WO2010032981A3 - Process gas treatment method and apparatus - Google Patents

Process gas treatment method and apparatus Download PDF

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Publication number
WO2010032981A3
WO2010032981A3 PCT/KR2009/005317 KR2009005317W WO2010032981A3 WO 2010032981 A3 WO2010032981 A3 WO 2010032981A3 KR 2009005317 W KR2009005317 W KR 2009005317W WO 2010032981 A3 WO2010032981 A3 WO 2010032981A3
Authority
WO
WIPO (PCT)
Prior art keywords
process gas
treatment method
plasma
gas treatment
exhaust gas
Prior art date
Application number
PCT/KR2009/005317
Other languages
French (fr)
Korean (ko)
Other versions
WO2010032981A2 (en
Inventor
김익년
김홍진
장홍기
지영연
Original Assignee
트리플코어스코리아
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 트리플코어스코리아 filed Critical 트리플코어스코리아
Publication of WO2010032981A2 publication Critical patent/WO2010032981A2/en
Publication of WO2010032981A3 publication Critical patent/WO2010032981A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/75—Multi-step processes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/461—Microwave discharges
    • H05H1/4622—Microwave discharges using waveguides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/20—Metals or compounds thereof
    • B01D2255/204—Alkaline earth metals
    • B01D2255/2047—Magnesium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/50—Carbon oxides
    • B01D2257/504—Carbon dioxide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
    • B01D2259/818—Employing electrical discharges or the generation of a plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2245/00—Applications of plasma devices
    • H05H2245/10—Treatment of gases
    • H05H2245/15—Ambient air; Ozonisers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/40—Capture or disposal of greenhouse gases of CO2

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Treating Waste Gases (AREA)
  • Exhaust Gas Treatment By Means Of Catalyst (AREA)
  • Catalysts (AREA)

Abstract

Provided are a process gas treatment method and apparatus. The process gas treatment method according to the present invention comprises: a step of decomposing process gas by plasma to create exhaust gas containing carbon dioxide; and a step of adsorbing the carbon dioxide of the exhaust gas by using a catalyst activated by the plasma. The process gas treatment method according to the present invention is economically efficient and environmentally friendly because the amount of CO2 in the exhaust gas is remarkably reduced by decomposing process gas containing fluorine, which is generated in a semiconductor process, using the plasma and effectively adsorbing CO2 generated by the decomposition to the plasma-activated catalyst. Furthermore, the used catalyst can be reused for other purposes without additional regeneration processes.
PCT/KR2009/005317 2008-09-18 2009-09-18 Process gas treatment method and apparatus WO2010032981A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2008-0091655 2008-09-18
KR1020080091655A KR101026458B1 (en) 2008-09-18 2008-09-18 Method and apparatus for treating process gas

Publications (2)

Publication Number Publication Date
WO2010032981A2 WO2010032981A2 (en) 2010-03-25
WO2010032981A3 true WO2010032981A3 (en) 2010-07-15

Family

ID=42040018

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2009/005317 WO2010032981A2 (en) 2008-09-18 2009-09-18 Process gas treatment method and apparatus

Country Status (3)

Country Link
KR (1) KR101026458B1 (en)
TW (1) TW201026375A (en)
WO (1) WO2010032981A2 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010104911A (en) * 2000-05-16 2001-11-28 황해웅 Method for treating toxic compounds using non-thermal plasma
KR20020003890A (en) * 2000-06-21 2002-01-16 황해웅 Method for treating toxic compounds by using rare earth ion-exchanged catalyst in non-thermal plasma
KR20020079343A (en) * 2001-04-11 2002-10-19 (주)케이.씨.텍 Method of Treating Perfluoro-Carbon Compound Gas And Apparatus For Treating Thereof
JP2006051420A (en) * 2004-08-10 2006-02-23 Sekisui Chem Co Ltd Adsorbing system, and desorbing/recovering system of carbon dioxide

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8827265D0 (en) * 1988-11-22 1988-12-29 Shell Int Research Process for separation of carbon dioxide
FR2798076B1 (en) * 1999-09-06 2002-05-24 Air Liquide PROCESS FOR REMOVAL BY PERMEATION OF FLUORINATED OR FLUOROSULFUR COMPOUNDS FROM A XENON AND / OR KRYPTON FLOW
KR20030043404A (en) * 2001-11-28 2003-06-02 주식회사 성광엔비텍 Method for removal of volatile organic compounds and odor using non-thermal plasma and apparatus thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010104911A (en) * 2000-05-16 2001-11-28 황해웅 Method for treating toxic compounds using non-thermal plasma
KR20020003890A (en) * 2000-06-21 2002-01-16 황해웅 Method for treating toxic compounds by using rare earth ion-exchanged catalyst in non-thermal plasma
KR20020079343A (en) * 2001-04-11 2002-10-19 (주)케이.씨.텍 Method of Treating Perfluoro-Carbon Compound Gas And Apparatus For Treating Thereof
JP2006051420A (en) * 2004-08-10 2006-02-23 Sekisui Chem Co Ltd Adsorbing system, and desorbing/recovering system of carbon dioxide

Also Published As

Publication number Publication date
TW201026375A (en) 2010-07-16
KR20100032674A (en) 2010-03-26
WO2010032981A2 (en) 2010-03-25
KR101026458B1 (en) 2011-04-01

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