discharge device with improved operability. Moreover, if it is such a structure, the response | compatibility to an automatic driving | operation can be performed easily.

At this time, a switching detection flow path 13 can be provided between the compressed air supply means 2 and the flow path switching means 7 as shown in FIGS. The compressed air can be sent from the compressed air supply means 2 to the flow path switching means 7 through the switching detection flow path 13.
As shown in FIGS. 3A and 3B, the liquid level detection means 8 is, for example, a float 14 that can be moved up and down by the liquid level of the drain stored in the tank 3, and the vertical movement of the float 14. Can be opened and closed, and can be configured with a mechanical valve 15 disposed on the switching detection flow path 13.

In such a liquid level detection means 8, the float 14 rises as the amount of stored drain increases and the liquid level rises. When the liquid level rises, that is, when the float 14 rises to a predetermined position, the mechanical valve 15 When the mechanical valve 15 is opened, the compressed air from the compressed air supply means 2 is sent to the flow path switching means 7 through the switching detection flow path 13, and it is detected that a predetermined amount of drain has been stored. Can be done. Further, when the stored drain 4 is discharged and the liquid level is lowered, the float 14 is lowered. When the float 14 is lowered to a predetermined position, the mechanical valve 15 is closed and the compressed air supply means 2 to the flow path switching means 7. It is possible to detect that the drainage has been completed by stopping the supply of compressed air.

The flow path switching means 7 can be an air operation valve that switches the flow path to the tank 3 in accordance with the pressure of the compressed air from the switching detection flow path 13 that changes as the mechanical valve 15 opens and closes. This air operation valve has a plurality of ports, and in the example of the air operation valve shown in FIGS. 3A and 3B, it has four ports. Here, the pressure of the compressed air sent from the compressed air supply means 2 to the air operation valve may be appropriately determined according to the specifications of the air operation valve to be used.

With such a configuration, the drain can be collected from the vacuum pipe 12 and discharged to the discharge pipe 6 without using an electrical device or control panel, and the cost can be further reduced. . Moreover, it can be set as the vacuum drain discharge device reduced in size. In the vacuum drain discharge device of the present invention, although it is necessary to install the drain pipe 5 and the tank 3 below the vacuum pipe 12, the restrictions on the construction route of the discharge pipe 6 can be reduced. There is no major restriction, and further, if it is downsized in this way, the layout planning of the vacuum equipment can be performed more easily. As a result, the vacuum equipment in the entire factory can be centralized.

FIG. 4 shows a schematic diagram of another example of the vacuum drain discharge device of the present invention. As shown in FIG. 4, the vacuum drain discharge device 41 has two pairs of floats 14a and 14b and mechanical valves 15a and 15b, and the two floats 14a and 14b are installed at different height positions. It can be. In this case, two switching detection flow paths 13a and 13b are also provided. Then, the mechanical valve 15a side paired with the float 14a installed at a low position is opened in a state where the float 14a is lowered to a predetermined position (see FIG. 5A), and the mechanical valve 15a is opened so that the switching detection flow When compressed air from the compressed air supply means 2 is sent to the flow path switching means 7 through the path 13a, the flow path switching means 7 switches the connection flow path to the tank 3 to the vacuum pipe 12.

On the other hand, the mechanical valve 15b paired with the float 14b installed at a high position is opened in a state where the float 14b is raised to a predetermined position (see FIG. 5B), and the mechanical valve 15b is opened so that the switching detection flow When the compressed air from the compressed air supply means 2 is sent to the flow path switching means 7 through the path 13b, the flow path switching means 7 switches the connection flow path to the tank 3 to the compressed air supply means 2.

Thus, if there are two pairs of the floats 14a and 14b and the mechanical valves 15a and 15b and the two floats 14a and 14b are installed at different height positions, the float installed at a low position is used. When the mechanical valve 15a paired with 14a is opened, the flow path switching means 7 switches the connection flow path to the tank 3 to the vacuum pipe 12, collects drain, and pairs with the float 14b installed at a high position. When the mechanical valve 15b is opened, the flow switching means 7 switches the connection flow path to the tank 3 to the compressed air supply means 2 so as to discharge the drain, so that the tank 3 having a higher height, that is, more It is possible to cope with the detection of the liquid level when the tank 3 having a large capacity capable of storing a large amount of drain is used. Of course, it is possible to increase the capacity of the tank by increasing the number of float / mechanical valve pairs to three or more.

Here, as shown in FIG. 4, a quick exhaust valve 20 for exhausting the compressed air in the switching detection flow paths 13a and 13b after the mechanical valves 15a and 15b are closed is provided on the switching detection flow paths 13a and 13b. be able to. The quick exhaust valve 20 has three ports, a port connected to the mechanical valves 15a and 15b, a port connected to the flow path switching means 7, and a port for discharging compressed air to the outside. When the pressure of the port connected to the mechanical valve becomes lower than the pressure of the port connected to the flow path switching means 7, the compressed air in the switching detection flow paths 13a and 13b can be discharged to the outside. Is.

Further, at this time, if the connection flow path to the tank 3 by the flow path switching means 7 is automatically switched to automatically switch the recovery of the drain from the drain pipe 5 and the discharge to the discharge pipe 6, it is fully automated. It becomes a possible vacuum drain discharge device, and the operability can be further improved. This switching automation can be mechanically performed using a mechanical valve and an air operation valve as in this embodiment. Of course, automatic switching may be performed using an electromagnetic valve or the like and using an electrical control circuit.

A method for recovering and discharging the drain using the vacuum drain discharge device of the present invention will be described below with reference to FIGS. FIG. 3A is a diagram showing a state where the drain is collected from the vacuum pipe 12, and FIG. 3B is a diagram showing a state where the stored drain 4 is discharged to the discharge pipe 6.
As shown in FIG. 3A, first, in a state where no drain is stored in the tank 3, the float 14 is in a lowered state, and the mechanical valve 15 is closed. In this state, the compressed air from the compressed air supply means 2 does not reach the flow path switching means 7, and the flow path switching means 7 connects the connection flow path to the tank 3 to the vacuum pipe 12. Therefore, while the backflow from the discharge pipe 6 is stopped by the check valve 17, the inside of the tank 3 is sucked through the vacuum flow path 9 to be in a vacuum state, and the drain is collected from the vacuum pipe 12 through the drain pipe 5. The drain is stored in the tank 3.

Then, the liquid level of the drain 4 in the tank 3 rises and the float 14 also rises. As shown in FIG. 3B, when the float 14 rises to a predetermined position, the mechanical valve 15 opens, and the switching detection flow path 13. Compressed air from the compressed air supply means 2 is sent to the flow path switching means 7, and the flow path switching means 7 switches the connection flow path to the tank 3 to the compressed air supply means 2. Therefore, the suction in the tank 3 through the vacuum channel 9 is shut off, and the backflow from the tank 3 is stopped by the check valve 16, while the compressed air from the compressed air supply means 2 is sent into the tank 3 and sent. The drain 4 is pushed out by the compressed air and discharged to the discharge pipe 6.

When the drain is discharged in this way and the liquid level is lowered, the float 14 is lowered to a predetermined position, the mechanical valve 15 is closed, and the state shown in FIG. By repeating these steps, it is possible to mechanically and automatically collect and discharge the drain efficiently without using an expensive and complicated control circuit.

Here, as shown in FIGS. 3A and 3B, the pressure of the compressed air supplied to the compressed air flow path 10 from the compressed air supply means 2 or the switching detection flow path 13 is adjusted and stabilized. For this purpose, a pressure reducing valve 18 or a regulator may be provided. For example, as shown in FIGS. 3 and 4, by providing a pressure reducing valve 18 on the compressed air flow path 10, the pressure of the compressed air sent to the air operation valve 7 and the pressure of the compressed air sent to the tank 3 can be changed. The pressure of the compressed air can be adjusted as appropriate according to the air operation valve 7 and the tank 3. Here, for example, the pressure of the compressed air sent to the air operation valve 7 can be about 0.5 MPa, and the pressure of the compressed air sent to the tank 3 can be about 0.2 MPa. Moreover, what has the filter function which removes the oil component in a compressed air, a water | moisture content, dust, etc. can also be used. Further, as shown in FIGS. 3A and 3B, a speed controller 19 for adjusting the flow rate of the compressed air flowing on the flow path may be provided.

Hereinafter, the present invention will be described more specifically with reference to Examples and Comparative Examples of the present invention, but the present invention is not limited to these.

(Example)
Drain was collected and discharged using the vacuum drain discharge device of the present invention having two pairs of floats and mechanical valves as shown in FIG. Here, the discharge pipe finally discharged drain above the vacuum drain discharge device, the pressure of the compressed air sent to the air operation valve was 0.5 MPa, and the pressure of the compressed air sent to the tank was 0.2 MPa. And the collection | recovery and discharge | emission of drain were made into one cycle, the cycle was repeated mechanically automatically, and the discharge | emission amount of the drain was measured.
As a result, the drain could be discharged to a pipe installed above the vacuum drain discharge device. The discharge amount per hour was 96.6 L / hour (2.8 L / cycle × 34.5 cycles / hour). Moreover, there was no pressure fluctuation in the vacuum piping, and the drain could be collected and discharged.
On the other hand, in the comparative example which will be described later, the drain could not be discharged at all to the pipe installed above the vacuum drain discharge device.

As described above, the vacuum drain discharge device of the present invention can improve the drain discharge capacity with a simple configuration, and the discharge pipe can be installed above the tank in which the drain is stored, that is, the restriction of the pipe construction route is reduced. I was able to confirm that it was possible.

(Comparative example)
Drain was collected and discharged using a conventional vacuum drain discharge device that does not have the compressed air supply means of the present invention and discharges the drain with a natural gradient.
As a result, the discharge amount per hour was 15 L / hour, the efficiency was poor, and the discharge pipe was often clogged with drainage. Moreover, in the comparative example, the discharge pipe cannot be installed above the vacuum drain discharge device as in the embodiment, and if it is installed above the vacuum drain discharge device, no drain can be discharged to the discharge pipe. .

The present invention is not limited to the above embodiment. The above-described embodiment is an exemplification, and the present invention has any configuration that has substantially the same configuration as the technical idea described in the claims of the present invention and that exhibits the same effects. Are included in the technical scope.

Claims

A vacuum drain discharge device that is connected to a vacuum pipe in a vacuum facility and collects and discharges drain from the vacuum pipe, and at least a tank that stores the collected drain, and compressed air that sends compressed air into the tank A vacuum drain discharge device characterized by having a supply means for discharging the drain stored in the tank by the compressed air from the compressed air supply means.
A drain pipe connected to the vacuum pipe and the tank, collecting drain from the vacuum pipe and storing it in the tank, a discharge pipe connecting to the tank and discharging the stored drain, and a vacuum in the tank Arranged on the vacuum flow path between the vacuum pipe and the tank for making a state and on the compressed air flow path between the compressed air supply means and the tank, and the connection flow path to the tank is the compressed air supply means or the A flow path switching means for switching to a vacuum pipe; and a liquid level detection means for detecting the liquid level of the drain stored in the tank, and according to the detected drain liquid level, the flow path switching means By switching the connection flow path to the tank, the drain recovery from the drain pipe and the drain discharge to the discharge pipe are switched. Vacuum drainage system according to claim 1 that.
Further, there is a switching detection flow path between the compressed air supply means and the flow path switching means, the liquid level detection means is a float that can be moved up and down by the liquid level of the drain stored in the tank, The mechanical valve disposed on the switching detection flow path can be opened and closed by the vertical movement of the float, and the flow path switching means includes compressed air from the switching detection flow path that changes by opening and closing of the mechanical valve. The vacuum drain discharge device according to claim 1, wherein the vacuum drain discharge device is an air operation valve that switches a connection flow path to the tank according to the pressure of the tank.
4. The vacuum drain discharge device according to claim 3, wherein the float and the mechanical valve have two pairs, and the two floats are installed at different height positions.
The drain pipe has a check valve for stopping the back flow from the tank to the vacuum pipe direction, and the discharge pipe has a check valve for stopping the back flow from the discharge pipe to the tank direction. The vacuum drain discharge device according to any one of claims 2 to 4, wherein the vacuum drain discharge device is characterized.
The automatic switching of the connection flow path to the tank by the flow path switching means automatically switches the recovery of the drain from the drain pipe and the discharge to the discharge pipe. The vacuum drain discharge device according to any one of claims 2 to 5.