WO2010068336A1

WO2010068336A1 - Silsesquioxane resins

Info

Publication number: WO2010068336A1
Application number: PCT/US2009/061125
Authority: WO
Inventors: Peng-Fei Fu; Eric Moyer; Craig Yeakle
Original assignee: Dow Corning Corporation
Priority date: 2008-12-10
Filing date: 2009-10-19
Publication date: 2010-06-17
Also published as: JP5662338B2; US20110233489A1; US8809482B2; JP2012511619A; EP2373722A1; CN102245674B; EP2373722A4; TW201024924A; CN102245674A; KR20110096063A; TWI490655B

Abstract

This invention pertains to silsesquioxane resins useful in antireflective coatings wherein the silsesquioxane resin is comprised of the units (Ph(CH₂)_rSiO_(3-x)/2(OR')x)m (HSiO_(3-x)/2(OR')_x)_n (MeSiO_(3-x)/2(OR')_x)o (RSiO_(3-x)/2(OR')_x)_p (R¹SiO_(3-x)/2(OR' )_x)_q where Ph is a phenyl group, Me is a methyl group; R¹ is hydrogen atom or a hydrocarbon group having from 1 to 4 carbon atoms; R is selected from a carboxylic acid group or a carboxylic acid forming group or mixtures thereof; and R is selected from substituted phenyl groups, ester groups, polyether groups; mercapto groups, sulfur-containing organic functional groups, hydroxyl producing group, aryl sulphonic ester groups, and reactive or curable organic functional groups; and r has a value of 0, 1, 2, 3, or 4; x has a value of 0, 1 or 2; wherein in the resin m has a value of 0 to 0.90; n has a value of 0.05 to 0.99; o has a value of 0 to 0.95; p has a value of 0.01 to 0.5; q has a value of 0 to 0.5; and m + n + o + p + q ≈ 1.

Description

SILSESQUIOXANE RESINS

CROSS-REFERENCE TO RELATED APPLICATIONS [0001] None BACKGROUND

[0002] In the photolithography process, exposure of a photoresist to UV light is an important step in attaining a high resolution image. With the continuing demand for smaller feature sizes in the semiconductor industry, 193 nm optical lithography has emerged very recently as the technology to produce devices with sub-100 nm features. The use of such a shorter wavelength of light requires the bottom antireflective coating (BARC) to reduce the reflection on substrate and dampen the photoresist swing cure by absorbing light that has passed though the photoresist. Commercially available antireflective coatings consist of both organic and inorganic based materials. Typically, the inorganic ARC, which exhibits good etch resistance, is CVD based and is subject to all the integration disadvantage of extreme topography; on the other hand, the organic ARC materials are applied by spin-on process and have excellent fill and planarization properties, but suffer from poor etch selectivity to organic photoresists. As a result, a material that offers the combined advantages of organic and inorganic ARC is highly desired. [0003] In this regards, we have recently discovered that certain phenyl-hydride based silsesquioxane resins exhibit excellent anti-reflective coating properties for 193 nm light. Although Bottom Anti Reflective Coatings (BARC) materials can effectively reduce the reflection of activating radiation, removal of BARC materials without damaging the overlying photoresist and/or the underlying substrate has been very challenging. The typical process to remove BARC is by a plasma etch process. However, plasma etch often cause thinning of a photoresist layer. As a result, the patterns on the photoresist layer may be destroyed or becomes not transferable to the substrate layer. Plasma etch may also cause damage to the substrate thereby affecting the performance of the final device. What is more, the additional etch step for removing the BARC material increases cost and process complication in photolithographic practice. Therefore it is desirable to have an antireflective coating material that may be removed by means other than plasma etch. [0004] This invention pertains to silsesquioxane resins useful as an antireflective coating layer for photolithography. This invention more specifically pertains to a silsesquioxane material containing carboxy moiety. The carboxy functional silsesquioxane resins form excellent spin-on film and are resistant to organic solvents such as PGMEA, 2-heptonene, but are developer- soluble when cured at 250 ° C or below. In addition Si-rich ARCs produced from the carboxyl function silsesquioxane resins show excellent dry-etch resistance.

BRIEF SUMMARY

[0005] This invention pertains to carboxyl functional silsesquioxane resins useful in antireflective coatings wherein the silsesquioxane resin is comprised of the units

(Ph(CH₂)_rSiO₍₃._x)/2(OR')_x)_m (HSiO₍3__x)/2(OR')_x)_n (MeSiO₍3__x)/2(OR')_x)_o (RSiO₍3__x)/2(OR')_x)_p (R¹SiO₍₃._xy₂(OR')_x)_q where Ph is a phenyl group, Me is a methyl group; R' is hydrogen atom or a hydrocarbon group having from 1 to 4 carbon atoms; R is selected from a carboxylic acid group, a carboxylic acid forming group or mixtures thereof; and R is selected from substituted phenyl groups, ester groups, polyether groups; mercapto groups, sulfur-containing organic functional groups, hydroxyl producing group, aryl sulphonic ester groups, and reactive or curable organic functional groups; and r has a value of 0, 1, 2, 3, or 4; x has a value of 0, 1 or 2; wherein in the resin m has a value of 0 to 0.95; n has a value of 0.05 to 0.95; o has a value of 0 to 0.95; p has a value of 0.05 to 0.5; q has a value of 0 to 0.95; and m + n + o + p + q = 1. When these resins are used in antireflective coatings, the cured films exhibit excellent solvent resistance (i.e. PGMEA) and can be removed by a variety of means including etching, wet developing, wet stripping and others. DETAILED DESCRPTION

[0006] The silsesquioxane resins useful in forming the antireflective coating are comprised of the units

(Ph(CH₂)_rSiO₍₃._x)/2(OR')_x)_m (HSiO₍3__x)/2(OR')_x)_n (MeSiO₍3__x)/2(OR')_x)_o (RSiO₍₃._x)/2(OR')_x)_p

(R¹SiO₍₃__x)/2(OR')_x)_q where Ph is a phenyl group, Me is a methyl group; R' is hydrogen atom or a hydrocarbon group having from 1 to 4 carbon atoms; R is selected from a carboxylic acid group, a carboxylic acid forming group or mixtures thereof; and R is selected from substituted phenyl groups, ester groups, polyether groups; mercapto groups, sulfur-containing organic functional groups, hydroxyl producing group, aryl sulphonic ester groups, and reactive or curable organic functional groups; and r has a value of 0, 1, 2, 3, or 4; x has a value of 0, 1 or 2; wherein in the resin m has a value of 0 to 0.90; n has a value of 0.05 to

0.99; o has a value of 0 to 0.95; p has a value of 0.01 to 0.5; q has a value of 0 to 0.5; and m + n + o + p + q ∞ l. Typically m has a value of 0.05 to 0.25, alternatively 0.05 to 0.15. Typically n has a value of 0.15 to 0.80, alternatively 0.2 to 0.75. Typically o has a value of 0.25 to 0.80, alternatively 0.4 to 0.75. Typically p has a value of 0.015 to 0.35, alternatively 0.025 to 0.25. Typically q has a value of 0 to 0.15, alternatively 0 to 0.1.

[0007] R' is independently a hydrogen atom or hydrocarbon group having 1 to 4 carbon atoms. R' may be exemplified by H, methyl, ethyl, propyl, iso-propyl and butyl.

[0008] In the resin R is a carboxylic acid group, a carboxylic acid forming group or mixtures thereof. Examples of carboxylic acid groups are those of the general formula

2 2 R C(O)OH where R is selected from alkylene groups having 1 -10 carbon atoms.

2 3

Examples of carboxylic acid forming groups are those of the general formula -R C(O)OR

2 3 where R is selected from alkylene groups having 1 -10 carbon atoms, and R is a protecting group. Protecting groups are organic or silyl groups that cleave under acidic conditions to yield the corresponding carboxylic acid group. Protecting groups may be exemplified, but not limited, by t-butyl, trimethylsilyl, anhydride groups, methylthiomethyl ester, benzyloxymethyl ester, diphenylmethyl ester, p-methoxybenzyl ester, and others. Many of the protecting groups are described in "Protective groups in organic synthesis" by Greene and Wuts, 3^rd Edition, page369-453.

[0009] R is selected from substituted phenyl groups, ester groups, polyether groups; mercapto groups, sulfur-containing organic functional groups, hydroxyl producing group, aryl sulphonic ester groups, and reactive or curable organic functional groups. Substituted phenyl groups contain at least one HO-, MeO-, Me-, Et- Cl- and/or other substituents. Ester groups may be any organic substituent containing at least one ester functionality. Examples of ester groups useful herein are -(CH₂^-O-C(O)Me and -(CH₂^-C(O)-OMe. Polyether groups are an organic substituent having hydrocarbon units linked through oxygen atom,

4 represented, but not limited, by the following structure: -(CH₂)_a[O(CH₂)b]_cOR , wherein a =

4 2 to 12; b = 2 to 6; c = 2 to 200; R = H, alkyl, or other organic groups. Examples of polyether groups useful herein are -(CH₂)₃-(OCH₂CH₂)_c-OMe, -(CH₂)₃-(OCH₂CH₂)_C-OH and -(CH₂)₃-(OCH₂CH₂)₇-OAc and -(CH₂)₃-(OCH₂CH₂)_c-OC(O)Me. Mercapto groups have the general formula HS(CH₂)(J- where d has a value of 1- 18, such as mercaptopropyl, mercaptoethyl, and mercaptomethyl. Aryl sulfonic ester groups have the formula R 0-SO₂-

Ph-(CH₂)r- where R is a hydrogen atom, an aliphatic group or an aromatic group and r has a value of 0, 1, 2, 3, or 4. Aryl sulfonic ester groups may be exemplified by, but not limited to HO-SO₂-Ph-(CH₂)r- or (CH₃)₂CHO-SO₂-Ph-(CH₂)r-. Reactive or curable organic functional groups may be exemplified by, but not limited to alkenyl groups such at vinyl and allyl; epoxy groups such as glycidoxypropyl group and epoxycyclohexane group, acrylate groups such as methacryoxypropyl groups, acryloxypropyl, and others. [0010] The typical method for producing the silsesquioxane resin involves the hydrolysis and condensation of the appropriate halo or alkoxy silanes. One example is the hydrolysis and condensation of a mixture of phenyltrichlorsilane, trichlorosilane, a silane having a carboxylic acid or carboxylic acid forming group, methyltrichlorosilane and optionally other organofunctional trichlorosilanes. By this method it is possible that residual -OH and/or - OR' will remain in the silsesquioxane resin as a result of incomplete hydrolysis or condensation. If the total amount of units in the silsesquioxane resin containing -OR' groups, exceed 40 mole% then gellation and instability of the resin may occur. Typically the silsesquioxane resin contains 6 to 38 mole% of units containing -OR' groups, alternatively less than 5 mole%, alternatively less than 1 mole%.

[0011] The silsesquioxane resin has a weight average molecular weight (Mw) in the range of 500 to 200,000 alternatively in the range of 500 to 100,000, alternatively in the range of 700 to 30,0000 as determined by gel permeation chromatography employing RI detection and polystyrene standards.

[0012] The method for preparing a siloxane resin comprises reacting in an organic solvent

(A) a mixture of silane reactants comprising HSiX₃, and RS 1X3, and optionally MeSiX3, Ph(CH2)_rSiX3, and R SiX₃ with (B) water, where X is a hydrolyzable group independently selected from Cl, Br, CH3CO2-, an alkoxy group -OR', or other hydrolyzable groups. The silanes useful herein can be exemplified by, but not limited to, HSi(OEt)3, HSiCl3,

PhCH₂CH₂SiCl₃ , and PhSiCl₃, MeSi(OMe)₃, MeSiCl₃, R¹SiCl₃ and R¹Si(OMe₃)₃ where

R is as defined above, Me represents a methyl group, Et represents an ethyl group and Ph represents a phenyl group. In the reaction mixture there is typically 0 to 90 mole%, alternatively 5 to 25 mole% Ph(CH₂)_rSiX₃, 5 to 99 mole%, alternatively 15 to 80 mole% HSiX₃, 0 to 95 mole%, alternatively 25 to 80 mole% MeSiX₃, 1 to 95 mole%, alternatively

1.5 to 35 mole% RSiX₃, and 0 to 50 mole%, alternatively 0 to 15 mole% R SiX₃ with the proviso that the sum of reactants equals 100 mole%.

[0013] Carboxy functional silanes that may be used in the preparation of the silsesquioxane resin, may be exemplified by, but not limited to, (MeO)₃Si-(CH₂)₂-COO^lBu

(MeO)₃Si-(CH₂)_d-(OCH₂CH₂)_e-COO^tBu (MeO)₃Si-(CH₂)₂-COO-SiMe₃ (MeO)₃Si-(CH₂)_C1-(OCH₂CH₂)_C-COO-SiMe₃

wherein Me is a methyl group, Bu is a t-butyl group, m has a value of 2 or 3 and n has a value of 1 to 10.

[0014] The amount of water in the reaction is typically in the range of 0.5 to 2 moles water per mole of X groups in the silane reactants, alternatively 0.5 to 1.5 moles per mole of X groups in the silane reactants.

[0015] The time to form the silsesquioxane resin is dependent upon a number of factors such as the temperature, the type and amount of silane reactants, and the amount of catalyst, if present. It is preferred to carry out the reaction for a time sufficient for essentially all of the X groups to undergo hydrolysis reactions. Typically the reaction time is from minutes to hours, alternatively 10 minutes to 1 hour. The reaction to produce the silsesquioxane resin can be carried out at any temperature so long as it does not cause significant gellation or cause curing of the silsesquioxane resin. The temperature at which the reaction is carried out is typically in the range of 25 ⁰C up to the reflux temperature of the reaction mixture. Typically the reaction is carried out by heating under reflux for 10 minutes to 1 hour.

[0016] The reaction step comprises both hydrolyzing and condensing the silane components. To facilitate the completion of the reaction a catalyst may be used. The catalyst can be a base or an acid such as a mineral acid. Useful mineral acids include, but are not limited to, HCl, HF, HBr, HNO₃, and H₂SO₄, among others, typically HCl. The benefit of HCl or other volatile acids is that a volatile acid can be easily removed from the composition by stripping after the reaction is completed. The amount of catalyst may depend on its nature. The amount of catalyst is typically 0.05 wt% to 1 wt% based on the weight of (A) + (B).

[0017] Generally, the silane reactants are either not soluble in water or sparingly soluble in water. In light of this, the reaction is carried out in an organic solvent. The organic solvent is present in any amount sufficient to dissolve the silane reactants. Typically the organic solvent is present from 1 to 99 weight percent, alternatively 70 to 90 wt% based on the weight of (A) + (B). Useful organic solvents may be exemplified by, but not limited to, saturated aliphatics such as n-pentane, hexane, n-heptane, and isooctane; cycloaliphatics such as cyclopentane and cyclohexane; aromatics such as benzene, toluene, xylene, mesitylene; ethers such as tetrahydrofuran, dioxane, ethylene glycol dietheyl ether, ethylene glycol dimethyl ether; ketones such as methylisobutyl ketone (MIBK) and cyclohexanone; halogen substituted alkanes such as trichloroethane; halogenated aromatics such as bromobenzene and chlorobenzene; esters such as propylene glycol monomethyl ether acetate (PGMEA), isobutyl isobutyrate and propyl propronate. Useful silicone solvents may be exemplified by, but not limited to cyclic siloxanes such as octamethylcyclotetrasiloxane, and decamethylcyclopentasiloxane. A single solvent may be used or a mixture of solvents may be used.

[0018] In the process for making the silsesquioxane resin, after the reaction is complete, volatiles may be removed from the silsesquioxane resin solution under reduced pressure. Such volatiles include alcohol by-products, excess water, catalyst, hydrochloric acid (chlorosilanes routes) and solvents. Methods for removing volatiles are known in the art and include, for example, distillation or stripping under reduced pressure.

[0019] Following completion of the reaction the catalyst may be optionally removed. Methods for removing the catalyst are well know in the art and would include neutralization, stripping or water washing or combinations thereof. The catalyst may negatively impact the shelf life of the silsesquioxane resin especially when in solution thus its removal is suggested. [0020] To increase the molecular weight of the silsesquioxane resin and/or to improve the storage stability of the silsesquioxane resin the reaction may be carried out for an extended period of time with heating from 40 ⁰C up to the reflux temperature of the solvent ("bodying step"). The bodying step may be carried out subsequent to the reaction step or as part of the reaction step. Typically, the bodying step is carried out for a period of time in the range of 10 minutes to 6 hours, alternatively 20 minutes to 3 hours. [0021] Following the reaction to produce the silsesquioxane resin a number of optional steps may be carried out to obtain the silsesquioxane resin in the desired form. For example, the silsesquioxane resin may be recovered in solid form by removing the solvent. The method of solvent removal is not critical and numerous methods are well known in the art (e.g. distillation under heat and/or vacuum). Once the silsesquioxane resin is recovered in a solid form, the resin can be optionally re-dissolved in the same or another solvent for a particular use. Alternatively, if a different solvent, other than the solvent used in the reaction, is desired for the final product, a solvent exchange may be done by adding a secondary solvent and removing the first solvent through distillation, for example. Additionally, the resin concentration in solvent can be adjusted by removing some of the solvent or adding additional amounts of solvent.

[0022] Another method for producing the silsesquioxane resin comprises grafting the corresponding carboxy containing monomer onto a starting silsesquioxane resin. The typical method for grafting the corresponding carboxy containing monomer onto the starting silsesquioxane resin is by the hydro silylation of a carboxy containing olefin onto a Si-H containing silsesquioxane resin in the presence of a transition metal catalyst.

[0023] Carboxy containing olefins useful herein include organic molecules that contain a

3 3 double bond and a carboxy containing group, -C(O)OR where R is as described above.

3 The carboxy containing group may be exemplified by carboxylic acid (R = H), a carboxylic anhydride or a carboxylic ester. When the carboxylate group is a carboxylic ester group, it has a protected organic group, which may be cleaved under the reaction conditions to yield the corresponding carboxylic acid. [0024] Carboxy containing olefins useful herein include, but are not limited to,

CH₂=CH-(CH₂)_g-COOR³ where R can be Bu, SiMe3, Si BuMe₂, or CPI13; and g = 0 to 8; CH₂=CH-(CH₂VCOO-CH₂-OMe where m = 0 to 8;

CH2=CH-(CH2)g-(OCH₂CH2)_n-COOR³ where R can be ¹Bu, SiMe₃, Si¹BuMe₂, or CPh₃; g = 0 to 8; h= 1 to 10.

[0025] SiH containing silsesquioxane resins useful in the production of the silsesquioxane resins herein are comprised of the units

(Ph(CH₂)_rSiO₍₃._x)/2(OR')_x)_m (HSiO₍₃._x)/2(OR')_x)_n» (MeSiO₍₃._x)/2(OR')_x)_o

(R¹SiO₍₃__x)/2(OR')_x)_q where Ph is a phenyl group, Me is a methyl group; R' is hydrogen atom or a hydrocarbon group having from 1 to 4 carbon atoms; and R is selected from substituted phenyl groups, ester groups, polyether groups; mercapto groups, sulfur-containing organic functional groups, hydroxyl producing group, aryl sulphonic ester groups, and reactive or curable organic functional groups; and r has a value of 0, 1, 2, 3, or 4; x has a value of 0, 1 or 2; wherein in the resin m has a value of 0 to 0.90; n" has a value of 0.10 to 1; o has a value of 0 to 0.95; q has a value of 0 to 0.5; and m + n" + o + q = l. [0026] Typically m has a value of 0.05 to 0.25, alternatively 0.5 to 0.15. Typically n has a value of 0.165 to 0.95, alternatively 0.10 to 0.3. Typically o has a value of 0.25 to 0.80, alternatively 0.25 to 0.75. Typically q has a value of 0 to 0.15, alternatively 0 to 0.1. [0027] The carboxylate olefin and Si-H containing silsesquioxane resin are reacted in the presence of a transition metal catalyst. Useful transition metal catalysts may be selected from a variety of hydrosilylation catalysts known to promote the reaction of vinyl-functional radicals with silicon-bonded hydrogen atoms. Suitable transition metal catalyst may include platinum and rhodium-containing compounds and complexes. Platinum catalysts such as platinum acetylacetonate or chloroplatinic acid are representative of these compounds and suitable for use. A typical transition metal catalyst is a chloroplatinic acid complex of divinyltetramethyldisilxoane diluted in dimethylvinylsiloxy endblocked polydimethylsiloxane. [0028] The amount of carboxylate olefin to Si-H containing silsesquioxane resin is typically such that the final resin contains 5 to 99 mole % of (HSiO₍3__xy2(OR')_x) and 1 to 50 mole % of (RSiO₍3__x)/₂(OR')_x), alternatively 15 to 80 mole % of (HSiO₍₃._x)/₂(OR')_x) and 1.5 to 35 mole % of (RSiO₍₃._x)/₂(OR')_x), alternatively 20 to 75 mole % of (HSiO₍₃._x)/₂(OR')_x) and

2.5 to 25 mole % of (RSiO₍3__xy₂(OR')_x). The amount of transition metal catalyst used is typically present in an amount to provide 2 ppm, alternatively 5 to 200 ppm of transition metal (i.e. Pt) based on the total weight carboxylate olefin and Si-H containing silsesquioxane. [0029] This invention also pertains to an antireflective coating (ARC) composition comprising

(i) silsesquioxane resin comprised of the units

(Ph(CH₂)_rSiO₍₃__x)/₂(OR')_x)_m (HSiO₍3__x)/₂(OR')_x)_n (MeSiO₍3__x)/₂(OR')_x)_o

(RSiO₍3__x)/₂(OR')_x)_p

(R¹SiOo-_Xy₂(ORO_x)_C1 where Ph is a phenyl group, Me is a methyl group; R' is hydrogen atom or a hydrocarbon group having from 1 to 4 carbon atoms; R is selected from a carboxylic acid group, a carboxylic acid forming group or mixtures thereof; and R is selected from substituted phenyl groups, ester groups, polyether groups; mercapto groups, sulfur-containing organic functional groups, hydroxyl producing group, aryl sulphonic ester groups, and reactive or curable organic functional groups; and r has a value of 0, 1, 2, 3, or 4; x has a value of 0, 1 or 2; wherein in the resin m has a value of >0 to 0.90; n has a value of 0.05 to 0.99; o has a value of 0 to 0.95; p has a value of 0.01 to 0.5; q has a value of 0 to 0.5; and m + n + o + p + q = l; and (ii) a solvent. [0030] Useful solvents (ii) include, but are not limited to, l-methoxy-2-propanol, propylene glycol monomethyl ethyl acetate gamma-butyrolactone, and cyclohexanone, among others. The ARC composition typically comprises from 10% to 99.9 wt% solvent based on the total weight of the ARC composition, alternatively 80 to 95 wt %. [0031] The antireflective coating compositions are formed by mixing together the silsesquioxane resin and solvent, and optionally any other additive.

EXAMPLES

[0032] The following examples are included to demonstrate embodiments of the invention. It should be appreciated by those of skill in the art that the techniques disclosed in the examples which follow represent techniques discovered by the inventor to function well in the practice of the invention. However, those of skill in the art should, in light of the present disclosure, appreciate that many changes can be made in the specific embodiments which are disclosed and still obtain a like or similar result without departing from the spirit and scope of the invention. All percentages are in wt. %. Structures given in Examples 1-6 are theoretical structures based on the reactants.

Example 1

^(Ph) (H) (Me) (PSA)

T 0.10 T o.2O T 0.625 T 0.075 [0033] A reactor was loaded with 445.1 g of propylene glycol methyl ether acetate

(PGMEA), 30.89 g of 3-(triethoxysilyl)propyl succinic anhydride ( 0.101 mol), 28.62 g of phenyltrichlorosilane (0.135 mol), 126.40 g of methyltrichlorosilane (0.846 mol), and 36.65 g of trichlorosilane (0.271 mol). The jacket temperature was set at 25 ⁰C. The solution was vigorously stirred. To a flask was placed 1080 g of PGMEA and 54.1 g deionized water. The mixture of PGMEA and water was vigorously stirred until all the water dissolved in PGMEA. Next, the PGMEA/water solution was added to the reactor under nitrogen over 1 hour while the reactants were vigorously stirred. After the completion of addition, the mixture in the reactor was washed three times with DI water (2 x 571 g). The solution was then stripped after adding 120 g of Ethanol (EtOH) to give a clear PGMEA solution. The solution is diluted to 10 Wt. % by adding more PGMEA and then filtrated through a 0.2 mm Teflon filter. GPC (vs. polystyrene): Mw =11300, Mw/Mn=2.70.

Example 2

JPh) JH) JMe) JPSA)

¹ 0.05 ^l 0.50¹ 0.425 ^l 0.075

[0034] In a reactor was loaded with 672.5 g of propylene glycol methyl ether acetate (PGMEA), 11.42 g of 3-(triethoxysilyl)propyl succinic anhydride ( 0.038 mol), 15.87 g of phenyltrichlorosilane (0.075 mol), 95.29 g of methyltrichlorosilane (0.638 mol), and 101.59 g of trichlorosilane (0.750 mol). The jacket temperature was set at 25 ⁰C. The solution was vigorously stirred. To a flask was placed 1080 g of PGMEA and 59.4 g deionized water. The mixture of PGMEA and water was vigorously stirred until all the water dissolved in PGMEA. Next, the PGMEA/water solution was added to the reactor under nitrogen over 1 hour while the reactants were vigorously stirred. After the completion of addition, the mixture in the reactor was washed three times with DI water (2 x 500 g). The solution was then stripped after adding EtOH (120 g) to give a clear PGMEA solution. The solution is diluted to 10 Wt.% by adding more PGMEA and then filtrated through a 0.2 mm Teflon filter. GPC (vs. polystyrene): Mw =44300, Mw/Mn=5.99.

Eample 3

JPhEt) (H) JCH CHMeCOOtBu)

T 0.07^T 0.70^T 2 0.23

[0035] To a flask containing hydrogensilsesquioxane resin (Mn =2200, 37.10 g, 0.7 mol) in 200 mL of toluene, were added styrene (7.29g, 0.07 mol) and t-butyl methacrylate (32.71 g, 0.23 mol), followed by a platinum catalyst. The mixture was stirred and irradiated with UV lamp at room temperature. After 18 hrs, the volatiles were removed at 40⁰C to yield the titled resin as viscous oil. The resin was dissolved in PGMEA to give 10 wt.% solution and the solution was filtrated through a 0.2 mm Teflon filter. GPC (vs. polystyrene): Mw =4890, Mw/Mn=2.44;

Example 4

^(PhEt) (H) [(CH ) COOtBu)]

T 0.07^T 0.74 T 2 3 0.19 [0036] To a flask containing hydrogensilsesquioxane resin (Mn =2200, 26.5 g, 0.5 mol) in 200 mL of toluene, were added styrene (3.65 g, 0.035 mol) and t-butyl butenoate (17.0 g, 0.115 mol), followed by a platinum catalyst. The mixture was stirred and refluxed overnight. The volatiles were then removed at 40⁰C to yield a viscous oil. The oil was dissolved in PGMEA to give 10 wt.% solution and the solution was filtrated through a 0.2 mm Teflon filter. GPC (vs. polystyrene): Mw =5730, Mw/Mn=2.21;

Example 5 fPhEt) (H) [(CH ) COOtBu]

T 0.07T 0.70^T 2 3 0.23

[0037] To a flask containing hydrogensilsesquioxane resin (Mn =11,800, 20 g, 0.38 mol) in 100 mL of toluene, were added styrene (3.65 g, 0.035 mol) and t-butyl butenoate (14.22 g, 0.095 mol), followed by a platinum catalyst. The rotary vapor at 40⁰C to yield viscous oil. The oil was dissolved in PGMEA to give 10 wt.% solution and the solution was filtrated through a 0.2 mm Teflon filter. GPC (vs. polystyrene): Mw =15,300, Mw/Mn=2.78.

Example 6

(Ph) (H) (Me) ((CH ) COOtBu) T 0.1 T 0.2 T 0.6 T 2 3 0.1

[0038] To a flask containing T(Ph)₀1T(H)₀₃T(Me)₀₆ resin (20 g, 0.38 mol) in 100 mL of toluene, were added t-butyl butenoate (3.26 g, 0.022 mol), followed by a platinum catalyst. The mixture was stirred and refluxed overnight. The volatiles were then removed using rotary vapor at 40 ⁰C to yield white solid. The resin was dissolved in PGMEA to give 10 wt.% solution and the solution was filtrated through a 0.2 mm Teflon filter. GPC (vs. polystyrene): Mw =12,450, Mw/Mn=2.95. Example 7

_T(Ph) (H) (Me) ((CH ) COOtBu)

T 0.07 T 0.45 ^τ 0.36 ^τ 2 3 0.12

[0039] PGMEA (600 g), phenyltrimethoxysilane (13.9 g, 0.07 mol), triethoxysilane (73.9 g. 0.45 mol), methyltriethoxysialne (64.2g, 0.36 mol), (3-tert-butyl)propal trimethoxysialne (31.7g, 0.12 mol), and de-ionized water (54g, 3 mol) were loaded into a flask. The solution was stirred for 5 min at room temperature and followed by the addition of nitric acid (70%, 0.64 g). The mixture was stirred overnight at 8O⁰C and then refluxed for 4 hrs, whereby low boiling volatiles were condensed and removed. The solution was cooled to room temperature to yield a clear colorless solution. The solution is then washed with de-ionized water. The residual water was stripped along with some PGMEA. The solution is diluted with PGMEA to a 10% solution in PGMEA. GPC (vs. PS): M_w = 6300; M_w/M_n = 2.58.

Example 8

(Ph) (H) (Me) ((CH ) COOtBu)

T 0.07 T 0.45 T 0.36 T 2 3 0.12 [0040] PGMEA (600 g), phenyltrimethoxysilane (19.8 g, 0.10 mol), triethoxysilane (32.8 g. 0.20 mol), methyltriethoxysialne (111.4 g, 0.625 mol), (3-tert-butyl)propal trimethoxysialne (19.8 g, 0.075 mol), and de-ionized water (54g, 3 mol) were loaded into a flask. The solution was stirred for 5 min at room temperature and followed by the addition of nitric acid (70%, 0.64 g). The mixture was stirred overnight at 8O⁰C and then refluxed for 4 hrs, whereby low boiling volatiles were removed. The solution was cooled to room temperature to yield a clear colorless solution. The solution is then washed with de-ionized water. The residual water was stripped along with some PGMEA. The solution is diluted with PGMEA to a 10% solution in PGMEA. GPC (vs. PS): M_w = 5300; M_w/Mn = 2.45.

Claims

Claims:

1. A silsesquioxane resin wherein the silsesquioxane resin is comprised of the units

(Ph(CH₂)_rSiO₍₃._x)/2(OR')_x)_m (HSiO₍3__x)/2(OR')_x)_n

(MeSiO₍3__x)/2(OR')_x)o (RSiO₍3__x)/₂(OR')_x)_p

(R¹SiO₍₃__x)/2(OR')_x)_q where Ph is a phenyl group, Me is a methyl group; R' is hydrogen atom or a hydrocarbon group having from 1 to 4 carbon atoms; and r has a value of 0, 1, 2, 3, or 4; x has a value of 0, 1 or 2; wherein in the resin m has a value of 0 to 0.90; n has a value of 0.05 to 0.99; o has a value of 0 to 0.95; p has a value of 0.01 to 0.5; q has a value of 0 to 0.5; and m + n + o + p + q « l.

2. The resin as claimed in claim 1 wherein m has a value of 0.05 to 0.25, n has a value of 0.15 to 0.80, o has a value of 0.25 to 0.80, p has a value of 0.015 to 0.35, and q has a value of O to 0.15.

3. The resin as claimed in claim 1 wherein R' is H.

4. The resin as claimed in claim 1 wherein R is a carboxylic acid group having the formula

2 2

-R C(O)OH where R is selected from alkylene groups having 1 -10 carbon atoms.

5. The resin as claimed in claim 1 wherein R is a carboxylic acid forming group of the

2 3 2 formula -R C(O)OR where R is selected from alkylene groups having 1 -10 carbon atoms,

3 and R is a protecting group.

6. The resin as claimed in claim 1 wherein R is a mixture of carboxylic acid groups and carboxylic acid forming group.

7. The resin as claimed in claim 5 wherein the protecting group is selected from by t-butyl, trimethylsilyl, anhydride groups, methylthiomethyl ester, benzyloxymethyl ester, diphenylmethyl ester, p-methoxybenzyl ester.

8. A method for producing a silsesquioxane resin comprising reacting in an organic solvent a (A) a mixture of silane reactants comprising 0 to 90 mole% Ph(CH2)_rSiX3, 5 to 99 mole% HSiX₃ 0 to 95 mole% MeSiX₃, 1 to 95 mole% RSiX₃, and 0 to 50 HIoIe^cR¹SiX₃ with the proviso that the sum of silane reactants equals 100 mole%; and (B) 0.5 to 2 moles of water per mole of X in the silane reactants wherein Ph represents a phenyl group, Me represents a methyl group, R is selected from a carboxylic acid group, a carboxylic acid forming group or a mixture thereof; and R is selected from substituted phenyl groups, ester groups, polyether groups; mercapto groups, sulfur-containing organic functional groups, hydroxyl producing group, aryl sulphonic ester groups, and reactive or curable organic functional groups; and r has a value of 0, 1, 2, 3, or 4; and X is a hydrolyzable group.

9. The method as claimed in claim 8 wherein RSiX₃ is selected from

(MeO)₃Si-(CH₂)_In-(OCH₂CH₂)_I1-COO¹Bu (MeO)₃Si-(CH₂)₂-COO-SiMe₃

(MeO)₃Si-(CH₂)_m-(OCH₂CH₂)_n-COO-SiMe₃

10. The method as claimed in claim 8 where there is additionally present a 0.05 to 1 wt% of a catalyst based on the weight of (A) + (B).

11. The method as claimed in claim 8 wherein the organic solvent is present in an amount of 1 to 99 wt% based on the weight of (A) + (B).

12. The method as claimed in claim 11 wherein the organic solvent is selected from saturated aliphatics, cycloaliphatics, aromatics, ethers, ketones, halogen substituted alkanes, halogenated aromatics, esters and silicones.

13. A method for producing a silsesquioxane resin comprising grafting a carboxylate olefin onto a Si-H containing silsesquioxane resin in the presence of a transition metal catalyst.

14. The method as claimed in claim 13 wherein the carboxylate olefin is selected from CH₂=CH-(CH₂VCOOR⁴;

CH₂=CH-(CH₂)_m-COO-CH₂-OMe; CH₂=CH-(CH₂)_J11-(OCH₂CH₂)_O-COOR⁴;

4 t t where R is selected from Bu, SiMe3, Si BuMe2, or CPI13; and m = 0 to 8.

15. The method as claimed in 13 wherein the SiH containing silsesquioxane resin is comprised of the units (Ph(CH₂)_rSiO₍₃._x)/2(OR')_x)_m (HSiO₍3__x)/2(OR')_x)_n» (MeSiO₍3__x)/2(OR')_x)_o

(R¹SiO₍₃__x)/2(OR')_x)_q where Ph is a phenyl group, Me is a methyl group; R' is hydrogen atom or a hydrocarbon group having from 1 to 4 carbon atoms; and R is selected from substituted phenyl groups, ester groups, polyether groups; mercapto groups, sulfur-containing organic functional groups, hydroxyl producing group, aryl sulphonic ester groups, and reactive or curable organic functional groups; and r has a value of 0, 1, 2, 3, or 4; x has a value of 0, 1 or 2; wherein in the resin m has a value of 0 to 0.90; n" has a value of 0.10 to 1; o has a value of 0 to 0.95; q has a value of 0 to 0.5; and m + n" + o + q = l.

16. The method as claimed in claim 16 wherein the transition metal catalyst is a platinum catalyst.

17. An antireflective coating (ARC) composition comprising (i) silsesquioxane resin comprised of the units

(Ph(CH₂)_rSiO₍₃__x)/₂(OR')_x)_m (HSiO₍₃__x)/₂(OR')_x)_n (MeSiO₍3__x)/₂(OR')_x)_o (RSiO₍₃__x)/₂(OR')_x)p (R¹SiO₍₃__x)/2(OR')_x)_q where Ph is a phenyl group, Me is a methyl group; R' is hydrogen atom or a hydrocarbon group having from 1 to 4 carbon atoms; R is selected from a carboxylic acid group, a carboxylic acid forming group or mixtures thereof; and R is selected from substituted phenyl groups, ester groups, polyether groups; mercapto groups, sulfur-containing organic functional groups, hydroxyl producing group, aryl sulphonic ester groups, and reactive or curable organic functional groups; and r has a value of 0, 1, 2, 3, or 4; x has a value of 0, 1 or 2; wherein in the resin m has a value of >0 to 0.90; n has a value of 0.05 to 0.99; o has a value of 0 to 0.95; p has a value of 0.01 to 0.5; q has a value of 0 to 0.5; and m + n + o + p + q = 1.; and (ii) a solvent.

18. The ARC composition as claimed in claim 17 wherein there is 10% to 99.9 wt% solvent based on the total weight of the ARC composition.

19. The ARC composition as claimed in claim 17 wherein the solvent is selected from 1- methoxy-2-propanol, propylene glycol monomethyl ethyl acetate gamma-butyrolactone, and cyclohexanone.