WO2010141455A1 - Metal barrier-doped metal contact layer - Google Patents
Metal barrier-doped metal contact layer Download PDFInfo
- Publication number
- WO2010141455A1 WO2010141455A1 PCT/US2010/036883 US2010036883W WO2010141455A1 WO 2010141455 A1 WO2010141455 A1 WO 2010141455A1 US 2010036883 W US2010036883 W US 2010036883W WO 2010141455 A1 WO2010141455 A1 WO 2010141455A1
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- WO
- WIPO (PCT)
- Prior art keywords
- layer
- photovoltaic device
- doped
- metal
- photovoltaic
- Prior art date
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- 229910052751 metal Inorganic materials 0.000 title claims abstract description 127
- 239000002184 metal Substances 0.000 title claims abstract description 127
- 239000004065 semiconductor Substances 0.000 claims abstract description 55
- 239000000463 material Substances 0.000 claims abstract description 39
- 239000006096 absorbing agent Substances 0.000 claims abstract description 25
- 239000002019 doping agent Substances 0.000 claims abstract description 25
- 238000000034 method Methods 0.000 claims description 41
- 238000000151 deposition Methods 0.000 claims description 34
- 239000000758 substrate Substances 0.000 claims description 23
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 22
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical group [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 22
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 22
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 22
- 229910052750 molybdenum Inorganic materials 0.000 claims description 21
- 239000011733 molybdenum Substances 0.000 claims description 21
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 20
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 20
- 239000011888 foil Substances 0.000 claims description 17
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 16
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 16
- 229910052737 gold Inorganic materials 0.000 claims description 16
- 239000010931 gold Substances 0.000 claims description 16
- 229910052709 silver Inorganic materials 0.000 claims description 16
- 239000004332 silver Substances 0.000 claims description 16
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 15
- 230000004888 barrier function Effects 0.000 claims description 15
- 229910052804 chromium Inorganic materials 0.000 claims description 15
- 239000011651 chromium Substances 0.000 claims description 15
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 14
- 229910052793 cadmium Inorganic materials 0.000 claims description 14
- 229910052802 copper Inorganic materials 0.000 claims description 14
- 239000010949 copper Substances 0.000 claims description 14
- 238000004544 sputter deposition Methods 0.000 claims description 13
- 229910052782 aluminium Inorganic materials 0.000 claims description 12
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 11
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 11
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 11
- 229910017052 cobalt Inorganic materials 0.000 claims description 11
- 239000010941 cobalt Substances 0.000 claims description 11
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 11
- 239000011521 glass Substances 0.000 claims description 11
- 229910052742 iron Inorganic materials 0.000 claims description 11
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims description 11
- 229910052759 nickel Inorganic materials 0.000 claims description 11
- 229910052697 platinum Inorganic materials 0.000 claims description 11
- 229910052707 ruthenium Inorganic materials 0.000 claims description 11
- 239000010936 titanium Substances 0.000 claims description 11
- 229910052719 titanium Inorganic materials 0.000 claims description 11
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 11
- 229910052721 tungsten Inorganic materials 0.000 claims description 11
- 239000010937 tungsten Substances 0.000 claims description 11
- 229910052720 vanadium Inorganic materials 0.000 claims description 11
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims description 11
- 229910052725 zinc Inorganic materials 0.000 claims description 11
- 239000011701 zinc Substances 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 10
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 10
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 10
- 229910001887 tin oxide Inorganic materials 0.000 claims description 10
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims description 8
- 229910052708 sodium Inorganic materials 0.000 claims description 8
- 239000011734 sodium Substances 0.000 claims description 8
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
- GPBUGPUPKAGMDK-UHFFFAOYSA-N azanylidynemolybdenum Chemical compound [Mo]#N GPBUGPUPKAGMDK-UHFFFAOYSA-N 0.000 claims description 6
- 229910052980 cadmium sulfide Inorganic materials 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 claims description 5
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims description 5
- 229910052787 antimony Inorganic materials 0.000 claims description 5
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims description 5
- 229910052785 arsenic Inorganic materials 0.000 claims description 5
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 5
- 229910052797 bismuth Inorganic materials 0.000 claims description 5
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims description 5
- 229910052792 caesium Inorganic materials 0.000 claims description 5
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 claims description 5
- 230000005611 electricity Effects 0.000 claims description 5
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 claims description 5
- PNHVEGMHOXTHMW-UHFFFAOYSA-N magnesium;zinc;oxygen(2-) Chemical compound [O-2].[O-2].[Mg+2].[Zn+2] PNHVEGMHOXTHMW-UHFFFAOYSA-N 0.000 claims description 5
- KYKLWYKWCAYAJY-UHFFFAOYSA-N oxotin;zinc Chemical group [Zn].[Sn]=O KYKLWYKWCAYAJY-UHFFFAOYSA-N 0.000 claims description 5
- 229910052700 potassium Inorganic materials 0.000 claims description 5
- 239000011591 potassium Substances 0.000 claims description 5
- 239000005361 soda-lime glass Substances 0.000 claims description 5
- 229940071182 stannate Drugs 0.000 claims description 5
- 239000011787 zinc oxide Substances 0.000 claims description 5
- 239000000853 adhesive Substances 0.000 claims description 4
- 230000001070 adhesive effect Effects 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 238000000137 annealing Methods 0.000 claims description 2
- 150000004767 nitrides Chemical class 0.000 claims description 2
- 238000005477 sputtering target Methods 0.000 description 11
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 9
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 8
- 229910052718 tin Inorganic materials 0.000 description 8
- 239000013077 target material Substances 0.000 description 6
- 239000000843 powder Substances 0.000 description 5
- 230000008021 deposition Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000000462 isostatic pressing Methods 0.000 description 2
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- 238000005507 spraying Methods 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 1
- 229910002056 binary alloy Inorganic materials 0.000 description 1
- PBHRBFFOJOXGPU-UHFFFAOYSA-N cadmium Chemical compound [Cd].[Cd] PBHRBFFOJOXGPU-UHFFFAOYSA-N 0.000 description 1
- -1 cadmium and tin) Chemical class 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
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- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
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- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 238000005118 spray pyrolysis Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022466—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/02002—Arrangements for conducting electric current to or from the device in operations
- H01L31/02005—Arrangements for conducting electric current to or from the device in operations for device characterised by at least one potential jump barrier or surface barrier
- H01L31/02008—Arrangements for conducting electric current to or from the device in operations for device characterised by at least one potential jump barrier or surface barrier for solar cells or solar cell modules
- H01L31/02013—Arrangements for conducting electric current to or from the device in operations for device characterised by at least one potential jump barrier or surface barrier for solar cells or solar cell modules comprising output lead wires elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
- H01L31/03925—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate including AIIBVI compound materials, e.g. CdTe, CdS
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Definitions
- the present invention relates to photovoltaic devices and methods of production.
- Photovoltaic devices can include semiconductor material deposited over a substrate, for example, with a first layer serving as a window layer and a second layer serving as an absorber layer.
- the semiconductor window layer can allow the penetration of solar radiation to the absorber layer, such as a cadmium telluride layer, which converts solar energy to electricity.
- Photovoltaic devices can also contain one or more transparent conductive oxide layers, which are also often conductors of electrical charge.
- FIG. 1 is a schematic of a photovoltaic device having multiple layers.
- FIG. 2 is a schematic of a photovoltaic device having multiple layers.
- Photovoltaic devices can include multiple layers created on a substrate (or superstrate).
- a photovoltaic device can include a barrier layer, a transparent conductive oxide (TCO) layer, a buffer layer, and a semiconductor layer formed in a stack on a substrate.
- Each layer may in turn include more than one layer or film.
- the semiconductor layer can include a first film including a semiconductor window layer, such as a cadmium sulfide layer, formed on the buffer layer and a second film including a semiconductor absorber layer, such as a cadmium telluride layer formed on the semiconductor window layer.
- each layer can cover all or a portion of the device and/or all or a portion of the layer or substrate underlying the layer.
- a "layer" can include any amount of any material that contacts all or a portion of a surface.
- Photovoltaic devices can include optically transparent substrates, such as glass. Because glass is not conductive, a transparent conductive oxide (TCO) layer can be deposited between the substrate and the semiconductor bi-layer to serve as a front contact. A metal layer can be deposited onto the p-type absorber layer to serve as a back contact. The front and back contacts can serve as electrodes for the device.
- TCO transparent conductive oxide
- a variety of materials are available for the metal layer, including, but not limited to molybdenum, aluminum, chromium, iron, nickel, titanium, vanadium, manganese, cobalt, zinc, ruthenium, tungsten, silver, gold, and platinum. Molybdenum functions particularly well as a back contact metal due to its relative stability at processing temperatures and low contact resistance. Copper has also proven effective for preserving fill factor.
- the inventions disclosed herein relate to the composition and deposition of back contacts for photo
- a photovoltaic device can include an intrinsic metal layer adjacent to a semiconductor absorber layer.
- the photovoltaic device can include a doped metal contact layer adjacent to the intrinsic metal layer.
- the doped metal contact layer can include a metal base material and a dopant.
- the intrinsic metal layer can include a molybdenum, aluminum, chromium, iron, nickel, titanium, vanadium, manganese, cobalt, zinc, ruthenium, tungsten, silver, gold, or platinum, or combinations thereof.
- the intrinsic metal layer can include a molybdenum.
- the intrinsic metal layer can include a nitride.
- the intrinsic metal layer can include a molybdenum nitride.
- the intrinsic metal layer can include a chromium.
- the metal base material can include a molybdenum, aluminum, chromium, iron, nickel, titanium, vanadium, manganese, cobalt, zinc, ruthenium, tungsten, silver, gold, or platinum, or combinations thereof.
- the metal base material can include a molybdenum.
- the dopant can include a copper, antimony, potassium, sodium, cesium, silver, gold, phosphorous, arsenic, and bismuth.
- the dopant can include a copper.
- the dopant can include a sodium.
- the doped metal contact layer can include a copper concentration of about 0.1% to about 10%.
- the photovoltaic device can include a semiconductor window layer, where the semiconductor absorber layer is positioned adjacent to the semiconductor window layer, and where the semiconductor window layer and the semiconductor absorber layer are at least a part of a semiconductor bi-layer.
- the semiconductor window layer can include a cadmium sulfide layer.
- the photovoltaic device can include a transparent conductive oxide stack, where the semiconductor bi-layer is positioned adjacent to the transparent conductive oxide stack.
- the photovoltaic device can include a first substrate, where the transparent conductive oxide stack is positioned adjacent to the first substrate.
- the first substrate can include a glass.
- the glass can include a soda-lime glass.
- the transparent conductive oxide stack can include a buffer layer positioned adjacent to a transparent conductive oxide layer, and where the transparent conductive oxide layer is positioned adjacent to one or more barrier layers.
- the transparent conductive oxide layer can include a cadmium stannate.
- the buffer layer can include a zinc tin oxide, tin oxide, zinc oxide, or zinc magnesium oxide, or combinations thereof.
- Each of the one or more barrier layers can include a silicon nitride, aluminum-doped silicon nitride, silicon oxide, aluminum-doped silicon oxide, boron-doped silicon nitride, phosphorous-doped silicon nitride, silicon oxide-nitride, or tin oxide, or combinations thereof.
- the photovoltaic device can include a back support adjacent to the doped metal contact layer.
- a method for manufacturing a photovoltaic device can include depositing an intrinsic metal layer on a semiconductor absorber layer.
- the method can include depositing a doped metal contact layer on the intrinsic metal layer.
- the doped metal contact layer can include a metal base material and a dopant.
- Depositing an intrinsic metal layer can include sputtering a molybdenum. Depositing an intrinsic metal layer can include sputtering a chromium. Depositing an intrinsic metal layer can include sputtering a molybdenum nitride. Depositing an intrinsic metal layer can include depositing a molybdenum, aluminum, chromium, iron, nickel, titanium, vanadium, manganese, cobalt, zinc, ruthenium, tungsten, silver, gold, or platinum, or combinations thereof. The method can include doping a metal base material to form a doped metal contact layer.
- the method can include doping a metal base material with a dopant, where the metal base material can include a molybdenum, aluminum, chromium, iron, nickel, titanium, vanadium, manganese, cobalt, zinc, ruthenium, tungsten, silver, gold, or platinum, or any combination thereof, and where the dopant can include a copper, antimony, potassium, sodium, cesium, silver, gold, phosphorous, arsenic, or bismuth, or any combination thereof.
- the method can include doping a metal base material with about 0.1% to about 10% copper.
- Depositing a doped metal contact layer can include sputtering a copper-doped molybdenum.
- Depositing a doped metal contact layer can include sputtering a metal base material that includes the same metal as the intrinsic metal layer.
- the method can include depositing the semiconductor absorber layer adjacent to a semiconductor window layer, where the semiconductor absorber layer includes a cadmium telluride layer, and where the semiconductor window layer includes a cadmium sulfide layer.
- the method can include depositing the semiconductor window layer adjacent to a transparent conductive oxide stack, where the transparent conductive oxide stack can include a buffer layer adjacent to a transparent conductive oxide layer, where the transparent conductive oxide layer is positioned adjacent to one or more barrier layers.
- the method can include depositing the transparent conductive oxide stack adjacent to a first substrate.
- the first substrate can include a glass.
- the glass can include a soda-lime glass.
- Each of the one or more barrier layers can include a silicon nitride, aluminum-doped silicon nitride, silicon oxide, aluminum-doped silicon oxide, boron-doped silicon nitride, phosphorous-doped silicon nitride, silicon oxide-nitride, or tin oxide, or combinations thereof.
- the transparent conductive oxide layer can include a cadmium stannate.
- the buffer layer can include a zinc tin oxide, tin oxide, zinc oxide, or zinc magnesium oxide, or combinations thereof.
- the method can include annealing the transparent conductive oxide stack. The method can include depositing a back support adjacent to the doped metal contact layer.
- a photovoltaic module may include a plurality of photovoltaic cells adjacent to a substrate.
- the photovoltaic module may include a back cover adjacent to the plurality of photovoltaic cells.
- the plurality of photovoltaic cells may include a second metal layer adjacent to a first layer.
- the first layer may be positioned adjacent to a substrate.
- the second metal layer may include a dopant.
- the plurality of photovoltaic cells may include an intrinsic metal layer adjacent to a semiconductor absorber layer.
- the plurality of photovoltaic cells may include a doped metal contact layer adjacent to the intrinsic metal layer.
- the doped metal contact layer may include a metal base material and a dopant.
- the photovoltaic module may include a first strip of tape having a length distributed along a contact region of each photovoltaic cell.
- the first strip of tape may include a front surface and a back surface. Each surface may contain an adhesive.
- the photovoltaic module may include a first lead foil distributed along the length of the first strip of tape.
- the photovoltaic module may include a second strip of tape, having a length shorter than that of the first strip of tape, distributed along the length and between the ends of the first strip of tape.
- the second strip of tape may include a front and back surface. Each surface may contain an adhesive.
- the photovoltaic module may include a second lead foil, having a length shorter than that of the second strip of tape, distributed along the length of the second strip of tape.
- the photovoltaic module may include a plurality of parallel bus bars, positioned adjacent and perpendicular to the first and second strips of tape. Each one of the plurality of parallel bus bars may contact one of the first or second lead foils.
- the photovoltaic module may include first and second submodules.
- the first submodule may include two or more cells of the plurality of photovoltaic cells connected in series.
- the second submodule may include another two or more cells of the plurality of photovoltaic cells connected in series.
- the first and second submodules may be connected in parallel through a shared cell.
- a method for generating electricity may include illuminating a photovoltaic cell with a beam of light to generate a photocurrent.
- the method may include collecting the generated photocurrent.
- the photovoltaic cell may include a second metal layer adjacent to a first layer.
- the first layer may be positioned adjacent to a substrate.
- the second metal layer may include a dopant.
- the photovoltaic cell may include an intrinsic metal layer adjacent to a semiconductor absorber layer.
- the photovoltaic cell may include a doped metal contact layer adjacent to the intrinsic metal layer.
- the doped metal contact layer may include a metal base material and a dopant.
- photovoltaic device 10 can be formed by depositing transparent conductive oxide layer 110 onto substrate 100 to serve as a front contact for photovoltaic device 10.
- Transparent conductive oxide layer 110 can include any suitable contact material, including a cadmium stannate, and can be deposited using any suitable technique, including sputtering.
- Semiconductor window layer 120 can be deposited on transparent conductive oxide layer 110.
- Semiconductor window layer 120 can include any suitable n-type semiconductor material, including cadmium sulfide.
- Semiconductor window layer 120 can be deposited using any suitable technique, including vapor transport.
- Semiconductor absorber layer 130 can be deposited onto semiconductor window layer 120.
- Semiconductor absorber layer 130 can include any suitable p-type semiconductor material, including cadmium telluride. Semiconductor absorber layer 130 can be deposited using any suitable deposition technique, including vapor transport. An intrinsic metal layer 140 can be deposited onto semiconductor absorber layer 130. Intrinsic metal layer 140 can include any intrinsic semiconductor material, including but not limited to molybdenum, aluminum, chromium, iron, nickel, titanium, vanadium, manganese, cobalt, zinc, ruthenium, tungsten, silver, gold, or platinum. Intrinsic metal layer 140 can also include a nitrogen. For example, intrinsic metal layer 140 can include a molybdenum nitride.
- Intrinsic metal layer 140 can be deposited using any suitable deposition technique, including sputtering, such as RF sputtering. Doped metal layer 150 can be deposited onto intrinsic metal layer 140 to serve as a back contact for photovoltaic device 10. Intrinsic metal layer 140 and/or doped metal layer 150 can also be of a suitable thickness, for example greater than about 10 A, greater than about 20 A, greater than about 50 A, greater than about 100 A, greater than about 250 A, greater than about 500 A, less than about 2000 A, less than about 1500 A, less than about 1000 A, or less than about 750 A. Doped metal layer 150 may include a metal base material and a dopant material.
- the metal base material can include any suitable metal or alloy, including molybdenum, aluminum, chromium, iron, nickel, titanium, vanadium, manganese, cobalt, zinc, ruthenium, tungsten, silver, gold, or platinum.
- the dopant material can include any suitable dopant, including copper, antimony, potassium, sodium, cesium, silver, gold, phosphorous, arsenic, or bismuth.
- doped metal layer 150 can include a molybdenum, doped with about 0.1% to about 10% copper.
- Intrinsic metal layer 140 and/or doped metal layer 150 can be substantially pure, containing a single metal or a binary alloy, mixture, or solid solution thereof.
- Photovoltaic device 10 can undergo heat treatment, during which the dopant material from doped metal layer 150 can diffuse into intrinsic metal layer 140.
- the dopant material from doped metal layer 150 can diffuse into intrinsic metal layer 140.
- copper from a copper-doped molybdenum can diffuse into a molybdenum nitride layer to create a concentration gradient.
- photovoltaic device 10 can further include a barrier layer 200 deposited between substrate 100 and transparent conductive oxide 110.
- Barrier layer 200 can preserve and/or enhance device performance by prohibiting diffusion of sodium (or other chemicals) from substrate 100.
- Barrier layer 200 can include any suitable barrier material, including silicon nitride, aluminum-doped silicon nitride, silicon oxide, aluminum-doped silicon oxide, boron-doped silicon nitride, phosphorous-doped silicon nitride, silicon oxide-nitride, or tin oxide, or any combinations thereof.
- Barrier layer 200 can include multiple barrier layers.
- photovoltaic device can also include a buffer layer 210 to enable smooth and continuous deposition of the subsequent semiconductor window layer 120.
- Buffer layer 120 can include any suitable buffer material, including zinc tin oxide, tin oxide, zinc oxide, or zinc magnesium oxide.
- a back support 230 can be deposited onto doped contact layer 150, and can include any suitable material, for example, a soda-lime glass.
- a variety of deposition techniques are available for depositing the layers discussed above, including for example, low pressure chemical vapor deposition, atmospheric pressure chemical vapor deposition, plasma-enhanced chemical vapor deposition, thermal chemical vapor deposition, DC or AC sputtering, spin-on deposition, and spray-pyrolysis.
- a sputtering target can be manufactured by ingot metallurgy.
- a sputtering target can be manufactured from cadmium, tin, silicon, or alumium, or combinations or alloys thereof suitable to make the layer.
- the target can be SissAl ⁇
- the cadmium and tin can be present in the same target in stoichiometrically proper amounts.
- a sputtering target can be manufactured as a single piece in any suitable shape.
- a sputtering target can be a tube.
- a sputtering target can be manufactured by casting a metallic material into any suitable shape, such as a tube.
- a sputtering target can be manufactured from more than one piece.
- a sputtering target can be manufactured from more than one piece of metal, for example, a piece of cadmium and a piece of tin.
- the cadmium and tin can be manufactured in any suitable shape, such as sleeves, and can be joined or connected in any suitable manner or configuration. For example, a piece of cadmium and a piece of tin can be welded together to form the sputtering target.
- One sleeve can be positioned within another sleeve.
- a sputtering target can be manufactured by powder metallurgy.
- a sputtering target can be formed by consolidating metallic powder (e.g., cadmium or tin powder) to form the target.
- the metallic powder can be consolidated in any suitable process (e.g., pressing such as isostatic pressing) and in any suitable shape. The consolidating can occur at any suitable temperature.
- a sputtering target can be formed from metallic powder including more than one metal powder (e.g., cadmium and tin). More than one metallic powder can be present in stoichiometrically proper amounts.
- a sputter target can be manufactured by positioning wire including target material adjacent to a base.
- wire including target material can be wrapped around a base tube.
- the wire can include multiple metals (e.g., cadmium and tin) present in stoichiometrically proper amounts.
- the base tube can be formed from a material that will not be sputtered.
- the wire can be pressed (e.g., by isostatic pressing).
- a sputter target can be manufactured by spraying a target material onto a base.
- Metallic target material can be sprayed by any suitable spraying process, including thermal spraying and plasma spraying.
- the metallic target material can include multiple metals (e.g., cadmium and tin), present in stoichiometrically proper amounts.
- the base onto which the metallic target material is sprayed can be a tube.
- Photovoltaic devices/cells fabricated using the methods discussed herein may be incorporated into one or more photovoltaic modules, each of which may include one or more submodules. Such modules may by incorporated into various systems for generating electricity.
- a photovoltaic module may include one or more submodules consisting of multiple photovoltaic cells connected in series. One or more submodules may be connected in parallel via a shared cell to form a photovoltaic module.
- a bus bar assembly may be attached to a contact surface of a photovoltaic module to enable connection to additional electrical components (e.g., one or more additional modules).
- a first strip of double-sided tape may be distributed along a length of the module, and a first lead foil may be applied adjacent thereto.
- a second strip of double-sided tape (smaller than the first strip) may be applied adjacent to the first lead foil.
- a second lead foil may be applied adjacent to the second strip of double-sided tape.
- the tape and lead foils may be positioned such that at least one portion of the first lead foil is exposed, and at least one portion of the second lead foil is exposed.
- a plurality of bus bars may be positioned along the contact region of the module.
- the bus bars may be positioned parallel from one another, at any suitable distance apart.
- the plurality of bus bars may include at least one bus bar positioned on a portion of the first lead foil, and at least one bus bar positioned on a portion of the second lead foil.
- the bus bar along with the portion of lead foil on which it has been applied, may define a positive or negative region.
- a roller may be used to create a loop in a section of the first or second lead foil. The loop may be threaded through the hole of a subsequently deposited back glass.
- the photovoltaic module may be connected to other electronic components, including, for example, one or more additional photovoltaic modules.
- the photovoltaic module may be electrically connected to one or more additional photovoltaic modules to form a photovoltaic array.
- the photovoltaic cells/modules/arrays may be included in a system for generating electricity.
- a photovoltaic cell may be illuminated with a beam of light to generate a photocurrent.
- the photocurrent may be collected and converted from direct current (DC) to alternating current (AC) and distributed to a power grid.
- Light of any suitable wavelength may be directed at the cell to produce the photocurrent, including, for example, more than 400 nm, or less than 700 nm (e.g., ultraviolet light).
- Photocurrent generated from one photovoltaic cell may be combined with photocurrent generated from other photovoltaic cells.
- the photovoltaic cells may be part of one or more photovoltaic modules in a photovoltaic array, from which the aggregate current may be harnessed and distributed.
- the embodiments described above are offered by way of illustration and example. It should be understood that the examples provided above may be altered in certain respects and still remain within the scope of the claims. It should be appreciated that, while the invention has been described with reference to the above preferred embodiments, other embodiments are within the scope of the claims.
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Abstract
A photovoltaic device can include an intrinsic metal layer adjacent to a semiconductor absorber layer; and a doped metal contact layer adjacent to the intrinsic metal layer, where the doped metal contact layer includes a metal base material and a dopant.
Description
METAL BARRIER-DOPED METAL CONTACT LAYER
CLAIM FOR PRIORITY
This application claims priority under 35 U.S. C. §119(e) to U.S. Provisional Patent Application Serial No. 61/184,221 filed on June 4, 2009, which is hereby incorporated by reference.
TECHNICAL FIELD
The present invention relates to photovoltaic devices and methods of production.
BACKGROUND
Photovoltaic devices can include semiconductor material deposited over a substrate, for example, with a first layer serving as a window layer and a second layer serving as an absorber layer. The semiconductor window layer can allow the penetration of solar radiation to the absorber layer, such as a cadmium telluride layer, which converts solar energy to electricity. Photovoltaic devices can also contain one or more transparent conductive oxide layers, which are also often conductors of electrical charge.
DESCRIPTION OF DRAWINGS FIG. 1 is a schematic of a photovoltaic device having multiple layers.
FIG. 2 is a schematic of a photovoltaic device having multiple layers.
DETAILED DESCRIPTION
Photovoltaic devices can include multiple layers created on a substrate (or superstrate). For example, a photovoltaic device can include a barrier layer, a transparent conductive oxide (TCO) layer, a buffer layer, and a semiconductor layer formed in a stack on a substrate. Each layer may in turn include more than one layer or film. For example, the semiconductor layer can include a first film including a semiconductor window layer, such as a cadmium sulfide layer, formed on the buffer layer and a second film including a semiconductor absorber layer, such as a cadmium telluride layer formed on the semiconductor window layer. Additionally, each layer can cover all or a portion of the device and/or all or a portion of the layer or substrate underlying the layer. For example, a "layer" can include any amount of any material that contacts all or a portion of a surface.
Photovoltaic devices can include optically transparent substrates, such as glass. Because glass is not conductive, a transparent conductive oxide (TCO) layer can be deposited between the substrate and the semiconductor bi-layer to serve as a front contact. A metal layer can be deposited onto the p-type absorber layer to serve as a back contact. The front and back contacts can serve as electrodes for the device. A variety of materials are available for the metal layer, including, but not limited to molybdenum, aluminum, chromium, iron, nickel, titanium, vanadium, manganese, cobalt, zinc, ruthenium, tungsten, silver, gold, and platinum. Molybdenum functions particularly well as a back contact metal due to its relative stability at processing temperatures and low contact resistance. Copper has also proven effective for preserving fill factor. The inventions disclosed herein relate to the composition and deposition of back contacts for photovoltaic devices.
In one aspect, a photovoltaic device can include an intrinsic metal layer adjacent to a semiconductor absorber layer. The photovoltaic device can include a doped metal contact layer adjacent to the intrinsic metal layer. The doped metal contact layer can include a metal base material and a dopant.
The intrinsic metal layer can include a molybdenum, aluminum, chromium, iron, nickel, titanium, vanadium, manganese, cobalt, zinc, ruthenium, tungsten, silver, gold, or platinum, or combinations thereof. The intrinsic metal layer can include a molybdenum. The intrinsic metal layer can include a nitride. The intrinsic metal layer can include a molybdenum nitride. The intrinsic metal layer can include a chromium. The metal base material can include a molybdenum, aluminum, chromium, iron, nickel, titanium, vanadium, manganese, cobalt, zinc, ruthenium, tungsten, silver, gold, or platinum, or combinations thereof. The metal base material can include a molybdenum. The dopant can include a copper, antimony, potassium, sodium, cesium, silver, gold, phosphorous, arsenic, and bismuth. The dopant can include a copper. The dopant can include a sodium. The doped metal contact layer can include a copper concentration of about 0.1% to about 10%. The photovoltaic device can include a semiconductor window layer, where the semiconductor absorber layer is positioned adjacent to the semiconductor window layer, and where the semiconductor window layer and the semiconductor absorber layer are at least a part of a semiconductor bi-layer. The semiconductor window layer can include a cadmium sulfide layer. The photovoltaic device can include a transparent conductive oxide stack, where the semiconductor bi-layer is positioned adjacent to the transparent conductive oxide stack. The photovoltaic device can include a first substrate,
where the transparent conductive oxide stack is positioned adjacent to the first substrate. The first substrate can include a glass. The glass can include a soda-lime glass. The transparent conductive oxide stack can include a buffer layer positioned adjacent to a transparent conductive oxide layer, and where the transparent conductive oxide layer is positioned adjacent to one or more barrier layers. The transparent conductive oxide layer can include a cadmium stannate. The buffer layer can include a zinc tin oxide, tin oxide, zinc oxide, or zinc magnesium oxide, or combinations thereof. Each of the one or more barrier layers can include a silicon nitride, aluminum-doped silicon nitride, silicon oxide, aluminum-doped silicon oxide, boron-doped silicon nitride, phosphorous-doped silicon nitride, silicon oxide-nitride, or tin oxide, or combinations thereof. The photovoltaic device can include a back support adjacent to the doped metal contact layer.
In one aspect, a method for manufacturing a photovoltaic device can include depositing an intrinsic metal layer on a semiconductor absorber layer. The method can include depositing a doped metal contact layer on the intrinsic metal layer. The doped metal contact layer can include a metal base material and a dopant.
Depositing an intrinsic metal layer can include sputtering a molybdenum. Depositing an intrinsic metal layer can include sputtering a chromium. Depositing an intrinsic metal layer can include sputtering a molybdenum nitride. Depositing an intrinsic metal layer can include depositing a molybdenum, aluminum, chromium, iron, nickel, titanium, vanadium, manganese, cobalt, zinc, ruthenium, tungsten, silver, gold, or platinum, or combinations thereof. The method can include doping a metal base material to form a doped metal contact layer. The method can include doping a metal base material with a dopant, where the metal base material can include a molybdenum, aluminum, chromium, iron, nickel, titanium, vanadium, manganese, cobalt, zinc, ruthenium, tungsten, silver, gold, or platinum, or any combination thereof, and where the dopant can include a copper, antimony, potassium, sodium, cesium, silver, gold, phosphorous, arsenic, or bismuth, or any combination thereof. The method can include doping a metal base material with about 0.1% to about 10% copper. Depositing a doped metal contact layer can include sputtering a copper-doped molybdenum. Depositing a doped metal contact layer can include sputtering a metal base material that includes the same metal as the intrinsic metal layer. The method can include depositing the semiconductor absorber layer adjacent to a semiconductor window layer, where the semiconductor absorber layer includes a cadmium telluride layer, and where the semiconductor window layer includes a cadmium sulfide layer. The method can include
depositing the semiconductor window layer adjacent to a transparent conductive oxide stack, where the transparent conductive oxide stack can include a buffer layer adjacent to a transparent conductive oxide layer, where the transparent conductive oxide layer is positioned adjacent to one or more barrier layers. The method can include depositing the transparent conductive oxide stack adjacent to a first substrate. The first substrate can include a glass. The glass can include a soda-lime glass. Each of the one or more barrier layers can include a silicon nitride, aluminum-doped silicon nitride, silicon oxide, aluminum-doped silicon oxide, boron-doped silicon nitride, phosphorous-doped silicon nitride, silicon oxide-nitride, or tin oxide, or combinations thereof. The transparent conductive oxide layer can include a cadmium stannate. The buffer layer can include a zinc tin oxide, tin oxide, zinc oxide, or zinc magnesium oxide, or combinations thereof. The method can include annealing the transparent conductive oxide stack. The method can include depositing a back support adjacent to the doped metal contact layer.
In one aspect, a photovoltaic module may include a plurality of photovoltaic cells adjacent to a substrate. The photovoltaic module may include a back cover adjacent to the plurality of photovoltaic cells. The plurality of photovoltaic cells may include a second metal layer adjacent to a first layer. The first layer may be positioned adjacent to a substrate. The second metal layer may include a dopant. The plurality of photovoltaic cells may include an intrinsic metal layer adjacent to a semiconductor absorber layer. The plurality of photovoltaic cells may include a doped metal contact layer adjacent to the intrinsic metal layer. The doped metal contact layer may include a metal base material and a dopant.
The photovoltaic module may include a first strip of tape having a length distributed along a contact region of each photovoltaic cell. The first strip of tape may include a front surface and a back surface. Each surface may contain an adhesive. The photovoltaic module may include a first lead foil distributed along the length of the first strip of tape. The photovoltaic module may include a second strip of tape, having a length shorter than that of the first strip of tape, distributed along the length and between the ends of the first strip of tape. The second strip of tape may include a front and back surface. Each surface may contain an adhesive. The photovoltaic module may include a second lead foil, having a length shorter than that of the second strip of tape, distributed along the length of the second strip of tape. The photovoltaic module may include a plurality of parallel bus bars, positioned adjacent and perpendicular to the first and second strips of tape. Each one of the plurality of parallel bus bars may contact one of the first or
second lead foils. The photovoltaic module may include first and second submodules. The first submodule may include two or more cells of the plurality of photovoltaic cells connected in series. The second submodule may include another two or more cells of the plurality of photovoltaic cells connected in series. The first and second submodules may be connected in parallel through a shared cell.
In one aspect, a method for generating electricity may include illuminating a photovoltaic cell with a beam of light to generate a photocurrent. The method may include collecting the generated photocurrent. The photovoltaic cell may include a second metal layer adjacent to a first layer. The first layer may be positioned adjacent to a substrate. The second metal layer may include a dopant. The photovoltaic cell may include an intrinsic metal layer adjacent to a semiconductor absorber layer. The photovoltaic cell may include a doped metal contact layer adjacent to the intrinsic metal layer. The doped metal contact layer may include a metal base material and a dopant.
Referring to FIG. 1 by way of example, photovoltaic device 10 can be formed by depositing transparent conductive oxide layer 110 onto substrate 100 to serve as a front contact for photovoltaic device 10. Transparent conductive oxide layer 110 can include any suitable contact material, including a cadmium stannate, and can be deposited using any suitable technique, including sputtering. Semiconductor window layer 120 can be deposited on transparent conductive oxide layer 110. Semiconductor window layer 120 can include any suitable n-type semiconductor material, including cadmium sulfide. Semiconductor window layer 120 can be deposited using any suitable technique, including vapor transport. Semiconductor absorber layer 130 can be deposited onto semiconductor window layer 120. Semiconductor absorber layer 130 can include any suitable p-type semiconductor material, including cadmium telluride. Semiconductor absorber layer 130 can be deposited using any suitable deposition technique, including vapor transport. An intrinsic metal layer 140 can be deposited onto semiconductor absorber layer 130. Intrinsic metal layer 140 can include any intrinsic semiconductor material, including but not limited to molybdenum, aluminum, chromium, iron, nickel, titanium, vanadium, manganese, cobalt, zinc, ruthenium, tungsten, silver, gold, or platinum. Intrinsic metal layer 140 can also include a nitrogen. For example, intrinsic metal layer 140 can include a molybdenum nitride. Intrinsic metal layer 140 can be deposited using any suitable deposition technique, including sputtering, such as RF sputtering. Doped metal layer 150 can be deposited onto intrinsic metal layer 140 to serve as a back contact for photovoltaic device 10. Intrinsic metal layer 140 and/or doped
metal layer 150 can also be of a suitable thickness, for example greater than about 10 A, greater than about 20 A, greater than about 50 A, greater than about 100 A, greater than about 250 A, greater than about 500 A, less than about 2000 A, less than about 1500 A, less than about 1000 A, or less than about 750 A. Doped metal layer 150 may include a metal base material and a dopant material. The metal base material can include any suitable metal or alloy, including molybdenum, aluminum, chromium, iron, nickel, titanium, vanadium, manganese, cobalt, zinc, ruthenium, tungsten, silver, gold, or platinum. The dopant material can include any suitable dopant, including copper, antimony, potassium, sodium, cesium, silver, gold, phosphorous, arsenic, or bismuth. For example, doped metal layer 150 can include a molybdenum, doped with about 0.1% to about 10% copper. Intrinsic metal layer 140 and/or doped metal layer 150 can be substantially pure, containing a single metal or a binary alloy, mixture, or solid solution thereof. Photovoltaic device 10 can undergo heat treatment, during which the dopant material from doped metal layer 150 can diffuse into intrinsic metal layer 140. For example, copper from a copper-doped molybdenum can diffuse into a molybdenum nitride layer to create a concentration gradient.
Referring to FIG. 2, photovoltaic device 10 can further include a barrier layer 200 deposited between substrate 100 and transparent conductive oxide 110. Barrier layer 200 can preserve and/or enhance device performance by prohibiting diffusion of sodium (or other chemicals) from substrate 100. Barrier layer 200 can include any suitable barrier material, including silicon nitride, aluminum-doped silicon nitride, silicon oxide, aluminum-doped silicon oxide, boron-doped silicon nitride, phosphorous-doped silicon nitride, silicon oxide-nitride, or tin oxide, or any combinations thereof. Barrier layer 200 can include multiple barrier layers. In continuing reference to FIG. 2, photovoltaic device can also include a buffer layer 210 to enable smooth and continuous deposition of the subsequent semiconductor window layer 120. Buffer layer 120 can include any suitable buffer material, including zinc tin oxide, tin oxide, zinc oxide, or zinc magnesium oxide. A back support 230 can be deposited onto doped contact layer 150, and can include any suitable material, for example, a soda-lime glass. A variety of deposition techniques are available for depositing the layers discussed above, including for example, low pressure chemical vapor deposition, atmospheric pressure chemical vapor deposition, plasma-enhanced chemical vapor deposition, thermal chemical vapor deposition, DC or AC sputtering, spin-on deposition, and spray-pyrolysis.
A sputtering target can be manufactured by ingot metallurgy. A sputtering target can be manufactured from cadmium, tin, silicon, or alumium, or combinations or alloys thereof suitable to make the layer. For example, the target can be SissAl^ The cadmium and tin can be present in the same target in stoichiometrically proper amounts. A sputtering target can be manufactured as a single piece in any suitable shape. A sputtering target can be a tube. A sputtering target can be manufactured by casting a metallic material into any suitable shape, such as a tube.
A sputtering target can be manufactured from more than one piece. A sputtering target can be manufactured from more than one piece of metal, for example, a piece of cadmium and a piece of tin. The cadmium and tin can be manufactured in any suitable shape, such as sleeves, and can be joined or connected in any suitable manner or configuration. For example, a piece of cadmium and a piece of tin can be welded together to form the sputtering target. One sleeve can be positioned within another sleeve. A sputtering target can be manufactured by powder metallurgy. A sputtering target can be formed by consolidating metallic powder (e.g., cadmium or tin powder) to form the target. The metallic powder can be consolidated in any suitable process (e.g., pressing such as isostatic pressing) and in any suitable shape. The consolidating can occur at any suitable temperature. A sputtering target can be formed from metallic powder including more than one metal powder (e.g., cadmium and tin). More than one metallic powder can be present in stoichiometrically proper amounts.
A sputter target can be manufactured by positioning wire including target material adjacent to a base. For example wire including target material can be wrapped around a base tube. The wire can include multiple metals (e.g., cadmium and tin) present in stoichiometrically proper amounts. The base tube can be formed from a material that will not be sputtered. The wire can be pressed (e.g., by isostatic pressing).
A sputter target can be manufactured by spraying a target material onto a base. Metallic target material can be sprayed by any suitable spraying process, including thermal spraying and plasma spraying. The metallic target material can include multiple metals (e.g., cadmium and tin), present in stoichiometrically proper amounts. The base onto which the metallic target material is sprayed can be a tube.
Photovoltaic devices/cells fabricated using the methods discussed herein may be incorporated into one or more photovoltaic modules, each of which may include one or more submodules. Such modules may by incorporated into various systems for
generating electricity. For example, a photovoltaic module may include one or more submodules consisting of multiple photovoltaic cells connected in series. One or more submodules may be connected in parallel via a shared cell to form a photovoltaic module. A bus bar assembly may be attached to a contact surface of a photovoltaic module to enable connection to additional electrical components (e.g., one or more additional modules). For example, a first strip of double-sided tape may be distributed along a length of the module, and a first lead foil may be applied adjacent thereto. A second strip of double-sided tape (smaller than the first strip) may be applied adjacent to the first lead foil. A second lead foil may be applied adjacent to the second strip of double-sided tape. The tape and lead foils may be positioned such that at least one portion of the first lead foil is exposed, and at least one portion of the second lead foil is exposed. Following application of the tape and lead foils, a plurality of bus bars may be positioned along the contact region of the module. The bus bars may be positioned parallel from one another, at any suitable distance apart. For example, the plurality of bus bars may include at least one bus bar positioned on a portion of the first lead foil, and at least one bus bar positioned on a portion of the second lead foil. The bus bar, along with the portion of lead foil on which it has been applied, may define a positive or negative region. A roller may be used to create a loop in a section of the first or second lead foil. The loop may be threaded through the hole of a subsequently deposited back glass. The photovoltaic module may be connected to other electronic components, including, for example, one or more additional photovoltaic modules. For example, the photovoltaic module may be electrically connected to one or more additional photovoltaic modules to form a photovoltaic array.
The photovoltaic cells/modules/arrays may be included in a system for generating electricity. For example, a photovoltaic cell may be illuminated with a beam of light to generate a photocurrent. The photocurrent may be collected and converted from direct current (DC) to alternating current (AC) and distributed to a power grid. Light of any suitable wavelength may be directed at the cell to produce the photocurrent, including, for example, more than 400 nm, or less than 700 nm (e.g., ultraviolet light). Photocurrent generated from one photovoltaic cell may be combined with photocurrent generated from other photovoltaic cells. For example, the photovoltaic cells may be part of one or more photovoltaic modules in a photovoltaic array, from which the aggregate current may be harnessed and distributed.
The embodiments described above are offered by way of illustration and example. It should be understood that the examples provided above may be altered in certain respects and still remain within the scope of the claims. It should be appreciated that, while the invention has been described with reference to the above preferred embodiments, other embodiments are within the scope of the claims.
Claims
1. A photovoltaic device, comprising: an intrinsic metal layer adjacent to a semiconductor absorber layer; and a doped metal contact layer adjacent to the intrinsic metal layer, the doped metal contact layer comprising a metal base material and a dopant.
2. The photovoltaic device of claim 1, wherein the intrinsic metal layer is selected from the group consisting of molybdenum, aluminum, chromium, iron, nickel, titanium, vanadium, manganese, cobalt, zinc, ruthenium, tungsten, silver, gold, and platinum.
3. The photovoltaic device of claim 1, wherein the intrinsic metal layer is a molybdenum.
4. The photovoltaic device of claim 1, wherein the intrinsic metal layer comprises a nitride.
5. The photovoltaic device of claim 1, wherein the intrinsic metal layer comprises a molybdenum nitride.
6. The photovoltaic device of claim 1, wherein the intrinsic metal layer comprises a chromium.
7. The photovoltaic device of claim 1, wherein the metal base material is selected from the group consisting of molybdenum, aluminum, chromium, iron, nickel, titanium, vanadium, manganese, cobalt, zinc, ruthenium, tungsten, silver, gold, and platinum.
8. The photovoltaic device of claim 1, wherein the metal base material comprises a molybdenum.
9. The photovoltaic device of claim 1, wherein the dopant is selected from the group consisting of copper, antimony, potassium, sodium, cesium, silver, gold, phosphorous, arsenic, and bismuth.
10. The photovoltaic device of claim 1, wherein the dopant comprises a copper.
11. The photovoltaic device of claim 1, wherein the dopant comprises a sodium.
12. The photovoltaic device of claim 1, wherein the doped metal contact layer comprises a copper concentration of about 0.1% to about 10%.
13. The photovoltaic device of claim 1, further comprising a semiconductor window layer, wherein the semiconductor absorber layer is positioned adjacent to the semiconductor window layer, and wherein the semiconductor window layer and the semiconductor absorber layer are at least a part of a semiconductor bi-layer.
14. The photovoltaic device of claim 13, wherein the semiconductor window layer comprises a cadmium sulfide layer.
15. The photovoltaic device of claim 13, further comprising a transparent conductive oxide stack, wherein the semiconductor bi-layer is positioned adjacent to the transparent conductive oxide stack.
16. The photovoltaic device of claim 15, further comprising a first substrate, wherein the transparent conductive oxide stack is positioned adjacent to the first substrate.
17. The photovoltaic device of claim 16, wherein the first substrate comprises a glass.
18. The photovoltaic device of claim 17, wherein the glass comprises a soda- lime glass.
19. The photovoltaic device of claim 15, wherein the transparent conductive oxide stack comprises a buffer layer positioned adjacent to a transparent conductive oxide layer, and wherein the transparent conductive oxide layer is positioned adjacent to one or more barrier layers.
20. The photovoltaic device of claim 19, wherein the transparent conductive oxide layer comprises a cadmium stannate.
21. The photovoltaic device of claim 19, wherein the buffer layer is selected from the group consisting of zinc tin oxide, tin oxide, zinc oxide, and zinc magnesium oxide.
22. The photovoltaic device of claim 19, wherein each of the one or more barrier layers is selected from the group consisting of silicon nitride, aluminum-doped silicon nitride, silicon oxide, aluminum-doped silicon oxide, boron-doped silicon nitride, phosphorous-doped silicon nitride, silicon oxide-nitride, and tin oxide.
23. The photovoltaic device of claim 1, further comprising a back support adjacent to the doped metal contact layer.
24. A method for manufacturing a photovoltaic device, the method comprising: depositing an intrinsic metal layer on a semiconductor absorber layer; and depositing a doped metal contact layer on the intrinsic metal layer, the doped metal contact layer comprising a metal base material and a dopant.
25. The method of claim 24, wherein depositing an intrinsic metal layer comprises sputtering a molybdenum.
26. The method of claim 24, wherein depositing an intrinsic metal layer comprises sputtering a chromium.
27. The method of claim 24, wherein depositing an intrinsic metal layer comprises sputtering a molybdenum nitride.
28. The method of claim 24, wherein depositing an intrinsic metal layer comprises depositing one selected from the group consisting of a molybdenum, aluminum, chromium, iron, nickel, titanium, vanadium, manganese, cobalt, zinc, ruthenium, tungsten, silver, gold, and platinum.
29. The method of claim 24, further comprising doping a metal base material to form a doped metal contact layer.
30. The method of claim 24, further comprising: doping a metal base material with a dopant, wherein the metal base material is selected from the group consisting of molybdenum, aluminum, chromium, iron, nickel, titanium, vanadium, manganese, cobalt, zinc, ruthenium, tungsten, silver, gold, and platinum, and wherein the dopant is selected from the group consisting of copper, antimony, potassium, sodium, cesium, silver, gold, phosphorous, arsenic, and bismuth.
31. The method of claim 24, further comprising doping a metal base material with about 0.1% to about 10% copper.
32. The method of claim 24, wherein depositing a doped metal contact layer comprises sputtering a copper-doped molybdenum.
33. The method of claim 24, wherein depositing a doped metal contact layer comprises sputtering a metal base material that comprises the same metal as the intrinsic metal layer.
34. The method of claim 24, further comprising depositing the semiconductor absorber layer adjacent to a semiconductor window layer, the semiconductor absorber layer comprising a cadmium telluride layer, and the semiconductor window layer comprising a cadmium sulfide layer.
35. The method of claim 34, further comprising depositing the semiconductor window layer adjacent to a transparent conductive oxide stack, wherein the transparent conductive oxide stack comprises a buffer layer adjacent to a transparent conductive oxide layer, wherein the transparent conductive oxide layer is positioned adjacent to one or more barrier layers.
36. The method of claim 35, further comprising depositing the transparent conductive oxide stack adjacent to a first substrate.
37. The method of claim 36, wherein the first substrate comprises a glass.
38. The method of claim 37, wherein the glass comprises a soda-lime glass.
39. The method of claim 35, wherein each of the one or more barrier layers is selected from the group consisting of silicon nitride, aluminum-doped silicon nitride, silicon oxide, aluminum-doped silicon oxide, boron-doped silicon nitride, phosphorous-doped silicon nitride, silicon oxide-nitride, and tin oxide.
40. The method of claim 35, wherein the transparent conductive oxide layer comprises a cadmium stannate.
41. The method of claim 35, wherein the buffer layer is selected from the group consisting of zinc tin oxide, tin oxide, zinc oxide, and zinc magnesium oxide.
42. The method of claim 35, further comprising annealing the transparent conductive oxide stack.
43. The method of claim 24, further comprising depositing a back support adjacent to the doped metal contact layer.
44. A photovoltaic module comprising: a plurality of photovoltaic cells adjacent to a substrate; and a back cover adjacent to the plurality of photovoltaic cells, the plurality of photovoltaic cells comprising: an intrinsic metal layer adjacent to a semiconductor absorber layer; and a doped metal contact layer adjacent to the intrinsic metal layer, the doped metal contact layer comprising a metal base material and a dopant.
45. The photovoltaic module of claim 44, further comprising: a first strip of tape having a length distributed along a contact region of each photovoltaic cell, the first strip of tape comprising a front surface and a back surface, each surface containing an adhesive; a first lead foil distributed along the length of the first strip of tape; a second strip of tape, having a length shorter than that of the first strip of tape, distributed along the length and between the ends of the first strip of tape, wherein the second strip of tape comprises a front and back surface, each containing an adhesive; a second lead foil, having a length shorter than that of the second strip of tape, distributed along the length of the second strip of tape; and a plurality of parallel bus bars, positioned adjacent and perpendicular to the first and second strips of tape, wherein each one of the plurality of parallel bus bars contacts one of the first or second lead foils.
46. The photovoltaic module of claim 45, further comprising first and second submodules, wherein the first submodule comprises two or more cells of the plurality of photovoltaic cells connected in series, and the second submodule comprises another two or more cells of the plurality of photovoltaic cells connected in series, wherein the first and second submodules are connected in parallel through a shared cell.
47. A method for generating electricity, the method comprising: illuminating a photovoltaic cell with a beam of light to generate a photocurrent; and collecting the generated photocurrent, wherein the photovoltaic cell comprises: an intrinsic metal layer adjacent to a semiconductor absorber layer; and a doped metal contact layer adjacent to the intrinsic metal layer, the doped metal contact layer comprising a metal base material and a dopant.
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US18422109P | 2009-06-04 | 2009-06-04 | |
US61/184,221 | 2009-06-04 |
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US9461186B2 (en) | 2010-07-15 | 2016-10-04 | First Solar, Inc. | Back contact for a photovoltaic module |
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