WO2011009668A1 - Piézoactionneur avec structure à couches multiples et son procédé de fabrication - Google Patents

Piézoactionneur avec structure à couches multiples et son procédé de fabrication Download PDF

Info

Publication number
WO2011009668A1
WO2011009668A1 PCT/EP2010/057606 EP2010057606W WO2011009668A1 WO 2011009668 A1 WO2011009668 A1 WO 2011009668A1 EP 2010057606 W EP2010057606 W EP 2010057606W WO 2011009668 A1 WO2011009668 A1 WO 2011009668A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezoelectric actuator
gates
polarity
piezoelectric
electrodes
Prior art date
Application number
PCT/EP2010/057606
Other languages
German (de)
English (en)
Inventor
Peter Cromme
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Publication of WO2011009668A1 publication Critical patent/WO2011009668A1/fr

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/508—Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/085—Shaping or machining of piezoelectric or electrostrictive bodies by machining
    • H10N30/088—Shaping or machining of piezoelectric or electrostrictive bodies by machining by cutting or dicing

Definitions

  • the invention relates to a piezoelectric actuator with a multilayer structure of piezoelectric layers and an alternating internal electrode design and a method for its production according to the generic features of the main claim and the independent method claim.
  • a piezoelectric actuator is known for example from DE 102 36 986 A1, which can be used for actuating a mechanical component in fuel injection systems in motor vehicles.
  • a multilayer structure of piezoelectric layers can be arranged in each case of a material having a suitable crystal structure so that when a voltage is applied, a mechanical reaction of the piezoelectric layer takes place, which depends on the crystal structure and the contact areas of electrical voltage represents a pressure, or a mechanical elongation in a predetermined direction.
  • the multi-layer structure has an alternating (interdigital) internal electrode design, in which each piezoceramic layer is bordered between two internal electrodes, via which an electrical voltage can be applied and thus each forms a piezoelectric element. Due to the electrical voltage, the piezoelectric elements each perform small strokes in the direction of the potential gradient, which add up to the total stroke of the piezoelectric actuator.
  • the internal electrodes are mutually connected to external electrodes for supplying the electrical voltage, wherein the internal electrodes, which are contacted with the positive electrical pole via the external electrode, are separated from the negative pole of the external electrodes by a so-called isolation zone. Another isolate onszone then separates the internal electrodes, which are connected to the negative pole, from the positive pole of the external electrodes.
  • Both isolation zones form a relatively rigid corset, which mechanically impedes the piezoelectric actuator during its stroke movement. Consequently, the electrical poling of the piezoactuator may lead to the formation of so-called polarity cracks. These poling cracks tend to crack through the isolation zone, potentially reducing the clamping effect of the multilayer structure. If no further measures are provided to control such poling cracks, the poling cracks may statistically be distributed in the piezoactuator, possibly with an uncontrolled crack course over the entire length of the piezoactuator. The uncontrolled crack growth often causes branching poling cracks, which can severely reduce the insulation between two internal electrodes. The probability of electrical failure of the piezoelectric actuator during operation thus increases considerably, wherein the branching poling cracks can also represent a rejection criterion in the production.
  • the invention is based on a piezoelectric actuator with a multi-layer structure of piezo layers, which are each enclosed between internal electrodes of alternating polarity.
  • the internal electrodes are acted upon by external electrodes, each having a different polarity of an electrical voltage, in that in each case one external electrode is in each case in contact with the internal electrodes of one polarity and differs from the internal electrodes.
  • electrodes of the other polarity are each separated by means of an isolation zone.
  • a parallel to the extension direction of the piezoelectric layers extending gate is present in at least one isolation zone in an advantageous manner.
  • the gates according to the invention are preferably located below a base metallization and the overlying outer electrode, so that it is possible with the invention advantageously to introduce predetermined breaking points for poling cracks in the piezoelectric actuator with a suitable mechanical removal method, without resulting disadvantages in the subsequent process steps of Production of the piezoelectric actuator revealed. It is particularly advantageous if the gates are distributed over the entire multi-layer structure.
  • a particularly advantageous method for producing the piezoactuator described above thus results if the gates are introduced during the process steps in the production after grinding and before applying a base metallization on the side surfaces of the piezoelectric actuator.
  • the strength of brittle materials which includes the piezoceramic of the piezoelectric layers, depends essentially on the condition of the surface. Damage to the surface, such. As cracks, reduce the strength of the piezoceramic drastically.
  • the surface of the piezoceramic can be weakened, for example, at the points where polarity cracks should form, targeted by a cut of the isolation zone. In order to sufficiently weaken the piezoceramic, even small cutting depths (for example 100 to 200 ⁇ m) are sufficient.
  • Figure 1 is a schematic representation of a known piezoelectric actuator with inner and outer electrodes.
  • FIG. 2 shows a detailed illustration of two inner electrodes and isolation zones to outer electrodes.
  • FIG 3 shows a view of a piezoelectric actuator with gates according to the invention in the isolation zones.
  • a piezoelectric actuator 1 shown schematically in FIG. 1 comprises a plurality of piezoelectric elements stacked one above the other as a multi-layer structure, each of which consists of piezo-layers 3 made of piezoceramic and internal electrodes 4 and 5 enclosing them.
  • the piezoelectric actuator 1 may be, for example, part of a piezo injector for controlling the fuel injection in an internal combustion engine.
  • the internal electrodes 4 and 5 of the piezoelectric elements are connected to external electrodes 6 and 7 mutually to a voltage source 8, so that taking advantage of the piezoelectric effect when the voltage is applied to the respective internal electrodes 4 and 5 via the intermediate piezoelectric layers 3, a mechanical reaction of the piezoelectric actuator 1 in the stacking direction of the multilayer structure can be effected.
  • the respective inner electrode 5 is connected to the positive outer electrode 7 and is separated from the minus outer electrode 6 by means of an insulation zone 10 of the piezoelectric layer which is not completely visible here and not printed with an inner electrode layer.
  • the respective inner electrode 6 is connected to the minus outer electrode 6 and also separated from the plus outer electrode 7 by means of an insulation zone 1 1 not printed with an inner electrode layer.
  • FIG. 3 shows how, in the case of a piezoactuator 12 according to the invention, the piezolayers visible in dashed lines in the isolation zones 11 (see FIG. 13 are provided, which are mounted under a base metallization and the outer electrodes 6 or 7.
  • the sections 13 according to FIG. 3 form predetermined breaking points for poling cracks in the piezoelectric actuator 12 and are introduced by means of a suitable removal method. This can preferably be carried out after grinding and before applying the base metallization on the side surfaces of the piezoelectric actuator 12.
  • the removal method used is in particular laser beam cutting, precision cutting methods, such as e.g.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Fuel-Injection Apparatus (AREA)

Abstract

L'invention concerne un piézoactionneur avec une structure à couches multiples faite de couches piézoélectriques qui sont placées entre des électrodes intérieures (4, 5) de polarité alternée. Chacune des électrodes intérieures, par l'intermédiaire d'électrodes extérieures (6, 7) est soumise à une polarité différente d'une tension électrique qui est amenée par une électrode extérieure (6, 7) qui est contactée avec les électrodes intérieures (4, 5) d'une certaine polarité et qui est isolée des électrodes intérieures (4, 5) de l'autre polarité par une zone d'isolation. Dans au moins l'une des zones d'isolation (10, 11) se trouve une entaille (13) orientée parallèlement à la direction d'extension des couches piézoélectriques.
PCT/EP2010/057606 2009-07-24 2010-06-01 Piézoactionneur avec structure à couches multiples et son procédé de fabrication WO2011009668A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009027986A DE102009027986A1 (de) 2009-07-24 2009-07-24 Piezoaktor mit einem Mehrlagenaufbau und ein Verfahren zu dessen Herstellung
DE102009027986.5 2009-07-24

Publications (1)

Publication Number Publication Date
WO2011009668A1 true WO2011009668A1 (fr) 2011-01-27

Family

ID=42357283

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2010/057606 WO2011009668A1 (fr) 2009-07-24 2010-06-01 Piézoactionneur avec structure à couches multiples et son procédé de fabrication

Country Status (2)

Country Link
DE (1) DE102009027986A1 (fr)
WO (1) WO2011009668A1 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004288794A (ja) * 2003-03-20 2004-10-14 Nec Tokin Corp 積層型圧電素子およびその製造方法
DE102008042232A1 (de) * 2007-09-21 2009-04-16 Denso Corp., Kariya-shi Laminiertes piezoelektrisches Element und Verfahren, dieses herzustellen
DE102008043651A1 (de) * 2007-11-12 2009-06-10 Denso Corp., Kariya-shi Piezoelektrisches Schichtelement

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10236986A1 (de) 2002-08-13 2004-02-26 Robert Bosch Gmbh Piezoaktor
DE102006031085A1 (de) 2006-03-16 2007-09-20 Epcos Ag Elektrisches Vielschichtbauelement

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004288794A (ja) * 2003-03-20 2004-10-14 Nec Tokin Corp 積層型圧電素子およびその製造方法
DE102008042232A1 (de) * 2007-09-21 2009-04-16 Denso Corp., Kariya-shi Laminiertes piezoelektrisches Element und Verfahren, dieses herzustellen
DE102008043651A1 (de) * 2007-11-12 2009-06-10 Denso Corp., Kariya-shi Piezoelektrisches Schichtelement

Also Published As

Publication number Publication date
DE102009027986A1 (de) 2011-01-27

Similar Documents

Publication Publication Date Title
EP1908131B1 (fr) Procede de fabrication d'un actionneur piezoelectrique monolithique a sections d'empilement, actionneur piezoelectrique monolithique a sections d'empilement et utilisation dudit actionneur piezoelectrique
EP2146815B1 (fr) Scie à fil et procédé de fabrication d'une scie à fil
EP2130240B1 (fr) Procédé et système pour séparer un bloc de composants en plusieurs composants céramiques
DE102009043220A1 (de) Piezoelektrisches Bauelement
EP2132796B1 (fr) Composant piézoélectrique présentant une couche de sécurité et son procédé de réalisation
EP2140508B1 (fr) Composant piézoélectrique comportant une couche de sécurité et une barrière d'infiltration, et son procédé de production
EP2622660A1 (fr) Composant piézoélectrique multicouche et procédé de fabrication dudit composant piézoélectrique multicouche
DE102006001656A1 (de) Piezoaktor und Verfahren zur Herstellung desselben
DE102005052686A1 (de) Piezoaktor und Verfahren zur Herstellung desselben
DE102007037554A1 (de) Piezoelektrischer Aktor
WO2011009668A1 (fr) Piézoactionneur avec structure à couches multiples et son procédé de fabrication
DE102005021275B4 (de) Verfahren zum Vermeiden einer Längsrissbildung eines piezoelektrischen oder elektrostriktiven Bauteils
DE102005023370A1 (de) Piezoelektrischer oder elektrostriktiver Stack mit erhöhter Lebensdauer
EP2798679B1 (fr) Pile piézo-électrique avec passivation et procédé de passivation d'une pile piézo-électrique
EP2149922B1 (fr) Piézoactionneur doté de zones passives à la tête et/ou au pied
DE102006046217B3 (de) Verfahren und Vorrichtung zur Herstellung von Keramikstapeln mit vieleckigem Querschnitt
EP1235284B1 (fr) Plaque piézocéramique et sa méthode de fabrication
DE102011109008A1 (de) Verfahren zur Herstellung eines piezoelektrischen Vielschichtbauelements
EP2348554B1 (fr) Procédé de fabrication d'un piézoactionneur doté d'une structure en plusieurs couches
EP1503435A2 (fr) Actionneur piézo-électrique et sa méthode de fabrication
EP2071645B1 (fr) Module piézoactionneur doté d'une construction multicouches de piézoactionneurs
EP2249409A2 (fr) Piézo-céramique pour actionneurs
EP2318687B1 (fr) Actionneur piézoélectrique
WO2017028985A1 (fr) Composant piézoélectrique
DE102008040772A1 (de) Piezoaktor mit passiven Bereichen am Kopf und/oder am Fuß

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 10721168

Country of ref document: EP

Kind code of ref document: A1

122 Ep: pct application non-entry in european phase

Ref document number: 10721168

Country of ref document: EP

Kind code of ref document: A1