WO2010083273A1

WO2010083273A1 - Ultra high purity gas valve with bellows assembly

Info

Publication number: WO2010083273A1
Application number: PCT/US2010/020986
Authority: WO
Inventors: Peter Holger Hedemann Jensen
Original assignee: Parker-Hannifin Corporation
Priority date: 2009-01-19
Filing date: 2010-01-14
Publication date: 2010-07-22
Also published as: TW201040419A

Abstract

An inline valve for a gas distribution system having a tubular valve chamber (68) for supporting a valve member (72), wherein the inlet (54) and outlet (58) are coaxial with each other and flow enters the valve chamber at a different angle than flow exits the valve chamber. The tubular design reduces raw materials and machining time. Also, the characteristic of the previous in-line design with the machined body, where the inlet and the outlet has a common centerline, is retained, and existing valve internals (e.g., proven valve member designs) can be used.

Description

ULTRA HIGH PURITY GAS VALVE WITH BELLOWS ASSEMBLY

Related Applications

This application claims the benefit of U.S. Provisional Application No. 61/145,588 filed January 19, 2009, which is hereby incorporated herein by reference.

Field of the Invention

The present invention generally relates to valves and, more particularly, to valves for controlling fluid flow in a gas distribution system.

Background of the Invention

Gas and liquid control systems are used in the semiconductor industry as well as the solar panel manufacturing industry to supply process gases and liquids to semiconductor processing equipment. These systems typically comprise highly finished tubing extending between a supply of the process liquid or gas and the semiconductor/solar processing equipment. The process liquids and gases are forced under pressure through the tubing, and valves are provided in these control systems for opening and closing the fluid passages therethrough and thereby controlling the flow of fluid from the supply to the semiconductor/solar processing equipment.

Conventional valves for such applications are often of a so-called y-shape design having a valve body with a y-shape having an inlet in one arm of the "y", an outlet in the leg of the "y", and the other arm of the "y" serving as a valve chamber. In such valves, the inlet and outlet are generally coaxial and are connected via a straight passageway extending through a body of the valve. The valve chamber intersects the straight passageway at an angle, for example 90 or 45 degrees. A valve member is supported in the valve chamber and is movable between an open and closed position to respectively block or permit flow through the passageway from the inlet to the outlet. Such a valve is commonly referred to as an inline valve since the inlet and outlet are coaxial.

The valve bodies of such valves are generally machined from one piece of material, or may be a multi-piece machined body wherein the multiple pieces are joined together, for example by welding. Such valve bodies can be heavy and costly to machine.

Summary of the Invention An inline valve for a gas distribution system having a tubular valve chamber for supporting a valve member, wherein the inlet and outlet are coaxial with each other and flow enters the valve chamber at a different angle than flow exits the valve chamber. The valve weight has been decreased between 50% and 80% over existing designs, and the manufacturing costs of the valve have been decreased considerably. By using a tubular design, a reduction in raw material and machine time can be achieved. Also, the characteristic of the previous in-line y-shape machined body design, where the inlet and the outlet has a common centerline, has been retained. Moreover, the valve can utilize existing valve internals (e.g., proven valve member designs). Accordingly, a housing for a fluid flow valve such as of a bellows-type for bulk gas delivery in semiconductor/solar manufacturing comprises a tubular body extending axially along a central body longitudinal axis between a body first end and a body second end, the body having a body radial axis (which may be generally orthogonal or otherwise angled relative to the body longitudinal axis) and a body medial opening disposed along the body radial axis between the body first and second ends, a tubular first port extending axially along a central first port longitudinal axis to a first port end having a first port end axis disposed at a first angle relative to the first port longitudinal axis, the first port end being joined in fluid communication to the body first end with the first port end axis being generally coaxially aligned with the central body longitudinal axis, and a tubular second port extending axially along a central second port longitudinal axis to a second port end having a second port end axis disposed at a second angle relative to the second port longitudinal axis, the second port end being joined in fluid communication to the body medial opening with the first and second port longitudinal axes being generally coaxially aligned.

The first and second port longitudinal axes can be disposed at an angle of about 45° relative to the body longitudinal axis. The second port end axis can be disposed generally orthogonal to the body longitudinal axis. The housing can further comprise a valve seat disposed within the body about the body first end. The body can be cylindrical and the valve seat can extend radially inwardly from an interior surface of the body. At least one of the tubular ports can be welded to the tubular body. The body can have an axially extending bore opening to the first and second ends of the body, wherein the second end of the body is adapted to receive a valve member therein. A purge port for purging excess pressure from the body can be provided. The body can be machined from a solid piece of material. Flow can enter the body at a different angle than flow exits the body. In accordance with another aspect, a valve assembly comprises a valve member and the housing as set forth above, wherein the valve member is supported by the body and is movable between open and closed positions for respectively permitting or blocking flow through the first and second port tubes. The valve member can be a bellows-type valve member, and can further comprise a hand wheel coupled to the valve member, whereby rotation of the hand wheel in a first direction moves the valve member to an open position, and rotation of the hand wheel in a second direction moves the valve member to the closed position.

In accordance with another aspect, a method of making a housing for a fluid flow valve such as of a bellows-type for bulk gas delivery in semiconductor/solar manufacturing comprises forming a tubular body extending axially along a central body longitudinal axis between a body first end and a body second end, the body having a body radial axis, forming a body medial opening disposed along the body radial axis between the body first and second ends, attaching a tubular first port to the body, the tubular first port extending axially along a central first port longitudinal axis to a first port end having a first port end axis disposed at a first angle relative to the first port longitudinal axis, the first port end being joined in fluid communication to the body first end with the first port end axis being generally coaxially aligned with the central body longitudinal axis, and attaching a tubular second port to the body, the tubular second port extending axially along a central second port longitudinal axis to a second port end having a second port end axis disposed at a second angle relative to the second port longitudinal axis, the second port end being joined in fluid communication to the body medial opening with the first and second port longitudinal axes being generally coaxially aligned. The body may be machined, and the tubular ports can be welded to the body.

Further features of the invention will become apparent from the following detailed description when considered in conjunction with the drawings.

Brief Description of the Drawings

Fig. 1 is a cross-sectional view of a prior art valve body for an inline valve assembly. Fig. 2 is a cross-sectional view of an exemplary valve assembly in accordance with the invention.

Fig. 3 is an enlarged portion of Fig. 2.

Fig. 4 is a cross-sectional view of the valve body of the valve assembly of Fig. 3, with the valve member removed.

Detailed Description

Referring to the attached drawings, Fig. 1 shows an exemplary prior art valve body 10 of previous bulk gas valves used in gas delivery systems. The body 10 is a single piece machined steel body having a general y-shape, with an inlet 12 in one arm of the "y", an outlet 14 in the leg of the "y", and the other arm of the "y" serving as a valve chamber 16. The inlet 12 and outlet 14 are connected via passageway 18. The valve chamber 16 intersects the passageway 18 at an angle, and a valve member (not shown) can be supported in the valve chamber 16 for blocking or permitting flow through the passageway 18 from the inlet 12 to the outlet 14. As will be appreciated, the valve body 10 is an in-line design, where the inlet 12 and the outlet 14 have a common centerline and flow enters and exits the valve body along such centerline.

Turning to Figs. 2-4, an exemplary inline valve assembly in accordance with the invention is illustrated and indicated generally by reference numeral 50. The valve assembly 50 includes a generally tubular body 52 extending axially along a central body longitudinal axis AL. An inlet port tube 54 and an outlet port tube 58 are secured to the body 52 in a suitable manner, such as by welding, for example. The inlet port tube 54 has an inlet port end 62 opposite its other end that is secured to the body 52, and the outlet tube 58 has an outlet port end 64 opposite its other end that is secured to the body 52. The inlet port end 62 and the outlet port end 64 of each port tube are generally coaxially aligned along a port end axis Ap. Of course, either port tube 54 or 58 can function as an inlet or outlet depending on the direction of flow through the valve.

The tubular body 52 includes a valve chamber 68 in which a valve member 72 is supported. Purge ports 73 are provided for relieving excess pressure from the valve. The valve member 72 is a bellows-type valve member having a seal member 74 adapted for sealing against a valve seat 76 within the valve chamber 68 to restrict flow through the body 52 from the inlet port end 62 of the inlet port tube 54 to the outlet port end 64 of the outlet port tube 58. As will be appreciated, the seal member 74 is movable between open and closed positions to respectively block or permit flow.

As best seen in Fig. 3, the seal member 74 is moveable between the closed position (shown), and an open position (not shown) whereat fluid can flow from the inlet port 62 to the outlet port 64. In this regard, the seal member 74 is mounted to a plug 82 which is connected to a threaded shaft 77 of the valve member 72 that is supported within the body 52 for longitudinal movement when a driver 79 is rotated by turning a hand wheel 78. A bellows 80 is connected via welding or the like between the plug 82 and a bellows adapter upper 75 and isolates the shaft 77 from the valve chamber 68 to prevent leakage of fluid. The seal member74, which can be an elastomeric seal or the like, can be provided on the plug 82 for sealing the interface between the seal member 74 and the valve seat 76. The bellows 80 can be made from lnconel 625 and can vary in thickness/number of plies depending on the size of the bellows. The dynamic seal can be a PCTFE and can be replaced if necessary. Although a bellows- type valve member is shown, other types of valve members can be used without departing from the scope of the invention. In fact, a wide variety of existing, proven valve members can be utilized with the valve body making it highly versatile.

Turning to Fig. 4, the valve body 52 is shown in cross-section with the valve member 72 removed therefrom. The tubular body 52 extends axially along central body longitudinal axis AL. The inlet port end 62 and the outlet port end Ap. As will be appreciated, the inlet port tube 54 and outlet port tube 58 are attached to the body 52 at generally right angles with respect to respective openings in the valve body 52. In the illustrated embodiment, the inlet port tube 54 is attached about an opening in an axial end face of the body 52, while the outlet port tube 58 is attached to the side of the body 52 around a medial opening disposed along a body radial axis (which may be generally orthogonal or otherwise angled relative to the body longitudinal axis) between the body first and second ends. As will be appreciated, fluid can flow from the inlet port end 62 of the inlet port tube 54 through the valve body 52 to the outlet port 64 of the outlet port tube 58. A 45 degree inlet port tube and 45 degree outlet port tube in the illustrated embodiment results in the in-line valve body design. While the inlet and outlet ports 62 and 64 are coaxial thereby facilitating inline installation, the valve body 52 is generally cylindrical and has a single axially extending throughbore forming the valve chamber 68 and opening to axial ends of the body 52. The inlet port tube 54 is secured to the body at the first end, while the second end is adapted to receive a valve member 72 as shown in Fig. 2. The valve member 72 can be secured to the body 52 in any suitable fashion, such as with bolt, or may be screwed into the body 52, for example. The valve body 52 can be lighter than the prior art design by as much as

50% to 80%. Manufacturing costs can also be decreased considerably since machining the intersecting bores of the prior art design of Fig. 1 is no longer required. The new design therefore also simplifies manufacturing. Also, by using a tubular design, a reduction in raw materials can be achieved. The decrease in weight makes the valve easier to install in the field, and easier to handle in general. Valve performance can also be improved by increasing the ply material thickness/number of layers in the bellows design.

Although the invention has been shown and described with respect to a certain preferred embodiment or embodiments, it is obvious that equivalent alterations and modifications will occur to others skilled in the art upon the reading and understanding of this specification and the annexed drawings. In particular regard to the various functions performed by the above described elements (components, assemblies, devices, compositions, etc.), the terms

6 (including a reference to a "means") used to describe such elements are intended to correspond, unless otherwise indicated, to any element which performs the specified function of the described element (i.e., that is functionally equivalent), even though not structurally equivalent to the disclosed structure which performs the function in the herein illustrated exemplary embodiment or embodiments of the invention. In addition, while a particular feature of the invention may have been described above with respect to only one or more of several illustrated embodiments, such feature may be combined with one or more other features of the other embodiments, as may be desired and advantageous for any given or particular application.

Claims

What is claimed is:

1. A housing for a fluid flow valve such as of a bellows-type for bulk gas delivery in semiconductor/solar manufacturing comprising: a tubular body extending axially along a central body longitudinal axis between a body first end and a body second end, the body having a body radial axis and a body medial opening disposed along the body radial axis between the body first and second ends; a tubular first port extending axially along a central first port longitudinal axis to a first port end having a first port end axis disposed at a first angle relative to the first port longitudinal axis, the first port end being joined in fluid communication to the body first end with the first port end axis being generally coaxially aligned with the central body longitudinal axis; and a tubular second port extending axially along a central second port longitudinal axis to a second port end having a second port end axis disposed at a second angle relative to the second port longitudinal axis, the second port end being joined in fluid communication to the body medial opening with the first and second port longitudinal axes being generally coaxially aligned.

2. A housing as set forth in claim 1 , wherein the first and second port longitudinal axes are disposed at an angle of about 45° relative to the body longitudinal axis.

3. A housing as set forth in any one of claims 1 -2, wherein the second port end axis is disposed generally orthogonal to the body longitudinal axis.

4. A housing as set forth in any one of claims 1 -3, further comprising: a valve seat disposed within the body about the body first end.

5. A housing as set forth in any one of claims 1 -4, wherein the body is cylindrical and the valve seat extends radially inwardly from an interior surface of the body.

6. A housing as set forth in any one of claims 1-5, wherein at least one of the tubular ports are welded to the tubular body.

7. A housing as set forth in any one of claims 1-6, wherein the body is generally cylindrical and has an axially extending bore opening to the first and second ends of the body, wherein the second end of the body is adapted to receive a valve member.

8. A housing as set forth in any one of claims 1-7, wherein the body includes at least one purge port for purging excess pressure from the body.

9. A housing as set forth in any one of claims 1-8, wherein the body is machined.

10. A housing as set forth in any one of claims 1-9, wherein flow enters the body at a different angle than flow exits the body.

11. A valve assembly comprising a valve member and the housing as set forth in any one of claims 1-10, wherein the valve member is supported by the body and is movable between open and closed positions for respectively permitting or blocking flow between the first and second port tubes.

12. A valve assembly as set forth in claim 1 1 , wherein the valve member is a bellows-type valve.

13. A valve assembly as set forth in any one of claims 1 1-12, wherein the valve assembly further comprises a hand wheel coupled to the valve member, whereby rotation of the hand wheel in a first direction moves the valve member to the open position, and rotation of the hand wheel in a second direction moves the valve member to the closed position.

14. A method of making a housing for a fluid flow valve such as of a bellows-type for bulk gas delivery in semiconductor/solar manufacturing comprising: forming a tubular body extending axially along a central body longitudinal axis between a body first end and a body second end, the body having a body radial axis; forming a body medial opening disposed along the body radial axis between the body first and second ends; attaching a tubular first port to the body, the tubular first port extending axially along a central first port longitudinal axis to a first port end having a first port end axis disposed at a first angle relative to the first port longitudinal axis, the first port end being joined in fluid communication to the body first end with the first port end axis being generally coaxially aligned with the central body longitudinal axis; and attaching a tubular second port to the body, the tubular second port extending axially along a central second port longitudinal axis to a second port end having a second port end axis disposed at a second angle relative to the second port longitudinal axis, the second port end being joined in fluid communication to the body medial opening with the first and second port longitudinal axes being generally coaxially aligned.

15. A method of making a housing as set forth in claim 14, wherein the forming the tubular body includes machining a bore in a cylindrical blank.

16. A method of making a housing as set forth in any one of claims 13-

14, wherein the attaching the tubular first and second ports to the body includes welding.