WO2010007837A1

WO2010007837A1 - Vibration actuator

Info

Publication number: WO2010007837A1
Application number: PCT/JP2009/060062
Authority: WO
Inventors: 来岩田; 昭宏鈴木
Original assignee: 株式会社豊田自動織機
Priority date: 2008-07-17
Filing date: 2009-06-02
Publication date: 2010-01-21
Also published as: CN102067435A; JP5304788B2; KR20110009705A; CN102067435B; JPWO2010007837A1

Abstract

A rotor can be rotated in a predetermined direction and can be moved in a wide range. A vibration actuator (101) is provided with a roller body (100) integrally including a first roller (1) and a second roller (2) which have different rotation axes. The first roller (1) has a first roller shaft (10), and the second roller (2) has a second roller shaft (11a) and a third roller shaft (11b). The vibration actuator (101) also has a first stator (3) mounted to the first roller (1) so as to be in contact therewith, a second stator (4) mounted to the second roller (2) so as to be in contact therewith, a first piezoelectric element (5) for vibrating the first stator (3) to rotate the first roller (1) about the rotation axis thereof, and a second piezoelectric element (6) for vibrating the second stator (4) to rotate the second roller (2) about the rotation axis thereof.

Description

Vibration actuator

The present invention relates to a vibration actuator that rotates a roller by vibration of vibration means.

Vibration actuators that generate and drive ultrasonic vibrations have been proposed as actuators used for parts that require a high degree of freedom and high torque drive, such as robot hands and arm joints. Yes.
For example, Patent Document 1 discloses a vibration actuator that includes two stators with a spherical rotor interposed therebetween, and further includes a rotor and one wire that passes through the two stators. Each of the two stators includes a stacked piezoelectric body. Further, a pre-pressure, which is a force in a direction in which the stator is pressed against the rotor, is applied between the rotor and the stator by the tension of the wire. Therefore, when an AC voltage is applied and the piezoelectric body vibrates, the stator including the vibrating piezoelectric body vibrates, and the rotor rotates due to the vibration.
Therefore, in this vibration actuator, two stators rotate one rotor so that the other stator is refracted with multiple degrees of freedom with respect to one stator.

JP 2006-51568 A

However, in the vibration actuator in Patent Document 1, since the spherical rotor is rotated by the stator, when the rotor is rotated in a predetermined direction, the rotation direction is shifted to an unintended direction. There's a problem. In addition, as the rotor rotates, the wire moves while being refracted in the through hole of the rotor. However, the range in which the rotor can rotate is limited by the moving range in the through hole of the wire, and the wire rotates. There is also a problem that the movable range of the child becomes narrow.

The present invention has been made to solve such problems, and provides a vibration actuator that can rotate in a predetermined direction with respect to a rotor and can operate in a wide movable range. The purpose is to do.

The vibration actuator according to the present invention includes a rotor integrally including a first roller and a second roller having different rotation center axes, a first stator disposed in contact with the first roller, and a contact with the second roller. A second stator to be arranged; first vibration means for rotating the first roller by vibrating the first stator; and second vibration for rotating the second roller by vibrating the second stator. Means.

Further, the vibration actuator according to the present invention rotates the first roller by vibrating the first roller having the rotation center axis, the first stator disposed in contact with the first roller, and the first stator. A first vibration actuator having a first vibration means, a second roller having a rotation center axis, a second stator disposed in contact with the second roller, and a second stator by vibrating the second stator, A second vibration actuator portion having a second vibration means for rotating the roller, and the first roller of the first vibration actuator portion and the second roller of the second vibration actuator portion are integrated and integrated. The rotation center axis of the first roller is different from the rotation center axis of the second roller.

According to the present invention, the vibration actuator can be rotated in a predetermined direction with respect to the rotor and can operate in a wide movable range.

It is a perspective view which shows the structure of the vibration actuator which concerns on Embodiment 1 of this invention. It is a perspective view which shows the roller main body of FIG. FIG. 3 is a schematic diagram showing a cross section taken along line III-III in FIG. 1. It is a fragmentary sectional view which shows the structure which concerns on the piezoelectric element of FIG. It is a perspective view which shows the polarization direction of the piezoelectric element board contained in the piezoelectric element of FIG. It is a perspective view which shows the structure of the vibration actuator which concerns on Embodiment 2 of this invention. FIG. 7 is a schematic diagram showing a cross section taken along line VII-VII in FIG. 6. It is a perspective view which shows the polarization direction of the piezoelectric element board contained in the piezoelectric element of FIG. It is a perspective view which shows the structure of the roller main body of the vibration actuator which concerns on Embodiment 3 of this invention. It is a perspective view which shows the structure of the vibration actuator which concerns on Embodiment 4 of this invention. FIG. 11 is a schematic diagram illustrating a cross section taken along line XI-XI in FIG. 10. It is a perspective view which shows the polarization direction of the piezoelectric element board contained in the piezoelectric element of FIG.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

Embodiment 1 FIG.
First, the configuration of the vibration actuator 101 according to the first embodiment of the present invention will be described with reference to FIGS.

Referring to FIG. 1, the vibration actuator 101 includes a pair of

roller portions

1a and 1b having a semi-cylindrical shape. The

roller portions

1a and 1b are provided to face each other and have a mirror image relationship with the same shape. The

roller portions

1a and 1b are connected by a first roller shaft 10 which is a rotation center shaft, and the cylindrical shaft center of the

roller portions

1a and 1b and the shaft center of the first roller shaft 10 are the same. The

roller portions

1a and 1b constitute the first roller 1 as one roller that operates integrally, as will be described later.

Moreover, the substantially cylindrical 1st stator 3 arrange | positioned so that the cylindrical surfaces 1aa and 1ba of each

roller part

1a and 1b may be contacted is provided. The first stator 3 is formed with groove portions 3c passing through the center of the end surfaces on the

roller portions

1a and 1b side, and the corner portions 3a1 and 3b1 at the upper portion of the groove portion 3c are chamfered. Therefore, band-shaped

convex portions

3a and 3b having a substantially trapezoidal pentagonal cross section are formed at the end portions of the first stator 3 on the

roller portions

1a and 1b side with the groove portion 3c interposed therebetween. Further, the first stator 3 contacts the cylindrical surface 1aa of the roller portion 1a and the cylindrical surface 1ba of the roller portion 1b at the chamfered portion 3a1 of the convex portion 3a and the chamfered portion 3b1 of the convex portion 3b, respectively. The

roller portions

1a and 1b are respectively supported by both 3b. The chamfered portion 3a1 of the convex portion 3a and the chamfered portion 3b1 of the convex portion 3b have shapes that match the cylindrical surfaces 1aa and 1ba of the

roller portions

1a and 1b (see FIG. 3).

A cylindrical first piezoelectric element 5 is disposed on the end surface of the first stator 3 opposite to the

roller portions

1a and 1b so that one end surface thereof is in contact with the first piezoelectric element 5. One vibration means is constituted. Furthermore, a cylindrical first base block 7 and a third base block 9 are sequentially provided on the other end surface of the first piezoelectric element 5 opposite to the first stator 3. The first base block 7 is fixed to the third base block 9. The first stator 3, the first piezoelectric element 5, and the first base block 7 form one cylindrical outer shape and constitute a first actuator body 101 a. The third base block 9 is fixed to a machine such as a robot hand or arm (not shown) provided with the vibration actuator 101.

A first support member 12 is provided on the first roller shaft 10 so as to be rotatable with respect to the first roller shaft 10, and the first support member 12 is a first roller with respect to the first stator 3. 1 is fixed and supported. The first support member 12 connects two plate-

like attachment portions

12a and 12b that are penetrated by the first roller shaft 10 with one plate-like connection portion 12c, and further has a rod-like first shaft portion connected to the connection portion 12c. It has the shape which connected the shaft part 12d which is. The shaft portion 12 d extends through the first stator 3, the first piezoelectric element 5, and the first base block 7 into the third base block 9. Furthermore, the shaft portion 12 d has a disc 12 e at its end, and further has a spring 12 f that is an elastic member between the disc 12 e and the first base block 7. The spring 12f is arranged so as to be wound around the shaft portion 12d, and the shaft portion 12d receives a tensile force in the direction A by the spring 12f. Accordingly, the first roller 1 is pressed against the first stator 3 by the tensile force applied to the first support member 12, that is, the first roller 1 is applied to the first stator 3. A preload to be pressed is applied, and the spring 12f constitutes a first preload means.
Here, for convenience of explanation, the axis of the shaft portion 12d of the first support member 12 from the third base block 9 toward the first roller shaft 10 is defined as the z axis, and the first roller is perpendicular to the z axis. It is assumed that the x-axis extends in the axial direction of the shaft 10 and the y-axis extends perpendicular to the x-axis and the z-axis.

Referring to FIG. 2, a U-shaped first sensor support 16 protrudes in the z-axis positive direction in the groove 3c between the

protrusions

3a and 3b on the side surface of the first stator 3. Is provided. Further, a first angle sensor 18 is attached to the first sensor support portion 16, and the first angle sensor 18 is connected to the first roller shaft 10. The first angle sensor 18 detects a rotation angle of the first roller 1 with respect to the initial setting position, and is electrically connected to the first actuator body 101a to control driving. (See FIG. 3). The rotation angle information detected by the first angle sensor 18 is sent to the drive circuit 56 (see FIG. 3), and the drive circuit 56 (see FIG. 3) drives the first actuator body 101a based on the rotation angle information. By controlling, the first roller 1 is rotated by a predetermined angle. The details of the operation of rotating the first roller 1 by driving the first actuator body 101a will be described later.

Next, referring to FIG. 3, the first piezoelectric element 5 has a first and second

piezoelectric element portions

51 and 52 that are located on the xy plane and overlap each other. ing. The first piezoelectric element portion 51 and the second piezoelectric element portion 52 are insulated from the first stator 3 and the first base block 7 via the insulating

sheets

53 and 55 and insulated from each other via the insulating sheet 54. Has been placed. In addition, a drive circuit 56 is provided for applying a drive voltage to the first piezoelectric element unit 51 and the second piezoelectric element unit 52 to drive them, and the drive circuit 56 includes the first piezoelectric element unit 51 and the first piezoelectric element unit 51. The two piezoelectric element portions 52 are electrically connected to each other.
Further, referring to FIG. 4, the first piezoelectric element portion 51 of the first piezoelectric element 5 includes an electrode plate 51a, a piezoelectric element plate 51b, an electrode plate 51c, a piezoelectric element plate 51d, and an electrode plate each having a substantially annular plate shape. 51e has a stacked structure in which the layers are sequentially stacked. Similarly, the second piezoelectric element portion 52 has a laminated structure in which an electrode plate 52a, a piezoelectric element plate 52b, an electrode plate 52c, a piezoelectric element plate 52d, and an electrode plate 52e each having a substantially annular plate shape are sequentially stacked. ing.

The electrode plate 51a and the electrode plate 51e disposed at both end surface portions of the first piezoelectric element portion 51 and the electrode plate 52a and the electrode plate 52e disposed at both end surface portions of the second piezoelectric element portion 52 are electrically connected, respectively. Grounded. Further, the electrode plate 51 c disposed between the pair of

piezoelectric element plates

51 b and 51 d of the first piezoelectric element portion 51 and the pair of

piezoelectric element plates

52 b and 52 d of the second piezoelectric element portion 52 are disposed. The electrode plates 52c are electrically connected to the drive circuit 56, respectively.

Further, as shown in FIG. 5, each of the pair of

piezoelectric element plates

51b and 51d of the first piezoelectric element portion 51 is divided into two so as to be separated in the y-axis direction, and the respective parts have opposite polarities. And polarized so as to perform deformation behavior opposite to expansion and contraction in the z-axis direction (thickness direction). That is, when an AC voltage is applied to the electrode plate 51c (see FIG. 4) disposed between the

piezoelectric element plates

51b and 51d, the

convex portions

3a and 3b (FIG. 3) of the first stator 3 cooperate with each other. The piezoelectric element plate 51b and the piezoelectric element plate 51d are disposed inside out so as to vibrate around the x axis (in the yz plane). On the other hand, each of the pair of

piezoelectric element plates

52b and 52d of the second piezoelectric element portion 52 is polarized so that the whole performs deformation behavior of expansion or contraction in the z-axis direction (thickness direction). That is, when an AC voltage is applied to the electrode plate 52c (see FIG. 4) disposed between the

piezoelectric element plates

52b and 52d, the

convex portions

3a and 3b (FIG. 3) cooperate with each other. The piezoelectric element plate 52b and the piezoelectric element plate 52d are disposed inside out so as to vibrate in the z-axis direction.

Next, returning to FIG. 1, a pair of

roller portions

2 a and 2 b arranged so as to connect them are coupled to the

roller portions

1 a and 1 b of the first roller 1. Therefore, the

roller parts

1a and 1b and the

roller parts

2a and 2b are combined with each other to form a roller body 100 that is a single rotor.
The

roller portions

2a and 2b are provided to face each other with the first roller shaft 10 interposed therebetween, and have a semi-cylindrical shape of the same shape and have a mirror image relationship. Further, the

roller portions

2a and 2b are provided so that the respective cylindrical surfaces 2aa and 2ba are arranged on the opposite side to the

roller portions

1a and 1b. The

roller portions

2a and 2b have the same rotation center axis, and the rotation center axes of the

roller portions

2a and 2b are the axis of the first roller shaft 10 which is the rotation center axis of the

roller portions

1a and 1b. Are perpendicular to each other and in the same plane.
Therefore, the

roller parts

2a and 2b constitute one second roller 2 and rotate together in the same direction, and the

roller parts

1a and 1b of the first roller 1 also rotate together in the same direction.

Further, a substantially cylindrical second stator 4 is provided so as to be in contact with the cylindrical surfaces 2aa and 2ba of the

roller portions

2a and 2b, respectively. The second stator 4 has the same shape as that of the first stator 3, and comes into contact with the cylindrical surfaces 2aa and 2ba of the

roller portions

2a and 2b at the belt-like

convex portions

4a and 4b, respectively.

A cylindrical second piezoelectric element 6 is disposed on the end face of the second stator 4 opposite to the

roller portions

2a and 2b so that one end face thereof is in contact with the second piezoelectric element 6. It constitutes two vibration means. The second piezoelectric element 6 has the same configuration as the first piezoelectric element 5 and is electrically connected to the drive circuit 56 (see FIG. 3).
Furthermore, a cylindrical second base block 8 is provided on the end surface of the second piezoelectric element 6 opposite to the second stator 4. The second stator 4, the second piezoelectric element 6, and the second base block 8 form one cylindrical outer shape and constitute a second actuator body 101 b.

A second support member 13 having the same shape as the first support member 12 is provided inside the second actuator main body 101b. The second support member 13 includes the second stator 4 and the second piezoelectric element. 6 extends through the second base block 8. The second support member 13 has an attachment portion 13a connected to the roller portion 2a by a second roller shaft 11a that is a rotation center axis, and the attachment portion 13b is connected to the roller portion 2b by a third roller shaft 11b that is a rotation center axis (not shown). It is connected. Therefore, the first roller shaft 10, the second roller shaft 11a, and the third roller shaft 11b have their respective axes on the same plane, and between the second roller shaft 11a and the third roller shaft 11b, The first roller shaft 10 is disposed so as to extend at right angles thereto. Further, the shaft portion 13d that is the second shaft portion of the second support member 13 has the same configuration as the shaft portion 12d of the first support member 12, and receives a tensile force in the direction B by the spring 13f. . Accordingly, the second roller 2 is pressed against the second stator 4 by the tensile force applied to the second support member 13, that is, the second roller 2 is applied to the second stator 4. A preload to be pressed is applied, and the spring 13f constitutes a second preload means.

Referring to FIG. 2, the second stator 4 is provided with a U-shaped second sensor support portion 17 in the same manner as the first stator 3. A second angle sensor 19 is attached. The second angle sensor 19 is connected to a third roller shaft 11b (not shown), and is electrically connected to a drive circuit 56 (see FIG. 3).
Therefore, the vibration actuator 101 forms the roller body 100 having two cylindrical surfaces with different directions of the central axis by integrating the first roller 1 and the second roller 2, and each cylinder of the first roller 1 and the second roller 2. The first actuator body 101a and the second actuator body 101b are arranged in contact with each other on the surface.

On the other hand, it is assumed that the first vibration actuator unit 110a is configured by the first roller 1 and the first actuator body 101a, and the second vibration actuator unit 110b is configured by the second roller 2 and the second actuator body 101b. At this time, the vibration actuator 101 combines the first vibration actuator portion 110a and the second vibration actuator portion 110b so that the directions of the rotation center axes of the first roller 1 and the second roller 2 are different from each other. It can also be regarded as

Next, the operation of the vibration actuator 101 according to the first embodiment of the present invention will be described with reference to FIGS.
First, operations of the first roller 1 and the first actuator body 101a will be described.
Referring to FIG. 5, the drive circuit 56 (see FIG. 3) has a frequency close to the natural frequency of the first actuator body 101 a (see FIG. 3) on the electrode plate 51 c (see FIG. 4) of the first piezoelectric element portion 51. When an AC voltage is applied, the two divided portions of the pair of

piezoelectric element plates

51b and 51d of the first piezoelectric element portion 51 alternately repeat expansion and contraction in the z-axis direction, and the convex portion 3a of the first stator 3 3b (see FIG. 3), a flexural vibration (ultrasonic vibration) is generated that swings around the x axis on the yz plane. Similarly, when the drive circuit 56 (see FIG. 3) applies an AC voltage to the electrode plate 52c (see FIG. 4) of the second piezoelectric element portion 52, a pair of

piezoelectric element plates

52b and 52d of the second piezoelectric element portion 52 are provided. Repeats expansion and contraction in the z-axis direction, and generates longitudinal vibration (ultrasonic vibration) in the z-axis direction with respect to the

convex portions

3a and 3b (see FIG. 3) of the first stator 3.

Therefore, referring to FIG. 3, both the electrode plate 51 c (see FIG. 4) of the first piezoelectric element portion 51 and the electrode plate 52 c (see FIG. 4) of the second piezoelectric element portion 52 are controlled according to the control of the drive circuit 56. When an AC voltage whose phase is shifted by 90 degrees is applied, a flexural vibration that swings around the x axis and a longitudinal vibration in the z axis direction are combined, and the

convex portions

3a and 3b of the first stator 3 are in the yz plane. Elliptical vibration occurs. That is, the

convex portions

3a and 3b of the first stator 3 perform elliptical vibration around the x axis. The phase of the AC voltage to be applied is advanced or delayed by 90 degrees for the electrode plate 52c (see FIG. 4) of the second piezoelectric element portion 52 relative to the electrode plate 51c (see FIG. 4) of the first piezoelectric element portion 51. Thus, the rotation direction of the elliptical vibration can be selected from any of directions P10 and Q10.

Therefore, since the preload is applied to the first actuator body 101a with respect to the first roller 1 by the first support member 12, the first stator 3 that elliptically vibrates in the direction P10 or Q10 around the x axis. The

convex portions

3a and 3b are rotated around the x-axis so as to scratch the first roller 1, that is, are rotated around the first roller shaft 10 in the direction P1 or Q1. When the

convex portions

3a and 3b of the first stator 3 perform elliptical vibration in the direction P10, the first roller 1 rotates in the direction P1, and the

convex portions

3a and 3b of the first stator 3 are elliptic in the direction Q10. When vibrating, the first roller 1 rotates in the direction Q1.

Further, since the third base block 9 is fixed to a machine such as a robot hand or arm (not shown) provided with the vibration actuator 101, the first stator 3 is fixed in the rotational directions of the directions P1 and Q1. become. Therefore, by applying an AC voltage to the first piezoelectric element 5, the first actuator body 101 a moves the first roller 1 and the first roller 1 in the direction B side from the first roller 1. The roller is rotated in the direction P1 or Q1 around the roller shaft 10. (See Figure 1)
The rotation angle of the first roller 1 is detected by the first angle sensor 18 (see FIG. 2) and is sent to the drive circuit 56. The drive circuit 56 is based on the rotation angle information, and the first actuator body 101a (first The drive of one piezoelectric element 5) is controlled to rotate the first roller 1 in a predetermined direction and angle.

On the other hand, returning to FIG. 1, in the same manner as the first actuator body 101a, when an AC voltage is applied to the second piezoelectric element 6 of the second actuator body 101b according to the control of the drive circuit 56 (see FIG. 3), the second fixed The

convex portions

4a and 4b of the child 4 perform elliptical vibration, so that the second roller 2 moves in the direction P2 or Q2 around the second roller shaft 11a and the third roller shaft 11b with respect to the second stator 4. Rotate to.

Further, the roller body 100, that is, the second roller 2 is fixed with respect to the rotational directions of the directions P2 and Q2 through the third base block 9. Therefore, by applying an AC voltage to the second piezoelectric element 6, the second actuator body 101 b causes the second roller 2 to move the second stator 4 and the portion on the direction B side from the second stator 4. It is rotated in the direction P2 or Q2 around the second roller shaft 11a and the third roller shaft 11b.
The rotation angle of the second roller 2 with respect to the second stator 4 is detected by the second angle sensor 19 (see FIG. 2) and sent to the drive circuit 56 (see FIG. 3), and the drive circuit 56 (see FIG. 3). ) Controls the driving of the second actuator body 101b (second piezoelectric element 6) based on this rotation angle information, and rotates the second roller 2, that is, the second stator 4, in a predetermined direction and angle.

From the above description, the vibration actuator 101 applies the AC voltage to the first piezoelectric element 5 and the second piezoelectric element 6, so that the second stator 4, that is, the first actuator body 101 a is applied to the first stator 3. On the other hand, the second actuator body 101b performs a multi-degree-of-freedom refraction operation, which is a multi-degree-of-freedom operation combining two rotations having different rotation center axes with the roller body 100 as a fulcrum.

As described above, the vibration actuator 101 according to the first embodiment includes the first roller 1 having the first roller shaft 10, the second roller shaft 11a, and the second roller shaft 11b having different rotation center axes. A roller main body 100 integrally including the roller 2 is provided. Furthermore, by vibrating the first stator 3 disposed in contact with the first roller 1, the second stator 4 disposed in contact with the second roller 2, and the first stator 3, the first roller 1 is moved. A first piezoelectric element 5 to be rotated and a second piezoelectric element 6 to rotate the second roller 2 by vibrating the second stator 4 are provided.

Thereby, the first stator 3 vibrated by the first piezoelectric element 5 rotates the first roller 1 around the first roller shaft 10. The second stator 4 vibrated by the second piezoelectric element 6 rotates the second roller 2 around the second roller shaft 11a and the third roller shaft 11b. Therefore, the second stator 4 is an operation in which two rotations with different rotation center axes are combined with the first stator 3 with the roller body 100 integrally including the first roller 1 and the second roller 2 as a fulcrum. Will be able to do. That is, the second stator 4 can operate so as to be refracted with multiple degrees of freedom with respect to the first stator 3 with the roller body 100 as a fulcrum. Further, the rotation directions of the first roller 1 and the second roller 2 are restricted to one direction by the first roller shaft 10 and the second roller shaft 11a and the third roller shaft 11b, respectively. For this reason, when rotating the 1st roller 1 and the 2nd roller 2 with respect to the 1st stator 3 and the 2nd stator 4, the rotation direction does not shift to the direction which is not intended. The movable ranges of the first roller 1 and the second roller 2 are respectively defined by the cylindrical surfaces 1aa and 1ba, which are contact surfaces with the first stator 3 and the second stator 4, and the cylindrical surfaces 2aa and 2ba. . For this reason, the rotation range of the 1st roller 1 and the 2nd roller 2 is expanded by adjusting the contact surface of the 1st roller 1 and the 2nd roller 2 with respect to the 1st stator 3 and the 2nd stator 4, respectively. Can do.

Further, the first piezoelectric element 5 formed by stacking the

piezoelectric element plates

51b, 51d, 52b and 52d, and the second piezoelectric element 6 formed by stacking the piezoelectric element plates in the same manner have the structure. Miniaturization can be achieved, and only one power source is required to drive the first piezoelectric element 5 and the second piezoelectric element 6, and the vibration actuator 101 can be miniaturized.

Further, when a tensile force is applied from the

springs

12f and 13f to the

respective shaft portions

12d and 13d of the first support member 12 and the second support member 13, the first roller shaft 10 of the first roller 1 and the second roller The second roller shaft 11a and the second roller shaft 11b are attracted, and the first roller 1 and the second roller 2 are pressed against the first stator 3 and the second stator 4, respectively. That is, pre-pressure is applied to the first roller shaft 10 of the first roller 1 and the second roller shaft 11 a and the third roller shaft 11 b of the second roller 2 through the first support member 12 and the second support member 13. Given each. Therefore, in the rotation operation of the first roller 1 and the second roller 2, it is possible to reduce the resistance to rotation received by the preload via the first support member 12 and the second support member 13, respectively. In addition, the first roller 1 and the second roller 2 are respectively fixed to the first stator 3 and the second stator 4 by these preloads, so that no electric power or the like is required for maintaining the operation.

The first roller 1 is in contact with the first stator 3 at the cylindrical surfaces 1aa and 1ba, and the second roller 2 is in contact with the second stator 4 at the cylindrical surfaces 2aa and 2ba. The frictional force generated between them is uniform. Therefore, the rotation operation of the first roller 1 and the second roller 2 with respect to the first stator 3 and the second stator 4 can be made smooth.
Further, since the direction of the first roller shaft 10 of the first roller 1 and the directions of the second roller shaft 11a and the third roller shaft 11b of the second roller 2 are perpendicular to each other, The positioning of the two stators 4 can be facilitated.
The rotation center of the first roller 1 is fixed to the first roller shaft 10, and the rotation center of the second roller 2 is fixed to the second roller shaft 11a and the third roller shaft 11b. Therefore, the first angle sensor 18 and the second angle sensor 19 that detect the positions of the first roller 1 and the second roller 2, that is, the rotation angle, are the first roller shaft 10 and the second roller shaft 11a or the third roller sensor. It can be easily installed using the roller shaft 11b.

Embodiment 2. FIG.
The vibration actuator 102 according to the second embodiment of the present invention changes the configuration of the first piezoelectric element 5 in the vibration actuator 101 of the first embodiment, and further uses a first base block 7 as a third stator to form a third base. The block 9 is slidable without being fixed.
In the following embodiments, the same reference numerals as those in the previous drawings are the same or similar components, and thus detailed description thereof is omitted.

First, the configuration of the vibration actuator 102 according to the second embodiment of the present invention will be described with reference to FIGS.
Referring to FIG. 6, in the same manner as in the first embodiment, in the vibration actuator 102, the first roller 1 and the first stator 3 are provided, and the first stator 3 has an end surface opposite to the first roller 1. The cylindrical first piezoelectric element 50 is arranged so that one end face thereof is brought into contact. Furthermore, the other end surface of the first piezoelectric element 50 opposite to the first stator 3 is arranged so that the substantially cylindrical third stator 20 is in contact therewith. The third base block 9 is disposed on the end surface of the third stator 20 opposite to the first piezoelectric element 50 so that one end surface of the third base block 9 is in contact therewith. The third stator 20 has a plurality of convex portions 20a on the third base block 9 side.

A first support member 122 is provided on the first roller shaft 10 that connects the

roller portions

1 a and 1 b of the first roller 1. The first support member 122 has a disc 122 e at the end of the shaft portion 122 d, and further has a spring 122 f between the disc 122 e and the third base block 9 inside the third base block 9. is doing. The spring 122f is arranged so as to be wound around the shaft portion 122d, and applies the preload of the first stator 3 to the first roller 1 and the preload of the third stator 20 to the third base block 9. Has been granted. (See Figure 7)
Next, referring to FIG. 7, the first piezoelectric element 50 is provided with the first piezoelectric element 5 in the first embodiment, and generates the first vibration that swings around the x axis on the yz plane. In addition to the element portion 51 and the second piezoelectric element portion 52 that generates longitudinal vibration in the z-axis direction, the third piezoelectric element portion 503 that generates flexural vibration that swings around the y-axis on the xz plane is provided. Yes.

The third piezoelectric element portion 503 has a pair of

piezoelectric element plates

503b and 503d as shown in FIG. Each of the

piezoelectric element plates

503b and 503d is divided into two so as to be separated in the x-axis direction, each part has opposite polarity, and is opposite to expansion and contraction in the z-axis direction (thickness direction), respectively. It is polarized to perform the deformation behavior. Further, the piezoelectric element plate 503b and the piezoelectric element plate 503d are arranged in an inverted manner.

The third piezoelectric element portion 503 has the same configuration as the first piezoelectric element portion 51 and the second piezoelectric element portion 52 except for the pair of

piezoelectric element plates

503b and 503d. The second piezoelectric element portion 52 is overlaid.
Referring to FIG. 7, the pair of electrode plates disposed at both end portions of the third piezoelectric element portion 503 are electrically grounded, and the pair of

piezoelectric element plates

503b and 503d (see FIG. 8). ) Are electrically connected to the drive circuit 56.
Further, the first piezoelectric element unit 51 and the third piezoelectric element unit 503 are insulated from the first stator 3 and the third stator 20 via the insulating

sheets

53 and 506, and the first piezoelectric element unit 51 and the second piezoelectric element unit 503 are insulated. The element part 52 and the third piezoelectric element part 503 are arranged in a state of being insulated from each other via insulating

sheets

54 and 55.

Further, when an AC voltage is applied from the drive circuit 56 to the electrode plate of the third piezoelectric element portion 503 to drive the third piezoelectric element portion 503, a pair of

piezoelectric element plates

503b and 503d of the third piezoelectric element portion 503 (FIG. 8). 2), the portion divided into two is alternately expanded and contracted in the z-axis direction, and the

projections

3a and 3b of the first stator 3 and the third stator 20 are rotated around the y-axis on the xz plane. Generates flexural vibration that causes rocking.
The other configuration of the vibration actuator 102 according to the second embodiment of the present invention is the same as that of the first embodiment, and thus the description thereof is omitted.

Next, the operation of the vibration actuator 102 according to the second embodiment of the present invention will be described with reference to FIGS.
Referring to FIG. 8, when the drive circuit 56 (see FIG. 7) applies an AC voltage to the first piezoelectric element portion 51, the first piezoelectric element portion 51 is connected to the

convex portions

3 a and 3 b and the first stator 3. A flexural vibration that swings around the x axis on the yz plane is generated with respect to the three stators 20 (see FIG. 7). Similarly, when the drive circuit 56 (see FIG. 7) applies an AC voltage to the second piezoelectric element portion 52, the second piezoelectric element portion 52 includes the

convex portions

3 a and 3 b and the third stator of the first stator 3. 20 (see FIG. 7) generates longitudinal vibration in the z-axis direction. Further, when an AC voltage is applied to the third piezoelectric element portion 503, the third piezoelectric element portion 503 is in the xz plane with respect to the

convex portions

3a and 3b of the first stator 3 and the third stator 20 (see FIG. 7). A flexural vibration that swings around the upper y-axis is generated.

Therefore, referring to FIG. 7, when an alternating voltage whose phase is shifted by 90 degrees is applied to both the first piezoelectric element portion 51 and the second piezoelectric element portion 52 according to the control of the drive circuit 56, the first stator 3. Elliptical vibrations in the yz plane are generated in the

convex portions

3a, 3b and the third stator 20 of the first and

second projections

3a, 3b. Therefore, since the

convex portions

3a and 3b of the first stator 3 perform elliptical vibration around the x axis, the first roller 1 rotates in the direction P1 or Q1 around the x axis. On the other hand, due to the elliptical vibration in the yz plane of the third stator 20, no relative motion occurs between the third stator 20 and the third base block 9.

Further, under the control of the drive circuit 56, the first piezoelectric element unit 51 is applied to the first piezoelectric element unit 51, the second piezoelectric element unit 52, and the third piezoelectric element unit 503 by applying an AC voltage whose phase is shifted. A combined vibration that is a combination of a flexural vibration that swings around the x-axis, a longitudinal vibration in the z-axis direction of the second piezoelectric element portion 52, and a flexural vibration that swings around the y-axis of the third piezoelectric element portion 503. It occurs on the

convex portions

3 a and 3 b of the first stator 3 and the third stator 20.
By this combined vibration, the third stator 20 rotates in the direction P3 or Q3 with respect to the third base block 9 so that the convex portion 20a scratches the surface of the third base block 9. At this time, since the third base block 9 is fixed to a machine such as a robot hand or arm (not shown) provided with the vibration actuator 102, the first stator 3, the first piezoelectric element 50, and the third stator 20 The configured first actuator body 102a rotates in the direction P3 or Q3. (See Figure 6)
Note that the first roller 1 also rotates in the direction P1 or Q1 depending on the direction of the composite vibration, also by the composite vibration generated in the

convex portions

3a and 3b of the first stator 3.
The other operations of the vibration actuator 102 according to the second embodiment of the present invention are the same as those in the first embodiment, and thus the description thereof is omitted.

Thus, in the vibration actuator 102 according to the second embodiment, the same effect as that of the vibration actuator 101 of the first embodiment can be obtained.
Further, by placing the third stator 20 in contact with the first piezoelectric element 5, the third base block 9 placed in contact with the third stator 20 can be rotated. That is, since the third base block 9 is fixed, the first actuator body 102 a can rotate around the first support member 122 with respect to the third base block 9. In addition, since the rotation center axis is fixed to the first support member 122, this rotation operation can prevent the rotation axis from being displaced.

Embodiment 3 FIG.
The vibration actuator 103 according to the third embodiment of the present invention includes the first roller shaft 10 of the first roller 1 and the second roller 2 provided on the same plane as the vibration actuator 101 of the first embodiment. The positional relationship between the two-roller shaft 11a and the third roller shaft 11b is changed.

Referring to FIG. 9, the

roller portions

31 a and 31 b of the first roller 31 are connected by a first roller shaft 310, and the

roller portions

32 a and 32 b of the second roller 32 are connected by a second roller shaft 311. In the same manner as in the first embodiment, the

roller portions

31a and 31b and the

roller portions

32a and 32b are combined and integrated with each other. At this time, the first roller shaft 310 and the second roller shaft 311 are Although the directions are perpendicular to each other, they are arranged apart in the vertical direction without crossing each other. For this reason, the

roller portions

31a and 31b of the first roller 31 and the

roller portions

32a and 32b of the second roller 32 have a shape closer to a cylinder than in the first embodiment. Therefore, the rotation angle range of the first roller 31 movable with respect to the first stator 3 and the rotation angle range of the second roller 32 movable with respect to the second stator 4 are compared with the first embodiment. It is increasing.

The first roller shaft 310 is provided with a first support member 123 having a substantially triangular prism-shaped attachment portion 123a and a shaft portion 123d, and the second roller shaft 311 has the same shape as the first support member 123. A second support member 133 is provided.
The other configuration and operation of the vibration actuator 103 according to the third embodiment of the present invention are the same as those of the first embodiment, and thus the description thereof is omitted.
Thus, in the vibration actuator 103 according to the third embodiment, the same effect as that of the vibration actuator 101 of the first embodiment can be obtained.
Further, by increasing the separation distance between the first roller shaft 310 and the second roller shaft 311, each movable relative to the first stator 3 and the second stator 4 of the first roller 31 and the second roller 32. The rotation angle range can be increased. Therefore, the freedom degree of operation | movement of the 2nd stator 4 with respect to the 1st stator 3, ie, the 2nd actuator main body 103b with respect to the 1st actuator main body 103a, can be increased.
In Embodiment 3, the roller body 300 has a shape in which the

roller portions

31a and 31b of the first roller 31 and the

roller portions

32a and 32b of the second roller 32 all form a part of a cylinder. However, these may be complete cylinders. For example, the

roller parts

32a and 32b of the cylindrical second roller 32 are arranged between the

roller parts

31a and 31b of the cylindrical first roller 31, and a part of the

roller parts

32a and 32b is the roller part 31a. And the roller main body 300 may be formed so as to protrude outward from the cylindrical surface of 31b.

Embodiment 4 FIG.
The vibration actuator 104 according to the fourth embodiment of the present invention is obtained by changing the configuration of the second roller 2 and the second stator 4 in the vibration actuator 101 of the first embodiment. That is, the second roller 2 rotates around the shaft portion 13d of the second support member 13.

First, the configuration of the vibration actuator 104 according to the fourth embodiment of the present invention will be described with reference to FIGS.
Referring to FIG. 10, in the same manner as in the first embodiment, the vibration actuator 104 is provided with a first roller 1 and a first stator 3 each including a pair of

semi-cylindrical roller portions

1a and 1b. Yes. A first piezoelectric element 5, a first base block 7, and a third base block 9 are sequentially provided on the end surface of the first stator 3 opposite to the first roller 1. The first piezoelectric element 5 has the same configuration as the first piezoelectric element 5 in the vibration actuator 101 of the first embodiment.
A first support member 12 is rotatably provided on the first roller shaft 10 of the first roller 1, and a spring 12 f provided on the first support member 12 is a first stator 3 for the first roller 1. The pre-pressure is given.

Next, a rectangular plate member 42 is coupled to the

roller portions

1a and 1b of the first roller 1 so as to connect them. The plate member 42 is coupled to the flat outer peripheral surfaces 1ab and 1bb of the

semi-cylindrical roller portions

1a and 1b.
The plate member 42 constitutes a second roller, and the

roller portions

1a and 1b and the plate member 42 are joined together to constitute a roller body 400 that is a single rotor. The shape of the plate member 42 is not limited to a rectangular shape, and may be a circular shape, an elliptical shape, a polygonal shape, or the like.

Furthermore, the substantially cylindrical 2nd stator 44 arrange | positioned so that the end surface 42a on the opposite side to the 1st roller 1 in the plate member 42 may be provided.
The 2nd stator 44 connects the 1st cylindrical part 44a and the 2nd cylindrical part 44b from which diameter differs mutually so that these axial centers may become the same. The first cylindrical portion 44a has the same shape as the third stator 20 in the vibration actuator 102 of the second embodiment. The first cylindrical portion 44 a has a plurality of convex portions 44 ab formed along the outer periphery of the end surface 44 aa in contact with the end surface 42 a of the plate member 42, and the convex portion 44 ab is in the end surface 42 a of the plate member 42. It is formed to fit.
A cylindrical second piezoelectric element 64 is disposed on the end surface of the second cylindrical portion 44b on the opposite side of the plate member 42 in the second stator 44, and the details of the configuration will be described later. To do.
Further, a second base block 8 is provided on the end surface of the second piezoelectric element 64 opposite to the second stator 44.

Referring also to FIG. 11, the end surface 42 a of the plate member 42 is coupled to the shaft portion 134 d of the second support member 134 perpendicularly to the end surface 42 a, and the shaft portion 134 d is It is integrated with the plate member 42. At this time, the shaft portion 134 d of the second support member 134 extends in a direction perpendicular to the axial direction of the first roller shaft 10 of the first roller 1.
Further, the second support member 134 has a shaft part 134d extending through the second stator 44 and the second piezoelectric element 64 to the second base block 8, and having a disk 134e at the end of the shaft part 134d. is doing. The second support member 134 has a spring 134 f around the shaft portion 134 d between the disk 12 e and the second base block 8 inside the second base block 8. The spring 134f applies a preload of the second stator 44 to the plate member 42.
At this time, the plate member 42 and the second stator 44 are rotatable about the shaft portion 134d of the second support member 134 with respect to each other. Therefore, the shaft portion 134d of the second support member 134 constitutes a roller shaft in the plate member 42 that is the second roller, that is, the second roller shaft and the third roller shaft in the first embodiment. Yes.

Here, for convenience of explanation, the axis direction of the shaft portion 12d of the first support member 12 is the z axis, the axis direction of the first roller shaft 10 is the x axis, and y is perpendicular to the x axis and the z axis. It defines the axis. Further, the axial center direction of the shaft portion 134d of the second support member 134 that is perpendicular to the x-axis and travels from the plate member 42 toward the second base block 8 is defined as the z4 axis, and with respect to the x-axis and the z4-axis It is assumed that the y4 axis extends vertically.
Therefore, the coordinate system consisting of the xyz axes is applied to the first roller 1, the first stator 3, the first piezoelectric element 5, and the first base block 7, and the coordinate system consisting of the xy4z4 axes is the plate member 42, The following description will be made by applying to the second stator 44, the second piezoelectric element 64, and the second base block 8.

Referring to FIG. 11, the permanent magnet 174 is embedded at the tip of the convex portion 44ab of the second stator 44, and the end surface 42a of the plate member 42 is located at a position facing the permanent magnet 174. The Hall sensor 194 is embedded. The hall sensor 194 detects the relative position of the permanent magnet 174 from the magnetic flux of the permanent magnet 174 that changes as the position of the permanent magnet 174 changes. Although not shown, the hall sensor 194 is electrically connected to the drive circuit 56, and relative position information of the permanent magnet 174 detected by the hall sensor 194 is sent to the drive circuit 56. Therefore, the drive circuit 56 rotates based on the relative position information of the Hall sensor 194 and the permanent magnet 174 with respect to the plate member 42 relative to the second stator 44, that is, the shaft portion 134 d of the second support member 134. Calculate the angle.

Next, the second piezoelectric element 64 has the first piezoelectric element portion 51 provided in the first piezoelectric element 50 of the second embodiment as the first piezoelectric element portion 51, and is provided in the same first piezoelectric element 50. The provided third piezoelectric element portion 503 is provided as the second piezoelectric element portion 504. Therefore, in the present embodiment, the first piezoelectric element portion 51 generates a flexural vibration that swings around the x axis on the y4z4 plane, and the second piezoelectric element portion 504 swings around the y4 axis on the xz4 plane. Generates flexural vibration to be moved. (See Figure 12)
Further, the first piezoelectric element portion 51 and the second piezoelectric element portion 504 are insulated from the second base block 8 and the second stator 44 via the insulating

sheets

53 and 506, and the first piezoelectric element portion 51 and the second piezoelectric element portion 504 are insulated. The element portions 504 are arranged in a state of being insulated from each other via the insulating sheet 54.
The other configuration of the vibration actuator 104 according to the fourth embodiment of the present invention is the same as that of the first or second embodiment, and thus the description thereof is omitted.

Next, the operation of the vibration actuator 104 according to the fourth embodiment of the present invention will be described with reference to FIGS.
First, the operations of the first roller 1, the first stator 3, the first piezoelectric element 5, and the first base block 7 are the same as those of the vibration actuator 101 of the first embodiment, and thus the description thereof is omitted.
Therefore, the operations of the plate member 42, the second stator 44, the second piezoelectric element 64, and the second base block 8 that are the second rollers will be described below.

Referring to FIGS. 11 and 12, when the drive circuit 56 applies an AC voltage to the first piezoelectric element portion 51 of the second piezoelectric element 64, the first piezoelectric element portion 51 is applied to the convex portion 44 ab of the second stator 44. On the other hand, a flexural vibration that swings around the x axis on the y4z4 plane is generated. Similarly, when the drive circuit 56 applies an AC voltage to the second piezoelectric element portion 504, the second piezoelectric element portion 504 swings around the y4 axis on the xz4 plane with respect to the convex portion 44ab of the second stator 44. Generates flexural vibration to be moved.
Therefore, referring to FIG. 11, when an AC voltage whose phase is shifted by 90 degrees is applied to both the first piezoelectric element unit 51 and the second piezoelectric element unit 504 in accordance with the control of the drive circuit 56, the first piezoelectric element unit 51, the combined vibration in which the flexural vibration that swings around the x axis of 51 and the flexural vibration that swings around the y4 axis of the second piezoelectric element portion 504, that is, elliptical vibration in the xy4 plane, It occurs at 44 convex portions 44ab.

The elliptical vibration in the xy4 plane causes the second stator 44 to rotate the plate member 42 in the direction P4 or Q4 around the z4 axis so as to scratch the end surface 42a of the plate member 42 by the convex portion 44ab. At this time, the first roller 1 is constrained to rotate around the z-axis by the

convex portions

3a and 3b of the first stator 3, and the first stator 3, the first piezoelectric element 5, the first base block 7 and The third base blocks 9 are fixed to each other. Therefore, since the plate member 42 is constrained with respect to the rotation about the z4 axis, the second stator 44 together with the second piezoelectric element 64 and the second base block 8 fixed to the second stator 44 have the plate member 42. Rotates in the direction Q4 or P4. (See Figure 10)

The rotation angle of the second stator 44 is calculated by the drive circuit 56 from the relative position information of the second stator 44 with respect to the plate member 42 detected by the Hall sensor 194, and the drive circuit 56 calculates the calculated rotation angle. Based on this, the driving of the second piezoelectric element 64 is controlled to rotate the second stator 44 in a predetermined direction and angle.
The other operations of the vibration actuator 104 according to the fourth embodiment of the present invention are the same as those in the first embodiment, and thus the description thereof is omitted.

Thus, in the vibration actuator 104 according to the fourth embodiment, the same effect as that of the vibration actuator 101 of the first embodiment can be obtained.
The vibration actuator 102 according to the second embodiment includes the first roller 1 that rotates about the x axis and the third stator 20 that rotates about the z axis. On the other hand, the vibration actuator 104 according to the present embodiment includes a first roller 1 that rotates about the x axis and a plate member 42 that is a second roller that rotates about the z4 axis. The first roller 1 and the third stator 20 in the vibration actuator 102 are disposed away from each other, but the first roller 1 and the plate member 42 in the vibration actuator 104 are disposed close to each other. For this reason, the vibration actuator 104 enables a combined operation of two types of rotation operations in which the rotation site around the x axis and the rotation site around the z4 axis are close to each other, as compared with the vibration actuator 102. Thus, for example, the vibration actuator 102 can reproduce the movement of a human finger and can be applied to a finger part in a robot hand, but the vibration actuator 104 can reproduce the movement of a human shoulder or hip joint, The robot can be applied to a portion corresponding to a human shoulder or crotch. Therefore, the application target of the vibration actuator according to the present invention can be expanded by the vibration actuator 104.

In the first to fourth embodiments, the

first rollers

1 and 31 and the

second rollers

2 and 32 are cylindrical. However, the present invention is not limited to this, and may be spherical.
Further, the pair of

roller portions

1a and 1b, 31a and 31b of the

first rollers

1 and 31, and the pair of

roller portions

2a and 2b, 32a and 32b of the

second rollers

2 and 32 all constitute a part of a cylinder. However, it may be a shape constituting a part of the truncated cone. For example, when the pair of

roller portions

1a and 1b of the first roller 1 in the vibration actuator 101 of the first embodiment has a truncated cone shape, the

convex portions

3a and 3b of the first stator 3 have the

roller portions

1a and 1b. A groove having a shape matching the roller surface forming the truncated cone may be formed, and the

roller portions

1a and 1b may be fitted into the groove. Thereby, it can prevent that the

roller parts

1a and 1b move to the 1st roller shaft 10 direction, ie, a rotation center axis direction.

In the first to fourth embodiments, the

first roller

1, 31 and the

second roller

2, 32, 42 have a relationship in which the direction of the rotation center axis is a right angle. However, the present invention is not limited to this. It is only necessary that the direction of the rotation center axis is different. For example, the rotation center axis of the

first rollers

1, 31 and the rotation center axis of the

second rollers

2, 32, 42 may be parallel. At this time, taking the vibration actuator 101 of Embodiment 1 as an example, since the first roller 1 and the second roller 2 are arranged in parallel, the second actuator body 101b is The roller body 100 can be rotated about 360 ° with the fulcrum as a fulcrum.

Moreover, although the 3rd stator 20 of Embodiment 2 has the some convex part 20a, and the 2nd stator 44 of Embodiment 4 also has the some convex part 44ab, it is limited to this. Is not to be done. The plurality of convex portions 20a and 44ab may be formed by one convex portion, or may be a ring-shaped one in which the convex portions adjacent to each other are connected. Moreover, although the convex parts 20a and 44ab were arrange | positioned cyclically | annularly, you may arrange | position in polygonal shape.

In the second embodiment, the flexural vibration of the first piezoelectric element portion 51 that swings around the x-axis, the longitudinal vibration of the second piezoelectric element portion 52 in the z-axis direction, and the third piezoelectric element portion 503 around the y-axis. The combined vibrations combined with the flexural vibrations to be swung are generated in the

convex portions

3 a and 3 b of the first stator 3 and the third stator 20. And the 3rd stator 20 was supposed to rotate to the direction P3 or Q3 with respect to the 3rd base block 9 by this composite vibration. However, in the same manner as in the fourth embodiment, the third stator 20 is moved in the direction with respect to the third base block 9 even by the composite vibration in which only the first piezoelectric element portion 51 and the third piezoelectric element portion 503 are vibrated. It can be rotated to P3 or Q3. (See Figure 6)

Claims

A rotor integrally including a first roller and a second roller having different rotation center axes;
A first stator disposed in contact with the first roller;
A second stator disposed in contact with the second roller;
First vibrating means for rotating the first roller by vibrating the first stator;
A vibration actuator comprising: second vibration means for rotating the second roller by vibrating the second stator.
A first roller having a central axis of rotation;
A first stator disposed in contact with the first roller;
A first vibration actuator unit having first vibration means for rotating the first roller by vibrating the first stator;
A second roller having a center axis of rotation;
A second stator disposed in contact with the second roller;
A second vibration actuator unit having second vibration means for rotating the second roller by vibrating the second stator,
The first roller of the first vibration actuator unit and the second roller of the second vibration actuator unit are integrated,
A vibration actuator in which the rotation center axis of the integrated first roller and the rotation center axis of the second roller are different.
The first vibrating means and the second vibrating means are:
It consists of a plurality of piezoelectric element plates that are laminated together and generate ultrasonic vibrations when a voltage is applied,
The first stator is disposed at an end of the piezoelectric element plate in the stacking direction of the first vibration unit,
3. The vibration actuator according to claim 1, wherein the second stator is disposed at an end of the second vibration unit in the stacking direction of the piezoelectric element plates.
Around the rotation center axis of the first roller, the first roller is rotatably supported,
A first support member having a first shaft portion penetrating the first stator and the first vibration means;
First preloading means for pressing the first roller against the first stator via the first support member;
Around the rotation center axis of the second roller, the second roller is rotatably supported,
A second support member having a second shaft portion penetrating the second stator and the second vibration means;
3. The vibration actuator according to claim 1, further comprising a second preloading unit that pressurizes the second roller against the second stator via the second support member.
A third stator disposed in contact with the first vibration means;
The said 3rd stator will rotate the target object arranged in contact with the said 3rd stator centering | focusing on a said 1st support member, if it vibrates by the vibration of a said 1st vibration means. The vibration actuator described.
A contact surface between the first roller and the first stator is a part of a cylindrical surface;
The vibration actuator according to claim 1, wherein a contact surface between the second roller and the second stator is a part of a cylindrical surface.
3. The vibration actuator according to claim 1, wherein the rotation center axis of the first roller and the rotation center axis of the second roller are in a relationship in which the directions of the rotation center axes are perpendicular to each other.
The contact surface of the first roller with the first stator is a part of a cylindrical surface,
The contact surface of the second roller with the second stator is a flat surface,
The first roller is rotatable around a central axis of the cylindrical surface that is a contact surface with the first stator,
The vibration actuator according to claim 1, wherein the second roller is rotatable about an axis perpendicular to a contact surface with the second stator.
Around the rotation center axis of the first roller, the first roller is rotatably supported,
A first support member having a first shaft portion penetrating the first stator and the first vibration means;
First preloading means for pressing the first roller against the first stator via the first support member;
Coupled to the contact surface of the second roller with the second stator to support the second roller;
A second support member having a second shaft portion penetrating the second stator and the second vibration means;
The vibration actuator according to claim 8, further comprising second preloading means that pressurizes the second roller against the second stator via the second support member.