WO2010047149A1 - Noise evaluation device - Google Patents

Noise evaluation device Download PDF

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Publication number
WO2010047149A1
WO2010047149A1 PCT/JP2009/060535 JP2009060535W WO2010047149A1 WO 2010047149 A1 WO2010047149 A1 WO 2010047149A1 JP 2009060535 W JP2009060535 W JP 2009060535W WO 2010047149 A1 WO2010047149 A1 WO 2010047149A1
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Prior art keywords
noise
evaluation device
noise evaluation
contact terminal
module
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PCT/JP2009/060535
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French (fr)
Japanese (ja)
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明博 難波
卓 須賀
敦 原
辰次 野間
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株式会社日立製作所
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/001Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing
    • G01R31/002Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing where the device under test is an electronic circuit

Definitions

  • the present invention relates to a device for measuring electrical noise generated from a device module that operates by supplying electric energy.
  • Electromagnetic unnecessary radiation generated from electronic equipment such as information processing equipment and digital AV equipment is a problem.
  • the noise source is often identified by noise source search.
  • As a noise source exploration method for example, as described in JP-A-11-83918 and JP-A-2004-198232, an electromagnetic field distribution in the vicinity of an electronic circuit board or a cable connecting two or more boards is used. There is a method of measuring with an electromagnetic field sensor.
  • a method for measuring electromagnetic radiation from a housing on which a board is mounted for example, as shown in Japanese Patent Application Laid-Open No. 11-190754, there is a method of measuring radiation current from a closed box containing a board to the ground. . Further, as a method for measuring a propagation path of noise flowing out from the substrate to the housing, there is a joint noise measurement method as disclosed in, for example, Japanese Patent Laid-Open No. 2007-240162.
  • the measurement methods described in Japanese Patent Application Laid-Open Nos. 11-83918 and 2004-198232 can measure the noise source on the object, but the substrate is not disposed when the substrate is installed in the casing. There is a problem that it is impossible to measure the noise propagation path that propagates from the housing to the housing. In order to suppress unwanted radiation, it is necessary not only to suppress the noise source but also to cut the noise propagation path, and a technique for measuring the noise propagation path is required. In addition, with the measurement method described in Japanese Patent Application Laid-Open No. 11-190752, the electromagnetic radiation of the electrical equipment that houses the substrate can be evaluated, but similarly, the noise propagation path between the substrate and the housing cannot be measured.
  • the measurement method described in Japanese Patent Application Laid-Open No. 2007-240162 is effective for measuring noise propagated to a joint component such as a screw connecting a housing and a substrate, but noise due to a path other than the joint component cannot be evaluated. Is not enough.
  • the present invention provides a noise evaluation apparatus that solves the above-described problems. That is, the present invention provides a noise evaluation apparatus that can measure a noise propagation path regardless of the position of a joining component in order to evaluate noise flowing out from a device module that is a noise source to a housing. .
  • the noise evaluation apparatus has a contact terminal for electrically connecting a module that operates by supplying electric energy and a ground that provides a potential reference. Furthermore, a noise detection unit for measuring electrical noise flowing in the contact terminal is provided.
  • the types of electrical noise include noise current flowing through the contact terminals and noise voltage between the module under measurement and the reference ground.
  • a plurality of contact terminals and noise detection units are provided as a set, and the noise distribution flowing out from the module is measured by arranging them in an array. Further, the noise distribution is measured by making the contact terminal and the noise detection terminal movable.
  • a noise evaluation apparatus for measuring electrical noise generated from an apparatus module, which is electrically connected to a ground for providing a potential reference, and is connected to an arbitrary point of the apparatus module.
  • a noise evaluation apparatus comprising: a contact terminal configured to take a noise; and a noise detection unit that measures noise flowing out from the apparatus module to the ground.
  • the noise evaluation device according to (1) wherein the noise detection unit measures a noise current flowing from the device module to the ground via the contact terminal. .
  • the noise evaluation unit measures a noise voltage between the device module and the ground.
  • the noise evaluation apparatus according to (1), wherein the ground, the contact terminal, and the noise detection unit are integrally formed of a multilayer printed board.
  • the first embodiment of the noise evaluation apparatus is arranged on a reference ground 3 and one or a plurality (see FIG.
  • two contact terminals 2 (2a, 2b) and a noise detection unit 1 (1a, 1b) that measures noise flowing in each of the contact terminals 2 (2a, 2b) are appropriately provided. Is done.
  • Each contact terminal 2 is electrically connected between the module to be measured 4 and the reference ground 3, and noise flowing out from the module to be measured 4 to the reference ground 3 through the contact terminal 2 is detected by the noise detector 1.
  • the noise detected by the noise detector 1 is measured by the measuring instrument 10.
  • a switch 9 is provided, and the switch 9 can select any noise detected by the noise detector 1 and input it to the measuring device 10. According to this method, it is not necessary to provide the same number of measuring devices 10 as the number of noise detection units 1, and it is sufficient to provide fewer measuring devices 10 than the number of noise detection units 1 or a single measuring device 10. ⁇ Cost reduction can be achieved.
  • the contact terminal 2 may be movable by adding a configuration having a spring property or the like in order to make the connection with the target module 4 more reliable.
  • the control unit 6 controls the measuring instrument 10 and transfers noise measurement control and measured data to the arithmetic processing unit 7. Moreover, the control part 6 also controls the switch 9, when the switch 9 is provided. The arithmetic processing unit 7 corrects the measured data using the sensitivity characteristic of the noise detection unit 1. Moreover, the noise evaluation apparatus of the present invention is provided with a display unit 8 and displays a noise measurement result and a measurement set value.
  • the display unit 8 displays an arbitrary detection result.
  • the noise spectrum at a point (FIG. 12) and the noise distribution at an arbitrary frequency (FIG. 13) can be displayed to the user.
  • the horizontal axis of the noise spectrum shown in FIG. 12 indicates frequency
  • the vertical axis indicates noise intensity.
  • the horizontal and vertical axes of the noise distribution shown in FIG. 13 are the coordinates of the noise evaluation position, and the intensity of the color indicates the noise intensity.
  • the present apparatus it is possible to specify the frequency of noise to be countermeasured and the position to be a noise propagation path, and therefore, noise evaluation effective for countermeasures against electromagnetic radiation can be performed.
  • the noise distribution shown in FIG. 13 can be obtained in more detail as the number of the contact terminals 5 with the detection unit is increased, and the arithmetic processing unit 7 can obtain the noise distribution based on the obtained noise distribution. By ranking the strength, etc., it is possible to specify the position to be taken.
  • FIG. 3 shows an example in which a plurality of contact terminals 5 with detecting portions are arranged in an array on the reference ground 3. According to this arrangement example, since the noise can be detected by bringing the contact terminal 5 with the detection unit into contact with the entire surface of the module 4 to be measured, the noise propagation path can be specified more accurately.
  • the arrangement of the contact terminals 5 with the detection unit is not limited to this, and may be a lattice shape or a staggered shape, and the arrangement interval may be regular or irregular.
  • the module to be measured 4 is placed in contact with the plurality of contact terminals 5 with detection units arranged in this manner, and the noise distribution flowing out from the module to be measured 4 to the reference ground 3 is measured. .
  • the contact terminal with the detection unit uses a contact terminal having a structure that can be expanded and contracted and that generates a force in the extending direction. May be.
  • FIG. 5 shows an example in which the current detection coil 11 is used as a noise detection unit.
  • a magnetic field generated by a noise current flowing out from the measured module 4 toward the reference ground 3 via the contact terminal 2 is detected by interlinking with the current detection coil 11.
  • the current detection coil 11 generates an induced electromotive force proportional to the noise current intensity.
  • the noise current flowing out from the module under measurement 4 is measured.
  • the current detection coil is not limited to this, and a multiple coil as shown in FIG. 7 may be used in order to supplement the magnetic flux due to the noise current.
  • FIG. 8 shows an example in which the voltage detection probe 12 is used as a noise detection unit.
  • the voltage detection element 13 is embedded in the contact terminal 2 and the voltage across the voltage detection element 13 is detected by the voltage detection probe 12, whereby the noise voltage flowing out from the module under measurement 4 can be measured.
  • a passive element such as a resistor, a capacitor, and an inductor may be used.
  • a noise detection unit using an active element may be used.
  • a noise detection unit 1 for detecting the potential between the module under measurement 4 and the reference ground 3 may be provided.
  • FIG. 9 shows the noise detection unit 1 including a transistor 15 having one end connected to the bias voltage source 17 and an adjustment element 16 connecting the transistor and the ground.
  • the noise detector 1 detects a voltage corresponding to the potential difference between the module under measurement 4 and the reference ground 3.
  • a noise current detection circuit using an active element or a noise voltage detection circuit may be appropriately configured.
  • FIG. 10 shows an example in which a noise detection unit, a reference ground, and a contact terminal are integrally formed by a multilayer printed board.
  • the current flowing through the contact terminal 2 can be obtained by forming the current detection coil 11 formed in the inner layer of the multilayer printed board in the periphery of the contact terminal 2 formed by the via inside the multilayer printed board. It can be measured by the current detection coil 11.
  • the via is connected to the ground layer which is the reference ground, and is connected to the target module 4 on the surface layer.
  • the induced voltage generated in the current detection coil 11 due to the noise current flowing in the via is guided to the connector installed in the wiring layer via the lead-out wiring of the transmission line structure formed in the wiring layer, and via the high-frequency cable or the like.
  • Detect with measuring instrument In order to ensure the connection between the via and the target module 4, a contact terminal having a spring property may be provided on the surface layer. According to this embodiment, since the noise detection unit has a structure integrated with the contact terminal 2, it is difficult to dispose a voltage detection probe or the like on the contact surface between the plurality of contact terminals and the module to be measured 4. It is possible to easily detect noise at a contact location near the center of the surface.
  • FIG. 11 shows a noise detector that provides a coupling pad 14 in the vicinity of the module to be measured 4 and performs noise measurement by capacitive coupling between the module to be measured 4 and the coupling pad 14. Noise flowing out from the module under measurement 4 flows to the reference ground 3 by capacitive coupling, and the noise can be detected by the noise detector 1.
  • the module to be measured is not configured to be electrically connected to the contact terminal, so that problems such as wear of the contact terminal 2 do not occur, and the life of the noise evaluation device can be extended. .
  • FIG. 14 shows a form in which the module to be measured 4 is mounted on the bottom surface of the apparatus housing 31.
  • the noise outflow path from the module under measurement 4 to the device housing 31 is the bottom surface of the module under measurement where the module under measurement 4 and the device housing 31 are in contact. 5 is arranged appropriately.
  • FIG. 13A and 13B the noise which flows out from the module in a module mounting form can be measured.
  • FIG. 15 shows a module mounting form in which the both side surfaces of the module under measurement 4 and the device casing 31 are in contact with each other.
  • the contact terminal 5 with a noise detector is provided on the contact surface 21. Deploy. Thereby, noise flowing out from the module in the module mounting form shown in FIG. 14 can be measured.
  • FIG. 16 shows a form in which the module under measurement 4 is mounted on the apparatus casing 21 using a stay 32 attached to the side surface of the apparatus casing 31.
  • the noise outflow path from the module under measurement 4 to the device housing 31 is a place where the module under measurement 4 and the stay 32 are in contact with each other, so the contact terminal 5 with a noise detector is disposed on the contact surface 21.
  • the contact terminal 5 with a noise detector is disposed on the contact surface 21.

Abstract

Disclosed is a noise evaluation device for the purpose of measuring electrical noise emanating from a device module that is operated by the supply of electrical energy. The noise evaluation device has a module that is operated by the supply of electrical energy, and a noise detection unit that has connection terminals for the purpose of making electrical connections between grounds providing a reference potential, and that detects electrical noise flowing to the grounds through the connection terminals. In addition, the distribution of the noise emanating from the module is measured by arranging the connection terminals and the noise detection unit as an array.

Description

ノイズ評価装置Noise evaluation device 参照による取り込みImport by reference
 本出願は、2008年10月24日に出願された日本特許出願第2008-273720号の優先権を主張し、その内容を参照することにより本出願に取り込む。 This application claims the priority of Japanese Patent Application No. 2008-273720 filed on Oct. 24, 2008, and is incorporated into the present application by referring to its contents.
 本発明は、電気エネルギーを供給することで動作する装置モジュールから発生する電気ノイズを測定する装置に関する。 The present invention relates to a device for measuring electrical noise generated from a device module that operates by supplying electric energy.
 情報処理装置、ディジタルAV機器などの電子機器から発生する電磁不要輻射が問題である。本輻射を抑制するためには、輻射源である電子装置の電気ノイズを抑制する必要があり、そのためにノイズ源探査によりノイズ源特定がよく行われる。ノイズ源探査手法としては、例えば、特開平11-83918号公報や特開2004-198232号公報に記載のように、電子回路基板あるいは2枚以上の基板を接続するケーブルの近傍の電磁界分布を電磁界センサにより測定する方法がある。 Electromagnetic unnecessary radiation generated from electronic equipment such as information processing equipment and digital AV equipment is a problem. In order to suppress this radiation, it is necessary to suppress the electrical noise of the electronic device that is the radiation source. For this reason, the noise source is often identified by noise source search. As a noise source exploration method, for example, as described in JP-A-11-83918 and JP-A-2004-198232, an electromagnetic field distribution in the vicinity of an electronic circuit board or a cable connecting two or more boards is used. There is a method of measuring with an electromagnetic field sensor.
 また、基板を搭載した筐体からの電磁輻射を測定する手法として、例えば、特開平11-190752号公報に示すように、基板を収容した閉ボックスからグランドへの輻射電流を測定する方法がある。さらに、基板から筐体に流出するノイズの伝播経路の測定手法としては、例えば特開2007-240162号公報に示すように、接合部ノイズ測定方法がある。 Further, as a method for measuring electromagnetic radiation from a housing on which a board is mounted, for example, as shown in Japanese Patent Application Laid-Open No. 11-190754, there is a method of measuring radiation current from a closed box containing a board to the ground. . Further, as a method for measuring a propagation path of noise flowing out from the substrate to the housing, there is a joint noise measurement method as disclosed in, for example, Japanese Patent Laid-Open No. 2007-240162.
特開平11-83918号公報Japanese Patent Laid-Open No. 11-83918 特開2004-198232号公報JP 2004-198232 A 特開平11-190752号公報JP-A-11-190752 特開2007-240162号公報JP 2007-240162 A
 しかし、特開平11-83918号公報や特開2004-198232号公報に記載された測定方法では、被対象物上のノイズ源を測定することができるが、基板を筐体に設置したときに基板から筐体に伝播するノイズ伝播経路を測定することができない問題がある。不要輻射抑制のためにはノイズ源抑制だけでなく、ノイズ伝播経路も切断する必要があり、ノイズ伝播経路を測定する技術が必要である。また、特開平11-190752号公報に記載された測定手法では、基板を収容した電気機器の電磁輻射は評価できるものの、同様に、基板-筐体間のノイズ伝播経路を測定することができない。 However, the measurement methods described in Japanese Patent Application Laid-Open Nos. 11-83918 and 2004-198232 can measure the noise source on the object, but the substrate is not disposed when the substrate is installed in the casing. There is a problem that it is impossible to measure the noise propagation path that propagates from the housing to the housing. In order to suppress unwanted radiation, it is necessary not only to suppress the noise source but also to cut the noise propagation path, and a technique for measuring the noise propagation path is required. In addition, with the measurement method described in Japanese Patent Application Laid-Open No. 11-190752, the electromagnetic radiation of the electrical equipment that houses the substrate can be evaluated, but similarly, the noise propagation path between the substrate and the housing cannot be measured.
 特開2007-240162号公報に記載された測定手法では、筐体と基板を接続するネジなどの接合部品に伝播するノイズ測定には有効であるが、接合部品以外の経路によるノイズを評価できず、十分ではない。 The measurement method described in Japanese Patent Application Laid-Open No. 2007-240162 is effective for measuring noise propagated to a joint component such as a screw connecting a housing and a substrate, but noise due to a path other than the joint component cannot be evaluated. Is not enough.
 本発明は、上述した問題点を解決したノイズ評価装置を提供するものである。即ち、本発明は、ノイズ源である装置モジュールから筐体へ流出するノイズを評価するために、接合部品の位置に関わらず、ノイズ伝播経路を測定可能にしたノイズ評価装置を提供するものである。 The present invention provides a noise evaluation apparatus that solves the above-described problems. That is, the present invention provides a noise evaluation apparatus that can measure a noise propagation path regardless of the position of a joining component in order to evaluate noise flowing out from a device module that is a noise source to a housing. .
 本発明に係るノイズ評価装置は、電気エネルギーを供給することで動作するモジュールと、電位基準を与えるグランド間を、電気的に接続するための接触端子を有している。さらに、接触端子に流れる電気ノイズを測定するための、ノイズ検出部を備えている。電気ノイズの種類としては、接触端子に流れるノイズ電流や、被測定モジュールと基準グランド間のノイズ電圧などである。 The noise evaluation apparatus according to the present invention has a contact terminal for electrically connecting a module that operates by supplying electric energy and a ground that provides a potential reference. Furthermore, a noise detection unit for measuring electrical noise flowing in the contact terminal is provided. The types of electrical noise include noise current flowing through the contact terminals and noise voltage between the module under measurement and the reference ground.
 さらに、上記の接触端子およびノイズ検出部を一組として複数設け、これをアレイ状に配置することで、モジュールから流出するノイズ分布を測定する。また、接触端子およびノイズ検出端子を可動式とすることでノイズ分布を測定する。 Furthermore, a plurality of contact terminals and noise detection units are provided as a set, and the noise distribution flowing out from the module is measured by arranging them in an array. Further, the noise distribution is measured by making the contact terminal and the noise detection terminal movable.
 以下、本願において開示される発明のうち代表的なものの概要を簡単に説明すれば次の通りである。
(1)装置モジュールから発生する電気ノイズを測定するノイズ評価装置であって、電位基準を与えるグランドと、前記グランドと電気的に接続され、前記装置モジュールの任意の点と接触してドウつう55をとる接触端子と、前記装置モジュールから前記グランドに流出する
ノイズを測定するノイズ検出部と、を有することを特徴とするノイズ評価装置である。
(2)(1)記載のノイズ評価装置であって、前記ノイズ検出部は、前記装置モジュールから前記接触端子を介して前記グランドに流れるノイズ電流を測定することを特徴とするノイズ評価装置である。
(3)(1)記載のノイズ評価装置であって、前記ノイズ検出部は、前記装置モジュールと前記グランドとの間のノイズ電圧を測定することを特徴とするノイズ評価装置である。
(4)(1)1記載のノイズ評価装置であって、前記グランドと前記接触端子と前記ノイズ検出部は、多層プリント基板により一体形成されていることを特徴とするノイズ評価装置である。
The following is a brief description of the outline of typical inventions disclosed in the present application.
(1) A noise evaluation apparatus for measuring electrical noise generated from an apparatus module, which is electrically connected to a ground for providing a potential reference, and is connected to an arbitrary point of the apparatus module. A noise evaluation apparatus comprising: a contact terminal configured to take a noise; and a noise detection unit that measures noise flowing out from the apparatus module to the ground.
(2) The noise evaluation device according to (1), wherein the noise detection unit measures a noise current flowing from the device module to the ground via the contact terminal. .
(3) The noise evaluation device according to (1), wherein the noise detection unit measures a noise voltage between the device module and the ground.
(4) The noise evaluation apparatus according to (1), wherein the ground, the contact terminal, and the noise detection unit are integrally formed of a multilayer printed board.
 電磁不要輻射の原因となるモジュールから流出する電気ノイズの伝播経路をも測定可能な評価装置を提供できる。
 本発明の他の目的、特徴及び利点は添付図面に関する以下の本発明の実施例の記載から明らかになるであろう。
It is possible to provide an evaluation apparatus capable of measuring the propagation path of electrical noise flowing out from a module that causes electromagnetic radiation.
Other objects, features and advantages of the present invention will become apparent from the following description of embodiments of the present invention with reference to the accompanying drawings.
本発明に係るノイズ評価装置の第一の実施形態を示す図である。It is a figure which shows 1st embodiment of the noise evaluation apparatus which concerns on this invention. 本発明に係るノイズ評価装置の第二の実施形態を示す図である。It is a figure which shows 2nd embodiment of the noise evaluation apparatus which concerns on this invention. 本発明に係るノイズ評価装置の検出部付き接触端子の配置例を示す図である。It is a figure which shows the example of arrangement | positioning of the contact terminal with a detection part of the noise evaluation apparatus which concerns on this invention. アレイ状に配置した接触端子上に被測定モジュールを搭載した際の図である。It is a figure at the time of mounting a to-be-measured module on the contact terminal arrange | positioned at array form. 本発明に係るノイズ評価装置のノイズ検出部の第一形態を示す図である。It is a figure which shows the 1st form of the noise detection part of the noise evaluation apparatus which concerns on this invention. 電流検出コイルによるノイズ電流検出原理を説明した図である。It is a figure explaining the noise current detection principle by a current detection coil. 電流検出コイルとして多重コイルを配置した場合の図である。It is a figure at the time of arrange | positioning a multiple coil as an electric current detection coil. 本発明に係るノイズ評価装置のノイズ検出部の第二形態を示す図である。It is a figure which shows the 2nd form of the noise detection part of the noise evaluation apparatus which concerns on this invention. 本発明に係るノイズ評価装置のノイズ検出部の第三形態を示す図である。It is a figure which shows the 3rd form of the noise detection part of the noise evaluation apparatus which concerns on this invention. 本発明に係るノイズ評価装置のノイズ検出部の第四形態を示す図である。It is a figure which shows the 4th form of the noise detection part of the noise evaluation apparatus which concerns on this invention. 本発明に係るノイズ評価装置のノイズ検出部の第五形態を示す図である。It is a figure which shows the 5th form of the noise detection part of the noise evaluation apparatus which concerns on this invention. ノイズ測定結果の第一表示例を示す図である。It is a figure which shows the 1st display example of a noise measurement result. ノイズ測定結果の第二表示例を示す図である。It is a figure which shows the 2nd example of a display of a noise measurement result. ノイズ測定結果の第二表示例を示す図である。It is a figure which shows the 2nd example of a display of a noise measurement result. 本発明に係るノイズ評価装置における被測定モジュールの第一の実装形態を示す図である。It is a figure which shows the 1st mounting form of the to-be-measured module in the noise evaluation apparatus which concerns on this invention. 本発明に係るノイズ評価装置における被測定モジュールの第二の実装形態を示す図である。It is a figure which shows the 2nd mounting form of the to-be-measured module in the noise evaluation apparatus which concerns on this invention. 本発明に係るノイズ評価装置における被測定モジュールの第三の実装形態を示す図である。It is a figure which shows the 3rd mounting form of the to-be-measured module in the noise evaluation apparatus which concerns on this invention.
 本発明に係るノイズ評価装置の第一の実施形態は、図1に示す通り、基準グランド3と、基準グランド3上に配置され、被測定モジュール4の任意の位置に接触させる1又は複数(図1の例では2つ)の接触端子2(2a,2b)と、接触端子2(2a,2b)の各々に流れるノイズを測定するノイズ検出部1(1a,1b)とを適宜有して構成される。ここで、接触端子2とノイズ検出部1とからなる検出部付き接触端子5は1つであっても複数個(図1の例では2個:5a,5b)あってもよい。 As shown in FIG. 1, the first embodiment of the noise evaluation apparatus according to the present invention is arranged on a reference ground 3 and one or a plurality (see FIG. In the example, two contact terminals 2 (2a, 2b) and a noise detection unit 1 (1a, 1b) that measures noise flowing in each of the contact terminals 2 (2a, 2b) are appropriately provided. Is done. Here, there may be one or more contact terminals 5 with a detection unit composed of the contact terminals 2 and the noise detection unit 1 (two in the example of FIG. 1: 5a, 5b).
 各接触端子2は被測定モジュール4と基準グランド3間を電気的に接続し、接触端子2を介して被測定モジュール4から基準グランド3へと流出するノイズをノイズ検出部1で検出する。ノイズ検出部1で検出したノイズは測定器10で測定する。ノイズ検出部1を複数用いたノイズ評価装置の場合には、切換器9を設け、この切換器9により任意のノイズ検出部1の検出ノイズを選択して測定器10に入力すればよい。本方式によれば、ノイズ検出部1の数と同数の測定器10を設ける必要はなく、ノイズ検出部1の数より少なく若しくは単一の測定器10を設ければよいため、装置の小型化・低コスト化が図れる。
 なお、この方式に限らず、図2に示す第二の実施形態のように、切換器9を用いることなく、ノイズ検出部1の数に対して同数の測定器10を設ける構成でもよい。例えば、図2の例では、ノイズ検出部1が2つあり(1a,1b)、それぞれに対応して測定器10(10a,10b)が設けられている。この方式によれば、複数の測定器10の並列処理が可能なため、測定処理の高速化を図ることができる。また、接触端子2は、被対象モジュール4との接続をより確実にすべく、バネ性を有する構成を付加等することにより可動式としてもよい。
Each contact terminal 2 is electrically connected between the module to be measured 4 and the reference ground 3, and noise flowing out from the module to be measured 4 to the reference ground 3 through the contact terminal 2 is detected by the noise detector 1. The noise detected by the noise detector 1 is measured by the measuring instrument 10. In the case of a noise evaluation apparatus using a plurality of noise detectors 1, a switch 9 is provided, and the switch 9 can select any noise detected by the noise detector 1 and input it to the measuring device 10. According to this method, it is not necessary to provide the same number of measuring devices 10 as the number of noise detection units 1, and it is sufficient to provide fewer measuring devices 10 than the number of noise detection units 1 or a single measuring device 10.・ Cost reduction can be achieved.
In addition, not only this system but the structure which provides the measuring device 10 of the same number with respect to the number of the noise detection parts 1 without using the switch 9 like 2nd embodiment shown in FIG. For example, in the example of FIG. 2, there are two noise detection units 1 (1a, 1b), and the measuring devices 10 (10a, 10b) are provided corresponding to each. According to this method, since a plurality of measuring instruments 10 can be processed in parallel, the measurement process can be speeded up. Further, the contact terminal 2 may be movable by adding a configuration having a spring property or the like in order to make the connection with the target module 4 more reliable.
 制御部6は、測定器10を制御し、ノイズ測定制御および測定したデータを演算処理部7へ転送する。また、制御部6は、切替器9が設けられた場合、切換器9の制御も行う。演算処理部7は、測定したデータをノイズ検出部1の感度特性を用いて補正処理を行う。また、本発明のノイズ評価装置には表示部8を備えており、ノイズ測定結果および測定設定値を表示する。 The control unit 6 controls the measuring instrument 10 and transfers noise measurement control and measured data to the arithmetic processing unit 7. Moreover, the control part 6 also controls the switch 9, when the switch 9 is provided. The arithmetic processing unit 7 corrects the measured data using the sensitivity characteristic of the noise detection unit 1. Moreover, the noise evaluation apparatus of the present invention is provided with a display unit 8 and displays a noise measurement result and a measurement set value.
 本発明に係るノイズ評価装置によれば、被測定モジュール4の任意の位置に検出部付き接触端子5を接触させてノイズを検出することができるため、表示部8には、検出結果として、任意点におけるノイズスペクトル(図12)や任意周波数におけるノイズ分布(図13)をユーザに表示することができる。図12に示すノイズスペクトルの横軸は周波数、縦軸はノイズ強度を示す。図13に示すノイズ分布の横軸及び縦軸はノイズ評価位置の座標、色の強弱がノイズ強度を示す。このように、本装置によれば、対策すべきノイズの周波数やノイズ伝播経路となる位置を特定できるため、電磁不要輻射対策に有効なノイズ評価が可能である。例えば、図13に示すノイズ分布は、検出部付き接触端子5の数を増やせば増やすほど、より詳細な分布を得ることができ、この得られたノイズ分布に基づいて演算処理部7にてノイズ強度の順位付け等を行うことにより、対策すべき位置を特定することができる。 According to the noise evaluation apparatus according to the present invention, since the noise can be detected by bringing the contact terminal 5 with the detection unit into contact with an arbitrary position of the module 4 to be measured, the display unit 8 displays an arbitrary detection result. The noise spectrum at a point (FIG. 12) and the noise distribution at an arbitrary frequency (FIG. 13) can be displayed to the user. The horizontal axis of the noise spectrum shown in FIG. 12 indicates frequency, and the vertical axis indicates noise intensity. The horizontal and vertical axes of the noise distribution shown in FIG. 13 are the coordinates of the noise evaluation position, and the intensity of the color indicates the noise intensity. As described above, according to the present apparatus, it is possible to specify the frequency of noise to be countermeasured and the position to be a noise propagation path, and therefore, noise evaluation effective for countermeasures against electromagnetic radiation can be performed. For example, the noise distribution shown in FIG. 13 can be obtained in more detail as the number of the contact terminals 5 with the detection unit is increased, and the arithmetic processing unit 7 can obtain the noise distribution based on the obtained noise distribution. By ranking the strength, etc., it is possible to specify the position to be taken.
 次に、本発明に係るノイズ評価装置の検出部付き接触端子5の配置例について説明する。図3は、検出部付き接触端子5を、基準グランド3にアレイ状に複数個配置した例を示す。本配置例によれば、被測定モジュール4の全面に渡って検出部付き接触端子5を接触させてノイズ検出が可能であるため、ノイズ伝播経路をより正確に特定することが可能となる。ただし、検出部付き接触端子5の配置は、これに限られず、格子状でも良いし、千鳥状でも良く、また配置間隔も規則的あるいは不規則的でも良い。 Next, an arrangement example of the contact terminal 5 with a detection unit of the noise evaluation apparatus according to the present invention will be described. FIG. 3 shows an example in which a plurality of contact terminals 5 with detecting portions are arranged in an array on the reference ground 3. According to this arrangement example, since the noise can be detected by bringing the contact terminal 5 with the detection unit into contact with the entire surface of the module 4 to be measured, the noise propagation path can be specified more accurately. However, the arrangement of the contact terminals 5 with the detection unit is not limited to this, and may be a lattice shape or a staggered shape, and the arrangement interval may be regular or irregular.
 このように複数配置された検出部付き接触端子5に対して、図4に示すように、被測定モジュール4を接触させて置き、被測定モジュール4から基準グランド3へ流出するノイズ分布を測定する。また、検出部付き接触端子5と被測定モジュールの接触を確実にするために、検出部付き接触端子は伸縮可能な構造を持ち、かつ伸展方向に力を発生する機構を持つ接触端子を使用しても良い。また、検出部付き接触端子5を移動させることで被測定モジュール4から流出するノイズ分布を測定してもよい。 As shown in FIG. 4, the module to be measured 4 is placed in contact with the plurality of contact terminals 5 with detection units arranged in this manner, and the noise distribution flowing out from the module to be measured 4 to the reference ground 3 is measured. . In addition, in order to ensure the contact between the contact terminal 5 with the detection unit and the module to be measured, the contact terminal with the detection unit uses a contact terminal having a structure that can be expanded and contracted and that generates a force in the extending direction. May be. Moreover, you may measure the noise distribution which flows out from the to-be-measured module 4 by moving the contact terminal 5 with a detection part.
 次に、本発明に係るノイズ評価装置のノイズ検出部1並びに接触端子2の実施形態について、図5乃至図11を用いて説明する。
 図5は、ノイズ検出部として電流検出コイル11を用いた例を示す。被測定モジュール4から基準グランド3へ向かって、接触端子2を介して流出するノイズ電流が作る磁界を、電流検出コイル11に鎖交させて検出する。図6に示すように、電磁誘導の法則により、電流検出コイル11はノイズ電流強度に比例した誘導起電力を発生する。この誘導起電力を電圧計などで検出することで、被測定モジュール4から流出するノイズ電流を測定する。なお、電流検出コイルはこれに限られず、ノイズ電流による磁束をより補足すべく、図7に示すような多重コイルを用いてもよい。
Next, an embodiment of the noise detection unit 1 and the contact terminal 2 of the noise evaluation apparatus according to the present invention will be described with reference to FIGS.
FIG. 5 shows an example in which the current detection coil 11 is used as a noise detection unit. A magnetic field generated by a noise current flowing out from the measured module 4 toward the reference ground 3 via the contact terminal 2 is detected by interlinking with the current detection coil 11. As shown in FIG. 6, according to the law of electromagnetic induction, the current detection coil 11 generates an induced electromotive force proportional to the noise current intensity. By detecting this induced electromotive force with a voltmeter or the like, the noise current flowing out from the module under measurement 4 is measured. The current detection coil is not limited to this, and a multiple coil as shown in FIG. 7 may be used in order to supplement the magnetic flux due to the noise current.
 図8は、ノイズ検出部として電圧検出プローブ12を用いた例を示す。本形態では、接触端子2に電圧検出素子13を埋め込み、この電圧検出素子13の両端電圧を電圧検出プローブ12で検出することで、被測定モジュール4から流出するノイズ電圧を測定できる。電圧検出素子13としては、抵抗、容量、インダクタなどの受動素子を用いればよい。 FIG. 8 shows an example in which the voltage detection probe 12 is used as a noise detection unit. In this embodiment, the voltage detection element 13 is embedded in the contact terminal 2 and the voltage across the voltage detection element 13 is detected by the voltage detection probe 12, whereby the noise voltage flowing out from the module under measurement 4 can be measured. As the voltage detection element 13, a passive element such as a resistor, a capacitor, and an inductor may be used.
 また、他の形態として、能動素子を用いたノイズ検出部を利用してもよい。例えば、図9に示す構成のように、被測定モジュール4と基準グランド3間の電位を検出するためのノイズ検出部1を設けてもよい。図9はバイアス電圧源17に一端が接続されたトランジスタ15と、該トランジスタとグランドとを接続する調整素子16とで構成したノイズ検出部1を示す。ノイズ検出部1は被測定モジュール4と基準グランド3間の電位差に応じた電圧を検出する。その他、能動素子を用いたノイズ電流検出回路や、ノイズ電圧検出回路を適宜構成してもよい。 As another form, a noise detection unit using an active element may be used. For example, as in the configuration shown in FIG. 9, a noise detection unit 1 for detecting the potential between the module under measurement 4 and the reference ground 3 may be provided. FIG. 9 shows the noise detection unit 1 including a transistor 15 having one end connected to the bias voltage source 17 and an adjustment element 16 connecting the transistor and the ground. The noise detector 1 detects a voltage corresponding to the potential difference between the module under measurement 4 and the reference ground 3. In addition, a noise current detection circuit using an active element or a noise voltage detection circuit may be appropriately configured.
 図10は、ノイズ検出部と基準グランドと接触端子とを多層プリント基板により一体化して形成した例を示す。本形態では、多層プリント基板内部のビアにより形成した接触端子2の周辺部に、同じく多層プリント基板の内層に形成した電流検出コイル11を形成する構成とすることで、接触端子2に流れる電流を電流検出コイル11により測定できる。ここで、ビアは基準グランドであるグランド層に接続しており、表層で被対象モジュール4と接続する。ビアに流れるノイズ電流により、電流検出コイル11で発生する誘導電圧は、配線層に形成した伝送線路構造の引出し配線を経由して、配線層に設置したコネクタに導かれ、高周波ケーブルなどを介して測定器で検出する。なお、ビアと被対象モジュール4の接続を確実にするために、表層にバネ性を持つ接触端子を設置してもよい。
 本形態によれば、ノイズ検出部が接触端子2と一体化した構造となっているため、複数の接触端子と被測定モジュール4との接触面のうち、電圧検出プローブなどの配置が難しい、接触面の中央付近の接触箇所についても、容易にノイズ検出が可能となる。
FIG. 10 shows an example in which a noise detection unit, a reference ground, and a contact terminal are integrally formed by a multilayer printed board. In the present embodiment, the current flowing through the contact terminal 2 can be obtained by forming the current detection coil 11 formed in the inner layer of the multilayer printed board in the periphery of the contact terminal 2 formed by the via inside the multilayer printed board. It can be measured by the current detection coil 11. Here, the via is connected to the ground layer which is the reference ground, and is connected to the target module 4 on the surface layer. The induced voltage generated in the current detection coil 11 due to the noise current flowing in the via is guided to the connector installed in the wiring layer via the lead-out wiring of the transmission line structure formed in the wiring layer, and via the high-frequency cable or the like. Detect with measuring instrument. In order to ensure the connection between the via and the target module 4, a contact terminal having a spring property may be provided on the surface layer.
According to this embodiment, since the noise detection unit has a structure integrated with the contact terminal 2, it is difficult to dispose a voltage detection probe or the like on the contact surface between the plurality of contact terminals and the module to be measured 4. It is possible to easily detect noise at a contact location near the center of the surface.
 また、図11は、被測定モジュール4の近傍に結合パッド14を設け、被測定モジュール4と結合パッド14との間の容量結合によりノイズ測定を行うノイズ検出部を示す。被測定モジュール4から流出するノイズは、容量結合により基準グランド3に流れ、そのノイズをノイズ検出部1により検出することができる。本形態の場合、他の形態とは異なり、被測定モジュールと接触端子と電気的に接続する構成ではないため、接触端子2の磨耗等の問題が生じず、ノイズ評価装置の長寿命化が図れる。 FIG. 11 shows a noise detector that provides a coupling pad 14 in the vicinity of the module to be measured 4 and performs noise measurement by capacitive coupling between the module to be measured 4 and the coupling pad 14. Noise flowing out from the module under measurement 4 flows to the reference ground 3 by capacitive coupling, and the noise can be detected by the noise detector 1. In the case of this embodiment, unlike the other embodiments, the module to be measured is not configured to be electrically connected to the contact terminal, so that problems such as wear of the contact terminal 2 do not occur, and the life of the noise evaluation device can be extended. .
 次に、これまで示したノイズ評価装置の装置筐体に実装する被測定モジュールの実装形態について、図14乃至図16を用いて説明する。
 図14は、装置筐体31の底面上に被測定モジュール4が実装された形態を示す。本形態では、被測定モジュール4から装置筐体31へのノイズ流出経路は、被測定モジュール4と装置筐体31が接する被測定モジュール底面であるから、この接触面21にノイズ検出部付き接触端子5を適宜配置する。これにより、図13A,13Bに示す様に、モジュール実装形態におけるモジュールから流出するノイズを測定することができる。
Next, the mounting form of the module to be measured to be mounted on the device casing of the noise evaluation apparatus described so far will be described with reference to FIGS.
FIG. 14 shows a form in which the module to be measured 4 is mounted on the bottom surface of the apparatus housing 31. In the present embodiment, the noise outflow path from the module under measurement 4 to the device housing 31 is the bottom surface of the module under measurement where the module under measurement 4 and the device housing 31 are in contact. 5 is arranged appropriately. Thereby, as shown to FIG. 13A and 13B, the noise which flows out from the module in a module mounting form can be measured.
 図15は、被測定モジュール4の両側面と装置筐体31が接触する形態で実装された、モジュール実装形態を示している。この場合、被測定モジュール4から装置筐体31へのノイズ流出経路は、被測定モジュールと装置筐体が接する被測定モジュール両側面であるから、この接触面21にノイズ検出部付き接触端子5を配置する。これにより図14に示すモジュール実装形態におけるモジュールから流出するノイズを測定することができる。 FIG. 15 shows a module mounting form in which the both side surfaces of the module under measurement 4 and the device casing 31 are in contact with each other. In this case, since the noise outflow path from the module under measurement 4 to the apparatus housing 31 is on both sides of the module under measurement where the module under measurement and the apparatus housing are in contact, the contact terminal 5 with a noise detector is provided on the contact surface 21. Deploy. Thereby, noise flowing out from the module in the module mounting form shown in FIG. 14 can be measured.
 図16は装置筐体31の側面に付けられたステー32を用いて、被測定モジュール4が装置筐体21に実装された形態を示している。この場合、被測定モジュール4から装置筐体31へのノイズ流出経路は、被測定モジュール4とステー32が接する場所であるから、この接触面21にノイズ検出部付き接触端子5を配置する。これにより図15に示すモジュール実装形態におけるモジュールから流出するノイズを測定することができる。
 上記した実装形態は、被測定モジュール4の種類に応じて適宜選択すればよい。なお、実施形態はこれに限られるものではなく、被測定モジュール4と装置筐体31との接触面21にノイズ検出部付き接触端子5を配置さえすればよい。
FIG. 16 shows a form in which the module under measurement 4 is mounted on the apparatus casing 21 using a stay 32 attached to the side surface of the apparatus casing 31. In this case, the noise outflow path from the module under measurement 4 to the device housing 31 is a place where the module under measurement 4 and the stay 32 are in contact with each other, so the contact terminal 5 with a noise detector is disposed on the contact surface 21. Thereby, noise flowing out from the module in the module mounting form shown in FIG. 15 can be measured.
What is necessary is just to select the above-mentioned mounting form suitably according to the kind of module 4 to be measured. The embodiment is not limited to this, and it is only necessary to arrange the contact terminal 5 with the noise detection unit on the contact surface 21 between the module under measurement 4 and the apparatus housing 31.
 以上、本発明者によってなされた発明を実施形態に基づき具体的に説明したが、本発明は上記実施形態に限定されるものではなく、その要旨を逸脱しない範囲で種々変更可能であることはいうまでもない。また、各実施形態で示した構成は、その要旨を逸脱しない範囲でそれぞれ置き換え・組合せ可能である。例えば、接触端子2を可動式とする構成は、いずれの実施形態にも適用可能である。また、複数のノイズ検出部1としてそれぞれ異なる実施形態のものを組み合わせて一のノイズ評価装置を構成しても構わない。 As mentioned above, the invention made by the present inventor has been specifically described based on the embodiment. However, the present invention is not limited to the above embodiment, and various modifications can be made without departing from the scope of the invention. Not too long. The configurations shown in the embodiments can be replaced and combined without departing from the scope of the invention. For example, the configuration in which the contact terminal 2 is movable is applicable to any embodiment. Moreover, you may comprise one noise evaluation apparatus combining the thing of each different embodiment as the some noise detection part 1. FIG.
 上記記載は実施例についてなされたが、本発明はそれに限らず、本発明の精神と添付の請求の範囲の範囲内で種々の変更および修正をすることができることは当業者に明らかである。 Although the above description has been made with reference to embodiments, the present invention is not limited thereto, and it will be apparent to those skilled in the art that various changes and modifications can be made within the spirit of the present invention and the scope of the appended claims.
 1 ノイズ検出部
 2 接触端子
 3 基準グランド
 4 被測定モジュール
 5 検出部付き接触端子
 6 制御部
 7 演算処理部
 8 表示部
 9 切換器
 10 測定器
 11 電流検出コイル
 12 電圧検出プローブ
 13 電圧検出素子
 14 結合パッド
 21 接触面
 31 装置筐体
 32 ステー
DESCRIPTION OF SYMBOLS 1 Noise detection part 2 Contact terminal 3 Reference ground 4 Module to be measured 5 Contact terminal with a detection part 6 Control part 7 Arithmetic processing part 8 Display part 9 Switch 10 Measuring instrument 11 Current detection coil 12 Voltage detection probe 13 Voltage detection element 14 Coupling Pad 21 Contact surface 31 Device housing 32 Stay

Claims (18)

  1.  装置モジュールから発生する電気ノイズを測定するノイズ評価装置であって、
     電位基準を与えるグランドと、
     前記グランドと電気的に接続され、前記装置モジュールの任意の点と電気的に接触する接触端子と、
     前記装置モジュールから前記グランドに流出するノイズを測定するノイズ検出部と、
    を有するノイズ評価装置。
    A noise evaluation device for measuring electrical noise generated from a device module,
    A ground that provides a potential reference;
    A contact terminal electrically connected to the ground and in electrical contact with any point of the device module;
    A noise detector for measuring noise flowing out from the device module to the ground;
    A noise evaluation apparatus.
  2.  請求項1記載のノイズ評価装置であって、
     前記ノイズ検出部は、前記装置モジュールから前記接触端子を介して前記グランドに流れるノイズ電流を測定するノイズ評価装置。
    The noise evaluation device according to claim 1,
    The noise detection unit is a noise evaluation device that measures a noise current flowing from the device module to the ground via the contact terminal.
  3.  請求項2記載のノイズ評価装置であって、
     前記ノイズ検出部は、前記接触端子の近傍に配置した電流検出コイルであるノイズ評価装置。
    The noise evaluation device according to claim 2,
    The noise evaluation device, wherein the noise detection unit is a current detection coil disposed in the vicinity of the contact terminal.
  4.  請求項3記載のノイズ評価装置であって、
     前記ノイズ検出部を構成する電流検出コイルは、多重コイルであるノイズ評価装置。
    The noise evaluation device according to claim 3,
    The current evaluation coil which comprises the said noise detection part is a noise evaluation apparatus which is a multiple coil.
  5.  請求項1記載のノイズ評価装置であって、
     前記ノイズ検出部は、前記装置モジュールと前記グランドとの間のノイズ電圧を測定するノイズ評価装置。
    The noise evaluation device according to claim 1,
    The noise detection unit is a noise evaluation device that measures a noise voltage between the device module and the ground.
  6.  請求項5記載のノイズ評価装置であって、
     前記接触端子の先端と後端との間には、電圧検出素子を有し、
     前記ノイズ検出部は、前記電圧検出素子の両端の電圧を測定するノイズ評価装置。
    The noise evaluation device according to claim 5,
    Between the front end and the rear end of the contact terminal has a voltage detection element,
    The noise detection unit is a noise evaluation device that measures a voltage at both ends of the voltage detection element.
  7.  請求項6記載のノイズ評価装置であって、
     前記電圧検出素子は、抵抗、容量、インダクタのいずれかを用いて構成される受動素子であるノイズ評価装置。
    The noise evaluation device according to claim 6,
    The voltage detection element is a noise evaluation apparatus which is a passive element configured using any one of a resistor, a capacitor, and an inductor.
  8.  請求項1記載のノイズ評価装置であって、
     前記グランドと前記接触端子と前記ノイズ検出部は、多層プリント基板により一体形成されているノイズ評価装置。
    The noise evaluation device according to claim 1,
    The ground, the contact terminal, and the noise detection unit are noise evaluation apparatuses that are integrally formed of a multilayer printed board.
  9.  請求項8記載のノイズ評価装置であって、
     前記接触端子は前記多層プリント基板のビアを用いて形成し、
     前記ノイズ検出部は前記多層プリント基板の内層を用いて構成されているノイズ評価装置。
    The noise evaluation device according to claim 8,
    The contact terminal is formed using a via of the multilayer printed circuit board,
    The noise detecting unit is configured by using an inner layer of the multilayer printed board.
  10.  請求項1に記載のノイズ評価装置であって、
     前記接触端子は可動式であるノイズ評価装置。
    The noise evaluation device according to claim 1,
    The noise evaluation device, wherein the contact terminal is movable.
  11.  請求項1に記載のノイズ評価装置であって、
     前記接触端子と前記ノイズ検出部とは一組を構成し、該組が複数設けられているノイズ評価装置。
    The noise evaluation device according to claim 1,
    The noise evaluation apparatus in which the contact terminal and the noise detection unit constitute a set, and a plurality of the sets are provided.
  12.  請求項11記載のノイズ評価装置であって、
     前記複数組の接触端子とノイズ検出部は、アレイ状又は格子状又は千鳥状に配置されているノイズ評価装置。
    The noise evaluation device according to claim 11,
    The plurality of sets of contact terminals and noise detection units are noise evaluation devices arranged in an array, a grid, or a staggered pattern.
  13.  請求項11記載のノイズ評価装置であって、
     さらに、前記複数組の接触端子とノイズ検出部により各々得られたデータに基づいて得られるノイズ分布を表示する表示部を有するノイズ評価装置。
    The noise evaluation device according to claim 11,
    Furthermore, the noise evaluation apparatus which has a display part which displays the noise distribution obtained based on the data each obtained by the said multiple sets of contact terminal and a noise detection part.
  14.  請求項13記載のノイズ評価装置であって、
     さらに、前記ノイズ検出部の感度特性を用いて前記データを補正処理する演算処理部を有するノイズ評価装置。
    The noise evaluation device according to claim 13,
    Furthermore, the noise evaluation apparatus which has the arithmetic processing part which correct | amends the said data using the sensitivity characteristic of the said noise detection part.
  15.  請求項14記載のノイズ評価装置であって、
     前記演算処理部は、前記ノイズ分布におけるノイズ強度の順位付けを行う機能を有するノイズ評価装置。
    The noise evaluation device according to claim 14, wherein
    The arithmetic processing unit is a noise evaluation device having a function of ranking noise intensity in the noise distribution.
  16.  請求項1に記載のノイズ評価装置であって、
     さらに、前記ノイズ検出部により得た検出ノイズを測定する測定器を有するノイズ評価装置。
    The noise evaluation device according to claim 1,
    Furthermore, the noise evaluation apparatus which has a measuring device which measures the detection noise obtained by the said noise detection part.
  17.  請求項11に記載のノイズ評価装置であって、
     前記複数組の接触端子及びノイズ検出部それぞれと電気的に接続された複数の測定器を有するノイズ評価装置。
    The noise evaluation device according to claim 11,
    A noise evaluation apparatus having a plurality of measuring devices electrically connected to each of the plurality of sets of contact terminals and the noise detection unit.
  18.  請求項11に記載のノイズ評価装置であって、
     前記複数組の接触端子及びノイズ検出部それぞれと電気的に接続された切換器と、
     前記切換器により選択された一のノイズ検出部により得た検出ノイズを測定する測定器と、を有するノイズ評価装置。
    The noise evaluation device according to claim 11,
    A switch electrically connected to each of the plurality of sets of contact terminals and the noise detector;
    A noise evaluation apparatus comprising: a measuring device that measures detection noise obtained by one noise detection unit selected by the switch.
PCT/JP2009/060535 2008-10-24 2009-06-09 Noise evaluation device WO2010047149A1 (en)

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