WO2010116491A1

WO2010116491A1 - Equipment design and manufacturing support system

Info

Publication number: WO2010116491A1
Application number: PCT/JP2009/057125
Authority: WO
Inventors: 立志飯森
Original assignee: 株式会社システムブイ
Priority date: 2009-04-07
Filing date: 2009-04-07
Publication date: 2010-10-14
Also published as: WO2010116547A1

Abstract

Disclosed is an equipment design and manufacturing support system that supports the design and manufacture of manufacturing equipment controlled by a computer or a PLC. The equipment design and manufacturing support system has an equipment simulator, an equipment controller, and an EES. The equipment simulator accepts input of equipment layout data for manufacturing equipment and, based on the equipment layout data and control commands from the equipment controller, executes simulation processing as virtual manufacturing equipment with a simulation program corresponding to individual classes of the manufacturing equipment. The equipment controller sends control commands, for controlling the manufacturing equipment as well as the virtual manufacturing equipment in the equipment simulator, to the manufacturing equipment and the equipment simulator. The EES obtains both the execution results of the simulation processing by the virtual manufacturing equipment in the equipment simulator and the execution results in the manufacturing equipment, and displays the individual execution results to permit comparison.

Description

Equipment design and manufacturing support system

The present invention relates to a device design / manufacturing support system that supports design / manufacturing of a manufacturing device. Preferably, the present invention relates to an apparatus design / manufacturing support system that supports design / manufacturing of a manufacturing apparatus controlled by a computer or PLC (Programmable Logic Controller) by using a two-dimensional or three-dimensional simulation.

Conventionally, in order to manufacture various types of manufacturing equipment represented by semiconductor manufacturing equipment, flat panel manufacturing equipment, solar cell manufacturing equipment, etc., mechanical drawings are first created (mechanical design phase), and then electrical The procedure was to create a drawing (electrical design phase) and finally to perform software design (software design phase). A schematic diagram of the procedure of a conventional manufacturing apparatus is shown in FIG.

In other words, after each design phase of mechanical design and electrical design has been completed, parts are ordered, assembled from the stage when they are delivered, software is introduced there, and the manufacturing equipment functions normally. Verify that. In the case of functioning normally, the apparatus can be operated by being connected to an apparatus controller that controls the manufacturing apparatus.

Therefore, whether the software created in the software design phase functions normally could not be confirmed unless it was in the verification stage (inspection stage) after the manufacturing equipment was actually assembled. In addition, since the concept of manufacturing equipment cannot be shared among mechanical, electrical, and software designers, problems due to design errors frequently occur.

In addition, after assembling the manufacturing equipment, software is introduced and verified, so if there is a problem, it is necessary to verify again from the beginning of the mechanical design phase and electrical design phase. It takes a period of time to complete the manufacturing equipment. For this reason, it is not possible to take a sufficient period of time for recovery from the occurrence of a problem. In addition, it is not possible to secure a sufficient period for verifying the performance of the manufacturing apparatus.

Therefore, for example, as shown in Patent Document 1 below, there is a system that can reduce the labor of verification using an actual machine by using a control simulation system that performs a simulation.

JP 2008-1000031 A

By using the simulation system described in Patent Document 1 above, it is possible to reduce the labor of verification by simulating the robot control alone and observing its operation.

However, since the manufacturing equipment incorporates multiple parts, it is not possible to confirm the operation of the entire manufacturing equipment. In the case of Patent Document 1, since simulation is performed using control information from a robot that is an actual machine (for example, information that indicates the state of a device in a real environment in time series), there is a robot that is an actual machine. Otherwise, a control simulation cannot be performed. Therefore, as in the present invention, there is a problem that it cannot be used for design / manufacturing support of the manufacturing apparatus.

In the case of Patent Document 1, it is possible to compare the operation of the actual machine and the animation, but the developer only visually confirms the operation of the actual machine and the animation display. It cannot be confirmed whether a difference (for example, processing time or processing timing) has occurred.

Therefore, in view of the above problems, the present inventors have invented a device design / manufacturing support system that supports design / manufacturing of a manufacturing device controlled by a computer or PLC.

A first invention is a device design / manufacturing support system that supports design / manufacturing of a manufacturing device, and the device design / manufacturing support system includes a device simulator, a device controller, and an EES. , Accepting the input of the device layout data of the manufacturing device, and based on the device layout data and the control command from the device controller, simulation as a virtual manufacturing device by a simulation program corresponding to each hierarchy of the manufacturing device The apparatus controller executes a process, and passes a control command for controlling a virtual manufacturing apparatus in the manufacturing apparatus and the apparatus simulator to the manufacturing apparatus and the apparatus simulator, and the EES is in the apparatus simulator. Simulation with virtual manufacturing equipment And the execution result of the emission process, execution result and the acquired respectively in the production apparatus, and displays to allow comparison of the execution result, a device design and fabrication support system.

By configuring as in the present invention, it is possible to check the operation of software or the like before the manufacturing apparatus which is an actual machine is assembled. Further, simulation processing can be performed without a manufacturing apparatus which is an actual machine. By receiving a control command from the device controller used for controlling the actual machine also during the simulation process, the process in the same environment can be performed in the case of the simulation process and the process by the actual machine, and executed by EES. The results can be compared. EES (Equipment Engineering System) indicates an apparatus engineering system, and details thereof will be described later.

The above-described invention can also be configured as follows. That is, a device design / manufacturing support system for supporting design / manufacturing of a manufacturing device, wherein the device design / manufacturing support system includes a device simulator, a device controller, and an EES, and the device simulator includes the manufacturing device. Storing CAD data including at least position information of parts of each layer constituting the structure, a modeling layout unit that receives input of operation parameters corresponding to the CAD data, and device layout data including at least the CAD data and operation parameters Based on the data storage unit, the device layout data stored in the data storage unit, and the control command received from the device controller, the simulation program corresponding to each level of the manufacturing device as a virtual manufacturing device Run simulation process A simulation processing unit, and a display processing unit for displaying a simulation state in the simulation processing unit on a display device of the device simulator, and the device controller performs an actual control mode for controlling the manufacturing device And switching to a simulation mode for controlling the virtual manufacturing apparatus in the apparatus simulator, and in the simulation mode, a control command is passed to the virtual manufacturing apparatus in the apparatus simulator, In the actual control mode, by passing a control command to the actually manufactured manufacturing apparatus, the manufacturing apparatus and the virtual manufacturing apparatus are controlled, and the EES is a virtual in the apparatus simulator. Execution result of simulation process in manufacturing equipment , Execution result and the acquired respectively in the production apparatus, and displays to allow comparison of the execution result, a device design and fabrication support system.

In the above-described invention, the following configuration can also be added. That is, the modeling layout unit of the apparatus simulator inputs the new operation parameter reflecting the result of comparison between the execution result of the virtual manufacturing apparatus and the execution result of the manufacturing apparatus in the EES. Accepted by the modeling layout unit, the simulation processing unit performs the virtual manufacturing by a simulation program corresponding to each layer of the manufacturing apparatus based on the received new operation parameter and a control command from the apparatus controller. This is a device design / manufacturing support system that again executes a simulation process as a device.

A new operation parameter can be set by acquiring the execution result by the device simulator and the execution result by the actual machine with EES and comparing them. The simulation accuracy can be further improved by performing the simulation process in the apparatus simulator again using the new operation parameters.

The device simulator in each of the above inventions can be configured as in the following invention. That is, a device simulator used in a device design / manufacturing support system that supports design / manufacturing of a manufacturing device, the device simulator including CAD data including at least position information of parts of each layer constituting the manufacturing device; A modeling layout unit that receives input of operation parameters corresponding to CAD data; a data storage unit that stores device layout data including at least the CAD data and operation parameters; and the device layout data stored in the data storage unit; Each level of the manufacturing apparatus based on the control command for the virtual manufacturing apparatus received from the apparatus controller capable of controlling both the actually manufactured manufacturing apparatus and the virtual manufacturing apparatus in the apparatus simulator By the simulation program corresponding to A device used in a device design and manufacturing support system comprising: a simulation processing unit that executes a simulation process as the virtual manufacturing device; and a display processing unit that displays a simulation status in the simulation processing unit on a display device of the device simulator It is a simulator.

The program for starting the device simulator can be configured as follows. That is, a device simulator used in a device design / manufacturing support system that supports design and manufacturing of a manufacturing device includes CAD data including at least position information of parts of each layer constituting the manufacturing device, and operation parameters corresponding to the CAD data. The modeling layout unit that associates the CAD data with the operation parameters and stores them as device layout data in the predetermined storage device, the device layout data stored in the storage device, and the actual production Based on the control command for the virtual manufacturing apparatus received from the apparatus controller capable of controlling both the manufacturing apparatus and the virtual manufacturing apparatus in the apparatus simulator, the simulation program corresponding to each level of the manufacturing apparatus , A stain as the virtual manufacturing device Simulation processing unit for executing configuration process, the simulation conditions in the simulation processing unit, a display processing unit for displaying on the display device of the device simulator, a program device simulator used in device design and fabrication support system to function as a.

It becomes possible to employ the apparatus design and manufacturing support method of the present invention using the apparatus simulator described above. That is, a device design / manufacturing support method for supporting design / manufacturing of a manufacturing device using a device simulator, wherein CAD data including at least position information of parts of each layer constituting the manufacturing device is generated in CAD As apparatus layout data including at least the CAD data and the operation parameters, the apparatus simulator reads the operation parameters corresponding to the CAD data, the apparatus simulator reads the operation parameters, and associates the operation parameters with the read CAD data. And storing the control command for the virtual manufacturing apparatus received from the apparatus controller capable of controlling both the actually manufactured manufacturing apparatus and the virtual manufacturing apparatus in the apparatus simulator in the apparatus simulator. Device layout data Based on the simulation program corresponding to each level of the manufacturing apparatus, a simulation process is executed as a virtual manufacturing apparatus, and an input of a new operation parameter is received based on the execution result of the simulation process. It is an apparatus design / manufacturing support method in which a simulation process is executed again using the virtual manufacturing apparatus in the apparatus simulator by reading into the simulator.

For the design and manufacture of manufacturing equipment, the following configurations can also be adopted. That is, a device design / manufacturing support method for supporting design / manufacturing of a manufacturing device using a device simulator, a device controller, and EES, wherein CAD data including at least position information of parts of each layer constituting the manufacturing device is obtained. Generated in the CAD and read into the device simulator, the operation parameter corresponding to the CAD data is read into the device simulator, the operation parameter is associated with the read CAD data, and the CAD data and the operation parameter are At least the device layout data is stored, and in the device simulator, based on the stored device layout data and the control command received from the device controller, the simulation program corresponding to each level of the manufacturing device The simulation process is executed as a manufacturing apparatus, the execution result of the simulation process in the virtual manufacturing apparatus in the apparatus simulator is received by the EES, the execution result in the manufacturing apparatus actually manufactured is received by the EES, The execution result in the virtual manufacturing apparatus and the execution result in the actually manufactured manufacturing apparatus are displayed so that they can be compared, and new operation parameters reflecting the comparison result are read into the apparatus simulator. Thus, there is provided a device design / manufacturing support method in which a simulation process is executed again using the virtual manufacturing device in the device simulator.

The device design / manufacturing support system of the present invention can confirm whether the software functions properly before the actual manufacturing device is assembled. As a result, the period from the design to assembly of the manufacturing device (designated as “real device” in this specification) that is the object of design / manufacturing can be shortened. A margin can be secured.

Also, when designing using simulation, simulation is possible even if there is no actual device. On the other hand, since the simulation is executed in accordance with a control command from a device controller that controls the actual device, a more accurate simulation is possible.

And since the execution result by the apparatus controller is verified by EES (Equipment Engineering System apparatus engineering system), verification based on an objective execution result is possible in each case of simulation and actual apparatus.

It is a figure which shows typically the outline of each apparatus which comprises an apparatus design manufacture support system. It is a figure which shows typically an example of the conceptual diagram of an apparatus simulator. It is a figure which shows typically an example of the conceptual diagram of the whole software structure of an apparatus design manufacture support system. It is a figure which shows typically an example of the hardware constitutions of the computer which implement | achieves an apparatus simulator, EES, an apparatus controller, etc. It is a flowchart which shows an example of a process typically. It is a figure which shows typically an example of the apparatus detailed event data acquired by EES. It is a figure which shows typically another example of the apparatus detailed event data acquired by EES. It is a figure which shows typically having compared the device detailed event data of each of the simulation mode and actual control mode acquired by EES with the Gantt chart. It is a figure which shows typically having compared each apparatus detailed event data of each of the simulation mode and actual control mode acquired by EES in the graph format. It is a figure which shows typically the schematic of the procedure of the design and manufacture of the conventional manufacturing apparatus. It is a figure which shows typically the schematic of the procedure of the design and manufacture of a manufacturing apparatus by using the apparatus design manufacturing support system of this invention. It is a figure which shows typically hierarchization of the program which makes a simulation process part function. It is a figure which shows typically the workflow of an apparatus design manufacturing support system. It is an example of the flowchart which shows the process of a simulation process part typically.

FIG. 1 shows an outline of each device constituting the device design and manufacturing support system 1 of the present invention. The apparatus design / manufacturing support system 1 of the present invention is preferably used for designing / manufacturing a manufacturing apparatus such as a semiconductor manufacturing apparatus, a flat panel manufacturing apparatus, and a solar cell manufacturing apparatus, but is not limited thereto and is controlled by a computer or a PLC. Any manufacturing apparatus may be used.

The apparatus design / manufacturing support system 1 of the present invention includes an apparatus simulator 2, an apparatus controller 3, and an EES 4. FIG. 2 schematically shows an example of a conceptual diagram of the apparatus simulator 2. FIG. 3 schematically shows an example of an overall conceptual diagram of the software configuration of the apparatus design / manufacturing support system 1.

The device simulator 2, EES 4, and device controller 3 are realized by a computer or a predetermined arithmetic circuit. FIG. 4 schematically shows an example of a hardware configuration of a computer that realizes the apparatus simulator 2, the EES 4, the apparatus controller 3, and the like.

The computer stores an arithmetic device 30 such as a CPU for executing arithmetic processing of a program, a storage device 31 such as a RAM and a hard disk for storing information, processing results of the arithmetic device 30 and information stored in the storage device 31 on the Internet or LAN. And at least a communication device 34 that transmits and receives via the network. Each function (each unit) realized on the computer is executed when a unit (program, module, etc.) for executing the process is read into the arithmetic unit 30. When using the information stored in the storage device 31 in the processing, each function reads the corresponding information from the storage device 31 and uses the read information for the processing in the arithmetic device 30 as appropriate. The computer may include an input device 33 such as a keyboard, a mouse, and a numeric keypad, and a display device 32 such as a monitor.

The means in the present invention are only logically distinguished from each other in function, and may be physically or virtually the same area. Each function, computer, etc. may be arbitrarily distributed and may be integrated into one.

The device simulator 2 accepts input of CAD data such as a machine drawing generated by the CAD 5. Also, input of operation parameters (described later) corresponding to the CAD data is received and stored as device layout data. And it is a computer which displays the simulation condition of a manufacturing apparatus based on apparatus layout data.

The apparatus simulator 2 includes a modeling layout unit 20, a data storage unit 21, a simulation processing unit 22, and a display processing unit 23.

The modeling layout unit 20 accepts input of CAD data of an actual device generated by the CAD 5 and stores it in the data storage unit 21 described later. For example, information indicating position information and size of each part of the manufacturing apparatus generated by two-dimensional CAD or three-dimensional CAD is stored as CAD data. In addition, the modeling layout unit 20 receives input of initial setting of operation parameters indicating how and at what timing each of the above components is moved. In this case, a file in which the operation parameters of each component are set may be read, or input of the operation parameters of each component may be received from the input device 33.

The operation parameters input in this way are associated with the CAD data stored in the data storage unit 21, and the CAD data and the operation parameters are stored in the data storage unit 21 as device layout data. This association may be handled as one (or related) device layout data by including the same identification information in each file, or integrated into one file as one device layout data. Also good.

Further, the CAD data read by the modeling layout unit 20 may be information (position information, information indicating size, etc.) related to all parts constituting the manufacturing apparatus generated by the CAD 5, or the manufacturing apparatus Among the components to be configured, the information may be information that is unnecessary for simulation processing in the simulation processing unit 22 described later, that is, information excluding information about components that are not displayed when the manufacturing apparatus is observed from the outside (the manufacturing process). It may be information on a component displayed when the apparatus is observed from the outside). In the latter case, information relating to parts that cannot be observed from the outside is reduced from the CAD data and stored in the data storage unit 21. In this case, the amount of CAD data is reduced, and the speed is not reduced during simulation processing.

The device layout data in the modeling layout unit 20 will be described. The modeling layout unit 20 first registers / sets parts (objects) of each layer constituting the actual apparatus with respect to the CAD data generated by the CAD 5. That is, the drawing of each part to be displayed in three dimensions is read and its layout is set. Then, the attribute of the object is set. The object attributes set here include object position information, operation parameters such as operation time (initially design value data), device operation specification I / O map information (for example, the number of actuators, the number of sensors, I / O map). When the attribute of the object is set in this way, the object is arranged in three dimensions. Since the operation parameters can be set by performing this operation similarly for the devices, modules, and subsystems, device layout data including CAD data and operation parameters for the entire device can be generated. In the case of two-dimensional CAD, the above-described processing may be performed as it is in two dimensions.

The data storage unit 21 stores various data such as device layout data, and necessary data is appropriately read out and used for the processing in the simulation processing unit 22 described later.

The simulation processing unit 22 uses the device layout data stored in the data storage unit 21 to execute a simulation process according to a simulation program that simulates a real device stored in advance. The simulation program used at this time is a simulation program for an actual device that is designed and manufactured by the device design / manufacturing support system 1, and a control command (described later) from the device controller 3 during the simulation process. The simulation process is executed according to the above.

In addition, in order to virtually simulate the real device by the simulation processing unit 22, the control target is hierarchized in the same hierarchy as the actual real device. This is schematically shown in FIG.

First, the actual device is divided into four layers. That is, it is divided into an apparatus hierarchy, a module hierarchy, a subsystem hierarchy, and an I / O device hierarchy. In addition, a hierarchy of materials to be manufactured by the actual device is provided. Therefore, the simulation program functioning in the simulation processing unit 22 performs control processing in a total of five layers. Note that each hierarchy is composed of a program for controlling the hierarchy, and each of the programs independently receives control based on a control command from the device controller 3 to execute simulation processing.

The device hierarchy is a layer that defines a space in which devices can be installed or objects (parts) below the module can be placed, and is composed of modules, subsystems, and I / O devices.

The module hierarchy is a hierarchy that defines replaceable components having functions for executing processes and carrying in the apparatus, and is composed of modules, subsystems, and I / O devices.

The subsystem hierarchy is a hierarchy that defines interchangeable components having specific functions within a module, and is composed of subsystems and I / O devices.

The I / O device hierarchy has a minimum control function for moving the apparatus, and is a hierarchy composed of various I / O devices such as sensors and actuators. For example, there are pumps, valves, robots, shutters, lifters, power supplies, etc.

The material hierarchy is a hierarchy indicating members supplied into the apparatus and conveyed in the apparatus. For example, there are FOUP (Front Opening Unified Unified Pod), wafer, substrate and the like. The apparatus has position information called a material location, and the material location has information indicating whether or not a material actually exists.

Actual devices are actually composed of devices, modules, subsystems, and I / O devices, and the manufacturing process for materials is performed by these devices. In the processing by the simulation processing unit 22, the four layers (device layer, module layer, subsystem layer, I / O device layer) constituting the real device, so as to correspond to the configuration of the real device, By performing the process separately on the material hierarchy (material hierarchy) to be manufactured, the device controller 3 can be linked in the same manner as when the actual device is actually operated. Then, the operation verification for each hierarchy is possible.

Note that the hierarchy can be arbitrarily divided according to the characteristics of the manufacturing equipment to be designed and manufactured.

The display processing unit 23 displays the processing result in the simulation processing unit 22 on the display device 32 of the device simulator 2.

The device controller 3 is a controller (controller for passing a control command) for performing sequence control of an actual device or a virtual manufacturing device (a manufacturing device that realizes the operation of the actual device inside the computer) in the simulation processing unit 22. It is an on-board computer and can switch between at least two control modes: an actual control mode and an apparatus simulation mode. Further, the device controller 3 acquires the execution results from the real device and the virtual manufacturing device, and the acquired data is acquired by the EES 4 described later.

The actual control mode is a mode in which an actual device is operated by connecting to a sensor or an actuator in an actual manufacturing device and passing a control command to the actual device. When the execution is performed in the real device, the execution result is received from the real device.

The device simulation mode is a mode in which the device is virtually operated by passing a control command to the simulation processing unit 22 of the device simulator 2. Further, when execution is performed in the simulation processing unit 22 of the apparatus simulator 2, the execution result is received from the simulation processing unit 22. In the apparatus simulation mode, the execution speed of the simulation processing can be executed at an arbitrary execution speed, such as the same speed as when controlling the actual apparatus (equal magnification), 2 times, 3 times, and the like. Thereby, the time required for confirmation can be shortened.

The device controller 3 has two cases: a case where the real device and the virtual manufacturing device are all controlled by a computer, and a case where the real device and the virtual manufacturing device are controlled by a PLC. Any of these may be used, but a control command for the used case is passed to the actual apparatus or the apparatus simulator 2.

These two control commands are information for controlling processing in each layer in the simulation processing unit 22 of the real device or the device simulator 2, and the control target is the real device and a virtual manufacturing device (device simulator). 2 (actual apparatus simulated by the two simulation processing units 22) is the same or substantially the same information (information having the same semantic content for control). The control command includes instruction information for starting control and additional information indicating under what conditions control is performed on the simulation processing unit 22 of the actual device or the device simulator 2.

Further, the device controller 3 receives the result of processing in each layer in the simulation processing unit 22 of the real device or the device simulator 2 with respect to the above control command as an execution result from the real device or the simulation processing unit 22. Regardless of whether the process is executed by a real device or a virtual manufacturing device (a real device simulated by the simulation processing unit 22 of the device simulator 2), the execution result is the same or substantially the same information (execution) Information with the same semantic content of the result). The execution result includes information indicating that processing for the control command has been completed and incidental information indicating what state has been obtained as a result of execution from the simulation processing unit 22 of the actual device or the device simulator 2.

Also, control commands and execution results are collectively referred to as control information. Control information (control command and execution result) when the device controller 3 is a computer is device / sequence step control information, and control information (control command and execution result) when the device controller 3 is a PLC is a device / sequence step IO. This is called a map (PLC control information).

The EES 4 (device engineering system) acquires detailed control information (control commands and execution results) of the virtual manufacturing device simulated by the simulation processing unit 22 of the real device or the device simulator 2 from the device controller 3 and analyzes the operation. (It may be obtained directly from the actual device or the device simulator 2 without using the device controller 3). The data acquired here includes detailed device events, trace data, and context data (recipe, substrate ID, lot ID, etc.). That is, detailed device events, trace data, and context data become control commands and execution results. Therefore, EES4 has a function of collecting control commands and execution results of real devices or virtual manufacturing devices, a function of checking their operation time, and the like. Each of these functions is obtained by acquiring data (detailed device event data) indicating control information such as a control command or execution result from a virtual manufacturing device in the real device or simulation processing unit 22 controlled by the device controller 3. Yes.

The detailed device event data includes the operation of the device and its start / end time as incidental information in the control command and execution result, so that the operation time can be calculated from the difference.

The CAD 5 is a device that generates CAD data of a drawing of an actual device, and may be either a two-dimensional CAD that generates a two-dimensional drawing or a three-dimensional CAD that generates a three-dimensional drawing. In the following description, a case where three-dimensional CAD is used will be described, but any of two-dimensional CAD and three-dimensional CAD can be used, and the same technical effect can be obtained by the same processing.

In addition, the design of the actual device in CAD5 is the same as the conventional one.

An example of processing of the device design and manufacturing support system 1 of the present invention will be described with reference to the flowchart of FIG. FIG. 13 schematically shows a workflow of the device design / manufacturing support system 1.

As before, mechanical design of the device is performed in the mechanical design phase, electrical design such as wiring is performed in the electrical design phase, and software is designed in the software design phase (S100). In mechanical design and electrical design, parts are ordered after design. In the mechanical design phase and the electrical design phase, design is performed using the CAD 5, and the CAD layout data is read by the modeling layout unit 20 of the apparatus simulator 2. The read CAD data is stored in the data storage unit 21. In addition, the CAD data stored in the data storage unit 21 may be deleted by accepting selection of unnecessary information, for example, information on components inside the actual device, as necessary. .

Further, the modeling layout unit 20 reads (or accepts input) an operation parameter initial setting file indicating at what timing the objects constituting each layer of the actual apparatus are moved, and the data storage unit correlates with the CAD data. 21 is stored. CAD data and operation parameters are associated with each other and stored in the data storage unit 21 as device layout data (S110).

Further, the software for each layer corresponding to the actual apparatus for operating the manufacturing apparatus designed in the software design phase is read into the simulation processing unit 22 of the apparatus simulator 2.

When the device layout data including the operation parameters is stored in the data storage unit 21 in this way, the device controller 3 is switched to the simulation mode (the user may switch manually or automatically) Alternatively, a confirmation message for switching the mode may be displayed and switching may be performed when permission input is received from the user), and a control command is passed to the simulation processing unit 22 of the apparatus simulator 2. In accordance with this control command and the device layout data including the operation parameters stored in the data storage unit 21, the software read into the simulation processing unit 22 virtually causes the manufacturing device to function and execute the simulation (S120). During the execution of the simulation, the display processing unit 23 may display the state on the display device 32. Further, when the control command is passed to the simulation processing unit 22, the EES 4 may acquire it as detailed device event data.

The simulation processing in the simulation processing unit 22 in S120 will be described with reference to the flowchart of FIG.

First, the modeling layout unit 20 of the device simulator 2 receives input of device layout data including operation parameters (S200). In this case, the apparatus simulator 2 may accept input of CAD data from the CAD 5 via a network, or may accept input of CAD data via a magnetic disk, an optical disk, a magneto-optical disk, a semiconductor memory, or the like. The modeling layout unit 20 also receives input of an initial setting file of device layout data corresponding to CAD data, and stores them in the data storage unit 21 as device layout data.

When the simulation process is performed by the device simulator 2, the device controller 3 and the device simulator 2 are connected to receive a control command from the device controller 3 (S210). The connection may be such that data can be transmitted / received by physically connecting a network cable, or data can be logically transmitted / received by connecting each other to a network such as the Internet or a LAN. It may be in a state. The device controller 3 may be automatically switched from the actual control mode to the simulation mode by connecting to the device simulator 2. Alternatively, the device controller 3 and the device simulator 2 may be connected by switching to the simulation mode.

When the device controller 3 and the device simulator 2 are thus connected, a control command is transferred from the device controller 3 to the device simulator 2 and is acquired by the simulation processing unit 22 (S220). Further, the control command passed at this time is acquired by the EES 4 as detailed device event data.

When the control command acquired by the simulation processing unit 22 is a control command for the I / O device hierarchy program in the simulation processing unit 22 (S230), the I / O device hierarchy program of the simulation processing unit 22 is activated. The process according to the control command is executed based on the program. That is, the operation of the I / O device hierarchy of the virtual control device is started (S240).

Since the operation of the I / O device hierarchy program is started, the operation of the I / O device hierarchy is virtually started, so that a time measuring unit (not shown) stored in the simulation processing unit 22 measures the time. To start.

Then, when the processing for the control command ends or when a predetermined processing time elapses (S250), the processing of the I / O device hierarchy program ends. That is, the operation of the I / O device hierarchy is virtually completed, and the timing of the timing unit ends (S260).

After the virtual operation in the I / O device hierarchy is completed, the simulation processing unit 22 passes the execution result to the device controller 3 as an operation completion report (S270). In the operation completion report, which is the execution result passed at this time, for example, the processing for the control command has been normally completed, the processing start time, the end time, the processing time, and what operation was performed (virtual) , Information on the state of the material as a result of the operation (accompanying information) is included. Then, the information on the state of the material as a result of the control (supplementary information) becomes information in the material layer, and the execution result is passed from the simulation processing unit 22 of the device simulator 2 to the device controller 3. Will be.

Also, the control command received from the device controller 3 in S220 is often a control command for the I / O device hierarchy, such as raising / lowering the lifter. However, it may be a control command for a layer higher than the I / O device layer, that is, a device layer, a module layer, or a subsystem layer. Even in that case (when it is not a control command for the I / O device hierarchy), similarly to the control command for the I / O device hierarchy, the program of the simulation processing unit 22 for the hierarchy in the control command operates. The process according to the control command is executed based on the program. That is, the operation of the virtual control device hierarchy corresponding to the control command is started (S280). It should be noted that the control command for which hierarchy is included in the incidental information in the control command includes information that can identify the control command for which hierarchy. The incidental information is different for each hierarchy, and the target hierarchy may be determined according to the type of the control command or incidental information.

The operation of the hierarchy is virtually started when the processing by the program of the hierarchy is started, so that a timer (not shown) stored in the simulation processor 22 starts timing.

Then, when the processing for the control command ends or when a predetermined processing time elapses (S290), the processing of the program in the layer is ended. That is, the operation of the hierarchy is virtually completed, and the timing of the timing unit ends (S300).

After the virtual operation in the corresponding layer among the device layer, the module layer, and the subsystem layer is completed, the simulation processing unit 22 passes the execution result to the device controller 3 as an operation completion report (S310). As in the case of the I / O device hierarchy, the operation completion report that is the execution result passed at this time, for example, indicates that the processing for the control command has been completed normally, the processing start time, the end time, the processing time, Information (supplementary information) such as whether the operation has been performed (virtually) or what kind of state the material has become as a result of the operation is included. Then, the information on the state of the material as an operation result becomes information (supplementary information) in the material layer, and is passed from the simulation processing unit 22 of the device simulator 2 to the device controller 3. .

As described above, the simulation processing unit 22 receives the control command from the device controller 3, and sequentially executes the program of the hierarchy corresponding to the control command according to the control command, and the execution result is the operation completion. It will be returned to the device controller 3 as a report. While the process shown in FIG. 14 is controlled by the apparatus controller 3, the simulation processing unit 22 repeats the process, and the display processing unit 23 performs a process corresponding to the simulation on the display device 32 of the apparatus simulator 2. Is displayed.

Since the execution result in the simulation processing unit 22 of the device simulator 2 is reflected in the device controller 3, the EES 4 acquires it as detailed device event data (S130). Then, by referring to the acquired execution result, it is possible to appropriately modify software or the like.

FIG. 6 schematically shows an example of display of detailed device event data acquired in this way. In FIG. 6, time stamps and processing times at which processing for each wafer is started and completed are displayed as a list. Since the simulation is performed using the time for operating the apparatus as a set value before the manufacturing apparatus is completed, the tuning can be performed even before the manufacturing apparatus is completed by changing the set value.

In addition, when an actual device that is a real machine is assembled, the device controller 3 is switched to the actual control mode (the user may manually switch, the automatic switching may be performed, or the mode switching may be performed. A confirmation message is displayed, and it may be configured to switch when a permission input is received from the user), and the control command is passed to the actual device that is the actual machine. Further, the control command passed at this time is acquired by the EES 4 as detailed device event data. An actual device, which is an actual machine, operates according to this control command.

Since this execution result is reflected in the apparatus controller 3 as in the case of the simulation, the EES 4 is acquired as detailed apparatus event data (S140).

FIG. 7 schematically shows an example of display of detailed device event data acquired in this way. In FIG. 7, time stamps and processing times at which processing for each wafer is started and completed are displayed as a list. Since the simulation is performed with the time for operating the apparatus as a design value before the manufacturing apparatus is completed, the tuning can be performed even before the manufacturing apparatus is completed by changing the design value.

The device controller 3 passes the same or substantially the same control command in the simulation mode and the actual control mode. Therefore, in EES4, since the execution result in the simulation mode and the execution result in the actual control mode are respectively acquired, the simulation mode and the actual control mode can be easily compared by displaying them on the same screen, for example. It is also possible to make it.

For example, by comparing the processing performance of the manufacturing apparatus with the list of the apparatus simulator 2 (simulation mode) operating at the design value and the actual apparatus (actual control mode) that is the actual apparatus, the operation of the actual apparatus that is the actual apparatus is adjusted. (S150). That is, by comparing and displaying the execution results of the simulation mode and the actual control mode, the developer can verify the execution results. Then, by loading a new operation parameter (for example, operation time) reflecting the verification result into the modeling layout unit 20 of the apparatus simulator 2, it is possible to further verify in the simulation mode.

Instead of acquiring and comparing the execution results of the simulation mode and the actual control mode with the EES 4, the execution result of the simulation mode is displayed on the display device 32 such as the device simulator 2, and the device layout data is based on the result. When the apparatus simulator 2 receives the correction input of the operation parameter (input of a new operation parameter), the simulation processing in the simulation processing unit 22 may be executed again.

Further, when there is a malfunction in the operation of the actual device that is a real machine, based on the detailed device event data (control information including control commands and execution results, or incidental information included therein) stored in EES4 (this detail) The device event data is acquired via a network or a storage device), and it is set as an operation parameter, and the simulation processing unit 22 of the device simulator 2 performs a simulation process, so that even if a developer is not on site, It is also possible to confirm the operation of an actual device that is an actual machine.

In FIGS. 6 and 7, the time stamps and processing times at which the processing for each wafer is started / finished are displayed as a list, but may be displayed as a Gantt chart, for example, as shown in FIGS. . FIG. 8 is a Gantt chart showing the time that the wafer exists in the manufacturing apparatus for processing. FIG. 9 is a Gantt chart showing the time during which the sequence in the existing manufacturing apparatus is executed.

The apparatus design / manufacturing support system 1 of the present invention can confirm whether the software functions normally before the manufacturing apparatus which is an actual machine is assembled. That is, by using the apparatus design / manufacturing support system 1 of the present invention, the manufacturing apparatus can be designed / manufactured by a procedure as shown in FIG. As a result, the period from the design to the assembly of the manufacturing apparatus can be shortened, so that a sufficient time margin can be ensured even when a problem occurs.

Also, when performing simulation processing, simulation is possible even if no actual machine exists. In the simulation, the simulation process can be executed in accordance with a control command from the device controller 3 that controls the actual device by enabling simulation processing corresponding to the same layer as that of the actual device that is the actual machine. More accurate simulation becomes possible.

And since the execution result by the apparatus controller 3 is verified by EES4 (apparatus engineering system), in the case of simulation, verification based on an objective execution result is possible in each case of an actual real apparatus.

1: Device design and manufacturing support system 2: Device simulator 3: Device controller 4: EES
5: CAD
20: Modeling layout unit 21: Data storage unit 22: Simulation processing unit 23: Display processing unit 30: Computing device 31: Storage device 32: Display device 33: Input device 34: Communication device

Claims

A device design / manufacturing support system for supporting design / manufacturing of a manufacturing device,
The apparatus design / manufacturing support system includes an apparatus simulator, an apparatus controller, and an EES.
The device simulator is
Based on the device layout data and a control command from the device controller, a simulation process corresponding to each hierarchy of the manufacturing device is performed as a virtual manufacturing device based on the input of the device layout data of the manufacturing device. Run
The device controller is
A control command for controlling a virtual manufacturing apparatus in the manufacturing apparatus and the apparatus simulator is passed to the manufacturing apparatus and the apparatus simulator.
The EES is
The execution result of the simulation process in the virtual manufacturing apparatus in the apparatus simulator and the execution result in the manufacturing apparatus are respectively acquired and displayed so that the respective execution results can be compared.
A device design and manufacturing support system characterized by that.
A device design / manufacturing support system for supporting design / manufacturing of a manufacturing device,
The apparatus design / manufacturing support system includes an apparatus simulator, an apparatus controller, and an EES.
The device simulator is
A modeling layout unit that accepts input of CAD data including at least position information of parts of each layer constituting the manufacturing apparatus, and operation parameters corresponding to the CAD data;
A data storage unit for storing device layout data including at least the CAD data and operation parameters;
Simulation for executing a simulation process as a virtual manufacturing device by a simulation program corresponding to each layer of the manufacturing device based on the device layout data stored in the data storage unit and a control command received from the device controller A processing unit;
A display processing unit for displaying a simulation status in the simulation processing unit on a display device of the device simulator,
The device controller is
It is possible to switch between an actual control mode for controlling the manufacturing apparatus and a simulation mode for controlling the virtual manufacturing apparatus in the apparatus simulator,
In the simulation mode, a control command is passed to the virtual manufacturing device in the device simulator, and in the actual control mode, the control command is passed to the actually manufactured manufacturing device. And controlling the virtual manufacturing apparatus,
The EES is
The execution result of the simulation process in the virtual manufacturing apparatus in the apparatus simulator and the execution result in the manufacturing apparatus are respectively acquired and displayed so that the respective execution results can be compared.
A device design and manufacturing support system characterized by that.
The modeling layout part of the device simulator is
In the EES, the modeling layout unit accepts an input of a new operation parameter that reflects the result of comparison between the execution result in the virtual manufacturing apparatus and the execution result in the manufacturing apparatus.
The simulation processing unit
Based on the received new operation parameter and the control command from the apparatus controller, the simulation program as the virtual manufacturing apparatus is executed again by the simulation program corresponding to each layer of the manufacturing apparatus.
The apparatus design and manufacturing support system according to claim 2.
A device simulator used in a device design / manufacturing support system that supports design / manufacturing of a manufacturing device,
The device simulator is
A modeling layout unit that accepts input of CAD data including at least position information of parts of each layer constituting the manufacturing apparatus, and operation parameters corresponding to the CAD data;
A data storage unit for storing device layout data including at least the CAD data and operation parameters;
Control for the virtual manufacturing apparatus received from the apparatus controller capable of controlling both the apparatus layout data stored in the data storage unit and the actually manufactured manufacturing apparatus and the virtual manufacturing apparatus in the apparatus simulator. A simulation processing unit that executes a simulation process as the virtual manufacturing device by a simulation program corresponding to each level of the manufacturing device based on the command;
A display processing unit for displaying a simulation status in the simulation processing unit on a display device of the device simulator;
A device simulator for use in a device design and manufacturing support system.
A device simulator for use in a device design / manufacturing support system that supports design / manufacturing
A predetermined storage device that accepts input of CAD data including at least position information of components of each layer constituting the manufacturing apparatus and operation parameters corresponding to the CAD data, and associates the CAD data with the operation parameters. Modeling layout part to be stored as device layout data in
Control instructions for the virtual manufacturing device received from the device controller capable of controlling both the device layout data stored in the storage device and the actually manufactured manufacturing device and the virtual manufacturing device in the device simulator And a simulation processing unit that executes a simulation process as the virtual manufacturing device by a simulation program corresponding to each level of the manufacturing device,
A display processing unit for displaying a simulation status in the simulation processing unit on a display device of the device simulator;
A device simulator program used in a device design and manufacturing support system, characterized in that the device simulator functions.
A device design and manufacturing support method for supporting design and manufacturing of a manufacturing device using a device simulator,
CAD data including at least position information of parts of each layer constituting the manufacturing apparatus is generated in the CAD and read by the apparatus simulator;
Causing the device simulator to read operation parameters corresponding to the CAD data;
Associating the operation parameters with the read CAD data, and storing them as device layout data including at least the CAD data and the operation parameters,
In the apparatus simulator, control commands for the virtual manufacturing apparatus and the stored apparatus layout data received from an apparatus controller capable of controlling both the actually manufactured manufacturing apparatus and the virtual manufacturing apparatus in the apparatus simulator. Based on the above, a simulation program corresponding to each level of the manufacturing apparatus performs a simulation process as a virtual manufacturing apparatus,
Based on the execution result of the simulation process, by receiving an input of a new operation parameter and reading it into the apparatus simulator, the simulation process is executed again using the virtual manufacturing apparatus in the apparatus simulator.
A device design / manufacturing support method.
A device design / manufacturing support method for supporting design / manufacturing of a manufacturing device using a device simulator, a device controller, and EES,
CAD data including at least position information of parts of each layer constituting the manufacturing apparatus is generated in the CAD and read by the apparatus simulator;
Causing the device simulator to read operation parameters corresponding to the CAD data;
Associating the operation parameters with the read CAD data, and storing them as device layout data including at least the CAD data and the operation parameters,
In the apparatus simulator, based on the stored apparatus layout data and the control command received from the apparatus controller, a simulation program corresponding to each level of the manufacturing apparatus executes a simulation process as a virtual manufacturing apparatus,
The execution result of the simulation process in the virtual manufacturing apparatus in the apparatus simulator is received by the EES,
The execution result in the manufacturing apparatus actually manufactured is received by the EES,
The execution result in the virtual manufacturing apparatus and the execution result in the actually manufactured manufacturing apparatus are displayed so as to be comparable,
A new operation parameter reflecting the result of the comparison is read into the device simulator, and the simulation process is executed again using the virtual manufacturing device in the device simulator.
A device design / manufacturing support method.