WO2010126300A2 - Apparatus for stabilizing second harmonic pulse output in a laser system operating by pulses - Google Patents

Apparatus for stabilizing second harmonic pulse output in a laser system operating by pulses Download PDF

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Publication number
WO2010126300A2
WO2010126300A2 PCT/KR2010/002680 KR2010002680W WO2010126300A2 WO 2010126300 A2 WO2010126300 A2 WO 2010126300A2 KR 2010002680 W KR2010002680 W KR 2010002680W WO 2010126300 A2 WO2010126300 A2 WO 2010126300A2
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harmonic
light absorption
pulse
absorption filter
energy
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PCT/KR2010/002680
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French (fr)
Korean (ko)
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WO2010126300A3 (en
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황해령
공승환
이희철
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(주)루트로닉
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Priority to US13/266,706 priority Critical patent/US8761214B2/en
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Publication of WO2010126300A3 publication Critical patent/WO2010126300A3/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/008—Mountings, adjusting means, or light-tight connections, for optical elements with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/007—Optical devices or arrangements for the control of light using movable or deformable optical elements the movable or deformable optical element controlling the colour, i.e. a spectral characteristic, of the light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements
    • G02B7/005—Motorised alignment
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/37—Non-linear optics for second-harmonic generation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/068—Stabilisation of laser output parameters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0092—Nonlinear frequency conversion, e.g. second harmonic generation [SHG] or sum- or difference-frequency generation outside the laser cavity

Definitions

  • the present invention relates to a method for achieving output stabilization of a second harmonic wave pulse, and in particular, a fundamental wave having a high energy in a stable state having a small pulse to pulse (PTP) value is incident to a nonlinear crystal and has a small value of PTP.
  • PTP pulse to pulse
  • FIG. 1 is a conceptual diagram illustrating a process of converting a wavelength of a laser pulse output from a pulse laser oscillator by half using a nonlinear crystal.
  • a laser pulse output from a general pulse laser oscillator has a wavelength due to nonlinear crystals such as KTP (KTiOPO 4 ), LBO (LiB 3 O 5 ), and BBO (BaB 2 O 4 ). Converted in half (in the example shown in FIG. 1, the 1064nm wavelength is converted to the 532nm wavelength), which is called frequency doubling or harmonic generation.
  • KTP KTP
  • LBO LiB 3 O 5
  • BBO BaB 2 O 4
  • the wavelength before the conversion is called a fundamental wave
  • the wavelength is reduced by half it is called the second harmonic
  • PTP pulse to pulse
  • lasers have a high PTP value at low output energy unless a special configuration is used, and the higher the output energy, the lower the PTP value.
  • the second harmonic wave When the second harmonic wave is generated, the second harmonic wave has a value of about twice that of the PTP of the fundamental wave, thereby increasing the PTP value.
  • the present invention was created to solve the above problems of the prior art, and the object of the second harmonic pulse output stabilization device in the pulsed laser system according to the present invention is to provide a light absorption filter at the rear end of the nonlinear crystal.
  • a fundamental wave having a high energy in a stable state having a small PTP value is incident on the nonlinear crystal to obtain a second harmonic wave having a desired various energy in a more stable state having a small value of PTP,
  • a laser system that operates with one pulse, it is suitable for the user to select whether to output a large energy laser pulse that is incident and converted into a nonlinear crystal as it is or to output the small energy using a light absorption filter. It is to provide a second harmonic pulse output stabilization apparatus.
  • a second harmonic pulse output stabilization device in a pulsed laser system of the present invention for achieving the above object, the pulse laser oscillation unit for outputting a laser pulse; A non-linear crystal for converting the laser pulse of the first wavelength output from the pulse laser oscillator into a second harmonic having a half value of the first wavelength length and outputting the second harmonic; And a light absorption filter for absorbing a part of energy of the second harmonic laser pulse converted from the nonlinear crystal to output a second harmonic wave having a lower energy.
  • the second harmonic pulse output stabilization device in the pulsed laser system of the present invention further comprises a moving means for moving the light absorption filter selectively inserted in the laser path and a controller for controlling the moving means. Characterized in that.
  • the second harmonic pulse output stabilization device in the pulsed laser system of the present invention having the above configuration has the following effects.
  • PTP can enter a low energy fundamental wave into the nonlinear crystal to maintain a low PTP while simultaneously obtaining a second harmonic wave having various levels of energy desired. It can be effective.
  • 1 is a conceptual diagram of a process of converting a wavelength of a laser pulse output from a general pulse laser oscillator in half using a nonlinear crystal.
  • FIG. 2 is a block diagram of a second harmonic pulse output stabilization device in a laser system operating with a pulse according to an embodiment of the present invention.
  • Figure 3 is a block diagram of a device of the linear motion means according to an embodiment of the present invention.
  • FIG. 4 is a detailed configuration diagram of the linear motion controller according to an embodiment of the present invention.
  • FIG. 5 is a detailed block diagram of the energy mode selection unit in FIG. 4.
  • FIG. 6 is a conceptual diagram of a process of converting a wavelength of a laser pulse output from a pulse laser oscillator in half using a nonlinear crystal in one embodiment of the present invention.
  • FIG. 7 is a block diagram of a holder according to another embodiment of the present invention.
  • FIG. 8 is a cross-sectional view taken along the line A-A of FIG.
  • Fig. 9 is a diagram showing the principal parts of a second harmonic pulse output stabilizing apparatus in a laser system operating with a pulse according to still another embodiment of the present invention.
  • Pulse laser oscillation unit 120 Nonlinear crystal
  • Control unit 350 Motor drive
  • FIG. 2 is a block diagram of a second harmonic pulse output stabilization device in a laser system operating with a pulse according to an embodiment of the present invention
  • Figure 3 is a linear motion means according to an embodiment of the present invention
  • 4 is a detailed block diagram of a linear motion controller according to an embodiment of the present invention
  • FIG. 5 is a detailed block diagram of an energy mode selection unit in FIG. 4.
  • FIG. 6 is a conceptual diagram illustrating a process of converting a wavelength of a laser pulse output from a pulse laser oscillator in half using a nonlinear crystal in one embodiment of the present invention.
  • the second harmonic wave output stabilization apparatus in the laser system operating with a pulse according to an embodiment of the present invention, the pulse laser oscillator 110 for outputting a laser pulse, and the pulse laser oscillator 110 Nonlinear crystal 120 converting the laser pulse of the first wavelength output from the second wavelength into a second harmonic having a half value of the first wavelength length, and outputting the nonlinear crystal 120 and the second transformed from the nonlinear crystal 120. And a light absorption filter 130 for absorbing a part of the energy of the second harmonic laser pulse to output a second harmonic wave having a lower energy.
  • the pulse laser oscillator 110 may be implemented as various types of resonators for oscillating a pulse laser having a pulse width of, for example, a nanosecond band, a pico second band, and a femto second band.
  • a pulse width of, for example, a nanosecond band, a pico second band, and a femto second band.
  • the light absorption filter 130 is linearly moved to selectively insert (ie, selectively) into a laser path.
  • Insertion or separation) linear motion means, and the linear motion controller 300 for controlling the linear motion of the linear motion means is characterized in that it is configured to further comprise.
  • the linear movement means In the second harmonic pulse output stabilization device in the pulsed laser system according to an embodiment of the present invention, the linear movement means, the motor 210 and the motor 210 to rotate by the supplied power source And a pinion (220) integrally rotating and transmitting the rotation of the motor (210), and a rack (230) for converting the rotational motion of the pinion (220) into a linear motion. It is done.
  • the light absorbing filter is fixed to the rack 230 and linearly integrated with the rack 230 Holder (240) for fixing the position of the 130 is characterized in that it is further configured.
  • the linear motion controller 300 selects an energy mode for inputting energy of an output second harmonic wave.
  • control unit 340 for outputting a driving control signal based on the energy of the second harmonic wave input from the energy mode selection unit 310, and based on the off driving control signal received from the control unit 340.
  • a motor driving unit 350 for outputting a motor driving signal for driving the motor 210 based on the on driving control signal received from the control unit 340.
  • the light absorption filter 130 is inserted into the laser path in the energy mode selector 310.
  • a low mode selection key 311 for inputting a key command to the controller 340 to output a second harmonic wave of low (low level) energy (for example, 30 to 200 mJ).
  • the control unit 340 generates a key command for causing the light absorption filter 130 inserted and inserted in the control unit to be separated from the laser path so that a second harmonic wave of high (high level) energy (eg, 200 to 400 mJ) is output. It is characterized in that the high mode selection key 312 for inputting.
  • the energy absorption rate of the light absorption filter 130 is characterized in that 1% to 99%.
  • the nonlinear crystal 120 is KTP (KTiOPO 4 ), LBO (LiB 3 O 5 ), BBO It is characterized in that it is any one selected from (BaB 2 O 4 ).
  • FIG. 7 is a block diagram of a holder 241 according to another embodiment of the present invention
  • FIG. 8 is a cross-sectional view taken along the line A-A of FIG.
  • the holder is made of a metal material having excellent thermal conductivity so as to smoothly dissipate heat generated from the light absorption filter 130. It is implemented as a holder 241, the insertion groove 241b is formed in the holder 241 of the metal material so as to contain the light absorption filter 130, the light absorption filter 130 Is in close contact with the insertion groove (241b) to be smoothly dissipated through the metal holder 241, the through hole (241a) through which the laser pulse can pass through the metal holder (241) It is characterized by being formed.
  • the light absorption filter 130 converts it into heat, that is, the amount of heat generated varies depending on the absorption rate (%), so that the light absorption filter 130 depends on the type of the light absorption filter 130. Since a metal holder 241 that simultaneously serves as a heat sink for cooling and needs to be mounted at the same time is required, in this embodiment, a structure capable of dissipating heat generated from the light absorption filter 130 is adopted. .
  • the coolant inlet 241d through which the coolant flows is provided at one side of the holder 241 of the metal material.
  • a cooling water outlet 241e is formed at the other side, and a hollow part inside the holder 241 made of metal so that the cooling water introduced through the cooling water inlet 241d flows out through the cooling water outlet 241e. 241c) is formed.
  • the coolant inlet 241d may be connected to an external coolant supply hose h1 to receive coolant, and the coolant outlet 241e may be connected to a coolant outlet hose h2 for flowing out the heat exchanged coolant to the outside. .
  • the method of cooling the light absorption filter 130 is not limited to the holder of the metal material as described above, it can be implemented by the method according to the embodiment shown in FIG.
  • FIG. 9 is a main configuration diagram of a second harmonic pulse output stabilization apparatus in a pulsed laser system according to another embodiment of the present invention.
  • the second harmonic pulse output stabilization device in the pulsed laser system is provided in contact with the light absorption filter 130 to supply power.
  • the thermoelectric element 251 After absorbing the heat of the light absorption filter 130 by the thermal element 251 and the thermoelectric element 251 is provided in contact with, radiating heat radiated from the thermoelectric element 251 by the supplied cooling water
  • the fixed band 254 for connecting is characterized in that it is configured to further include.
  • the cooling water supply unit 253 includes a cooling water storage tank 253a for storing cooling water, a connection pipe 253b for connecting the cooling water storage tank 253a, and the water jacket 252, and the connection pipe 253b. It is characterized by consisting of a cooling water pump 253c for forcibly supplying the cooling water of the cooling water storage tank 253a to the water jacket 252 through.
  • thermoelectric element 251 the heat generated from the light absorption filter 130 is removed by the operation of the thermoelectric element 251, and the cooling water flows into the water jacket 252 by the operation of the cooling water pump 253c, and thus the thermoelectric element. Heat dissipation 251.
  • the low mode selection key 311 is selected.
  • the controller 340 recognizes the low mode setting command and outputs an on driving control signal for rotating the motor 210 in the A direction.
  • the motor driving unit 350 that receives the on-drive control signal for rotating the motor 210 in the A direction from the control unit 340 outputs a motor driving signal to the motor 210, wherein the motor 210 is in the A direction. Will rotate.
  • the motor drive signal is a DC current having a polarity, of course.
  • the pinion 220 also rotates in the A direction, and as a result, the rack 230 linearly moves in the A direction.
  • the first position sensor 320 detects the first position signal and detects the first position signal.
  • the control unit 340 that receives the first position signal from the first position sensor 320 outputs an off driving control signal to the motor driving unit 350, and receives the off driving control signal from the control unit 340.
  • the driver 350 cuts off the current supplied from the power supply unit (not shown) to the motor 210, and as a result, the motor 210 stops driving.
  • the rack 230 stops the linear motion and the light absorption filter 130 is positioned on the laser path.
  • the light absorption filter 130 When the light absorption filter 130 is inserted in the laser path as described above, the light absorption filter 130 absorbs the energy of the laser pulse at a predetermined absorption rate (for example, 50%).
  • the laser pulse of 1064 nm having a low PTP (for example, 1% and 4%) and a high energy region (for example, 800mJ, 400mJ) is generated in the pulse laser oscillator 110.
  • the laser is converted to a 532 nm wavelength having a half length of wavelength while passing through the nonlinear crystal 120, and has a low energy level of 200 mJ and 60 mJ while passing through the light absorption filter 130 having a predetermined absorption rate (for example, 50%). It will output a pulse.
  • the following describes an operation mode in which the high energy second harmonic wave pulse having a small PTP value is output as it is without changing the amount of energy.
  • the control unit 340 that receives the high mode from the energy mode selection unit 310 transmits an on-drive control signal for rotating the motor 210 in the B direction to the motor driving unit 350.
  • the motor driving unit 350 receiving the on-drive control signal for rotating the motor 210 in the B direction from the control unit 340 outputs a motor driving signal to the motor 210, where the motor 210 and the pinion ( 220 rotates in the B direction, and as a result, the rack 230 is linearly moved in the B direction.
  • the rack 230 linearly moves in the B direction, the light absorption filter 130 is separated from the laser path, and the second position detecting sensor is instantaneously released from the laser path. 330 detects this and outputs a second position signal.
  • the control unit 340 receiving the second position signal outputs the off driving control signal to the motor driving unit 350 to cut off the current supplied to the motor 210 to stop the driving of the motor 210.
  • the high energy laser pulse converted from the nonlinear crystal 120 is output without changing the amount of energy.
  • the light absorption filter 130 can be selectively positioned or displaced on the laser path, thereby injecting a large energy fundamental wave laser pulse having a low PTP at all times into the nonlinear crystal, thereby reducing the desired small or large with a low PTP.
  • a stable second harmonic laser pulse in the energy domain can be obtained.
  • the moving means for selectively inserting the light absorbing filter on the laser path may be modified in a configuration in which the light absorbing filter is selectively inserted by the rotational movement of the rotational movement means in addition to the linear movement means of this embodiment.
  • the rotary motion means includes a disk and a motor for rotating the disk, and a light absorption filter is mounted on a portion of the outer circumference of the disk, and the laser path is positioned at a point where the outer light absorption filter is located on the outer circumference of the disk.
  • the motor of the rotary motion means is controlled by a controller, and as the motor rotates under the control of the controller, the light absorption filter of the disk outer circumference can be selectively inserted in the laser path.
  • the movement means for selectively inserting the light absorption filter on the laser path may be variously modified, and is not limited to the above embodiment.

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
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  • Astronomy & Astrophysics (AREA)
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Abstract

The present invention relates to an apparatus for stabilizing second harmonic pulse output in a laser system operating by pulses. The apparatus of the present invention comprises: a pulse laser oscillating unit (110) which outputs a laser pulse; a nonlinear crystal (120) which converts the laser pulse of a first wavelength output by the pulse laser oscillation unit (110) into a second harmonic wave with a value that is half of the first wavelength, and outputs the converted second harmonic wave; and an optical absorption filter (130) which absorbs a portion of the energy of the converted second harmonic laser pulse from the nonlinear crystal (120) to output the second harmonic wave with a lower energy. The thus-configured apparatus of the present invention supplies a fundamental wave in a stable state and having a small PTP value and high energy to the nonlinear crystal, in order to obtain the second harmonic wave which is in a more stable state and has a small PTP value and a variety of energies.

Description

[규칙 제26조에 의한 보정 05.07.2010]　펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치Correction by Rule 26 05.07.2010 Second Harmonic Pulse Output Stabilization Device in Laser System Operated by Pulse
본 발명은 제2 조화파 펄스의 출력 안정화를 이루는 방법에 관한 것으로, 특히 PTP(Pulse to Pulse) 값이 작은 안정된 상태의 높은 에너지를 갖는 기본파를 비선형 결정에 입사시키어 작은 값의 PTP를 갖는, 보다 안정된 소망하는 다양한 에너지를 갖는 제 2 조화파를 획득할 수 있도록 하기에 적당하도록 한 펄스로 동작하는 레이저 시스템에서의 제2 조화파 레이저 펄스 출력 안정화 장치에 관한 것이다.The present invention relates to a method for achieving output stabilization of a second harmonic wave pulse, and in particular, a fundamental wave having a high energy in a stable state having a small pulse to pulse (PTP) value is incident to a nonlinear crystal and has a small value of PTP. A second harmonic laser pulse output stabilization device in a laser system operating with a pulse suitable to be able to obtain a second harmonic wave having a more stable desired energy.
도 1에는 펄스 레이저발진부에서 출력되는 레이저 펄스의 파장을 비선형 결정을 이용하여 파장을 반으로 변환하는 과정의 개념도가 도시되어 있다.FIG. 1 is a conceptual diagram illustrating a process of converting a wavelength of a laser pulse output from a pulse laser oscillator by half using a nonlinear crystal.
도 1에 도시된 바와 같이 일반적인 펄스 레이저발진부(미도시)에서 출력되는 레이저 펄스는 KTP(KTiOPO4), LBO(LiB3O5), BBO(BaB2O4) 등의 비선형 결정에 의해서 파장이 반으로 변환되는데(도 1 도시 예에서 1064nm 파장이 532nm 파장으로 변환됨), 이를 주파수 배가 혹은 조화파 발생이라 한다.As shown in FIG. 1, a laser pulse output from a general pulse laser oscillator (not shown) has a wavelength due to nonlinear crystals such as KTP (KTiOPO 4 ), LBO (LiB 3 O 5 ), and BBO (BaB 2 O 4 ). Converted in half (in the example shown in FIG. 1, the 1064nm wavelength is converted to the 532nm wavelength), which is called frequency doubling or harmonic generation.
이때 변환되기 전의 파장을 기본파(Fundamental wave)라고 하고 변환되어서 파장이 반으로 줄었으면 이를 제2 조화파(the second harmonic)라고 한다.In this case, the wavelength before the conversion is called a fundamental wave, and when the wavelength is reduced by half, it is called the second harmonic.
펄스로 구동되는 레이저들은 출력되는 에너지들 간의 에너지 변화도를 PTP(Pulse to Pulse) 안정도(stability)로 표시하는데, PTP 수치가 낮을수록 안정성이 좋은 레이저임은 물론이다.Lasers driven by pulses indicate energy variation between output energies in terms of pulse to pulse (PTP) stability. The lower the PTP value, the more stable the laser.
일반적으로 레이저들은 특수한 구성을 하지 않는 한 출력 에너지가 낮을 경우에는 PTP 수치가 높고 출력 에너지가 높을수록 PTP의 수치가 낮아진다.In general, lasers have a high PTP value at low output energy unless a special configuration is used, and the higher the output energy, the lower the PTP value.
제2 조화파 발생시 제2 조화파는 기본파의 PTP에 비하여 보통 약 2배 정도의 값을 갖게 되어서 PTP 수치가 높아지는 문제점이 있다.When the second harmonic wave is generated, the second harmonic wave has a value of about twice that of the PTP of the fundamental wave, thereby increasing the PTP value.
따라서 낮은 에너지의 기본파를 비선형 결정에 입사시키는 경우 기본파의 PTP의 수치가 크므로 매우 높은 PTP를 갖는 제2 조화파를 얻게 되므로 출력 에너지의 변화가 매우 큰 제2 조화파를 얻게 되는 문제점이 있었다.Therefore, when the low energy fundamental wave is incident on the nonlinear crystal, since the PTP of the fundamental wave is large, a second harmonic wave having a very high PTP is obtained, thereby obtaining a second harmonic wave having a very large change in output energy. there was.
본 발명은 상기와 같은 종래 기술의 문제점을 해결하기 위해 창작된 것으로 본 발명에 의한 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치의 목적은, 비선형 결정의 후단에 광흡수 필터를 구성함으로써, PTP 값이 작은 안정된 상태의 높은 에너지를 갖는 기본파를 비선형 결정에 입사시키어 작은 값의 PTP를 갖는, 보다 안정된 상태의 소망하는 다양한 에너지를 갖는 제 2 조화파를 획득할 수 있도록 하고,The present invention was created to solve the above problems of the prior art, and the object of the second harmonic pulse output stabilization device in the pulsed laser system according to the present invention is to provide a light absorption filter at the rear end of the nonlinear crystal. By constructing, a fundamental wave having a high energy in a stable state having a small PTP value is incident on the nonlinear crystal to obtain a second harmonic wave having a desired various energy in a more stable state having a small value of PTP,
또한 비선형 결정으로 입사되어 변환된 큰 에너지의 레이저 펄스를 그대로 출력할 것인지 또는 광흡수 필터를 사용하여 작은 에너지로 출력할 것인지 여부를 사용자가 선택할 수 있도록 하기에 적당하도록 한 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치를 제공하는 데 있다.In addition, in a laser system that operates with one pulse, it is suitable for the user to select whether to output a large energy laser pulse that is incident and converted into a nonlinear crystal as it is or to output the small energy using a light absorption filter. It is to provide a second harmonic pulse output stabilization apparatus.
상기와 같은 목적을 달성하기 위한 본 발명인 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치는, 레이저 펄스를 출력하는 펄스 레이저발진부; 상기 펄스 레이저발진부에서 출력되는 제1 파장의 레이저 펄스를 제1 파장 길이의 반값을 갖는 제2 조화파(the 2nd harmonic)로 변환하여 출력하는 비선형 결정; 상기 비선형 결정으로부터 변환된 제2 조화파 레이저 펄스의 에너지 일부를 흡수하여 보다 낮은 에너지를 갖는 제2 조화파가 출력되도록 하는 광흡수 필터를 포함하여 구성되는 것을 특징으로 한다.A second harmonic pulse output stabilization device in a pulsed laser system of the present invention for achieving the above object, the pulse laser oscillation unit for outputting a laser pulse; A non-linear crystal for converting the laser pulse of the first wavelength output from the pulse laser oscillator into a second harmonic having a half value of the first wavelength length and outputting the second harmonic; And a light absorption filter for absorbing a part of energy of the second harmonic laser pulse converted from the nonlinear crystal to output a second harmonic wave having a lower energy.
또한, 본 발명의 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치는 위 광흡수 필터를 이동시켜 레이저 경로 상에 선택적으로 삽입하는 이동수단과 그 이동수단을 제어하는 컨트롤러를 더 포함하는 것을 특징으로 한다.In addition, the second harmonic pulse output stabilization device in the pulsed laser system of the present invention further comprises a moving means for moving the light absorption filter selectively inserted in the laser path and a controller for controlling the moving means. Characterized in that.
상기와 같은 구성을 가지는 본 발명인 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치는 다음과 같은 효과가 있다.The second harmonic pulse output stabilization device in the pulsed laser system of the present invention having the above configuration has the following effects.
첫째, 비선형 결정의 후단에 광흡수 필터를 구성함으로써, PTP가 낮은 높은 에너지의 기본파를 비선형 결정으로 입사시키어 낮은 PTP를 유지할 수 있으면서 동시에 소망하는 다양한 레벨의 에너지를 갖는 제2 조화파를 획득할 수 있는 효과가 있다.First, by constructing a light absorption filter at the rear end of the nonlinear crystal, PTP can enter a low energy fundamental wave into the nonlinear crystal to maintain a low PTP while simultaneously obtaining a second harmonic wave having various levels of energy desired. It can be effective.
둘째, 비선형 결정으로부터 변환된 높은 에너지의 제2 조화파 레이저 펄스를 그대로 출력할 것인지 또는, 보다 작은 에너지로 출력할 것인지 여부를 사용자가 선택할 수 있는 효과가 있다.Second, there is an effect that a user can select whether to output the high energy second harmonic laser pulse converted from the nonlinear crystal as it is or to output it with less energy.
도 1은, 일반적인 펄스 레이저발진부에서 출력되는 레이저 펄스의 파장을 비선형 결정을 이용하여 반으로 변환하는 과정의 개념도이다.1 is a conceptual diagram of a process of converting a wavelength of a laser pulse output from a general pulse laser oscillator in half using a nonlinear crystal.
도 2는, 본 발명의 일 실시예에 의한 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치의 블록 구성도이다.2 is a block diagram of a second harmonic pulse output stabilization device in a laser system operating with a pulse according to an embodiment of the present invention.
도 3은, 본 발명의 일 실시예에 의한 선형운동수단의 장치 구성도이다.Figure 3 is a block diagram of a device of the linear motion means according to an embodiment of the present invention.
도 4는, 본 발명의 일 실시예에 의한 선형운동 컨트롤러의 상세 구성도이다.4 is a detailed configuration diagram of the linear motion controller according to an embodiment of the present invention.
도 5는, 도 4에 있어서 에너지 모드 선택부의 상세 블록 구성도이다.FIG. 5 is a detailed block diagram of the energy mode selection unit in FIG. 4.
도 6은, 본 발명의 일 실시예에 있어서 펄스 레이저발진부에서 출력되는 레이저 펄스의 파장을 비선형 결정을 이용하여 반으로 변환하는 과정의 개념도이다.6 is a conceptual diagram of a process of converting a wavelength of a laser pulse output from a pulse laser oscillator in half using a nonlinear crystal in one embodiment of the present invention.
도 7은, 본 발명의 다른 실시예에 의한 홀더의 구성도이다.7 is a block diagram of a holder according to another embodiment of the present invention.
도 8은, 도 7의 A-A선 단면도이다.8 is a cross-sectional view taken along the line A-A of FIG.
도 9는, 본 발명의 또 다른 실시예에 의한 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치의 요부 구성도이다.Fig. 9 is a diagram showing the principal parts of a second harmonic pulse output stabilizing apparatus in a laser system operating with a pulse according to still another embodiment of the present invention.
* 도면의 주요 부분에 대한 부호의 설명 *       Explanation of symbols on the main parts of the drawings
110 ; 펄스 레이저발진부 120 ; 비선형 결정110; Pulse laser oscillation unit 120; Nonlinear crystal
130 ; 광흡수 필터 210 ; 모터130; Light absorption filter 210; motor
220 ; 피니언 230 ; 랙220; Pinion 230; Rack
240 ; 홀더 241 ; 금속재질의 홀더240; Holder 241; Metal holder
241a; 통과공 241b; 삽설홈241a; Through hole 241b; Insertion groove
241c; 중공부 241d; 냉각수 유입구241c; Hollow portion 241d; Cooling water inlet
241e; 냉각수 유출구 251 ; 열전소자241e; Cooling water outlet 251; Thermoelectric element
252 ; 워터재킷 253 ; 냉각수공급부252; Water jacket 253; Cooling water supply
253a; 냉각수저장통 253b ; 연결관253a; Cooling water reservoir 253b; Connector
253c; 냉각수펌프 254 ; 고정밴드253c; Cooling water pump 254; Fixed band
300 ; 선형운동 컨트롤러 310 ; 에너지 모드 선택부300; Linear motion controller 310; Energy mode selector
311 ; 로우 모드 선택키 312 ; 하이 모드 선택키311; Low mode selection key 312; High Mode Selection Key
320 ; 제1 위치감지센서 330 ; 제2 위치감지센서320; First position sensor 330; 2nd position sensor
340 ; 제어부 350 ; 모터구동부340; Control unit 350; Motor drive
다음은 본 발명인 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치의 바람직한 실시예를 첨부한 도면을 기초로 상세하게 설명한다.The following describes in detail with reference to the accompanying drawings a preferred embodiment of the second harmonic pulse output stabilization device in a pulsed laser system according to the present invention.
도 2에는 본 발명의 일 실시예에 의한 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치의 블록 구성도가 도시되어 있고, 도 3에는 본 발명의 일 실시예에 의한 선형운동수단의 장치 구성도가 도시되어 있고, 도 4에는 본 발명의 일 실시예에 의한 선형운동 컨트롤러의 상세 구성도가 도시되어 있고, 도 5에는 도 4에 있어서 에너지 모드 선택부의 상세 블록 구성도가 도시되어 있고, 도 6에는 본 발명의 일 실시예에 있어서 펄스 레이저발진부에서 출력되는 레이저 펄스의 파장을 비선형 결정을 이용하여 반으로 변환하는 과정의 개념도가 도시되어 있다.Figure 2 is a block diagram of a second harmonic pulse output stabilization device in a laser system operating with a pulse according to an embodiment of the present invention, Figure 3 is a linear motion means according to an embodiment of the present invention 4 is a detailed block diagram of a linear motion controller according to an embodiment of the present invention, and FIG. 5 is a detailed block diagram of an energy mode selection unit in FIG. 4. FIG. 6 is a conceptual diagram illustrating a process of converting a wavelength of a laser pulse output from a pulse laser oscillator in half using a nonlinear crystal in one embodiment of the present invention.
도시된 바와 같이, 본 발명의 일 실시예에 의한 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치는, 레이저 펄스를 출력하는 펄스 레이저발진부(110)와, 상기 펄스 레이저발진부(110)에서 출력되는 제1 파장의 레이저 펄스를 제1 파장 길이의 반값을 갖는 제2 조화파(the 2nd harmonic)로 변환하여 출력하는 비선형 결정(120)과, 상기 비선형 결정(120)으로부터 변환된 제2 조화파 레이저 펄스의 에너지 일부를 흡수하여 보다 낮은 에너지를 갖는 제2 조화파가 출력되도록 하는 광흡수 필터(130)를 포함하여 구성되는 것을 특징으로 한다.As shown, the second harmonic wave output stabilization apparatus in the laser system operating with a pulse according to an embodiment of the present invention, the pulse laser oscillator 110 for outputting a laser pulse, and the pulse laser oscillator 110 Nonlinear crystal 120 converting the laser pulse of the first wavelength output from the second wavelength into a second harmonic having a half value of the first wavelength length, and outputting the nonlinear crystal 120 and the second transformed from the nonlinear crystal 120. And a light absorption filter 130 for absorbing a part of the energy of the second harmonic laser pulse to output a second harmonic wave having a lower energy.
상기 펄스 레이저발진부(110)는, 예컨대 나노 초대(nano second band), 피코 초대(pico second band), 펨토 초대(femto second band)의 펄스폭을 갖는 펄스 레이저를 발진하는 다양한 종류의 공진기로 구현될 수 있을 것이다.The pulse laser oscillator 110 may be implemented as various types of resonators for oscillating a pulse laser having a pulse width of, for example, a nanosecond band, a pico second band, and a femto second band. Could be.
본 발명의 일 실시예에 의한 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치에 있어서, 상기 광흡수 필터(130)를 선형운동시켜서 레이저 경로 상에 선택적으로 삽입하는(즉 선택적으로 삽입하거나 이탈시키는) 선형운동수단과, 상기 선형운동수단의 선형운동을 제어하는 선형운동 컨트롤러(300)가 더 포함되어 구성되는 것을 특징으로 한다.In a second harmonic pulse output stabilization device in a pulsed laser system according to an embodiment of the present invention, the light absorption filter 130 is linearly moved to selectively insert (ie, selectively) into a laser path. Insertion or separation) linear motion means, and the linear motion controller 300 for controlling the linear motion of the linear motion means is characterized in that it is configured to further comprise.
본 발명의 일 실시예에 의한 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치에 있어서, 상기 선형운동수단은, 공급되는 전원에 의하여 회전하는 모터(210)와, 상기 모터(210)와 일체로 회전하며 모터(210)의 회전을 전달하는 피니언(pinion)(220)과, 상기 피니언(220)의 회전운동을 직선운동으로 변환하는 랙(rack)(230)으로 구성되는 것을 특징으로 한다.In the second harmonic pulse output stabilization device in the pulsed laser system according to an embodiment of the present invention, the linear movement means, the motor 210 and the motor 210 to rotate by the supplied power source And a pinion (220) integrally rotating and transmitting the rotation of the motor (210), and a rack (230) for converting the rotational motion of the pinion (220) into a linear motion. It is done.
본 발명의 일 실시예에 의한 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치에 있어서, 상기 랙(230)에 고정되어 상기 랙(230)과 일체로 선형 운동하며 상기 광흡수 필터(130)의 위치를 고정하는 홀더(240)가 더 포함되어 구성되는 것을 특징으로 한다.In the second harmonic pulse output stabilization device in a pulsed laser system according to an embodiment of the present invention, the light absorbing filter is fixed to the rack 230 and linearly integrated with the rack 230 Holder (240) for fixing the position of the 130 is characterized in that it is further configured.
본 발명의 일 실시예에 의한 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치에 있어서, 상기 선형운동 컨트롤러(300)는, 출력되는 제2 조화파의 에너지를 입력하는 에너지 모드 선택부(310)와, 상기 광흡수 필터(130)가 레이저 경로 상에 위치하는 경우 제1 위치신호를 출력하는 제1 위치감지센서(320)와, 상기 광흡수 필터(130)가 레이저 경로에서 이탈되는 것을 감지하여 제2 위치신호를 출력하는 제2 위치감지센서(330)와, 상기 제1 위치감지센서(320)와 제2 위치감지센서(330)로부터 수신되는 신호를 기초로 오프 구동제어신호를 출력하고 상기 에너지 모드 선택부(310)로부터 입력된 제2 조화파의 에너지를 기초로 온 구동제어신호를 출력하는 제어부(340)와, 상기 제어부(340)로부터 수신된 오프 구동제어신호를 기초로 모터(210)의 구동을 정지하고 상기 제어부(340)로부터 수신된 온 구동제어신호를 기초로 상기 모터(210)를 구동하기 위한 모터구동신호를 출력하는 모터구동부(350)를 포함하여 구성되는 것을 특징으로 한다.In the apparatus for stabilizing a second harmonic wave output in a pulsed laser system according to an embodiment of the present invention, the linear motion controller 300 selects an energy mode for inputting energy of an output second harmonic wave. The unit 310, the first position sensor 320 outputting a first position signal when the light absorption filter 130 is positioned on the laser path, and the light absorption filter 130 are separated from the laser path. A second position sensor 330 for detecting a second position signal and outputting a second position signal, and an off driving control signal based on signals received from the first position sensor 320 and the second position sensor 330. And a control unit 340 for outputting a driving control signal based on the energy of the second harmonic wave input from the energy mode selection unit 310, and based on the off driving control signal received from the control unit 340. To drive the motor 210. And a motor driving unit 350 for outputting a motor driving signal for driving the motor 210 based on the on driving control signal received from the control unit 340.
본 발명의 일 실시예에 의한 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치에 있어서, 상기 에너지 모드 선택부(310)에는, 상기 광흡수 필터(130)가 레이저 경로 상에 삽입하도록 하여 낮은(로우 레벨(low level)) 에너지(예컨대 30 ~ 200mJ)의 제2 조화파가 출력되도록 하는 키 명령을 상기 제어부(340)로 입력하는 로우 모드 선택키(311)와, 레이저 경로 상에 삽입되어서 위치한 상기 광흡수 필터(130)가 레이저 경로에서 이탈되도록 하여 높은(하이 레벨(high level)) 에너지(예컨대 200 ~ 400mJ)의 제2 조화파가 출력되도록 하는 키 명령을 상기 제어부(340)로 입력하는 하이 모드 선택키(312)가 구비되어 있는 것을 특징으로 한다.In the second harmonic pulse output stabilization device in a pulsed laser system according to an embodiment of the present invention, the light absorption filter 130 is inserted into the laser path in the energy mode selector 310. A low mode selection key 311 for inputting a key command to the controller 340 to output a second harmonic wave of low (low level) energy (for example, 30 to 200 mJ). The control unit 340 generates a key command for causing the light absorption filter 130 inserted and inserted in the control unit to be separated from the laser path so that a second harmonic wave of high (high level) energy (eg, 200 to 400 mJ) is output. It is characterized in that the high mode selection key 312 for inputting.
본 발명의 일 실시예에 의한 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치에 있어서, 상기 광흡수 필터(130)의 에너지 흡수율은 1%~99%인 것을 특징으로 한다.In the second harmonic pulse output stabilization apparatus in a pulsed laser system according to an embodiment of the present invention, the energy absorption rate of the light absorption filter 130 is characterized in that 1% to 99%.
본 발명의 일 실시예에 의한 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치에 있어서, 상기 비선형 결정(120)은, KTP(KTiOPO4), LBO(LiB3O5), BBO(BaB2O4) 중에서 선택된 어느 하나인 것을 특징으로 한다.In the second harmonic pulse output stabilization device in a pulsed laser system according to an embodiment of the present invention, the nonlinear crystal 120 is KTP (KTiOPO 4 ), LBO (LiB 3 O 5 ), BBO It is characterized in that it is any one selected from (BaB 2 O 4 ).
도 7에는 본 발명의 다른 실시예에 의한 홀더(241)의 구성도가 도시되어 있고, 도 8에는 도 7의 A-A선 단면도가 도시되어 있다.FIG. 7 is a block diagram of a holder 241 according to another embodiment of the present invention, and FIG. 8 is a cross-sectional view taken along the line A-A of FIG.
도 7 및 도 8에 도시된 바와 같이, 본 발명의 다른 실시예에 의한 경우에 있어서는, 상기 홀더는 광흡수 필터(130)에서 발생하는 열을 원활하게 방열할 수 있도록 열전도도가 우수한 금속재질의 홀더(241)로 구현되고, 상기 광흡수 필터(130)를 내포하여 안착할 수 있도록 상기 금속재질의 홀더(241)에는 삽설홈(241b)이 내부에 형성되어 있으며, 상기 광흡수 필터(130)는 상기 삽설홈(241b)에 밀착되어서 내설됨으로써 금속재질의 홀더(241)를 통해서 원활하게 방열할 수 있도록 하며, 상기 금속재질의 홀더(241)에는 레이저 펄스가 통과할 수 있는 통과공(241a)이 형성되어 있는 것을 특징으로 한다.As shown in FIG. 7 and FIG. 8, in another embodiment of the present invention, the holder is made of a metal material having excellent thermal conductivity so as to smoothly dissipate heat generated from the light absorption filter 130. It is implemented as a holder 241, the insertion groove 241b is formed in the holder 241 of the metal material so as to contain the light absorption filter 130, the light absorption filter 130 Is in close contact with the insertion groove (241b) to be smoothly dissipated through the metal holder 241, the through hole (241a) through which the laser pulse can pass through the metal holder (241) It is characterized by being formed.
상기 광흡수 필터(130)는 제2 조화파가 입사되면 이를 열로 변환하므로 즉, 흡수율(%)에 따라 발열하는 열의 양이 달라지므로 광흡수 필터(130)의 종류에 따라 광흡수 필터(130)의 냉각을 위한 방열판 역할을 하면서도 동시에 취부하는 역할을 동시에 수행하는 금속재질의 홀더(241)가 필요하므로, 본 실시예에서는 광흡수 필터(130)에서 발생하는 열을 방열할 수 있는 구조를 채택하였다.When the second harmonic wave is incident, the light absorption filter 130 converts it into heat, that is, the amount of heat generated varies depending on the absorption rate (%), so that the light absorption filter 130 depends on the type of the light absorption filter 130. Since a metal holder 241 that simultaneously serves as a heat sink for cooling and needs to be mounted at the same time is required, in this embodiment, a structure capable of dissipating heat generated from the light absorption filter 130 is adopted. .
또한, 본 발명의 일 실시예에 의한 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치에 있어서, 상기 금속재질의 홀더(241)의 일측에는 냉각수가 유입되는 냉각수 유입구(241d)가 형성되어 있고 타측에는 냉각수 유출구(241e)가 형성되어 있으며, 상기 냉각수 유입구(241d)를 통해서 유입된 냉각수가 냉각수 유출구(241e)를 통해서 흘러나가도록 금속재질의 홀더(241)의 내부에는 중공부(241c)가 형성되어 있는 것을 특징으로 한다.In addition, in the second harmonic pulse output stabilization device in the laser system operating with a pulse according to an embodiment of the present invention, the coolant inlet 241d through which the coolant flows is provided at one side of the holder 241 of the metal material. And a cooling water outlet 241e is formed at the other side, and a hollow part inside the holder 241 made of metal so that the cooling water introduced through the cooling water inlet 241d flows out through the cooling water outlet 241e. 241c) is formed.
상기 냉각수 유입구(241d)는 외부의 냉각수 공급호스(h1)에 연결되어서 냉각수를 공급받을 것이고, 상기 냉각수 유출구(241e)에는 열교환된 냉각수를 외부로 유출하기 위한 냉각수 유출호스(h2)가 연결될 수 것이다.The coolant inlet 241d may be connected to an external coolant supply hose h1 to receive coolant, and the coolant outlet 241e may be connected to a coolant outlet hose h2 for flowing out the heat exchanged coolant to the outside. .
상기와 같은 구성에 의하면 냉각수의 공급에 의해서 방열 효율을 더욱 높일 수 있는 이점이 있다.According to the configuration as described above there is an advantage that can further increase the heat radiation efficiency by the supply of cooling water.
한편, 상기 광흡수 필터(130)를 냉각하는 방식은 상기와 같은 금속재질의 홀더에 한정되지 않고, 예컨대 도 9에 도시된 실시예에 의한 방식으로도 구현할 수가 있다.On the other hand, the method of cooling the light absorption filter 130 is not limited to the holder of the metal material as described above, it can be implemented by the method according to the embodiment shown in FIG.
이하에서 이에 대하여 상세하게 설명한다.This will be described in detail below.
도 9에는 본 발명의 또 다른 실시예에 의한 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치의 요부 구성도가 도시되어 있다.9 is a main configuration diagram of a second harmonic pulse output stabilization apparatus in a pulsed laser system according to another embodiment of the present invention.
도 9에 도시된 바와 같이, 본 발명의 또 다른 실시예에 의한 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치는, 상기 광흡수 필터(130)에 접촉 구비되어서, 인가되는 전원에 의하여 상기 광흡수 필터(130)의 열을 흡수한 후 열전소자(251)와, 상기 열전소자(251)에 접촉 구비되고, 공급되는 냉각수에 의하여 상기 열전소자(251)에서 방사되는 열을 방열하기 위한 금속재질의 워터재킷(water jacket)(252)과, 상기 워터재킷(252)으로 냉각수를 공급하기 위한 냉각수공급부(253)와, 상기 워터재킷(252)과 상기 광흡수 필터(130)를 연결하기 위한 고정밴드(254)가 가 더 포함되어서 구성되는 것을 특징으로 한다.As shown in FIG. 9, the second harmonic pulse output stabilization device in the pulsed laser system according to another embodiment of the present invention is provided in contact with the light absorption filter 130 to supply power. After absorbing the heat of the light absorption filter 130 by the thermal element 251 and the thermoelectric element 251 is provided in contact with, radiating heat radiated from the thermoelectric element 251 by the supplied cooling water A metal water jacket 252, a cooling water supply unit 253 for supplying cooling water to the water jacket 252, the water jacket 252 and the light absorption filter 130 The fixed band 254 for connecting is characterized in that it is configured to further include.
그리고, 상기 냉각수공급부(253)는, 냉각수를 저장하는 냉각수저장통(253a)과, 상기 냉각수저장통(253a)과 상기 워터재킷(252)을 연결하는 연결관(253b)과, 상기 연결관(253b)을 통해 냉각수저장통(253a)의 냉각수를 상기 워터재킷(252)으로 강제 공급하기 위한 냉각수펌프(253c)로 구성되는 것을 특징으로 한다.The cooling water supply unit 253 includes a cooling water storage tank 253a for storing cooling water, a connection pipe 253b for connecting the cooling water storage tank 253a, and the water jacket 252, and the connection pipe 253b. It is characterized by consisting of a cooling water pump 253c for forcibly supplying the cooling water of the cooling water storage tank 253a to the water jacket 252 through.
상기와 같은 구성에 의하면, 열전소자(251)의 동작에 의해서 광흡수 필터(130)에서 발생하는 열을 빼앗고, 냉각수펌프(253c)의 동작에 의해서 냉각수가 워터재킷(252)으로 유입되어서 열전소자(251)를 방열한다.According to the configuration described above, the heat generated from the light absorption filter 130 is removed by the operation of the thermoelectric element 251, and the cooling water flows into the water jacket 252 by the operation of the cooling water pump 253c, and thus the thermoelectric element. Heat dissipation 251.
다음은 상기와 같은 구성을 가지는 본 발명인 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치의 동작과정에 대하여 기술한다.The following describes the operation process of the second harmonic pulse output stabilization device in the pulse system laser system of the present invention having the configuration as described above.
먼저, 낮은 에너지(예컨대 30 ~ 200mJ)의 제2 조화파 출력을 획득하고자 하는 경우 로우 모드 선택키(311)를 선택한다.First, when the second harmonic output of low energy (eg, 30 to 200 mJ) is to be obtained, the low mode selection key 311 is selected.
로우 모드 선택키(311)가 입력되면 제어부(340)는 로우 모드 설정 명령을 인식하여 모터(210)를 A 방향으로 회전시키는 온 구동제어신호를 출력한다.When the low mode selection key 311 is input, the controller 340 recognizes the low mode setting command and outputs an on driving control signal for rotating the motor 210 in the A direction.
상기 제어부(340)로부터 모터(210)를 A 방향으로 회전시키는 온 구동제어신호를 수신한 모터구동부(350)는 상기 모터(210)로 모터구동신호를 출력하고, 이때 모터(210)는 A 방향으로 회전하게 된다. 상기 모터구동신호는 예컨대 극성을 가지는 DC 전류임은 물론이다.The motor driving unit 350 that receives the on-drive control signal for rotating the motor 210 in the A direction from the control unit 340 outputs a motor driving signal to the motor 210, wherein the motor 210 is in the A direction. Will rotate. Of course, the motor drive signal is a DC current having a polarity, of course.
상기와 같이 모터(210)가 A 방향으로 회전함에 따라서 피니언(220) 역시 A방향으로 회전하게 되고, 그 결과 상기 랙(230)은 A 방향으로 직선운동하게 된다.As the motor 210 rotates in the A direction as described above, the pinion 220 also rotates in the A direction, and as a result, the rack 230 linearly moves in the A direction.
상기와 같이 랙(230)이 A 방향으로 직선운동함에 따라서 상기 광흡수 필터(130)가 레이저 경로 상에 위치하게 되고, 이때 상기 제1 위치감지센서(320)는 이를 감지하여 제1 위치신호를 출력한다.As described above, as the rack 230 linearly moves in the A direction, the light absorption filter 130 is positioned on the laser path. At this time, the first position sensor 320 detects the first position signal and detects the first position signal. Output
상기 제1 위치감지센서(320)로부터 제1 위치신호를 수신한 제어부(340)는 오프 구동제어신호를 모터구동부(350)로 출력하고, 상기 제어부(340)로부터 오프 구동제어신호를 수신한 모터구동부(350)는 전원공급부(미도시)로부터 모터(210)로 공급되는 전류를 차단하고, 그 결과 상기 모터(210)는 구동이 정지된다.The control unit 340 that receives the first position signal from the first position sensor 320 outputs an off driving control signal to the motor driving unit 350, and receives the off driving control signal from the control unit 340. The driver 350 cuts off the current supplied from the power supply unit (not shown) to the motor 210, and as a result, the motor 210 stops driving.
이때, 상기 랙(230)은 직선운동을 멈추게 되고 상기 광흡수 필터(130)는 레이저 경로 상에 정위치하게 된다.At this time, the rack 230 stops the linear motion and the light absorption filter 130 is positioned on the laser path.
상기와 같이 광흡수 필터(130)가 레이저 경로 상에 삽입되면 광흡수 필터(130)가 소정의 흡수율(예컨대 50%)로 레이저 펄스의 에너지를 흡수하게 된다.When the light absorption filter 130 is inserted in the laser path as described above, the light absorption filter 130 absorbs the energy of the laser pulse at a predetermined absorption rate (for example, 50%).
도 6의 (a) 및 (b)에 도시된 바와 같이 펄스 레이저발진부(110)에서 발진된 PTP가 낮고(예컨대 1%, 4%) 높은 에너지 영역(예컨대 800mJ, 400mJ)의 1064nm의 레이저 펄스는 비선형 결정(120)을 통과하면서 파장의 길이가 반인 532nm 파장으로 변환되고, 소정의 흡수율(예컨대 50%)을 갖는 광흡수 필터(130)를 통과하면서 에너지가 각각 200mJ과 60mJ로 에너지 레벨이 낮아진 레이저 펄스를 출력하게 된다.As shown in (a) and (b) of FIG. 6, the laser pulse of 1064 nm having a low PTP (for example, 1% and 4%) and a high energy region (for example, 800mJ, 400mJ) is generated in the pulse laser oscillator 110. The laser is converted to a 532 nm wavelength having a half length of wavelength while passing through the nonlinear crystal 120, and has a low energy level of 200 mJ and 60 mJ while passing through the light absorption filter 130 having a predetermined absorption rate (for example, 50%). It will output a pulse.
다음은 PTP 값이 작은 높은 에너지의 제 2 조화파 레이저 펄스를 그 에너지양의 변화가 없이 그대로 출력하는 경우의 동작 모드에 대하여 기술한다.The following describes an operation mode in which the high energy second harmonic wave pulse having a small PTP value is output as it is without changing the amount of energy.
사용자가 하이 모드 설정키(312)을 누르면, 에너지 모드 선택부 (310)로부터 하이 모드를 수신한 제어부(340)는 모터(210)를 B 방향으로 회전시키는 온 구동제어신호를 모터구동부(350)로 출력한다.When the user presses the high mode setting key 312, the control unit 340 that receives the high mode from the energy mode selection unit 310 transmits an on-drive control signal for rotating the motor 210 in the B direction to the motor driving unit 350. Will output
상기 제어부(340)로부터 모터(210)를 B 방향으로 회전시키는 온 구동제어신호를 수신한 모터구동부(350)는 상기 모터(210)로 모터구동신호를 출력하고, 이때 모터(210)와 피니언(220)은 B 방향으로 회전하고 그 결과 상기 랙(230)은 B 방향으로 직선운동하게 된다.The motor driving unit 350 receiving the on-drive control signal for rotating the motor 210 in the B direction from the control unit 340 outputs a motor driving signal to the motor 210, where the motor 210 and the pinion ( 220 rotates in the B direction, and as a result, the rack 230 is linearly moved in the B direction.
상기와 같이 랙(230)이 B 방향으로 직선운동함에 따라서 상기 광흡수 필터(130)가 레이저 경로 상에서 이탈하게 되고, 상기 광흡수 필터(130)가 레이저 경로 상에서 완전히 이탈하는 순간 제2위치감지센서(330)가 이를 감지하여 제2위치신호를 출력한다.As described above, as the rack 230 linearly moves in the B direction, the light absorption filter 130 is separated from the laser path, and the second position detecting sensor is instantaneously released from the laser path. 330 detects this and outputs a second position signal.
상기 제2위치신호를 수신한 제어부(340)는 오프 구동제어신호를 모터구동부(350)로 출력하여 모터(210)로 공급되는 전류를 차단하여 모터(210)의 구동을 정지시킨다.The control unit 340 receiving the second position signal outputs the off driving control signal to the motor driving unit 350 to cut off the current supplied to the motor 210 to stop the driving of the motor 210.
상기와 같은 과정으로 광흡수 필터(130)가 레이저 경로 상에서 제거되면 비선형 결정(120)으로부터 변환된 높은 에너지의 레이저 펄스는 에너지양의 변화없이 출력된다.When the light absorption filter 130 is removed in the laser path as described above, the high energy laser pulse converted from the nonlinear crystal 120 is output without changing the amount of energy.
따라서, 광흡수 필터(130)를 레이저 경로 상에 선택적으로 정위치 또는 이탈시킬 수 있어서, 비선형 결정에 항상 낮은 PTP를 갖는 큰 에너지의 기본파 레이저 펄스를 입사시키어 낮은 PTP를 갖는 소망하는 작은 또는 큰 에너지 영역의 안정된 제2 조화파 레이저 펄스를 획득할 수 있게 된다.Accordingly, the light absorption filter 130 can be selectively positioned or displaced on the laser path, thereby injecting a large energy fundamental wave laser pulse having a low PTP at all times into the nonlinear crystal, thereby reducing the desired small or large with a low PTP. A stable second harmonic laser pulse in the energy domain can be obtained.
한편, 광흡수 필터를 레이저 경로 상에 선택적으로 삽입하기 위한 이동수단에는 본 실시예의 선형운동수단 이외에도 회전운동수단의 회전운동에 의해 광흡수 필터가 선택적으로 삽입되는 구성으로도 변형될 수 있다. 이 경우 회전운동수단에는 원판과 원판을 회전운동시키는 모터을 포함하고, 원판의 외주 일부에 광흡수 필터가 장착되며, 원판의 외주 바깥쪽 광흡수 필터가 위치하는 지점에 레이저 경로가 위치하도록 구성된다. 회전운동수단의 모터는 컨트롤러에 의해 제어되고, 컨트롤러의 제어에 의해 모터가 회전함에 따라 원판 외주의 광흡수 필터가 레이저 경로상에 선택적으로 삽입될 수 있게 된다. 이와 같이 광흡수 필터를 레이저 경로 상에 선택적으로 삽입시키는 이동수단은 다양한 변형이 가능하며, 위 실시예에 한정적으로 해석될 것이 아니다.On the other hand, the moving means for selectively inserting the light absorbing filter on the laser path may be modified in a configuration in which the light absorbing filter is selectively inserted by the rotational movement of the rotational movement means in addition to the linear movement means of this embodiment. In this case, the rotary motion means includes a disk and a motor for rotating the disk, and a light absorption filter is mounted on a portion of the outer circumference of the disk, and the laser path is positioned at a point where the outer light absorption filter is located on the outer circumference of the disk. The motor of the rotary motion means is controlled by a controller, and as the motor rotates under the control of the controller, the light absorption filter of the disk outer circumference can be selectively inserted in the laser path. As such, the movement means for selectively inserting the light absorption filter on the laser path may be variously modified, and is not limited to the above embodiment.
상기의 본 발명의 실시예는 본 발명의 기술적 사상의 일 실시예에 불과하며, 동업계의 통상의 기술자에 있어서는, 본 발명의 기술적인 사상 내에서 다른 변형된 실시가 가능함은 물론이다.The above embodiments of the present invention are merely one embodiment of the technical idea of the present invention, and of course, other modifications can be made within the technical idea of the present invention by those skilled in the art.

Claims (10)

  1. 레이저 펄스를 출력하는 펄스 레이저발진부;A pulse laser oscillator for outputting a laser pulse;
    상기 펄스 레이저발진부에서 출력되는 제1 파장의 레이저 펄스를 제1 파장 길이의 반값을 갖는 제2 조화파(the 2nd harmonic)로 변환하여 출력하는 비선형 결정;A non-linear crystal for converting the laser pulse of the first wavelength output from the pulse laser oscillator into a second harmonic having a half value of the first wavelength length and outputting the second harmonic;
    상기 비선형 결정으로부터 변환된 제2 조화파 레이저 펄스의 에너지 일부를 흡수하여 보다 낮은 에너지를 갖는 제2 조화파가 출력되도록 하는 광흡수 필터;A light absorption filter for absorbing a part of energy of a second harmonic laser pulse converted from the nonlinear crystal to output a second harmonic wave having a lower energy;
    상기 광흡수 필터를 이동시켜서 레이저 경로 상에 선택적으로 삽입하는 이동수단; 및Moving means for moving the light absorption filter and selectively inserting the light absorption filter into a laser path; And
    상기 이동수단을 제어하는 컨트롤러를 포함하여 구성되는 것을 특징으로 하는 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치.A second harmonic pulse output stabilization device in a pulsed laser system, characterized in that it comprises a controller for controlling the movement means.
  2. 제 1 항에 있어서,The method of claim 1,
    상기 이동수단은,The means for moving,
    공급되는 전원에 의하여 회전하는 모터;A rotary motor by a power source supplied;
    상기 모터와 일체로 회전하며 모터의 회전을 전달하는 피니언(pinion);A pinion that rotates integrally with the motor and transmits rotation of the motor;
    상기 피니언의 회전운동을 직선운동으로 변환하는 랙(rack)으로 구성되는 것을 특징으로 하는 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치.The second harmonic pulse output stabilization device in a pulsed laser system, characterized in that consisting of a rack (rack) for converting the rotational motion of the pinion into a linear motion.
  3. 제 2 항에 있어서,The method of claim 2,
    상기 랙에 고정되어 상기 랙과 일체로 선형 운동하며 상기 광흡수 필터의 위치를 고정하는 홀더가 더 포함되어 구성되는 것을 특징으로 하는 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치.The second harmonic pulse output stabilization device in a pulsed laser system, characterized in that it further comprises a holder fixed to the rack and linear movement integral with the rack to fix the position of the light absorption filter.
  4. 제 1 항에 있어서,The method of claim 1,
    상기 컨트롤러는,The controller,
    출력되는 제2 조화파의 에너지를 입력하는 에너지 모드 선택부;An energy mode selection unit for inputting energy of the second harmonic wave output;
    상기 광흡수 필터가 레이저 경로 상에 위치하는 경우 제1 위치신호를 출력하는 제1 위치감지센서;A first position sensor for outputting a first position signal when the light absorption filter is positioned on a laser path;
    상기 광흡수 필터가 레이저 경로에서 이탈되는 것을 감지하여 제2 위치신호를 출력하는 제2 위치감지센서;A second position sensor for detecting a deviation of the light absorption filter from the laser path and outputting a second position signal;
    상기 제1 위치감지센서와 제2 위치감지센서로부터 수신되는 신호를 기초로 오프 구동제어신호를 출력하고, 상기 에너지 모드 선택부로부터 입력된 제2 조화파의 에너지를 기초로 온 구동제어신호를 출력하는 제어부;An off driving control signal is output based on signals received from the first position sensing sensor and the second position sensing sensor, and an on driving control signal is output based on energy of a second harmonic wave input from the energy mode selection unit; A control unit;
    상기 제어부로부터 수신된 오프 구동제어신호를 기초로 모터의 구동을 정지하고, 상기 제어부로부터 수신된 온 구동제어신호를 기초로 상기 모터를 구동하기 위한 모터구동신호를 출력하는 모터구동부를 포함하여 구성되는 것을 특징으로 하는 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치.And a motor driving unit for stopping driving of the motor based on the off driving control signal received from the controller and outputting a motor driving signal for driving the motor based on the on driving control signal received from the controller. And a second harmonic pulse output stabilization device in a pulsed laser system.
  5. 제 4 항에 있어서,The method of claim 4, wherein
    상기 에너지 모드 선택부에는,In the energy mode selection unit,
    상기 광흡수 필터가 레이저 경로 상에 삽입하도록 하여 로우 레벨(low level) 에너지의 제2 조화파가 출력되도록 하는 키 명령을 상기 제어부로 입력하는 로우 모드 선택키와,A low mode selection key for inputting a key command to the control unit to insert the light absorption filter on the laser path to output a second harmonic wave of low level energy;
    레이저 경로 상에 삽입되어서 위치한 상기 광흡수 필터가 레이저 경로에서 이탈되도록 하여 하이 레벨(high level) 에너지의 제2 조화파가 출력되도록 하는 키 명령을 상기 제어부로 입력하는 하이 모드 선택키가 구비되어 있는 것을 특징으로 하는 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치.And a high mode selection key for inputting a key command to the controller to cause the light absorption filter inserted and positioned on the laser path to be separated from the laser path to output a second harmonic wave of high level energy. And a second harmonic pulse output stabilization device in a pulsed laser system.
  6. 제 3 항에 있어서,The method of claim 3, wherein
    상기 홀더는 광흡수 필터에서 발생하는 열을 원활하게 방열할 수 있도록 금속재질의 홀더로 구현되고,The holder is implemented as a metal holder to smoothly dissipate heat generated from the light absorption filter,
    상기 광흡수 필터를 내포하여 안착할 수 있도록 상기 금속재질의 홀더에는 삽설홈이 내부에 형성되어 있으며, Inserting grooves are formed in the holder of the metal material to be seated by containing the light absorption filter,
    상기 광흡수 필터는 상기 삽설홈에 밀착되어서 내설됨으로써 금속재질의 홀더를 통해서 원활하게 방열할 수 있도록 하며,The light absorbing filter is in close contact with the insertion groove to be smoothly dissipated through the metal holder.
    상기 금속재질의 홀더에는 레이저 펄스가 통과할 수 있는 통과공이 형성되어 있는 것을 특징으로 하는 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치.The second harmonic pulse output stabilizing device of the pulsed laser system, characterized in that the metal holder is formed with a through hole through which the laser pulse can pass.
  7. 제 6 항에 있어서,The method of claim 6,
    상기 금속재질의 홀더의 일측에는 냉각수가 유입되는 냉각수 유입구가 형성되어 있고 타측에는 냉각수 유출구가 형성되어 있으며,Cooling water inlet is formed on one side of the holder of the metal material and the cooling water inlet is formed on the other side, the cooling water outlet is formed on the other side,
    상기 냉각수 유입구를 통해서 유입된 냉각수가 냉각수 유출구를 통해서 흘러나가도록 금속재질의 홀더의 내부에는 중공부가 형성되어 있는 것을 특징으로 하는 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치.The second harmonic pulse output stabilization device in a pulsed laser system, characterized in that the hollow portion is formed inside the holder of the metal material so that the coolant flowing through the cooling water inlet flows through the cooling water outlet.
  8. 제 1 항에 있어서,The method of claim 1,
    상기 광흡수 필터에 접촉 구비되어서, 인가되는 전원에 의하여 상기 광흡수 필터의 열을 흡수한 후 열전소자;A thermoelectric element provided in contact with the light absorption filter and absorbing heat of the light absorption filter by an applied power;
    상기 열전소자에 접촉 구비되고, 공급되는 냉각수에 의하여 상기 열전소자에서 방사되는 열을 방열하기 위한 금속재질의 워터재킷(water jacket);A metal water jacket provided in contact with the thermoelectric element and configured to dissipate heat radiated from the thermoelectric element by the supplied cooling water;
    상기 워터재킷으로 냉각수를 공급하기 위한 냉각수공급부가 더 포함되어서 구성되는 것을 특징으로 하는 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치.The second harmonic pulse output stabilization device in a pulsed laser system, characterized in that it further comprises a cooling water supply for supplying cooling water to the water jacket.
  9. 제 8 항에 있어서,The method of claim 8,
    상기 열전소자 및 워터재킷을 상기 광흡수 필터에 고정하기 위한 고정밴드가 더 포함되어서 구성되는 것을 특징으로 하는 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치.The second harmonic pulse output stabilization device in a pulsed laser system, characterized in that it further comprises a fixing band for fixing the thermoelectric element and the water jacket to the light absorption filter.
  10. 제 8 항에 있어서,The method of claim 8,
    상기 냉각수공급부는,The cooling water supply unit,
    냉각수를 저장하는 냉각수저장통;A coolant reservoir for storing coolant;
    상기 냉각수저장통과 상기 워터재킷을 연결하는 연결관;A connection pipe connecting the coolant reservoir and the water jacket;
    상기 연결관을 통해 냉각수저장통의 냉각수를 상기 워터재킷으로 강제 공급하기 위한 냉각수펌프로 구성되는 것을 특징으로 하는 펄스로 동작하는 레이저 시스템에서의 제2 조화파 펄스 출력 안정화 장치.The second harmonic pulse output stabilization device in a pulsed laser system, characterized in that configured as a coolant pump for forcibly supplying the coolant in the coolant reservoir through the connecting pipe to the water jacket.
PCT/KR2010/002680 2009-04-28 2010-04-28 Apparatus for stabilizing second harmonic pulse output in a laser system operating by pulses WO2010126300A2 (en)

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