WO2010061546A1

WO2010061546A1 - Branching device

Info

Publication number: WO2010061546A1
Application number: PCT/JP2009/006051
Authority: WO
Inventors: 村山晋
Original assignee: 株式会社Ihi
Priority date: 2008-11-28
Filing date: 2009-11-12
Publication date: 2010-06-03
Also published as: JP2010126334A; TW201029901A

Abstract

Provided is a branching device (1A) of a conveyor line that conveys a conveying container (10) configured to receive an object (D) to be conveyed. The branching device includes: first guide parts (G1, G2) installed on an upper surface of the conveying container; second guide parts installed on a lower surface of the conveying container; a plurality of conveying rollers (R1A-R4A) installed along both lateral sides in a conveying direction except for at a junction between a first conveying line (S) and a second conveying line (B) to move the conveying container; guide rails (TG1) installed along both lateral sides in the conveying direction except for at the junction and contacting the second guide parts to guide the second guide parts; and a horizontally movable switch guide (2A) installed at the upside of the junction and comprising a first switching guide rail (SG1) contacting the first guide parts to guide the conveying container along the first conveying line, and a second switching guide rail (BG1) contacting the first guide parts to guide the conveying container along the second conveying line.

Description

Branching device

The present invention relates to a branching device.
This application claims priority based on Japanese Patent Application No. 2008-305279 filed in Japan on November 28, 2008, the contents of which are incorporated herein by reference.

A turntable is known as a branching device that switches the transport direction of a transported object along a transport path such as a roller conveyor to the branch transport path side (see Patent Document 1).

Japanese Patent No. 3749176

The turntable needs to be swung in a state where a transported object is placed on the turntable when the transport container transported on the transport path is switched to the branch transport path side. For this reason, at the time of turning of the turntable, the progress (conveyance) of the subsequent transported object is stopped and stagnated on the transport path, so that the transport efficiency is lowered.

The present invention has been made in view of the above-described circumstances, and an object of the present invention is to provide a branching device that can smoothly and reliably change the transfer direction without stagnation of the flow of the transport container.

The branching apparatus according to the present invention employs the following means in order to solve the above problems.
The present invention is a branch device for a transport path for transporting a transport container that contains a transport object, and includes a first guide portion disposed on both sides in the width direction perpendicular to the transport direction on the top surface of the transport container, A second guide portion disposed on both sides in the width direction orthogonal to the transport direction of the lower surface, and disposed along both sides in the width direction of the transport direction excluding the intersection of the first transport path and the second transport path in the transport path. A plurality of transport rollers that support and transport the lower surface of the transport container, and guides that are disposed along both sides of the transport path in the width direction of the transport direction excluding the intersecting portion and abut against the second guide portion The first transfer guide rail and the first guide part of the first guide part that contact the rail and the first guide part arranged on the second transfer path side to guide the transfer container along the first transfer path A transport container along the second transport path in contact with the one arranged on the road side A switching guide which is horizontally movably disposed above the intersection and having a second switching guide rails comprising a.

Further, the guide rail may be disposed on the outer side in the width direction of the transport path in the transport direction than the transport roller.

In addition, the transport roller may be disposed on the outer side in the width direction of the transport path in the transport direction than the guide rail.

Further, the first guide portion may have a guide roller having a rotation shaft extending in the vertical direction.

Further, the second guide portion may have a guide roller having a rotation shaft extending in the vertical direction.

The first guide portion may be a side surface of a flat flange.

The second guide portion may be a side surface portion of the transport container.

According to the present invention, it is possible to easily and reliably switch the transport direction (straight and branch) of the transport container simply by moving the position of the switching guide. Further, even when a plurality of transport containers are continuously transported, the plurality of transport containers can be continuously straightened or branched without being temporarily stopped.

It is a perspective view showing a schematic structure of a branching device concerning a first embodiment of the present invention. It is a perspective view of the conveyance container used for the branch apparatus which concerns on 1st embodiment of this invention. It is a branching device which concerns on 1st embodiment of this invention, Comprising: It is a figure which shows the state which switched the transfer direction of the conveyance container to the rectilinear advance direction. It is a branching device which concerns on 1st embodiment of this invention, Comprising: It is a figure which shows the state which switched the transfer direction of the conveyance container to the rectilinear advance direction. It is a branch apparatus which concerns on 1st embodiment of this invention, Comprising: It is a figure which shows the state which switched the transfer direction of the conveyance container to the branch direction. It is a branch apparatus which concerns on 1st embodiment of this invention, Comprising: It is a figure which shows the state which switched the transfer direction of the conveyance container to the branch direction. It is a branch apparatus which concerns on 2nd embodiment of this invention, Comprising: It is a figure which shows the state which switched the transfer direction of the conveyance container to the rectilinear advance direction. It is a branch apparatus which concerns on 2nd embodiment of this invention, Comprising: It is a figure which shows the state which switched the transfer direction of the conveyance container to the rectilinear advance direction. It is a branch apparatus which concerns on 2nd embodiment of this invention, Comprising: It is a figure which shows the state which switched the transfer direction of the conveyance container to the branch direction. It is a branch apparatus which concerns on 2nd embodiment of this invention, Comprising: It is a figure which shows the state which switched the transfer direction of the conveyance container to the branch direction. It is a branch apparatus which concerns on 2nd embodiment of this invention, Comprising: It is a figure which shows the state which switched the transfer direction of the conveyance container to the branch direction.

Hereinafter, embodiments of a branching apparatus according to the present invention will be described with reference to the drawings.
FIG. 1 is a perspective view showing a schematic configuration of a branching apparatus according to the first embodiment.
FIG. 2 is a perspective view of a transport container used in the branching apparatus according to the first embodiment.

The transfer container 10 is, for example, a container that transfers a plurality of disc-shaped semiconductor wafers D (transferred objects) arranged and accommodated in a plurality of stages. The transfer container 10 includes a storage case 12 in which a plurality of locking grooves for locking both sides of the semiconductor wafer D are formed on the inner sidewalls on both sides, and a lid body 14 that seals and closes the opening 13 of the storage case 12. It is configured.

The transfer container 10 containing a plurality of semiconductor wafers D is transferred in the direction of the arrow along a main transfer path S or a branch transfer path B described later with the closed opening 13 facing sideways.
On the upper surface T of the transport container 10, a pair of first guide rollers G <b> 1 and G <b> 2 can be rotated at predetermined intervals in the front and rear directions in the transport direction on both sides of a rectangular flange 15 extending in the width direction held at a constant height by a support column. It is supported by. A pair of second guide rollers G3 and G4 are also supported on the lower surface E of the transport container 10 on both sides in the transport direction at the same positions as the first guide rollers G1 and G2, and are rotatable at predetermined intervals in the front and rear directions in the transport direction. (See FIGS. 3A, 3B, 4A and 4B). Each of these guide rollers G1, G2, G3, and G4 includes a rotation axis RA (see FIG. 3B) extending in the vertical direction, and rotates around the rotation axis.

The first guide rollers G1 and G2 may be the side surfaces of the flange 15 having a flat plate shape instead of the rollers. Further, the second guide rollers G3 and G4 may not be rollers, but may be side surfaces of the transport container 10 (the lower side surface 141 of the lid body 14 or the lower back surface 121 of the housing case 12 near the guide roller G4). That is, in the first embodiment, when there is no guide roller G1, G2, or G3, G4, the side surface of the flange 15 and the side surface portion of the transport container 10 function in the same manner as the guide rollers G1 to G4.

3A and 3B are branching devices according to the first embodiment of the present invention, and show a state in which the transfer direction of the transport container is switched to the straight traveling direction.
4A and 4B are diagrams illustrating a branching apparatus according to the first embodiment of the present invention, in a state where the transfer direction of the transport container is switched to the branching direction.

3A and 4A, in the branching apparatus 1A, the main transport path S that transports the transport container 10 in the straight traveling direction and the branch transport path B that transports the transport container 10 in the branch direction from the main transport path S intersect. It is arranged at the site.

A plurality of transport rollers R1A and R2A are continuously arranged in the transport direction on both inner side surfaces of the frame 16 of the main transport path S and the branch transport path B. The transport rollers R1A and R2A are composed of a drive roller DR and a free roller FR that can freely rotate, and are in contact with the inner side in the width direction of the second guide rollers G3 and G4 disposed on the lower surface of the transport container 10. It is arranged.

In areas other than the branch area BA1 (area surrounded by the two-dot chain line) where the main conveyance path S and the branch conveyance path B intersect, the second guide roller G3 on the lower surface of the conveyance container 10 is disposed outside the conveyance rollers R1A and R2A. , G4 are provided along the transfer direction to guide G4 in the transfer direction.

In the branch area BA1, the transport roller R2A located on the branch transport path B side of the main transport path S does not exist in the range intersecting with both the transport rollers R3A and R4A of the branch transport path B. Further, the transport roller R3A located on the main transport path S side of the branch transport path B does not exist in a range that intersects with both the transport rollers R1A and R2A of the main transport path S.

The branching device 1A includes a switching guide 2A having a substantially triangular shape in top view that moves forward and backward (horizontal movement) in a direction crossing between the main transport path S and the branch transport path B by a drive source (not shown).
The switching guide 2A is a linear first switching guide rail SG1 that abuts on a guide roller G2 disposed on the branch conveyance path B side of the first guide rollers G1 and G2 of the conveyance container 10 and guides it along the straight direction. And an arcuate second switching guide rail BG1 that contacts the guide roller G1 disposed on the main conveyance path S side of the first guide rollers G1 and G2 and guides it along the branch direction. The first switching guide rail SG1 and the second switching guide rail BG1 are integrally configured so as to be the outer surfaces of the switching guide 2A.

Next, the operation of the branching apparatus 1A according to the first embodiment will be described with reference to FIGS. 3A, 3B, 4A, and 4B.
First, when the transport container 10 is moved straight on the main transport path S, the upper surface of the transport container 10 is moved by moving the switching guide 2A from the main transport path S side to the branch transport path B side as shown in FIG. 3A. Of the T first guide rollers G1, G2, the branch path side guide roller G2 is guided to the first switching guide rail SG1.

That is, as shown in FIG. 3B, when the transport container 10 goes straight in the branch area BA1, the branch path side guide roller G2 on the upper surface T of the transport container 10 is guided to the first switching guide rail SG1. Therefore, the conveyance container 10 is prevented from tilting toward the branch path, and the conveyance container 10 is smoothly transferred along the traveling direction by the driving force of the conveyance roller R1A while maintaining the horizontal posture.

Here, as shown in FIG. 1, the distance between the centers of the first guide rollers G1 and G1 and G2 and G2 on the upper surface of the transport container 10 is L. Further, as shown in FIG. 3A, the end of the guide rail TG1 at the intersection of the guide rails TG1 of the main transport path S and the branch transport path B is denoted by TG10, and the transport of the transport container 10 of the first switching rail SG1 is performed. Let SG10 be the end on the rear side. At this time, if the distance S1 between these end portions TG10 and SG10 is S1 <L, when two guide rollers G2 and G2 exist in the front-rear direction of conveyance, when one G2 passes through the intermittent portion, However, the transport container 10 is smoothly transferred by the other three guide rollers G3, G3, and G2 without colliding with the guide rail SG1.
Further, when there is one guide roller G2, the dimension of the switching guide 2A is set large so that the position of the end SG10 of the first switching rail SG1 substantially coincides with the position of the end TG10 of the guide rail TG1. That's fine.

As shown in FIG. 4A, when the transfer container 10 is branched and transferred from the main transfer path S to the branch transfer path B, the switching guide 2A is horizontally moved from the branch transfer path B side to the main transfer path S side. As a result, of the first guide rollers G1, G2 on the upper surface of the transport container 10, the main transport path guide roller G1 is guided by the second switching guide rail BG1.
It is obvious that if the distance of the intermittent part B1 in FIG. 4A is B1 <L, or if the second switching guide rail BG1 is installed large, the same function as described above can be achieved.

That is, as shown in FIG. 4B, when the transport container 10 branches to the branch transport path B side in the branch area BA1, the main transport path guide roller G1 on the upper surface T of the transport container 10 guides to the second switching guide rail BG1. Is done. Therefore, the transport container 10 is prevented from tilting toward the main transport path, and the transport container 10 is smoothly transferred along the traveling direction of the branch transport path B by the driving roller DR on the transport roller R4A side while maintaining the horizontal posture. The

In this way, it is possible to easily and reliably switch between the straight movement of the transport container 10 and the movement in the branching direction only by moving the switching guide 2A horizontally. Accordingly, even when the plurality of transport containers 10 are continuously transported, the plurality of transport containers 10 can be continuously moved in a straight line or branching direction without being temporarily stopped.

Next, it attaches to the branch apparatus which concerns on 2nd embodiment of this invention, and demonstrates with reference to FIG. 5A, FIG. 5B, FIG. 6A, FIG. 6B, and FIG.
In addition, about the same component as 1st embodiment, the same code | symbol is attached | subjected and description is abbreviate | omitted.
FIG. 5A and FIG. 5B are diagrams illustrating a branching apparatus according to the second embodiment of the present invention, in a state where the transfer direction of the transport container is switched to the straight traveling direction.
6A, 6B, and 6C are diagrams illustrating a branching device according to the second embodiment of the present invention, in which the transfer direction of the transport container is switched to the branching direction.

5A, FIG. 5B, FIG. 6A, FIG. 6B and FIG. 6C, the transport container 20 containing a plurality of semiconductor wafers D has the same structure as that of the first embodiment.
On the upper surface T of the transport container 20, a pair of first guide rollers G11 and G12 are supported on both sides of the rectangular flange 17 held at a constant height so as to be rotatable at predetermined intervals in the front and rear directions. A pair of second guide rollers G13 and G14 are also supported on the lower surface E of the transport container 20 on both sides in the transport direction at the same position as the first guide rollers G11 and G12, and can be rotated at predetermined intervals in the front and rear directions in the transport direction. It is supported by. Each of these guide rollers G11, G12, G13, and G14 includes a rotation axis RA (see FIG. 5B) extending in the vertical direction, and rotates around this rotation axis.
In the second embodiment, when the guide rollers G11 and G12 are not provided, the side surface of the flange 15 functions similarly to the guide rollers G11 and G12.

On the other hand, a plurality of transport rollers R1B and R2B are continuously disposed on both inner side surfaces of the frame 18 of the main transport path S and the branch transport path B in the transport direction. The transport rollers R1B and R2B are composed of a drive roller DR and a free-rotating free roller FR, and are close to the outside in the width direction of the second guide rollers G13 and G14 disposed on the lower surface of the transport container 20. Arranged.

In areas other than the branch area BA2 (area surrounded by the two-dot chain line) where the main conveyance path S and the branch conveyance path B intersect, the second guide roller on the lower surface of the conveyance container 20 is located inside the conveyance rollers R1B and R2B. Guide rails TG2 for guiding G13 and G14 in the transfer direction are provided along the transfer direction.

In the branch area BA2, the transport roller R2B located on the branch transport path B side of the main transport path S does not exist in the range intersecting with both the transport rollers R3B and R4B of the branch transport path B. Further, the transport roller R3B located on the main transport path S side of the branch transport path B does not exist in a range intersecting with both the transport rollers R1B and R2B of the main transport path S.

The branching device 1B includes a switching guide 2B that moves forward and backward in a direction crossing between the main transport path S and the branch transport path B by a drive source (not shown).
The switching guide 2B is in contact with the guide roller G12 disposed on the branch path side of the first guide rollers G11 and G12 on the upper surface T of the transport container 20, and guides along the straight traveling direction. And an arcuate second switching guide rail BG2 that contacts the guide roller G11 disposed on the main transport path S side of the first guide rollers G11 and G12 and guides it along the branch direction. The first switching guide rail SG2 and the second switching guide rail BG2 are integrally configured so as to be the outer surfaces of the switching guide 2B.

Next, the operation of the branching apparatus 1B according to the second embodiment will be described with reference to FIGS. 5A, 5B, 6A, 6B, and 6C.
First, when the transport container 20 is moved straight on the main transport path S, the upper surface of the transport container 20 is moved by moving the switching guide 2B from the main transport path S side to the branch transport path B side as shown in FIG. 5A. Of the T first guide rollers G11 and G12, the branch path side guide roller G12 is guided to the first switching guide rail SG2.

That is, as shown in FIG. 5B, when the transport container 20 goes straight in the branch area BA2, the branch path side guide roller G12 on the upper surface T of the transport container 20 is guided to the first switching guide rail SG2. Therefore, the conveyance container 20 is prevented from tilting toward the branch conveyance path B, and the conveyance container 10 is smoothly transferred along the traveling direction by the driving force of the conveyance roller R1B while maintaining the horizontal posture.

Further, as shown in FIG. 6A, when the transfer container 20 is branched and transferred from the main transfer path S to the branch transfer path B, the switching guide 2B is moved from the branch transfer path B side to the main transfer path S side. Of the first guide rollers G11 and G12 on the upper surface of the transport container 10, the main transport path side guide roller G11 is guided by the second switching guide rail BG2.
Note that, at the intersection, the straight and branching guide rails TG2 and TG2 may be extended to the intersecting position as shown in FIG. 6C.

That is, as shown in FIG. 6B, when the transport container 20 is transported to the branch transport path B side in the branch area BA2, the main transport path side guide roller G1 on the upper surface T of the transport container 20 is moved to the second switching guide rail BG2. Guided. Therefore, the transport container 10 is prevented from tilting toward the main transport path, and the transport container 10 is smoothly transferred along the traveling direction of the branch transport path B by the driving roller DR on the transport roller R4B side while maintaining the horizontal posture. The

In this way, it is possible to easily and surely switch between the straight movement and the movement in the branching direction of the transport container 20 only by moving the switching guide 2B. Therefore, even when the plurality of transport containers 20 are continuously transported, the transport containers 20 are continuously moved straightly or in a branching direction without being decelerated as well as being temporarily stopped. Can do.
As an accompanying effect, since the transfer container is inclined to the inner side of the branching curve, an article such as a semiconductor wafer in the container is less likely to be displaced due to centrifugal force.

The various shapes and combinations of the constituent members shown in the above-described embodiments are merely examples, and various modifications can be made based on design requirements and the like without departing from the gist of the present invention.

For example, as described above, the first and second guide rollers disposed before and after the transport direction on the upper surface or the lower surface of the transport container may not be at the same position. Moreover, the specification which has at least 1 each of the 1st guide roller in the width direction of a conveyance direction may be sufficient.

In the above-described embodiment, the case where the conveyance direction of the conveyance container moves straight or branches has been described, but the application field of the present invention is not limited to this. For example, the branching device of the present invention can be applied to a portion where the main transport path and the branch transport path merge.

According to the present invention, it is possible to easily and reliably switch the transport direction (straight and branch) of the transport container simply by moving the position of the switching guide. Further, even when a plurality of transport containers are continuously transported, the transport containers can be continuously transported in a straight line or branching direction without being temporarily stopped.

1A, 1B ... branching device, S ... main transport path (first transport path), B ... branch transport path (second transport path), R1A, R2A, R1B, R2B, R3A, R4A, R3B, R4B ... transport rollers, TG1, TG2 ... guide rail, D ... conveyed material, 10,20 ... conveying container, T ... top surface, E ... bottom surface, G1, G2, G11, G12 ... first guide roller (first guide part), G3, G4 G13, G14: second guide roller (second guide part), 2A, 2B ... switching guide, SG1, SG2 ... first switching guide rail, BG1, BG2: second switching guide rail, 15 ... flange (guide part), 14 ... lid, 141 ... lower side of the lid (guide part), 12 ... storage case, 121 ... lower back of the storage case

Claims

A branching device for a transport path for transporting a transport container for storing a transported object,
A first guide portion disposed on both sides in the width direction orthogonal to the transport direction of the upper surface of the transport container;
A second guide portion disposed on both sides in the width direction orthogonal to the transport direction of the lower surface of the transport container;
A plurality of transport rollers disposed along both sides in the width direction of the transport direction excluding the intersection of the first transport path and the second transport path among the transport paths, and supporting and transporting the lower surface of the transport container;
A guide rail disposed along both sides in the width direction of the transport direction excluding the intersecting portion of the transport path and guiding the second guide portion in contact with the guide rail;
Of the first guide portion, the first switching guide rail that contacts the one arranged on the second conveyance path side and guides the conveyance container along the first conveyance path, and the first guide portion. A second switching guide rail that contacts the one disposed on the first conveyance path side and guides the conveyance container along the second conveyance path and is disposed so as to be horizontally movable above the intersection. A switching guide;
A branching device comprising:
The branching device according to claim 1, wherein the guide rail is disposed on the outer side in the width direction in the transport direction of the transport path than the transport roller.
The branching device according to claim 1, wherein the transport roller is disposed on the outer side in the width direction in the transport direction of the transport path than the guide rail.
The branching device according to claim 1, wherein the first guide portion includes a guide roller having a rotation shaft extending in a vertical direction.
The branching device according to claim 1, wherein the second guide portion includes a guide roller having a rotating shaft extending in a vertical direction.
The branching device according to claim 2, wherein the second guide part is a side surface of a flat flange.
The branching device according to claim 2, wherein the first guide part is a side part of the transfer container.